SUBMICRON SYSTEMS CORP
4, 1996-06-10
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>   1
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                                                           OMB APPROVAL        
                                                    ---------------------------
- ------                                              OMB Number:   3235-0287    
FORM 4                                              Expires:  April 30, 1997   
- ------                                              Estimated average burden   
                                                    hours per response .... 0.5
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                                 U.S. SECURITIES AND EXCHANGE COMMISSION
                                          WASHINGTON, DC 20549
                                       
                               STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP
/ / Check this box if no                                                     
    longer subject to         Filed pursuant to Section 16(a) of the Securities 
    Section 16. Form 4            Exchange Act of 1934, Section 17(a) of the 
    or Form 5 obligations         Public Utility Holding Company Act of 1935
    may continue. See              or Section 30(f) of the Investment Company
    Instruction 1(b).                           Act of 1940               

<TABLE> 
<S>                             <C>            <C>                        <C>                <C>          <C>            <C>   
- ------------------------------------------------------------------------------------------------------------------------------------
 1. Name and Address of Reporting Person       2. Issuer Name and Ticker or Trading Symbol   6. Relationship of Reporting Person to
Levy            David              F.             SubMicron Systems Corporation: SUBM           Issuer (Check all applicable)
- ---------------------------------------------------------------------------------------------    X  Director       X 10% Owner
  (Last)          (First)          (Middle)    3. IRS or Social Security  4. Statement for      ----              ---
                                                  Number of Reporting        Month/Year          X  Officer (give    Other (Specify
4375 Farmington Circle                            Person (Voluntary)         May 1996           ----        title ---       below)
- ---------------------------------------------                             -------------------               below)
                 (Street)                                                 5. If Amendment, 
                                                                             Date of Original          Chairman, President & Ceo
                                                                             (Month/Year)              ------------------------
Allentown            PA             18104
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  (City)           (State)           (Zip)     TABLE 1 -- NON-DERIVATIVE SECURITIES ACQUIRED, DISPOSED OF, OR BENEFICIALLY OWNED
- ------------------------------------------------------------------------------------------------------------------------------------
 1. Title of Security           2. Trans-   3. Transac-  4. Securities Acquired (A)  5.  Amount of Se-    6. Owner-      7. Nature  
  (Instr. 3)                       action      tion         or Disposed of (D)           curities Benefi-    ship           of In-  
                                   Date        Code         (Instr. 3, 4 and 5)          cially Owned at     Form:          direct  
                                               (Instr. 8)                                End of Month        Direct         Benefi-
                                  (Month/                                                (Instr. 3 and 4)    (D) or         cial
                                   Day/   ---------------------------------------                            Indirect       Owner- 
                                   Year)  Code    V      Amount   (A) or    Price                            (I)            ship   
                                                                  (D)                                        (Instr. 4)     (Instr.
                                                                                                                            4)     

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Common Stock                      5/13/96   S           12,500      (D)    $9.125
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Common Stock                      5/14/96   S           12,500      (D)    $9.25
- ------------------------------------------------------------------------------------------------------------------------------------
Common Stock                      5/14/96   S            5,000      (D)    $9.125
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Common Stock                      5/15/96   S           20,000      (D)    $9.125
- ------------------------------------------------------------------------------------------------------------------------------------
Common Stock                      5/16/96   S           12,500      (D)    $9.375
- ------------------------------------------------------------------------------------------------------------------------------------
Common Stock                      5/17/96   S            7,500      (D)    $9.375
- ------------------------------------------------------------------------------------------------------------------------------------
Common Stock                      5/20/96   S           30,000      (D)    $9.375       1,855,500             (D)
- ------------------------------------------------------------------------------------------------------------------------------------

- ------------------------------------------------------------------------------------------------------------------------------------

- ------------------------------------------------------------------------------------------------------------------------------------

- ------------------------------------------------------------------------------------------------------------------------------------

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.                   (Over)

                                                                               (Print or Type Responses)             SEC 1474 (8/92)
 
