MICRION CORP /MA/
10QSB, 1996-05-14
SPECIAL INDUSTRY MACHINERY, NEC
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                     U.S. SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C.  20549
                                   FORM 10-QSB

                 [X]  QUARTERLY REPORT UNDER SECTION 13 or 15(d)
                      OF THE SECURITIES EXCHANGE ACT OF 1934 FOR THE 
                      QUARTERLY PERIOD ENDED MARCH 31, 1996


                                      OR

                 [ ]  TRANSITION REPORT UNDER  SECTION 13 OR 15(d)
                      OF THE SECURITIES EXCHANGE ACT OF 1934 FOR THE
                      TRANSITION PERIOD FROM___ TO ___


       Commission File Number 0-23840

                                  Micrion Corporation

                (Exact name of  Registrant as specified in its charter)

       Massachusetts                                         04-2892070
       (State or other jurisdiction of                     (I.R.S. Employer     
       incorporation or organization)                      Identification No.)

       One Corporation Way, Peabody, Massachusetts                 01960-7990
       (Address of principal executive offices)                     (Zip Code)

                                    (508) 531-6464
                              (Issuer's telephone number)

                                    Not Applicable
         (Former name, former address and former fiscal year, if changed since
                                     last report)

       Check  whether the issuer (1) filed all reports required to be filed by
       Section 13 or 15(d) of the Securities Exchange Act of 1934 during the
       preceding 12 months (or for such shorter period that the registrant was
       required to file such reports), and (2) has been subject to such filing
       requirements for the past 90 days.

                         Yes     X           No              

       State the number of shares outstanding of each of the issuer's classes
       of common equity, as of the latest practicable date:

            As of May 10, 1996, the Company had 4,028,064 shares of Common
            Stock, no par value, outstanding.

       Transitional Small Business Disclosure Format (check one):

                              Yes [  ]             No [X]

                                      
                                      Page 1
                              
                               MICRION CORPORATION


       PART I.   FINANCIAL INFORMATION                                  Page
          
       Item 1.   Financial Statements 

                 Consolidated Balance Sheets - June 30, 1995 and
                 March 31, 1996 (unaudited)                               3

                 Consolidated Statements of Operations - Three months 
                 ended March  31, 1995 and 1996 (unaudited) and Nine 
                 months ended March 31, 1995 and 1996  (unaudited)        4

                 Consolidated Statements of Cash Flows - Nine months 
                 ended March 31, 1995 and 1996 (unaudited)                5

                 Notes to Consolidated Financial Statements - 
                 March 31, 1996                                           6

       Item 2.   Management's Discussion and Analysis or Plan of 
                 Operation                                                8

       PART II.  OTHER INFORMATION

       Item 1.   Legal Proceedings                                       12

       Item 2.   Changes in Securities - None                            12

       Item 3.   Defaults Upon Senior Securities - None                  12

       Item 4.   Submission of Matters to a Vote of Security 
                 Holders - None                                          12

       Item 5.   Other Information - None                                12

       Item 6.   Exhibits and Reports on Form 8-K                        13    
          



















                                        Page 2


                         MICRION CORPORATION AND SUBSIDIARIES
                              Consolidated Balance Sheets

                                                                                
                                                           (unaudited)
                                                 June 30     March 31
      ASSETS                                       1995        1996 
                                                     (in thousands)
      CURRENT ASSETS:                                    
        Cash and cash equivalents                $  6,851    $ 3,382
         Accounts receivable                        9,771     14,061
         Inventories (note 3)                      11,263     15,333
         Prepaid expenses and other current 
            assets                                    271        418
         Deferred tax asset, net of valuation 
            allowance                                 470        470
              Total current assets                 28,626     33,664

      PROPERTY AND EQUIPMENT, net (note 4)          1,562      2,781

      OTHER ASSETS, net                               298        243
              Total assets                        $30,486    $36,688



      LIABILITIES AND STOCKHOLDERS' EQUITY

      CURRENT LIABILITIES:
        Accounts payable                            3,262      5,418
        Accrued expenses                            1,625      2,354
        Accrued warranty expenses                     541      1,023
        Current installments of obligations under 
          capital leases                               40        255
        Customer deposits and deferred income         355        624
              Total current liabilities             5,823      9,674

      OBLIGATIONS UNDER CAPITAL LEASES, net of 
        current installments                           26        833



      STOCKHOLDERS' EQUITY:
        Preferred stock, no par value; authorized 
          5,000,000 shares                              -          -
        Common stock, no par value; authorized 
          12,300,000 shares, issued and  
          outstanding 3,901,326 and 3,907,862 
          shares, respectively                     28,814     28,873
        Accumulated deficit                       (4,176)    (2,663)
        Other equity                                  (1)       (29)
              Total stockholders' equity           24,637     26,181
              Total liabilities and  
                 stockholders' equity            $ 30,486   $ 36,688




                                     Page 3


                          MICRION CORPORATION AND SUBSIDIARIES
                         Consolidated Statements of Operations
                
                                           (unaudited)         (unaudited)
                                          Three Months        Nine Months
                                            March 31,           March 31,
                                          1995      1996      1995      1996
                                       (in thousands except for per share data)
      REVENUES:
                                               
        Product revenues               $  7,418  $  9,457  $ 18,669  $ 26,117
        Contract revenues                   507       258     1,893     1,040
            Total revenues                7,925     9,715    20,562    27,157

      COST OF REVENUES:
        Cost of product revenues          4,828     5,800    11,467    16,236
        Cost of contract revenues           433       236     1,599     1,047
            Total cost of revenues        5,261     6,036    13,066    17,283

            Gross profit                  2,664     3,679     7,496     9,874

      OPERATING EXPENSES:
        Selling, general and
          administrative expenses         1,166     1,834     3,551     4,931
        Research and development 
          expenses                          837     1,209     2,060     2,819
            Total operating expenses      2,003     3,043     5,611     7,750

            Income from operations          661       636     1,885     2,124

      OTHER INCOME (EXPENSE):
        Interest income                     171        57       252       188
        Interest expense                    (7)      (26)      (15)      (35)
        Other                              (23)        15      (27)        46
            Total other income              141        46       210       199

            Income before provision
              for income taxes              802       682     2,095     2,323

      PROVISION FOR INCOME TAXES             92       236       240       810

          Net income                   $    710  $    446  $  1,855     1,513


        NET INCOME PER SHARE           $     .18 $     .11 $    .55  $    .38

      WEIGHTED AVERAGE COMMON AND
        COMMON EQUIVALENT
        SHARES OUTSTANDING                3,941     4,054     3,391     4,020

                                          




                                         Page 4




                         MICRION CORPORATION AND SUBSIDIARIES

                         Consolidated Statements of Cash Flows
                                                                      

                                                           (unaudited)
                                                  Nine months ended March 31,
                                                       1995         1996
                                                         (in thousands)
      
      CASH FLOWS FROM OPERATING ACTIVITIES:
      Net income                                     $1,855       $1,513
        Adjustments to reconcile net income to net
        cash used by operating activities:
        Depreciation and amortization                   445          497
           Non-cash compensation                         31           13
           Changes in assets and liabilities:
              Accounts receivable                    (5,407)      (4,449)
              Inventories                            (3,195)      (4,070)
                 Prepaid expenses and other current    (172)         (34)
                 assets
              Accounts payable                        1,115        2,121
              Accrued expenses                          644          746
              Accrued warranty expenses                 (10)         486
              Customer deposits and deferred income     (11)         269
         Net cash used by operating activities       (4,705)      (2,908)

      CASH FLOWS FROM INVESTING ACTIVITIES:
         Purchase of property and equipment            (898)      (1,653)
         Decrease in other assets                       (80)          --
         Net cash used by investing activities         (978)      (1,653)

      CASH FLOWS FROM FINANCING ACTIVITIES:
         Repayments of capital lease obligations        (30)         (84)
         Proceeds from capital lease financing           --        1,106
         Proceeds from sale of common stock, net     11,055           59
         Repurchase of common stock, net                 (1)          --
      Net cash provided by financing activities      11,024        1,081

      EFFECT OF EXCHANGE RATE CHANGES ON CASH            24           11

         INCREASE (DECREASE) IN CASH AND CASH         5,365       (3,469)
         EQUIVALENTS                           
            CASH AND CASH EQUIVALENTS, beginning of   3,238        6,851
            period
      CASH AND CASH EQUIVALENTS, end of period       $8,603       $3,382

         SUPPLEMENTAL DISCLOSURES OF CASH FLOW
         INFORMATION:
           Cash paid during the period for:
           Interest                                     $14          $26
           Income taxes                                $258         $125





                                   Page 5


                          MICRION CORPORATION AND SUBSIDIARIES
                       Notes to Consolidated Financial Statements
                                     March 31, 1996

     (1) NATURE OF BUSINESS

     Micrion  Corporation  and  its  subsidiaries  (collectively "the
     Company")   are  engaged  in   the  development,  production  and
     marketing  of capital  equipment  used in  the manufacturing  and
     processing  of  semiconductor   devices  and  other  applications
     outside        of        the       semiconductor        business.

