SUBMICRON SYSTEMS CORP
PRE 14A, 1997-06-05
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>   1
 
                                  SCHEDULE 14A
                                 (RULE 14a-101)
 
                    INFORMATION REQUIRED IN PROXY STATEMENT
 
                            SCHEDULE 14A INFORMATION
          PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES
                     EXCHANGE ACT OF 1934 (AMENDMENT NO.  )
 
     Filed by the Registrant [X]
 
     Filed by a Party other than the Registrant [ ]
 
     Check the appropriate box:
 
     [X] Preliminary Proxy Statement        [ ] Confidential, for Use of the
                                                Commission Only (as permitted by
                                                Rule 14a-6(e)(2))
     [ ] Definitive Proxy Statement
 
     [ ] Definitive Additional Materials
 
     [ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12

                         SubMicron Systems Corporation
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified in Its Charter)
 
- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement if other than the Registrant)
 
Payment of Filing Fee (Check the appropriate box):
 
     [X] No fee required.
 
     [ ] Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and
         0-11.
 
     (1) Title of each class of securities to which transaction applies:
 
- --------------------------------------------------------------------------------
 
     (2) Aggregate number of securities to which transaction applies:
 
- --------------------------------------------------------------------------------
 
     (3) Per unit price or other underlying value of transaction computed
         pursuant to Exchange Act Rule 0-11 (Set forth the amount on which the
         filing fee is calculated and state how it was determined):
 
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     (4) Proposed maximum aggregate value of transaction:
 
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     (5) Total fee paid:
 
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     [ ] Fee paid previously with preliminary materials.
 
     [ ] Check box if any part of the fee is offset as provided by Exchange Act
         Rule 0-11(a)(2) and identify the filing for which the offsetting fee
         was paid previously. Identify the previous filing by registration
         statement number, or the form or schedule and the date of its filing.
 
     (1) Amount previously paid:
 
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     (2) Form, schedule or registration statement no.:
 
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     (3) Filing party:
 
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     (4) Date filed:
 
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<PAGE>   2
                          SUBMICRON SYSTEMS CORPORATION
                                 6620 GRANT WAY
                               ALLENTOWN, PA 18106

                    NOTICE OF ANNUAL MEETING OF STOCKHOLDERS
                       TO BE HELD ON MONDAY, JULY 21, 1997


         The Annual Meeting of Stockholders of SubMicron Systems Corporation
(the "Company") will be held on Monday, July 21, 1997, at 10:00 a.m., at the
Holiday Inn Conference Center, Rt. 100 & I-78, Fogelsville, Pennsylvania, for
the following purposes:

         1. To elect two directors to hold office until the Annual Meeting of
Stockholders in 2000.

         2. To approve an amendment to the Company's Employee Stock Purchase
Plan to increase the number of shares issuable thereunder.

         3. To approve amendments to the Company's 1991 Amended and Restated
Stock Option Plan, including an increase in the number of shares issuable 
thereunder.

         4. To approve a proposal to amend the Company's Certificate of
Incorporation to increase the authorized number of shares of Preferred Stock.

         5. To approve the convertibility feature of the Company's 8%
Convertible Subordinated Notes.

         6. To ratify the appointment of Ernst & Young LLP as the Company's
independent accountants for 1997.

         7. To transact such other business as may properly come before the
meeting.

         The Board of Directors has fixed the close of business on May 28,
1997 as the record date for the meeting. Only stockholders of record at that
time are entitled to notice of and to vote at the meeting and any adjournment or
postponement thereof.

         The enclosed proxy is solicited by the Board of Directors of the
Company. Reference is made to the attached Proxy Statement for further
information with respect to the business to be transacted at the meeting.

         You are cordially invited to attend the meeting in person. The Board of
Directors urges you to sign, date and return the enclosed proxy card promptly.
The return of the enclosed proxy card will not affect your right to vote in
person if you choose to attend the meeting.


                                                     R.G. Holmes
                                                     Secretary


June __, 1997
<PAGE>   3
                          SUBMICRON SYSTEMS CORPORATION
                                 6620 GRANT WAY
                               ALLENTOWN, PA 18106

                                 PROXY STATEMENT
                                       FOR
                         ANNUAL MEETING OF STOCKHOLDERS
                                  JULY 21, 1997


         This Proxy Statement is furnished in connection with the solicitation
of proxies by the Board of Directors of SubMicron Systems Corporation (the
"Company") for use at the Company's Annual Meeting of Stockholders which will be
held on the date, at the time and place, and for the purposes set forth in the
foregoing notice. This Proxy Statement, the foregoing notice and the enclosed
proxy card are first being sent to stockholders on or about June __, 1997.

         The Board of Directors does not intend to bring any matter before the
meeting except those as specifically indicated in the notice and does not know
of anyone else who intends to do so. If any other matters properly come before
the meeting, however, the persons named in the enclosed proxy card, or their
duly constituted substitutes acting at the meeting, will be authorized to vote
or otherwise act thereon in accordance with their judgment on such matters.

         When your proxy card is returned properly signed prior to voting at the
meeting, the shares represented thereby will be voted in accordance with the
instructions marked thereon. If your proxy card is signed and returned without
specifying choices, the shares will be voted as recommended by the directors.

         Any proxy may be revoked at any time prior to its exercise by notifying
the Secretary in writing, by delivering a duly executed proxy bearing a later
date, or by attending the meeting and voting in person.


                    VOTING SECURITIES AND SECURITY OWNERSHIP

OUTSTANDING SHARES AND VOTING RIGHTS

         At the close of business on May 28, 1997, the record date fixed for the
determination of stockholders entitled to notice of and to vote at the meeting,
16,890,014 shares of the Company's Common Stock (the "Common Stock") and
1,302.85 shares of the Company's Series A Convertible Non-Redeemable Preferred
Stock (the "Series A Preferred Stock") were outstanding and entitled to vote.
Only the record holders of Common Stock and Series A Preferred Stock on the
record date will be entitled to vote. There are no other classes of voting
securities outstanding. The presence at the meeting, in person or by proxy, of
holders of shares entitled to cast at least a majority of the votes that may be
cast by all shares of Common Stock and Series A Preferred Stock outstanding as
of the record date, voting together, will constitute a quorum. Each share of
Series A Preferred Stock is convertible into 2,000 shares of Common Stock and is
entitled to one vote for each share of
<PAGE>   4
Common Stock into which such share or fraction thereof may be converted. Each
share of Common Stock is entitled to one vote, and, accordingly, each share of
Series A Preferred Stock is entitled to 2,000 votes. The Common Stock and Series
A Preferred Stock will vote together on all matters scheduled to be considered.
The total number of votes entitled to be cast at the meeting is 19,495,714.
There are no cumulative voting rights with respect to the election of directors.

         Abstentions and broker non-voters are counted for purposes of
determining whether a quorum is present at the meeting. Abstentions will be
counted in tabulations of votes cast on the matters to be voted on, whereas
broker non-votes will not be counted for purposes of determining whether a
proposal has been approved. The election of directors requires a plurality of
the votes cast, the proposed amendment to the Company's Certificate of
Incorporation requires the affirmative vote of a majority of the number of votes
that may be cast at the meeting and each other matter to be submitted to the
stockholders requires the affirmative vote of a majority of the votes cast at
the meeting. Accordingly, except with respect to the election of directors, an
abstention has the effect of a negative vote.

SECURITY OWNERSHIP OF PRINCIPAL STOCKHOLDERS

         The following table sets forth certain information with respect to the
beneficial ownership as of May 28, 1997 of each person who was known to the
Company to be the beneficial owner of more than 5% of the Common Stock or the
Class A Preferred Stock. Each of the stockholders named below has sole voting
and investment power with respect to such shares, unless otherwise indicated.

<TABLE>
<CAPTION>
================================================================================================================================
                                                                                                         Percent of
Name and Address of                                      Number of               Percent of              Total Voting
Beneficial Owner               Title of Class            Shares                  Class                   Power
- --------------------------------------------------------------------------------------------------------------------------------
<S>                            <C>                       <C>                     <C>                     <C>
David F. Levy                  Common Stock              4,695,250(2)                26.6%                   23.2%
6620 Grant Way
Allentown, PA 18106
- --------------------------------------------------------------------------------------------------------------------------------
James S. Molinaro              Common Stock              4,695,250(2)                26.6                    23.2
6620 Grant Way
Allentown, PA 18106
- --------------------------------------------------------------------------------------------------------------------------------
Maurice J.                     Series A                     177.50              13.6                     1.8
Gallagher, Jr.                 Preferred Stock
6900 Westcliff Drive
Suite 505
Las Vegas, NV
89128
- --------------------------------------------------------------------------------------------------------------------------------
</TABLE>
                                       -2-
<PAGE>   5
<TABLE>
<CAPTION>
- --------------------------------------------------------------------------------------------------------------------------------
<S>                            <C>                               <C>                 <C>                      <C>
Timothy P. Flynn               Series A                          177.50              13.6                     1.8
6900 Westcliff Drive           Preferred Stock
Suite 505
Las Vegas, NV
89128
- --------------------------------------------------------------------------------------------------------------------------------
J.F. Shea Co., Inc.            Series A                          142.00              10.9                     1.5
655 Brea Canyon                Preferred Stock
Road
Walnut, CA 91789
- --------------------------------------------------------------------------------------------------------------------------------
Robert L. Priddy               Series A                          213.00              16.3                     2.2
3435 Kingsboro                 Preferred Stock
Road NE, #1601
Atlanta, GA 30326
- --------------------------------------------------------------------------------------------------------------------------------
Lewis H. and Peggy             Series A                          142.00              10.9                     1.5
S. Jordan                      Preferred Stock
610 Wingspread
Peachtree City, GA
30269
- --------------------------------------------------------------------------------------------------------------------------------
CRIM Partners, L.P.            Series A                          81.65                6.3                      *
7078 Westchester               Preferred Stock
Avenue
White Plains, NY
10604
================================================================================================================================
</TABLE>

 *       Less than 1 percent.
(1)      With respect to each stockholder, includes any shares issuable upon
         exercise of any options held by such stockholder that are or will
         become exercisable within sixty days of the record date.
(2)      Consists of shares over which the stockholder has power to direct the
         voting on the election of directors pursuant to the Voting Agreement
         (as defined below). Includes 1,980,500 shares owned by each of Messrs.
         Levy and Mr. Molinaro. Also includes options to purchase 396,125 and
         338,125 shares of Common Stock held by Messrs. Levy and Molinaro,
         respectively.



                                       -3-
<PAGE>   6
SECURITY OWNERSHIP OF MANAGEMENT

         The following table sets forth certain information with respect to the
beneficial ownership as of May 28, 1997 of (i) each director, (ii) each of the
Named Executives (as hereinafter defined) and (iii) all the directors and
executive officers as a group. Each of the stockholders named below has sole
voting and investment power with respect to such shares, unless otherwise
indicated.

<TABLE>
<CAPTION>
================================================================================================================================
                                                                                                         Percent of
Name of                                                  Number of               Percent of              Total Voting
Beneficial Owner               Title of Class            Shares(1)               Class                   Power
- --------------------------------------------------------------------------------------------------------------------------------
<S>                            <C>                       <C>                     <C>                     <C>
David F. Levy                  Common Stock              4,695,250(2)                26.6%                   23.2%
- --------------------------------------------------------------------------------------------------------------------------------
James S. Molinaro              Common Stock              4,695,250(2)                26.6                    23.2
- --------------------------------------------------------------------------------------------------------------------------------
Ronald B. Booth                Common Stock                  ___                     ___
                               Series A                                                                      *
                               Preferred Stock               7.1                     *
- --------------------------------------------------------------------------------------------------------------------------------
Richard J. Busis               Common Stock                  ___                     ___                     ___
- --------------------------------------------------------------------------------------------------------------------------------
David J. Ferran                Common Stock                 33,332(3)                *                       *
- --------------------------------------------------------------------------------------------------------------------------------
Maurice J.                     Common Stock                  ___                     ___
Gallagher, Jr.                 Series A                                                                       1.8
                               Preferred Stock               177.5                   13.6
- --------------------------------------------------------------------------------------------------------------------------------
Barry W. Ridings               Common Stock                 64,000(4)                *
                               Series A                                                                      *
                               Preferred Stock               7.1                     *
- --------------------------------------------------------------------------------------------------------------------------------
John P. Traub (5)              Common Stock                306,642(6)                 1.8                     1.6
- --------------------------------------------------------------------------------------------------------------------------------
Leonard R. Weisberg            Common Stock                 40,655(7)                *                       *
- --------------------------------------------------------------------------------------------------------------------------------
Daniel G. Hajjar               Common Stock                 81,139(8)                *                       *
- --------------------------------------------------------------------------------------------------------------------------------
R.  G. Holmes                  Common Stock                 35,822(9)                *                       *
- --------------------------------------------------------------------------------------------------------------------------------
All executive officers         Common Stock              5,256,840(10)               29.3
and directors as a             Series A                                                                      27.5
group (11 persons)             Preferred Stock               191.7                   14.7
================================================================================================================================
</TABLE>

*        Less than 1 percent.
(1)      With respect to each stockholder, includes any shares issuable upon
         exercise of any options held by such stockholder that are or will
         become exercisable within sixty days of the record date.
(2)      Consists of shares over which the stockholder has power to direct the
         voting on the election of directors pursuant to the Voting Agreement.
         Includes 1,980,500 shares owned by each of Messrs. Levy and Mr.
         Molinaro. Also includes options to purchase 396,125 and 338,125 shares
         of Common Stock held by Messrs. Levy and Molinaro, respectively.
(3)      Consists of options to purchase 33,332 shares of Common Stock.
(4)      Includes options to purchase 8,000 shares of Common Stock.
(5)      Mr. Traub's term as a director expires at the 1997 annual meeting and
         he is not standing for reelection.
(6)      Includes options to purchase 150,000 shares of Common Stock.
(7)      Includes options to purchase 18,000 shares of Common Stock.
(8)      Includes options to purchase 74,000 shares of Common Stock.
(9)      Includes options to purchase 25,000 shares of Common Stock.
(10)     Includes options to purchase an aggregate of 1,042,582 shares of Common
         Stock.



                                       -4-
<PAGE>   7
                              ELECTION OF DIRECTORS

                             (ITEM 1 ON PROXY CARD)

         At the meeting, the stockholders will elect two Class C directors to
hold office until the Annual Meeting of Stockholders in 2000 and until their
respective successors have been duly elected and qualified. The Board of
Directors is divided into three classes serving staggered three-year terms, the
term of one class of directors to expire each year. The term of the present
Class C Directors expires at the 1997 Annual Meeting of Stockholders. The Board
has nominated two persons to serve as Class C Directors: Ronald B. Booth and
Richard J. Busis. Messrs. Booth and Busis are currently serving as Class C
Directors and have indicated a willingness to continue serving as directors.
Unless contrary instructions are given, the shares represented by a properly
executed proxy will be voted "FOR" the election of Messrs. Booth and Busis.
Should either of the nominees become unavailable to accept election as a
director, the persons named in the enclosed proxy will vote the shares which
they represent for the election of such other person as the Board of Directors
may recommend.

         Messrs. David F. Levy, James S. Molinaro and Leonard W. Weisberg were
appointed directors of the Company in connection with the merger of a subsidiary
of the Company with SubMicron Systems, Inc., a Pennsylvania corporation
("SubMicron"), which was approved by the stockholders of the Company on August
31, 1993 (the "Merger"). In connection with the Merger, all of the Company's
directors prior to the Merger (with the exception of Mr. Ridings) resigned, the
Board of Directors was classified as described above and the executive officers
and directors of SubMicron became the executive officers and directors of the
Company.

