APPLIED SCIENCE & TECHNOLOGY INC
S-3/A, 1996-05-10
SPECIAL INDUSTRY MACHINERY, NEC
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      As filed with the Securities and Exchange Commission on May 9, 1996

                                                       Registration No. 33-80135
    
================================================================================
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549


   
                        PRE-EFFECTIVE AMENDMENT NO. 1 TO
    

                                    FORM S-3

                             REGISTRATION STATEMENT
                                      UNDER
                           THE SECURITIES ACT OF 1933


                      APPLIED SCIENCE AND TECHNOLOGY, INC.
             (Exact name of registrant as specified in its charter)

          DELAWARE                                              04-2962110
(State or other jurisdiction                                 (IRS Employer
 of incorporation or organization)                           Identification No.)

   
                        RICHARD S. POST, PH.D., PRESIDENT
                      APPLIED SCIENCE AND TECHNOLOGY, INC.
                                  35 CABOT ROAD
                        WOBURN, MASSACHUSETTS 01801-1053
                                 (617) 933-5560
          (Address, including zip code, and telephone number, including
           area code, of registrant's principal executive offices and
            name, address and telephone number of agent for service)
    


                                   COPIES TO:

                            NEIL H. ARONSON, ESQUIRE
                           EDWARD P. GONZALES, ESQUIRE
                           O'CONNOR, BROUDE & ARONSON
                          950 WINTER STREET, SUITE 2300
                          WALTHAM, MASSACHUSETTS 02154
                                 (617) 890-6600

         Approximate  date of commencement of proposed sale to the public:  From
time to time after this Registration Statement becomes effective.

         If the only securities  being registered on this form are being offered
pursuant to dividend or interest  reinvestment plans, please check the following
box: |_|

         If any of the  securities  being  registered  on  this  Form  are to be
offered  on a  delayed  or  continuous  basis  pursuant  to Rule 415  under  the
Securities Act of 1933,  other than  securities  offered only in connection with
dividend or interest reinvestment plans, check the following box: |X|

                                       


                         CALCULATION OF REGISTRATION FEE
<TABLE>
<CAPTION>

   
                                                     Proposed             Proposed
Title of Each Class                                  Maximum              Maximum                Amount of
of Securities to Be        Amount to                 Offering Price       Aggregate              Registration
Registered                 Be Registered             per Share (1)        Offering Price (1)     Fee(2)
- ----------                 -------------             -------------        ------------------     ------
<S>                         <C>                       <C>                 <C>                   <C>
Common Stock,
  $.01 par value
  per share (the
  "Common
  Stock") (3) ........         34,126                   $9.60               $327,609.60          $112.97(4)


</TABLE>

(1)      The offering  price per share and maximum  offering price is the actual
         exercise  price of the  redeemable  warrants  under which the shares of
         Common Stock are underlying.

(2)      The registration fee submitted with this registration  statement is for
         the registration of 34,126 shares of Common Stock underlying redeemable
         warrants  that  were  issued by the  Registrant  in  connection  with a
         private  placement  that  the  Company  completed  in  September  1992.
         Pursuant to Rule 429 under the  Securities Act of 1933, as amended (the
         "Act"),  the registration fee for the other securities to be registered
         under this  registration  statement were paid previously as part of the
         registration fee submitted with a Registration  Statement on Form SB-2,
         Registration No.  33-69098-B,  declared  effective on November 9, 1993,
         which  included (i) a fee in the amount of  $5,194.28 to cover  977,500
         shares of Common Stock underlying  1,955,000  redeemable  warrants (the
         "Warrants"),  (ii) an aggregate fee in the amount of $1,471.67 to cover
         255,000 shares of Common Stock  underlying  the warrants  issued to the
         representative  of the underwriters of the initial public offering (the
         "Representative's IPO Warrants") and underlying the Warrants underlying
         the  Representative's  IPO  Warrants,  and (iii) a fee in the amount of
         $8.50 to cover 170,000  Warrants  underlying the  Representative's  IPO
         Warrants.

(3)      Pursuant  to Rule 416 also  registered  hereunder  are such  additional
         indeterminate number of shares of Common Stock that may become issuable
         pursuant to antidilution adjustments, stock splits, stock dividends and
         similar adjustments.

(4)      The registration fee was previously paid to the Commission on December
         7, 1995.
    
         THE REGISTRANT HEREBY AMENDS THIS  REGISTRATION  STATEMENT ON SUCH DATE
OR DATES AS MAY BE NECESSARY TO DELAY ITS  EFFECTIVE  DATE UNTIL THE  REGISTRANT
SHALL FILE A FURTHER AMENDMENT WHICH SPECIFICALLY  STATES THAT THIS REGISTRATION
STATEMENT SHALL  THEREAFTER  BECOME EFFECTIVE IN ACCORDANCE WITH SECTION 8(A) OF
THE SECURITIES  ACT OF 1933, AS AMENDED,  OR UNTIL THIS  REGISTRATION  STATEMENT
SHALL BECOME  EFFECTIVE ON SUCH DATE AS THE COMMISSION,  ACTING PURSUANT TO SAID
SECTION 8(A), MAY DETERMINE.

         Pursuant to Rule 429 under the Act the combined prospectus contained in
this  registration  statement also relates to a  Registration  Statement on Form
SB-2,  Registration No. 33-69098-B,  which was declared effective on November 9,
1993.

                                       -2-



                      APPLIED SCIENCE AND TECHNOLOGY, INC.

              CROSS-REFERENCE SHEET SHOWING LOCATION IN PROSPECTUS
                  OF INFORMATION REQUIRED BY PART I OF FORM S-3
<TABLE>
<CAPTION>

                  Registration Statement                               Location or Heading
                      Item and Caption                                      in Prospectus

<S>     <C>                                                           <C>
1.       Forepart of Registration Statement and
         Outside Front Cover Page of Prospectus...................     Outside Front Cover Page

2.       Inside Front and Outside Back
         Cover Pages of Prospectus................................     Inside Front Cover Page; Outside Back Cover
                                                                       Page

3.       Summary Information, Risk Factors and
         Ratio of Earnings to Fixed Charges.......................     The Company; Risk Factors

4.       Use of Proceeds..........................................     Use of Proceeds

5.       Determination of Offering Price..........................     Outside Front Cover Page;  Plan of
                                                                       Distribution

6.       Dilution.................................................     Not Applicable

7.       Selling Security Holders.................................     Selling Securityholders

8.       Plan of Distribution.....................................     Outside Front Cover Page; Plan of Distribution

9.       Description of Securities to be Registered...............     Outside Front Cover Page

10.      Interests of Named Experts and Counsel...................     Legal Matters

11.      Material Changes.........................................     Recent Developments

12.      Incorporation of Certain Information by Reference........     Incorporation of Certain Information by
                                                                       Reference

13.      Disclosure of Commission Position on
         Indemnification for Securities Act Liabilities...........     Not Applicable

</TABLE>

                                       -3-



         Information  contained herein is subject to completion or amendment.  A
registration  statement  relating  to these  securities  has been filed with the
Securities  and Exchange  Commission.  These  securities may not be sold nor may
offers to buy be accepted prior to the time the registration  statement  becomes
effective.  This  prospectus  shall  not  constitute  an  offer  to  sell or the
solicitation of an offer to buy nor shall there be any sale of these  securities
in any State in which such offer,  solicitation  or sale would be unlawful prior
to registration or qualification under the securities laws of any such State.


                                       -4-





   
                    SUBJECT TO COMPLETION, DATED MAY 9, 1996
    

PROSPECTUS
                      APPLIED SCIENCE AND TECHNOLOGY, INC.

   
1,266,626 SHARES OF COMMON STOCK, $.01 PAR VALUE PER SHARE, AND 170,000 WARRANTS

         This Prospectus  relates to 1,266,626 shares of Common Stock,  $.01 par
value per share (the "Common Stock"), of Applied Science and Technology, Inc., a
Delaware corporation (the "Company"),  registered for issuance by the Company as
follows:  (i)  977,500  shares of Common  Stock  issuable  upon  exercise of the
redeemable warrants (the "IPO Warrants") issued by the Company to investors (the
"Holders") in its initial  public  offering in November  1993 (the "IPO");  (ii)
170,000 shares of Common Stock issuable upon exercise of the redeemable warrants
(the "Representative's Warrants") issued to Josephthal Lyon & Ross Incorporated,
the representative of the underwriters of the IPO (the "Representative");  (iii)
85,000 shares of Common Stock issuable upon exercise of IPO Warrants  underlying
the Representative's  Warrants (the  "Representative's IPO Warrants");  and (iv)
34,126 shares of Common Stock issuable upon exercise of redeemable warrants (the
"Investor  Warrants")  issued to  certain  investors  (the  "Investors")  in the
Company's   private   placement   completed  in  September  1992  (the  "Private
Placement").   THE  COMPANY   INTENDS  TO  REDEEM  THE  IPO  WARRANTS  UPON  THE
EFFECTIVENESS  OF  THIS  PROSPECTUS  OR AS SOON AS  PRACTICABLE  THEREAFTER,  IN
ACCORDANCE  WITH THE PROVISIONS OF THE WARRANT  AGREEMENT,  DATED AS OF NOVEMBER
10, 1993, BY AND BETWEEN THE COMPANY AND  CONTINENTAL  STOCK  TRANSFER AND TRUST
COMPANY.  This Prospectus also relates to 170,000  Representative's IPO Warrants
issuable by the Company  upon  exercise of the  Representative's  Warrants.  See
"Selling  Securityholders."  The  Holders,  Representative,  and  Investors  are
sometimes hereinafter referred to collectively as the "Selling Securityholders,"
and the IPO Warrants,  Representative's Warrants, Representative's IPO Warrants,
and Investor Warrants are sometimes  hereinafter referred to collectively as the
"Warrants."