     (2) BASIS OF PRESENTATION
     The  accompanying  unaudited   financial  statements  have   been
     prepared  in accordance with the instructions  to Form 10-QSB and
     Article  2 of Regulation S-X.   Accordingly, they  do not include
     all  of  the  information  and footnotes  required  by  generally
     accepted accounting principles for complete financial statements.
     In  the opinion  of  management, all  adjustments (consisting  of
     normal   recurring  accruals)   considered  necessary   for  fair
     presentation have  been  included.   The  accompanying  financial
     statements should  be read  in conjunction with  the consolidated
     financial  statements  and  footnotes  thereto  included  in  the
     Company's annual  report 10-KSB  filing with the  U.S. Securities
     and Exchange Commission  for the  year ended June  30, 1995.  The
     Company's first,  second, and  third fiscal  quarters end on  the
     Saturday  closest to  September  30, December  31  and March  31,
     respectively.   For ease of reference, such quarter end dates are
     used herein.

      (3) INVENTORIES
      Inventories consist of:
                                                                   (unaudited)
                                                         June 30,     March 31,
                                                           1995          1996
                                                             (in thousands)

         Raw materials and manufactured partes, net      $5,993        $9,691
         Work in process                                  4,817         4,828
         Finished goods                                     453           814
             Total inventories                          $11,263       $15,333

       (4) PROPERTY AND EQUIPMENT, net
                                                                    (unaudited)
                                                         June 30,     March 31,
                                                           1995          1996
                                                             (in thousands)

         Furniture and fixtures                            $471          $536
         Computer, engineering and production             2,737         3,288
           equipment
         Sales demonstration systems                        345           345
         Leasehold improvements                             193           167
         Property under capital leases                      778         1,884
                                                         $4,524        $6,220
         Accumulated depreciation and amortization       (2,962)       (3,439)
             Net property and equipment                  $1,562        $2,781
                                         
                                         Page 6
                          
                          MICRION CORPORATION AND SUBSIDIARIES
                       Notes to Consolidated Financial Statements

                               March 31, 1996

  At June 30, 1995 and March 31, 1996, accumulated amortization  under
  capital leases was approximately $743,000 and $804,000, respectively.

     (5) SUBSEQUENT EVENT

     On  May 7, 1996, the Company reached a negotiated settlement with
     KLA Instruments Corporation (KLA)  of litigation initiated by KLA
     in December, 1993, and  which was described in the  Company's 10-
     KSB filing with the  U.S. Securities and Exchange Commission  for
     the year ended June 30, 1995.
        
     In the  non-cash settlement, KLA  will receive 119,202  shares of
     Micrion common stock  from the   Company and  95,798 shares  from
     other  parties involved in the  litigation.  An irrevocable proxy
     vests  all voting  rights  of these  shares  in Dr.  Nicholas  P.
     Economou,  Micrion's President and  CEO.   Micrion has  agreed to
     register these shares for  sale under the Securities Act  of 1933
     at  KLA's expense.   As part of the  settlement, KLA, the Company
     and other parties have agreed to dismiss all claims filed  in the
     litigation.

     The  settlement  is expected  to result  in  a charge  during the
     quarter ending June  30, 1996 of  approximately $2.7 million,  or
     $.65 per share,  which is  based upon the  estimated fair  market
     value  of  the  shares to  be  issued by  the  Company  and other
     associated costs related to the settlement.

           




                          


     This  document contains  forward-looking  information within  the
     meaning of Section 27A of the Securities Act of 1933, as amended,
     and Section 21E of the Securities Act of 1934, as amended, and is
     subject to  the  "safe  harbor" created  by  these sections.  The
     Company's  actual  results   for  future  periods   could  differ
     materially   from   those  projected   in   such  forward-looking
     information.  Factors that  could cause actual results to  differ
     include, but are not limited  to, the following: settlement costs
     may  be increased based on actual legal or other expenses related
     to  the litigation  and/or based  on the  valuation of  the stock
     involved  in   the  transaction.    The   Company  undertakes  no
     obligation to  publicly release  the result  of any revisions  to
     these forward-looking statements which may be made to reflect the
     events or circumstances after  the date hereof or to  reflect the
     occurrence of unanticipated events.
     
                                   Page 7
     
     
     
     Item 2. Management's Discussion and Analysis or Plan of Operation

                    Micrion Corporation and Subsidiaries
                  Management's Discussion and Analysis of
               Financial Condition and Results of Operations


     Results of Operations

     Three Months Ended March 31, 1996 Compared to Three Months Ended
     March 31, 1995

        Revenues.   Total revenues increased by 22.6% to $9.7 million
     for the three months ended March 31, 1996 from $7.9 million for
     the same period ended March 31, 1995.

        Product revenues consist of revenues from the sale of focused
     ion beam (FIB) systems, spare and replacement parts and service
     contracts provided with respect to systems.  Product revenues
     increased 27.5% to $9.5 million for the three-month period ended
     March 31, 1996 from $7.4 million for the same period ended March
     31, 1995.  The increase was due to increased sales of FIB systems
     resulting from increased capital spending by semiconductor
     companies and the continued market acceptance of the Company s
     FIB products and other applications outside of the semiconductor
     business.

        Contract revenues decreased 49.1% to $0.3 million for the
     three-month period ended March 31, 1996 from $0.5 million for the
     same period ended March 31, 1995.   The decrease was due to a
     decreased level of activity on existing government contracts and
     the completion of a commercial contract.

        Gross Margin.  The Company's gross margin on product revenues
     increased to 38.7% for the three-month period ended March 31,
     1996 from 34.9% for the same period ended March 31, 1995.  The
     increase was due to changes in the mix of foreign and domestic
     shipments during the period.  Domestic sales generally yield
     higher gross margins than foreign sales.

        The Company's gross margin on contract revenues decreased to
     8.5% for the three-month period ended March 31, 1996 from 14.6%
     for the same period ended March 31, 1995. This decrease was due
     to completion of a higher margin commercial contract during the
     three-month period ended March 31, 1995.   The Company expects a
     higher proportion of contract revenues to be derived from
     government contracts in the future, which will yield a lower
     gross margin.

         Selling, General and Administrative Expenses.  Selling,
     general and administrative expenses increased 57.3% to $1.8
     million for the three-month period ended March 31, 1996 from $1.2
     million for the same period ended March 31, 1995.  The increase is
     


                                   Page 8
                          
     
     
     attributable to the rapid ramp up of the Company's manufacturing
     capacity in order to produce FIB systems for a new manufacturing
     application, which has required additional personnel in
     applications support and sales, customer support personnel to
     support FIB systems and increases in administrative personnel. 
     Also, the increase is a result of increases in compensation
     levels and litigation costs.

