ADVANCED TECHNOLOGY MATERIALS INC /DE/
10-K, 1997-03-28
GENERAL INDUSTRIAL MACHINERY & EQUIPMENT, NEC
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-K

              [X] ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF
                      THE SECURITIES EXCHANGE ACT OF 1934

                  For the fiscal year ended December 31, 1996

            [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF
                      THE SECURITIES EXCHANGE ACT OF 1934

            For the transition period from __________ to __________

                        Commission file Number: 0-22756

                       Advanced Technology Materials, Inc.
                       -----------------------------------
             (Exact name of registrant as specified in its charter)

          Delaware                                     06-1236302
          --------                                     ----------
(State or other jurisdiction of          (I.R.S. Employer Identification No.)
 incorporation or organization)

7 Commerce Drive, Danbury, CT                            06810
- -----------------------------                            -----
(Address of principal executive offices)               (Zip Code)

                                  203-794-1100
              (Registrant's telephone number, including area code)

Securities registered pursuant to Section 12(b) of the Act:
                                                          Name of each exchange
Title of each class                                         on which registered
- -------------------                                         -------------------
     None                                                      Not Applicable

Securities registered pursuant to Section 12(g) of the Act:

                          Common Stock, $.01 par value
                          ----------------------------
                             (Title of each class)

     Indicate  by check mark  whether the  registrant  (1) has filed all reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. Yes x No __

     Indicate by check mark if disclosure of delinquent  filers pursuant to Item
405 of Regulation S-K is not contained herein, and will not be contained, to the
best of registrant's  knowledge,  in definitive proxy or information  statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K [ x ]

     The aggregate  market value of the voting stock held by  non-affiliates  of
the registrant at February 28, 1997, was  approximately  $158,750,510,  based on
the closing price of $19.00 per share.

     The number of shares  outstanding  of the  registrant's  common stock as of
February 28, 1997 was 8,793,345.
<PAGE>

<PAGE>
<TABLE>
<CAPTION>

                       ADVANCED TECHNOLOGY MATERIALS, INC.
                           Annual Report on Form 10-K
                   For the Fiscal Year Ended December 31, 1996

                                TABLE OF CONTENTS

<S>             <C>                                                        <C>

Part I                                                                     Page
- ------                                                                     ----
Item 1.         Business..................................................    3

Item 2.         Properties................................................   15

Item 3.         Legal Proceedings.........................................   15

Item 4.         Submission of Matters to a Vote of Security Holders.......   15

Part II
- -------
Item 5.         Market for Registrant's Common Equity and Related
                Stockholder Matters.......................................   16

Item 6.         Selected Financial Data...................................   17

Item 7.         Management's Discussion and Analysis of Financial
                Condition and Results of Operations.......................   18

Item 8.         Financial Statements and Supplementary Data...............   22

Item 9.         Changes In and Disagreements with Accountants on
                Accounting and Financial Disclosure.......................   22

Part III
- --------
Item 10.        Directors and Executive Officers of the Registrant........   23

Item 11.        Executive Compensation....................................   25

Item 12.        Security Ownership of Certain Beneficial Owners
                and Management............................................   28

Item 13.        Certain Relationships and Related Transactions............   29


Part IV
- -------
Item 14.        Exhibits, Financial Statement Schedule, and Reports
                on Form 8-K...............................................   30

Index to Consolidated Financial Statements and Financial Statement Schedule F-1


Signatures..................................................................S-1

</TABLE>
                                       2
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<PAGE>
                                     PART I


Item 1.   Business.

     Advanced Technology Materials, Inc. ("ATMI" or the "Company") is a supplier
of  enabling  materials,   products,  and  technologies  for  the  semiconductor
industry. The Company's products are primarily based on proprietary and patented
chemical vapor deposition ("CVD")  technologies used for semiconductor thin film
manufacture.

     ATMI's strategy is to use these  technologies to develop  products for high
growth niche markets of the semiconductor industry and to sequentially introduce
these products into these high growth markets with industry collaborators. Using
its phased commercial  introduction strategy,  ATMI has been able to develop its
CVD  core   technologies   and   establish   businesses   to   support   further
commercialization of its new products.

     ATMI's   enabling   products   and   technologies    include   point-of-use
environmental  equipment,  next-generation  thin  film  materials  and  delivery
systems,  and high performance  semiconductor  devices based on wide bandgap and
III-V materials.

     Semiconductor Industry Background

     The semiconductor  industry  achieved  worldwide sales in 1995 of over $140
billion.  While industry  revenues  decreased in 1996, the Company  believes the
decrease  was  primarily  a result of a decline  in memory  chip  prices,  not a
reduction in the number of  semiconductor  devices  produced  and shipped.  Even
during  this  downturn,  the  industry  is adding  substantial  capacity to meet
increasing  demand  for a  multitude  of end uses  from  personal  computers  to
wireless communications.

     From a wafer  substrate,  usually  made of  silicon,  a  complex  series of
process steps creates  semiconductor  devices.  Important  process steps include
deposition,  patterning,  and  etching.  During  deposition,  several  layers of
conducting,  semi-conducting,  or  insulating  thin films are formed on a wafer.
Controlling  the deposition of these films is vital to the ultimate  performance
of an individual device.

     There are two principal  methods of film  deposition.  One,  physical vapor
deposition ("PVD") is now primarily used for depositing conductive metal layers.
The other, CVD, is used for depositing  semiconducting and insulating thin films
as well as some conductors.  In the CVD process,  wafers are usually placed in a
sophisticated  reaction chamber, ready for the injection of a specially designed
gas or  vaporized  liquid.  Simultaneously,  energy  is  added  to  the  reactor
resulting in thin film deposition on the surface of the wafer.

     The CVD process offers the following production advantages:
     *  conformality--the  ability  to coat  evenly,  especially  in holes and
           trenches designed into the device
     * purity
     * ability to coat over large areas
     * cost efficiency
                                       3
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     Thin film deposition  technology is migrating to CVD for many films because
of these  advantages.  This  migration  increased CVD equipment  sales from $500
million in 1989 to over $1.5 billion in 1996.  It also created  rapid growth for
suppliers  of CVD  equipment  such as Applied  Materials,  Tokyo  Electron,  and
Novellus Systems.

     ATMI's focus on developing  high  performance and  ferroelectric  thin film
fabrication  revolves around its core CVD technology.  From that core technology
development,  ATMI introduces related commercial  technologies  serving existing
silicon device  fabrication  needs.  First is gas abatement  technologies  using
ATMI's unique  adsorbent  materials.  These adsorbents allow for nearly complete
adsorption of the reactive gases flowing from a CVD reactor  exhaust.  ATMI also
sells  new  commercial  CVD  raw  materials  that  enable  the   manufacture  of
semiconducting thin films for use in next-generation silicon devices.

     ATMI Business Strategy

     ATMI was founded in 1986 to develop and commercialize products based on its
core CVD technology. The Company has the following key strategies:

     Core Technology Development

     Proprietary  and  patented  CVD  thin  film  technology   underlies  ATMI's
development and  commercialization of new products.  Its CVD technology is based
on a  multidisciplinary  approach  that  draws  upon the  experience  of  ATMI's
personnel in the areas of chemistry,  physics,  materials science and electrical
engineering.  ATMI dedicates  significant resources to maintaining its expertise
in CVD technology and protecting its intellectual property.

     Focus on High Growth Markets

     ATMI targets  semiconductor  market  segments with growth rates expected to
exceed the industry's  overall growth rate. For example,  ATMI believes that the
market for  point-of-use  abatement  equipment is growing at a rate in excess of
the overall growth rate of the semiconductor  equipment  industry.  In addition,
the Company  focuses on segments  where  technology-driven  paradigm  shifts are
occurring  or are enabled by the use of ATMI's core  technologies.  For example,
the Company believes semiconductor manufacturers are moving strongly towards the
use of new thin film materials, driven by device performance considerations.

     Phased Product Commercialization

     ATMI  has  a  history  of  commercializing  products  using  its  core  CVD
technology.  The Company's  strategy is to focus initially on products with less
technological  complexity and capital risk and in later phases focus on products
with a higher degree of sophistication and financial risk. In its first phase of
commercialization,  the Company  introduced new products through its subsidiary,
ATMI EcoSys Corporation ("EcoSys") (and its predecessor, Novapure), to abate CVD
effluent  streams.  EcoSys  is now a  leader  in the  manufacture  and  sale  of
point-of-use  environmental  equipment  to the  semiconductor  industry.  In its
second phase of  commercialization,  ATMI  introduced  several new materials and
delivery   systems  through  its  NovaMOS   division  for  use  in  the  silicon
semiconductor industry. In the third phase of commercialization, ATMI intends to
use its core technology to manufacture  and sell devices based on  ferroelectric
and  other  high  performance   semiconductor  thin  films.   Certain  of  these
third-phase  products are now in development and are expected by ATMI to account
for a significant portion of its long-term growth.
                                       4
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     Strategic Alliances

     ATMI has formed  many  strategic  alliances,  including  joint  development
programs and collaborative  marketing efforts, to accelerate the introduction of
its products into markets that have manufacturing and/or distribution  barriers.
As it grows,  ATMI  expects to  continue  to  accelerate  product  introductions
through  acquisitions and collaborations  with customers,  vendors and companies
with significant capabilities outside of ATMI's current markets.

     Externally Funded Research and Development

     Developing  new thin film  processes and  materials for complex  electronic
devices is very  expensive.  By entering  into research  contracts  with federal
government  agencies,  and with selected  private industry  collaborators,  ATMI
offsets a  significant  portion of its  research  and  development  costs.  ATMI
primarily solicits research contracts that provide  opportunities to enhance its
core  technology  base,  or promote  the  commercial  introduction  of  targeted
products.

     ATMI Businesses

     ATMI  operates  three  primary  business  units:   EcoSys,   NovaMOS,   and
Epitronics.

     EcoSys, a wholly-owned subsidiary,  manufactures and services environmental
equipment for the  semiconductor  industry.  ATMI believes EcoSys is a leader in
the rapidly growing market for point-of-use abatement equipment.

     ATMI's NovaMOS division  manufactures  and sells CVD raw materials  (source
reagents) used to manufacture  semiconducting  thin films. ATMI believes NovaMOS
is a leading  provider of source  reagents for  next-generation  silicon  device
manufacture.

     ATMI's Epitronics division, develops, manufactures,  distributes, and sells
advanced high performance  substrates and thin films for the  optoelectronic and
wireless communications markets.

           EcoSys: Point of Use Semiconductor Environmental Equipment

     EcoSys  Market  Background
     Manufacturing   semiconductors  involves  many  processes  with  thin  film
deposition  steps that use toxic or hazardous  materials.  These  materials were
once abated through large systems  servicing  multiple process effluent streams.
Because of the many thin film processes  used, the industry is migrating  toward
dedicated  point-of-use  environmental  equipment  for  individual  reactors and
processes.

     Demand for  environmental  equipment  reflects the  dramatic  growth in CVD
processing.  Only  about a quarter  of the  original  materials  entering  a CVD
reactor end up deposited as a thin film.  The rest,  combined with  by-products,
becomes the effluent  stream  requiring  abatement  that must meet  increasingly
strict environmental, safety, and health regulations.

     Whole  plant  environmental   systems  become  inefficient  with  multiple,
different effluent streams. As process variations grow in the industry,  so does
the need for  point-of-use  environmental  equipment.  The Company  believes the
market for this type of point-of-use equipment exceeds $150 million per year and
that the current growth rate exceeds that of the semiconductor equipment market.
                                       5
<PAGE>
     EcoSys Business  Background
     Currently ATMI's primary commercial business,  generating about half of the
Company's  consolidated  revenues,  is EcoSys,  which  manufactures,  sells, and
services semiconductor environmental equipment.

     ATMI  first  entered  this  market  in 1989  with the  introduction  of its
Novapure(r)  point-of-use  dry chemical  scrubber.  This product was  originally
designed under contract to the Environmental Protection Agency ("EPA"). In 1991,
this  product  and  several  others  resulting  from early  stage  research  and
development  efforts at ATMI were contributed to Novapure,  a joint venture with
Millipore.  In 1994,  Novapure was dissolved,  with ATMI retaining rights to the
effluent  treatment  product line. Also in 1994, ATMI acquired Vector  Technical
Group,  Inc.  ("Vector"),  a manufacturer of liquid and combustion  point-of-use
semiconductor  environmental  equipment, and merged it with its Novapure line of
products to form EcoSys.

     In 1995,  ATMI  acquired the Guardian  Systems  product line of  combustion
point-of-use  semiconductor  environmental  equipment  to  broaden  its  product
offerings. ATMI believes EcoSys is the only company in the world offering all of
the key technologies for effluent gas scrubbing to the  semiconductor  industry:
dry chemical,  liquid, flame oxidation and catalytic  oxidation.  As a result of
this broad product line,  ATMI believes  EcoSys is a global market leader in the
manufacture and sale of point-of-use semiconductor effluent abatement equipment.
ATMI's  strategy is to  maximize  EcoSys'  market  share  through the  continued
development  and  acquisition of new  semiconductor  environmental  products and
services.   The  Company   believes   that  this  full  line  of   semiconductor
environmental  products,  coupled with a comprehensive  service  strategy,  will
allow for continued market penetration by its EcoSys business.

     Products
     EcoSys   provides  three  major  product  lines.   These  products   reduce
consumption,  offer new  recycling  techniques,  and  allow new waste  treatment
methods.  Typical  selling prices for these  products range between  $20,000 and
$100,000 per unit.

     Dry  Chemical  Scrubbers
     Novapure(r)  dry  chemical  scrubbers  adsorb  and  concentrate   hazardous
effluent up to 20,000 times that of  conventional  effluent  treatment  methods.
ATMI believes that EcoSys, through its unique and patented adsorption materials,
is a  market  leader  for  point-of-use  semiconductor  effluent  dry  scrubbing
throughout the world.

     Liquid  Scrubbers
     Vector  Technology(r)  liquid  scrubbers  are designed  for cost  effective
removal of acidic and high particulate  bearing gases commonly used in the wafer
fabrication process.  Vector scrubbers recirculate  scrubbing water,  minimizing
overall  water use,  and are  highly  effective  in  removing  high  particulate
effluent.

     Oxidation Scrubbers
     Guardian(r)  active oxidation  scrubbers treat combustible  materials.  The
Guardian  product  line,  acquired at the end of 1995,  is an industry  standard
designed  for  low  cost  of  ownership.   Next-generation  systems  operate  on
inexpensive methane fuel while achieving exceptional removal efficiencies. These
combustion   systems  also  abate   certain   global   warming   gases  such  as
perfluorinated  carbon  compounds  (PFCs),  at high  efficiency  with  near zero
nitrous oxide generation.

     EcoSys  offers  other  developmental  environmental,   safety,  and  health
products to the semiconductor industry, including:
                                       6
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     Catalytic Oxidizers
     ReCAT(tm)  catalytic  oxidation  scrubbers  use  proprietary  catalysts  to
destroy volatile organic compounds ("VOCs"). VOCs come from the solvents used in
applying  photoresists and other organic materials during chip manufacture.  The
ReCAT  product  line  adopts  the  EcoSys   point-of-use   approach  to  organic
destruction, replacing the large plant-scale oxidizer systems most semiconductor
companies  use.  It uses a  fraction  of the  energy  required  by  conventional
systems, and has the potential to create a true point-of-use  effluent treatment
device.

     Emergency Release Scrubbers
     ATMI is marketing and continuing to develop effluent  treatment systems for
the  capture  of  semiconductor  process  gases in  emergency  situations.  Such
situations  might arise at the point of  delivery of a gas to a reactor  through
gas cylinder rupture or similar catastrophic event.

     Vent Gas Scrubbers
     Cylinders of hazardous  gases are typically  used for the delivery of gases
to  reactors.  Changing  these  cylinders  causes  small  amounts  of  hazardous
materials to be vented.  EcoSys has  developed a vent gas scrubber  based on its
dry scrubber  technology for use in such  applications.  EcoSys is collaborating
with Air Products  Corporation in the  development  and current  distribution of
this product.

     Recycling
     EcoSys is  investigating  the potential for recycling the materials used in
thin film  deposition  processes  in the belief  that  recycling  is  ultimately
preferred  over  destructive  abatement.  PFCs, as an example,  are used in some
wafer  cleaning  and  etching  processes.  They are under  strict  environmental
controls and  production  cutbacks,  because  they are  suspected to deplete the
ozone layer.  With Praxair  Corporation,  EcoSys has  developed a PFC  recycling
system that captures the gas and  repurifies it for subsequent  reuse.  In 1996,
the first unit was installed at a test site.

     Total Effluent Abatement Management
     EcoSys has  expanded  its  product  and  service  offerings  in response to
semiconductor  companies'  trend  towards  wanting their  abatement  supplier to
provide a full range of abatement  equipment and provide on-going  management of
their total  effluent  abatement  needs.  EcoSys has invested in  organizational
infrastructure  to provide this  capability  and began to receive  contracts for
this service in 1996.

           NovaMOS-Next-Generation CVD Materials and Delivery Systems

     NovaMOS Market Background
     As  semiconductor  device  capabilities  in  memory,  logic and speed  have
expanded exponentially,  circuit dimensions have correspondingly  decreased. The
Company believes that further  reductions will require a change in the materials
used for the many functional  thin films required to store,  transmit and switch
electricity  in the complex  circuitry of  semiconductor  devices.  For example,
while existing memory and other very large scale  integrated  ("VLSI")  circuits
may  be  fabricated  using  standard  silicon  dioxide   capacitor  thin  films,
deficiencies  in the electrical  properties of ultra-thin  silicon  dioxide will
limit its use in the extremely small dimensions of next-generation,  ultra large
scale  integrated  ("ULSI")  devices.  Alternate  ("next-generation")  capacitor
materials, including tantalum oxide and barium titanate, are expected to be used
in the fabrication of ULSI circuits,  e.g. 256 Mb and 1 Gb dynamic random access
memory chips ("DRAMs"). As these new materials are adopted, the Company believes
that a strategy of collaborative  development with a total systems approach will
allow for  significant  penetration  into the $350  million  overall  market for
semiconductor thin film precursors.
                                       7
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     These  next-generation  materials will be manufactured  primarily using CVD
processes.  Because many of the raw  materials for these new thin films will not
be available in gaseous form,  the Company  believes that a market is developing
for  liquid  chemical  precursors  (specialty  chemicals)  that  allow  for  the
manufacture of  next-generation  thin films, as well as for equipment  (delivery
systems) that convert liquids to gases before entry into a CVD reactor.  CVD raw
materials are  consumables,  and demand for such materials  generally tracks the
number of  silicon  wafers  that are used in  semiconductor  device  manufacture
("wafer starts"),  while demand for CVD equipment generally tracks investment in
new plants.

     NovaMOS Business Background
     ATMI formed NovaMOS in February 1992 to serve markets for CVD semiconductor
thin film  manufacture.  NovaMOS' two primary  product lines are liquid chemical
precursors and delivery systems.

     In August 1992, ATMI entered into an agreement with IBM, Texas  Instruments
and Micron Technology (the "Collaborating  Group") to develop advanced thin film
capacitor   materials  and  CVD  process   technology   delivery  equipment  for
next-generation memory devices. This agreement focused on developing CVD process
technology  to  fabricate  ferroelectric  thin films,  such as barium  strontium
titanate,  for high performance  memory devices.  Barium strontium  titanate can
store over 30 times more electrical charge than  conventional thin films.  Using
this  material  should  significantly  reduce the  manufacturing  complexity  of
advanced memory devices.  In April 1993, the Advanced  Research  Projects Agency
("ARPA")  awarded  a $5  million  contract  for the  development  of  thin  film
materials  technology to the Collaborating Group, with ATMI as prime contractor.
The total cost of the program is approximately $15 million,  approximately  half
of which will be borne by the  Collaborating  Group.  In February  1994,  Varian
Associates joined the Collaborating Group, providing CVD manufacturing hardware.

     ATMI's  ferroelectric  thin film technology has also expanded to non-barium
strontium  titanate  materials  that have  broad  application  in a  variety  of
applications  ranging from non-volatile  memory devices to wireless  components.
This in turn has led ATMI to expand  its  device  development  effort to include
these materials in the belief that these particular market segments may prove to
be an attractive device market opportunity for the Company.

     Products
     NovaMOS generates  approximately  one-third of ATMI's consolidated revenues
with  approximately  half of NovaMOS  revenues  coming from product sales.  This
division  offers a bundled  product line of  materials,  equipment,  and process
experience  which  represents  a total  solution to the  controlled  delivery of
liquid precursors to CVD reactors.

     Safe Delivery Systems
     Historically,  semiconductor process gases have only been available in high
pressure  cylinders  that can create an  immediate  danger  over a large area if
inadvertently  released.  ATMI's Safe Delivery System ("SDS")  reduces  cylinder
pressures below atmospheric levels. This allows controllable,  on-demand release
of certain  semiconductor  process  gases.  ATMI has a strategic  alliance  with
Matheson  Gas Products  ("Matheson"),  a subsidiary  of Nippon  Sanso,  begun in
January 1994, and renewed with amended  provisions in 1996. Under a license from
ATMI, Matheson markets and distributes the SDS product to specific semiconductor
niche process applications.

     CVD Materials
     ATMI develops  thin film  precursors  for  semiconductor  devices.  NovaMOS
manufactures  and sells source  reagents  allowing CVD  fabrication  of advanced
materials,  including titanium nitride,  platinum,  copper, tantalum oxide, lead
zirconate titanate,  bismuth strontium tantalate,  and barium strontium titanate
thin films.  The Company  believes  these films will have broad  application  in
advanced  semiconductor  devices.  NovaMOS  EpiGrade(r)  source reagents sell at
prices ranging from $2 to $200 per gram.
                                       8
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     Liquid Delivery Systems
     NovaMOS  manufactures  and sells its proprietary LDS and Sparta(tm)  Liquid
Delivery  Systems.  These vaporize liquid  precursors  before injection into CVD
reactors.  The liquid delivery systems' principal  advantage is their ability to
deliver   multiple   materials   as   well   as   handling   thermally-sensitive
next-generation  materials with minimal  decomposition.  They are typically used
for both  conventional  material  thin film  fabrication  and advanced  material
deposition.  NovaMOS is a supplier to the  advanced  dielectric,  ferroelectric,
barrier layer,  and conductor thin film markets of the  semiconductor  industry.
The liquid delivery systems sell at prices ranging from $35,000 to $200,000.


              Epitronics - Advanced Wafers and Thin Film Deposition

     Epitronics Market Background
     Demand  for  increased  performance  from  semiconductor  devices  and  the
proliferation  of  optoelectronic  devices  are  leading  designers  and process
engineers to consider  building  electronic  circuits and discrete  devices from
alternative  semiconductors  to  silicon.  Advances in  semiconductor  materials
fabrication  technologies  are promoting device  development  based on materials
such as the III-V semiconductors  (including gallium arsenide, indium phosphide)
and the wide bandgap semiconductors such as silicon carbide and gallium nitride.

     The III-V  semiconductors  are finding  increasing  use in three  different
markets: in wireless  communication  devices where high frequency performance is
critical; in optoelectronic  devices where the electronic structure of the III-V
semiconductors allows energy efficient light generation;  and in solar cells for
satellite applications where efficient generation of electricity is critical.

     The wide bandgap  semiconductors  offer potential  advantages in two areas;
both silicon  carbide and gallium  nitride-based  devices may have advantages in
high power or high  temperature  operation while gallium  nitride-based  devices
permit  efficient  generation of short wavelength light for use in blue LEDs and
in blue laser diodes.

     Epitronics Business Background
     Through its Epitronics division, ATMI is manufacturing and selling advanced
semiconductor substrates and epitaxial wafers. It is also establishing alliances
and selectively developing devices for emerging market opportunities.

     Commercial  introduction  of wide  bandgap  semiconductor  devices has been
limited to date by several technological barriers, including the availability of
single  crystal  substrates  (wafers).  The  fabrication  of fully operable high
performance  semiconductor  devices,  requires an appropriate wafer as a base to
grow suitable  thin film.  The most  appropriate  substrate has the same crystal
structure as the desired thin film. For silicon  carbide,  ATMI has  proprietary
technology to  manufacture  single  crystal  silicon  carbide  substrates and is
developing technology for single crystal gallium nitride substrates.  Epitronics
has both silicon carbide and gallium nitride  epitaxial thin film technology and
has developed and continues to develop thin film fabrication technology that can
be employed in other  developmental high technology  products,  e. g., displays.
ATMI  recognizes  that it may be  important  to develop  or  acquire  additional
technologies  to meet the demand for high  performance  devices in its  targeted
market areas.

     In  December,  1995,  ATMI  acquired  Epitronics  Corporation,  a  Phoenix,
Arizona-based  manufacturer of III-V  semiconductor  thin films for the wireless
and  optoelectronics  markets.  ATMI  integrated  the  operations  of Epitronics
Corporation with its Diamond Electronics  Division in 1996, under the recognized
Epitronics name. Epitronics III-V semiconductor  manufacturing is in Phoenix and
its wide bandgap semiconductor manufacturing and R&D facilities are in Danbury.
                                       9
<PAGE>
     Epitronics Business Strategy

     Epitronics  specializes in advanced compound  semiconductors and focuses on
materials.  Its core  technology  is chemical  vapor  deposition,  the growth of
epitaxial thin films (epi) on  semiconductor  wafers with  precisely  controlled
structural  and  electronic  properties.  Epitronics  focuses on  materials  for
rapidly growing markets in  optoelectronics,  wireless  communications and power
electronics and provides  materials and device  fabrication  processes for III-V
compound  semiconductors  (gallium  arsenide,  indium  phosphide)  and the  wide
bandgap semiconductors (silicon carbide, gallium nitride).  Epitronics' business
strategy  is to build a business  and  technology  base in the  materials  while
incubating  and  subsequently   launching   value-added   device  businesses  on
proprietary technology.

     The Phoenix  facility is dedicated to the  production of III-V epi products
that are finding  increasing  use in  wireless  communications,  satellites  and
optoelectronics  for data and  telecommunication  market  segments.  There is an
increasing demand for III-V epi wafers in particular for heterojunction  bipolar
transistors (HBTs) for use in power amplifiers.

     The  Danbury   facility   focuses  on  the   development  of  wide  bandgap
semiconductor  materials  (substrates  and epi)  including  silicon  carbide and
gallium nitride.  Wide bandgap  semiconductors  are expected to find use in high
power applications such as motor control, high temperature  applications such as
automotive  electronics,  and in high power high frequency  applications such as
ground  based  radar and  communication  stations.  The R&D group  continues  to
support cathode design and manufacturing by Candescent Technologies  Corporation
who is developing a field emission display or Thin CRT.

     Products
     Current Products
     Epitronics  currently  manufactures III-V epitaxial wafers in Phoenix,  AZ.
III-V epi  products  are  finding  increasing  use in  wireless  communications,
satellites,  and optoelectronics for data and telecommunication market segments.
In  particular,   there  is  an  increased  demand  for  III-V  epi  wafers  for
heterojunction   bipolar   transistors  (HBTs)  for  use  in  power  amplifiers.
Epitronics  markets its  epitaxial  services  and sells  product of the service,
epitaxial  wafers,  directly to industry and government  customers  according to
their  design  specifications.  In  Danbury,  Epitronics  manufactures  one-  to
two-inch  diameter  silicon carbide wafers.  It is expanding  capacity to ensure
internal and external supplies.  The Company believes that these substrate sales
will promote additional  collaborations,  addressing technology  development and
commercial product  introduction  issues associated with future  optoelectronic,
sensor, and power device products.

     Epitronics  is a  distributor  of SIMOX  (Separation  by IMplanted  OXygen)
wafers  for  Nippon  Steel  Corporation,  Japan and  specialty  wafers for Wafer
Technology  (Milton  Keynes,  UK). These  distributed  materials  complement the
Epitronics  manufactured  product line and leverage the development of the sales
and  marketing  organization  required to execute the  customer  service  driven
marketing  plan.  NSC  SIMOX  wafers  are used for  fabricating  high  speed and
radiation-hard  circuits.  Specialty III-V wafers from Wafer Technology  include
Indium Phosphide based materials for optical fiber-based communications, gallium
arsenide  for  optoelectronic   devices,  and  indium  antimonide  for  infrared
detectors.