         This offering (the "Offering") is not being underwritten. The shares of
Common Stock and IPO Warrants being offered hereunder may be sold by the Company
from time to time to the Selling  Securityholders  at the exercise prices of the
Warrants.  Although the shares of Common Stock and Representative's IPO Warrants
being offered hereunder have not been specifically  registered for resale by the
Selling  Securityholders,  once  registered such securities may be resold by the
Selling  Securityholders  and/or their registered  representatives  from time to
time at prices to be determined at the time of such sales.  No minimum  required
purchase  exists and no arrangement has been made to have funds received by such
Selling  Securityholders  and/or their registered  representatives  placed in an
escrow, trust or similar account or arrangement, unless the proceeds come from a
purchaser  residing in a state in which the sale of those securities has not yet
been qualified. See "Selling Securityholders" and "Plan of Distribution."

         The  Company's  Common  Stock and IPO Warrants are traded on the NASDAQ
National Market System Stock Market  ("NASDAQ/NMS") under the symbols "ASTX" and
"ASTXW," respectively. The shares of Common Stock and IPO Warrants to be offered
for resale  pursuant to this  Prospectus may be offered for resale on NASDAQ/NMS
or in privately negotiated  transactions.  On May 1, 1996, the closing bid price
of the  Company's  Common  Stock and IPO Warrants on  NASDAQ/NMS  was $22.25 per
share and $3.63 per IPO Warrant.
                                   __________

         THE  SECURITIES  OFFERED  HEREBY  INVOLVE A HIGH  DEGREE OF RISK TO THE
PURCHASERS  OF  SUCH  SECURITIES.  SEE  "RISK  FACTORS"  ON  PAGES  7-14 OF THIS
PROSPECTUS.
    
                                   __________

         THESE   SECURITIES  HAVE  NOT  BEEN  APPROVED  OR  DISAPPROVED  BY  THE
SECURITIES  AND  EXCHANGE  COMMISSION  NOR HAS THE  COMMISSION  PASSED  UPON THE
ACCURACY OR ADEQUACY OF THIS PROSPECTUS. ANY REPRESENTATION TO THE CONTRARY IS A
CRIMINAL OFFENSE.

<TABLE>
<CAPTION>

   
                                                              Underwriting
                                            Price to          Discounts and             Proceeds to
                                             Public            Commissions              Company (2)
                                             ------            -----------              -----------
<S>                                        <C>               <C>                       <C>           
Per Share (Underlying IPOWarrants)(1) ...   $15.05            $735,568.75               $15,255,057.25
Per Unit (Underlying
  Representative's Warrants).............   $15.7325          $   -0-                   $ 2,674,525.00
Per Share (Underlying Investor Warrants)    $ 9.60            $   -0-                   $   327,609.60
                                            --------          -----------               --------------
Total . .................................   $40.3825          $735,568.75               $18,257,191.85
</TABLE>
__________

(1)      Pursuant to the terms of a Warrant Agreement,  dated November 10, 1993,
         the Company will be responsible for a fee to the  Representative  equal
         to five percent (5%) of the aggregate proceeds derived upon exercise of
         the  IPO  Warrants  issued  to  the  Holders,   payable  under  certain
         circumstances.

(2)      Offering expenses estimated at $17,000.00 are payable by the Company.
                                   __________

                  THE DATE OF THIS PROSPECTUS IS MAY __, 1996.

    


                              AVAILABLE INFORMATION

   
         The  Company  is  subject  to  the  informational  requirements  of the
Securities  Exchange  Act of 1934,  as amended  (the  "Exchange  Act"),  and, in
accordance therewith, files reports, proxy statements and other information with
the Securities and Exchange Commission (the "Commission").  Such reports,  proxy
statements  and other  information  can be inspected  and copies  thereof may be
obtained,  at prescribed rates, at the public reference facilities maintained by
the  Commission at the Public  Reference  Section,  Room 1024, 450 Fifth Street,
N.W., Washington, D.C. 20549, and at the Commission's Regional Office located at
7 World Trade  Center,  13th  Floor,  New York,  New York 10048.  Copies of such
material can be obtained at prescribed  rates by writing to the Public Reference
Section of the Commission at 450 Fifth Street, N.W., Washington, D.C. 20549.
    

         The  Company's  Common Stock and IPO Warrants are listed for trading on
NASDAQ/NMS.  Reports  and  other  information  concerning  the  Company  can  be
inspected at the offices of The NASDAQ  Stock  Market  located at 1735 K Street,
N.W., Washington, D.C. 20006.

   
         The Company has filed a  Registration  Statement  on Form S-3 under the
Securities Act of 1933, as amended (the "Securities  Act"),  covering the Common
Stock and  Representative's  IPO  Warrants  included  in this  Prospectus.  This
Prospectus  does not  contain  all the  information  set forth in or  annexed as
exhibits to the Registration  Statement filed by the Company with the Commission
and reference is made to such  Registration  Statement and the exhibits  thereto
for the  complete  text  thereof.  For further  information  with respect to the
Company and the securities offered hereby, reference is made to the Registration
Statement,  including the exhibits filed as part thereof, copies of which may be
obtained at prescribed rates upon request to the Commission in Washington,  D.C.
Any statements  contained herein  concerning the provisions of any documents are
not necessarily complete,  and, in each instance,  such statements are qualified
in their  entirety  by  reference  to such  document  filed as an exhibit to the
Registration Statement or otherwise filed with the Commission.

         NO DEALER,  SALESMAN,  OR ANY OTHER PERSON HAS BEEN  AUTHORIZED TO GIVE
ANY  INFORMATION OR TO MAKE ANY  REPRESENTATIONS,  OTHER THAN THOSE CONTAINED OR
INCORPORATED  BY  REFERENCE  IN THIS  PROSPECTUS,  AND,  IF GIVEN OR MADE,  SUCH
INFORMATION OR REPRESENTATION  MUST NOT BE RELIED UPON AS HAVING BEEN AUTHORIZED
BY THE COMPANY.  THIS  PROSPECTUS DOES NOT CONSTITUTE AN OFFER BY THE COMPANY TO
SELL ANY OF THE SECURITIES  OFFERED HEREBY IN ANY  JURISDICTION TO ANY PERSON TO
WHOM IT IS  UNLAWFUL  FOR THE  COMPANY TO MAKE SUCH OFFER IN SUCH  JURISDICTION.
NEITHER THE DELIVERY OF THIS PROSPECTUS NOR ANY SALE MADE HEREUNDER SHALL, UNDER
ANY  CIRCUMSTANCE,  CREATE ANY IMPLICATION  THAT THERE HAS BEEN NO CHANGE IN THE
AFFAIRS OF THE COMPANY SINCE THE DATE HEREOF.
    


                                       -2-




                INCORPORATION OF CERTAIN INFORMATION BY REFERENCE

         The  following  documents,  which  have  been  previously  filed by the
Company  with the  Commission  under  the  Exchange  Act,  are  incorporated  by
reference in this Prospectus:

  (1)   Annual Report on Form 10-K for the fiscal year ended July 1, 1995
        ("Fiscal 1995");

  (2)   Quarterly Report on Form 10-Q for the fiscal quarter ended September 30,
        1995;

   
  (3)   Quarterly Report on Form 10-Q for the fiscal quarter ended December 30, 
        1995;

  (4)   Quarterly Report on Form 10-Q for the fiscal quarter ended March 30, 
        1996;

  (5)   Current Report on Form 8-K, dated October 25, 1995, and filed on October
        26, 1995;

  (6)   Current Report on Form 8-K, dated November 22, 1995, and filed on 
        November 23, 1995;

  (7)   Current Report on Form 8-K, dated December 15, 1995, and filed on 
        December 18, 1995;

  (8)   Current Report on Form 8-K, dated December 29, 1995, and filed on 
        January 12,  1996,  as amended by a Current  Report on Form 8-K/A, dated
        March 14, 1996, and filed March 15, 1996; and

  (9)   Description  of the  Company's  Common Stock in the  Company's Form  8-A
        Registration   Statement,   declared  effective  on  November 9, 1993.
    
         All documents filed by the Company  pursuant to Sections 13(a),  13(c),
14 or 15(d) of the Exchange Act  subsequent to the date of this  Prospectus  and
prior to the termination of the Offering  described herein shall be deemed to be
incorporated by reference into this  Prospectus from the respective  dates those
documents are filed.

         Any statement contained herein or in a document  incorporated or deemed
to be  incorporated  by  reference  herein  shall be  deemed to be  modified  or
superseded for purposes of the Registration Statement and this Prospectus to the
extent that a statement  contained herein or in any subsequently  filed document
which also is or is deemed to be  incorporated  by reference  herein modifies or
supersedes  such statement.  Any such statement so modified or superseded  shall
not be deemed, except as so modified or superseded,  to constitute a part of the
Registration Statement or this Prospectus.



                                       -3-


   
         The Company will provide,  without charge,  to each person who receives
this Prospectus,  upon the written or oral request of any such person, a copy of
any or all of the documents  which have been  incorporated  herein by reference,
other than exhibits to such  documents  (unless such  exhibits are  specifically
incorporated  by reference).  Requests should be directed in writing to Mr. John
M. Tarrh, Senior Vice President,  Applied Science and Technology, Inc., 35 Cabot
Road, Woburn, Massachusetts 01801-1053, or by telephone at (617) 933-5560.
    

                               RECENT DEVELOPMENTS

         No material  changes in the Company's  affairs have occurred  since the
end of Fiscal 1995,  which have not been  described in an Annual  Report on Form
10-K, a Quarterly  Report on Form 10- Q or a Current Report on Form 8-K filed by
the Company under the Exchange Act.