          Research and Development Expense.   The Company's research
     and development expense increased 44.4% to $1.2 million for the
     three-month period ended March 31, 1996 from $.8 million for the
     same period ended March 31, 1995.  The increase was due to the
     Company's additional development activity for new products and
     applications.  The level of research and development expense is
     expected to increase over the remainder of fiscal 1996 due to
     management's decision to address certain production applications
     for its FIB  products.

           Other Income and Expense.  Other income and expense,
     primarily interest related, although not material, decreased to
     $.05 million for the three-month period ended March 31, 1996 as
     compared to $.14 million for the same period ended March 31,
     1995.  The decrease is due to a lower cash position during the
     period ended March 31, 1996.

           Provision for Income Taxes.  The Company's effective tax
     rate for the three-month period ended March 31, 1996 reflects the
     use of a tax rate on income of 35%.  This compares to an
     effective tax rate of 11.5% for the three-month period ended
     March 31, 1995 as the Company previously recognized the use of
     net operating loss carryforwards as they were earned.  The
     Company continues to re-evaluate the recoverability of deferred
     tax assets.
     
     Nine Months Ended March 31, 1996 Compared to Nine Months Ended
     March 31 ,1995

         Revenues.  Total revenues increased by 32.1% to $27.2 million
     for the nine months ended March 31, 1996 from $20.6 million for
     the same period ended March 31, 1995.

        Product revenues consist of revenues from the sale of focused
     ion beam (FIB) systems, spare and replacement parts and service
     contracts provided with respect to systems.  Product revenues
     increased 39.9% to $26.1 million for the nine-month period ended
     March 31, 1996 from $18.7 million for the same period ended March
     31, 1995.  The increase was due to increased sales of FIB systems
     resulting from increased capital spending by semiconductor
     companies and the continued market acceptance of the Company s
     FIB products and other applications outside of the semiconductor
     business.

        Contract revenues decreased 45.1% to $1.0 million for the
     nine-month period ended March 31, 1996 from $1.9 million for the
     same period ended March 31, 1995.  The decrease was due to a
     decreased level of activity on existing government contracts and
     the completion of a  higher margin commercial contract.  The
     Company expects a higher
                                 Page 9
     
     proportion of contract revenues to be derived from government
     contracts in the future, which will yield a lower gross margin.

        Gross Margin.  The Company's gross margin on product revenues
     decreased to 37.8% for the nine-month period ended March 31, 1996
     from 38.6% for the same period ended March 31, 1995. The decrease
     was due to changes in the mix of foreign and domestic shipments
     during the period.  Foreign sales generally yield lower gross
     margins than domestic sales.  In addition, a significant level of
     engineering costs for specific customer systems were charged to
     cost of sales during the period.

         The Company's gross margin on contract revenues decreased to
     negative 0.6% for the nine-month period ended March 31, 1996 from
     15.5% for the same period ended March 31, 1995.  The decrease in
     gross margin was due to completion of a commercial contract and
     additional costs related to that contract which were not
     anticipated during the period ended March 31, 1996.   The Company
     expects a higher proportion of contract revenues to be derived
     from government contracts in the future, which will yield a lower
     gross margin.

          Selling, General and Administrative Expenses.  Selling,
     general and administrative expenses increased 38.9% to $4.9
     million for the nine-month period ended March 31, 1996 from $3.6
     million for the same period ended March 31, 1995. The increase is
     primarily attributable to the rapid ramp up of the Company s
     manufacturing capacity in order to produce the FIB systems for a
     new manufacturing application, which has required additional
     personnel in applications support and sales, customer support
     personnel to support FIB systems and increases in administrative
     personnel.  Also, the increase is a  result of increases in
     compensation levels and litigation costs.

          Research and Development Expense.  The Company's research
     and development expense increased 36.8% to $2.8 million for the
     nine-month period ended March 31, 1996 from $2.1 million for the
     same period ended March 31, 1995.  The increase was due to the
     Company's additional development activity for new products and
     applications, which has required additional personnel.  The level
     of research and development expenses is expected to increase over
     the remainder of fiscal 1996 due to management's decision to
     address certain production applications for its FIB products.

         Other Income and Expense.   Other income and expense,
     primarily interest related, although not material, decreased to
     $.20 million for the nine-month period ended March 31, 1996 as
     compared to $.21 million for the same period ended March 31,
     1995.  The decrease is due to a lower cash position during the period.

         Provision for Income Taxes. The Company's effective tax rate
     for the nine-month period ended March 31, 1996 reflects the use
     of a tax rate on income of 35%.  This compares to an effective
     tax rate of 11.5% for the nine-month period ended March 31, 1995
     as the Company previously recognized the use of net operating
     loss carryforwards as they were earned.  The Company continues to
     re-evaluate the recoverability of deferred tax assets.
                                
                                Page 10

     Liquidity and Capital Resources

       At March 31, 1996 the Company had working capital of $24.0
     million as compared to $22.8 million  at June 30, 1995,
     reflecting an increase in working capital of $1.2 million.  The
     increase is primarily attributable to an increase in accounts
     receivable due to increased product sales and an increase in
     inventories to meet expected customer demand for FIB systems
     offset in part by an increase in accounts payable and accrued
     expenses.     Cash and cash equivalents were $3.4 million as of
     March 31, 1996 as opposed to $6.9 million as of June 30, 1995. 

       Net cash used by operating activities for the nine months ended
     March 31, 1996 was $2.9 million and consisted primarily of
     increases in accounts receivable and inventories, offset by
     increases in accounts payable and accrued expenses.  Accounts
     payable increased due to the level of activity of increased
     inventory purchases due to the ramp-up of manufacturing
     activities to meet expected demand.  Accounts receivable
     increased due to the number of FIB systems shipped toward the end
     of the three-month period ended March 31, 1996.

     The Company's accounts receivable increased to $14.1 million at
     March 31, 1996 as compared to $9.8 million at June 30, 1995 due
     to the number of FIB systems accepted by and shipped to customers
     near the end of the quarter ended March 31, 1996.

       The Company's inventories increased to $15.3 million at March
     31, 1996 as compared to $11.3 million at June 30, 1995.  The
     increase is due to management's decision to escalate the
     manufacturing of FIB systems meet current and expected customer
     demand for FIB systems.

       Net cash used by investing activities for the nine months ended
     March 31, 1996 was $1.7 million and consisted of purchases of
     capital equipment to be used for research and development, and
     other operating department requirements.

       Net cash provided by financing activities for the nine months
     ended March 31, 1996 was $1.1 million and consisted primarily of
     proceeds from a lease line of credit used to fund capital
     purchases.

       The Company has a working capital line of credit with a bank
     which provides for  borrowings up to $5.0 million and has
     recently completed negotiations to increase the borrowing
     capacity to $10.0 million.  Amounts borrowed bear interest at the
     bank's prime rate.  The line of credit expires on December 1,
     1996 and will be extended to December 31, 1997 under the revised
     line of credit , as negotiated.  As of March 31, 1996, no amount
     is outstanding against the available line of credit. 

       The Company believes that it has the necessary liquidity and
     capital resources to sustain existing operations for the next
     twelve months.

                                  Page 11



                Part II.   Other Information

     Item 1.    Legal Proceedings.

        On May 7, 1996, the Company reached a negotiated settlement
     with KLA Instruments Corporation (KLA) of litigation initiated by
     KLA in December, 1993, and which was described in the Company's
     10-KSB filing with the U.S. Securities and Exchange Commission
     for the year ended June 30, 1995.

        In the non-cash settlement, KLA will receive 119,202 shares of
     Micrion common stock from the Company and 95,798 shares from
     other parties to the litigation. An irrevocable proxy vests all
     voting rights of these shares in Dr. Nicholas P. Economou,
     Micrion's President and CEO. Micrion has agreed to register these
     shares for sale under the Securities Act of 1933 at KLA's
     expense. As part of the settlement, KLA, the Company and other
     parties have agreed to dismiss all claims filed in the
     litigation. 

