ADE CORP
SC 13D, 1998-06-22
MEASURING & CONTROLLING DEVICES, NEC
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                              UNITED STATES
                    SECURITIES AND EXCHANGE COMMISSION
                          WASHINGTON, D.C.  20549

                               SCHEDULE 13D

                 UNDER THE SECURITIES EXCHANGE ACT OF 1934
                           (Amendment No. ___)

                             ADE Corporation
          --------------------------------------------------------
                            (Name of Issuer)

                              Common Stock
          --------------------------------------------------------
                      (Title of Class of Securities)

                               000-26714
          --------------------------------------------------------
                             (CUSIP Number)

                         Robert Abbe, President
           80 Wilson Way, Westwood, MA  02090     (781) 467-3500
          --------------------------------------------------------
          (Name, Address and Telephone Number of Person Authorized
                  to Receive Notices and Communications)

                              June 11, 1998
           -------------------------------------------------------
           (Date of Event which Requires Filing of this Statement)

If the filing person has previously filed a statement on Schedule 13G to 
report the acquisition which is the subject of this Schedule 13D, and is
filing this schedule because of Rule 13d-1(b)(3) or (4), check the following
box [   ].

NOTE:  Six copies of this statement, including all exhibits, should be filed
with the Commission.  See Rule 13d-1(a) for other parties to whom copies are
to be sent.

*The remainder of this cover page shall be filled out for a reporting 
person's initial filing on this form with respect to the subject class of 
securities, and for any subsequent amendment containing information which 
would alter the disclosures provided in a prior cover page.

The information required on the remainder of this cover page shall not be 
deemed to be "filed" for the purpose of Section 18 of the Securities Exchange
Act of 1934 ("Act") or otherwise subject to the liabilities of that section 
of the Act but shall be subject to all other provisions of the Act (however, 
see the Notes).

                                    Page 1

<PAGE>

                                 SCHEDULE 13D

 --------------------------------                 ---------------------------
| CUSIP NO. 000-26714            |               |  PAGE 2 OF 4 PAGES        |
|           ---------            |               |                           |
 --------------------------------                 ---------------------------
- ------------------------------------------------------------------------------
| 1 |  NAME OF REPORTING PERSON                                              |
|   |  S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON                     |
|   |                                                                        |
|   |  Dr. Chris Koliopoulos                                                 |
|   |  ###-##-####                                                           |
|   |                                                                        |
- ------------------------------------------------------------------------------
| 2 |  CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP                      |
|   |                                                         __             |
|   |                                                    (a) |__|            |
|   |  Not Applicable                                    (b) |__|            |
|   |                                                                        |
- ------------------------------------------------------------------------------
| 3 |  SEC USE ONLY                                                          |
|   |                                                                        |
|   |                                                                        |
|   |                                                                        |
- ------------------------------------------------------------------------------
| 4 |  SOURCE OF FUNDS                                                       |
|   |                                                                        |
|   |  00                                                                    |
|   |                                                                        |
- ------------------------------------------------------------------------------
| 5 |  CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO  |
|   |  ITEMS 2(d) OR 2(e)                                         __         |
|   |                                                            |__|        |
|   |                                                                        |
- ------------------------------------------------------------------------------
| 6 |  CITIZENSHIP OR PLACE OF ORGANIZATION                                  |
|   |                                                                        |
|   |  U.S.                                                                  |
|   |                                                                        |
- ------------------------------------------------------------------------------
|                         | 7 |  SOLE VOTING POWER          1,334,000 SHARES |
|     Number of           |---------------------------------------------------
|       Shares            | 8 |  SHARED VOTING POWER                         |
|    Beneficially         |---------------------------------------------------
|      Owned By           | 9 |  SOLE DISPOSITIVE POWER     1,334,000 SHARES |
|   Each Reporting        |---------------------------------------------------
|     Person With         |10 |  SHARED DISPOSITIVE POWER                    |
- ------------------------------------------------------------------------------
|11 |  AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON          |
|   |                                                                        |
|   |  1,334,000 SHARES                                                      |
|   |                                                                        |
- ------------------------------------------------------------------------------
|12 |  CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES  |
|   |                                                                __      |
|   |                                                               |__|     |
- ------------------------------------------------------------------------------
|13 |  PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)                    |
|   |                                                                        |
|   |  10.18%                                                                |
- ------------------------------------------------------------------------------
|14 |  TYPE OF REPORTING PERSON*                                             |
|   |                                                                        |
|   |  IN                                                                    |
- ------------------------------------------------------------------------------

                                  Page 2 of 7
<PAGE>
                    SECURITIES AND EXCHANGE COMMISSION
                          WASHINGTON, D.C.  20549

                               SCHEDULE 13D
                 

ITEM 1.  Security and Issuer

         Common Stock, par value $.01 per share, of ADE Corporation, 
80 Wilson Way, Westwood, MA  02090-1806.

ITEM 2.  Identity and Background

         (a)  Dr. Chris Koliopoulos

         (b)  c/o Phase Shift Technology, Inc.
              3480 East Brittania, Suite 110
              Tucson, Arizona 85706

         (c)  President
              Phase Shift Technology, Inc.
              3480 East Brittania, Suite 110
              Tucson, Arizona 85706
              Principal business:  the design and manufacture of optical test
                                   and inspection equipment

         (d)  I have had no criminal convictions during the preceding five
years.

         (e)  I have not been party to any civil proceeding during the last
five years resulting in any judgment, decree or final order enjoining future
violations of, or prohibiting or mandating activities subject to, federal or 
state securities laws, or finding any violation of such laws.

         (f)  I am a U.S. citizen.

ITEM 3.  Source and Amount of Funds or Other Consideration

         Phase Shift Technology, Inc., in which I was a stockholder, merged
on June 11, 1998, with ADE Corporation and became a wholly-owned subsidiary
thereof.  I received 1,334,000 shares of the Common Stock of ADE Corporation
as consideration for my 67% equity interest in Phase Shift Technology, Inc.

ITEM 4.  Purpose of Transaction

         I am acquiring the subject shares for investment purposes and not 
for any of the purposes enumerated in the section.

ITEM 5.  Interest in Securities of the Issuer

         Please refer to Items 7 through 11 of the Cover Page to this Schedule
13D.

                                  Page 3
<PAGE>

ITEM 6.  Contracts, Arrangements, Understandings or Relationships with Respect
to Securities of the Issuer

         None

ITEM 7.  Material to be Filed as Exhibits

         None



SIGNATURE

     After reasonable inquiry and to the best of my knowledge and belief, I 
certify that the information set forth in this statement is true, complete 
and correct.


6/22/98                                         /s/ Chris Koliopoulos
- -----------------------------                   -------------------------------
Date                                            Signature

                                                Dr. Chris Koliopoulos
                                                -------------------------------
                                                Name/Title

                                     Page 4
<PAGE>



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