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<PAGE>
EXHIBIT 23.1
CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS
As independent public accountants, we hereby consent to the incorporation by
reference in this registration statement of our report dated October 27, 1999
included in the GaSonics International Corporation's Form 10-K for the year
ended September 30, 1999 and to all references to our Firm included in this
registration statement.
/s/ ARTHUR ANDERSON LLP
Arthur Anderson LLP
San Jose, California
October 23, 2000
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