        The settlement is expected to result in a charge during the
     quarter ending June 30, 1996 approximating $2.7 million, or $.65
     per share, which is based upon the estimated fair market value of
     the shares to be issued by the Company and other associated costs
     related to the settlement.  

        Please refer to the statement on page 7 of this document
     regarding forward looking information.

     Item 2.    Changes in Securities.

        None

     Item 3.    Defaults Upon Senior Securities.

         None

     Item 4.    Submission of Matters to a Vote of Security Holders.

         None

     Item 5.    Other Information.

         None











                                         

                                  Page 12


     Item 6. Exhibits and Reports on Form 8-K.

        (a)   Exhibits

              Each Exhibit number corresponds to the number assigned
     to such exhibit in the Exhibit Table of Item 601 of Regulation S-B.
     

        Exhibit
        Number                  Description

        4.1                     Irrevocable Proxy from KLA Instruments
                                Corporation
       
       10                       Settlement Agreement By and
                                Among KLA Instruments Corporation,
                                the Company and Other 
                                Parties Dated May 7, 1996.

       11                       Statement of Computation of
                                Per Share Earnings

       27.1                     Financial Data Schedule


        (b) Reports on Form 8-K

           A report on Form 8-K was filed by the Company on March 18,
     1996.

























                                        Page 13



      

      Signatures

     In accordance with the requirements of the Exchange Act, the registrant
  caused this report to be signed on its behalf by the undersigned, thereunto
  duly authorized.


                                 MICRION CORPORATION 
                                    (Registrant)



      Date:    May 14, 1996      /s/ Nicholas P. Economou             
                                 Nicholas P. Economou
                                 President and Chief Executive Officer


      Date:    May 14, 1996      /s/  David M. Hunter                  
                                 David M. Hunter
                                 Vice President, Finance and Administration




                                        Page 14





























                                                         EXHIBIT 4

                               IRREVOCABLE PROXY

      KNOW  ALL   BY  THESE PRESENTS  that  KLA INSTRUMENTS  CORPORATION  (the
"Stockholder")  does hereby make, constitute and  appoint NICHOLAS P. ECONOMOU
("Economou"), or, in the event that Economou is no longer serving as President
of Micrion Corporation,  the person who  is then serving  as the President  of
Micrion Corporation (the "Corporation"), for it and in its stead to act as its
proxy in respect  of the 215,000 shares of Common Stock, no par value, or such
other number  of shares then owned  by the Stockholder (the  "Shares"), of the
Corporation acquired by the  Stockholder in connection with the  settlement of
certain litigation in  the Essex County Superior  Court, Salem, Massachusetts,
entitled KLA Instruments  Corporation v.  Micrion Corporation,  et al.,  Civil
Action  No. 93-2942A,  giving and  granting Economou  (or any  successor) full
power and authority to (i)  vote all of the  Shares beneficially owned by  the
Stockholder,  either in person or by proxy, or give written consent in lieu of
voting thereof,  (ii) waive any  notice of any  regular or special  meeting of
stockholders of the Corporation and (iii) call meetings of stockholders of the
Corporation, as the Stockholder might or  could do if personally present  with
full power of substitution, appointment and revocation.

      At all times hereafter, the Stockholder shall have the right to transfer
the  Shares,  in  whole or  in  part,  to  any  third party  not  controlling,
controlled  by, or  under common control  with the Stockholder,  and upon such
sale or transfer  the transferred shares  shall no longer  be subject to  this
irrevocable proxy.

      This proxy is coupled  with an interest (which interest  includes, among
other  things,  the  settlement of  the  above-referenced  litigation  and the
agreements  between the Corporation, of  which Economou is  the President, and
the  Stockholder in connection therewith), is irrevocable and shall be binding
upon the Stockholder and its representatives, successors and assigns.

      IN WITNESS WHEREOF,  the undersigned has executed this irrevocable proxy
as of the 6th day of May, 1996.

                                          KLA INSTRUMENTS CORPORATION


                                          By:/s/ Christopher Stoddart         
         
                                          Name:   Christopher Stoddart
                                          Title:  Treasurer

Accepted as of the date hereof 

/s/ Nicholas P. Economou                 
Nicholas P. Economou
President of Micrion Corporation


                                                     EXHIBIT 10

                             SETTLEMENT AGREEMENT
            

      THIS SETTLEMENT AGREEMENT (this "Agreement") is made by and between KLA

Instruments Corporation, a Delaware corporation ("KLA"), and Kenneth Levy as

third party defendant ("Levy"), on one hand, and Micrion Corporation, a

Massachusetts corporation ("Micrion"), Hambrecht & Quist Group, a California

corporation ("H&Q"), EG&G Inc., a Massachusetts corporation ("EG&G"), DeMuth,

Folger & Terhune, a New York partnership ("DF&T"), Peter W. Wallace

("Wallace"), Louis P. Valente ("Valente"), Thomas W. Folger ("Folger"),

Nicholas P. Economou ("Economou"), John A. Doherty ("Doherty"), and Charles E.

Minihan ("Minihan"), on the other hand (Micrion, H&Q, DF&T, Wallace, Valente,

Folger, Economou, Doherty and Minihan are referred to collectively as the

"Defendants"), and shall be effective as of May 7, 1996 (the "Effective

Date"), for all purposes upon execution of this Agreement by all of the

foregoing parties.



                                R E C I T A L S

A.    WHEREAS, on or about December 22, 1993, KLA filed a Complaint (the

"Complaint") against the Defendants and EG&G in Massachusetts Superior Court,

Essex County (the "Court"), Civil Action No. 93-2942A (the "Lawsuit"); 

B.    WHEREAS, EG&G was subsequently dismissed as a defendant in the Lawsuit

without prejudice.

C.    WHEREAS, on or about August 22, 1994, the Defendants filed an Amended

Answer to the Complaint.  At that time, the Defendants also filed a

Counterclaim against KLA (for abuse of process, breach of fiduciary duty and

breach of implied covenant of good faith and fair dealing) (the

"Counterclaim"), and a Third-Party Complaint against Levy (for aiding and<PAGE>



abetting an abuse of process, a breach of fiduciary duty and a breach of

implied covenant of good faith and fair dealing) (the "Third-Party

Complaint").  Additionally, in the Lawsuit, Micrion contended that KLA and

Levy caused substantial damages exceeding $5,000,000 to Micrion resulting from

the pendency of the Lawsuit at the time of Micrion's Initial Public Offering,

including damages in excess of $1,000,0000 attributable to the pendency of the

cause of action under M.G.L. Ch.93A by itself. 

D.    WHEREAS, prior to the recapitalization and refinancing of Micrion, which

occurred in June and August 1993 (the "Refinancing"), KLA owned 710,808 shares

of preferred stock of Micrion that represented 244 shares of Micrion common

stock as of May 11, 1994 (the effective date of Micrion's initial public

offering of common stock) as a result of the Refinancing and a subsequent

reverse stock split.

E.    WHEREAS, KLA and Levy, on one hand, and the Defendants and EG&G, on the

other hand, while denying any liability to each other from any and all claims

concerning all counts of the Complaint, Counterclaim and Third-Party Complaint

in the Lawsuit, decided to resolve those claims and counts without the

necessity of further litigation. 



                               A G R E E M E N T

      NOW, THEREFORE, for good and valuable consideration, the receipt and

adequacy of which are hereby acknowledged, the parties hereto hereby agree as

follows:

I.    Terms of Settlement.  To finally and irrevocably settle the Lawsuit, the

Defendants and EG&G shall issue and deliver an aggregate of Two Hundred

Fifteen Thousand (215,000) shares of common stock of Micrion (the "Shares") to


                                      2






KLA, and KLA agrees to accept the Shares in settlement of the Lawsuit at the

Closing as provided in this Agreement.  Subject to the provisions of this

Agreement, the parties hereto hereby acknowledge and agree that the Shares to

be issued and delivered to KLA at the Closing under this Agreement will not

have been registered under the Securities Act of 1933, as amended (the "Act")

as of the date thereof and are further subject to the voting restrictions of

the irrevocable proxy executed and delivered concurrently with the issuance of

the Shares, as provided in Section 5 of this Agreement (the "Proxy").