         Messrs. Levy and Molinaro (the "SubMicron Principals") have entered
into a voting agreement (the "Voting Agreement") that provides for all their
shares of Common Stock to be voted at their joint direction. In the event the
SubMicron Principals are unable to agree on how to vote their shares, they will
appoint a special voting trustee to break the deadlock. If they are unable to
agree on the designation of a special voting trustee, their shares will be voted
in accordance with the vote of the majority of shares of Common Stock not
subject to the Voting Agreement. The Voting Agreement will terminate on the
earliest to occur of August 31, 2003, the death or incapacity of either of the
SubMicron Principals, or the date on which either of the SubMicron Principals no
longer holds any Common Stock.

         In connection with the issuance of the Series A Preferred Stock and the
Company's 8% Convertible Subordinated Notes (the "Notes") in March 1997, the
Company agreed to appoint two representatives of the holders of the Notes (the
"Noteholders") as directors of the Company. Messrs. Booth and Gallagher are such
representatives. In addition, the Board of Directors agreed to continue to
nominate Messrs. Booth or Gallagher (or other nominees reasonably acceptable to
the Company and the representatives of the Noteholders) upon the expiration of
their respective terms if more than 50% of the aggregate principal amount of the
Notes remains outstanding at the expiration of such term or was outstanding at
any time within six months prior to the end of such term. Beginning six months
after less than 50% but more than 25% of the aggregate principal amount of the
Notes remains outstanding, the Noteholders will be entitled to have only one
designee on the Board, and six months after less than 25% of the aggregate
principal amount of the Notes remains outstanding,

                                       -5-
<PAGE>   8
the Noteholders will no longer be entitled to representatives on the Board.
Accordingly, one or both of the designees is intended to resign as a director at
such time as the Noteholders are entitled to only one or no representatives on
the Board. Messrs. Levy and Molinaro have agreed to vote their shares in favor
of the designees of the Noteholders.

         The current members of the Board of Directors, including the nominees
for Class C Directors, together with certain information about them, are set
forth below:

<TABLE>
<CAPTION>
                                      DIRECTOR                                POSITIONS WITH
          NAME                AGE       SINCE         EXPIRES                   THE COMPANY
          ----                ---       -----         -------                   -----------
<S>                           <C>     <C>             <C>          <C>
Class C Directors


Ronald B. Booth                 48       1997           1997       Director

Richard J. Busis                43       1997           1997       Director

John P. Traub                   50       1995           1997       President of Systems
                                                                   Chemistry and a Director

Class B Directors

Maurice J. Gallagher, Jr.       47       1997           1998       Director

James S. Molinaro               35       1993(1)        1998       President of SubMicron
                                                                   Systems, Inc. and
                                                                   Director

Barry W. Ridings                45       1991           1998       Director

Class A Directors

David J. Ferran                 40       1997           1999       President, Chief
                                                                   Executive Officer and
                                                                   Director

David F. Levy                   52       1993(1)        1999       Chairman of the Board
                                                                   and Director

Leonard R. Weisberg             67       1993(1)        1999       Director
</TABLE>

(1)      Messrs. Levy and Weisberg were directors of SubMicron from 1988 until
         the Merger and Mr. Molinaro was a director of SubMicron from 1989 until
         the Merger.


                                       -6-
<PAGE>   9
         Mr. Booth has been a director of the Company since April 1997. Mr.
Booth has been President of Pacific Air Aviation, Inc., an air charter company
in Las Vegas, Nevada, since October 1993. From October 1992 to September 1993,
Mr. Booth was Chief Financial Officer of Arcadian Motor Carrier, Inc., a
nationwide trucking operation, and from September 1984 to October 1992, he was
Vice President of Finance for WestAir Commuter Airlines. Mr. Booth is a
Certified Public Accountant and has a B.S. degree in Business
Administration/Accounting from California State University, Chico.

         Mr. Busis has been a director of the Company since April 1997. Since
1995, Mr. Busis has been a senior member of the law firm of Cozen and O'Connor.
From 1992 to 1995, Mr. Busis was a partner at the law firm of Wolf, Block,
Schorr and Solis-Cohen. Mr. Busis received a J.D. from the Harvard Law School
and an M.A. and B.A. from the University of Pennsylvania.

         Mr. Traub has been a director of the Company since the acquisition of
Systems Chemistry Incorporated by the Company in 1995. Mr. Traub has been
President and Chief Executive Officer of Systems Chemistry since 1989 and was
Chairman of the Board of Systems Chemistry from 1993 until its acquisition by
the Company.

         Mr. Gallagher has been a director of the Company since April 1997. Mr.
Gallagher participated in the founding of ValuJet Airlines, Inc. in July 1992
and has served as a director of ValuJet since its inception. He served as
ValuJet's President from its inception until June 1993 and as its Chief
Financial Officer until May 1994. Mr. Gallagher also served as Vice Chairman of
the Board of ValuJet from June 1993 until October 1996. In addition, since May
1992, Mr. Gallagher has been involved as an investor in various aviation related
and other companies. From May 1992 until March 1993, he served as a director of
Mesa Airlines, Inc., and from 1983 to August 1992, he served as an executive
officer and director of WestAir Holding, Inc., the parent of a regional airline
headquartered in Fresno, California. WestAir Holding, Inc. was acquired by Mesa
Airlines in May 1992. Mr. Gallagher has an M.B.A. from the University of
California at Berkeley.

         Mr. Molinaro was Vice President, Chief Operating Officer and Secretary
of SubMicron from January 1989 until the Merger. He assumed these positions with
the Company upon consummation of the Merger and held such positions until
December 1995. As part of a reorganization of the Company's corporate structure,
in December 1995, Mr. Molinaro became the President of SubMicron, the Company's
principal operating subsidiary, in lieu of his positions with the Company. Mr.
Molinaro has served as a director of SubMicron since 1989 and as a director of
the Company since the Merger. During November and December 1988, Mr. Molinaro
served as a consultant to Dexon, Inc., a semiconductor equipment manufacturer,
and from June 1986 to November 1988, Mr. Molinaro served as Director of Research
and Development for Dexon. Mr. Molinaro has a B.S. degree in Mechanical
Engineering from Pennsylvania State University.

         Mr. Ridings has been a director of the Company since its inception and
was a director of SubMicron from March 1993 until the Merger. Since March 1990,
Mr. Ridings has been a Managing Director for Alex. Brown & Sons. From June 1986
to March 1990, Mr. Ridings was a Managing Director for Drexel Burnham Lambert,
investment bankers. Mr. Ridings is also a director of Noodle Kidoodle, Inc., New
Valley Corporation, Norex Industries, Inc., Telemundo Group, Inc., Search
Capital Group, Inc. and TransCor Waste Services Inc. Mr. Ridings received

                                       -7-
<PAGE>   10
an M.B.A. from Cornell University.

         Mr. Ferran became President, Chief Executive Officer and a director of
the Company in May 1997. Prior thereto, Mr. Ferran served as President and Chief
Executive Officer of Tylan General Corporation and its predecessor from 1984 and
as Chairman of its Board of Directors from February 1994 until February 1997,
when Tylan General was acquired. Mr. Ferran has a B.S. in Business
Administration from the University of New Hampshire.

         Mr. Levy, the founder of SubMicron, was SubMicron's Chairman of the
Board, President and Chief Executive Officer from its inception in 1988 until
the Merger. He assumed these positions with the Company upon consummation of the
Merger. Mr. Levy remains Chairman of the Board and also served as President and
Chief Executive Officer of the Company until May 1997. In addition, Mr. Levy was
Treasurer of the Company from the Merger until December 1995. Prior to his
founding of SubMicron, Mr. Levy was Vice President--Automation Division of Dexon
from February 1988 to November 1988 and Vice President, Sales and Marketing of
Dexon, from November 1985 to February 1988. From 1983 to 1985, Mr. Levy was Vice
President of Sales and Marketing for Micro Air Systems and from 1978 to 1982, he
was head of the Manufacturing Systems and Procedures Group for Signetics
Corporation. Mr. Levy has a B.S. degree in Mechanical Engineering from Pontifica
Universidade Catolica and an MBA from John F. Kennedy University of Orinda,
California.

         Mr. Weisberg was a director of SubMicron from its inception until the
Merger and became a director of the Company upon consummation of the Merger. Mr.
Weisberg was Vice President, Research and Engineering for Honeywell Inc. from
1980 until his retirement at the end of 1994. Prior to joining Honeywell, Mr.
Weisberg served as Director of Electronics and Physical Sciences in the Office
of the Secretary of Defense of the United States Department of Defense.
Previously, Mr. Weisberg was Vice President and Director of the Central Research
Laboratory of Itek Corporation and was Director of the Semiconductor Device
Research Laboratory of RCA Laboratories. Mr. Weisberg has a B.A. in Physics from
Clark University and an M.A. in Physics from Columbia University.

MEETINGS AND COMMITTEES OF THE BOARD OF DIRECTORS

         During 1996, the Board of Directors held five formal meetings. The
Board has an Audit Committee and a Compensation Committee. The Audit Committee,
which held three formal meetings during 1996, reviews the Company's internal
controls and handles matters relating to the Company's independent auditors. The
Compensation Committee, which held one meeting during 1996, considers and
determines compensation issues involving the Company's executive officers and
oversees the compensation of other employees of the Company. The Compensation
Committee also administers the Company's Amended and Restated 1991 Stock Option
Plan, the 1993 Executive Stock Option Plan and the Employee Stock Purchase Plan.
Messrs. Weisberg and Ridings are currently the members of the Compensation
Committee, the Stock Option Committee and the Audit Committee. During 1996, the
Board established a Nominating Committee to assist the Board in finding
qualified individuals to serve as directors. The Nominating Committee will
review background information on candidates, make recommendations to the Board
regarding such candidates and review and make recommendations to the Board for
any candidates that may be

                                       -8-
<PAGE>   11
proposed by stockholders. Messrs. Levy, Weisberg and Ridings are members of the
Nominating Committee.

         All directors, other than Mr. Molinaro, attended more than 75% of the
aggregate of the total number of meetings of the Board of Directors and meetings
held by all committees of the Board of Directors on which they served.

COMPENSATION OF DIRECTORS

         Each director who is not an officer or employee of the Company or its
subsidiaries receives $1,500 for each meeting of the Board he attends. In
addition, under the Company's 1995 Stock Option Plan for Non-Employee Directors,
each non-employee director receives an option to purchase 5,000 shares of Common
Stock upon election to the Board and an annual grant of an option to purchase
3,000 shares of Common Stock on the day following the Company's Annual Meeting
of Stockholders (or on June 30 if the Annual Meeting has not been held by such
date). The exercise price for options granted under such Plan is the fair market
value of a share of Common Stock on date of grant. Such options generally become
exercisable eleven months after the date of grant and terminate five years from
the date of grant.


                                       -9-
<PAGE>   12
              APPROVAL OF AMENDMENT TO EMPLOYEE STOCK PURCHASE PLAN

                             (ITEM 2 ON PROXY CARD)

         At the 1995 annual meeting, the Company's stockholders approved the
Submicron Systems Corporation 1994 Employee Stock Purchase Plan (the "Stock
Purchase Plan"). The Stock Purchase Plan was adopted to provide employees of the
Company and its subsidiaries with a method of acquiring an equity interest in
the Company through the purchase of shares of Common Stock, at discounted
prices, using payroll deductions. As initially approved, the Stock Purchase Plan
provided for the issuance of up to 300,000 shares of Common Stock. As of the end
of 1996, 83,613 shares remained available for issuance for the Stock Purchase
Plan. Accordingly, the Board has approved and recommended that the Company's
shareholders approve an amendment to the Stock Purchase Plan to increase the
aggregate maximum number of shares subject tot he Stock Purchase Plan from
300,000 to 500,000 shares. Although the Stock Purchase Plan is an "employee
stock purchase plan" within the meaning of Section 423 of the Internal Revenue
Code of 1986 (the "Code"), the Stock Purchase Plan is not a "qualified deferred
compensation plan" under Section 401(a) of the Code and is not subject to the
provisions of the Employee Retirement Income Security Act of 1974 ("ERISA").

         The material features of the Stock Purchase Plan are as follows:

         - NUMBER OF SHARES. The aggregate maximum number of shares reserved for
issuance under the Stock Purchase Plan will be increased to 500,000 shares if
the amendment is approved, subject to adjustment upon the occurrence of stock
dividends, stock splits, recapitalization or certain other capital adjustments
that change the number of outstanding shares of Common Stock.

         - ADMINISTRATION AND OPERATION. The Stock Purchase Plan is administered
by the Compensation Committee. No member of the Board who is eligible to
participate in the Stock Purchase Plan may be a member of that Committee. All
questions of interpretation or application of the Stock Purchase Plan are
determined by the Board of Directors, whose decisions are final and binding upon
all participants.

         The Stock Purchase Plan has overlapping two-year offering periods that
begin each January 1 and July 1. Each offering period includes four six-month
purchase periods. Purchases under the Stock Purchase Plan are made each June 30
and December 31 at a purchase price per share of Common Stock equal to 85% of
the fair market value of a share of Common Stock on either the first day of the
applicable offering period or on the day of purchase, whichever is lower. In the
event the fair market value is lower on the date of purchase, the applicable
offering period will terminate on such purchase date, and a new offering period
will commence on the next day (January 1 or July 1, as the case may be). The
fair market value of the Common Stock is determined in relation to market price
in accordance with certain procedures set forth in the Stock Purchase Plan. No
fractional shares will be purchased, and any remaining cash will automatically
stay in the employee's account until the next purchase date (unless the employee
withdraws from the Stock Purchase Plan, in which case the cash will be returned
to the employee).

         An eligible employee may authorize payroll deductions from 1% to 10% of
such employee's compensation (subject to a lower limit as may be established by
the Stock Purchase Plan Committee).

                                      -10-
<PAGE>   13
At the end of each six-month purchase period, the deductions are applied to the
purchase of Common Stock.

         All funds received are held by the Company under the Stock Purchase
Plan, are general assets of the Company, free of any trust or other restriction,
and may be used for any corporate purpose. No interest on such funds will be
credited to or paid to any participant under the Stock Purchase Plan.

         - ELIGIBILITY. Any regular employee of the Company and its
participating subsidiaries whose customary employment is at least 20 hours per
week and more than five months per year is eligible to participate in the Stock
Purchase Plan, beginning with the first offering period following the six-month
anniversary of such employee's date of hire. As of May 31, 1997, approximately
600 employees would have been eligible to participate in the Stock Purchase
Plan.

         - LIMITATIONS ON PARTICIPATION AND AMOUNT PURCHASED. No employee may
participate in the Stock Purchase Plan to the extent that such employee would be
entitled to purchase more than $25,000 in fair market value of Common Stock
under all employee stock purchase plans of the Company in any calendar year. The
maximum number of shares any participant may purchase during any six-month
purchase period is determined by dividing $12,500 by the fair market value of a
share of Common Stock on the first day of the purchase period. In addition, no
employee may participate in the Stock Purchase Plan to the extent that such
employee would own stock possessing 5% or more of the total combined voting
power or value of all classes of stock of the Company, after giving effect to
such purchase.

         - PAYMENT. An employee pays for the shares purchased under the Stock
Purchase Plan by making contributions through payroll deductions of up to 10%
(or such lower percentage as may be set by the Board of Directors or the Stock
Purchase Plan Committee), but not less than 1% of an employee's compensation,
subject to the limits described above. Employees may not make cash contributions
to the Stock Purchase Plan in addition to their payroll deductions. The employee
must be employed on the purchase date to purchase shares of Common Stock, and if
employment terminates for any reason, including retirement or death, the
employee will be withdrawn from the Stock Purchase Plan immediately and the
payroll deductions credited to the employee's account will be returned to the
employee, without interest.