                                       -4-



                                   THE COMPANY

THE BUSINESS

   
         Applied   Science  and  Technology,   Inc.  (the  "Company")   designs,
manufactures  and markets  proprietary  systems and  components  used to produce
certain advanced  materials such as  semiconductors  and diamond.  The Company's
systems and components  typically use microwave plasma production  techniques in
which  gases  are  heated  to form a plasma  that  chemically  interacts  with a
substrate material. Based on its estimates, management believes that the size of
the markets in which the Company  currently  participates is approximately  $600
million and that the Company is a leading worldwide supplier of microwave plasma
equipment  to  such  markets.   This  equipment  is  used  today  primarily  for
manufacturing the latest generation of advanced semiconductors.  It is also used
for creating diamond for use in coatings and other  processes,  and for advanced
materials research.
    

         The Company provides  patented and proprietary  components,  as well as
engineering  and  scientific  expertise,   to  semiconductor  capital  equipment
manufacturers  ("SCEMs")  for  use  in  semiconductor   manufacturing  processes
including photoresist stripping,  passivation, etching and thin film deposition.
The  Company's  major  customers  include  Applied  Materials,   Inc.  ("Applied
Materials"),  GaSonics International,  Inc. ("GaSonics"), and Lam Research, Inc.
("Lam  Research").  Their  customers  (IBM,  Intel,  Motorola) use the Company's
equipment to manufacture  the latest  generation of advanced  memory devices and
microprocessors, such as Pentium and Power PC chips.

   
         Customers  also  use  the  Company's   patented,   patent  pending  and
proprietary chemical vapor deposition ("CVD") diamond production  components and
systems in the development and manufacture of tool coatings,  optics and optical
coatings,   thermal   management   substrates   for   laser   diodes   used   in
telecommunications,  and high performance electronics.  Diamond is considered an
ideal  material  for a wide  variety of uses  because of its  extreme  hardness,
excellent  thermal  conductivity,  and other unique  properties.  The Company is
focused in this market on  commercializing  the use of CVD diamond by developing
systems to manufacture CVD diamond at higher  production  rates,  resulting in a
lower cost per carat.

         The Company sells its products to commercial, university and government
laboratory research customers, who provide information for the Company about new
applications  for the Company's  technologies in existing and emerging  markets.
The  Company  manufactures  microwave  components  and  systems  for  industrial
applications,  including  equipment  used in processing  rubber and a variety of
other  materials.  The Company performs funded research and development with the
U.S.  government  and commercial  customers when the Company  believes that such
research and  development  will lead to long term product revenue streams rather
than a short term boost in revenues and earnings.
    



                                       -5-



   
         Management's expansion strategy is to continue to develop,  manufacture
and market systems, components and process technologies that meet its customers'
needs for new  applications  of plasma  processing  for  existing  CVD  diamond,
semiconductor  and  medical  equipment  markets  as  well as for  potential  new
markets.  These markets include  semiconductor and medical  equipment  component
manufacturing,  electro-optics and high temperature  superconducting  materials.
The  Company's  plan  is  to  seek  to  significantly  expand  revenues  through
anticipated internal growth as well as through potential  acquisitions,  such as
the recent acquisitions of Ehrhorn  Technological  Operations,  Inc. ("ETO") and
Newton Engineering  Service,  Inc. ("Newton  Engineering").  No assurance can be
given  that  the  Company  will  be  able  to  successfully   identify  possible
acquisition candidates,  complete such acquisitions,  and successfully integrate
these  businesses  into the  Company's  operations.  See "Risk  Factors -- Risks
Associated with Acquisitions."

         In November and December 1995, the Company acquired Newton  Engineering
and ETO, respectively. ETO is a manufacturer of high performance radio frequency
power amplifiers for the semiconductor,  medical,  industrial and communications
markets.  Newton  Engineering  is  a  supplier  of  specialty  transformers  and
inductors used by the Company and other industrial customers.

         The Company was  incorporated  in Delaware on January 12, 1987. As used
in this Prospectus,  unless otherwise indicated, the "Company" refers to Applied
Science and Technology,  Inc., a Delaware  corporation and the Company's  wholly
owned   subsidiaries,   ETO,  a  Nevada  corporation,   Newton  Engineering,   a
Massachusetts  corporation  ,  ASTeX/Gerling  Laboratories,  Inc.,  a California
corporation, and Applied Science and Technology, GmbH, a German corporation. The
Company's corporate offices are located at 35 Cabot Road, Woburn,  Massachusetts
01801 and its telephone number is (617) 933-5560.
    



                                       -6-



                                  RISK FACTORS

   
         In  addition  to the  information  contained  in this  Prospectus,  the
following  information should be considered carefully by potential purchasers in
evaluating the Company,  its business and the securities  offered  hereby.  This
Prospectus   contains   forward-looking   statements  which  involve  risks  and
uncertainties.  The Company's  actual results and timing of certain events could
differ materially from those anticipated by such forward-looking statements as a
result of certain  factors  discussed  in this  Prospectus,  including  the risk
factors set forth below.
    

COMPETITION;   RISK  OF  TECHNOLOGICAL   OBSOLESCENCE;   UNCERTAINTY  OF  MARKET
ACCEPTANCE OF NEW PRODUCTS AND APPLICATIONS

         The advanced  materials  field, and particularly the CVD diamond field,
are undergoing rapid and significant  technological  change. The Company expects
plasma processing and CVD diamond technology to continue to develop rapidly. The
Company's  success  will  depend  upon its  ability to  maintain  a  competitive
position for its products in the marketplace. To do so, the Company must develop
and enhance its  technology  and products to keep pace with rapid  technological
changes in production equipment and advanced materials processes. Many companies
and academic institutions have developed and are capable of developing competing
products   based  on   technologies   similar  to  the  Company's  or  on  other
technologies.  Many of these competitors are well-established,  and several have
or  may  acquire  substantially  greater  financial,  technical,  manufacturing,
marketing  and other  resources  than the  Company,  and many  have  established
success  in the  development,  sale and  service  of  competitive  products.  No
assurance  can be given  that  these  or other  firms  will not  develop  new or
enhanced  products that are more  effective than any that have been developed or
may be developed by the Company.  No assurance can be given that planned  future
products  will  realize  market  acceptance  or will meet  technical  demands of
current and potential customers.

         The Company  believes  that its ability to compete  depends on elements
both within and outside its control,  including, but not limited to, the success
and timing of new  product  development  and new  product  introductions  by the
Company and its  competitors,  product  performance and price,  distribution and
customer  support.  No  assurance  can be given that the Company will be able to
compete  successfully  with  respect  to these  factors.  Although  the  Company
believes that it may have certain  technological  and other  advantages over its
competitors,  maintaining such advantages will require  continued  investment by
the  Company in research  and  development,  sales and  marketing  and  customer
service  and  support.  No  assurance  can be given that the  Company  will have
sufficient  resources to make such  investments or that the Company will be able
to achieve the  technological  advances  necessary to maintain such  competitive
advantages.  In  addition,  as the  Company  enters  new  markets,  distribution
channels,  technical  requirements  and levels and bases of  competition  may be
different  than those in the Company's  current  markets and no assurance can be
given that the Company will be able to compete favorably.



                                       -7-


DEPENDENCE ON SIGNIFICANT CUSTOMERS AND CONTRACTS

   
         Applied  Materials  accounted  for  approximately  41% of the Company's
total revenue in Fiscal 1995. GaSonics,  U.S. government agencies (including the
Advanced  Research   Projects  Agency  ("ARPA"))  and  the  Company's   Japanese
distributor each accounted for approximately 9%, 6% and 5%, respectively, of the
Company's  total  revenue in Fiscal 1995.  Management  considers  the  Company's
relationship  with each of its  significant  customers to be  satisfactory  and,
although no assurance can be given, anticipates that each of these entities will
continue to account for a significant  portion of the Company's total revenue in
the current  fiscal  year.  The supply  agreements  with Applied  Materials  and
GaSonics,  as  well as  certain  government  contracts,  typically  provide  for
cancellation or modification (for example, reduction of the amount of a purchase
order) of the agreements with little or no penalty.  A substantial  reduction in
orders from the Company's significant customers,  the loss of these customers or
the inability to attract orders from new customers would have a material adverse
effect on the Company's operations and financial condition.
    

NO ASSURANCE OF FUTURE PROFITABILITY

   
         For the  years  ended  June 30,  1993  ("Fiscal  1993"),  July 2,  1994
("Fiscal  1994"),  and Fiscal  1995,  the Company had net  earnings of $149,292,
$518,041 and $1,127,748,  respectively. The results for Fiscal 1993, Fiscal 1994
and Fiscal  1995 may not  necessarily  be  indicative  of future  results and no
assurance  can be given that the Company will operate  profitably in the future.
For the nine months  ended March 30,  1996,  the Company  incurred a net loss of
$1,370,598, primarily as a result of the acquisition of ETO. The Company expects
to  report a loss for the  current  fiscal  year,  primarily  as a result of the
substantial non-recurring expense incurred in connection with the acquisition of
ETO.
    