II.   Characterization of Settlement.  The parties hereto hereby acknowledge

that for all relevant purposes (i) KLA intends to characterize its receipt of

the Shares under this Agreement as an issuance and transfer of such Shares

solely in exchange for the release of claims based on the diminution in the

value of KLA's interest in its original shares of Micrion preferred stock, as

described in Recital D; (ii) KLA intends to take the position that such

issuance and transfer is intended to restore the ownership interest of KLA in

Micrion to its condition as it existed immediately prior to the Refinancing,

and for no other purposes; and (iii) KLA intends to take the position that KLA

shall be deemed to have owned the Shares as if the Shares were a part of KLA's

ownership interest in Micrion prior to the Refinancing.  Without adopting

KLA's position as its own and without admitting any liability under the

Complaint or otherwise in the Lawsuit, each of the Defendants and EG&G hereby

agree not to take any position, except as they may be required to by law,

before any federal, state, county, municipal or other local government,

government agency, instrumentality or department, or in any administrative,

regulatory or judicial proceeding, or in any report, filing, certificate, tax

return, declaration, instrument or other document submitted to or contained


                                      3





in, as the case may be, any of the foregoing that is contrary to any of the

positions to be taken by KLA as described in this Section 2.  The Defendants

further agree not to file, except as they may be required to by law, any

Internal Revenue Service Form 1099, or any comparable federal, state or local

tax form, with any federal, state or local taxing agency or authority

reporting the delivery of the Shares or any payment or other consideration

made under this Agreement to KLA to the Internal Revenue Service, or any state

or local taxing authority.

III.  Securities Law Compliance.

      A.    Schedule 13D Filing.  Within the required period under the rules

and regulations promulgated by the SEC, KLA and the holder of the proxy (the

"Proxyholder") shall prepare and file separate reports on SEC Schedule 13D of

their holdings of the Shares to the SEC. 

      B.    Press Release and Form 8-K Report.  Immediately after the

Effective Date, Micrion shall issue a press release relating to the settlement

of the Lawsuit, substantially in the form as set forth in Exhibit A, for

immediate release in compliance with Schedule D to the Bylaws of the NASD, and

Micrion shall promptly file a report with the SEC on Form 8-K relating to the

settlement of the Lawsuit and attaching thereto a copy of the press release. 

KLA hereby warrants that it will not issue a press release relating to the

settlement of the Lawsuit.

      C.    Disposition of Shares.  At all times hereafter, subject to

compliance with the Act and the rules and regulations of the SEC promulgated

thereunder, Micrion acknowledges and agrees that the Shares shall be subject

to transfer by KLA without restriction except as provided in subsection (d),

below.  In particular, Micrion acknowledges that KLA may sell the Shares upon


                                      4






satisfaction of all the conditions of any applicable exemption from the

registration requirements under Section 5 of the Act, including the exemption

provided by SEC Rule 144, and that (i) upon the satisfaction of all such

conditions, or (ii) upon delivery to Micrion of an opinion of counsel

reasonably satisfactory to Micrion or (iii) upon delivery to Micrion of a

letter from the SEC addressed to Micrion or to KLA to the effect that the SEC

will not take any action with respect to the transfer of the Shares in the

absence of a registration statement then in effect with respect to such

Shares, Micrion will approve the transfer of the Shares by KLA, and will so

instruct Micrion's transfer agent and any other person having legal

responsibilities with respect to the transfer of Shares of Micrion common

stock.

      D.    The parties agree that at the Closing, and until KLA shall satisfy

the conditions of Rule 144(k) with respect to the Shares, the certificate or

certificates evidencing the Shares shall bear one or both of the following

legends:

      E.    A legend referring to the transfer restrictions under the Act,

identical or substantially similar to the legend set forth below:

            THE SECURITIES REPRESENTED BY THIS CERTIFICATE HAVE NOT BEEN
            REGISTERED UNDER THE SECURITIES ACT OF 1933.  THEY MAY NOT BE
            SOLD, OFFERED FOR SALE, PLEDGED OR HYPOTHECATED IN THE ABSENCE OF
            A REGISTRATION STATEMENT IN EFFECT WITH RESPECT TO THE SECURITIES
            UNDER SUCH ACT, OR AN OPINION OF COUNSEL REASONABLY SATISFACTORY
            TO THE COMPANY THAT SUCH REGISTRATION IS NOT REQUIRED, OR A LETTER
            FROM THE SECURITIES AND EXCHANGE COMMISSION TO THE COMPANY OR TO
            THE HOLDER HEREOF TO THE EFFECT THAT THE COMMISSION WILL NOT TAKE
            ANY ACTION WITH RESPECT TO THE TRANSFER OF THE SECURITIES IN THE
            ABSENCE OF A REGISTRATION STATEMENT THEN IN EFFECT WITH RESPECT TO
            SUCH SECURITIES UNDER SUCH ACT, OR UNLESS SOLD OR TRANSFERRED
            PURSUANT TO RULE 144 OF SUCH ACT.

      F.    A legend referring to the voting restrictions set forth in the

Proxy, substantially similar to the legend set forth below:

                                      5






            THE SHARES REPRESENTED BY THIS CERTIFICATE ARE SUBJECT TO AN
            IRREVOCABLE PROXY ISSUED IN ACCORDANCE WITH MASSACHUSETTS LAW.

      G.    S-3 Registration.  At the written request of KLA to Micrion,

delivered at any time after the Closing Date but not later than May 14, 1996,

Micrion shall prepare and file with the SEC by no later than May 22, 1996 a

registration statement on Form S-3 or an equivalent form (such registration

statement and the prospectus included therein and all documents incorporated

by reference therein being referred to as the "Registration Statement") for

resale of as many of the Shares as shall be requested in writing by KLA. 

Micrion shall use its best efforts to have the Registration Statement declared

effective under the Act as promptly as practicable after such filing and shall

persist in such efforts until the Registration Statement has been declared

effective under the Act.  During the period commencing with the effectiveness

of the Registration Statement and continuing until (i) KLA has sold all of the

Shares, or (ii) KLA is entitled, in the opinion of counsel acceptable to

Micrion, to sell all remaining shares pursuant to Rule 144 promulgated under

the Act, Micrion shall use its best efforts to cause the Registration

Statement to continue to be effective and to update the prospectus contained

therein as required by applicable SEC rules and regulations, including Rule

415, to enable KLA to resell the Shares on the Nasdaq Stock Market or any

securities exchange or other stock market in which shares of Micrion common

stock may be traded.  Micrion shall also take all actions required to be taken

under any applicable state securities laws in connection with registration or

qualification of the Shares and the resale of the Shares pursuant to the

Registration Statement or any applicable form of qualification or exemption

under such state securities laws.  Micrion shall provide sufficient copies of

the Registration Statement and the prospectus related thereto to KLA or

                                      6






underwriters and selling brokers, if any, for distribution by KLA or the

underwriters or selling brokers, if any, to comply with the requirements under

the rules and regulations promulgated under the Act with respect to the

delivery of the prospectus.  Notwithstanding the foregoing, Micrion shall not

be required to undertake special audits or engage experts in connection with

the preparation of the Registration Statement and any prospectus related

thereto.  To the extent permitted by law, KLA shall indemnify Micrion, its

officers and directors, each underwriter and selling broker, if any, and each

person, if any, who controls Micrion, against liability (including liability

under the Act and the Securities and Exchange Act of 1934, as amended (the

"Exchange Act")) arising by reason of any statement contained in the

Registration Statement that KLA provided to Micrion in writing explicitly for

use in the Registration Statement, being false or misleading or omitting to

state a material fact necessary to be stated in order that the statements made

in the Registration Statement, in the circumstances in which they are made,

not be misleading.  To the extent permitted by law, Micrion shall indemnify

KLA and each underwriter and selling broker, if any, against liability

(including liability under the Act and the Exchange Act) arising by reason of

any statement (other than a statement provided by KLA as described above)

