ULTRATECH STEPPER INC
10-K, 1998-03-27
SPECIAL INDUSTRY MACHINERY, NEC
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                            ------------------------
 
                                   FORM 10-K
 
                ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF
                      THE SECURITIES EXCHANGE ACT OF 1934
 
<TABLE>
<S>                         <C>
FOR THE FISCAL YEAR ENDED   COMMISSION FILE NUMBER
    DECEMBER 31, 1997               0-22248
</TABLE>
 
                            ------------------------
 
                            ULTRATECH STEPPER, INC.
                                  (REGISTRANT)
 
<TABLE>
<S>                       <C>
        DELAWARE                94-3169580
    (State or other          (I.R.S. Employer
      jurisdiction         Identification No.)
   of incorporation)
 
    3050 ZANKER ROAD              95134
  SAN JOSE, CALIFORNIA          (Zip Code)
 (Address of principal
   executive offices)
</TABLE>
 
                 REGISTRANT'S TELEPHONE NUMBER: (408) 321-8835
          Securities registered pursuant to Section 12(b) of the Act:
 
                                      NONE
 
          Securities registered pursuant to Section 12(g) of the Act:
 
                     COMMON STOCK; SERIES A PREFERRED STOCK
 
                            ------------------------
 
    Indicate by check mark whether the Registrant (1) has filed all reports
required to be filed by Section 13 or 15(d) of the Securities Exchange Act of
1934 during the preceding 12 months (or for such shorter period that the
Registrant was required to file such reports), and (2) has been subject to such
filing requirements for the past 90 days. Yes _X_ No ____
 
    Indicate by check mark if disclosure of delinquent filers pursuant to Item
405 of Regulation S-K is not contained herein, and will not be contained, to the
best of Registrant's knowledge, in definitive proxy or information statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K. [  ]
 
    The aggregate market value of the voting stock held by non-affiliates of the
Registrant, based on the closing price of the Common Stock on March 18, 1998, as
reported on the Nasdaq National Market was approximately $344,000,000. Shares of
Common Stock held by each officer and director and by each person who owns 5% or
more of the outstanding Common Stock have been excluded from this computation in
that such persons may be deemed to be affiliates. This determination of
affiliate status is not necessarily a conclusive determination for other
purposes.
 
    As of March 18, 1998, the Registrant had 20,857,848 shares of Common Stock
outstanding.
 
                      DOCUMENTS INCORPORATED BY REFERENCE
 
1.  Portions of the Registrant's Annual Report to Stockholders for the fiscal
    year ended December 31, 1997 are incorporated into Part II of this Annual
    Report on Form 10-K.
2.  Portions of the Registrant's Proxy Statement for the Annual Meeting of
    Stockholders to be held on June 3, 1998 are incorporated by reference into
    Part III of this Annual Report on Form 10-K.
 
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<PAGE>
                                     PART I
 
ITEM 1.  BUSINESS
 
    This Annual Report on Form 10-K may contain, in addition to historical
information, certain forward-looking statements that involve significant risks
and uncertainties. The Company's actual results could differ materially from the
information set forth in any such forward-looking statements. Factors that could
cause or contribute to such differences include those discussed below under
"Additional Risk Factors", as well as those discussed elsewhere in this Annual
Report on Form 10-K.
 
THE COMPANY
 
    Ultratech Stepper, Inc. ("Ultratech" or the "Company") develops,
manufactures and markets photolithography equipment designed to reduce the cost
of ownership for manufacturers of integrated circuits, thin film magnetic
recording devices and micromachined components. The Company supplies step-and-
repeat systems based on one-to-one ("1X") optical technology to customers
located throughout the United States, Europe, Asia/Pacific and Japan. Ultratech
believes that its steppers offer cost and certain performance advantages, as
compared with competitors' reduction steppers, to semiconductor device
manufacturers for applications involving line geometries of 0.65 microns or
greater ("noncritical feature sizes") and to thin film head manufacturers. The
Company's steppers do not currently address applications involving line
geometries of less than 0.65 microns ("critical feature sizes"). The Company's
steppers are used in "mix-and-match" applications to complement reduction
steppers and step-and-scan systems in advanced semiconductor device fabrication.
The Company's steppers also are used as replacements for scanners in existing
fabrication facilities to enable semiconductor manufacturers to extend the
useful life and increase the capabilities of their facilities. In addition, the
Company's steppers are used to manufacture high volume, low cost semiconductors
used in a variety of applications such as telecommunications, automotive control
systems and consumer electronics. Ultratech also supplies photolithography
systems to thin film head manufacturers and believes that its steppers offer
advantages over certain competitive reduction lithography tools with respect to
field size, throughput, specialized substrate handling and cost. Additionally,
the Company supplies photolithography equipment to the micromachining market,
where certain technical features such as high resolution at g-line wavelengths
and superior depth of focus are seen as offering advantages over competitive
tools.
 
    During the quarter ended December 31, 1997, the Company shipped its first
UltraBeam model V2000 electron beam pattern generation system based on
vector-scan technology for use in the development and production of photomasks
for the integrated circuit industry. The Company acquired this technology in
February 1997 when it acquired the assets of Lepton, Inc.
 
BACKGROUND
 
    The fabrication of devices such as integrated circuits ("semiconductors" or
"ICs") and thin film magnetic recording heads ("thin film heads" or "TFHs")
requires a large number of complex processing steps, including deposition,
photolithography and etching. Deposition is a process in which a layer of either
electrically insulating or electrically conductive material is deposited on the
surface of a wafer. The photolithographic imaging process imprints device
features on a light sensitive polymer photoresist. After development of the
photoresist, etching selectively removes material from areas not covered by the
imprinted pattern.
 
    Photolithography is one of the most critical and expensive steps in IC and
TFH device manufacturing. According to the Semiconductor Industry Association,
up to 35% of the cost of processing silicon wafers in the fabrication of ICs is
related to photolithography. Photolithography exposure equipment is used to
image device features on the surface of thin deposition films by selectively
exposing a light sensitive polymer photoresist coated on the wafer surface,
through a photomask containing the master image of a particular device layer.
Exposure of each process layer imprints a different set of features on the
device.
 
                                       2
<PAGE>
These device layers must be properly aligned to previously defined layers before
imaging takes place, so that structures formed on the wafers are correctly
placed, one on top of the other, in order to ensure a functioning device.
 
    Since the introduction of the earliest photolithography tools for IC
manufacturing in the early 1960s, a number of tools have been introduced to
enable manufacturers to produce increasingly complex devices that incorporate
progressively finer line widths. In the late 1970s, photolithography tools known
as step-and-repeat projection aligners, or steppers, were introduced. Unlike
prior tools, such as contact printers which required the photomask to physically
contact the wafer in order to transfer the entire pattern during a single
exposure, and scanners, which transferred the device image by scanning a narrow
slit of light across the entire photomask and wafer in a single, continuous
motion, steppers expose only a small square or rectangular portion of the wafer
in a single exposure, then move or "step" to an adjacent site to repeat the
exposure. This stepping process is repeated as often as necessary until the
entire wafer has been exposed. By imaging a small area, steppers are able to
achieve finer resolution and better alignment between the multiple device layers
and higher yield and productivity in certain devices than possible with earlier
tools. Since the late 1980s, 1X steppers have become a critical tool for the
fabrication of thin film heads because of their performance characteristics.
Thin film heads are devices that form the small read/write component in the most
advanced disk drives and have enabled disk drives to increase in speed and
memory capacity and perform more efficiently. Steppers are currently the
predominant lithography tools used in the manufacture of devices such as ICs and
TFHs.
 
    According to VLSI Research, Inc. ("VLSI"), a semiconductor industry market
research firm, the two principal types of steppers currently in use are
reduction steppers, which are the most widely used steppers, and one-to-one
steppers. Reduction steppers, which typically have reduction ratios of
five-to-one, are tools in which the photomask pattern containing the design is
typically five times larger than the device pattern that is to be exposed on the
wafer surface. Additionally, step-and-scan systems have been introduced recently
in order to address device sizes of .18 micron and below. In contrast to
steppers, which expose the entire field in a single exposure, step-and-scan
systems scan across the field until the entire field is exposed.
 
    The Company believes that one of the fastest growing segments of the
photolithography equipment market is reduction steppers and step-and-scan
systems that use a deep ultra-violet light source ("DUV"). The lower DUV
wavelength allows IC manufacturers to produce critical geometries of .25 microns
and below. The Company does not presently offer products for or compete in this
market. However, the Company markets certain of its products in mix-and-match
applications with these lithography systems.
 
    The principal advantage of reduction steppers and step-and-scan systems is
that they may be used in manufacturing steps requiring critical feature sizes
and are therefore necessary for manufacturing advanced ICs. One-to-one steppers,
on the other hand, are tools in which the photomask containing the design is the
same size as the device pattern that is exposed on the wafer surface. Current
one-to-one steppers, unlike current reduction steppers, are based on different
technology which incorporates both reflective and refractive elements in its
optical lens imaging system that, although highly sophisticated in design, is
much simpler than a current reduction stepper's lens imaging system which
incorporates only refractive elements. As a result, current 1X steppers are
generally less expensive than current reduction steppers required for critical
feature sizes. Because of their optical design, 1X steppers typically are also
able to expose larger areas and deliver greater energy to the wafer surface,
which generally results in higher throughput than is achievable with most
reduction steppers required for critical feature sizes. One-to-one steppers,
however, are currently limited to use in manufacturing steps involving
noncritical feature sizes. Accordingly, the Company believes that sales of its
systems are highly dependent upon capacity expansions by its customers.
Competitors to Ultratech have also introduced their own mix-and-match steppers
to complement their critical layer tools. Additionally, the Company believes
that competition for the mix-and-match business has increased due to the ability
of manufacturers of reduction steppers to mix-and-match their systems with
step-and-scan systems. See "Risk Factors: Importance of Mix-and-Match Strategy."
 
                                       3
<PAGE>
    In recent years, the complexity of ICs has increased significantly while, at
the same time, product cycles have shortened and the price per function of such
devices has continued to decline. As device complexity has increased, the device
geometries have continued to shrink, which in turn has increased the need for
tools such as reduction steppers that are capable of imaging critical feature
sizes. For example, fabrication of a 64-megabit dynamic random access memory
("DRAM") device with a minimum feature size of 0.35 microns involves an average
of 22-25 mask levels and approximately 600 process steps. Certain mask levels in
the fabrication of advanced devices require photolithography equipment such as
reduction steppers and step-and-scan systems that are capable of imaging lines
with critical feature sizes. A majority of the masking layers in such devices,
however, only require photolithography tools capable of imaging lines with
noncritical feature sizes. In addition, many IC devices, such as application
specific integrated circuits ("ASICs") used in various applications including
telecommunications, consumer electronics and automotive control systems, can be
manufactured using 1X steppers for the masking layers. Most advanced thin film
head devices, which currently require noncritical feature size imaging, are
manufactured using 1X steppers for the masking layers. However, the Company
believes that future thin film head device manufacturing may involve certain
steps that require critical feature size imaging.
 
    In the past, manufacturers of ICs and similar devices purchased capital
equipment based principally on technological capabilities. In view of the
significant capital expenditures required to construct, equip and maintain
fabrication facilities, relatively short product cycles and manufacturers'
increasing concern for overall fabrication costs, the Company believes that
manufacturers of ICs and thin film heads increasingly are focusing on reducing
their total cost to manufacture a device. A major component of this cost is the
cost of ownership of the equipment used for a particular application in a
fabrication facility. Cost of ownership is measured in terms of the costs
associated with the acquisition of equipment as well as factors such as
throughput, yield, up-time, service, labor overhead, maintenance, and various
other costs of owning and using the equipment. With increasing importance being
placed upon a system's overall cost of ownership, in many cases the system with
the most technologically advanced capabilities will not necessarily be the
manufacturing system of choice. As part of the focus on cost reduction, the
Company believes that device manufacturers are attempting to extend the useful
life and enhance the production capabilities of fabrication facilities by
selecting equipment that can replace existing tools while offering better
performance in a cost-effective manner.
 
PRODUCTS
 
    The Company currently offers three different series of systems for use in
the semiconductor fabrication process: the model 1500 and 1500 MVS Series, which
address the markets for scanner replacement and high volume/low cost
semiconductor fabrication; the Saturn Wafer Stepper-TM- Family, which addresses
the market for mix-and-match in advanced semiconductor fabrication; and the
Titan Wafer Stepper-TM- Family, which addresses the market for photosensitive
polyimide applications, bump processing for flip chip devices, as well as the
markets for scanner replacement and high volume/low cost semiconductor
fabrication. These steppers currently offer feature size capabilities ranging
from 1.4 microns to 0.65 microns and typically range in price from $800,000 to
$2.1 million. The model 1500 Series and the Titan Wafer Stepper Family offer g-
and h-line illumination specifications. The Saturn Wafer Stepper Family features
an i-line illumination specification that is designed to make them compatible
with advanced i-line reduction steppers. The Company shipped its first Saturn
Wafer Stepper in the fourth quarter of 1995. The Saturn Wafer Stepper Family,
with its 0.65 micron capability, extends mix-and-match applications to the
64/256-megabit dynamic random access memories and equivalent logic technology.
The Titan Wafer Stepper Family addresses, among other markets, an application
called photosensitive polyimide processing. This process is used in the
protective layer, between the inside of the device package and the active
device. Because it reduces the thickness of integrated circuits, this process is
useful for devices mounted on credit cards and can also be used in a number of
"micro" applications, such as laptop or palmtop computers. The polyimide process
is also commonly used in the manufacture of advanced DRAMs and microprocessors.
The primary advantage of a photosensitive polyimide process is that it
 
                                       4
<PAGE>
reduces process steps required in the fabrication of these devices. The Saturn
and Titan wafer stepper families are also used for bump processing. The Saturn
or Titan stepper is used in conjunction with electroplating to produce a pattern
of bumps, or metal connections, on the bond pads of the die for flip chip
devices. This pattern can be placed in a tight array across the entire die, as
opposed to the conventional method of wire bonding which is limited to the
periphery of the die. This allows manufacturers to shrink the die size. The flip
chip device can then be placed in a small outline package or directly on a
printed circuit board.
 
    The Company offers four different series of systems for use in the
fabrication of thin film heads: the model 1700 Series, which is the most widely
used stepper for the TFH market; the model 2700 Series, which is designed to
meet the need for improved performance; the model 4700, which provides
manufacturers the ability to print rowbars with a single exposure, further
enhancing both yields and magnetic recording head performance; and the model
6700, which extends the model 4700 capabilities into the submicron range by
utilizing i-line exposure. In addition, the Company provides three steppers
capable of patterning features on rowbars utilizing an alternate alignment
system (Machine Vision System, or "MVS"). The model 1700 MVS and 1700 ABS are
used to expose the Air Bearing Surface (ABS) pattern, while the model 1800
extends capabilities to much smaller submicron patterns used for pole trimming.
The Company's TFH steppers offer feature size capabilities ranging from 2.0 to
 .65 microns and typically range in price from $800,000 to $2.1 million.
 
    The Company also offers photolithography equipment for use in the
micromachining market. Micromachining combines electronics with mechanics in
small devices for detection and control of a wide variety of parameters.
Examples include accelerometers used to activate air bags in automobiles, and
membrane pressure sensors used in industrial control systems. These
micromachined devices are manufactured on silicon substrates using
photolithographic techniques similar to those used for manufacturing
semiconductors and thin film head devices. The Company's model 1500 and 1500 MVS
Series and the Saturn Wafer Stepper Family offer resolution and depth of focus
advantages to the manufacturers of micromachined devices.
 
    Additionally, in December 1997, the Company shipped its first UltraBeam
model V2000 electron beam pattern generation system based on vector-scan
technology for use in the development and production of photomasks for the IC
industry. This product has an approximate price range of $6 million to $9
million. The model V2000 system addresses the production requirements of
photomasks for .25 micron design rule and below. Using the vector/raster-scan
technology employed by the Company, the electron beam moves directly to those
areas of the photomask that are to be exposed, bypassing unexposed areas, and
then rasters in the area to be exposed. In contrast, alternative technologies
use an electron beam that is scanned continuously back and forth over the entire
photomask. Key specifications for the model V2000 system include overlay of 25
nanometers, CD uniformity of 35 nanometers, CD linearity of 20 nanometers and a
maximum writing rate of 500 MHz. These specifications will vary depending on the
customer application. The Company believes that its V2000 system will offer
certain cost and productivity advantages, as compared with certain competitive
systems.
 
    The Company also sells upgrades and refurbishments to certain older product
lines in its installed base. These refurbished older systems typically have a
purchase price significantly less than the purchase price for the Company's
newer systems.
 
                                       5
<PAGE>
    The year of introduction and major features of the Company's current stepper
systems are set forth below:
 
<TABLE>
<CAPTION>
                                                                                                          THROUGHPUT
                                                                     FIELD SIZE SPECIFICATIONS
                                                                   ------------------------------  SPECIFICATIONS* (WAFERS
                                                                                    MAXIMUM AREA          PER HOUR)
                                            YEAR OF      FEATURE    MAXIMUM AREA       SQUARE      ------------------------
             PRODUCT LINE                INTRODUCTION     SIZE     RECTANGLE (MM)       (MM)         6 INCH       8 INCH
- ---------------------------------------  -------------  ---------  --------------  --------------  -----------  -----------
<S>                                      <C>            <C>        <C>             <C>             <C>          <C>
SEMICONDUCTOR/MICRO-MACHINING:
1500 Series............................         1988        1.0mm    34.2 x 13.6     18.0 x 18.0           55           30
                                                1989        0.8mm    31.8 x 11.5     15.5 x 15.5           45           25
1500 Series MVS........................         1997        1.0mm    34.2 x 13.6     18.0 x 18.0           50           25
                                                1997        0.8mm    31.8 x 11.5     15.5 x 15.5           40           20
Saturn Wafer Stepper Family:
  Saturn I.............................         1997        1.0mm    44.0 x 22.0     26.7 x 26.7           90           80
  Saturn II............................         1997       0.75mm    44.0 x 22.0     26.7 x 26.7           90           80
  Saturn III...........................         1997       0.65mm    44.0 x 22.0     25.2 x 25.2           90           80
Titan Wafer Stepper Family:
  Titan I..............................         1997        1.4mm    50.0 x 25.0     27.4 x 27.4          103           88
  Titan II.............................         1997       0.75mm    44.0 x 22.0     26.7 x 26.7           90           85
  Titan III............................         1997       0.65mm    44.0 x 22.0     25.2 x 25.2           90           85
PHOTOMASK:
UltraBeam V2000........................         1997       0.65mm            n/a             n/a          n/a          n/a
THIN-FILM HEAD:
1700 Series............................         1991        1.2mm    34.2 x 13.6     18.0 x 18.0           70           50
                                                1991        1.0mm    34.2 x 13.6     18.0 x 18.0           70           50
1700 MVS...............................         1995        1.0mm    34.2 x 13.6     18.0 x 18.0          n/a          n/a
1700 ABS...............................         1997        2.0mm    30.0 x 10.0             n/a          n/a          n/a
1800...................................         1997        0.8mm    28.0 x  2.0             n/a          n/a          n/a
2700 Series............................         1992        1.2mm    34.2 x 13.6     18.0 x 18.0           78           68
                                                1992        1.0mm    34.2 x 13.6     18.0 x 18.0           78           68
4700...................................         1994        1.0mm    55.0 x 18.0     26.7 x 26.7           98           92
6700...................................         1996       0.65mm    55.0 x 18.0     26.7 x 26.7           96           90
6800...................................         1997       0.75mm    55.0 x 18.0     26.7 x 26.7           98           92
</TABLE>
 
- ------------------------
 
* Actual throughput varies depending upon customer application.
 
RESEARCH, DEVELOPMENT AND ENGINEERING
 
    The semiconductor and magnetic recording head manufacturing industries are
subject to rapid technological change and new product introductions and
enhancements. The Company believes that continued and timely development and
introduction of new and enhanced systems are essential for the Company to
maintain its competitive position. The Company has made a substantial investment
in the research and development of its core optical technology, which the
Company believes is critical to its financial results. The Company intends to
continue to develop its technology and to develop innovative products and
product features to meet customer demands. Current engineering projects include
the continued development, documentation and transition to commercial
manufacturing of the UltraBeam model V2000 electron beam pattern generation
system, continued research and development of the Verdant Technologies' (a
wholly-owned subsidiary of Ultratech Stepper) system for advanced thermal
processing and creation of ultrashallow junctions (formerly referred to as the
Company's PGILD project), continued development and documentation of the Saturn
Wafer Stepper Family and model 6700 wafer stepper, and development of larger and
more flexible optical systems. Other research and development
 
                                       6
<PAGE>
efforts are currently focused on reliability improvement; manufacturing cost
reduction; year 2000 compliance; and performance enhancement and development of
new features for existing systems, both for inclusion in the Company's systems
and to meet specific customer order requirements. These research and development
efforts are undertaken, principally, by the Company's research, development and
engineering organizations and costs are generally expensed as incurred. Other
operating groups within the Company support the above referenced research,
development and engineering efforts, and the associated costs are charged to
these organizations as incurred. The Company also has programs devoted to the
development of new photolithography systems, including new generations of
photolithography systems for existing and new markets, enhancements and
extensions of existing photolithography systems for existing and new markets and
custom engineering for specific customers.
 
    The Company works with many customers to develop technology required to
manufacture advanced devices or to lower the customer's cost of ownership. The
Company maintains an engineering department that supports customer design of 1X
stepper photomasks for both test and production purposes and an applications
engineering group, consisting of highly qualified engineers located throughout
the world that assist customers in optimizing the use of the Company's systems.
 
    The Company has historically devoted a significant portion of its financial
resources to research and development programs and expects to continue to
allocate significant resources to these efforts in the future. As of December
31, 1997, the Company had approximately 129 full-time employees engaged in
research, development, and engineering. For 1997, 1996 and 1995, total research,
development, and engineering expenses were approximately $26.4 million, $27.2
million and $22.7 million, respectively, and represented 17.9%, 14.1% and 14.4%
of the Company's net sales, respectively.
 
SALES AND SERVICE
 
    The Company markets and sells its products in the United States and Europe
principally through its direct sales organization. The Company sells its
products in the Asia/Pacific region primarily through outside sales
organizations. In December 1997, the Company terminated its relationship with
its Japanese distributor, Innotech Corporation. The Company is presently in the
process of establishing a direct sales force in Japan. This strategy is
anticipated to contribute to higher selling, general and administrative expenses
in 1998, relative to 1997, related to transitional costs as well as higher
ongoing expenses. See "Risk Factors: International Sales; Japanese Market."
 
    Ultratech's service personnel are based throughout the United States,
Europe, Asia/Pacific and Japan. The Company currently leases four sales and
service offices in the United States outside of California, maintains
subsidiaries in the United Kingdom, Japan and Thailand and leases offices for
its branches in Korea and Taiwan to service equipment and support customers in
such locations. As part of its customer service, Ultratech maintains an on-line
computerized network of the Company's parts inventory in the United States,
Europe and Japan.
 
    The Company believes that as semiconductor and thin film head manufacturers
produce increasingly complex devices, they will require a higher degree of
support. Reliability, performance, yield, cost, uptime and mean time between
failure are increasingly important factors by which customers evaluate potential
suppliers of photolithography equipment. The Company believes that the strength
of its worldwide service and support organization is an important factor in its
ability to sell its systems, maintain customer loyalty and reduce the
maintenance costs of its systems. In addition, the Company believes that working
with its suppliers and customers is necessary to ensure that the Company's
systems are cost effective, technically advanced and designed to satisfy
customer requirements.
 
    The Company supports its customers with field service, technical service
engineers and training programs. The Company provides its customers with
comprehensive support and service before, during and after delivery of its
systems. To support the sales process and to enhance customer relationships, the
Company works closely with prospective customers to develop hardware and
software test specifications
 
                                       7
<PAGE>
and benchmarks, and often designs customized applications to enable prospective
customers to evaluate the Company's equipment for their specific needs. Prior to
shipment, Ultratech's support personnel typically assist the customer in site
preparation and inspection, and typically provide customers with training at the
Company's facilities or at the customer's location. The Company currently offers
to its customers various courses of instruction on the Company's systems,
including instructions in system hardware and software tools for optimizing the
Company's systems. The Company's customer training program also includes
instructions in the maintenance of the Company's systems. The Company's field
support personnel work with the customer's employees to install the system and
demonstrate system readiness. Technical support is also available through
on-site Company personnel.
 
    In general, the Company warrants its new systems against defects in design,
materials and workmanship for one year. The Company offers its customers
additional support after the warranty period in the form of maintenance
contracts for specified time periods. Such contracts include various options
such as priority response, planned preventive maintenance, scheduled one-on-one
training, daily on-site support, and monthly system and performance analysis.
 
MANUFACTURING
 
    The Company performs all of its manufacturing activities (final assembly,
system testing and certain subassembly) in clean room environments totaling
approximately 40,000 square feet. These facilities are located in California and
New Jersey. Performing manufacturing operations in California exposes the
Company to a higher risk of natural disasters, particularly floods and
earthquakes.
 
    The Company's manufacturing activities consist of assembling and testing
components and subassemblies, which are then integrated into finished systems.
The Company is relying increasingly on outside vendors and subcontractors to
manufacture certain components and subassemblies. This strategy has enabled the
Company to increase its manufacturing capacity. The Company orders one of the
most critical components of its technology, the glass for its lenses, from
suppliers on purchase orders. The Company then designs the lenses and provides
the lens specifications to other suppliers that grind the lenses. The Company
then assembles and tests the optical lenses in its metrology laboratory. The
Company has recorded the critical parameters of each of its optical lenses sold
since 1982 and believes that such information enables it to supply lenses to its
customers that match the characteristics of its customers' existing lenses.
Prior to shipment, the customer's engineers may perform acceptance tests at
Ultratech's facility. After passing the acceptance test, the system is packaged
in the clean room environment and prepared for shipment.
 
    The Company procures certain of its critical systems' components,
subassemblies and services from a single supplier or a limited group of
suppliers in order to ensure overall quality and timeliness of delivery. To
date, the Company has been able to obtain adequate services and supplies of
components and subassemblies for its systems in a timely manner. However,
disruption or termination of certain of these sources, due to year 2000
compliance issues or other factors, could have a material adverse effect on the
Company's business, financial condition and results of operations. The Company's
reliance on sole or a limited group of suppliers and the Company's increasing
reliance on subcontractors involve several risks, including a potential
inability to obtain an adequate supply of required components and reduced
control over pricing, quality and timely delivery of components. Although the
timeliness, yield and quality of deliveries to date from the Company's
subcontractors have been acceptable, manufacture of certain of these components
and subassemblies is an extremely complex process, and long lead times are
required. Any inability to obtain adequate deliveries or any other circumstance
that would require the Company to seek alternative sources of supply or to
manufacture such components internally could significantly increase
manufacturing costs and could delay the Company's ability to ship its products,
which could damage relationships with current and prospective customers and
therefore would have a material adverse effect on the Company's business,
financial condition and results of operations.
 
                                       8
<PAGE>
    The Company maintains a company-wide quality program that it believes has a
direct effect on its results of operations. The intent of the program is to
provide continuous improvement in the Company's steppers and services to meet
customer requirements. The Company trains all of its employees in basic quality
skills and regularly participates in quality sharing meetings with other
equipment manufacturers and customer quality audits of procedures and personnel.
The Company achieved ISO 9001 certification in 1996, and has maintained this
certification uninterrupted through this report date.
 
COMPETITION
 
    The capital equipment industry in which the Company competes is intensely
competitive. A substantial investment is required to install and integrate
capital equipment into a semiconductor or thin film head production line. The
Company believes that once a device manufacturer has selected a particular
vendor's capital equipment, the manufacturer generally relies upon that
equipment for the specific production line application and, to the extent
possible, subsequent generations of similar products. Accordingly, it is
difficult to achieve significant sales to a particular customer once another
vendor's capital equipment has been selected. The Company experiences intense
competition worldwide from a number of leading foreign and domestic
manufacturers, such as Nikon, Canon, ASM Lithography, Ltd. ("ASML") and Silicon
Valley Group, Inc., all of which have substantially greater financial,
marketing, technical and other resources than the Company. Nikon supplies a 1X
stepper for use in the manufacture of liquid crystal displays and both Canon and
Nikon offer reduction steppers for thin film head fabrication. The Company
believes that future thin film head production may involve manufacturing steps
that require critical feature sizes. The Company's current steppers do not
address device layers below .65 microns. In addition, Nikon and Canon are
shipping their own widefield mix-and-match lithography systems and ASML has
recently introduced an i-line step-and-scan system for mix-and-match with their
DUV step-and-scan systems. (See: "Additional Risk Factors: Importance of
Mix-and-Match Strategy"). Additionally, ASML has recently announced their intent
to compete in the low-cost lithography market. The Company's UltraBeam model
V2000 electron beam pattern generation system competes against systems produced
by ETEC Systems, Inc.; Hitachi, Ltd.; Leica Camera AG; and JEOL, Ltd. In
addition, the Company believes that the high cost of developing new lithography
tools has caused its competitors to collaborate with customers and other parties
in various areas such as research and development, manufacturing and marketing,
thereby resulting in a combined competitive threat with significantly enhanced
financial, technical and other resources. The Company expects its competitors to
continue to improve the performance of their current products. These competitors
have stated that they will introduce new products with improved price and
performance characteristics that will compete directly with the Company's
products. This could cause a decline in sales or loss of market acceptance of
the Company's steppers, and thereby materially adversely affect the Company's
business, financial condition and results of operations. There can be no
assurance that enhancements to, or future generations of, competing products
will not be developed that offer superior cost of ownership and technical
performance features. The Company believes that to be competitive, it will
require significant financial resources in order to continue to invest in new
product development, features and enhancements, to introduce next generation
stepper systems on a timely basis, and to maintain customer service and support
centers worldwide. In marketing its products, the Company will also face
competition from vendors employing other technologies, such as excimer lasers
and phase-shift mask technology, which may extend the capabilities of
competitive products beyond their current limits or increase their productivity.
In addition, increased competitive pressure could lead to intensified
price-based competition, resulting in lower prices and margins, which would
materially adversely affect the Company's business, financial condition and
operating results. There can be no assurance that the Company will be able to
compete successfully in the future.
 
    Japanese IC manufacturers have a significant share of the worldwide market
for certain types of ICs for which the Company's systems are used. However, the
Japanese stepper manufacturers are well established in the Japanese stepper
market, and it is extremely difficult for non-Japanese lithography equipment
companies to penetrate the Japanese stepper market. To date, the Company has not
established
 
                                       9
<PAGE>
itself as a major competitor in the Japanese IC equipment market and there can
be no assurance that the Company will be able to achieve significant sales to
Japanese IC manufacturers in the future. See "International Sales; Japanese
Market."
 
INTELLECTUAL PROPERTY RIGHTS
 
    Although the Company attempts to protect its intellectual property rights
through patents, copyrights, trade secrets and other measures, it believes that
any success will depend more upon the innovation, technological expertise and
marketing abilities of its employees. Nevertheless, the Company has a policy of
seeking patents when appropriate on inventions resulting from its ongoing
research and development and manufacturing activities. The Company owns various
United States and foreign patents, which expire on dates ranging from July 2000
to May 2016, and has various United States and foreign patent applications
pending. The Company also has various registered trademarks and copyright
registrations covering mainly software programs used in the operation of its
stepper systems. The Company also relies upon trade secret protection for its
confidential and proprietary information. There can be no assurance that the
Company will be able to protect its technology adequately or that competitors
will not be able to develop similar technology independently. There can be no
assurance that any of the Company's pending patent applications will be issued
or that foreign intellectual property laws will protect the Company's
intellectual property rights. In addition, litigation may be necessary to
enforce the Company's patents, copyrights or other intellectual property rights,
to protect the Company's trade secrets, to determine the validity and scope of
the proprietary rights of others or to defend against claims of infringement.
Such litigation could result in substantial costs and diversion of resources and
could have a material adverse effect on the Company's business, financial
condition and results of operations, regardless of the outcome of the
litigation. There can be no assurance that any patent issued to the Company will
not be challenged, invalidated or circumvented or that the rights granted
thereunder will provide competitive advantages to the Company. Furthermore,
there can be no assurance that others will not independently develop similar
products, duplicate the Company's products or, if patents are issued to the
Company, design around the patents issued to the Company.
 
    Although there are no pending lawsuits against the Company regarding
infringement claims with respect to any existing patents or any other
intellectual property rights, the Company has in the past been notified of
claims that it may be infringing intellectual property rights possessed by third
parties. The Company has in the past been notified in prior years by certain
customers that the Company may be obligated to defend or settle claims that the
Company's products infringe any of such patents and, in the event it is
subsequently determined that the customer infringes any of such patents, they
intend to seek reimbursement from the Company for damages and other expenses
resulting from this matter.
 
    There can be no assurance that infringement claims by third parties or
claims for indemnification resulting from infringement claims will not be
asserted in the future, or that such assertions will not materially adversely
affect the Company's business, financial condition and results of operations,
regardless of the outcome of any litigation. With respect to any such future
claims, the Company may seek to obtain a license under the third party's
intellectual property rights. There can be no assurance, however, that a license
will be available on reasonable terms or at all. The Company could decide, in
the alternative, to resort to litigation to challenge such claims. Such
challenges could be extremely expensive and time consuming and could materially
adversely affect the Company's business, financial condition and results of
operations, regardless of the outcome of any litigation.
 
ENVIRONMENTAL REGULATIONS
 
    The Company is subject to a variety of governmental regulations relating to
the use, storage, discharge, handling, emission, generation, manufacture and
disposal of toxic or other hazardous substances used to manufacture the
Company's systems. The Company believes that it is currently in compliance in
all material respects with such regulations and that it has obtained all
necessary environmental permits to
 
                                       10
<PAGE>
conduct its business. Nevertheless, the failure to comply with current or future
regulations could result in substantial fines being imposed on the Company,
suspension of production, alteration of the manufacturing process or cessation
of operations. Such regulations could require the Company to acquire expensive
remediation equipment or to incur substantial expenses to comply with
environmental regulations. Any failure by the Company to control the use,
disposal or storage of, or adequately restrict the discharge of, hazardous or
toxic substances could subject the Company to significant liabilities.
 
CUSTOMERS, APPLICATIONS AND MARKETS
 
    The Company sells its systems to semiconductor, photomask, thin film head
and micromachining manufacturers located throughout the United States, Europe,
Asia/Pacific and Japan. Semiconductor manufacturers have purchased the model
1500 Series steppers, the Saturn Wafer Stepper Family, and the Titan Wafer
Stepper Family for the fabrication of microprocessors, microcontrollers, DRAMs
and ASICs. Such systems are used in mix-and-match environments with other
lithography tools, as replacements for scanners and contact printers, in
start-up fabrication facilities, in packaging for ultrathin and flip chip
applications and for high volume, low cost noncritical feature size
semiconductor production. Thin film head manufacturers have purchased the model
1700 Series steppers, the model 2700 Series steppers, the model 4700 stepper and
the model 6700 stepper because of their advantages in yield, throughput and
overall cost of ownership. Manufacturers of micromachined components have
purchased the model 1500 Series steppers and Saturn/Titan wafer stepper families
because of high throughput and flexible field size advantages along with
cost-effective, submicron imaging capabilities. Additionally, during December of
1997 the Company shipped its first UltraBeam model V2000 electron beam
lithography system to a developer and manufacturer of photomasks for the IC
industry.
 
    Historically, Ultratech has sold a substantial portion of its systems to a
limited number of customers. In 1997, sales to two customers accounted for 14%
and 10% of the Company's net sales. In 1996, sales to two customers accounted
for approximately 17% and 12% of the Company's net sales. In 1995, sales to one
customer accounted for approximately 12% of the Company's net sales. The Company
expects that sales to relatively few customers will continue to account for a
high percentage of its net sales in the foreseeable future and believes that the
Company's financial results depend in significant part upon the success of these
major customers, and the Company's ability to meet their future capital
equipment needs. Although the composition of the group comprising the Company's
largest customers may vary from period to period, the loss of a significant
customer or any reduction in orders by any significant customer, including
reductions due to market, economic or competitive conditions in the
semiconductor or magnetic recording head industries or in the industries that
manufacture products utilizing integrated circuits or thin-film heads, may have
a material adverse effect on the Company's business, financial condition and
results of operations. The Company's ability to increase its sales in the future
will depend in part upon its ability to obtain orders from new customers as well
as the financial condition and success of its customers and the general economy,
of which there can be no assurance. See "Cyclicality of Semiconductor and
Magnetic Recording Head Industries."
 
    Sales of the Company's systems depend, in significant part, upon the
decision of a prospective customer to increase manufacturing capacity or to
restructure current manufacturing facilities, either of which typically involves
a significant commitment of capital. In view of the significant investment
involved in a system purchase, the Company has experienced and may continue to
experience delays following initial qualification of the Company's systems as a
result of delays in a customer's approval process. For this and other reasons,
the Company's systems typically have a lengthy sales cycle during which the
Company may expend substantial funds and management effort in securing a sale.
Lengthy sales cycles subject the Company to a number of significant risks,
including inventory obsolescence and fluctuations in operating results, over
which the Company has little or no control. See "Fluctuations in Operating
Results; Limited System Sales; Customer Concentration."
 
                                       11
<PAGE>
    During 1997, 1996 and 1995, international sales accounted for 33%, 53% and
55% of net sales, respectively. The Company believes that the severe currency
and equity market fluctuations that have been experienced recently by many of
the Asian markets will cause a further reduction in orders of the Company's
products, particularly in the short-term, which will have a material adverse
effect on the Company's business, financial condition and results of operations.
The Company's international system sales are typically denominated in United
States dollars or dollar equivalents. For financial information concerning
foreign and domestic operations and export sales, please refer to Note 13 of the
Ultratech Stepper, Inc. Consolidated Financial Statements, incorporated by
reference from page 44 of the Company's Annual Report to Stockholders. See "Risk
Factors: International Sales; Japanese Market."
 
BACKLOG
 
    The Company schedules production of its systems based upon order backlog,
informal customer commitments and general economic forecasts for its targeted
markets. The Company includes in its backlog all customer orders for its
one-to-one reflective and refractive optical technology systems for which it has
accepted purchase order numbers and assigned shipment dates within six months,
all customer orders for its electron beam lithography systems for which it has
accepted purchase order numbers and assigned shipment dates within one year, as
well as all orders for service, spare parts and upgrades. All orders are subject
to cancellation or rescheduling by the customer with limited or no penalties.
Because of orders received for systems to be shipped in the same quarter in
which the order is received, possible changes in system delivery schedules,
cancellations of orders and potential delays in system shipments, the Company's
backlog at any particular date may not necessarily be representative of actual
sales for any succeeding period. As of December 31, 1997, the Company's backlog
was approximately $65.6 million, compared with approximately $81.3 million as of
December 31, 1996.
 
EMPLOYEES
 
    At December 31, 1997, the Company had approximately 576 full-time employees,
including 129 engaged in research, development, and engineering, 45 in sales and
marketing, 173 in customer service and support, 164 in manufacturing and 65 in
general administration and finance. The Company believes any future success,
should it occur, would depend, in large part, on its ability to attract and
retain highly skilled employees. None of the employees of the Company is covered
by a collective bargaining agreement. The Company considers its relationships
with its employees to be good.
 