RISKS RELATING TO GROWTH AND EXPANSION

   
         Rapid growth of the Company's  business,  which the Company  intends to
pursue   aggressively   through   anticipated   internal   growth  and  possible
acquisitions,   but  of  which  no  assurance  of  success  can  be  given,  may
significantly  strain  the  Company's  management,   operational  and  technical
resources. If the Company is successful in obtaining rapid market penetration of
its  products,  the Company  will be required to deliver  increasing  volumes of
highly  complex  products and components to its customers on a timely basis at a
reasonable  cost to the Company.  No assurance  can be given that the  Company's
efforts to expand its  manufacturing  and quality  assurance  activities will be
successful  or that the  Company  will be able to satisfy  increased  commercial
scale production on a timely and  cost-effective  basis.  The Company's  success
will also  depend,  in part,  upon its  ability to provide  its  customers  with
engineering,  manufacturing,  marketing  and other  support.  In addition to the
levels of  support  currently  provided,  including  the  ability  to modify its
technology and products to meet end-user requirements,  the Company will also be
required  to  continue  to improve its  operational,  management  and  financial
systems and  controls.  Failure to manage  growth could have a material  adverse
effect on the business of the Company.
    


                                       -8-





RISKS ASSOCIATED WITH ACQUISITIONS

   
         In the normal  course of  business,  the  Company  evaluates  potential
acquisitions of businesses,  products and technologies  that would complement or
expand the  Company's  business.  The Company  also  evaluates  potential  joint
ventures or other  collaborative  projects.  In November and  December  1995 the
Company  acquired  Newton  Engineering  and  ETO,  respectively,  and  has  been
operating  such  companies  as wholly  owned  subsidiaries  of the Company  (the
"Acquisitions").  No  assurance  can be given that the  Company  will be able to
successfully  integrate the  Acquisitions  into its operations,  or successfully
negotiate, finance or integrate any other such acquired businesses,  products or
technologies  or  successfully  engage in any joint ventures or  collaborations.
Furthermore,  the  integration  of the  Acquisitions  or of any  other  acquired
business may cause a diversion of management  time and  resources.  No assurance
can be given that the Company will enter into any additional acquisitions, joint
ventures or other collaborative  projects in the future, and no assurance can be
given  that  the  Acquisitions  or  any  other  acquisition,  joint  venture  or
collaborative  project,  when consummated,  will not materially adversely affect
the Company.

LIQUIDITY AND CAPITAL RESOURCES

         The expansion of the Company's  current business  involves  significant
financial risk and capital investment.  No assurance can be given that financing
will be available in the future to meet the needs of the Company for  additional
investment capital.
    

PATENTS AND PROPRIETARY INFORMATION

         The Company's patent and trade secret rights are of material importance
to the Company  and its future  prospects  because  the Company  relies on these
rights to protect proprietary technology.  Generally, the Company's patents have
been  directed to gas and plasma  generator  technology,  microwave  heating and
rubber  curing.  The Company  currently  owns ten U.S.  patents and one Canadian
patent, has six patent  applications  pending in the U.S., and has several other
U.S.  and foreign  patent  applications  in various  stages of  preparation  and
filing.  The earliest of the issued patents  considered  material by the Company
expires in 2004.  As a  qualifying  small  business,  the Company  has  retained
commercial  ownership rights to proprietary  technology  developed under various
U.S. government contracts and grants, including SBIR contracts. No assurance can
be given as to the issuance of additional  patents or, if so issued, as to their
scope and validity.  Patents granted may not provide meaningful  protection from
competitors.  Even if a competitor's  products were to infringe patents owned by
the  Company,  it would be costly for the  Company  to enforce  its rights in an
infringement  action  and  would  divert  funds  and  other  resources  from the
Company's operations.  Furthermore, no assurance can be given that the Company's
products  or  processes  will not  infringe  any  patents or other  intellectual
property  rights of third  parties.  If the  Company's  products or processes do
infringe the rights of third parties, no assurance can be given that the Company
can  obtain a  license  from the  intellectual  property  owner on  commercially
reasonable terms or at all.


                                       -9-


         The Company relies on trade secrets that it seeks to protect,  in part,
through confidentiality agreements with employees, consultants and its customers
and potential  customers.  No assurance can be given that these  agreements will
not be breached,  that the Company will have adequate remedies for any breach or
that  the  Company's  trade  secrets  will  not  otherwise  become  known  to or
independently  developed by  competitors.  As the Company intends to enforce its
patents,  trademarks and  copyrights  and protect its trade  secrets,  it may be
involved from time to time in litigation to determine the enforceability,  scope
and validity of these rights.  Any such  litigation  could result in substantial
cost to the Company and  diversion  of effort by the  Company's  management  and
technical personnel.

ATTRACTION AND RETENTION OF KEY PERSONNEL AND DEPENDENCE UPON FOUNDERS

         The success of the Company will depend, in large part, upon its ability
to attract,  recruit and retain highly qualified  scientists,  as well as highly
skilled and experienced management and technical personnel.  No assurance can be
given that the  Company  will be able to hire and  retain  such  personnel.  The
Company is dependent  in  particular  upon the services of Richard S. Post,  its
President,  and John M. Tarrh and Donald K. Smith,  its Senior Vice  Presidents,
all of whom are co-founders of the Company.  Although the Company  maintains key
person life  insurance of $2 million on its  President and $1 million on each of
its Senior Vice Presidents and is the sole  beneficiary of these  policies,  the
loss of any of their  services  would  have a  material  adverse  effect  on the
Company. In addition, the Company believes that its success will depend in large
part on its  ability to continue  to attract  and retain  qualified  management,
scientific and marketing  personnel.  Competition for such personnel is intense,
and no assurance  can be given that the  personnel  the Company may need will be
available in the future.

DEPENDENCE UPON FOREIGN SALES AND FOREIGN SUPPLIERS

         During  Fiscal  1994  and  Fiscal  1995,  sales  to  foreign  customers
accounted  for  approximately  14.4% and 15.1%,  respectively,  of the Company's
total revenue. In addition,  the Company relies on foreign suppliers for certain
components.  The Company is subject to risks  associated with foreign  customers
and suppliers in general, including political instability,  embargoes,  shipping
delays,  custom duties,  import and export quotas and other trade  restrictions,
all of which could have a material  adverse effect on the Company's  operations,
or could have a significant  adverse impact on the Company's  ability to deliver
its  products on a  competitive  and timely  basis.  The Company may  experience
difficulties  in collecting  accounts  receivable  and in obtaining or enforcing
judgments  with respect to  receivables  outside the U.S. The Company's  foreign
sales are typically made in U.S. dollars. A strengthening in the dollar relative
to the  currencies  of those  countries  where the Company does  business  would
increase  the  prices of its  products  as stated in those  currencies,  and may
adversely  affect  the  Company's  sales in those  countries.  To the extent the
Company  lowers  its  prices  to  reflect  a  change  in  exchange  rates,   the
profitability  of the  Company's  business  in those  markets  may be  adversely
affected. In the past, there have been significant  fluctuations in the exchange
rates  between the dollar and the  currencies  in those  countries  in which the
Company does business.

                                      -10-



POTENTIAL DILUTIVE EFFECT OF WARRANTS AND OPTIONS

   
         In  addition  to  the  IPO  Warrants,  Representative's  Warrants,  the
Representative's  IPO Warrants  issuable upon  exercise of the  Representative's
Warrants  and  Investor  Warrants  referred  to herein,  the Company has options
outstanding  to purchase  490,980  shares of Common Stock at a weighted  average
exercise price of $11.00 per share. Holders of Warrants and options may be given
an  opportunity  to benefit from a rise in the market price of the Common Stock.
So long as any of these Warrants and options remain outstanding,  the terms upon
which the Company could obtain additional capital may be adversely affected. The
holders of these Warrants and options can be expected to exercise them at a time
when the market price of the Common Stock is in excess of the exercise  price of
the Warrants or options,  and such  exercise and the  subsequent  sale of Common
Stock could  reduce the market price for the Common Stock and result in dilution
to the then outstanding shares of Common Stock.

SIGNIFICANT INFLUENCE BY MANAGEMENT

         Certain of the  Company's  executive  officers and  directors and their
affiliates control the vote of approximately  23.8% of the outstanding shares of
Common Stock prior to the exercise of any outstanding options and warrants. As a
result,  such  persons  may be  able  to  significantly  influence  all  matters
requiring approval by the stockholders of the Company, including the election of
directors.
    

NO ACTIVE PUBLIC MARKET;  ARBITRARY  DETERMINATION OF EXERCISE PRICES;  POSSIBLE
VOLATILITY OF TRADING PRICES FOR COMMON STOCK

   
         Although the Common Stock and IPO Warrants are quoted on NASDAQ/NMS, no
assurance can be given that an active public market in such  securities  will be
sustained.  The  exercise  price of each of the IPO  Warrants,  Representative's
Warrants,  and Representative's IPO Warrants,  and of the Investor Warrants, was
arbitrarily   determined   by   negotiation   between   the   Company   and  the
Representative,  and the investors in the Private Placement,  respectively. Such
exercise  prices  do not  necessarily  bear any  relationship  to the  Company's
assets,  book value,  total revenue or other established  criteria of value, and
should not be considered indicative of the actual value of the Common Stock. The
trading  prices of the Common  Stock  could be subject to wide  fluctuations  in
response to the Company's  operating  results,  announcements  by the Company or
others of developments affecting the Company or its competitors or customers and
other events or factors.  In addition,  the stock market has experienced extreme
price and volume fluctuations in recent years, particularly in the securities of
smaller technology  companies.  These fluctuations have had a substantial effect
on the market  prices  for many  companies,  often  unrelated  to the  operating
performances  of the specific  companies,  and similar  events in the future may
adversely affect the market prices of the Common Stock.
    