contained in the Registration Statement included therein being false or

misleading or omitting to state a material fact necessary to be stated in

order that the statements made in or incorporated by reference in the

Registration Statement, in the circumstances in which they are made, not to be

misleading.  KLA shall pay or reimburse Micrion for all of the reasonable

printing expenses, registration expenses, selling expenses, selling

commissions, "blue sky" qualification and filing fees payable in connection


                                      7






with the preparation and filing of the Registration Statement and related

"blue sky" filings, and shall reimburse Micrion for all of its attorneys' fees

in connection therewith, such attorneys' fees not to exceed $10,000.  The

covenants of Micrion contained in this Section 4 are material to KLA and the

parties hereto but do not constitute a condition to the effectiveness of this

Settlement Agreement, and the failure of Micrion to obtain or maintain the

effectiveness of any Registration Statement as provided in this Section 4

shall not vitiate any release given pursuant to this Agreement or otherwise

constitute a basis for rescission of this Agreement by KLA.    

      H.    Proxy.  All of the Shares initially shall be subject to the terms

of the Proxy substantially in the form attached hereto as Exhibit B.  Economou

shall be designated as the initial Proxyholder, for so long as he remains the

President of Micrion; thereafter, the Proxyholder shall be the President of

Micrion.  The Shares shall be released from the terms of the Proxy upon their

sale or transfer to a third party which is not controlling, controlled by, or

under common control with, KLA.  Upon request by any such third party, Micrion

shall cause its transfer agent to issue a new certificate for such shares

without the legend referred to in Section 3(d)(ii).  KLA shall execute and

deliver the Proxy at the Closing, and KLA agrees that KLA shall not dispute

the validity or enforceability of the Proxy at any time thereafter.

      I.    Closing.  The closing (the "Closing") of the transactions

contemplated by this Agreement shall take place at 2:00 p.m. E.D.T. on May 7,

1996, or at such other time as the parties hereto may agree (the time and date

of the Closing is referred to herein as the "Closing Date").  The Closing

shall be held at the offices of Choate, Hall & Stewart, Exchange Place, 53




                                      8






State Street, Boston, Massachusetts 02109 or such other place as the parties

may agree upon in writing.  At the Closing:

      J.    KLA and each of the Defendants and EG&G, through their respective

counsel, shall execute and deliver a Stipulated Dismissal with Prejudice,

under Rules 41(a)(1)(ii) and (c) of the Massachusetts Rules of Civil

Procedure, of the Complaint, the Counterclaim and the Third-Party Complaint,

substantially in the form attached hereto as Exhibit C.  Each of counsel to

KLA and counsel to the Defendants and EG&G is authorized to execute and file

with the Court the Stipulated Dismissal with Prejudice;

      K.    KLA and each of the Defendants and EG&G shall jointly execute and

deliver this Agreement;

      L.    KLA and the Proxyholder shall jointly execute and deliver the

Proxy;

      M.    Micrion shall issue and cause to be delivered to KLA one or more

share certificates evidencing One Hundred Nineteen Thousand Two Hundred Two

(119,202) Shares;

      N.    H&Q shall cause to be delivered to KLA one or more share

certificates evidencing Ninety-Five Thousand Seven Hundred Ninety-Eight

(95,798) Shares, duly endorsed for transfer;

      O.    KLA, on one hand, and the Defendants and EG&G, on the other hand,

shall execute and deliver such other certificates, receipts and documentation

as may be reasonably requested by counsel for each party to effectuate the

terms, conditions, purposes and aims of this Agreement.

      P.    Representations and Warranties of Micrion.  In connection with the

execution and delivery of this Agreement, and the issuance and delivery of the




                                      9






Shares, Micrion represents and warrants to KLA, effective on the date of this

Agreement and on the Closing Date, as follows:

      Q.    Corporate Power.  Micrion has all requisite legal and corporate

power (i) to issue and deliver the Shares to be issued and delivered by

Micrion hereunder, (ii) to release the Released Matters (as defined in Section

11), and (iii) to carry out and perform its other obligations under the terms

of this Agreement.

      R.    Capitalization.  The authorized capital of Micrion (prior to the

issuance of the 119,202 shares referred to in Section 6(d) above) consists of

12,300,000 shares of common stock, of which approximately 3,907,987 are duly

and validly issued and outstanding, and 5,000,000 shares of preferred stock,

of which none is issued and outstanding.  The Shares to be issued and

delivered pursuant to the terms of this Agreement, when issued and delivered

in accordance with the terms hereof, will be duly and validly issued, fully

paid and nonassessable, and will be issued in compliance with federal,

Massachusetts and California securities laws.

      S.    Corporate Action.  All corporate action on the part of Micrion,

its officers, directors and shareholders necessary for (i) the issuance and

delivery of the Shares pursuant hereto, (ii) the release by Micrion of the

Released Matters, and (iii) the performance of Micrion obligations hereunder,

have been duly taken or will have been duly taken prior to the issuance of the

Shares to be issued by Micrion hereunder.

      T.    Valid and Binding Obligations.  This Agreement and the related

documentation have been duly and validly authorized, executed and delivered by

Micrion, and constitute valid, legal and binding contractual obligations of

Micrion.


                                      10






      U.    Disclosure.   As of their respective filing dates (except as

thereafter amended), all documents (other than preliminary material) that

Micrion has filed with the SEC since January 1, 1995 (collectively the "SEC

Filings") complied in all material respects with all applicable requirements

of the Act and the Exchange Act.

      V.    S-3 Eligibility.  Micrion currently meets the eligibility

requirements set forth in General Instruction I.A. of the General Instructions

for the use of the Form S-3 Registration Statement and will use its best

efforts to continue to meet such requirements as long as KLA's registration

rights as set forth in Section 4 remain in effect.

      W.    Assignment.  Micrion has not assigned, sold, transferred or

disposed of any of its respective interests in any of the Released Matters.

      X.    Reliance.  The foregoing representations and warranties are made

by Micrion with the knowledge and expectation that KLA is placing reliance

thereon.

      Y.    Representations and Warranties of H&Q.  In connection with the

execution and delivery of this Agreement, and the issuance and delivery of the

Shares, H&Q represents and warrants to KLA, effective on the date of this

Agreement and on the Closing Date, as follows:

      Z.    Corporate Power; Shares.  H&Q has all requisite legal and

corporate power (i) to transfer the Shares to be transferred by such Defendant

hereunder, (ii) to release the Released Matters (as defined in Section 11),

and (iii) to carry out and perform its other obligations under the terms of

this Agreement.  The Shares to be issued and delivered pursuant to the terms

of this Agreement, when issued and delivered in accordance with the terms




                                      11






hereof, will be duly and validly issued, fully paid and nonassessable, and

will be issued in compliance with federal, Massachusetts and California

securities laws.

      AA.   Corporate Action.  All corporate action on the part of H&Q, and

its officers, directors and shareholders necessary for (i) the transfer and

delivery of the Shares pursuant hereto, (ii) the release by H&Q of the

Released Matters, and (iii) the performance of H&Q of its obligations

hereunder, have been duly taken or will have been duly taken prior to the

transfer of the Shares to be transferred to KLA hereunder.

      AB.   Valid and Binding Obligations.  This Agreement and the related

documentation have been duly and validly authorized, executed and delivered by

H&Q and constitute valid, legal and binding contractual obligations of H&Q.

      AC.   Assignment.  H&Q has not assigned, sold, transferred or disposed

of any of its respective interests in any of the Released Matters.

      AD.   Reliance.  The foregoing representations and warranties are made

by H&Q with the knowledge and expectation that KLA is placing reliance

thereon.