ADDITIONAL RISK FACTORS
 
    FLUCTUATIONS IN OPERATING RESULTS; LIMITED SYSTEM SALES; CUSTOMER
CONCENTRATION  The Company's operating results have fluctuated significantly in
the past and will continue to fluctuate significantly in the future depending
upon a variety of factors, including cyclicality in the Company's target
markets; the timing of significant orders; lengthy sales cycles for the
Company's products; the mix of products sold; lengthy manufacturing cycles for
the Company's products; lengthy product development cycles for new products; the
timing of new product announcements and releases by the Company or its
competitors; market acceptance of new products and enhanced versions of the
Company's products; manufacturing inefficiencies associated with the startup of
new product introductions; customer concentration; ability to volume produce
systems and meet customer requirements; patterns of capital spending by
customers; product discounts; changes in pricing by the Company, its competitors
or suppliers; political and economic instability throughout the world, in
particular the Asia-Pacific region; natural disasters (particularly flooding and
earthquakes); regulatory changes; business interruptions related to the
Company's occupation of its facilities; and various competitive factors
including price-based competition and competition from vendors employing other
technologies. The Company's gross profit as a percentage of sales has been and
will continue to be significantly affected by a variety of factors, including
the mix of products sold; nonlinearity of shipments during the quarter; the
percentage of international sales, which typically have lower gross margins than
domestic sales principally due to higher field service and support costs;
increased competition in the Company's targeted markets; the introduction of new
products, which typically have
 
                                       12
<PAGE>
higher manufacturing costs until manufacturing efficiencies are realized and are
typically discounted more than existing products until the products gain market
acceptance; the rate of capacity utilization; and the implementation of
subcontracting arrangements.
 
    The Company derives a substantial portion of its total net sales from sales
of a relatively small number of systems, which typically range in price from
$800,000 to $2.1 million. Additionally, the Company's Model V2000 electron beam
lithography system, first shipped in the quarter ended December 31, 1997, has an
approximate price range of $6 million to $9 million. As a result of these sale
prices, the timing of recognition of revenue from a single transaction has had
and will continue to have a significant impact on the Company's net sales and
operating results. The Company's backlog at the beginning of a period typically
does not include all of the sales needed to achieve the Company's objectives for
that period. In addition, orders in backlog are subject to cancellation, delay,
deferral or rescheduling by a customer with limited or no penalties.
Consequently, the Company's net sales and operating results for a period have
been and continue to depend upon the Company obtaining orders for systems to be
shipped in the same period in which the order is received. The Company's
business and financial results for a particular period could be materially
adversely affected if an anticipated order for even one system is not received
in time to permit shipment during the particular period or if orders previously
recorded by the Company are deferred or cancelled. Furthermore, a substantial
portion of the Company's net sales has historically been realized near the end
of each quarter. Accordingly, the failure to receive anticipated orders or
delays in shipments near the end of a particular quarter, due, for example, to
unanticipated shipment reschedulings, cancellations, delays or deferrals by
customers or to unexpected manufacturing difficulties or delays in deliveries by
suppliers due to their long production lead times or otherwise, may cause net
sales in a particular period to fall significantly below the Company's
expectations, which would materially adversely affect the Company's operating
results for such period. In particular, the significantly long manufacturing
cycles of the Company's linear motor-based steppers, which include the Model
4700 stepper, Model 6700 stepper, Titan Wafer Stepper and Saturn Wafer Stepper,
and the long lead time for lenses and other materials, could cause shipments of
such products to be delayed from one quarter to the next, which could materially
adversely affect the Company's financial condition and results of operations for
a particular quarter. Additionally, the Company has very limited experience in
the manufacture of its Model V2000 electron beam pattern generation system, and
the Company is in the process of documenting the manufacturing processes for
this product. The Model V2000 production process is extremely complex and the
product has a significantly long manufacturing cycle, which greatly increases
the likelihood of delays in shipments from one quarter to the next. Due to the
high list price for these systems, shipment delays would materially adversely
affect the Company's financial condition and results of operations for a
particular quarter if the shipment were delayed to the following quarter. The
impact of these and other factors on the Company's sales and operating results
in any future period cannot be forecast with certainty.
 
    Historically, the Company has sold a substantial portion of its systems to a
limited number of customers. See "Customers, Applications and Markets." In
addition to the business risks associated with the dependence on these major
customers, these significant customer concentrations have in the past, and have
currently resulted in significant concentrations of accounts receivable and
leases receivable. In particular, sales to a relatively few customers in the
thin film head industry currently make up a significant portion of the Company's
receivables. Recently, the Company has increased its level of customer leasing
activity and has granted extended payment terms to many of its customers. The
formation of significant and concentrated long-term receivables and the granting
of extended payment terms exposes the Company to additional risks, including the
risk of default by one or more customers representing a significant portion of
the Company's total receivables. If such default were to occur, the Company's
business, financial condition and results of operations would be materially
adversely affected.
 
                                       13
<PAGE>
    The Company's business has in prior years been subject to seasonality,
although the Company believes such seasonality has been masked in recent years
by cyclical trends within the semiconductor and thin film industries. In
addition, the need for continued expenditures for research and development,
capital equipment purchases and ongoing training and customer service and
support worldwide, among other factors, will make it difficult for the Company
to reduce its significant operating expenses in a particular period if the
Company fails to achieve its net sales goals for the period. Additionally, the
Company has recently experienced manufacturing inefficiencies associated with
shifts in product demand and underutilization of manufacturing capacity and the
Company presently anticipates that these trends will continue for at least the
next several quarters. Such continuation would materially adversely affect the
Company's business, financial condition and results of operations.
 
    CYCLICALITY OF SEMICONDUCTOR AND MAGNETIC RECORDING HEAD INDUSTRIES  The
Company's business depends in significant part upon capital expenditures by
manufacturers of semiconductors, photomasks and thin film head magnetic
recording devices, which in turn depend upon the current and anticipated market
demand for such devices and products utilizing such devices. The semiconductor
industry is highly cyclical and historically has experienced recurring periods
of oversupply, as evidenced by the current downturn in the semiconductor capital
equipment industry. This has, from time to time, resulted in significantly
reduced demand for capital equipment including the systems manufactured and
marketed by the Company. The Company believes that markets for new generations
of semiconductors will also be subject to similar fluctuations. In the past, the
semiconductor industry has experienced significant growth, which, in turn, has
caused significant growth in the capital equipment industry. However, the
semiconductor industry has more recently experienced a cyclical downturn, and
this has resulted in a significant reduction in capital spending. The Company
has recently experienced cancellation of purchase orders, shipment delays and
purchase order restructurings by several of its customers and there can be no
assurance that this trend will not continue in the future.
 
    The Company attempts to mitigate the risk of cyclicality by participating in
both the semiconductor and magnetic recording head markets, as well as
diversifying into new markets such as photolithography for micromachining and
the development of photomasks. Despite such efforts, when one or more of such
markets experiences a downturn or slowdown, such as is currently occurring in
the semiconductor and thin film head markets, the Company's net sales and
operating results can be materially adversely affected, and may even result in
net losses for one or more quarters. Accordingly, the Company can give no
assurance that it will be able to achieve or maintain its current level of
sales. Based on present market conditions in both the semiconductor and thin
film head industries, and nonlinearity of system shipments, the Company
presently expects that future quarterly comparisons, through at least the second
quarter of 1998, will indicate a period-over-comparable period decline in the
Company's net sales and net income and may also result in a sequential decline
in sales and net income, relative to levels achieved during the fourth quarter
of 1997. Additionally, declines in net sales, relative to the quarter ended
December 31, 1997, may result in net losses due to the Company's current level
of operating expenses.
 
    During 1997, 1996 and 1995, approximately 50%, 40% and 30%, respectively, of
the Company's net sales were derived from sales to thin film head manufacturers
and micromachining customers. The Company has recently experienced a significant
decline in orders from customers in the thin film head market. Additionally,
several companies within the thin film head and disk drive industries have
recently announced lower than expected earnings and have announced restructuring
or other non-recurring charges. The Company believes these events indicate that
the thin film head and disk drive industries have excess capacity in the
near-term. This will result in lower sales and delays or deferrals of customer
orders from these industries, which will materially adversely affect the
Company's business, financial condition and results of operations in the near
term. Additionally, the Company is experiencing increased competition in this
market from Canon and Nikon, and may experience competition from ASML. The
Company's business and operating results would be materially adversely affected
by downturns or slowdowns in the thin film head market or by loss of market
share.
 
                                       14
<PAGE>
    IMPORTANCE OF MIX-AND-MATCH STRATEGY  A principal element of the Company's
strategy is to sell its systems to advanced semiconductor fabrication facilities
for mix-and-match applications. This strategy depends, in significant part, upon
the recognition by semiconductor manufacturers that costs can be reduced by
using the Company's systems to perform exposure on semiconductor process layers
requiring feature sizes of 0.65 microns or greater and the willingness of such
manufacturers to implement processes to lower manufacturing costs. Many
semiconductor fabrication facilities have limited or no experience with
integrating lithography tools in the manner necessary for full implementation
and acceptance of a mix-and-match manufacturing strategy, and there can be no
assurance that semiconductor manufacturers will adopt such a strategy. The
Company has designed certain of its systems to operate in a compatible manner
with its competitors' reduction steppers and step-and-scan systems, which are
used to process layers with feature sizes below 0.65 microns. The successful
implementation of the Company's strategy, however, will result in a loss of
sales by manufacturers of reduction steppers and will cause these competitors to
respond with lower prices, productivity improvements or new technical designs
for their systems that eliminate the need for the Company's steppers or make it
difficult for the Company's systems to attain compatibility with such systems.
Also, certain of the Company's competitors, which also manufacture widefield
systems, including Nikon and Canon, are shipping their own widefield
mix-and-match lithography systems. The introduction, development and sales of
such competitive systems could materially adversely affect the Company's
business, financial condition and results of operations.
 
    To facilitate its mix-and-match strategy, the Company has developed and is
continuing to develop a family of products. The Company shipped its first Model
2244i stepper during 1993, and commenced volume production in 1994. In 1995, the
Company commenced shipment and volume production of the Titan Wafer Stepper and
commenced shipment of the Saturn Wafer Stepper. As is typical with newly
introduced systems in the capital equipment industry, the Company has
experienced and may continue to experience technical or other difficulties with
its mix-and-match family of products. The Company believes that the market
acceptance and process verification combined with volume production of the
mix-and-match family of products is of critical importance to the successful
implementation of its mix-and-match strategy and its future financial results.
Recently, this market segment of the Company's business has experienced a
pronounced downturn due, in part, to the recent cyclical downturn in the
semiconductor industry. Additionally, the Company believes that existing capital
budgets of semiconductor manufacturers are currently focusing on technology
buys, and not capacity additions. This places the Company at a disadvantage,
since its steppers address non-critical geometries. To the extent that the
mix-and-match family of products does not achieve or maintain significant sales
due to a cyclical downturn in the semiconductor industry; technical,
manufacturing or other difficulties associated with these products; lack of
customer acceptance; an inability to reduce the significantly long manufacturing
cycle of these products; an inability to increase capacity for the production of
the mix-and-match family of products; direct competition from other widefield
mix-and-match systems from Nikon and Canon, among others; or any other reason,
the Company's business, financial condition and results of operations would be
materially adversely affected. In addition, the increase in mix-and-match
stepper production has resulted and will continue to result in higher inventory
levels and operating expenses. Failure to achieve or maintain significant sales
of these steppers could lead, among other things, to an increase in inventory
obsolescence and an increase in expenses without corresponding sales, either of
which could materially adversely affect the Company's business, financial
condition and results of operations. See "Fluctuations in Operating Results;
Limited System Sales; Customer Concentration."
 
    DEVELOPMENT OF NEW PRODUCT LINES; EXPANSION OF OPERATIONS; MANAGEMENT OF
GROWTH  Currently, the Company is devoting significant resources to the
development, introduction and commercialization of new products and technologies
that are outside of the Company's core businesses (see "Research, Development
and Engineering"). During 1998, the Company will continue to develop these
products and will invest significant additional resources in plant and
equipment, inventory, personnel and other costs, to begin production of these
products and to provide the marketing, administration and after-sales support
required to support these new products. Accordingly, there can be no assurance
that gross profit margins
 
                                       15
<PAGE>
and inventory levels will not be adversely impacted in the future by start-up
costs associated with the initial production of these new product lines. These
start-up costs include, but are not limited to, additional manufacturing
overhead, additional inventory reserve requirements and the creation of
after-sales support organizations. Additionally, there can be no assurance that
operating expenses will not increase, relative to sales, as a result of adding
additional marketing and administrative personnel, among other costs, to support
the Company's additional products. If the Company is unable to achieve
significantly increased net sales or its sales fall below expectations, the
Company's operating results will be materially adversely affected until, among
other factors, inventory levels and expenses can be reduced.
 
    In December 1997, the Company terminated its distributor relationship with
Innotech, its Japanese distributor. The Company is presently in the process of
expanding its operations in Japan by establishing a direct sales force. The
Company has leased additional facilities and is making significant capital
expenditures for sales and applications support. For this and other reasons, the
Company expects that its selling, general and administrative expenses will
increase in absolute dollars in 1998, relative to 1997. Should additional gross
profit on sales to the Japan marketplace not be sufficient to fund these
expanded operations, the Company's business, financial condition and results of
operations would be materially adversely impacted.
 
    RAPID TECHNOLOGICAL CHANGE; IMPORTANCE OF TIMELY PRODUCT INTRODUCTION  The
semiconductor and magnetic recording head manufacturing industries are subject
to rapid technological change and new product introductions and enhancements.
The Company's ability to be competitive in these and other markets will depend
in part upon its ability to develop new and enhanced systems and related
software tools, and to introduce these systems and related software tools at
competitive prices and on a timely and cost-effective basis to enable customers
to integrate them into their operations either prior to or as they begin volume
product manufacturing. The Company will also be required to enhance the
performance of its existing systems and related software tools. Any success of
the Company in developing new and enhanced systems and related software tools
depends upon a variety of factors, including product selection, timely and
efficient completion of product design, timely and efficient implementation of
manufacturing and assembly processes, product performance in the field and
effective sales and marketing. In particular, the Company has not yet fully
defined the markets and applications for the Titan Wafer Stepper Family and the
Saturn Wafer Stepper Family. Because new product development commitments must be
made well in advance of sales, new product decisions must anticipate both future
demand and the technology that will be available to supply that demand. There
can be no assurance that the Company will be successful in selecting,
developing, manufacturing and marketing new products and related software tools
or enhancing its existing products and related software tools. Any such failure
would materially adversely affect the Company's business, financial condition
and results of operations.
 
    Because of the large number of components in the Company's systems,
significant delays can occur between a system's introduction and the
commencement by the Company of volume production of such systems. The Company
has experienced delays from time to time in the introduction of, and technical
and manufacturing difficulties with, certain of its systems and enhancements and
related software tools and may experience delays and technical and manufacturing
difficulties in future introductions or volume production of new systems or
enhancements and related software tools. In particular, the Company has very
little experience in manufacturing its UltraBeam V2000 electron beam lithography
system. Due the significant manufacturing cycle time required for the production
of this system, its lengthy sales cycle, lack of adequate documentation for the
product and the complex nature of this system, delays in production and/or
shipment will result from time to time. This system presently has an approximate
price range of $6 million to $9 million. Due to the high selling price of this
system, delays in shipments from one quarter to the next would have a material
adverse effect on the results of operations for that quarter. There can be no
assurance that the Company will not encounter technical, manufacturing or other
difficulties that could delay future introductions or volume production of
systems or enhancements. The Company's inability to complete the development or
meet the technical specifications of any of its systems or enhancements and
 
                                       16
<PAGE>
related software tools or to manufacture and ship these systems or enhancements
and related software tools, such as the model 4700 stepper, the model 6700
stepper, the Titan Wafer Stepper Family, the Saturn Wafer Stepper Family, the
UltraBeam model V2000 electron beam lithography system and the Company's rapid
thermal annealing/laser doping system, in volume and in time to meet the
requirements for manufacturing the future generation of semiconductor or thin
film head devices would materially adversely affect the Company's business,
financial condition and results of operations. In addition, the Company may
incur substantial unanticipated costs to ensure the functionality and
reliability of its products early in the products' life cycles. If new products
have reliability or quality problems, reduced orders or higher manufacturing
costs, delays in collecting accounts receivable and additional service and
warranty expenses may result. Any of such events may materially adversely affect
the Company's business, financial condition and results of operations.
 
    DEPENDENCE ON KEY PERSONNEL  The Company's future operating results depend
in significant part upon the continued contributions of its executive officers
and other key personnel, many of whom would be difficult to replace. None of
such persons has an employment or noncompetition agreement with the Company. The
Company does not maintain any life insurance on any of its key persons. The loss
of key personnel would have a material adverse effect on the business, financial
condition and results of operations of the Company. In addition, the Company's
future operating results depend in significant part upon its ability to attract
and retain other qualified management, manufacturing, and technical, sales and
support personnel for its operations. There are only a limited number of persons
with the requisite skills to serve in these positions and it may become
increasingly difficult for the Company to hire such personnel over time.
Competition for such personnel is intense, and there can be no assurance that
the Company will be successful in attracting or retaining such personnel. The
failure to attract or retain such persons would materially adversely affect the
Company's business, financial condition and results of operations.
 
    Recently, the Company has experienced an increased level of employee
turnover. The Company believes that this increase is due to several factors,
including: the recent semiconductor industry slowdown, which resulted in a
planned reduction in the Company's workforce during the fourth fiscal quarter of
1996, and which has further resulted in an increased level of uncertainty within
the workforce; an expanding economy within the geographic area that the Company
maintains its principal business offices, making it more difficult for the
Company to retain its employees; and the declining value of stock options
granted to employees, relative to their total compensation, as a result of the
full vesting of options granted prior to the Company's initial public offering
and significant numbers of options granted at prices well in excess of the
current market value of the Company's stock. Due to these and other factors, the
Company may continue to experience high levels of employee turnover, which could
adversely impact the Company's business, financial condition and results of
operations.
 
    INTERNATIONAL SALES; JAPANESE MARKET  International sales accounted for
approximately 33%, 53% and 55% of total net sales in 1997, 1996 and 1995,
respectively. The Company anticipates that international sales, which typically
have lower gross margins than domestic sales, principally due to higher field
service and support costs, will continue to account for a significant portion of
total net sales. As a result, a significant portion of the Company's sales will
be subject to certain risks, including unexpected changes in regulatory
requirements, difficulty in satisfying existing regulatory requirements,
exchange rate fluctuations, tariffs and other barriers, political and economic
instability, difficulties in accounts receivable collections, natural disasters,
difficulties in staffing and managing foreign subsidiary and branch operations
and potentially adverse tax consequences. Although the Company generally
transacts its international sales in U.S. dollars, international sales expose
the Company to a number of additional risk factors, including fluctuations in
the value of local currencies relative to the U.S. dollar, which, in turn,
impact the relative cost of ownership of the Company's products and may further
impact the purchasing ability of its international customers. The Company is
also subject to the risks associated with the imposition of legislation and
regulations relating to the import or export of semiconductors and magnetic
recording head products. The Company cannot predict whether quotas, duties,
taxes or other charges or restrictions will
 
                                       17
<PAGE>
be implemented by the United States, Japan or any other country upon the
importation or exportation of the Company's products in the future. There can be
no assurance that any of these factors or the adoption of restrictive policies
will not have a material adverse effect on the Company's business, financial
condition and results of operations. Additionally, the Company believes that the
severe currency and equity market fluctuations that have been experienced
recently by many of the Asian markets will cause a further reduction in orders
of the Company's products, particularly in the short-term, which will have a
material adverse effect on the Company's business, financial condition and
results of operations.
 
    Although the Company has sold a number of its systems to Japanese thin film
head manufacturers, to date, the Company has made limited sales of its systems
to Japanese semiconductor manufacturers. The Japanese semiconductor market
segment is large, represents a substantial percentage of the worldwide
semiconductor manufacturing capacity, and is difficult for foreign companies to
penetrate. The Company is at a competitive disadvantage with respect to Japanese
semiconductor capital equipment suppliers that have been engaged for some time
in collaborative efforts with Japanese semiconductor manufacturers, and
currently dominate the Japanese stepper market. The Company believes that
increased penetration of the Japanese market is critical to its financial
results and intends to continue to invest significant resources in Japan in
order to meet this objective. As part of its strategy to penetrate the Japanese
market, in 1993, the Company entered into a distribution agreement with Innotech
Corporation, a local distributor of products. This agreement was terminated in
December 1997, and the Company is presently in the process of expanding its
operations in Japan by establishing a direct sales force and creating sales and
applications support organizations. See "Additional Risk Factors: Development of
New Product Lines; Expansion of Operations; Management of Growth."
 
    YEAR 2000 COMPLIANCE  Many currently installed computer systems and software
products are coded to accept only two digit entries in the date code field.
Beginning in the year 2000, these date code fields will need to accept four
digit entries to distinguish 21st century dates from 20th century dates. As a
result, in less than two years, computer systems and/or software used by many
companies may need to be upgraded to comply with such "Year 2000" requirements.
The Company has commenced, for all of its information systems and software
contained in the products it sells, a year 2000 conversion project to address
necessary code changes, testing and implementation. The Company expects such
modifications will be made on a timely basis and does not believe that the cost
of such modifications will have a material effect on the Company's operating
results. However, there can be no assurance that the Company will be able to
timely and cost-effectively cure its products' errors and defects associated
with year 2000 date functions, and this may result in material costs to the
Company, including costs associated with detecting and fixing such defects and
costs incurred in litigation due to any such defects. Many commentators have
predicted that a significant amount of litigation will arise out of year 2000
compliance issues. The Company is aware of several such suits currently pending.
Because of the unprecedented nature of such litigation and the Company's current
lack of knowledge as to the extent its products contain defects relating to the
year 2000, there can be no assurance that the Company will not be materially
adversely affected by claims related to year 2000 compliance. Additionally, the
Company's customers may be required to devote substantial financial resources to
their own internal year 2000 issues. This may result in fewer financial
resources available to purchase the Company's products, which would result in
fewer system sales by the Company. This, in turn, could have a material adverse
impact on the Company's business, financial condition and results of operations.
 
    Although the Company is not aware of any material operational issues or
costs associated with preparing its internal systems for the year 2000, there
can be no assurance that the Company will not experience serious unanticipated
negative consequences and/or material costs caused by undetected errors or
defects in technology used in its internal operating systems, which are composed
primarily of third party software and hardware technology.
 
    FUTURE ACQUISITIONS  The Company may in the future pursue acquisitions of
complementary product lines, technologies or businesses. The pursuit of
acquisitions involves additional costs, which could
 
                                       18
<PAGE>
materially adversely impact the company's results of operations. Future
acquisitions by the Company may result in potentially dilutive issuances of
equity securities, the incurrence of debt and contingent liabilities, and
amortization expenses related to goodwill and other intangible assets, which
could materially adversely affect any Company profitability. In addition,
acquisitions involve numerous risks, including difficulties in the assimilation
of the operations, technologies and products of the acquired companies, the
diversion of management's attention from other business concerns, risks of
entering markets in which the Company has no or limited direct prior experience,
and the potential loss of key employees of the acquired company. In the event
the Company acquires product lines, technologies or businesses which do not
complement the Company's business, or which otherwise do not enhance the
Company's sales or operating results, the Company may incur substantial
write-offs and higher recurring operating costs, which could have a material
adverse effect on the Company's business, financial condition and results of
operations. In the event that any such acquisition does occur, there can be no
assurance as to the effect thereof on the Company's business or operating
results.
 
    EFFECTS OF CERTAIN ANTI-TAKEOVER PROVISIONS  Certain provisions of the
Company's Certificate of Incorporation, equity incentive plans, Shareholder
Rights Plan, Bylaws and Delaware law may discourage certain transactions
involving a change in control of the Company. In addition to the foregoing, the
Company's classified board of directors, the shareholdings of the Company's
officers, directors and persons or entities that may be deemed affiliates and
the ability of the Board of Directors to issue "blank check" preferred stock
without further stockholder approval could have the effect of delaying,
deferring or preventing a change in control of the Company and may adversely
affect the voting and other rights of holders of Common Stock.
 
    VOLATILITY OF STOCK PRICE  The Company believes that factors such as
announcements of developments related to the Company's business, fluctuations in
the Company's operating results, sales of securities of the Company into the
marketplace, general conditions in the semiconductor and magnetic recording head
industries or the worldwide or regional economies, an outbreak of hostilities, a
shortfall in revenue or earnings from or changes in analysts' expectations,
announcements of technological innovations or new products or enhancements by
the Company or its competitors, developments in patents or other intellectual
property rights and developments in the Company's relationships with its
customers and suppliers could cause the price of the Company's Common Stock to
fluctuate, perhaps substantially. In addition, in recent years the stock market
in general, and the market for shares of small capitalization stocks in
particular, including the Company's, have experienced extreme price
fluctuations, which have often been unrelated to the operating performance of
affected companies. There can be no assurance that the market price of the
Company's Common Stock will not continue to experience significant fluctuations
in the future, including fluctuations that are unrelated to the Company's
performance.
 
ITEM 2.  PROPERTIES
 
    The Company maintains its headquarters and manufacturing operations in San
Jose, California in three leased facilities, totaling approximately 188,000
square feet, which contain general administration and finance, marketing and
sales, customer service and support, manufacturing and research, development,
and engineering. Additionally, the Company leases 19,000 square feet in New
Providence, New Jersey for its UltraBeam Lithography subsidiary, which contains
manufacturing, research, and development, engineering and general
administration. The leases for these facilities expire at various dates from
February 1999 to March 2005. The Company also leases 6.4 acres of undeveloped
land near its headquarters in San Jose. This lease expires in November 1998. As
part of this transaction, the Company presently has segregated $5.3 million of
its securities as collateral for certain obligations of the lessor pertaining to
this land. The Company also leases four sales and support offices in the United
States in Tempe, Arizona; Woburn, Massachusetts; Austin, Texas; and Richardson,
Texas under leases with terms expiring between one month to two years. The
Company also maintains branch offices in Korea and Taiwan, with terms expiring
between one month and one year; and sales, service and support subsidiaries in
Japan, the United
 
                                       19
<PAGE>
Kingdom and Thailand, with terms expiring between one month and five years. The
Company believes that its existing facilities will be adequate to meet its
currently anticipated requirements and that suitable additional or substitute
space will be available as needed.
 
ITEM 3.  LEGAL PROCEEDINGS
 
    The Company is not a party to any material litigation.
 
ITEM 4.  SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS
 
    No matters were submitted to a vote of security holders during the fourth
quarter ended December 31, 1997.
 
                      EXECUTIVE OFFICERS OF THE REGISTRANT
 
    As of December 31, 1997, the executive officers of the Company, who are
appointed by and serve at the discretion of the Board of Directors, are as
follows:
 
<TABLE>
<CAPTION>
             NAME                   AGE                               POSITION WITH THE COMPANY
- ------------------------------      ---      ----------------------------------------------------------------------------
<S>                             <C>          <C>
Arthur W. Zafiropoulo.........          58   Chairman of the Board of Directors, Chief Executive Officer and President
Daniel H. Berry...............          52   Senior Vice President, Sales and Service
William G. Leunis, III........          42   Senior Vice President, Finance, Chief Financial Officer, Secretary and
                                             Treasurer
</TABLE>
 
    Mr. Zafiropoulo founded the Company in September 1992 to acquire certain
assets and liabilities of the Ultratech Stepper Division (the "Predecessor") of
General Signal Corporation and, since March 1993, has served as Chief Executive
Officer and Chairman of the Board. Additionally, Mr. Zafiropoulo served as
President of the Company from March 1993 to March 1996, resumed the position of
President of the Company in May 1997 and presently serves in this capacity.
Between September 1990 and March 1993, he was President of the Predecessor. From
February 1989 to September 1990, Mr. Zafiropoulo was President of General
Signal's Semiconductor Equipment Group International, a semiconductor equipment
company. From August 1980 to February 1989, Mr. Zafiropoulo was President and
Chief Executive Officer of Drytek, Inc., a plasma dry-etch company that he
founded in August 1980, and which was later sold to General Signal in 1986. From
July 1987 to September 1989, Mr. Zafiropoulo was also President of Kayex, a
semiconductor equipment manufacturer, which is a unit of General Signal. Mr.
Zafiropoulo is a director of RF Power Products Inc., a manufacturer of advanced
power supplies. In addition, Mr. Zafiropoulo is a director of Semi/Sematech, an
association of U.S.-owned suppliers of equipment, materials and services to the
semiconductor industry and SEMI (Semiconductor and Equipment Materials
International), an international trade association.
 
    Mr. Berry has served as Senior Vice President, Sales and Service of the
Company since March 1993. Between December 1990 and March 1993, he served as
Vice President, Sales and Service of the Predecessor. From November 1989 to
December 1990, Mr. Berry was director of international operations for General
Signal's Semiconductor Equipment Group International, a semiconductor equipment
company. From July 1976 to November 1989, he held various management positions
including director of marketing and optical lithography, at Perkin-Elmer
Corporation, a semiconductor equipment manufacturer.
 
    Mr. Leunis has served as Senior Vice President, Finance, Chief Financial
Officer, Secretary and Treasurer of the Company since January 1997. Between
March 1993 and December 1996, he served as Vice President, Finance, Chief
Financial Officer, Secretary and Treasurer of the Company. Between September
1990 and March 1993, he served as Vice President, Finance of the Predecessor.
From August 1986 to August 1990, Mr. Leunis was Chief Financial Officer of the
Predecessor. From 1978 to August 1986, Mr. Leunis held various financial
positions at General Signal.
 
                                       20
<PAGE>
                                    PART II
 
ITEM 5.  MARKET FOR THE REGISTRANT'S COMMON EQUITY AND RELATED STOCKHOLDER
  MATTERS
 
    The information required by this Item is incorporated by reference from page
48 of the Company's 1997 Annual Report to Stockholders.
 
ITEM 6.  SELECTED FINANCIAL DATA
 
    The information required by this Item is incorporated by reference from page
24 of the Company's 1997 Annual Report to Stockholders.
 
ITEM 7.  MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
  OF OPERATIONS
 
    The information required by this Item is incorporated by reference from
pages 25-31 of the Company's 1997 Annual Report to Stockholders.
 
ITEM 8.  FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA
 
    The Report of Ernst & Young LLP, Independent Auditors, and consolidated
financial statements required by this Item are incorporated by reference from
pages 32-48 of the Company's 1997 Annual Report to Stockholders.
 
ITEM 9.  CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND
  FINANCIAL DISCLOSURE
 
    Not applicable.
 
                                       21
<PAGE>
                                    PART III
 
    Certain information required by Part III is omitted from this Report in that
the Registrant will file a definitive proxy statement within 120 days after the
end of its fiscal year pursuant to Regulation 14A for its 1998 Annual Meeting of
Stockholders to be held June 3, 1998 and the information included therein is
incorporated herein by reference as set forth below.
 
ITEM 10.  DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT
 
    The information concerning the Company's directors required by this Item is
incorporated by reference from the Item captioned "Election of Directors" in the
Company's Proxy Statement for the 1998 Annual Meeting of Stockholders (the
"Proxy Statement"). The information required by this Item relating to the
Company's executive officers is included under the caption "Executive Officers
of the Registrant" in Part I, Item 4 of this Annual Report on Form 10-K.
 
ITEM 11.  EXECUTIVE COMPENSATION
 
    The information required by this Item is incorporated by reference from the
Item captioned "Executive Compensation and Related Information" in the Proxy
Statement.
 
ITEM 12.  SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT
 
    The information required by this Item is incorporated by reference from the
Items captioned "Election of Directors" and "Ownership of Securities" in the
Proxy Statement.
 
ITEM 13.  CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS
 
    The information required by this Item is incorporated by reference from the
item captioned "Certain Transactions" in the Proxy Statement.
 
                                       22
<PAGE>
                                    PART IV
 
ITEM 14.  EXHIBITS, FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K
 
        (a) The following documents are filed as part of this Report on Form
    10-K
 
            (1) Financial Statements
       The following consolidated financial statements of Ultratech Stepper,
       Inc. are set forth in the Company's 1997 Annual Report to Stockholders
       and incorporated by reference in Item 8.
 
<TABLE>
<CAPTION>
                                                                                                      ANNUAL REPORT
                                                                                                       PAGE NUMBER
                                                                                                     ---------------
<S>                                                                                                  <C>
Consolidated Balance Sheets--December 31, 1997 and 1996............................................        32
Consolidated Statements of Income--Years ended December 31, 1997, 1996, and 1995...................        33
Consolidated Statements of Cash Flows--Years Ended December 31, 1997, 1996 and 1995................        34
Notes to Consolidated Financial Statements.........................................................       35-46
Report of Ernst & Young LLP, Independent Auditors..................................................        47
</TABLE>
 
            (2) Financial Statement Schedules
       The following consolidated financial statement schedule is included
       herein:
 
<TABLE>
<CAPTION>
                                                                                                       PAGE NUMBER
                                                                                                     ---------------
<S>                                                                                                  <C>
Schedule II Valuation and Qualifying Accounts......................................................        S-1
</TABLE>
 
        Schedules other than those listed above have been omitted since they are
    either not required, are not applicable, or the required information is
    shown in the financial statements or related notes.
 
            (3) Exhibits
       The following exhibits are referenced or included in this report:
 
<TABLE>
<CAPTION>
  EXHIBIT                                                 DESCRIPTION
- ------------  ----------------------------------------------------------------------------------------------------
<C>           <S>
   2.1(1)     Asset Purchase Agreement, dated March 8, 1993, among Registrant, General Signal Corporation and
                General Signal Technology Corporation.
 
   3.1(1)     Amended and Restated Certificate of Incorporation of the Registrant, filed October 6, 1993.
 
   3.2(6)     Bylaws of Registrant, as amended.
 
   3.3(6)     Certified Certificate of Amendment of the Amended and Restated Certificate of Incorporation of the
                Company dated May 17, 1995.
 
   4.5(1)     Specimen Common Stock Certificate of Registrant.
 
   4.6(7)     Shareholder Rights Agreement between Registrant and the First National Bank of Boston dated February
                11, 1997.
 
   4.6.1      Shareholder Rights Agreement between Registrant and the First National Bank of Boston, filed on
                February 26, 1997, as amended on March 18, 1998.
 
  10.1(1)(2)  Distributor Agreement dated June 22, 1993 between the Company and Innotech Corporation.
 
  10.2(1)(5)  1993 Stock Option/Stock Issuance Plan and form of Nonstatutory Stock Option Agreement with respect
                to the automatic option grant program, as amended.
 
  10.3(8)     1993 Stock Option/Stock Issuance Plan (Amended and Restated on August 8, 1997).
 
  10.4(1)     Form of Indemnification Agreement entered into between the Registrant and each of its officers and
                directors.
</TABLE>
 
                                       23
<PAGE>
<TABLE>
<CAPTION>
  EXHIBIT                                                 DESCRIPTION
- ------------  ----------------------------------------------------------------------------------------------------
<C>           <S>
  10.5(1)     Standard Industrial Lease--Single Tenant, Full Net between The Equitable Life Assurance Society of
                the United States, as Landlord, and Registrant, as Tenant, dated August 27, 1993.
 
  10.6(3)     Executive Incentive Plan.
 
  10.7(3)     Profit Sharing Plan.
 
  10.8(4)     Standard Industrial Lease Mutual Tenant, Full Net between Orchard Investment Company Number 701, As
                Landlord, and Registrant, As Tenant dated May 17, 1994 and as amended, October 18, 1994.
 
  10.8.1      Second Amendment to Lease and Agreement to Release between the Receiver of the Estate of Orchard
                Investment Company Number 701, As Original Landlord, Orchard Properties, and Registrant, As Tenant
                dated May 25, 1995
 
  10.8.2      Third Amendment to Lease between Orchard Investment Company Number 701, As Landlord, and Registrant,
                As Tenant dated November 16, 1995
 
  10.8.3      Fourth Amendment to Lease between San Jose Acquisition Co., L.L.C. (successor of Orchard Investment
                Company Number 701), As Landlord, and Registrant, As Tenant dated February 6, 1996
 
  10.8.4      Fifth Amendment to Lease between Silicon Valley Properties, L.L.C. (successor of San Jose
                Acquisition Co., L.L.C., and Orchard Investment Company Number 701), As Landlord and Registrant,
                As Tenant dated December 1, 1997
 
  10.11(5)    1995 Employee Stock Purchase Plan
 
  13          Annual Report to Stockholders for the Year Ended December 31, 1997.
 
  21          Subsidiaries of Registrant.
 
  23          Consent of Ernst & Young LLP, Independent Auditors.
 
  24          Power of Attorney (included on signature page).
 
  27.1        Financial Data Schedule
 
  27.2        Financial Data Schedule
 
  27.3        Financial Data Schedule
</TABLE>
 
- ------------------------
 
(1) Previously filed with the Company's Registration Statement on Form S-1
    declared effective with the Securities and Exchange Commission on September
    28, 1993. File No. 33-66522.
 
(2) Confidential Treatment has been granted for the deleted portions of this
    document.
 
(3) Previously filed with the Company's 1993 Annual Report on Form 10-K
    (Commission File No. 0-22248).
 
(4) Previously filed with the Company's 1994 Annual Report on Form 10-K
    (Commission File No. 0-22248).
 
(5) Previously filed with the Company's 1995 Annual Report on Form 10-K
    (Commission File No. 0-22248).
 
(6) Previously filed with the Company's Quarterly Report on Form 10-Q for the
    quarter ended September 30, 1996 (Commission File No. 0-22248)
 
(7) Previously filed with the Company's Current Report on Form 8-K, dated
    February 26, 1997.
 
(8) Previously filed with the Company's Current Report on Form S-8, dated August
    8, 1997.
 
        (b) Reports on Form 8-K. No reports on Form 8-K were filed during the
    fourth quarter of 1997.
 
        (c) Exhibits. See list of exhibits under (a)(3) above.
 
        (d) Financial Statement Schedules. See list of schedules under (a)(2)
    above.
 
                                       24
<PAGE>
                                   SIGNATURES
 
    Pursuant to the requirements of Section 13 or 15(d) of the Securities
Exchange Act of 1934, the Registrant has duly caused this Report to be signed on
its behalf by the undersigned, thereunder duly authorized.
 
                                ULTRATECH STEPPER, INC.
 
                                By:          /s/ ARTHUR W. ZAFIROPOULO
                                     -----------------------------------------
                                               Arthur W. Zafiropoulo
                                       CHAIRMAN OF THE BOARD, CHIEF EXECUTIVE
                                               OFFICER AND PRESIDENT
 
                               POWER OF ATTORNEY
 
    KNOW ALL MEN BY THESE PRESENTS, that each person whose signature appears
below constitutes and appoints Arthur W. Zafiropoulo and William G. Leunis, III,
jointly and severally, his attorneys-in-fact, each with the power of
substitution, for him in any and all capacities, to sign any amendments to this
Report on Form 10-K and to file the same, with exhibits thereto and other
documents in connection therewith, with the Securities and Exchange Commission,
hereby ratifying and confirming all that each of said attorney-in-fact, or his
substitute or substitutes, may do or cause to be done by virtue hereof.
 
    Pursuant to the requirements of the Securities Exchange Act of 1934, this
Report has been signed below by the following persons on behalf of the
Registrant and in the capacities and on the dates indicated.
 