     Technology Development
     In addition to process improvement that the Company believes will allow for
greater market  penetration for its III-V  epitaxial  wafers and silicon carbide
substrates,  Epitronics  is focusing  its R&D efforts on thin film  products for
optoelectronics  including blue solid state devices and novel cathode  materials
for a thin CRT.
                                       10
<PAGE>
     Epitronics is developing substrate and thin film technology for solid-state
blue light emitting diodes and lasers.  Blue LEDs will be primarily used in full
color  displays  while blue lasers are  valuable  for  increasing  optical  data
storage  capabilities  and in full color  printers.  Gallium  nitride  substrate
technology  under  development by Epitronics and others may be essential to high
yield  LED  manufacturing  processes  and to  demonstrating  long life time blue
lasers. Epitronics is collaborating with Hewlett-Packard,  Xerox, SDL, Inc., and
others to  develop  substrate  technology  for  commodity  blue  lasers,  and is
developing  proprietary  device designs to enable penetration of specialty laser
markets. Epitronics is the preferred high performance materials supplier for the
Blue Band Consortium which is developing blue lasers for improved data storage.

     Epitronics  provides thin film  technology  for cold cathodes under a joint
development  program  to  a  strategic  alliance  with  Candescent  Technologies
Corporation ("CTC"), formerly called Silicon Video Corporation. Traditional CRTs
use a single,  hot cathode (its source of electrons) placed far from the screen.
In a field  emission  display  ("FED"),  multiple  cathodes  replace  the single
cathode,  giving  many  electron  sources  for each  pixel.  Unique  thin  films
fabricated with Epitronics high performance  materials enhance uniform low power
electron emission. Because image uniformity and power consumption are critically
dependent on cathode materials and design,  Epitronics materials are well suited
for inclusion in cold cathodes for FEDs. These cold cathodes enable  full-color,
flat panel displays with  brightness and  resolution  equivalent to CRTs,  hence
thin CRTs.

     Under  its  agreement  with  ATMI,  CTC has an  exclusive  license  to ATMI
technology for FEDs,  and ATMI has license to certain CTC technology  outside of
displays.  CTC will  manufacture  and  distribute  the thin CRTs. As part of the
alliance,  ATMI purchased $1,000,000 of CTC's convertible  preferred stock. ATMI
and CTC receive  significant direct support from the federal government for cold
cathode technology development.


     Customers, Sales, and Marketing

     ATMI sells and  distributes  its  products  worldwide,  both  directly  and
through  manufacturers'  representatives.  The  Company  also  seeks  to  create
strategic  alliances  that allow maximum  global market  penetration  at minimal
cost.

     Many of ATMI's customers have relationships with more than one division, or
are acting as collaborators on ATMI's development  programs.  A number of ATMI's
key customers are listed below:

Advanced Micro Devices         Hyundai Electronics          Samsung Electronics
Atmel                          IBM                          SGS Thomson
Digital Equipment Corp.        Intel                        Siemens
GEC Plessey Semiconductor      Lucent Technologies          Sony
Goldstar Electronics           Motorola                     Texas Instruments
Hewlett-Packard                National Semiconductor       Tokyo Electron

     Manufacturing
     ATMI's research and development  laboratory and prototype  production plant
are  located at its  Danbury,  Connecticut  facility.  In  Danbury,  the Company
fabricates,   tests,   and  assembles   high   performance   semiconductor   and
ferroelectric  thin films and  devices.  Although  ATMI's high  performance  and
ferroelectric  processing  technology is very similar to standard  semiconductor
manufacturing  technology,  ATMI has developed certain proprietary equipment and
processes. ATMI believes its facility is adequate for current needs.
                                       11
<PAGE>
     EcoSys  manufactures  Novapure(r),  Vector  Technology(r),  Phoenix(tm) and
ReCAT(tm) point-of-use  scrubbers in San Jose,  California.  EcoSys manufactures
its  proprietary  adsorbents for its gas treatment  products at ATMI's  Danbury,
Connecticut   facility.   The   Guardian(r)   product  line   manufacturing   is
subcontracted to a third party who had manufactured  these products prior to the
product line acquisition by ATMI in 1995.

     ATMI's NovaMOS division produces and integrates its liquid delivery systems
in Danbury, along with chemical manufacture and purification. ATMI manufacturing
facility  for the SDS  Safe  Delivery  Source  in  Danbury  is  complemented  by
contracted  manufacturing  from Matheson's  facility.  The Company believes that
these two facilities are adequate for current and anticipated demand.

     Epitronics  manufactures its III-V semiconductor thin films and devices for
the wireless and optoelectronic  industries at its Phoenix, Arizona facility. It
produces wide bandgap wafers and high performance thin films in Danbury.

     Raw materials for ATMI's products and processes are available from multiple
domestic sources.

     Competition
     The semiconductor  environmental  equipment,  materials, and device markets
have rapidly  evolving  technology and products.  Both large and small companies
offer products in these markets,  and many of these companies have significantly
greater financial and other resources than ATMI.

     EcoSys
     EcoSys's  primary  competition  in effluent gas treatment is from companies
focused on water and combustion  treatment  methods.  The primary water scrubber
competitor is Delatech,  while combustion scrubber  competitors are Delatech and
Alzeta. Dry scrubber competitors include CS-GmbH,  Ebara, Japan Pionics, and the
Edwards Division of British Oxygen Corporation.

     NovaMOS
     NovaMOS's primary  competitors in CVD materials and delivery systems in the
U.S. are the Schumacher  Division of Air Products,  Advanced Delivery & Chemical
Systems,  Inc., the Diffusion Systems Division of Olin Hunt Specialty  Products,
Inc., and MKS Instruments,  Inc. There are several other smaller participants in
this market.

     There are no immediate competitors to the patented SDS Safe Delivery Source
product.  Several gas companies provide product in high pressure containers that
compete with the process capability of SDS.

     Epitronics
     High  performance  semiconductors  are a new and rapidly  emerging  area of
technology.  The technology has attracted the interest of a wide variety of both
large and small companies. Potential competitors include Kobe Steel, which has a
high  performance  electronics  subsidiary,   and  Westinghouse,   which  has  a
substantial silicon carbide  electronics  effort.  Several smaller companies are
also developing high performance semiconductor products, including Cree Research
(silicon  carbide)  and IBIS  Technology  (SIMOX  wafers).  Nichia  Chemical,  a
Japanese  company,  sells very bright blue LEDs and is  developing a solid-state
blue laser. Cree Research is selling blue LEDs based on silicon carbide,  and is
trying to produce  commercial  quantities  of bright  blue LEDs based on gallium
nitride.  Other groups,  including  Hewlett-Packard,  APA Optics, Inc., and SDL,
Inc. are also working on blue optoelectronics, using similar technology.
                                       12
<PAGE>
     PixTech,  Inc, SI Diamond Technology Inc., FED Corporation,  and others are
attempting to develop  alternative field emission flat panel display products in
competition with CTC.


     Government Contracts
     ATMI  participates  in U.S.  government  funded  research  and  development
contracts.  As of December 31, 1996, the Company had received  aggregate  awards
since its inception of approximately $55 million from U.S. government  agencies,
including  approximately  $46  million  recognized  as revenue  by ATMI  through
December 31, 1996.  These  contracts fund continued CVD technology  development,
development of high  performance  semiconductor,  ferroelectric  thin films, and
devices for specific  applications,  while  offsetting  the cost of research and
development.  Government  contract  revenues  were  about  $9,846,000  in  1996,
$8,712,000 in 1995, and  $7,018,000 in 1994.  This is about 21%, 29%, and 36% of
ATMI's total revenues in those years. The government may terminate  contracts at
its convenience.

     In April 1993, the Collaborating Group of IBM, Texas Instruments and Micron
Technology  was awarded a $5 million  contract  (subsequently  increased to $5.7
million) from ARPA to develop  next-generation  capacitor  thin films for DRAMs.
The  Collaborating  Group  contributed  matching  funds  and  agreed to make any
technology developed under the contract available to the other group members.

     ATMI has numerous  contracts from the U.S. Air Force, the Ballistic Missile
Defense  Organization  ("BMDO"),  and the National Science  Foundation  ("NSF"),
supporting  development of CVD core  technology for the deposition of dielectric
materials and their uses in alternative applications,  such as optical switching
and infrared sensing.

     ATMI  receives  funding for research  into high  performance  semiconductor
programs.  Funds come from the U.S. Navy,  BMDO, the U.S. Army,  ARPA,  NSF, the
Department  of  Energy,  and NASA in each of the four  primary  technical  areas
required for device development: substrate manufacture, thin film deposition and
characterization, device processing and device design.

     The Office of Naval Research ("ONR"),  supports efforts to grow and prepare
surfaces of high  performance and silicon carbide thin films.  The Army supports
the development of high  performance  contacting  technology,  a key step in any
manufacturing  process  for high  performance  devices.  High  performance  cold
cathode technology has received  significant support from both BMDO (ATMI, prime
contractor)  and ARPA (CTC,  prime  contractor).  ATMI will  continue  to submit
proposals to various government entities for additional research and development
funding.

     Backlog
     As of December  31,  1996,  ATMI had firm  backlog of  approximately  $16.5
million  consisting  of  approximately  $8.2 million of product  orders and $8.3
million of  executed  and funded  research  contracts.  This  compares to a firm
backlog  level of  approximately  $14.8  million as of December 31, 1995,  which
consisted  of  approximately  $4.5 million of product  orders and  approximately
$10.3 million of executed and funded research contracts.

     ATMI  considers  orders  for  products  shippable  within six months of the
backlog date and fully executed and funded  research  contract  awards as of the
backlog date as firm  backlog.  SDS product  backlog is not  included  since the
product is sold and shipped to Matheson  for  distribution  to the  ultimate end
user.
                                       13
<PAGE>
     Patents and Proprietary Rights
     ATMI  protects  its  technology  by,  among  other  things,  filing  patent
applications  for  technology  considered  important to the  development  of its
business.  It also relies upon trade secrets,  unpatented  know-how,  continuing
technological  innovation and the aggressive pursuit of licensing  opportunities
to help develop and maintain its competitive position.

     ATMI and its divisions have been awarded 68 U.S. patents and currently have
72 U.S. patent applications  pending.  Foreign  counterparts of certain of these
applications  have  been  filed  or may be filed at an  appropriate  time.  ATMI
decides on a case-by-case  basis whether,  and in what  countries,  it will file
foreign  counterparts  of a U.S. patent  application.  ATMI holds licenses to 12
U.S. patents.  ATMI's U.S.  patents expire between  September 2006 and February
2015. The U.S. patents licensed to ATMI expire during the period from March 2006
through February 2013.

     ATMI's ability to compete  effectively with other companies will depend, in
part,  on its  ability to maintain  the  proprietary  nature of its  technology.
Although ATMI has been awarded, has filed applications for, or has been licensed
under numerous patents in the United States and foreign countries,  there can be
no assurance as to the degree of  protection  afforded by these patents or as to
the likelihood that pending patents will be issued.

     The Company requires all employees and most consultants, outside scientific
collaborators,   sponsored   researchers   and   other   advisors   to   execute
confidentiality  agreements  upon the  commencement  of employment or consulting
relationships   with  ATMI.  These  agreements  provide  that  all  confidential
information  developed or made known to the individual  during the course of the
individual's  relationship  with the Company is to be kept  confidential and not
disclosed  to third  parties  except in  specific  circumstances.  All of ATMI's
employees have entered into agreements providing for the assignment of rights to
inventions made by them while in the employ of the Company.

     Epigrade, Scram, Novapure, EcoSys, EcoSys (logo), Vector Technology, Vector
(logo), Advanced Technology Materials (logo),  Phoenix, ReCAT, NovaMOS,  Sparta,
Guardian,  Epitronics,  NovaSource,  VaporSource,  and SDS are trademarks of the
Company.

     Research and Development
     ATMI's research and development  expenditures are  substantially  funded by
external sources,  including various agencies of the federal  government.  Total
sums expended for research and development in the years ended December 31, 1996,
1995  and 1994  were  approximately  $15,968,000,  $11,697,000  and  $9,566,000,
respectively.  Of  those  amounts,  approximately  $8,341,000,   $7,491,000  and
$6,151,000,  respectively,  were externally funded and are classified as cost of
contract revenues on ATMI's Consolidated Financial Statements, and approximately
$7,627,000,  $4,206,000 and $3,415,000,  respectively,  were  internally  funded
expenditures  by the Company and are  classified  as  research  and  development
operating expenses on ATMI's Consolidated Financial Statements.


     Environmental Regulation
     The Company uses,  generates and  discharges  toxic,  volatile or otherwise
hazardous chemicals and wastes in its research and development and manufacturing
activities. Therefore, the Company is subject to a variety of federal, state and
local governmental regulations related to the storage, use and disposal of these
materials. The Company believes that it has all the permits necessary to conduct
its business.  However, the failure to comply with present or future regulations
could result in fines being imposed on the Company,  suspension of production or
a cessation  of  operations.  While the Company  believes  that it has  properly
handled  its  hazardous  materials  and  wastes and has not  contributed  to any
on-site  contamination  or environmental  condition at any of its premises,  the
premises  in  Danbury,  CT may have  been  contaminated  prior to the  Company's
occupancy.
                                       14
<PAGE>
The  Company  is  not  aware  of  any  environmental  investigation,
proceeding  or action by federal or state  agencies  involving  these  premises.
However,   under  certain  federal  and  state  statutes  and   regulations,   a
governmental agency may seek recovery and response costs from both operators and
owners of property where releases of hazardous  substances  have occurred or are
ongoing.  The prior occupant of the premises has agreed to indemnify the Company
for remediation costs in connection with any pre-existing, on-site contamination
or  environmental  condition.  However,  there  can be no  assurance  that  this
indemnification  will  prove  adequate  to cover any  liability  imposed  on the
Company  related to the  environmental  condition of the premises or the cost of
defending an  environmental  action,  either of which could be substantial.  The
Company's  activities  may  also  result  in its  being  subject  to  additional
regulation.  Such regulations  could require the Company to acquire  significant
additional  equipment  or to incur  other  substantial  expenses  to comply with
environmental regulations.  Any failure by the Company to control the use of, or
to restrict  adequately the discharge of, hazardous  substances could subject it
to substantial financial liabilities and could have a material adverse effect on
the Company's business, operating results and financial condition.

     Employees
     As of December 31, 1996 ATMI employed a total of 188 individuals, including
80 in sales and  administration,  51 in  operations  and 51 who are  principally
employed in research and development.  Thirty-eight employees hold Ph.D. degrees
and twenty-one hold other advanced degrees in electrical engineering,  materials
science,  chemistry,  physics or related fields. None of the Company's employees
are covered by collective  bargaining  agreements.  ATMI has not experienced any
work stoppages and considers its relations with its employees to be strong.



Item 2.  Properties.

     ATMI is located in  Danbury,  Connecticut  where it leases a 72,000  square
foot facility in Commerce Park. The Company occupies this facility under a lease
which  expires on August 30,  2005.  ATMI  believes  its  existing  facility  is
adequate and suitable for its current needs,  although it plans to significantly
expand its production capability, and potential manufacturing space as needed.

     EcoSys  leases a 25,000  square  foot  facility  in San  Jose,  California,
expiring  March 2002.  ATMI  believes this facility is adequate and suitable for
current and anticipated EcoSys' needs.

     Epitronics  leases a 15,000  square  foot  facility  in  Phoenix,  Arizona,
expiring  August 1999.  ATMI believes this facility is adequate and suitable for
current and anticipated Epitronics' needs.



Item 3.  Legal Proceedings.

     ATMI is not a party  to any  material  litigation  and is not  aware of any
pending or threatened  litigation that could have a material adverse effect upon
its business, operating results, or financial condition.


Item 4.  Submission of Matters to a Vote of Security Holders.

     No  matter  was  submitted  to a vote  of  security  holders,  through  the
solicitation  of proxies or otherwise,  during the fourth  quarter of the fiscal
year ended December 31, 1996.
                                       15
<PAGE>

<PAGE>
                                    PART II.

Item 5.  Market for Registrant's Common Equity and Related Stockholder Matters.

     ATMI's  common  stock is traded on The  Nasdaq  National  Market  under the
symbol ATMI.  The  following  table sets forth the high and low sales prices for
the common stock as reported on the Nasdaq for the periods indicated.
<TABLE>
           <S>                                            <C>        <C>
                                                            High        Low
                                                            ----        ---
           1995
           ----
           January 1 - March 31                           $  8.13    $  5.13
           April 1 - June 30                                10.50       6.63
           July 1 - September 30                            16.00      10.00
           October 1 - December 31                          14.38       9.25

           1996
           ----
           January 1 - March 31                            $12.75    $  9.63
           April 1 - June 30                                15.88      10.38
           July 1 - September 30                            13.88      10.75
           October 1 - December 31                          18.50      12.25
</TABLE>

     As of February 28, 1997, there were approximately  4,700  stockholders,  of
which approximately 250 were holders of record.

     ATMI has never  paid cash  dividends  on its  capital  stock and  currently
intends to retain future earnings,  if any, for use in its business.  Therefore,
ATMI does not anticipate  paying any cash dividends in the  foreseeable  future.
Certain of the Company's  financing  arrangements  contain  prohibitions  on the
payment of dividends  without the lender's  consent or in  conjunction  with the
Company's failure to comply with various financial covenants.

     The Transfer Agent and Registrar for ATMI Common Stock is Boston EquiServe,
L.P. formerly known as The First National Bank of Boston.
                                       16
<PAGE>
Item 6.         Selected Financial Data.

     The consolidated  statement of operations data set forth below with respect
to the years ended December 31, 1996, 1995 and 1994 and the consolidated balance
sheet data at December 31, 1996 and 1995 are derived from,  and are qualified by
reference to, the audited  Consolidated  Financial Statements included elsewhere
in this report and should be read in conjunction with those financial statements
and notes thereto.  The consolidated  statement of operations data for the years
ended  December  31, 1993 and 1992 and the  consolidated  balance  sheet data at
December  31,  1994,  1993 and  1992 are  derived  from  consolidated  financial
statements  not included  herein.  Amounts for 1993 and all previous  years have
been restated to give effect to the  acquisition of Vector,  which was accounted
for as a pooling of interests.

<TABLE>
<CAPTION>
Consolidated Statement of Operations Data:
(in thousands, except per share data)
                                         Year Ended December 31,
                                         -----------------------
<S>                         <C>       <C>       <C>         <C>         <C>
                               1996      1995       1994        1993       1992
                               ----      ----       ----        ----       ----
Product revenues            $36,504   $21,336   $ 12,538    $  7,174    $ 4,383
Contract revenues             9,846     8,712      7,223       6,070      4,888
                              -----     -----      -----       -----      -----
    Total revenues           46,350    30,048     19,761      13,244      9,271
Cost of revenues             24,281    17,099     11,990       8,243      6,459
                             ------    ------     ------       -----      -----
Gross profit                 22,069    12,949      7,771       5,001      2,812
Operating expenses:
    Research and development  7,627     4,206      3,415       1,864      1,260
    Selling, general,
      and administrative     11,510     8,558      5,588       3,772      3,066
                             ------     -----      -----       -----      -----
    Total operating expenses 19,136    12,764      9,003       5,636      4,326
                             ------    ------      -----       -----      -----
Operating income (loss)       2,933       185     (1,231)       (635)    (1,514)
Other income, net               628       503      3,991          35         86
                                ---       ---      -----          --         --
Income (loss) before taxes
   and minority interest      3,561       688      2,760        (600)    (1,428)
Income taxes                    239       134        124         219        108
                                ---       ---        ---         ---        ---
Income (loss) before
   minority interest          3,321       554      2,636        (819)    (1,536)
Minority interest                 0         0          0         269        380
                                  -         -          -         ---        ---
Net income (loss)             3,321       554      2,636        (550)    (1,156)
                              =====       ===      =====        ====     ======
Net income (loss)
   per share (1)            $  0.35   $  0.07   $   0.35    ($  0.10)   ($ 0.23)
                            =======   =======   ========    ========    =======

Weighted average
   shares outstanding (1)     9,359     8,074      7,595       5,473      5,009
                              =====     =====      =====       =====      =====
</TABLE>

<TABLE>
<CAPTION>
                                                December 31,
                                                ------------
<S>                             <C>       <C>       <C>      <C>       <C>
                                1996      1995      1994     1993      1992
                                ----      ----      ----     ----      ----
Consolidated Balance Sheet Data:
(in thousands)

Cash, cash equivalents,
  and marketable securities     $21,406   $25,465   $12,692  $13,444   $  4,538
Working capital                  27,103    26,224    13,341   14,050      4,678
Total assets                     50,118    49,798    21,251   20,170     10,029

Long-term obligations,
   less current portion           5,004     5,434     1,236      896      1,465
Minority interest                  --        --        --      3,179      3,447
Redeemable convertible
   preferred stock                 --        --        --       --        7,982
Stockholders' equity
   (deficiency)                 36,393    32,897    14,785   12,099      (6,440)
</TABLE>

     (1) The  calculation  of net income  (loss) per share and weighted  average
shares  outstanding  gives effect to: (i) shares issued in conjunction  with the
1994  acquisition of Vector as if the acquisition  occurred prior to all periods
presented,  (ii) the 1993  conversion of all  outstanding  shares of Convertible
Preferred Stock into 4,040,039 shares of Common Stock and (iii) the 1993 payment
of a dividend of 76,102 shares of Common Stock to certain holders of Convertible
Preferred  Stock  effective  upon the closing of the  Company's  initial  public
offering,  in each case for all periods  presented  although  such  inclusion is
antidilutive.

                                       17
<PAGE>

<PAGE>
Item 7.
     Management's  Discussion and Analysis of Financial Condition and Results of
     Operations

Overview

     Founded in 1986,  ATMI  generates  revenues from product sales and contract
research. Most product sales are point-of-use environmental equipment, specialty
materials,  and  delivery  systems  for the  semiconductor  industry.  ATMI also
receives royalties for certain product sales from third parties.

     Since  1986,  a  significant  portion  of  ATMI's  revenues  has come  from
contracts  with United States  government  agencies.  The programs in which ATMI
participates  may extend for several  years,  but are usually  funded  annually.
There can be no assurance  that the  government  will continue its commitment to
programs to which ATMI's  development  projects are  applicable or that ATMI can
compete successfully to obtain program funding.

     ATMI has  used a  targeted  acquisition  strategy  to  assist  in  building
critical mass and market position in the niches the Company serves. In 1994 ATMI
acquired  Vector,  and in conjunction with the sale of Novapure product lines to
Millipore in September 1994, formed EcoSys by merging the retained operations of
Novapure with those of Vector.  In 1995, ATMI acquired the Guardian product line
from Messer  Greisheim  Industries and folded that product line into EcoSys.  In
1995, ATMI acquired  Epitronics  Corporation,  and in early 1996,  combined that
business  with  the  formerly  known  Diamond  Electronics  division  under  the
Epitronics name.

     The following table sets forth, for the periods  indicated,  the percentage
relationship to total revenues of certain items in ATMI's consolidated statement
of operations:
<TABLE>
<CAPTION>
                                                       Year Ended December 31,
                                                       -----------------------
<S>                                                   <C>       <C>       <C>
                                                       1996      1995      1994
                                                       ----      ----      ----
Product revenue .................................      78.8%     71.0%     63.5%
Contract revenue ................................      21.2      29.0      36.5
                                                       ----      ----      ----
      Total revenues ............................     100.0     100.0     100.0
Cost of revenues ................................      52.4      56.9      60.7
                                                       ----      ----      ----
Gross profit ....................................      47.6      43.1      39.3
      Research and development ..................      16.5      14.0      17.3
      Selling, general, and administrative ......      24.8      28.5      28.3
                                                       ----      ----      ----
            Total operating expenses ............      41.3      42.5      45.6
                                                       ----      ----      ----
Operating income (loss) .........................       6.3       0.6      (6.3)
Other income, net................................       1.4       1.6      20.2
                                                        ---       ---      ----
Income before taxes..............................       7.7       2.2      13.9
Income taxes.....................................       0.5       0.4       0.6
                                                        ---       ---       ---
Net income.......................................       7.2%      1.8%     13.3%
</TABLE>
                                       18
<PAGE>

<PAGE>

     The following table sets forth revenues,  cost of revenues and gross profit
for products and contracts, as a percentage of each category:

<TABLE>
<CAPTION>
                                                     Year Ended December 31,
                                                     -----------------------
<S>                                           <C>            <C>          <C>
                                               1996           1995         1994
                                               ----           ----         ----
Products:
  Revenues ........................           100.0%         100.0%       100.0%
  Cost of revenues ................            43.7           45.0         46.6
                                               ----           ----         ----
Gross profit ......................            56.3%          55.0%        53.4%
Contracts:
  Revenues ........................           100.0%         100.0%       100.0%
  Cost of revenues ................            84.7           86.0         85.2
                                               ----           ----         ----
Gross  profit .....................            15.3%          14.0%        14.8%

</TABLE>

Results of Operations
Years Ended December 31, 1996, 1995, and 1994.

     Revenues.  In 1996,  ATMI's total revenues  improved 54.3% to approximately
$46,350,000 from $30,048,000 in 1995. Total revenues for 1995 were 52.1% greater
than 1994's $19,761,000.  Product sales were $36,504,000, up 71.1% in 1996, from
1995's product sales of $21,336,000. Product sales for 1996 were 78.8% of ATMI's
total revenues,  and in 1995, 71.0%. In turn, 1995 showed a 70.2% increase above
product sales of $12,538,000 in 1994. Product sales in 1994 were 63.4% of ATMI's
total revenues.

     EcoSys effluent  treatment product sales led ATMI's product revenue growth.
With its technology  leadership and full service philosophy in the environmental
niche of the  semiconductor  market,  EcoSys managed to increase market share in
the face of a softening  capital  equipment  market.  Sales to Pacific Rim-based
companies  continued to be strong. The December 1995 acquisition of the Guardian
product line was also responsible for a portion of the revenue growth.

     This year, sales of effluent gas treatment  products were approximately 54%
of  ATMI's  revenues,   about   $25,076,000.   Last  year,  EcoSys   contributed
$16,889,000,  about  56% of  revenues.  In  1994,  51% of  ATMI's  total  sales,
$10,078,000,  were EcoSys product sales. While not a significant factor to date,
a continued slowdown in capital equipment spending in the semiconductor industry
could have a negative effect on EcoSys revenue growth during 1997.

     The SDS  product  line  has  begun  to  have a  significant  impact  on the
Company's  revenue  growth.  The revenue  from this product line changed in late
1996 from a royalty stream to a product revenue steam. As a result,  the sale of
this product represented  approximately 9% of total revenues in 1996, up from 3%
for the entire 1995 year's revenues.

     General  increases in government  funding of ATMI research  resulted in the
growth  of  contract  revenues.  For  1996,  government  funding  grew  13.0% to
$9,846,000,  from $8,712,000 in 1995 and increased 20.6% in 1995 from $7,222,000
in 1994.  The  increased  research  funding  in 1996 was  primarily  focused  on
materials  development,  device  processing and device design  activities within
NovaMOS and  Epitronics.  The 1995  growth was  primarily  related to  increased
funding of substrate fabrication and materials development projects.
                                       19
<PAGE>
     Gross  Profit.   ATMI's  gross  profit  improved  this  year  by  70.4%  to
$22,069,000  compared to 1995,  when gross profit of $12,949,000 had grown 66.6%
from  $7,771,000 in 1994. As a percentage of revenues,  gross profit improved to
47.6% in 1996 from 43.1% in 1995 and increased in 1995 from 39.3% in 1994.

     In 1996,  ATMI's sales mix  continued to shift  toward  greater  volumes of
high-margin  products.  Consequently,  our product revenue gross margin improved
75.3% to $20,565,000  from  $11,728,000 in 1995 and increased 75.0% in 1995 from
$6,700,000 in 1994. Product gross margin improved to 56.3% of revenues,  up from
55.0% in 1995 and  53.4% in 1994.  The  improved  product  margins  in 1996 were
attributed  primarily to the  significant  increases in royalties in  connection
with SDS product line growth.  Additionally,  sales of the SDS product commenced
late in the year when the Company began manufacturing the product and recognized
margins higher than the average ATMI product margin.  The effect of the SDS more
than offset some slight  declines in margin  realized on sale of EcoSys products
due to geographic and product mix shifts to comparatively lower margin sales.

     Gross profit on contract  revenue  increased in 1996 by 23.3% to $1,505,000
from  $1,221,000 in 1995 which was an increase of 14.0% over 1994 at $1,071,000.
Gross margin on  contracts  over the last three years have  remained  relatively
stable.  As a percent of contract  revenues,  gross margin increased to 15.3% in
1996  from  14.0% in 1995  which was a  decrease  from  14.8% in 1994.  Contract
margins can vary slightly from year to year based on the mix of cost-type,  firm
fixed  price  and  cost  share   arrangements.   Additionally,   different   fee
arrangements  and  indirect  cost  absorption  can  contribute  to  some  margin
variability.