         - INCREASING AND DECREASING DEDUCTIONS; WITHDRAWAL; RESTRICTION ON
TRANSFERABILITY. An employee may decrease, but not increase, the rate of payroll
deductions at any time during an offering period by submitting a new
subscription agreement. The employee may increase the rate of payroll deductions
for upcoming offering periods only during the two-week period before the start
of a new purchase period. The number of times the employee may change such
deductions may be limited, however, by the Board of Directors or the Stock
Purchase Plan Committee. An employee may withdraw from the Stock Purchase Plan
at any time by completing a notice of withdrawal and submitting it to the
Company prior to the end of a purchase period. The employee's rights to purchase
shares under the Stock Purchase Plan are not transferable.


                                      -11-
<PAGE>   14
         - TREATMENT OF SHARES PURCHASED. The shares purchased by an employee
under the Stock Purchase Plan will be held in an investment account, with the
employee having the right at any time to withdraw all or any portion of the
shares credited to the employee's account by giving written notice to the
Company. If, however, the shares remain in the employee's investment account,
any cash dividends paid with respect to the shares will be retained and used to
purchase additional shares under the Stock Purchase Plan, subject to the
provisions and limitations of the Stock Purchase Plan.

         - AMENDMENTS TO AND TERMINATION OF THE PLAN. Subject to the provisions
of the Stock Purchase Plan, the Board of Directors may amend or terminate the
Stock Purchase Plan, except that certain amendments, such as increasing the
number of shares subject to the Stock Purchase Plan, require approval of the
Company's stockholders. Unless earlier terminated, the Stock Purchase Plan will
continue in effect until December 31, 2004.

         - FEDERAL INCOME TAX ASPECTS. The ability of employees to purchase
stock under a stock purchase plan is treated as a type of stock option right,
where the option is viewed as granted at the beginning of an offering period,
and where the exercise of the option occurs on the date the stock is purchased
under the terms of the Stock Purchase Plan. The federal income tax consequences
of the grant and exercise of stock options under an employee stock purchase plan
(as defined in Section 423 of the Code) and the subsequent disposition of shares
acquired under such options are summarized below.

         The employee is not taxed at the time of the grant of stock options or
when shares are purchased pursuant to the exercise of the options under the
Stock Purchase Plan.

         Upon the sale of shares acquired under the Stock Purchase Plan, any
gain up to the 15% discount on the purchase price is taxable as ordinary
compensation income, and any further gain will be taxable as a long-term capital
gain and any loss will be treated as a long-term capital loss, provided that
such shares are not sold within two years of the beginning of the offering
period during which the shares were purchased nor within one year from the date
such shares were purchased.

         If the holding period requirements for such shares are not satisfied,
the difference between the price paid by the employee and the market value of
the shares on the date of purchase is taxable as ordinary income in the year of
the disposition and the difference between the amount received by the employee
on the disposition of the shares and the market value of the shares as the date
of purchase is treated as a capital gain or loss (long-term capital gain or loss
if the shares have been held more than one year).

         In addition, if the holding period requirements are not met, the
Company will be entitled to a tax deduction equal to the difference between the
price paid by the employee and the market value of the shares at the date of
purchase. If the holding period requirements are met, the Company will not be
entitled to such a deduction.


                                      -12-
<PAGE>   15
         - STOCK PURCHASE PLAN BENEFITS. The proposed amendment would not change
the benefits available under the Stock Purchase Plan as now in effect. The
number of shares of Common Stock which would be purchased during the Company's
1997 fiscal year is not determinable because purchase prices will not be set
until the end of each offering period and the level of participation may
fluctuate during the course of the year. Two of the Named Executives, Messrs.
Levy and Molinaro, are not eligible to participate in the Stock Purchase Plan
because they each own shares of Common Stock representing more than 5% of the
voting power of the Common Stock.

         During 1996, the other two Named Executives, Messrs. Holmes and Hajjar,
participated in the Stock Purchase Plan and purchased 822 and 3,949 shares of
Common Stock, respectively, with an aggregate dollar difference between the
purchase price and the Fair Market Value of the shares ("Aggregate Dollar
Difference") of $2.13 for each share purchased. The Company has no executive
officers other than the Named Executives. Nonexecutive officer employees
(approximately 250 persons) purchased 140,959 shares of Common Stock having
an Aggregate Dollar Difference of $1.64 for each share purchased. Nonemployee
directors are not entitled to participate in the Stock Purchase Plan.

         The affirmative vote of a majority of the votes cast at the meeting in
person or by proxy is required to approve the amendment. THE BOARD OF DIRECTORS
RECOMMENDS VOTING "FOR" APPROVAL OF THE AMENDMENT TO THE STOCK PURCHASE PLAN.


               APPROVAL OF AMENDMENTS TO THE COMPANY'S 1991 AMENDED
                         AND RESTATED STOCK OPTION PLAN

                             (ITEM 3 ON PROXY CARD)

         The Company's 1991 Amended and Restated Stock Option Plan (the "Stock
Option Plan") was adopted to recognize the contributions made to the Company and
its affiliates by their respective employees, directors, consultants and
advisors, to provide those individuals with additional incentive to devote
themselves to the future success of the Company and to improve the ability of
the Company to attract, retain and motivate individuals upon whom the sustained
growth and financial success of the Company depends. The Stock Option Plan
provides for the grant of options ("Options") to purchase shares of Common
Stock. At the 1995 annual meeting, the stockholders approved certain amendments
to the Stock Option Plan including an increase in the aggregate maximum number
of shares of Common Stock for which Options may be granted to 1,500,000 shares.
As of May 30, 1997, there were no further shares available for grant pursuant
to the Stock Option Plan. Accordingly, the Board of Directors has approved and
recommends that the Company's stockholders approve an amendment to the Stock
Option Plan to increase the aggregate maximum number of shares of Common Stock
for which Options may be granted from 1,500,000 to 4,000,000 shares which, if
the amendments are approved, will include an option to purchase 1,000,000
shares as described below. The closing sale price for a share of Common Stock 
on June __, 1997 was $____ as reported by the Nasdaq National Market.

         The proposed amendments to the Stock Option Plan also increase the
aggregate maximum number of shares of Common Stock for which Options may be
granted to any participant in any fiscal year (the "Individual Limit") from
500,000 shares to 1,000,000 shares. The Individual Limit is designed to address
provisions in the Code which provide that publicly-held corporations may not
generally deduct compensation for the Chief Executive Officer and certain other
executive officers to the extent that such compensation exceeds $1,000,000 in a
fiscal year for any of such executives (the "Million Dollar Cap"). Compensation
which is "performance based," however, is not counted as part of the Million
Dollar Cap. In connection with the employment of David Ferran as the Company's
new President and Chief Executive Officer, the Board of Directors granted Mr.
Ferran an option to purchase 1,000,000 shares of Common Stock at the fair market
value of the Common Stock on the date of grant. The proposed increase in the
Individual Limit, if approved by the Stockholders, is intended to permit income
attributable to such Options to be treated as "performance-based" compensation
and, therefore, exempt from the Million Dollar Cap. In the event the amendments
are not approved by the stockholders, Mr. Ferran's option will be outside of the
Stock Option Plan and subject to the Million Dollar Cap.

         Grants under the Plan currently may be transferred, other than by will
or the laws of descent and distribution, only pursuant to a "qualified domestic
relations order" within the meaning of the Code and the Employee Retirement
Income Security Act of 1974 ("ERISA"). If the amendments are approved, option 
grants may also permit the transfer of Options to the optionee's spouse, 
children or grandchildren or to a trust created solely for the benefit of the
optionee and the foregoing persons.

         The key provisions of the Stock Option Plan, as proposed to be amended,
are as follows:

         - NUMBER OF SHARES. The aggregate maximum number of shares that may be
issued under the Stock Option Plan will be increased to 4,000,000 if the
amendment is approved, subject

                                      -13-
<PAGE>   16
to adjustment upon the occurrence of a stock dividend, stock split,
recapitalization or certain other capital adjustments. If any shares subject to
any Option are forfeited, or an Option is terminated without issuance of shares,
the shares subject to such Option will again be available for grant pursuant to
the Stock Option Plan.

         - ADMINISTRATION. The Stock Option Plan is administered by a committee
(the "Committee") designated by the Board of Directors; provided, however, the
Board may designate two committees to administer the Stock Option Plan, one of
such committees to administer the Plan with respect to each person who is an
officer of the Company or an affiliate within the meaning of the rules
promulgated under the Securities Exchange Act of 1934 (the "Exchange Act") and
the other committee to be comprised of directors (which may include directors
who are also employees of the Company) to administer the Plan with respect to
all other persons.

         - ELIGIBILITY. All employees and directors of the Company and its
subsidiaries and consultants and advisors to the Company and its subsidiaries
are eligible to receive Options. As of May 31, 1997, there were approximately
640 eligible employees. Consultants and advisors must have rendered bona fide
services, and such services must not be in connection with a capital raising
transaction.

         - TERM OF STOCK OPTION PLAN. No Options may be granted under the Stock
Option Plan after June 9, 2001.

         - OPTIONS. Options granted under the Stock Option Plan may be either
incentive stock options ("ISOs") or non-qualified stock options. ISOs are
intended to qualify as "incentive stock options" within the meaning of Section
422 of the Code. Unless an Option is specifically designated at the time of
grant as an ISO, the Option will be non-qualified. Options are not transferrable
by the optionee except by will or by the laws of descent and distribution or
pursuant to a qualified domestic relations order. If the amendments are
approved, Options to purchase more than 1,000,000 shares (rather than 500,000
shares) may not be issued to any participant in any fiscal year.

         - EXERCISE PRICE. The exercise price of Options will be determined by
the Committee, provided that the exercise price of an ISO will be at least 100%
of the fair market value of a share of Common Stock on the date the Option is
granted, or at least 110% of the fair market value of a share of Common Stock on
the date an ISO is granted if the recipient owns, directly or by attribution
under Section 424(d) of the Code, shares possessing more than 10% of the total
combined voting of all classes of stock of the Company. The term of each Option
is fixed by the Committee. The aggregate fair market value, determined as of the
time of grant, of the shares of Common Stock with respect to which an ISO is
exercisable for the first time by the recipient during any calendar year (under
all incentive stock option plans of the Company or an affiliate) may not exceed
$100,000.

         - TERMINATION OF OPTIONS. All Options terminate on the earliest of: (a)
the expiration of the term specified in the Option, which may not exceed ten
years from the date of grant; (b) the expiration of three months from the date
an optionee's employment or service with the Company or its subsidiaries
terminates for any reason other than disability, death or as set forth in
clauses (d) and (e) below; (c) the expiration of one year from the date an
optionee's employment or service with the Company or its subsidiaries terminates
by reason of disability or death; (d) the date on which a

                                      -14-

<PAGE>   17
determination is made by the Committee that the optionee has breached his or her
employment or service contract with the Company or its subsidiaries, has been
engaged in any sort of disloyalty to the Company or its subsidiaries or has
disclosed trade secrets or confidential information of the Company or its
subsidiaries; or (e) the date set by the Committee to be an accelerated
expiration date in the event of a Change of Control (as defined below). The
Committee, in its discretion, may provide for additional limitations on the
terms of any Option.

         - TRANSFERS. No Option granted under the Stock Option Plan may be
transferred, except by will or the laws of descent and distribution, other than
pursuant to a "qualified domestic relations order," within the meaning of the
Code and ERISA. In addition, if the amendments are approved, option grants may
permit the transfer of an Option to the optionee's spouse, children or
grandchildren or a trust created solely for the benefit of the optionee and the
foregoing persons.

         - PAYMENT. An optionee may pay for shares covered by an Option in cash,
certified check, payment through a broker in accordance with Regulation T of the
Federal Reserve Board or by such other mode of payment as the Committee may
approve, including payment in whole or in part in shares of Common Stock held by
the optionee for at least six months.

         - PROVISIONS RELATING TO A CHANGE OF CONTROL. Upon the occurrence of a
Change of Control, all Options become immediately exercisable, and the Committee
may take whatever action with respect to Options outstanding as it deems
necessary or desirable, including acceleration of the expiration or termination
date of the date of the Options.

         A Change of Control will occur upon requisite approval by stockholders
(or, if such approval is not required, by the Company's Board of Directors) of a
plan of liquidation or dissolution or the sale of substantially all of the
assets of the Company. Subject to certain exceptions, a Change of Control will
also occur upon requisite approval by the Company's and the other constituent
corporation's stockholders (or, if such approval is not required, by the
Company's Board of Directors) of the merger or consolidation of the Company with
or into such other constituent corporation. In addition, a Change of Control
will occur if certain entities, persons or groups specified in the Stock Option
Plan have become beneficial owners of or have obtained voting control over more
than 30% of the outstanding shares of Common Stock or the first date upon which
a majority of the Company's Board of Directors consists of persons who have been
members of the Board of Directors for less than two years, unless the nomination
for election of each new director who was not a director at the beginning of
such period was approved by a vote of at least two-thirds of the directors then
still in office who were directors at the beginning of such period.

         - AMENDMENTS. The Board of Directors may amend the Stock Option Plan
from time to time in such manner as it may deem advisable. Nevertheless, the
Board of Directors may not, without obtaining stockholder approval within 12
months before or after such action, change the class of individuals eligible to
receive an ISO or increase the maximum number of shares for which Options may be
granted or make any other change or amendment as to which stockholder approval
is required in order to satisfy the conditions set forth in the rules
promulgated under the Exchange Act.

         - FEDERAL INCOME TAX CONSEQUENCES. The following discussion is a
summary of certain federal income tax consequences of the issuance of Options
and the acquisition of shares of Common Stock by exercising Options under the
Stock Option Plan and does not present a complete analysis of all federal tax
consequences which may be relevant to any particular recipient. It also does not
purport to discuss state or local income tax laws.

         A recipient of an ISO will not recognize taxable income upon either the
grant or exercise of

                                      -15-
<PAGE>   18
an ISO. The optionee will recognize long-term capital gain or loss on a
disposition of the shares acquired upon exercise of an ISO, provided the
optionee does not dispose of those shares within two years from the date the ISO
was granted or within one year after the shares were transferred to such
optionee. Currently, for regular federal income tax purposes, long-term capital
gain is taxed at a maximum rate of 28%, while ordinary income may be subject to
a maximum rate of 39.6%. If the optionee satisfies both of the foregoing holding
periods, the Company will not be allowed a deduction by reason of the grant or
exercise of an ISO.

         As a general rule, if the optionee disposes of the shares before
satisfying both holding period requirements (a "disqualifying disposition"), the
gain recognized by the optionee on the disqualifying disposition will be taxed
as ordinary income to the extent of the difference between (a) the lesser of the
fair market value of the shares on the date of exercise or the amount received
for the shares in the disqualifying disposition, and (b) the adjusted basis of
the shares, and the Company will be entitled to a deduction in that amount. The
gain (if any) in excess of the amount recognized as ordinary income on a
disqualifying disposition will be long-term or short-term capital gain,
depending on the length of time the optionee held the shares prior to the
disposition.

         The amount by which the fair market value of a share at the time of
exercise exceeds the option price will be included in the computation of such
optionee's "alternative minimum taxable income" in the year the optionee
exercises the ISO. Currently, the alternative minimum tax is imposed at the rate
of 26% or 28%. If an optionee pays alternative minimum tax with respect to the
exercise of an ISO, the amount of such tax paid will be allowed as a credit
against regular tax liability in subsequent years.

