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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THE
CONSOLIDATED FINANCIAL STATEMENTS OF ADE CORPORATION FOR THE TWELVE MONTHS ENDED
APRIL 30, 2000 AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH FINANCIAL
STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> YEAR
<FISCAL-YEAR-END> APR-30-2000
<PERIOD-START> MAY-01-1999
<PERIOD-END> APR-30-2000
<CASH> 35,001
<SECURITIES> 0
<RECEIVABLES> 14,549
<ALLOWANCES> (629)
<INVENTORY> 29,968
<CURRENT-ASSETS> 84,758
<PP&E> 30,724
<DEPRECIATION> (12,851)
<TOTAL-ASSETS> 132,870
<CURRENT-LIABILITIES> 19,048
<BONDS> 11,950
0
0
<COMMON> 135
<OTHER-SE> 101,737
<TOTAL-LIABILITY-AND-EQUITY> 132,870
<SALES> 62,506
<TOTAL-REVENUES> 62,506
<CGS> 35,475
<TOTAL-COSTS> 35,475
<OTHER-EXPENSES> 47,167
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> 919
<INCOME-PRETAX> (18,856)
<INCOME-TAX> 102
<INCOME-CONTINUING> (18,958)
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> (20,447)
<EPS-BASIC> (1.53)
<EPS-DILUTED> (1.53)
</TABLE>
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