APPLIED SCIENCE & TECHNOLOGY INC
DEF 14A, 1996-10-23
SPECIAL INDUSTRY MACHINERY, NEC
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                            SCHEDULE 14A INFORMATION

                  PROXY STATEMENT PURSUANT TO SECTION 14(A) OF
                       THE SECURITIES EXCHANGE ACT OF 1934


             FILED BY THE REGISTRANT    [X]

             FILED BY A PARTY OTHER THAN THE REGISTRANT     [ ]

             CHECK THE APPROPRIATE BOX:


       [ ]   Preliminary Proxy Statement
       [X]   Definitive Proxy Statement
       [ ]   Definitive Additional Materials
       [ ]   Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12 
       [ ]   Confidential, for Use of the Commission Only ( as permitted by Rule
              14a-6(e)(2))

                       APPLIED SCIENCE AND TECHNOLOGY INC.
                (Name of Registrant as Specified In Its Charter)

               Payment of Filing Fee (Check the appropriate box):


[X] $125 PER EXCHANGE ACT RULES 0-11(C)(1)(II),  14A-6(I)(1),  OR 14A-6(I)(2) OR
      ITEM 22(A)(2) OF SCHEDULE 14A.
[ ] $500 PER EACH PARTY TO THE  CONTROVERSY  PURSUANT TO EXCHANGE ACT RULE 14A-6
      (I)(3).
[ ] FEE COMPUTED ON TABLE BELOW PER EXCHANGE ACT RULES 14A-6(I)(4) AND 0-11.

(1)  TITLE OF EACH CLASS OF SECURITIES TO WHICH TRANSACTION APPLIES:
     ___________________________________________________________________________

(2)  AGGREGATE NUMBER OF SECURITIES TO WHICH TRANSACTION APPLIES:
     ___________________________________________________________________________

(3)  PER UNIT PRICE OR OTHER UNDERLYING VALUE OF TRANSACTION  COMPUTED  PURSUANT
     TO EXCHANGE  ACT RULE 0-11 (SET FORTH THE AMOUNT ON WHICH THE FILING FEE IS
     CALCULATED AND STATE HOW IT WAS DETERMINED).
     ___________________________________________________________________________

(4)  PROPOSED MAXIMUM AGGREGATE VALUE OF TRANSACTION:
     ___________________________________________________________________________

(5)  TOTAL FEE PAID:
     __$125_____________________________________________________________________


[ ]  FEE PREVIOUSLY PAID WITH PRELIMINARY MATERIALS.

[ ]  CHECK BOX IF ANY PART OF THE FEE IS OFFSET AS PROVIDED BY EXCHANGE ACT RULE
     0-11(A)(2)  AND IDENTIFY THE FILING FOR WHICH THE  OFFSETTING  FEE WAS PAID
     PREVIOUSLY.  IDENTIFY THE PREVIOUS FILING BY REGISTRATION STATEMENT NUMBER,
     OR THE FORM OR SCHEDULE AND THE DATE OF ITS FILING.


(1)  AMOUNT PREVIOUSLY PAID:
     ___________________________________________________________________________

(2)  FORM, SCHEDULE OR REGISTRATION STATEMENT NO.:
     ___________________________________________________________________________

(3)  FILING PARTY:
     ___________________________________________________________________________

(4)  DATE FILED:
     ___________________________________________________________________________






                      APPLIED SCIENCE AND TECHNOLOGY, INC.
                                  35 CABOT ROAD
                           WOBURN, MASSACHUSETTS 01801





                                                         October 18, 1996




Dear Stockholder:

         You are cordially  invited to attend the Annual Meeting of Stockholders
of APPLIED  SCIENCE  AND  TECHNOLOGY,  INC.  (the  "Corporation")  to be held on
Thursday,  November 21, 1996 at 10:30 a.m. at the offices of the Corporation, 35
Cabot Road, Woburn, Massachusetts 01801.

         At the Annual Meeting, you will be asked (i) to elect three (3) members
of the Board of Directors of the Corporation; and (ii) to ratify and approve the
selection of the Corporation's  independent auditors.  Details of the matters to
be considered at the Annual Meeting are contained in the Proxy Statement,  which
we urge you to review carefully.

         Whether or not you plan to attend the Annual Meeting,  please complete,
date,  sign and return  your Proxy  promptly  in the  enclosed  envelope,  which
requires  no postage if mailed in the  United  States.  If you attend the Annual
Meeting,  you may  vote in  person  if you  wish,  even if you  have  previously
returned your Proxy.

         On  behalf of the  Board of  Directors,  I would  like to  express  our
appreciation for your continued interest in the affairs of the Corporation.

                                                          Sincerely,



                                                          Richard S. Post, Ph.D.
                                                          President


                                                       





                      APPLIED SCIENCE AND TECHNOLOGY, INC.
                                  35 CABOT ROAD
                           WOBURN, MASSACHUSETTS 01801

                    NOTICE OF ANNUAL MEETING OF STOCKHOLDERS


To the Stockholders:

         NOTICE IS HEREBY  GIVEN that the  Annual  Meeting  of  Stockholders  of
APPLIED  SCIENCE  AND   TECHNOLOGY,   INC.  (the   "Corporation"),   a  Delaware
corporation,  will be held on  Thursday,  November 21, 1996 at 10:30 a.m. at the
Corporation's offices located at 35 Cabot Road, Woburn, Massachusetts 01801, for
the following purposes:

    1.   To elect three (3) members of the Board of Directors;

    2.   To  ratify  and  approve  the  selection  of KPMG Peat  Marwick  LLP as
         independent  auditors  for the  Corporation  for the fiscal year ending
         June 28, 1997; and

    3.   To consider and act upon any matters  incidental  to the  foregoing and
         any other  matters  that may  properly  come  before the meeting or any
         adjournment or adjournments thereof.

         The Board of  Directors  has fixed the close of  business on October 1,
1996,  as the record  date for the  determination  of  stockholders  entitled to
notice of and vote at the Annual  Meeting and any  adjournment  or  adjournments
thereof.

                                                              By Order of the
                                                              Board of Directors


                                                              John M. Tarrh
                                                              Secretary

Woburn, Massachusetts
October 18, 1996


                                    IMPORTANT

   WHETHER OR NOT YOU EXPECT TO ATTEND IN PERSON, WE URGE YOU TO SIGN, DATE, AND
   RETURN THE ENCLOSED PROXY AT YOUR EARLIEST CONVENIENCE.  THIS WILL ENSURE THE
   PRESENCE OF A QUORUM AT THE MEETING.  PROMPTLY SIGNING, DATING, AND RETURNING
   THE PROXY WILL SAVE THE CORPORATION THE EXPENSES AND EXTRA WORK OF ADDITIONAL
   SOLICITATION.  AN  ADDRESSED  ENVELOPE  FOR WHICH NO POSTAGE IS  REQUIRED  IF
   MAILED IN THE UNITED  STATES IS ENCLOSED  FOR THAT  PURPOSE.  SENDING IN YOUR
   PROXY WILL NOT  PREVENT  YOU FROM  VOTING  YOUR  STOCK AT THE  MEETING IF YOU
   DESIRE TO DO SO, AS YOUR PROXY IS REVOCABLE AT YOUR OPTION.




                                                      


                      APPLIED SCIENCE AND TECHNOLOGY, INC.
                                  35 CABOT ROAD
                           WOBURN, MASSACHUSETTS 01801


                                 ---------------
                                 PROXY STATEMENT
                                 ---------------

                                OCTOBER 18, 1996

         The  enclosed  proxy is  solicited by the Board of Directors of APPLIED
SCIENCE AND TECHNOLOGY,  INC. (the  "Corporation") for use at the Annual Meeting
of  Stockholders  (the "Annual  Meeting")  to be held on Thursday,  November 21,
1996, at 10:30 a.m. at the offices of the  Corporation,  35 Cabot Road,  Woburn,
Massachusetts 01801, and at any adjournment or adjournments thereof.

         Stockholders  of record at the close of  business  on  October 1, 1996,
will be entitled to vote at the Annual Meeting or any  adjournment  thereof.  On
that date,  4,448,475 shares of the  Corporation's  common stock, $.01 par value
per share (the  "Common  Stock"),  were  issued and  outstanding.  Each share of
Common  Stock  entitles  the  holder to one vote  with  respect  to all  matters
submitted to stockholders  at the Annual  Meeting.  The Corporation has no other
voting securities.

