APPLIED SCIENCE & TECHNOLOGY INC
SC 13D, 2000-10-11
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>   1
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549



                                  SCHEDULE 13D
                                 (RULE 13d-101)

                 INFORMATION TO BE INCLUDED IN STATEMENTS FILED
                    PURSUANT TO RULE 13D-1(a) AND AMENDMENTS
                     THERETO FILED PURSUANT TO RULE 13D-2(a)

                    UNDER THE SECURITIES EXCHANGE ACT OF 1934
                              (AMENDMENT NO. ____)(1)


                      Applied Science and Technology, Inc.

                                (Name of Issuer)


                     Common Stock, $0.01 par value per share

                         (Title of Class of Securities)

                                    038236105

                                 (CUSIP Number)

                                Ronald C. Weigner
                   Vice President and Chief Financial Officer
                              MKS Instruments, Inc.
                 Six Shattuck Road, Andover, Massachusetts 01810
                                 (978) 975-2350

                     (Name, Address and Telephone Number of
                    Person Authorized to Receive Notices and
                                 Communications)

                                October 2, 2000

             (Date of Event Which Requires Filing of This Statement)

         If the filing person has previously filed a statement on Schedule 13G
to report the acquisition which is the subject of this Schedule 13D, and is
filing this schedule because of Rule 13d-1(e), 13d-1(f) or 13d-1(g), check the
following box. [ ]

Note: Schedules filed in paper format shall include a signed original and five
copies of the schedule, including all exhibits. See Rule 13d-7(b) for other
parties to whom copies are to be sent.

         (1) The remainder of this cover page shall be filled out for a
reporting person's initial filing on this form with respect to the subject class
of securities, and for any subsequent amendment containing information which
would alter disclosures provided in a prior cover page.

         The information required on the remainder of this cover page shall not
be deemed to be "filed" for the purpose of Section 18 of the Securities Exchange
Act of 1934 ("Act") or otherwise subject to the liabilities of that section of
the Act but shall be subject to all other provisions of the Act (however, see
the Notes).

<PAGE>   2
CUSIP NO. 038236105                   13D                            PAGE 2 OF 8


--------------------------------------------------------------------------------
1       NAME OF REPORTING PERSON
        I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

        MKS Instruments, Inc.                                04-2277512
--------------------------------------------------------------------------------
2       CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                 (a)  []
        N/A      (b)  []

--------------------------------------------------------------------------------
3       SEC USE ONLY

--------------------------------------------------------------------------------
4       SOURCE OF FUNDS*

        OO
--------------------------------------------------------------------------------
5       CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT TO
        ITEMS 2(d) OR 2(e)                                         []

        N/A
--------------------------------------------------------------------------------
6       CITIZENSHIP OR PLACE OF ORGANIZATION

        Commonwealth of Massachusetts
--------------------------------------------------------------------------------
 NUMBER OF SHARES BENEFICIALLY OWNED BY   7      SOLE VOTING POWER
         EACH REPORTING PERSON
                  WITH                               52,500
--------------------------------------------------------------------------------
                                          8      SHARED VOTING POWER

                                                     854,523
--------------------------------------------------------------------------------
                                          9      SOLE DISPOSITIVE POWER

                                                     52,500
--------------------------------------------------------------------------------
                                          10     SHARED DISPOSITIVE POWER

                                                     N/A
--------------------------------------------------------------------------------
11      AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

        907,023
--------------------------------------------------------------------------------
12      CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*
        [ ]

        N/A
--------------------------------------------------------------------------------
13      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 11

        6.3%
--------------------------------------------------------------------------------
14      TYPE OF REPORTING PERSON*
        CO
--------------------------------------------------------------------------------
                      *SEE INSTRUCTIONS BEFORE FILLING OUT!
<PAGE>   3
CUSIP NO. 038236105                   13D                            PAGE 3 OF 8


         Neither the filing of this Schedule 13D nor any of its contents shall
be deemed to constitute an admission by MKS Instruments, Inc. that it is the
beneficial owner of any of the Common Stock referred to herein for purposes of
Section 13(d) of the Securities Exchange Act of 1934, as amended (the "Act"), or
for any other purpose, and such beneficial ownership is expressly disclaimed.

ITEM 1.  SECURITY AND ISSUER.

