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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THE
CONSOLIDATED FINANCIAL STATEMENTS CONTAINED IN CASCADE MICROTECH, INC.'S
REGISTRATION STATEMENT ON FORM S-1 FILED WITH THE COMMISSION ON SEPTEMBER 29,
2000 AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH CONSOLIDATED
FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C> <C> <C>
<PERIOD-TYPE> YEAR YEAR 6-MOS
<FISCAL-YEAR-END> DEC-31-1998 DEC-31-1999 DEC-31-2000
<PERIOD-START> JAN-01-1998 JAN-01-1999 JAN-01-2000
<PERIOD-END> DEC-31-1998 DEC-01-1999 JUN-30-2000
<CASH> 368 13,511 4,864
<SECURITIES> 0 0 7,967
<RECEIVABLES> 8,759 12,668 13,580
<ALLOWANCES> 50 66 69
<INVENTORY> 5,716 6,254 7,386
<CURRENT-ASSETS> 16,559 33,651 33,684
<PP&E> 7,514 6,999 9,072
<DEPRECIATION> 4,936 3,951 4,387
<TOTAL-ASSETS> 20,549 38,114 41,304
<CURRENT-LIABILITIES> 8,205 7,639 10,092
<BONDS> 0 0 0
0 9,908 10,356
3,332 9,226 9,226
<COMMON> 1,350 1,446 813
<OTHER-SE> 5,858 8,293 9,463
<TOTAL-LIABILITY-AND-EQUITY> 20,549 38,114 41,304
<SALES> 41,597 51,530 31,860
<TOTAL-REVENUES> 41,597 51,530 31,860
<CGS> 24,541 27,444 16,735
<TOTAL-COSTS> 24,541 27,444 16,735
<OTHER-EXPENSES> 18,632 20,123 12,415
<LOSS-PROVISION> 0 0 0
<INTEREST-EXPENSE> 349 198 52
<INCOME-PRETAX> (1,707) 3,697 2,963
<INCOME-TAX> (730) 1,223 1,130
<INCOME-CONTINUING> (977) 2,474 1,833
<DISCONTINUED> 0 0 0
<EXTRAORDINARY> 0 0 0
<CHANGES> 0 0 0
<NET-INCOME> (977) 2,474 1,833
<EPS-BASIC> (0.21) 0.50 0.36
<EPS-DILUTED> (0.21) 0.33 0.19
</TABLE>
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