     Research  and  Development  Expenses.  ATMI  targets  areas to maintain its
competitive  advantage.  For  1996,  our  R&D  spending  rose  significantly  to
$7,627,000,  up 81.3% from last year.  Primary  drivers for the increase in 1996
was  expansion  of product  development  efforts  within  EcoSys  and  increased
spending to expand and protect the SDS  technology  portfolio.  R&D  expenses of
$4,206,000 in 1995 was an increase of 23.2% from 1994 R&D of $3,415,000.  R&D as
a percentage of revenues has increased to 16.5% in 1996,  compared with 14.0% in
1995, which was a decrease from 17.3% of revenues in 1994.

     Selling,  General,  and  Administrative  Expenses.  Increasing in line with
ATMI's  growth,  ATMI's  variable  selling  costs grew in 1996.  ATMI also added
administrative  staff in 1996 to support  revenue growth and incurred  increased
costs related to the businesses acquired in 1995. As a result, the 1996 S,G&A
expenses of $11,510,000,  were approximately 34.5% above last year's expenses of
$8,558,000  which in turn were up 53.2% from 1994 S,G&A  expenses of $5,588,000.
The growth in 1995 was due again to variable  selling cost increases and also to
the  expansion  of the  Company's  marketing  staff.  S,G&A as a  percentage  of
revenues has decreased to 24.8% in 1996,  compared with 28.5% in 1995, which was
a slight increase from 28.3% of revenues in 1994.

     Other Income,  Net. Most of ATMI's other income stems from interest income,
offset by interest expense on the Company's outstanding debt. In 1996, net other
income  grew  by  24.8%  to  $628,000.  The  Company's  invested  cash  balances
throughout  1996 were  significantly  higher  than in 1995 due to the  Company's
public offering in October 1995.  Increased  interest  expense in 1996 partially
offset the effect of the increased  interest earned on cash investments.  In
1995, net other income of $503,000 grew by 29% from the 1994 amount of $390,000,
exclusive of 1994's non-recurring  transactions.  Again the 1995 interest income
growth was due to having the proceeds of the October 1995  offering for the last
quarter  of  the  year.  The  1994   non-recurring   transaction   involved  the
restructuring  of the Novapure  joint  venture and the sale of assets for a $4.6
million gain.  Offsetting this gain were transaction and consolidation  expenses
of $1 million for the restructuring,  acquiring Vector, and combining Vector and
Novapure into EcoSys.
                                       20
<PAGE>
     Income Taxes. ATMI's income tax expense related primarily to state taxes on
income generated,  partially offset by the utilization of loss carryforwards and
available state tax credits. Minimal federal taxes paid in 1996 and 1995 related
to  alternative  minimum  taxes  arising  from  the  use of net  operating  loss
carryforwards.  Income  tax  expense  in 1996 was  $239,000,  up 78.4%  from the
$134,000 in 1995 which, in turn, were up 8.5% from $124,000 in 1994.

Liquidity and Capital Resources

     The 1996 year was ATMI's first in generating cash from operations. Net cash
generated of $4,280,000 was due  principally to the increased  profitability  of
the  Company  for the  year.  In 1995,  ATMI  used net  cash for  operations  of
$1,226,000,  primarily  to fund a  significant  increase in accounts  receivable
because of end-of-the-year  product shipments.  In 1994,  $1,342,000 in net cash
was used in operations, primarily funding ATMI operating losses.

     The amount of the Company's  working capital has not changed  significantly
since the closing of the 1995 public  offering.  Working capital was $27,103,000
at December 31, 1996, compared to $26,224,000 at December 31, 1995.

     The Company's  investing  activities include capital  expenditures in 1996,
1995, and 1994 of $4,694,000, $3,604,000 and $1,785,000,  respectively. The 1996
capital  expenditures  were  primarily  focused on  manufacturing  expansion for
EcoSys and NovaMOS and laboratory construction for customer application work for
EcoSys.  The 1995 and 1994  capital  was  spent  on  renovations  and  leasehold
improvements for the Danbury and San Jose facilities,  upgrades to the Company's
information systems and purchase of laboratory equipment.

     Among  other  investing  activities  for  1996,  ATMI  sold  $4,886,000  in
marketable  securities and made a $4 million payment in connection with the 1995
acquisition  of Guardian.  During  1995,  ATMI made a $1 million  investment  in
Candescent  Technologies  Corporation (formerly Silicon Video Corporation),  and
purchased  $11,213,000 of marketable  securities with the proceeds received from
the 1995 public  offering.  When the Company  restructured  Novapure  and sold a
portion of its assets in 1994, ATMI received net proceeds of approximately  $2.5
million.

     Through the end of 1996,  ATMI had used $2.0 million from capital leases in
financing  capital  equipment  purchases.  Financial  institutions have provided
collateral-based   loans  for  $3.3  million.   The  State  of  Connecticut  has
contributed  loans of almost $2.0 million.  About $6.6 million was been extended
to ATMI by parties to the Company's acquisition activities.  At year end, nearly
$5.6 million of loans and financing remained  outstanding.  Notes payable extend
through June 2002 with interest  rates from 5.4% to 9.5%.  ATMI made payments of
$1,144,000  on notes  payable this year.  Last year,  notes paid were  $741,000,
while in 1994, payments totaled $1,050,000.  In December 1996, ATMI was extended
a $10  million  unsecured  line of  credit by its  commercial  bank to assist in
financing future activities.

     ATMI believes the cash generated from operations and the proceeds from last
year's common stock offering  together with existing sources of liquidity,  will
satisfy  projected working capital and cash  requirements,  at least through the
end of 1998.  However,  ATMI believes the level of financial resources available
to it is an important competitive factor in its industry and may seek additional
capital  prior  to  the  end of  that  period.  The  Company  considers  raising
additional capital on an on-going basis as market factors and its needs suggest.
Additionally,  ATMI considers,  on a continuing basis, potential acquisitions of
technologies  and  businesses  complementary  to its current  business which may
require additional cash.
                                       21
<PAGE>
Inflation

     During the last three years,  inflation has not had a significant impact on
ATMI's operating results.

Safe Harbor Statement

     Statements  which  are not  historical  facts in this  report  are  forward
looking statements, made on a good faith basis. Such forward looking statements,
including those  concerning the Company's  expectations  for demand and sales of
new and existing products, semiconductor industry and market segment growth, and
market and technology opportunities, all involve risk and uncertainties.  Actual
results may differ  materially  from  forward  looking  statements,  for reasons
including,  but not limited to, changes in the pattern of semiconductor industry
growth or the markets the Company sells products for,  customer  interest in the
Company's products,  product and market  competition,  delays or problems in the
development and  commercialization  of the Company's products,  or technological
change affecting the Company's core thin film competencies.


Item 8.  Financial Statements and Supplementary Data.

     The Report of Independent Auditors,  the consolidated  financial statements
and financial  statement  schedule that are listed in the Index to  Consolidated
Financial  Statements and Financial  Statement  Schedule are included  herein on
pages F-1 through F-16.

Item 9. Changes in and Disagreements with Accountants on Accounting and
Financial Disclosure.

     There have been no changes in or disagreements with accountants required to
be reported herein.
                                       22
<PAGE>

<PAGE>
                                    PART III

Item 10.  Directors and Executive Officers of the Registrant

The executive officers and directors of the Company are as follows:

<TABLE>
<S>                        <C>    <C>
Name                       Age    Position with the Company
- ----                       ---    -------------------------
Eugene G. Banucci, Ph.D.   53     President, Chief Executive Officer,
                                     Chairman of the Board and Director
Peter S. Kirlin, Ph.D.     36     Executive Vice President
Duncan W. Brown, Ph.D.     44     Vice President and Director,
                                     President of Epitronics
Daniel P. Sharkey          40     Vice President, Chief Financial Officer
                                     and Treasurer
Ward C. Stevens, Ph.D.     42     Vice President and Secretary
Nicholas J. Wood           33     Vice President - Marketing
Mark A. Adley              37     Director
Gary A. Andersen           60     Director
John A. Armstrong, Ph.D.   62     Director
Robert S. Hillas           47     Director
Stephen H. Mahle           51     Director

</TABLE>
     Eugene  G.  Banucci,  Ph.D.,  a  founder  of the  Company,  has  served  as
President,  Chief Executive Officer,  Chairman of the Board and a director since
1986.  Previously,  Dr.  Banucci served in a variety of executive and managerial
positions.  From 1984 to 1986, he was a director of American Cyanamid  Company's
Chemical Research Division,  with  responsibility for the research,  development
and technical service activities of the Chemicals Group.

     Peter S.  Kirlin,  Ph.D.,  has served as  Executive  Vice  President of the
Company  since  December  1995.  From 1991 to 1995,  Dr.  Kirlin  served as Vice
President of Microelectronics  and General Manager of the NovaMOS division,  and
from 1988 to 1991, he was Director of  Superconductor  Materials and Electronics
for the Company.  Prior to joining  ATMI,  Dr.  Kirlin was a Project  Leader and
Research  Engineer for American  Cyanamid  Company.  Dr. Kirlin has written more
than 30 published articles and holds 7 issued U.S. patents.

     Duncan W. Brown,  Ph.D.,  a founder of ATMI, has served as a Vice President
since 1986 and as a Director since 1990.  Dr. Brown was also named  President of
Epitronics  Corporation  in March  1996.  From  1983 to 1986,  Dr.  Brown  was a
Research  Chemist at American  Cyanamid  Company.  Previously,  Dr.  Brown was a
Postdoctoral  Fellow  in  the  Departments  of  Chemistry  at  MIT  and  Harvard
University,  and an Academic  Associate at IBM's  Research  Division.  Dr. Brown
holds 15 issued U.S. patents and has published several technical articles.

     Daniel P. Sharkey has served as Chief Financial  Officer since joining ATMI
in 1990. He was also elected Vice  President  and  Treasurer in September  1993.
From 1987 to 1990, Mr. Sharkey was Vice President of Finance and  Administration
for Adage, Inc., a manufacturer of high-performance computer graphics terminals.
From 1983 to 1987, he was Corporate Controller for CGX Corporation.  Previously,
Mr. Sharkey served as Audit Supervisor for KPMG Peat Marwick.
                                       23
<PAGE>
     Ward C. Stevens,  Ph.D.,  a founder of ATMI, has served as a Vice President
since 1986 and served as a Director  from 1986 to 1990.  Prior to joining  ATMI,
Dr. Stevens was a Materials  Scientist and Project  Leader at American  Cyanamid
Company and a Materials  Scientist at Celanese  Research  Company.  Dr.  Stevens
holds  12  issued  U.S.  patents  and  is  the  author  of  numerous  scientific
publications.

     Nicholas J. Wood has served as the Company's Vice President-Marketing since
August  1995.  From 1985 to 1995,  Mr.  Wood  served  in a variety  of sales and
marketing positions with Intel Corporation. Most recently, from 1992 to 1995, he
served as Northern European Marketing Manager.

     Mark A. Adley has served as a director  of the Company  since  1991.  Since
1996,  Mr.  Adley has been a Managing  Director at Credit  Suisse  First  Boston
Corporation  where he was a Director from 1994 to 1996.  From 1992 through 1993,
Mr.  Adley  served  as  an  investment  manager  for  Clipper  Asset  Management
Corporation, the General Partner of The Clipper Group, L.P. ("Clipper").  During
1991,  Mr. Adley served as an  investment  manager for Clipper.  Mr. Adley was a
Director at CS First Boston  Merchant  Bank during 1990 and, at The First Boston
Corporation,  was a Vice  President from 1989 to 1990 and an Associate from 1985
to 1988.

     Gary A.  Andersen has served as a director of the Company  since 1994.  Mr.
Andersen  was  President,   Chief  Executive   Officer  and  a  director  of  RF
Monolithics,  Inc., a manufacturer  of products  based on surface  acoustic wave
technology,  from 1986 to 1996.  Previously,  Mr. Andersen served as Director of
National  Accounts at Valid Logic  Systems,  National  Sales  Manager for Memory
Systems at Mostek Corporation and OEM Marketing Manager at Intel Memory Systems.

     John A.  Armstrong,  Ph.D.  has served as a director of the  Company  since
1993.  Dr.  Armstrong  is  presently  a  visiting  professor  of  physics at the
Massachusetts  Institute of  Technology.  Previously,  he was Vice  President of
Science and Technology for IBM from 1987 until his retirement in 1993.

     Robert S. Hillas has served as a director of the  Company  since 1987.  Mr.
Hillas has been a Managing  Director of E.M.  Warburg,  Pincus & Co., Inc. since
1993.  From  1985 to  1992,  Mr.  Hillas  served  as a  General  Partner  of DSV
Management  Ltd.,  the General  Partner of DSV  Partners  IV, a venture  capital
limited partnership, and from 1981 to 1992, as a General Partner of DSV Partners
III, a venture capital limited partnership.

     Stephen H. Mahle has served as a director of the Company  since March 1996.
Mr.  Mahle has been  President  of the Brady  Pacing  Business,  a  division  of
Medtronic,  Inc.,  since  1995.  From  1989 to 1995,  Mr.  Mahle  served as Vice
President  and General  Manager of the Brady Pacing  Business.  Previously,  Mr.
Mahle  served  in a variety  of  marketing  and  product  development  roles for
Medtronic, Inc.

     All directors hold office until the next annual meeting of the stockholders
of the Company or until their  successors  have been duly elected and qualified.
Executive  officers serve at the discretion of the Company's Board of Directors.
There are no family relationships among the executive officers and directors nor
are there any arrangements or  understandings  between any executive officer and
any other person pursuant to which the executive officer was selected.

Section 16(a)  Beneficial Ownership Reporting Compliance

     Section 16(a) of the Securities Exchange Act of 1934, as amended,  requires
the Company's  executive officers and directors and persons who beneficially own
more than ten percent of the Company's Common Stock to file reports of ownership
and changes in ownership  with the  Securities  and Exchange  Commission.  Based
solely on reports and other  information  submitted by the  executive  officers,
directors  and such  beneficial  owners,  the Company  believes  that during the
fiscal year ended December 31, 1996, all such reports were timely filed.
                                       24
<PAGE>

Item 11.  Executive Compensation


Summary Compensation

     The  following   table  sets  forth  certain   information   regarding  the
compensation  paid by the Company to the Company's Chief  Executive  Officer and
each of the other four most highly  compensated  executive officers for services
in all capacities to the Company and its  subsidiaries for the fiscal year ended
December 31, 1996.
<TABLE>
<CAPTION>
                           SUMMARY COMPENSATION TABLE


                                                         Long Term
                                                       Compensation
                                                          Awards
                                   Annual Compensation    ------
                                   -------------------  Securities    All Other
                                                        Underlying    Compen-
Name and Principal Position   Year  Salary($) Bonus($)  Options(#)  sation($)(1)
- ---------------------------   ----  ------------------  ----------  ------------
<S>                           <C>   <C>        <C>        <C>            <C>
Eugene G. Banucci             1996  181,300    40,000         --         2,121
  President, Chief Executive  1995  155,250    40,000     35,000         2,875
     Officer and Chairman     1994  145,300    40,000         --         1,530
     of the Board

Peter S. Kirlin               1996  111,100    30,000         --            --
   Executive Vice President   1995   96,560    35,000     25,000           400
                              1994   91,300    20,000         --            --

Nicholas J. Wood (2)          1996  121,200    15,000         --            --
   Vice President - Marketing 1995   41,667    16,526     36,000            --
                              1994       --        --         --            --

Daniel P. Sharkey             1996   110,000   20,000         --         1,678
   Vice President, Chief      1995   103,000   25,000     15,000         1,583
     Financial Officer        1994    98,000   20,000         --           529
     and Treasurer

Ward C. Stevens               1996   101,000   25,000         --           890
   Vice President, Secretary  1995    96,000   10,000      5,000         1,823
                              1994    93,000   10,000         --           579

</TABLE>
     (1) Represents  premiums paid for life  insurance and long term  disability
policies  of which the  Company is not the  beneficiary  and  flexible  spending
contributions toward health care costs not covered by Company plans.

     (2) Mr. Wood joined the Company on August 28, 1995.
                                       25
<PAGE>

<PAGE>
Option Exercises and Year-End Values

     The following table sets forth information concerning option holdings as of
December  31,  1996  with  respect  to the  individuals  named  in  the  Summary
Compensation Table.
<TABLE>
<CAPTION>
                 AGGREGATED OPTION EXERCISES IN LAST FISCAL YEAR
                        AND FISCAL YEAR-END OPTION VALUES

                                    Number of Securities   Value of Unexercised
                  Shares           Underlying Unexercised  in-the Money Options
                Acquired           Options at FY-End (#)     at FY-End ($)(1)
                   on     Value    ---------------------     ----------------
Name            Exercise Realized   Exercisable         Exercisable
                   (#)     ($)              Unexercisable         Unexercisable
- -------------   --------------------------------------------------------------
<S>                  <C>    <C>      <C>      <C>        <C>           <C>
Eugene G. Banucci     --        --   103,975  30,400     1,651,194     238,100
Peter S. Kirlin ..   6,000   73,679   54,234  25,540       847,573     236,057
Nicholas J. Wood .    --        --     7,200  28,800        39,600     158,400
Daniel P. Sharkey    4,000   50,222   69,875  21,000     1,103,247     214,750
Ward C. Stevens ..   9,375  121,245   74,725   5,400     1,231,315      44,850
</TABLE>
     (1) Based on the fair  market  value of the  Company's  Common  Stock as of
December 31, 1996 ($17.25) minus the exercise price of the options.

Non-Competition Agreements

     Eugene G. Banucci, Duncan W. Brown, Ward C. Stevens and Peter S. Kirlin are
parties to agreements with the Company containing  covenants not to compete with
the Company during their employment and for two years thereafter.

Director Compensation

     The Company's directors do not receive any cash compensation for service on
the Board of Directors or any committee  thereof but are reimbursed for expenses
incurred in connection with attending meetings of the Board of Directors and any
committee thereof. In October 1993, the Company granted options for the purchase
of  22,500  shares  of the  Company's  Common  Stock  to  John A.  Armstrong  in
consideration  of consulting  services  performed for the Company.  The exercise
price of the options is $3.55 per share,  which was the fair market value of the
Company's  Common Stock on the date of grant,  and the options vest ratably over
five years on each of the first five anniversary dates of the grant date. In May
1994,  the  Company  granted  options for the  purchase of 22,500  shares of the
Company's  Common Stock to Gary A. Andersen in  consideration of his services on
the Board of  Directors.  The exercise  price of the options is $5.00 per share,
which was the fair market  value of the  Company's  Common  Stock on the date of
grant,  and the options  vest  ratably over five years on each of the first five
anniversary  dates of the grant date.

                                       26
<PAGE>
     In December  1994, the Company  granted  options for the purchase of 22,500
shares of the Company's Common Stock to Robert S. Hillas in consideration of his
services on the Board of Directors.  The exercise  price of the options is $5.50
per share,  which was the fair market value of the Company's Common Stock on the
date of grant, and the options were immediately vested as to 50% of the grant in
consideration  of past  service on the Board of  Directors  and vested as to the
remaining 50% of the grant on December 9, 1995. In May 1995, the Company granted
options for the purchase of 22,500 shares of the Company's  Common Stock to Mark
A.  Adley in  consideration  of his  services  on the  Board of  Directors.  The
exercise  price of the  options  is $8.50 per share,  which was the fair  market
value of the Company's  Common Stock on the date of grant,  and the options were
immediately  vested as to 40% of the grant in  consideration  of past service on
the Board of Directors  and the  remaining  60% vest ratably over three years on
each of the first three  anniversary dates of the grant date. In March 1996, the
Company  granted  options  for the  purchase of 22,500  shares of the  Company's
Common Stock to Stephen H. Mahle in  consideration  of his services on the Board
of Directors.  The exercise price of the options is $10.50 per share,  which was
the fair market value of the  Company's  Common Stock on the date of grant,  and
the options vest  ratably over five years on each of the first five  anniversary
dates of the grant date.

                                       27
<PAGE>

<PAGE>
Item 12.  Security Ownership of Certain Beneficial Owners and Management

     The following  table sets forth certain  information  regarding  beneficial
ownership  of the  Company's  Common  Stock as of February  28, 1997 by (i) each
person  known by the Company to own  beneficially  more than five percent of the
outstanding  Common  Stock of the  Company,  (ii) each  director of the Company,
(iii) each executive officer named in the Summary  Compensation  Table, and (iv)
all  directors  and  executive  officers  of the  Company as a group.  Except as
otherwise  indicated,  all shares are owned  directly.  Except as  indicated  by
footnote,  and subject to community property laws where applicable,  the persons
named in the table have sole  voting and  investment  power with  respect to all
shares of Common Stock indicated.
<TABLE>
<CAPTION>

                                         Shares      Percent
                                       Beneficially    of
                                          Owned       Class
                                          -----       -----
Name and Address of Beneficial Owner
- ------------------------------------
<S>                                     <C>           <C>
J.P. Morgan & Co.,
  Incorporated (1)
  60 Wall Street
  New York, NY 10260 ..............     1,120,950     12.7%

Eugene G. Banucci (2) ............        314,691      3.5%
Ward C. Stevens (3) ...............       178,764      2.0%
Duncan W. Brown (4) ...............       172,771      1.9%
Daniel P. Sharkey (5) .............        69,875       *
Peter S. Kirlin (5) ...............        54,234       *
Robert S. Hillas (6) ..............        30,977       *
Mark A. Adley (7) .................        16,500       *
John A. Armstrong (5) .............        13,500       *
Gary A. Andersen (5) ..............         9,000       *
Nicholas J. Wood (5) ..............         7,200       *
Stephen H. Mahle (8) ..............         4,600       *

All directors and executive officers
  as a group (11 persons) (9) .....       872,112      9.4%
</TABLE>

*less than 1%

     (1)  The  shares  shown  as  beneficially  owned  by  J.P.  Morgan  &  Co.,
Incorporated  were those reported as beneficially  owned by it as of January 31,
1997 in Amendment  No. 3 to its Schedule 13G filed with the SEC.  Such  schedule
indicates  that J.P.  Morgan & Co.,  Incorporated  has sole  voting  power  with
respect  to  701,100  shares  and sole  dispositive  power  with  respect to all
1,120,950 shares.

     (2) Includes  103,975  shares  issuable  upon  exercise of options that are
exercisable within 60 days of February 28, 1997 and 5,659 shares either owned by
Dr.  Banucci's  spouse or issuable  upon  exercise of options  within 60 days of
February 28, 1997 by Dr.  Banucci's  spouse.  Dr. Banucci  disclaims  beneficial
ownership of the shares held by his spouse.
                                       28
<PAGE>
     (3)  Includes  74,725  shares  issuable  upon  exercise of options that are
exercisable within 60 days of February 28, 1997 and 5,537 shares either owned or
issuable  upon  exercise of options  within 60 days of February  28, 1997 by Dr.
Steven's spouse. Dr. Stevens disclaims  beneficial  ownership of the shares held
by his spouse.

     (4)  Includes  69,637  shares  issuable  upon  exercise of options that are
exercisable within 60 days of February 28, 1997 and 4,634 shares either owned or
issuable  upon  exercise of options  within 60 days of February  28, 1997 by Dr.
Brown's spouse. Dr. Brown disclaims  beneficial  ownership of the shares held by
his spouse.

     (5) Consists  entirely of shares issuable upon exercise of options that are
exercisable within 60 days of February 28, 1997.

     (6)  Includes  11,250  shares  issuable  upon  exercise of options that are
exercisable within 60 days of February 28, 1997.

     (7)  Includes  18,000  shares  issuable  upon  exercise of options that are
exercisable within 60 days of February 28, 1997. Does not include 189,500 shares
beneficially  owned by  Merchant  Investments,  Inc.  ("Merchant").  Mr. Mark A.
Adley,  a director of the  Company,  is employed by Credit  Suisse  First Boston
Corporation,  a  wholly-owned  subsidiary of Credit  Suisse First  Boston,  Inc.
("CSFBI"),  which  indirectly  wholly  owns  Merchant.   Pursuant  to  an  Asset
Management  Agreement  among  CSFBI,  certain  affiliates  of  CSFBI  (including
Merchant) and The Clipper  Group,  L.P.  ("Clipper"),  Clipper  manages  certain
investments for such persons, including these shares. Under the Asset Management
Agreement,  Clipper  has sole power to vote  these  shares but does not have the
power (sole or shared) to dispose of any such shares.  Mr. Adley  disclaims  any
beneficial ownership of the shares owned by Merchant.

     (8)  Includes  4,500  shares  issuable  upon  exercise of options  that are
exercisable within 60 days of February 28, 1997.

     (9) Includes  446,057 shares  issuable to executive  officers and directors
pursuant to options which are  exercisable  within 60 days of February 28, 1997.
Does not include an aggregate of 189,500  shares as to which a certain  director
disclaims beneficial ownership (See Note (7)).

Item 13.  Certain Relationships and Related Transactions

     There are no relationships or transactions required to be reported herein.

                                       29
<PAGE>

<PAGE>

                                     PART IV


Item 14. Exhibits, Financial Statement Schedule, and Reports on Form 8-K.


(a) (1) and (2) Financial Statements and Schedule

     The report of independent auditors,  consolidated  financial statements and
financial  statement  schedules  listed in the Index to  Consolidated  Financial
Statements and Financial Statement Schedule on page F-1 hereof are filed as part
of this report, commencing on page F-2 hereof.

     All other financial statement schedules not listed in the Index are omitted
as the required information is not applicable or the information is given in the
financial statements or related notes.