<TABLE>
<CAPTION>
          SIGNATURE                       TITLE                    DATE
- ------------------------------  --------------------------  -------------------
 
<C>                             <S>                         <C>
                                Chairman of the Board of
  /s/ ARTHUR W. ZAFIROPOULO       Directors, Chief
- ------------------------------    Executive Officer           March 18, 1998
    Arthur W. Zafiropoulo         (Principal Executive
                                  Officer) and President
 
                                Senior Vice President,
                                  Finance, Chief Financial
  /s/ WILLIAM G. LEUNIS, III      Officer, Secretary and
- ------------------------------    Treasurer (Principal        March 18, 1998
    William G. Leunis, III        Financial and Accounting
                                  Officer)
 
     /s/ KENNETH A. LEVY
- ------------------------------  Director                      March 18, 1998
       Kenneth A. Levy
 
     /s/ GREGORY HARRISON
- ------------------------------  Director                      March 18, 1998
       Gregory Harrison
 
     /s/ LARRY R. CARTER
- ------------------------------  Director                      March 18, 1998
       Larry R. Carter
 
     /s/ THOMAS D. GEORGE
- ------------------------------  Director                      March 18, 1998
       Thomas D. George
 
      /s/ JOEL GEMUNDER
- ------------------------------  Director                      March 18, 1998
        Joel Gemunder
</TABLE>
 
                                       25
<PAGE>
                                                                     SCHEDULE II
 
                            ULTRATECH STEPPER, INC.
                       VALUATION AND QUALIFYING ACCOUNTS
                                 (IN THOUSANDS)
 
<TABLE>
<CAPTION>
                                                BALANCE AT   CHARGED TO
                                                 BEGINNING    COSTS AND     CHARGED TO      DEDUCTIONS     BALANCE AT
DESCRIPTION                                      OF PERIOD    EXPENSES    OTHER ACCOUNTS        (1)       END OF PERIOD
- ----------------------------------------------  -----------  -----------  ---------------  -------------  -------------
<S>                                             <C>          <C>          <C>              <C>            <C>
Year ended December 31, 1995:
  Allowance for doubtful accounts.............   $     242    $     371      $      --       $      --      $     613
Year ended December 31, 1996:
  Allowance for doubtful accounts.............   $     613    $   1,225      $      --       $    (687)     $   1,151
Year ended December 31, 1997:
  Allowance for doubtful accounts.............   $   1,151    $   2,205      $      --       $  (1,098)     $   2,258
</TABLE>
 
- ------------------------
 
(1) Deductions represent write-offs against reserve account balances.
 
                                      S-1

<PAGE>


- ------------------------------------------------------------------------------




                            ULTRATECH STEPPER, INC.




                                      and




                       THE FIRST NATIONAL BANK OF BOSTON




                                 Rights Agent




                           Amended Rights Agreement

                       Dated as of February 11, 1997, as
                            amended March 18, 1998




- ------------------------------------------------------------------------------
<PAGE>

                                  TABLE OF CONTENTS
                                                                          Page
                                                                          ----

Section 1.     Certain Definitions . . . . . . . . . . . . . . . . . . . . . 1

Section 2.     Appointment of Rights Agent . . . . . . . . . . . . . . . . . 6

Section 3.     Issue of Right Certificates . . . . . . . . . . . . . . . . . 6

Section 4.     Form of Right Certificates. . . . . . . . . . . . . . . . . . 7

Section 5.     Countersignature and Registration . . . . . . . . . . . . . . 8

Section 6.     Transfer, Split-Up, Combination and Exchange of Right
               Certificates; Mutilated, Destroyed, Lost or
               Stolen Right Certificates . . . . . . . . . . . . . . . . . . 8

Section 7.     Exercise of Rights; Purchase Price; Expiration Date
               of Rights . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Section 8.     Cancellation and Destruction of Right Certificates. . . . . .10

Section 9.     Availability of Preferred Shares. . . . . . . . . . . . . . .11

Section 10.    Preferred Shares Record Date. . . . . . . . . . . . . . . . .12

Section 11.    Adjustment of Purchase Price, Number of Shares or 
               Number of Rights. . . . . . . . . . . . . . . . . . . . . . .13

Section 12.    Certificate of Adjusted Purchase Price or Number of Shares. .20

Section 13.    Consolidation, Merger or Sale or Transfer of 
               Assets or Earning Power . . . . . . . . . . . . . . . . . . .21

Section 14.    Fractional Rights and Fractional Shares . . . . . . . . . . .23

Section 15.    Rights of Action. . . . . . . . . . . . . . . . . . . . . . .24

Section 16.    Agreement of Right Holders. . . . . . . . . . . . . . . . . .24

Section 17.    Right Certificate Holder Not Deemed a Stockholder . . . . . .25

Section 18.    Concerning the Rights Agent . . . . . . . . . . . . . . . . .25

Section 19.    Merger or Consolidation or Change of Name of Rights Agent . .26

Section 20.    Duties of Rights Agent. . . . . . . . . . . . . . . . . . . .27

Section 21.    Change of Rights Agent. . . . . . . . . . . . . . . . . . . .29

Section 22.    Issuance of New Right Certificates. . . . . . . . . . . . . .30

Section 23.    Redemption. . . . . . . . . . . . . . . . . . . . . . . . . .30

                                       i
<PAGE>

Section 24.    Exchange. . . . . . . . . . . . . . . . . . . . . . . . . . .31

Section 25.    Notice of Certain Events. . . . . . . . . . . . . . . . . . .33

Section 26.    Notices . . . . . . . . . . . . . . . . . . . . . . . . . . .34

Section 27.    Supplements and Amendments. . . . . . . . . . . . . . . . . .35

Section 28.    Successors. . . . . . . . . . . . . . . . . . . . . . . . . .35

Section 29.    Determinations and Actions by the Board of Directors. . . . .35

Section 30.    Benefits of this Agreement. . . . . . . . . . . . . . . . . .36

Section 31.    Severability. . . . . . . . . . . . . . . . . . . . . . . . .36

Section 32.    Governing Law . . . . . . . . . . . . . . . . . . . . . . . .36

Section 33.    Counterparts. . . . . . . . . . . . . . . . . . . . . . . . .36

Section 34.    Descriptive Headings. . . . . . . . . . . . . . . . . . . . .37

Exhibit A -    Form of Certificate of Designations of Series A Junior
               Participating Preferred Stock of Ultratech Stepper, Inc.

Exhibit B -    Form of Right Certificate

Exhibit C -    Summary of Rights to Purchase Preferred Shares

                                       ii
<PAGE>

                               RIGHTS AGREEMENT


          Rights Agreement, dated as of February 11,  1997 (as amended March 
18, 1998), between Ultratech Stepper, Inc., a Delaware corporation (the 
"Company"), and The First National Bank of Boston, a national banking 
association (the "Rights Agent").

          The Board of Directors of the Company has authorized and declared a 
dividend of one preferred share purchase right (a "Right") for each Common 
Share (as hereinafter defined) of the Company outstanding as of the Close of 
Business (as hereinafter defined) on February 24, 1997 (the "Record Date"), 
each Right representing the right to purchase one one-hundredth (1/100th) of 
a Preferred Share (as hereinafter defined) upon the terms and subject to the 
conditions herein set forth, and has further authorized and directed the 
issuance of one Right with respect to each Common Share that shall become 
outstanding between the Record Date and the earliest of the Distribution 
Date, the Redemption Date or the Final Expiration Date (as such terms are 
hereinafter defined).

          Accordingly, in consideration of the premises and the mutual 
agreements herein set forth, the parties hereby agree as follows: 

                                                                          1
<PAGE>

          Section 1. Certain Definitions. For purposes of this Agreement, the 
following terms have the meanings indicated:

          (a) "Acquiring Person" shall mean any Person (as such term is 
hereinafter defined) who or which, together with all Affiliates and 
Associates (as such terms are hereinafter defined) of such Person, shall be 
the Beneficial Owner (as such term is hereinafter defined) of 15% or more of 
the Common Shares of the Company then outstanding, but shall not include the 
Company, any Subsidiary (as such term is hereinafter defined) of the Company, 
any employee benefit plan of the Company or any Subsidiary of the Company, or 
any entity holding Common Shares for or pursuant to the terms of any such 
plan.   Notwithstanding the foregoing:

               (i) no Person shall become an "Acquiring Person" as the result
     of an acquisition of Common Shares by the Company which, by reducing the
     number of shares outstanding, increases the proportionate number of 
     shares beneficially owned by such Person to 15% or more of the Common
     Shares of the Company then outstanding; PROVIDED, HOWEVER, that if a
     Person shall become the Beneficial Owner of 15% or more of the Common
     Shares of the Company then outstanding by reason of share purchases by
     the Company and shall, after such share purchases by the Company, become
     the Beneficial Owner of any additional Common Shares of the Company,
     then such Person shall be deemed to be an "Acquiring Person";

              (ii) if the Board of Directors of the Company determines (upon
     approval by a majority of the Continuing Directors (as such term is
     hereinafter defined)) in good faith that a Person who would otherwise
     be an Acquiring Person, as defined pursuant to the foregoing provisions
     of this paragraph (a), is eligible to file and did file a Schedule 13G,
     and such Person divests as promptly as practicable a sufficient number
     of Common Shares so that such Person would no longer be an Acquiring
     Person, as defined pursuant to the foregoing provisions of this
     paragraph (a), then such Person shall not be deemed to be an "Acquiring
     Person" for any purpose of this Agreement; and

             (iii) no Person shall become an "Acquiring Person" if the 
     transaction or series of related transactions in which such Person
     (together with all Affiliates or Associates of such Person) became
     the Beneficial Owner of 15% or more of the Common Shares of the Company
     then outstanding had received prior approval of a majority of the
     Continuing Directors; PROVIDED, that in the event a Person is not an
     Acquiring Person by reason of this clause (iii) of this Section 1(a), such
     Person shall become an Acquiring Person, in the event such Person
     thereafter acquires Beneficial Ownership of any additional Common Shares
     unless such acquisition of such additional Common Shares would not result
     in such Person becoming an Acquiring Person by reason by any provision of
     this Agreement, including, without limitation, this clause (iii) of this
     Section 1(a).

          (b) "Affiliate" and "Associate" shall have the respective meanings 
ascribed to such terms in Rule 12b-2 of the General Rules and Regulations 
under the Exchange Act (as such term is hereinafter defined).

          (c) A Person shall be deemed the "Beneficial Owner" of and shall be 
deemed to "beneficially own" any securities:

               (i) which such Person or any of such Person's Affiliates or 
Associates beneficially owns, directly or indirectly;

              (ii) which such Person or any of such Person's Affiliates
     or Associates has (A) the right to acquire (whether such right is
     exercisable immediately or only after the passage of time) pursuant to
     any agreement, arrangement or understanding (other than customary 
     agreements with and between underwriters and selling group members
     with respect to a bona fide public offering of securities), or upon
     the exercise of conversion rights, exchange rights, rights (other than
     these Rights), warrants or options, or otherwise; PROVIDED, HOWEVER that a
     Person shall not be deemed the Beneficial Owner of, or to beneficially own,
     (1)  securities tendered pursuant to a tender or exchange offer made by or
     on behalf of such Person or any of such Person's Affiliates or Associates
     until such tendered securities are accepted for purchase or exchange or
     (2) securities which a Person or any Person's Affiliates or Associates may
     be deemed to have the right to acquire pursuant to any merger or other
     acquisition agreement between the Company and such Person (or one or more
     of such Person's Affiliates or Associates) if such agreement has been
     approved by the Board of Directors of the Company, upon the affirmative
     vote of a majority of the Continuing Directors, prior to there being an
     Acquiring Person; or (B) the right to vote pursuant to any agreement,
     arrangement or understanding; PROVIDED, HOWEVER, that a Person shall not be
     deemed the Beneficial Owner of, or to beneficially own, any security if the
     agreement, arrangement or understanding to vote such security (1) arises
     solely from a revocable proxy or consent

                                                                          2
<PAGE>

     given to such Person in response to a public proxy or consent solicitation
     made pursuant to, and in accordance with, the applicable rules and
     regulations promulgated under the Exchange Act and (2) is not also then
     reportable on Schedule 13D under the Exchange Act (or any comparable or
     successor report); or

             (iii) which are beneficially owned, directly or indirectly, by
     any other Person with which such Person or any of such Person's Affiliates
     or Associates has any agreement, arrangement or understanding (other than
     customary agreements with and between underwriters and selling group 
     members with respect to a bona fide public offering of securities) for the
     purpose of acquiring, holding, voting (except to the extent contemplated
     by the proviso to Section 1(c)(ii)(B)) or disposing of any securities of
     the Company.

          Notwithstanding anything in this definition of Beneficial Ownership 
to the contrary, the phrase "then outstanding," when used with reference to a 
Person's Beneficial Ownership of securities of the Company, shall mean the 
number of such securities then issued and outstanding together with the 
number of such securities not then actually issued and outstanding which such 
Person would be deemed to own beneficially hereunder.

          (d) "Business Day" shall mean any day other than a Saturday, a 
Sunday, or a day on which banking institutions in the State of California or 
the state in which the principal office of the Rights Agent is located are 
authorized or obligated by law or executive order to close.

          (e) "Company" shall have the meaning set forth in the first 
paragraph at the beginning of this Agreement.

          (f) "Close of Business" on any given date shall mean 5:00 P.M., 
Eastern time, on such date; PROVIDED, HOWEVER, that if such date is not a 
Business Day it shall mean 5:00 P.M., Eastern time, on the next succeeding 
Business Day.

          (g) "Common Shares" when used with reference to the Company shall 
mean the shares of common stock of the Company.  "Common Shares" when used 
with reference to any Person other than the Company shall mean the capital 
stock (or other equity interest) with the greatest voting power of such other 
Person or, if such other Person is a Subsidiary of another Person, the Person 
or Persons which ultimately control such first-mentioned Person.

          (h) "common stock equivalents" shall have the meaning set forth in 
Section 11(a)(iv) hereof.

          (i) "Continuing Director" shall mean (i) any person who is a member 
of the Board of Directors of the Company, while such person is a member of 
the Board of Directors, who is not an Acquiring Person, or an Affiliate or 
Associate of an Acquiring Person, or a representative or agent of an 
Acquiring Person or of any such Affiliate or Associate, and who was a member 
of the Board of Directors prior to the date of this Agreement, or (ii) any 
person who subsequently becomes a member of the Board of Directors and who, 
while such person is a member of the Board of Directors, is not an Acquiring 
Person or an Affiliate or Associate of an Acquiring Person, or a 
representative or agent of an Acquiring Person or of any such Affiliate or 
Associate, if such Person's nomination for election or such Person's election 
to the Board of Directors is recommended or approved by a majority of the 
Continuing Directors then on the Board of Directors.

          (j) "current per share market price" shall have the meaning set 
forth in Section 11(d)(i) hereof.

          (k) "Current Value" shall have the respective meanings set forth in 
Section 11(a)(iv) hereof and Section 24 hereof.

          (l) "Distribution Date" shall have the meaning set forth in 
Section 3 hereof.

          (m) "equivalent preferred shares" shall have the meaning set forth 
in Section 11(b) hereof.

          (n) "Exchange Act" shall mean the Securities Exchange Act of 1934, 
as amended, as in effect on the date of this Agreement.

          (o) "Exchange ratio" shall have the meaning set forth in Section 24 
hereof.

          (p) "Final Expiration Date" shall have the meaning set forth in 
Section 7 hereof.

                                                                          3
<PAGE>


          (q) "issuer" shall have the meaning set forth in Section 13 hereof.

          (r) "Person" shall mean any individual, firm, corporation or other 
entity, and shall include any successor (by merger or otherwise) of such 
entity.

          (s) "Preferred Shares" shall mean shares of Series A Junior 
Participating Preferred Shares, par value .001, of the Company having the 
rights and preferences set forth in the Form of Certificate of Designations 
attached to this Agreement as Exhibit A.

          (t) "Purchase Price" shall have the meaning set forth in Section 4 
hereof.

          (u) "Record Date" shall have the meaning set forth in the second 
paragraph at the beginning of this Agreement.

          (v) "Redemption Date" shall have the meaning set forth in Section 7 
hereof.

          (w) "Redemption Price" shall have the meaning set forth in Section 
23 hereof.

          (x) "Right" shall have the meaning set forth in the second 
paragraph at the beginning of this Agreement.

          (y) "Right Certificate" shall have the meaning set forth in Section 
3 hereof.

          (z) "Rights Agent" shall have the meaning set forth in the first 
paragraph at the beginning of this Agreement.

         (aa) "Securities Act" shall have the meaning set forth in Section 9 
hereof.

         (bb) "Security" shall have the meaning set forth in Section 11(d)(i) 
hereof.

         (cc) "Shares Acquisition Date" shall mean the first date of public 
announcement (which, for purposes of this definition, shall include, without 
limitation, a report filed pursuant to Section 13(d) of the Exchange Act) by 
the Company or an Acquiring Person that an Acquiring Person has become such.

         (dd) "Spread" shall have the meaning set forth in Section 11(a)(iv) 
hereof.

         (ee) "Subsidiary" of any Person shall mean any corporation or other 
entity of which a majority of the voting power of the voting equity 
securities or equity interest is owned, directly or indirectly, by such 
Person.

         (ff) "Substitution Period" shall have the meaning set forth in 
Section 11(a)(iv) hereof.

         (gg) "Summary of Rights" shall have the meaning set forth in Section 
3 hereof.

         (hh) "Trading Day" shall have the meaning set forth in Section 
11(d)(i) hereof.

          Section 2. APPOINTMENT OF RIGHTS AGENT. The Company hereby appoints 
the Rights Agent to act as agent for the Company in accordance with the terms 
and conditions hereof, and the Rights Agent hereby accepts such appointment.  
The Company may from time to time appoint such co-Rights Agents as it may 
deem necessary or desirable upon ten (10) days prior written notice to the 
Rights Agent.  The Rights Agent shall have no duty to supervise and shall in 
no event be liable for the acts or omissions of any such co-Rights Agent.

          Section 3. ISSUE OF RIGHT CERTIFICATES. Until the earlier of (i) 
the tenth day after the Shares Acquisition Date or (ii) the tenth business 
day (or such later date as may be determined by action of the Board of 
Directors (upon approval by a majority of the Continuing Directors) prior to 
such time as any Person becomes an Acquiring Person) after the date of the 
commencement by any Person (other than the Company, any Subsidiary of the 
Company, any employee benefit plan of the Company or of any Subsidiary of the 
Company or any entity

                                                                          4
<PAGE>


holding Common Shares for or pursuant to the terms of any such plan) of, or 
of the first public announcement of the intention of any Person (other than 
the Company, any Subsidiary of the Company, any employee benefit plan of the 
Company or of any Subsidiary of the Company or any entity holding Common 
Shares for or pursuant to the terms of any such plan) to commence, a tender 
or exchange offer the consummation of which would result in any Person 
becoming the Beneficial Owner of Common Shares aggregating 15% or more of the 
then outstanding Common Shares (including any such date which is after the 
date of this Agreement and prior to the issuance of the Rights; the earlier 
of such dates being herein referred to as the "Distribution Date"), (x) the 
Rights will be evidenced (subject to the provisions of Section 3(b) hereof) 
by the certificates for Common Shares registered in the names of the holders 
thereof (which certificates shall also be deemed to be Right Certificates) 
and not by separate Right Certificates, and (y) the right to receive Right 
Certificates will be transferable only in connection with the transfer of 
Common Shares.  As soon as practicable after the Distribution Date, the 
Company will notify the Rights Agent thereof and the Company will prepare and 
execute, the Rights Agent will countersign, and the Company will send or 
cause to be sent (and the Rights Agent will, if requested, send) by 
first-class, insured, postage-prepaid mail, to each record holder of Common 
Shares as of the Close of Business on the Distribution Date, at the address 
of such holder shown on the records of the Company, a Right Certificate, in 
substantially the form of Exhibit B hereto (a "Right Certificate"), 
evidencing one Right for each Common Share so held.  As of the Distribution 
Date, the Rights will be evidenced solely by such Right Certificates.

          (b) On the Record Date, or as soon as practicable thereafter, the 
Company will send a copy of a Summary of Rights to Purchase Preferred Shares, 
in substantially the form of Exhibit C hereto (the "Summary of Rights"), by 
first-class, postage-prepaid mail, to each record holder of Common Shares as 
of the Close of Business on the Record Date, at the address of such holder 
shown on the records of the Company.  With respect to certificates for Common 
Shares outstanding as of the Record Date, until the Distribution Date, the 
Rights will be evidenced by such certificates registered in the names of the 
holders thereof together with a copy of the Summary of Rights attached 
thereto.  Until the Distribution Date (or the earlier of the Redemption Date 
or the Final Expiration Date), the surrender for transfer of any certificate 
for Common Shares outstanding on the Record Date, with or without a copy of 
the Summary of Rights attached thereto, shall also constitute the transfer of 
the Rights associated with the Common Shares represented thereby.

          (c) Certificates for Common Shares which become outstanding 
(including, without limitation, reacquired Common Shares referred to in the 
last sentence of this paragraph (c)) after the Record Date but prior to the 
earliest of the Distribution Date, the Redemption Date or the Final 
Expiration Date shall have impressed on, printed on, written on or otherwise 
affixed to them the following legend:

          This certificate also evidences and entitles the holder hereof to
     certain rights as set forth in a Rights Agreement between Ultratech
     Stepper, Inc. and The First National Bank of Boston, dated as of
     February 11, 1997 (the "Rights Agreement"), the terms of which are
     hereby incorporated herein by reference and a copy of which is on file
     at the principal executive offices of Ultratech Stepper, Inc.  Under
     certain circumstances, as set forth in the Rights Agreement, such
     Rights will be evidenced by separate certificates and will no longer
     be evidenced by this certificate.  Ultratech Stepper, Inc. will mail
     to the holder of this certificate a copy of the Rights Agreement
     without charge after receipt of a written request therefor.  Under
     certain circumstances, as set forth in the Rights Agreement, Rights
     issued to any Person who becomes an Acquiring Person (as defined in
     the Rights Agreement) may become null and void.

With respect to such certificates containing the foregoing legend, until the
Distribution Date, the Rights associated with the Common Shares represented by
such certificates shall be evidenced by such certificates alone, and the
surrender for transfer of any such certificate shall also constitute the
transfer of the Rights associated with the Common Shares represented thereby. 
In the event that the Company purchases or acquires any Common Shares after the
Record Date but prior to the Distribution Date, any Rights associated with such
Common Shares shall be deemed cancelled and retired so that the Company shall
not be entitled to exercise any Rights associated with the Common Shares which
are no longer outstanding.

          Section 4. FORM OF RIGHT CERTIFICATES.  The Right Certificates (and 
the forms of election to purchase Preferred Shares and of assignment to be 
printed on the reverse thereof) shall be substantially the same as Exhibit B 
hereto and may have such marks of identification or designation and such 
legends, summaries or endorsements printed thereon as the Company may deem 
appropriate and as are not inconsistent with the provisions of this 
Agreement, or as may be required to comply with any applicable law or with 
any rule or regulation made pursuant thereto or with any rule or regulation 
of any stock exchange or transaction reporting system on which the Rights may 
from time to time be listed, or to conform to usage.  Subject to the 
provisions of Section 22 hereof, the Right Certificates shall entitle the 
holders thereof to purchase such number of one one-hundredths of a Preferred 
Share 

                                                                          5
<PAGE>


as shall be set forth therein at the price per one one-hundredth of a 
Preferred Share set forth therein (the "Purchase Price"), but the number of 
such one one-hundredths of a Preferred Share and the Purchase Price shall be 
subject to adjustment as provided herein.

          Section 5. COUNTERSIGNATURE AND REGISTRATION. The Right 
Certificates shall be executed on behalf of the Company by its Chairman of 
the Board, its President, any of its Vice Presidents, or its Treasurer or 
Chief Financial Officer, either manually or by facsimile signature, shall 
have affixed thereto the Company's seal or a facsimile thereof, and shall be 
attested by the Secretary or an Assistant Secretary of the Company, either 
manually or by facsimile signature.  The Right Certificates shall be manually 
countersigned by the Rights Agent and shall not be valid for any purpose 
unless countersigned.  In case any officer of the Company who shall have 
signed any of the Right Certificates shall cease to be such officer of the 
Company before countersignature by the Rights Agent and issuance and delivery 
by the Company, such Right Certificates, nevertheless, may be countersigned 
by the Rights Agent and issued and delivered by the Company with the same 
force and effect as though the person who signed such Right Certificates had 
not ceased to be such officer of the Company; and any Right Certificate may 
be signed on behalf of the Company by any person who, at the actual date of 
the execution of such Right Certificate, shall be a proper officer of the 
Company to sign such Right Certificate, although at the date of the execution 
of this Rights Agreement any such person was not such an officer.

          Following the Distribution Date, the Rights Agent will keep or 
cause to be kept, at its office designated for such purpose, books for 
registration and transfer of the Right Certificates issued hereunder.  Such 
books shall show the names and addresses of the respective holders of the 
Right Certificates, the number of Rights evidenced on its face by each of the 
Right Certificates and the date of each of the Right Certificates.

          Section 6.  TRANSFER, SPLIT-UP, COMBINATION AND EXCHANGE OF RIGHT 
CERTIFICATES; MUTILATED, DESTROYED, LOST OR STOLEN RIGHT CERTIFICATES.  
Subject to the provisions of Section 14 hereof, at any time after the Close 
of Business on the Distribution Date, and at or prior to the Close of 
Business on the earlier of the Redemption Date or the Final Expiration Date, 
any Right Certificate or Right Certificates (other than Right Certificates 
representing Rights that have become void pursuant to Section 11(a)(ii) 
hereof or that have been exchanged pursuant to Section 24 hereof) may be 
transferred, split up, combined or exchanged for another Right Certificate or 
Right Certificates, entitling the registered holder to purchase a like number 
of one one-hundredths of a Preferred Share (or other securities or property) 
as the Right Certificate or Right Certificates surrendered then entitled such 
holder to purchase.  Any registered holder desiring to transfer, split up, 
combine or exchange any Right Certificate or Right Certificates shall make 
such request in writing delivered to the Rights Agent, and shall surrender 
the Right Certificate or Right Certificates to be transferred, split up, 
combined or exchanged at the office of the Rights Agent designated for such 
purpose.  Thereupon the Rights Agent shall countersign and deliver to the 
person entitled thereto a Right Certificate or Right Certificates, as the 
case may be, as so requested.  The Company may require payment of a sum 
sufficient to cover any tax or governmental charge that may be imposed in 
connection with any transfer, split up, combination or exchange of Right 
Certificates.

          Upon receipt by the Company and the Rights Agent of evidence 
reasonably satisfactory to them of the loss, theft, destruction or mutilation 
of a Right Certificate, and, in case of loss, theft or destruction, of 
indemnity or security reasonably satisfactory to them, and, at the Company's 
request, reimbursement to the Company and the Rights Agent of all reasonable 
expenses incidental thereto, and upon surrender to the Rights Agent and 
cancellation of the Right Certificate if mutilated, the Company will make and 
deliver a new Right Certificate of like tenor to the Rights Agent for 
delivery to the registered holder in lieu of the Right Certificate so lost, 
stolen, destroyed or mutilated.

          Section 7. EXERCISE OF RIGHTS; PURCHASE PRICE; EXPIRATION DATE OF 
RIGHTS. (a) Except as provided in Section 23(c), the registered holder of any 
Right Certificate may exercise the Rights evidenced thereby (except as 
otherwise provided herein) in whole or in part at any time after the 
Distribution Date upon surrender of the Right Certificate, with the form of 
election to purchase and certification on the reverse side thereof duly 
executed, to the Rights Agent at the office of the Rights Agent designated 
for such purpose, together with payment of the Purchase Price for each one 
one-hundredth of a Preferred Share as to which the Rights are exercised, at 
or prior to the earliest of (i) the Close of Business on February 9, 2007, 
(the "Final Expiration Date"), (ii) the time at which the Rights are redeemed 
as provided in Section 23 hereof (the "Redemption Date"), (iii) the time at 
which such Rights are exchanged as provided in Section 24 hereof, or (iv) the 
consummation of any merger or other acquisition involving the Company 
pursuant to an agreement described in Section 1(c)(ii)(A)(2) hereof.

          (b) The Purchase Price for each one one-hundredth of a Preferred 
Share pursuant to the exercise of a Right shall initially be $145.00, shall 
be subject to adjustment from time to time as provided in Sections 11 and 13 
hereof and shall be payable in lawful money of the United States of America 
in accordance with paragraph (c) below.

                                                                          6
<PAGE>

          (c) Upon receipt of a Right Certificate representing exercisable 
Rights, with the form of election to purchase duly executed, accompanied by 
payment of the Purchase Price for the shares to be purchased and an amount 
equal to any applicable transfer tax required to be paid by the holder of 
such Right Certificate in accordance with Section 9 hereof by certified 
check, cashier's check or money order payable to the order of the Company, 
the Rights Agent shall thereupon promptly (i) (A) requisition from any 
transfer agent of the Preferred Shares (if such transfer agent is an entity 
other than the Rights Agent) certificates for the number of Preferred Shares 
to be purchased and the Company hereby irrevocably authorizes such transfer 
agent to comply with all such requests, or (B) requisition from a depositary 
agent properly appointed by the Company depositary receipts representing such 
number of one one-hundredths of a Preferred Share as are to be purchased (in 
which case certificates for the Preferred Shares represented by such receipts 
shall be deposited by the transfer agent with the depositary agent) and the 
Company hereby directs the depositary agent to comply with such request, (ii) 
when appropriate, requisition from the Company the amount of cash to be paid 
in lieu of issuance of fractional shares in accordance with Section 14 
hereof, (iii) after receipt of such certificates or depositary receipts, 
cause the same to be delivered to or upon the order of the registered holder 
of such Right Certificate, registered in such name or names as may be 
designated by such holder and (iv) when appropriate, after receipt, deliver 
such cash to or upon the order of the registered holder of such Right 
Certificate.

          (d) In case the registered holder of any Right Certificate shall 
exercise less than all the Rights evidenced thereby, a new Right Certificate 
evidencing Rights equivalent to the Rights remaining unexercised shall be 
issued by the Rights Agent to the registered holder of such Right Certificate 
or to his duly authorized assigns, subject to the provisions of Section 14 
hereof.

          (e) The Company covenants and agrees that it will cause to be 
reserved and kept available out of its authorized and unissued Preferred 
Shares or any Preferred Shares held in its treasury, the number of Preferred 
Shares that will be sufficient to permit the exercise in full of all 
outstanding Rights in accordance with this Section 7.

          (f) Notwithstanding anything in this Agreement to the contrary, 
neither the Rights Agent nor the Company shall be obligated to undertake any 
action with respect to a registered holder upon the occurrence of any 
purported exercise as set forth in this Section 7 unless such registered 
holder shall have (i) completed and signed the certificate contained in the 
form of election to purchase set forth on the reverse side of the Right 
Certificate surrendered for such exercise, and (ii) provided such additional 
evidence of the identity of the Beneficial Owner (or former Beneficial Owner) 
or Affiliates or Associates thereof as the Company shall reasonably request.

          Section 8. CANCELLATION AND DESTRUCTION OF RIGHT CERTIFICATES. All 
Right Certificates surrendered for the purpose of exercise, transfer, split 
up, combination or exchange shall, if surrendered to the Company or to any of 
its agents, be delivered to the Rights Agent for cancellation or in cancelled 
form, or, if surrendered to the Rights Agent, shall be cancelled by it, and 
no Right Certificates shall be issued in lieu thereof except as expressly 
permitted by any of the provisions of this Rights Agreement.  The Company 
shall deliver to the Rights Agent for cancellation and retirement, and the 
Rights Agent shall so cancel and retire, any other Right Certificate 
purchased or acquired by the Company otherwise than upon the exercise 
thereof.  The Rights Agent shall deliver all cancelled Right Certificates to 
the Company, or shall, at the written request of the Company, destroy such 
cancelled Right Certificates, and in such case shall deliver a certificate of 
destruction thereof to the Company.

          Section 9. AVAILABILITY OF PREFERRED SHARES. (a) The company 
covenants and agrees that it will use its best efforts to cause to be 
reserved and kept available out of and to the extent of its authorized and 
unissued shares of Preferred Stock not reserved for another purpose (and, 
following the occurrence of an event described in Section 11(a)(ii) or 
Section 13(a), out of its authorized and unissued shares of Common Stock 
and/or other securities), the number of Preferred Shares (and, following the 
occurrence of any such event, Common Stock and/or other securities) that will 
be sufficient to permit the exercise in full of all outstanding Rights.

          (b) If the Preferred Shares (or, following the occurrence of an 
event described in Section 11(a)(ii) or Section 13(a), the Common Shares 
and/or other securities) are at any time listed on a national securities 
exchange or included for quotation on any transaction reporting system, then 
so long as the Preferred Shares (and, following the occurrence of any such 
event, Common Shares and/or other securities) issuable and deliverable upon 
exercise of the Rights may be listed on such exchange or included for 
quotation on any such transaction reporting system, the Company shall use its 
best efforts to cause, from and after such time as the Rights become 
exercisable (but only to the extent that it is reasonably likely that the 
Rights will be exercised), all shares reserved for such issuance to be listed 
on such exchange or included for quotation on any such transaction reporting 
system upon official notice of issuance upon such exercise.

                                                                          7
<PAGE>

          (c) The Company shall use its best efforts to (i) file, as soon as 
practicable following the earliest date after the first occurrence of an 
event described in Section 11(a)(ii) in which the consideration to be 
delivered by the Company upon exercise of the Rights has been determined in 
accordance with Section 11(a)(iv) hereof, or as soon as is required by law 
following the Distribution Date, as the case may be, a registration statement 
under the Securities Act of 1933, as amended (the "Securities Act"), with 
respect to the securities purchasable upon exercise of the Rights on an 
appropriate form, (ii) cause such registration statement to become effective 
as soon as practicable after such filing and (iii) cause such registration 
statement to remain effective (with a prospectus at all times meeting the 
requirements of the Securities Act) until the earlier of (A) the date as of 
which the Rights are no longer exercisable for such securities or (B) the 
date of expiration of the Rights.  The Company may temporarily suspend, for a 
period not to exceed ninety (90) days after the date set forth in clause (i) 
of the first sentence of this Section 9(c), the exercisability of the Rights 
in order to prepare and file such registration statement and permit it to 
become effective.  Upon any such suspension, the Company shall issue a public 
announcement stating, and notify the Rights Agent, that the exercisability of 
the Rights has been temporarily suspended, as well as a public announcement 
and notification to the Rights Agent at such time as the suspension is no 
longer in effect.  The Company will also take such action as may be 
appropriate under, or to ensure compliance with, the securities or "blue sky" 
laws of the various states in connection with the exercisability of the 
Rights.  Notwithstanding any provision of this Agreement to the contrary, the 
Rights shall not be exercisable in any jurisdiction, unless the requisite 
qualification in such jurisdiction shall have been obtained, or an exemption 
therefrom shall be available and until a registration statement has been 
declared effective.

          (d) The Company covenants and agrees that it will take all such 
action as may be necessary to ensure that all Preferred Shares delivered upon 
exercise of Rights shall, at the time of delivery of the certificates for 
such Preferred Shares (subject to payment of the Purchase Price), be duly and 
validly authorized and issued and fully paid and nonassessable shares.

          (e) The Company further covenants and agrees that it will pay when 
due and payable any and all federal and state transfer taxes and charges 
which may be payable in respect of the issuance or delivery of the Right 
Certificates or of any Preferred Shares upon the exercise of Rights. The 
Company shall not, however, be required to pay any transfer tax which may be 
payable in respect of any transfer or delivery of Right Certificates to a 
person other than, or the issuance or delivery of certificates or depositary 
receipts for the Preferred Shares in a name other than that of, the 
registered holder of the Right Certificate evidencing Rights surrendered for 
exercise or to issue or to deliver any certificates or depositary receipts 
for Preferred Shares upon the exercise of any Rights until any such tax shall 
have been paid (any such tax being payable by the holder of such Right 
Certificate at the time of surrender) or until it has been established to the 
Company's reasonable satisfaction that no such tax is due.

          Section 10. PREFERRED SHARES RECORD DATE. Each person in whose name 
any certificate for Preferred Shares is issued upon the exercise of Rights 
shall for all purposes be deemed to have become the holder of record of the 
Preferred Shares represented thereby on, and such certificate shall be dated, 
the date upon which the Right Certificate evidencing such Rights was duly 
surrendered and payment of the Purchase Price (and any applicable transfer 
taxes) was made; PROVIDED, HOWEVER, that if the date of such surrender and 
payment is a date upon which the Preferred Shares transfer books of the 
Company are closed, such person shall be deemed to have become the record 
holder of such shares on, and such certificate shall be dated, the next 
succeeding Business Day on which the Preferred Shares transfer books of the 
Company are open.  Prior to the exercise of the Rights evidenced thereby, the 
holder of a Right Certificate shall not be entitled to any rights of a holder 
of Preferred Shares for which the Rights shall be exercisable, including, 
without limitation, the right to vote, to receive dividends or other 
distributions or to exercise any preemptive rights, and shall not be entitled 
to receive any notice of any proceedings of the Company, except as provided 
herein.

          Section 11. ADJUSTMENT OF PURCHASE PRICE, NUMBER OF SHARES OR 
NUMBER OF RIGHTS. The Purchase Price, the number of Preferred Shares covered 
by each Right and the number of Rights outstanding are subject to adjustment 
from time to time as provided in this Section 11.

          (a)  (i) In the event the Company shall at any time after the date 
of this Agreement (A) declare a dividend on the Preferred Shares payable in 
Preferred Shares, (B) subdivide the outstanding Preferred Shares, (C) combine 
the outstanding Preferred Shares into a smaller number of Preferred Shares or 
(D) issue any shares of its capital stock in a reclassification of the 
Preferred Shares (including any such reclassification in connection with a 
consolidation or merger in which the Company is the continuing or surviving 
corporation), except as otherwise provided in this Section 11(a), the 
Purchase Price in effect at the time of the record date for such dividend or 
of the effective date of such subdivision, combination or reclassification, 
and the number and kind of shares of capital stock issuable on such date, 
shall be

                                                                          8
<PAGE>

proportionately adjusted so that the holder of any Right exercised after such 
time shall be entitled to receive the aggregate number and kind of shares of 
capital stock which, if such Right had been exercised immediately prior to 
such date and at a time when the Preferred Shares transfer books of the 
Company were open, such holder would have owned upon such exercise and been 
entitled to receive by virtue of such dividend, subdivision, combination or 
reclassification; PROVIDED, HOWEVER, that in no event shall the consideration 
to be paid upon the exercise of one Right be less than the aggregate par 
value of the shares of capital stock of the Company issuable upon exercise of 
one Right.  If an event occurs which would require an adjustment under both 
Section 11(a)(i) and Section 11(a)(ii), the adjustment provided for in this 
Section 11(a)(i) shall be in addition to, and shall be made prior to any 
adjustment required pursuant to Section 11(a)(ii).

              (ii) Subject to Section 24 of this Agreement, in the event that 
any Person becomes an Acquiring Person, each holder of a Right shall 
thereafter have a right to receive, upon exercise thereof at a price equal to 
the then current Purchase Price multiplied by the number of one 
one-hundredths of a Preferred Share for which a Right is then exercisable, in 
accordance with the terms of this Agreement and in lieu of Preferred Shares, 
such number of Common Shares of the Company as shall equal the result 
obtained by (x) multiplying the then current Purchase Price by the number of 
one one-hundredths of a Preferred Share for which a Right is then exercisable 
and dividing that product by (y) 50% of the then current per share market 
price of the Company's Common Shares (determined pursuant to Section 11(d) 
hereof) on the date of the occurrence of such event.  Except as provided in 
Section 23(C), in the event that any Person shall become an Acquiring Person 
and the Rights shall then be outstanding, the Company shall not take any 
action which would eliminate or diminish the benefits intended to be afforded 
by the Rights.