                  This statement on Schedule 13D relates to the common stock of
                  Applied Science and Technology, Inc., a Delaware corporation
                  ("ASTeX" or "Issuer"). The principal executive offices of
                  ASTeX are located at 90 Industrial Way, Wilmington,
                  Massachusetts 01887.

ITEM 2.  IDENTITY AND BACKGROUND.

                  The name of the corporation filing this statement is MKS
                  Instruments, Inc., a Massachusetts corporation ("MKS"). MKS's
                  principal business is to supply gas measurement, control and
                  analysis products used in semiconductor and other advanced
                  thin-film manufacturing processes. The address of the
                  principal executive offices of MKS is Six Shattuck Road,
                  Andover, Massachusetts 01810. Set forth on Schedule A is the
                  name, residence or business address, present principal
                  occupation or employment and the name, principal business and
                  address of any corporation or other organization in which such
                  employment is conducted and citizenship of each of MKS's
                  directors and executive officers, as of the date hereof.

                  Neither MKS nor, to MKS's best knowledge, any person named on
                  Schedule A hereto is required to disclose legal proceedings
                  pursuant to Items 2(d) or 2(e).



ITEM 3.  SOURCE AND AMOUNT OF FUNDS OR OTHER CONSIDERATION.

                  Pursuant to an Agreement and Plan of Merger, dated as of
                  October 2, 2000 (the "Merger Agreement"), among MKS, Mango
                  Subsidiary Corp., a Delaware corporation and a wholly owned
                  subsidiary of MKS ("Merger Sub"), and ASTeX and, subject to
                  the conditions set forth therein (including approval by
                  stockholders of ASTeX and MKS), Merger Sub will merge with and
                  into ASTeX and ASTeX will become a wholly owned subsidiary of
                  MKS (such events constituting the "Merger"). Once the Merger
                  is consummated, Merger Sub will cease to exist as a
                  corporation and all of the business, assets, liabilities and
                  obligations of Merger Sub will be merged into ASTeX with ASTeX
                  remaining as the surviving corporation (the "Surviving
                  Corporation"). As a result of the Merger, each outstanding
                  share of ASTeX Common Stock, other than shares owned by MKS,
                  will be converted into 0.7669 of a share (the "Exchange
                  Ratio") of MKS Common Stock, and each outstanding option to
                  purchase ASTeX Common Stock will be assumed by MKS. The
                  foregoing summary of the Merger is qualified in its entirety
                  by reference to the copy of the Merger Agreement included as
                  Exhibit 1 to this Schedule 13D and incorporated herein in its
                  entirety by this reference.

ITEM 4.  PURPOSE OF TRANSACTION.

                  (a)-(b) As described in Item 3 above, this statement is
                  related to the Merger of Merger Sub with and into ASTeX in a
                  statutory merger pursuant to the Delaware General Corporation
                  Law. At the effective time of the Merger, the separate
                  existence of Merger Sub will cease to exist and ASTeX will
                  continue as the Surviving Corporation and as a wholly owned
                  subsidiary of MKS. Holders of outstanding ASTeX Common Stock
                  will
<PAGE>   4
CUSIP NO. 038236105                   13D                            PAGE 4 OF 8


                  receive, in exchange for each share of ASTeX Common Stock held
                  by them, 0.7669 of a share of MKS Common Stock. MKS will
                  assume ASTeX's outstanding options.

                  As an inducement to MKS to enter into the Merger Agreement,
                  each of the individuals and the entities set forth on Schedule
                  B, each a stockholder of ASTeX (collectively, the
                  "Stockholders"), has executed a Stockholder Agreement, dated
                  as of October 2, 2000, with MKS (the "Stockholder Agreement"),
                  and, by doing so, has irrevocably appointed MKS as such
                  stockholder's lawful attorney and proxy. Such proxy gives MKS
                  the limited right to vote each of the 854,523 shares of ASTeX
                  Common Stock beneficially owned by the Stockholders with
                  respect to the adoption and approval of the Merger Agreement
                  and the Merger. The shared voting power with the Stockholders
                  relates to the same 854,523 shares of Issuer Common Stock (the
                  "Shares"). The foregoing summary of the Stockholder Agreement
                  is qualified in its entirety by reference to the copy of the
                  Stockholder Agreement included as Exhibit 2 to this Schedule
                  13D and incorporated herein in its entirety by reference.

