MICRION CORP /MA/
SC 13D, 1996-05-16
SPECIAL INDUSTRY MACHINERY, NEC
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                                 UNITED STATES
                      SECURITIES AND EXCHANGE COMMISSION
                            Washington, D.C.  20549


                                 SCHEDULE 13D

                   Under the Securities Exchange Act of 1934
                            (Amendment No. _____)*

                              Micrion Corporation
                               (Name of Issuer)

                          Common Stock, no par value
                        (Title of Class of Securities)

                                   59479P102
                                (CUSIP Number)

                        Nicholas P. Economou, President
                  Micrion Corporation, One Corporation Way, 
                     Peabody, MA 01960-7990 (508) 531-6464
  (Name, Address and Telephone Number of Person Authorized to Receive Notices
                                 and Communications)

                                  May 7, 1996
            (Date of Event which Requires Filing of this Statement)


If  the filing  person has  previously filed  a statement  on Schedule  13G to
report  the acquisition  which is  the subject  of this  Schedule 13D,  and is
filing this schedule  because of Rule 13d-1(b)(3) or (4),  check the following
box.  [ ]

Check the following box if a fee is being paid (**) with the statement [X]. 
(A fee is not  required only if  the reporting  person:   (1) has a  previous
statement on file reporting  beneficial ownership of more than five percent of
the class  of securities described in  Item 1; and (2) has filed  no amendment
subsequent thereto reporting  beneficial ownership of five percent  or less of
such class.)  (See Rule 13d-7.) (**Note: The fee will be paid by the Reporting
Person upon receipt of invoice.)


*The remainder of this cover page shall be filled out for a reporting person's
initial filing on  this form with respect to the  subject class of securities,
and  for any  subsequent amendment  containing  information which  would alter
disclosures provided in a prior cover page.

The information  required on the  remainder of  this cover page  shall not  be
deemed to be "filed" for the purpose of Section 18 of  the Securities Exchange
Act of 1934 ("Act") or otherwise subject to the liabilities of that section of
the  Act but shall be subject to all other provisions of the Act (however, see
the Notes).

                                  
                                  
                                  SCHEDULE 13D

    CUSIP No.       59479P102                    Page  2    of     5   Pages

      1    NAME OF REPORTING PERSON
           S.S OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

                    Nicholas P. Economou
      
      2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP            (a) [ ]
                                                                       (b) [ ]
      3    SEC USE ONLY

      4    SOURCE OF FUNDS

                    00
      
      5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED PURSUANT
           TO ITEMS 2(d) or 2(e)                                           [ ]

      6    CITIZENSHIP OR PLACE OF ORGANIZATION

                    United States of America

               NUMBER              7    SOLE VOTING POWER
                 OF
               SHARES                            307,995 shares
               BENE-               8    SHARED VOTING POWER
              FICIALLY
               OWNED                             0
                 BY                9    SOLE DISPOSITIVE POWER
                EACH
               REPOR-                            92,995 shares
                TING               10   SHARED DISPOSITIVE POWER
               PERSON
                WITH                             0

     11    AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

                    307,995
     
     12    CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) 
           EXCLUDES CERTAIN SHARES                                          [ ] 
     
     13    PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

                    7.6% as of May 7, 1996
     
     14    TYPE OF REPORTING PERSON

                    IN









   Schedule 13D                         Page 3 of 5 Pages
   Nicholas P. Economou

   Item 1.  Security and Issuer

            The class of security to which this statement relates is the
   Common Stock, no par value, of Micrion Corporation ("Micrion").  The name
   and address of the principal executive offices of the issuer of such
   securities are Micrion Corporation, One Corporation Way, Peabody, MA 01960-
   7990.

   Item 2.  Identity and Background

   (a)      The name of the person filing this statement is Nicholas P.
   Economou.

   (b)      The business address of the person filing this statement is c/o
   Micrion Corporation, One Corporation Way, Peabody, MA 01960-7990.

   (c)      The present principal occupation of the person filing this
   statement is President and Chief Executive Officer of Micrion Corporation,
   One Corporation Way, Peabody, MA 01960-7990.

   (d)      The response to this item is negative.

   (e)      The response to this item is negative.

   (f)      Nicholas P. Economou is a citizen of the United States of America.

   Item 3.  Source and Amount of Funds or Other Consideration.