          Notwithstanding anything in this Agreement to the contrary, from 
and after the first occurrence of an event in which any Person shall become 
an Acquiring Person, any Rights beneficially owned by (A) an Acquiring Person 
or an Associate or Affiliate of an Acquiring Person, (B) a transferee of an 
Acquiring Person (or of any such Associate or Affiliate) who becomes a 
transferee after the Acquiring Person becomes such, or (C) a transferee of an 
Acquiring Person (or of any such Associate or Affiliate) who becomes a 
transferee prior to or concurrently with the Acquiring Person becoming such 
and receives such Rights pursuant to either (1) a transfer (whether or not 
for consideration) from the Acquiring Person to holders of equity interests 
in such Acquiring Person or to any Person with whom the Acquiring Person has 
any continuing agreement, arrangement or understanding regarding the 
transferred Rights or (2) a transfer which the Board of Directors, upon 
approval by a majority of the Continuing Directors, has determined is part of 
a plan, arrangement or understanding which has as a primary purpose or effect 
the avoidance of this Section 11(a)(ii), shall become null and void without 
any further action and no holder of such Rights shall have any rights 
whatsoever with respect to such Rights, whether under any provision of this 
Agreement or otherwise.  No Right Certificate shall be issued pursuant to 
Section 3 that represents Rights beneficially owned by an Acquiring Person 
whose Rights would be void pursuant to the preceding sentence or any 
Associate or Affiliate thereof; no Right Certificate shall be issued at any 
time upon the transfer of any Rights to an Acquiring Person whose Rights 
would be void pursuant to the preceding sentence or any Associate or 
Affiliate thereof or to any nominee of such Acquiring Person, Associate or 
Affiliate; and any Right Certificate delivered to the Rights Agent for 
transfer to an Acquiring Person whose Rights would be void pursuant to the 
preceding sentence shall be cancelled.  The Company shall use all reasonable 
efforts to ensure that the provisions of this Section 11(a)(ii) are complied 
with, but shall have no liability to any holder of Right Certificates or 
other Person as a result of its failure to make any determinations with 
respect to an Acquiring person or its Affiliates, Associates or transferees 
hereunder.

             (iii) The right to buy Common Shares of the Company pursuant to 
subparagraph (ii) of this paragraph (a) shall not arise if the event causing 
such Person to become an Acquiring Person (A) is a consolidation, merger, 
sale, transfer or similar transaction subject to Section 13 hereof, or (B) is 
an acquisition of shares of Common Stock pursuant to a tender offer or an 
exchange offer for all outstanding Common Shares at a price and on terms 
determined by at least a majority of the Continuing Directors, and after 
receiving advice from one or more investment banking firms, to be (1) at a 
price which is fair to stockholders (taking into account all factors which 
such members of the Board of Directors deem relevant including, without 
limitation, prices which could reasonably be achieved if the Company or its 
assets were sold in an orderly basis designed to realize maximum value) and 
(2) otherwise in the best interests of the Company and its stockholders.

              (iv) In lieu of issuing Common Shares in accordance with 
Section 11(a)(ii) hereof, the Company may, if the Board of Directors of the 
Company, upon approval by a majority of the Continuing Directors, determines 
that such action is necessary or appropriate and not contrary to the interest 
of holders of Rights (and, in the event that the number of Common Shares 
which are authorized by the Company's Certificate of Incorporation but not 
outstanding or reserved for issuance for purposes other than upon exercise of 
the Rights are not sufficient to permit the exercise in full of the Rights, 
or if any necessary regulatory approval for such issuance has not been 
obtained by the Company), the Company shall: (A) determine the excess of (1) 
the value of the Common Shares issuable upon the exercise of a Right (the 
"Current Value")

                                                                          9
<PAGE>

over (2) the Purchase Price (such excess being referred to as the "Spread") 
and (B) with respect to each Right, make adequate provision to substitute for 
such Common Shares, upon exercise of the Rights, (1) cash, (2) a reduction in 
the Purchase Price, (3) other equity securities of the Company (including, 
without limitation, shares or units of shares of any series of preferred 
stock which the Board of Directors of the Company, upon approval by a 
majority of the Continuing Directors, has deemed to have the same value as 
Common Shares (such shares or units of shares of preferred stock are herein 
called "common stock equivalents")), except to the extent that the Company 
has not obtained any necessary regulatory approval for such issuance, (4) 
debt securities of the Company, except to the extent that the Company has not 
obtained any necessary regulatory approval for such issuance, (5) other 
assets or (6) any combination of the foregoing, having an aggregate value 
equal to the Current Value, where such aggregate value has been determined by 
the Board of Directors of the Company, upon approval by a majority of the 
Continuing Directors, based upon the advice of a nationally recognized 
investment banking firm selected by the Board of Directors of the Company, 
upon approval by a majority of the Continuing Directors; PROVIDED, HOWEVER, 
if the Company shall not have made adequate provision to deliver value 
pursuant to clause (B) above within thirty (30) days following the occurrence 
of an event described in Section 11(a)(ii), then the Company shall be 
obligated to deliver, upon the surrender for exercise of a Right and without 
requiring payment of the Purchase Price, Common Shares (to the extent 
available), except to the extent that the Company has not obtained any 
necessary regulatory approval for such issuance, and then, if necessary, 
cash, which shares and/or cash have an aggregate value equal to the Spread.  
If the Board of Directors, upon approval by a majority of the Continuing 
Directors, shall determine in good faith that it is likely that sufficient 
additional Common Shares could be authorized for issuance upon exercise in 
full of the Rights or that any necessary regulatory approval for such 
issuance will be obtained, the thirty (30) day period set forth above may be 
extended to the extent necessary, but not more than ninety (90) days after 
the occurrence of an event described in Section 11(a)(ii), in order that the 
Company may seek stockholder approval for the authorization of such 
additional shares or take action to obtain such regulatory approval (such 
period, as it may be extended, the "Substitution Period").  To the extent 
that the Company determines that some action need be taken pursuant to the 
first and/or second sentences of this Section 11(a)(iv), the Company (x) 
shall provide that such action shall apply uniformly to all outstanding 
Rights held by holders entitled to receive Common Shares or other securities 
or property upon exercise of such Rights and (y) may suspend the 
exercisability of the Rights until the expiration of the Substitution Period 
in order to seek any authorization of additional shares, to take any action 
to obtain any required regulatory approval and/or to decide the appropriate 
form of distribution to be made pursuant to such first sentence and to 
determine the value thereof.  In the event of any such suspension, the 
Company shall issue a public announcement stating that the exercisability of 
the Rights has been temporarily suspended, as well as a public announcement 
at such time as the suspension is no longer in effect and shall promptly 
notify the Rights Agent of such suspension.  For purposes of this Section 
11(a)(iv), the value of the Common Shares shall be the current per share 
market price (as determined pursuant to Section 11(d) hereof) of the Common 
Shares at the Close of Business on the date of the occurrence of one of the 
events described in Section 11(a)(ii) and the value of any "common stock 
equivalent" shall be deemed to have the same value as the Common Shares on 
such date.

          (b) In the event that the Company shall fix a record date for the 
issuance of rights, options or warrants to all holders of Preferred Shares 
entitling them (for a period expiring within 45 calendar days after such 
record date) to subscribe for or purchase Preferred Shares (or shares having 
the same rights, privileges and preferences as the Preferred Shares 
("equivalent preferred shares")) or securities convertible into Preferred 
Shares or equivalent preferred shares at a price per Preferred Share or 
equivalent preferred share (or having a conversion price per share, if a 
security convertible into Preferred Shares or equivalent preferred shares) 
less than the then current per share market price of the Preferred Shares (as 
defined in Section 11(d)) on such record date, the Purchase Price to be in 
effect after such record date shall be determined by multiplying the Purchase 
Price in effect immediately prior to such record date by a fraction, the 
numerator of which shall be the number of Preferred Shares outstanding on 
such record date plus the number of Preferred Shares which the aggregate 
offering price of the total number of Preferred Shares and/or equivalent 
preferred shares so to be offered (and/or the aggregate initial conversion 
price of the convertible securities so to be offered) would purchase at such 
current market price and the denominator of which shall be the number of 
Preferred Shares outstanding on such record date plus the number of 
additional Preferred Shares and/or equivalent preferred shares to be offered 
for subscription or purchase (or into which the convertible securities so to 
be offered are initially convertible).  In case such subscription price may 
be paid in a consideration part or all of which shall be in a form other than 
cash, the value of such consideration shall be as determined in good faith by 
the Board of Directors of the Company, upon approval by a majority of the 
Continuing Directors, whose determination shall be described in a statement 
filed with the Rights Agent and shall be binding on the Rights Agent and the 
holders of the Rights.  Preferred Shares owned by or held for the account of 
the Company shall not be deemed outstanding for the purpose of any such 
computation.  Such adjustment shall be made successively whenever such a 
record date is fixed; and in the event that such rights, options or warrants 
are not so issued, the Purchase Price shall be adjusted to be the Purchase 
Price which would then be in effect if such record date had not been fixed.

                                                                          10
<PAGE>

          (c) In case the Company shall fix a record date for the making of a 
distribution to all holders of the Preferred Shares (including any such 
distribution made in connection with a consolidation or merger in which the 
Company is the continuing or surviving corporation) of evidences of 
indebtedness or assets (other than a regular quarterly cash dividend or a 
dividend payable in Preferred Shares) or subscription rights or warrants 
(excluding those referred to in Section 11(b) hereof), the Purchase Price to 
be in effect after such record date shall be determined by multiplying the 
Purchase Price in effect immediately prior to such record date by a fraction, 
the numerator of which shall be the then current per share market price of 
the Preferred Shares on such record date, less the fair market value (as 
determined in good faith by the Board of Directors of the Company, upon 
approval by a majority of the Continuing Directors, whose determination shall 
be described in a statement filed with the Rights Agent) of the portion of 
the assets or evidences of indebtedness so to be distributed or of such 
subscription rights or warrants applicable to one Preferred Share and the 
denominator of which shall be such current per share market price of the 
Preferred Shares. Such adjustments shall be made successively whenever such a 
record date is fixed; and in the event that such distribution is not so made, 
the Purchase Price shall again be adjusted to be the Purchase Price which 
would then be in effect if such record date had not been fixed.

          (d)  (i) For the purpose of any computation hereunder, the "current 
per share market price" of any security (a "Security" for the purpose of this 
Section 11(d)(i)) on any date shall be deemed to be the average of the daily 
closing prices per share of such Security for the thirty (30) consecutive 
Trading Days (as such term is hereinafter defined) immediately prior to such 
date; PROVIDED, HOWEVER, that in the event that the current per share market 
price of the Security is determined during a period following the 
announcement by the issuer of such Security of (A) a dividend or distribution 
on such Security payable in shares of such Security or securities convertible 
into such shares, or (B) any subdivision, combination or reclassification of 
such Security and prior to the expiration of thirty (30) Trading Days after 
the ex-dividend date for such dividend or distribution, or the record date 
for such subdivision, combination or reclassification, then, and in each such 
case, the current per share market price shall be appropriately adjusted to 
reflect the current market price per share equivalent of such Security.)  The 
closing price for each day shall be the last sale price, regular way, or, in 
case no such sale takes place on such day, the average of the closing bid and 
asked prices, regular way, in either case as reported in the principal 
consolidated transaction reporting system with respect to securities listed 
or admitted to trading on the Nasdaq National Market ("Nasdaq") or, if the 
Security is not listed or admitted to trading on the Nasdaq, as reported in 
the principal consolidated transaction reporting system with respect to 
securities listed on the principal national securities exchange on which the 
Security is listed or admitted to trading or, if the Security is not listed 
or admitted to trading on any national securities exchange, the last quoted 
price or, if not so quoted, the average of the high bid and low asked prices 
in the over-the-counter market, as reported by the Nasdaq or such other 
system then in use, or, if on any such date the Security is not quoted by any 
such organization, the average of the closing bid and asked prices as 
furnished by a professional market maker making a market in the Security 
selected by the Board of Directors of the Company, upon approval by a 
majority of the Continuing Directors.  If on any such date no market maker is 
making a market in the Security, the "current per share market price" of such 
Security on such date as determined in good faith by the Board of Directors 
of the Company as provided for above shall be used.  The term "Trading Day" 
shall mean a day on which the principal national securities exchange on which 
the Security is listed or admitted to trading is open for the transaction of 
business or, if the Security is not listed or admitted to trading on any 
national securities exchange, a Business Day.

              (ii) For the purpose of any computation hereunder, the "current 
per share market price" of the Preferred Shares shall be determined in 
accordance with the method set forth in Section 11(d)(i).  If the Preferred 
Shares are not publicly traded, the "current per share market price" of the 
Preferred Shares shall be conclusively deemed to be the current per share 
market price of the Common Shares as determined pursuant to Section 11(d)(i) 
(appropriately adjusted to reflect any stock split, stock dividend or similar 
transaction occurring after the date hereof), multiplied by one hundred.  If 
neither the Common Shares nor the Preferred Shares are publicly held or so 
listed or traded, "current per share market price" shall mean the fair value 
per share as determined in good faith by the Board of Directors of the 
Company, upon approval by a majority of the Continuing Directors, whose 
determination shall be described in a statement filed with the Rights Agent.

          (e) No adjustment in the Purchase Price shall be required unless 
such adjustment would require an increase or decrease of at least 1% in the 
Purchase Price; PROVIDED, HOWEVER, that any adjustments which by reason of 
this Section 11(e) are not required to be made shall be carried forward and 
taken into account in any subsequent adjustment.  All calculations under this 
Section 11 shall be made to the nearest cent or to the nearest one 
one-millionth of a Preferred Share or one ten-thousandth of any other share 
or security as the case may be. Notwithstanding the first sentence of this 
Section 11(e), any adjustment required by this Section 11 shall be made no 
later than the earlier of (i) three years from the date of the transaction 
which requires such adjustment or (ii) the date of the expiration of the 
right to exercise any Rights.

                                                                          11
<PAGE>

          (f) If as a result of an adjustment made pursuant to Section 11(a) 
hereof, the holder of any Right thereafter exercised shall become entitled to 
receive any shares of capital stock of the Company other than Preferred 
Shares, thereafter the number of such other shares so receivable upon 
exercise of any Right shall be subject to adjustment from time to time in a 
manner and on terms as nearly equivalent as practicable to the provisions 
with respect to the Preferred Shares contained in Section 11(a) through (c), 
inclusive, and the provisions of Sections 7, 9, 10, 13 and 14 with respect to 
the Preferred Shares shall apply on like terms to any such other shares.

          (g) All Rights originally issued by the Company subsequent to any 
adjustment made to the Purchase Price hereunder shall evidence the right to 
purchase, at the adjusted Purchase Price, the number of one one-hundredths of 
a Preferred Share purchasable from time to time hereunder upon exercise of 
the Rights, all subject to further adjustment as provided herein.

          (h) Unless the Company shall have exercised its election as 
provided in Section 11(i), upon each adjustment of the Purchase Price as a 
result of the calculations made in Sections 11(b) and (c), each Right 
outstanding immediately prior to the making of such adjustment shall 
thereafter evidence the right to purchase, at the adjusted Purchase Price, 
that number of one one-hundredths of a Preferred Share (calculated to the 
nearest one one-millionth of a Preferred Share) obtained by (i) multiplying 
(x) the number of one one-hundredths of a share covered by a Right 
immediately prior to this adjustment by (y) the Purchase Price in effect 
immediately prior to such adjustment of the Purchase Price and (ii) dividing 
the product so obtained by the Purchase Price in effect immediately after 
such adjustment of the Purchase Price. 

          (i) The Company may elect on or after the date of any adjustment of 
the Purchase Price to adjust the number of Rights, in substitution for any 
adjustment in the number of one one-hundredths of a Preferred Share 
purchasable upon the exercise of a Right.  Each of the Rights outstanding 
after such adjustment of the number of Rights shall be exercisable for the 
number of one one-hundredths of a Preferred Share for which a Right was 
exercisable immediately prior to such adjustment.  Each Right held of record 
prior to such adjustment of the number of Rights shall become that number of 
Rights (calculated to the nearest one ten-thousandth) obtained by dividing 
the Purchase Price in effect immediately prior to adjustment of the Purchase 
Price by the Purchase Price in effect immediately after adjustment of the 
Purchase Price.  The Company shall make a public announcement of its election 
to adjust the number of Rights, indicating the record date for the 
adjustment, and, if known at the time, the amount of the adjustment to be 
made.  This record date may be the date on which the Purchase Price is 
adjusted or any day thereafter, but, if the Right Certificates have been 
issued, shall be at least 10 days later than the date of the public 
announcement.  If Right Certificates have been issued, upon each adjustment 
of the number of Rights pursuant to this Section 11(i), the Company shall, as 
promptly as practicable, cause to be distributed to holders of record of 
Right Certificates on such record date Right Certificates evidencing, subject 
to Section 14 hereof, the additional Rights to which such holders shall be 
entitled as a result of such adjustment, or, at the option of the Company, 
shall cause to be distributed to such holders of record in substitution and 
replacement for the Right Certificates held by such holders prior to the date 
of adjustment, and upon surrender thereof, if required by the Company, new 
Right Certificates evidencing all the Rights to which such holders shall be 
entitled after such adjustment.  Right Certificates so to be distributed 
shall be issued, executed and countersigned in the manner provided for herein 
and shall be registered in the names of the holders of record of Right 
Certificates on the record date specified in the public announcement.

          (j) Irrespective of any adjustment or change in the Purchase Price 
or the number of one one-hundredths of a Preferred Share issuable upon the 
exercise of the Rights, the Right Certificates theretofore and thereafter 
issued may continue to express the Purchase Price and the number of one 
one-hundredths of a Preferred Share which were expressed in the initial Right 
Certificates issued hereunder.

          (k) Before taking any action that would cause an adjustment 
reducing the Purchase Price below one one-hundredth of the then par value, if 
any, of the Preferred Shares issuable upon exercise of the Rights, the 
Company shall take any corporate action which may, in the opinion of its 
counsel, be necessary in order that the Company may validly and legally issue 
fully paid and nonassessable Preferred Shares at such adjusted Purchase Price.

          (l) In any case in which this Section 11 shall require that an 
adjustment in the Purchase Price be made effective as of a record date for a 
specified event, the Company may elect to defer until the occurrence of such 
event the issuing to the holder of any Right exercised after such record date 
of the Preferred Shares and other capital stock or securities of the Company, 
if any, issuable upon such exercise over and above the Preferred Shares and 
other capital stock or securities of the Company, if any, issuable upon such 
exercise on the basis of the Purchase Price in effect prior to such 
adjustment; PROVIDED, HOWEVER that the Company shall deliver to such holder a 
due bill or other appropriate instrument evidencing such holder's right to 
receive such additional shares upon the occurrence of the event requiring 
such adjustment.

                                                                          12
<PAGE>

          (m) Anything in this Section 11 to the contrary notwithstanding, 
the Company shall be entitled to make such reductions in the Purchase Price, 
in addition to those adjustments expressly required by this Section 11, as 
and to the extent that it in its sole discretion shall determine to be 
advisable in order that any consolidation or subdivision of the Preferred 
Shares, issuance wholly for cash of any Preferred Shares at less than the 
current market price, issuance wholly for cash of Preferred Shares or 
securities which by their terms are convertible into or exchangeable for 
Preferred Shares, dividends on Preferred Shares payable in Preferred Shares 
or issuance of rights, options or warrants referred to hereinabove in Section 
11(b), hereafter made by the Company to holders of its Preferred Shares shall 
not be taxable to such stockholders.

          (n) In the event that at any time after the date of this Agreement 
and prior to the Distribution Date, the Company shall (i) declare or pay any 
dividend on the Common Shares payable in Common Shares or (ii) effect a 
subdivision, combination or consolidation of the Common Shares (by 
reclassification or otherwise than by payment of dividends in Common Shares) 
into a greater or lesser number of Common Shares, then in any such case (A) 
the number of one one-hundredths of a Preferred Share purchasable after such 
event upon proper exercise of each Right shall be determined by multiplying 
the number of one one-hundredths of a Preferred Share so purchasable 
immediately prior to such event by a fraction, the numerator of which is the 
number of Common Shares outstanding immediately before such event and the 
denominator of which is the number of Common Shares outstanding immediately 
after such event, and (B) each Common Share outstanding immediately after 
such event shall have issued with respect to it that number of Rights which 
each Common Share outstanding immediately prior to such event had issued with 
respect to it.  The adjustments provided for in this Section 11(n) shall be 
made successively whenever such a dividend is declared or paid or such a 
subdivision, combination or consolidation is effected.

          Section 12. CERTIFICATE OF ADJUSTED PURCHASE PRICE OR NUMBER OF 
SHARES. Whenever an adjustment is made as provided in Sections 11 and 13 
hereof, the Company shall promptly (a) prepare a certificate setting forth 
such adjustment, and a brief statement of the facts accounting for such 
adjustment, (b) file with the Rights Agent and with each transfer agent for 
the Common Shares or the Preferred Shares (if such transfer agent is an 
entity other than the Rights Agent) a copy of such certificate and (c) mail a 
brief summary thereof to each holder of a Right Certificate in accordance 
with Section 25 hereof.  Notwithstanding the foregoing sentence, the failure 
by the Company to make such certification or give such notice shall not 
affect the validity of or the force or effect of the requirement for such 
adjustment.  The Rights Agent shall be fully protected in relying on any such 
certificate and on any adjustment contained therein and shall not be deemed 
to have knowledge of such adjustment unless and until it shall have received 
such certificate.

          Section 13. CONSOLIDATION, MERGER OR SALE OR TRANSFER OF ASSETS OR 
EARNING POWER. (a) After the Rights become exercisable, except as provided in 
Section 13(b) hereof, in the event, directly or indirectly, (1) the Company 
shall consolidate with, or merge with and into, any other Person, (2) any 
Person shall consolidate with the Company, or merge with and into the Company 
and the Company shall be the continuing or surviving corporation of such 
consolidation or merger and, in connection with such consolidation or merger, 
all or part of the Common Shares shall be changed into or exchanged for stock 
or other securities of any other Person (or the Company) or cash or any other 
property, or (3) the Company shall sell or otherwise transfer (or one or more 
of its Subsidiaries shall sell or otherwise transfer), in one or more 
transactions, directly or indirectly, assets or earning power aggregating 50% 
or more of the assets or earning power of the Company and its Subsidiaries 
(taken as a whole) to any other Person other than the Company or one or more 
of its wholly-owned Subsidiaries, then, and in each such case, proper 
provision shall be made so that (i) each holder of a Right (except as 
otherwise provided herein) shall thereafter have the right to receive, upon 
the exercise thereof at a price equal to the then current Purchase Price 
multiplied by the number of one one-hundredths of a Preferred Share for which 
a Right is then exercisable, in accordance with the terms of this Agreement 
and in lieu of Preferred Shares, such number of Common Shares of such other 
Person (including the Company as successor thereto or as the surviving 
corporation) as shall equal the result obtained by (A) multiplying the then 
current Purchase Price by the number of one one-hundredths of a Preferred 
Share for which a Right is then exercisable and dividing that product by (B) 
50% of the then current per share market price of the Common Shares of such 
other Person (determined pursuant to Section 11(d) hereof) on the date of 
consummation of such consolidation, merger, sale or transfer; (ii) the issuer 
of such Common Shares shall thereafter be liable for, and shall assume, by 
virtue of such consolidation, merger, sale or transfer, all the obligations 
and duties of the Company pursuant to this Agreement; (iii) the term 
"Company" shall thereafter be deemed to refer to such issuer; and (iv) such 
issuer shall take such steps (including, but not limited to, the reservation 
of a sufficient number of its Common Shares in accordance with Section 9 
hereof) in connection with such consummation as may be necessary to assure 
that the provisions hereof shall thereafter be applicable, as nearly as 
reasonably may be, in relation to the Common Shares thereafter deliverable 
upon the exercise of the Rights.  The Company shall not consummate any such 
consolidation, merger, sale or transfer unless prior thereto the Company and 
such issuer shall have executed and delivered to the Rights Agent a 
supplemental agreement so providing.  The 

                                                                          13
<PAGE>

Company shall not enter into any transaction of the kind referred to in this 
Section 13 if at the time of such transaction there are any rights, warrants, 
instruments or securities outstanding or any agreements or arrangements 
which, as a result of the consummation of such transaction, would eliminate 
or substantially diminish the benefits intended to be afforded by the Rights. 
 The provisions of this Section 13 shall similarly apply to successive 
mergers or consolidations or sales or other transfers. 

          The supplemental agreement referred to above in this Section 13(a) 
to be entered into by the Company and the Rights Agent shall also provide 
that, as soon as practicable after the date of any of the events described in 
this Section 13(a), such issuer shall:

               (i) prepare and file a registration statement under the 
Securities Act with respect to the Rights and the securities purchasable upon 
exercise of the Rights on an appropriate form, use its best efforts to cause 
such registration statement to become effective as soon as practicable after 
such filing and use its best efforts to cause such registration statement to 
remain effective (with a prospectus at all times meeting the requirements of 
the Securities Act) until the Final Expiration Date, and similarly comply 
with applicable state securities laws;

              (ii) use its best efforts to list (or continue the listing of) 
the Rights and the securities purchasable upon exercise of the Rights on a 
national securities exchange or to meet the eligibility requirements for 
quotation on Nasdaq; and

             (iii) deliver to holders of the Rights historical financial 
statements for such issuer which comply in all respects with the requirements 
for registration on Form 10 (or any successor form) under the Exchange Act.

          (b) In the event of any merger or other acquisition transaction 
involving the Company pursuant to an agreement described in Section 
1(c)(ii)(A)(2), the provisions of Section 13(a) hereof shall not be 
applicable to such transaction and this Rights Agreement and the rights of 
holders of Rights hereunder shall be terminated in accordance with Section 
7(a) hereof.

          (c) The term "issuer," for purposes of this Section 13, shall refer 
to the Person (or Affiliate or Associate) referred to in Section 13(a); 
PROVIDED, HOWEVER, that (i) if such Person (or Affiliate or Associate) is a 
direct or indirect Subsidiary of another Person, the term "issuer" shall 
refer to such other Person, and (ii) in case such Person is a Subsidiary, 
directly or indirectly, of more than one Person, the term "issuer" shall 
refer to whichever of such Persons is the issuer of such Common Shares having 
the greatest aggregate value.

          (d) If, for any reason, the Rights cannot be exercised for Common 
Shares of such issuer as provided in Section 13(a), then each holder of 
Rights shall have the right to exchange its Rights for cash from such issuer 
in an amount equal to the number of Common Shares that it would otherwise be 
entitled to purchase multiplied by 50% of the current per share market price, 
as determined pursuant to Section 11(d) hereof, of such Common Shares of such 
issuer.  If, for any reason, the foregoing provision cannot be applied to 
determine the cash amount into which the Rights are exchangeable, then the 
Board of Directors of the Company, upon approval by a majority of the 
Continuing Directors, based upon the advice of one or more nationally 
recognized investment banking firms, shall determine such amount reasonably 
and with good faith due to the holders of Rights.  Any such determination 
shall be final and binding on the Rights Agent and the holders of Rights.

          Section 14. FRACTIONAL RIGHTS AND FRACTIONAL SHARES. (a) The 
Company shall not be required to issue fractions of Rights or to distribute 
Right Certificates which evidence fractional Rights.  In lieu of such 
fractional Rights, there shall be paid to the registered holders of the Right 
Certificates with regard to which such fractional Rights would otherwise be 
issuable, an amount in cash equal to the same fraction of the current market 
value of a whole Right.  For the purposes of this Section 14(a), the current 
market value of a whole Right shall be the closing price of the Rights for 
the Trading Day immediately prior to the date on which such fractional Rights 
would have been otherwise issuable.  The closing price for any day shall be 
the last sale price, regular way, or, in case no such sale takes place on 
such day, the average of the closing bid and asked prices, regular way, in 
either case as reported in the principal consolidated transaction reporting 
system with respect to securities listed or admitted to trading on the Nasdaq 
or, if the Rights are not listed or admitted to trading on the Nasdaq, as 
reported in the principal consolidated transaction reporting system with 
respect to securities listed on the principal national securities exchange on 
which the Rights are listed or admitted to trading or, if the Rights are not 
listed or admitted to trading on any national securities exchange, the last 
quoted price or, if not so quoted, the average of the high bid and low asked 
prices in the over-the-counter market, as reported by Nasdaq or such other 
system then in use or, if on any such date the Rights are not quoted by any 
such organization, the average of the closing bid and asked prices as 
furnished by a professional market 

                                                                          14
<PAGE>

maker making a market in the Rights selected by the Board of Directors of the 
Company, upon approval by a majority of the Continuing Directors.  If on any 
such date no such market maker is making a market in the Rights, the fair 
value of the Rights on such date as determined in good faith by the Board of 
Directors of the Company, upon approval by a majority of the Continuing 
Directors, shall be used.  If the Rights are not publicly traded, the current 
market value of a whole Right shall equal the difference between the closing 
price of a Common Share (as determined pursuant to the second sentence of 
Section 11(d)(i) hereof) less the current Purchase Price, multiplied by 100.

          (b) The Company shall not be required to issue fractions of 
Preferred Shares (other than fractions which are integral multiples of one 
one-hundredth of a Preferred Share) upon exercise of the Rights or to 
distribute certificates which evidence fractional Preferred Shares (other 
than fractions which are integral multiples of one one-hundredth of a 
Preferred Share).  Fractions of Preferred Shares in integral multiples of one 
one-hundredth of a Preferred Share may, at the election of the Company, be 
evidenced by depositary receipts, pursuant to an appropriate agreement 
between the Company and a depositary selected by it; PROVIDED, that such 
agreement shall provide that the holders of such depositary receipts shall 
have all the rights, privileges and preferences to which they are entitled as 
beneficial owners of the Preferred Shares represented by such depositary 
receipts.  In lieu of fractional Preferred Shares that are not integral 
multiples of one one-hundredth of a Preferred Share, the Company shall pay to 
the registered holders of Right Certificates at the time such Rights are 
exercised as herein provided an amount in cash equal to the same fraction of 
the current market value of one Preferred Share.  For the purposes of this 
Section 14(b), the current market value of a Preferred Share shall be the 
closing price of a Preferred Share (as determined pursuant to the second 
sentence of Section 11(d)(i) hereof) for the Trading Day immediately prior to 
the date of such exercise.  If the Preferred Shares are not publicly traded, 
the current market value shall be determined in accordance with Section 
11(d)(ii) hereof.

          (c) The holder of a Right by the acceptance of the Right expressly 
waives his right to receive any fractional Rights or any fractional shares 
upon exercise of a Right (except as provided above).

          Section 15. RIGHTS OF ACTION. All rights of action in respect of 
this Agreement, excepting the rights of action given to the Rights Agent 
under Section 18 hereof, are vested in the respective registered holders of 
the Right Certificates (and, prior to the Distribution Date, the registered 
holders of the Common Shares); and any registered holder of any Right 
Certificate (or, prior to the Distribution Date, of the Common Shares), 
without the consent of the Rights Agent or of the holder of any other Right 
Certificate (or, prior to the Distribution Date, of the Common Shares), may, 
in such holder's own behalf and for such holder's own benefit, enforce, and 
may institute and maintain any suit, action or proceeding against the Company 
to enforce, or otherwise act in respect of, such holder's right to exercise 
the Rights evidenced by such Right Certificate in the manner provided in such 
Right Certificate and in this Agreement.  Without limiting the foregoing or 
any remedies available to the holders of Rights, it is specifically 
acknowledged that the holders of Rights would not have an adequate remedy at 
law for any breach of this Agreement and will be entitled to specific 
PERFORMANCE OF THE OBLIGATIONS HEREUNDER, AND INJUNCTIVE RELIEF AGAINST 
ACTUAL OR THREATENED VIOLATIONS OF THE OBLIGATIONS OF ANY PERSON SUBJECT TO 
THIS AGREEMENT.

          Section 16. AGREEMENT OF RIGHT HOLDERS. Every holder of a Right, by 
accepting the same, consents and agrees with the Company and the Rights Agent 
and with every other holder of a Right that:

          (a) prior to the Distribution Date, the Rights will be transferable 
only in connection with the transfer of the Common Shares;

          (b) after the Distribution Date, the Right Certificates are 
transferable only on the registry books of the Rights Agent if surrendered at 
the office of the Rights Agent designated for such purpose, duly endorsed or 
accompanied by a proper instrument of transfer; and

          (c) subject to Sections 6 and 7(f) hereof, the Company and the 
Rights Agent may deem and treat the person in whose name the Right 
Certificate (or, prior to the Distribution Date, the associated Common Shares 
certificate) is registered as the absolute owner thereof and of the Rights 
evidenced thereby (notwithstanding any notations of ownership or writing on 
the Right Certificates or the associated Common Shares certificate made by 
anyone other than the Company or the Rights Agent) for all purposes 
whatsoever, and neither the Company nor the Rights Agent shall be affected by 
any notice to the contrary.  

          (d) notwithstanding anything in this Agreement to the contrary, 
neither the Company nor the Rights Agent shall have any liability to any 
holder of a Right or other Person as a result of its inability to perform any 
of its 

                                                                          15
<PAGE>

obligations under this Agreement by reason of any preliminary or permanent 
injunction or other order, decree or ruling issued by a court of competent 
jurisdiction or by a governmental, regulatory or administrative agency or 
commission, or any statute, rule, regulation or executive order promulgated 
or enacted by any governmental authority, prohibiting or otherwise 
restraining performance of such obligation; PROVIDED, HOWEVER, the Company 
must use its best efforts to have any such order, decree or ruling lifted or 
otherwise overturned as soon as possible.

          Section 17. RIGHT CERTIFICATE HOLDER NOT DEEMED A STOCKHOLDER. No 
holder, as such, of any Right Certificate shall be entitled to vote, receive 
dividends or be deemed for any purpose the holder of the Preferred Shares or 
any other securities of the Company which may at any time be issuable on the 
exercise of the Rights represented thereby, nor shall anything contained 
herein or in any Right Certificate be construed to confer upon the holder of 
any Right Certificate, as such, any of the rights of a stockholder of the 
Company or any right to vote for the election of directors or upon any matter 
submitted to stockholders at any meeting thereof, or to give or withhold 
consent to any corporate action, or to receive notice of meetings or other 
actions affecting stockholders (except as provided in Section 25 hereof), or 
to receive dividends or subscription rights, or otherwise, until the Right or 
Rights evidenced by such Right Certificate shall have been exercised in 
accordance with the provisions hereof. 

          Section 18. CONCERNING THE RIGHTS AGENT. The Company agrees to pay 
to the Rights Agent reasonable compensation for all services rendered by it 
hereunder and, from time to time, on demand of the Rights Agent, its 
reasonable expenses and counsel fees and other disbursements incurred in the 
administration and execution of this Agreement and the exercise and 
performance of its duties hereunder.  The Company also agrees to indemnify 
the Rights Agent for, and to hold it harmless against, any loss, liability, 
or expense, incurred without gross negligence, bad faith or willful 
misconduct on the part of the Rights Agent, for any action taken, suffered or 
omitted by the Rights Agent in connection with the execution, acceptance and 
administration of this Agreement and the exercise and performance hereunder 
of its duties, including the costs and expenses of defending against and 
appealing any claim of liability in the premises.  The indemnity provided 
herein shall survive the termination of this Agreement and the expiration of 
the Rights.

          The Rights Agent shall be protected and shall incur no liability 
for, or in respect of any action taken, suffered or omitted by it in 
connection with, its administration of this Agreement and the exercise and 
performance of its duties hereunder in reliance upon any Right Certificate or 
certificate for the Preferred Shares or Common Shares or for other securities 
of the Company, instrument of assignment or transfer, power of attorney, 
endorsement, affidavit, letter, notice, direction, consent, certificate, 
statement, or other paper or document believed by it to be genuine and to be 
signed, executed and, where necessary, verified or acknowledged, by the 
proper person or persons, or otherwise upon the advice of counsel as set 
forth in Section 20 hereof.

          Section 19. MERGER OR CONSOLIDATION OR CHANGE OF NAME OF RIGHTS 
AGENT.  Any corporation into which the Rights Agent or any successor Rights 
Agent may be merged or with which it may be consolidated, or any corporation 
resulting from any merger or consolidation to which the Rights Agent or any 
successor Rights Agent shall be a party, or any corporation succeeding to the 
stock transfer or corporate trust business of the Rights Agent or any 
successor Rights Agent, shall be the successor to the Rights Agent under this 
Agreement without the execution or filing of any paper or any further act on 
the part of any of the parties hereto, provided that such corporation would 
be eligible for appointment as a successor Rights Agent under the provisions 
of Section 21 hereof.  In case at the time such successor Rights Agent shall 
succeed to the agency created by this Agreement any of the Right Certificates 
shall have been countersigned but not delivered, any such successor Rights 
Agent may adopt the countersignature of the predecessor Rights Agent and 
deliver such Right Certificates so countersigned; and in case at that time 
any of the Right Certificates shall not have been countersigned, any 
successor Rights Agent may countersign such Right Certificates either in the 
name of the predecessor Rights Agent or in the name of the successor Rights 
Agent; and in all such cases such Right Certificates shall have the full 
force provided in the Right Certificates and in this Agreement.

          In case at any time the name of the Rights Agent shall be changed 
and at such time any of the Right Certificates shall have been countersigned 
but not delivered, the Rights Agent may adopt the countersignature under its 
prior name and deliver Right Certificates so countersigned; and in case at 
that time any of the Right Certificates shall not have been countersigned, 
the Rights Agent may countersign such Right Certificates either in its prior 
name or in its changed name; and in all such cases such Right Certificates 
shall have the full force provided in the Right Certificates and in this 
Agreement.

          Section 20. DUTIES OF RIGHTS AGENT. The Rights Agent undertakes the 
duties and obligations imposed by this Agreement upon the following terms and 
conditions, by all of which the Company and the holders of Right 
Certificates, by their acceptance thereof, shall be bound:

                                                                          16
<PAGE>

          (a) The Rights Agent may consult with legal counsel of its choice 
(who may be legal counsel for the Company), and the advice or opinion of such 
counsel shall be full and complete authorization and protection to the Rights 
Agent as to any action taken, suffered or omitted by it in good faith and in 
accordance with such advice or opinion. 

          (b) Whenever in the administration, exercise and performance of its 
duties under this Agreement the Rights Agent shall deem it necessary or 
desirable that any fact or matter be proved or established by the Company 
prior to taking, suffering or omitting any action hereunder, such fact or 
matter (unless other evidence in respect thereof be herein specifically 
prescribed) may be deemed to be conclusively proved and established by a 
certificate signed by any one of the Chairman of the Board, the Chief 
Executive Officer, the President, any Vice President, the Treasurer or the 
Secretary of the Company and delivered to the Rights Agent; and such 
certificate shall be full authorization to the Rights Agent for any action 
taken, suffered or omitted in good faith by it under the provisions of this 
Agreement in reliance upon such certificate.

          (c) The Rights Agent shall be liable hereunder to the Company and 
any other Person only for its own gross negligence, bad faith or willful 
misconduct.

          (d) The Rights Agent shall not be liable for or by reason of any of 
the statements of fact or recitals contained in this Agreement or in the 
Right Certificates (except its countersignature thereof) or be required to 
verify the same, but all such statements and recitals are and shall be deemed 
to have been made by the Company only.

