PLASMA & MATERIALS TECHNOLOGIES INC
SC 13G/A, 1997-02-12
SPECIAL INDUSTRY MACHINERY, NEC
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SECURITIES AND EXCHANGE COMMISSION
Washington, D.C.  20549

SCHEDULE 13G

Under the Securities Exchange Act of 1934
(Amendment No. 1)

Plasma & Materials Technologies, Inc.
(Name of Issuer)

Common Stock
(Title of Class of Securities)

72753M 10 9
(CUSIP Number)



Check the following box if a fee is being paid with this statement [ ].  
(A fee is not required only if the filing person:  (1) has a previous 
statement on file reporting beneficial ownership of more than five 
percent of the class of securities described in Item 1; and (2) has 
filed no amendment subsequent thereto reporting beneficial ownership of 
five percent or less of such class.)  (See Rule 13d-7).

*The remainder of this cover page shall be filled out for a reporting 
person's initial filing on this form with respect to the subject class 
of securities, and for any subsequent amendment containing information 
which would alter the disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not 
be deemed to be "filed" for the purpose of Section 18 of the Securities 
Exchange Act of 1934 ("Act") or otherwise subject to the liabilities of 
that section of the Act but shall be subject to all other provisions of 
the Act (however, see the Notes).



                                   13G

CUSIP NO.  72753M 10 9


1)        NAME OF REPORTING PERSON
          S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

            Norwest Equity Partners IV
            Tax Identification No.  41-1647118

2)        CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*    (a)  [ ]
                                                               (b)  [ ]
3)        SEC USE ONLY

4)        CITIZENSHIP OR PLACE OF ORGANIZATION

            Minnesota

NUMBER OF          (5)  SOLE VOTING POWER
SHARES                    552,381
BENEFICIALLY       (6)  SHARED VOTING POWER
OWNED BY                  0
EACH               (7)  SOLE DISPOSITIVE POWER
REPORTING                 552,381
PERSON             (8)  SHARED DISPOSITIVE POWER
WITH                      0

9)         AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
             552,381

10)        CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
           SHARES*

11)        PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
             Less than 5%

12)        TYPE OF REPORTING PERSON*

             PA







                                   13G

CUSIP NO.  72753M 10 9


1)        NAME OF REPORTING PERSON
          S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

            Itasca Partners
            Tax Identification No.  41-1647117

2)        CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*    (a)  [ ]
                                                               (b)  [ ]
3)        SEC USE ONLY

4)        CITIZENSHIP OR PLACE OF ORGANIZATION

            Minnesota

NUMBER OF          (5)  SOLE VOTING POWER
SHARES                    552,381
BENEFICIALLY       (6)  SHARED VOTING POWER
OWNED BY                  0
EACH               (7)  SOLE DISPOSITIVE POWER
REPORTING                 552,381
PERSON             (8)  SHARED DISPOSITIVE POWER
WITH                      0

9)         AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
             552,381

10)        CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
           SHARES*

11)        PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
             Less than 5%

12)        TYPE OF REPORTING PERSON*

             PA








13G

CUSIP NO.  72753M 10 9


1)        NAME OF REPORTING PERSON
          S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

            Robert F. Zicarelli
            Social Security No.  ###-##-####

2)        CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*    (a)  [ ]
                                                               (b)  [ ]
3)        SEC USE ONLY

4)        CITIZENSHIP OR PLACE OF ORGANIZATION

            United States of America

NUMBER OF          (5)  SOLE VOTING POWER
SHARES                    552,381
BENEFICIALLY       (6)  SHARED VOTING POWER
OWNED BY                  0
EACH               (7)  SOLE DISPOSITIVE POWER
REPORTING                 552,381
PERSON             (8)  SHARED DISPOSITIVE POWER
WITH                      0

9)         AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
             552,381

10)        CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
           SHARES*

11)        PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
             Less than 5%

12)        TYPE OF REPORTING PERSON*

             IN








13G

CUSIP NO.  72753M 10 9


1)        NAME OF REPORTING PERSON
          S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

            Daniel J. Haggerty
            Social Security No.  ###-##-####

2)        CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*    (a)  [ ]
                                                               (b)  [ ]
3)        SEC USE ONLY

4)        CITIZENSHIP OR PLACE OF ORGANIZATION

            United States of America

NUMBER OF          (5)  SOLE VOTING POWER
SHARES                    603,898
BENEFICIALLY       (6)  SHARED VOTING POWER
OWNED BY                  0
EACH               (7)  SOLE DISPOSITIVE POWER
REPORTING                 603,898

PERSON             (8)  SHARED DISPOSITIVE POWER
WITH                      0

9)         AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
             603,898

10)        CHECK IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN 
           SHARES*

11)        PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (9)
             Less than 5%

12)        TYPE OF REPORTING PERSON*

             IN










SECURITIES AND EXCHANGE COMMISSION
Washington, D.C.  20549

SCHEDULE 13G
Under the Securities Exchange Act of 1934
(Amendment No. 1)


Item 1(a)  Name of Issuer:

           Plasma & Materials Technologies, Inc.