         The presence of the holders of a majority of the issued and outstanding
shares of Common Stock entitled to vote at the Annual Meeting,  either in person
or represented by a properly executed proxy, is necessary to constitute a quorum
for the transaction of business at the Annual Meeting.

         The election of directors  will be determined by a plurality  vote. The
other proposal to be voted upon by the stockholders of the Corporation  requires
the vote of a majority of shares of Common Stock  present at the Annual  Meeting
for passage. Abstentions and broker non-votes (the latter of which result when a
broker holding shares for a beneficial  holder in "street name" has not received
timely voting  instructions on certain  matters from such beneficial  holder and
the broker does not have discretionary voting power on such matters) are counted
for  purposes of  determining  the presence or absence of a quorum at the Annual
Meeting.  Abstentions  are counted in tabulations of the votes cast on proposals
presented to stockholders, whereas broker non-votes are not counted for purposes
of determining whether a proposal has been approved.

         THE DIRECTORS, NOMINATED DIRECTORS AND OFFICERS OF THE CORPORATION AS A
GROUP  OWN OR MAY BE  DEEMED  TO  CONTROL  1,106,190  SHARES  OF  COMMON  STOCK,
CONSTITUTING  APPROXIMATELY  24.8% OF THE OUTSTANDING  SHARES OF COMMON STOCK OF
THE  CORPORATION.  EACH OF THE DIRECTORS,  NOMINATED  DIRECTORS AND OFFICERS HAS
INDICATED  HIS INTENT TO VOTE ALL SHARES OF COMMON STOCK OWNED OR  CONTROLLED BY
HIM IN FAVOR OF EACH ITEM SET FORTH HEREIN.


                                        2





         Execution of a proxy will not in any way affect a  stockholder's  right
to attend the Annual Meeting and vote in person. The proxy may be revoked at any
time before it is  exercised  by written  notice to the  Secretary  prior to the
Annual  Meeting,  or by giving to the Secretary a duly executed  proxy bearing a
later date than the proxy being  revoked at any time before such proxy is voted,
or by  appearing  at the  Annual  Meeting  and  voting  in  person.  The  shares
represented  by all properly  executed  proxies  received in time for the Annual
Meeting will be voted as specified therein. In the absence of other instructions
set forth on a proxy, shares will be voted in favor of the election as directors
of those persons  named in this Proxy  Statement and in favor of all other items
set forth herein.

         The Board of Directors  knows of no other matter to be presented at the
Annual  Meeting.  If any other matter should be presented at the Annual  Meeting
upon which a vote may be taken, such shares  represented by all proxies received
by the Board of Directors will be voted with respect  thereto in accordance with
the judgment of the persons  named as  attorneys  in the  proxies.  The Board of
Directors  knows of no matter to be acted upon at the Annual  Meeting that would
give rise to appraisal rights for dissenting stockholders.

         An annual report on Form 10-K,  containing  the  Corporation's  audited
financial  statements  for its fiscal  years ended June 29, 1996  ("Fiscal  Year
1996"),  July 1, 1995 ("Fiscal Year 1995") and July 2, 1994 ("Fiscal Year 1994")
is being mailed together with this Proxy Statement to all stockholders  entitled
to vote.  This Proxy Statement and the  accompanying  proxy were first mailed to
stockholders on or about October 18, 1996.

                                 PROPOSAL NO. 1
                                 --------------
                              ELECTION OF DIRECTORS

         The bylaws of the Corporation provide for a Board of Directors which is
divided into three classes.  Directors constituting  approximately  one-third of
the Board of Directors  are elected each year for a period of three years at the
Corporation's  Annual Meeting of Stockholders  and serve until their  successors
are duly elected by the  stockholders of the  Corporation.  The members of Class
III, Dr. Smith and Messrs. de Beaumont and Bertucci,  are currently proposed for
reelection to the Board of  Directors.  The terms of the members of Class I, Dr.
Post and Mr. Anderson, expire in 1997, and the terms of the members of Class II,
Messrs.  Tarrh and Kahl, expire in 1998. Messrs.  Kahl and Anderson were elected
as directors by the Board of Directors effective October 1, 1995.  Vacancies and
newly  created  directorships  resulting  from any  increase  in the  number  of
authorized  directors  may be filled by a majority  vote of the  directors  then
remaining in office.  Officers are elected by and serve at the discretion of the
Board of Directors.



                                        3





         Shares  represented  by all proxies  received by the Board of Directors
and not so marked as to withhold  authority to vote for an individual  director,
or for all  directors,  will be voted (unless one or more nominees are unable or
unwilling to serve) for the election of the nominees  named below.  The Board of
Directors expects that each of the nominees will be available for election,  but
if any of them  is not a  candidate  at the  time  the  election  occurs,  it is
intended that such proxy will be voted for the election of another nominee to be
designated by the Board of Directors to fill any such vacancy.

         The  following  table sets forth the year each  director  was elected a
director and the age, positions and offices presently held by each director with
the Corporation:
<TABLE>
<CAPTION>
<S>                                <C>         <C>              <C>               <C>   
                                                CLASS TO           YEAR
                                                WHICH             FIRST
                                                DIRECTOR         BECAME A
NAME                                AGE         BELONGS          DIRECTOR          POSITION

Richard S. Post, Ph.D........        53          I                1987             Chief Executive Officer,
                                                                                   President and Chairman of
                                                                                   the Board of Directors

John M. Tarrh ...............        49          II               1987             Senior Vice President,
                                                                                   Finance, Secretary, Treasurer
                                                                                   and Director

Donald K. Smith, Ph.D........        44          III              1987             Senior Vice President,
                                                                                   Advanced Technology, and
                                                                                   Director

Robert R. Anderson...........        59          I                1995             Director

Michel de Beaumont...........        54          III              1993             Director

John R. Bertucci.............        55          III              1994             Director

Hans-Jochen Kahl.............        56          II               1995             Director
</TABLE>


         Mr.  Jordan  L.  Golding  has  served  as an  advisor  to the  Board of
Directors since 1989.

         The Board of Directors has appointed an Executive  Committee  presently
comprised  of Drs.  Post and Smith and Mr.  Tarrh.  The  Executive  Committee is
authorized  to take any action that the Board of Directors is  authorized to act
upon  with  the  exception  of  the  issuance  of  stock,  the  sale  of  all or
substantially  all  of the  Corporation's  assets,  and  any  other  significant
corporate transaction.

         All of the  directors  of the  Corporation  who were  directors  during
Fiscal Year 1996 attended at least 75% of the meetings of the Board of Directors
and the  committees on which they served  during Fiscal Year 1996.  The Board of
Directors  met four (4)  times  formally,  while  the  Executive  Committee  met
informally on a number of occasions during Fiscal Year 1996.



                                        4



         The Board of Directors  also has  appointed a  Compensation  Committee,
presently  comprised  of Mr. Kahl with Mr.  Golding as an advisor,  and an Audit
Committee  comprised of Messrs.  Bertucci and Anderson,  with Mr.  Golding as an
advisor. The Compensation Committee is responsible for negotiating and approving
compensation arrangements for officers,  employees,  consultants, and directors,
including  the  granting of options to purchase the  Corporation's  Common Stock
pursuant to any of the Corporation's stock option plans. The Audit Committee was
established  for the  purposes  of (i)  reviewing  the  Corporation's  financial
results  and  recommending  the  selection  of  the  Corporation's   independent
auditors;  (ii)  reviewing the  effectiveness  of the  Corporation's  accounting
policies and practices,  financial  reporting and internal  controls;  and (iii)
reviewing  the  scope  of  independent   audit   coverages  and  fees,  and  any
transactions  that may involve a potential  conflict  of interest  and  internal
control systems. In July 1995, the Board of Directors established a Stock Option
Committee to  administer  the  Corporation's  1987 and 1993 Stock Option  Plans.
Members of the Stock Option Committee are Messrs. de Beaumont and Bertucci,  the
outside directors of the Corporation.  The Compensation and Audit Committees met
three (3) and four (4) times, respectively, during Fiscal Year 1996.

         None of the  directors or  executive  officers of the  Corporation  are
related by blood, marriage, or adoption to any of the Corporation's directors or
executive officers. To date, no other committee of the Board of Directors except
as described above has been established.