          (e) The Rights Agent shall not be under any liability or 
responsibility in respect of the legality, validity or enforceability of this 
Agreement or the execution and delivery hereof (except the due execution 
hereof by the Rights Agent) or in respect of the legality, validity or 
enforceability or the execution of any Right Certificate (except its 
countersignature thereof); nor shall it be liable or responsible for any 
breach by the Company of any covenant or condition contained in this 
Agreement or in any Right Certificate; nor shall it be responsible for any 
change in the exercisability of the Rights (including the Rights becoming 
void pursuant to Section 11(a)(ii) hereof) or any adjustment in the terms of 
the Rights (including the manner, method or amount thereof) provided for in 
Section 3, 11, 13, 23 or 24, or the ascertaining of the existence of facts 
that would require any such change or adjustment (except with respect to the 
exercise of Rights evidenced by Right Certificates after receipt of the 
certificate described in Section 12 hereof); nor shall it by any act 
hereunder be deemed to make any representation or warranty as to the 
authorization or reservation of any Preferred Shares to be issued pursuant to 
this Agreement or any Right Certificate or as to whether any Preferred Shares 
will, when issued, be validly authorized and issued, fully paid and 
nonassessable.

          (f) The Company agrees that it will perform, execute, acknowledge 
and deliver or cause to be performed, executed, acknowledged and delivered 
all such further and other acts, instruments and assurances as may reasonably 
be required by the Rights Agent for the carrying out or performing by the 
Rights Agent of the provisions of this Agreement.

          (g) The Rights Agent is hereby authorized and directed to accept 
instructions with respect to the administration, exercise and performance of 
its duties hereunder from any one of the Chairman of the Board, the Chief 
Executive Officer, the President, any Vice President, the Secretary or the 
Treasurer of the Company, and to apply to such officers for advice or 
instructions in connection with its duties, and it shall not be responsible 
or liable for any action taken, suffered or omitted by it in good faith in 
accordance with instructions of any such officer or for any delay in acting 
while waiting for those instructions.  Any application by the Rights Agent 
for written instructions from the Company may, at the option of the Rights 
Agent, set forth in writing any action proposed to be taken or omitted by the 
Rights Agent under this Rights Agreement and the date on and/or after which 
such action shall be taken or such omission shall be effective.  The Rights 
Agent shall not be liable for any action taken by, or omission of, the Rights 
Agent in accordance with a proposal included in any such application on or 
after the date specified in such application (which date shall not be less 
than five (5) Business Days after the date any officer of the Company 
actually received such application, unless any such officer shall have 
consented in writing to an earlier date) unless, prior to taking any such 
action (or the effective date in the case of an omission), the Rights Agent 
shall have received written instructions in response to such application 
specifying the action to be taken or omitted.

          (h) The Rights Agent and any stockholder, director, officer or 
employee of the Rights Agent may buy, sell or deal in any of the Rights or 
other securities of the Company or become pecuniarily interested in any 
transaction in which the Company may be interested, or contract with or lend 
money to the Company or otherwise act as fully and freely as 

                                                                          17
<PAGE>

though it were not Rights Agent under this Agreement.  Nothing herein shall 
preclude the Rights Agent from acting in any other capacity for the Company 
or for any other legal entity.

          (i) The Rights Agent may execute and exercise any of the rights or 
powers hereby vested in it or perform any duty hereunder either itself or by 
or through its attorneys or agents, and the Rights Agent shall not be 
answerable or accountable for any act, default, neglect or misconduct of any 
such attorneys or agents or for any loss to the Company resulting from any 
such act, default, neglect or misconduct, provided reasonable care was 
exercised in the selection and continued employment thereof.

          (j) No provision of this Agreement shall require the Rights Agent 
to expend or risk its own funds or otherwise incur any financial liability in 
the performance of any of its duties hereunder or in the exercise of its 
rights if the Rights Agent in good faith believes that repayment of such 
funds or adequate indemnification against such risk or liability is not 
reasonably assured to it.

          (k) If, with respect to any Right Certificate surrendered to the 
Rights Agent for exercise, transfer, split up, combination or exchange, the 
certification on the form of assignment or form of election to purchase, as 
the case may be, that the Rights evidenced by the Right Certificate are not 
owned by an Acquiring Person, or an Affiliate or Associate thereof, has 
either not been completed or in any manner indicates any other response 
thereto, the Rights Agent shall not take any further action with respect to 
such requested exercise, transfer, split up, combination or exchange, without 
first consulting with the Company.

          Section 21. CHANGE OF RIGHTS AGENT. The Rights Agent or any 
successor Rights Agent may resign and be discharged from its duties under 
this Agreement upon thirty (30) days' notice in writing mailed to the Company 
and to each other transfer agent of the Common Shares or Preferred Shares (if 
any) (as to which the Rights Agent has received prior written notice) by 
registered or certified mail, and the Company shall mail notice thereof to 
the holders of the Right Certificates by first-class mail.  The Company may 
remove the Rights Agent or any successor Rights Agent upon thirty (30) days' 
notice in writing, mailed to the Rights Agent or successor Rights Agent, as 
the case may be, and to each other transfer agent of the Common Shares or 
Preferred Shares (if any) (as to which the Rights Agent has received prior 
written notice) by registered or certified mail, and to the holders of the 
Right Certificates by first-class mail.  If the Rights Agent shall resign or 
be removed or shall otherwise become incapable of acting, the Company shall 
appoint a successor to the Rights Agent. If the Company shall fail to make 
such appointment within a period of thirty (30) days after giving notice of 
such removal or after it has been notified in writing of such resignation or 
incapacity by the resigning or incapacitated Rights Agent or by the holder of 
a Right Certificate (who shall, with such notice, submit such holder's Right 
Certificate for inspection by the Company), then the registered holder of any 
Right Certificate may apply to any court of competent jurisdiction for the 
appointment of a new Rights Agent.  Any successor Rights Agent, whether 
appointed by the Company or by such a court, shall be a corporation organized 
and doing business under the laws of the United States or of any state of the 
United States, in good standing, authorized under such laws to exercise 
corporate trust or stock transfer powers, and subject to supervision or 
examination by federal or state authority and which has at the time of its 
appointment as Rights Agent a combined capital and surplus of at least $50 
million.  After appointment, the successor Rights Agent shall be vested with 
the same powers, rights, duties and responsibilities as if it had been 
originally named as Rights Agent without further act or deed; but the 
predecessor Rights Agent shall deliver and transfer to the successor Rights 
Agent any property at the time held by it hereunder, and execute and deliver 
any further assurance, conveyance, act or deed necessary for the purpose.  
Not later than the effective date of any such appointment the Company shall 
file notice thereof in writing with the predecessor Rights Agent and each 
other transfer agent of the Common Shares or Preferred Shares (if any), and 
mail a notice thereof in writing to the registered holders of the Right 
Certificates.  Failure to give any notice provided for in this Section 21, 
however, or any defect therein, shall not affect the legality or validity of 
the resignation or removal of the Rights Agent or the appointment of the 
successor Rights Agent, as the case may be.

          Section 22. ISSUANCE OF NEW RIGHT CERTIFICATES. Notwithstanding any 
of the provisions of this Agreement or of the Rights to the contrary, the 
Company may, at its option, issue new Right Certificates evidencing Rights in 
such form as may be approved by its Board of Directors, upon approval by a 
majority of the Continuing Directors, to reflect any adjustment or change in 
the Purchase Price and the number or kind or class of shares or other 
securities or property purchasable under the Right Certificates made in 
accordance with the provisions of this Agreement.  In addition, in connection 
with the issuance or sale of Common Shares following the Distribution Date 
and prior to the redemption or expiration of the Rights, the Company (a) 
shall, with respect to Common Shares so issued or sold pursuant to the 
exercise of stock options or under any employee benefit plan or arrangement 
or upon the exercise, conversion or exchange of securities of the Company 
currently outstanding or issued at any time in the future by the Company and 
(b) may, in any other case, if deemed necessary 

                                                                          18
<PAGE>

or appropriate by the Board of Directors of the Company, upon approval by a 
majority of the Continuing Directors, issue Right Certificates representing 
the appropriate number of Rights in connection with such issuance or sale; 
PROVIDED, HOWEVER, that (i) no such Right Certificate shall be issued and 
this sentence shall be null and void AB INITIO if, and to the extent that, 
such issuance or this sentence would create a significant risk of or result 
in material adverse tax consequences to the Company or the Person to whom 
such Right Certificate would be issued or would create a significant risk of 
or result in such options' or employee plans' or arrangements' failing to 
qualify for otherwise available special tax treatment and (ii) no such Right 
Certificate shall be issued if, and to the extent that, appropriate 
adjustment shall otherwise have been made in lieu of the issuance thereof.

          Section 23. REDEMPTION. (a) The Company may, at its option, upon 
approval by a majority of the Continuing Directors, at any time prior to the 
earlier of (i) the tenth business day following the Shares Acquisition Date, 
or (ii) such date or dates on or after the tenth business day following the 
Shares Acquisition Date to which such option may be extended by a majority of 
the Continuing Directors (for one or more successive 10 day periods) by 
vote(s) first taken or written consent(s) first given prior to the tenth 
business day following the Shares Acquisition Date and, thereafter, prior to 
the completion of any such 10 day extension or extensions (or, if the Shares 
Acquisition Date shall have occurred prior to the Record Date, prior to (A) 
the tenth business day following the Record Date or (B) such date or dates on 
or after the tenth business day after the Record Date to which such option 
may be extended by a majority of the Continuing Directors (for one or more 
successive 10 day periods) by vote(s) first taken or written consent(s) first 
given prior to the tenth business day following the Record Date and, 
thereafter, prior to the completion of any such 10 day extension or 
extensions), redeem all but not less than all the then outstanding Rights at 
a redemption price of $.01 per Right, appropriately adjusted to reflect any 
stock split, stock dividend or similar transaction occurring after the date 
hereof (such redemption price being hereinafter referred to as the 
"Redemption Price"), and the Company may, at its option, pay the Redemption 
Price either in cash, Common Shares (based on the current per share market 
price thereof (as determined pursuant to Section 11(d) hereof) at the time of 
redemption), or any other form of consideration deemed appropriate by the 
Board of Directors.  The redemption of the Rights by the Board of Directors 
may be made effective at such time on such basis and with such conditions as 
the Board of Directors in its sole discretion may establish, upon approval by 
a majority of the Continuing Directors.

          (b) Immediately upon the action of the Board of Directors of the 
Company ordering the redemption of the Rights pursuant to paragraph (a) of 
this Section 23, and without any further action and without any notice, the 
right to exercise the Rights will terminate and the only right thereafter of 
the holders of Rights shall be to receive the Redemption Price. The Company 
shall promptly give public notice of any such redemption; PROVIDED, HOWEVER, 
that the failure to give, or any defect in, any such notice shall not affect 
the validity of such redemption.  Within 10 days after such action of the 
Board of Directors ordering the redemption of the Rights, the Company shall 
give notice of such redemption to the Rights Agent and shall mail a notice of 
redemption to all the holders of the then outstanding Rights at their last 
addresses as they appear upon the registry books of the Rights Agent or, 
prior to the Distribution Date, on the registry books of the transfer agent 
for the Common Shares.  Any notice which is mailed in the manner herein 
provided shall be deemed given, whether or not the holder receives the 
notice.  Each such notice of redemption will state the method by which the 
payment of the Redemption Price will be made.  Neither the Company nor any of 
its Affiliates or Associates may redeem, acquire or purchase for value any 
Rights at any time in any manner other than that specifically set forth in 
this Section 23 or in Section 24 hereof, and other than in connection with 
the purchase of Common Shares prior to the Distribution Date.

          (c) Notwithstanding anything contained in this Agreement to the 
contrary, the Rights shall not be exercisable pursuant to Section 7(a) at any 
time when the Rights are redeemable hereunder.

          Section 24. EXCHANGE. (a) The Company, at its option, upon approval 
by a majority of the Continuing Directors, at any time after any Person 
becomes an Acquiring Person, may exchange all or part of the then outstanding 
and exercisable Rights (which shall not include Rights that have become void 
pursuant to the provisions of Section 11(a)(ii) hereof) for Common Shares at 
an exchange ratio of one Common Share per Right, appropriately adjusted to 
reflect any stock split, stock dividend or similar transaction occurring 
after the date hereof (such exchange ratio being hereinafter referred to as 
the "Exchange Ratio").  Notwithstanding the foregoing, the Board of Directors 
shall not be empowered to effect such exchange at any time after any Person 
(other than the Company, any Subsidiary of the Company, any employee benefit 
plan of the Company or any such Subsidiary, or any entity holding Common 
Shares for or pursuant to the terms of any such plan), together with all 
Affiliates and Associates of such Person, becomes the Beneficial Owner of 50% 
or more of the Common Shares then outstanding.

          (b) Immediately upon the action of the Board of Directors of the 
Company ordering the exchange of any Rights pursuant to subsection (a) of 
this Section 24 and without any further action and without any notice, the 
right to exercise 

                                                                          19
<PAGE>

such Rights shall terminate and the only right thereafter of a holder of such 
Rights shall be to receive that number of Common Shares equal to the number 
of such Rights held by such holder multiplied by the Exchange Ratio.  The 
Company shall promptly give public notice of any such exchange; PROVIDED, 
HOWEVER that the failure to give, or any defect in, such notice shall not 
affect the validity of such exchange.  The Company promptly shall mail a 
notice of any such exchange to all of the holders of such Rights at their 
last addresses as they appear upon the registry books of the Rights Agent. 
Any notice which is mailed in the manner herein provided shall be deemed 
given, whether or not the holder receives the notice.  Each such notice of 
exchange will state the method by which the exchange of the Common Shares for 
Rights will be effected and, in the event of any partial exchange, the number 
of Rights which will be exchanged.  Any partial exchange shall be effected 
pro rata based on the number of Rights (other than Rights which have become 
void pursuant to the provisions of Section 11(a)(ii) hereof) held by each 
holder of Rights.

          (c) In any exchange pursuant to this Section 24, the Company, at 
its option, may substitute Preferred Shares (or equivalent preferred shares, 
as such term is defined in Section 11(b) hereof) for Common Shares 
exchangeable for Rights, at the initial rate of one one-hundredth of a 
Preferred Share (or equivalent preferred share) for each Common Share, as 
appropriately adjusted to reflect adjustments in the voting rights of the 
Preferred Shares pursuant to the terms thereof, so that the fraction of a 
Preferred Share delivered in lieu of each Common Share shall have the same 
voting rights as one Common Share.

          (d) In the event that there shall not be sufficient Common Shares 
or Preferred Shares issued but not outstanding or authorized but unissued to 
permit any exchange of Rights as contemplated in accordance with Section 
24(a), the Company shall either take such action as may be necessary to 
authorize additional Common Shares or Preferred Shares for issuance upon 
exchange of the Rights or alternatively, at the option of the Board of 
Directors, upon approval by a majority of the Continuing Directors, with 
respect to each Right (i) pay cash in an amount equal to the Purchase Price, 
in lieu of issuing Common Shares or Preferred Shares in exchange therefor, or 
(ii) issue debt or equity securities, or a combination thereof, having a 
value equal to the Current Value (as hereinafter defined) of the Common 
Shares or Preferred Shares exchangeable for each such Right, where the value 
of such securities shall be determined by a nationally recognized investment 
banking firm selected by the Board of Directors, upon approval by a majority 
of the Continuing Directors, or (iii) deliver any combination of cash, 
property, Common Shares, Preferred Shares and/or other securities having a 
value equal to the Current Value in exchange for each Right.  The term 
"Current Value," for the purposes of this Section 24, shall mean the product 
of the current per share market price of Common Shares (determined pursuant 
to Section 11(d) on the date of the occurrence of the event described above 
in subparagraph (a)) multiplied by the number of Common Shares for which the 
Right otherwise would be exchangeable if there were sufficient shares 
available.  To the extent that the Company determines that some action need 
be taken pursuant to clauses (i), (ii) or (iii) of this Section 24(d), the 
Board of Directors, upon approval by a majority of the Continuing Directors, 
may temporarily suspend the exercisability of the Rights for a period of up 
to sixty (60) days following the date on which the event described in Section 
24(a) shall have occurred, in order to seek any authorization of additional 
Common Shares or Preferred Shares and/or to decide the appropriate form of 
distribution to be made pursuant to the above provision and to determine the 
value thereof.  In the event of any such suspension, the Company shall issue 
a public announcement stating that the exercisability of the Rights has been 
temporarily suspended.

          (e) The Company shall not be required to issue fractions of Common 
Shares or to distribute certificates which evidence fractional Common Shares. 
 In lieu of such fractional Common Shares, the Company shall pay to the 
registered holders of the Right Certificates with regard to which such 
fractional Common Shares would otherwise be issuable an amount in cash equal 
to the same fraction of the current market value of a whole Common Share.  
For the purposes of this paragraph (e), the current market value of a whole 
Common Share shall be the closing price of a Common Share (as determined 
pursuant to the second sentence of Section 11(d)(i) hereof) for the Trading 
Day immediately prior to the date of exchange pursuant to this Section 24.

          Section 25. NOTICE OF CERTAIN EVENTS. (a) In case the Company shall 
propose (i) to pay any dividend payable in stock of any class to the holders 
of its Preferred Shares or to make any other distribution to the holders of 
its Preferred Shares (other than a regular quarterly cash dividend), (ii) to 
offer to the holders of its Preferred Shares rights or warrants to subscribe 
for or to purchase any additional Preferred Shares or shares of stock of any 
class or any other securities, rights or options, (iii) to effect any 
reclassification of its Preferred Shares (other than a reclassification 
involving only the subdivision of outstanding Preferred Shares), (iv) to 
effect any consolidation or merger into or with, or to effect any sale or 
other transfer (or to permit one or more of its Subsidiaries to effect any 
sale or other transfer), in one or more transactions, of 50% or more of the 
assets or earning power of the Company and its Subsidiaries (taken as a 
whole) to, any other Person, (v) to effect the liquidation, dissolution or 
winding up of the Company, or (vi) to declare or pay any dividend on the 
Common Shares payable in Common Shares or to effect a subdivision, 
combination or consolidation of the Common Shares (by 

                                                                          20
<PAGE>

reclassification or otherwise than by payment of dividends in Common Shares), 
then, in each such case, the Company shall give to each holder of a Right 
Certificate, in accordance with Section 26 hereof, a notice of such proposed 
action, which shall specify the record date for the purposes of such stock 
dividend, or distribution of rights or warrants, or the date on which such 
reclassification, consolidation, merger, sale, transfer, liquidation, 
dissolution, or winding up is to take place and the date of participation 
therein by the holders of the Common Shares and/or Preferred Shares, if any 
such date is to be fixed, and such notice shall be so given in the case of 
any action covered by clause (i) or (ii) above at least ten (10) days prior 
to the record date for determining holders of the Preferred Shares for 
purposes of such action, and in the case of any such other action, at least 
ten (10) days prior to the date of the taking of such proposed action or the 
date of participation therein by the holders of the Common Shares and/or 
Preferred Shares, whichever shall be the earlier.

          (b) In case any of the events set forth in Section 11(a)(ii) hereof 
shall occur, then the Company shall as soon as practicable thereafter give to 
each holder of a Right Certificate, in accordance with Section 26 hereof, a 
notice of the occurrence of such event, which notice shall describe such 
event and the consequences of such event to holders of Rights under Section 
11(a)(ii) hereof.  In the event any Person becomes an Acquiring Person, the 
Company will promptly notify the Rights Agent thereof.  

          Section 26. NOTICES. Notices or demands authorized by this 
Agreement to be given or made by the Rights Agent or by the holder of any 
Right Certificate to or on the Company shall be sufficiently given or made if 
sent by first-class mail, postage prepaid, addressed (until another address 
is filed in writing with the Rights Agent) as follows:

          Ultratech Stepper, Inc.
          3050 Zanker Road
          San Jose, CA  95134

          Attention:     Arthur W. Zafiropoulo
                         Chairman and Chief Executive Officer

Subject to the provisions of Section 21 hereof, any notice or demand 
authorized by this Agreement to be given or made by the Company or by the 
holder of any Right Certificate to or on the Rights Agent shall be 
sufficiently given or made if sent by first-class mail, postage prepaid, 
addressed (until another address is filed in writing with the Company) as 
follows:

          The First National Bank of Boston
          c/o Boston EquiServe Limited Partnership
          150 Royall Street, Mail Stop 45-02-62
          Canton, MA  02021

          Attention:  Shareholder Services Division

Notices or demands authorized by this Agreement to be given or made by the 
Company or the Rights Agent to the holder of any Right Certificate shall be 
sufficiently given or made if sent by first-class mail, postage prepaid, 
addressed to such holder at the address of such holder as shown on the 
registry books of the Company.

          Section 27. SUPPLEMENTS AND AMENDMENTS. Prior to the Distribution 
Date, the Company may supplement or amend this Agreement in any respect, 
without the approval of any holders of Rights, by action of its Board of 
Directors upon approval by a majority of the Continuing Directors, and the 
Rights Agent shall, if the Company so directs, execute such supplement or 
amendment. From and after the Distribution Date, the Company may from time to 
time supplement or amend this Agreement without the approval of any holders 
of Rights, by action of its Board of Directors, upon approval by a majority 
of the Continuing Directors, in order to cure any ambiguity, to correct or 
supplement any provision contained herein which may be defective or 
inconsistent with any other provisions herein, or to make any other 
provisions with respect to the Rights which the Company may deem necessary or 
desirable and which shall be consistent with, and for the purpose of 
fulfilling, the objectives of the Board of Directors in adopting this 
Agreement, including, without limitation, to change the Purchase Price, the 
Redemption Price, any time periods herein specified, and any other term 
hereof, any such supplement or amendment to be evidenced by a writing signed 
by the Company and the Rights Agent; PROVIDED, HOWEVER, that from and after 
such time as any Person becomes an Acquiring Person, this Agreement shall not 
be amended in any manner which would adversely affect the interests of the 
holders of Rights.  Upon receipt of a certificate from an appropriate officer 
of the Company that the proposed supplement or amendment is consistent with 
this Section 27 and, after such time as any Person has become an Acquiring 
Person, that the proposed supplement or amendment does not adversely affect 
the interests of the 

                                                                          21
<PAGE>

holders of Rights, the Rights Agent shall execute such supplement or 
amendment.  Without limiting the foregoing, the Company may at any time prior 
to such time as any Person becomes an Acquiring Person, by action of its 
Board of Directors, upon approval by a majority of the Continuing Directors, 
amend this Agreement to lower the thresholds set forth in Sections 1(a) and 
3(a) to not less than the greater of (i) any percentage greater than the 
largest percentage of the outstanding Common Shares then known by the Company 
to be beneficially owned by any Person (other than the Company, any 
Subsidiary of the Company, any employee benefit plan of the Company or any 
Subsidiary of the Company, or any entity holding Common Shares for or 
pursuant to the terms of any such plan) and (ii) 10%.

          Section 28. SUCCESSORS. All the covenants and provisions of this 
Agreement by or for the benefit of the Company or the Rights Agent shall bind 
and inure to the benefit of their respective successors and assigns hereunder.

          Section 29.  DETERMINATIONS AND ACTIONS BY THE BOARD OF DIRECTORS. 
For all purposes of this Agreement, any calculation of the number of Common 
Shares outstanding at any particular time, including for purposes of 
determining the particular percentage of such outstanding Common Shares of 
which any Person is the Beneficial Owner, shall be made in accordance with 
the last sentence of Rule 13d-3(d)(1)(i) of the General Rules and Regulations 
under the Exchange Act.  The Board of Directors of the Company (and, where 
specifically provided for herein, only upon approval by a majority of the 
Continuing Directors) shall have the exclusive power and authority to 
administer this Agreement and to exercise all rights and powers specifically 
granted to the Board, or the Company, or as may be necessary or advisable in 
the administration of this Agreement, including, without limitation, the 
right and power to (i) interpret the provisions of this Agreement and (ii) 
make all determinations deemed necessary or advisable for the administration 
of this Agreement (including a determination to redeem or not redeem the 
Rights or to amend the Agreement).  All such actions, calculations, 
interpretations and determinations (including, for purposes of clause (y) 
below, all omissions with respect to the foregoing), which are done or made 
by the Board (or, where specifically provided for herein, upon approval by a 
majority of the Continuing Directors) in good faith, shall (x) be final, 
conclusive and binding on the Company, the Rights Agent, the holders of the 
Right Certificates and all other parties and (y) not subject the Board or the 
Continuing Directors to any liability to the holders of the Rights.

          Section 30. BENEFITS OF THIS AGREEMENT. Nothing in this Agreement 
shall be construed to give to any person or corporation other than the 
Company, the Rights Agent and the registered holders of the Right 
Certificates (and, prior to the Distribution Date, the Common Shares) any 
legal or equitable right, remedy or claim under this Agreement; but this 
Agreement shall be for the sole and exclusive benefit of the Company, the 
Rights Agent and the registered holders of the Right Certificates (and, prior 
to the Distribution Date, the Common Shares).

          Section 31. SEVERABILITY. If any term, provision, covenant or 
restriction of this Agreement is held by a court of competent jurisdiction or 
other authority to be invalid, void or unenforceable, the remainder of the 
terms, provisions, covenants and restrictions of this Agreement shall remain 
in full force and effect and shall in no way be affected, impaired or 
invalidated; PROVIDED, HOWEVER, that notwithstanding anything in this 
Agreement to the contrary, if any such term, provision, covenant or 
restriction is held by such court or authority to be invalid, void or 
unenforceable and the Board of Directors of the Company, upon approval by a 
majority of the Continuing Directors, determines in its good faith judgment 
that severing the invalid language from this Agreement would adversely affect 
the purpose or effect of this Agreement, the right of redemption set forth in 
Section 23 hereof shall be reinstated and shall not expire until the tenth 
business day following the date of such determination by the Board of 
Directors of the Company.

          Section 32. GOVERNING LAW. This Agreement and each Right 
Certificate issued hereunder shall be deemed to be a contract made under the 
laws of the State of Delaware and for all purposes shall be governed by and 
construed in accordance with the laws of such State applicable to contracts 
to be made and performed entirely within such State.

          Section 33. COUNTERPARTS. This Agreement may be executed in any 
number of counterparts and each of such counterparts shall for all purposes 
be deemed to be an original, and all such counterparts shall together 
constitute but one and the same instrument.

                                                                          22
<PAGE>

          Section 34. DESCRIPTIVE HEADINGS. Descriptive headings of the 
several Sections of this Agreement are inserted or convenience only and shall 
not control or affect the meaning or construction of any of the provisions 
hereof.

          IN WITNESS WHEREOF, the parties hereto have caused this Agreement 
to be duly executed and attested, all as of the day and year first above 
written.

ATTEST:                                 ULTRATECH STEPPER, INC.



By  /s/ William G. Leunis, III          By  /s/ Arthur W. Zafiropoulo
  --------------------------------        --------------------------------
  Name: William G. Leunis, III            Name: Arthur W. Zafiropoulo
  Title: Chief Financial Officer          Title: Chairman and Chief
         and Secretary                           Executive Officer



ATTEST:                                 THE FIRST NATIONAL BANK OF 
                                        BOSTON, as Rights Agent



By  /s/ Angela R. Dray                  By  /s/ Katherine S. Anderson
  --------------------------------        --------------------------------
  Name: Angela R. Dray                    Name: Katherine S. Anderson
  Title: Account Manager                  Title: Administration Manager

                                                                          23


<PAGE>
                                                                EXHIBIT 10.8.1

                             SECOND AMENDMENT TO LEASE
                             AND AGREEMENT AND RELEASE

     This Second Amendment To Lease and Agreement and Release (the 
"Amendment") is dated as of May 25, 1995, for reference purposes only, and is 
made between Susan L. Uecker, in her capacity as receiver of the estate of 
Orchard Investment Company Number 701, a California general partnership as 
per appointment by the Santa Clara County Superior Court in case no. CV746085 
on December 23, 1994 ("Receiver"), Orchard Investment Company Number 701, a 
California general partnership ("Original Landlord"), Orchard Properties, a 
California corporation ("Orchard"), and Ultratech Stepper, Inc., a Delaware 
corporation ("Tenant") with reference to the following facts and 
circumstances, which are conclusively agreed between the parties:

       A.   Original Landlord and Tenant are parties to a lease dated for
   reference purposes as of May 17, 1994, together with a First Amendment
   to Lease dated as of October 18, 1994 (collectively referred to as the
   "Lease").  All capitalized words having an assigned meaning in the Lease
   shall continue to have such meaning in this Amendment unless explicitly
   modified.

       B.   Pursuant to the Lease, Tenant has leased from Receiver 53,393
   rentable square feet of space (the "Premises"), comprised of 14,532 rentable
   square feet at 2855 Zanker Road, San Jose, California (the "Original
   Premises") and 38,861 rentable square feet of space at 2815-2835 Zanker Road,
   San Jose, California (the "Expansion Space").

       C.   Tenant is currently occupying a portion of the Expansion Space (the
   "Occupied Premises") at 2825 Zanker Road and has undertaken tenant 
   improvements to that portion of the Expansion Space located at 2815 Zanker
   Road (the "Construction Premises").

       D.   In the course of constructing tenant improvements to the
    Construction Premises, Tenant discovered asbestos containing materials 
    ("ACM") in the mastic that had been used on the underside of certain non-
    asbestos containing floor tiles.

Second Amendment to Lease              Page 2 of 11
- -------------------------              ------------

        E.   Tenant has had an asbestos investigation of the Premises conducted
    by ProTech Consulting and Engineering, a written report of which is dated
    March 17, 1995 (the "Report"), The Report identifies an area of the 
    Construction Premises where ACM mastic was used under non-asbestos 
    containing tile (the "Construction Premises ACM Area").  The Report further
    identifies an area of the Occupied Premises where ACM mastic was used under
    non-asbestos containing tile (the "Occupied Premises ACM Area").  The ACM in
    both said Areas is referred to collectively as the "Identified ACM."

       F.   Tenant's improvement plans for the Construction Premises require the
    current removal of the ACM in the Construction Premises ACM Area.

       G.   Upon discovery of the ACM, Tenant requested that Original Landlord
    assume the responsibility for removing ACM from the entire Expansion Space,
    wherever located, including, without limitation, ACM in any mastic on the 
    underside of any floor tiles located in the Expansion Space, and further
    requested rent abatement and reimbursement of certain out-of-pocket expenses
    incurred by Tenant in storage of equipment, relocation of business 
    operations, delay in construction, and otherwise resulting from Tenant's 
    decision not to move forward with construction of its tenant improvements
    in the Construction Space.

       H.   Original Landlord disputed Tenant's claims.

       I.   Original Landlord and Tenant have agreed to resolve their 
    dispute as provided herein.

                                                                          1
<PAGE>

            J.   Receiver is prepared to contribute certain funds from the 
    receivership estate towards resolution of Tenant's claims and is otherwise
    prepared to consent to and approve the terms of this Amendment.

Second Amendment to Lease              Page 3 of 11
- -------------------------              ------------

     Now, therefore, in consideration of all of the foregoing facts and 
circumstances, and for good and valuable consideration, the receipt of which 
is acknowledged by each party, Original Landlord, Receiver and Tenant agree 
to and do amend the Lease as follows and Orchard and Original Landlord agree 
to perform as follows:

1.   REMOVAL OF ACM FROM THE CONSTRUCTION PREMISES

     Upon full execution of this Amendment, Receiver will immediately direct 
its property manager, Orchard to cause its licensed contractors under the 
supervision and control of Orchard to remove the ACM from the Construction 
Premises ACM Area (pursuant to the provisions of Paragraph 4 hereof).  
Orchard shall cause this work to be performed in a good and workmanlike 
manner, in compliance with all applicable law, and within seven (7) business 
days of the date this Agreement is fully executed.  Tenant shall not be 
required to bear any of the cost thereof, and such cost shall not be billed 
to Tenant as a part of the Common Operating Expenses of the Building.  Upon 
submission of Orchard's billing for such work, Receiver will reimburse 
Orchard, solely from the proceeds of the Receivership Estate for such work to 
a maximum of $7,500.00, and any expenses in excess of such sum shall be the 
responsibility of Original Landlord and Orchard.

2.   LIABILITY FOR OBLIGATIONS

     Except as expressly provided in this Amendment to the contrary, the 
obligations of Original Landlord and Orchard under this Amendment are the 
personal obligations of the Original Landlord and Orchard, and not of the 
receiver or any successor in interest to the interest of landlord under the 
Lease, other than Original Landlord.  Tenant agrees to look solely to the 
personal assets of Original Landlord and Orchard, and not to the assets of 
Receiver, the receivership estate of Receiver or any successor landlord under 
the Lease, other than Original Landlord, for satisfaction of the obligations 
of Original Landlord and Orchard under this Amendment.  As used in this 
Amendment, the term "Landlord" shall mean the Original Landlord and any 
successor in interest to the interest of landlord under the Lease including, 
without limitation, Receiver and any successor in interest to Receiver 
following termination of the receivership

Second Amendment to Lease              Page 4 of 11
- -------------------------              ------------

estate.  Original Landlord and Orchard agree to indemnify, defend and hold 
harmless (a) the Receiver and any successor landlord under the Lease with 
regard to any claims made by Tenant arising from or relating to this 
Amendment, including reasonable attorneys' fees and costs, provided that such 
claims arise from obligations assumed by Original Landlord and Orchard 
hereunder, and (b) Tenant against any third party claims (including claims 
made by any government agency) arising from or relating to breach of the 
obligations of Orchard and/or Original Landlord arising under this Amendment.

3.   REMOVAL OF ACM FROM THE OCCUPIED PREMISES

     Tenant agrees that any tenant improvements to be constructed in the 
Occupied Premises by Tenant which will require removal or disturbance of ACM 
will require Landlord's permission given under the provisions of the Lease.  
Landlord will approve or disapprove such proposed construction based on its 
ordinary standards and will not make the removal of ACM a criteria for such 
decisions.

     If Tenant's designs for tenant improvements in the Occupied Premises 
require the removal or disturbance of ACM in the Occupied Premises, Tenant 
will notify Landlord in writing at the time Tenant submits its plans and 
specifications to Landlord for approval.

                                                                          2
<PAGE>

     If plans and specifications are submitted calling for the disturbance or 
removal of the ACM in the Occupied Premises, Original Landlord agrees to 
undertake (in a good and workmanlike manner, and in compliance with all laws) 
and pay for the removal of the Identified ACM from the Occupied Premises 
(pursuant to the provisions of Paragraph 4 hereof), moving with reasonable 
diligence to retain contractors hired by Original Landlord to perform such 
services and to obtain permits for the construction if necessary.  The cost 
of such activities shall be allocated as follows:

       a.   As to plans for construction of tenant improvements in the Occupied
   Space submitted on or before December 31, 1995, Original Landlord will pay 
   the cost of removal of the Identified ACM from the Occupied Premises ACM
   Area, without charge to

Second Amendment to Lease              Page 5 of 11
- -------------------------              ------------

   Tenant. If plans and specifications are submitted for such construction on or
   after January 1, 1996 and on or before December 31, 1996, then Original
   Landlord will pay the cost of such removal, but if Original Landlord's cost
   (including the amount paid to consultants, contractors, and subcontractors,
   inspection fees, permit fees, and other amounts paid to governmental 
   entities or otherwise reasonably expended in accomplishing the task, but not
   including Original Landlord's internal costs of construction management)
   exceeds $7,500.00, Original Landlord will notify Tenant of the amount of the
   excess, and Tenant will pay to Original Landlord an amount equal to the
   excess, which shall be due from Tenant to Original Landlord within 
   thirty (30) days thereafter (and will be subject to the late fee provided for
   in the Lease for Additional Rent, without further notice, if the sum is not
   paid within such period).  Under these circumstances, the costs of the
   removal paid by Original Landlord shall not be billed to Tenant as part of
   the Building's Common Operating Expenses.  Original Landlord represents that
   it has received an acceptable bid for the performance of this work at a cost
   (as defined above) equal to or less than $7,500.00, which bid is good until
   December 31, 1995.

       b.   If the plans and specifications are submitted on or after January 1,
   1997, then Original Landlord will perform the removal (in a good and 
   workmanlike manner, and in compliance with all laws) and directly pay the
   cost thereof. Upon completion of the removal, Original Landlord will notify
   Tenant of the cost (which shall include the amount paid to consultants, 
   contractors, and subcontractors, inspection fees, permit fees, and other
   amounts paid to governmental entities or otherwise reasonably expended in
   accomplishing the task, and Original Landlord's customary and reasonable fee
   of 4% of all construction costs). Tenant will pay to Original Landlord an
   amount equal to the amount of Original Landlord's cost as above defined,
   which shall be due from Tenant to Original Landlord within thirty (30) days
   thereafter (and will be subject to the late fee provided for in the Lease
   for Additional Rent, without further notice, if the sum is not paid within
   such period).

Second Amendment to Lease              Page 6 of 11
- -------------------------              ------------

     Without regard to when ACM is removed from the Occupied Premises, Tenant 
shall have no claims against any Landlord, the Receiver, future owners, nor 
Orchard, Original Landlord, or its partners, nor against any officer, 
director, partner, or employee thereof, for rent abatement, temporary 
unavailability of space, delay in other construction, losses from interrupted 
business operations, or other damages resulting from the presence or removal 
of the ACM, and Tenant waives any and all such claims, provided, that Tenant 
does not give up any such claims against Original Landlord resulting from 
Original Landlord's or Orchard's failure to accomplish the work in a timely 
manner as provided herein, and in a good and workmanlike manner, and in 
compliance with all laws.

     Notwithstanding anything in this Paragraph 3 to the contrary, if the 
receivership estate of the Receiver is terminated and the landlord's interest 
under the Lease is transferred to a party other than Original Landlord, the 
foregoing provisions of this Paragraph 3, other than and excepting the first 
two paragraphs hereof, shall be null and void and of no further force and 
effect as against Receiver and its successor(s) in ownership of the Premises. 
 Tenant shall make no claims of default under the Lease or breach of this 
Amendment against Receiver or any successor owner of the Premises other than 
Original Landlord, in regard to any failure of Original Landlord to carry out 
its obligations hereunder.

4.   SCOPE OF REMOVAL DUTIES

                                                                          3
<PAGE>

This Agreement shall not be deemed to require Orchard or Original Landlord to 
provide or pay for any other construction services other than the removal of 
the Identified ACM and the tile under which the mastic lies.  Tenant will 
remove carpet covering the Identified ACM, and will provide the area where 
the Identified ACM must be removed with all future and fixtures removed, 
ready for work to be performed.  Orchard and Original Landlord shall not be 
required to remove carpeting over tile which is attached by an ACM mastic, 
nor to prepare the surface after removal, nor to replace tile or carpet, nor 
to prepare the space for work.  Tenant will cooperate to make the space 
available for safe removal of asbestos, including vacating the space as 
required by the asbestos removal subcontractor, controlling HVAC systems and 
ventilation, and in all other ways reasonably requested of Tenant.

Second Amendment to Lease              Page 7 of 11
- -------------------------              ------------

5.   RELEASE

Tenant agrees that the foregoing obligations and promises, as well as the 
performance of the removal of the Construction Premises ACM required by 
Paragraph I hereof, are in complete satisfaction of all obligations of 
Landlord, Original Landlord and its partners, and Orchard relating to the 
Identified ACM, and that in return for the promises and obligations which are 
contained herein and such performance, Tenant releases Landlord, Original 
Landlord, Orchard, and their respective officers, directors, agents, 
servants, employees, attorneys, shareholders, partners, joint venturers, and 
all other persons associated with any of them, from any and all claims, 
liabilities, obligations, demands, actions, causes of action, and/or lawsuits 
arising out of the presence of the Identified ACM on the Premises.  Tenant 
specifically releases all claims for delay in construction or occupancy, 
storage of furniture and fixtures, interruption or delay of business, and 
rent abatement.  Upon execution hereof, Tenant shall pay all Rent currently 
due, and upon receipt of same, Receiver will waive any claim to late charges 
in regards to the Rent paid.