</TABLE>
<PAGE>   2
<TABLE>
<CAPTION>
                                                                                                                                
 
FORM 4 (CONTINUED)        TABLE II -- DERIVATIVE SECURITIES ACQUIRED, DISPOSED OF, OR BENEFICIALLY OWNED
                                  (E.G., PUTS, CALLS, WARRANTS, OPTIONS, CONVERTIBLE SECURITIES)

<S>                       <C>          <C>        <C>         <C>              <C>             <C>                   <C>          
- ------------------------------------------------------------------------------------------------------------------------------------
1. Title of Derivative    2. Conver-   3. Trans-  4. Trans-   5. Number of     6. Date Exer-   7. Title and Amount   8. Price     
   Security                  sion or      action     action      Derivative       cisable and     of Underlying         of        
   (Instr. 3)                Exercise     Date       Code        Securities Ac-   Expiration      Securities            Deriv-    
                             Price of     (Month/    (Instr. 8)  quired (A) or    Date            (Instr. 3 and 4)      ative     
                             Deriv-       Day/                   Disposed of (D)  (Month/Day/                           Secur-    
                             ative        Year)                  (Instr. 3, 4,    Year)                                 ity       
                             Security                            and 5)                                                 (Instr. 5)
                                                                               -----------------------------------             
                                                                               Date    Expira-            Amount or            
                                                    -------------------------- Exer-   tion       Title   Number of            
                                                    Code  V     (A)     (D)    cisable Date               Shares               
- ------------------------------------------------------------------------------------------------------------------------------------
Options to Purchase         $6.00                                               Note             Common    268,125
  Common Stock                                                                  (1)              Stock
- ------------------------------------------------------------------------------------------------------------------------------------
Options to Purchase         $7-7/8                                              5/95             Common     25,000
  Common Stock                                                                                   Stock
- ------------------------------------------------------------------------------------------------------------------------------------
Options to Purchase         $10-1/8                                             6/95             Common     20,000
  Common Stock                                                                                   Stock
- ------------------------------------------------------------------------------------------------------------------------------------
Options to Purchase         $11                                                 4/96             Common     10,000
  Common Stock                                                                                   Stock
- ------------------------------------------------------------------------------------------------------------------------------------
Options to Purchase         $8-7/8                                              3/97             Common     50,000
  Common Stock                                                                                   Stock
- ------------------------------------------------------------------------------------------------------------------------------------

- ------------------------------------------------------------------------------------------------------------------------------------

- ------------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>                    <C>                         <C>                              
1. Title of Derivative       9. Number of           10. Ownership               11. Nature of                              
   Security                     Derivative              Form of                     Indirect                     
   (Instr. 3)                   Securities              Derivative                  Beneficial                   
                                Beneficially            Security:                   Ownership                    
                                Owned at End            Direct (D)                  (Instr. 4)                   
                                of Month                or Indirect (I)                                          
                                (Instr. 4)              (Instr. 4)                                               
                                                                                 
- -------------------------------------------------------------------------------------------------------
Options to Purchase             268,125                 (D)
  Common Stock
- -------------------------------------------------------------------------------------------------------
Options to Purchase              25,000                 (D)
  Common Stock
- -------------------------------------------------------------------------------------------------------
Options to Purchase              20,000                 (D)
  Common Stock
- -------------------------------------------------------------------------------------------------------
Options to Purchase              10,000                 (D)
  Common Stock
- -------------------------------------------------------------------------------------------------------
Options to Purchase              50,000                 (D)
  Common Stock
- -------------------------------------------------------------------------------------------------------

- -------------------------------------------------------------------------------------------------------
Explanation of Responses:

Note (1) The options vest in three annual installments on August 31, 1994, August 31, 1995 and August 31, 1996. Vesting of the
         options are contingent upon continued employment with the Company.
 
**Intentional misstatements or omissions of facts constitute Federal Criminal Violations.    /s/ DAVID LEVY                  6/10/96
  See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).                                                  ------------------------------- -------
                                                                                             **Signature of Reporting Person   Date
                                         

Note. File three copies of this Form, one of which must be manually signed.                                               Page 2   
      If space provided is insufficient, see Instruction 6 for procedure.                                            SEC 1474 (8/92)

</TABLE>                                                                      



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