<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THE
UNAUDITED CONSOLIDATED FINANCIAL STATEMENTS OF ADE CORPORATION FOR THE THREE
MONTHS ENDED JULY 31, 2000.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 3-MOS
<FISCAL-YEAR-END> APR-30-2001
<PERIOD-START> MAY-01-2000
<PERIOD-END> JUL-31-2000
<CASH> 33,080
<SECURITIES> 0
<RECEIVABLES> 15,622
<ALLOWANCES> (701)
<INVENTORY> 31,371
<CURRENT-ASSETS> 86,219
<PP&E> 29,833
<DEPRECIATION> (14,251)
<TOTAL-ASSETS> 132,237
<CURRENT-LIABILITIES> 19,579
<BONDS> 11,800
0
0
<COMMON> 135
<OTHER-SE> 100,723
<TOTAL-LIABILITY-AND-EQUITY> 132,237
<SALES> 21,817
<TOTAL-REVENUES> 21,817
<CGS> 11,000
<TOTAL-COSTS> 11,000
<OTHER-EXPENSES> 11,644
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> (340)
<INCOME-PRETAX> (487)
<INCOME-TAX> 0
<INCOME-CONTINUING> (487)
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> (1,209)
<EPS-BASIC> (0.09)
<EPS-DILUTED> (0.09)
</TABLE>