TRIKON TECHNOLOGIES INC
PRE 14A, 2000-04-18
SPECIAL INDUSTRY MACHINERY, NEC
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                           SCHEDULE 14A INFORMATION
Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934


Filed by the Registrant [X]
Filed by a Party other than the Registrant  [_]

Check the appropriate box:

[X]  Preliminary Proxy Statement
[_]  Confidential, for Use of the Commission Only (as permitted by Rule 14a-
     6(e)(2))
[_]  Definitive Proxy Statement
[_]  Definitive Additional Materials
[_]  Soliciting Material Pursuant to (S) 240.14a-11 (c) or (S) 240.14a-12

 .................................Trikon Technologies, Inc.......................
               (Name of Registrant as Specified in Its Charter)

 ................................................................................
    (Name of Person(s) Filing Proxy Statement if other than the Registrant)

Payment of Filling  Fee (Check appropriate box):

[X]  No fee required
[_]  $125 per Exchange Act Rules 0-11 (c)(1)(ii), 14a-6(i)(1), 14a-6(i)(2) or
     Item 22 (a)(2) of Schedule 14A.
[_]  Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

     1)  Title of each class of securities to which transaction applies:
         .......................................................................

     2)  Aggregate number of securities to which transaction applies:
         .......................................................................
     3)  Per unit price or other underlying value of transaction computed
         pursuant to Exchange Act Rule 0-11 (Set forth the amount on which the
         filing fee is calculated and state how it was determined):
         .......................................................................
     4)  Proposed maximum aggregate value of transaction:
         .......................................................................

     5)  Total fee paid:
         .......................................................................

[_]  Fee paid previously by written preliminary materials.

[_]  Check box if any part of the fee is offset as provided by Exchange Act Rule
0- 11(a)(2) and identify the filing for which the offsetting fee was paid
previously. Identify the previous filing by registration statement number, or
the Form or Schedule and the date of its filing.

     1)  Amount Previously Paid: ______________________________________________
     2)  Form Schedule or Registration Statement No:___________________________
     3)  Filing Party: ________________________________________________________
     4)  Date Filed: __________________________________________________________
<PAGE>

                           TRIKON TECHNOLOGIES, INC.
                                 RINGLAND WAY
                         NEWPORT, SOUTH WALES  NP6 2TA
                                UNITED KINGDOM

                   NOTICE OF ANNUAL MEETING OF STOCKHOLDERS
                              AND PROXY STATEMENT

                            TO BE HELD MAY 31, 2000

The annual meeting of stockholders of Trikon Technologies, Inc. ("Trikon" or the
"Company") will be held at the offices of McDermott, Will & Emery, 50
Rockefeller Plaza, 11th Floor, New York, New York 10020, on Wednesday, May 31,
2000, at 9:00 a.m., for the following purposes:

        1.  For the holders of Common Stock to elect four directors of the board
            of directors to serve until the next annual meeting of stockholders
            and until their successors have been elected and qualified. The
            nominees for election by holders of Common Stock are Christopher D.
            Dobson, Nigel Wheeler, Richard M. Conn and Robert R. Anderson.

        2.  For the holders of Series H Preferred Stock to elect one director of
            the board of directors to serve until the next annual meeting of
            stockholders and until his successor has been elected and qualified.
            The nominee for election by the holders of Series H Preferred Stock
            is Stephen N. Wertheimer.

        3.  To approve an amendment to Trikon's Seventh Restated Articles of
            Incorporation to increase the number of authorized shares of Common
            Stock from 11,000,000 to 15,000,000.

        4.  To approve an amendment to Trikon's 1991 Stock Option Plan, amended
            and restated as of April 26, 1999, to increase the number of shares
            of Common Stock that may be issued under such plan from 1,050,000 to
            1,500,000.

        5.  To ratify the selection of Ernst & Young LLP as Trikon's independent
            public accountants for the fiscal year ending December 31, 2000.

        6.  To act upon such other matters as may properly come before the
            annual meeting or any adjournments or postponements thereof.

     The foregoing items of business are more fully described in the Proxy
Statement accompanying this notice.  Except with respect to proposal 2, each
share of Trikon's Common Stock is entitled to one vote on all matters presented
at the annual meeting.  With respect to proposal 2, each share of Trikon's
Series H Preferred Stock is entitled to one vote.  The record date for
determining those stockholders who will be entitled to notice of, and to vote
at, the

                                      -1-
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annual meeting and at any adjournment thereof is April 28, 2000. A list of
stockholders entitled to vote at the annual meeting will be available for
inspection at the offices of Trikon.

     Whether or not you plan to attend the annual meeting in person, please
complete, date, sign, and return the enclosed proxy promptly in the accompanying
reply envelope.  Your proxy may be revoked at any time prior to the annual
meeting.  If you decide to attend the annual meeting and wish to change your
proxy vote, you may do so automatically by voting in person at the annual
meeting.

                                    By Order of the Board of Directors

                                    Jeremy Linnert
                                    Secretary

Newport, South Wales, United Kingdom
May 1, 2000


                            YOUR VOTE IS IMPORTANT.

IN ORDER TO ASSURE YOUR REPRESENTATION AT THE MEETING, YOU ARE REQUESTED TO
COMPLETE, SIGN, AND DATE THE ENCLOSED PROXY AS PROMPTLY AS POSSIBLE AND RETURN
IT IN THE ENCLOSED REPLY ENVELOPE (TO WHICH NO POSTAGE NEED BE AFFIXED IF MAILED
IN THE UNITED STATES).

                                      -2-
<PAGE>

                           TRIKON TECHNOLOGIES, INC.

                                PROXY STATEMENT

                        ANNUAL MEETING OF STOCKHOLDERS

                            TO BE HELD MAY 31, 2000


                                 INTRODUCTION

     These proxy materials are furnished in connection with the solicitation of
proxies by the board of directors of Trikon Technologies, Inc., a California
corporation, for use at its annual meeting of stockholders to be held on
Wednesday, May 31, 2000, at 9:00 a.m., at the offices of McDermott, Will &
Emery, 50 Rockefeller Plaza, 11th Floor, New York, New York 10020, and at any
adjournment or postponement of the annual meeting.  These proxy materials were
first mailed on or about May 1, 2000, to all stockholders entitled to vote at
the annual meeting.

                              PURPOSE OF MEETING

     The specific proposals to be considered and acted upon at the annual
meeting are summarized in the accompanying Notice of annual meeting of
stockholders.  Each proposal is described in more detail in this Proxy
Statement.

                        VOTING RIGHTS AND SOLICITATION

Voting

     Trikon's common stock, no par value (the "Common Stock") and Series H
Preferred Stock, no par value (the "Series H Preferred Stock") are the only
classes of securities entitled to vote at the annual meeting.  Holders of
Trikon's Series H Preferred Stock are only entitled to vote on proposal 2.
Holders of Trikon's Common Stock are not entitled to vote on proposal 2.  On
April 28, 2000, the record date for determination of stockholders entitled to
vote at the annual meeting, there were _________ shares of Common Stock and
_________ shares of Series H Preferred Stock outstanding.  Each stockholder of
record on April 28, 2000 is entitled to one vote for each share of Common Stock
and one vote for each share of Series H Preferred Stock held on such date.

     A majority of the shares of Common Stock, represented in person or by
proxy, shall constitute a quorum for the transaction of business other than for
proposal 2.  A majority of the shares of Series H Preferred Stock, represented
in person or by proxy, shall constitute a quorum for the election of the
director to be elected by the holders of Series H Preferred Stock as set forth
in proposal 2. Abstentions and broker non-votes are counted as present for the
purpose of determining the presence of a quorum for the transaction of business.
With respect to the election of directors by holders of Common Stock, the four
nominees receiving the greatest number of affirmative votes will be elected.
With respect to the election of a director by holders

                                      -3-
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of Series H Preferred stock, the nominee receiving the greatest number of
affirmative votes will be elected.

     With respect to the approval of the amendment of Trikon's Seventh Restated
Articles of Incorporation (the "Restated Articles") to effectuate the increase
in number of authorized shares of Trikon's Common Stock from 11,000,000 to
15,000,000, the affirmative vote of a majority of Trikon's outstanding shares of
Common Stock will constitute approval of such proposal.

     With respect to the ratification of the selection of Ernst & Young LLP as
Trikon's independent public accountants for the fiscal year ended December 31,
2000 and the amendment to Trikon's 1991 Stock Option Plan, amended and restated
as of April 26, 1999 (the "Stock Option Plan"), the affirmative vote of a
majority of the shares of Common Stock present or represented and voting at the
annual meeting will constitute ratification of such proposals, provided that the
shares voting affirmatively also constitute at least a majority of the required
quorum.  Accordingly, abstentions and broker non-votes can have the effect of
preventing approval of the ratification of the selection of  Ernst & Young LLP
as Trikon's independent public accountants and the amendment to the Stock Option
Plan, if the number of affirmative votes, though a majority of the votes cast,
does not constitute a majority of the required quorum.

     In the election of directors by holders of Common Stock, a stockholder may
cumulate his votes for one or more nominees, but only if the names of nominees
were placed in nomination prior to the voting and such stockholder has given
notice at the meeting prior to the voting of his intention to so cumulate his
votes.  If any one stockholder has given such notice, all stockholders may
cumulate their votes in such election of directors.  If the voting for directors
is conducted by cumulative voting, each share will be entitled to a number of
votes equal to the number of directors to be elected, which votes may be cast
for a single nominee or distributed among two or more nominees in such
proportions as the stockholder or proxy deems fit.

Proxies

     Whether or not you are able to attend the annual meeting, you are urged to
complete and return the appropriate enclosed proxy card, which is solicited by
the board of directors and which will be voted as you direct on your proxy card
when properly completed.  In the event no directions are specified, such proxies
will be voted FOR the approval of proposals 1, 2, 3, 4 and 5 described in the
accompanying Notice and Proxy Statement and in the discretion of the proxy
holders as to other matters that may properly come before the annual meeting.
You may revoke or change your proxy at any time before the annual meeting.  To
do this, send a written notice of revocation or another signed proxy card with a
later date to the Secretary of Trikon at Trikon's principal executive offices
before the beginning of the annual meeting.  You may also revoke your proxy by
attending the annual meeting and voting in person.

     The Common Stock proxy is only to be used to vote shares of Common Stock.
The Series H Preferred Stock proxy is only to be used to vote shares of Series H
Preferred Stock.  Holders of both Common Stock and Series H Preferred Stock
should complete both the Common Stock proxy, to vote their shares of Common
Stock, and the Series H Preferred Stock proxy, to vote their shares of Series H
Preferred Stock.

                                      -4-
<PAGE>

Solicitation of Proxies

     Trikon will bear the entire cost of solicitation, including the
preparation, assembly, printing, and mailing of this Proxy Statement, the
proxies, and any additional solicitation material furnished to stockholders.

     Copies of solicitation material will be furnished to brokerage houses,
fiduciaries, and custodians holding shares in their names that are beneficially
owned by others so that they may forward this solicitation material to such
beneficial owners.  In addition, Trikon may reimburse such persons for their
costs of forwarding the solicitation material to such beneficial owners.  The
original solicitation of proxies by mail may be supplemented by solicitation by
telephone, telegram, or other means by directors, officers, employees, or agents
of Trikon.  No additional compensation will be paid to these individuals for any
such services.  Except as described above, Trikon does not intend to solicit
proxies other than by mail.

                MATTERS TO BE CONSIDERED AT THE ANNUAL MEETING

                                PROPOSAL NO. 1:

               ELECTION OF DIRECTORS BY HOLDERS OF COMMON STOCK

General

     The Certificate of Determination that establishes the rights, preferences
and privileges of the Series H Preferred Stock provides that the holders of
Series H Preferred Stock are entitled to elect one director if the board of
directors of Trikon is constituted of five or fewer members and two directors if
the board of directors is constituted of more than five members.  Under the By-
laws of Trikon, the number of directors constituting the entire board of
directors may be increased or decreased within the range of not less than five
and not more than nine directors by majority action of the board of directors.
The currently authorized number of directors is five.  As a result, four
directors will be elected at this meeting by holders of Common Stock and one
director will be elected by the holders of Series H Preferred Stock.