(a) (3) Exhibits

     3.01 (a)  Restated  Certificate  of  Incorporation,  filed in  Delaware  on
December 1, 1993 (Filed as Exhibit 3.01 (a) to the  Company's  Form 10-K for the
year  ended  December  31,  1993,  File   No.0-22756   ("1993  Form  10-K")  and
incorporated herein by reference)

     (b)  Certificate  of Amendment  to Restated  Certificate  of  Incorporation
(Filed as Exhibit 3.01 to Form 10-Q for the quarter  ended June 30,  1995,  File
No.0-22756 ("June 30, 1995 Form 10-Q") and incorporated herein by reference)

     3.02 Bylaws  effective  on  December 1, 1993 (Filed as Exhibit  3.02 (a) to
1993 Form 10-K and incorporated herein by reference)

     4.01 Specimen  Certificate  representing  shares of Common Stock,  $.01 par
value,  of the registrant  (Filed as Exhibit 4.01 to the Company's  Registration
Statement or amendments  thereto on Form S-1,  Registration  No. 33-69634 ("Form
S-1") and  incorporated  herein by  reference)  10.01 (a) Teaming  Agreement for
DARPA Contract Proposal and Resulting Program Relating to Barium  Titanate-Based
DRAM Technology  dated August 10,1992  between  Advanced  Technology  Materials,
Inc.,  IBM,  Texas  Instruments,  Micro  Semiconductor,  Inc.  and Lam  Research
Corporation  (Filed as Exhibit 10.04 (a) to Form S-1 and incorporated  herein by
reference)

     (b) Amendment No. 1 to the Teaming  Agreement dated November 5, 1992 (Filed
as Exhibit 10.04 (b) to Form S-1 and incorporated herein by reference)

     (c) Amendment No. 2 to the Teaming  Agreement dated February 4, 1993 (Filed
as Exhibit 10.04 (c) to Form S-1 and incorporated herein by reference)

     (d) Agreement with the United States  Defense  Advanced  Research  Projects
Agency  (DARPA)  dated  April  8,  1993  re:  "Ultra-Dense  Capacitor  Materials
Processing  Partnership" for $5,020,194  (Filed as Exhibit 10.04 (d) to Form S-1
and incorporated herein by reference)

     10.02 Form of Key Employee Agreement between Advanced Technology Materials,
Inc. and each of Eugene G. Banucci,  Duncan W. Brown,  Ward C. Stevens and Peter
S.  Kirlin  (Filed  as  Exhibit  10.05 to Form S-1 and  incorporated  herein  by
reference)

     10.03 (a) License,  Marketing and Development  Agreement  between  Advanced
Technology  Materials,  Inc. and Millipore  Corporation  dated November 17, 1987
(Filed as Exhibit 10.07 (a) to Form S-1 and incorporated herein by reference)

                                       30
<PAGE>
     (b)  Agreement  of  Amendment,  Amendment  #1  to  License,  Marketing  and
Development  Agreement  dated June 27,  1991 (Filed as Exhibit 10.07 (b) to Form
S-1 and incorporated herein by reference)

     (c)  Agreement  of  Amendment,  Amendment  #2  to  License,  Marketing  and
Development  Agreement dated October 1, 1992 (Filed as Exhibit 10.07 (c) to Form
S-1 and incorporated herein by reference)

     (d)  Agreement  of  Amendment,  Amendment  #3  to  License,  Marketing  and
Development  Agreement  dated  September 26, 1994 (Filed as Exhibit 10.06 (d) to
Form 10-K for the year ended  December 31, 1994,  File No.  0-22756  ("1994 Form
10-K") and incorporated herein reference)

     10.04 (a) Letter Agreement between Advanced Technology Materials,  Inc. and
Silicon Valley Bank dated September 29, 1994 (Filed as Exhibit 10.08 (a) to 1994
Form 10-K and incorporated herein by reference)

     (b) Promissory  Note from Advanced  Technology  Materials,  Inc. to Silicon
Valley Bank dated  September  7, 1994  (Filed as Exhibit  10.08 (b) to 1994 Form
10-K and incorporated herein by reference)

     (c) Negative Pledge Agreement by and between Advanced Technology Materials,
Inc. and Silicon  Valley Bank dated August 31, 1994 (Filed as Exhibit  10.08 (c)
to 1994 Form 10-K and incorporated herein by reference)

     10.05  Agreement of Lease between Melvyn J. Powers and Mary P. Powers d/b/a
M&M Realty and  Advanced  Technology  Materials,  Inc.  dated  December 23, 1994
(Filed as Exhibit 10.09 to 1994 Form 10-K and incorporated herein by reference)

     10.06 Lease Agreement between Montague Oaks Associates,  Phase III and ATMI
EcoSys  Corporation  dated February 7, 1995 (Filed as Exhibit 10.10 to 1994 Form
10-K and incorporated herein by reference)

     10.07 (a) Loan and Financing  Agreement by and between Advanced  Technology
Materials,  Inc. and the Connecticut  Development  Authority dated June 27, 1995
(Filed as Exhibit 10.01(a) to June 30, 1995 Form 10-Q)

     (b)  Promissory  Note  from  Advanced  Technology  Materials,  Inc.  to the
Connecticut  Development  Authority  dated June 27, 1995 (Filed as Exhibit 10.01
(b) to June 30, 1995 Form 10-Q)

     (c) Security Agreement by and between Advanced Technology  Materials,  Inc.
and the Connecticut  Development Authority dated June 27, 1995 (Filed as Exhibit
10.01(c) to June 30, 1995 Form 10-Q)

     (d) Stock  Subscription  Warrant  granted  to the  Connecticut  Development
Authority  dated June 27, 1995 (Filed as Exhibit  10.01(d) to June 30, 1995 Form
10-Q)

     10.08 (a) Letter Agreement between Advanced Technology Materials,  Inc. and
Silicon Valley Bank dated  September 22, 1995 (Filed as Exhibit  10.08(d) to the
Company's  Form 10-K for the  December 31, 1995,  File No.  0-22756  ("1995 Form
10-K") and incorporated herein by reference)

     (b) Promissory  Note from Advanced  Technology  Materials,  Inc. to Silicon
Valley Bank dated September 22, 1995 (Filed as Exhibit 10.08(d) to the 1995 Form
10-K and incorporated herein by reference)

     10.09 Loan  Agreement  between  Advanced  Technology  Materials,  Inc.  and
Silicon Valley Bank dated December 27, 1996 (Filed herewith)

     11.01 Statement re: computation of per share earnings (Filed herewith)

     21.01 Subsidiaries of the registrant (Filed herewith)

     23.01 Consent of Ernst & Young LLP (Filed herewith)

     27.01 Financial Data Schedule (Filed herewith)



b) Reports on Form 8-K

         None
                                       31
<PAGE>

<PAGE>
                                       F-1

   Index to Consolidated Financial Statements and Financial Statement Schedule


Report of Independent Auditors                                             F-2

Consolidated Balance Sheet at December 31, 1996 and 1995                   F-3

Consolidated Statement of Income for the years ended December 31, 1996,
1995 and 1994                                                              F-4

Consolidated Statement of Stockholders' Equity for the years
ended December 31, 1996, 1995 and 1994                                     F-5

Consolidated Statement of Cash Flows for the years
ended December 31, 1996, 1995 and 1994                                     F-6

Notes to Consolidated Financial Statements                                 F-7


Financial Statement Schedule

Schedule II - Valuation and qualifying accounts                           F-16

                                       F-1
<PAGE>

<PAGE>
                         Report of Independent Auditors


The Board of Directors and Stockholders of
Advanced Technology Materials, Inc.


     We have audited the  accompanying  consolidated  balance  sheet of Advanced
Technology  Materials,  Inc. as of December  31, 1996 and 1995,  and the related
consolidated statements of income,  stockholders' equity and cash flows for each
of the three  years in the period  ended  December  31,  1996.  Our audits  also
included the financial  statement  schedule  listed in the Index at Item 14 (a).
These financial  statements and schedule are the responsibility of the Company's
management.  Our  responsibility  is to express  an  opinion on these  financial
statements and schedule based on our audits.

     We conducted  our audits in accordance  with  generally  accepted  auditing
standards.  Those standards require that we plan and perform the audit to obtain
reasonable assurance about whether the financial statements are free of material
misstatement.  An audit includes examining, on a test basis, evidence supporting
the amounts and disclosures in the financial statements.  An audit also includes
assessing the  accounting  principles  used and  significant  estimates  made by
management,  as well as evaluating the overall financial statement presentation.
We believe that our audits provide a reasonable basis for our opinion.

     In our opinion,  the consolidated  financial  statements  referred to above
present fairly, in all material respects, the consolidated financial position of
Advanced  Technology  Materials,  Inc.  at December  31, 1996 and 1995,  and the
consolidated  results of its operations and its cash flows for each of the three
years in the period ended  December  31,  1996,  in  conformity  with  generally
accepted  accounting  principles.  Also, in our opinion,  the related  financial
statement  schedule,   when  considered  in  relation  to  the  basic  financial
statements  taken as a whole,  presents  fairly  in all  material  respects  the
information set forth therein.






ERNST & YOUNG LLP


Stamford, Connecticut
February 14, 1997
                                      F-2
<PAGE>

<PAGE>
<TABLE>
<CAPTION>
                       Advanced Technology Materials, Inc.
                           Consolidated Balance Sheet
                           --------------------------

                                                                December 31,
Assets                                                     1996            1995
- ------                                                     ----            ----
<S>                                                <C>             <C>
Current assets:
Cash and cash equivalents (Note 1)                 $  4,437,015    $  3,609,265
Marketable (Notes 1 and 2)                           16,969,073      21,855,473
securities
Accounts receivable, net of allowance
 for doubtful accounts
 of $141,504 in 1996, $93,491 in 1995 (Note 3)        9,377,777       9,233,015
Inventories (Notes 1 and 4)                           4,541,282       2,647,142
Other                                                   500,324         345,486
                                                        -------         -------
Total current assets                                 35,825,471      37,690,381


Property and equipment, net (Notes 1 and 5)           8,102,218       5,575,343

Long-term investment (Note 6)                         1,000,000       1,000,000
Goodwill and other long term assets,
 net (Notes 1 and 11)                                 5,190,758       5,532,216
                                                      ---------       ---------
                                                   $ 50,118,447    $ 49,797,940
                                                   ============    ============


Liabilities and stockholders' equity
Current liabilities:
Accounts payable                                   $  3,469,530    $  3,121,355
Accrued expenses                                      1,996,587       1,799,322
Accrued commissions                                   1,378,888         984,443
Accrued payroll and benefits                            465,280         210,717
Notes payable, current portion (Note 7)                 621,463       4,725,238
Other                                                   790,261         625,495
                                                        -------         -------
Total current liabilities                             8,722,009      11,466,570

Notes payable, less current portion (Note 7)          4,944,517       5,257,155
Other long-term liabilities                              59,382         177,086

Stockholders' equity: (Note 10)
Preferred stock, par value $.01:
  1,000,000 shares authorized;
  none issued and outstanding                                --              --
Common stock, par value $.01:
  15,000,000 shares authorized;
issued and outstanding 8,775,810
  in 1996 and 8,721,61                                   87,758          87,216
Additional paid-in capital                           37,234,277      37,060,652
Accumulated deficit                                    (929,496)     (4,250,739)
                                                       --------      ----------
Total stockholders' equity                           36,392,539      32,897,129
                                                     ----------      ----------
                                                   $ 50,118,447    $ 49,797,940
                                                   ============    ============
</TABLE>
See accompanying notes.
                                      F-3
<PAGE>

<PAGE>
<TABLE>
<CAPTION>

                       Advanced Technology Materials, Inc.
                        Consolidated Statement of Income
                        --------------------------------

                                                  Year ended December 31
                                                  ----------------------
                                           1996            1995            1994
                                           ----            ----            ----
<S>                                <C>             <C>             <C>
Revenues (Note 1):
    Product revenues               $ 36,503,728    $ 21,336,408    $ 12,538,246
    Contract revenues                 9,845,973       8,711,924       7,222,403
                                      ---------       ---------       ---------
Total revenues                       46,349,701      30,048,332      19,760,649

Cost of revenues:
    Cost of product revenues         15,939,051       9,608,831       5,838,310
    Cost of contract revenues         8,341,455       7,490,568       6,151,215
                                      ---------       ---------       ---------
Total cost of revenues               24,280,506      17,099,399      11,989,525
                                     ----------      ----------      ----------
Gross profit                         22,069,195      12,948,933       7,771,124

Operating expenses:
    Research and development (Note 1) 7,626,534       4,205,997       3,414,536
    Selling, general,
      and administrative             11,509,827       8,557,730       5,588,171
                                     ----------       ---------       ---------
                                     19,136,361      12,763,727       9,002,707
                                     ----------      ----------       ---------
Operating income (loss)               2,932,834         185,206      (1,231,583)

Interest income                       1,113,548         737,948         501,884
Interest expense (Note 7)              (485,660)       (234,951)       (111,612)
Other income, net (Notes 11 and 12)        --              --         3,601,042
                                      ---------       ---------       ---------
                                        627,888         502,997       3,991,314

Income before taxes                   3,560,722         688,203       2,759,731

Income taxes (Note 9)                   239,479         134,157         123,600
                                        -------         -------         -------
Net income                         $  3,321,243    $    554,046    $  2,636,131
                                   ============    ============    ============

Net income per share (Note 1)      $       0.35    $       0.07    $       0.35
                                   ============    ============    ============
Weighted average shares outstanding
  (Note 1)                            9,359,021       8,074,032       7,595,193
                                      =========       =========       =========

</TABLE>




See accompanying notes.
                                      F-4
<PAGE>

<PAGE>
<TABLE>
<CAPTION>

                       Advanced Technology Materials, Inc.
                 Consolidated Statement of Stockholders' Equity
                 ----------------------------------------------

                                           Additional
                               Common       Paid-in    Accumulated
                               Stock        Capital     Deficit       Total
                              ---------   ----------  -----------   ----------
<S>                             <C>      <C>          <C>           <C>

Balance at December 31, 1993    $69,406  $19,470,767  $(7,440,916)  $12,099,257

Issuance of 24,440 common shares
pursuant to the exercise of
employee stock options              244       11,529         --          11,773

Issuance of 74,017 common shares
pursuant to the exercise of
warrants                            740       36,760         --          37,500

Net income                         --           --      2,636,131     2,636,131
                              ---------    ---------    ---------     ---------

Balance at December 31, 1994     70,390   19,519,056   (4,804,785)   14,784,661

Issuance of 137,571 common shares
pursuant to the exercise of
employee stock options            1,376      111,979         --         113,355

Sale of 1,525,000 common shares,
net of issuance costs            15,250   17,177,317         --      17,192,567

Issuance of 20,000 common shares
pursuant to the acquisition of
Epitronics                          200      202,300         --         202,500

Compensation from the issuance of
common stock options               --         50,000         --          50,000

Net income                         --           --        554,046       554,046
                              ---------    ---------    ---------     ---------


Balance at December 31, 1995     87,216   37,060,652   (4,250,739)   32,897,129

Issuance of 54,199 common shares
pursuant to the exercise of
employee stock options              542      173,625         --         174,167

Net income                         --           --      3,321,243     3,321,243
                              ---------    ---------    ---------     ---------
Balance at December 31, 1996    $87,758  $37,234,277  $  (929,496)  $36,392,539
                                =======  ===========  ===========   ===========
</TABLE>

See accompanying notes.

                                      F-5
<PAGE>

<PAGE>
<TABLE>
<CAPTION>

                       Advanced Technology Materials, Inc.
                      Consolidated Statement of Cash Flows
                      ------------------------------------


                                                  Year ended December 31,
                                                  -----------------------
                                              1996           1995          1994
                                              ----           ----          ----
<S>                                     <C>           <C>            <C>
Operating activities
Net income                              $3,321,243       $554,046    $2,636,131
Adjustments to reconcile net income to net cash
 provided (used) by operating activities
  Depreciation and amortization          2,295,336      1,409,086     1,058,950
  Gain on restructuring of joint venture      --             --      (4,609,634)
  Stock option compensation                   --           50,000          --
  Gain on disposal of property and equipment  --             --         (20,626)
  Changes in operating assets and liabilities
   Increase in accounts receivable        (144,762)    (3,774,193)     (904,666)
   Increase in inventory                (2,118,192)      (478,952)     (553,327)
   Increase in other assets               (215,263)      (134,087)      (16,196)
   Increase in accounts payable            348,175        595,692       423,895
   Increase in accrued expenses            846,273        324,345       730,414
   (Decrease) increase in
     other liabilities                     (52,938)       227,927       (86,669)

Total adjustments                          958,629     (1,780,182)   (3,977,859)
                                           -------     ----------    ----------
Net cash provided (used)
 by operating activities                 4,279,872     (1,226,136)   (1,341,728)
                                         ---------     ----------    ----------
Investing activities
 Capital expenditures                   (4,694,246)    (3,604,139)   (1,784,946)
 Long-term investment                         --       (1,000,000)         --
 Sale (purchase) of
   marketable securities, net            4,886,400    (11,212,815)    2,432,635
 Payments to Vector shareholders              --             --         (93,309)
 Payments for acquisitions              (4,000,000)      (550,000)         --
 Proceeds from sale of assets              597,970           --            --
 Net cash received from
   joint venture restructuring                --             --       2,457,308
                                         ---------     ----------    ----------
 Net cash (used) provided
   by investing activities              (3,209,876)   (16,366,954)    3,011,688
                                        ----------    -----------     ---------
Financing activities
 Proceeds from issuance of notes payable   727,216      2,588,169     1,011,438
 Principal payments on notes payable    (1,143,629)      (741,133)   (1,049,605)
 Proceeds from sale of common stock           --       17,192,567          --
 Proceeds from exercise of stock options
 and warrants                              174,167        113,355        49,273
                                           -------        -------        ------

Net cash (used) provided
   by financing activities                (242,246)    19,152,958        11,106
                                          --------     ----------        ------

Net increase in cash and cash equivalents  827,750      1,559,868     1,681,066
Cash and cash equivalents, beginning
 of year                                 3,609,265      2,049,397       368,331
                                         ---------      ---------       -------
Cash and cash equivalents, end of year  $4,437,015     $3,609,265    $2,049,397
                                        ==========     ==========    ==========

</TABLE>

See accompanying notes.

                                      F-6
<PAGE>

<PAGE>

                       Advanced Technology Materials, Inc.
                   Notes to Consolidated Financial Statements

1. Summary of Significant Accounting Policies

Company's Activities

     The activities of Advanced Technology Materials,  Inc. and its subsidiaries
(the  Company")  are  focused  on  providing   products  and  services  to  the
semiconductor  industry. The Company is engaged in the development,  manufacture
and sale of equipment and materials based on the Company's  proprietary chemical
vapor  deposition  ("CVD")  technologies.  Revenues are derived from the sale of
point-of-use  environmental  equipment  and  specialty  materials  and  delivery
systems for the semiconductor  industry.  The Company also derives revenues from
contract  research  and  development  activities  related  to  high  performance
semiconductor  materials  and  devices and  royalties  generated  under  various
license agreements.

Principles of Consolidation

     The  consolidated  financial  statements  include the  accounts of Advanced
Technology Materials,  Inc. and all wholly and majority owned subsidiaries.  All
significant  intercompany  accounts and  transactions  have been  eliminated  in
consolidation.

Revenue Recognition

     Product revenues are recognized upon shipment of goods.  Contract  revenues
under fixed-price and cost-reimbursement-type contracts are recognized using the
percentage of completion  method based upon costs incurred and estimated  future
costs.  Contract revenues from the U.S.  Government were $9,845,973,  $8,711,924
and  $7,018,455  for  the  years  ended  December  31,  1996,   1995,  and  1994
respectively.

Use of Estimates

     The  preparation of the financial  statements in conformity  with generally
accepted  accounting  principles  requires  management  to  make  estimates  and
assumptions  that affect the amounts  reported in the financial  statements  and
accompanying notes. Actual results may differ from those estimates.

Research and Development

     Research and development costs,  including  materials,  labor, and overhead
related to  self-funded  projects  and cost sharing  arrangements  with the U.S.
Government, are expensed as incurred.

Cash and Cash Equivalents

     The Company  considers  all highly  liquid  investments  with a maturity of
three months or less when purchased to be cash equivalents.

Marketable Securities

     Marketable securities are classified as available for sale and are reported
at fair value, which approximates  cost.  Management  determines the appropriate
classification  of debt  securities at the time of purchase and and  reevaluates
such designation as of each balance sheet date.
                                      F-7
<PAGE>


<PAGE>
                       Advanced Technology Materials, Inc.
                   Notes to Consolidated Financial Statements
                                   (continued)


     The  cost of  securities  sold is based on the  specific  reevaluates  such
designation as of each balance sheet date. The cost of securities  sold is based
on the specific  identification method. Interest on these securities is included
in interest income.

Inventories

     Inventories  are  stated at the  lower of cost or  market on the  first-in,
first-out (FIFO) method.

Property and Equipment

     Property and equipment is stated at cost.  Depreciation and amortization of
property  and  equipment  is computed  using the  straight-line  method over the
estimated useful lives of the assets, which vary from three to ten years.

Taxes

     The Company  accounts  for income  taxes in  accordance  with  Statement of
Financial Accounting Standards No. 109, "Accounting for Income Taxes" (FAS 109).
Under FAS 109, the  liability  method is used in  accounting  for income  taxes.
Under this method, deferred tax assets and liabilities are determined based upon
differences  between financial reporting and tax basis of assets and liabilities
and are  measured  using the  enacted  tax rates and laws that will be in effect
when the differences are expected to reverse.

Fair Values of Financial Instruments

     Fair  values  of cash  and cash  equivalents,  short-term  investments  and
short-term  debt  approximate  cost due to the short period of time to maturity.
The fair value of long term debt approximates the carrying amount.

Long Lived Assets

     The Company reviews on a periodic basis the value of its long-lived  assets
to  determine  whether an  impairment  exists.  At December  31,  1996,  no such
impairment  existed.  Goodwill  and other  long term  assets  are  stated net of
accumulated amortization of $292,500 and $75,386 at December 31, 1996 and 1995,
respectively.

Stock Based Compensation

     Effective in fiscal year 1996,  the company  adopted  Financial  Accounting
Statement No. 123,  "Accounting  for Stock-Based  Compensation."  This statement
defines a fair value based method of accounting for employee stock  compensation
plans.  However,  it also allows an entity to  continue to measure  compensation
cost for those plans in accordance with Accounting Principle Board (APB) Opinion
No.  25,  "Accounting  for  Stock  Issued  to  Employees."  Under  APB  No.  25,
compensation cost is the excess, if any, of the quoted market price of the stock
at the grant date over the amount the  employee  must pay to acquire  the stock.
The  company  has  elected  to  continue  to  account  for  its  employee  stock
compensation  plans under APB No. 25. Pro forma  disclosures of net earnings and
earnings  per share,  as if the fair value based method of  accounting  had been
applied, are presented in Note 10.

Per Share Data

     Earnings  per common share are  computed  using the  treasury  stock method
based  on the  weighted  average  number  of  common  shares  and  common  stock
equivalent shares  outstanding  during the period.  Shares outstanding have been
restated to include those shares that would have been issued in connection  with
the Vector  acquisition (see Note 11) in each of the periods  presented.  Shares
from the assumed  exercise of options and  warrants  granted by the Company have
been included in the computations of earnings per share for all periods,  unless
their inclusion would be antidilutive.
                                      F-8
<PAGE>

2. Marketable Securities
<TABLE>
<CAPTION>
Marketable securities are comprised of the following:

                                                            December 31,
                                                            ------------

                                                        1996               1995
                                                        ----               ----
<S>                                              <C>                <C>
U.S. Government Obligations ..............        $9,537,690        $14,080,978
Corporate Obligations ....................         7,431,383          7,774,495
                                                   ---------          ---------
                                                 $16,969,073        $21,855,473
                                                 ===========        ===========
</TABLE>

     All of the Company's marketable securities have maturities of less than two
years.


3. Accounts Receivable

     Amounts due from  various  agencies of the United  States  Government  were
approximately  22% of accounts  receivable  for both December 31, 1996 and 1995,
respectively. Unbilled accounts receivable amounted to $757,172 and $586,358 and
customer  advances,  included in other  liabilities,  amounted  to $275,653  and
$446,995 at December 31, 1996 and 1995, respectively.

     Credit is extended to commercial  customers based on an evaluation of their
financial   condition  and  collateral  is  not  generally   required.   Certain
transactions  with foreign  customers  are  supported by letters of credit.  The
Company  maintains an allowance for doubtful accounts at a level that management
believes is sufficient to cover potential credit losses.


4. Inventories

<TABLE>
<CAPTION>
Inventories are comprised of the following:

                                                        December 31,
                                                        ------------
                                                      1996                 1995
                                                      ----                 ----
<S>                                             <C>                  <C>
Raw materials                                   $4,143,818           $2,252,841
Work in process                                    686,898              614,069
Finished goods                                     369,846               59,291
                                                   -------               ------
                                                 5,200,562            2,926,201

Obsolescence reserve                              (659,280)            (279,059)
                                                  --------             --------
                                                $4,541,282           $2,647,142
                                                ==========           ==========
</TABLE>

                                      F-9
<PAGE>

<PAGE>
5. Property and Equipment
<TABLE>
<CAPTION>
Property and equipment is comprised of the following:
                                                          December 31,
                                                          ------------
                                                      1996                 1995
                                                      ----                 ----
<S>                                            <C>                   <C>
Machinery and equipment ..............         $11,610,508           $8,734,575
Furniture and fixtures ...............             708,072              565,020
Leasehold improvements ...............           3,516,401            2,218,837
                                                 ---------            ---------
                                                15,834,981           11,518,432
Accumulated depreciation
   and amortization ..................          (7,732,763)          (5,943,089)
                                                ----------           ----------
                                                $8,102,218           $5,575,343
                                                ==========           ==========

</TABLE>
     Depreciation  expense for the years ended December  31,1996,  1995 and 1994
was $1,895,142, $1,333,700 and $1,058,950, respectively.

6. Long-Term Investment

     On April 1, 1995, the Company purchased $1,000,000 of convertible preferred
stock of Candescent  Technologies  Corporation  ("CTC"),  formerly Silicon Video
Corporation,  a San Jose-based  developer of flat panel displays.  This stock is
convertible into common shares on a one-to-one  basis and has certain  dividend,
liquidation,  and voting rights equivalent with other preferred  stockholders of
CTC.  In  conjunction  with  this  investment,  the  Company  has  expanded  its
collaboration  with  CTC to  include  further  joint  research  and  development
programs and manufacturing  rights related to certain  components of CTC's "Thin
CRT." The investment is recorded at cost.

7. Notes Payable
<TABLE>
<CAPTION>
Notes payable consist of the following:
                                                             December 31,
                                                             ------------
                                                        1996             1995
                                                        ----             ----
<S>                                                 <C>              <C>
Note payable in conjunction
 with acquisition of Guardian Systems,
 bearing interest at 5.4%,
 due on January 4, 1996  .....................     $      --         $4,000,000
Note payable in conjunction with
 acquisition of Guardian Systems,
 bearing interest at 8.5% and 8.25%
 at December 31, 1996 and 1995, due
 in three annual installments
 beginning January 1, 1999 ...................       2,000,000        2,000,000
Term loan with Connecticut state
 agency, bearing interest at 6% at
 December 31, 1996 and 1995,
 respectively, due through June 2002 .........       1,300,000        1,300,000
Term loan with Connecticut state
 agency, bearing interest at 5%,
 due on April 1, 2001 ........................         500,000             --
Equipment credit line with a
 commercial bank, bearing interest
 at 9% and 9.5% at December 31, 1996
 and 1995, respectively, due through
 June 2000 ...................................       1,701,453        2,018,808
Other notes payable ..........................          64,527          663,585
                                                        ------          -------
                                                     5,565,980        9,982,393
Less current portion .........................        (621,463)      (4,725,238)
                                                      --------       ----------
                                                    $4,944,517       $5,257,155
                                                    ==========       ==========
</TABLE>
                                      F-10
<PAGE>
<TABLE>
<CAPTION>
The approximate aggregate debt maturities are as follows:

<S>                                               <C>
Year ending December 31:
         1997                                     $  621,463
         1998                                        687,056
         1999                                      1,246,011
         2000                                        933,562
         2001                                      1,344,731
         thereafter                                  733,157
                                                     -------
                                                  $5,565,980
                                                  ==========

</TABLE>
     The  seven-year  term  loan of  $1,300,000  is  collateralized  by  various
equipment,  leasehold  improvements and renovations in the Company's Connecticut
facility.

     The Company's  equipment  credit lines bear interest at prime plus 1/2% per
annum and are  collateralized  by certain  assets.  The Company is in compliance
with  the  credit  line  covenants,  including  maintaining  certain  liquidity,
leverage, and tangible net worth levels.

     In December,  1996,  the Company  obtained a $10 million  unsecured line of
credit  with  a  commercial  bank  which  permits  borrowing  levels  tied  to a
percentage of accounts  receivable and inventories.  This line bears interest at
prime (with LIBOR  options)  and expires on  December  26,  1997.  There were no
borrowings under this line at December 31, 1996.

     Interest  paid was  $481,129,  $239,482  and  $111,612  for the years ended
December 31, 1996, 1995 and 1994, respectively.

8. Leases

     The  Company  leases  office and  manufacturing  facilities  under  several
operating  leases.  The lease for its Danbury,  Connecticut  facility expires in
August  2005 while the EcoSys San Jose,  California  facility  lease  expires in
March 2002.  Rental  expense was  $889,594,  $435,908 and $345,976 for the years
ended December 31, 1996, 1995 and 1994, respectively.

     The following is a schedule of future  minimum lease payments for operating
leases as of December 31, 1996:
<TABLE>
<CAPTION>
<S>                                                                 <C>
                                                                    Operating
Year ending December 31:                                             Leases
- ------------------------                                             ------
         1997                                                       $   875,356
         1998                                                           765,886
         1999                                                           763,734
         2000                                                           685,865
         2001                                                           694,096
         thereafter                                                   1,826,849
                                                                      ---------
Total minimum lease payments                                         $5,611,786
                                                                     ==========
</TABLE>
                                      F-11
<PAGE>


9. Income Taxes

     At December 31, 1996, the Company had loss  carryforwards for United States
federal  income tax  purposes  of  approximately  $2,800,000  and  research  and
development tax credit carryforwards of approximately  $326,000 expiring in 2001
through  2010.  It also had  alternative  minimum  tax credit  carryforwards  of
approximately  $85,000, with no expiration.  For state tax purposes, the Company
had loss  carryforwards  of approximately  $1,800,000  expiring between 1997 and
2000.

     Significant components of the Company's deferred tax assets and liabilities
are as follows:
<TABLE>
<CAPTION>
                                                           December 31,
                                                           ------------
                                                       1996           1995
                                                       ----           ----
<S>                                             <C>            <C>
Deferred tax assets:
   Accrued liabilities ......................      $139,000       $282,000
   Net operating loss carryforwards
    and tax credits .........................       829,000      1,823,000
   Inventory reserves .......................       577,000        281,000
   Other, net ...............................       161,000        482,000
                                                    -------        -------
                                                  1,706,000      2,868,000
Deferred tax liabilities - none .............             -              -

Net deferred tax assets .....................     1,706,000      2,868,000
Valuation allowance .........................    (1,706,000)    (2,868,000)
                                                 ----------     ----------
Amount recognized in the financial statements   $         -    $         -

</TABLE>
     The reconciliation of income tax computed at the U.S. federal statutory tax
rates to the Company's tax expense is:
<TABLE>
<CAPTION>
                                             1996           1995           1994
                                             ----           ----           ----
<S>                                    <C>              <C>            <C>
U.S. statutory rate .............      $1,210,600       $233,900       $935,700
State income taxes ..............         317,500        149,700         81,900
Net operating loss
 carryforward utilization .......      (1,263,100)      (263,600)      (894,000)
Other, net ......................         (25,271)        14,157           --
                                          -------         ------         ------
                                         $239,479       $134,157       $123,600
                                         ========       ========       ========
</TABLE>


10. Stockholders' Equity

     In October  1995,  the  Company  completed a public  offering of  1,600,000
shares of common  stock at $12.25  per share.  Net  proceeds  to the  Company of
$17,192,567  were from 1,525,000  shares sold by the Company while 75,000 shares
were sold for various  selling  shareholders.  Costs of the offering,  including
underwriting commissions, amounted to $1,488,683.