     The claims released include all claims of Tenant of whatever nature 
against any Landlord or Original Landlord arising from the presence of the 
Identified ACM on the Premises, whether now known or unknown, whether 
suspected or unsuspected, whether latent or patent, whether such claims are 
or could be anticipated by Tenant, and whether such claims have arisen now, 
or arise in the future (if they relate to acts or omissions of the party 
which have taken place as of the date of this release).  This Amendment shall 
survive the execution of this release, and nothing herein shall be deemed to 
waive any rights of any party against the others for fraud, wilful 
wrongdoing, or violation of law which occurs after the effective date hereof.

     Tenant enters into this release with the knowledge that there may be 
unknown, unanticipated, or unsuspected claims arising from the Identified ACM 
which are released and waived by executing this release, and that there is a 
risk that Tenant will incur or suffer losses, damages, or injuries which are 
released hereby or which would, but for this release, be the legal 
responsibility of one or more of the party(s) released hereby.  Tenant agrees 
to accept the above-described risks with the understanding that THIS RELEASE 
APPLIES TO ALL

Second Amendment to Lease              Page 8 of 11
- -------------------------              ------------

     UNKNOWN OR UNANTICIPATED RESULTS OF THE PRESENCE OF THE IDENTIFIED ACM 
DESCRIBED ABOVE, AS WELL AS THOSE KNOWN AND ANTICIPATED, and Tenant agrees to 
accept and bear full responsibility for any losses, injuries, or damages 
which are suffered or incurred by Tenant as a result of unknown, 
unanticipated, or unsuspected claims, losses, damages, or injuries.

     Tenant waives and gives up all rights or benefits which might otherwise 
accrue to Tenant, now or in the future, under the terms of California Civil 
Code Section 1542, which reads as follows:

       "A general release does not extend to claims which the creditor does 
       not know or suspect to exist in his favor at the time of execution of
       the release, which if known by him must have materially affected his
       settlement with the debtor."

All parties acknowledge that this Amendment reflects a settlement of 
conflicting views on responsibility for ACM in the Expansion Space, and that 
each party enters into the Amendment and accepts the obligations set forth 
herein as a compromise and settlement of such disputes.  It shall not be 
construed as an admission of liability or responsibility by any party hereto. 
The covenants, terms, and conditions of this Amendment shall survive 
execution hereof, and nothing 

                                                                          4
<PAGE>

contained herein shall be deemed a release of any claim, liability, or cause 
of action against a party which is obligated to perform acts hereunder 
arising out of that party's failure to so perform.  No default or failure to 
perform of Orchard or Original Landlord shall be deemed to be a default under 
the Lease.

6.   ACCEPTANCE OF PREMISES

Tenant has had a complete opportunity to inspect and investigate the Premises in
the course of its preparations for construction and its investigation of ACM on
the Premises.  Original Landlord represents, without undertaking any
investigation, that it has disclosed to Tenant any actual knowledge possessed by
Original Landlord in regard to ACM in the Expansion Space.  Except for the
presence of Hazardous Materials, Tenant accepts the Premises "AS-IS" and

Second Amendment to Lease              Page 9 of 11
- -------------------------              ------------

relieves any Landlord, including without limitation Original Landlord, of any 
further disclosure obligations relating to the Premises and the Building, 
their construction, the materials used in construction, the type, nature, and 
quality of tenant improvements installed therein, and otherwise relating to 
the Premises and the Building.  Tenant acknowledges that, except for 
Hazardous Materials as defined in the Lease, the risk of latent, unknown, 
unforeseen, concealed, hidden, undiscovered, or undiscoverable matters 
relating to the Premises and the Building, (including but not limited to 
defects and dangerous conditions) has entirely shifted to Tenant, 
notwithstanding any Landlord's constructive, or inquiry knowledge of such 
matters, and notwithstanding any duty on Receiver's part to inspect or 
investigate the Premises and the Building and disclose matters which are or 
should reasonably have been discovered, and Tenant accepts such risk.  
Nothing in this Paragraph 6 shall be deemed to change, expand, or contract 
the express obligations of the parties as set forth in the Lease in regard to 
maintenance or repair of the Building.  Tenant's liability for any and all 
Hazardous Materials other than the Identified ACM on the Premises shall 
continue to be governed solely by the provisions of the Lease relating to 
Hazardous Materials.

     Nothing contained in this Amendment shall be deemed to diminish, waive, 
or restrict rights which Tenant otherwise might have, if any, to seek 
indemnity from Original Landlord for any third party claims or liabilities 
(including claims by governmental entities) with respect to the Identified 
ACM.

7.   FIRST REFUSAL SPACE

The Lease grants Tenant a right of first refusal on certain space identified as
the First Refusal Space.  Original Landlord and Tenant currently believe it is
possible that there is further ACM in the First Refusal Space.  At such time as
the First Refusal Space is offered for lease, if Landlord proposes to lease the
First Refusal Space to a third party on agreed business terms, and if such terms
do not include a provision whereby Landlord is obligated to remove the ACM from
the First Refusal Space at Landlord's own expense, then Landlord will accept
Tenant's exercise of its right of first refusal with the condition that, upon
request of Tenant in connection with the exercise of its right of first refusal,
Landlord will perform the removal of such ACM, at the sole cost and expense of
Tenant,

Second Amendment to Lease              Page 10 of 11
- -------------------------              -------------

(which shall include the amount paid to consultants, contractors, and 
subcontractors, inspection fees, permit fees, and other amounts paid to 
governmental entities or otherwise reasonably expended in accomplishing the 
task, and a customary and reasonable fee of 4% of all construction costs). 
Unless otherwise agreed in advance by Landlord in writing, Tenant shall pay 
for such cost and expenses prior to and as a condition of Landlord's 
commencement of any asbestos removal activities.

8.   CONTINUING OBLIGATION

Except as expressly set forth in this Amendment, all terms and conditions of the
Lease remain in full force and effect, and all terms and conditions of the Lease
are incorporated herein as though set forth at length.

9.   EFFECT OF AMENDMENT

                                                                          5
<PAGE>

This Amendment modifies the Lease.  In the event of any conflict or 
discrepancy between the Lease and/or any other previous documents between the 
parties and the provisions of this Amendment, then the provisions of this 
Amendment shall control.  Except as modified herein, the Lease shall remain 
in full force and effect.  All capitalized terms used herein have the meaning 
assigned to such terms in the Lease.

10.  AUTHORITY

Each individual executing this Amendment on behalf of Tenant represents and 
warrants that he or she is duly authorized to and does execute and deliver 
this Amendment pursuant to express authority from Tenant pursuant to and in 
accordance with the By-Laws and organizational document.

11.  ENTIRE AGREEMENT

This is the entire agreement between the parties relating to the subject matter
addressed herein, and all previous discussions and negotiations are merged into
this Amendment.  No modification hereof shall be valid unless in writing, signed
by the party to be charged.

                                                                          6
<PAGE>

Second Amendment to Lease              Page 11 of 11
- -------------------------              -------------

12.  COSTS AND ATTORNEY'S FEES

Tenant shall bear its own attorney's fees and costs attendant upon the
resolution of this dispute AND the negotiation and execution of this Amendment,
and Tenant shall not be responsible for such attorneys' fees and costs of any
other party to this Amendment.

Dated: May 25, 1995                    ORCHARD INVESTMENT COMPANY NUMBER 701,
                                       A CALIFORNIA GENERAL PARTNERSHIP
                                       BY:  NELO, A CALIFORNIA GENERAL
                                            PARTNERSHIP


                                       By:  /s/David J. Brown
                                          ------------------------------------
                                          DAVID J. BROWN, ITS GENERAL PARTNER


                                       ORCHARD PROPERTIES, A CALIFORNIA
                                       CORPORATION


                                       By:  /s/David J. Brown
                                          ------------------------------------
                                          DAVID J. BROWN, PRESIDENT AND CHAIRMAN


Dated: May 25, 1995
                                       ULTRATECH STEPPER, INC., A DELAWARE
                                       CORPORATION


                                       /s/Dave Holmes
                                       ---------------------------------------
                                       By: Dave Holmes  Vice President Corporate
                                                        Services
                                           -----------------------------------
                                                [Print Name and Title]

                                       SUSAN L. UECKER, in her capacity as
                                       Receiver of the Estate of Orchard 
                                       Investment Company Number 701, a
                                       California general partnership as per
                                       appointment by the Santa Clara County
                                       Superior Court in case no. CV746085 on
                                       12/23/94.

                                       /s/ Susan L. Uecker
                                       ---------------------------------------
                                       Susan Uecker, RECEIVER

                                                                          7


<PAGE>

                                                                EXHIBIT 10.8.2


                                   THIRD AMENDMENT TO LEASE

            THIS THIRD AMENDMENT TO LEASE  is dated for reference purposes
       only as October 26, 1995 and is part of that Lease dated May 17, 1994
       together with the Summary of Basic Lease terms, the First Addendum to
       Lease, the Acceptance Agreement, the First Amendment to Lease dated
       October 18, 1994, and the Second Amendment to Lease dated May 25, 1995
       thereto (collectively, the "Lease") by and between ORCHARD INVESTMENT
       COMPANY NUMBER 701, a California general partnership ("Landlord"), and 
       ULTRATECH STEPPER, INC., a Delaware corporation ("TENANT"), and is
       made with reference to the following facts:

       A.  The Premises currently leased by Tenant pursuant to the Lease 
       consists of 53,393 rentable square feet comprised of 14,532 rentable 
       square feet at 2855 Zanker Road, and 38,861 rentable square feet at 
       2815-2825 Zanker Road, city of San Jose, California.

       B.  The Lease Term for said Premises currently expires on December 31,
       1997.

       C.  Tenant and Landlord have agreed to expand the square footage of said
       Premises by 16,864 rentable square feet as shown on "Exhibit A"
       attached hereto and incorporated herein by reference as the "Second
       Expansion Space".

       D.  Tenant and Landlord have agreed that the Term of the Lease for the
       Second Expansion Space shall expire at a later date than specified
       pursuant to the original terms of the Lease.

       NOW, THEREFORE,  Landlord and Tenant hereby agree that the Summary of
       Basic Lease Terms is amended as follows as of the Commencement Date:

1.  PREMISES:      As of the November 16, 1995, or the date the Second 
Expansion Space is actually delivered to Tenant, if later, Section D shall be 
amended to provide for the Second Expansion Space of 16,864 rentable square 
feet at 2865 Zanker Road ("2865 Zanker"), plus Tenant's original spaces 
consisting of 14,532 rentable square feet at 2855 Zanker Road ("2855 
Zanker"), and 38,861 rentable square feet at 2815-2835 Zanker Road ("2815 
Zanker"), for a total of 70,257 rentable square feet.

2.  BUILDING: Section F shall be amended to read that the Building at 
2855-2865 Zanker Road containing the 2855 Zanker and 2865 Zanker portions of 
the Premises consists of a total of 31,396 rentable square feet, and the 
Building at 2815-2835 containing the 2815 Zanker portion of the Premises 
consists of a total of 28,860 rentable square feet.

3.  TENANTS SHARE:      [As of the date the Second Expansion space is actually
delivered to Tenant on November 16, 1995, if later. ] Section G shall be amended
to mean fifty-three and 71/100 percent (53.71%) for the 2865 Zanker portion of 
the Premises, and forty-six and 29/100 percent (46.29%) for 2855 Zanker portion
of the Premises, and sixty-six and 02/100 percent (66.02%) 

4.  TENANTS ALLOCATED PARKING STALLS:  [As of the date the Second Expansion 
space is actually delivered to Tenant on November 16, 1995, if later.]
Section H shall be amended to mean 184 stalls for the 2815 Zanker and 2855 
Zanker portion of the Premises, plus 58 stalls for the 2865 Zanker portion of 
the Premises.

5.  LEASE TERMS:   Section 1 shall be amended to provided that the Lease Term 
for the 2815 Zanker and 2855 Zanker portion of the Premises shall expire 
December 31, 1997 and the Lease Term for the 2865 Zanker portion of the 
Premises shall expire February 28, 1999.

6.  BASE MONTHLY RENT:  As of the November 16, 1995, or the date the Second 
Expansion Space is actually delivered to Tenant, if later.  Section K shall 
be amended to provide for the Base Monthly Rent as follows:

A.     For the 2815 Zanker and 2855 Zanker portion of the Premises:

                    From the Commencement

<PAGE>

            Date through December 31, 1997:         $34,705.45 per month

       
  B.   For the 2865 Zanker portion of the Premises:      

            From the Commencement
            Date through February 28, 1999:         $13,491.20 per month


7.  COMMENCEMENT DATE:  The Commencement Date shall be February 16, 1996, or
any later date that is three (3) months from the date the Second Expansion Space
is actually delivered to Tenant by Landlord.

8.  SECURITY DEPOSIT:   Section M is hereby amended to provided for an increase
in the Security Deposit of $13,491.00 which Tenant has provided Landlord upon
signature hereon, for a total of $48,196.44

9.  EARLY OCCUPANCY:

A.     As consideration for Tenant's performance of all obligations to be
       performed by Tenant under the Lease and upon receipt of the increased
       Security Deposit of $13,491.00 Landlord shall permit Tenant to enter and
       use the Second Expansion Space starting November 16, 1995 until the
       Commencement Date (the "Early Occupancy Period").  Such occupancy during
       the Early Occupancy Period shall be subject to all of the terms, 
       covenants and conditions of the Lease provided, however, that the rent 
       and operating expenses payable during the Early Occupancy Period shall
       be waived.

B.     In the event either party shall bring any action or legal proceeding for
       damages for alleged breach of any provision of this agreement, to recover
       rent, to terminate tenancy of the Second Expansion Space, or to enforce,
       protect to establish any term or covenant of this agreement or the Lease
       or right of remedy of either party, the prevailing party shall be 
       entitled to recover as a part of such action or proceeding, reasonable 
       attorney's fees and court costs as may be fixed by the court or jury.

C.     In consideration of executing this Early Occupancy Agreement, Tenant 
       agrees to indemnify and save Landlord harmless of and from any and all 
       liability, damage, expense, cause of action, suits or claims judgements
       resulting from injury to person or property arising from the use of the
       Second Expansion Space by Tenant during the Early Occupancy Period, 
       including loss or damage to Tenant, its equipment, materials or supplies.

D.     During the Early Occupancy Period, Tenant shall arrange to have all 
       utility services including but not limited to gas, electric, water and
       trash billed directly to Tenant for payment.

10.  WARRANTY OF EXISTING CONDITIONS:   Landlord shall provide the Second 
Expansion Space to Tenants on November 16, 1996 with all electrical, plumbing,
HVAC, and roof systems in good working conditions as of the delivery and 
acceptance dates as provided for in Paragraph 12 herein.

11.  INTERIOR IMPROVEMENTS:   Tenant acknowledges that it has had the 
opportunity to inspect the Second Expansion Space prior to the date of delivery
and acceptance as provided for in Paragraph 13 herein, and agrees that the 
Second Expansion Space is to be leased and accepted by Tenant in its existing
condition, "as-is", without implied or express warranty or representation, 
except as provided for herein, and with all patent and latent defects.  However,
Landlord shall be responsible for the cost of removal of any asbestos containing
floor tiles or related tile mastics within Second Expansion Space.

12.  DELIVERY AND ACCEPTANCE OF THE SECOND EXPANSION SPACE:  Except as provided
for herein, delivery and acceptance of the Premises as provided for in 
Paragraph 1 above shall be November 16, 1995.

13.  FULL FORCE AND EFFECT:   Except as expressly set forth in this Amendment,
all terms and conditions of the Lease remain in full force and effect.

       IN WITNESS WHEREOF, Landlord and Tenant have executed this Third 
Amendment to be effective as of the date first set forth above.

LANDLORD:                               TENANT:

ORCHARD INVESTMENT COMPANY              ULTRATECH STEPPER, INC.
NUMBER 701
                                        a Delaware Corporation
a California general partnership


<PAGE>

By:  NELO, a California general partnership      By:__________________________

By: New England Mutual Life Insurance 
Company

a Massachusetts corporation                      _____________________________
                                                  (print Name and Title)
a general partner




By: Copley Real Estate Advisors, Inc.

Asset manager and advisor hereunto duly 
authorized



By:__________________________


Date:________________________        Date:______________________________



<PAGE>
                                                                 EXHIBIT 10.8.3
                                FOURTH AMENDMENT TO LEASE
            
            THIS FOURTH AMENDMENT TO LEASE is dated for reference purposes only
       as February 6, 1996, and is part of that Lease dated May 17, 1994 
       together with the Summary of Basic Lease Terms; the First Addendum To 
       Lease; the Acceptance Agreement; the First Amendment To Lease dated 
       October 18, 1994; the Second Amendment To Lease dated May 25, 1995; 
       and the Third Amendment To Lease dated October 30, 1995 thereto 
       (collectively, the "Lease") by and between ORCHARD INVESTMENT COMPANY
       NUMBER 701, a California general partnership ("Landlord"), and ULTRATECH
       STEPPER, INC., a Delaware corporation ("Tenant"), and is made with 
       reference to the following facts:

            A.   Landlord is the successor in interest to Orchard Investment 
       Company No. 701, a California general partnership as owner of the 
       Premises and Landlord under the Lease,

            B.   The Premises currently leased by Tenant pursuant to the Lease 
       consists of 70,257 rentable square feet comprised of 14,532 rentable 
       square feet at 2855 Zanker Road, 38,861 rentable square feet at 2815-2825
       Zanker Road, and 16,864 rentable square feet at 2865 Zanker Road, City of
       San Jose, California.

            C.   The Lease Term for the 2815-2825 Zanker and 2855 Zanker portion
       of the Premises currently expires on December 31, 1997, and February 28,
       1999 for the 2865 Zanker portion of the Premises.

            D.   Tenant and Landlord have agreed to expand the square footage of
       said Premises by 19,999 rentable square feet as shown on "Exhibit A"
       attached hereto and incorporated herein by reference as the "Third
       Expansion Space".

            E.   Tenant and Landlord have agreed that the Term of the Lease for
       the Third Expansion Space shall expire at a later date than specified
       pursuant to the original terms of the Lease.

            NOW, THEREFORE, Landlord and Tenant hereby agree that the Summary of
       Basic Lease Terms is amended as follows as of the Commencement Date:

            1.   PREMISES: As of April 1, 1996, or the date the Third Expansion
       Space is actually delivered to Tenant (the "Expansion Date"), if later,
       Section D shall be amended to consist of the Third Expansion Space of
       19,999 rentable square feet at 2835 Zanker Road ("2835 Zanker"), plus
       Tenant's original spaces consisting of 14,532 rentable, square feet at
       2855 Zank6r Road ("2855 Zanker"), 38,861 rentable square feet at 
       2815-2825 Zanker Road ("2815-2825 Zanker"), and 16,864 rentable square
       feet at 2865 Zanker Road ("2865 Zanker") for a total of 90,256 rentable
       square feet.
            
            2.   BUILDING: As of the Expansion Date, Section F of the Lease 
       shall be amended to read that the Building at 2855-2865 Zanker Road 
       ("Building B") containing the 2855 Zanker and 2865 Zanker portions of 
       the Premises consists of a total of 31,396 rentable square feet, and the
       Building at 2815-2835 Zanker Road ("Building C") containing the 2815-2825
       Zanker, and 2835 Zanker portions of the Premises consists of a total of
       58,860 rentable square feet.
            
            3.   TENANTS SHARE: As of the Expansion Date Section G of the Lease
       shall be amended to mean fifty-three and 71/100 percent (53.71%) for the 
       2865 Zanker portion of the Premises, and forty-six and 29/100 percent 
       (46.29%) for the 2855 Zanker portion of the Premises, sixty-six and 
       02/100 percent (66.02%) for the 2815-2825 Zanker portion of the Premises,
       and thirty-three and 98/100 percent (33.98%) for the 2835 Zanker portion
       of the Premises.

Page Two

            4.    TENANT'S ALLOCATED PARKING STALLS: As of the Expansion Date
       Section 11 of the Lease shall be amended to mean 184 stalls for the
       2815-2825 Zanker and 2855 Zanker portion of the Premises, plus 58 stalls
       for the 2865 Zanker portion of the Premises, plus 72 stalls for the 2835
       Zanker portion of the Premises, for a total of 314 stalls.
               
            5.   LEASE TERM: As of the Expansion Date Section J of the Lease 
       shall be amended to provide that the Lease Term for the 2815-2825 Zanker
       and 2855 Zanker portion of the Premises shall expire December 31, 1997, 
       the 

                                       4
<PAGE>

       Lease Term for the 2865 Zanker portion of the Premises shall expire 
       February 28, 1999, and the Lease Term for the 2835 Zanker portion of the
       Premises shall expire March 31, 1999.

            6.   BASE MONTHLY RENT: As of the Expansion Date Section K of the 
       Lease shall be amended to provide for the Base Monthly Rent as follows:

       A.   For the 2815-2825 Zanker and 2855 Zanker portion of the Premises:

            From the Commencement Date,

            through December 31, 1997:                   $34,705.45 per month.

       B.   For the 2865 Zanker portion of the Premises: 

            From the Commencement Date

            through February 28, 1999:                   $13,491.20 per month.

       C.   For the 2835 Zanker portion of the Premises: 

            From the Commencement Date

            through March 31, 1999:                      $16,399.18 per month.
       
            7.   SECURITY DEPOSIT: Section M is hereby amended to provide for an
       increase in the Security Deposit of $16,399.00 which Tenant has provided
       Landlord upon signature hereon, for a total of $64,595.00.

            8.   WARRANTY OF  EXISTING CONDITIONS:    Landlord shall provide
       the Third Expansion Space to Tenant with all electrical, plumbing, HVAC,
       and roof systems in good working condition as of the delivery and 
       acceptance dates as provided for in Paragraph 10 herein.

            9.   INTERIOR IMPROVEMENTS:     Tenant acknowledges that it has 
       had the opportunity to inspect the Third Expansion Space prior to the 
       Commencement Date, and agrees that the Third Expansion Space is to be 
       leased and accepted by Tenant in its existing condition, "as-is", 
       without implied or express warranty or representation, except as provided
       for herein, and with all patent and latent defects. However, Landlord 
       shall be responsible, at Landlord's sole expense, for (i) the cost of 
       removal of any asbestos containing floor tiles or tile mastic
       within the Third Expansion Space, and (ii) the clean-up and repair of 
       any damage to the Third Expansion Space caused by Landlord or Landlord's
       existing tenant therein during the time period subsequent to the date of
       this Amendment but prior to the Expansion Date, all of which shall be 
       completed prior to the Expansion Date.
       
            10.  UTILITIES, SERVICES, AND METERING: Paragraph 12 of the First 
       Amendment to Lease is hereby deleted.  Tenant shall contract directly 
       with the utility companies for metered services for electric and gas, and
       Tenant shall maintain such HVAC and related equipment as provided for
       in Article 6 of the Lease.

Page Three

            11.    FULL FORCE AND EFFECT:   Except as expressly set forth in 
       this Amendment, all terms and conditions of the Lease remain in full 
       force and effect.

                                       5

<PAGE>

       IN WITNESS WHEREOF, Landlord and Tenant have executed this Fourth 
Amendment to be effective as of the date first set forth above.


       LANDLORD:                                  TENANT:

       SAN JOSE ACQUISITION CO., L.L.C.,          ULTRATECH STEPPER, INC.
       a Delaware limited liability company       a Delaware corporation

       By: ARGO PARTNERSHIP, L.P.,                BY:  /S/WILLIAM G. LEUNIS III
       its General Partner                         William G. Leunis III
                                                    Vice President, Finance, CFO

       By: ARGO MANAGEMENT COMPANY, L.P.,
         its General Partner

          By: O'CONNOR CAPITAL PARTNERS, L.P.,
             its General Partner

             By: O'CONNOR CAPITAL INCORPORATED,
                its General partner

                 BY: /S/K.J. ARTINGSTALL
                    ---------------------
                 Name: K.J. ARTINGSTALL
                      ---------------------
                 Title: VP
                       ---------------------
                 Date:  2/21/96                              Date:    2/13/96
                      ---------------------                       ------------
By:    ARGO PARTNERSHIP II, L.P., 
       its Manager

       By:  ARGO II MANAGEMENT COMPANY, L.P., 
            its General Partner

          By:     O'CONNOR CAPITAL PARTNERS II, L.P., 
                  its General Partner

             By:  O'CONNOR CAPITAL II INCORPORATED
                  its General Partner

                  By:  /S/K.J. ARTINGSTALL
                     ---------------------
                  Name:  K.J. Artingstall
                       ---------------------
                  Title:   VP
                        ---------------------
                  Date:   2/21/96
                       ---------------------
Exhibit A - Site Plan

                                         SITE PLAN
            
            
            
            EXHIBIT A

                                       6


<PAGE>
                                                                EXHIBIT 10.8.4

                              FIFTH AMENDMENT TO LEASE


       This FIFTH AMENDMENT TO LEASE (this "Amendment") is entered into as of 
December 1, 1997, by and between ULTRATECH STEPPER, INC., a Delaware 
corporation ("Tenant"), and SILICON VALLEY PROPERTIES, LLC, a Delaware 
limited liability company ("Landlord"), with reference to the following facts:

       A.   Landlord, as successor to Orchard Investment Company Number 701, 
and Tenant are the current parties to that certain Lease, dated May 17, 1994, 
as amended by that certain First Amendment to Lease, dated October 18, 1994, 
that certain Second Amendment to Lease and Agreement and Release dated as of 
May 25, 1995, that certain Third Amendment to Lease dated May 17, 1994, and 
that Fourth Amendment to Lease dated February 6, 1996 (said Lease, as amended 
thereby, collectively shall be referred to as the "Lease"), for the lease by 
Tenant of (i) approximately 38,861 square feet of space in a building at 
2815-2825 Zanker Road (the "2815 Zanker Space"), (ii) approximately 19,999 
square feet of space in a building at 2835 Zanker Road (the "2835 Zanker 
Space"), (iii) 14,532 square feet of space in a building at 2855 Zanker Road 
(the "2855 Zanker Space"), and (iv) approximately 16,864 square feet of space 
in a building at 2865 Zanker Road (the "2865 Zanker Space"), all in San Jose, 
California and as more particularly described in the Lease (the "Leased 
Premises").  All capitalized terms referred to in this Amendment shall have 
the same meaning defined in the Lease, except where expressly defined to the 
contrary in this Amendment.

       B.   The Lease Term for the 2815 Zanker Space and 2855 Zanker Space, 
which together contains approximately 53,393 square feet, was scheduled to 
expire on December 31, 1997, and Tenant exercised its option to extend for 
three years, upon the following terms and conditions.

       NOW, THEREFORE, in consideration of the foregoing and the mutual 
covenants hereinafter contained, and for other good and valuable 
consideration, the receipt and sufficiency of which are hereby acknowledged, 
the parties hereto agree as follows:

       1. EXTENSION.  Pursuant to section 1 of First Addendum to Lease, 
Tenant has exercised its option to extend Lease Term for the portion of the 
Premises defined above as the 2815 Zanker Space and 2855 Zanker Space with 
the Lease Term for such portion of the Premises now expiring on December 31, 
2000.  The Lease Term for the remaining portion of the Premises (i.e., 2835 
Zanker Space and 2865 Zanker Space) remains unaffected by this Amendment 
(i.e., the Lease Term for 2835 Zanker Space expires March 31, 1999 and for 
2865 Zanker Space expires February 28, 1999).  As a result of this Amendment, 
Tenant has fully exercised all of its options or rights to extend the Lease 
Term for the portion of the Premises defined as the 2815 Zanker Space and 
2855 Zanker Space.

       2. BASE MONTHLY RENT DURING TERM.  Commencing on January 1, 1998 and 
continuing through December 31, 2000, the Base Monthly Rent for the 2815 
Zanker Space and the 2855 Zanker Space shall be as follow:

<TABLE>
<CAPTION>

       SPACE               TIME PERIOD                  BASE MONTHLY RENT
       <S>                 <C>                              <C>
       2815 Zanker Space   1/ 1/98 through 12/31/98         $58,291.50
                           1/1/99 through 12/31/99          $60,234.55
                           1/1/2000 through 12/31/2000      $62,177.60

       2855 Zanker Space   1/1/98 through 12/31/98          $21,798.00
                           1/1/99 through 12/31/99          $22,524.60
                           1/1/2000 through 12/31/2000      $23,251.20
</TABLE>

       The foregoing rental rates were established by the appraisal procedure 
described in section 1 of Addendum No. 1 comprising a part of the Lease and 
are applicable without the construction of any improvement or the granting of 
any allowance or concession by Landlord.

       3. GENERAL PROVISIONS

                                                                          7
<PAGE>

       3.1 CONFIRMATION.  Tenant acknowledges and agrees that: (a) Tenant is 
in sole possession of the Premises demised under the Lease; (b) all work, 
improvements and furnishings required by Landlord under the Lease have been 
completed and accepted by Tenant; (c) all free rent and any other concession 
required under the Lease have been granted, used and otherwise satisfied; and 
(d) it has no offset, claim, recoupment or defense against the payment of 
rent and other sums and the performance of all obligations of Tenant under 
the Lease.

       3.2 FURTHER ASSURANCES.  Landlord and Tenant each agree to execute any 
and all documents and agreements reasonably requested by the other party to 
further evidence or effectuate this Amendment.

       3.3 SUCCESSORS AND ASSIGNS.  This Amendment shall be binding upon and 
inure to the benefit of the parties hereto and their successors and assigns.

       3.4 REAFFIRMATION. As amended hereby, the Lease shall remain in full 
force and effect.

       3.5 CONFLICTS. In case of any conflict between any term or provision 
of this Amendment and the Lease, the term or provision of this Amendment 
shall govern.

       3.6 COUNTERPARTS. This Amendment may be executed in one or more 
counterparts, each of which shall be deemed an original, but all of which 
when taken together shall constitute one agreement.

       IN WITNESS WHEREOF, this Amendment has been executed as of the date 
first set forth above.

LANDLORD:   SILICON VALLEY PROPERTIES, L.L.C. 
            a Delaware limited liability company

            By:  Divco SVP Group, LLC,
            a Delaware limited liability company 
            Its Manager

            By: /s/Scott Smithers
               -----------------------------
               Name: Scott Smithers
               Its:  President
               Dated: December 8, 1997


TENANT:     ULTRATECH STEPPER, INC., 
            a Delaware corporation

            By: /s/ William G. Leunis III
               ------------------------------
               Name: William G Leunis III
               Its:  Vice President of Finance
               Dated: December 2nd, 1997

                                                                          8


<PAGE>

                                                               EXHIBIT 13

     ANNUAL REPORT TO STOCKHOLDERS FOR THE YEAR ENDED DECEMBER 31, 1997



<PAGE>
Selected Financial Data

<TABLE>
<CAPTION>

In thousands, except per share data       1997**        1996          1995          1994          1993*         1992*
<S>                                     <C>           <C>           <C>           <C>           <C>           <C>
Operations:
Net sales                               $147,349      $193,508      $157,831      $ 91,344      $ 54,136      $ 35,309
Gross profit                              77,678       104,893        82,288        46,037        26,683        17,548
Gross profit as a percentage of sales         53%           54%           52%           50%           49%           50%
Operating income                        $ 18,001      $ 46,678      $ 31,782      $ 15,291      $  6,833      $  2,220
Income before income taxes                25,094        52,707        36,170        16,445         6,689         2,089
Pre-tax income as percentage of sales         17%           27%           23%           18%           12%            6%
Net income                              $ 17,566      $ 35,311      $ 24,234      $ 11,019      $  4,123      $  1,304
Net income per share-basic                 $0.85         $1.76         $1.32         $0.68           N/A           N/A
Number of shares used in
   per share computation-basic            20,553        20,079        18,425        16,293           N/A           N/A
Net income per share-diluted               $0.81         $1.66         $1.20         $0.65           N/A           N/A
Number of shares used in
   per share computation-diluted          21,681        21,271        20,154        16,917           N/A           N/A
Dividends per share                            -             -             -             -             -             -
Balance sheet:
Cash, cash equivalents and
   short-term investments               $164,349      $167,409      $161,356      $ 50,246      $ 26,242       $   176
Working capital                          223,226       212,684       176,174        69,368        32,977         6,307
Total assets                             300,001       280,772       245,428       104,789        56,381        16,765
Long-term obligations,
   less current portion                        -             -             -           400           800             -
Stockholders' equity                     263,632       239,947       199,658        80,027        38,091         8,323
Other data:
Return on average equity                       7%           16%           17%           19%           18%           15%
Book value per common share
   outstanding                          $  12.68      $  11.81      $  10.08       $  4.84       $  3.00           N/A
Current ratio                               7.60          6.40          4.94          3.93          2.89          1.76
Long-term debt to equity ratio              0.00          0.00          0.00          0.00          0.02          0.00
Capital expenditures                    $  9,337      $  7,849      $  9,760       $ 7,759       $ 2,752       $   972
Income tax as percentage of
   pre-tax income                             30%           33%           33%           33%           38%           38%


Quarterly Data

Unaudited, in thousands, except per share data                          1st          2nd           3rd           4th

1997**
Net sales                                                           $ 38,733      $ 38,054      $ 36,752      $ 33,810
Gross profit                                                          21,033        19,979        19,228        17,438
Operating income                                                       4,916         6,543         5,648           894
Net income                                                             4,533         5,727         5,405         1,901
Net income per share-basic                                          $   0.22      $   0.28      $   0.26      $   0.09
Number of shares used in per share
   computation-basic                                                  20,371        20,451        20,626        20,765
Net income per share-diluted                                        $   0.21      $   0.27      $   0.25      $   0.09
Number of shares used in per share 
   computation-diluted                                                21,526        21,442        21,851        21,862

1996
Net sales                                                           $ 51,713      $ 51,793      $ 46,502      $ 43,500
Gross profit                                                          27,654        28,102        25,343        23,794
Operating income                                                      11,527        12,531        11,622        10,998
Net income                                                             8,641         9,276         8,835         8,559
Net income per share-basic                                          $   0.43      $   0.46      $   0.44      $   0.42
Number of shares used in per share
   computation-basic                                                  19,866        20,026        20,168        20,256
Net income per share-diluted                                        $   0.41      $   0.44      $   0.42      $   0.40
Number of shares used in per share
   computation-diluted                                                21,225        21,278        21,174        21,357
</TABLE>

*Ultratech Stepper, Inc. (the "Company") acquired certain assets and 
liabilities of the Ultratech Stepper Division (the "Predecessor") of General 
Signal Corporation on March 8, 1993. The amounts, as presented above, reflect 
historical results and do not include pro forma adjustments, which may have 
been incurred as an independent company. Net income per share for each of the 
two years in the period ended December 31, 1993 is not presented because of a 
lack of comparability between the capital structure of the Company and the 
Predecessor.

**Results of operations in 1997 include special charges of $3,619,000, or 
$0.12 per share-basic and diluted, to reflect acquired in-process research 
and development in the first quarter of 1997, and $3,450,000, or $0.12 per 
share-basic, $0.11 per share-diluted, to account for termination of the 
Company's Japan distributor in the fourth quarter of 1997.

- ------------------------------------------------------------------------------
Page 24                                               Ultratech Stepper, Inc.

<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations

Overview

Ultratech develops, manufactures and markets photolithography equipment 
(steppers) designed to reduce the cost of manufacturing integrated circuits 
(ICs), thin film heads (TFHs) for disk drives and micromachined components. 
The Company supplies step-and-repeat systems based on one-to-one reflective 
and refractive optical technology to customers located throughout the United 
States, Europe, Asia/Pacific and Japan. These products range from low-cost 
systems for high-volume manufacturing to advanced systems for cost-effective 
production of leading-edge devices. Additionally, during the quarter ended 
December 31, 1997, the Company shipped its first UltraBeam Model V2000 
electron beam pattern generation system based on vector-scan technology for 
use in the development and production of photomasks for the IC industry.

The following discussion should be read in conjunction with the consolidated 
financial statements, and notes thereto, included elsewhere herein. For a 
further discussion of the Company's business, please refer to the Company's 
1997 Annual Report on Form 10-K, which is included as an integral component 
of the Annual Report to Stockholders.

Results of Operations

The Company's operating results have fluctuated significantly in the past and 
will continue to fluctuate significantly in the future depending upon a 
variety of factors, including cyclicality in the Company's target markets; 
the timing of significant orders; lengthy sales cycles for the Company's 
products; the mix of products sold; lengthy manufacturing cycles for the 
Company's products; lengthy product development cycles for new products; the 
timing of new product announcements and releases by the Company or its 
competitors; market acceptance of new products and enhanced versions of the 
Company's products; manufacturing inefficiencies associated with the startup 
of new product introductions; customer concentration; ability to volume 
produce systems and meet customer requirements; patterns of capital spending 
by customers; product discounts; changes in pricing by the Company, its 
competitors or suppliers; political and economic instability throughout the 
world, in particular the Asia/Pacific region; natural disasters; regulatory 
changes; business interruptions related to the Company's occupation of its 
facilities; and various competitive factors including price-based competition 
and competition from vendors employing other technologies. The Company's 
gross profit as a percentage of sales has been and will continue to be 
significantly affected by a variety of factors, including the mix of products 
sold; the percentage of international sales, which typically have lower gross 
margins than domestic sales principally due to higher field service and 
support costs; increased competition in the Company's targeted markets; 
nonlinearity of shipments during the quarter; the introduction of new 
products, which typically have higher manufacturing costs until manufacturing 
efficiencies are realized and are typically discounted more than existing 
products until the products gain market acceptance; the rate of capacity 
utilization; and the implementation of subcontracting arrangements.  

The Company derives a substantial portion of its total net sales from sales 
of a relatively small number of new systems, which typically range in price 
from $800,000 to $2.1 million. Additionally, the Company's UltraBeam Model 
V2000 electron beam lithography system, first shipped in the quarter ended 
December 31, 1997, has an approximate price range of $6 million to $9 
million. As a result of these high sale prices, the timing of recognition of 
revenue from a single transaction has had and will continue to have a 
significant impact on the Company's net sales and operating results. The 
Company's backlog at the beginning of a period typically does not include all 
of the sales needed to achieve the Company's objectives for that period. In 
addition, orders in backlog are subject to cancellation, delay, deferral or 
rescheduling by a customer with limited or no penalties. Consequently, the 
Company's net sales and operating results for a period have been and continue 
to depend upon the Company obtaining orders for systems to be shipped in the 
same period in which the order is received. The Company's business and 
financial results for a particular period could be materially adversely 
affected if an anticipated order for even one system is not received in time 
to permit shipment during the particular period. Furthermore, a substantial 
portion of the Company's net sales has historically been realized near the 
end of each quarter. Accordingly, the failure to receive anticipated orders 
or delays in shipments near the end of a particular quarter, due, for 
example, to unanticipated shipment reschedulings, cancellations, delays or 
deferrals by customers or to unexpected manufacturing difficulties or delays 
in deliveries by suppliers due to their long production lead times or 
otherwise, may cause net sales in a particular period to fall significantly 
below the Company's expectations, which would materially adversely affect

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 25

<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations

the Company's operating results for such period. In particular, the 
significantly long manufacturing cycles of the Company's linear motor-based 
steppers, which include the Model 4700 stepper, Model 6700 stepper, Titan 
Wafer Stepper family and Saturn Wafer Stepper family, and the long lead time 
for lenses and other materials, could cause shipments of such products to be 
delayed from one quarter to the next, which could materially adversely affect 
the Company's financial condition and results of operations for a particular 
quarter. Additionally, the Company has very limited experience in the 
manufacture of its UltraBeam Model V2000 electron beam pattern generation 
system, and the Company is in the process of documenting the manufacturing 
processes for this product. The UltraBeam Model V2000 production process is 
extremely complex and the product has significantly long manufacturing and 
sales cycles, which greatly increases the likelihood of delays in shipments 
from one quarter to the next. Due to the high list price for these systems, 
shipment delays would materially adversely affect the Company's financial 
condition and results of operations for a particular quarter if the shipment 
were delayed to the following quarter. The impact of these and other factors 
on the Company's sales and operating results in any future period cannot be 
forecast with certainty. 