BACKGROUND

         The following is a brief summary of the  background of each director of
the Corporation, as well as Mr. Golding, an advisor to the Board of Directors:

         RICHARD S. POST, PH.D. has served as the Corporation's President, Chief
Executive  Officer and Chairman of the Board since its inception in 1987. He has
also been  President  and Chairman of the Board of  Directors  of  ASTeX/Gerling
Laboratories,  Inc. ("AGL") since 1992.  Prior to founding the Corporation,  Dr.
Post served at the  Massachusetts  Institute of Technology  ("MIT") from 1981 to
1987. At MIT, Dr. Post served as a Senior Research Scientist, in the position of
Head of the Mirror  Confinement  Division of the Plasma Fusion Center,  where he
was   responsible   for  project   management,   plasma  physics  and  materials
interactions research. Dr. Post earned his Ph.D. in Plasma Physics from Columbia
University  and his Bachelor of Science degree from the University of California
at Berkeley.

         MR.  JOHN  M.  TARRH  has  served  as  the  Corporation's  Senior  Vice
President,  Finance,  and  Secretary,  and as a director  since its inception in
1987. Mr. Tarrh became the Manager of the Mirror  Confinement  Division of MIT's
Plasma Fusion Center in 1986 where he was responsible for financial  management,
project  management and  administration.  Prior to joining the research staff of
MIT in 1978,  he was the  Executive  Vice  President  -  Operations  of Magnetic
Engineering Associates, a privately held,  high-technology company in Cambridge,
Massachusetts which was owned by Sala Magnetics. Mr. Tarrh presently serves as a
director for QC Optics,  Inc., a privately  
                                       

                                        5



held designer of laser based defect  detection  systems.  Mr. Tarrh received his
Master of Science degree in Electrical  Engineering  from MIT, and he earned his
Bachelor of Science degree in Electrical  Engineering from Virginia  Polytechnic
Institute and State University.

         DONALD K.  SMITH,  PH.D.  has served as the  Corporation's  Senior Vice
President,  Advanced Technology,  and as a director since its inception in 1987.
He joined MIT as a Research  Scientist in 1981 and was a Group Leader as well as
a member of the management team on several  projects.  Dr. Smith  specializes in
radio frequency and plasma  engineering.  Dr. Smith earned his Master of Science
degree and Ph.D. in  Electrical  Engineering  from the  University of Wisconsin,
Madison, and his Bachelor of Science degree from Davidson College.

         MR.  ROBERT R.  ANDERSON  has served as a director  of the  Corporation
since October 1995.  Previously,  Mr.  Anderson  co-founded  and served as Chief
Financial  Officer and Chief Operating  Officer of KLA Instruments  Corporation,
the leading manufacturer of yield monitoring and process control systems for the
semiconductor  manufacturing  industry,  from which he retired in 1994. Prior to
co-founding  KLA, Mr.  Anderson was Chief  Financial  Officer of  Computervision
Corporation,  which  develops  and markets  software for design  automation  and
product data  management.  Mr. Anderson is Chairman of the Board of Directors of
Silicon Valley Research,  a leading  manufacturer of EDA software for integrated
circuit design and manufacture. Mr. Anderson attended Bentley College.

         MR.  MICHEL DE  BEAUMONT  has served as a director  of the  Corporation
since January 1993.  Since 1981,  Mr. de Beaumont has served as a co-founder and
director of American Equities Overseas (U.K.) Ltd. of London, England ("American
Equities"), a private securities brokerage and corporate finance firm. From 1978
to 1981,  Mr. de Beaumont  served as a Vice  President  in the  London,  England
Office of American Securities Corp.  ("American  Securities"),  a clearing house
for  American  Equities.  Mr. de Beaumont has also  previously  served as a Vice
President at Smith Barney  Harris  Upham and  Oppenheimer  & Co. Mr. de Beaumont
holds  degrees  in  Advanced   Mathematics,   Physics  and  Chemistry  from  the
Universities of Poitiers and Paris, and a degree in Business Administration from
the University of Paris.

         MR. JOHN R. BERTUCCI has served as a director of the Corporation  since
September 1994. Mr. Bertucci has been President,  Chief Executive  Officer and a
director of MKS Instruments,  Inc.  ("MKS"),  a privately held  manufacturer and
seller of pressure  control  instruments for vacuum  processes,  since 1974. Mr.
Bertucci received a Master of Science degree in Industrial  Administration and a
Bachelor of Science degree in  Metallurgical  Engineering  from  Carnegie-Mellon
University.

         MR.  HANS-JOCHEN KAHL has served as a director of the Corporation since
October 1995.  Mr. Kahl  currently  serves as a consultant to Ebara,  a Japanese
manufacturer  of  industrial  water pumps and vacuum  process  equipment for the
semiconductor  industry.  Previously,  Mr.  Kahl was  employed  by  Leybold  AG,
formerly Leybold-Heraeus GmbH ("Leybold"),  a leading international manufacturer
of  vacuum  pumps and  other  vacuum  process  equipment  for the  semiconductor
industry.  Mr.  Kahl



                                        6




served as a managing  director  of  Leybold,  where he was primarily responsible
for sales,  marketing  and  strategic planning. Mr. Kahl  was  appointed  to the
Board of Directors of Leybold in 1987.

         MR. JORDAN L. GOLDING, a certified public accountant,  has served as an
advisor to the Board of Directors since 1989. Mr. Golding served as a partner in
KPMG  Peat  Marwick  LLP  until  his  retirement  in  1988,   where  his  client
responsibilities included high technology,  merchandising,  banking and emerging
companies.  After  service in the U.S.  Navy,  he became a partner  in  Golding,
Golding & Company,  which in 1967  merged  with KPMG Peat  Marwick  LLP.  He has
served as President of the Massachusetts Society of Certified Public Accountants
and was Chairman of the Management  Advisory Services  Committee of the American
Institute of Certified  Public  Accountants.  Mr. Golding  presently serves as a
consultant  and a director of Marcliff  Corporation,  the privately  held parent
company  of Marson  Corporation  (a  manufacturer  and  distributor  of  various
automobile  parts),  and of Canadian  Western Bank, a publicly  held  commercial
bank.  Mr.  Golding  serves on the  Advisory  Board of New  Balance,  Inc.,  the
privately  held  parent  company of New  Balance  Athletic  Shoe,  Inc.,  and of
Charrette Corporation, a publicly held art and graphics supplies company, and as
a consultant  to other  corporations.  Mr.  Golding  earned a Master of Business
Administration  degree from Harvard Business School,  and graduated from Harvard
College.

EXECUTIVE OFFICERS AND KEY EMPLOYEES

         The  executive   officers  and  certain  other  key  employees  of  the
Corporation, their ages and positions held in the Corporation are as follows:
<TABLE>
<CAPTION>

<S>                                             <C>              <C>  
NAME                                             AGE              POSITION

Richard S. Post, Ph.D................            53               President, Chief Executive Officer and
                                                                  Chairman of the Board of Directors

John M. Tarrh ...........................        49               Senior Vice President, Finance, Secretary
                                                                  and Treasurer

Donald K. Smith, Ph.D.............               44               Senior Vice President, Advanced
                                                                  Technology

Paul A. Blackborow..................             37               Vice President, Customer Operations

John D. Lloyd ...........................        56               Vice President, Manufacturing
                                                                   Operations

Michael A. Silvia .....................          44               Vice President, Business Operations

Robert E. Bettilyon ...................          47               Controller

William M. Holber, Ph.D..........                42               Director of Technical Marketing

Lorrie Ferraro............................       34               Director of Human Resources

Richard W. Hartnell..................            55               Director of Operations of AGL

</TABLE>



                                        7





         The  following is a brief summary of the  background of each  executive
officer or key employee of the  Corporation,  other than Drs. Post and Smith and
Mr. Tarrh, whose backgrounds are described above:

         MR. PAUL A. BLACKBOROW has served as the Corporation's  Vice President,
Customer  Operations since August 1995. Prior to this Mr.  Blackborow  served as
the  Corporation's   Manager  of  Customer   Operations  since  September  1994.
Previously,  Mr. Blackborow  served as Director of Business  Development for the
Corporation.  Prior to joining the Corporation, from 1991 to 1993 Mr. Blackborow
was employed by W.E.D. Ltd., a British manufacturer of robotics equipment, where
he was responsible for the establishment of a new manufacturing facility.  Prior
to his  employment  with W.E.D.  Ltd.,  from 1987 to 1991,  Mr.  Blackborow  was
employed  as  President  by Plasma  Technology,  Inc.  Mr.  Blackborow  received
Bachelor and Master of Science degrees in Engineering from Cambridge University.