     An  amendment  of  the  Company's  Restated  Certificate  of  Incorporation
approved by its shareholders in May 1995,  provided for an increase in the
Company's authorized common shares to 15,000,000.

                                      F-12
<PAGE>

<PAGE>
Stock Plans

     In May 1995, the Company's  shareholders  approved the adoption of the 1995
Stock Plan  ("1995  Plan"),  which  provides  for the  granting of up to 500,000
nonqualified  stock  options,   "incentive  stock  options"  (ISOs")  and  stock
appreciation rights to employees, directors and consultants of the Company.

     The Company's 1987 Stock Plan (the "1987 Plan"),  as amended,  provides for
the granting of up to 1,115,833  nonqualified stock options and "incentive stock
options" ("ISOs").

     Under the terms of both stock plans,  nonqualified  options granted may not
be at a price of less than 50% of the fair market value of the common stock, and
ISOs granted may not be at a price of less than 100% of fair market value of the
common stock on the date of grant.

     Options are  generally  exercisable  commencing  one year after the date of
grant at the rate of 20% per annum on a cumulative basis.  Nonqualified  options
expire up to ten years and one  month  from the date of grant,  and ISOs  expire
five to ten years from the date of grant.

<TABLE>
<CAPTION>
                                                     Number of      Option price
                                                      Shares         per share
                                                      ------         ---------
<S>                                                   <C>          <C>
Options outstanding at December 31, 1993 ........      724,046       $.28-$7.00
  Granted .......................................      156,900      $5.00-$6.38
  Canceled ......................................      (22,910)      $.44-$7.00
  Exercised .....................................      (24,440)      $.28-$ .53
                                                       -------       ---- -----

Options outstanding at December 31, 1994 ........      833,596       $.28-$7.00
  Granted .......................................      305,950     $6.88-$13.88
  Canceled ......................................      (27,670)      $.53-$6.38
  Exercised .....................................     (137,571)      $.28-$5.50
                                                      --------       ---- -----

Options outstanding at December 31, 1995 ........      974,305      $.28-$13.88
  Granted .......................................       92,500     $9.88-$17.63
  Canceled ......................................      (53,590)     $.53-$12.50
  Exercised .....................................      (54,999)     $.28-$12.50
                                                       -------      ---- ------
Options outstanding at December 31, 1996 ........      958,216      $.28-$17.63
                                                       =======      ==== ======
</TABLE>
     At December  31,  1996,  options for 567,066  shares are  exercisable,  and
options  for  239,043  shares are  available  for grant.  The  weighted  average
exercise  price of options are $4.99 and $3.43 for 1996 and 1995,  respectively.
The weighted average remaining contractual life of these options is 6.5 years.

     If compensation expense for the Company's plans had been determined for all
stock option  grants based on the fair value at the grant dates for awards under
those plans, consistent with the method described in SFAS No. 123, the Company's
net  income and  earnings  per share  would  have been  reduced to the pro forma
amounts indicated below:
<TABLE>
<CAPTION>
                                       1996                  1995
                                       ----                  ----
      <S>                          <C>                     <C>
      Net earnings:                $3,000,000              $488,000
      Earnings per share:              $.32                   $.06
</TABLE>
                                      F-13
<PAGE>
     During the initial  phase-in  period,  as required by SFAS No. 123, the pro
forma amounts were  determined  based on the stock option  grants  subsequent to
January  1,  1995.  Therefore,  the  pro  forma  amounts  presented  may  not be
indicative of the effects of compensation  cost on net earnings and earnings per
share in future years due to the timing of stock option  grants and  considering
that options generally vest over a five year period.

     The fair value of each option grant, for pro forma disclosure  purposes was
estimated on the date of grant using the Black-Scholes option pricing model with
the following weighted average assumptions for 1996 and 1995:
<TABLE>
<CAPTION>
                                                  1996                 1995
                                                  ----                 ----
     <S>                                     <C>                  <C>
     Expected dividend yield                      none                 none
     Risk free interest rate                     6.25%                6.10%
     Expected volatility                         54.6%                58.2%
     Expected life of options                7.5 years            7.5 years
</TABLE>
     The weighted  average fair value of stock options  granted in 1996 and 1995
was $8.21 and $6.72, respectively.

Warrants

     In  connection  with its  initial  public  offering,  the  Company  granted
warrants to its  underwriters  to purchase  131,250  common shares at $11.25 per
share,  which became exercisable on November 23, 1994 and expire on November 23,
1998.  Additional  warrants  have  been  granted  to  agencies  of the  State of
Connecticut  in connection  with certain loan  agreements  with those  agencies.
These warrants are for an aggregate of 70,000 shares at exercise  prices ranging
from $10.13 to $11.25, of which 30,000 are vested as of December 31, 1996.


11. Mergers and Acquisitions

     On December 30, 1995, the Company acquired certain assets pertaining to the
Guardian Systems ("Guardian") product line of Messer Greisheim Industries,  Inc.
for  $6,000,000.   In  connection  with  this  purchase,  the  Company  recorded
approximately  $4,900,000  in goodwill to be amortized  over twenty  years.  The
Guardian  product  line  consists  of  thermal  destruction  units  used  in the
treatment of effluent in the semiconductor industry. The product line has become
part of the Company's Ecosys operation.

     During 1995,  the Company also  acquired  the assets of two  businesses  in
exchange for 20,000 shares of its Common Stock,  $550,000 in cash and a $700,000
promissory  note bearing  interest at prime plus 1%, payable in equal  quarterly
installments  beginning in September 1995. In 1996, one of those  businesses was
subsequently  sold,  the  $700,000  promissory  note was paid in full and a note
receivable of  approximately  $498,000 was recorded.  This note receivable bears
interest at 8% and is payable on October 31, 1999.

     The pro forma unaudited  results of operations for the years ended December
31, 1995 and 1994,  assuming the purchase of all the above  businesses  had been
consummated as of the beginning of each period presented, are as follows:
                                      F-14
<PAGE>
<TABLE>
<CAPTION>
                                                         1995               1994
                                                         ----               ----
<S>                                               <C>                <C>
Revenues .................................        $35,466,000        $25,660,000
Net income ...............................            813,000          2,371,000
Net income per common share ..............               $.10               $.31
</TABLE>
     On September  15, 1994,  the Company  issued  698,505  shares of its Common
Stock and  $93,309 in cash in  exchange  for all of the  issued and  outstanding
shares  of  common  stock  of  Vector.   In  connection  with  this  acquisition
approximately  $1.0 million of costs were charged to other  income,  net,  which
were  non-recurring  in nature and  consisted  primarily of  professional  fees,
compensation  costs, and provisions for miscellaneous  costs associated with the
integration and consolidation of Vector with the Company.

     The Vector acquisition was treated as a pooling of interests.  For the nine
months  ended  September  30, 1994 prior to the  acquisition,  revenues  and net
income of  Vector  included  in the  financial  statements  are  $3,149,037  and
$207,604.


12. Asset Sale and Restructuring Agreement

     On September 28, 1994, the Company executed an Asset Sale and Restructuring
Agreement whereby certain assets of a majority owned subsidiary,  valued at $.02
million,  were sold in exchange  for  approximately  $2.7  million in cash and a
royalty  on future  sales of  certain  products.  A gain of  approximately  $4.6
million was recognized as a result of the transaction which is included in other
income,  net.  Revenue  generated by these assets was  $4,568,955.  The net loss
incurred was $25,528 for the period from January 1, 1994 to September 28, 1994.


13.  Geographic Data

     During 1996 and 1995, the Company had export sales of approximately 31% and
29%,  respectively.  Sales to Asia,  primarily Korea, were approximately 27% and
24% of the Company's revenues.

<TABLE>
<CAPTION>
Quarterly Results of Operations (unaudited)

(Thousands of Dollars, except per share amounts)

1996                          --------------Quarter-----------------       Year
- ----                                                                       ----
                               First     Second      Third     Fourth
                               -----     ------      -----     ------
<S>                          <C>        <C>        <C>        <C>        <C>
Net sales ...............    $10,062    $12,376    $12,145    $11,767    $46,350
Gross profit ............      4,780      6,122      5,786      5,381     22,069
Net income ..............        469        640        975      1,237      3,321

Income per share ........       $.05       $.07       $.10       $.13       $.35

</TABLE>
<TABLE>
<CAPTION>
1995                            -------------Quarter-----------------      Year
- ----                                                                       ----
                               First     Second      Third     Fourth
                               -----     ------      -----     ------
<S>                           <C>        <C>        <C>        <C>      <C>
Net sales ................    $6,066     $7,185     $7,996     $8,801   $30,048
Gross profit .............     2,520      3,102      3,343      3,984    12,949
Net income (loss) ........      (158)       166        302        345       554

Income (loss) per share ..     $(.02)      $.02       $.03       $.04      $.07
</TABLE>
                                      F-15
<PAGE>

<PAGE>
<TABLE>
<CAPTION>
                                   Schedule II

                       ADVANCED TECHNOLOGY MATERIALS, INC.
                         VALUATION & QUALIFYING ACCOUNTS

                                    Balance at
                                    Beginning   Charged to            Balance at
 Year Ended                           of          Cost/                  End of
 ----------                         Period       Expense   Deductions   Period
                                    ------       -------   ----------   ------
<S>                                 <C>         <C>        <C>        <C>
December 31, 1994
   Allowance for doubtful accounts  $ 42,399    $ 48,045   $  8,003   $ 82,441
   Inventory obsolescence reserve    139,117     215,100     77,849    276,368
December 31, 1995
   Allowance for doubtful accounts    82,441      62,000     50,950     93,491
   Inventory obsolescence reserve    276,368     126,776    124,085    279,059
December 31, 1996
   Allowance for doubtful accounts    93,491      60,000     11,987    141,504
   Inventory obsolescence reserve    279,059     380,221          0    659,280
</TABLE>
                                      F-16
<PAGE>


<PAGE>

                                   SIGNATURES

     Pursuant  to the  requirements  of  Section  13 or 15(d) of the  Securities
Exchange Act of 1934, the registrant has duly caused this report to be signed on
its behalf by the undersigned, thereunto duly authorized.

Advanced Technology Materials, Inc.

March 26, 1997
By    /S/ Eugene G. Banucci
      Eugene G. Banucci, Ph.D., President, Chief Executive
      Officer, Chairman of the Board and Director


     Pursuant  to the  requirements  of  Section  13 or 15(d) of the  Securities
Exchange Act of 1934, this report has been signed below by the following persons
on behalf of the registrant and in the capacities and on the dates indicated.
<TABLE>
<CAPTION>
Signature                      Title                                      Date
- ---------                      -----                                      ----
<S>                            <C>                                      <C>
                               President, Chief Executive
                               Officer, Chairman of the Board
/S/ Eugene G. Banucci          and Director                             3/26/97
Eugene G. Banucci, Ph.D.

                               Vice President, Chief Financial
                               Officer and Treasurer (Chief
/S/ Daniel P. Sharkey          Accounting Officer)                      3/26/97
Daniel P. Sharkey


                               Vice President, President-
/S/ Duncan W. Brown            Epitronics, and Director                 3/26/97
Duncan W. Brown, Ph.D.


                               Director
/S/ Mark A. Adley                                                       3/26/97
Mark A. Adley


                               Director
/S/ Gary Andersen                                                       3/26/97
Gary Andersen


                               Director
/S/ John A. Armstrong                                                   3/26/97
John A. Armstrong, Ph.D.


                               Director
/S/ Robert S. Hillas                                                    3/26/97
Robert S. Hillas


                               Director
/S/ Stephen H. Mahle                                                    3/26/97
Stephen H. Mahle
</TABLE>
                                      S-1
<PAGE>

<PAGE>
<TABLE>
<CAPTION>
                    EXHIBIT INDEX



Exhibit
 No.      Description
 ---      -----------
<S>       <C>
10.09     Loan  Agreement  between  Advanced  Technology  Materials,  Inc.  and
           Silicon Valley Bank dated December 27, 1996

11.01     Statement re: computation of earnings per common share

21.01     Subsidiaries of the registrant

23.01     Consent of Ernst & Young LLP

27.01     Financial Data Schedule
</TABLE>
<PAGE>

<PAGE>



                                 LOAN AGREEMENT

                        $10,000,000 WORKING CAPITAL LINE
                                   PROVIDED BY
                               SILICON VALLEY BANK
                                       TO
                       ADVANCED TECHNOLOGY MATERIALS, INC.

                                DECEMBER 27, 1996

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     This LOAN AGREEMENT is entered into as of DECEMBER 27, 1996, by and between
SILICON  VALLEY BANK, a  California-chartered  bank with its principal  place of
business at 3003 Tasman Drive,  Santa Clara, CA 95054 and with a loan production
office  located  at  Wellesley  Office  Park,  40  William  Street,  Suite  350,
Wellesley, MA 02181, doing business under the name Silicon Valley East ("Bank"),
and  ADVANCED  TECHNOLOGY  MATERIALS,  INC.,  a  Delaware  corporation  with its
principal  place of business at 7 COMMERCE  DRIVE,  DANBURY,  CONNECTICUT  06810
("Borrower").

                                    RECITALS

     Borrower  wishes to obtain  credit  from time to time from  Bank,  and Bank
desires to extend  credit to Borrower.  This  Agreement  sets forth the terms on
which Bank will advance credit to Borrower,  and Borrower will repay the amounts
owing to Bank.

                                    AGREEMENT

     The parties agree as follows:

                         1. DEFINITIONS AND CONSTRUCTION

     1.1 Definitions.  As used in this Agreement, the following terms shall have
the following definitions: "Accounts" means all presently existing and hereafter
arising accounts,  contract rights,  and all other forms of obligations owing to
Borrower  arising  out of  the  sale  or  lease  of  goods  (including,  without
limitation,  the licensing of software and other technology) or the rendering of
services  by  Borrower,  whether or not earned by  performance,  and any and all
credit  insurance,  guaranties,  and  other  security  therefor,  as well as all
merchandise  returned to or reclaimed by Borrower and Borrower's  Books relating
to any of the foregoing.

     "Advance"  or  "Advances"  means  a loan  Advance  or  Advances  under  the
Committed Revolving Line.

     "Affiliate"  means,  with  respect to any  Person,  any Person that owns or
controls  directly or  indirectly  such Person,  any Person that  controls or is
controlled  by or is under common  control  with such  Person,  and each of such
Person's senior executive officers, directors, and partners.

     "Bank  Expenses"  means  all  reasonable   costs  or  expenses   (including
reasonable  attorneys'  fees  and  expenses)  incurred  in  connection  with the
preparation, negotiation,  administration, and enforcement of the Loan Documents
and  Bank's  reasonable  attorneys'  fees and  expenses  incurred  in  amending,
enforcing or defending the Loan Documents, whether or not suit is brought.

     "Borrower's  Assets"  means the  property  described  on Exhibit A attached
hereto.

     "Borrower's  Books" means all of  Borrower's  books and records  including:
ledgers; records concerning Borrower's Assets, liabilities,  business operations
or  financial  condition;  and all  computer  programs,  or tape files,  and the
equipment, containing such information.

     "Borrowing Base" has the meaning set forth in Section 2.1 hereof.

     "Business Day" means any day that is not a Saturday,  Sunday,  or other day
on which banks in the State of California are authorized or required to close.

     "Closing Date" means the date of this Agreement.

     "Code" means the Massachusetts Uniform Commercial Code.

     "Committed   Revolving  Line"  means  TEN  MILLION  AND  NO/100THS  Dollars
($10,000,000).

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<PAGE>

     "Contingent  Obligation"  means,  as applied to any  Person,  any direct or
indirect liability,  contingent or otherwise, of that Person with respect to (i)
any  indebtedness,  lease,  dividend,  letter of credit or other  obligation  of
another,  including,   without  limitation,  any  such  obligation  directly  or
indirectly guaranteed,  endorsed, co-made or discounted or sold with recourse by
that  Person,  or in respect  of which  that  Person is  otherwise  directly  or
indirectly  liable;  (ii) any  obligations  with  respect to undrawn  letters of
credit issued for the account of that Person; and (iii) all obligations  arising
under any interest rate, currency or commodity swap agreement, interest rate cap
agreement,  interest rate collar  agreement,  or other  agreement or arrangement
designated to protect a Person against  fluctuation in interest rates,  currency
exchange rates or commodity prices; provided, however, that the term "Contingent
Obligation"  shall not include  endorsements  for  collection  or deposit in the
ordinary course of business.  The amount of any Contingent  Obligation  shall be
deemed to be an amount equal to the stated or  determined  amount of the primary
obligation  in respect of which such  Contingent  Obligation  is made or, if not
stated or determinable,  the maximum reasonably anticipated liability in respect
thereof as determined by such Person in good faith; provided, however, that such
amount shall not in any event exceed the maximum amount of the obligations under
the guarantee or other support arrangement.

     "Current Assets" means, as of any applicable date, all amounts that should,
in  accordance  with GAAP,  be  included as current  assets on the  consolidated
balance sheet of Borrower and its Subsidiaries as at such date.

     "Current  Liabilities"  means, as of any applicable  date, all amounts that
should,  in  accordance  with GAAP,  be included as current  liabilities  on the
consolidated  balance sheet of Borrower and its  Subsidiaries,  as at such date,
plus, to the extent not already included therein,  all outstanding Advances made
under this Agreement,  including all Indebtedness that is payable upon demand or
within one year from the date of determination  thereof unless such Indebtedness
is renewable or extendable at the option of Borrower or any Subsidiary to a date
more than one year from the date of  determination,  but excluding  Subordinated
Debt.

     "Daily  Balance" means the amount of the  Obligations  owed at the end of a
given day.

     "Eligible  Accounts" means those Accounts that arise in the ordinary course
of Borrower's  business that comply with all of Borrower's  representations  and
warranties  to Bank set  forth in  Section  5.4;  provided,  that  standards  of
eligibility  may be  fixed  and  revised  from  time to  time by Bank in  Bank's
reasonable judgment and upon notification thereof to Borrower in accordance with
the provisions  hereof.  Unless otherwise agreed to by Bank,  Eligible  Accounts
shall not include the following:

     (a) Accounts  that the account  debtor has failed to pay within ninety (90)
days of invoice date;

     (b) Accounts  with respect to an account  debtor,  fifty  percent  (50%) of
whose  Accounts the account  debtor has failed to pay within ninety (90) days of
invoice date;

     (c)  Accounts  with  respect  to which the  account  debtor is an  officer,
employee, or agent of Borrower;

     (d)  Accounts  with  respect  to which  goods are  placed  on  consignment,
guaranteed sale, sale or return, sale on approval, bill and hold, or other terms
by reason of which the payment by the account debtor may be conditional;

     (e)  Accounts  with  respect to which the  account  debtor is an  Affiliate
(other than by virtue of being directly or indirectly  under common ownership or
control with Borrower) of Borrower;

     (f)  Accounts  with  respect to which the account  debtor does not have its
principal  place of business in the United States,  except for Eligible  Foreign
Accounts,  and Accounts arising from products shipped to or services provided to
branches or offices located in the United States of any account debtor that does
not have its principal place of business in the United States;

     (g) Accounts with respect to which Borrower is liable to the account debtor
for goods sold or services rendered by the account debtor to Borrower,  but only
to the extent of any amounts owing to the account debtor against amounts owed to
Borrower;

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<PAGE>

     (h) Accounts with respect to an account debtor,  including Subsidiaries and
Affiliates, whose total obligations to Borrower exceed twenty-five percent (25%)
of all  Accounts,  to the extent  such  obligations  exceed  the  aforementioned
percentage, except as approved in writing by Bank;

     (i) Accounts with respect to which the account debtor disputes liability or
makes any claim with  respect  thereto as to which  Bank  believes,  in its sole
discretion, that there may be a basis for dispute (but only to the extent of the
amount  subject  to such  dispute or  claim),  or is  subject to any  Insolvency
Proceeding, or becomes insolvent, or goes out of business; and

     (j) Accounts  the  collection  of which Bank  reasonably  determines  to be
doubtful.

     "Eligible  Foreign  Accounts"  means  Accounts  with  respect  to which the
account  debtor  does not have its  principal  place of  business  in the United
States and that are: (1) covered by credit insurance in form and amount,  and by
an insurer  satisfactory to Bank less the amount of any deductible(s)  which may
be or become owing thereon; or (2) supported by one or more letters of credit in
favor of Bank as  beneficiary,  in an  amount  and of a tenor,  and  issued by a
financial  institution,  acceptable  to Bank;  or (3) that  Bank  approves  on a
case-by-case basis.

     "Eligible  Inventory"  means  Borrower's  raw materials  Inventory  that is
reflected  on  Borrower's  financial  statements,  and  that  complies  with the
representations and warranties set forth in Section 5.5.

     "Equipment"  means all  present  and future  machinery,  equipment,  tenant
improvements,  furniture,  fixtures,  vehicles,  tools, parts and attachments in
which Borrower has any interest.

     "ERISA" means the  Employment  Retirement  Income  Security Act of 1974, as
amended, and the regulations thereunder.

     "GAAP" means  generally  accepted  accounting  principles as in effect from
time to time.

     "Indebtedness"  means  (a)  all  indebtedness  for  borrowed  money  or the
deferred purchase price of property or services,  including  without  limitation
reimbursement  and other obligations with respect to surety bonds and letters of
credit,  (b) all obligations  evidenced by notes,  bonds,  debentures or similar
instruments,   (c)  all  capital  lease   obligations  and  (d)  all  Contingent
Obligations.

     "Insolvency  Proceeding"  means any proceeding  commenced by or against any
person or entity under any  provision of the United States  Bankruptcy  Code, as
amended, or under any other bankruptcy or insolvency law, including  assignments
for the  benefit  of  creditors,  formal or  informal  moratoria,  compositions,
extension generally with its creditors,  or proceedings seeking  reorganization,
arrangement, or other relief.

     "Inventory"  means all present and future  inventory in which  Borrower has
any interest, including merchandise, raw materials, parts, supplies, packing and
shipping  materials,  work in process and finished products intended for sale or
lease  or to be  furnished  under a  contract  of  service,  of  every  kind and
description  now  or at  any  time  hereafter  owned  by or in  the  custody  or
possession,  actual or constructive, of Borrower, including such inventory as is
temporarily  out of its custody or  possession  or in transit and  including any
returns  upon any  accounts or other  proceeds,  including  insurance  proceeds,
resulting from the sale or disposition of any of the foregoing and any documents
of title  representing any of the above, and Borrower's Books relating to any of
the foregoing.

     "Investment" means any beneficial ownership  (including stock,  partnership
interest or other  securities)  of any Person,  or any loan,  advance or capital
contribution to any Person.

     "IRC"  means  the  Internal  Revenue  Code of  1986,  as  amended,  and the
regulations thereunder.

     "Lien" means any mortgage,  lien, deed of trust, charge,  pledge,  security
interest or other encumbrance.

                                       5
<PAGE>

     "Loan Documents"  means,  collectively,  this Agreement,  any note or notes
executed by Borrower,  and any other agreement entered into between Borrower and
Bank in connection with this Agreement,  all as amended or extended from time to
time.

     "Material  Adverse  Effect"  means a  material  adverse  effect  on (i) the
business  operations  or condition  (financial or otherwise) of Borrower and its
Subsidiaries  taken as a whole or (ii) the  ability  of  Borrower  to repay  the
Obligations or otherwise perform its obligations under the Loan Documents.

     "Negotiable  Collateral" means all of Borrower's present and future letters
of credit of which it is a beneficiary, notes, drafts, instruments,  securities,
documents of title,  and chattel paper,  and Borrower's Books relating to any of
the foregoing.

     "Obligations" means all debt, principal,  interest, Bank Expenses and other
amounts  owed to Bank by  Borrower  pursuant  to  this  Agreement  or any  other
agreement, whether absolute or contingent, due or to become due, now existing or
hereafter arising, including any interest that accrues after the commencement of
an Insolvency Proceeding and including any debt, liability,  or obligation owing
from Borrower to others that Bank may have obtained by assignment or otherwise.

     "Payment Date" means the 26th calendar day of each month.

     "Periodic  Payments" means all installments or similar  recurring  payments
that Borrower may now or hereafter  become  obligated to pay to Bank pursuant to
the terms and  provisions  of any  instrument,  or agreement now or hereafter in
existence between Borrower and Bank.

     "Permitted Indebtedness" means:

     (a)  Indebtedness of Borrower in favor of Bank arising under this Agreement
or any other Loan Document;

     (b)  Indebtedness  existing  on  the  Closing  Date  and  disclosed  in the
Schedule;

     (c) Subordinated Debt;

     (d)  Indebtedness  to trade  creditors  incurred in the ordinary  course of
business;

     (e)   Indebtedness   incurred  solely  for  the  purpose  of  financing  an
acquisition permitted by Section 7.3; and

     (f) Indebtedness secured by Permitted Liens.

     "Permitted Investment" means:

     (a) Investments existing on the Closing Date disclosed in the Schedule; and

                                       6
<PAGE>

     (b) (i) marketable direct obligations issued or unconditionally  guaranteed
by the United  States of America  or any  agency or any State  thereof  maturing
within one (1) year from the date of acquisition thereof,  (ii) commercial paper
maturing  no more  than one (1)  year  from the  date of  creation  thereof  and
currently  having the highest rating  obtainable  from either  Standard & Poor's
Corporation  or Moody's  Investors  Service,  Inc.,  and (iii)  certificates  of
deposit  maturing no more than one (1) year from the date of investment  therein
issued by Bank.

     "Permitted Liens" means the following:

     (a) Any Liens existing on the Closing Date and disclosed in the Schedule or
arising under this Agreement or the other Loan Documents;

     (b) Liens for taxes,  fees,  assessments or other  governmental  charges or
levies,  either not  delinquent or being  contested in good faith by appropriate
proceedings,  provided  the same have no  priority  over any of Bank's  security
interests;

     (c) Liens (i) upon or in any equipment  acquired or held by Borrower or any
of  its  Subsidiaries  to  secure  the  purchase  price  of  such  equipment  or
indebtedness  incurred  solely for the purpose of financing the  acquisition  of
such  equipment,  or  (ii)  existing  on  such  equipment  at  the  time  of its
acquisition,  provided  that the Lien is  confined  solely  to the  property  so
acquired and improvements thereon, and the proceeds of such equipment;

     (d) Liens on Equipment leased by Borrower or any Subsidiary  pursuant to an
operating lease in the ordinary course of business  (including  proceeds thereof
and accessions  thereto)  incurred solely for the purpose of financing the lease
of such  Equipment  (including  Liens pursuant to leases  permitted  pursuant to
Section 7.1 and Liens arising from UCC  financing  statements  regarding  leases
permitted by this Agreement); and

     (e) Liens upon or in any stock or  property  acquired by Borrower or any of
its  Subsidiaries  to secure the purchase  price of such stock or property in an
acquisition permitted by Section 7.3.

     "Person" means any individual,  sole proprietorship,  partnership,  limited
liability   company,   joint  venture,   trust,   unincorporated   organization,
association,  corporation,  institution, public benefit corporation, firm, joint
stock company, estate, entity or governmental agency.

     "Prime Rate" means the variable rate of interest,  per annum, most recently
announced by Bank, as its "prime rate,"  whether or not such  announced  rate is
the lowest rate available from Bank.

     "Quick Assets"  means,  at any date as of which the amount thereof shall be
determined,  the consolidated cash,  cash-equivalents,  accounts  receivable and
investments,  with  maturities not to exceed 90 days, of Borrower  determined in
accordance with GAAP.

     "Responsible  Officer" means each of the Chief Executive Officer, the Chief
Financial Officer and the Controller of Borrower.

     "Revolving Maturity Date" means December 26, 1997.

     "Schedule" means the schedule of exceptions attached hereto.

     "Subordinated   Debt"  means  any  debt   incurred  by  Borrower   that  is
subordinated  to the debt owing by Borrower to Bank on terms  acceptable to Bank
(and identified as being such by Borrower and Bank).

     "Subsidiary"  means any corporation or partnership in which (i) any general
partnership  interest  or (ii)  more than 50% of the stock of which by the terms
thereof  ordinary  voting  power to elect the Board of  Directors,  managers  or
trustees of the entity shall, at the time as of which any determination is being
made, be owned by Borrower, either directly or through an Affiliate.