                                      -11-



ANTI-TAKEOVER  MEASURES;  POSSIBLE  ANTI-TAKEOVER  EFFECTS  OF  CERTAIN  CHARTER
PROVISIONS; POSSIBLE ISSUANCE OF PREFERRED STOCK

         The  Company,  as a Delaware  corporation,  is  subject to the  General
Corporation   Law  of  the  State  of  Delaware,   including   Section  203,  an
anti-takeover law enacted in 1988. In general,  the law restricts the ability of
a public Delaware corporation from engaging in a "business  combination" with an
"interested  stockholder"  for a period  of three  years  after  the date of the
transaction in which the person became an interested  stockholder.  As a result,
potential  acquirors of the Company may be discouraged from attempting to effect
an acquisition transaction with the Company,  thereby possibly depriving holders
of the  Company's  securities  of  certain  opportunities  to sell or  otherwise
dispose of such securities at above-market prices pursuant to such transactions.
As a result of the  application  of Section  203 and certain  provisions  in the
Company's  Certificate  of  Incorporation  and  By-laws,  as amended,  potential
acquirors  of the  Company may find it more  difficult  or be  discouraged  from
attempting  to effect  an  acquisition  transaction  with the  Company,  thereby
possibly depriving holders of the Company's securities of certain  opportunities
to sell or otherwise dispose of such securities at above-market  prices pursuant
to such transactions.

         The Company is authorized to issue up to 1,000,000  shares of Preferred
Stock,  $.01 par value per share.  The  issuance  of any  Preferred  Stock could
affect the rights of the  holders of Common  Stock,  and  therefore,  reduce the
value of the Common Stock.  In  particular,  specific  rights  granted to future
holders of Preferred  Stock could be used to restrict the  Company's  ability to
merge with or sell its assets to a third party,  thereby  preserving  control of
the  Company  by  present  owners and  preventing  holders of Common  Stock from
realizing a premium on their shares and may adversely affect the voting power of
holders of the Common Stock.

SHARES ELIGIBLE FOR FUTURE SALE; REGISTRATION RIGHTS

   
         As of May 1, 1996 the  Company  had  4,431,195  shares of Common  Stock
outstanding, of which 3,075,787 shares are freely tradeable and 1,101,703 shares
which are owned by certain of the Company's executive officers and directors are
currently eligible for sale under Rule 144 ("Rule 144") of the Securities Act of
1933, as amended (the  "Securities  Act").  The 1,101,703 shares of Common Stock
owned by certain of the Company's  executive  officers and directors are subject
to the volume trading limitations under Rule 144.
    

         Ordinarily,  under Rule 144, a person holding restricted securities for
a period of two years  may,  every  three  months,  sell in  ordinary  brokerage
transactions or in transactions  directly with a market maker an amount equal to
the greater of one percent of the Company's then outstanding Common Stock or the
average weekly trading volume during the four calendar weeks prior to such sale.
Rule 144 also  permits  sales by a person who is not an affiliate of the Company
and who has satisfied a three-year  holding  period to sell without any quantity
limitation. Future sales under Rule 144 or Rule 701 may have a depressive effect
on the market price of the Common Stock should a public market  develop for such
stock.


                                      -12-



   
         The Company has reserved an aggregate of 716,279 shares of Common Stock
for issuance to employees,  officers,  directors and consultants pursuant to its
1987 Stock  Option Plan,  1993 Stock  Option Plan and 1994 Formula  Stock Option
Plan (the  "Plans").  To date,  options to  purchase  789,667  shares  have been
granted under the Plans,  of which 159,630 have been  exercised and 139,237 have
been cancelled. The Company has also reserved for issuance (i) 977,500 shares of
Common Stock  underlying  the IPO Warrants;  (ii) 255,000 shares of Common Stock
underlying the  Representative's  Warrants and the Representative's IPO Warrants
underlying  the  Representative's  Warrants;  and (iii) 34,126  shares of Common
Stock  underlying  the Investor  Warrants.  All shares  underlying the Company's
Plans are registered and, upon exercise,  are freely tradeable subject to volume
trading  limitations  under Rule 144. The existence of  outstanding  options and
Warrants may affect the price at which the  Company's  Common Stock may be sold.
In addition, the exercise of any such options or Warrants may further dilute the
net tangible book value of the Common Stock, and the holders of such options and
Warrants may exercise them at a time when the Company would otherwise be able to
obtain additional equity capital on terms more favorable to the Company.
    

LIMITATION ON OFFICERS' AND DIRECTORS' LIABILITIES UNDER DELAWARE LAW.

         Pursuant to the Company's Certificate of Incorporation,  as amended, as
authorized  under  applicable  Delaware  law,  directors  of the Company are not
liable for monetary  damages for breach of fiduciary duty,  except in connection
with a breach of the duty of loyalty, for acts or omissions not in good faith or
which involve intentional misconduct or a knowing violation of law, for dividend
payments or stock repurchases  illegal under Delaware law or for any transaction
in which a director has derived an improper personal benefit.  In addition,  the
Company's  bylaws  provide  that the Company  must  indemnify  its  officers and
directors  to the fullest  extent  permitted  by Delaware  law for all  expenses
incurred in the  settlement  of any actions  against such persons in  connection
with their having served as officers or directors of the Company.

POSSIBLE RESTRICTIONS ON MARKET MAKING ACTIVITIES IN THE COMPANY'S SECURITIES.

   
         The    Representative,    Josephthal,    Lyon   &   Ross   Incorporated
("Josephthal"), currently makes a market in the Company's securities. Rule 10b-6
under  the  Exchange  Act,  will  prohibit   Josephthal  from  engaging  in  any
market-making  activities with regard to the Company's securities for the period
from nine  business  days (or such  other  applicable  period as Rule  10b-6 may
provide) prior to any solicitation by Josephthal of the exercise of IPO Warrants
until  the  later  of the  termination  of  such  solicitation  activity  or the
termination  (by waiver or otherwise) of any right that  Josephthal  may have to
receive a fee for the exercise of IPO Warrants following such solicitation. As a
result,  Josephthal  may be  unable  to  provide  a  market  for  the  Company's
securities  during certain periods while the IPO Warrants are  exercisable.  Any
temporary  cessation  of such  market-making  activities  could  have an adverse
effect on the market  prices of the  Company's  securities.  In addition,  under
applicable  rules and regulations  under the Exchange Act, any person engaged in
the distribution of the Selling Securityholder securities may not simultaneously
engage in market making activities with respect to any securities of the Company
for a period of at least two (and  possibly  nine)  business  days  prior to the
commencement  of such  distribution.  Accordingly,  in the event  such a firm is
engaged in a distribution of the Selling  Securityholder  securities,  such firm
will  not be  able to make a  market  in the  Company's  securities  during  the
applicable restrictive period. Any temporary cessation of such



                                      -13-


market making activities could have an adverse effect on the market price of the
Company's securities.
    

CURRENT PROSPECTUS AND STATE REGISTRATION REQUIRED TO EXERCISE WARRANTS

   
         Holders of the Warrants will not be able to exercise them unless at the
time of exercise a current  prospectus  under the Securities  Act,  covering the
shares of Common Stock  issuable  upon exercise of the Warrants is effective and
such  shares have been  qualified  or are exempt  from  qualification  under the
applicable  securities  or "blue  sky" laws of the  states in which the  various
holders of the Warrants then reside.  Although the Company has undertaken to use
reasonable  efforts  to  maintain  the  effectiveness  of a  current  prospectus
covering the Common Stock  underlying  the  Warrants,  no assurance can be given
that the Company will be able to do so. The value of the Warrants may be greatly
reduced if a current  prospectus  covering  the Common Stock  issuable  upon the
exercise of the  Warrants is not kept  effective  or if such Common Stock is not
qualified or exempt from qualification in the states in which the holders of the
Warrants then reside.
    

NO DIVIDENDS

   
         The  Company  has not paid  dividends  to its  stockholders  since  its
inception  and does not plan to pay  dividends in the  foreseeable  future.  The
Company's  current  credit  and term loan  facility  arrangements  restrict  the
Company's  ability to declare cash  dividends  without the bank's prior  written
consent.  The Company intends to reinvest  earnings,  if any, in the development
and  expansion of its  business.  Any  declaration  of dividends  will be at the
election of the Board of Directors  and will depend upon the  earnings,  capital
requirements and financial position of the Company, general economic conditions,
bank lending requirements, and other pertinent factors.
    



                                      -14-


                                 USE OF PROCEEDS

   
         The Company would receive approximately  $18,240,000 in net proceeds if
all  of  the  IPO  Warrants,  Representative's  Warrants,  Representative's  IPO
Warrants and Investor Warrants were exercised.  See "Plan of Distribution."  The
Company  currently  intends  to use the net  proceeds  from  such  exercises  to
purchase inventory, finance account receivables,  fund research and development,
expand facilities, fund acquisitions,  and for other working capital and general
corporate purposes.  Depending on the Company's circumstances at the time any or
all of the net proceeds from such  exercises  become  available,  if at all, the
Company  reserves the right to use such net  proceeds  for  purposes  other than
those set forth above.
    

                             SELLING SECURITYHOLDERS

   
         The shares of Common Stock and  Representative's IPO Warrants are being
registered  to permit the  issuance by the Company of such  securities  upon the
exercise of warrants  that were issued in the IPO and in the Private  Placement.
Such securities are being registered at the expense of the Company,  pursuant to
the terms of the underwriting  and Private  Placement  agreements,  exclusive of
fees  and   expenses  of  the  Selling   Securityholders'   attorneys  or  other
representatives and selling or brokerage  commissions,  if any, as the result of
the subsequent resale of such securities.  The period of sale of such securities
by the Company may occur over an extended period of time. Many of the holders of
the  Representative's  Warrants  and  Representative's  IPO  Warrants  served as
underwriters in the Company's IPO in November 1993.

