<PAGE>
Exhibit 3.1.1
THE COMMONWEALTH OF MASSACHUSETTS
WILLIAM FRANCIS GALVIN
Secretary of the Commonwealth
One Ashburton Place, Boston, Massachusetts 02108-1512
ARTICLES OF AMENDMENT
(General Laws, Chapter 156B, Section 72)
We, Martin J. Reid , *President
---------------------------------------------------------------
and Debra L. Nelson , *Clerk
---------------------------------------------------------------
of Ibis Technology Corporation ,
-----------------------------------------------------------------------------
(EXACT NAME OF CORPORATION)
located at 32 CHERRY HILL DRIVE, DANVERS, MA 01923 ,
---------------------------------------------------------------------
(STREET ADDRESS OF CORPORATION IN MASSACHUSETTS)
certify that these Articles of Amendment affecting articles numbered:
3
--------------------------------------------------------------------------------
(NUMBER THOSE ARTICLES 1, 2, 3, 4, 5 AND/OR 6 BEING AMENDED)
of the Articles of Organization were duly adopted at a meeting held on May
14, 1998, by vote of:
5,700,999 shares of COMMON of 6,705,340 shares outstanding
--------- ----------- ---------------
(TYPE, CLASS & SERIES, IF ANY)
_________ shares of ___________ of _______________ shares outstanding
(TYPE, CLASS & SERIES, IF ANY)
_________ shares of ___________ of _______________ shares outstanding
(TYPE, CLASS & SERIES, IF ANY)
being at least a majority of each type, class or series outstanding and
entitled to vote thereon:
<PAGE>
To CHANGE the number of shares and the par value (if any) of any type, class
or series of stock which the corporation is authorized to issue, fill in the
following:
The total PRESENTLY authorized is:
<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------
WITHOUT PAR VALUE STOCKS WITH PAR VALUE STOCKS
------------------------------------------------------------------------------------------------------
TYPE NUMBER OF SHARES TYPE NUMBER OF SHARES PAR VALUE
------------------------------------------------------------------------------------------------------
<S> <C> <C> <C> <C>
Common: Common: 10,000,000 $.008
------------------------------------------------------------------------------------------------------
------------------------------------------------------------------------------------------------------
Preferred: Preferred: 2,000,000 $ 01
------------------------------------------------------------------------------------------------------
------------------------------------------------------------------------------------------------------
</TABLE>
CHANGE the total authorized to:
<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------
WITHOUT PAR VALUE STOCKS WITH PAR VALUE STOCKS
------------------------------------------------------------------------------------------------------
TYPE NUMBER OF SHARES TYPE NUMBER OF SHARES PAR VALUE
------------------------------------------------------------------------------------------------------
<S> <C> <C> <C> <C>
Common: Common: 20,000,000 $.008
------------------------------------------------------------------------------------------------------
------------------------------------------------------------------------------------------------------
Preferred: Preferred: 2,000,000 $ .01
------------------------------------------------------------------------------------------------------
------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>
The foregoing amendment(s) will become effective when these Article of
Amendments are filed in accordance with General Laws, Chapter 156B, Section 6
unless the articles specify, in accordance with the vote adopting the
amendment, a LATER effective date not more than THIRTY DAYS after such
filing, in which event the amendment will become effective on such later date.
Later effective date: ____________________________________.
SIGNED UNDER THE PENALTIES OF PERJURY, this 14th day of May, 1998,
/s/ Martin J. Reid , President
-----------------------------------------------------
/s/ Debra L. Nelson , Clerk
-----------------------------------------------------
<PAGE>
THE COMMONWEALTH OF MASSACHUSETTS
ARTICLES OF AMENDMENT
(GENERAL LAWS, CHAPTER 156B, SECTION 72)
I hereby approve the within Articles of Amendment and, the
filing fee in the amount of $10,000.00 having been paid, said
articles are deemed to have been filed with me this 21st day
of May 1998.
EFFECTIVE DATE ___________________________
/s/ William Francis Galvin
WILLIAM FRANCIS GALVIN
SECRETARY OF THE COMMONWEALTH
TO BE FILLED IN BY CORPORATION
PHOTOCOPY OF DOCUMENT TO BE SENT TO:
ANNE T. LELAND, LEGAL ASSISTANT
MINTZ, LEVIN, COHN, FERRIS, GLOVSKY AND POPEO, P.C.
ONE FINANCIAL CENTER, BOSTON, MA 02111
617 542-6000