     "Tangible Net Worth" means at any date as of which the amount thereof shall
be determined,  the  consolidated  total assets of Borrower and its Subsidiaries
minus,  without  duplication,  (i) the sum of any  amounts  attributable  to (a)
goodwill,  (b) intangible  items such as unamortized  debt discount and expense,
patents,  trade and  service  marks  and  names,  copyrights  and  research  and
development  expenses except prepaid expenses,  and (c) all reserves not already
deducted from assets, and (ii) Total Liabilities.

     "Total  Liabilities" means at any date as of which the amount thereof shall
be  determined,  all  obligations  that  should,  in  accordance  with  GAAP  be
classified  as  liabilities  on the  consolidated  balance  sheet  of  Borrower,
including in any event all Indebtedness, but specifically excluding Subordinated
Debt.

                                       7
<PAGE>

     1.2 Accounting Terms. All accounting terms not specifically  defined herein
shall be construed in accordance with GAAP and all  calculations  made hereunder
shall be made in accordance  with GAAP. When used herein,  the terms  "financial
statements" shall include the notes and schedules thereto.

                          2. LOAN AND TERMS OF PAYMENT

     2.1  Advances.  Borrower  promises  to pay to the order of Bank,  in lawful
money of the United States of America,  the aggregate unpaid principal amount of
all  Advances  made by Bank to  Borrower  hereunder  and  interest on the unpaid
principal  amount of such  Advances  at such rates and at such times as provided
for in this Agreement, all as in accordance with the terms of this Agreement.

     2.1.1 Revolving  Advances.  Subject to and upon the terms and conditions of
this  Agreement,  Bank  agrees to make  Revolving  Advances  to  Borrower  in an
aggregate amount not to exceed (i) the Committed Revolving Line or the Borrowing
Base, whichever is less minus (ii) the face amount of all outstanding Letters of
Credit (including drawn but unreimbursed  Letters of Credit) and minus (iii) the
Foreign Exchange Reserve. For purposes of this Agreement, "Borrowing Base" shall
mean an amount equal to (i) EIGHTY percent (80%) of Eligible  Accounts plus (ii)
the lesser of THIRTY percent (30%) of the value of Borrower's Eligible Inventory
(valued at the lower of cost or  wholesale  fair market  value) or NINE  HUNDRED
THOUSAND AND NO/100THS Dollars  ($900,000).  Subject to the terms and conditions
of this Agreement,  amounts borrowed  pursuant to this Section 2.1 may be repaid
and reborrowed at any time during the term of this Agreement.

     Whenever  Borrower desires a Revolving  Advance,  Borrower will notify Bank
(i) in the case of a Prime Rate loan, by facsimile  transmission or telephone no
later  than 3:00 p.m.  Pacific  time,  on the  Business  Day that the  Revolving
Advance is to be made,  in which case each such  notification  shall be promptly
confirmed  by a  Payment/Advance  Form in  substantially  the form of  Exhibit B
hereto,  or  (ii) in the  case of a LIBOR  Rate  loan  in  accordance  with  the
provisions of the LIBOR  Supplement  to  Agreement,  a copy of which is attached
hereto and incorporated  herein.  Bank is authorized to make Revolving  Advances
under  this  Agreement,  based upon  instructions  received  from a  Responsible
Officer, or without instructions if in Bank's discretion such Revolving Advances
are necessary to meet Obligations which have become due and remain unpaid.  Bank
shall be entitled to rely on any  telephonic  notice  given by a person who Bank
reasonably  believes to be a Responsible  Officer,  and Borrower shall indemnify
and hold Bank  harmless for any damages or loss  suffered by Bank as a result of
such reliance. Bank will credit the amount of Revolving Advances made under this
Section 2.1 to Borrower's deposit account.

     The Committed  Revolving  Line shall  terminate on the  Revolving  Maturity
Date,  at which time all  Revolving  Advances  under this  Section 2.1 and other
amounts  due under this  Agreement  (except  as  otherwise  expressly  specified
herein) shall be immediately due and payable.

     2.1.2 Letters of Credit.

     (a) Subject to the terms and conditions of this  Agreement,  Bank agrees to
issue or cause to be issued  Letters of Credit for the account of Borrower in an
aggregate  outstanding face amount not to exceed (i) the lesser of the Committed
Revolving  Line or the Borrowing  Base,  whichever is less,  minus (ii) the then
outstanding principal balance of the Advances.  Each Letter of Credit shall have
an expiry date no later than one hundred  eighty (180) days after the  Revolving
Maturity Date provided that Borrower's Letter of Credit reimbursement obligation
shall be  secured  by cash on terms  acceptable  to Bank at any time  after  the
Revolving  Maturity Date if the term of this  Agreement is not extended by Bank.
All Letters of Credit shall be, in form and substance, acceptable to Bank in its
sole  discretion and shall be subject to the terms and conditions of Bank's form
of standard Application and Letter of Credit Agreement.

     (b) The obligation of Borrower to  immediately  reimburse Bank for drawings
made under Letters of Credit shall be absolute,  unconditional  and irrevocable,
and shall be performed  strictly in accordance  with the terms of this Agreement
and such Letters of Credit, under all circumstances  whatsoever.  Borrower shall
indemnify,  defend, protect, and hold Bank harmless from any loss, cost, expense
or liability, including, without limitation, reasonable attorneys' fees, arising
out of or in  connection  with any  Letters  of Credit,  other than loss,  cost,
expense or liability  arising out of the gross negligence or willful  misconduct
of Bank.

                                       8
<PAGE>

     (c) Borrower  may request  that Bank issue a Letter of Credit  payable in a
currency other than United States Dollars. If a demand for payment is made under
any such  Letter of  Credit,  Bank  shall  treat  such  demand as an  Advance to
Borrower of the  equivalent of the amount thereof (plus cable charges) in United
States  currency  at the then  prevailing  rate of  exchange  in San  Francisco,
California,  for sales of that other  currency for cable transfer to the country
of which it is the currency.

     (d) Upon the issuance of any letter of credit  payable in a currency  other
than United  States  Dollars,  Bank shall create a reserve  under the  Committed
Revolving Line for letters of credit against  fluctuations in currency  exchange
rates, in an amount equal to ten percent (10%) of the face amount of such letter
of credit.  The amount of such  reserve may be amended by Bank from time to time
to account for  fluctuations  in the exchange  rate. The  availability  of funds
under the  Committed  Revolving  Line  shall be  reduced  by the  amount of such
reserve for so long as such letter of credit remains outstanding.

     2.1.3 Foreign Exchange Contract; Foreign Exchange Settlements.

     (a) Subject to the terms of this Agreement, Borrower may enter into foreign
exchange contracts (the "Exchange  Contracts") not to exceed an aggregate amount
of (i)  the  lesser  of the  Committed  Revolving  Line or the  Borrowing  Base,
whichever  is less,  minus (ii) the then  outstanding  principal  balance of the
Advances  (the  "Contract  Limit"),  pursuant  to which  Bank  shall  sell to or
purchase from  Borrower  foreign  currency on a spot or future  basis.  Borrower
shall not request any  Exchange  Contracts  at any time it is out of  compliance
with any of the  provisions  of this  Agreement.  All  Exchange  Contracts  must
provide for delivery of  settlement on or before the Maturity  Date.  The amount
available under the Committed Revolving Line at any time shall be reduced by the
following  amounts  (the  "Foreign  Exchange  Reserve")  on any  given  day (the
"Determination  Date"):  (i) on all  outstanding  Exchange  Contracts  on  which
delivery is to be effected or  settlement  allowed more than two  business  days
after the Determination Date, 10% of the gross amount of the Exchange Contracts;
plus (ii) on all  outstanding  Exchange  Contracts  on which  delivery  is to be
effected or settlement  allowed within two business days after the Determination
Date, 100% of the gross amount of the Exchange Contracts.

     (b) Bank may, in its  discretion,  terminate the Exchange  Contracts at any
time (a) that an Event of  Default  occurs or (b) that  there is not  sufficient
availability  under the  Committed  Revolving  Line and  Borrower  does not have
available funds in its bank account to satisfy the Foreign Exchange Reserve.  If
Bank terminates the Exchange Contracts, and without limitation of any applicable
indemnities,  Borrower agrees to reimburse Bank for any and all fees,  costs and
expenses relating thereto or arising in connection therewith.

     (c)  Borrower  shall not  permit  the total  gross  amount of all  Exchange
Contracts on which delivery is to be effected and settlement  allowed in any two
business day period to be more than $750,000 (the "Settlement  Limit") nor shall
Borrower  permit  the total  gross  amount of all  Exchange  Contracts  to which
Borrower is a party,  outstanding at any one time, to exceed the Contract Limit.
Notwithstanding the above,  however,  the amount which may be settled in any two
(2) business day period may be increased  above the Settlement  Limit up to, but
in no event to exceed,  the amount of the  Contract  Limit  under  either of the
following circumstances:

     (i) if there is sufficient  availability under the Committed Revolving Line
in the amount of the Foreign  Exchange  Reserve as of each  Determination  Date,
provided  that Bank in advance  shall  reserve  the full  amount of the  Foreign
Exchange Reserve against the Committed Revolving Line; or

     (ii) if there is insufficient  availability  under the Committed  Revolving
Line, as to  settlements  within any two (2) business day period,  provided that
Bank,  in its sole  discretion,  may:  (A) verify good funds  overseas  prior to
crediting  Borrower's  deposit account with Bank (in the case of Borrower's sale
of foreign currency); or (B) debit Borrower's deposit account with Bank prior to
delivering  foreign  currency  overseas (in the case of  Borrower's  purchase of
foreign currency).

     (d) In the case of  Borrower's  purchase of foreign  currency,  Borrower in
advance  shall  instruct  Bank upon  settlement  either to treat the  settlement
amount as an advance under the Committed  Revolving Line, or to debit Borrower's
account for the amount settled.

                                       9
<PAGE>

     (e) Borrower shall execute all standard from applications and agreements of
Bank in connection with the Exchange  Contracts and, without limiting any of the
terms of such  applications and agreements,  Borrower will pay all standard fees
and charges of Bank in connection with the Exchange Contracts.

     (f) Without  limiting any of the other terms of this  Agreement or any such
standard form  applications and agreement of Bank,  Borrower agrees to indemnify
Bank  and  hold it  harmless,  from  and  against  any and  all  claims,  debts,
liabilities,  demands,  obligations,  actions,  costs and  expenses  (including,
without  limitation,  attorneys'  fees of  counsel of Bank's  choice),  of every
nature and description  which it may sustain or incur,  based upon,  arising out
of, or in any way relating to any of the Exchange  Contracts or any transactions
relating thereto or contemplated thereby, other than claims, debts, liabilities,
demands,  obligations,  actions,  costs and  expenses  arising  out of the gross
negligence or willful misconduct of Bank.

     2.2  Overadvances.  If,  at any  time  or for any  reason,  the  amount  of
Obligations  owed by Borrower to Bank pursuant to Section 2.1 of this  Agreement
is  greater  than the  lesser of (i) the  Committed  Revolving  Line or (ii) the
Borrowing Base,  Borrower shall  immediately pay to Bank, in cash, the amount of
such excess.

     2.3 Interest Rates, Payments, and Calculations.

     (a)  Interest  Rate.  Except as set forth in Section  2.3(b),  any Advances
shall bear interest on the average Daily Balance at the Prime Rates or the LIBOR
Rates as set forth on the attached LIBOR Supplement to Agreement, as applicable.

     (b) Default Rate. All Obligations  shall bear interest,  from and after the
occurrence  of an Event of  Default,  at a rate  equal to three  (3)  percentage
points above the interest rate applicable under Section 2.3(a).

     (c) Payments.  Interest  hereunder  shall be due and payable on the Payment
Date of each month during the term hereof.  Borrower  hereby  authorizes Bank to
debit any accounts with Bank,  including,  without  limitation,  Account  Number
07-000537-70,  for payments of principal and interest due on the Obligations, on
the Payment Date thereof,  and any other amounts owing by Borrower to Bank. Bank
will notify Borrower of all debits which Bank makes against Borrower's accounts.
Any such debits against Borrower's accounts in no way shall be deemed a set-off.
Any  interest  not paid when due shall be  compounded  by becoming a part of the
Obligations, and such interest shall thereafter accrue interest at the rate then
applicable hereunder.

     (d)  Computation.  In the event the Prime Rate is changed from time to time
hereafter,  the  applicable  rate of interest  hereunder  shall be  increased or
decreased effective as of 12:01 a.m. on the day the Prime Rate is changed, by an
amount equal to such change in the Prime Rate. All interest chargeable under the
Loan Documents shall be computed on the basis of a three hundred sixty (360) day
year for the actual number of days elapsed.

     2.4  Crediting  Payments.

     Prior to the  occurrence  of an Event of Default,  Bank shall credit a wire
transfer  of funds,  check or other item of payment to such  deposit  account or
Obligation as Borrower  specifies.  After the occurrence of an Event of Default,
the  receipt  by Bank of any wire  transfer  of funds,  check,  or other item of
payment shall be immediately applied to conditionally  reduce  Obligations,  but
shall  not be  considered  a  payment  on  account  unless  such  payment  is of
immediately available federal funds or unless and until such check or other item
of payment is honored when  presented for payment.  Notwithstanding  anything to
the contrary  contained  herein,  any wire transfer or payment  received by Bank
after 12:00 noon Pacific  time shall be deemed to have been  received by Bank as
of the opening of business on the immediately  following  Business Day. Whenever
any payment to Bank under the Loan Documents  would  otherwise be due (except by
reason of acceleration) on a date that is not a Business Day, such payment shall
instead be due on the next Business Day, and additional fees or interest, as the
case may be, shall accrue and be payable for the period of such extension.

                                       10
<PAGE>

     2.5 Fees. Borrower shall pay to Bank the following:

     (a)  Facility  Fee. A Facility  Fee equal to TWENTY FIVE  THOUSAND  Dollars
($25,000),  which fee shall be due on or before  the  Closing  Date and shall be
fully earned and non-refundable;

     (b) Financial  Examination  and Appraisal Fees.  Bank's  customary fees and
out-of-pocket  expenses for Bank's audits of Borrower's  Accounts,  and for each
appraisal  of  Borrower's  Assets and  financial  analysis  and  examination  of
Borrower performed from time to time by Bank or its agents;  provided,  however,
that prior to the  occurrence of an Event of Default Bank shall not perform such
analyses and examinations more frequently than annually;

     (c) Bank Expenses.  Upon demand from Bank,  including,  without limitation,
upon the date  hereof,  all Bank  Expenses  incurred  through  the date  hereof,
including reasonable  attorneys' fees and expenses,  and, after the date hereof,
all Bank Expenses,  including  reasonable  attorneys' fees and expenses,  as and
when they become due.

     2.6  Additional  Costs.  In case any law,  regulation,  treaty or  official
directive  or the  interpretation  or  application  thereof  by any court or any
governmental authority charged with the administration thereof or the compliance
with  any  guideline  or  request  of any  central  bank or  other  governmental
authority (whether or not having the force of law):

     (a)  subjects  Bank to any tax with  respect to  payments of  principal  or
interest or any other amounts  payable  hereunder by Borrower or otherwise  with
respect to the transactions contemplated hereby (except for taxes on the overall
net  income of Bank  imposed by the  United  States of America or any  political
subdivision thereof);

     (b) imposes,  modifies or deems applicable any deposit insurance,  reserve,
special deposit or similar requirement against assets held by, or deposits in or
for the account of, or loans by, Bank; or

     (c) imposes upon Bank any other  condition with respect to its  performance
under this Agreement,  and the result of any of the foregoing is to increase the
cost to Bank,  reduce the income  receivable  by Bank or impose any expense upon
Bank with respect to any loans,  Bank shall notify  Borrower  thereof.  Borrower
agrees to pay to Bank the amount of such  increase in cost,  reduction in income
or additional expense as and when such cost, reduction or expense is incurred or
determined,  upon  presentation by Bank of a statement of the amount and setting
forth Bank's  calculation  thereof,  all in reasonable  detail,  which statement
shall be deemed true and correct absent manifest error.

     2.7 Term. Except as otherwise set forth herein, this Agreement shall become
effective on the Closing Date and,  subject to Section 12.7,  shall  continue in
full  force  and  effect  for a term  ending  on the  Revolving  Maturity  Date.
Notwithstanding  the  foregoing,  Bank  shall  have the right to  terminate  its
obligation to make Advances under this Agreement  immediately and without notice
upon the occurrence, and during the continuance, of an Event of Default.

                             3. CONDITIONS OF LOANS

     3.1 Conditions Precedent to Initial Advance. The obligation of Bank to make
the initial  Advance is subject to the condition  precedent that Bank shall have
received, in form and substance satisfactory to Bank, the following:

     (a) this  Agreement  and the  Working  Capital  Note each duly  executed by
Borrower;

     (b) a  certificate  of the Secretary of Borrower with respect to incumbency
and resolutions authorizing the execution and delivery of this Agreement;

     (c) financing  statements  (Forms  UCC-1)  evidencing  Borrower's  negative
pledge set forth in Section 7.5 of this Agreement;

                                       11
<PAGE>

     (d) a  Borrowing  Base  Certificate  signed  by a  Responsible  Officer  in
substantially  the form of  Exhibit C hereto,  together  with aged  listings  of
accounts receivable and accounts payable;

     (e) insurance certificate(s);

     (f) payment of the fees and Bank Expenses then due specified in Section 2.5
hereof; and

     (g) such other documents, and completion of such other matters, as Bank may
reasonably deem necessary or appropriate.

     3.2  Conditions  Precedent to all Advances.  The obligation of Bank to make
each Advance, including the initial Advance, is further subject to the following
conditions:

     (a) timely receipt by Bank of (i) the  Payment/Advance  Form as provided in
Section 2.1 in the case of a Prime Rate loan,  or the LIBOR Rate Loan  Borrowing
Certificate attached as Schedule A to the LIBOR Supplement to Agreement,  in the
case of a LIBOR Rate loan; and

     (b) the representations and warranties contained in Section 5 shall be true
and  correct  in  all  material   respects  on  and  as  of  the  date  of  such
Payment/Advance Form and on the effective date of each Advance as though made at
and as of each such date,  and no Event of Default  shall have  occurred  and be
continuing,  or would result from such Advance. The making of each Advance shall
be deemed to be a  representation  and  warranty by Borrower on the date of such
Advance as to the accuracy of the facts referred to in this Section 3.2(b).

                        4. CREATION OF SECURITY INTEREST

     INTENTIONALLY OMITTED

                        5. REPRESENTATIONS AND WARRANTIES

     Borrower represents and warrants as follows:

     5.1 Due Organization and  Qualification.  Borrower and each Subsidiary is a
corporation  duly existing and in good  standing  under the laws of its state of
incorporation  and  qualified  and  licensed to do  business  in, and is in good
standing in, any state in which the conduct of its business or its  ownership of
property  requires  that it be so  qualified,  except where the failure to be so
qualified would not have a Material Adverse Effect.

     5.2  Due  Authorization;   No  Conflict.   The  execution,   delivery,  and
performance of the Loan Documents are within Borrower's  powers,  have been duly
authorized,  and are  not in  conflict  with  nor  constitute  a  breach  of any
provision contained in Borrower's Charter or Bylaws, nor will they constitute an
event of default under any material agreement to which Borrower is a party or by
which Borrower is bound. Borrower is not in default under any agreement to which
it is a party or by which it is  bound,  which  default  could  have a  Material
Adverse Effect.

     5.3 No Prior  Encumbrances.  Borrower  has good and  indefeasible  title to
Borrower's Assets, free and clear of Liens, except for Permitted Liens.

     5.4 Bona  Fide  Eligible  Accounts.  The  Eligible  Accounts  are bona fide
existing  obligations.  The property  giving rise to such Eligible  Accounts has
been  delivered  to the  account  debtor or to the  account  debtor's  agent for
immediate  shipment  to and  unconditional  acceptance  by the  account  debtor.
Borrower has not received notice of actual or imminent Insolvency  Proceeding of
any account  debtor that is included in any  Borrowing  Base  Certificate  as an
Eligible Account.

     5.5 Merchantable  Inventory.  All Inventory is in all material  respects of
good and marketable quality, free from all material defects.

                                       12
<PAGE>

     5.6 Name;  Location of Chief Executive  Office.  Except as disclosed in the
Schedule,  Borrower  has not done  business  under  any  name  other  than  that
specified on the signature page hereof.  The chief executive  office of Borrower
is located at the address indicated in Section 10 hereof.

     5.7 Litigation.  Except as set forth in the Schedule,  there are no actions
or proceedings pending by or against Borrower or any Subsidiary before any court
or  administrative  agency in which an  adverse  decision  could have a Material
Adverse Effect or a material adverse effect on Borrower's interest in Borrower's
Assets.  Borrower  does not have  knowledge  of any such  pending or  threatened
actions or proceedings.

     5.8 No Material  Adverse Change in Financial  Statements.  All consolidated
financial  statements  related to  Borrower  and any  Subsidiary  that have been
delivered by Borrower to Bank fairly present in all material respects Borrower's
consolidated   financial  condition  as  of  the  date  thereof  and  Borrower's
consolidated results of operations for the period then ended. There has not been
a material  adverse change in the consolidated  financial  condition of Borrower
since the date of the most  recent of such  financial  statements  submitted  to
Bank.

     5.9  Solvency.  Borrower  is solvent  and able to pay its debts  (including
trade debts) as they mature.

     5.10  Regulatory  Compliance.  Borrower  and  each  Subsidiary  has met the
minimum funding requirements of ERISA with respect to any employee benefit plans
subject to ERISA.  No event has occurred  resulting from  Borrower's  failure to
comply with ERISA that is reasonably  likely to result in  Borrower's  incurring
any  liability  that could have a Material  Adverse  Effect.  Borrower is not an
"investment company" or a company "controlled" by an "investment company" within
the  meaning of the  Investment  Company  Act of 1940.  Borrower  is not engaged
principally, or as one of the important activities, in the business of extending
credit for the  purpose of  purchasing  or  carrying  margin  stock  (within the
meaning  of  Regulations  G, T and U of the Board of  Governors  of the  Federal
Reserve  System).  Borrower has complied with all the  provisions of the Federal
Fair  Labor  Standards  Act.  Borrower  has not  violated  any  statutes,  laws,
ordinances or rules  applicable to it,  violation of which could have a Material
Adverse Effect.

     5.11  Environmental  Condition.  None  of  Borrower's  or any  Subsidiary's
properties or assets has ever been used by Borrower or any Subsidiary or, to the
best of Borrower's knowledge,  by previous owners or operators,  in the disposal
of, or to produce,  store, handle, treat,  release, or transport,  any hazardous
waste or hazardous  substance  other than in accordance  with applicable law; to
the best of Borrower's  knowledge,  none of Borrower's  properties or assets has
ever been designated or identified in any manner  pursuant to any  environmental
protection statute as a hazardous waste or hazardous substance disposal site, or
a candidate for closure pursuant to any  environmental  protection  statute;  no
lien  arising  under any  environmental  protection  statute has attached to any
revenues  or to  any  real  or  personal  property  owned  by  Borrower  or  any
Subsidiary;  and neither  Borrower  nor any  Subsidiary  has received a summons,
citation,  notice, or directive from the Environmental  Protection Agency or any
other  federal,  state or other  governmental  agency  concerning  any action or
omission by Borrower or any Subsidiary resulting in the releasing,  or otherwise
disposing of hazardous waste or hazardous substances into the environment.

     5.12 Taxes.  Borrower and each  Subsidiary  has filed or caused to be filed
all tax  returns  required  to be  filed,  and has  paid,  or has made  adequate
provision for the payment of, all taxes reflected therein.

     5.13 Subsidiaries. Borrower does not own any stock, partnership interest or
other equity securities of any Person, except for Permitted Investments.

     5.14  Government  Consents.  Borrower and each  Subsidiary has obtained all
consents,  approvals and  authorizations  of, made all  declarations  or filings
with, and given all notices to, all governmental  authorities that are necessary
for the continued operation of Borrower's business as currently conducted.

     5.15 Full Disclosure.  No representation,  warranty or other statement made
by Borrower in any certificate or written  statement  furnished to Bank contains
any  untrue  statement  of a  material  fact or omits to state a  material  fact
necessary  in order to make the  statements  contained in such  certificates  or
statements not misleading.

                                       13
<PAGE>

                            6. AFFIRMATIVE COVENANTS

     Borrower   covenants  and  agrees  that,  until  payment  in  full  of  all
outstanding Obligations, and for so long as Bank may have any commitment to make
an Advance hereunder, Borrower shall do all of the following:

     6.1  Good   Standing.   Borrower   shall  maintain  its  and  each  of  its
Subsidiaries'  corporate  existence  and good  standing in its  jurisdiction  of
incorporation  and  maintain  qualification  in each  jurisdiction  in which the
failure to so  qualify  could have a Material  Adverse  Effect.  Borrower  shall
maintain  in force,  and shall  cause each of its  Subsidiaries  to  maintain in
force, to the extent consistent with prudent management of Borrower's  business,
all licenses,  approvals and agreements, the loss of which could have a Material
Adverse Effect.

     6.2  Government  Compliance.  Borrower  shall  meet,  and shall  cause each
Subsidiary to meet, the minimum  funding  requirements  of ERISA with respect to
any employee  benefit plans subject to ERISA.  Borrower shall comply,  and shall
cause each  Subsidiary  to  comply,  with all  statutes,  laws,  ordinances  and
government  rules and  regulations  to which it is subject,  noncompliance  with
which  could have a Material  Adverse  Effect or a  material  adverse  effect on
Borrower's Assets.

     6.3 Financial Statements, Reports, Certificates.  Borrower shall deliver to
Bank:

     (a) as soon as  available,  but in any event  within  FORTY-FIVE  (45) days
after the end of each fiscal quarter,  a company prepared  consolidated  balance
sheet and income statement covering  Borrower's  consolidated  operations during
such period, certified by an officer of Borrower reasonably acceptable to Bank;

     (b) as soon as  available,  but in any event within  NINETY (90) days after
the end of Borrower's fiscal year, audited consolidated  financial statements of
Borrower prepared in accordance with GAAP,  consistently applied,  together with
an unqualified opinion on such financial statements of an independent  certified
public accounting firm reasonably acceptable to Bank;

     (c) within five (5) days of filing,  copies of all statements,  reports and
notices sent or made available  generally by Borrower to its security holders or
to any holders of  Subordinated  Debt and all reports on Form 10-K, 10-Q and 8-K
filed with the Securities and Exchange Commission;

     (d) promptly upon receipt of notice thereof,  a report of any legal actions
pending or threatened  against  Borrower or any Subsidiary  that could result in
damages or costs to Borrower or any Subsidiary of One Hundred  Thousand  Dollars
($100,000) or more; and

     (e) such budgets,  sales  projections,  operating  plans or other financial
information as Bank may reasonably request from time to time.

     Within  fifteen (15) days after the last day of each fiscal  quarter during
which Advances are outstanding  under this Agreement,  Borrower shall deliver to
Bank  a  Borrowing  Base  Certificate   signed  by  a  Responsible   Officer  in
substantially  the form of  Exhibit C hereto,  together  with aged  listings  of
accounts receivable and accounts payable.

     Within  FORTY-FIVE  (45) days  after the last day of each  fiscal  quarter,
Borrower  shall  deliver  to Bank  with the  quarterly  financial  statements  a
Compliance Certificate signed by a Responsible Officer in substantially the form
of Exhibit D hereto.

     6.4  Inventory;  Returns.  Borrower  shall keep all  Inventory  in good and
marketable condition, free from all material defects. Returns and allowances, if
any, as between  Borrower and its account debtors shall be on the same basis and
in accordance with the usual customary  practices of Borrower,  as they exist at
the  time of the  execution  and  delivery  of this  Agreement.  Borrower  shall
promptly  notify Bank of all  returns and  recoveries  and of all  disputes  and
claims,  where the return,  recovery,  dispute or claim involves more than Fifty
Thousand Dollars ($50,000).

                                       14
<PAGE>

     6.5 Taxes.  Borrower shall make,  and shall cause each  Subsidiary to make,
due and timely  payment or deposit of all  material  federal,  state,  and local
taxes, assessments, or contributions required of it by law, and will execute and
deliver to Bank, on demand, appropriate certificates attesting to the payment or
deposit thereof; and Borrower will make, and will cause each Subsidiary to make,
timely  payment or deposit of all material tax  payments and  withholding  taxes
required of it by  applicable  laws,  including,  but not limited to, those laws
concerning F.I.C.A.,  F.U.T.A., state disability,  and local, state, and federal
income taxes,  and will, upon request,  furnish Bank with proof  satisfactory to
Bank  indicating  that  Borrower  or a  Subsidiary  has made  such  payments  or
deposits;  provided that  Borrower or a Subsidiary  need not make any payment if
the amount or validity of such payment is contested in good faith by appropriate
proceedings  and is  reserved  against  (to the  extent  required  by  GAAP)  by
Borrower.