     At the annual meeting, Trikon is nominating four candidates for election to
the board of directors by holders of Common Stock.  Unless otherwise instructed,
the proxy holders will vote the proxies received from holders of Common Stock by
them for the four nominees listed herein.  In the event that any nominee of
Trikon is unable or declines to accept nomination for election, the proxies will
be voted for any nominee who shall be recommended by the present board of
directors.  Management has no knowledge that any of the persons named will be
unavailable or unwilling to serve.  The terms of office for each person elected
as a director will continue until the next annual meeting of stockholders and
until such director's successor has been elected and qualified.

     The four nominees who receive the greatest number of affirmative votes of
shares of Common Stock shall become directors.  Upon the request of any person
entitled to vote for directors to be elected by the holders of Common Stock
prior to the voting, each holder of Common Stock voting in the election of
directors may cumulate such holder's votes and give

                                      -5-
<PAGE>

one candidate a number of votes equal to the number of directors to be elected
multiplied by the number of shares of Common Stock held by such holder, or
distribute his votes on the same principle among as many candidates as he may
select. However, no stockholder shall be entitled to cumulate votes for any
candidate unless, pursuant to the Bylaws of Trikon, the candidate's name has
been placed in nomination prior to the voting.

     To the knowledge of Trikon, no arrangement or understanding exists between
any of such four nominees and any other person or persons pursuant to which any
nominee was or is to be selected as a director or nominee.  None of the nominees
has any family relationship to any other nominee or to any executive officer of
Trikon.

Recommendation of The Board of Directors

     The board of directors recommends a vote FOR the nominees listed below for
election by the holders of Common Stock.

     Christopher D. Dobson.  Mr. Dobson joined Trikon's board of directors as
Chairman in November 1996 upon the acquisition of Trikon Limited. From December
of  1997 to June 1998, Mr. Dobson was Chief Executive Officer of the Company.
Mr. Dobson was appointed Chief Scientific Officer in May 1998.  Mr. Dobson was a
co-founder of Trikon Limited and was the Chairman of Trikon Limited's board of
directors from 1971 to November 1996.

     Nigel Wheeler.  Mr. Wheeler joined Trikon as a director and the President
and Chief Operating Officer in November 1996 upon the acquisition of Trikon
Limited. In October 1998, Mr. Wheeler was appointed Chief Executive Officer.
From July 1993 to November 1996, Mr. Wheeler served as Trikon Limited's Chief
Executive Officer.

     Richard M. Conn.  Mr. Conn was elected to the board of directors of Trikon
in January 1998. Mr. Conn formed Business Development Consulting in early 1997
and serves as a consultant in the semiconductor equipment industry. Prior to
forming Business Development Consulting, Mr. Conn was a Vice President of Sales
at KLA Instruments Corporation, the predecessor to KLA-Tencor from 1984 until
1996. During his tenure at KLA Instruments Corporation, Mr. Conn was a member of
the boards of directors of KLA Instruments Corporation's subsidiaries in the
United Kingdom, France and Germany. Mr. Conn has held several other positions in
the semiconductor industry at companies that include Eaton Semiconductor
Equipment, Applied Materials UK and ITT Semiconductors.

     Robert R. Anderson.  Mr. Anderson, a co founder of KLA Instrumentation
Inc., (now KLA-Tencor Inc.), which acts as a supplier of semiconductor process
control equipment, was elected to the board of directors of Trikon in April
2000.  Mr. Anderson was Chairman and Chief Executive Officer of Yield Dynamics,
a private software provider to the semiconductor industry during the period of
October 1998 to April 1999.  Mr. Anderson is the Chairman of Silicon Valley
Research, Inc., a post he has held since January 1994.  Mr. Anderson also served
as Chief Executive Officer of that company during the periods April 1994 to July
1995 and December 1996 to October 1997 and as Chief Financial Officer from
September 1994 to November 1995.  Mr. Anderson serves as a director of Applied
Science and Technology, Inc., Metron Technology,

                                      -6-
<PAGE>

N.V. and certain other companies. During the period from 1992 to 1996, Mr.
Anderson was a member of the Nasdaq Corporate Advisory Board.


                                PROPOSAL NO. 2:

         ELECTION OF A DIRECTOR BY HOLDERS OF SERIES H PREFERRED STOCK

General

     At the annual meeting, Trikon is nominating one candidate for election to
the board of directors by holders of Series H Preferred Stock.  Unless otherwise
instructed, the proxy holders will vote the proxies received from holders of
Series H Preferred Stock by them for the nominee listed herein.  In the event
that the nominee of Trikon listed below is unable or declines to accept
nomination for election, the proxies will be voted for any nominee who shall be
recommended by the present board of directors.  Management has no present
knowledge that the person named will be unavailable or unwilling to serve.  The
terms of office for each person elected as a director will continue until the
next annual meeting of stockholders and until such director's successor has been
elected and qualified.  The nominee who receives the greatest number of
affirmative votes of shares of Series H Preferred Stock shall become a director.

     To the knowledge of Trikon, no arrangement or understanding exists between
any nominee for the director to be elected by the holders of Series H Preferred
Stock and any other person or persons pursuant to which the nominee was or is to
be selected as a director or nominee.  The nominee does not have any family
relationship to any other nominee or to any executive officer of Trikon.

Recommendation of the Board of Directors

     The board of directors recommends a vote FOR the nominee listed below for
election by the holders of Series H Preferred Stock.

     Stephen N. Wertheimer was appointed to the board of directors in June 1998.
He has been a Managing Director of Credit Research and Trading LLC since 1996.
He was the President and founder of Water Capital Corp. from 1991 to 1996.  Mr.
Wertheimer is also Chairman of Advanced Mining Systems, Inc. and currently
serves as a director of El Paso Electric Company, and Greenwich Fine Arts, Inc.
and SpectruMedix Corporation.  Mr. Wertheimer also serves as a member of the
compensation committee of SpectruMedix Corporation.

Information Concerning Nominees and Incumbent Directors

<TABLE>
<CAPTION>

Nominees                                          Age      Positions and Offices Held with Trikon
- --------                                          ---      --------------------------------------
<S>                                             <C>      <C>
Richard M. Conn (1) (2).......................     55      Director
Christopher D. Dobson.........................     63      Director, Chairman of the Board and Chief Scientific
                                                           Officer
</TABLE>

                                      -7-
<PAGE>

<TABLE>
<CAPTION>
<S>                                              <C>      <C>
Nigel Wheeler                                      50      Director, President and Chief Executive Officer
Stephen N. Wertheimer (1) (2).................     49      Director
Robert R. Anderson (1) (2)....................     62      Director
</TABLE>

(1)  Member of audit committee

(2)  Member of compensation committee

Board Committees and Meetings

     During the fiscal year ended December 31, 1999, the board of directors held
six (6) meetings.  During this period, each of the incumbent directors attended
or participated in more than 75% of the aggregate of (i) the total number of
meetings of the board of directors and (ii) the total number of meetings held by
all committees of the board on which each such director served.

Committees of the Board of Directors

     The board of directors has an audit committee and a compensation committee.
The audit committee reviews the results and scope of the audit and other
services provided by Trikon's independent auditors, reviews and evaluates
Trikon's internal control functions, and monitors transactions between Trikon
and its employees, officers and directors.  The audit committee held two (2)
meetings during the year ended December 31, 1999.  The compensation committee
administers Trikon's Stock Option Plan and designates compensation levels for
officers and directors of Trikon.  The compensation committee held two (2)
meetings during the year ended December 31, 1999.

                                PROPOSAL NO. 3:

              APPROVAL OF AMENDMENT TO SEVENTH RESTATED ARTICLES
                  OF INCORPORATION TO INCREASE THE NUMBER OF
             AUTHORIZED COMMON SHARES FROM 11,000,000 TO 15,000,000

General

     The board of directors of Trikon has unanimously approved (subject to
stockholder approval), and is hereby soliciting stockholder approval of, an
amendment to Trikon's Restated Articles of Incorporation, substantially in the
form of Exhibit A attached to this Proxy Statement (the "Articles of
Amendment"), and incorporated herein by reference, effecting an increase in the
number of Trikon's authorized shares from 11,000,000 to 15,000,000.

     In order to effect the increase in the authorized shares of Common Stock,
the stockholders are being asked to approve the Articles of Amendment.  The
board of directors approved the Articles of Amendment at the meeting of the
board of directors on March 21, 2000 subject to stockholder approval.  The board
of directors believes that the increase in the authorized shares of Common Stock
is in the best interests of both Trikon and the stockholders,

                                      -8-
<PAGE>

and is necessary in order to provide for additional conversions of preferred
stock and debt of the Company into Common Stock.

     The approval of the Articles Amendment requires the affirmative vote of a
majority of Trikon's outstanding shares of Common Stock.  The failure of the
stockholders to approve the Articles Amendment will not affect any other
proposals of this Proxy Statement.

Recommendation of Board of Directors

     The board of directors recommends a vote FOR the above proposal.

                                PROPOSAL NO. 4:

             APPROVAL OF AMENDMENTS TO THE 1991 STOCK OPTION PLAN

     Trikon's stockholders are being asked to approve an amendment to Trikon's
Stock Option Plan that will increase the number of shares of Common Stock
reserved for issuance under the Stock Option Plan by 450,000 shares, from
1,050,000 to 1,500,000.

     The amendment to the Stock Option Plan that is the subject of this proposal
was approved by the board of directors at a meeting on March 21, 2000 and is
subject to stockholder approval at the annual meeting.  The purpose of the
amendment is to increase the number of shares reserved for issuance under the
Stock Option Plan, thereby affording the Company greater ability to offer
incentive based compensation.  A copy of the Amended and Restated Stock Option
Plan, as proposed to be adopted, is attached hereto as Exhibit B.

     The Stock Option Plan became effective upon adoption by the board of
directors on December 11, 1990, and was originally entitled the Nonqualified
Stock Option Plan.  The Stock Option Plan was amended and restated by the board
of directors in 1995, and was subsequently approved by the stockholders during
the same year.  In October 1996, in connection with the acquisition of
Electrotech Limited, a United Kingdom Company, the board of directors adopted
the Share Option Scheme (the "U.K. Plan") as a separate subplan within the Stock
Option Plan to be used for option grants to employees resident in the United
Kingdom.  The Stock Option Plan was amended and restated by the board of
directors on July 19, 1998, and subsequently approved by the stockholders on
July 28, 1998.  The board of directors further amended and restated the Stock
Option Plan on April 26, 1999; such amendment was approved by the stockholders
on June 14, 1999.  The share reserve under the Stock Option Plan is available
for issuance pursuant to options granted under either the Stock Option Plan or
the U.K. Plan incorporated therein. Options granted under the U.K. Plan have
terms similar to the option grants made under the Stock Option Plan, except for
certain differences required to satisfy the applicable tax and corporate law
requirements in effect in the United Kingdom.

     The following is a summary of the principal features of the Stock Option
Plan as most recently amended, and the primary differences between the U.K. Plan
and the Stock Option Plan.  The summary, however, does not purport to be a
complete description of all the provisions of either plan.  Any stockholder of
Trikon who wishes to obtain a copy of the actual plan

                                      -9-
<PAGE>

documents may do so upon written request to the Corporate Secretary at Trikon's
principal executive offices in South Wales, United Kingdom.

Administration

     The Stock Option Plan may be administered by the board of directors or a
committee of the board of directors.  Currently, the Stock Option Plan is
administered by the compensation committee of the board of directors.  The
entity responsible for administering the Stock Option Plan will be referred to
in this proposal as the Plan Administrator.

Eligibility

     Employees, non-employee board members, and independent consultants and
advisers in the service of Trikon or its subsidiaries are eligible to receive
options to purchase shares of Common Stock under the Stock Option Plan.

     As of April 28, 2000, a total of approximately 4 executive officers, 301
other employees, and 3 non-employee Board members were eligible to participate
in the Stock Option Plan.

Share Reserve

     A total of 1,500,000 shares of Common Stock has been reserved for issuance
in the aggregate under the Stock Option Plan and the U.K. Plan, provided the
stockholders approve the 450,000 share increase that forms part of this
proposal.

     In no event may any one participant in the Stock Option Plan be granted
stock options for more than 210,000 shares per calendar year, effective with the
1999 calendar year.  Stockholder approval of this proposal will accordingly
constitute approval of such share limitation for purposes of Internal Revenue
Code Section 162(m).

     To the extent an outstanding option under the Stock Option Plan expires or
terminates for any reason prior to exercise in full, the shares subject to the
portion of the option not so exercised will be available for subsequent option
grants under the Stock Option Plan.