         MR.  JOHN  D.  LLOYD  has  been  the   Corporation's   Vice  President,
Manufacturing Operations since June 1994. Prior to joining the Corporation, from
1988 to 1993 Mr. Lloyd was Director of Manufacturing at Coherent General,  Inc.,
a private  manufacturer  of  industrial  lasers and laser  systems for materials
processing  and medical  applications.  Mr.  Lloyd  received a Master of Science
degree in  Industrial  Management  from  Purdue  University,  and a Bachelor  of
Science degree in Electrical Engineering from Clarkson University.

         MR. MICHAEL A. SILVIA is currently Vice President, Business Operations.
He previously  served as the  Corporation's  Vice  President of Operations  from
December 1991 through June 1994.  Mr. Silvia joined the  Corporation  in 1988 as
Materials Manager and was named Operations Manager in October 1989. Originally a
contracts manager with the Electronic Systems Divisions of the United States Air
Force/Air Force Systems Command, Mr. Silvia joined MIT in 1980 as the Purchasing
Manager for the combined  requirements  of the Plasma Fusion Center and National
Magnet Laboratory and in 1987 became Assistant Director of Purchasing for all of
MIT. Mr. Silvia earned a Bachelor of Science degree in Finance at the University
of Massachusetts at Dartmouth.

         MR. ROBERT E.  BETTILYON has been the  Corporation's  Controller  since
August  1993.  From 1983 to 1993,  Mr.  Bettilyon  was  Controller  at  Coherent
General, Inc., a private manufacturer of industrial lasers and laser systems for
materials  processing  and medical  applications,  and has served at each of its
Massachusetts, Tokyo and Munich facilities. Mr. Bettilyon previously served as a
Senior Financial Planning Analyst at Standard Oil of Ohio from 1980 to 1983, and
as an Audit Senior at Touche Ross (now Deloitte and Touche),  from 1977 to 1980.
Mr.  Bettilyon  holds a  Bachelor  of  Science  degree  in  Accounting  from the
University of Utah and is a Certified Public Accountant.

         WILLIAM  M.  HOLBER,  PH.D.  has been  the  Corporation's  Director  of
Technical  Marketing since July 1995. From May 1993 to July 1995, Dr. Holber was
the Corporation's Director of Technology Development for OEM products. From 1986
to May 1993,  Dr.  Holber was a research  staff  member 



                                        8


for the IBM T.J. Watson  Research Center where he performed  research on various
aspects of  electron  cyclotron  resonance  (ECR)  plasmas  for  microelectronic
applications.  Dr.  Holber  received a Ph.D.  in Applied  Physics from  Columbia
University,  a  Master  of  City  and  Regional  Planning  degree  from  Harvard
University,  Kennedy School of Government, a Master of Science degree in Physics
from the  University  of Chicago  and a Bachelor  of Science  degree  from Brown
University.

         MS.  LORRIE  FERRARO  has  been  the  Corporation's  Director  of Human
Resources since June 1995. Prior to joining the  Corporation,  Ms. Ferraro owned
and operated a privately-held  human resources consulting firm, AmCan Marketing,
in Lowell, Massachusetts,  where her clients included AVID Technologies and Muro
Pharmaceutical.  Prior to founding  AmCan  Marketing  in 1990,  Ms.  Ferraro was
employed  from  1989 to 1990 by  Metcalf  and  Eddy  Companies,  Inc.,  as Human
Resource  Manager.  Ms. Ferraro  received an Associate degree in Human Resources
from McGill University and an Associate degree in Education from Northern Lights
College.

         MR.  RICHARD W. HARTNELL has served as Director of  Operations  for AGL
since 1994.  Prior to joining the  Corporation,  from 1979 to 1993, Mr. Hartnell
was  Director  of  Operations  for  Teledyne  CME, a  publicly-held  electronics
manufacturing company, where he was responsible for manufacturing, manufacturing
engineering and quality  control.  Mr.  Hartnell  received a Bachelor of Science
degree in Electrical Engineering from San Jose State University.



                                        9



                      BENEFICIAL OWNERSHIP OF COMMON STOCK

         The  following  table  sets  forth,  as of  October  1,  1996,  certain
information  concerning  stock  ownership of the  Corporation by (i) each person
known by the  Corporation  to own of record or be the  beneficial  owner of more
than five  percent  (5%) of the  Corporation's  Common  Stock,  (ii) each of the
Corporation's directors, and (iii) all directors and officers as a group. Except
as otherwise  indicated,  the stockholders  listed in the table have sole voting
and investment powers with respect to the shares indicated.

<TABLE>
<CAPTION>

        <S>                                                <C>                             <C> 
         NAME AND ADDRESS                                   NUMBER OF SHARES                PERCENTAGE
         OF BENEFICIAL OWNER(1)                             BENEFICIALLY OWNED(2)           OF CLASS
         ----------------------                             ---------------------           ----------

         Kopp Investment Advisors, Inc.............               845,515                     19.0%

         Richard S. Post, Ph.D.(3).................               408,535                      9.2%

         Donald K. Smith, Ph.D.(4) ................               312,252                      7.0%

         John M. Tarrh(5)..........................               281,858                      6.3%

         Michel de Beaumont(6).....................                55,012                      1.2%

         John Bertucci(7)..........................                59,000                      1.3%

         Robert R. Anderson(8) ....................                 5,000                        *

         Hans-Jochen Kahl(8).......................                 5,000                        *

         All Officers and Directors
         as a Group (10 persons)
         (3)(4)(5)(6)(7)(8)(9)(10)(11). . . . . . . . . .       1,185,890                     26.1%
- ---------------------------------------
*        Less than one percent (1%)
</TABLE>


(1)      The address for all officers and  directors is c/o Applied  Science and
         Technology,  Inc.,  35 Cabot Road,  Woburn,  Massachusetts  01801.  The
         address for Kopp Investment Advisors, Inc. is 6600 France Avenue South,
         #672, Edina, Minnesota 55435.

(2)      Pursuant to the rules of the Securities and Exchange Commission, shares
         of Common  Stock  that an  individual  or group has a right to  acquire
         within 60 days  pursuant to the  exercise  of options or  warrants  are
         deemed to be  outstanding  for the purpose of computing the  percentage
         ownership  of such  individual  or  group,  but are  not  deemed  to be
         outstanding for the purpose of computing the percentage of ownership of
         any other person in the table.

                                       

                                       10




(3)      Includes  (i)  3,200  shares  of  Common  Stock  owned  by Dr.  Post as
         custodian  for his two  children;  (ii) 12,500  shares of Common  Stock
         owned by Dr. Post's wife;  (iii) 2,000 shares of Common Stock  issuable
         upon the exercise of the vested  portion of an option to purchase up to
         5,000 shares, at an exercise price of $11.125 per share,  which expires
         on July 2, 2000;  (iv) 5,000 shares of Common Stock  issuable  upon the
         exercise  of the vested  portion of an option to  purchase up to 15,000
         shares,  at an exercise  price of $12.625 per share,  which  expires on
         December 28, 2000;  and (v) 6,000 shares of Common Stock  issuable upon
         the  exercise  of the  vested  portion of an option to  purchase  up to
         30,000 shares, at an exercise price of $9.625 per share,  which expires
         on August 5, 2001.

(4)      Includes (i) 800 shares of Common Stock  issuable  upon the exercise of
         the vested  portion of an option to purchase up to 2,000 shares,  at an
         exercise  price of $11.125  per share,  which  expires on July 2, 2000;
         (ii) 3,000  shares of Common  Stock  issuable  upon the exercise of the
         vested  portion of an option to  purchase  up to 15,000  shares,  at an
         exercise  price of $12.625 per share,  which  expires on  December  28,
         2000; and (iii) 3,000 shares of Common Stock issuable upon the exercise
         of the vested  portion of an option to purchase up to 15,000  shares at
         an exercise price of $9.625 per share, which expires on August 5, 2001.

(5)      Includes  (i) an  aggregate  of 876 shares of Common Stock owned by Mr.
         Tarrh's wife and minor son;  (ii) 400 shares of Common  Stock  issuable
         upon the exercise of the vested  portion of an option to purchase up to
         1,000 shares, at an exercise price of $11.125 per share,  which expires
         on July 2, 2000;  (iii) 1,400 shares of Common Stock  issuable upon the
         exercise  of the vested  portion of an option to  purchase  up to 7,000
         shares at an  exercise  price of $12.625  per share,  which  expires on
         December 28, 2000;  and (iv) 1,300 shares of Common Stock issuable upon
         the exercise of the vested portion of an option to purchase up to 6,500
         shares at an  exercise  price of $9.625  per  share,  which  expires on
         August 5,  2001.  Excludes  12,500  shares of Common  Stock held by Mr.
         Tarrh's father and sisters, in which Mr. Tarrh disclaims any beneficial
         interest.

