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Previous: GASONICS INTERNATIONAL CORP, S-3/A, EX-5.1, 2000-10-10 |
Next: DONAHUE J CHRISTOPHER, 4, 2000-10-10 |
<PAGE>
EXHIBIT 23.1
CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS
As independent public accountants, we hereby consent to the incorporation by
reference in this registration statement of our report dated October 27, 1999
included in GaSonics International Corporation's Form 10-K for the year ended
September 30, 1999 and to all references to our Firm included in this
registration statement.
/s/ Arthur Andersen LLP
ARTHUR ANDERSEN LLP
San Jose, California
October 3, 2000
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