         Although the shares of Common Stock and  Representative's  IPO Warrants
covered by this Prospectus have not been  specifically  registered for resale by
the Selling  Securityholders,  once  registered such securities may be resold by
the Selling Securityholders and/or their registered representatives from time to
time  at  prices  to be  determined  at the  time  of  such  sale.  The  Selling
Securityholders  are not  restricted as to the price or prices at which they may
resell their  securities  and sales of such  securities  at less than the market
price  may  depress  the  market  price of the  Company's  Common  Stock and IPO
Warrants.  It is  anticipated  that the resale of the  securities  being offered
hereby  when  made,  will be made  through  customary  channels  either  through
broker-dealers   acting  as  agents  or  brokers  for  the  seller,  or  through
broker-dealers  acting as  principals,  who may then  resell  the  shares in the
over-the-counter  market, or at private sales in the over-the-counter  market or
otherwise,  at negotiated prices related to prevailing market prices at the time
of the sales,  or by a combination of such methods.  Thus, the period for resale
of such  securities  by the Selling  Securityholders  may occur over an extended
period of time.
    



                                      -15-


   
         The  following  table  sets  forth,  as of May 1,  1996,  the number of
securities  beneficially  owned prior to the Offering,  the number of securities
offered  hereby,  and the  number of  securities  beneficially  owned  after the
Offering  (assuming sale of all securities  being offered hereby) by the Selling
Securityholders.

<TABLE>
<CAPTION>

                                           Securities                            Securities
                         Material          Owned                                 Beneficially
                         Relationship      Beneficially      Securities          Owned After        Percentage
Selling                  with the          Prior to          Being               Completion of      After
Securityholder(1)        Company           Offering          Offered             Offering           Offering
- -----------------        -------           --------          -------             --------           --------
<S>                          <C>           <C>               <C>                        <C>           <C>          
IPO Warrant Holders          (1)           977,500 Shares    977,000 Shares           0                *

Josephthal Lyon              (2)           215,377 Shares    215,377 Shares           0                *
  & Ross Incorporated                      170,000 Rep.      170,000 Rep.             0                *
                                             IPO Warrants      IPO Warrants

Investors                    (3)           34,126 Shares     34,126 Shares            0                *

</TABLE>
____________
* Less than one percent.


(1)      The Holders own the redeemable warrants (the "IPO Warrants") which were
         issued in the Company's  initial public  offering in November 1993 (the
         "IPO").  Two IPO  Warrants  entitle the Holder to purchase one share of
         Common Stock at an exercise price of $15.05 per share.

(2)      Josephthal Lyon & Ross Incorporated  ("JLR") was the  representative of
         the  underwriters in the Company's IPO.  Certain of these warrants have
         subsequently been transferred by JLR to its employees and other members
         of the underwriting group which participated in the Company's IPO.

(3)      The  Investors  purchased  warrants  from the Company in the  Company's
         private  placement  completed in September 1992. Each warrant  entitles
         the Investor to purchase one share of Common Stock at an exercise price
         of $9.60 per share.

    




                                      -16-



                              PLAN OF DISTRIBUTION

   
         The  shares  of  Common  Stock  and IPO  Warrants  covered  hereby  and
underlying the Warrants may be offered and sold from time to time after exercise
of such  Warrants by their  respective  holders.  To exercise an IPO Warrant the
holder must pay the exercise price of $15.05 to the Company and transfer two IPO
Warrants to the Company in exchange for one share of Common  Stock.  To exercise
the  Representative's  Warrants,  the  holder  must  pay the  exercise  price of
$15.5875  per share of Common Stock and $.145 per  Representative's  IPO Warrant
underlying  such  Representative's  Warrant,  and transfer one  Representative's
Warrant  to the  Company  in  exchange  for one  share of  Common  Stock and one
Representative's  IPO Warrant.  The  Representative's IPO Warrants issuable upon
exercise of the Representative's Warrants are then exercisable on the same terms
as the IPO Warrants  described  above.  To exercise the Investor  Warrants,  the
Holder must pay the  exercise  price of $9.60 to the Company  and  transfer  one
Investor Warrant to the Company in exchange for one share of Common Stock.

         The shares of Common Stock and Representative's IPO Warrants covered by
this Prospectus and issued by the Company may be subsequently offered and resold
from  time to time  by the  Selling  Securityholders,  or by  pledgees,  donees,
transferees  or other  successors in interest,  in one or more  transactions  on
NASDAQ/NMS,  or  otherwise at prices and at terms then  prevailing  or at prices
related to the then current  market price,  or in negotiated  transactions.  The
Selling  Securityholders  will  act  independently  of  the  Company  in  making
decisions  with respect to such offers and  resales.  The shares of Common Stock
and Representative's IPO Warrants may be resold by one or more of the following:
(a) a block trade in which the broker or dealer so engaged  will attempt to sell
the shares of Common  Stock or  Representative's  IPO  Warrants as agent but may
position  and  resell a portion  of the block as  principal  to  facilitate  the
transaction; (b) purchases by a broker or dealer as principal and resale by such
broker or dealer for its account pursuant to this  prospectus;  and (c) ordinary
brokerage transactions and transactions in which the broker solicits purchasers.
Thus,  the  period  of   distribution   of  such  shares  of  Common  Stock  and
Representative's  IPO  Warrants may occur over an extended  period of time.  The
Company  is paying  all of the other  expenses  of  registering  the  securities
offered  hereby  under the  Securities  Act  estimated to be $17,000 for filing,
legal,  accounting  and  miscellaneous  fees and  expenses,  and has  agreed  to
indemnify the Selling  Securityholders  against certain  liabilities,  including
liabilities under the Securities Act. In effecting sales, broker-dealers engaged
by  the  Selling   Securityholders  may  arrange  for  other  broker-dealers  to
participate.  Usual and customary or specifically  negotiated  brokerage fees or
commissions may be paid by the Selling  Securityholders  in connection with such
sales.  The Company will not receive any  proceeds  from any sales of the Common
Stock and IPO  Warrants by the  Selling  Securityholders,  but will  receive the
proceeds generated upon exercise of any of the Warrants.
    

         In  offering  the  securities,  the  Selling  Securityholders  and  any
broker-dealers and any other participating  broker-dealers who execute sales for
the  Selling  Securityholders  may be deemed  to be  "underwriters"  within  the
meaning of the  Securities  Act in connection  with such sales,  and any profits
realized  by  the  Selling   Securityholders   and  the   compensation  of  such
broker-dealer  may be deemed to be underwriting  discounts and  commissions.  In
addition, any shares covered by this Prospectus

                                      -17-



which qualify for sale  pursuant to Rule 144 or Rule 701 or any other  exemption
may be sold  under  Rule  144 or Rule 701 or any  other  exemption  rather  than
pursuant to this Prospectus.

         The Company has  advised the Selling  Securityholders  that during such
time as they may be engaged in a distribution of securities included herein they
are  required to comply with Rules  10b-6 and 10b-7 under the  Exchange  Act (as
those Rules are described in more detail  below) and, in  connection  therewith,
that they may not  engage in any  stabilization  activity,  except as  permitted
under the Exchange Act, are required to furnish each broker-dealer through which
Common  Stock and IPO  Warrants  included  herein may be offered  copies of this
Prospectus,  and may not bid for or purchase  any  securities  of the Company or
attempt to induce any person to  purchase  any  securities  except as  permitted
under the Exchange Act.

         Rule 10b-6 under the Exchange Act prohibits,  with certain  exceptions,
participants in a distribution from bidding for or purchasing, for an account in
which the participant has a beneficial interest,  any of the securities that are
the subject of the  distribution.  Rule 10b-7 governs bids and purchases made in
order to stabilize the price of a security in connection  with a distribution of
the security.

                                 TRANSFER AGENT

         The transfer  agent for the Company's  Common Stock and IPO Warrants is
Continental  Stock Transfer and Trust Company of 2 Broadway,  New York, New York
10004.

                                  LEGAL MATTERS

   
         Certain legal matters  relating to the Common Stock offered hereby will
be passed upon for the Company by O'Connor, Broude & Aronson, 950 Winter Street,
Waltham,  Massachusetts 02154. Certain attorneys in the firm of O'Connor, Broude
& Aronson own an  aggregate of 1,181  shares of the  Company's  Common Stock and
2,600 Warrants to purchase an aggregate of 1,300 shares of Common Stock.
    

                                     EXPERTS

         The consolidated  financial  statements of the Company appearing in the
Company's  Annual  Report on Form 10-K for the year ended July 1, 1995 have been
audited by KPMG Peat Marwick LLP,  independent  auditors,  as set forth in their
report  thereon  included  therein and  incorporated  herein by reference.  Such
consolidated  financial  statements  are  incorporated  herein by  reference  in
reliance  upon such report  given upon the  authority of such firm as experts in
accounting and auditing.



                                      -18-


                                 INDEMNIFICATION

         Insofar as indemnification for liabilities arising under the Securities
Act may be permitted to  directors,  officers,  and  controlling  persons of the
Company pursuant to the foregoing provisions, or otherwise, the Company has been
advised  that in the opinion of the  Securities  and  Exchange  Commission  such
indemnification  is against public policy as expressed in the Securities Act and
is, therefore, unenforceable.

         Delaware  General   Corporation  Law,  Section  102(b)(7),   enables  a
corporation in its original certificate of incorporation or an amendment thereto
validly  approved by  stockholders  to eliminate or limit personal  liability of
members of its Board of Directors for violations of a director's  fiduciary duty
of care. The elimination or limitation, however, shall not apply where there has
been a breach of the duty of loyalty,  failure to act in good faith, engaging in
intentional  misconduct  or  knowingly  violating  a law,  paying a dividend  or
approving a stock  repurchase  which is deemed  illegal or obtaining an improper
personal benefit.  Article 8 of the Company's  Certificate of Incorporation,  as
amended, provides the following:

                  A director of this Corporation  shall not be personally liable
         to the Corporation or its  stockholders for monetary damages for breach
         of  fiduciary  duty as a  director,  except for  liability  (i) for any
         breach of the  director's  duty of  loyalty to the  Corporation  or its
         stockholders,  (ii) for acts or  omissions  not in good  faith or which
         involve  intentional  misconduct or a knowing  violation of law,  (iii)
         under Section 174 of the Delaware General  Corporation Law, or (iv) for
         any transaction  from which the Director  derived an improper  personal
         benefit.