(6)      Includes (i) 10,487  shares of Common Stock held by American  Equities,
         of which Mr. de Beaumont is a  director;  (ii) 35,525  shares of Common
         Stock owned by Samisa  Investment  Corp., an investment  trust of which
         Mr. de Beaumont is a  beneficiary;  (iii) 4,000  shares of Common Stock
         issuable  upon the  exercise  of the  vested  portion  of an  option to
         purchase up to 4,000 shares,  at an exercise  price of $7.06 per share,
         which  expires on November  18,  2004;  and (iv) 5,000 shares of Common
         Stock  issuable upon the exercise of the vested portion of an option to
         purchase up to 12,000 shares at an exercise  price of $16.00 per share,
         which expires on November 15, 2005.

(7)      Includes  (i)  15,000  shares of Common  Stock  owned  directly  by Mr.
         Bertucci;  (ii) 35,000 shares of Common Stock held by MKS  Instruments,
         Inc., of which Mr.  Bertucci is the majority  shareholder;  (iii) 5,000
         shares of Common Stock issuable upon the exercise of the vested portion
         of an option to  purchase up to 12,000  shares at an exercise  price of
         $16.00 per share,  which  expires on November 15, 2005;  and (iv) 4,000
         shares of Common Stock issuable upon the exercise of the vested portion
         of an option to purchase up to 4,000  shares,  at an exercise  price of
         $7.06 per share, which expires on November 18, 2004.


                                       
                                       11




(8)      Includes 5,000 shares of Common Stock issuable upon the exercise of the
         vested  portion  of an option  to  purchase  up to 12,000  shares at an
         exercise price of $16.00 per share, which expires on November 15, 2005.

(9)      Includes the following shares and options owned or beneficially held by
         Paul  A.  Blackborow,   the  Corporation's  Vice  President,   Customer
         Operations:  (i) 9,000  shares of Common  Stock;  (ii) 2,000  shares of
         Common Stock  issuable  upon the  exercise of the vested  portion of an
         option to purchase up to 4,000 shares,  at an exercise  price of $5.875
         per share,  which  expires on October 17,  1998;  (iii) 4,000 shares of
         Common Stock  issuable  upon the  exercise of the vested  portion of an
         option to purchase up to 10,000 shares, at an exercise price of $11.125
         per share,  which  expires  on July 2, 2000;  (iv) 800 shares of common
         stock  issuable upon the exercise of the vested portion of an option to
         purchase up to 4,000 shares at an exercise  price of $12.625 per share,
         which  expires on December  28,  2000;  and (v) 1,300  shares of Common
         Stock  issuable upon the exercise of the vested portion of an option to
         purchase up to 6,500  shares at an exercise  price of $9.625 per share,
         which expires on August 5, 2001.

(10)     Includes the following shares and options owned or beneficially held by
         John  D.  Lloyd,  the  Corporation's   Vice  President,   Manufacturing
         Operations:  (i) 2,000  shares of Common  Stock;  (ii) 1,200  shares of
         Common Stock held in a retirement account; (iii) 2,000 shares of Common
         Stock  issuable upon the exercise of the vested portion of an option to
         purchase up to 6,000 shares,  at an exercise price of $5.875 per share,
         which  expires on October 17,  1999;  (iv) 2,000 shares of Common Stock
         issuable  upon the  exercise  of the  vested  portion  of an  option to
         purchase up to 5,000 shares, at an exercise price of $11.125 per share,
         which expires on July 2, 2000;  (v) 800 shares of Common Stock issuable
         upon the exercise of the vested  portion of an option to purchase up to
         4,000 shares at an exercise  price of $12.625 per share,  which expires
         on December 28, 2000; and (vi) 700 shares of Common Stock issuable upon
         the exercise of the vested portion of an option to purchase up to 3,500
         shares at an  exercise  price of $9.625  per  share,  which  expires on
         August 5, 2001. Excludes 300 shares of Common Stock held by Mr. Lloyd's
         two  adult  children,  of which  Mr.  Lloyd  disclaims  any  beneficial
         interest.

(11)     Includes the following shares and options owned or beneficially held by
         Michael  A.  Silvia,   the  Corporation's   Vice  President,   Business
         Operations:  (i) 18,233  shares of Common  Stock;  (ii) 2,500 shares of
         Common Stock  issuable  upon the  exercise of the vested  portion of an
         option to purchase up to 2,500  shares,  at an exercise  price of $5.00
         per share,  which  expires on November 30, 1997;  (iii) 4,000 shares of
         Common Stock  issuable  upon the  exercise of the vested  portion of an
         option to purchase up to 5,000  shares,  at an exercise  price of $8.00
         per share,  which expires on July 27, 1998; (iv) 3,200 shares of Common
         Stock  issuable upon the exercise of the vested portion of an option to
         purchase up to 4,000 shares,  at an exercise price of $6.875 per share,
         which  expires on October 18,  1998;  (v) 4,000  shares of Common Stock
         issuable  upon the  exercise  of the  vested  portion  of an  option to
         purchase  up to 10,000  shares,  at an  exercise  price of $11.125  per
         share,  which expires on July 2, 2000;  (vi) 800 shares of Common Stock
         issuable  upon the  exercise  of the  vested  portion  of an  option to
         purchase up to 4,000 shares, at an exercise price of $12.625 per share,
         which  expires on  December  28,  2000;  and (vii) 700 shares of Common
         Stock  issuable upon the exercise of the vested portion


 

                                       12




         of an  option to  purchase up to 3,500  shares at an exercise  price of
         $9.625 per share, which expires on August 5, 2001.


                     COMPENSATION OF OFFICERS AND DIRECTORS

EXECUTIVE OFFICERS' COMPENSATION

         The table on the following page sets forth the compensation paid to Dr.
Post, the Corporation's  Chief Executive Officer,  President and Chairman of the
Board of Directors, Mr. Tarrh, the Corporation's Senior Vice President, Finance,
Dr. Smith, the Corporation's  Senior Vice President,  Advanced  Technology,  Mr.
Silvia, the Corporation's Vice President,  Business  Operations,  and Mr. Lloyd,
the Corporation's Vice President,  Manufacturing  Operations during Fiscal Years
1996, 1995 and 1994.



                                       13




<TABLE>
<CAPTION>

                                                     SUMMARY COMPENSATION TABLE

                                                                                                     Long Term Compensation
                                                                                               ------------------------------------
                                                              Annual Compensation                      Awards              Payouts
- ------------------------------------------------------------------------------------------     ------------------------    --------
<S>                            <C>       <C>         <C>             <C>             <C>            <C>           <C>         <C>
(a)                            (b)       (c)         (d)             (e)             (f)            (g)           (h)         (i)
                                                                                                Securities
Name and                                                                           Restricted   Underlying     LTIP        All Other
Principal                                                      Other Annual        Stock        Options/       Payouts     Compen-
Position                      Year    Salary(1)      Bonus     Compensation(2)     Awards       SARs (#)            $      sation(3)
- ---------                     ----    ---------      -----     ---------------     ------       --------       --------    ---------

Richard S. Post                1996   $142,500      $57,200          -0-            -0-         30,000          -0-         $2,344
   President, Chief            1995   $130,000      $17,679          -0-            -0-            -0-          -0-         $1,739
   Executive Officer           1994   $130,661      $ 9,180          -0-            -0-            -0-          -0-         $1,542
   and Chairman of the
   Board

Donald K. Smith                1996   $114,000      $40,040          -0-            -0-         17,000          -0-         $1,534
   Senior Vice President,      1995   $104,000      $16,143          -0-            -0-            -0-          -0-         $1,512
   Advanced Technology,        1994   $104,000      $ 9,115          -0-            -0-            -0-          -0-         $1,237
   and Director

John M. Tarrh                  1996   $95,366       $28,710          -0-            -0-          8,000          -0-         $1,761
   Senior Vice President,      1995   $87,006       $10,139          -0-            -0-            -0-          -0-         $1,255
   Finance, Secretary,         1994   $84,309       $ 9,244          -0-            -0-            -0-          -0-         $  909
   Treasurer and Director              
                                       
Michael A. Silvia              1996   $93,190       $23,379          -0-            -0-         14,000          -0-         $1,772
   Vice President,             1995   $85,000       $15,021        $ 63             -0-            -0-          -0-         $1,235
   Business Operations         1994   $83,968       $ 8,752          -0-            -0-          9,000          -0-         $1,047
                                       
John D. Lloyd                  1996   $93,437       $23,100          -0-            -0-          9,000          -0-         $1,672
   Vice President,             1995   $80,846       $ 7,000          -0-            -0-          6,000          -0-         $  913
   Manufacturing Operations    1994   $ 3,077           -0-          -0-            -0-            -0-          -0-            -0-

</TABLE>
                                         

(1)      Amounts shown  indicate cash  compensation  earned and received by Drs.
         Post and Smith and Messrs.  Silvia,  Tarrh and Lloyd;  no amounts  were
         earned but deferred at their election.  Drs. Post and Smith and Messrs.
         Silvia,  Tarrh and Lloyd participate in the Corporation's  group health
         and life insurance programs and other benefits  generally  available to
         all employees of the Corporation.