      AE.   Representations and Warranties of the Other Defendants.  In

connection with the execution and delivery of this Agreement, each of the

Defendants other than Micrion and H&Q (the "Other Defendants") and EG&G

represents and warrants to KLA, effective on the date of this Agreement and on

the Closing Date, as follows:

      AF.   Corporate Power.  Each of the Other Defendants and EG&G has all

requisite legal and corporate power, if appropriate, to release the Released

Matters (as defined in Section 11), and to carry out and perform its other

obligations under the terms of this Agreement.


                                      12






      AG.   Corporate Action.  If appropriate, all corporate action on the

part of the Other Defendants and EG&G and their officers, directors and

shareholders necessary for the release by the Other Defendants and EG&G of the

Released Matters, and the performance of their obligations hereunder, have

been duly taken.

      AH.   Valid and Binding Obligations.  This Agreement and the related

documentation have been duly and validly authorized, executed and delivered by

the Other Defendants and EG&G and constitute valid, legal and binding

contractual obligations of each of the Other Defendants and EG&G.

      AI.   Assignment.  None of the other Defendants nor EG&G has assigned,

sold, transferred or disposed of any of its respective interests in any of the

Released Matters.

      AJ.   Reliance.  The foregoing representations and warranties are made

by the Other Defendants and EG&G with the knowledge and expectation that KLA

is placing reliance thereon.

IV.   Representations and Warranties of KLA.  In connection with the execution

and delivery of this Agreement, KLA represents and warrants to the Defendants

and EG&G, effective on the date of this Agreement and on the Closing Date, as

follows:

      A.    Corporate Power.  KLA has all requisite legal and corporate power

to release the Released Matters (as defined in Section 11), and to carry out

and perform its other obligations under the terms of this Agreement.

      B.    Corporate Action.  All corporate action on the part of KLA and its

officers, directors and shareholders necessary for the release by KLA of the

Released Matters, and the performance of its obligations hereunder, have been

duly taken.


                                      13






      C.    Valid and Binding Obligations.  This Agreement and the related

documentation have been duly, validly authorized, executed and delivered by

KLA and constitute valid, legal and binding contractual obligations of KLA.

      D.    Assignment.  KLA has not assigned, sold, transferred or disposed

of any of its respective interests in any of the Released Matters.

      E.    Reliance.  The foregoing representations and warranties are made

by the KLA with the knowledge and expectation that the Defendants and EG&G are

placing reliance thereon.

V.    General Releases.

      A.    Related Parties.  As used in this Agreement, the term "Related

Parties" shall mean any past, present and future successor, affiliate,

subsidiary, agent, attorney, employee, employer, officer, director, sharehold-

er, owner, alter ego, heir, executor, administrator, estate, representative,

successor, predecessor, assignee, assignor, joint venturer, partner, spouse,

parent or affiliated entity, pension plan, insurer, accountant, agent, or

trustee of the party or any affiliate thereof to which reference is being

made. 

      B.    Released Matters.  As used in this Agreement, the term "Released

Matters" shall mean any and all claims, liens, demands, obligations, actions,

causes of actions, counts, damages, liabilities, losses, fees, costs or

expenses, of any nature whatsoever, known or unknown, past or present,

ascertained or unascertained, suspected or unsuspected, existing or claimed to

exist, (including, without limitation, any and all claims for contribution or

indemnification) which the party giving the release has had or now has against

any party hereto, insofar as those matters to be released hereby in any way

relate to either: (i) the claims raised by, the issues presented by or the


                                      14






subject matter of the Complaint, Counterclaim, Third-Party Complaint or the

Lawsuit, including, without limitation, the matters described in the Recitals

to this Agreement; or (ii) the relationship between KLA and Levy, on one hand,

and the Defendants and EG&G, on the other hand, insofar as the relationship

relates in any way to Micrion, including without limitation any and all

contracts or agreements to which both KLA and Micrion are or were parties. 

Notwithstanding anything contained in the foregoing provisions to the

contrary, none of the parties to this Agreement shall be released from any

claim, liability or obligation created by or arising under this Agreement.

      C.    Releases.  In consideration of the issuance of the Shares, of the

dismissal with prejudice of the Complaint, Counterclaim and Third-Party

Complaint, and of each and every other obligation undertaken by the parties to

this Agreement, which the parties hereto agree and acknowledge is adequate,

good, legal and valuable consideration, each of KLA and Levy, on one hand, and

each of the Defendants and EG&G, on the other hand, hereby releases, remises

and forever discharges each other such party and its or his respective Related

Parties, from the Released Matters.  Further, each of the Defendants and EG&G,

for itself or himself and on behalf of its or his Related Parties, hereby

releases, remises and forever discharges each other and its or his respective

Related Parties from the Released Matters, except for any obligations created

by or arising under any underwriting, investment banking or financial advisory

agreement.

      D.    Waiver of Claims.  This Agreement is a full and final release with

respect to the Released Matters.  Each of KLA and Levy, for itself or himself,

and each of the Defendants and EG&G, for itself or himself, expressly waives

any right or claim of right he or it may have under the provisions of


                                      15






California Civil Code Section 1542 or similar provisions of federal or any

state, statutory or common law.  The parties understand that California Civil

Code Section 1542 provides as follows:

            A general release does not extend to the claims which the creditor
            does not know or expect to exist in his favor at the time of
            executing the release, which if known by him must have materially
            affected his settlement with the debtor.

Each party acknowledges and agrees that this Agreement is a complete

compromise of matters involving disputed issues of law and fact and fully

assumes the risk that the investigation it or he has conducted, if any,

relating to the Released Matters, may be inadequate and that the facts with

respect to which this Agreement is executed may hereafter be found to be

different from the facts that such party now believes to be true.  Each party

assumes the risk of such possible differences of facts and hereby agrees that

this Agreement shall remain in effect, notwithstanding such differences of

fact.  Each party further recognizes that the other party to this Agreement

may have information or facts of which it/he are not aware and agrees and

acknowledges that in entering into this Agreement it/he is not relying on the

representations of any other party regarding the facts and circumstances

relating to the Released Matters.  

VI.   Fees and Costs.  KLA and Levy, on one hand, and the Defendants and EG&G,

on the other hand, shall bear its or their own fees and costs, including

attorney's fees, incurred in connection with the Lawsuit, the disputes between

the parties hereto as described in the Recitals, and negotiation, drafting,

execution, delivery and performance of this Agreement and the related

documentation except as otherwise provided in Section 4.

VII.  Understanding of Agreement.  Each party affirms and acknowledges that it

or he has both read this Agreement and had an opportunity to have this

                                      16






Agreement fully explained by counsel of choice, and fully understands and

appreciates the words and terms used in this Agreement and their effect.  Each

party further affirms and acknowledges that this Agreement is a full and final

compromise, release and settlement of the Released Matters, and that each

party signs this Agreement of its and his own free will.  Each party, and/or

the respective attorneys of each party, has carefully and fully reviewed and

revised, or has had an opportunity to revise, this Agreement.  Accordingly,

the parties agree that the normal rule of construction that any ambiguities

are to be resolved against the drafting party shall not be utilized in the

interpretation of this Agreement.

VIII. No Admission of Liability.  Each party affirms and acknowledges that

this Agreement is a compromise of disputed claims and is not intended to be

and shall not be construed as, an admission of liability on the part of any

party hereto to any other party.

IX.   Effect of Captions.  The titles to the various provisions of this

Agreement are used for convenience or reference only and are not intended to

and shall not in any way enlarge or diminish the rights and obligations of the

parties hereto or effect the meaning or construction of this Agreement.

X.    Partial Invalidity.  Should any part, term, provision or portion of this

Agreement be decided by a court of competent jurisdiction to be illegal or in

conflict with any laws of any state, or of the United States, and on account

thereof, or for any other reason, be rendered unenforceable or ineffectual,

the validity of the remaining parts, terms, portions or provisions shall be

enforceable and shall not be affected thereby.