         A recipient of a non-qualified stock option will not recognize taxable
income at the time of grant, and the Company will not be allowed a deduction by
reason of the grant. Such an optionee will recognize ordinary income in the year
in which the non-qualified stock option is exercised, in an amount equal to the
excess of the fair market value of the shares at the time of exercise over the
exercise price of the Option, and the Company will be allowed a deduction in
that amount. Upon disposition of the shares, an optionee will recognize
long-term or short-term capital gain or loss, depending upon the length of time
the shares were held prior to disposition, equal to the difference between the
amount realized on disposition and the optionee's basis in the shares (which
basis ordinarily is the fair market value of the shares on the date the Option
was exercised).

         - STOCK OPTION PLAN BENEFITS. The Stock Option Plan as proposed to be
amended would not change the benefits available under the Stock Option Plan as
now in effect. The number of Options which may be granted for 1997 under the
Stock Option Plan is at the discretion of the Committee and not determinable.
For 1996, information regarding the grants of Options to the Named Executives is
set forth under the caption "Executive Compensation--Stock Option Grants." The
Named Executives are the only executive officers of the Company. Nonemployee
directors received no Options under the Stock Option Plan during 1996, and 133 
nonexecutive officer employees of the Company received Options to purchase an
aggregate of approximately 890,000 shares of Common Stock at prices ranging
from $5.00 to $11.25.

                                      -16-
<PAGE>   19
         The affirmative vote of a majority of the votes cast at the meeting in
person or by proxy is required to approve the amendment. THE BOARD OF DIRECTORS
RECOMMENDS VOTING "FOR" APPROVAL OF THE AMENDMENT TO THE STOCK OPTION PLAN.


                    AMENDMENT OF CERTIFICATE OF INCORPORATION
         TO INCREASE THE AUTHORIZED NUMBER OF SHARES OF PREFERRED STOCK

                             (ITEM 4 ON PROXY CARD)

         Article FOURTH of the Company's Certificate of Incorporation, as
amended, currently fixes the authorized capital of the Company at 100,000,000
shares of Common Stock and 5,000 shares of Preferred Stock. The authorized
Preferred Stock is "blank check" Preferred Stock which, subject to applicable
law and any stock exchange or Nasdaq requirements, may be issued with such
designations, rights and preferences as may be determined from time to time by
the Company's Board of Directors, without further stockholder approval. The
Board of Directors believes that such blank check Preferred Stock is a common
feature of many public companies and provides flexibility in efforts to raise
additional capital and other corporate purposes. Of the currently authorized
5,000 shares of Preferred Stock, as of April 30, there were issued and
outstanding 1,302.85 shares of Series A Preferred Stock, and there remained
available for issuance 3,697.15 shares of Preferred Stock, with such
designations, preferences and rights as the Board of Directors may determine
from time to time.

         If the amendment is approved by the stockholders, the first paragraph
of Article FOURTH would be amended to read as follows:

         FOURTH (a) The Corporation shall be authorized to issue the following
shares:

<TABLE>
<CAPTION>
                Class                     Number of Shares                            Par Value
                -----                     ----------------                            ---------
                <S>                       <C>                                         <C>
                COMMON                     100,000,000                                 .0001
                PREFERRED                    1,000,000                                   .01
</TABLE>

         While the Company does not have any commitments or understanding at
this time for the issuance of any additional shares of Preferred Stock, the
Board believes that it is desirable to have the additional shares available for
possible future use for financing, acquisitions or other purposes not now
foreseeable. The authorization of additional shares of Preferred Stock would
not, by itself, have any effect on the rights of the holders of the outstanding
Common Stock or Series A Preferred Stock. The issuance of additional shares
authorized by the amendment may, among other things, have a dilutive effect on
earnings per share and on the equity and voting power of those holding shares of
the Company's stock at the time of issuance. In addition, the increase in
authorized shares could, under certain circumstances, have an anti-takeover
effect by, for example, allowing issuance of shares that would dilute the stock
ownership of a person seeking to effect a change in the composition of the Board
or contemplating a tender offer or other transaction for the combination of the
Company with another company. However, this proposal is not being made in
response to any effort of which the Company is aware to accumulate the Common
Stock or obtain control of the Company.

                                      -17-
<PAGE>   20
         The affirmative vote of a majority of all votes eligible to be cast at
the meeting is required for approval of the amendment. THE BOARD OF DIRECTORS
RECOMMENDS THAT THE STOCKHOLDERS VOTE "FOR" APPROVAL OF THE AMENDMENT TO THE
CERTIFICATE OF INCORPORATION.


                 PROPOSAL TO APPROVE THE CONVERTIBILITY FEATURE
               OF THE COMPANY'S 8% SUBORDINATED CONVERTIBLE NOTES
                               DUE MARCH 26, 2002

                             (ITEM 5 ON PROXY CARD)

         Effective March 26, 1997, in a negotiated transaction, the Company
issued and sold $8,692,028 principal amount of its 8% Convertible Subordinated
Notes due March 26, 2002 (the "Notes") and 1,302.85 shares of its Series A
Convertible Non-Redeemable Preferred Stock (the "Preferred Stock"), in
retirement of $18,350,000 principal amount of the Company's 9% Convertible
Subordinated Notes due December 1997 (the "9% Notes") and associated warrants
held by such persons. The Board of Directors believes it was in the Company's
best interests to consummate the transaction, the result of which substantially
reduced the annual cash interest payments required to be made by the Company
(approximately $1.7 million annual interest payment on the 9% Notes compared to
approximately $754,000 annual interest payment on the Notes); reduced the
non-cash amortization charges related to the discount on the 9% Notes and
deferred debt issuance costs; and substantially reduced the short-term
indebtedness of the Company.

           The Preferred Stock is convertible on a 2,000-for-1 basis into
2,605,700 shares of Common Stock (an equivalent of $3.70 per share of Common
Stock at the time of issuance, a premium to the fair market value of the Common
Stock at such time). Until converted, the Preferred Stock is entitled to vote
with the Common Stock and is entitled to one vote for each share of Common Stock
into which such share or fraction of a share of Preferred Stock is convertible.

         The Notes are not currently convertible. By their terms, the Notes will
become convertible into Common Stock only at such time as the Company's
stockholders approve their convertibility. If approved, the Notes will be
convertible at $3.70 per share into approximately 2,349,000 shares of Common
Stock (which conversion price also represented a premium to the fair market
value of the Common Stock at the time of the issuance of the Notes). The
conversion price of the Notes is subject to certain standard adjustments, such
as upon changes in capitalization and, on a weighted average basis, certain
issuances below the then applicable conversion price. In addition, the
conversion price of the Notes will be adjusted in March 1999, if the fair market
value of the Common Stock at such time is below the then applicable conversion
price, to the greater of the then fair market value of a share of Common Stock
and $2.50.

         The Common Stock is listed on the NASDAQ National Market, and as such
is subject to the rules and regulations of the National Association of
Securities Dealers, Inc. (the "NASD") applicable to the Nasdaq National Market.
The NASD has a rule for Nasdaq National Market companies requiring stockholder
approval for the sale by the Company of shares of Common Stock (or securities
convertible into or exercisable for Common Stock) equal to 20% or more of the
voting power of all shares of the Company if the sale price is less than the
greater of the book value or

                                      -18-
<PAGE>   21
market value of the stock. Since the aggregate number of shares underlying the
Notes together with the Common Stock underlying the Preferred Stock exceeds 20%
of the approximately 17 million shares of Common Stock outstanding at the time
of issuance of the securities, and the conversion price of the Notes, when
adjusted in 1999, could be less then the fair market value of the Common Stock
on the date of issuance (but not less than the fair market value at the time of
such adjustment), the Board of Directors believes it is necessary and desirable
for the Company at this meeting to obtain stockholder approval to the
convertibility feature of the Notes.

                  If the stockholders approve this proposal, the Notes will be
become convertible at any time thereafter into Common Stock at the then
applicable conversion price, and the Company has agreed to cause such Common
Stock to be saleable in the open market, subject to certain limitations.
Therefore, if the convertibility feature of the Notes is approved, the issuance
of the Common Stock underlying the Notes upon any conversion could under certain
circumstances have adverse effects on existing stockholders, including the
following: (i) substantial dilution to the equity and voting power of current
stockholders; and (ii) an adverse effect on the market price of the Common Stock
if large blocks of Common Stock underlying the Notes and Preferred Stock are
sold in the open market.

         If the stockholders of the Company do not approve the convertibility
feature of the Notes on or before January 31, 1998, there will be an Event of
Default under the terms of the Notes, and the holders of the Notes shall have
the right to cause the then outstanding principal balance plus accrued interest
to become immediately due and payable, subject to the subordination rights in
favor of the Company's principal lending institutions, and the interest rate
will increase from 8% to 10%. The Board of Directors believes that such
consequence could have a material adverse effect on the Company and therefore
believes it is in the best interests of the Company and its stockholders for the
stockholders to approve the convertibility feature of the Notes. In addition,
if the convertibility feature of the Notes is approved, any Notes so converted
will reduce the Company's indebtedness and interest expense.

         The affirmative vote of the majority of the votes cast in the meeting
in person or by proxy is required to approve the above proposal. THE BOARD OF
DIRECTORS RECOMMENDS VOTING "FOR" APPROVAL OF THE CONVERTIBILITY FEATURE OF THE
NOTES.


                         RATIFICATION OF THE APPOINTMENT
                        OF INDEPENDENT PUBLIC ACCOUNTANTS

                             (ITEM 6 ON PROXY CARD)

         As previously reported, on December 18, 1996, the Company and Arthur
Andersen LLP ("Andersen"), its previous independent public accounts, mutually
agreed to terminate their relationship. Andersen audited the Company's financial
statements for fiscal 1994 and 1995. The report of Andersen on the Company's
consolidated financial statements for fiscal 1994 and 1995 did not contain an
adverse opinion or a disclaimer of opinion and was not qualified or modified as
to uncertainty, audit scope or accounting. The mutual decision of the Company
and Andersen to terminate the relationship with Andersen as the Company's
independent public accountants was approved by the Audit Committee of the
Company's Board of Directors and unanimously approved by the Board of Directors.

                                      -19-
<PAGE>   22
         During the audit of the 1995 consolidated financial statements of the
Company, there was a matter of discussion and disagreement which, if not
resolved to the satisfaction of Andersen, would have caused it to make reference
to the subject matter in its report. Such matter concerned the recognition of
revenue on certain "bill and hold" transactions with customers, including the
original reporting of certain revenues in the 1995 third quarter. This matter
was resolved to the satisfaction of Andersen and the 1995 third quarter
financial statements were restated for this matter. Management of the Company,
including the Chairman and Chief Executive Officer and the Chief Financial
Officer, discussed this matter with Andersen. The Audit Committee of the Board
of Directors also discussed this matter with Andersen. The Company has
authorized Andersen to respond fully to the inquiries of any successor
accountant concerning the subject matter of its disagreement with Andersen.

         On December 18, 1996, the Company determined to engage Ernst & Young
LLP ("Ernst & Young") as its new independent accountant to audit its
consolidated financial statements for fiscal 1996. Prior to determining to
engage Ernst & Young, the Company had not consulted Ernst & Young on any
accounting matters during the two most recent fiscal years or any subsequent
interim period.

         Subject to stockholder ratification, the Board of Directors, upon
recommendation of the Audit Committee, has reappointed Ernst & Young LLP to
serve as the Company's independent public accountants for the current fiscal
year. If the stockholders do not ratify this appointment by the affirmative vote
of a majority of the votes cast at the meeting, other independent public
accountants will be considered by the Board upon recommendation of the Audit
Committee.

         A representative of Ernst & Young LLP is expected to be present at the
meeting. Such representative will have the opportunity to make a statement if he
desires to do so and will be available to respond to appropriate questions.

         The affirmative vote of a majority of votes cast at the meeting in
person or by proxy is required to ratify the appointment of Ernest & Young LLP.
THE BOARD OF DIRECTORS RECOMMENDS VOTING "FOR" RATIFICATION OF THE APPOINTMENT
OF ERNST & YOUNG.

                                      -20-
<PAGE>   23
                             EXECUTIVE COMPENSATION

SUMMARY COMPENSATION TABLE

         The following table sets forth the cash compensation paid by the
Company as well as certain other compensation paid or accrued during fiscal
1994, 1995 and 1996 to David F. Levy, the Company's Chief Executive Officer, and
to each of the Company's three other executive officers during 1996
(collectively, the "Named Executives"):

<TABLE>
<CAPTION>
- --------------------------------------------------------------------------------------------------
                                                              ANNUAL COMPENSATION

                                          --------------------------------------------------------
         NAME AND                                                                 OTHER ANNUAL
    PRINCIPAL POSITION          FISCAL          SALARY           BONUS            COMPENSATION
                                 YEAR            ($)              ($)               ($) (1)
- --------------------------------------------------------------------------------------------------
<S>                           <C>           <C>              <C>             <C>
David F. Levy,                1996          360,000          34,000          47,617(2)
Chairman of the               1995          340,000          46,320           ____
Board, President              1994          300,000           ____            ____
and Chief
Executive Officer
- --------------------------------------------------------------------------------------------------
R. G. Holmes,                 1996          150,000           ____           23,894(2)
Chief Financial               1995          75,000(3)         ____            ____
Officer and
Treasurer
- --------------------------------------------------------------------------------------------------
Daniel G. Hajjar,             1996          150,000          15,000           ____
Chief Operating               1995          150,000           ____            ____
Officer
- --------------------------------------------------------------------------------------------------
James S.                      1996          340,000          34,000           ____
Molinaro,                     1995          340,000          46,320           ____
President,                    1994          300,000           ____            ____
SubMicron
==================================================================================================
</TABLE>
<TABLE>
<CAPTION>
- --------------------------------------------------------------------------------
                                     LONG-TERM
                                   COMPENSATION
                            ---------------------------
         NAME AND                                              ALL OTHER
    PRINCIPAL POSITION                AWARDS                 COMPENSATION
                            ---------------------------           ($)
                                    OPTIONS (#)
- --------------------------------------------------------------------------------
<S>                            <C>                      <C>
David F. Levy,                 73,000                    ____
Chairman of the                55,000                    ____
Board, President                ____                     ____
and Chief
Executive Officer
- --------------------------------------------------------------------------------
R. G. Holmes,                  20,000                    ____
Chief Financial                20,000                    ____
Officer and
Treasurer
- --------------------------------------------------------------------------------
Daniel G. Hajjar,              36,500                    ____
Chief Operating                40,000                    ____
Officer
- --------------------------------------------------------------------------------
James S.                       25,000                    ____
Molinaro,                      45,000                    ____
President,                     ____                      ____
SubMicron
================================================================================
</TABLE>
- --------------------------

(1)      Except as noted below, none of the Named Executives received any other
         annual compensation not categorized as salary or bonus except for
         perquisites and other personal benefits which in the aggregate did not
         exceed the lesser of $50,000 or 10% of the total annual salary and
         bonus reported for such Named Executive.
(2)      Includes automobile reimbursement of $24,042 and $23,894 for Messrs.
         Levy and Holmes, respectively.
(3)      Mr. Holmes joined the Company in June 1995.


                                      -21-
<PAGE>   24
STOCK OPTION GRANTS

         The following table contains information concerning grants of stock
options under the Stock Option Plan to the Chief Executive Officer and to each
of the other Named Executives during 1996. The Company does not have any plan
pursuant to which stock appreciation rights ("SARs") may be granted.