(2)      Represents  the  difference  between the exercise price and fair market
         value of the Common Stock at the time of exercise of certain options to
         purchase Common Stock held by Michael A. Silvia.

(3)      Amounts  shown  represent   premium  payments  on  life  and  long-term
         disability  insurance  policies  for Drs.  Post and Smith  and  Messrs.
         Silvia,  Tarrh and Lloyd (which are  available to all  employees of the
         Corporation)  and  contributions  paid by the Corporation in connection
         with its 401(k) Plan.



                                       14




                 AGGREGATED OPTION EXERCISES IN FISCAL YEAR 1996
                        AND FISCAL YEAR-END OPTION VALUES

<TABLE>
<CAPTION>

            <S>                          <C>              <C>                  <C>               <C>   
            (a)                          (b)              (c)                  (d)               (e)
- --------------------------      ---------------------------------      -------------------   ----------
                                                                       Number of             Value of
                                                                       Securities            Unexercised
                                                                       Underlying            In-the-Money
                                                                       Unexercised           Options at
                                                                       Options               Fiscal Year-
                                                        Value          at Fiscal Year-       End Exercisable/
                                Shares Acquired         Realized       End Exercisable/      Unexercisable
         Name                     on Exercise             ($)          Unexercisable             ($)(1)
- --------------------------      -------------------   -------------    ----------------      -------------

John D. Lloyd                        4,000           $5.875/sh          4,800/10,200        44,100/97,275
Michael A. Silvia                   10,000            $5.50/sh         14,500/11,000       121,101/120,650

</TABLE>

(1)      In-the-Money  options are those options for which the fair market value
         of the  underlying  Common Stock is greater than the exercise  price of
         the option. On June 29, 1996 the last day of Fiscal Year 1996, the fair
         market value of the  Corporation's  Common Stock underlying the options
         (as determined by the last sale price quoted on NASDAQ/NMS) was $12.00.


                        OPTION GRANTS IN FISCAL YEAR 1996
<TABLE>
<CAPTION>

                                                                                             Potential Realizable Value
                                                                                            at Assumed Annual Rates of
                                                                                              Stock Price Appreciation
                                                       Individual Grants                        For Option Term (1)(5)
- ---------------------------------------------------------------------------------------------------------------------------
<S>        <C>                              <C>              <C>            <C>           <C>          <C>           <C>
           (a)                              (b)              (c)            (d)           (e)          (f)           (g)
- ------------------------            -----------------    -----------    -----------   -----------   ---------     ---------
                                                         % of Total
                                        Number of         Options
                                        Securities       Granted to
                                       Underlying        Employees      Exercise or
                                         Options         in Fiscal       Base Price   Expiration
        Name                        Granted (#)(1)(2)     Year(3)         ($/Sh)        Date(4)         5%           10%
- ------------------------            -----------------   ------------    -----------   -----------   ---------     ---------

Richard S. Post                          5,000              2.1%        $11.1250      07/02/2000    $  15,368     $  33,960
                                        25,000             10.5%        $12.6250      12/28/2000    $  87,201     $ 192,692

Donald K. Smith                          2,000               .8%        $11.1250      07/02/2000    $   6,147     $  13,584
                                        15,000              6.3%        $12.6250      12/28/2000    $  52,321     $ 115,615

Michael A. Silvia                       10,000              4.2%        $11.1250      07/02/2000    $  30,736     $  67,919
                                         4,000              1.7%        $12.6250      12/28/2000    $  13,952     $  30,831

John M. Tarrh                            1,000               .4%        $11.1250      07/02/2000    $   3,074     $   6,792
                                         7,000              2.9%        $12.6250      12/28/2000    $  24,416     $  53,954

- ----------------------------------------------
</TABLE>


                                                       15





(1)      None of the above named  individuals  has  exercised any of the options
         granted during Fiscal Year 1996.

(2)      Options granted in Fiscal Year 1996 are exercisable  immediately  after
         the  grant  date,  with  20% of the  shares  covered  thereby  becoming
         exercisable  at that time and an  additional  20% of the option  shares
         becoming  exercisable on each  successive  anniversary  date, with full
         vesting occurring on the fifth anniversary date.

(3)      In Fiscal Year 1996,  options to purchase a total of 237,550  shares of
         Common Stock were granted to  employees of the  Corporation,  including
         executive officers.

(4)      The options  are subject to earlier  termination  upon  certain  events
         related to termination of employment.

(5)      The  dollar  gains  under  these  columns   result  from   calculations
         discussing  hypothetical  growth rates as set by the Commission and are
         not intended to forecast future price appreciation of the Common Stock.

COMPENSATION OF DIRECTORS

         Messrs.  Anderson,  Bertucci,  and Kahl receive  $1,000 per meeting for
participation  in  Board  of  Directors  meetings,  and  $500  per  meeting  for
participation  in  Committee  meetings.   All  non-employee   directors  receive
reimbursement of reasonable travel expenses.

         In addition,  pursuant to the Corporation's  Formula Plan, effective on
and commencing as of November 16, 1995, all  non-employee  directors  received a
grant of options to purchase twelve thousand  (12,000) shares of Common Stock at
an exercise price equal to the fair market value of the Common Stock on the date
of grant.  Under the Formula  Plan,  options to purchase  one  thousand  (1,000)
shares of Common Stock will vest immediately and additional  options to purchase
one thousand (1,000) shares of Common Stock will vest quarterly,  subject to the
option holder's  continued  service as a Director of the  Corporation.  Upon the
vesting of these options,  each non-employee director will receive an additional
grant of options to purchase twelve thousand (12,000) shares of Common Stock, to
vest on the same terms as above.

EMPLOYMENT AGREEMENTS

         The Corporation  has entered into employment  agreements with Drs. Post
and Smith and Mr. Tarrh which are renewable  annually.  These agreements provide
for base salaries of $170,000,  $117,000, and $103,000 respectively,  during the
fiscal year ended June 28, 1997 ("Fiscal Year 1997"). However, subsequent to the
end of Fiscal  Year 1996,  Drs.  Post and Smith and Mr.  Tarrh  recommended  and
implemented  a 10%  reduction  in  their  base  salaries  as part of an  expense
reduction  effort by the  Corporation.  Bonuses  may be  granted by the Board of
Directors and each of these  officers is eligible to receive  bonuses if certain
profit levels are achieved pursuant to the Corporation's  bonus plan (the "Bonus
Plan").  Pursuant to the Bonus Plan, Drs. Post and Smith, and Mr. Tarrh received
bonuses of $57,200, $40,040 and $28,710, respectively,  during Fiscal Year 1996.
Each individual is entitled to

                                                       

                                       16




receive benefits offered to the Corporation's employees generally and to receive
twelve  (12)  months base salary as  severance  in the event his  employment  is
terminated  by the  Corporation  without  cause.  In  addition,  the  employment
agreements  preclude each individual from competing with the Corporation  during
his  employment  and  for  at  least  two  years  thereafter,   from  disclosing
confidential information,  and each agreement contains an ownership provision in
the  Corporation's  favor for  techniques,  discoveries  and inventions  arising
during the term of employment.

401(K) PLAN

         Effective July 1990, the  Corporation  adopted and established a 401(k)
Employee  Benefit Plan (the "401(k) Plan").  Under the 401(k) Plan, any employee
who has  completed  90 days of service and has  attained  the age of 21 years is
eligible to  participate.  Under the terms of the 401(k)  Plan,  an employee may
defer up to 15% of his or her compensation  through  contributions to the 401(k)
Plan.  Also, the Corporation may make  discretionary  matching  contributions on
behalf of the participating employees. Amounts contributed to the 401(k) Plan by
the Corporation are subject to a six year vesting schedule. The Corporation made
voluntary contributions to the 401(k) Plan during Fiscal Year 1996 of $72,547 on
behalf of all eligible employees.