     Should any change be made to the Common Stock issuable under the Stock
Option Plan, whether by reorganization, merger, consolidation, recapitalization,
reclassification, stock split, stock dividend or similar capital adjustment,
appropriate adjustments will be made to (i) the maximum number of shares of
Common Stock issuable under the Stock Option Plan, (ii) the maximum number of
shares for which any one person may be granted stock options under the Stock
Option Plan per calendar year, and (iii) the number, price and kind of
securities subject to any outstanding options under the Stock Option Plan.

Valuation

     The fair market value per share of Common Stock on any relevant date under
the Option Plan will be the closing selling price per share on the date
immediately prior to the date in

                                      -10-
<PAGE>

question on the OTC Bulletin Board. On April 28, 2000, the closing selling price
per share was $_________.

Option Grants

     Options must be granted with an exercise price per share not less than the
fair market value per share of Common Stock on the grant date.  No granted
option may have a term in excess of ten years.  Options granted under the Stock
Option Plan will generally become exercisable in four (4) successive equal
annual installments upon the optionee's completion of each year of service over
the four (4)-year period measured from the grant date.  The board of directors
may not impose a vesting schedule upon granted options which is more restrictive
than twenty percent (20%) per year vesting, with the initial vesting to occur
not later than one (1) year after the date of grant of the option.  However,
such limitation shall not be applicable to any option granted to individuals who
are officers, directors or independent consultants of Trikon.

     Upon termination of employment for reasons other than death or disability,
the optionee will have thirty (30) days in which to exercise his or her
outstanding options to the extent those options are exercisable for one or more
option shares at the time of such termination of employment.  Termination of
employment due to death or disability of the optionee allow 180 days and one
year, respectively, from the date of termination in which to exercise such
options.  The Plan Administrator will have discretion to extend the period
following the optionee's cessation of service during which his or her
outstanding options may be exercised and/or accelerate the exercisability of
those options in whole or in part.

     The Plan Administrator will have the authority to effect the cancellation
of outstanding options under the Stock Option Plan that have exercise prices in
excess of the then current market price of Common Stock and to issue replacement
options with an exercise price based on the market price of Common Stock at the
time of the new grant.

Stockholder Rights and Option Assignability

     An optionee will not have any stockholder rights pursuant to an outstanding
option until a stock certificate is issued representing the shares purchased
upon the exercise of such option.

     Options are generally not assignable or transferable other than by will or
the laws of inheritance and, during the optionee's lifetime, the option may be
exercised only by the optionee.  However, the Plan Administrator may allow non-
statutory options to be transferred or assigned during the optionee's lifetime
to one or more members of the optionee's immediate family or to a trust
established exclusively for more or more such family members.

Acceleration

     In March 2000, the board of directors amended the Stock Option Plan to
provide that in the event of a dissolution or liquidation of the Company, or any
reorganization, merger or consolidation in which the Company does not survive
(each, a "Corporate Transaction"), each optionee shall have the right until five
days before the effective date of the Corporate Transaction to exercise in whole
or in part any unexpired options issued to such optionee,

                                      -11-
<PAGE>

whether or not such options are vested and whether or not the surviving
corporation, if any, grants the optionee an option to purchase shares in the
surviving corporation.

     The accelerated vesting of options in the event of a change in ownership or
control of Trikon may be seen as an anti-takeover provision and may have the
effect of discouraging a merger proposal, a takeover attempt or other efforts to
gain control of Trikon.

Financial Reports

     Under the terms of the Stock Option Plan, Trikon shall deliver a balance
sheet and an income statement at least annually to each individual holding an
outstanding option, unless such individual is a key employee whose duties in
connection with Trikon assure such individual access to equivalent information.

Amendment and Termination

     The board of directors may amend or modify the Stock Option Plan in any or
all respects whatsoever, subject to any stockholder approval under applicable
law or regulation.  The board of directors may terminate the Stock Option Plan
at any time, and the Stock Option Plan will in all events terminate on December
31, 2003.

Stock Awards

     The table below shows, as to each of Trikon's executive officers named in
the Summary Compensation Table and the various indicated individuals and groups,
the number of shares of Common Stock subject to options granted under the Stock
Option Plan, the Directors Stock Option Plan and the U.K. Plan between January
1, 1999, and April 28, 2000, together with the weighted average exercise price
payable per share.

     As of April 28, 2000, options for 817,788 shares were outstanding, 26,714
shares had been issued under the Stock Option Plan, and 205,498 shares remained
available for future option grant.

                                      -12-
<PAGE>

                              OPTION TRANSACTIONS
                              -------------------
                   (January 1, 1999 through April 28, 2000)


<TABLE>
<CAPTION>

Name                                              Options Granted                 Weighted Average
- ----                                              (Number of Shares)              Exercise Price
                                                  ------------------              --------------
<S>                                             <C>                             <C>
Christopher D. Dobson..................                       0                               0
Nigel Wheeler..........................                 307,688                           2.736
Nicolas Carrington.....................                   5,000                          14.375
Jeremy Linnert.........................                   4,000                          14.375
All executive officers as a group (5
 persons)..............................                 320,688                           3.208
Robert R. Anderson,
   Director............................                   9,000
Richard M. Conn, Director..............                   1,800                           1.406
Lawrence D. Lenihan,                                      1,800                           1.406
   Jr., Director.......................
Stephen N. Wertheimer,
   Director............................                   1,800                           1.406
All employees, including current
 officers who are not executive
 officers as a group
   (259 persons).......................                 201,374                           4.095

</TABLE>

New Plan Benefits

     As of the date hereof, the Company has not determined the timing or amount
of any future grants of additional options or other benefits under the Stock
Option Plan.

Federal Income Tax Consequences

     Options granted under the Stock Option Plan may be either incentive stock
options which satisfy the requirements of Section 422 of the Internal Revenue
Code or non-statutory options which are not intended to satisfy such
requirements.  The Federal income tax treatment for the two types of options
differs as follows:

     Incentive Stock Options.  No taxable income is recognized by the optionee
at the time of the option grant, and no taxable income is generally recognized
at the time the option is exercised.  The optionee will, however, recognize
taxable income in the year in which the purchased shares are sold or otherwise
made the subject of disposition.

     For Federal income tax purposes, dispositions are divided into two
categories: (i) qualifying and (ii) disqualifying.  The optionee will make a
qualifying disposition of the purchased shares if the sale or disposition is
made more than two (2) years after the grant date of

                                      -13-
<PAGE>

the option and more than one (1) year after the exercise date. If the optionee
fails to satisfy either of these two holding periods prior to the sale or
disposition, then a disqualifying disposition of the purchased shares will
result.

     If the optionee makes a disqualifying disposition of the purchased shares,
then Trikon will be entitled to an income tax deduction, for the taxable year in
which such disposition occurs, equal to the excess of (i) the fair market value
of such shares on the date the option was exercised over (ii) the exercise price
paid for such shares.  In no other instance will Trikon be allowed a deduction
with respect to the optionee's disposition of the purchased shares.  Trikon
anticipates that any compensation deemed paid by Trikon upon one or more
disqualifying dispositions of incentive stock option shares will not have to be
taken into account for purposes of the $1 million limitation per covered
individual on the deductibility of the compensation paid to certain executive
officers of Trikon.

     Non-statutory Options.  No taxable income is recognized by an optionee upon
the grant of a non-statutory option.  The optionee will in general recognize
ordinary income in the year in which the option is exercised equal to the excess
of the fair market value of the purchased shares on the exercise date over the
exercise price, and the optionee will be required to satisfy the tax withholding
requirements applicable to such income.

     Trikon will be entitled to an income tax deduction equal to the amount of
ordinary income recognized by the optionee in connection with the exercise of
the non-statutory option.  The deduction will in general be allowed for the
taxable year of Trikon in which such ordinary income is recognized by the
optionee- Trikon anticipates that the compensation deemed paid by Trikon upon
the exercise of non-statutory options will not have to be taken into account for
purposes of the $1 million limitation per covered individual on the
deductibility of the compensation paid to certain executive officers of Trikon.

Accounting Treatment

     Option grants to employees and members of the board of directors with an
exercise price equal to the fair market value of the shares on the grant date
will not result in any charge to Trikon's earnings, but Trikon must disclose, in
pro-forma statements to Trikon's financial statements, the impact the option
grants would have upon Trikon's reported earnings were the fair value of those
options at the time of grant treated as compensation expense.  In addition, the
number of outstanding options may be a factor in determining Trikon's earnings
per share on a fully-diluted basis.

U.K. Plan

     The following is a summary of the major differences between the provisions
of the U.K. Plan and those of the Stock Option Plan:

     .  Consultants and directors who are not required to devote more than 25
        hours per week to Trikon or its subsidiaries are not eligible to
        receive option grants under the U.K. Plan.

                                      -14-
<PAGE>

     .  The aggregate market value of the shares of Common Stock purchasable
        under all outstanding options granted under the U.K. Plan and any other
        option plan of Trikon to any one individual may not exceed 30,000
        British pounds, with such value to be determined for each option at the
        time of the grant.

     .  Options must be granted at an exercise price not less than the par value
        per share.

     .  Options granted under the U.K. Plan are not transferable during the
        optionee's lifetime.

     .  In the event of (i) certain changes in control of Trikon resulting from
        a tender offer for the total outstanding securities of Trikon or for all
        the shares of Common Stock, (ii) any court-ordered reorganization of
        Trikon or (iii) a voluntary winding up of Trikon, each outstanding
        option granted under the U.K. Plan will become immediately exercisable
        for all the shares subject to that option and may be exercised for any
        or all of those shares for a period of up to six months following the
        date on which the successor entity obtains control of Trikon or the date
        the court orders such reorganization or the date of the resolution for
        such winding up of Trikon. However, no acceleration of an outstanding
        option will occur in connection with a change in control of Trikon if
        the successor entity assumes that option or replaces it with an option
        of equivalent value.

Stockholder Approval Required

     The affirmative vote of a majority of the shares present or represented and
voting at the annual meeting, together with the affirmative vote of the required
quorum, is required for approval of the amendment to the Stock Option Plan.

Recommendation of the Board of Directors

     The board of directors recommends a vote FOR the above proposal.

                                PROPOSAL NO. 5:

                RATIFICATION OF INDEPENDENT PUBLIC ACCOUNTANTS

     Ernst & Young LLP served as Trikon's independent public accountants for the
fiscal year ended December 31, 1999.  At the annual meeting, the stockholders
are being asked to ratify the selection of Ernst & Young LLP as Trikon's
independent public accountants for the fiscal year ending December 31, 2000.
The affirmative vote of the majority of shares of Common Stock present or
represented and voting at the annual meeting, together with the affirmative vote
of at least a majority of the required quorum, is required for approval of the
ratification of Ernst & Young LLP as Trikon's independent public accountants.

     In the event the stockholders fail to ratify the appointment, the board of
directors will reconsider its selection.  Even if the selection is ratified, the
board of directors, in its discretion, may direct the appointment of a different
independent accounting firm for such fiscal year if the

                                      -15-
<PAGE>

board of directors feels that such a change would be in Trikon's and its
stockholders, best interests.

     Representatives of Ernst & Young LLP will be present at the annual meeting
to respond to appropriate questions and to make such statements as they desire.

Recommendation of the Board of Directors

     The board of directors recommends that the stockholders vote FOR the
ratification of the selection of Ernst & Young LLP to serve as Trikon's
independent public accountants for the fiscal year ending December 31, 2000.

                                PROPOSAL NO. 6:

                OTHER MATTERS WHICH MAY COME BEFORE THE MEETING

     The board of directors has no knowledge of any other matters which may come
before the annual meeting and does not intend to present any other matters.
However, if any other matters shall properly come before the meeting or any
adjournments thereof, the persons named as proxies will have discretionary
authority to vote the shares of Common Stock and Series H Preferred Stock
represented by the accompanying proxies in accordance with their best judgment.

