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EXHIBIT 23.3
CONSENT OF DELOITTE AND TOUCHE TOHMATSU, INDEPENDENT AUDITORS
We consent to the incorporation by reference in Registration Statement No.
333-94619 of Asyst Technologies, Inc. of Form S-8 of our report dated April
28, 2000, appearing in this Annual Report on Form 10-K of Asyst Technologies,
Inc. for the year ended March 31, 2000.
DELOITTE TOUCHE TOHMATSU
Nagoya, Japan
June 29, 2000
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