<TABLE> <S> <C>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM KEY
TECHNOLOGY, INC.'S CONSOLIDATED FINANCIAL STATEMENTS CONTAINED IN ITS ANNUAL
REPORT ON FORM 10-K FOR THE PERIOD ENDED SEPTEMBER 30, 2000 AND IS QUALIFIED IN
ITS ENTIRETY BY REFERENCE TO SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<CURRENCY> US DOLLARS
<S> <C>
<PERIOD-TYPE> YEAR
<FISCAL-YEAR-END> SEP-30-2000
<PERIOD-START> OCT-01-1999
<PERIOD-END> SEP-30-2000
<EXCHANGE-RATE> 1
<CASH> 6,427
<SECURITIES> 108
<RECEIVABLES> 9,847
<ALLOWANCES> (421)
<INVENTORY> 22,011
<CURRENT-ASSETS> 42,043
<PP&E> 32,435
<DEPRECIATION> (18,651)
<TOTAL-ASSETS> 85,417
<CURRENT-LIABILITIES> 16,841
<BONDS> 19,483
14,156
0
<COMMON> 9,329
<OTHER-SE> 22,136
<TOTAL-LIABILITY-AND-EQUITY> 85,417
<SALES> 67,634
<TOTAL-REVENUES> 68,235
<CGS> 41,804
<TOTAL-COSTS> 41,804
<OTHER-EXPENSES> 26,815
<LOSS-PROVISION> (103)
<INTEREST-EXPENSE> 427
<INCOME-PRETAX> (708)
<INCOME-TAX> (375)
<INCOME-CONTINUING> (333)
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> (333)
<EPS-BASIC> (0.12)
<EPS-DILUTED> (0.12)
</TABLE>