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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM ULTRATECH
STEPPER INC., FORM 10-Q AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH
FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 9-MOS
<FISCAL-YEAR-END> DEC-31-2000
<PERIOD-START> JUL-01-2000
<PERIOD-END> SEP-30-2000
<CASH> 59,052
<SECURITIES> 93,225
<RECEIVABLES> 20,506
<ALLOWANCES> 279
<INVENTORY> 30,130
<CURRENT-ASSETS> 206,479
<PP&E> 59,716
<DEPRECIATION> 32,884
<TOTAL-ASSETS> 247,305
<CURRENT-LIABILITIES> 61,626
<BONDS> 0
0
0
<COMMON> 21
<OTHER-SE> 185,410
<TOTAL-LIABILITY-AND-EQUITY> 247,305
<SALES> 92,805
<TOTAL-REVENUES> 105,644
<CGS> 57,412
<TOTAL-COSTS> 66,928
<OTHER-EXPENSES> 19,822
<LOSS-PROVISION> (510)
<INTEREST-EXPENSE> 211
<INCOME-PRETAX> 6,659
<INCOME-TAX> 2,433
<INCOME-CONTINUING> 4,226
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> (18,883)
<NET-INCOME> (14,657)
<EPS-BASIC> (0.69)
<EPS-DILUTED> (0.69)
</TABLE>
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