The Company's business has in prior years been subject to seasonality, 
although the Company believes such seasonality has been masked in recent 
years by cyclical trends within the semiconductor and thin film industries. 
In addition, the need for continued expenditures for research and 
development, capital equipment purchases and ongoing training and customer 
service and support worldwide, among other factors, will make it difficult 
for the Company to reduce its significant operating expenses in a particular 
period if the Company fails to achieve its net sales goals for the period. 
Additionally, the Company has recently experienced manufacturing 
inefficiencies associated with shifts in product demand and underutilization 
of manufacturing capacity and the Company presently anticipates that these 
trends will continue for at least the next several quarters. Such 
continuation would materially adversely affect the Company's business, 
financial condition and results of operations.

Certain of the statements contained in this Annual Report are forward-looking
statements that involve a number of risks and uncertainties. In addition to the
factors discussed herein, among other factors that could cause actual results to
differ materially include the following: highly competitive industry;
international sales; development of new product lines; rapid technological
change; importance of timely product introductions; importance of the Company's
mix-and-match strategy; expansion of the Company's operations; management of
growth; dependence on key personnel; sole or limited sources of supply;
intellectual property matters; environmental regulations; effects of certain
anti-takeover provisions; volatility of stock price; and the other risk factors
listed from time to time in the Company's SEC reports, including but not limited
to the Company's 1997 Annual Report on Form 10-K.

Due to these and additional factors, historical results and percentage
relationships discussed below will not necessarily be indicative of the results
of operations for any future period.


Net Sales

1997 VS. 1996  Net sales consist of revenue from system sales, spare parts
sales, and service. For the year ended December 31, 1997, net sales were $147.3
million, a decrease of 24% as compared with net sales of $193.5 million for
1996. The decline, relative to 1996, was primarily attributed to significantly
lower unit sales of the Company's Model 1500 Series steppers, which address the
markets for scanner replacement and high-volume/low-cost semiconductor
fabrication, and lower unit sales of the Company's Model 1700 Series steppers
with machine vision system (MVS), which address the market for back-end
processing of thin film heads, partially offset by the shipment of the Company's
first UltraBeam Model V2000 electron beam lithography system, which addresses
the market for the development and production of photomasks for the
semiconductor industry. For the year ended December 31, 1997, the Company's
system shipments decreased 34%, relative to 1996, while the weighted-average
selling price of all systems sold was essentially unchanged. Net sales from
spare parts and service increased 10% for the year ended December 31, 1997, as
compared to 1996.

The Company believes that its sales have been and continue to be adversely
impacted by reduced capital capacity spending levels within the semiconductor
industry, particularly in the Japanese and other Asian marketplaces. The Company
continues to experience shipment delays and purchase order restructurings by
several of its customers, and has also experienced purchase order cancellations.
There can be no assurance that this trend will not continue in the future.
Accordingly, the Company can give no

- ------------------------------------------------------------------------------
Page 26                                               Ultratech Stepper, Inc.

<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations

assurance that it will be able to achieve or maintain its current or prior 
level of sales. The Company believes that the current strength of the U.S. 
dollar, particularly in relation to the Japanese yen, places the Company at a 
competitive disadvantage. Additionally, the Company has recently experienced 
a significant downturn in orders from customers in the thin film head 
industry. Several companies within the thin film head and disk drive 
industries have recently announced lower than expected earnings, layoffs and 
restructuring or other charges. The Company believes these events indicate 
that the thin film head and disk drive industries have excess capacity in the 
near-term. This will result in lower sales as a result of cancellations, 
delays and deferrals of customer orders from these industries, which will 
materially adversely affect the Company's business, financial condition and 
results of operations in the near-term. Based on current market conditions in 
both the semiconductor and thin film head industries and nonlinearity of 
system shipments, the Company expects that future quarterly comparisons, 
through at least the second quarter of 1998, will indicate a 
period-over-comparable-period decline in the Company's net sales and net 
income and may result in a sequential decline in net sales and net income, 
relative to the quarter ended December 31, 1997. Additionally, declines in 
net sales, relative to the quarter ended December 31, 1997, may result in net 
losses due to the Company's current level of operating expenses.

For the year ended December 31, 1997, international net sales were $48.4 
million, as compared with $102.1 million for 1996, a decline of 53%. 
International net sales represented 33% of total net sales for the year ended 
December 31, 1997, as compared with 53% for 1996. This year-over-year 
decline, both in absolute dollars and as a percentage of total sales, was 
primarily attributed to decreased system sales to the Asian, European and 
Japanese markets. The Company believes that the severe currency and equity 
market fluctuations that have been experienced recently by many of the Asian 
markets has resulted, and may continue to result, in delays, deferrals and 
cancellations of orders of the Company's products, particularly in the 
short-term, which will have a material adverse effect on the Company's 
business, financial condition and results of operations. The Company's 
operations in foreign countries are not currently subject to significant 
exchange rate fluctuations, principally because sales contracts for the 
Company's systems are generally denominated in U.S. dollars. However, 
international sales expose the Company to a number of additional risk 
factors, including fluctuations in the value of local currencies relative to 
the U.S. dollar, which, in turn, impact the relative cost of ownership of the 
Company's products.

                                  [GRAPH]
                         Revenue by Geographical Region
                              (Dollars in Millions)


Because the Company's net sales are subject to a number of risks, including 
intense competition in the capital equipment industry and the timing and 
market acceptance of the Company's products, there can be no assurance that 
the Company will exceed or maintain its current level of net sales for any 
period in the future. Additionally, the Company believes that the market 
acceptance and volume production of its UltraBeam Model V2000 electron beam 
lithography system, Titan Wafer Stepper family and Saturn Wafer Stepper 
family are of critical importance to its future financial results. To the 
extent that these products do not achieve significant sales due to 
difficulties involving manufacturing or engineering, an inability to reduce 
the current long manufacturing cycles for such products, direct competition, 
or any other reason, the Company's business, financial condition and results 
of operations would be materially adversely affected. Additionally, the 
Company is presently transitioning from its Model 1700 MVS Series steppers, 
which address the market for back-end processing of inductive thin film 
heads, to the Model 1800 MVS Series steppers, which address the market for 
back-end processing of magneto-resistive (MR) thin film heads. To the extent 
that the Model 1800 Series steppers do not achieve significant sales due to 
competition from alternative technologies, excess capacity in the thin film 
industry or any other reason, the Company's business, financial condition and 
results of operations would be materially adversely affected. 

1996 VS. 1995   Net sales for 1996 were $193.5 million, an increase of 23% over
net sales of $157.8 million for 1995. This increase was primarily due to a
three-fold unit shipment increase in the Company's Model 1700 MVS Series
steppers; higher unit sales of the Company's Titan Wafer Stepper, which
addresses the market for photosensitive polyimide applications as well as the
markets for scanner replacement and high-volume/low-cost semiconductor
fabrication; and a shift by thin film head manufacturers from the Model 2700
stepper to the Company's more advanced Model 4700 stepper. These factors were
partially offset by lower unit sales of the Company's Model 2244i stepper, which
addresses the market for mix-and-match in advanced IC fabrication. Overall, the
Company's system shipments increased 11% and the weighted-average selling price
of all systems sold increased by 9%. Net sales from spare parts and service in
1996 increased 22% over 1995 levels, resulting primarily from an increased
number of system upgrades and higher service and spare parts sales resulting
from a larger installed base of the Company's systems in

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 27

<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations

1996, as compared with 1995. Strength in the Company's international markets 
also contributed to the year-over-year dollar increase in net sales. 
International sales for 1996 were $102.1 million, an increase of 17% over 
international sales of $87.2 million in 1995. This increase was primarily due 
to increased sales of the Company's Model 1700 MVS Series steppers to thin 
film head manufacturers in Southeast Asia. During 1996, international sales 
represented 53% of total sales, as compared to 55% in 1995. 

Gross Profit

1997 VS. 1996   The Company's gross profit as a percentage of sales was 52.7% 
for 1997, as compared with 54.2% for 1996. This decline in gross margin as a 
percentage of net sales can be primarily attributed to the shift away from 
the Company's more mature product lines, which typically have higher margins 
due to manufacturing efficiencies and lower required after-sales support, 
toward the Company's newer and more advanced systems; manufacturing 
inefficiencies caused by underutilization of manufacturing capacity; changes 
in the Company's shipment schedule and an unusually high degree of 
nonlinearity of shipments during the 1997 periods; partially offset by lower 
required inventory reserves due to improved inventory management; lower 
international sales relative to total sales for the Company; improved margins 
from spare parts and service; and increased after-sales support efficiencies.

                                  [GRAPH]
                    Gross Profit As A Percentage Of Net Sales

The Company believes that increased competition from Canon Inc., Nikon Inc. 
and ASM Lithography, Ltd., among others, together with generally weak 
conditions in the markets the Company serves, will make it difficult for the 
Company to maintain recent gross margin percentages. Additionally, the 
Company is proceeding with capacity additions for the anticipated volume 
production of several new products that are outside of the Company's core 
technologies. Commencement of production of these new products has resulted 
and will continue to result in the purchase of significant levels of 
inventory to support manufacturing requirements, hiring of additional 
production and manufacturing support personnel, purchase of significant 
levels of plant and equipment and the incurrence of other related 
manufacturing overhead costs. The purchase of additional inventories will 
result in a significantly higher risk of obsolescence, which may require 
additional inventory reserves and would negatively impact gross margins. 
Additionally, new products generally have lower gross margins until 
production and after-sales efficiencies can be achieved. Should these new 
products fail to develop or generate significant market demand, the Company's 
business, financial condition and results of operations would be materially 
adversely impacted. As a result of these and other factors, the Company 
presently expects that gross profit as a percentage of sales will be 
significantly lower in 1998, relative to levels achieved in 1997.  

1996 VS. 1995   The Company's gross profit as a percentage of sales was 54.2% 
for 1996 as compared with 52.1% for 1995. This increase in gross profit 
percentage was primarily attributed to a favorable product mix, higher 
weighted-average selling prices for the Company's systems, fewer system 
shipments to the Japanese market, increased after-sales efficiencies and 
lower required provisions for the Company's profit sharing and executive 
incentive plans, partially offset by the impact of manufacturing 
inefficiencies caused by changes in the Company's shipment schedule, 
underutilization of manufacturing capacity and an unusually high degree of 
nonlinearity of shipments during the Company's 1996 fiscal quarters, relative 
to its 1995 fiscal quarters. 

Research, Development and Engineering

1997 VS. 1996   The Company's research, development and engineering expenses, 
net of third-party funding, were $26.4 million for 1997, a decrease of 3% 
over the $27.2 million recorded for 1996. This decrease was primarily 
attributed to decreased spending in absolute dollars for the development, 
enhancement, manufacturing support and sales demonstration support of the 
Company's Model 2244i stepper, Model 4700 stepper, Titan Wafer Stepper family 
and Saturn Wafer Stepper family, partially offset by increased spending for 
the Company's Model 1800 MVS Series steppers, development of its electron 
beam lithography system and development of its rapid thermal annealing/laser 
doping technologies and systems.

- ------------------------------------------------------------------------------
Page 28                                               Ultratech Stepper, Inc.

<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations

The Company intends to continue to invest significant resources in the
development of new products, such as the Company's rapid thermal annealing/laser
doping and electron beam lithography systems, and enhancements of existing
semiconductor and thin film head lithography systems. Due to these and other
factors, the Company expects the absolute dollar amount of research, development
and engineering expenses for 1998 to increase substantially, relative to 1997.

                                  [GRAPH]
                               R.D. & E. Expenses
                             (Dollars in Millions)

1996 VS. 1995   The Company's research, development and engineering expenses,
net of third-party funding, were $27.2 million for 1996, an increase of 20% over
the $22.7 million recorded for 1995. This increase was primarily attributed to
the continued development, enhancement, manufacturing support and sales
demonstration support of the Company's Model 2244i stepper, Model 4700 stepper,
Titan Wafer Stepper and Saturn Wafer Stepper; expenditures related to the
enhancement of features and functionality of the Company's Model 1500 and Model
1700 Series steppers; and certain advanced research projects. These factors were
partially offset by lower required provisions for the Company's profit sharing
and executive incentive plans.

Selling, General and Administrative

1997 VS. 1996   Selling, general and administrative expenses were $26.2 million,
a decrease of 16% over the $31.0 million recorded for 1996. As a percentage of
net sales, selling, general and administrative expenses increased to 17.8% of
net sales in 1997, as compared to 16.0% of net sales in 1996. The dollar
decrease for the year ended 1997, relative to 1996, reflects in large part the
Company's decrease in sales, service and support expenses typically associated
with a decrease in sales; cost containment measures implemented during late
1996; significantly lower required provisions for the Company's profit sharing
and executive incentive plans; and lower commission expense resulting from lower
sales and higher direct sales relative to total net sales for the period. 

                                  [GRAPH]
                  Operation Income As A Percentage Of Sales
                           (Excludes Special Charges)

The Company expects the absolute dollar amount of selling, general and 
administrative expenses for 1998 to increase substantially relative to 1997. 
This increase is anticipated, in part, due to increased sales, service and 
support expenses associated with the anticipated future volume production and 
commercialization of the Company's electron beam lithography system and the 
anticipated future introduction of its rapid thermal annealing/laser doping 
system; higher operating costs in Japan as a result of the Company's decision 
to establish a direct sales force; and to potentially higher anticipated 
provisions for the Company's profit sharing and executive incentive plans, 
which are dependent upon the Company achieving certain operating income 
targets. 

1996 VS. 1995   Selling, general and administrative expenses were $31.0 
million for 1996, an increase of 11% over the $27.9 million recorded for 
1995. As a percentage of net sales, selling, general and administrative 
expenses declined to 16.0% of net sales in 1996, as compared to 17.6% of net 
sales in 1995. The significant reduction in selling, general and 
administrative expenses, as a percentage of net sales, can be primarily 
attributed to cost containment measures implemented during the year, lower 
required provisions for the Company's profit sharing and executive incentive 
plans and lower commission expense resulting from higher direct sales 
relative to total net sales for the year. The significant dollar increase in 
1996 reflects the Company's increases in sales, service and support expenses 
typically associated with an increase in sales, partially offset by the 
Company's cost containment measures, lower required provisions for the 
Company's profit sharing and executive incentive plans and lower commission 
expense resulting from higher direct sales relative to total net sales.

Acquired In-Process Research and Development

During the first quarter of 1997, the Company completed the acquisition of the
assets of Lepton Inc., a developer of electron beam lithography systems. As a
result of this acquisition, the Company recognized a one-time pre-tax charge in
the quarter ended March 31, 1997 for acquired in-process research and
development expense of  $3.6 million, or $0.12 per share, net of related income
tax benefits. 

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 29
<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations

Special Charge Relating to Termination of Japan Distributor

In December 1997, the Company terminated its relationship with its Japan 
distributor, Innotech Corporation. This resulted in a special charge of $3.5 
million, or $0.11 per share, in the quarter ended December 31, 1997, net of 
related income tax benefits, primarily related to termination fees negotiated 
between the Company and Innotech. The Company is presently in the process of 
establishing a direct sales force in Japan. This is anticipated to contribute 
to higher selling, general and administrative expenses in 1998, relative to 
1997.

Other Income, Net

Other income, net, which consists primarily of interest income, was $7.3 
million for 1997 as compared with $6.3 million for 1996 and $4.6 million for 
1995. The increases in 1997 and 1996 were attributed to interest earned on 
increased levels of cash equivalents, short-term investments and leases 
receivable.

Income Taxes

Income taxes represented 30%, 33% and 33% of income before income taxes for 
1997, 1996 and 1995, respectively. The decrease in the tax rate for 1997, 
relative to 1996 and 1995, is primarily a result of tax benefits associated 
with the Company's research and development efforts together with higher 
tax-exempt income, relative to total income before income taxes. The Company 
presently anticipates that its effective tax rate in 1998 will remain at 30%; 
however, tax legislation and other factors may impact this rate further. The 
Company's effective tax rate currently differs from the U.S. statutory rate 
as a result of state income taxes and benefits associated with the Company's 
foreign sales corporation, tax-exempt income and credits for research and 
development, net of other individually immaterial items.

Liquidity and Capital Resources

Cash flows provided by operating activities were $5.6 million for the year 
ended December 31, 1997, as compared with $12.6 million provided by operating 
activities during the comparable period in 1996. Positive cash flows from 
operating activities during 1997 were primarily attributed to net income of 
$17.6 million and net non-cash charges to income of $15.5 million, which 
include a $3.6 million pre-tax charge for the write-off of in-process 
research and development associated with the Company's purchase of the assets 
of Lepton Inc., partially offset by a net cash requirement of $27.4 million 
as a result of changes in operating assets and liabilities. The negative net 
effect from changes in operating assets and liabilities was primarily 
attributed to an increase of $13.1 million in leases receivable, a $6.1 
million increase in accounts receivable, a $1.8 million increase in 
inventories and a decrease in accrued liabilities of $6.4 million, partially 
offset by a $2.9 million increase in accounts payable. The Company 
anticipates that the current trend of nonlinearity of shipments and extended 
customer payment terms will continue to keep accounts receivable levels at 
unusually high levels for at least the next several quarters. Such trends, 
should they continue, would expose the Company to numerous risks, which could 
materially adversely affect the Company's business, financial condition and 
results of operations.

                                  [GRAPH]
                             Capital Expenditure
                             (Dollars in Millions)

The Company believes that because of the relatively long manufacturing cycle of
certain of its systems, particularly newer products, the Company's investment in
inventories will continue to represent a significant portion of working capital.
Additionally, the Company has incurred and will continue to incur significant
additional levels of inventory, plant and equipment as a result of the
anticipated volume production of its electron beam lithography system and
anticipated introduction of its rapid thermal annealing/laser doping system. As
a result of such investments, the Company will be subject to increased risk of
inventory obsolescence, impairment of long-lived assets and other factors, which
could materially adversely affect the Company's business, financial condition
and results of operations.

- ------------------------------------------------------------------------------
Page 30                                                Ultratech Stepper, Inc.
<PAGE>

Management's Discussion and Analysis of Financial Condition and
   Results of Operations


At December 31, 1997, the Company had working capital of $223.2 million. The 
Company's principal sources of liquidity at December 31, 1997 consisted of 
$164.3 million in cash, cash equivalents and short-term investments and $4 
million in various unsecured lines of credit. As of December 31, 1997, there 
was $0.1 million outstanding under such facilities. 

For the year ended December 31, 1997, cash provided by financing activities 
was $3.9 million, principally as a result of the issuance of Common Stock 
pursuant to the exercise of employee stock options and the issuance of stock 
under the Company's employee stock purchase plan. 

                                  [GRAPH]
                              Working Capital
                            (Dollars in millions)

During the year ended December 31, 1997, the Company used $13.4 million of 
cash in its investing activities, including $9.3 million for capital 
expenditures, $3.1 million for the purchase of the assets of Lepton Inc. and 
$0.8 million for the net investment of cash in short-term investments. The 
Company intends to continue to make significant capital expenditures during 
1998 related to the expansion of its manufacturing facilities, the 
manufacture of its systems for sales demonstration and engineering 
development purposes and additional capital expenditures related to research, 
development and engineering, sales and service and management information 
systems. As a result of these capital expenditures, the Company's 
depreciation and amortization costs are anticipated to increase significantly 
and may negatively impact the Company's results of operations in the event of 
a further downturn in the Company's business cycles.

Many currently installed computer systems and software products are coded to 
accept only two-digit entries in the date code field. Beginning in the year 
2000, these date code fields will need to accept four-digit entries to 
distinguish twenty-first century dates from twentieth century dates. As a 
result, in less than two years, computer systems and/or software used by many 
companies may need to be upgraded to comply with such "Year 2000" 
requirements. The Company has commenced, for all of its information systems 
and software contained in the products it sells, a year 2000 date conversion 
project to address necessary code changes, testing and implementation. 
Significant uncertainty exists concerning the potential effects associated 
with such compliance. The Company expects such modifications will be made on 
a timely basis and does not believe that the cost of such modifications will 
have a material effect on the Company's operating results. There can be no 
assurance, however, that the Company and/or its vendors will be able to 
modify timely and successfully such products, services and systems to comply 
with year 2000 requirements, which could have a material adverse effect on 
the Company's business, financial condition and results of operations, 
including costs associated with related litigation.

The development and manufacture of new lithography systems and enhancements 
are highly capital intensive. In order to remain competitive, the Company 
must continue to make significant expenditures for capital equipment, sales, 
service, training and support capabilities; investments in systems, 
procedures and controls; expansion of operations and research and 
development, among many items. The Company expects that cash flow from 
operations, its cash, cash equivalents and short-term investments and funds 
available under its lines of credit will be sufficient to meet the Company's 
cash requirements for the next twelve months. Beyond the next twelve months, 
the Company may require additional equity or debt financing to address its 
working capital or capital equipment needs. Additionally, the Company may in 
the future pursue acquisitions of complementary product lines, technologies 
or businesses. Future acquisitions by the Company may result in potentially 
dilutive issuances of equity securities, the incurrence of debt and 
contingent liabilities and amortization expenses related to goodwill and 
other intangible assets, which could materially adversely affect any Company 
profitability. In addition, acquisitions involve numerous risks, including 
difficulties in the assimilation of the operations, technologies and products 
of the acquired companies; the diversion of management's attention from other 
business concerns; risks of entering markets in which the Company has no or 
limited direct prior experience; and the potential loss of key employees of 
the acquired company. In the event that such an acquisition does occur, there 
can be no assurance as to the effect thereof on the Company's business or 
operating results. Additionally, the Company is experiencing increased 
interest in its equipment leasing program. Continued success of this strategy 
may result in the further formation of significant long-term receivables and 
would require the use of substantial amounts of working capital. The 
formation of significant long-term receivables and the granting of extended 
customer payment terms exposes the Company to additional risks, including 
potentially higher customer concentration and higher potential operating 
expenses relating to customer defaults. To the extent that the Company's 
financial resources are insufficient to fund the Company's activities, 
additional funds will be required. There can be no assurance that additional 
financing will be available on reasonable terms or at all.


- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 31

<PAGE>

Consolidated Balance Sheets

<TABLE>
<CAPTION>
                                                                December 31,        December 31,
In thousands, except share amounts                                  1997                1996
<S>                                                             <C>                 <C>
Assets
Current assets:
   Cash and cash equivalents                                      $ 43,898            $ 47,771
   Short-term investments                                          120,451             119,638
   Accounts receivable, less allowance for doubtful accounts
     of $2,258 in 1997 and $1,151 in 1996                           45,947              39,845
   Inventories                                                      37,337              35,524
   Leases receivable--current portion                                2,408                 193
   Prepaid expenses and other current assets                         1,840                 655
   Deferred income taxes                                             5,142               8,439
                                                                ----------------------------------
Total current assets                                               257,023             252,065

Equipment and leasehold improvements, net                           22,285              19,242
Restricted investments                                               5,325               5,129
Leases receivable                                                   11,354                 425
Other assets                                                         4,014               3,911
                                                                ----------------------------------
Total assets                                                      $300,001            $280,772
                                                                ==================================

Liabilities and Stockholders' Equity
Current liabilities:
   Note payable                                                   $     94            $      -
   Accounts payable                                                 12,295               9,400
   Accrued expenses                                                 17,502              23,929
   Advance billings                                                    872                 646
   Income taxes payable                                              3,034               5,406
                                                                ----------------------------------
Total current liabilities                                           33,797              39,381

Deferred income taxes                                                2,103                 732
Other liabilities                                                      469                 712
Commitments and contingencies
Stockholders' equity:
   Preferred Stock, $.001 par value:
      2,000,000 shares authorized; none issued                           -                   -
   Common Stock, $.001 par value:
      30,000,000 shares authorized;
      issued and outstanding--20,786,288 at December 31, 1997
      and 20,310,443 at December 31, 1996                               21                  20
   Additional paid-in capital                                      170,200             164,288
   Net unrealized gains on investments                                 271                  65
   Retained earnings                                                93,140              75,574
                                                                ----------------------------------
Total stockholders' equity                                         263,632             239,947
                                                                ----------------------------------
Total liabilities and stockholders' equity                        $300,001            $280,772
                                                                ==================================
</TABLE>

See accompanying notes to consolidated financial statements.


- ------------------------------------------------------------------------------
Page 32                                                Ultratech Stepper, Inc.

<PAGE>

Consolidated Statements of Income

<TABLE>
<CAPTION>
                                                             Years Ended December 31,
                                                        ---------------------------------
In thousands, except per share amounts                    1997        1996        1995
<S>                                                     <C>         <C>         <C>

Net sales                                               $147,349    $193,508    $157,831
Cost of sales                                             69,671      88,615      75,543
                                                        ---------------------------------
Gross profit                                              77,678     104,893      82,288
Research, development and engineering                     26,431      27,220      22,655
Selling, general and administrative                       26,177      30,995      27,851
Acquired in-process research and development               3,619         -           -
Special charge relating to termination of
   Japan distributor                                       3,450         -           -
                                                        ---------------------------------
Operating income                                          18,001      46,678      31,782
Interest expense                                            (165)       (236)       (206)
Other income, net                                          7,258       6,265       4,594
                                                        ---------------------------------
Income before income taxes                                25,094      52,707      36,170
Income taxes                                               7,528      17,396      11,936
                                                        ---------------------------------
Net income                                              $ 17,566    $ 35,311    $ 24,234
                                                        ---------------------------------
Net income per share-basic                              $   0.85    $   1.76    $   1.32
Number of shares used in per share
   computations-basic                                     20,553      20,079      18,425

Net income per share-diluted                            $   0.81    $   1.66    $   1.20
Number of shares used in per share
  computations-diluted                                    21,681      21,271      20,154
                                                        ---------------------------------
</TABLE>

See accompanying notes to consolidated financial statements.

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 33

<PAGE>

Consolidated Statements of Cash Flow

<TABLE>
<CAPTION>

                                                                Years Ended December 31,
                                                         ---------------------------------------
In thousands                                                1997         1996          1995
<S>                                                       <C>          <C>           <C>
Cash flows from operating activities:
Net income                                                $ 17,566     $ 35,311      $ 24,234
Adjustments to reconcile net income to net 
  cash provided by operating activities:
    Depreciation and amortization                            7,234        6,060         3,848
    Loss on disposal of equipment                               93           43           261
    Deferred income taxes                                    4,566         (898)       (2,369)
    Write-off of acquired in-process
       research and development                              3,619          -             -
    Changes in operating assets and liabilities:
       Accounts receivable                                  (6,102)     (15,928)       (7,794)
       Inventories                                          (1,813)      (8,137)       (5,570)
       Prepaid expenses and other current assets            (1,185)         677          (911)
       Leases receivable-current portion                    (2,215)        (193)          -
       Leases receivable-long-term                         (10,929)        (425)          -
       Other assets                                           (874)      (1,184)       (1,961)
       Accounts payable                                      2,895       (3,525)        7,428
       Accrued expenses                                     (6,427)         712         9,782
       Advance billings                                        226       (3,425)        2,399
       Income taxes payable                                   (251)       3,738         5,917
       Other liabilities                                      (761)        (186)          320
                                                         ---------------------------------------
Net cash provided by operating activities                    5,642       12,640        35,584

Cash flows from investing activities:
Capital expenditures                                        (9,337)      (7,849)       (9,760)
Investments in securities                                 (681,316)    (593,545)     (896,010)
Proceeds from sales of investments                         165,192      266,593       396,993
Proceeds from maturing investments                         515,342      337,442       404,273
Purchase of certain assets of Lepton Inc.                   (3,101)         -             -
Segregation of restricted investments                         (175)        (170)       (4,996)
                                                         ---------------------------------------
Net cash provided by (used in) investing activities        (13,395)       2,471      (109,500)

Cash flows from financing activities:
Repayment of promisory note                                    -           (400)         (400)
Proceeds from issuance of short-term debt                       99        7,500         3,000
Repayment of short-term debt                                    (5)      (7,500)       (3,000)
Proceeds from issuance of Common Stock                       3,786        2,699        90,222
                                                         ---------------------------------------
Net cash provided by financing activities                    3,880        2,299        89,822
                                                         ---------------------------------------
NET INCREASE (DECREASE) IN CASH AND CASH EQUIVALENTS        (3,873)      17,410        15,906
CASH AND CASH EQUIVALENTS AT BEGINNING OF PERIOD            47,771       30,361        14,455
                                                         ---------------------------------------
CASH AND CASH EQUIVALENTS AT END OF PERIOD                $ 43,898     $ 47,771      $ 30,361
                                                         ---------------------------------------
Supplemental disclosures of cash flow information:
     Cash paid during the period for:
        Interest                                          $    185     $    238      $    187
        Income taxes                                         3,254       14,500         8,517
     Other non-cash changes
        Systems transferred from inventory to equipment
           and other assets                               $  4,208     $  2,384      $  3,570
                                                         ---------------------------------------
</TABLE>

See accompanying notes to consolidated financial statements.

- ------------------------------------------------------------------------------
Page 34                                                Ultratech Stepper, Inc.

<PAGE>

Notes to Consolidated Financial Statements


1. NATURE OF OPERATIONS

Ultratech Stepper, Inc. (the "Company") and its subsidiaries develop, market and
manufacture photolithography equipment for use in the integrated circuit
fabrication process; in the development and fabrication of photomasks for the
production of integrated circuits; in the fabrication of thin film heads for
high-capacity disk drives; and in the manufacture of micromachined components
that are used extensively in telecommunications, automotive and medical
applications. Principal markets for the Company's products include the U.S.,
Europe and Asia.


2. CONCENTRATION OF RISKS

Sales of the Company's systems depend, in significant part, upon the decision 
of a prospective customer to increase manufacturing capacity or to 
restructure current manufacturing facilities, either of which typically 
involves a significant commitment of capital. For this and other reasons, the 
Company's systems typically have a lengthy sales cycle during which the 
Company may expend substantial funds and management effort in securing a 
sale. Additionally, the markets for the Company's products are subject to 
rapid technological change, which requires the Company to respond with new 
products and enhanced versions of existing products. Lengthy sales cycles and 
rapid technological change subject the Company to a number of significant 
risks, including inventory obsolescence, significant after-sales support and 
fluctuations in operating results, which are difficult to estimate and over 
which the Company has little or no control. Sole-source and single-source 
suppliers provide critical components and services for the manufacture of the 
Company's products. The reliance on sole or limited groups of suppliers may 
subject the Company from time to time to quality, allocation and pricing 
constraints. For a further discussion of the Company's business and risk 
factors, please refer to the Company's Annual Report on Form 10-K.

Financial instruments that potentially subject the Company to concentrations 
of credit risk consist principally of cash equivalents, short-term 
investments, trade receivables and long-term customer financing. The Company 
places its cash equivalents, short-term investments and restricted 
investments with high credit-quality financial institutions. The Company 
invests its excess cash in commercial paper, readily marketable debt 
instruments and collateralized funds of U.S. and state government entities. 
The Company has established guidelines relative to credit ratings, 
diversification and maturities that seek to maintain safety and liquidity. A 
majority of the Company's trade receivables and lease receivables are derived 
from sales in various geographic areas, principally the U.S., Europe, Japan, 
South Korea, Taiwan and Southeast Asia, to large companies within the 
integrated circuit, thin film head, photomask and micromachining industries. 
The Company performs ongoing credit evaluations of its customers' financial 
condition and requires collateral, such as letters of credit and security 
agreements, whenever deemed necessary. The Company maintains an allowance for 
uncollectible accounts receivable based upon expected collectibility of all 
accounts receivable and leases receivable. The formation of significant 
long-term receivables and the granting of extended customer payment terms 
exposes the Company to additional risks, including potentially higher 
customer concentration and higher potential operating expenses relating to 
customer defaults.

3. SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

BASIS OF PRESENTATION   The accompanying financial statements include the 
accounts of the Company and its subsidiaries, all of which are wholly owned. 
Intercompany balances and transactions have been eliminated.

The preparation of the financial statements in conformity with generally 
accepted accounting principles requires management to make estimates and 
assumptions that affect the amounts reported in the financial statements and 
accompanying notes. Actual results could differ from those estimates.

CASH EQUIVALENTS   Cash equivalents consist of highly liquid investments with 
a maturity date at acquisition of three months or less. The carrying value of 
cash equivalents approximates fair value.

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 35

<PAGE>

Notes to Consolidated Financial Statements


INVESTMENTS   Management determines the appropriate classification of its 
investments at the time of purchase and re-evaluates the classification at 
each balance sheet date. All investments in the Company's portfolio are 
classified as "available for sale," in accordance with the provisions of the 
Financial Accounting Standards Board (FASB) Statement No. 115, "Accounting 
for Certain Investments in Debt and Equity Securities." Available-for-sale 
securities are stated at fair value, with the unrealized gains and losses, 
net of tax, reported in a separate component of stockholders' equity. 

The amortized cost of debt securities is adjusted for amortization of 
premiums and accretion of discounts to maturity. Such amortization, as well 
as interest, dividends, realized gains and losses and declines in value 
judged to be other than temporary are included in other income, net. The cost 
of securities sold is based on the specific identification method.

INVENTORIES   Inventories are stated at the lower of cost or market. Cost is 
determined using the first-in, first-out (FIFO) method.  Demonstration units, 
included in other assets, are stated at cost, less accumulated depreciation, 
and are depreciated over 36 months.

EQUIPMENT AND LEASEHOLD IMPROVEMENTS   Equipment and leasehold improvements 
are stated at cost less accumulated depreciation and amortization. Equipment 
is depreciated on a straight-line basis over the estimated useful lives 
(three to seven years). Leasehold improvements are amortized on a 
straight-line basis over the life of the related assets or the lease term, 
whichever is shorter.

DERIVATIVE FINANCIAL INSTRUMENTS   Off-balance-sheet transactions, consisting 
of forward currency contracts, have from time to time been utilized by the 
Company to hedge obligations denominated in foreign currencies. To date, 
these transactions have been immaterial to the consolidated operations of the 
Company.

REVENUE RECOGNITION   Sales of the Company's products are generally recorded 
upon shipment, which usually precedes final customer acceptance, provided 
that collection of the related receivable is probable. The Company also sells 
service contracts for which revenue is deferred and recognized ratably over 
the contract period.

From time to time, the Company leases its products to customers, typically as
sales-type leases. These leases generally have a five-year term.

WARRANTY   The Company generally warrants its products for a period of up to 12
months from the date of customer acceptance for material and labor to repair the
product; accordingly, a provision for the estimated cost of the warranty is
recorded at the time revenue is recognized.

RESEARCH, DEVELOPMENT AND ENGINEERING EXPENSES   The Company is actively 
engaged in basic technology and applied research programs designed to develop 
new products and product applications. In addition, substantial ongoing 
product and process improvement engineering and support programs relating to 
existing products are conducted within engineering departments and elsewhere. 
Research, development and engineering costs are charged to operations as 
incurred.

The Company has entered into various research and development arrangements 
with certain third parties to jointly develop new products and technology. 
Under such programs, the Company generally receives funding from the third 
parties over an extended period based on achieving certain milestones or 
based on a cost-sharing arrangement. Such funds are not anticipated to cover 
all the costs of the programs and are recorded as reductions to research, 
development and engineering expense based on the percentage of completion of 
each project. For the years ended 1997, 1996 and 1995, the Company recognized 
approximately $580,000, $2,688,000 and $1,590,000, respectively, in related 
funding. As of December 31, 1997, there were no amounts remaining to be 
funded on these contracts.


- ------------------------------------------------------------------------------
Page 36                                                Ultratech Stepper, Inc.

<PAGE>

Notes to Consolidated Financial Statements

ACQUIRED IN-PROCESS RESEARCH AND DEVELOPMENT   During the first quarter of 
1997, the Company completed the acquisition of the assets of Lepton Inc., a 
developer of electron beam lithography systems. As a result of this 
acquisition, the Company recognized a one-time pre-tax charge in the quarter 
ended March 31, 1997 for acquired in-process research and development expense 
of $3.6 million.

SPECIAL CHARGE RELATING TO TERMINATION OF JAPAN DISTRIBUTOR   In December 
1997, the Company terminated its relationship with its Japan distributor, 
Innotech Corporation. This resulted in a special charge of $3.5 million in 
the quarter ended December 31, 1997, related primarily to termination fees 
negotiated between the Company and Innotech.

FOREIGN CURRENCY ACCOUNTING   The U.S. dollar is the functional currency for 
all foreign operations. Foreign exchange gains and losses, which result from 
the process of remeasuring foreign currency financial statements into U.S. 
dollars or from transactions during the period, have been immaterial and are 
included in other income, net.

STOCK-BASED COMPENSATION   The Company has elected to follow Accounting 
Principles Board Opinion No. 25, "Accounting for Stock Issued to Employees" 
(APB 25), and related Interpretations in accounting for its employee stock 
options and stock purchase plan. Pro forma information regarding net income 
and net income per share is disclosed as required by the FASB's Statement No. 
123, "Accounting for Stock-Based Compensation" (FAS 123), which also requires 
that the information be determined as if the Company accounted for its 
stock-based compensation subsequent to December 31, 1994 under the fair value 
method of that Statement.

BASIC AND DILUTED NET INCOME PER SHARE   In February 1997, the FASB issued 
Statement No. 128, "Earnings per Share." Statement 128 replaced the 
calculation of primary and fully diluted net income per share with basic and 
diluted net income per share. Unlike primary net income per share, basic net 
income per share excludes any dilutive effects of options, warrants and 
convertible securities. Diluted net income per share is very similar to the 
previously reported fully diluted net income per share. All net income per 
share amounts for all periods have been presented, and where appropriate, 
restated to conform to the Statement 128 requirements.

The following sets forth the computation of basic and diluted net income per 
share:


<TABLE>
<CAPTION>
                                                              Years Ended December 31,
                                                       --------------------------------------
In thousands, except per share amounts                     1997         1996         1995
<S>                                                      <C>          <C>          <C>
Numerator:
  Net income                                             $ 17,566     $ 35,311     $ 24,234
Denominator:
  Denominator for basic net income per share               20,553       20,079       18,425
  Effect of dilutive employee stock options                 1,128        1,192        1,729
                                                       --------------------------------------
  Denominator for diluted net income per share             21,681       21,271       20,154
                                                       --------------------------------------
Net income per share--basic                              $   0.85     $   1.76    $    1.32
                                                       --------------------------------------
Net income per share--diluted                            $   0.81     $   1.66    $    1.20
                                                       --------------------------------------
</TABLE>

RECENTLY ISSUED ACCOUNTING PRONOUNCEMENTS   In June 1997, the FASB issued 
Statement No. 130, "Reporting Comprehensive Income," which establishes 
standards for the reporting and display of comprehensive income and its 
components in a full set of general-purpose financial statements, and 
Statement No. 131, "Disclosures About Segments of an Enterprise and Related 
Information," which establishes annual and interim reporting standards for a 
company's business segments and related disclosures about it's products, 
services, geographic areas and major customers. Both Statements No. 130 and 
No. 131 are effective for fiscal years beginning after December 15, 1997. The 
Company has not assessed the effect that these new standards will have on its 
consolidated financial statements and/or disclosures.