     6.6 Insurance.

     (a) Borrower, at its expense,  shall keep Borrower's Assets insured against
loss or damage by fire, theft, explosion,  sprinklers, and all other hazards and
risks,  and in such amounts,  as ordinarily  insured  against by other owners in
similar  businesses  conducted in the  locations  where  Borrower's  business is
conducted on the date hereof. Borrower shall also maintain insurance relating to
Borrower's  ownership and use of Borrower's Assets in amounts and of a type that
are customary to businesses similar to Borrower's.

     (b) All such  policies  of  insurance  shall  be in such  form,  with  such
companies,  and in such amounts as  reasonably  satisfactory  to Bank.  All such
policies of property insurance shall shall specify that the insurer must give at
least  twenty  (20) days  notice to Bank  before  canceling  its  policy for any
reason.  Borrower  shall  deliver to Bank  certified  copies of such policies of
insurance  and evidence of the payments of all premiums  therefor.  All proceeds
payable under any such policy  shall,  at the option of Bank, be payable to Bank
to be applied on account of the Obligations.

     6.7 Principal  Depository.  Borrower  shall maintain at least one operating
account and some portion of its excess funds with Bank.

     6.8  Quick  Ratio.  Borrower  shall  maintain,  as of the  last day of each
calendar quarter, a ratio of Quick Assets to Current Liabilities of at least 2.0
to 1.0.

     6.9 Debt-Net Worth Ratio.  Borrower shall  maintain,  as of the last day of
each calendar  quarter,  a ratio of Total  Liabilities less Subordinated Debt to
Tangible Net Worth plus Subordinated Debt of not more than 1.0 to 1.0.

     6.10 Tangible Net Worth.  Borrower  shall  maintain,  as of the last day of
each calendar quarter, a Tangible Net Worth of not less than TWENTY FIVE MILLION
Dollars ($25,000,000).

     6.11 Further  Assurances.  At any time and from time to time Borrower shall
execute and deliver such further instruments and take such further action as may
reasonably be requested by Bank to effect the purposes of this Agreement.

                              7. NEGATIVE COVENANTS

     Borrower  covenants and agrees that, so long as any credit  hereunder shall
be available and until payment in full of the outstanding  Obligations or for so
long as Bank may have any commitment to make any Advances,  Borrower will not do
any of the following:

     7.1 Dispositions.  Convey,  sell,  lease,  transfer or otherwise dispose of
(collectively, a "Transfer"), or permit any of its Subsidiaries to Transfer, all
or any part of its business or property,  other than: (i) Transfers of Inventory
in the ordinary course of business; (ii) Transfers of non-exclusive licenses and
similar   arrangements   for  the  use  of  the  property  of  Borrower  or  its
Subsidiaries;  (iii)  Transfers  of  worn-out  or  obsolete  Equipment,  or (iv)
Transfers of property no longer  necessary or useful to the business of Borrower
or any of its Subsidiaries.

                                       15
<PAGE>

     7.2  Change in  Business.  Engage  in any  business,  or permit  any of its
Subsidiaries  to engage in any  business,  other than the  businesses  currently
engaged in by Borrower and any business substantially similar or related thereto
(or incidental thereto),  or undergo a material change in Borrower's  ownership,
management  or  directors.  Borrower  will not,  without  thirty (30) days prior
written notification to Bank, relocate its chief executive office.

     7.3 Mergers or  Acquisitions.  Merge or  consolidate,  or permit any of its
Subsidiaries  to  merge  or  consolidate,   with  or  into  any  other  business
organization,  or, without Bank's prior written consent,  acquire, or permit any
of its Subsidiaries to acquire, all or substantially all of the capital stock or
property of another Person or any operating  division of a Person in one or more
acquisitions  having a total  aggregate  purchase price of FIVE MILLION  DOLLARS
($5,000,000) or more.

     7.4 Indebtedness. Create, incur, assume or be or remain liable with respect
to any  Indebtedness,  or permit any  Subsidiary so to do, other than  Permitted
Indebtedness.

     7.5 Encumbrances.  Create,  incur,  assume or suffer to exist any Lien with
respect to any of its Accounts or Inventory,  or assign or otherwise  convey any
right to receive  income,  including the sale of any Accounts,  or permit any of
its Subsidiaries so to do, except for Permitted Liens.

     7.6  Distributions.  Pay any  dividends or make any other  distribution  or
payment on account of or in  redemption,  retirement  or purchase of any capital
stock other than cash  dividends not in excess of SEVEN  HUNDRED FIFTY  THOUSAND
Dollars ($750,000) in any fiscal year of Borrower.

     7.7  Investments.  Directly  or  indirectly  acquire  or own,  or make  any
Investment  in or to any  Person,  or permit any of its  Subsidiaries  so to do,
other than Permitted Investments.

     7.8  Transactions  with  Affiliates.  Directly or indirectly  enter into or
permit to exist any material  transaction  with any Affiliate of Borrower except
for transactions  that are in the ordinary course of Borrower's  business,  upon
fair and  reasonable  terms that are no less favorable to Borrower than would be
obtained in an arm's length transaction with a non-affiliated Person.

     7.9  Subordinated  Debt.  Make any  payment in respect of any  Subordinated
Debt,  or permit any of its  Subsidiaries  to make any such  payment,  except in
compliance  with the terms of such  Subordinated  Debt,  or amend any  provision
contained in any documentation  relating to the Subordinated Debt without Bank's
prior written consent.

     7.10  Compliance.   Become  an  "investment   company"   controlled  by  an
"investment  company," within the meaning of the Investment Company Act of 1940,
or  become  principally  engaged  in,  or  undertake  as one  of  its  important
activities,  the business of extending  credit for the purpose of  purchasing or
carrying margin stock, or use the proceeds of any Advance for such purpose. Fail
to meet the minimum funding  requirements of ERISA, permit a Reportable Event or
Prohibited  Transaction,  as defined in ERISA, to occur, fail to comply with the
Federal  Fair  Labor  Standards  Act or  violate  any law or  regulation,  which
violation could have a Material  Adverse Effect or a material  adverse effect on
Borrower's Assets, or permit any of its Subsidiaries to do any of the foregoing.

                         8. EVENTS OF DEFAULT

     Any one or more of the  following  events  shall  constitute  an  Event  of
Default by Borrower under this Agreement:

     8.1  Payment  Default.  If  Borrower  fails to pay,  when  due,  any of the
Obligations.

     8.2 Covenant Default.

     (a) If Borrower  fails to perform any  obligation  under Sections 6.3, 6.7,
6.8,  6.9, or 6.10 or violates  any of the  covenants  contained in Article 7 of
this Agreement, or

                                       16
<PAGE>

     (b) If Borrower  fails or neglects to perform,  keep,  or observe any other
material term,  provision,  condition,  covenant, or agreement contained in this
Agreement,  in any of the Loan  Documents,  or in any  other  present  or future
agreement between Borrower and Bank and as to any default under such other term,
provision,  condition,  covenant or agreement  that can be cured,  has failed to
cure such default within ten (10) days after Borrower receives notice thereof or
any officer of Borrower becomes aware thereof;  provided,  however,  that if the
default  cannot by its nature be cured  within the ten (10) day period or cannot
after  diligent  attempts by Borrower be cured  within such ten (10) day period,
and such default is likely to be cured within a reasonable  time,  then Borrower
shall have an additional  reasonable  period (which shall not in any case exceed
thirty (30) days) to attempt to cure such  default,  and within such  reasonable
time period the failure to have cured such default  shall not be deemed an Event
of Default  (provided  that no Advances  will be required to be made during such
cure period);

     8.3 Material Adverse Change.  If there (i) occurs a material adverse change
in the  business,  operations,  or condition  (financial  or  otherwise)  of the
Borrower,  or (ii) is a material  impairment of the prospect of repayment of any
portion  of the  Obligations  or (iii) is a  material  impairment  of the  value
Borrower's Assets;

     8.4 Attachment.  If any material portion of Borrower's  assets is attached,
seized,  subjected to a writ or distress  warrant,  or is levied upon,  or comes
into the  possession  of any  trustee,  receiver  or person  acting in a similar
capacity and such attachment,  seizure, writ or distress warrant or levy has not
been removed,  discharged  or rescinded  within ten (10) days, or if Borrower is
enjoined,  restrained, or in any way prevented by court order from continuing to
conduct all or any material  part of its business  affairs,  or if a judgment or
other  claim  becomes  a lien  or  encumbrance  upon  any  material  portion  of
Borrower's  assets,  or if a notice of lien,  levy,  or  assessment  is filed of
record with respect to any of Borrower's assets by the United States Government,
or any department,  agency, or instrumentality thereof, or by any state, county,
municipal, or governmental agency, and the same is not paid within ten (10) days
after  Borrower  receives  notice  thereof,  provided that none of the foregoing
shall  constitute an Event of Default where such action or event is stayed or an
adequate bond has been posted pending a good faith contest by Borrower (provided
that no Advances will be required to be made during such cure periods);

     8.5  Insolvency.  If  Borrower  becomes  insolvent,  or  if  an  Insolvency
Proceeding is commenced by Borrower, or if an Insolvency Proceeding is commenced
against  Borrower  and is not  dismissed  or  stayed  within  thirty  (30)  days
(provided  that  no  Advances  will  be  made  prior  to the  dismissal  of such
Insolvency Proceeding);

     8.6 Other  Agreements.  If there is a  default  in any  agreement  to which
Borrower is a party with a third party or parties resulting in the exercise of a
right  by such  third  party or  parties,  to  accelerate  the  maturity  of any
Indebtedness in an amount in excess of One Hundred Thousand  Dollars  ($100,000)
or that could have a Material Adverse Effect;

     8.7  Subordinated  Debt.  If  Borrower  makes any  payment  on  account  of
Subordinated  Debt,  except to the extent  such  payment  is  allowed  under any
subordination agreement entered into with Bank;

     8.8  Judgments.  If a judgment or judgments  for the payment of money in an
amount,  individually  or in the aggregate,  of at least Fifty Thousand  Dollars
($50,000) shall be rendered  against  Borrower and shall remain  unsatisfied and
unstayed  for a period of thirty (30) days  (provided  that no Advances  will be
made prior to the satisfaction or stay of such judgment); or

     8.9  Misrepresentations.  If any  material  misrepresentation  or  material
misstatement exists now or hereafter in any warranty or representation set forth
herein  or in any  certificate  delivered  to  Bank by any  Responsible  Officer
pursuant to this Agreement or to induce Bank to enter into this Agreement or any
other Loan Document.

                          9. BANK'S RIGHTS AND REMEDIES

     9.1 Rights and Remedies.  Upon the occurrence and during the continuance of
an Event of Default,  Bank may, at its election,  without notice of its election
and  without  demand,  do any one or more of the  following,  all of  which  are
authorized by Borrower:

                                       17
<PAGE>

     (a) Declare all Obligations, whether evidenced by this Agreement, by any of
the other Loan Documents,  or otherwise,  immediately due and payable  (provided
that upon the  occurrence  of an Event of Default  described  in Section 8.5 all
Obligations  shall  become  immediately  due and  payable  without any action by
Bank);

     (b) Cease  advancing  money or  extending  credit to or for the  benefit of
Borrower under this Agreement or under any other agreement  between Borrower and
Bank; and

     (c) Without notice to Borrower set off and apply to the Obligations any and
all (i) balances and deposits of Borrower held by Bank, or (ii)  indebtedness at
any time owing to or for the credit or the account of Borrower held by Bank.

     9.2 Power of Attorney.  Effective  only upon the  occurrence and during the
continuance of an Event of Default,  Borrower hereby  irrevocably  appoints Bank
(and any of Bank's  designated  officers,  or employees) as Borrower's  true and
lawful attorney to send requests for  verification of Accounts or notify account
debtors of Bank's security interest in the Accounts.  The appointment of Bank as
Borrower's attorney in fact, and each and every one of Bank's rights and powers,
being coupled with an interest, is irrevocable until all of the Obligations have
been  fully  repaid and  performed  and Bank's  obligation  to provide  advances
hereunder is terminated.

     9.3 Bank  Expenses.  If  Borrower  fails to pay any  amounts or furnish any
required  proof of payment due to third persons or entities,  as required  under
the terms of this Agreement,  then Bank may do any or all of the following:  (a)
make payment of the same or any part thereof; (b) set up such reserves under the
Committed  Revolving  Line as Bank  deems  necessary  to  protect  Bank from the
exposure created by such failure;  or (c) obtain and maintain insurance policies
of the type discussed in Section 6.6 of this Agreement, and take any action with
respect to such policies as Bank deems prudent. Any amounts so paid or deposited
by Bank shall  constitute  Bank Expenses,  shall be immediately due and payable,
and shall bear interest at the then applicable rate  hereinabove  provided.  Any
payments made by Bank shall not  constitute an agreement by Bank to make similar
payments  in the future or a waiver by Bank of any Event of  Default  under this
Agreement.

     9.4 Remedies  Cumulative.  Bank's rights and remedies under this Agreement,
the Loan Documents,  and all other  agreements  shall be cumulative.  Bank shall
have all other rights and remedies not inconsistent herewith as provided by law,
or in  equity.  No  exercise  by Bank of one right or remedy  shall be deemed an
election, and no waiver by Bank of any Event of Default on Borrower's part shall
be deemed a  continuing  waiver.  No delay by Bank  shall  constitute  a waiver,
election,  or  acquiescence  by it. No waiver by Bank shall be effective  unless
made in a written  document signed on behalf of Bank and then shall be effective
only in the  specific  instance  and for the  specific  purpose for which it was
given.

     9.5 Demand;  Protest.  Borrower waives demand,  protest, notice of protest,
notice of default or dishonor,  notice of payment and nonpayment,  notice of any
default, nonpayment at maturity, release, compromise,  settlement, extension, or
renewal of accounts,  documents,  instruments,  chattel paper, and guarantees at
any time held by Bank on which Borrower may in any way be liable.

                                   10. NOTICES

     Unless otherwise provided in this Agreement,  all notices or demands by any
party  relating  to  this  Agreement  or any  other  agreement  entered  into in
connection herewith shall be in writing and (except for financial statements and
other  informational  documents which may be sent by first-class  mail,  postage
prepaid)  shall  be  personally  delivered  or  sent by a  recognized  overnight
delivery service,  certified mail, postage prepaid, return receipt requested, or
by  telefacsimile  to Borrower or to Bank,  as the case may be, at its addresses
set forth below:

          If to Borrower       Advanced Technology Materials, Inc.
                                7 Commerce Drive
                                Danbury, CT 06810
                               ATTN: Daniel P. Sharkey, CFO
                                FAX: 203-792-8040

                                       18
<PAGE>

          If to Bank           Silicon Valley Bank
                                40 William Street
                               Wellesley, MA 02181
                               ATTN: Joan Parsons
                                FAX: 617-431-9906

     The  parties  hereto may  change  the  address at which they are to receive
notices  hereunder,  by notice in writing in the  foregoing  manner given to the
other.

                 11. CHOICE OF LAW AND VENUE; JURY TRIAL WAIVER

     The  laws  of  the  Commonwealth  of  Massachusetts  shall  apply  to  this
Agreement.  BORROWER  ACCEPTS FOR ITSELF AND IN CONNECTION  WITH ITS PROPERTIES,
UNCONDITIONALLY, THE NON-EXCLUSIVE JURISDICTION OF ANY STATE OR FEDERAL COURT OF
COMPETENT JURISDICTION IN THE COMMONWEALTH OF MASSACHUSETTS IN ANY ACTION, SUIT,
OR  PROCEEDING  OF ANY KIND  AGAINST IT WHICH ARISES OUT OF OR BY REASON OF THIS
AGREEMENT; PROVIDED, HOWEVER, THAT IF FOR ANY REASON BANK CANNOT AVAIL ITSELF OF
THE COURTS OF THE COMMONWEALTH OF MASSACHUSETTS,  BORROWER ACCEPTS  JURISDICTION
OF THE COURTS AND VENUE IN SANTA CLARA  COUNTY,  CALIFORNIA.  BORROWER  AND BANK
EACH HEREBY WAIVE THEIR RESPECTIVE  RIGHTS TO A JURY TRIAL OF ANY CLAIM OR CAUSE
OF ACTION  BASED UPON OR ARISING OUT OF ANY OF THE LOAN  DOCUMENTS OR ANY OF THE
TRANSACTIONS  CONTEMPLATED  THEREIN,  INCLUDING  CONTRACT  CLAIMS,  TORT CLAIMS,
BREACH OF DUTY CLAIMS, AND ALL OTHER COMMON LAW OR STATUTORY CLAIMS.  EACH PARTY
RECOGNIZES  AND  AGREES  THAT  THE  FOREGOING  WAIVER   CONSTITUTES  A  MATERIAL
INDUCEMENT  FOR IT TO ENTER  INTO THIS  AGREEMENT.  EACH  PARTY  REPRESENTS  AND
WARRANTS  THAT IT HAS  REVIEWED  THIS WAIVER WITH ITS LEGAL  COUNSEL AND THAT IT
KNOWINGLY AND VOLUNTARILY  WAIVES ITS JURY TRIAL RIGHTS  FOLLOWING  CONSULTATION
WITH LEGAL COUNSEL.

                             12. GENERAL PROVISIONS

     12.1  Successors and Assigns.  This  Agreement  shall bind and inure to the
benefit  of the  respective  successors  and  permitted  assigns  of each of the
parties; provided, however, that neither this Agreement nor any rights hereunder
may be assigned by Borrower without Bank's prior written consent,  which consent
may be granted or withheld in Bank's sole discretion.  Bank shall have the right
without the consent of or notice to Borrower to sell,  transfer,  negotiate,  or
grant  participation  in  all  or any  part  of,  or  any  interest  in,  Bank's
obligations,  rights and benefits hereunder, provided that Bank remains the lead
bank after any such action.

     12.2  Indemnification.  Borrower shall defend,  indemnify and hold harmless
Bank and its  officers,  employees,  and agents  against:  (a) all  obligations,
demands,  claims,  and  liabilities  claimed or  asserted  by any other party in
connection with the  transactions  contemplated  by this Agreement;  and (b) all
losses or Bank  Expenses  in any way  suffered,  incurred,  or paid by Bank as a
result  of or in  any  way  arising  out  of,  following,  or  consequential  to
transactions  between  Bank  and  Borrower  whether  under  this  Agreement,  or
otherwise (including without limitation reasonable attorneys fees and expenses),
except for losses caused by Bank's gross negligence or willful misconduct.

     12.3 Time of Essence.  Time is of the essence  for the  performance  of all
obligations set forth in this Agreement.

     12.4 Severability of Provisions.  Each provision of this Agreement shall be
severable  from every  other  provision  of this  Agreement  for the  purpose of
determining the legal enforceability of any specific provision.

     12.5 Amendments in Writing,  Integration.  This Agreement cannot be amended
or terminated  orally.  All prior agreements,  understandings,  representations,
warranties,  and  negotiations  between the parties  hereto with  respect to the
subject matter of this Agreement, if any, are merged into this Agreement and the
Loan Documents.

                                       19
<PAGE>

     12.6  Counterparts.  This  Agreement  may  be  executed  in any  number  of
counterparts and by different parties on separate  counterparts,  each of which,
when  executed  and  delivered,  shall be deemed to be an  original,  and all of
which, when taken together, shall constitute but one and the same Agreement.

     12.7 Survival.  All covenants,  representations and warranties made in this
Agreement  shall  continue  in full force and effect so long as any  Obligations
remain  outstanding.  The obligations of Borrower to indemnify Bank with respect
to the expenses,  damages,  losses,  costs and liabilities  described in Section
12.2 shall  survive until all  applicable  statute of  limitations  periods with
respect to actions that may be brought against Bank have run.

     12.8 Confidentiality.  In handling any confidential  information Bank shall
exercise  the same  degree of care that it  exercises  with  respect  to its own
proprietary information of the same types to maintain the confidentiality of any
non-public  information  thereby received or received pursuant to this Agreement
except that disclosure of such  information may be made (i) to the  subsidiaries
or affiliates of Bank in connection  with their present or prospective  business
relations  with Borrower,  (ii) to prospective  transferees or purchasers of any
interest  in the  Loans,  provided  that they  have  entered  into a  comparable
confidentiality  agreement  in favor of  Borrower  and have  delivered a copy to
Borrower,  (iii) as  required  by law,  regulations,  rule or  order,  subpoena,
judicial  order or similar order and (iv) as may be required in connection  with
the  examination,   audit  or  similar   investigation  of  Bank.   Confidential
information  hereunder shall not include  information that either: (a) is in the
public domain or in the knowledge or possession of Bank when  disclosed to Bank,
or becomes part of the public  domain after  disclosure to Bank through no fault
of Bank;  or (b) is disclosed to Bank by a third party,  provided  Bank does not
have actual  knowledge that such third party is prohibited  from disclosing such
information.

     12.9  Effectiveness.  This  Agreement  shall become  effective only when it
shall have been executed by Borrower and Bank  (provided,  however,  in no event
shall this  Agreement  become  effective  until  signed by an officer of Bank in
California).

     IN WITNESS  WHEREOF,  the parties  hereto have caused this  Agreement to be
executed as a sealed instrument as of the date first set forth above.

"Borrower"                                "Bank"

ADVANCED TECHNOLOGY MATERIALS, INC.       SILICON VALLEY BANK, doing business
                                          as SILICON VALLEY EAST


By:   /s/ Daniel P. Sharkey                 By: /s/ James C. Maynard
    --------------------------             --------------------------
       Daniel P. Sharkey, CFO                 James C. Maynard, VP


                                          SILICON VALLEY BANK

                                          By:   /s/ Christine Ware
                                          -------------------------
                                          Title: Vice President
                                          -------------------------
                                     (Signed in Santa Clara County, California)

                                       20
<PAGE>



                                    EXHIBIT A
                                BORROWER'S ASSETS


     Borrower's  Assets  shall  consist  of all  right,  title and  interest  of
Borrower in and to the following:

     (a) All goods and  equipment  now owned or hereafter  acquired,  including,
without limitation, all machinery,  fixtures, vehicles (including motor vehicles
and trailers),  and any interest in any of the foregoing,  and all  attachments,
accessories,   accessions,   replacements,    substitutions,    additions,   and
improvements to any of the foregoing, wherever located;

     (b) All  inventory,  now owned or hereafter  acquired,  including,  without
limitation,  all  merchandise,  raw  materials,  parts,  supplies,  packing  and
shipping  materials,  work in  process  and  finished  products  including  such
inventory  as is  temporarily  out of  Borrower's  custody or  possession  or in
transit and including any returns upon any accounts or other proceeds, including
insurance  proceeds,  resulting  from  the  sale  or  disposition  of any of the
foregoing  and  any  documents  of  title  representing  any of the  above,  and
Borrower's Books relating to any of the foregoing;

     (c) All  contract  rights and general  intangibles  now owned or  hereafter
acquired, including, without limitation,  goodwill,  trademarks,  service marks,
trade  styles,  trade  names,  patents,  patent  applications,  leases,  license
agreements,   franchise  agreements,   blueprints,  drawings,  purchase  orders,
customer lists, route lists, infringements,  claims, computer programs, computer
discs, computer tapes, literature,  reports, catalogs, design rights, income tax
refunds, payments of insurance and rights to payment of any kind;

     (d) All now existing  and  hereafter  arising  accounts,  contract  rights,
royalties,  license rights and all other forms of obligations  owing to Borrower
arising out of the sale or lease of goods,  the  licensing of  technology or the
rendering of services by Borrower, whether or not earned by performance, and any
and all credit insurance,  guaranties,  and other security therefor,  as well as
all  merchandise  returned to or  reclaimed  by Borrower  and  Borrower's  Books
relating to any of the foregoing;

     (e) All documents, cash, deposit accounts,  securities,  letters of credit,
certificates  of deposit,  instruments  and chattel paper now owned or hereafter
acquired and Borrower's Books relating to the foregoing;

     (f) All copyright rights,  copyright applications,  copyright registrations
and like  protections in each work of authorship  and  derivative  work thereof,
whether  published or unpublished,  now owned or hereafter  acquired;  all trade
secret  rights,  including  all  rights  to  unpatented  inventions,   know-how,
operating manuals,  license rights and agreements and confidential  information,
now owned or hereafter  acquired;  all mask work or similar rights available for
the protection of  semiconductor  chips,  now owned or hereafter  acquired;  all
claims for damages by way of any past, present and future infringement of any of
the foregoing; and

     (g) Any and all claims,  rights and  interests  in any of the above and all
substitutions for, additions and accessions to and proceeds thereof.

                                       21
<PAGE>




                                    EXHIBIT B
                  LOAN PAYMENT/ADVANCE TELEPHONE REQUEST FORM

The undersigned hereby certifies as follows:

     I, ___________________, am the duly elected and acting ____________________
of Advanced Technology Materials, Inc. ("Borrower").

     This certificate is delivered  pursuant to Section 2.1 of that certain Loan
Agreement  dated  December 27, 1996 by and between  Borrower and Silicon  Valley
Bank ("Bank") (the "Loan  Agreement").  The terms used in this Borrowing Request
which are defined in the Loan Agreement have the same meaning herein as ascribed
to them therein.

     Borrower is confirming  its telephone  request made on  __________________,
199___ for a Prime Rate Advance as follows:

     (a) The  date on  which  the  Advance  is to be made is  _________________,
199__.

     (b) The amount of the Advance is to be $____________.

     All representations and warranties of Borrower stated in the Loan Agreement
are true,  accurate and complete in all material  respects as of the date of the
telephone request for and Advance confirmed by this Borrowing Request; provided,
however,  that those  representations  and  warranties  expressly  referring  to
another date shall be true, accurate and complete in all material respects as of
such date.

     IN WITNESS WHEREOF,  this Borrowing  Request is executed by the undersigned
as of this ______ day of ______________, 199__.



     ADVANCED TECHNOLOGY MATERIALS, INC.


     By:

     Title:



                                       22
<PAGE>
<TABLE>
<CAPTION>

                                    EXHIBIT C
                           BORROWING BASE CERTIFICATE

Borrower:                                    Lender:
         Advanced Technology Materials, Inc.        Silicon Valley Bank
         7 Commerce Drive                           3003 Tasman Drive
         Danbury, CT 06810                          Santa Clara, CA 95054

Commitment Amount: $10,000,000

ACCOUNTS RECEIVABLE
<S>                                                      <C>        <C>
1. Accounts Receivable Book Value as of ________________            $__________
2. Additions (please explain on reverse)                            $__________
3. TOTAL ACCOUNTS RECEIVABLE                                        $__________
ACCOUNTS RECEIVABLE DEDUCTIONS
4. Amounts over 90 days due                              $_________
5. Credit Balances Applied to Over 90-Day Accounts       $_________
6. Balance of 50% over 90 day accounts                   $_________
7. Concentration Limits                                  $_________
8. Ineligible Foreign Accounts                           $_________
9. Contra Accounts                                       $_________
10.Promotion or Demo Accounts                            $_________
11.Intercompany/Employee Accounts                        $_________
12.Other (please explain on reverse)                     $_________
13.TOTAL ACCOUNTS RECEIVABLE DEDUCTIONS                              $_________
14.Eligible Accounts (#3 - #13)                                      $_________
15.LOAN VALUE OF ACCOUNTS (80% of #14)                               $_________

</TABLE>
ELIGIBLE INVENTORY
16.Raw Materials Inventory Value as of  ___________________  $_________ ELIGIBLE
INVENTORY  DEDUCTIONS  (without   duplication)  17.Work  in  Process  $_________
18.TOTAL  ELIGIBLE  INVENTORY  DEDUCTIONS   $_________   19.Eligible   Inventory
(#16-#18)  $_________  20.Maximum  Eligible Inventory Sublimit $ 900,000 21.LOAN
VALUE OF INVENTORY (lesser of 20 or [30% of #18]) $_________

<TABLE>
<CAPTION>
BALANCES
<S>                                                                 <C>
22.Maximum Loan Amount                                              $10,000,000
23.Total Funds Available (Lesser of #22 or [#15 plus #21])           $_________
24.Present balance owing on Line of Credit                           $_________
25.Outstanding under Eligible Inventory Sublimit                     $_________
26.RESERVE POSITIVE (#22 minus #24 plus #25)                         $_________
</TABLE>
     The  undersigned  represents  and  warrants  that  the  foregoing  is true,
complete and correct, and that the information  reflected in this Borrowing Base
Certificate  complies with the  representations  and warranties set forth in the
Loan  Agreement  dated  DECEMBER 27, 1996,  as may be amended from time to time,
between the undersigned and Silicon Valley Bank.