Item 1(b)  Address of Issuer's Principal Executive Offices:

           9255 Deering Avenue
           Chatsworth, CA  91311
 
Item 2(a)  Name of Person Filing:

           1.  Norwest Equity Partners IV
           2.  Itasca Partners
           3.  Robert F. Zicarelli
           4.  Daniel J. Haggerty

Item 2(b)  Address of Principal Business Office:

           1.  Norwest Equity Partners IV
               2800 Piper Jaffray Tower
               222 South Ninth Street
               Minneapolis, MN  55402

           2.  Itasca Partners
               2800 Piper Jaffray Tower
               222 South Ninth Street
               Minneapolis, MN  55402

           3.  Robert F. Zicarelli
               2800 Piper Jaffray Tower
               222 South Ninth Street
               Minneapolis, MN  55402

           4.  Daniel J. Haggerty
               2800 Piper Jaffray Tower
               222 South Ninth Street
               Minneapolis, MN  55402

           This statement is filed by Norwest Equity Partners IV on
           behalf of all of the persons listed above pursuant to
           Rule 13d-1(c) and Rule 13d-1(f).  Norwest Equity Partners
           IV is a Minnesota limited partnership.  Itasca Partners,
           a Minnesota general partnership, is the general partner of
           Norwest Equity Partners IV.  Robert F. Zicarelli and
           Daniel J. Haggerty are the managing partners of Itasca
           Partners.



Item 2(c)  Citizenship:

           1.  Norwest Equity Partners IV:  Minnesota
           2.  Itasca Partners:  Minnesota
           3.  Robert F. Zicarelli:  United States
           4.  Daniel J. Haggerty:  United States

Item 2(d)  Title of Class of Securities:

           Common Stock

Item 2(e)  CUSIP Number:

           72753M 10 9

Item 3     Not Applicable

Item 4     Ownership:

           (1)  Norwest Equity Partners IV:  At December 31, 1996,
                Norwest Equity Partners IV owned 552,381 shares of
                common stock.  This amount represented 3.9% of 
                the total shares of common stock outstanding at that 
                date.  Norwest Equity Partners IV has no rights to
                acquire additional shares through the exercise of
                options or otherwise.

           (2)  Itasca Partners:  At December 31, 1996, Itasca 
                Partners was deemed to own, by virtue of its
                affiliation with Norwest Equity Partners IV, 552,381
                shares of common stock.  This amount represented 3.9%
                of the total shares of common stock outstanding at 
                that date.

           (3)  Robert F. Zicarelli:  At December 31, 1996, Robert F.
                Zicarelli was deemed to own, by virtue of his 
                afiliation with Norwest Equity Partners IV, 552,381
                shares of common stock.  This amount represented 3.9%
                of the total shares of common stock outstanding at that 
                date.

           (4)  Daniel J. Haggerty:  At December 31, 1996, Daniel J.
                Haggerty was deemed to own an aggregate of 603,898 
                shares of common stock (representing 4.2% of the total 
                number of shares of common stock outstanding at that 
                date) as follows:  (a) 552,381 shares of common stock 
                by virtue of his affiliation with Norwest Equity 
                Partners V (see 1 above), which shares represented 
                3.9% of the total number of shares of common stock 
                outstanding at that date and (b) 51,517 shares of 
                common stock by virtue of his affiliation with Norwest 
                Equity Partners V, which shares represented .3% of the 
                shares of common stock outstanding at that date.  Mr. 
                Haggerty is one of three managing partners of Itasca 
                Partners, a Minnesota Limited partnership that is the 
                general partner of Norwest Equity Partners IV.

                The persons filing this statement other than Norwest
                Equity Partners IV disclaim beneficial ownership of,
                and the filing of this shall not be construed as an
                admission that the persons filing are beneficial 
                owners of, the shares covered by this statement for
                purposes of Section 13, 14, and 16.

Item 5     Ownership of Five Percent or Less of a Class:

           If this statement is being filed to report the fact that as
           of the date hereof the reporting persons have ceased to be
           beneficial owners of more than five percent of the class of
           securities, check the following [X].

Item 6     Ownership of More than Five Percent on Behalf of Another 
           Person:

           Not Applicable.

Item 7     Identification and Classification of the Subsidiary Which 
           Acquired the Security Being Reported on by the Parent
           Holding Company:

           Not Applicable

Item 8     Identification and Classification of Members of the Group:

           Not Applicable

Item 9     Notice of Dissolution of Group:

           Not Applicable

Item 10    Certification:

           By signing below, I certify that, to the best of my 
           knowledge and belief, the securities referred to 
           above were cquired in the ordinary course of
           business and were not acquired for the purpose of 
           and do not have the effect of changing or 
           influencing the control of the issuer of such
           securities and were not acquired in connection with or as a
           participant in any transaction having such purposes or
           effect.

Signature.

After reasonable inquiry and to the best of my knowledge and belief, I 
certify that the information set forth in this statement is true, 
complete, and correct.

Date:  February 10, 1997

NORWEST EQUITY PARTNERS IV

By ITASCA PARTNERS, as general partner



By:  /s/ John P. Whaley
         John P. Whaley, Partner


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