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EXHIBIT 23.1
Consent of Ernst & Young LLP, Independent Auditors
We consent to the incorporation by reference in the Registration Statement on
Form S-8 pertaining to the Supplemental Stock Option/Stock Issuance Plan of
Ultratech Stepper, Inc of our report dated January 25, 2000 with respect to the
consolidated financial statements of Ultratech Stepper, Inc. incorporated by
reference in its Annual Report on Form 10-K for the year ended December 31,
1999, and the related financial statement schedule included therein, filed with
the Securities and Exchange Commission.
/s/ Ernst & Young LLP
ERNST & YOUNG LLP
San Jose, California
August 11, 2000