                  In exercising its right to vote the Shares as lawful attorney
                  and proxy of the Stockholders, MKS (or any nominee of MKS)
                  will be limited, at every ASTeX stockholders meeting and every
                  written consent in lieu of such meeting, to vote the shares in
                  favor of approval of the Merger and the Merger Agreement. The
                  Stockholders may vote the Shares on all other matters. The
                  Stockholder Agreement terminates upon the earlier to occur of
                  (i) such date and time as the Merger shall become effective in
                  accordance with the terms and provisions of the Merger
                  Agreement or (ii) the date of termination of the Merger
                  Agreement.

                  (c) Not applicable.

                  (d) It is anticipated that, upon consummation of the Merger,
                  the directors of the Surviving Corporation shall be the
                  current directors of Merger Sub. It is anticipated that the
                  initial officers of the Surviving Corporation shall be the
                  officers of Merger Sub, until their respective successors are
                  duly elected or appointed and qualified.

                  (e) Other than as a result of the Merger described in
                      Item 3 above, not applicable.

                  (f) Not applicable.

                  (g) Upon consummation of the Merger, the Certificate of
                  Incorporation of the Merger Sub, as in effect immediately
                  prior to the Merger, shall be the Certificate of Incorporation
                  of the Surviving Corporation until thereafter amended as
                  provided by the Delaware Law and such Certificate of
                  Incorporation. Upon consummation of the Merger, the By-laws of
                  the Merger Sub, as in effect immediately prior to the Merger,
                  shall be the By-laws of the Surviving Corporation until
                  thereafter amended. In addition, the Merger Agreement may have
                  the effect of impeding the acquisition of control of Issuer by
                  any person other than MKS. ASTeX will pay MKS a termination
                  fee of $9,075,000 if ASTeX enters into an alternative
                  transaction in which any person other than MKS or its
                  affiliates acquires more than 20% of ASTeX's outstanding
                  shares.

                  (h)-(i) If the Merger is consummated as planned, the ASTeX
                  Common Stock will be deregistered under the Act and delisted
                  from the Nasdaq National Market.

                  (j) Other than as described above, MKS currently has no plan
                  or proposals which relate to, or may result in, any of the
                  matters listed in Items 4(a)-(j) of Schedule 13D (although MKS
                  reserves the right to develop such plans).

ITEM 5.  INTEREST IN SECURITIES OF THE ISSUER.
<PAGE>   5
CUSIP NO. 038236105                   13D                            PAGE 5 OF 8


                  (a)-(b) In addition to the 52,500 shares of common stock for
                  which MKS has sole voting power and sole dispositive power, as
                  a result of the Stockholder Agreement, MKS may be deemed to be
                  the beneficial owner of an additional 854,523 shares of Issuer
                  Common Stock. Such Issuer Common Stock constitutes
                  approximately 5.9% of the issued and outstanding shares of
                  Issuer Common Stock. Schedule B sets forth the applicable
                  information required by Item 2 with respect to each of the
                  Stockholders with whom the power to vote is shared.

                  (c)-(e) Not applicable.

ITEM 6. CONTRACTS, ARRANGEMENTS, UNDERSTANDINGS OR RELATIONSHIPS WITH RESPECT TO
SECURITIES OF THE ISSUER.

                  John R. Bertucci, the Chairman and Chief Executive Officer of
                  MKS, also serves as a director of ASTeX. Other than the Merger
                  Agreement and the Stockholder Agreement, to the best knowledge
                  of MKS, there are no other contracts, arrangements,
                  understandings or relationships (legal or otherwise) among the
                  persons or entities listed in Item 2 and between such person
                  or entity and any person or entity with respect to any
                  securities of ASTeX, including but not limited to transfer of
                  voting of any of the securities, finder's fees, joint
                  ventures, loan or option arrangements, puts or calls,
                  guarantees of profits, division of profits or loss, or the
                  giving or withholding of proxies.

ITEM 7.  MATERIAL TO BE FILED AS EXHIBITS.

                  The following documents are filed as exhibits:

                  1.       Agreement and Plan of Merger, dated as of October 2,
                           2000, by and among MKS, Merger Sub and ASTeX.

                  2.       Stockholder Agreement, dated as of October 2, 2000,
                           by and among MKS and each of the Stockholders.

<PAGE>   6
CUSIP NO. 038236105                   13D                            PAGE 6 OF 8


                                    SIGNATURE

         After reasonable inquiry and to the best of my knowledge and belief, I
hereby certify that the information set forth in this statement is true,
complete and correct.

