U.S. SECURITIES AND EXCHANGE COMMISSION
________ Washington, D.C. 20549
| |
| FORM 5 | ANNUAL STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP
|________|
Filed pursuant to Section 16(a) of the Securities Exchange
Act of 1934, Section 17(a) of the Public Utility Holding
___ Company Act of 1935 or Section 30(f) of the Investment
| | Check this box Company Act of 1940
|___| if no longer subject OMB Number: 3235-0362
to Section 16. Form 4 Expires: Sept. 30,1998
or Form 5 obligations
may continue. See in-
struction 1(b).
___
| | Form 3 Holdings Reported
|___|
___
| | Form 4 Transactions Reported
|___|
<TABLE>
____________________________________________________________________________
|1.Name and Address of|2. Issuer and Ticker|6. Relationship of Reporting |
| Reporting Person | or Trading Symbol| Person to Issuer (check all |
| | | applicable) |
| | ADE Corporation | ( )Director ( ) 10% Owner |
| Ohm, William H. | (ADEX) | (x)Officer ( ) Other |
|_____________________|____________________| Vice President and Gen. Mgr. |
|(Last) (First) (MI)|3. IRS or Social| of wholly-owned subsidiary |
| | Security |_____________________________________|
| | Number of Re-|4.Statement for|7.Individual or |
| 80 Wilson Way | porting Per- | Month/Year | Joint/Group Filing |
|_____________________| son (volun.) | |X Form filed by One |
|(Street) | | FYE 4/31/97 | Reporting Person |
| | |_______________|_ Form filed by |
| Westwood, MA 02090 | |5.If Amendment,| More than One |
|_____________________| | Date of Ori- | Reporting Person |
|(City) (State) (Zip) | | ginal 6/13/96| |
|_____________________|________________|_______________|_____________________|
| | TABLE I - Non-Derivative Securities Acquired, |
| | Disposed of, or Beneficially Owned |
|_____________________|______________________________________________________|
|<CAPTION> | | | | | | |
|1.Title of |2.Trans-|3.Trans.|4.Securities |5.Amount |6.Owner-|7.Nature|
| Security | action| action| Acquired (A) or|of Secu- | ship | of In-|
| (Instr. 3)| Date | Code | Disposed of (D)|rities | form: | direct|
| | (Month/| (Instr.| (Instr. 3, 4 |Benefi- | Direct | Bene- |
| | Day/ | 8) | and 5) |cially | (D) or | ficial|
| | Year) |________|_________________|Owned at | Indi- | Owner-|
| | | | |(A)| |end of | rect | ship |
| | | Code |Amount|or | Price|Issuer's | (I) | (Instr.|
| | | | |(D)| |Fiscal | | 4) |
| | | | | | |Year | | |
|____________|________|________|______|___|______|_________|________|________|
|<S> |<C> | <C> |<C> |<C>|<C> |<C> |<C> |<C> |
| | | | | | |1,318 shs| D | |
| | | | | | | | | |
|____________|________|________|______|___|______|_________|________|________|
| | | | | | | | | |
| | | | | | | | | |
|____________|________|________|______|___|______|_________|________|________|
| | | | | | | | | |
| | | | | | | | | |
|____________|________|________|______|___|______|_________|________|________|
| | | | | | | | | |
| | | | | | | | | |
|____________|________|________|______|___|______|_________|________|________|
</TABLE>
*If the form is filed by more than one reporting person, see
Instruction 4(b)(v) SEC 2270 (7-96)
<PAGE>
FORM 5 (continued)
Table II - Derivative Securities Acquired, Disposed of, or Beneficially
Owned (e.g., puts, calls, warrants, options, convertible
securities)
<TABLE>
<CAPTION>
_________________________________________________________________________
|1.Title of Deri- |2.Con- |3.Trans-|4.Trans-|5.Number of |6.Date Exer- |
| vative Security| version| action| action| Derivative | cisable |
| (Instr. 3) | or Ex- | Date | Code | Securities | and Expir- |
| | ercise | (Month/| (Inst.| Acquired | ation Date |
| | Price | Day/ | 8) | (A) or Dis-| mo/day/yr |
| | of | Year) | | posed of |_____________|
| | Deri- | | | (D) (Instr.| Date | Expi-|
| | vative | | | 3, 4 and 5)| Exer-| ra- |
| | Secu- | | |_____________| cis- | tion |
| | rity | | | | | able | Date |
| | | | | (A) | (D) | | |
|_________________|_________|________|________|______|______|______|______|
|<S> |<C> |<C> |<C> |<C> |<C> |<C> |<C> |
|Option to |$17.625 |4/24/97 | A |10,000| | * |4/24/ |
|Purchase | | | | | | | 07 |
|_________________|_________|________|________|______|______|______|______|
| | | | | | | | |
| | | | | | | | |
|_________________|_________|________|________|______|______|______|______|
| | | | | | | | |
| | | | | | | | |
|_________________|_________|________|________|______|______|______|______|
</TABLE>
Continuation of Table II.
<TABLE>
<CAPTION>
______________________________________________________________
|7. Title and Amount|8. Price|9. Number|10. Owner- |11. Nature |
| of Underlying | of | of De-| ship | of In- |
| Securities | Deri-| riva- | Form of| direct |
| (Instr. 3 and 4)| vative| tive | Deriv. | Bene- |
| | Secu-| Secu- | ative | ficial |
|___________________| rity | rities| Securi-| Owner- |
| | Amount| (Inst.| Bene. | ty: Di-| ship |
| | or | 5) | Owned | rect(D)| (Instr.|
| Title | Number| | at End| or In- | 4) |
| | of | | of | direct | |
| | Shares| | Year | (I) | |
|___________|_______|________|_________|___________|___________|
|<S> |<C> |<C> |<C> |<C> |<C> |
|Common |10,000 | |10,000 | D | |
|Stock | | | | | |
|___________|_______|________|_________|___________|___________|
| | | | | | |
| | | | | | |
|___________|_______|________|_________|___________|___________|
| | | | | | |
| | | | | | |
|___________|_______|________|_________|___________|___________|
</TABLE>
Explanation of Responses:
*exercisable 2,000 shares on 4/24/98 and an additional 2,000 shares on each
of 4/24/99, 4/24/00, 4/24/01 and 4/24/02.
/s/ William H. Ohm 9/10/97
__________________________ ________
**Signature of Reporting Date
Person
**Intentional misstatements or omissions
of facts constitute Federal Criminal
Violations. See 18 U.S.C. 1001 and
15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be
manually signed. If space provided is insufficient,
see Instruction 6 for procedure.
Page 2
SEC 2270 (7-96)