         Article 12 of the Company's  Certificate of Incorporation,  as amended,
         provides the following:

         A.       Right to Indemnification.

                  Each person who was or is made a party or is  threatened to be
         made a party  to or is  involved  in any  action,  suit or  proceeding,
         whether    civil,    criminal,    administrative    or    investigative
         ("proceeding"),  by reason of the fact that he or she,  or a person for
         whom he or she is the legal  representative,  is or was a  director  or
         officer of the  Corporation  or is or was serving at the request of the
         Corporation  as a  director,  officer,  employee  or agent  of  another
         corporation  or  of  a  partnership,  joint  venture,  trust  or  other
         enterprise,  including  service with respect to employee benefit plans,
         whether the basis of such  proceeding is alleged  action in an official
         capacity  as a  director,  officer,  employee  or agent or in any other
         capacity while serving as a director, officer, employee or agent, shall
         be  indemnified  and held  harmless by the  Corporation  to the fullest
         extent  authorized  by the  General  Corporation  Law of the  State  of
         Delaware,  as the same now exists or may  hereafter be amended (but, in
         the case of any such amendment,  only to the extent that such amendment
         permits the Corporation to provide broader  indemnification rights than
         said law permitted the Corporation to provide prior to such amendment),
         against all expenses, liability and loss (including attorney's fees, 
         judgments,

                                      -19-

<PAGE>



         fines,  liability  under  federal tax laws or the  Employee  Retirement
         Income Security Act of 1974, as amended from time to time, with respect
         to  employee  benefit  plans,  and  amounts  to be paid in  settlement)
         reasonably incurred or suffered by such person in connection therewith;
         provided, however, that the Corporation shall indemnify any such person
         seeking  indemnity in  connection  with a proceeding  (or part thereof)
         initiated by such person only if such  proceeding (or part thereof) was
         authorized by the Board of Directors of the  Corporation.  The right to
         indemnification  referred  to in  the  preceding  sentence  shall  be a
         contract  right  and  shall  include  the  right  to be  paid,  by  the
         Corporation,  expenses  incurred in defending any such  proceeding,  in
         advance of its final disposition;  provided,  however, that the payment
         of such  expenses  incurred  by a  director  or  officer  in his or her
         capacity  as a director  or officer  (and not in any other  capacity in
         which  service was or is  rendered  by such person  while a director or
         officer, including, without limitation, service to any employee benefit
         plan) in advance of the final disposition of such proceeding,  shall be
         made only upon delivery to the Corporation of an undertaking,  by or on
         behalf of such director or officer, to repay all amounts so advanced if
         it should be determined ultimately that such director or officer is not
         entitled to be indemnified under this Article 12 or otherwise.

         B.       Right of Claimant to Bring Suit.

                  If a claim under Part A of this Article 12 is not paid in full
         by the  Corporation  within  ninety days after a written claim has been
         received by the  Corporation,  the claimant may at any time  thereafter
         bring suit against the  Corporation to recover the unpaid amount of the
         claim and, if  successful  in whole or in part,  the claimant  shall be
         entitled to be paid also the  expense of  prosecuting  such  claim.  It
         shall be a defense to any such action (other than an action  brought to
         enforce a claim for expenses  incurred in defending  any  proceeding in
         advance of its final  disposition  where the required  undertaking  has
         been  tendered to the  Corporation)  that the  Claimant has not met the
         standards  of  conduct  which  make it  permissible  under the  General
         Corporation  Law of the  State  of  Delaware  for  the  Corporation  to
         indemnify  the  claimant  for the  amount  claimed,  but the  burden of
         providing such defense shall be on the Corporation. Neither the failure
         of the Corporation (including its Board of Directors, independent legal
         counsel, or its stockholders) to have made a determination prior to the
         commencement  of such action that  indemnification  of the  claimant is
         proper in the  circumstance  because  he or she has met the  applicable
         standard of conduct set forth in said law, nor an actual  determination
         by the Corporation (including its Board of Directors, independent legal
         counsel,  or its  stockholders)  that  the  claimant  had not met  such
         applicable  standard  of  conduct,  shall be a defense to the action or
         create a  presumption  that  the  claimant  had not met the  applicable
         standard of conduct.

         C.       Non-Exclusivity of Rights.

                  The  rights  conferred  on any person by Parts A and B of this
         Article 12 shall not be  exclusive of any other right which such person
         may have or hereafter acquire under any

                                      -20-



         statute,  provision  of  this  Certificate  of  Incorporation,  by-law,
         agreement,   vote  of  stockholders  or   disinterested   directors  or
         otherwise.

         D.       Insurance.

                  The Corporation may purchase and maintain  insurance on behalf
         of any person who is or was a director,  officer,  employee or agent of
         the Corporation, or is or was serving at the request of the Corporation
         as a  director,  officer,  employee  or agent of  another  corporation,
         partnership,  joint venture,  trust or other enterprise,  including any
         employee benefit plan,  against any liability asserted against any such
         person and incurred by such person in any such capacity, or arising out
         of such person's status as such,  whether or not the Corporation  would
         have the power to indemnify such person  against such  liability  under
         the General Corporation Law of the State of Delaware.

         Delaware  General  Corporation  Law, Section 145, permits a corporation
organized under Delaware law to indemnify directors and officers with respect to
any matter in which the director or officer  acted in good faith and in a manner
he reasonably  believed to be not opposed to the best  interests of the Company,
and, with respect to any criminal  action,  had reasonable  cause to believe his
conduct  was  lawful.  Article  VII of the Bylaws of the  Company,  as  amended,
provides as follows:

                  Reference  is made to  Section  145  and  any  other  relevant
         provisions  of the General  Corporation  Law of the State of  Delaware.
         Particular  reference  is made to the  class  of  persons,  hereinafter
         called  "Indemnitees," who may be indemnified by a Delaware corporation
         pursuant to the provisions of such Section 145, namely,  any person, or
         the heirs, executors, or administrators of such person, who was or is a
         party or is threatened to be made a party to any threatened, pending or
         completed  action,  suit,  or  proceeding,   whether  civil,  criminal,
         administrative,  or  investigative,  by  reason  of the fact  that such
         person  is or was a  director,  officer,  employee,  or  agent  of such
         corporation or is or was serving at the request of such  corporation as
         a director,  officer,  employee,  or agent of such corporation or is or
         was serving at the request of such corporation as a director,  officer,
         employee or agent of another corporation,  partnership,  joint venture,
         trust,  or other  enterprise.  The  Corporation  shall,  and is  hereby
         obligated to, indemnify the Indemnitees,  and each of them, in each and
         every  situation  where  the  Corporation  is  obligated  to make  such
         indemnification  pursuant to the aforesaid  statutory  provisions.  The
         Corporation shall indemnify the Indemnitees,  and each of them, in each
         and every situation where,  under the aforesaid  statutory  provisions,
         the  Corporation is not  obligated,  but is  nevertheless  permitted or
         empowered,  to make such  indemnification,  it being  understood  that,
         before  making  such  indemnification,  with  respect to any  situation
         covered under this sentence, (i) the Corporation shall promptly make or
         cause to be made, by any of the methods  referred to in Subsection  (d)
         of such Section  145, a  determination  as to whether  each  Indemnitee
         acted in good faith and in a manner he reasonably believed to be in, or
         not opposed to, the best interests of the Corporation, and, in the case
         of any criminal

                                      -21-



         action or  proceeding,  had no  reasonable  cause to  believe  that his
         conduct was unlawful,  and (ii) that no such  indemnification  shall be
         made unless it is determined that such  Indemnitee  acted in good faith
         and in a manner he reasonably believed to be in, or not opposed to, the
         best  interests  of the  Corporation,  and, in the case of any criminal
         action or  proceeding,  had no  reasonable  cause to  believe  that his
         conduct was unlawful.

                                      -22-







================================================================================


No dealer,  salesman or any other person has been  authorized in connection with
this Offering to give any information or to make any representations  other than
those contained in this  Prospectus  and, if given or made, such  information or
representations  must  not be  relied  upon as  having  been  authorized  by the
Company.  This Prospectus does not constitute an offer to sell or a solicitation
of an offer to buy any of the securities  offered hereby in any  jurisdiction in
which such offer or solicitation is not authorized or in which the person making
such offer or solicitation is not qualified to do so or to any person to whom it
is unlawful to make such an offer or solicitation.  Neither the delivery of this
Prospectus nor any sale made hereunder shall, under any circumstances, create an
implication that there has been no change in the circumstances of the Company or
the facts herein set forth since the date hereof.


                                   __________

                                TABLE OF CONTENTS
                                                                            PAGE
                                                                            ----

   
Available Information ........................................................2
Incorporation of Certain Information by Reference ............................3
Recent Developments ..........................................................4
The Company ..................................................................5
Risk Factors ................... .............................................7
Use of Proceeds ............... .............................................15
Selling Securityholders .....................................................15
Plan of Distribution ........ ...............................................17
Transfer Agent ..............................................................18
Legal Matters ...............................................................18
Experts .....................................................................18
Indemnification .............................................................19
    


                                   __________



================================================================================








================================================================================

   
                                1,266,626 SHARES
                                OF COMMON STOCK,
                          $.01 PAR VALUE PER SHARE, AND
                                170,000 WARRANTS
    





                      APPLIED SCIENCE AND TECHNOLOGY, INC.