                              OPTION GRANTS IN 1996

<TABLE>
<CAPTION>
                                                                                                     Potential Realizable Value at
                                                                                                     Assumed Annual Rates of Stock
                                                                                                     Price Appreciation  for Option
                                                                Individual Grants                    Term (1)
                         -----------------------------------------------------------------------     ------------------------------
                         Number of
                         Securities            % of Total
                         Underlying            Options Granted
                         Options               to Employees in    Exercise Price    Expiration
Name                     Granted(#)(2)         1996               ($/Sh)            Date                   5%                 10%
- ----------------         -------------         ------------------ ---------------   ------------     --------------       ----------
<S>                      <C>                   <C>                <C>               <C>              <C>                  <C>
David F. Levy               50,000                4.8              8.875            3/14/06            279,250              707,250
                            23,000                2.2              8.50             3/25/06            123,050              311,650

R.G. Holmes                 20,000                1.9              9.625            1/30/06            121,100              306,700

Daniel G. Hajjar            25,000                2.4              9.625            1/30/06            151,375              383,375
                            11,500                1.1              8.50             3/25/06             61,525              155,825

James S. Molinaro           25,000                2.4              9.625            1/30/06            151,375              383,375
</TABLE>

- --------------------

(1)      Illustrates the value that might be realized upon exercise of options
         immediately prior to the expiration of their term, assuming specified
         compounded rates of appreciation on the Common Stock over the term of
         the options. Assumed rates of appreciation are not necessarily
         indicative of future stock performance.
(2)      All options granted vest on the first anniversary of their date of
         grant.


                                      -22-
<PAGE>   25
STOCK OPTION EXERCISES AND HOLDINGS

         The following table sets forth certain information regarding the stock
options exercised by each of the Named Executives during 1996 and the value of
options held by each of the Named Executives at December 31, 1996.

                       AGGREGATED OPTION EXERCISES IN 1996
                     AND OPTION VALUES AT DECEMBER 31, 1996

<TABLE>
<CAPTION>
=============================================================





                         SHARES                VALUE
                         ACQUIRED ON           REALIZED
NAME                     EXERCISE (#)          ($)
- -------------------------------------------------------------
<S>                      <C>                   <C>
David F. Levy            ____                  ____
- -------------------------------------------------------------
R. G. Holmes             ____                  ____
- -------------------------------------------------------------
Daniel G. Hajjar         ____                  ____
- -------------------------------------------------------------
James S.                 ____                  ____
Molinaro
=============================================================
</TABLE>

<TABLE>
<CAPTION>
=================================================================================================================
                         NUMBER OF UNEXERCISED                      VALUE OF UNEXERCISED
                         OPTIONS AT                                 IN-THE-MONEY OPTIONS
                         DECEMBER 31, 1996 (#)                      AT DECEMBER 31, 1996 ($)(1)
                         ----------------------------------------------------------------------------------------

NAME                     EXERCISABLE          UNEXERCISABLE         EXERCISABLE           UNEXERCISABLE
- -----------------------------------------------------------------------------------------------------------------
<S>                    <C>                    <C>                   <C>                   <C>
David F. Levy              323,125                73,000                  ____                    ____
- -----------------------------------------------------------------------------------------------------------------
R. G. Holmes                 5,000                35,000                  ____                    ____
- -----------------------------------------------------------------------------------------------------------------
Daniel G. Hajjar            35,000                49,000                  ____                    ____
- -----------------------------------------------------------------------------------------------------------------
James S.                   313,125                25,000                  ____                    ____
Molinaro
=================================================================================================================
</TABLE>

(1)      None of the Named Executives had outstanding options as of December 31,
         1996 with an exercise price below $4.125, the last sale price of the
         Common Stock on the Nasdaq National Market on December 31, 1996.

EMPLOYMENT CONTRACTS

         James S. Molinaro has entered into an employment agreement with the
Company which initially provided for  a base salary of $265,200, which base
salary may be increased or decreased from time to time in the sole discretion
of the Company's Board. In no event, however, may such base salary be less than
$240,000 per annum. For fiscal 1996, the base salary of Mr. Molinaro was fixed
at $340,000. The employment agreement has an initial five-year term expiring in
August 1998 that is automatically renewable at the end of such term for an
additional year and each year thereafter unless either party to the agreement
gives notice of nonrenewal. In addition, Mr. Molinaro is eligible to
participate in any bonus or profit sharing plan adopted by the Company and will
be afforded the use of a leased automobile, inclusive of maintenance and
insurance costs, during the term of his employment.
         
         In the event the Company should terminate the employment of Mr.
Molinaro without cause or if Mr. Molinaro should terminate his employment
because of a material breach by the Company of his employment agreement, Mr.
Molinaro
         
                                      -23-
<PAGE>   26
will be entitled to receive a severance benefit equal to his then annual base
salary for a period of three years. However, if such termination follows a
merger or sale of all or substantially all of the Company's assets, Mr.
Molinaro will be entitled to receive a severance benefit equal to his then
annual base salary for a period of five years.

         In May 1997, David F. Levy stepped down as President and Chief
Executive Officer of the Company. In connection therewith, in lieu of his
previous employment agreement (which was substantially similar to Mr.
Molinaro's agreement), Mr. Levy is entering into a new agreement which will
generally provide for Mr. Levy to be paid specified amounts until May 2000.

         David J. Ferran has entered into an Employment Agreement with the
Company which provides for him to earn a base salary of $333,333, which base
salary may be increased or decreased from time to time, but not to less than
$333,333. The Employment Agreement has no specific termination; provided,
however, in the event the Company terminates Mr. Ferran's employment without
"cause" or if he should terminate his employment because of "good reason" (each
as defined in the Agreement), Mr. Ferran shall be entitled to receive a lump sum
payment equal to the greater of (i) the amount, if any, by which $1,000,000
exceeds the total amount paid to Mr. Ferran in base salary under this Agreement
and (ii) the sum of his salary for 18 months at the rate in effect immediately
prior to such termination and an amount equal to the bonus actually paid to Mr.
Ferran for the preceding fiscal year. If such termination follows a "change in
control" (as defined in the Agreement), Mr. Ferran shall be entitled to the
amount set forth above plus certain additional amounts.

STOCK PERFORMANCE GRAPH

         The following graph compares the yearly percentage change in the
cumulative total stockholder return on the Common Stock during the five-year
period ended December 31, 1996, the cumulative total return on the CRSP Total
Return Index for The Nasdaq National Market (US Companies) and the H&Q
Technology Index during such period. The comparison assumes $100 was invested at
the beginning of such period in Common Stock and in each of the foregoing
indices and assumes the reinvestment of any dividends. Prior to the Merger on
August 31, 1993, the Common Stock was traded in the over-the-counter market on
the Nasdaq Small-Cap System under the symbol TICO. Since September 1, 1993, the
Common Stock has been traded under the symbol SUBM. From September 1, 1993 to
December 20, 1993, the Common Stock was traded on the Nasdaq Small-Cap System,
and since December 21, 1993, the Common Stock has been included in the Nasdaq
National Market.

<TABLE>
<CAPTION>
                                                        NASDAQ STOCK MARKET-
DATES        SUBMICRON SYSTEMS      H&Q TECHNOLOGY               U.S.
- -----        -----------------      --------------      --------------------
<S>             <C>                   <C>                    <C>
Dec-91           100                   100                    100
Jan-92           157.33                105.85                 105.85
Feb-92           212.20                110.31                 108.25
Mar-92           193.91                103.33                 103.14
Apr-92           176.84                100.92                  98.71
May-92           136.59                100.84                 100.00
Jun-92           108.55                 94.77                  96.09
Jul-92            97.56                 99.18                  99.49
Aug-92           104.88                 95.31                  96.45
Sep-92           112.20                 98.81                 100.03
Oct-92           117.07                103.92                 103.97
Nov-92            95.12                110.71                 112.25
Dec-92            90.24                115.02                 116.38
Jan-93           142.69                119.89                 119.69
Feb-93           121.95                112.12                 115.23
Mar-93           121.95                113.35                 118.56
Apr-93           123.18                106.93                 113.50
May-93           119.51                116.59                 120.28
Jun-93           131.71                115.78                 120.84
Jul-93           152.45                109.90                 120.98
Aug-93           156.10                115.75                 127.23
Sep-93           180.49                117.84                 131.02
Oct-93           153.66                121.08                 133.97
Nov-93           114.63                122.63                 129.97
Dec-93           110.99                125.52                 133.59
Jan-94           137.81                132.92                 137.65
Feb-94           131.71                134.47                 136.36
Mar-94           134.15                126.66                 127.98
Apr-94            87.80                124.13                 126.32
May-94            87.80                124.88                 126.62
Jun-94            82.93                117.47                 121.99
Jul-94            90.24                121.92                 124.49
Aug-94           101.23                134.13                 132.43
Sep-94           113.42                134.02                 132.09
Oct-94           118.30                143.50                 134.69
Nov-94           102.44                142.48                 130.22
Dec-94            96.35                145.70                 130.59
Jan-95            82.93                145.03                 131.32
Feb-95           107.32                155.91                 138.26
Mar-95           134.15                162.16                 142.36
Apr-95           163.41                172.46                 146.84
May-95           204.88                177.57                 150.63
Jun-95           214.63                196.72                 162.83
Jul-95           170.73                213.77                 174.80
Aug-95           229.27                217.82                 178.35
Sep-95           234.15                224.02                 182.45
Oct-95           214.63                226.90                 181.40
Nov-95           195.12                225.62                 185.66
Dec-95           182.93                218.76                 184.67
Jan-96           187.80                223.62                 185.59
Feb-96           200.00                232.15                 192.66
Mar-96           168.29                223.13                 193.30
Apr-96           192.68                247.47                 209.33
May-96           202.44                250.91                 218.95
Jun-96           170.73                233.37                 209.08
Jul-96           112.20                211.18                 190.46
Aug-96           124.39                223.70                 201.13
Sep-96           102.44                248.50                 216.52
Oct-96            80.49                244.27                 214.15
Nov-96            91.47                268.39                 227.42
Dec-96            80.49                262.49                 227.16
</TABLE>

REPORT OF THE COMPENSATION COMMITTEE

         The Compensation Committee of the Board of Directors (the "Committee"),
consisting entirely of nonemployee directors, approves all general policies
under which compensation is paid. The Committee determines the compensation of
David F. Levy, the Company's Chief Executive Officer, as well as the Company's
other executive officers. The Committee has delegated to Mr. Levy responsibility
for making recommendations to the Committee with respect to compensation for the
Company's nonexecutive officers. The Committee has final approval, however, for

                                      -24-
<PAGE>   27
compensation of all of the Company's officers. The Committee also administers
the Stock Option Plan, the Stock Purchase Plan and the Executive Stock Option
Plan.

         During 1995, the Committee retained Watson Wyatt, an executive
compensation consulting firm, to review the Company's executive compensation
practices. Wyatt reviewed the compensation practices of a group of companies
whose products and revenues are generally comparable to those of the Company. In
addition, the Committee reviewed a comprehensive study of executive compensation
in high-technology companies. Based on input from these two sources, the Company
concluded that the base salary of the Company's Chief Executive Officer was on
the high side and should increase at a lower rate than the averages for
comparable positions in similar companies. The Committee also concluded that the
annual incentives and stock option awards were lower than average and should be
increased, with the incentives based on the Company's performance.

         For 1996, the Company increased the base salary of Mr. Levy by
approximately 6% to $360,000, substantially lower than previous percentage
increases. As in 1995, the Committee established cash bonus incentives related
to revenue growth, gross profit and earnings per share. Total incentives that
could have been earned for 1996 were 100% of Mr. Levy's base salary, with up to
20% based on revenue, and up to 40% based on each of gross profits and earnings
per share. The purpose of the latter two components, totalling a possible 80% of
base salary, was to focus attention on the profitable performance of the
Company. Based on the Company's performance for 1996, Mr. Levy did not receive
any cash bonus with respect to 1996.  The Committee also provided Mr. Levy an
incentive for acquisitions during 1996, pursuant to which Mr. Levy received a 
grant of options to purchase 23,000 shares of Common Stock as a result of the
Company's acquisition of Imtec Acculine, Inc.

         As stated above, the Committee also believes that the Company's grant
of stock options had been below average and, consistent with the Committee's
philosophy of providing incentive-based compensation, the Company granted
options to purchase an aggregate of 120,000 shares of Common Stock to the Named
Executives (excluding acquisition-related option grants), including options to
purchase 50,000 shares of Common Stock to Mr. Levy (in addition to the
acquisition related options.) One other Named Executive also received an option
related to the acquisition of Imtec.

         The base salaries for the other Named Executives did not increase
during 1996 and, similar to Mr. Levy, each of the other Named Executives had the
ability to receive a cash bonus compensation based on a combination of the
Company's revenues, gross profit and earnings per share.  Based on the
Company's performance for 1996, none of the other Named Executives received any
cash bonus with respect to 1996.

         The Committee believes that the executive incentives were in accordance
with the consultant's recommendations and industry practice and were crafted in
a way to couple total possible compensation to the performance of the Company
and thus to increase stockholder value.


                                                         COMPENSATION COMMITTEE:
                                                             Barry W. Ridings
                                                            Leonard R. Weisberg


                                      -25-
<PAGE>   28
COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION

         Barry W. Ridings, a member of the Compensation Committee, is a Managing
Director of Alex. Brown & Sons. During 1996, Alex. Brown provided certain
investment banking advice to the Company for which it received customary fees.

CERTAIN TRANSACTIONS

         During 1996, the Company began leasing certain new facilities in
Allentown, Pennsylvania. During a portion of 1996, a partnership owned by
Messrs. Levy and Molinaro owned the facilities. During 1996, the Company made a
rental payment to such partnership in the aggregate amount of $22,565. The
facility was sold to a third party in March 1997.

         Richard J. Busis, a director of the Company, is a senior member of
Cozen and O'Connor, which provides certain legal services to the Company.

         On January 31, 1990, SubMicron entered into a Tax Indemnification
Agreement with its stockholders which provided for distributions to be made by
SubMicron for payment of personal tax liabilities imposed on the stockholders as
a result of SubMicron's S Corporation status.


                             SOLICITATION OF PROXIES

         The Company will bear the cost of the solicitation of the Board of
Directors' proxies for the meeting, including the cost of preparing, assembling
and mailing proxy materials, the handling and tabulation of proxies received,
and charges of brokerage houses and other institutions, nominees and fiduciaries
in forwarding such materials to beneficial owners. In addition to the mailing of
the proxy materials, such solicitation may be made in person or by telephone,
telegraph or telecopy by directors, officers or regular employees of the
Company, or by a professional proxy solicitation organization engaged by the
Company.


                              STOCKHOLDER PROPOSALS

         Stockholder proposals intended to be presented at the 1998 Annual
Meeting of Stockholders must be received by the Secretary of the Company at the
address appearing on the first page of this Proxy Statement not later than
_______ __, 1998 in order to be considered for inclusion in the Company's proxy
statement and form of proxy relating to that meeting.


                                      -26-
<PAGE>   29
                         SUBMICRON SYSTEMS CORPORATION

          THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS

        The undersigned stockholder of SUBMICRON SYSTEMS CORPORATION (the
"Company") hereby constitutes and appoints DAVID J. FERRAN and JOHN KIZER, and
each of them acting individually, as the attorney and proxy of the undersigned,
with full power of substitution, for and in the name and stead of the
undersigned, to attend the Annual Meeting of Stockholders of the Company to be
held on July 21, 1997 at 10:00 a.m., at the Holiday Inn Conference Center, Rt.
100 & I-78, Fogelsville, Pennsylvania, and any adjournment or postponement
thereof, and there at to vote all shares of Common Stock which the undersigned
would be entitled to vote if personally present; provided that such proxies are
authorized and directed to vote as indicated on the reverse side with respect
to such matters as are specified thereon.