- ------------------------------------------------------------------------------
BANK                                   USE                               ONLY
- ------------------------------------------------------------------------------
Rec'd By: ___________
- ------------------------------------------------------------------------------
              Auth. Signer

Date: _______________

Verified: _______________
           Auth. Signer

Date: ________________


ADVANCED TECHNOLOGY MATERIALS, INC.


By: ____________________________
          Authorized Signer
COMMENTS:

                                       23
<PAGE>

                                    EXHIBIT D
                             COMPLIANCE CERTIFICATE

Borrower:                                   Lender:
        Advanced Technology Materials, Inc.        Silicon Valley Bank
        7 Commerce Drive                           3003 Tasman Drive
        Danbury, CT 06810                          Santa Clara, CA 95054

     The undersigned  authorized officer of Advanced Technology Materials,  Inc.
hereby  certifies  that in accordance  with the terms and conditions of the Loan
Agreement dated DECEMBER 27, 1996 between  Borrower and Bank (the  "Agreement"),
(i) Borrower is in complete  compliance for the period ending ___________ of all
required conditions and terms except as noted below and (ii) all representations
and  warranties  of Borrower  stated in the  Agreement  are true,  accurate  and
complete in all material  respects as of the date hereof.  Attached herewith are
the required documents supporting the above  certification.  The Officer further
certifies  that  these  are  prepared  in  accordance  with  Generally  Accepted
Accounting  Principals  (GAAP)  and are  consistent  from one period to the next
except as explained in an accompanying letter or footnotes.

     Please  indicate  compliance  status by circling  Yes/No under  '"Complies"
column

Reporting Covenant                  Required                          Complies

Quarterly financial statements      Quarterly within 45 days         Yes     No
Annual (CPA Audited)                FYE within 90 days               Yes     No
A/R & A/P Agings                    Quarterly within 15 days
                                   (prior to first Advance
                                    and only while Advances
                                         are outstanding)             Yes    No

Financial Covenants           Required          Actual                Complies

Maintain on a Quarterly Basis:
 Minimum Quick Ratio          2.0:1.0            __________:1.0        Yes   No
 Minimum TNW              $25,000,000        $_____________            Yes   No
 Maximum Debt/TNW             1.0:1.0            __________:1.0        Yes   No

Comments Regarding Exceptions:

     On behalf of Borrower,  the Officer further  acknowledges  that at any such
time as  Borrower  is out of  compliance  with any of the terms set forth in the
Agreement,  including,  without  limitation,  any  of the  financial  covenants,
Borrower cannot receive any advances.


     Sincerely,
- ------------------------------------------------------------------------------
BANK                                   USE                                ONLY
- ------------------------------------------------------------------------------
Received                     by:               ___________________________
- ------------------------------------------------------------------------------
Date: _________________________________

Verified: ______________________________
Date: _________________________________

Compliance Status:                  Yes      No

- -----------------------------------
Signature

- -----------------------------------
TITLE

- ----------------------------------
DATE



                                       24
<PAGE>

                          LIBOR SUPPLEMENT TO AGREEMENT

     This LIBOR  Supplement to Agreement (the  "Supplement")  is a supplement to
the Loan Agreement dated as of December 27, 1996 (the "Loan Agreement")  between
Silicon   Valley  Bank  ("Bank")  and  Advanced   Technology   Materials,   Inc.
("Borrower), and forms a part of and is incorporated into the Loan Agreement.

                                 1. DEFINITIONS

     "Business  Day" means a day of the year (a) that is not a Saturday,  Sunday
or other day on which banks in the State of California or the City of London are
authorized or required to close and (b) on which  dealings are carried on in the
interbank market in which Bank customarily participates.

     "Interest Period" means for each LIBOR Rate Loan, a period of approximately
one, two or three months as the Borrower may elect,  provided  that the last day
of an Interest  Period for a LIBOR Rate Loan shall be  determined  in accordance
with the practices of the LIBOR interbank market as from time to time in effect,
provided,  further,  in all cases such  period  shall  expire not later than the
applicable Maturity Date.

     "Interest  Rate"  shall mean as to: (a) Prime Rate  Loans,  an annual  rate
equal to the Prime  Rate;  and (b) LIBOR Rate  Loans,  an annual rate of 2.5% in
excess of the LIBOR Rate (based on the LIBOR Rate  applicable  for the  Interest
Period selected by the Borrower).

     "LIBOR Base Rate" means, for any Interest Period for a LIBOR Rate Loan, the
rate of  interest  per  annum  determined  by Bank to be the per  annum  rate of
interest at which  deposits in United States  Dollars are offered to Bank in the
London  interbank  market in which Bank  customarily  participates at 11:00 A.M.
(local time in such interbank market) two (2) Business Days before the first day
of such Interest Period for a period approximately equal to such Interest Period
and in an amount approximately equal to the amount of such Loan.

     "LIBOR Rate" shall mean,  for any Interest  Period for a LIBOR Rate Loan, a
rate per annum (rounded upwards, if necessary,  to the nearest 1/16 of 1%) equal
to (i) the LIBOR Base Rate for such Interest  Period divided by (ii) 1 minus the
Reserve Requirement for such Interest Period.

     "LIBOR  Rate  Loans"  means any Loans  made or a portion  thereof  on which
interest is payable based on the LIBOR Rate in accordance with the terms hereof.

     "Prime Rate" means the variable  rate of interest per annum,  most recently
announced by Bank as its "prime rate," whether or not such announced rate is the
lowest rate available from Bank. The Interest rate  applicable to the Prime Rate
Loans shall change on each date there is a change in the Prime Rate.

     "Prime  Rate  Loans"  means any Loans  made or a portion  thereof  on which
interest is payable based on the Prime Rate in accordance with the terms hereof.

     "Regulation D" means  Regulation D of the Board of Governors of the Federal
Reserve System as the same may be amended or supplemented from time to time.

     "Regulatory Change" means, with respect to Bank, any change on or after the
date of this Loan Agreement in United States  federal,  state or foreign laws or
regulations,  including Regulation D, or the adoption or making on or after such
date of any  interpretations,  directives  or  requests  applying  to a class of
lenders  including Bank of or under any United States  federal or state,  or any
foreign,  laws or  regulations  (whether  or not having the force of law) by any
court or governmental or monetary  authority charged with the  interpretation or
administration thereof.

                                       25
<PAGE>

     "Reserve  Requirement"  means, for any Interest Period. the average maximum
rate at which  reserves  (including  any  marginal,  supplemental  or  emergency
reserves)  are  required to be  maintained  during such  Interest  Period  under
Regulation  D  against  "Eurocurrency  liabilities"  (as  such  term  is used in
Regulation D) by member banks of the Federal  Reserve System.  Without  limiting
the effect of the  foregoing,  the Reserve  Requirement  shall reflect any other
reserves  required to be maintained by Bank by reason of any  Regulatory  Change
against (i) any category of liabilities  which includes deposits by reference to
which the LIBOR Rate is to be determined as provided in the definition of "LIBOR
Base Rate" or (ii) any  category of  extensions  of credit or other assets which
include Loans.

             2. REQUESTS FOR LOANS: CONFIRMATION OF INITIAL LOANS.

     (a) Each LIBOR Rate Loan shall be made upon the irrevocable written request
of Borrower received by Bank not later than 11:00 a.m. (Santa Clara,  California
time) on the Business Day three (3) Business Days prior to the date such Loan is
to be made.  Each such  notice  shall  specify the date such Loan is to be made,
which day shall be a Business Day, the amount of such Loan, the Interest  Period
for such Loan, and comply with such other  requirements  as Bank  determines are
reasonable or desirable in connection therewith.

     (b) Each  written  request  for a LIBOR Rate Loan shall be in the form of a
LIBOR Rate Loan Borrowing Certificate as set forth on Schedule A, which shall be
duly executed by the Borrower.

     (c) Each Prime Rate Loan shall be made upon the irrevocable written request
of Borrower received by Bank not later than 11:00 a.m. (Santa Clara,  California
time) on the Business Day one (1) Business day prior to the date such Loan is to
be made. Each such notice shall specify the date such Loan is to be made,  which
day shall be a Business  Day and the amount of such Loan,  and comply  with such
other  requirements as Bank determines are reasonable or desirable in connection
therewith.

                      3. CONVERSION/CONTINUATION OF LOANS.

     (a)  Borrower  may from time to time submit in writing a request that Prime
Rate Loans be  converted  to LIBOR Rate  Loans or that any  existing  LIBOR Rate
Loans continue for an additional Interest Period. Such request shall specify the
amount of the Prime Rate Loans which will  constitute  LIBOR Rate Loans (subject
to the limits set forth below) and the Interest  Period to be applicable to such
LIBOR Rate Loans.  Each written request for a conversion to a LIBOR Rate Loan or
a  continuation  of a LIBOR  Rate Loan shall be  substantially  in the form of a
LIBOR Rate Conversion/Continuation Certificate as set forth on Schedule B, which
shall be duly  executed  by the  Borrower.  Subject to the terms and  conditions
contained herein, three (3) Business Days after Bank's receipt of such a request
from  Borrower,  such Prime Rate Loans shall be converted to LIBOR Rate Loans or
such LIBOR Rate Loans shall continue, as the case may be provided that:

     (i) no Event of  Default,  or event which with notice or passage of time or
both would constitute an Event of Default, exists;

     (ii) no party  hereto  shall  have sent any notice of  termination  of this
Supplement or of the Loan Agreement.

     (iii) Borrower  shall have complied with such customary  procedures as Bank
has established from time to time for Borrower's requests for LIBOR Rate Loans;

     (iv) the  amount of a LIBOR  Rate Loan shall be  $500,000  or such  greater
amount which is an integral multiple of $50,000; and

     (v) Bank shall have  determined  that the Interest  Period or LIBOR Rate is
available to Bank which can be readily  determined as of the date of the request
for such LIBOR Rate Loan.

     Any request by Borrower to convert  Prime Rate Loans to LIBOR Rate Loans or
continue any  existing  LIBOR Rate Loans shall be  irrevocable.  Notwithstanding
anything  to the  contrary  contained  herein,  Bank  shall not be  required  to
purchase United States Dollar deposits in the London  interbank  market or other
applicable  LIBOR Rate market to fund any LIBOR Rate Loans,  but the  provisions
hereof shall be deemed to apply as if Bank had  purchased  such deposits to fund
the LIBOR Rate Loans.

                                       26
<PAGE>

     (b) Any LIBOR Rate Loans  shall  automatically  convert to Prime Rate Loans
upon the last day of the applicable  Interest  Period,  unless Bank has received
and approved a complete and proper  request to continue  such LIBOR Rate Loan at
least  three (3)  Business  Days prior to such last day in  accordance  with the
terms hereof.  Any LIBOR Rate Loans shall,  at Bank's  option,  convert to Prime
Rate Loans in the event that (i) an Event of  Default,  or event  which with the
notice or passage of time or both would  constitute  an Event of Default,  shall
exist, (ii) this Supplement or the Loan Agreement shall terminate,  or (iii) the
aggregate  principal  amount of the Prime Rate Loans which have  previously been
converted to LIBOR Rate Loans,  or the  aggregate  principal  amount of existing
LIBOR Rate Loans continued,  as the case may be, at the beginning of an interest
Period shall at any time during such Interest  Period  exceeds the lesser of (x)
the Committed  Revolving Line or (y) the Borrowing Base.  Borrower agrees to pay
to Bank, upon demand by Bank (or Bank may, at its option, charge Borrower's loan
account) any amounts required to compensate Bank for any loss (including loss of
anticipated  profits),  cost or expense Incurred by such person,  as a result of
the  conversion  of LIBOR Rate Loans to Prime Rate Loans  pursuant to any of the
foregoing.

     (c) On all Loans,  Interest shall be payable by Borrower to Bank monthly in
arrears not later than the  twenty-second  (22nd) day of each calendar  month at
the applicable Interest Rate.

     4. ADDITIONAL REQUIREMENTS/PROVISIONS REGARDING LIBOR RATE LOANS: ETC.

     (a) If for any reason  (including  voluntary  or  mandatory  prepayment  or
acceleration), Bank receives all or part of the principal amount of a LIBOR Rate
Loan prior to the last day of the Interest Period for such Loan,  Borrower shall
immediately  notify  Borrower's  account officer at Bank and, on demand by Bank,
pay Bank the amount (if any) by which (i) the  additional  interest  which would
have been payable on the amount so received had it not been  received  until the
last day of such Interest Period exceeds (ii) the interest which would have been
recoverable  by Bank by  placing  the  amount  so  received  on  deposit  in the
certificate of deposit  markets or the offshore  currency  interbank  markets or
United States  Treasury  investment  products,  as the case may be, for a period
starting on the date on which it was so  received  and ending on the last day of
such Interest  Period at the Interest rate  determined by Bank in its reasonable
discretion.  Bank's  determination as to such amount shall be conclusive  absent
manifest error.

     (b) Borrower shall pay to Bank, upon demand by Bank, from time to time such
amounts as Bank may  determine to be necessary  to  compensate  it for any costs
incurred  by Bank  that  Bank  determines  are  attributable  to its  making  or
maintaining  of any amount  receivable by Bank hereunder in respect of any Loans
relating  thereto (such increases in costs and reductions in amounts  receivable
being  herein  called  "Additional  Costs"),  in each  case  resulting  from any
Regulatory Change which:

     (i) changes the basis of taxation of any amounts payable to Bank under this
Supplement  in respect of any Loans  (other  than  changes  which  affect  taxes
measured by or imposed on the overall net income of Bank by the  jurisdiction in
which such Bank has its principal office); or

     (ii)  imposes  or  modifies  any  reserve,   special   deposit  or  similar
requirements  relating to any  extensions  of credit or other  assets of, or any
deposits with or other  liabilities of Bank (including any Loans or any deposits
referred to in the definition of "LIBOR Base Rate"); or

     (iii) imposes any other condition affecting this Supplement (or any of such
extensions of credit or liabilities).

     Bank will notify Borrower of any event occurring after the date of the Loan
Agreement  which will entitle Bank to  compensation  pursuant to this section as
promptly as  practicable  after it obtains  knowledge  thereof and determines to
request such  compensation.  Bank will furnish Borrower with a statement setting
forth the basis and amount of each request by Bank for  compensation  under this
Section 4. Determinations and allocations by Bank for purposes of this Section 4
of  the  effect  of any  Regulatory  Change  on its  costs  of  maintaining  its
obligations  to make  Loans or of  making  or  maintaining  Loans or on  amounts
receivable by it in respect of Loans, and of the additional  amounts required to
compensate Bank in respect of any Additional  Costs,  shall be conclusive absent
manifest error,

                                       27
<PAGE>

     (c) Borrower  shall pay to Bank,  upon the request of Bank,  such amount or
amounts as shall be sufficient  (in the sole good faith opinion of such Bank) to
compensate it for any loss,  costs or expense  incurred by it as a result of any
failure by Borrower to borrow a Loan on the date for such borrowing specified in
the relevant notice of borrowing hereunder.

     (d) If Bank shall  determine  that the  adoption or  implementation  of any
applicable law, rule,  regulation or treaty regarding capital  adequacy,  or any
change therein, or any change in the interpretation or administration thereof by
any governmental  authority,  central bank or comparable agency charged with the
interpretation  or  administration  thereof,  or  compliance  by  Bank  (or  its
applicable  lending  office) with  respect to any  directive  regarding  capital
adequacy (whether or not having the force of law) of any such authority, central
bank or comparable  agency, has or would have the effect of reducing the rate of
return on capital of Bank or any person or entity  controlling Bank (a "Parent")
as a consequence of its  obligations  hereunder to a level below that which Bank
(or its Parent) could have achieved but for such adoption,  change or compliance
(taking into  consideration its policies with respect to capital adequacy) by an
amount  deemed by Bank to be  material,  then from time to time,  within 15 days
after  demand by Bank,  Borrower  shall pay to Bank  such  additional  amount or
amounts as will compensate Bank for such reduction. A statement of Bank claiming
compensation  under this  Section and  setting  forth the  additional  amount or
amounts to be paid to it hereunder shall be conclusive absent manifest error.

     (e) If at any time Bank,  in its sole and absolute  discretion,  determines
that  (i)  the  amount  of  the  LIBOR  Rate  Loans  for  periods  equal  to the
corresponding  interest  Periods  are not  available  to  Bank  in the  offshore
currency interbank  markets,  or (ii) the LIBOR Rate does not accurately reflect
the cost to Bank of lending the LIBOR Rate Loan,  then Bank shall  promptly give
notice thereof to Borrower, and upon the giving of such notice Bank's obligation
to make the LIBOR Rate Loans shall terminate,  unless Bank and Borrower agree in
writing to a different interest rate applicable to LIBOR Rate Loans. If it shall
become  unlawful  for Bank to  continue  to fund or  maintain  any Loans,  or to
perform its obligations  hereunder,  upon demand by Bank,  Borrower shall prepay
the Loans in full with accrued interest thereon and all other amounts payable by
Borrower  hereunder  (including,  without  limitation,  any  amount  payable  in
connection with such prepayment pursuant to Section 4(a)).

                                  5. CONFLICTS.

     If there is any  conflict  between  the terms and  condition  of this LIBOR
Supplement to Loan Agreement and the terms and condition of the Loan  Agreement,
the terms  and  condition  of this  LIBOR  Supplement  to Loan  Agreement  shall
control.


                                       28
<PAGE>


                         SCHEDULE A TO LIBOR SUPPLEMENT
                      LIBOR RATE LOAN BORROWING CERTIFICATE

         The undersigned hereby certifies as fellows:

     I,   _________________________,    am   the   duly   elected   and   acting
________________ of Advanced Technology Materials, Inc. ("Borrower").

     This  certificate Is delivered  pursuant to Section 2 of that certain LIBOR
Supplement to Agreement together with the Loan Agreement dated December 27, 1996
by and between Borrower and Silicon Valley Bank ("Bank") (the "Loan Agreement").
The terms  used in this  Borrowing  Certificate  which are  defined  in the Loan
Agreement have the same meaning herein as ascribed to them therein.

     Borrower  hereby  requests  on  ___________,19___  a LIBOR  Rate  Loan (the
"Loan") as follows:

     (a) The date on which the Loan is to be made is _____________ 19__.

     (b) The  amount of the Loan is to be  ____________________  ($___________),
for an Interest Period of ____________ month(s).

     All representations and warranties of Borrower stated in the Loan Agreement
are true,  correct and complete in all material  respects as of the date of this
request for a loan; provided, however, that those representations and warranties
expressly  referring to another date shall be true,  correct and complete in all
material respects as of such date.

     IN WITNESS  WHEREOF,  this  Borrowing  Base  Certificate is executed by the
undersigned as of this ________ day of ___________ 19__.

     ADVANCED TECHNOLOGY MATERIALS, INC.


     By:

     Title:


     Internal Bank Use Only

- ------------------  ----------  -------------------  -------------
LIBOR Pricing Date  LIBOR Rate  LIBOR Rate Variance  Maturity Date
- ------------------  ----------  -------------------  -------------


                                       29
<PAGE>

                         SCHEDULE B TO LIBOR SUPPLEMENT
                 LIBOR RATE CONVERSION/CONTINUATION CERTIFICATE

         The undersigned hereby certifies as follows:

     I,   _________________________,    am   the   duly   elected   and   acting
________________ of Advanced Technology Materials, Inc. ("Borrower").

     This  certificate is delivered  pursuant to Section 2 of that certain LIBOR
Supplement to Agreement together with the Loan Agreement dated December 27, 1996
by and between Borrower and Silicon Valley Bank ("Bank") (the "Loan Agreement").
The terms used in this LIBOR Rate Conversion/Continuation  Certificate which are
defined in the Loan  Agreement  have the same meaning herein as ascribed to them
therein,

     Borrower  hereby  requests on  _____________  19____ a LIBOR Rate Loan (the
"Loan") as follows:

     (a) ____ (I) A rate  conversion of an existing Prime Rate Loan from a Prime
Rate Loan to a LIBOR Rate Loan; or

     ____ (ii) A  continuation  of an  existing  LIBOR Rate Loan as a LIBOR Rate
Loan;

     [Check (i) or (ii) above]

     (b) The date on which the Loan is to be made is _____________ 19___.

     (c) The amount of the Loan is to be  __________________  ($____________  ),
for an Interest Period of _____________ month(s).

     All representations and warranties of Borrower stated in the Loan Agreement
are true,  correct and complete in all material  respects as of the date of this
request for a loan; provided, however, that those representations and warranties
expressly  referring to another dale shall be true,  correct and complete in all
material respects as of such date.

     IN WITNESS WHEREOF, this LIBOR Rate Conversion/Continuation  Certificate is
executed by the undersigned as of this __________ day of _____________ 19__.

     ADVANCED TECHNOLOGY MATERIALS, INC.


     By:

     Title:

     For Internal Bank Use Only

- ------------------  ----------  -------------------  -------------
LIBOR Pricing Date  LIBOR Rate  LIBOR Rate Variance  Maturity Date
- ------------------  ----------  -------------------  -------------


                                       30
<PAGE>


                            Revolving Promissory Note

$10,000,000                                             Danbury, Connecticut
                                                           December 27, 1996

     FOR VALUE RECEIVED, the undersigned, ADVANCED TECHNOLOGY MATERIALS, INC., a
Delaware  corporation (the "Borrower"),  promises to pay to the order of Silicon
Valley Bank, a  California-chartered  bank ("Bank"), at such place as the holder
hereof may  designate,  in lawful  money of the United  States of  America,  the
aggregate unpaid principal amount of all advances  ("Advances")  made by Bank to
Borrower in accordance with the terms of the Loan Agreement between Borrower and
Bank of even date herewith, as amended from time to time (the "Loan Agreement"),
up  to  a  maximum  principal  amount  of  TEN  MILLION  AND  NO/100THS  Dollars
($10,000,000),  until  paid in full.  Borrower  shall also pay  interest  on the
aggregate  unpaid  principal  amount  of  such  Advances  at  the  rates  and in
accordance with the terms of the Loan Agreement. The entire principal amount and
all accrued interest shall be due and payable on DECEMBER 26, 1997.

     Borrower  irrevocably waives the right to direct the application of any and
all  payments  at any time  hereafter  received  by Bank  from or on  behalf  of
Borrower,  and Borrower  irrevocably  agrees that Bank shall have the continuing
exclusive  right to apply  any and all such  payments  against  the then due and
owing  obligations of Borrower as Bank may deem  advisable.  In the absence of a
specific  determination  by Bank with respect  thereto,  all  payments  shall be
applied in the following order: (a) then due and payable fees and expenses;  (b)
then due and payable interest payments and mandatory  prepayments;  and (c) then
due and payable principal payments and optional prepayments.

     Bank is hereby  authorized  by  Borrower  to  endorse  on Bank's  books and
records each Advance made by Bank under this Note and the amount of each payment
or  prepayment  of  principal of each such  Advance  received by Bank;  it being
understood,  however, that failure to make any such endorsement (or any error in
notation)  shall not affect the obligations of Borrower with respect to Advances
made  hereunder,  and  payments of  principal  by Borrower  shall be credited to
Borrower  notwithstanding  the  failure  to make a  notation  (or any  errors in
notation) thereof on such books and records.

     Borrower  promises to pay Bank all costs and expenses of collection of this
Note and to pay all  reasonable  attorneys'  fees  incurred in such  collection,
whether  or not there is a suit or  action,  or in any suit or action to collect
this  Note  or in any  appeal  thereof.  Borrower  waives  presentment,  demand,
protest,  notice of protest, notice of dishonor,  notice of nonpayment,  and any
and all other notices and demands in connection  with the delivery,  acceptance,
performance,  default or  enforcement  of this Note,  as well as any  applicable
statutes  of  limitations.  No delay by Bank in  exercising  any  power or right
hereunder  shall  operate  as a waiver  of any  power or  right.  Time is of the
essence as to all obligations hereunder.

     This Note is issued pursuant to the Loan Agreement,  which shall govern the
rights and obligations of Borrower with respect to all obligations hereunder.

     This Note  shall be  deemed to be made  under,  and shall be  construed  in
accordance with and governed by, the laws of the Commonwealth of  Massachusetts,
excluding conflicts of laws principles.

     Executed as an instrument under seal.

     ADVANCED TECHNOLOGY MATERIALS, INC.


     By: Daniel P. Sharkey, CFO



<TABLE>
<CAPTION>
                                  EXHIBIT 11.01

                       ADVANCED TECHNOLOGY MATERIALS, INC.

                    COMPUTATION OF EARNINGS PER COMMON SHARE


PRIMARY
- -------
                                          Year Ended    Year Ended   Year Ended
                                           12/31/96      12/31/95     12/31/94
                                           --------      --------     --------
<S>                                      <C>            <C>          <C>
Net income                               $  3,321,243   $  554,046   $2,636,131
                                         ============   ==========   ==========

Average common shares                       8,739,520    7,514,083    7,000,805
outstanding
Incremental shares issuable pursuant
to employee stock
options (if dilutive)                         619,501      559,949      594,388
                                              -------      -------      -------
Total shares                                9,359,021    8,074,032    7,595,193
                                         ============   ==========   ==========
Net income per share                     $       0.35   $     0.07   $     0.35
                                         ============   ==========   ==========
</TABLE>


<TABLE>
<CAPTION>
FULLY DILUTED
- -------------
                                           Year Ended   Year Ended   Year Ended
                                            12/31/96      12/31/95     12/31/94
<S>                                        <C>          <C>          <C>
Net income                                 $3,321,243   $  554,046   $2,636,131
                                           ==========   ==========   ==========

Average common shares outstanding           8,739,520    7,514,083    7,000,805

Incremental shares issuable
pursuant to employee stock options
 (if dilutive)                                737,425      563,977      594,388
                                              -------      -------      -------
Total shares                                9,476,945    8,078,060    7,595,193
                                            =========    =========    =========
Net income per share                       $     0.35   $     0.07   $     0.35
                                           ==========   ==========   ==========
</TABLE>

<TABLE>
<CAPTION>


                                  EXHIBIT 21.01

                       ADVANCED TECHNOLOGY MATERIALS, INC.

                         SUBSIDIARIES OF THE REGISTRANT

Subsidiary                         State of Incorporation
- ----------                         ----------------------
<S>                                <C>
ATMI EcoSys Corporation            California

Epitronics Corporation             Delaware
</TABLE>



                                  EXHIBIT 23.01

                         Consent of Independent Auditors



     We consent to the reference to our firm under the caption  "Experts" in the
Registration  Statement  pertaining  to the 1987 Stock Option Plan (Form S-8 No.
33-77060)  and the  Registration  Statement  pertaining to the 1995 Stock Option
Plan (Form S-8 No. 33-93048) of Advanced Technology  Materials,  Inc. and to the
incorporation  by reference  therein of our report dated February 14, 1997, with
respect to the  consolidated  financial  statements  and  schedule  of  Advanced
Technology  Materials,  Inc.  included in its Annual  Report (Form 10-K) for the
year ended December 31, 1996, filed with the Securities and Exchange Commission.







ERNST & YOUNG LLP


Stamford, Connecticut
March  26, 1997

<TABLE> <S> <C>


<ARTICLE>                                      5
<MULTIPLIER>                                   1000
       
<S>                                            <C>
<PERIOD-TYPE>                                  YEAR
<FISCAL-YEAR-END>                              Dec-31-1996
<PERIOD-END>                                   Dec-31-1996
<CASH>                                         4437
<SECURITIES>                                   16969
<RECEIVABLES>                                  9378<F1>
<ALLOWANCES>                                   0
<INVENTORY>                                    4541
<CURRENT-ASSETS>                               35825
<PP&E>                                         8102<F2>
<DEPRECIATION>                                 0
<TOTAL-ASSETS>                                 50118
<CURRENT-LIABILITIES>                          8722
<BONDS>                                        0
                          0
                                    0
<COMMON>                                       88
<OTHER-SE>                                     36305
<TOTAL-LIABILITY-AND-EQUITY>                   50118
<SALES>                                        36504
<TOTAL-REVENUES>                               46350
<CGS>                                          15939
<TOTAL-COSTS>                                  24281
<OTHER-EXPENSES>                               7627<F3>
<LOSS-PROVISION>                               0
<INTEREST-EXPENSE>                             486
<INCOME-PRETAX>                                3561
<INCOME-TAX>                                   239
<INCOME-CONTINUING>                            0
<DISCONTINUED>                                 0
<EXTRAORDINARY>                                0
<CHANGES>                                      0
<NET-INCOME>                                   3321
<EPS-PRIMARY>                                  .35
<EPS-DILUTED>                                  .35



<FN>
<F1>Net of  allowance  for doubtful  accounts,  consistent  with  balance  sheet
presentation.
<F2>Net of accumulated depreciation, consistent with balance sheet
presentation.
<F3>Research and development expenses
</FN>
        

</TABLE>


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