BOARD COMPENSATION COMMITTEE REPORT ON EXECUTIVE COMPENSATION

         On October 15, 1992,  the Securities  and Exchange  Commission  adopted
substantial   amendments  to  its   disclosure   rules   relating  to  executive
compensation.  To adequately  address and comply with these rules,  the Board of
Directors  established a Compensation  Committee (the  "Committee")  in November
1994. The Committee is currently  composed of Mr. Kahl, with Mr. Golding serving
as an advisor,  and is responsible  for setting and  administering  the policies
which govern annual  compensation for the  Corporation's  executives.  Following
review and approval by the Committee of the  compensation  policies,  all issues
pertaining to executive compensation are submitted to the Board of Directors for
approval.  Following the Annual  Meeting,  the Board of Directors may appoint an
additional non-employee director to join Mr. Kahl on the Compensation Committee.

         This report is not incorporated by reference in prior Securities Act of
1933 and Securities  Exchange Act of 1934 filings made by the  Corporation  that
might have incorporated  future filings in their entirety,  except to the extent
that the Corporation  specifically  incorporates  this information by reference,
and should not be otherwise deemed filed under such Acts.

         The Committee believes that the primary objectives of the Corporation's
compensation  policies  are to  attract  and retain a  management  team that can
effectively  implement and execute the  Corporation's  strategic  business plan.
These  compensation  policies  include  (i) an overall  management  compensation
program that is competitive with management  compensation  programs at companies
of similar size;  (ii)  short-term  bonus  incentives for management to meet the
Corporation's  net  income  performance  goals;  and (iii)  long-term  incentive
compensation  in  the  form  of  stock  options  and  other   long-term   equity
compensation that will encourage  management to continue to focus on shareholder
return.


                                       17




         The Committee's goal is to use  compensation  policies to closely align
the interests of the Corporation  with the interests of shareholders so that the
Corporation's management have incentives to achieve short-term performance goals
while building long-term value for the Corporation's shareholders. The Committee
will review its  compensation  policies  from time to time in order to determine
the reasonableness of the Corporation's  compensation  programs and to take into
account factors which are unique to the Corporation.

         The Committee has entered into employment agreements with Drs. Post and
Smith, and Mr. Tarrh. These agreements are renewable  annually,  and provide for
termination for cause as well as termination without cause and limit competition
if the officer's employment is terminated.

         Base  Salaries.  For Fiscal Year 1997,  Dr. Post's base salary has been
increased  from $143,000 in Fiscal Year 1996 to $170,000 per annum;  Dr. Smith's
base salary has been increased from $114,000 in Fiscal Year 1996 to $117,000 per
annum;  and Mr.  Tarrh's base salary has been  increased  from $97,500 in Fiscal
Year 1996 to $103,000.  The Compensation  Committee believes that these salaries
reflect base salaries paid to senior officers of other companies of similar size
and also reflect  improvements  in the  Corporation's  financial  performance to
date.  However,  subsequent  to the fiscal year end, Drs. Post and Smith and Mr.
Tarrh recommended and implemented a 10% reduction in their base salaries as part
of an expense reduction effort by the Corporation.

         Bonus Plan.  To further  incentivize  management to continue to improve
operating results, in August 1994, the Board of Directors  implemented the Bonus
Plan.  Pursuant to the Bonus Plan,  the Board of Directors  may grant bonuses to
certain executive officers if specified profit levels are achieved.  The amounts
to be  distributed  pursuant to the Bonus Plan are  determined  by the amount by
which operating  profits exceed the operating  profit goal, which is established
annually.  The  Committee  believes  that the Bonus  Plan  provides  significant
incentive to the executive  officers of the  Corporation to exceed the operating
profit goal.

         Compensation for Chief Executive Officer.  Dr. Post's  compensation was
based  upon  careful  analysis  of  other  comparable  public  companies'  Chief
Executive  Officers'  compensation  and Dr.  Post's  efforts  and success in the
following areas:  improving the Corporation's  operating  results;  establishing
strategic goals and objectives for the long-term growth of the Corporation;  and
raising  equity  capital  needed  to allow the  Corporation  to  advance  in its
strategic goals.

                                                      COMPENSATION COMMITTEE


                                                      Hans-Jochen Kahl, Chairman


                                       18



PERFORMANCE GRAPH

         The following graph compares the cumulative  total  stockholder  return
(assuming  reinvestment  of dividends)  from investing $100 on November 10, 1993
(the day the Corporation's Common Stock began trading separately on The National
Association of Securities Dealers Automated  Quotation System  ("NASDAQ")),  and
plotted  at the end of Fiscal  Years  1994,  1995 and  1996,  in each of (i) the
Corporation's  Common  Stock,  (ii) the NASDAQ  Market Index of  companies  (the
"NASDAQ Market Index");  and (iii) a Peer Group Index based on Standard Industry
Classification Number 3679, Electronic Components (the "SIC Code Index"),  which
consists of other companies in the Electronic Component industry.


                            CUMULATIVE TOTAL RETURN
                      AMONG APPLIED SCIENCE & TECHNOLOGY,
                     NASDAQ MARKET INDEX AND SIC CODE INDEX


                       ASSUMES $100 INVESTED ON NOV. 1993
                          ASSUMES DIVIDEND REINVESTED
                          FISCAL YEAR ENDING JUNE 1996
<TABLE>
<CAPTION>
<S>                                                 <C>           <C>           <C>            <C>  
                                                    11/10/93       07/02/94      07/01/95       06/29/96
                                                    --------       --------      --------       --------
Applied Science and Technology, Inc. .......        $100.00        $  55.68       $101.14        $109.09

NASDAQ Market Index ........................        $100.00        $ 106.38       $142.80        $183.35
 
SIC Code Index..............................        $100.00        $  99.38       $116.55        $146.72
</TABLE>



                                       19




                           PRICE RANGE OF COMMON STOCK

         The Corporation's Common Stock and Redeemable Warrants have been traded
on the National  Association of Securities Dealers Automated  Quotation System -
National  Market  System  ("NASDAQ/NMS")  under the symbols  "ASTX" and "ASTXW,"
respectively.  On  September  28,  1996,  the closing bid and ask prices for the
Corporation's  Common  Stock as reported by  NASDAQ/NMS  were $7 7/8 and $8 1/2,
respectively, and the bid and asked prices for the Redeemable Warrants were $5/8
and $3/4,  respectively.  As of September  28,  1996,  the  Corporation  had 166
holders  of record of its  Common  Stock.  Management  believes  that  there are
approximately 1800 beneficial owners of its Common Stock.

         For the periods indicated,  the following table sets forth the high and
low closing sale prices for the Common Stock as reported by NASDAQ/NMS from July
3, 1994  through  September  28, 1996.  Such  quotations  represent  interdealer
quotations without  adjustment for retail markups,  markdowns or commissions and
may not represent actual transactions.


                                                            SALE 
                                                            ----                
                                                  HIGH                LOW
                                                  ----                ---
         1995
         First Quarter ......................   $  7 1/8           $  5 3/4
         Second Quarter .....................      7 1/2              5 1/2
         Third Quarter ......................      8 3/4              5 1/2
         Fourth Quarter .....................     12 5/8              7 3/8

         1996
         First Quarter ......................   $ 18 1/4           $ 10 3/4
         Second Quarter .....................     16 3/4             15 1/2
         Third Quarter.......................     17                 12 5/8
         Fourth Quarter......................     23 1/2              9

         1997
         First Quarter.......................   $ 14 1/4           $  7 3/4


STOCK OWNERSHIP AND TRADING REPORTS

         Section  16(a) of the  Securities  Exchange  Act of 1934,  as  amended,
("Section  16(a)")  requires  executive  officers,  directors,  and  persons who
beneficially own more than ten percent (10%) of the Corporation's  stock to file
initial  reports of  ownership  on Form 3 and reports of changes in ownership on
Form 4 with the Securities and Exchange  Commission (the  "Commission")  and any
national  securities   exchange  on  which  the  Corporation's   securities  are
registered. Executive officers, directors

                                       

                                       20




and  greater  than ten  percent  (10%)  beneficial  owners are  required  by the
Commission's  regulations to furnish the Corporation  with copies of all Section
16(a) forms they file.

