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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM ULTRATECH
STEPPER INC., FORM 10-Q AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH
FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 6-MOS
<FISCAL-YEAR-END> DEC-31-2000
<PERIOD-START> APR-01-2000
<PERIOD-END> JUN-30-2000
<CASH> 37,557
<SECURITIES> 95,925
<RECEIVABLES> 13,388
<ALLOWANCES> 235
<INVENTORY> 30,294
<CURRENT-ASSETS> 182,134
<PP&E> 53,189
<DEPRECIATION> 31,195
<TOTAL-ASSETS> 222,416
<CURRENT-LIABILITIES> 54,385
<BONDS> 0
0
0
<COMMON> 21
<OTHER-SE> 167,748
<TOTAL-LIABILITY-AND-EQUITY> 222,416
<SALES> 55,292
<TOTAL-REVENUES> 63,428
<CGS> 35,578
<TOTAL-COSTS> 41,732
<OTHER-EXPENSES> 13,158
<LOSS-PROVISION> 600
<INTEREST-EXPENSE> 142
<INCOME-PRETAX> (10,845)
<INCOME-TAX> 0
<INCOME-CONTINUING> (10,845)
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> (18,883)
<NET-INCOME> (29,728)
<EPS-BASIC> (1.40)
<EPS-DILUTED> (1.40)
</TABLE>
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