        IF NO DIRECTION IS MADE, THE SHARES WILL BE VOTED "FOR" THE ELECTION OF
BOTH NOMINEES FOR DIRECTOR AND "FOR" THE OTHER PROPOSALS SET FORTH ON THE
REVERSE SIDE. THIS PROXY ALSO DELEGATES DISCRETIONARY AUTHORITY TO VOTE WITH
RESPECT TO ANY OTHER BUSINESS WHICH MAY PROPERLY COME BEFORE THE MEETING OR ANY
ADJOURNMENT OR POSTPONEMENT THEREOF.


(Continued and to be signed and dated on reverse side)
<PAGE>   30
(Continued from other side)

1.   [ ]   FOR both nominees for director listed at right.  NOMINEES:
                                                            Ronald B. Booth
                                                            Richard J. Busis

     [ ]   WITHHOLD AUTHORITY to vote for both nominees 
           for director listed at right.
 
     [ ]   FOR, EXCEPT VOTE WITHHELD FOR THE FOLLOWING:

           -------------------------

2.   Proposal to approve an amendment to the Company's 
     Employee Stock Purchase Plan.

     [ ] FOR          [ ] AGAINST          [ ] ABSTAIN

3.   Proposal to approve amendments to the Company's 1991 
     Amended and Restated Stock Option Plan.

     [ ] FOR          [ ] AGAINST          [ ] ABSTAIN

4.   Proposal to approve an amendment to the Company's 
     Certificate of Incorporation to increase the 
     authorized number of shares of Preferred Stock.

     [ ] FOR          [ ] AGAINST          [ ] ABSTAIN

5.   Proposal to approve the convertibility feature of 
     the Company's 8% Convertible Subordinated Notes.

     [ ] FOR          [ ] AGAINST          [ ] ABSTAIN

6.   Proposal to ratify the appointment of Ernst & Young LLP.

     [ ] FOR          [ ] AGAINST          [ ] ABSTAIN

7.   To vote on such other business which may properly 
     come before the meeting.




                                      -2-


   
<PAGE>   31
        THE UNDERSIGNED HEREBY ACKNOWLEDGES RECEIPT OF THE NOTICE OF ANNUAL
MEETING, PROXY STATEMENT AND ANNUAL REPORT OF SUBMICRON SYSTEMS CORPORATION.

PLEASE SIGN, DATE AND RETURN IN THE ENCLOSED POSTAGE-PREPAID ENVELOPE.

                                        Date: _________________, 1997

                                        _____________________________
                                        Signature of Stockholder

                                        _____________________________
                                        Signature of Stockholder


NOTE:   Please sign this Proxy exactly as name(s) appear(s) in address. When
        signing as attorney-in-fact, executor, administrator, trustee or
        guardian, please add your title as such, and if signer is a corporation,
        please sign with full corporate name by duly authorized officer or
        officers and affix the corporate seal. When stock is issued in the name
        of two or more persons, all such persons should sign.


                                     - 3 -
<PAGE>   32
                          APPENDIX A TO PROXY STATEMENT



                          SUBMICRON SYSTEMS CORPORATION

                        1994 EMPLOYEE STOCK PURCHASE PLAN


                   1. Purpose.

                           The purpose of the Plan is to assist SubMicron
Systems Corporation, a Delaware corporation (the "Company"), and its
Subsidiaries in retaining the employment of employees by offering them a greater
stake in the Company's success and a closer identity with it, and to aid in
obtaining the services of individuals whose employment would be helpful to the
Company and would contribute to its success. This is to be accomplished by
providing employees a continuing opportunity to purchase Shares (as hereinafter
defined) from the Company through periodic offerings.

                           The Plan is intended to comply with the provisions of
section 423 of the Code (as hereinafter defined), and the Plan shall be
administered, interpreted and construed accordingly.

                   2. Definitions. For purposes of the Plan:

                           (a) "Account" means the non-interest bearing account
which the Company (or the Subsidiary which employs the Participant) shall
establish for Participants, to which Participants' payroll deductions pursuant
to the Plan shall be credited.

                           (b) "Agent" means the person or persons appointed by
the Board in accordance with Paragraph 3(d).

                           (c) "Applicable Offering Period" means the Offering
Period applicable to a purchase made on a Purchase Date for the purpose of
determining the Purchase Price in accordance with Section 5 of the Plan.

                           (d) "Board" means the Board of Directors of the
Company.

                           (e) "Code" means the Internal Revenue Code of 1986,
as amended.

                           (f) "Committee" means the committee described in
Paragraph 3(a).

                           (g) "Company" means SubMicron Systems Corporation.

                           (h) "Compensation" means the total amount of
compensation for services paid to a Participant for an Offering Period by the
Company and the Subsidiaries
<PAGE>   33
that would be reportable on Internal Revenue Service Form W-2 (excluding amounts
payable as commission or bonus), plus amounts that are not includable in income
for federal income tax purposes that a Participant elects to contribute pursuant
to an arrangement described in section 125 or section 401(k) of the Code.

                           (i) "Eligible Employee" means an employee of the
Company or Subsidiary who is described in Paragraph 4.

                           (j) "Employer" means the Company or Subsidiary for
whom an Eligible Employee is performing services at the time the Eligible
Employee becomes a Participant.

                           (k) "Fair Market Value" on the Purchase Date means,
in the case of a purchase on a Purchase Date of Shares by the Company in an
arms'-length transaction, the actual purchase price of such Shares, and, in any
other case, the mean between the highest and lowest sales prices of Shares on
the principal national securities exchange on which the Shares are listed on
such date, or, if the Shares are not listed on any national securities exchange,
the mean between the highest and lowest sales prices of Shares as reported on
the Nasdaq National Market on such date, or if the Shares are included in
Nasdaq, but are not included in the Nasdaq National Market, the mean between the
closing bid and asked prices for Shares on such date as reported by Nasdaq, or
if the Shares are not so reported, the fair market value of Shares as determined
by the Committee in good faith. If there are no sales reports or bid or asked
quotations, as the case may be, for a given date, the closest preceding date on
which there were sales reports or bid or asked quotations shall be used.

                           (l) "Investment Account" means the account
established for a Participant pursuant to Paragraph 9(a) to hold Shares acquired
for a Participant pursuant to the Plan.

                           (m) "Nasdaq" means the National Association of
Security Dealers, Inc. Automated Quotations System.

                           (n) "Offering Period" means each two-year period
beginning on January 1 and July 1 of each year. The first Offering Period shall
commence on January 1, 1995.

                           (o) "Participant" means an Eligible Employee who
makes an election to participate in the Plan in accordance with Paragraph 5.

                           (p) "Plan" means the SubMicron Systems Corporation
1994 Employee Stock Purchase Plan as set forth in this document, and as may be
amended from time to time.

                           (q) "Plan Year" means the calendar year. The first
Plan Year shall be the 1995 calendar year.

                                       -2-
<PAGE>   34
                           (r) "Purchase Date" means the last business day of
each Purchase Period.

                           (s) "Purchase Period" means each six month period
beginning on January 1 and July 1 of each Plan Year.

                           (t) "Purchase Price" means the lesser of 85% of the
Fair Market Value of a Share on (i) the first business day of the Applicable
Offering Period or (ii) the Purchase Date.

                           (u) "Share" or "Shares" means a share or shares of
Common Stock, $0.0001 par value, of the Company.

                           (v) "Subscription Agreement" means the agreement
between the Participant and the Employer pursuant to which the Participant
authorizes payroll deductions to the Account.

                           (w) "Subsidiary" means any corporation that, at the
time in question, is a subsidiary corporation of the Company, within the meaning
of section 424(f) of the Code.

                   3. Administration.

                           (a) The Plan shall be administered by the Board of
Directors or by a committee (hereafter, the Committee), which shall be a
committee of the Board consisting of at least two members designated by the
Board. No member of the Board of Directors who is eligible to participate in the
Plan may vote on any matter affecting the administration of the Plan. If a
Committee is established, no member of the Board of Directors who is also
eligible to participate in the Plan may be a member of the Committee. All
Committee members shall serve, and may be removed, at the pleasure of the Board
of Directors.

                           (b) For purposes of administration of the Plan, a
majority of the members of the Committee (but not less than two) eligible to
serve as such shall constitute a quorum, and any action taken by a majority of
such members of the Committee present at any meeting at which a quorum is
present, or acts approved in writing by all members of the Committee, shall be
the acts of the Committee.

                           (c) Subject to the express provisions of the Plan,
the Committee shall have full discretionary authority to interpret the Plan, to
issue rules for administering the Plan, to change, alter, amend or rescind such
rules, and to make all other determinations necessary or appropriate for the
administration of the Plan. All determinations, interpretations and
constructions made by the Committee with respect to the Plan shall be final and
conclusive. No member of the Board of Directors or the Committee shall be liable
for any action, determination or omission taken or made in good faith with
respect to the Plan or any right granted hereunder.

                                       -3-
<PAGE>   35
                           (d) The Committee may engage an Agent to purchase
Shares on each Purchase Date and to perform custodial and record keeping
functions for the Plan, such as holding record title to the Participants' Share
certificates, maintaining an individual Investment Account for each such
Participant and providing periodic account status reports to such Participants.

                           (e) The Committee shall have full discretionary
authority to delegate ministerial functions to management of the Company.

                   4. Eligibility. All employees of the Company, and of such of
its Subsidiaries as may be designated for such purpose from time to time by the
Committee, shall be eligible to participate in the Plan as of the first day of
an Offering Period, provided each of such employees:

                           (a) has been employed by the Company or any of its
Subsidiaries for at least six months;

                           (b) is customarily employed for more than 20 hours
per week;

                           (c) is customarily employed more than five months per
calendar year; and

                           (d) does not own stock possessing 5% or more of the
total combined voting power or value of all classes of stock of the Company or a
Subsidiary. In determining stock ownership for purposes of the preceding
sentence, the rules of section 424(d) of the Code shall apply and stock which
the employee may purchase under outstanding options, including rights to
purchase stock under the Plan, shall be treated as stock owned by the employee.

                           For purposes of this Paragraph 4, the term
"employment" shall be interpreted in accordance with the provisions of section
1.421-7(h) of the Treasury Regulations (or any successor regulations).

                   5. Election to Participate.

                           (a) (i) Initial Subscription Agreements. Each
Eligible Employee may become a Participant by filing a Subscription Agreement
authorizing specified regular payroll deductions. A Subscription Agreement
authorizing specified regular payroll deductions must specify the date on which
such deduction is to commence, which may not be retroactive. Subject to the
limits of Paragraph 5(b), payroll deductions may be in any amount not less than
one percent (1%) and not in excess of ten percent (10%) of an Eligible
Employee's Compensation, subject to a lower limit as may be established pursuant
to Paragraph 5(b) below. All payroll deductions shall be recorded in the
Accounts. All funds recorded in Accounts may be used by the Company and
Subsidiaries for any corporate purpose, subject to the Participant's right to
withdraw at any time an amount equal to the

                                       -4-
<PAGE>   36
balance accumulated in his or her Account as described in Paragraph 8 below.
Funds credited to Accounts shall not be required to be segregated from the
general funds of the Company or any Subsidiary.

                                         (ii) Subsequent Subscription
Agreements. Any Participant may file a Subscription Agreement subsequent to his
or her filing an initial Subscription Agreement changing the terms of his or her
participation in accordance with Section 6 of the Plan.

                                         (iii) Applicable Offering Period. The
Applicable Offering Period for each Eligible Employee who becomes a Participant
by filing an initial Subscription Agreement in accordance with Section 5(a)(i)
of the Plan shall initially be the first Offering Period commencing after the
receipt of such Subscription Agreement by the Committee, and the Purchase Price
for any purchases made on behalf of a Participant in accordance with Section 9
of the Plan on a Purchase Date occurring during such Participant's Applicable
Offering Period shall be determined by reference to the Fair Market Value of a
Share on the Purchase Date itself or the first day of such Applicable Offering
Period, in accordance with the definition of Purchase Price set forth in Section
2(t). Notwithstanding the foregoing, in the event the Fair Market Value of a
Share on a Purchase Date is lower than the Fair Market Value of a Share on the
first day of the Applicable Offering Period, the Applicable Offering Period for
a Participant shall terminate on such Purchase Date. The Applicable Offering
Period for any Participant after such Participant's Applicable Offering Period
terminates shall be the Offering Period commencing on the next day after the
date such prior Applicable Offering Period terminates.

                           (b) Contribution Limit. The sum of all regular
payroll deductions authorized under Paragraph 5(a) shall not exceed such
percentage of the Participant's Compensation as may be specified by the
Committee.

                   6. Subsequent Subscription Agreements and Deduction Changes.
A Participant may at any time decrease his or her payroll deduction by filing a
new Subscription Agreement with the Committee during a Purchase Period which
will supersede any prior Subscription Agreement effective no later than thirty
(30) days after receipt of such new Subscription Agreement by the Committee. If
administratively practicable, and at the Committee's discretion, such decrease
in a Participant's payroll deduction shall be effective as of the first day of
the payroll period following the receipt by the Committee of the new
Subscription Agreement or as of such other date no later than thirty (30) days
after receipt of the new Subscription Agreement as the Committee determines.
Other than as provided in the case of a termination of participation under
Paragraph 8 below, such change in the rate of regular payroll deductions may not
be made more than once during each Purchase Period. During the two week period
immediately preceding each new Purchase Period, a Participant may increase or
decrease his or her payroll deduction by filing a new Subscription Agreement
with the Committee. If a Participant does not file a new Subscription Agreement
with the Committee, the terms of the previously submitted Subscription Agreement
shall remain in effect for each subsequent Purchase Period. Notwithstanding
anything contained

                                       -5-
<PAGE>   37
herein to the contrary, a Participant may file a new Subscription Agreement at
any time for the sole purpose of changing his or her designation of beneficiary.

                   7. Limit on Purchase of Shares.

                           (a) No employee may be granted a right to purchase
Shares under the Plan if immediately following such grant, such employee would
have rights to purchase equity securities under all plans of the Company and
Subsidiaries that are intended to meet the requirements of section 423 of the
Code, that accrue at a rate which exceeds $25,000 of Fair Market Value
(determined at the time the rights are granted) for each calendar year in which
such rights to purchase Shares are outstanding at any time. For purposes of this
Paragraph 7:

                                         (i) The right to purchase Shares
accrues when the right (or any portion thereof) first becomes exercisable during
the calendar year;

                                         (ii) Subject to the limitations under
Paragraph 10, each Participant accrues the right to purchase up to a number of
Shares for each Purchase Period equal to $12,500 divided by the Fair Market
Value of the Shares, determined on the first day of the Purchase Period, but in
no case may such accrual of rights to purchase Shares exceed $25,000 of Fair
Market Value, determined on the first day of each Offering Period, for any
calendar year;

                                         (iii) A right to purchase Shares which
has accrued under one grant of rights under the Plan may not be carried over to
any other grant of rights; and

                                         (iv) The limits of this Paragraph 7
shall be interpreted by the Committee in accordance with applicable rules and
regulations issued under section 423 of the Code.

                           (b) No employee may be granted a right to purchase
Shares under the Plan if, immediately following such grant, such employee would
own stock possessing 5% or more of the total combined voting power or value of
all classes of stock of the Company or a Subsidiary. In determining stock
ownership for purposes of the preceding sentence, the rules of section 424(d) of
the Code shall apply and stock which the employee may purchase under outstanding
options, including rights to purchase stock under the Plan, shall be treated as
stock owned by the employee.