                                      -16-
<PAGE>

                SECURITY OWNERSHIP OF DIRECTORS AND MANAGEMENT

     To the extent known by Trikon, the following table sets forth certain
information regarding beneficial ownership of Common Stock and Series H
Preferred Stock as of March 22, 2000 by:  (i) each person (or group or
affiliated persons) who is known by Trikon to own beneficially more than 5% of
Trikon's outstanding Common Stock or Series H Preferred Stock, (ii) each of
Trikon's directors and nominees for director, (iii) each of the other two
executive officers named in the "SUMMARY COMPENSATION TABLE" and (iv) Trikon's
directors and executive officers as a group.  For purposes of calculating the
percentage beneficially owned, (i) the number of shares of Common Stock includes
(x) 10,634,004 shares of Common Stock outstanding as of March 22, 2000 and (y)
the shares of Common Stock subject to options and warrants held by the person or
group that are currently exercisable or exercisable within 60 days from March
22, 2000 and (ii) the number of shares of Series H Preferred Stock outstanding
as of March 22, 2000 was 1,959,916.  Except as indicated in the footnotes to
this table, the persons named in the table have sole voting and investment power
with respect to all shares of Common Stock and Series H Preferred Stock shown as
beneficially owned by them, subject to community property laws, where
applicable.


<TABLE>
<CAPTION>
                                               Shares of                                        Shares of
                                               Common Stock                                     Series H            Percent of
Name and Address of                            Beneficially              Percent of         Preferred Stock          Series H
Beneficial Owner                               Owned                    Common Stock       Beneficially Owned    Preferred Stock
- -----------------------------------            -------------            ------------       ------------------    ---------------
<S>                                        <C>                        <C>               <C>                     <C>
Christopher D. Dobson..............            1,634,614                    15.1%                   --                   --
    Ringland Way, Newport
    South Wales, NP6 2TA U.K.
Pequot Capital Management, Inc.(1).            1,012,251                     9.4               155,799                  7.9
    500 Nyala Farm Road
    Westport, CT 06880
The DDJ Entities(2)................              862,198                     8.0                    --                   --
    141 Linden Street, Suite 4
    Wellesley, MA 02181
Citigroup Inc.(3)..................                 *                         *                370,435                 18.9
    838 Greenwich Street
    New York, NY 10013
Mackay-Shields Financial                            *                         *                301,590                 15.3
 Corporation(4)....................
    9 West 57th Street, 37th Floor
    New York, NY 10019
Putnam Investments.................              259,600                     2.4               255,537                 13.0
    One Post Office Square
    Boston, MA 02109
Nicolas Carrington.................                9,066(5)                   *                   --                   --
Richard M. Conn....................                   --                      --                  --                   --
</TABLE>

                                      -17-
<PAGE>

<TABLE>
<CAPTION>
                                               Shares of                                   Shares of
                                               Common Stock                                Series H                Percent of
Name and Address of                            Beneficially              Percent of        Preferred Stock         Series H
Beneficial Owner                               Owned                    Common Stock       Beneficially Owned    Preferred Stock
- -----------------------------------            -------------            ------------       ------------------    ---------------
<S>                                           <C>                        <C>                <C>                    <C>
Jeremy Linnert.....................                6,150(6)                  *                      --                   --
Stephen Wertheimer.................                9,000(7)                  *                      --                   --
Nigel Wheeler......................               84,424(8)                  *                      --                   --
Robert Anderson                                       --                    --                      --                   --
All current directors and                      1,743,254(9)               16.8                      --                   --
 executive officers
  as a group (7 persons)...........
</TABLE>

- ------------------------
 *   Less than 1.0%

(1)  The number of shares beneficially owned by Pequot Capital Management, Inc.
     is based on information contained in a Schedule 13D filed on January 8,
     1999 and certain information provided by Pequot Capital Management, Inc. to
     the Company.  Pequot Capital Management, Inc., an investment adviser
     registered under the Investment Advisers Act of 1940, acts as an investment
     adviser to certain investment funds and managed accounts, which hold shares
     of Common Stock and Series H Preferred Stock.

(2)  The number of common shares beneficially owned by the DDJ Entities is based
     on the information contained in Schedule 13G filed by DDJ Capital
     Management, LLC ("DDJ") on behalf of DDJ Capital III, LLC ("DDJ III"), B
     III Capital Partners, L.P. (the "DDJ Fund") and itself on March 14, 2000.
     DDJ III is the general partner of, and DDJ is the investment manager for,
     the DDJ Fund. All shares of Common Stock reported as beneficially owned by
     DDJ Entities were directly beneficially owned by the DDJ Fund.

(3)  The number of common shares beneficially owned by Citigroup Inc.
     ("Citigroup") is based on information in a Schedule 13G filed by Citigroup
     on January 27, 2000.

(4)  The number of common shares beneficially owned by MackayShields Financial
     Corporation ("MackayShields") is based on information contained in a
     Schedule 13G filed by MackayShields on February 8, 2000 and certain
     information provided by MackayShields to the Company.

(5)  Includes 9,066 shares of Common Stock issuable under stock options
     exercisable within 60 days of March 22, 2000.

(6)  Includes 6,150 shares of Common Stock issuable under stock options
     exercisable within 60 days of March 22, 2000.

(7)  Includes 9,000 shares of Common Stock issuable under stock options
     exercisable within 60 days of March 22, 2000.

(8)  Includes 84,424 shares of Common Stock issuable under stock options
     exercisable within 60 days of March 22, 2000.

(9)  Includes 108,640 shares of Common Stock issuable under stock options
     exercisable within 60 days of  March 22, 2000.

                                      -18-
<PAGE>

Compliance with SEC Reporting Requirements

     Section 16(a) of the Exchange Act ("Section 16(a)"), requires Trikon's
directors and certain of its officers, and persons who own more than 10% of
Trikon's Common Stock (collectively, "Insiders"), to file reports of ownership
and changes in ownership with the Securities and Exchange Commission (the
"Commission").  Insiders are required by Commission regulations to furnish
Trikon with copies of all section 16(a) forms they file.

     Based solely on its review of the copies of such forms received by it, or
written representations from certain reporting persons that no Form 5s were
required for those persons, Trikon believes that its Insiders complied with all
applicable Section 16 filing requirements for 1998, on a timely basis.

                 EXECUTIVE COMPENSATION AND OTHER INFORMATION

Summary of Cash and Certain Other Compensation

     The following table sets forth all compensation received for services
rendered to Trikon in all capacities for the years ended December 31, 1999, 1998
and 1997, by (i) each person who served as Chief Executive Officer of Trikon
during the year ended December 31, 1999 and (ii) each of the other four most
highly compensated executive officers of Trikon who were serving as executive
officers at December 31, 1999 and whose total compensation exceeded $100,000
(collectively, the "Named Executive Officers").  Perquisites amounting in
aggregate to the lesser of $50,000 or 10% of the total annual salary and bonus
reported for the named executive officer are not disclosed.  For the purpose of
calculating salaries and other compensation paid in British pounds to Nigel
Wheeler, Christopher D. Dobson, Jeremy Linnert and Nicolas Carrington, the
conversion rate of 1.616 is used, which is the average rate of exchange for the
year ended December 31, 1999.

                                      -19-
<PAGE>

                           SUMMARY COMPENSATION TABLE


<TABLE>
<CAPTION>
                                               Compensation
                                           ----------------------
                                                                                               Securities          All
                                    Fiscal                                 Restricted Stock    Underlying         Other
                                    Year   Salary ($)   Bonus ($)            Awards ($)       Options/SAR(1)  Compensation
                                    -----  ----------  ----------          -------------      --------------   -------------
<S>                               <C>     <C>         <C>               <C>                 <C>             <C>
Christopher D. Dobson (2)....        1999         --         --                    --              --               --
  Chairman of the Board and          1998  $ 235,727         --            $7,183,004(3)           --               --
  Chief Scientific Officer           1997    315,917         --                    --              --               --

Thomas C. McKee(4)...........        1998     90,258         --                    --              --           17,786(5)
  Former director and
  Chief Executive Officer

Nigel Wheeler (6)............        1999    263,408    131,704                    --         257,688           76,964(7)
  Director, President and            1998    266,111         --                    --          50,000           50,306(8)
  Executive Officer                  1997    268,200    268,200                    --          20,000           50,388(9)

Nicolas Carrington (10)......        1999    117,564     79,962                    --              --           18,871(11)
  Senior Vice President,             1998    118,842         --                    --          30,630           16,463(12)
   Sales
  and Field Operations               1997    115,589         --                    --           3,630           72,994(13)

Jeremy Linnert (14)..........        1999    105,040     25,856                    --              --           17,340(15)
  Chief Financial Officer            1998    106,196         --                    --          22,300           48,501(16)
  Officer and Secretary              1997     82,270         --                    --           1,500           55,830(17)
</TABLE>

(1)  The number of shares of Common Stock underlying stock options granted in
     each year has been adjusted for the effect of the one for ten reverse stock
     split on December 17, 1999.

(2)  Mr. Dobson served as Chief Executive Officer from December 1997 to May
     1998.

(3)  In connection with the consummation of the exchange offer commenced on
     April 14, 1998 (the "Exchange Offer"), the Company issued to Mr. Dobson
     5,015,811 shares of restricted Common Stock and 6,476.995 shares of
     restricted Series I Preferred Stock.  Each share of restricted Series I
     Preferred Stock automatically converted into 1,000 shares of restricted
     Common Stock on July 28, 1998.  The aggregate restricted stock was subject
     to the one for ten reverse stock split carried out on December 17, 1999.
     The restricted shares of Common Stock and Series I Preferred Stock were
     valued at $7,183,004 based upon the closing price of the equivalent
     unrestricted Common Stock on the date of grant.  The restricted shares of
     Common Stock issued to Mr. Dobson vest 100% on the earlier of (i) May 14,
     2003, or (ii) the sale of all or substantially all of the assets of Trikon.
     The number and value of Mr. Dobson's aggregate restricted stock holdings at
     December 31, 1999 were 1,149,281 shares valued at $12,211,110.

(4)  Mr. McKee served as Chief Executive officer from June 1998 to September
     1998.

(5)  Of this amount, $12,500 represents a relocation allowance and $4,499
     represents a car allowance.

(6)  Mr. Wheeler was appointed Chief Executive Officer in October 1998.

(7)  Of this amount, $59,266 represents pension contributions by Trikon on
     behalf of the officer.

(8)  Of this amount, $36,438 represents pension contributions by Trikon on
     behalf of the officer.

(9)  Of this amount, $15,651 represents a car allowance and $32,182 represents
     pension contributions by Trikon on behalf of the officer.

                                      -20-
<PAGE>

(10) Mr. Carrington was appointed Senior Vice President Sales and Field
     operations in December 1997.

(11) Of this amount, $11,748 represents a car allowance and $5,738 represents
     pension contributions by Trikon on behalf of the officer.

(12) Of this amount, $10,916 represents a car allowance and $4,659 represents
     pension contributions by Trikon on behalf of the officer.

(13) Of this amount, $57,795 represents consideration for Mr. Carrington's
     agreement to remain with Trikon until March 31, 1998.

(14) Mr. Linnert joined Trikon in November 1996 upon the acquisition of
     Electrotech. He was appointed Chief Financial Officer and Secretary in
     December 1998.

(15) Of this amount $10,748 represents a car allowance and $5,260 represents
     pension contributions paid by Trikon on behalf of the officer.

(16) Of this amount, $33,276 represents consideration for Mr. Linnert's
     agreement to stand for election as a director for the period from January
     to June 1998, $9,955 represents a car allowance and $3,938 represents
     pension contributions paid by Trikon on behalf of the officer.

(17) Of this amount, $41,341 represents consideration for Mr. Linnert's
     agreement to remain with Trikon until March 31, 1998 and $9,462 represents
     a car allowance.

                                      -21-
<PAGE>

Option Grants in Last Fiscal Year

     The following table sets forth each grant of stock options made during the
year ended December 31, 1999 to each of the Named Executive Officers.  No stock
appreciation rights ("SARs") have ever been granted by Trikon.

<TABLE>
<CAPTION>
                                                                                                              Potential
                                                                                                            Realized Value
                                      Number of                                                               at Assumed
                                     Securities        Percent of Total                                     Annual Rates of
                                     Underlying         Options Granted       Exercise                        Stock Price
                                      Options           to Employees in         Price       Expiration      Appreciation for
                                      Granted (#)       Fiscal Year (%)       ($/sh)(1)       Date           Option Terms (2)
- -------------------------------   ----------------    ----------------     -------------   -----------    -----------------------
<S>                               <C>                 <C>                  <C>             <C>             <C>          <C>
Christopher D. Dobson...........             --                    --              --              --          --
Nigel Wheeler...................    50,000(3)(4)               11.6434            .312        10/27/08      10,000       25,000
                                   207,688(3)(4)               48.3639           1.406        10/27/08     184,000      465,000
Nicolas Carrington..............             --                    --              --              --          --           --
Jeremy Linnert..................             --                    --              --              --          --           --
</TABLE>

(1)  Represents the fair market value of the underlying shares of Common Stock
     at the time of grant.