            No funds were expended in connection with the transaction that
   requires the filing of this statement.  On May 7, 1996, KLA Instruments
   Corporation ("KLA") acquired 215,000 shares of the Common Stock, no par
   value, of Micrion, as the result of the settlement of litigation brought by
   KLA against Micrion and certain other named defendants in the Essex County,
   Massachusetts, Superior Court (KLA Instruments Corporation v. Micrion
   Corporation, et al., Civil Action No. 93-2942A).  Of these shares, 119,202
   were newly issued by Micrion to KLA and the remaining 95,798 were
   transferred to KLA by other defendants.  A condition to the Settlement
   Agreement dated May 7, 1996 was a requirement that all 215,000 of the
   shares issued and transferred to KLA be subject to an irrevocable proxy in
   favor of Nicholas P. Economou, so long as he is the President of Micrion,
   and in favor of the subsequent Presidents of Micrion when Dr. Economou
   ceases to be the President of Micrion.  This statement is being filed not
   because Dr. Economou purchased the subject shares but because he acquired
   the sole right to vote them pursuant to the irrevocable proxy.  The subject
   shares will cease to be subject to the irrevocable proxy at such time as
   they are sold or

   
   
   
   
   
   
   
   
   
   
   Schedule 13D                         Page 4 of 5 Pages
   Nicholas P. Economou

   transferred to a third party which is not controlling, controlled by or
   under common control with, KLA.


   Item 4.  Purpose of Transaction.

            Please see explanation set forth above with respect to Item 3 for
   the purposes of the acquisition of securities of the issuer.  The reporting
   person has no plans or proposals which may relate to or would result in any
   of the matters described pursuant to the lettered subparagraphs of this
   item.  Accordingly, the answers to Item 4 are as follows:

   (a)      Inapplicable

   (b)      Inapplicable

   (c)      Inapplicable

   (d)      Inapplicable

   (e)      Inapplicable

   (f)      Inapplicable

   (g)      Inapplicable

   (h)      Inapplicable

   (i)      Inapplicable

   (j)      Inapplicable

   Item 5.  Interest in Securities of the Issuer.

            (a)   Nicholas P. Economou is the beneficial owner of 307,995
   shares of the Common Stock of Micrion, which represents 7.6% of the
   outstanding shares of Common Stock of Micrion as of May 7, 1996.  Of these
   shares, 215,000 shares are owned by KLA but Dr. Economou exercises sole
   voting power with respect to such shares pursuant to the irrevocable power
   of attorney described in Item 3 above, and the remaining 92,995 represent
   79,751 shares owned by Dr. Economou and 13,244 shares which he has the
   right to acquire within 60 days of May 7, 1996.

            (b)   Nicholas P. Economou has sole power to vote 307,995 shares
   of the Common Stock of Micrion, the shared power to vote  no Micrion
   shares, the sole power to dispose of 92,995 Micrion shares and the shared
   power to dispose of no Micrion shares.

   
   
   
   
   
   
   
   
   
   Schedule 13D                         Page 5 of 5 Pages
   Nicholas P. Economou

            (c)   The only transaction in the Common Stock of Micrion that
   were effected by Dr. Economou during the past sixty days is the transaction
   described in Item 3 above.

            (d)   KLA has the right to receive or the power to direct the
   receipt of dividends from, or the proceeds from the sale of 215,000 shares
   of the Common Stock of Micrion which are beneficially owned by Dr. Economou
   within the meaning of the Securities Exchange Act of 1934.

            (e)   Not applicable.

   Item 6.  Contracts, Arrangements, Understandings or Relationships with
   Respect to Securities of the Issuer.

            A Settlement Agreement was entered into on May 7, 1996 among KLA
   Instruments Corporation, Micrion Corporation and the other named
   defendants, including Nicholas P. Economou, in the case described above in
   Item 3.  Pursuant to the Settlement Agreement, KLA released all claims in
   the litigation described in Item 3 above, the named defendants released
   certain claims against KLA and a cross-defendant, and Micrion and the other 
   defendants agreed to deliver 215,000 shares of Micrion Common Stock to KLA. 
   Pursuant to the Settlement Agreement, Micrion agreed to file not later than 
   May 22, 1996 a registration statement on Form S-3 covering the resale of 
   such shares, and KLA agreed to execute and deliver an irrevocable proxy 
   with respect to the voting of such shares to Dr. Economou. 

            On May 7, 1996, KLA delivered to Dr. Economou an irrevocable proxy
   with respect to the shares of Micrion received by KLA as a result of the
   settlement.

   Item 7.  Material to Be Filed as Exhibits.

            Filed with this statement is a copy of the irrevocable proxy
   executed and delivered by KLA to Nicholas P. Economou with respect to the
   215,000 shares of Micrion obtained by KLA as a result of the settlement
   described in Item 3 above.

   Signature

            After reasonable inquiry and to the best of my knowledge and
   belief, I certify that the information set forth in this statement is true,
   complete and correct.
                                         
   May 16, 1996                            Nicholas P. Economou 
      Date                                       Signature            





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