                   8. Termination of Participation and Withdrawal of Funds. A
Participant may at any time and for any reason, withdraw from participation in
the Plan for an Offering Period by filing a notice of withdrawal form with the
Committee prior to the last day of such Purchase Period, in which case the
entire balance accumulated in his or her Account shall be paid to such
Participant as soon as practicable thereafter and no further payroll deductions
shall be made pursuant to the Plan. Partial withdrawals shall not be permitted.
A

                                       -6-
<PAGE>   38
Participant may recommence participation in the Plan by submitting a new
Subscription Agreement to the Committee, which will be effective as of the next
Offering Period.

                   9. Method of Purchase and Investment Accounts.

                           (a) Exercise of Option for Shares. Each Participant
having funds credited to an Account on a Purchase Date shall be deemed, without
any further action, to have exercised on such Purchase Date, the option to
purchase the number of whole Shares which the funds in such Account would
purchase at the Purchase Price, subject to the limit:

                                         (i) on the aggregate number of Shares
that may be made available for purchase to all Participants under the Plan for
the term of the Plan, as set forth in Paragraph 10; and

                                         (ii) on the number of Shares that may
be made available for purchase to any individual Participant, as set forth in
Paragraphs 5(b) and 7.

Such option shall be deemed exercised if the Participant does not withdraw such
funds before the Purchase Date. All Shares so purchased shall be credited to a
separate Investment Account established by the Agent for each Participant. The
Agent shall hold in its name or the name of its nominee all certificates for
Shares purchased until such Shares are withdrawn by a Participant pursuant to
Paragraph 11. No purchases of fractional Shares shall be made pursuant to the
Plan. If the Fair Market Value of a Share on a Purchase Date is less than the
Fair Market Value of a Share on the first day of the Offering Period,
immediately following exercise of the Participant's option the Participant shall
be deemed to have been reenrolled in the Plan in the Offering Period which
commences immediately following such Purchase Date. Any funds left in a
Participant's Account following a Purchase Date shall be applied to the purchase
of Shares on the next Purchase Date, along with any additional funds added to
such Participant's Account as a result of subsequent payroll deductions, subject
to Participants' withdrawal rights against Accounts and the other limits of the
Plan.

                           (b) Dividends on Shares Held in Investment Accounts.
All cash dividends paid with respect to the Shares credited to a Participant's
Investment Account shall, unless otherwise directed by the Committee, be
credited to his or her Account and used, in the same manner as other funds
credited to Accounts, to purchase additional Shares under the Plan on the next
Purchase Date, subject to Participants' withdrawal rights against Accounts and
the other limits of the Plan.

                           (c) Adjustment of Shares on Application of Aggregate
Limits. If the total number of Shares that would be purchased pursuant to
Paragraph 9(a) but for the limits described in Paragraph 9(a)(i) exceeds the
number of Shares available for purchase under the Plan, then the number of
available Shares shall be allocated among the Investment Accounts of
Participants in the ratio that the amount credited to a Participant's Account as
of the Purchase Date bears to the total amount credited to all Participants'
Accounts as of the

                                       -7-
<PAGE>   39
Purchase Date. The cash balance not applied to the purchase of Shares shall be
held in Participants' Accounts subject to the terms and conditions of the Plan.

                   10. Shares Subject to Plan. The aggregate maximum number of
Shares that may be issued pursuant to the Plan is Five Hundred Thousand
(500,000), subject to adjustment as provided in Paragraph 18 of the Plan. The
Shares delivered pursuant to the Plan may, at the option of the Company, be
Shares purchased specifically for purposes of the Plan, shares otherwise held in
treasury or Shares originally issued by the Company for such purpose.

                   11. Withdrawal of Certificates. A Participant shall have the
right at any time to withdraw a certificate or certificates for all or a portion
of the Shares credited to his or her Investment Account by giving written notice
to the Company.

                   12. Registration of Certificates. Each certificate withdrawn
by a Participating Employee may be registered only in the name of the
Participant, or, if the Participant so indicated on the Participant's Account,
in the Participant's name jointly with a member of the Participant's family,
with right of survivorship. A Participant who is a resident of a jurisdiction
which does not recognize such a joint tenancy may have certificates registered
in the Participant's name as tenant in common or as community property with a
member of the Participant's family without right of survivorship.

                   13. Voting. The Agent shall vote all Shares held in an
Investment Account in accordance with the Participant's instructions.

                   14. Rights on Retirement, Death or Other Termination of
Employment. In the event of a Participant's retirement, death or other
termination of employment, or in the event that a Participant otherwise ceases
to be an Eligible Employee, (a) no payroll deduction shall be taken from any pay
due and owing to the Participant thereafter, and the balance in the
Participant's Account shall be paid to the Participant or, in the event of the
Participant's death, to the person or persons designated as the Participant's
beneficiary on Participant's most recently filed Subscription Agreement, or if
no beneficiary has been designated, to the person to whom the Participant's
rights shall have passed under the laws of descent and distribution, and (b) a
certificate for the Shares credited to the Participant's Investment Account will
be forwarded to the Participant (or, in the event of the Participant's death, to
the person or persons designated as the Participant's beneficiary on
Participant's most recently filed Subscription Agreement, or if no beneficiary
has been designated, to the person to whom the Participant's rights shall have
passed under the laws of descent and distribution).

                   15. Rights Not Transferable. Except as permitted by Paragraph
14, rights under the Plan are not transferable by a Participant and are
exercisable during the employee's lifetime only by the employee.

                                       -8-
<PAGE>   40
                   16. No Right to Continued Employment. Neither the Plan nor
any right granted under the Plan shall confer upon any Participant any right to
continuance of employment with the Company or any Subsidiary, or interfere in
any way with the right of the Company or Subsidiary to terminate the employment
of such Participant.

                   17. Application of Funds. All funds received or held by the
Company under this Plan may be used for any corporate purpose.

                   18. Adjustments in Case of Changes Affecting Shares. In the
event of a subdivision of outstanding Shares, or the payment of a stock
dividend, the Share limit set forth in Paragraph 10 shall be adjusted
proportionately, and such other adjustments shall be made as may be deemed
equitable by the Committee. In the event of any other change affecting Shares
(including any event described in section 424(a) of the Code), such adjustment,
if any, shall be made as may be deemed equitable by the Committee to give proper
effect to such event, subject to the limitations of section 424 of the Code.

                   19. Amendment of the Plan. The Board of Directors of the
Company may at any time, or from time to time, amend the Plan in such manner as
it may deem advisable. Nevertheless, the Board of Directors of the Company may
not (i) increase the maximum number of shares that may be issued pursuant to the
Plan, (ii) materially increase the benefits accruing to Participants under the
Plan, or (iii) modify the requirements as to eligibility for participation in
the Plan without obtaining approval, within twelve months before or after such
action, by vote of a majority of the votes cast at a duly called meeting of the
Shareholders at which a quorum representing a majority of all outstanding voting
stock of the Company is, either in person or by proxy, present and voting on the
matter.

                   20. Termination of the Plan. The Plan and all rights of
employees under any offering hereunder shall terminate on the earliest of:

                           (a) any time at the discretion of the Board of
Directors; or

                           (b) December 31, 2004.

Upon termination of this Plan, (i) all amounts in the Accounts of Participants
shall be carried forward into the Participant's Account under a successor plan,
if any, or promptly refunded, and (ii) all certificates for the Shares credited
to a Participant's Investment Account shall be forwarded to him or her.

                   21. Governmental Regulations.

                           (a) Anything contained in this Plan to the contrary
notwithstanding, the Company shall not be obligated to sell or deliver any
Shares certificates under this Plan unless and until the Company is satisfied
that such sale or delivery complies with (i) all applicable requirements of the
governing body of the principal market in which such Shares are traded, (ii) all
applicable provisions of the Securities Act of 1933, as amended (the

                                       -9-
<PAGE>   41
"Act"), and the rules and regulations thereunder and (iii) all other laws or
regulations by which the Company is bound or to which the Company is subject.

                           (b) The Company (or a Subsidiary) may make such
provisions as it may deem appropriate for the withholding of any taxes or
payment of any taxes which it determines it may be required to withhold or pay
in connection with any Shares. The obligation of the Company to deliver
certificates under this Plan is conditioned upon the satisfaction of the
provisions set forth in the preceding sentence.

                  22. Section 16 Restrictions for Officers and Directors.
Notwithstanding any other provision of the Plan, each officer (for purposes of
Section 16 of the Securities Exchange Act of 1934, as amended (the "Exchange
Act")), and director of the Company shall be subject to such restrictions as are
required so that transactions under the Plan by such officer or director shall
be exempt from Section 16(b) of the Exchange Act. Without limiting the
generality of the foregoing, such restrictions may include restrictions on the
ability of an officer or director making withdrawals from the Plan, ceasing
participation in the Plan and holding the Shares received under the Plan for so
long as such restrictions are required to qualify for a Section 16 exemption.

                   23. Repurchase of Shares. The Company shall not be required
to repurchase from any Participant any Shares which such Participant acquires
under the Plan.

                                      -10-
<PAGE>   42
                          APPENDIX B TO PROXY STATEMENT

                          SUBMICRON SYSTEMS CORPORATION

                   AMENDED AND RESTATED 1991 STOCK OPTION PLAN

                                                                    Revised 5/97


                  SubMicron Systems Corporation (the "Company") hereby amends
and restates the SubMicron Systems Corporation 1991 Amended and Restated Stock
Option Plan in its entirety (as so amended and restated, the "Plan").

                  1. PURPOSE. The Plan is intended to recognize the
contributions made to the Company or an Affiliate by employees of the Company or
any Affiliate (as hereinafter defined), members of the Board of Directors of the
Company or any Affiliate, and certain consultants and advisors to the Company or
any Affiliate, to provide such persons with additional incentive to devote
themselves to the future success of the Company or any Affiliate, and to improve
the ability of the Company or an Affiliate to attract, retain, and motivate
individuals upon whom the Company's sustained growth and financial success
depend, by providing such persons with an opportunity to acquire or increase
their proprietary interest in the Company through receipt of rights to acquire
the Company's Common Stock, $.0001 par value (the "Common Stock").

                  2. DEFINITIONS. Unless the context clearly indicates
otherwise, the following terms shall have the following meanings:

                           (a) "Act" means the Securities Act of 1933, as
amended.

                           (b) "Affiliate" means a corporation which is a parent
corporation or a subsidiary corporation with respect to the Company within the
meaning of Section 424(e) or (f) of the Code.

                           (c) "Board of Directors" means the Board of Directors
of the Company.

                           (d) "Change of Control" shall have the meaning as set
forth in Section 9 of the Plan.

                           (e) "Code" means the Internal Revenue Code of 1986,
as amended.

                           (f) "Committee" means the Board of Directors or the
committee designated by the Board of Directors in accordance with the provisions
set forth in Section 3 of the Plan.

                           (g) "Company" means SubMicron Systems Corporation, a
Delaware corporation.
<PAGE>   43
                           (h) "Disability" shall have the meaning set forth in
Section 22(e)(3) of the Code.

                           (i) "Exchange Act" means the Securities Exchange Act
of 1934, as amended.

                           (j) "Fair Market Value" shall have the meaning set
forth in Subsection 8(b) of the Plan.

                           (k) "ISO" means an Option granted under the Plan
which is intended to qualify as an "incentive stock option" within the meaning
of Section 422(b) of the Code.

                           (l) "Non-qualified Stock Option" means an Option
granted under the Plan which is not intended to qualify, or otherwise does not
qualify, as an "incentive stock option" within the meaning of Section 422(b) of
the Code.

                           (m) "Option" means either an ISO or a Non-qualified
Stock Option granted under the Plan.

                           (n) "Optionee" means a person to whom an Option has
been granted under the Plan, which Option has not been exercised and has not
expired or terminated.

                           (o) "Option Document" means the document described in
Section 8 of the Plan which sets forth the terms and conditions of a grant of
Options.

                           (p) "Option Price" means the price at which Shares
may be purchased upon exercise of an Option, as calculated pursuant to Section
8(b) of the Plan.

                           (q) "Shares" means the shares of Common Stock of the
Company which are the subject of Options.

                  3. ADMINISTRATION OF THE PLAN.

                           (a) Committee. The Plan shall be administered by a
committee composed of two or more of the members of the Company's Board of
Directors who shall not be eligible to receive Options under the Plan while
serving as a member of the Committee; provided, however, the Board may designate
two committees to administer the Plan in its stead, one of such committees
composed of two or more of its directors who will not be eligible to receive
Options under the Plan while serving on such Committee to administer the Plan
with respect to each person who is a "Principal Officer (as defined below), and
the other such committee composed of two or more directors (which may include
directors who are eligible to receive Options under the Plan) to administer the
Plan with respect to each person other than a Principal Officer. Any of such
committees designated by the Board of Directors is referred to as the
"Committee." As used herein the

                                      - 2 -
<PAGE>   44
term "Principal Officer" means a person who is an "officer" of the Company,
within the meaning of Rule 16a-1(f) promulgated under the Exchange Act, or any
successor regulation.

                           (b) Meetings. The Committee shall hold meetings at
such times and places as it may determine. Acts approved at a meeting by a
majority of the members of the Committee or acts approved in writing by the
unanimous consent of the members of the Committee shall be the valid acts of the
Committee.

                           (c) Grants. The Committee shall from time to time, in
its discretion, direct the Company to grant Options pursuant to the terms of the
Plan. The Committee shall have plenary authority to (i) determine the Optionees
to whom, the times at which, and the price at which Options shall be granted,
(ii) determine the type of Option to be granted and the number of Shares subject
thereto, and (iii) approve the form and terms and conditions of the Option
Documents; all subject, however, to the express provisions of the Plan. In
making such determinations, the Committee may take into account the nature of
the Optionee's services and responsibilities, the Optionee's present and
potential contribution to the Company's success and such other factors as it may
deem relevant. The interpretation and construction by the Committee of any
provisions of the Plan or of any Option granted under it shall be final, binding
and conclusive.

                           (d) Exculpation. No member of the Board of Directors
shall be personally liable for monetary damages for any action taken or any
failure to take any action in connection with the administration of the Plan or
the granting of Options under the Plan, provided that this Section 3(d) shall
not apply to (i) any breach of such member's duty of loyalty to the Company or
its stockholders, (ii) acts or omissions not in good faith or involving
intentional misconduct or a knowing violation of law, (iii) acts or omissions
that would result in liability under Section 174 of the General Corporation Law
of the State of Delaware, as amended, or (iv) any transaction from which the
member derived an improper personal benefit.

                           (e) Indemnification. Service on the Committee shall
constitute service as a member of the Board of Directors. Each member of the
Committee shall be entitled without further act on his part to indemnity from
the Company to the fullest extent provided by applicable law and the Company's
Certificate of Incorporation and/or By-laws in connection with or arising out of
any action, suit or proceeding with respect to the administration of the Plan or
the granting of Options thereunder in which he or she may be involved by reason
of his or her being or having been a member of the Committee, whether or not he
or she continues to be a member of the Committee at the time of the action, suit
or proceeding.

                           (f) Limitations on Grants of Options to Consultants
and Advisors. With respect to the grant of Options to consultants and advisors,
bona fide services must be rendered by consultants and advisors, and such
services must not be in connection with a capital raising transaction.

                                      - 3 -
<PAGE>   45
                   4. GRANTS UNDER THE PLAN. Grants under the Plan may be in the
form of a Non-qualified Stock Option, an ISO or a combination thereof, at the
discretion of the Committee.

                   5. ELIGIBILITY. All employees and members of the Board of
Directors of, and (subject to Section 3(f)) consultants and advisors to, the
Company or an Affiliate shall be eligible to receive Options hereunder. The
Committee, in its sole discretion, shall determine whether an individual
qualifies as such an employee, consultant or advisor.