(2)  Represents the value of the shares of Common Stock issuable upon the
     exercise of the option, assuming the stated rates of price appreciation for
     ten years, compounded annually, with the aggregate exercise price deducted
     from the final appreciated value.  Such annual rates of appreciation are
     for illustrative purposes only, are based on requirements of the commission
     and do not reflect Trikon's estimate of future stock appreciation.  No
     assurance can be given that such rates of appreciation, or any
     appreciation, will be achieved.

(3)  Represents stock options that vest in equal, annual increments of 25% over
     the four-year period of service measured from their date of grant, October
     27, 1998.

(4)  Number of securities underlying options granted and exercise price have
     been adjusted for the effects of the one for ten reverse stock split
     carried out on December 17, 1999.


Aggregated Stock Option Exercises in Last Fiscal Year and Fiscal Year-end Option
Values

     The following table sets forth the number of exercisable and unexercisable
options held by each of the Named Executive officers at December 31, 1999.  No
shares of Common Stock were acquired upon exercise of stock options by the Named
Executive Officers during the fiscal year 1999.

                                      -22-
<PAGE>

<TABLE>
<CAPTION>
                                   Number of Securities Underlying Unexercised     Value of Unexercised In-the-Money
                                            Options at Fiscal Year-End                 Options at Fiscal Year End
Name                                      Exercisable/Unexercisable (#)              Exercisable/Unexercisable ($)
- ---------------------------------  --------------------------------------------    ----------------------------------
<S>                                <C>                                           <C>
Christopher D. Dobson                                  ---                                        ----
Nigel Wheeler....................              84,424/223,264                            656,000/1,968,000
Nicolas Carrington...............                8,565/22,065                               63,000/190,000
Jeremy Linnert...................                5,950/16,350                               51,000/152,000
</TABLE>


Pension Plans

     The following table shows the estimated annual pension benefits payable to
a covered participant at normal retirement age, which is age 65, under Trikon's
defined benefit pension plan, the Electrotech Retirement Benefits Scheme.  (For
female members, pension earned prior to 6th April 1996 may be taken unreduced
from age 60.)  The Electrotech Retirement Benefits Scheme was originally
initiated by Electrotech.  As a result, only former Electrotech employees are
covered participants.  Plan members are required to contribute at the rate of 5%
of taxable remuneration, the balance of the cost being met by Trikon.  Benefits
are provided on retirement, death and withdrawal, with vesting after two years
of service in the plan.  Pensions increase in payment at the rate of 5% per
annum.  Benefits are calculated with reference to taxable remuneration and years
of service in the plan and are not subject to offsets for social security
retirement benefits:

                               Pension Plan Table

<TABLE>
<CAPTION>
                                                                     Years of Service
                      ------------------------------------------------------------------------------------------------------------
Remuneration                   5           10           15           20           25           30           35        40 or more
- -------------         --------------     --------     -------      --------     --------     --------     -------     ------------
<S>                  <C>              <C>          <C>          <C>          <C>          <C>          <C>          <C>
(Pounds)                    (Pounds)     (Pounds)     (Pounds)     (Pounds)     (Pounds)     (Pounds)     (Pounds)     (Pounds)
 50,000                       4,167        8,333       12,500       16,667       20,833       25,000       29,167       33,333
100,000                       8,333       16,667       25,000       33,333       41,667       50,000       58,333       66,667
150,000                      12,500       25,000       37,500       50,000       62,500       75,000       87,500      100,000
200,000                      16,667       33,333       50,000       66,667       83,333      100,000      116,667      133,333
250,000                      20,833       41,667       62,500       83,333      104,167      125,000      145,833      166,667
300,000                      25,000       50,000       75,000      100,000      125,000      150,000      175,000      200,000
</TABLE>

     A participant's remuneration covered by Trikon's pension plan is his or her
highest taxable salary (the "Highest Taxable Salary") in the last five plan
years of the participant's career or, in the case of a controlling director with
a 20% stock holding, the average such salary over his or her last three plan
years.  A participant earns one-sixtieth (1/60) of his Highest Taxable Salary
for each year of service to a maximum of forty-sixtieths (40/60).  Taxable
remuneration for the Named Executive officers in the plan as at the end of the
last calendar year was 163,000 British pounds (approximately $268,200) for Mr.
Wheeler.  The projected number of years of service for Mr. Wheeler at his normal
retirement age is 33 years and 10 months. Pension contributions on behalf of Mr.
Wheeler for fiscal years 1997, 1998 and 1999, respectively, are as included in
the All Other Compensation column of the Summary Compensation Table.

                                      -23-
<PAGE>

                         TEN-YEAR OPTION/SAR REPRICINGS

<TABLE>
<CAPTION>
                                                    Number of
                                                    Securities     Market Price    Exercise Price
                                                    Underlying     of Stock at     at Time of
                                                   Options/SARs      Time of       Repricing or
                                                    Repriced or    Repricing or    Amendment       New Exercise
               Name                        Date    Amended (#)    Amendment ($)      ($)             Price ($)
- --------------------------------------------------------------------------------------------------------------
<S>                                     <C>        <C>            <C>             <C>               <C>
Nigel Wheeler...........................  2/06/98     200,000        200,000          11.6250        $1.4375
- --------------------------------------------------------------------------------------------------------------
Nicolas Carrington......................  2/06/98      36,300        $1.4375          11.6250        $1.4375
- --------------------------------------------------------------------------------------------------------------
Jeremy Linnert..........................  2/06/98      15,000        $1.4375          11.6250        $1.4375
- --------------------------------------------------------------------------------------------------------------
</TABLE>

Employment Agreements

     The Company has entered into an employment agreement with Nigel Wheeler,
dated November 15, 1996, pursuant to which Mr. Wheeler was nominated as a
director and as the President and Chief Operating Officer for the three-year
term of the agreement.  The agreement with Mr. Wheeler renews annually unless
terminated by either party.  Under the agreement, Mr. Wheeler is paid a base
salary of $268,200 per year, net of any U.S. taxes or other assessments so long
as he is not a U.S. citizen.  The base salary is subject to certain annual,
upward adjustments by the Company.  In addition, Mr. Wheeler is eligible to
receive an annual performance bonus for each year of service.  The employment
agreement further provides certain customary insurance, vacation benefits and
termination provisions.

     On October 27, 1998, the Board of Directors appointed Mr. Wheeler as Chief
Executive Officer.  In connection with his appointment as Chief Executive
Officer, the Board of Directors agreed to (i) immediately grant him options to
purchase 20,000 shares of Common Stock, (ii) on or about January 1, 1999, grant
him additional options to purchase 50,000 shares of Common Stock, and (iii)
subject to stockholder approval, grant additional options to purchase shares of
Common Stock equal to 2% of the Company's then outstanding Common Stock on a
fully diluted basis.  Mr. Wheeler is authorized to direct the Company to
allocate all or a portion of such options to other members of management.
Stockholder approval was granted at the Annual Meeting of Stockholders on June
14, 1999.  In connection with the Exchange Offer, the Board of Directors entered
into certain agreements with Christopher D. Dobson, Chairman of the Board and
then Chief Executive Officer of the Company.  The Company and Mr. Dobson agreed
that upon the consummation of the Exchange Offer, 1,149,281 shares of restricted
Common Stock would be granted to Mr. Dobson.  The Restricted Stock shall vest
one hundred percent (100%) upon the earlier of (i) the date five years after the
closing of the Exchange Offer, or (ii) the sale of all or substantially all of
the assets of the Company, the direct sale by the Company's stockholders
possessing more than 50% of the total combined voting power of the Company's
outstanding securities to persons different than those holding such securities
immediately prior to such sale or the merger or consolidation in which
securities possessing more than 50% of the total combined voting power of the
Company's outstanding securities are transferred to persons different than those
holding such securities immediately prior to the merger or consolidation.  The
restricted stock shall automatically be acquired by the Company in return for a
payment of $0.01 per share of Common Stock upon Mr. Dobson's termination for
cause, voluntary cessation of providing services to the Company or if, during
the first two years following the Exchange

                                      -24-
<PAGE>

Offer, Mr. Dobson devotes fewer than 750 hours per annum to Trikon related
matters. For purposes of the restricted stock, the meaning of "for cause" is
limited to willful misconduct that materially injures the pecuniary interests of
the Company and any material breach of the noncompetition obligations under
these agreements. Mr. Dobson is permitted, at his discretion, to reallocate up
to twenty percent (20%) of the restricted stock to other members of senior
management of the Company.

     The Board of Directors and Mr. Dobson further agreed that after the
consummation of the Exchange Offer, Mr. Dobson shall receive a contingent
variable interest up to 3% of the net proceeds (gross proceeds less reasonable
and customary expenses) received upon the sale of the Company as follows:


<TABLE>
<CAPTION>
               Sales Price ($)                             Cumulative Percentage (%)
              -----------------------                      -------------------------
<S>                                                       <C>
              At least $250 million    ..................            0.5%
              At least $260 million    ..................            1.0
              At least $270 million    ..................            2.0
              At least $280 million    ..................            2.5
              $300 million or more     ..................            3.0
</TABLE>

     In addition, the Board of Directors and Mr. Dobson agreed upon certain
terms of his employment following the consummation of the Exchange Offer.  Among
other things, Mr. Dobson shall continue in his position as Chairman and Chief
Executive Officer of the Company, devote substantially his full business time to
his duties (which shall include research and development work performed on
Trikon projects and products, wherever located) and a base salary, of 196,000
British pounds.  Upon successful recruitment of a chief executive officer
candidate, Mr. Dobson shall step down as Chief Executive Officer of the Company
and continue to receive compensation at his current rate of compensation, unless
in connection therewith he determines to devote substantially less than 75% of
his full business time to the Company in which case his base salary shall be
reduced by 50%.  In the event that Mr. Dobson is terminated for any reason other
than cause prior to May 2001, he shall be paid an amount equal to his base
salary (as of the date of termination) for the period from the date of
termination until May 2001.  During his employment, Mr. Dobson has agreed not to
directly or indirectly be involved with any enterprise engaged in the
semiconductor equipment manufacturing industry, subject to a de minimis
investment exception.  In addition, he also agreed not to solicit any employees
of the Company to leave the Company nor any business of any customers, licensors
or licensees of the Company during his employment and for two (2) additional
years thereafter.  All intellectual property and know-how developed by Mr.
Dobson while employed by the Company will automatically be assigned to the
Company without royalties or other payment.  Mr. Dobson waived his salary for
the whole of 1999.

     In connection with the negotiation of the Applied Materials and Lam
Research licenses, restructuring the Company, and future licensing efforts, the
Board of Directors authorized a $1,500,000 bonus payable to Mr. Dobson, subject
to consummation of the Exchange Offer.  Payment of such bonus by the Company is
subject to (i) payment of all accrued and unpaid

                                      -25-
<PAGE>

dividends on the Series H Preferred Stock and redemption for cash of all
outstanding shares of Series H Preferred Stock issued as payment of dividends on
outstanding Series H Preferred Stock, (ii) such payment not being made prior to
June 30, 1999 and (iii) at the time of payment Trikon shall have had at least
$8,000,000 of EBITDA during and for its two most recently completed fiscal
quarters (taken as one period). For purposes of calculating EBITDA, upfront
license fees (excluding the Applied Material and Lam Research licenses) shall be
equally amortized over the twelve-month period following receipt (including the
month of receipt, and, incremental license fees associated with the MORI(TM)
source technology.

     Other than as set forth above, Trikon currently has no employment contracts
with any of the Named Executive Officers.