         Based  solely on a review of the copies of such forms  furnished to the
Corporation  and  written   representations  from  the  executive  officers  and
directors, the Corporation believes that all its executive officers,  directors,
and  greater  than  ten  percent  (10%)  beneficial  owners  complied  with  all
applicable Section 16(a) filing requirements, with the following exceptions: Mr.
Paul Blackborow, the Corporation's Vice President, Customer Operations filed one
(1) late Form 4,  reporting one (1)  transaction  and Mr.  Michael  Silvia,  the
Corporation's  Vice President,  Business  Operations  filed one (1) late Form 4,
reporting one (1) transaction.

                                 DIVIDEND POLICY

         The  Corporation  has not paid  dividends on its Common Stock since its
inception  and has no  intention  of paying  any  dividends  in the  foreseeable
future.  The  Corporation's  current credit facility  arrangements  restrict the
Corporation's  ability to declare  cash  dividends  without the  lender's  prior
written consent. The Corporation intends to reinvest future earnings, if any, in
the development and expansion of its business. Any declaration of dividends will
be at the election of the Board of Directors  and will depend upon the earnings,
capital requirements and financial position of the Corporation, general economic
conditions,  requirements of any bank lending  arrangements which may then be in
place, and other pertinent factors.

                                 PROPOSAL NO. 2

                 ACCOUNTING MATTERS AND RATIFICATION OF AUDITORS

         The  persons  named in the  enclosed  proxy  will  vote to  ratify  the
selection of KPMG Peat Marwick LLP as  independent  auditors for the fiscal year
ending  June  28,  1997  unless  otherwise  directed  by  the  stockholders.   A
representative  of KPMG Peat Marwick LLP is expected to be present at the Annual
Meeting,  and will have the opportunity to make a statement and answer questions
from stockholders if he or she so desires.

                                VOTING AT MEETING

         The Board of Directors has fixed October 1, 1996 as the record date for
the determination of stockholders entitled to vote at this meeting. At the close
of business on that date,  there were outstanding and entitled to vote 4,448,475
shares of Common Stock.

                             SOLICITATION OF PROXIES

         The cost of solicitation  of proxies will be borne by the  Corporation.
In addition to the  solicitation  of proxies by mail,  officers and employees of
the  Corporation  may solicit in person or by  telephone.  The  Corporation  may
reimburse  brokers or persons  holding stock in their names,  or in the names of
their  nominees,  for their  expense in sending  proxies  and proxy  material to
beneficial owners.



                                       20




                               REVOCATION OF PROXY

         Subject  to the terms and  conditions  set forth  herein,  all  proxies
received by the Corporation will be effective,  notwithstanding  any transfer of
the shares to which such proxies relate,  unless prior to the Annual Meeting the
Corporation receives a written notice of revocation signed by the person who, as
of the record date,  was the  registered  holder of such  shares.  The notice of
revocation  must  indicate  the  certificate  number or numbers of the shares to
which such revocation  relates and the aggregate number of shares represented by
such certificate(s).

                              STOCKHOLDER PROPOSALS

         In order to be included in proxy material for the 1997 Annual  Meeting,
tentatively scheduled for November 13, 1997,  stockholders' proposed resolutions
must be received by the  Corporation on or before July 1, 1997. The  Corporation
suggests  that  proponents  submit their  proposals by  certified  mail,  return
receipt requested, addressed to the President of the Corporation.

                                  ANNUAL REPORT

         THE  CORPORATION IS PROVIDING TO EACH  STOCKHOLDER,  TOGETHER WITH THIS
PROXY  STATEMENT  WITHOUT  CHARGE,  A COPY OF THE  CORPORATION'S  ANNUAL REPORT,
INCLUDING THE FINANCIAL STATEMENTS FOR THE CORPORATION'S MOST RECENT FISCAL YEAR
ENDED JUNE 29, 1996.

                                  MISCELLANEOUS

         Management  does not know of any other matter which may come before the
Annual  Meeting.  However,  if any other  matters are properly  presented to the
Annual  Meeting,  it is the intention of the persons  named in the  accompanying
proxy to vote,  or  otherwise  act, in  accordance  with their  judgment on such
matters.

                                              By Order of the Board of Directors


                                              John M. Tarrh
                                              Secretary


October 18, 1996

         MANAGEMENT  HOPES THAT  STOCKHOLDERS  WILL  ATTEND THE ANNUAL  MEETING.
WHETHER OR NOT YOU PLAN TO ATTEND,  YOU ARE URGED TO COMPLETE,  DATE,  SIGN, AND
RETURN THE ENCLOSED PROXY IN THE  ACCOMPANYING  ENVELOPE.  PROMPT  RESPONSE WILL
GREATLY FACILITATE ARRANGEMENTS FOR THE ANNUAL MEETING AND YOUR COOPERATION WILL
BE APPRECIATED.  STOCKHOLDERS WHO ATTEND THE ANNUAL MEETING MAY VOTE THEIR STOCK
PERSONALLY EVEN THOUGH THEY HAVE SENT IN THEIR PROXIES.



                                       22




                      APPLIED SCIENCE AND TECHNOLOGY, INC.
      PROXY OF ANNUAL MEETING OF STOCKHOLDERS TO BE HELD NOVEMBER 21, 1996
           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS

     THE  UNDERSIGNED  hereby  appoints  Richard  S.  Post and John M.  Tarrh as
Proxies,  with full power of  substitution to each, to vote for and on behalf of
the  undersigned at the Annual Meeting of  Stockholders  of APPLIED  SCIENCE AND
TECHNOLOGY,  INC. to be held at the  Corporation's  offices  located at 35 Cabot
Road, Woburn, Massachusetts 01801, on Thursday, November 21, 1996 at 10:30 a.m.,
and at any adjournment or adjournments  thereof.  The undersigned hereby directs
the said  Richard  S. Post and John M.  Tarrh to vote in  accordance  with their
judgment on any matters that may properly come before the Annual Meeting, all as
indicated  in the  Notice  of the  Annual  Meeting,  receipt  of which is hereby
acknowledged,  and to act on the  following  matters set forth in such notice as
specified by the undersigned:

             IF NO DIRECTION IS MADE, THIS PROXY WILL BE VOTED FOR
                    ELECTION OF DIRECTORS AND FOR PROPOSAL 2.

(1) Proposal  to elect  three  (3)  members  of the  Board of  Directors  of the
    Corporation,  each  of  whom  is  currently  serving  as a  Director  of the
    Corporation.
 
    INSTRUCTION: TO WITHHOLD AUTHORITY FOR ANY INDIVIDUAL NOMINEE STRIKE 
                 SUCH NOMINEE'S NAME FROM THE LIST BELOW. 

    [ ] FOR all nominees listed below           [ ] WITHHOLD AUTHORITY 
        (except as marked to the contrary)          to vote for all nominees 
                                                    listed below 

              DONALD K. SMITH, MICHEL DE BEAUMONT, JOHN R. BERTUCCI

(2) Proposal  to ratify and approve the  selection  of KPMG Peat  Marwick LLP as
    independent  auditors of the Corporation for the fiscal year ending June 28,
    1997.
                                               FOR [ ]  AGAINST [ ]  ABSTAIN [ ]

(3) In their  discretion  to transact  such other  business as may properly come
    before the meeting or any adjournment or adjournments thereof.

    THE SHARES  REPRESENTED  BY THIS PROXY WILL BE VOTED FOR AND IN FAVOR OF THE
ITEMS SET FORTH ABOVE UNLESS A CONTRARY SPECIFICATION IS MADE.






PLEASE MARK,  DATE,  SIGN AND RETURN THE PROXY CARD PROMPTLY  USING THE ENCLOSED
ENVELOPE.

Please sign exactly as name appears below.

                                        Dated:___________________________ , 1996

                                        ________________________________________
                                                        Signature 

                                        ________________________________________
                                                 Signature if held jointly 

                                        ________________________________________
                                                       Printed Name 

                                        ________________________________________
                                                          Address 

                                        NOTE:  When  shares  are  held by  joint
                                        tenants,  both should sign. When signing
                                        as  attorney,  executor,  administrator,
                                        trustee or  guardian,  please  give full
                                        title as such.  If the  person  named on
                                        the stock  certificate has died,  please
                                        submit evidence of your authority.  If a
                                        corporation,   please   sign   in   full
                                        corporate   name  by  the  President  or
                                        authorized   officer  and  indicate  the
                                        signer's   office.   If  a  partnership,
                                        please  sign  in  partnership   name  by
                                        authorized person.


 




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