Exhibit 21.1
List of Subsidiaries, as of December 6, 2000
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Key Technology, Inc., an Oregon corporation (the Registrant)
o Key Technology FSC, Inc., a Guam corporation
o Key Technology Holdings USA LLC, an Oregon limited liability company
o Suplusco Holding B.V., a Netherlands corporation
o Key Technology B.V., a Netherlands corporation
o Key Technology AMVC LLC, an Oregon limited liability company
o ALS, Inc., a California corporation
o ARC Netherlands B.V., a Netherlands corporation
o Ventek, Inc., an Oregon corporation
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