Directors Compensation

     Trikon's outside directors earn an annual retainer of $15,000 and receive
$1,000 for attending a meeting of the board of directors in person, $750 for
attending a meeting of the board of directors by telephone and $750 for
attending a committee meeting in person or by telephone. Outside directors may
also be reimbursed for certain expenses in connection with attendance at board
of directors and committee meetings. In addition, under Trikon's 1998 Director
Stock Option Plan, each individual who is first elected or appointed to the
Board as a non-employee Board member after June 10, 1999 will automatically
receive, at the time of such initial election or appointment, a stock option to
purchase 9,000 shares of Common Stock, and at each annual stockholders meeting,
beginning with the 2000 Annual Stockholders Meeting, each individual who is re-
elected as a non-employee Board member will automatically receive a stock option
to purchase 4,000 shares of Common Stock. In March 2000, the board of directors
increased the number of shares of Common Stock underlying the annual stock
option grant from 1,800 to 4,000. The shares subject to each 9,000-share option
grant vest in a series of four (4) successive equal annual installments upon the
director's completion of each year of service on the board of directors over the
four (4) year period measured from the date of grant, and the shares subject to
each 4,000-share option grant vest upon completion of one year of service
measured from the date of grant. In June 1999, each of Richard M. Conn, Lawrence
D. Lenihan and Stephen N. Wertheimer received an option to purchase 1,800 shares
of Common Stock at an exercise price of $1.406 following their reelection as
non-employee Board members. The number and exercise price of the shares is
stated after giving effect to the reverse stock split effective December 17,
1999.

Compensation Committee Interlocks and Insider Participation

     The compensation committee of the board of directors of Trikon throughout
the fiscal year 1999 consisted of Richard M. Conn, Lawrence D. Lenihan Jr. and
Stephen N. Wertheimer.

     None of these individuals was at any time during the fiscal year ended
December 31, 1999 or at any other time an officer or employee of Trikon.  No
executive officer of Trikon serves as a member of the board of directors or the
compensation committee of any other entity

                                      -26-
<PAGE>

which has one or more executive officers serving as a member of Trikon's board
of directors or compensation committee.

Report of the Board of Directors on Executive Compensation

     The compensation committee recommends to the board of directors general
compensation policies for Trikon, oversees Trikon's compensation plans and
specific compensation levels for executive officers, including bonuses, and
administers the Stock Option Plan.  The following is the report approved by the
compensation committee addressing the compensation of Trikon's executive
officers for 1999.

     Compensation Policy.  Trikon's executive compensation policy is designed to
establish an appropriate relationship between executive pay and Trikon's annual
performance, long-term growth objectives and ability to attract and retain
qualified executive officers.  The compensation committee addresses this
objective by integrating competitive annual base salaries with (a) bonuses based
on annual corporate performance and the achievement of individual performance
objectives and (b) stock option grants under the option Plan.  The compensation
committee believes that cash compensation in the form of salary and bonus
provides Company executives with appropriate immediate rewards for success in
current operations, while stock option grants promote management stock ownership
and thereby expand management's stake in the long-term performance and success
of Trikon.

     For 1999, the compensation committee approved the base salaries of each of
Trikon's executive officers.  In determining such base salaries, Trikon examined
salaries paid to executive officers of semiconductor equipment companies and
other high technology companies with sales comparable to those of Trikon.  For
1999, the compensation committee set the base salaries of Trikon's executive
officers generally at the median level of the salaries paid to executives in
comparable positions at semiconductor equipment companies and other high
technology companies of similar size as Trikon.

     During 1999, the compensation committee reviewed the number of stock
options granted to each of Trikon's employees, including the executive officers
and the Chief Executive Officer.  Following the review, all eligible employees
were granted options under the Stock Option Plan either in 1999 or in the first
quarter of 2000.  The number of options that each executive officer or employee
was granted was based primarily on the executive's or employee's ability to
influence Trikon's long-term growth and profitability.  The vesting provisions
of the options granted under the Stock Option Plan are designed to encourage
longevity of employment with Trikon.

     Compensation of Chief Executive Officer.  The compensation committee
believed that Nigel Wheeler, Trikon's Chief Executive Officer during 1999,
provided valuable services to Trikon, and that his compensation should therefore
be competitive with that paid to executives at comparable semiconductor
equipment companies.  In addition, the compensation committee believed that the
compensation of the Chief Executive Officer should be heavily influenced by
Trikon's performance.

                                      -27-
<PAGE>

     Therefore, although there has necessarily been some subjectivity in setting
Mr. Wheeler's salary, major elements of his compensation package are directly
tied to Trikon's performance.  For 1999, Mr. Wheeler's salary was reset at
163,000 British pounds (approximately $263,408) per annum, an amount the
compensation committee deemed at the time appropriate in light of Trikon's stage
of growth and salaries paid to chief executive officers of other growth
technology companies. In addition, he earned a bonus of 81,500 (approximately
$131,704) British pounds on Trikon's achieving certain revenue and net income
targets for the fiscal year. In January 2000, the compensation committee
approved the grant to Mr. Wheeler of options to acquire 50,000 shares of Common
Stock of the Company. The compensation committee believes the options are
appropriate to align Mr. Wheeler's interests with those of Trikon's
stockholders.

     Internal Revenue Code Section 162(M).  Under Section 162 of the Internal
Revenue Code, the amount of compensation paid to certain executives that is
deductible with respect to Trikon's corporate taxes is limited to $1,000,000
annually.  It is the current policy of the compensation committee to maximize,
to the extent reasonably possible, Trikon's ability to obtain a corporate tax
deduction for compensation paid to executive officers of Trikon to the extent
consistent with the best interests of Trikon and its stockholders.

Stock Performance Graph

     The following graph shows a comparison of total stockholder returns for
Trikon, the Nasdaq Composite Index, the Hambrecht & Quist Semiconductor Index
and the Philadelphia Semiconductor Index for the period during which Trikon's
Common Stock has been registered under Section 12 of the Securities Exchange Act
of 1934.

                                      -28-
<PAGE>

<TABLE>
<CAPTION>
                                                      Trikon           Hambrecht & Quist         NASDAQ Stock
Measurement Period (Fiscal Year Covered)        Technologies,Inc.       Semi-Conductor              Market
- ----------------------------------------        -----------------      -----------------         ------------
<S>                                          <C>                      <C>                      <C>
Measurement Pt 08/25/95....................            100.00              100.00                  100.00
FYE 12/31/96...............................             52.40               92.23                  127.62
FYE 12/31/97...............................              4.60               98.32                  156.35
FYE 12/31/98...............................              0.14              138.01                  220.48
FYE 12/31/99...............................              4.74              344.41                  408.02
</TABLE>

*    Total return assumes reinvestment of dividends.

     The chart above assumes $100.00 was invested on August 25, 1995 in Trikon's
Common Stock the Nasdaq Composite Index and the Hambrecht & Quist Semiconductor
Index.  Total returns for the Nasdaq Composite Index and the Hambrecht & Quist
Semiconductor Index are weighted based on market capitalization.

                COMPARISON OF 52 MONTH CUMULATIVE TOTAL RETURN*
                       AMONG TRIKON TECHNOLOGIES, INC.,
                     THE NASDAQ STOCK MARKET (.U.S.) INDEX
                   AND THE CHASE H & Q SEMICONDUCTORS INDEX

                                 [LINE GRAPH]


* $ 100 INVESTGED ON 8/25/95 IN STOCK OR INDEX
  INCLUDING REINVESTMENT OF DIVIDENDS.
  FISCAL YEAR ENDING DECEMBER 31.

     Notwithstanding anything to the contrary set forth in any of Trikon's
previous filings under the Securities Act or the Exchange Act that might
incorporate future filings made by Trikon under those statutes, the preceding
Report of the compensation committee of the board of directors on Executive
Compensation and Trikon stock performance graph will not be incorporated by
reference into any of those prior filings, nor will such report or graph be
incorporated by reference into any future filings made by Trikon under those
statutes.

                                      -29-
<PAGE>

                             STOCKHOLDER PROPOSALS

     Stockholders are entitled to submit proposals on matters appropriate for
stockholder action consistent with regulations of the Securities and Exchange
Commission and with the Company's By-laws.  Any such proposal for the 2001
annual meeting of stockholders must comply with applicable regulations and be
received by the Secretary, Trikon Technologies, Inc., Ringland Way, Newport,
South Wales, NP6 2TA, United Kingdom, as follows:

     (i) to be eligible for inclusion in the Company's proxy statement and form
     of proxy, it must be received no later than January 2, 2001; or

     (ii) to be eligible to be presented from the floor for vote at the meeting
     (but not intended for inclusion in the Company's proxy materials), it must
     be received by March 17, 2001.

                                ANNUAL REPORTS

     A copy of Trikon's annual report on Form 10-K is being mailed to each
stockholder of record along with this Proxy Statement.  Such report is not part
of Trikon's soliciting material.

                                 OTHER MATTERS

     The board of directors knows of no other matters to be presented for
stockholder action at the annual meeting.  However, if other matters do properly
come before the annual meeting or any adjournments or postponements thereof, the
board of directors intends that the persons named in the proxies will vote upon
such matters in accordance with their best judgment.

                         BY ORDER OF THE BOARD OF DIRECTORS

                         Jeremy Linnert
                         Secretary

                                      -30-
<PAGE>

                                                                       EXHIBIT A

                           CERTIFICATE OF AMENDMENT
                                      TO
                  SEVENTH RESTATED ARTICLES OF INCORPORATION
                                      OF
                           TRIKON TECHNOLOGIES, INC.


The undersigned certify that:

1. They are the Chief Executive Officer and the Secretary, respectively, of
Trikon Technologies, Inc. (the "Corporation"), a California corporation.

2. Paragraph 1 of  Article IV of the Seventh Restated Articles of Incorporation
of the Corporation is amended and restated in its entirety to read as follows:

          "The Company is authorized to issue two classes of shares designated
     "Common Stock" and "Preferred Stock", respectively.  The number of shares
     of Common Stock authorized to be issued is Fifteen Million (15,000,000) and
     the number of shares of Preferred Stock authorized to be issued is Twenty
     Million (20,000,000).


3. The foregoing amendment of Articles of Incorporation has been duly approved
by the board of directors.

4. The foregoing amendment of Articles of Incorporation has been duly approved
by the required vote of shareholders in accordance with Section 902, California
Corporations Code. The total number of shares of the Corporation entitled to
vote on the amendment is shares of Common Stock. The number of shares voting in
favor of the amendment equaled or exceeded the vote required for approval of the
amendment. The percentage vote required for the approval of the amendment was
more than 50% of the Common Stock.

We further declare under penalty of perjury under the laws of the State of
California that the matters set forth in this certificate are true and correct
of our own knowledge.


Dated     ___ ___, 2000

                                    ----------------------------------------
                                    Nigel Wheeler, Chief Executive Officer


                                    ----------------------------------------
                                    Jeremy Linnert, Secretary

<PAGE>

                                                                       EXHIBIT B

                           TRIKON TECHNOLOGIES, INC.

                            1991 STOCK OPTION PLAN

                        (As Amended on March 21, 2000)

     SECTION 1.  Description of Plan.  This is the 1991 Stock Option Plan (the
"Plan") of Trikon Technologies, Inc., a California corporation (the "Company").
Under the Plan, employees, directors, consultants and advisors of the Company or
any of its Subsidiaries, to be selected as set forth below, may be granted
options ("Options") to purchase shares of the Common Stock of the Company
("Common Stock").  For purposes of the Plan, the term "Subsidiary" means any
corporation 50% or more of the voting stock of which is owned by the Company or
by a Subsidiary of the Company.  It is intended that the Options under the Plan
will either qualify for treatment as incentive stock options under Section 422
of the Internal Revenue Code of 1986, as amended (the "Code") and be designated
Incentive Stock options, or not qualify for such treatment and be designated
Non-Statutory Stock Options.

     SECTION 2.  Purpose of this Plan.  The purpose of the Plan and of granting
options to employees, directors, consultants and advisors is to further the
growth, development and financial success of the Company and its subsidiaries by
providing additional incentives to such persons by assisting them in acquiring
shares of Common Stock and to benefit directly from the Company's growth,
development and financial success.

     SECTION 3.  Eligibility.  The persons who shall be eligible to receive
grants of Options under the Plan shall be the employees, directors, consultants
and advisors of the Company or any of its Subsidiaries.  A person who holds an
option is herein referred to as a "Participant." More than one Option may be
granted to any one Participant.  Notwithstanding the foregoing, no Option may be
granted to any person who then owns stock possessing more than 10% of the total
combined voting power of all classes of stock of the Company or of a Subsidiary
unless the Option Price (as hereinafter defined) is at least 110% of the fair
market value of the Common Stock on the date of grant.  In addition, any
Incentive Stock Option granted to any person who then owns stock possessing more
than 10% of the total combined voting power of all classes of stock of the
Company or of a Subsidiary shall have a termination date not later than five
years after the date such Option is granted.  For this purpose, a person's stock
ownership is determined using the constructive ownership rules contained in Code
Section 424(d).