XI.   Successors and Assigns.  The terms and conditions of this Agreement

shall inure to the benefit of and be binding upon the respective permitted


                                      17






successors and assigns of the parties.  The rights and obligations under this

Agreement are not assisgnable without the written consent of each of the

parties to this Agreement or their authorized representatives, except to the

successor of all or substantially all of the business of the assigning party

(regardless of the form of the transfer thereof, e.g. by way of merger, sale

of assets or similar transaction), and provided that nothing contained herein

shall be deemed to restrict KLA's transfer of the Shares as otherwise

permitted under this Agreement.

XII.  Notices.  Any and all written communications required or permitted by

this Agreement, or by law, to be served upon or given to any party hereto by

another party, shall be in writing and shall be personally served or given by

facsimile or overnight courier mail at the addresses indicated below:


If to KLA or Levy:                        KLA Instruments Corporation
                                          160 Rio Robles
                                          San Jose, CA  95161-9055
                                          Attention:  V.P. Finance and
                                          Administration, CFO

with a copy to:                           Graham & James LLP
                                          600 Hansen Way
                                          Palo Alto, CA  94304
                                          Attention:  Michael Kalkstein, Esq.

If to Micrion:                            Micrion Corporation
                                          One Corporation Way
                                          Peabody, MA  01960-7990
                                          Attention:  President
If to H&Q:                                Hambrecht & Quist Group, Inc.
                                          One Bush Street
                                          San Francisco, CA  94104
                                          Attention:  General Counsel

If to the Other Defendants:               c/o Micrion Corporation
                                          One Corporation Way
                                          Peabody, MA  01960-7990
                                          Attention:  President



                                      18








If to EG&G:                               EG&G, Inc.
                                          45 William Street
                                          Wellesley, MA  02181
                                          Attention:  General Counsel

with copies in each case to:              Choate, Hall & Stewart
                                          Exchange Place
                                          53 State Street
                                          Boston, MA  02109-2891
                                          Attention:  Kevin Lesinski, Esq.

XIII. Complete Agreement, Modification and Waiver.  This Agreement together

with the Exhibits hereto and the documents delivered pursuant hereto or

referred to herein contain the entire agreement between the parties hereto

with respect to the transactions contemplated herein and supersede all

previous negotiations, commitments and writings.  This Agreement may be

modified only by a writing signed by each of the parties to this Agreement or

by their authorized representatives.  No waiver of any provision of this

Agreement shall be effective unless made in writing.  No waiver of any breach

of this Agreement shall constitute a waiver of any previous or subsequent

breach of the same or any other provision of this Agreement.

XIV.  Applicable Law.  This Agreement shall be governed in all respects by the

laws of the Commonwealth of Massachusetts without regard to the conflicts of

laws provisions thereof.

XV.   Counterpart Signatures.  This Agreement may be executed in any number of

counterparts and by facsimile, with the same effect as if all parties have

signed the same document, and each such executed counterpart shall be deemed

to be an original instrument.  All such executed counterparts together shall

constitute one and the same instrument.  True and correct copies may be used

in lieu of the original.

                  SIGNATURE PAGES TO THE SETTLEMENT AGREEMENT


                                        
                                      19
                                        




      
      IN WITNESS WHEREOF, the parties have executed this Agreement as of the

day and year set forth in the heading hereof.

KLA INSTRUMENTS CORPORATION               DEMUTH, FOLGER & TERHUNE
By: Robert J. Boehlke                     By:  Thomas W. Folger           
    Vice President and CFO                General Partner of the General       
                                          Partner of DEMUTH, FOLGER & TERHUNE
                                                                       


KENNETH LEVY, THIRD-PARTY                 PETER W. WALLACE
DEFENDANT

                                                                       
MICRION CORPORATION                       LOUIS P. VALENTE
By: NICHOLAS P. ECONOMOU
President and Chief Executive Officer

                                          
                                          THOMAS W. FOLGER

HAMBRECHT & QUIST GROUP

By: Stephen M. Machtinger                                                     
    Vice President, General Counsel        
    and Secretary                         NICHOLAS P. ECONOMOU,
                                          Individually and as the Proxyholder


                                                                       
EG&G, INC.                                JOHN A. DOHERTY
                                    
By: John F. Alexander, II                                            
Sr. Vice President and                    CHARLES E. MINIHAN
Chief Financial Officer



APPROVED AS TO FORM:

GRAHAM & JAMES LLP,
COUNSEL TO KLA AND LEVY

By:  Michael Kalkstein


APPROVED AS TO FORM:

CHOATE, HALL & STEWART,
COUNSEL TO THE DEFENDANTS AND EG&G

By:  Kevin J. Lesinski



                               MICRION CORPORATION AND           EXHIBIT 11
                                     SUBSIDIARIES
                           Statement of Computation of Per
                                    Share Earnings


                                       (unaudited)         (unaudited)
                                  For the three months  For the nine months
                                     ended March 31,     ended March 31,
                                      1995      1996      1995      1996
                                     (in thousands except per share data)

    Net Income                       $710      $446    $1,855    $1,513

    (a) Computation of Primary 
          Earnings per Share:

        Weighted average common
        equivalent shares 
        outstanding Common stock    3,901     3,907     3,272     3,905
      Common stock equivalents:
        Warrants(1)                    37        53       117        49
        Options (2)                     3        94         2        66
      Weighted average common and
      common equivalent shares
      outstanding                   3,941     4,054     3,391     4,020

      Primary Earnings per Share    $0.18     $0.11     $0.55     $0.38


    (b) Computation of Fully 
        Diluted Earnings per Share:

        Weighted average common
         equivalent shares 
         outstanding Common 
         stock                      3,901     3,907     3,272     3,905
      Common stock equivalents:
        Warrants(1)                    39        55       124        51
        Options (2)                     -       107        16        78
    Weighted average common and
    common equivalent shares
    outstanding                     3,940     4,069     3,412     4,034

     Fully Diluted Earnings 
     per Share                      $0.18     $0.11     $0.54     $0.38

    (1)  Warrants  issued  7/93 for  160,000  shares  and 5/94  for  100,000
    shares, less shares reacquired under the treasury stock method.

    (2)  Options granted  11/94, 12/94, 5/95,  12/95 and  1/96 under  option
    plan, less shares required under the treasury stock method.


<TABLE> <S> <C>

<ARTICLE> 5

<LEGEND>
This schedule contains summary financial information extracted from the
Registrant's Condensed Consolidated Financial Statements appearing in the
Registrant's quarterly report on Form 10-Q for the quarter ended March 31, 
1996, to which this schedule is an exhibit, and is qualified in its entirety 
by reference to such quarterly report.
</LEGEND>

<MULTIPLIER> 1,000
       
<S>                             <C>
<PERIOD-TYPE>                   9-MOS
<FISCAL-YEAR-END>                          JUN-30-1996
<PERIOD-END>                               MAR-31-1996
<CASH>                                           3,382
<SECURITIES>                                         0
<RECEIVABLES>                                   14,061
<ALLOWANCES>                                         0
<INVENTORY>                                     15,333
<CURRENT-ASSETS>                                33,664
<PP&E>                                           6,220
<DEPRECIATION>                                   3,439
<TOTAL-ASSETS>                                  36,688
<CURRENT-LIABILITIES>                            9,674
<BONDS>                                              0
                                0
                                          0
<COMMON>                                        28,873
<OTHER-SE>                                     (2,692)
<TOTAL-LIABILITY-AND-EQUITY>                    36,688
<SALES>                                         26,117
<TOTAL-REVENUES>                                27,157
<CGS>                                           16,236
<TOTAL-COSTS>                                   17,283
<OTHER-EXPENSES>                                     0
<LOSS-PROVISION>                                     0
<INTEREST-EXPENSE>                                  35
<INCOME-PRETAX>                                  2,323
<INCOME-TAX>                                       810
<INCOME-CONTINUING>                              1,513
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                     1,513
<EPS-PRIMARY>                                      .38
<EPS-DILUTED>                                      .38
        


</TABLE>


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