SUBMICRON SYSTEMS CORP
3, 1997-12-08
SPECIAL INDUSTRY MACHINERY, NEC
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 FORM 3                                                                        
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                    U.S. SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, DC 20549

            INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

    Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934,
Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(f)
                     of the Investment Company Act of 1940


<TABLE>
<S>                                        <C>                           <C>                                 <C>                 
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 1. Name and Address of Reporting Person*  2. Date of Event Requiring    4. Issuer Name and Ticker or        6. If Amendment, Date 
    The KB Mezzanine Fund II, L.P.            Statement                     Trading Symbol                      of Original
- ----------------------------------------      (Month/Day/Year)            SubMicron Systems Corporation (SUBM)  (Month/Day/Year)
     (Last)     (First)     (Middle)           11/26/97                  ------------------------------------   
   405 Lexington Avenue, 21st Floor        ----------------------------  5. Relationship of Reporting        -----------------------
- ----------------------------------------   3. IRS or Social Security          Person to Issuer               7. Individual or Joint/
             (Street)                         Number of Reporting           (Check all applicable)              Group Filing (Check
   New York, NY  10174                        Person (Voluntary)               Director     X    10% Owner      applicable line)
- --------------------------------------                                   -----            -----                X    Form filed by
      (City)      (State)      (Zip)       ----------------------------        Officer           Other       -----  One Reporting
                                                                         ----- (give      -----  (specify           Person
                                                                               title below)      below)             Form filed by
                                                                                                             -----  More than One
                                                                         ----------------------------------         Reporting Person
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                                      TABLE 1 -- NON-DERIVATIVE SECURITIES BENEFICIALLY OWNED
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 1. Title of Security                         2. Amount of Securities         3. Ownership Form:         4. Nature of Indirect     
    (Instr. 4)                                   Beneficially Owned              Direct (D) or              Beneficial    
                                                 (Instr. 4)                      Indirect (I)               Ownership (Instr. 4)
                                                                                 (Instr. 5)                 
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*If the form is filed by more than one Reporting Person, see Instruction 5(b)(v).
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.                   (Over)
                                                                               (Print or Type Responses)             SEC 1473 (7/96)
</TABLE>
                 

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<TABLE>
<CAPTION>
 
FORM 3 (CONTINUED)               TABLE II -- DERIVATIVE SECURITIES BENEFICIALLY OWNED
                            (E.G., PUTS, CALLS, WARRANTS, OPTIONS, CONVERTIBLE SECURITIES)
 
<S>                              <C>                <C>                            <C>           <C>         <C>        
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1. Title of Derivative Security  2. Date            3. Title and Amount of         4. Conver-    5. Owner-   6. Nature of Indirect
   (Instr. 4)                       Exercisable and    Securities Underlying          sion or       ship        Beneficial Ownership
                                    Expiration Date    Derivative Security            Exercise      Form of     (Instr. 5)          
                                    (Month/Day/        (Instr. 4)                     Price of      Deriv-                         
                                    Year)                                             Deri-         ative                          
                                                                                      vative        Security:                      
                                                                                      Security                                     
                                 -------------------------------------------------                  Direct                         
                                 Date      Expira-                       Amount or                  (D) or                         
                                 Exercis-  tion             Title        Number                     Indirect (I)                   
                                 able      Date                          of Shares                  (Instr. 5)                     
                                                                                                                                   
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Common Stock Purchase Warrants 11/26/97  11/26/07      Common Stock      5,623,912    $2.25         D
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Explanation of Responses:
 
**Intentional misstatements or omissions of facts constitute Federal Criminal   /s/ Michael H. Khougaz             12/8/97
  Violations.  See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).                        -------------------------------   ------------------
                                                                                **Signature of Reporting Person          Date
                                                                                Title: Managing Member

</TABLE>

Note. File three copies of this form, one of which must be manually signed.
  If space provided is insufficient, See Instruction 6 for procedure.

Potential persons who are to respond to the collection of information contained
in this form are not required to respond unless the form displays a currently
valid OMB Number.


                                                                 SEC 1473 (7/96)


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