     Only employees of the Company or a Subsidiary may be granted Incentive
Stock Options under the Plan.  The exercise of an Incentive Stock Option will
not qualify for favorable income tax treatment unless the Participant remains an
employee of the Company or a Subsidiary at all times during the period beginning
on the date of the grant of the Incentive Stock Option and ending on the date
three months before the date of the exercise of the Incentive Stock Option.  For
this purpose, a Participant who is on a leave of absence that exceeds ninety
days will be considered to have terminated his employment on the ninety-first
day of the leave of absence, unless the Participant's rights to reemployment are
guaranteed by statute or contract.  However, a

<PAGE>

Participant will not be considered to have incurred a termination of employment
because of a transfer of employment between the Company and a Subsidiary (or
vice versa).

     The aggregate fair market value (determined as of the time an Option is
granted) of the Common Stock for which any Participant may be granted Incentive
Stock Options first exercisable in any calendar year under the Plan and any
other incentive stock option plans (which qualify under Section 422 of the Code)
of the Company or any Subsidiary shall not exceed $100,000.

     SECTION 4.  Administration.  This Plan shall be administered by the Board
of Directors of the Company or a committee thereof (in either case, the
"Board").  Should the Board delegate its authority to administer the Plan to a
committee of the Board, then such committee shall be comprised of individuals
who satisfy the requirements under Rule 16b-3 of the Securities Exchange Act of
1934, as amended (the "1934 Act") and under Code Section 162(m) for purposes of
Option grants made to officers and directors of the Company who are subject to
the short-swing liability provisions of Section 16 of the 1934 Act, as amended.

     The Board is authorized and empowered to administer the Plan and, subject
to the Plan, (a) to select the Participants, to specify the number of shares of
Common Stock with respect to which Options are granted to each such Participant,
to specify the Option Price (as hereinafter defined) and the terms of options,
and in general to grant Options; (b) to determine, subject to the limits of
Section 3 hereof, whether Options will be Incentive Stock Options or Non-
Statutory Stock options; (c) to determine the dates upon which options shall be
granted and to provide for the terms and conditions of the options in a manner
consistent with this Plan, which terms and conditions need not be identical as
to the various options granted; (d) to interpret the Plan; (e) to prescribe,
amend and rescind rules relating to the Plan; and (f) to determine the rights
and obligations of Participants under the Plan.  The interpretation and
construction by the Board of any provision of the Plan or of any option granted
thereunder shall be final.  No member of the Board shall be liable for any
action or determination made in good faith with respect to the Plan or any
option granted under it.

     SECTION 5.  Shares Subject to the Plan.  The number of shares of Common
Stock which may be purchased under both the Plan and the Company's Share Option
Scheme shall be 1,500,000 shares.  Such number shall in any event be adjusted to
reflect all stock splits, stock dividends or similar capital changes.  Upon the
expiration or termination for any reason of an outstanding Option which shall
not have been exercised in full, any shares of Common Stock then remaining
unissued which shall have been reserved for issuance upon such exercise shall
again become available for the granting of additional Options under the Plan.

     The maximum number of shares for which Options may be granted to any
Participant shall be limited to 210,000 shares per calendar year.  For this
purpose, an Option granted to a Participant shall be continued to be outstanding
despite its cancellation.

     SECTION 6.  Option Price.  The purchase price per share (the "Option
Price") of the shares of Common Stock underlying each Option shall be determined
in each case by the Board with respect to each specific Option but shall not be
less than the Fair Market Value (as defined

<PAGE>

below) of such shares on the date of grant. In the event that the Company
acquires another entity, the Board may authorize the issuance of options
("Substitute Options") to the individuals performing services for the acquired
entity in substitution of stock options previously granted to those individuals
in connection with their performance of services for such entity upon such terms
and conditions as the Board shall determine, taking into account the conditions
of Code Section 424(a) in the case of a Substitute Option that is intended to be
an Incentive Stock Option.

     Fair Market Value per share of Common Stock on any relevant date shall be
determined in accordance with the following provisions:

          (a) If the Common Stock is at the time traded on the Nasdaq National
     Market, then the Fair Market Value shall be the closing selling price per
     share of Common Stock on the date immediately prior to the date in
     question, as such price is reported by the National Association of
     Securities Dealers on the Nasdaq National Market.  If there is no closing
     selling price for the Common Stock on the date immediately prior to the
     date in question, then the Fair Market Value shall be the closing selling
     price on the last preceding date for which such quotation exists.

          (b) If the Common Stock is at the time listed on either the American
     Stock Exchange or the New York Stock Exchange, then the Fair Market Value
     shall be the closing selling price per share of Common Stock on the date
     immediately prior to the date in question on the stock exchange determined
     by the Board to be the primary market for the Common Stock, as such price
     is officially quoted in the composite tape of transactions on such
     exchange.  If there is no closing selling price for the Common Stock on the
     date immediately prior to the date in question, then the Fair Market Value
     shall be the closing selling price on the last preceding date for which
     such quotation exists.

          (c) In the event the Common Stock is not traded on the Nasdaq National
     Market or listed on the American Stock Exchange or the New York Stock
     Exchange, the Fair market value shall be determined by the Board, after
     taking into account such factors as it deems appropriate.

     SECTION 7.  Exercise of Options.  Subject to all other provisions of the
Plan, each Option shall be exercisable for the full number of shares of Common
Stock subject thereto, or any part thereof, in five equal cumulative annual
installments commencing one year after the date of grant (provided the
Participant is employed by the Company at the time of vesting), or in such other
installments and at such other intervals as the Board may in any specific case
or cases otherwise specifically determine in granting such Option.  The Board
may not impose a vesting schedule upon the option or shares of Common Stock
subject to such option which is more restrictive than twenty percent (20%) per
year vesting, with the initial vesting to occur not later than one (1) year
after the date of grant of the Option.  However, such limitation shall not be
applicable to any Option granted to individuals who are officers of the Company,
directors or independent consultants.  Each Option shall terminate and expire,
and shall no longer be subject to exercise, ten years after the date of grant
thereof, or at such earlier date as the Board may otherwise specifically
determine in granting such Option.  The Option shall be exercised by the
Participant by giving written notice to the Company specifying the number of
full shares to be

<PAGE>

purchased and accompanied by payment of the full purchase price therefor in
cash, by check or in such other form of lawful consideration (including
promissory notes or shares of Common Stock then held by the Participant) as the
Board may approve from time to time.

     SECTION 8.  Option.  Each Option granted under the Plan shall be evidenced
by a written stock option executed by the Company and delivered to the
Participant, which shall be substantially in the form attached as Exhibit A
hereto, or shall be in such other form as specified by the Board.  Such stock
option shall indicate whether such Option is to be an Incentive Stock Option or
a Non-Statutory Stock Option and, if an Incentive Stock Option, shall contain
terms and conditions permitting such Option to qualify for treatment as an
incentive stock option under Section 422 of the Code.

     SECTION 9.  Issuance of Common Stock.  The Company's obligation to issue
shares of Common Stock upon the exercise of an Option is expressly conditioned
upon the making of such investment representations and related undertakings by
the Participant (or his legal representative, heir or legatee, as the case may
be) in order to comply with the requirements of any exemption from any
securities law registration or other qualification of such shares which the
Company in its sole discretion shall deem necessary or advisable.  Such required
representations and undertakings may include representations and agreements that
such Participant (or his legal representative, heir or legatee): (a) is
purchasing such shares for investment and not with any present intention of
selling or otherwise disposing thereof, and (b) agrees to have placed upon the
face and reverse of any certificates evidencing such shares a legend setting
forth (i) any representations and undertakings which such Participant has given
to the Company or a reference thereto, and (ii) that, prior to effecting any
sale or other disposition of any such shares, the Participant must furnish to
the Company an opinion of counsel, satisfactory to the Company and its counsel,
to the effect that such sale or disposition will not violate the applicable
requirements of state and federal laws and regulatory agencies.

     SECTION 10.  Limited Transferability of Options.  During the lifetime of a
Participant, options shall be exercisable only by the Participant and shall not
be assignable or transferable other than by will or by the laws of descent and
distribution following the Participant's death in accordance with Section 13(b)
hereof.

     SECTION 11.  Recapitalization, Reorganization, Merger or Consolidation.  If
the outstanding shares of Common Stock of the Company are increased, decreased
or exchanged for different securities through reorganization, merger,
consolidation, recapitalization, reclassification, stock split, stock dividend
or like capital adjustment, a proportionate adjustment shall be made (a) in the
aggregate number of shares of Common Stock which may be issued pursuant to the
exercise of options under the Plan and the maximum number of shares for which
options may be granted per Participant, as provided in Section 5, and (b) in the
number, price and kind of shares subject to any outstanding option granted under
the Plan.

     Upon the dissolution or liquidation of the Company or upon any
reorganization, merger or consolidation in which the Company does not survive,
the Plan and each outstanding Option shall terminate; provided that in such
event: (a) each Participant to whom no option has been tendered by the surviving
corporation in accordance with all of the terms of clause (b)

<PAGE>

immediately below shall have the right until five days before the effective date
of such dissolution or liquidation, or such merger or consolidation in which the
Company is not the surviving corporation, to exercise in whole or in part any
unexpired Option or Options issued to him, without regard to the installment
provisions of Section 7 of the Plan or any option agreement; or (b) in its sole
and absolute discretion, the surviving corporation may, but shall not be so
obligated, tender to any Participant holding an Option, an option or options to
purchase shares of the surviving corporation, and such new option or options
shall contain such terms and provisions as shall be required to preserve
substantially all of the rights and benefits of any option then outstanding
under the Plan. Each Participant shall be given written notice by the Company of
any such proposed or contemplated dissolution, liquidation, reorganization,
merger or consolidation at least thirty-five (35) days prior to the effective
date thereof, which notice shall advise such Participant of the proposed
dissolution, liquidation, reorganization, merger or consolidation and the rights
of the Participant pursuant to this paragraph.

     To the extent that the foregoing adjustments relate to stock or securities
of the Company, such adjustments shall be made by the Board, whose determination
in that respect shall be final, binding and conclusive.  Except as hereinbefore
expressly provided in this Section 11, the Participant shall have no rights by
reason of any subdivision or consolidation of shares of stock of any class or
the payment of any stock dividend or any other increase or decrease in the
number of shares of stock of any class, and the number or price of shares of
Common Stock subject to any option shall not be affected by, and no adjustment
shall be made by reason of, any dissolution, liquidation, reorganization, merger
or consolidation, or any issue by the Company of shares of stock of any class,
or rights to purchase or subscribe for stock of any class, or securities
convertible into shares of stock of any class.

     The grant of an Option pursuant to the Plan shall not affect in any way the
right or power of the Company to make adjustments, reclassifications or changes
in its capital or business structures or to merge, consolidate, dissolve or
liquidate or to sell or transfer all or any part of its business or assets.

     SECTION 12.  Rights as a Shareholder.  A Participant holding an Option, or
a transferee of an Option, shall have no rights as a shareholder with respect to
any shares covered by his Option until the date of the issuance of a stock
certificate to him for such shares, and no adjustment shall be made for
dividends (ordinary or extraordinary, whether in cash, securities or other
property) or distributions or other rights for which the record date is prior to
the date such stock certificate is issued, except as expressly provided in
Section 11.

     SECTION 13.  Termination of Options.  Each Option granted under the Plan
shall set forth a termination date thereof, which date shall be not later than
ten years from the date such option is granted.  Except as otherwise determined
by the Board and set forth in the documents evidencing an Option, all options
shall terminate and expire upon the first to occur of the following events:

          (a) the expiration of 30 days from the date of such Participant's
     termination of employment (other than by reason of death), except that if
     the Participant is disabled (within the meaning of section 22(e)(3) of the
     Internal Revenue Code) at the time of his

<PAGE>

     termination of employment, the expiration of one year from the date of the
     Participant's termination of employment;

          (b) the expiration of 180 days from the date of the death of such
     Participant if his death occurs while he is employed by the Company or any
     of its subsidiaries; or

          (c) the termination of the option pursuant to Section 11 of the Plan.

     The termination of employment of a Participant by death or otherwise shall
not accelerate or otherwise affect the number of shares with respect to which an
Option may be exercised, and the option may only be exercised with respect to
that number of shares which could have been purchased under the option had the
option been exercised by the Participant on the date of such termination.