DATED: October 11, 2000


                                              MKS Instruments, Inc.



                                              By: /s/ Ronald C. Weigner
                                                  ---------------------
                                                  Ronald C. Weigner

                                              Title: Vice President and Chief
                                                     Financial Officer
<PAGE>   7
CUSIP NO. 038236105                   13D                            PAGE 7 OF 8


                                   SCHEDULE A

<TABLE>
<CAPTION>

                   NAME                                                 BUSINESS ADDRESS
                   ----                                                 ----------------
-------------------------------------------------------------------------------------------------------------------
EXECUTIVE OFFICERS OF MKS
-------------------------------------------------------------------------------------------------------------------
<S>                                                      <C>
John R. Bertucci                                          Six Shattuck Road
Chairman of the Board of Directors and Chief Executive    Andover, MA 01810
Officer
-------------------------------------------------------------------------------------------------------------------
Peter R. Younger                                          Six Shattuck Road
President and Chief Operating Officer                     Andover, MA 01810
-------------------------------------------------------------------------------------------------------------------
Ronald C. Weigner                                         Six Shattuck Road
Vice President and Chief Financial Officer                Andover, MA 01810
-------------------------------------------------------------------------------------------------------------------
Donald K. Smith                                           Six Shattuck Road
Chief Technology Officer                                  Andover, MA 01810
-------------------------------------------------------------------------------------------------------------------
John J. Sullivan                                          Six Shattuck Road
Executive Vice President of Technology                    Andover, MA 01810
-------------------------------------------------------------------------------------------------------------------
William D. Stewart                                        Six Shattuck Road
Corporate Vice President and General Manager, Pressure    Andover, MA 01810
Measurement & Control Products
-------------------------------------------------------------------------------------------------------------------
Joseph A. Maher, Jr.                                      Six Shattuck Road
Corporate Vice President and General Manager, Pressure    Andover, MA 01810
Measurement & Control Products
-------------------------------------------------------------------------------------------------------------------
Robert D. Klimm                                           Six Shattuck Road
Corporate Vice President and General Manager, Materials   Andover, MA 01810
Delivery & Analysis Products
-------------------------------------------------------------------------------------------------------------------
Leo Berlinghieri                                          Six Shattuck Road
Corporate Vice President, Customer Support Operations     Andover, MA 01810
-------------------------------------------------------------------------------------------------------------------
DIRECTORS OF MKS
-------------------------------------------------------------------------------------------------------------------
John R. Bertucci                                          See above
-------------------------------------------------------------------------------------------------------------------
Richard S. Chute                                          Hill & Barlow
                                                          1 International Place
                                                          Boston, MA 02110
-------------------------------------------------------------------------------------------------------------------
Owen W. Robbins                                           199 Country Road
                                                          Weston, MA 02193
-------------------------------------------------------------------------------------------------------------------
Robert J. Therrien                                        Brooks Automation
                                                          15 Elizabeth Drive
                                                          Chelmsford, MA 01824
-------------------------------------------------------------------------------------------------------------------
Louis P. Valente                                          44 Concord Road
                                                          Weston, MA 02193
-------------------------------------------------------------------------------------------------------------------
Citizenship of the above named persons:  USA

</TABLE>

<PAGE>   8
CUSIP NO. 038236105                   13D                            PAGE 8 OF 8


                                   SCHEDULE B


<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------
                             STOCKHOLDER                                              NO. OF SHARES
---------------------------------------------------------------------------------------------------
<S>                                                                                   <C>
         Name:  Richard S. Post, Ph.D.                                                   539,550
         Address:  c/o Applied Science and
                   Technology, Inc.
                   90 Industrial Way
                   Wilmington, MA 01887
         Principal Business: Chairman and Chief
                             Executive Officer of
                             ASTeX
         Place of Citizenship:  United States

---------------------------------------------------------------------------------------------------
         Name:  John M. Tarrh                                                            314,973
         Address:  c/o Applied Science and
                         Technology, Inc.
                         90 Industrial Way
                         Wilmington, MA 01887
         Principal Business:  Senior Vice President,
                              Finance, Secretary,
                              Treasurer and
                              Director of
                              ASTeX
         Place of Citizenship:  United States

---------------------------------------------------------------------------------------------------
</TABLE>


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