                                   __________

                                   PROSPECTUS
                                   __________











   
                                     , 1996
    



================================================================================











                                     PART II

                     INFORMATION NOT REQUIRED IN PROSPECTUS

ITEM 14.  OTHER EXPENSES OF ISSUANCE AND DISTRIBUTION

         The  following is an  itemization  of all  expenses  (subject to future
contingencies)  incurred or expected to be incurred by the Company in connection
with the issuance and  distribution of the securities being offered hereby other
than underwriting  discounts and commissions  (items marked with an asterisk (*)
represent estimated expenses):

   
Registration Fee (SEC)..........................................     $    431.59
Registration Fee (NASD).........................................     $    625.16
Transfer Agent's Fees*..........................................     $    500.00
Printing Costs*.................................................     $  1,000.00
Legal Fees*.....................................................     $ 13,000.00
Accounting Fees*................................................     $  1,200.00
Miscellaneous*..................................................     $    243.25
                                                                     -----------
    TOTAL*......................................................     $ 17,000.00
                                                                     ===========
    
                                                                
ITEM 15.  INDEMNIFICATION OF OFFICERS AND DIRECTORS

         See "Indemnification" contained in Part I hereof, which is incorporated
by reference.

ITEM 16.   EXHIBITS

         (a) The following is a list of exhibits  filed herewith as part of this
Registration Statement:

Exhibit
  No.                                                Title
 ----                                                -----

  5       Opinion letter of O'Connor,  Broude & Aronson as to legality of shares
          being registered.

 23a      Consent of KPMG Peat Marwick LLP.

 23b      Consent of O'Connor,  Broude & Aronson  (contained in Opinion filed as
          Exhibit 5).



                                      II-1


         (b) The following  exhibits  were filed as part of the  Company's  Form
SB-2  Registration   Statement  (No.   33-69098-B)  declared  effective  by  the
Commission on November 10, 1993 and are incorporated herein by reference:

Exhibit
  No.                                      Title
 ----                                      -----

  3a      Certificate of Incorporation, as amended, dated July 1, 1992.

  3b      Certificate  of  Amendment  of  Certificate  of  Incorporation,  dated
          September 1, 1993.

  3c      Bylaws, as amended.

  4a      Specimen Common Stock Certificate.

  4b      Form of Warrant Agreement, including Form of Warrant Certificate.

  4c      Form  of  Representative's   Warrant  Agreement,   including  Form  of
          Representative's Warrant Certificate.

ITEM 17. UNDERTAKINGS

         The undersigned Registrant hereby undertakes:

   
                  (1) To file,  during any  period in which  offers or sales are
being made, a post-effective amendment to this registration statement to include
any material information with respect to the plan of distribution not previously
disclosed  in  the  registration  statement  or  any  material  change  to  such
information in the registration statement.
    

                  (2) For the purpose of  determining  any  liability  under the
Securities  Act, to treat each  post-effective  amendment as a new  registration
statement of the securities offered,  and the offering of the securities at that
time as the initial bona fide offering.

                  (3) To remove from  registration by means of a  post-effective
amendment  any of the  securities  being  registered  that remain  unsold at the
termination of the Offering.

         The  undersigned  registrant  hereby  undertakes  that, for purposes of
determining  any  liability  under  the  Securities  Act,  each  filing  of  the
registrant's  annual  report  pursuant to Section 13(a) or 15(d) of the Exchange
Act (and,  where  applicable,  each filing of an employee  benefit plan's annual
report  pursuant to Section 15(d) of the Exchange Act) that is  incorporated  by
reference in the registration statement shall be deemed to be a new registration
statement relating to the  securitiesoffered  therein,  and the offering of such
securities  at that time shall be deemed to be the  initial  bona fide  offering
thereof.

                                      II-2


         Insofar as indemnification for liabilities arising under the Securities
Act may be permitted to  directors,  officers,  and  controlling  persons of the
Registrant pursuant to the foregoing  provisions,  or otherwise,  the Registrant
has been advised that in the opinion of the Securities  and Exchange  Commission
such indemnification is against public policy as expressed in the Securities Act
and is, therefore,  unenforceable. In the event that a claim for indemnification
against such  liabilities  (other than the payment by the Registrant of expenses
incurred or paid by a director, officer, or controlling person of the Registrant
in the  successful  defense of any action,  suit, or  proceeding) is asserted by
such director,  officer, or controlling person in connection with the securities
being registered,  the Registrant will, unless in the opinion of its counsel the
matter  has  been  settled  by  controlling  precedent,  submit  to a  court  of
appropriate  jurisdiction  the question  whether such  indemnification  by it is
against  public policy as expressed in the Act and will be governed by the final
adjudication of such issue.



                                      II-3



                                   SIGNATURES

   
         Pursuant to the requirements of the Securities Act of 1933, as amended,
the Registrant certifies that it has reasonable grounds to believe that it meets
all of the  requirements  for  filing  on  Form  S-3 and has  duly  caused  this
Amendment No. 1 to this Registration Statement to be signed on its behalf by the
undersigned,  thereunto duly authorized, in the City of Woburn,  Commonwealth of
Massachusetts, on May 8, 1996.
    

                                       APPLIED SCIENCE AND TECHNOLOGY, INC.


                                       By:/s/ Richard S. Post
                                          -------------------------------
                                          Richard S. Post
                                          President

   
         Pursuant to the requirements of the Securities Act of 1933, as amended,
this  Amendment  No. 1 to this  Registration  Statement  has been  signed by the
following persons in the capacities and on the dates indicated.

<TABLE>
<CAPTION>


Name                                    Capacity                                    Date
- ----                                    --------                                    ----
<S>                                     <C>                                         <C>    
/s/ Richard S. Post                     Chairman of the Board,                      May 8, 1996
- ----------------------                  Chief Executive Officer 
Richard S. Post                         and President (principal
                                        executive officer)      
                                        

/s/ John M. Tarrh                       Chief Financial Officer,                    May 8, 1996
- ----------------------                  Senior Vice President of
John M. Tarrh                           Finance and Director    
                                        (principal financial    
                                        and accounting officer) 
                                        

/s/ Donald K. Smith                     Senior Vice President of                    May 8, 1996
- ----------------------                  Advanced Technology
Donald K. Smith                         and Director       
                                        

/s/ Robert R. Anderson                  Director                                    May 8, 1996
- ----------------------
Robert R. Anderson

/s/ Michel de Beaumont                  Director                                    May 8, 1996
- ----------------------
Michel de Beaumont

/s/ John R. Bertucci                    Director                                    May 8, 1996
- ----------------------
John R. Bertucci

/s/ Hans Jochen-Kahl                    Director                                    May 8, 1996
- ----------------------
Hans Jochen-Kahl

</TABLE>
    
                                      II-4




                                  EXHIBIT INDEX


<TABLE>
<CAPTION>
                                                                            SEQUENTIALLY
 EXHIBIT                                                                   NUMBERED PAGE
   NO.                        TITLE                                            NUMBER
  ----                        -----                                            ------
<S>        <C>                                                             <C>

   5        Opinion letter of O'Connor, Broude &
            Aronson as to legality of shares being
            registered.

 23a        Consent of KPMG Peat Marwick LLP.

 23b        Consent of O'Connor, Broude & Aronson
            (contained in Opinion filed as Exhibit 5).

</TABLE>









                                                              May 9, 1996



Board of Directors
Applied Science and Technology, Inc.
35 Cabot Road
Woburn, Massachusetts 01801-1003

Ladies and Gentlemen:

         This firm has  represented  Applied  Science and  Technology,  Inc.,  a
Delaware corporation (hereinafter called the "Corporation"),  in connection with
the filing of the Registration Statement described below.

   
         In our capacity as counsel to the Corporation, we are familiar with the
Certificate of Incorporation, as amended, and the By-Laws of the Corporation. We
are also familiar with the corporate  proceedings  taken by the  Corporation  in
connection with the  preparation and filing of a Registration  Statement on Form
S-3 (the "Registration Statement") covering the registration of 1,266,626 shares
of common stock, $.01 par value per share (the "Common Stock").
    

         Based upon the foregoing, we are of the opinion that:

         1.       The  Corporation is duly organized and validly  existing under
                  the laws of the State of Delaware.

   
         2.       The  1,266,626  shares of Common Stock to be  registered  have
                  been  duly  authorized,  and,  when  issued  and  paid  for in
                  accordance  with their terms,  will be legally  issued,  fully
                  paid and non-assessable.
    



<PAGE>



Board of Directors
Applied Science and Technology, Inc.
May 8, 1996
Page 2


   
         This opinion is provided solely for the benefit of the addressee hereof
and is not to be  relied  upon by any  other  person  or  party,  without  prior
notification to, and the consent of, this firm. Nevertheless,  we hereby consent
to the use of this opinion and to all  references to our firm in or made part of
the Registration Statement and any amendments thereto.
    

                                                   Very truly yours,

                                                   O'CONNOR, BROUDE & ARONSON



                                                   By: /s/ Neil H. Aronson
                                                      ------------------------
                                                        Neil H. Aronson

NHA:EPG:anr

c:       Richard S. Post, Ph.D., President







                              ACCOUNTANT'S CONSENT

The Board of Directors
Applied Science and Technology, Inc.:


   
We  consent  to the use of our  report  dated  July 28,  1995,  relating  to the
consolidated financial statements of Applied Science and Technology, Inc., as of
December 31, 1995 and 1994 incorporated herein by reference and to the reference
to our firm under the heading "Experts" in the registration statement.
    



                                    /s/ KPMG Peat Marwick LLP


Boston, Massachusetts
May 8, 1996



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