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 37

<PAGE>

4. INVESTMENTS

The Company classifies all of its investments as "available for sale," in
accordance with the provisions of FASB Statement No. 115, "Accounting for
Certain Investments in Debt and Equity Securities." Accordingly, the Company
states its investments at estimated fair value. Fair values are estimated based
on quoted market prices or pricing models using current market rates. The
Company deems all investments, except those restricted, to be available to meet
current working capital requirements.

The following is a summary of the Company's investments:

<TABLE>
<CAPTION>

                                                     December 31, 1997                        December 31, 1996
                                        ---------------------------------------    -------------------------------------
                                         Amortized      Gross        Estimated       Amortized     Gross       Estimated
                                                      Unrealized                                Unrealized
                                                      ----------                                ----------
<S>                                      <C>         <C>     <C>     <C>             <C>     <C>   <C>      <C>
Short-term investments, in thousands       Cost      Gains   Losses  Fair Value        Cost    Gains  Losses   Fair Value
U.S. Treasury securities 
     and obligations of
     U.S. government agencies           $ 16,744      $  9    $ 22    $ 16,731       $ 9,559    $ 11   $ 28    $  9,542
Obligations of states and 
     political subdivisions              106,459       311      16     106,754       107,208     221     83     107,346
U.S. corporate debt securities            29,943        93       9      30,027        36,273      12     30      36,255
                                        --------------------------------------------------------------------------------
                                        $153,146      $413     $47    $153,512      $153,040    $244   $141    $153,143
                                        --------------------------------------------------------------------------------

Restricted investments
U.S. Treasury securities
   and obligations of
   U.S. government agencies             $  3,606      $  7     $ -    $  3,613      $  5,131    $  -   $  5    $  5,126
Obligations of states and 
   political subdivisions                    -           -       -         -               3       -      -           3
U.S. corporate debt securities             1,712         -       -       1,712             -       -      -           -
                                        --------------------------------------------------------------------------------
                                        $  5,318      $  7     $ -    $  5,325      $  5,134    $  -   $  5    $  5,129
                                        --------------------------------------------------------------------------------
                                        $158,464      $420     $47    $158,837      $158,174    $244   $146    $158,272
                                        --------------------------------------------------------------------------------
</TABLE>

The following is a reconciliation of the Company's investments to the balance 
sheet classifications at December 31:

<TABLE>
<CAPTION>

In thousands                                 1997           1996
<S>                                      <C>            <C>
Cash equivalents                         $ 33,061       $ 33,505
Short-term investments                    120,451        119,638
Restricted investments                      5,325          5,129
                                        -------------------------
Investments, at estimated fair value     $158,837       $158,272
                                        -------------------------
</TABLE>

Gross realized gains and losses were not material for the years ended 
December 31, 1997 and 1996. The adjustments to net unrealized gains and 
(losses) on investments are included as a separate component of stockholders' 
equity and totaled $206,000 and ($156,000), net of related taxes, for the 
years ended December 31, 1997 and 1996, respectively. 


- ------------------------------------------------------------------------------
Page 36                                                Ultratech Stepper, Inc.

<PAGE>

The amortized cost and estimated fair value of the Company's investments at 
December 31, 1997, by contractual maturity, are shown below. Expected 
maturities will differ from contractual maturities because the issuers of the 
securities may have the right to prepay obligations without prepayment 
penalties.

<TABLE>
<CAPTION>

                                                  Amortized         Fair
In thousands                                         Cost           Value
<S>                                               <C>               <C>
Due in one year or less                           $105,894          $105,992
Due after one year through five years               52,570            52,845
                                               ------------------------------
                                                  $158,464          $158,837
                                               ------------------------------
</TABLE>

5. INVENTORIES

Inventories consist of the following at December 31:

<TABLE>
<CAPTION>
In thousands                                        1997               1996
<S>                                                 <C>                <C>
Raw materials                                       $ 20,297           $ 17,625
Work-in-process                                        9,739             11,971
Finished products                                      7,301              5,928
                                                   -----------------------------
                                                    $ 37,337           $ 35,524
                                                   -----------------------------
</TABLE>


6. EQUIPMENT AND LEASEHOLD IMPROVEMENTS

Equipment and leasehold improvements consist of the following at December 31:


<TABLE>
<CAPTION>

In thousands                                          1997              1996
<S>                                                   <C>               <C>
Machinery and equipment                               $ 18,739          $ 14,660
Leasehold improvements                                   2,877             1,701
Office furniture and equipment                          15,457            12,441
                                                     ---------------------------
                                                        37,073            28,802
Accumulated depreciation and amortization              (14,788)           (9,560)
                                                     ---------------------------
                                                      $ 22,285          $ 19,242
                                                     ---------------------------
</TABLE>

7. ACCRUED EXPENSES

Accrued expenses consist of the following at December 31:

<TABLE>
<CAPTION>

In thousands                                   1997                1996
<S>                                          <C>                 <C>
Salaries and benefits                        $  5,018            $  7,132
Warranty reserves                               5,871               9,424
Settlement/Japan distributor                    3,051                   -
Other                                           3,562               7,373
                                             ----------------------------
                                             $ 17,502            $ 23,929
                                             ----------------------------
</TABLE>

- ------------------------------------------------------------------------------
Ultratech Stepper, Inc.                                               Page 39

<PAGE>

Notes to Consolidated Financial Statements

8. CREDIT FACILITIES

The Company has credit facilities for borrowings in various currencies up to 
$4,000,000 on an unsecured basis with various banks. These agreements include 
facility fees, allow for borrowings at rates including the banks' prime 
reference rate, require compliance with certain financial covenants and 
restrict the Company's ability to pay cash dividends. A $3,000,000 credit 
facility expires in May 1998 and the remaining $1,000,000 credit facility 
expires in September 1998. At December 31, 1997 and 1996, there were $0.1 
million and $0 outstanding under these credit facilities, respectively.

9. STOCK-BASED COMPENSATION

1993 STOCK OPTION PLAN   Under the Company's 1993 Stock Option Plan, as 
amended, qualified employees, nonemployee Board members and consultants may 
receive options to purchase shares of Common Stock at 85% to 100% of fair 
value at certain specified dates. These options generally vest in equal 
monthly installments over a period of approximately four years, with a 
minimum vesting period of twelve months from grant date, and generally expire 
ten years from date of grant. The plan will terminate on the earlier of 
January 6, 2003, or the date on which all shares available for issuance under 
the Plan have been issued. The plan includes a provision to automatically 
increase the shares reserved for issuance by an amount equal to 1.4% of the 
total number of shares of Common Stock outstanding on the last trading day of 
the immediately preceding fiscal year, through the year 2000. Under the plan, 
approximately 883,000 and 739,000 options were available for issuance at 
December 31, 1997 and 1996, respectively.

A summary of the Company's stock option activity, and related information
follows:

<TABLE>
<CAPTION>

                                             1997                               1996                        1995
                                  -----------------------------   -----------------------------   -----------------------------
                                               Weighted-Average                Weighted-Average                Weighted-Average
                                  Options        Exercise Price   Options        Exercise Price   Options        Exercise Price
<S>                               <C>          <C>                <C>          <C>                <C>          <C>
Outstanding at January 1          2,350,208         $12.34        2,295,735       $ 9.95          2,367,408         $ 4.40
Granted                           1,017,300         $20.37          787,349       $17.92            475,900         $30.23
Exercised                          (379,730)        $ 6.09         (421,329)      $ 3.45           (493,263)        $ 2.94
Forfeited                          (427,526)        $21.49         (311,547)      $20.86            (54,310)        $ 9.20
                                  ----------------------------------------------------------------------------------------------
Outstanding at December 31        2,560,252         $14.94        2,350,208       $12.34          2,295,735         $ 9.95
                                  ----------------------------------------------------------------------------------------------
</TABLE>

At December 31, 1997, options outstanding were as follows:

<TABLE>
<CAPTION>
                                             Options Outstanding                             Options Exercisable
                             ------------------------------------------------------     ---------------------------------
                                             Weighted-Average
Range of                                Remaining Contractual      Weighted-Average                      Weighted-Average
Exercise Prices              Options             Life (Years)        Exercise Price     Options            Exercise Price
<S>                      <C>                   <C>                 <C>                <C>                <C>
$ 0.050-$14.499              817,717                     5.41                $ 2.50     755,796                    $ 1.75
$14.500-$20.749            1,244,038                     8.80                $17.45     220,468                    $17.56
$20.750-$33.625              498,497                     8.38                $29.04     177,108                    $30.09
- --------------------------------------------------------------------------------------------------------------------------
$ 0.050-$33.625            2,560,252                     7.64                $14.94   1,153,371                    $ 9.12
</TABLE>


EMPLOYEE STOCK PURCHASE PLAN   In August 1995, the Company established an 
Employee Stock Purchase Plan. The plan permits virtually all employees to 
purchase Common Stock through payroll deductions at 85% of the lower of the 
fair market value of the Common Stock on the first or last day of the 
offering period. The offering periods are twelve months. Under the Plan, 
approximately 268,000 shares and 114,000 shares of Common Stock were reserved 
and available for issuance at December 31, 1997 and 1996, respectively.


- ------------------------------------------------------------------------------
Page 40                                                Ultratech Stepper, Inc.
<PAGE>

Notes to Consolidated Financial Statements

ACCOUNTING FOR STOCK-BASED COMPENSATION   The Company has elected to follow APB
25 and related interpretations in accounting for employee stock-based
compensation because, as discussed below, the alternative fair value accounting
provided for under FAS 123 requires use of option valuation models that were not
developed for use in valuing employee stock options. Under APB 25, because the
exercise price of the Company's employee stock options equals the market price
of the underlying stock on the date of grant, no compensation expense is
recognized.

Pro forma information regarding net income and net income per share is required
by FAS 123, which also requires that the information be determined as if the
Company had accounted for its employee stock options granted subsequent to
December 31, 1994 under the fair value method of that Statement. The fair value
for these options was estimated at the date of grant using a Black-Scholes
option pricing model with the following weighted-average assumptions: 

<TABLE>
<CAPTION>
                                                   1997                1996
<S>                                            <C>                 <C>
Expected life (in years)                            3.5                3.5
Risk-free interest rate                             5.6%               6.1%
Volatility factor                                   0.62               0.50
Dividend yield                                      0.0%               0.0%

</TABLE>

The weighted-average expected life of the option is computed assuming a 
multiple-point approach with annual vesting periods. The weighted-average 
fair value per share of all options granted during 1997 and 1996 was $9.74 
and $7.32, respectively. 

The Black-Scholes option valuation model was developed for use in estimating 
the fair value of traded options that have no vesting restrictions and are 
fully transferable. In addition, option valuation models require the input of 
highly subjective assumptions including the expected stock price volatility. 
Because the Company's employee stock options have characteristics 
significantly different from those of traded options, and because changes in 
the subjective input assumptions can materially affect the fair value 
estimate, in management's opinion, the existing models do not necessarily 
provide a reliable single measure of the fair value of its employee stock 
options.

For purposes of pro forma disclosures, the estimated fair value of options 
granted is amortized to expense over the options' four-year vesting period. 
Option grants are divided into annual vesting periods, resulting in the 
recognition of approximately 50% of the total compensation expense of the 
grant in the first year. Additionally, the potential tax benefit associated 
with the issuance of incentive stock options is not reflected until realized 
upon the disqualifying disposition of the shares. The Company's pro forma 
information follows:


<TABLE>
<CAPTION>

In thousands, except per share amounts             1997         1996       1995
<S>                                              <C>           <C>        <C>
Pro forma net income                            $14,453        $31,985    $22,886
Pro forma net income per share-diluted          $  0.67         $ 1.52     $ 1.14
</TABLE>

Because FAS 123 is applicable only to options granted subsequent to December 
31, 1994, its pro forma effect will not be fully reflected until 1998. 

_____________________________________________________________________________
Ultratech Stepper, Inc.                                               Page 41

<PAGE>

Notes to Consolidated Financial Statements

10. STOCKHOLDERS' EQUITY

The following table summarizes stockholders' equity activity:

<TABLE>
<CAPTION>

                                                                    Stockholders' Equity
                                        -----------------------------------------------------------------------------------------
                                         Common Stock           Additional        Net Unrealized                       Total
                                         ---------------          Paid-in         Gains (Losses)     Retained      Stockholders'
In thousands                             Shares   Amount          Capital         on Investments       Earnings        Equity
<S>                                      <C>      <C>           <C>               <C>                <C>             <C>

Balance at January 1, 1995               16,550    $17          $ 64,416          $(435)             $ 16,029        $ 80,027
Sale of Common Stock pursuant to
  offering, net of offering expense
  of $5,056                               2,760      3            88,770             -                    -            88,773
Net issuance of Common Stock
  under stock option plan                   492      -             1,449             -                    -             1,449
Income tax benefit from stock option
  transactions                               -       -             4,506             -                    -             4,506
Net unrealized gain on investments,
  net of tax effect                          -       -               -              656                   -               656
Amortization of deferred compensation        -       -                13             -                    -                13
Net income                                   -       -               -               -                 24,234          24,234
                                        -----------------------------------------------------------------------------------------
Balance at December 31, 1995             19,802    $20          $159,154           $221              $ 40,263        $199,658
                                        -----------------------------------------------------------------------------------------
Net issuance of Common Stock under
  stock option plan and employee
  stock purchase plan                       508      -             2,700             -                    -             2,700
Income tax benefit from stock option
  and stock purchase plan transactions       -       -             2,420             -                    -             2,420
Net unrealized loss on investments,
  net of tax effect                          -       -                -            (156)                  -              (156)
Amortization of deferred compensation        -       -                14             -                    -                14
Net income                                   -       -                -              -                 35,311          35,311
                                        -----------------------------------------------------------------------------------------
Balance at December 31, 1996             20,310    $20          $164,288           $ 65              $ 75,574        $239,947
                                        -----------------------------------------------------------------------------------------
Net issuance of Common Stock under
  stock option plan and employee stock
  purchase plan                             476      1             3,785             -                    -             3,786
Income tax benefit from stock option
  and stock purchase plan transactions       -       -             2,121             -                    -             2,121
Net unrealized gain on investments,
  net of tax effect                          -       -                -             206                   -               206
Amortization of deferred compensation        -       -                 6             -                    -                 6
Net income                                   -       -                -              -                 17,566          17,566
                                        -----------------------------------------------------------------------------------------
Balance at December 31, 1997             20,786    $21          $170,200           $271              $ 93,140        $263,632
                                        -----------------------------------------------------------------------------------------
</TABLE>

SHAREHOLDER RIGHTS PLAN   In January 1997, the Board approved the adoption of 
a Shareholder Rights Plan ("Rights Plan"). Among other things, the Rights 
Plan provides that each Right will be distributed as a dividend at the rate 
of one Preferred Share Purchase Right on each outstanding share of the 
Company's Common Stock held by stockholders of record as of the close of 
business on February 24, 1997. The rights expire on February 9, 2007.

The Rights will be exercisable only if a person or group acquires 15% or more 
of the Company's Common Stock or announces a tender offer the consummation of 
which would result in ownership by a person or group of 15% or more of the 
Company's Common Stock. Each Right will entitle stockholders to buy one 
one-hundredth of a share of a new series of Junior Participating Preferred 
Stock at an exercise price of $145.00 upon certain events.

The Rights are redeemable, in whole but not in part, at the option of the 
Board of Directors at $.01 per Right, at any time within 10 days of the date 
they become exercisable and in certain other circumstances and will not 
become exercisable in certain instances where a transaction is approved by 
the Company's Board of Directors. The Rights will not prevent a takeover of 
the Company, but should encourage anyone seeking to acquire the Company to 
negotiate with the Company's Board of Directors.

Shares reserved for issuance under the Plan were 350,000 at December 31, 1997.

_______________________________________________________________________________
Page 42                                                 Ultratech Stepper, Inc.

<PAGE>

Notes to Consolidated Financial Statements

11. EMPLOYEE BENEFIT PLANS

EMPLOYEE BONUS PLANS   The Company currently sponsors a profit sharing plan 
and an executive incentive bonus plan that distribute employee awards based 
on the achievement of predetermined operating income targets. Employee awards 
under these various employee bonus plans, including awards deferred from 
prior years, were $447,000, $1,497,000 and $2,087,000 for 1997, 1996 and 
1995, respectively.

EMPLOYEE SAVINGS AND RETIREMENT PLAN   The Company currently sponsors a 
401(k) employee salary deferral plan that allows voluntary contributions by 
all full-time employees of from 1% to 20% of their pretax earnings. Company 
contributions will be made only if certain predetermined operating income 
targets are achieved. The Company has recognized expense of $0, $797,000 and 
$898,000 relating to this benefit plan for 1997, 1996 and 1995, respectively.

12. INCOME TAXES

The domestic and foreign components of income before income taxes are as
follows:

<TABLE>
<CAPTION>

                                                         YEARS ENDED DECEMBER 31,
                                             --------------------------------------
In thousands                                     1997           1996          1995
<S>                                           <C>             <C>          <C>
Domestic                                      $ 23,326        $ 48,058     $ 31,546
Foreign                                          1,768           4,649        4,624
                                             --------------------------------------
Income before income taxes                    $ 25,094        $ 52,707     $ 36,170
                                             --------------------------------------
</TABLE>

Income taxes included the following:

<TABLE>
<CAPTION>

                                                         YEARS ENDED DECEMBER 31,
                                             --------------------------------------
In thousands                                     1997           1996          1995
<S>                                           <C>             <C>          <C>

Federal:
     Current                                  $  2,142        $ 14,513      $ 11,136
     Deferred                                    3,925            (847)       (2,355)
                                             ---------------------------------------
                                                 6,067          13,666         8,781 

State:
     Current                                       365           2,301         1,764
     Deferred                                      644             (31)         (172)
                                             ---------------------------------------
                                                 1,009           2,270         1,592

Foreign:
     Current                                       455           1,480         1,542
     Deferred                                       (3)            (20)           21
                                             ---------------------------------------
                                                   452           1,460         1,563
                                             ---------------------------------------
Total income tax provision                    $  7,528        $ 17,396      $ 11,936
                                             ---------------------------------------
</TABLE>

The tax benefit associated with stock option and employee stock purchase plan 
transactions reduced taxes currently payable by $2,121,000, $2,420,000 and 
$4,506,000 for 1997, 1996 and 1995, respectively. Such benefits are credited 
to stockholders' equity when realized.


_____________________________________________________________________________
Ultratech Stepper, Inc.                                               Page 43

<PAGE>


Notes to Consolidated Financial Statements

Income taxes reconcile to the amount computed by applying the U.S. statutory 
rate to income before income taxes as follows:

<TABLE>
<CAPTION>
                                                       Years Ended December 31,
                                                 ----------------------------------------
In thousands                                       1997          1996         1995
<S>                                                <C>           <C>          <C>

Tax computed at statutory rate                     $  8,783      $ 18,447     $ 12,660
State income taxes (net of federal benefit)             656         1,476        1,035
Foreign sales corporation                               (90)       (1,179)        (671)
Tax-exempt income                                    (1,747)       (1,640)      (1,095)
Credits for research and development                   (612)         (693)        (328)
Other, net                                              538           985          335
                                                 ----------------------------------------
Income tax provision                               $  7,528      $ 17,396     $ 11,936
                                                 ----------------------------------------
</TABLE>


Deferred income taxes reflect the net tax effect of temporary differences 
between the carrying amounts of assets and liabilities for financial 
reporting purposes and the amounts used for income tax purposes.

Significant components of deferred income tax assets and liabilities are as 
follows:

<TABLE>
<CAPTION>


In thousands                                       1997                1996
<S>                                            <C>                 <C>
Deferred tax assets:
    State taxes                                $    325            $  1,071
    Warranty reserves                             2,141               3,317
    Accrued vacation                                590                 615
    Inventory valuation                           3,869               6,251
    Other                                         2,136               1,432
Deferred tax liabilities:
    Deferred income                              (3,919)             (4,247)
    Lease revenue                                (1,489)                 -
    Other                                          (614)               (732)
                                               -------------------------------
Net deferred tax assets                        $  3,039            $  7,707
                                               -------------------------------
</TABLE>

13. MAJOR CUSTOMERS AND GEOGRAPHIC INFORMATION

The Company's products are manufactured in the United States and are sold 
worldwide. The Company markets internationally through domestic and 
foreign-based sales and service operations and independent sales 
organizations. The Company operates in one business segment, which is the 
manufacture and distribution of photolithography equipment to manufacturers 
of integrated circuits, photomasks for the production of integrated circuits, 
thin film heads and micromachined components. 

In 1997, sales to two customers accounted for 14% and 10% of the Company's 
net sales. In 1996, sales to two customers accounted for 17% and 12% of the 
Company's net sales. In 1995, sales to one customer accounted for 12% of the 
Company's net sales.

_______________________________________________________________________________
Page 44                                                 Ultratech Stepper, Inc.

<PAGE>

Notes to Consolidated Financial Statements

The following table summarizes the Company's operations by geographic region.


<TABLE>
<CAPTION>
                                                                                    Adjustment
                                                                                       and
In thousands                                United States      Asia      Europe    Eliminations   Consolidated
<S>                                         <C>              <C>         <C>        <C>           <C>
1997
Sales to unaffiliated domestic customers     $ 98,966        $   -       $    -       $    -        $ 98,966
Sales to unaffiliated foreign customers        33,938         1,200       13,245           -          48,383
Transfers between geographic locations          9,558         5,961          256       (15,775)          -
                                           ---------------------------------------------------------------------
Total net sales                              $142,462        $7,161      $13,501      $(15,775)     $147,349
                                           ---------------------------------------------------------------------
Operating income                             $ 16,171        $  319      $ 1,632      $   (121)     $ 18,001
                                           ---------------------------------------------------------------------
Identifiable assets                          $291,854        $2,292      $ 5,855      $     -       $300,001
                                           ---------------------------------------------------------------------

1996
Sales to unaffiliated domestic customers     $ 91,370        $   -       $   -        $     -       $ 91,370
Sales to unaffiliated foreign customers        76,242         1,593       24,303            -        102,138
Transfers between geographic locations         19,191         5,711          857        (25,759)         -
                                           ---------------------------------------------------------------------
Total net sales                              $186,803        $7,304      $25,160      $ (25,759)    $193,508
                                           ---------------------------------------------------------------------
Operating income                             $ 41,865        $  297      $ 4,396      $     120     $ 46,678
                                           ---------------------------------------------------------------------
Identifiable assets                          $269,088        $1,995      $ 9,689      $     -       $280,772
                                           ---------------------------------------------------------------------

1995
Sales to unaffiliated domestic customers     $ 70,617        $  -        $   -        $     -       $ 70,617
Sales to unaffiliated foreign customers        57,333         1,014       28,867            -         87,214
Transfers between geographic locations         22,479         4,575          301        (27,355)         -
                                           ---------------------------------------------------------------------
Total net sales                              $150,429       $ 5,589      $29,168      $ (27,355)    $157,831
                                           ---------------------------------------------------------------------
Operating income                             $ 27,451       $   254      $ 4,319      $    (242)    $ 31,782
                                           ---------------------------------------------------------------------
Identifiable assets                          $233,030       $ 1,858      $10,540      $     -       $245,428
                                           ---------------------------------------------------------------------
</TABLE>

Sales and transfers between geographic areas are made at transfer prices that 
approximate arms-length distributor pricing between the domestic and 
international operations.

The Company believes that the severe currency and equity market fluctuations 
that have been experienced recently by many of the Asian markets has 
resulted, and may continue to result, in delays, deferrals and cancellations 
of orders of the Company's products, particularly in the short-term, which 
will have a material adverse effect on the Company's business, financial 
condition and results of operations. The Company's operations in foreign 
countries are not currently subject to significant exchange rate 
fluctuations, principally because sales contracts for the Company's systems 
are generally denominated in U.S. dollars. However, international sales 
expose the Company to a number of additional risk factors, including 
fluctuations in the value of local currencies relative to the U.S. dollar, 
which, in turn, impact the relative cost of ownership of the Company's 
products.

_____________________________________________________________________________
Ultratech Stepper, Inc.                                               Page 45

<PAGE>

Notes to Consolidated Financial Statements

14. Commitments

The Company leases its facilities, undeveloped land and certain equipment 
under operating leases. Under certain of its leasing arrangements, the 
Company is subject to escalation charges and also retains certain renewal and 
purchase options. As of December 31, 1997, the minimum annual rental 
commitments are as follows:

<TABLE>
<CAPTION>

<S>                                        <C>
1998                                       $ 3,942,000 
1999                                         3,352,000 
2000                                         2,772,000 
2001                                         1,370,000 
2002                                         1,213,000 
Thereafter                                   2,353,000
                                           -----------
                                           $15,002,000
                                           =========== 
</TABLE>

Rent expense was approximately $3,401,000, $2,841,000 and $2,721,000, for the 
years ended December 31, 1997, 1996 and 1995, respectively.

The Company presently leases 6.4 acres of land located in San Jose, 
California. This lease expires in November 1998. As part of this transaction, 
the Company has segregated $5.3 million of its securities as collateral for 
certain obligations of the lessor pertaining to this land. These securities 
are restricted as to withdrawal, and are managed, subject to certain 
limitations, by the Company under its investment policy.











_______________________________________________________________________________
Page 46                                                 Ultratech Stepper, Inc.

<PAGE>


Report of Ernst & Young LLP, Independent Auditors



TO THE BOARD OF DIRECTORS AND STOCKHOLDERS OF ULTRATECH STEPPER, INC.

We have audited the accompanying consolidated balance sheets of Ultratech 
Stepper, Inc. and subsidiaries as of December 31, 1997 and 1996, and the 
related consolidated statements of income and cash flows for each of the 
three years in the period ended December 31, 1997. These financial statements 
are the responsibility of the Company's management. Our responsibility is to 
express an opinion on these financial statements based on our audits.

We conducted our audits in accordance with generally accepted auditing 
standards. Those standards require that we plan and perform the audit to 
obtain reasonable assurance about whether the financial statements are free 
of material misstatement. An audit includes examining, on a test basis, 
evidence supporting the amounts and disclosures in the financial statements. 
An audit also includes assessing the accounting principles used and 
significant estimates made by management, as well as evaluating the overall 
financial statement presentation. We believe that our audits provide a 
reasonable basis for our opinion.

In our opinion, the consolidated financial statements referred to above 
present fairly, in all material respects, the consolidated financial position 
of Ultratech Stepper, Inc. and subsidiaries at December 31, 1997 and 1996, 
and the consolidated results of their operations and their cash flows for 
each of the three years in the period ended December 31, 1997, in conformity 
with generally accepted accounting principles.


                                              /s/ ERNST & YOUNG LLP
                                              ----------------------------

San Jose, California
January 23, 1998











_____________________________________________________________________________
Ultratech Stepper, Inc.                                               Page 47

<PAGE>

Investor Information


Investor Information
Exchange: Nasdaq National Market 
Symbol: UTEK
Closing price (12/31/97): $19.875
Dividend yield: Nil
Market capitalization (millions) at 12/31/97: $413
Industry: Semiconductor capital equipment
Market segments: integrated circuits, photomasks, thin film heads and 
micromachined components

As of March 10, 1998, the Company had approximately 36,300 beneficial 
stockholders, including 793 stockholders of record.

Price Range of Common Stock

The following table sets forth, for periods indicated, the range of high and 
low sale prices of the stock as reported by the National Association of 
Securities Dealers, Inc.:

<TABLE>
<CAPTION>

                                                             1997                       1996                    
                                                ---------------------------     -------------------
Fiscal Quarter                                     High                 Low     High            Low
<S>                                             <C>                 <C>       <C>            <C>
First Quarter                                   $30.625             $20.500   $31.750        $15.875
Second Quarter                                   25.375              17.000    28.250         16.625
Third Quarter                                    34.375              22.500    21.500         14.000
Fourth Quarter                                   34.500              18.500    27.750         16.125

</TABLE>

The following graph sets forth, for periods indicated, the range of stock 
price/earnings ratios, based on high, low and closing stock prices:

<TABLE>
<CAPTION>

[Graph]
Price/Earnings Performance

Quarter          High        Low        Close
- -------          ----        ---        -----
<S>              <C>         <C>        <C>
Q1/96             27         13          15
Q2/96             20         12          14
Q3/96             14          9          12
Q4/96             17         10          17
Q1/97             18         12          15
Q2/97             17         12          16
Q3/97             26         17          25
Q4/97             31         16          18

</TABLE>


Dividend Information

The Company has not paid cash dividends on its Common Stock since inception, 
and its Board of Directors presently plans to reinvest the Company's earnings 
in its business. Accordingly, it is anticipated that no cash dividends will 
be paid to holders of Common Stock in the foreseeable future. 

Inquiries Concerning the Company

Ultratech Stepper welcomes inquiries from its stockholders and other 
interested investors. For additional copies of this report, the Form 10-K or 
other information, please contact:

Ultratech Stepper, Inc.
Investor Relations
3050 Zanker Road
San Jose, CA 95134
Phone: (408) 321-8835

Background on the Company and its products, financial information and our 
online annual report, as well as other useful information, which may be of 
interest to investors, can be found at the Company's home page on the world 
wide web at www.ultratech.com.

Transfer Agent and Registrar:

Questions regarding misplaced stock certificates, change of address or the 
consideration of accounts should be addressed to the Company's transfer agent:

The First National Bank of Boston
c/o Boston EquiServe LP
P.O. Box 644
Boston, MA 02102


Annual Meeting

The Ultratech Stepper, Inc. annual meeting of stockholders will be held at 
10:00 a.m. on Wednesday, June 3, 1998, at the Beverly Heritage Hotel, 
Milpitas, California.

Independent Auditors
Ernst & Young LLP
San Jose, California


General Counsel
Brobeck, Phleger & Harrison LLP
Palo Alto, California


_______________________________________________________________________________
Page 48                                                 Ultratech Stepper, Inc.





<PAGE>

                                                                   EXHIBIT 21

                    SUBSIDIARIES OF ULTRATECH STEPPER, INC.

The following is a list of Ultratech Stepper Inc.'s subsidiaries including their
states of incorporation as of March 10, 1998:


SUBSIDIARIES                                STATE AND  COUNTRY OF INCORPORATION
Ultratech Stepper International, Inc.            State of Delaware, USA
Ultratech Stepper UK Limited                     United Kingdom
Ultratech Stepper Foreign Sales Corp.            Barbados
Ultratech Kabushiki Kaisha                       Japan
Ultratech Capital, Inc.                          State of Delaware, USA
UltraBeam Lithography, Inc.                      State of Delaware, USA
Ultratech Stepper (Thailand) Co. LTD.            Thailand
Verdant Technologies, Inc.                       State of Delaware, USA
U.S. Advanced Lithography LLC                    State of Delaware, USA



<PAGE>
                                                                      EXHIBIT 23
 
               CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS
 
    We consent to the incorporation by reference in this Annual Report (Form
10-K) of Ultratech Stepper, Inc. of our report dated January 23, 1998, included
in the 1997 Annual Report to Stockholders of Ultratech Stepper, Inc.
 
    Our audits included the financial statement schedule of Ultratech Stepper,
Inc. listed in Item 14(a). This schedule is the responsibility of the Company's
management. Our responsibility is to express an opinion based on our audits. In
our opinion, the financial statement schedule referred to above, when considered
in relation to the basic financial statements taken as a whole, presents fairly
in all material respects the information set forth therein.
 
    We also consent to the incorporation by reference in the Registration
Statement (Form S-8 No. 33-92572) pertaining to the 1993 Stock Option/Stock
Issuance Plan and the 1995 Employee Purchase Plan of Ultratech Stepper, Inc. of
our report dated January 23, 1998, with respect to the consolidated financial
statements incorporated herein by reference, and our report included in the
preceding paragraph with respect to the financial statement schedule included in
this Annual Report (Form 10-K) of Ultratech Stepper, Inc.
 
                                          /s/ ERNST & YOUNG LLP
                                          San Jose, California
                                          March 27, 1998

<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM ULTRATECH
STEPPER INC., FORM 10-K AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO
SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
       
<S>                             <C>
<PERIOD-TYPE>                   YEAR
<FISCAL-YEAR-END>                          DEC-31-1997
<PERIOD-START>                             JAN-01-1997
<PERIOD-END>                               DEC-31-1997
<CASH>                                          43,898
<SECURITIES>                                   120,451
<RECEIVABLES>                                   48,205
<ALLOWANCES>                                     2,258
<INVENTORY>                                     37,337
<CURRENT-ASSETS>                               257,023
<PP&E>                                          37,073
<DEPRECIATION>                                  14,788
<TOTAL-ASSETS>                                 300,001
<CURRENT-LIABILITIES>                           33,797
<BONDS>                                              0
                                0
                                          0
<COMMON>                                            21
<OTHER-SE>                                     263,611
<TOTAL-LIABILITY-AND-EQUITY>                   300,001
<SALES>                                        136,677
<TOTAL-REVENUES>                               147,349
<CGS>                                           62,995
<TOTAL-COSTS>                                   69,671
<OTHER-EXPENSES>                                30,050
<LOSS-PROVISION>                                 2,205
<INTEREST-EXPENSE>                                 165
<INCOME-PRETAX>                                 25,094
<INCOME-TAX>                                     7,528
<INCOME-CONTINUING>                             17,566
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                    17,566
<EPS-PRIMARY>                                     0.85
<EPS-DILUTED>                                     0.81
        

</TABLE>

<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM ULTRATECH
STEPPER INC., FORM 10-Q  AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH
FINANCIAL STATEMENTS.
</LEGEND>
<RESTATED> 
<MULTIPLIER> 1,000
       
<S>                             <C>                     <C>                     <C>
<PERIOD-TYPE>                   3-MOS                   3-MOS                   3-MOS
<FISCAL-YEAR-END>                          DEC-31-1997             DEC-31-1997             DEC-31-1997
<PERIOD-START>                             JAN-01-1997             APR-01-1997             JUL-01-1997
<PERIOD-END>                               MAR-31-1997             JUN-30-1997             SEP-30-1997
<CASH>                                          30,156                  48,294                  35,625
<SECURITIES>                                   136,080                 121,838                 128,703
<RECEIVABLES>                                   42,770                  42,553                  43,412
<ALLOWANCES>                                     1,176                   1,706                   1,706
<INVENTORY>                                     32,580                  30,757                  32,014
<CURRENT-ASSETS>                               251,939                 255,174                 253,293
<PP&E>                                          28,828                  30,460                  32,982
<DEPRECIATION>                                  10,769                  11,878                  13,369
<TOTAL-ASSETS>                                 282,605                 290,168                 296,332
<CURRENT-LIABILITIES>                           36,569                  37,542                  34,519
<BONDS>                                              0                       0                       0
                                0                       0                       0
                                          0                       0                       0
<COMMON>                                            20                      20                      20
<OTHER-SE>                                     244,789                 251,487                 260,736
<TOTAL-LIABILITY-AND-EQUITY>                   282,605                 290,168                 296,332
<SALES>                                         36,251                  35,617                  33,827
<TOTAL-REVENUES>                                38,733                  38,054                  36,752
<CGS>                                           16,008                  16,507                  15,850
<TOTAL-COSTS>                                   17,700                  18,075                  17,524
<OTHER-EXPENSES>                                 9,839                   6,793                   7,092
<LOSS-PROVISION>                                    25                     980                       0
<INTEREST-EXPENSE>                                  42                      43                      58
<INCOME-PRETAX>                                  6,570                   8,299                   7,510
<INCOME-TAX>                                     2,037                   2,572                   2,105
<INCOME-CONTINUING>                              4,533                   5,727                   5,405
<DISCONTINUED>                                       0                       0                       0
<EXTRAORDINARY>                                      0                       0                       0
<CHANGES>                                            0                       0                       0
<NET-INCOME>                                     4,533                   5,727                   5,405
<EPS-PRIMARY>                                     0.22                    0.28                    0.26
<EPS-DILUTED>                                     0.21                    0.27                    0.25
        

</TABLE>

<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<RESTATED> 
<MULTIPLIER> 1,000
       
<S>                             <C>                     <C>                     <C>                     <C>
<C>
<PERIOD-TYPE>                   3-MOS                   3-MOS                   3-MOS                   YEAR
YEAR
<FISCAL-YEAR-END>                          DEC-31-1996             DEC-31-1996             DEC-31-1996             DEC-31-1996
             DEC-31-1995
<PERIOD-START>                             JAN-01-1996             APR-01-1996             JUL-01-1996             JAN-01-1996
             JAN-01-1995
<PERIOD-END>                               MAR-31-1996             JUN-30-1996             SEP-30-1996             DEC-31-1996
             DEC-31-1995
<CASH>                                          21,867                  28,185                  40,508                  47,771
                  30,361
<SECURITIES>                                   138,757                 124,125                 117,509                 119,638
                 130,995
<RECEIVABLES>                                   34,340                  45,501                  48,891                  40,996
                  24,530
<ALLOWANCES>                                       859                   1,137                   1,224                   1,151
                     613
<INVENTORY>                                     31,665                  34,994                  35,708                  35,524
                  27,387
<CURRENT-ASSETS>                               235,131                 241,930                 252,962                 252,065
                 220,875
<PP&E>                                          23,948                  26,975                  27,527                  28,802
                  21,231
<DEPRECIATION>                                   5,904                   7,077                   8,330                   9,560
                   4,879
<TOTAL-ASSETS>                                 261,486                 271,093                 281,795                 280,772
                 245,428
<CURRENT-LIABILITIES>                           51,724                  50,914                  51,175                  39,381
                  44,701
<BONDS>                                              0                       0                       0                       0
                       0
                                0                       0                       0                       0
                       0
                                          0                       0                       0                       0
                       0
<COMMON>                                            20                      20                      20                      20
                      20
<OTHER-SE>                                     208,818                 219,310                 229,723                 239,927
                 199,638
<TOTAL-LIABILITY-AND-EQUITY>                   261,486                 271,093                 281,795                 280,772
                 245,428
<SALES>                                         49,568                  49,639                  44,462                 185,058
                 151,124
<TOTAL-REVENUES>                                51,713                  51,793                  46,502                 193,508
                 157,831
<CGS>                                           22,552                  22,297                  19,463                  82,425
                  70,668
<TOTAL-COSTS>                                   24,059                  23,691                  21,159                  88,615
                  75,543
<OTHER-EXPENSES>                                 7,393                   7,307                   6,421                  27,220
                  22,655
<LOSS-PROVISION>                                   247                     278                      87                   1,225
                     371
<INTEREST-EXPENSE>                                  64                      67                      61                     236
                     206
<INCOME-PRETAX>                                 13,093                  14,054                  13,082                  52,707
                  36,170
<INCOME-TAX>                                     4,452                   4,778                   4,247                  17,396
                  11,936
<INCOME-CONTINUING>                              8,641                   9,276                   8,835                  35,311
                  24,234
<DISCONTINUED>                                       0                       0                       0                       0
                       0
<EXTRAORDINARY>                                      0                       0                       0                       0
                       0
<CHANGES>                                            0                       0                       0                       0
                       0
<NET-INCOME>                                     8,641                   9,276                   8,835                  35,311
                  24,234
<EPS-PRIMARY>                                     0.43                    0.46                    0.44                    1.76
                    1.32
<EPS-DILUTED>                                     0.41                    0.44                    0.42                    1.66
                    1.20
        

</TABLE>


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