     For purposes of the above, in the case of Options granted to Participants
who are directors of the Company or consultants or advisors to the Company,
"employment" shall mean service as such director, consultant or advisor to the
Company.

     SECTION 14.  Withholding of Taxes.  The Company shall deduct and withhold
from the wages, salary, bonus and other income paid by the Company to the
Participant the requisite tax upon the amount of taxable income, if any,
recognized by the Participant in connection with the exercise in whole or in
part of any Option or the sale of Common Stock issued to the Participant upon
exercise of the option, all as may be required from time to time under any
federal or state tax laws and regulations.  This withholding of tax shall be
made from the Company's concurrent or next payment of wages, salary, bonus or
other income to the Participant or by payment to the Company by the Participant
of the required withholding tax, as the Board may determine.

     SECTION 15.  Termination of Plan.  The Plan shall terminate upon the
earliest to occur of (i) December 31, 2003, (ii) the date on which all shares
available for issuance under the Plan shall have been issued or (iii) the
termination of all outstanding options in accordance with Section 11.  However,
the Board may in its absolute discretion terminate the Plan at any time.  Should
the Plan terminate on December 31, 2003, or by the Board in its absolute
discretion, then all option grants outstanding at that time shall continue to
have force and effect in accordance with the provisions of the documents
evidencing such grants.

     SECTION 16.  Amendment of Plan.  The Board shall have complete and
exclusive power and authority to amend or modify the Plan in any or all
respects.  However, no such amendment or modification shall adversely affect the
rights and obligations with respect to options at the time outstanding under the
Plan unless the Participant consents to such amendment or modification.  In
addition, certain amendments may require shareholder approval pursuant to
applicable laws or regulations.

     On March 21, 2000, the Plan was amended to increase the number of shares of
Common Stock authorized for issuance over the term of the Plan by an additional
450,000 shares (the "2000 Amendment").  The 2000 Amendment became effective
immediately upon adoption by the Board.

<PAGE>

     The 2000 Amendment is subject to shareholder approval at the 2000 Annual
Meeting, and no option grants made on the basis of the 450,000-share increase
shall become exercisable in whole or in part unless and until the 2000 Amendment
is approved by the shareholders.  Should such shareholder approval not be
obtained at the 2000 Annual Meeting, then each option grant made pursuant to
such 450,000-share increase shall terminate and cease to remain outstanding, and
no further option grants shall be made on the basis of that share increase.
However, the provisions of the Plan as in effect immediately prior to the 2000
Amendment shall automatically be reinstated, and option grants may thereafter
continue to be made pursuant to the reinstated provisions of the Plan.  All
option grants made prior to the 2000 Amendment shall remain outstanding in
accordance with the terms and conditions of the respective instruments
evidencing those options, and nothing in the 2000 Amendment shall be deemed to
modify or in any way affect those outstanding options.  Subject to the foregoing
limitations, the Plan Administrator may make option grants under the Plan at any
time before the date fixed herein for the termination of the Plan.

     SECTION 17.  Amendment of Options.  The Board may modify an existing
option, including the right to (a) change the exercise price, (b) accelerate the
right to exercise it, (c) extend or renew it, or (d) cancel it and issue a new
Option.  However, no modification may be made to an option that would impair the
rights of the Participant holding the option without his consent.  Whether a
modification of an existing Incentive Stock Option will be treated as the
issuance of a new Incentive Stock Option will be determined in accordance with
the rules of Code Section 424(h).  Whether a modification of an existing option
granted to an Insider will be treated as a new grant for purposes of Section 16
of the Securities Exchange Act of 1934 will be determined in accordance with
Rule 16b-3.

     SECTION 18.  Financial Reports.  The Company shall deliver a balance sheet
and an income statement at least annually to each individual holding an
outstanding option, unless such individual is a key Employee whose duties in
connection with the Company or Subsidiary assure such individual access to
equivalent information.

<PAGE>

                                     LOGO

                              COMMON STOCK PROXY

                           TRIKON TECHNOLOGIES, INC.
                 ANNUAL MEETING OF STOCKHOLDERS, MAY 31, 2000
        THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS OF
                           TRIKON TECHNOLOGIES, INC.

THIS PROXY IS ONLY TO BE USED TO VOTE SHARES OF COMMON STOCK, NO PAR VALUE PER
SHARE ("COMMON STOCK"), OF TRIKON TECHNOLOGIES, INC.  IT IS NOT TO BE USED TO
VOTE SHARES OF SERIES H PREFERRED STOCK, NO PAR VALUE PER SHARE ("SERIES H
PREFERRED STOCK"), OF TRIKON TECHNOLOGIES, INC.  HOLDERS OF SERIES H PREFERRED
STOCK SHOULD COMPLETE THE SERIES H PREFERRED STOCK PROXY INCLUDED IN THESE
MATERIALS.  HOLDERS OF COMMON STOCK AND SERIES H PREFERRED STOCK SHOULD COMPLETE
THIS PROXY TO VOTE THEIR SHARES OF COMMON STOCK AND THE SERIES H PREFERRED STOCK
PROXY INCLUDED IN THESE MATERIALS TO VOTE THEIR SHARES OF SERIES H PREFERRED
STOCK.

     The undersigned revokes all previous proxies, acknowledges receipt of the
notice of annual meeting of stockholders to be held on May 31, 2000 and the
proxy statement, and appoints Christopher D. Dobson and Nigel Wheeler or either
of them the proxy of the undersigned, with full power of substitution, to vote
all shares of Common Stock of Trikon Technologies, Inc. that the undersigned is
entitled to vote, either on his or her own behalf or on behalf of an entity or
entities, at the 2000 annual meeting of stockholders of the Company to be held
at the offices of McDermott, Will & Emery, 50 Rockefeller Plaza, 11th Floor, New
York, New York 10020, on May 31, 2000 at 9:00 a.m., and at any adjournment or
postponement thereof, with the same force and effect as the undersigned might or
could do if personally present thereat.  The shares represented by this proxy
shall be voted in the manner set forth below.

1.   TO ELECT FOUR DIRECTORS TO SERVE UNTIL THE NEXT ANNUAL MEETING OF
     STOCKHOLDERS AND UNTIL THEIR SUCCESSORS HAVE BEEN ELECTED AND QUALIFIED, TO
     BE ELECTED BY THE HOLDERS OF COMMON STOCK.

     _____  FOR all nominees listed below (except as marked to the contrary
               below).
            Nominees:   Christopher D. Dobson
                        Nigel Wheeler
                        Richard M. Conn
                        Robert R. Anderson

     _____  WITHHOLD AUTHORITY to vote for all nominees listed above.
<PAGE>

     TO WITHHOLD AUTHORITY TO VOTE for any nominee or nominees, write the name
     of such nominee or nominees below:

     ___________________________

     ___________________________


3.   TO APPROVE AN AMENDMENT TO THE COMPANY'S SEVENTH RESTATED ARTICLES OF
     INCORPORATION TO INCREASE THE NUMBER OF AUTHORIZED SHARES OF COMMON STOCK
     FROM 11,000,000 TO 15,000,000.

            ____   FOR         ____   AGAINST       ____   ABSTAIN

4.   TO APPROVE AN AMENDMENT TO THE COMPANY'S 1991 STOCK OPTION PLAN TO INCREASE
     THE NUMBER OF SHARES OF COMMON STOCK THAT MAY BE ISSUED UNDER SUCH PLAN
     FROM 1,050,000 TO 1,500,000.

            ____   FOR         ____   AGAINST       ____   ABSTAIN

5.   TO RATIFY THE SELECTION OF ERNST & YOUNG LLP AS THE COMPANY'S INDEPENDENT
     PUBLIC ACCOUNTANTS FOR THE FISCAL YEAR ENDING DECEMBER 31, 2000.

            ____   FOR         ____   AGAINST       ____   ABSTAIN

6.   IN ACCORDANCE WITH THE DISCRETION OF THE PROXY HOLDERS, TO ACT UPON ALL
     MATTERS INCIDENT TO THE CONDUCT OF THE MEETING AND UPON OTHER MATTERS AS
     MAY PROPERLY COME BEFORE THE MEETING OR ANY ADJOURNMENTS OR POSTPONEMENTS
     THEREOF.

     The board of directors recommends a vote FOR the directors listed above in
proposal 1 and a vote FOR all other proposals.  This Proxy, when properly
executed, will be voted as specified above.  If no specification is made, this
Proxy will be voted FOR the election of the directors listed above in proposal 1
and FOR all other proposals.

                             MARK HERE FOR ADDRESS
                             CHANGE AND NOTE BELOW

     Please sign your name exactly as it appears hereon.  If acting as an
attorney, executor, trustee, or in other representative capacity, sign name and
title.

                              Signature:____________________

                              Date:_________________________

                              Signature:____________________

Date:__________________
<PAGE>

                        SERIES H PREFERRED STOCK PROXY

                           TRIKON TECHNOLOGIES, INC.
                 ANNUAL MEETING OF STOCKHOLDERS, MAY 31, 2000
        THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS OF
                           TRIKON TECHNOLOGIES, INC.

THIS PROXY IS ONLY TO BE USED TO VOTE SHARES OF SERIES H PREFERRED STOCK, NO PAR
VALUE PER SHARE ("SERIES H PREFERRED STOCK"), OF TRIKON TECHNOLOGIES, INC.  IT
IS NOT TO BE USED TO VOTE SHARES OF COMMON STOCK, NO PAR VALUE PER SHARE
("COMMON STOCK"), OF TRIKON TECHNOLOGIES, INC.  HOLDERS OF COMMON STOCK SHOULD
COMPLETE THE COMMON STOCK PROXY INCLUDED IN THESE MATERIALS.  HOLDERS OF COMMON
STOCK AND SERIES H PREFERRED STOCK SHOULD COMPLETE THIS PROXY TO VOTE THEIR
SHARES OF SERIES H PREFERRED STOCK AND THE COMMON STOCK PROXY INCLUDED IN THESE
MATERIALS TO VOTE THEIR SHARES OF COMMON STOCK.

The undersigned revokes all previous proxies, acknowledges receipt of the notice
of annual meeting of Stockholders to be held on May 31, 2000 and the proxy
statement, and appoints Christopher D. Dobson and Nigel Wheeler or either of
them the proxy of the undersigned, with full power of substitution, to vote all
shares of Series H Preferred Stock of Trikon Technologies, Inc. that the
undersigned is entitled to vote, either on his or her own behalf or on behalf of
an entity or entities, at the 2000 annual meeting of stockholders of Trikon to
be held at the offices of McDermott, Will & Emery, 50 Rockefeller Plaza, 11th
Floor, New York, New York 10020, on May 31, 2000 at 9:00 a.m., and at any
adjournment or postponement thereof, with the same force and effect as the
undersigned might or could do if personally present thereat.  The shares
represented by this proxy shall be voted in the manner set forth below.

2.   TO ELECT A DIRECTOR TO SERVE UNTIL THE NEXT ANNUAL MEETING OF STOCKHOLDERS
     AND UNTIL HIS SUCCESSOR HAS BEEN ELECTED AND QUALIFIED, TO BE ELECTED BY
     THE HOLDERS OF THE SERIES H PREFERRED STOCK:

     ______  FOR Stephen N. Wertheimer

     ______  WITHHELD AUTHORITY to vote for the nominee listed above.

6.   IN ACCORDANCE WITH THE DISCRETION OF THE PROXY HOLDERS, TO ACT UPON ALL
     MATTERS INCIDENT TO THE CONDUCT OF THE MEETING AND UPON OTHER MATTERS AS
     MAY PROPERLY COME BEFORE THE MEETING OR ANY ADJOURNMENTS OF POSTPONEMENTS
     THEREOF.

     The board of directors recommends a vote FOR the directors listed above in
proposal 2 and a vote FOR all other proposals.  This Proxy, when properly
executed, will be voted
<PAGE>

as specified above. If no specification is made, this Proxy will be voted FOR
the election of the directors listed above in proposal 2 and FOR all other
proposals.

                             MARK HERE FOR ADDRESS
                             CHANGE AND NOTE BELOW

     Please sign your name exactly as it appears hereon.  If acting as an
attorney, executor, trustee, or in other representative capacity, sign name and
title.

                              Signature:______________________

                              Date:___________________________

                              Signature:______________________

                              Date:___________________________


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