                   6. SHARES SUBJECT TO PLAN. The aggregate maximum number of
Shares for which Options may be granted pursuant to the Plan is 4,000,000,
subject to adjustment as provided in Section 10 of the Plan. The Shares shall be
issued from authorized and unissued Common Stock or Common Stock held in or
hereafter acquired for the treasury of the Company. If an Option terminates or
expires without having been fully exercised for any reason, the Shares for which
the Option was not exercised may again be the subject of one or more Options
granted pursuant to the Plan.

                   7. TERM OF THE PLAN. No Option may be granted under the Plan
after June 10, 2001.

                   8. OPTION DOCUMENTS AND TERMS. Each Option granted under the
Plan shall be a Non-qualified Stock Option unless the Option shall be
specifically designated at the time of grant to be an ISO for federal income tax
purposes. If any Option designated as an ISO is determined for any reason not to
qualify as an incentive stock option within the meaning of Section 422 of the
Code, such Option shall be treated as a Non-qualified Stock Option for all
purposes under the provisions of the Plan. Options granted pursuant to the Plan
shall be evidenced by the Option Documents in such form as the Committee shall
from time to time approve, which Option Documents shall comply with and be
subject to the following terms and conditions and such other terms and
conditions as the Committee shall from time to time require which are not
inconsistent with the terms of the Plan.

                           (a) Number of Option Shares. Each Option Document
shall state the number of Shares to which it pertains. An Optionee may receive
more than one Option, which may include Options which are intended to be ISOs
and Options which are not intended to be ISOs, but only on the terms and subject
to the conditions and restrictions of the Plan. The maximum number of Shares for
which Options may be granted to any single Optionee in any calendar year,
adjusted as provided in Section 10, shall be 1,000,000 Shares.

                           (b) Option Price. Each Option Document shall state
the Option Price which, for a Non-qualified Stock Option, may be less than,
equal to, or greater than the Fair Market Value of the Shares on the date the
Option is granted and, for an ISO, shall be at least 100% of the Fair Market
Value of the Shares on the date the Option is granted as determined by the
Committee in accordance with this Section 8(b); provided, however, that if an
ISO is granted to an Optionee who then owns, directly or by attribution

                                      - 4 -
<PAGE>   46
under Section 424(d) of the Code, shares possessing more than ten percent of the
total combined voting power of all classes of stock of the Company or an
Affiliate, then the Option Price shall be at least 110% of the Fair Market Value
of the Shares on the date the Option is granted. If the Common Stock is traded
in a public market, the Fair Market Value per share shall be, if the Common
Stock is listed on a national securities exchange or included in the Nasdaq
National Market, the last reported sale price thereof on the relevant date, or,
if the Common Stock is not so listed or included, the mean between the last
reported "bid" and "asked" prices thereof on the relevant date, as reported on
Nasdaq or, if not so reported, as reported by the National Daily Quotation
Bureau, Inc. or as reported in a customary financial reporting service, as
applicable and as the Committee determines. If the Common Stock is not traded in
a public market on the relevant date, the Fair Market Value shall be as
determined in good faith by the Committee.

                           (c) Exercise. No Option shall be deemed to have been
exercised prior to the receipt by the Company of written notice of such exercise
and of payment in full of the Option Price for the Shares to be purchased. Each
such notice shall specify the number of Shares to be purchased and shall (unless
the Shares are covered by a then current and effective registration statement or
qualified Offering Statement under Regulation A under the Securities Act)
contain the Optionee's acknowledgment in form and substance satisfactory to the
Company that (i) such Shares are being purchased for investment and not for
distribution or resale (other than a distribution or resale which, in the
opinion of counsel satisfactory to the Company, may be made without violating
the registration provisions of the Act), (ii) the Optionee has been advised and
understands that (A) the Shares have not been registered under the Act, are
"restricted securities" within the meaning of Rule 144 under the Act and are
subject to restrictions on transfer and (B) the Company is under no obligation
to register the Shares under the Act or to take any action which would make
available to the Optionee any exemption from such registration, (iii) such
Shares may not be transferred without compliance with all applicable federal and
state securities laws, and (iv) an appropriate legend referring to the foregoing
restrictions on transfer and any other restrictions imposed under the Option
Documents may be endorsed on the certificates. Notwithstanding the foregoing, if
the Company determines that issuance of Shares should be delayed pending (I)
registration under federal or state securities laws, (II) the receipt of an
opinion of counsel satisfactory to the Company that an appropriate exemption
from such registration is available, (III) the listing or inclusion of the
Shares on any securities exchange or an automated quotation system or (IV) the
consent or approval of any governmental regulatory body whose consent or
approval is necessary in connection with the issuance of such Shares, the
Company may defer exercise of any Option granted hereunder until any of the
events described in this sentence has occurred.

                           (d) Medium of Payment. An Optionee shall pay for
Shares (i) in cash, (ii) by certified or cashier's check payable to the order of
the Company or (iii) by such other mode of payment as the Committee may approve,
including payment through a broker in accordance with procedures permitted by
Regulation T of the Federal Reserve Board. Furthermore, the Committee may
provide in an Option Document that payment may be

                                      - 5 -
<PAGE>   47
made in whole or in part in shares of Common Stock held by the Optionee for at
least six months. If payment is made in whole or in part in shares of Common
Stock, then the Optionee shall deliver to the Company certificates registered in
the name of such Optionee representing shares owned by such Optionee, free of
all liens, claims and encumbrances of every kind and having an aggregate Fair
Market Value on the date of delivery that is at least as great as the Option
Price of the Shares (or relevant portion thereof) with respect to which such
Option is to be exercised by the payment in shares of Common Stock, endorsed in
blank or accompanied by stock powers duly endorsed in blank by the Optionee. In
the event that certificates for shares of the Company's Common Stock delivered
to the Company represent a number of shares in excess of the number of shares
required to make payment for the Option Price of the Shares (or relevant portion
thereof) with respect to which such Option is to be exercised by payment in
shares of Common Stock, the stock certificate issued to the Optionee shall
represent (I) the Shares in respect of which payment is made, and (II) such
excess number of shares. Notwithstanding the foregoing, the Committee may impose
from time to time such limitations and prohibitions on the use of shares of the
Common Stock to exercise an Option as it deems appropriate.

                           (e) Termination of Options.

                                    (i) No option or any unexercised
installments thereof shall be exercisable after the first to occur of the
following:

                                            (A) Expiration of the Option term
specified in the Option Document, which shall not exceed (1) ten years from the
date of grant, or (2) five years from the date of grant of an ISO if the
Optionee on the date of grant owns, directly or by attribution under Section
424(d) of the Code, shares possessing more than ten percent of the total
combined voting power of all classes of stock of the Company or of an Affiliate;

                                            (B) Expiration of three months from
the date the Optionee's employment or service with the Company or its Affiliates
terminates for any reason other than Disability or death or as otherwise
specified in Subsection 8(e)(i)(D) or 8(e)(i)(E) below;

                                            (C) Expiration of one year from the
date such employment or service with the Company or its Affiliates terminates
due to the Optionee's Disability or death;

                                            (D) A finding by the Committee,
after full consideration of the facts presented on behalf of both the Company
and the Optionee, that the Optionee has breached his employment or service
contract with the Company or an Affiliate, or has been engaged in disloyalty to
the Company or an Affiliate, including, without limitation, fraud, embezzlement,
theft, commission of a felony or proven dishonesty in the course of his or her
employment or service, or has disclosed trade secrets or confidential
information of the Company or an Affiliate. In such event, in addition to

                                      - 6 -
<PAGE>   48
immediate termination of the Option, the Optionee shall automatically forfeit
all Shares for which the Company has not yet delivered the share certificates
upon refund by the Company of the Option Price of such Shares. Notwithstanding
anything herein to the contrary, the Company may withhold delivery of share
certificates pending the resolution of any inquiry that could lead to a finding
resulting in a forfeiture; or

                                            (E) The date, if any, set by the
Board of Directors as an accelerated expiration date in the event of a Change of
Control.

                                    (ii) Notwithstanding the foregoing, the
Committee may extend the period during which all or any portion of an Option may
be exercised to a date no later than the Option term specified in the Option
Document pursuant to Subsection 8(e)(i)(A), provided that any change pursuant to
this Subsection 8(e)(ii) which would cause an ISO to become a Non-qualified
Stock Option may be made only with the consent of the Optionee.

                           (f) Transfers. No Option granted under the Plan may
be transferred, except by will or by the laws of descent and distribution.
During the lifetime of the person to whom an Option is granted, such Option may
be exercised only by him. Notwithstanding the foregoing, a Non-qualified Stock
Option may be transferred pursuant to the terms of a "qualified domestic
relations order," within the meaning of Sections 401(a)(13) and 414(p) of the
Code or within the meaning of Title I of the Employee Retirement Income Security
Act of 1974, as amended. In addition, option grants may permit the transfer of
an Option to the Optionee's spouse, children or grandchildren or a trust created
solely for the benefit of the Optionee and the foregoing persons.

                           (g) Limitation on ISO Grants. In no event shall the
aggregate fair market value of the shares of Common Stock (determined at the
time an ISO is granted) with respect to which incentive stock options under all
incentive stock option plans of the Company or its Affiliates are exercisable
for the first time by the Optionee during any calendar year exceed $100,000.

                           (h) Other Provisions. Subject to the provisions of
the Plan, the Option Documents shall contain such other provisions including,
without limitation, provisions authorizing the Committee to accelerate the
exercisability of all or any portion of an Option granted pursuant to the Plan,
additional restrictions upon the exercise of the Option or additional
limitations upon the term of the Option, as the Committee shall deem advisable.

                           (i) Amendment. Subject to the provisions of the Plan,
the Committee shall have the right to amend Option Documents issued to an
Optionee, subject to the Optionee's consent if such amendment is not favorable
to the Optionee, except that the consent of the Optionee shall not be required
for any amendment made pursuant to Subsection 8(e)(i)(E) or Section 9 of the
Plan, as applicable, except to the extent set forth in Section 9.

                                      - 7 -
<PAGE>   49
                  9. CHANGE OF CONTROL. In the event of a Change of Control, all
Options then outstanding under the Plan shall become immediately exercisable in
full; provided that any acceleration of exercisability of options under this
Section 9 which would cause an ISO to become a Non-Qualified Stock Option may be
made only with the consent of the Optionee. Any amendment to this Section 9
which diminishes the rights of Optionees shall not be effective with respect to
Options outstanding at the time of adoption of such amendment, whether or not
such outstanding Options are then exercisable. In addition, in the event of a
Change of Control, the Committee may take whatever other action with respect to
Options outstanding as it deems necessary or desirable, including without
limitation, accelerating the expiration date of any Options.

                           A "Change of Control" shall be deemed to have
occurred upon the earliest to occur of the following events: (a) the date the
stockholders of the Company (or the Board of Directors, if stockholder action is
not required) approve a plan or other arrangement pursuant to which the Company
will be dissolved or liquidated, (b) the date the stockholders of the Company
(or the Board of Directors, if stockholder action is not required) approve a
definitive agreement to sell or otherwise dispose of substantially all of the
assets of the Company, (c) the date the stockholders of the Company (or the
Board of Directors, if stockholder action is not required) and the stockholders
of the other constituent corporation (or its board of directors if stockholder
action is not required) have approved a definitive agreement to merge or
consolidate the Company with or into such other corporation other than, in
either case, a merger or consolidation of the Company in which holders of shares
of Common Stock immediately prior to the merger or consolidation will have at
least a majority of the voting power of the surviving corporation's voting
securities immediately after the merger or consolidation, which voting
securities are to be held in the same proportion as such holders' ownership of
Common Stock immediately before the merger or consolidation, (d) the date any
entity, person or group, within the meaning of Section 13(d)(3) or Section
14(d)(2) of the Exchange Act (other than (i) the Company or any of its
subsidiaries or any employee benefit plan (or related trust) sponsored or
maintained by the Company or any of its subsidiaries, or (ii) any other person
who, as of January 1, 1995, shall have been the beneficial owner (within the
meaning of Rule 13d-3 promulgated under the Exchange Act) of more than 30% of
outstanding shares of Common Stock), shall have become the beneficial owner of,
or shall have obtained voting control over, more than 30% of the outstanding
shares of Common Stock, or (e) the first day after the date this Plan is
effective when directors are elected such that a majority of the Board of
Directors shall have been members of the Board of Directors for less than two
years, unless the nomination for election of each new director who was not a
director at the beginning of such two-year period was approved by a vote of at
least two-thirds of the directors then still in office who were directors at the
beginning of such period.

                   10. ADJUSTMENTS ON CHANGES IN CAPITALIZATION. The aggregate
number of Shares and class of shares as to which Options may be granted
hereunder, the number and class or classes of shares covered by each outstanding
Option and the Option Price thereof shall be appropriately adjusted in the event
of a stock dividend, stock split, recapitalization

                                      - 8 -
<PAGE>   50
or other change in the number or class of issued and outstanding equity
securities of the Company resulting from a subdivision or consolidation of the
Common Stock and/or, if appropriate, other outstanding equity securities or a
recapitalization or other capital adjustment (not including the issuance of
Common Stock on the conversion of other securities of the Company which are
convertible into Common Stock) affecting the Common Stock which is effected
without receipt of consideration by the Company. The Committee shall have
authority to determine the adjustments to be made under this Section 10, and any
such determination by the Committee shall be final, binding and conclusive.

                   11. AMENDMENT OF THE PLAN. The Board of Directors of the
Company may amend the Plan from time to time in such manner as it may deem
advisable. Nevertheless, the Board of Directors of the Company may not (a)
change the class of individuals eligible to receive an ISO, (b) increase the
maximum number of shares as to which Options may be granted or (c) make any
other change or amendment to which stockholder approval is required in order to
satisfy the conditions set forth in Rule 16b-3 promulgated under the Exchange
Act, in each case without obtaining approval, within twelve months before or
after such action, by vote of a majority of the votes cast at a duly called
meeting of the stockholders at which a quorum representing a majority of all
outstanding voting stock of the Company is, either in person or by proxy,
present and voting on the matter. No amendment to the Plan shall adversely
affect any outstanding Option, however, without the consent of the Optionee.

                   12. NO COMMITMENT TO RETAIN. The grant of an Option pursuant
to the Plan shall not be construed to imply or to constitute evidence of any
agreement, express or implied, on the part of the Company or any Affiliate to
retain the Optionee in the employ or service of the Company or an Affiliate
and/or as a member of the Company's Board of Directors or in any other capacity.

                   13. WITHHOLDING OF TAXES. Whenever the Company proposes or is
required to deliver or transfer Shares in connection with the exercise of an
Option, the Company shall have the right to (a) require the recipient to remit
or otherwise make available to the Company an amount sufficient to satisfy any
federal, state and/or local withholding tax requirements prior to the delivery
or transfer of any certificate or certificates for such Shares or (b) take
whatever other action it deems necessary to protect its interests with respect
to tax liabilities. The Company's obligation to make any delivery or transfer of
Shares shall be conditioned on the Optionee's compliance, to the Company's
satisfaction, with any withholding requirement.

                   14. INTERPRETATION. It is the intent of the Company that
transactions under the Plan with respect to directors and officers (within the
meaning of Section 16(a) of the Exchange Act) satisfy the conditions of Rule
16b-3 promulgated under the Exchange Act. To the extent that any provision of
the Plan would result in a conflict with such conditions, such provision shall
be deemed null and void to the extent permitted by applicable law and in the
discretion of the Board of Directors. This Section 14 shall not be applicable if
no class of the Company's equity securities is then registered pursuant to
Section 12 of the Exchange Act.

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