MICRION CORP /MA/
10-K, 1996-09-30
SPECIAL INDUSTRY MACHINERY, NEC
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                                     UNITED STATES
                           SECURITIES AND EXCHANGE COMMISSION                  
                               Washington, D.C.  20549

                                      FORM 10-K


      [ X  ]    ANNUAL REPORT  UNDER SECTION 13  OR 15(D) OF THE SECURITIES
                  EXCHANGE ACT OF  1934  [FEE REQUIRED] FOR THE FISCAL YEAR
                  ENDED JUNE 30, 1996
                                      or
      
      [    ]    TRANSITION REPORT  PURSUANT TO  SECTION 13 OR 15(D) OF THE
                  SECURITIES EXCHANGE ACT  OF 1934 [NO  FEE REQUIRED] FOR
                  THE TRANSITION PERIOD FROM ___________ TO ____________.      
                        

                        Commission File Number:  0-23840 

                              MICRION CORPORATION
               (Name of registrant as specified in its charter)

             Massachusetts                                  04-2892070
      (State or other jurisdiction of                       (I.R.S. Employer
      incorporation or organization)                        Identification No.)

            One Corporation Way                             01960
          Peabody, Massachusetts                          (Zip Code)
 (Address of principal executive offices)

                                (508) 531-6464
             (Registrant's telephone number, including area code)

Securities registered under Section 12(b) of the Act:  None

Securities registered  under Section 12(g) of  the Act:  Common  Stock, no par
value

Indicate by check mark whether the  registrant (1) filed all reports  required
to be filed  by Section 13  or 15(d) of  the Securities  Exchange Act of  1934
during the preceding 12 months (or for such shorter period that the registrant
was required  to file such reports),  and (2) has been subject  to such filing
requirements for the past 90 days. 
Yes    [X]         No   [   ]

Indicate by check mark if disclosure of delinquent filers pursuant to Item 405
of Regulation S-K is  not contained herein, and will not be  contained, to the
best  of registrant's knowledge, in definitive proxy or information statements
incorporated by  reference in Part III of  this Form 10-K or  any amendment to
this Form 10-K.    [ X ]       

The  aggregate  market value  of the  registrant's voting  stock held  by non-
affiliates of the registrant was $42,038,296 as of September 24, 1996.



The number  of shares  of  the registrant's  Common  Stock outstanding  as  of
September 24, 1996 was 4,033,363.
                      
                      DOCUMENTS INCORPORATED BY REFERENCE


Portions of the registrant's Annual Report to Stockholders for the fiscal year
ended June 30,  1996 (the "1996 Annual Report") are  incorporated by reference
in  Part II, and  portions of the registrant's  definitive Proxy Statement for
its Annual  Meeting of Stockholders to  be held November 14,  1996 (the "Proxy
Statement") are incorporated by reference in Part III.


                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    
                                    PART I

Item 1.           BUSINESS. 

Introduction

      Micrion  Corporation (the  "Company" or  "Micrion") is  a leader  in the
design,  development,  manufacture  and  marketing  of focused-ion-beam  (FIB)
systems.   Micrion's  FIB  systems are  used  in the  design,  fabrication and
testing of semiconductor integrated  circuits (ICs) and other high  technology
devices.   FIB  technology provides  a unique  combination of  capabilities to
image, analyze and  perform "microsurgery"  on ICs and  other high  technology
devices.     Semiconductor  integrated  circuit  and   other  high  technology
manufacturers  use Micrion's FIB  systems to reduce  time to market  and/or to
achieve and  maintain acceptable  manufacturing yields  more quickly and  cost
effectively.  The Company introduced the world's first FIB system specifically
designed for use  in the manufacturing process  of ICs in 1985 and  since then
has introduced new products incorporating a variety of technological advances,
including  the MicroMill HT FIB  system in fiscal  1996, specifically designed
for magnetic head manufacturing applications.

Technology and Market Trends

      Integrated  circuits  are critical  components  of  a  wide  variety  of
products such as computers, telephones, televisions, automobiles and aircraft.
As applications for ICs continue  to expand, the trend  in the industry is  to
put  more  functionality  on  a  single  chip.    To  increase  functionality,
semiconductor  manufacturers  are  producing  larger chips  with  more  layers
utilizing smaller feature sizes.   Improvements in lithography technology have
allowed the printing of progressively smaller features on progressively larger
wafers.  Minimum feature sizes in advanced ICs  are now less than 0.5 microns,
or one one-hundredth the diameter of a human hair.  The density of  components
on  the most advanced ICs  has approximately doubled every  two years.  At the
same time, the market price per functional element on a chip has decreased and
product  cycles  have shortened.   The  combination  of technology  and market
forces  has put  enormous pressure on  semiconductor manufacturing  tools with
increased capabilities.  FIB  systems, such as those manufactured  by Micrion,
have been developed to meet this need. 

      Disk  drive  manufacturers are  constantly  striving  to achieve  higher
densities of data on a disk because higher densities generally  permit greater
storage capacities at  lower costs in  smaller packages.   One of the  primary
factors  that determines  data density  is  the size  and  performance of  the
magnetic "read/write" heads.  Smaller heads  can record and retrieve data from
narrower tracks, thus providing  increased data density on a given  disk size.
Therefore,  disk drive  manufacturers desire  to produce  increasingly smaller
read/write heads.   However, the current photolithographic  technology used to
manufacture  such heads  seems to be  reaching a barrier  beyond which smaller
heads  cannot be  reliably produced.   In  fiscal 1996,  the MicroMill  HT FIB
system was introduced to help meet the need of producing smaller, more precise
magnetic heads.

                                       2







Integrated Circuit Manufacturing Process and Problems

      The  integrated circuit  manufacturing process  consists of  three major
phases:  design, fabrication and test.

      The  design  phase   begins  with  the  specification  of   the  desired
functionality  and architecture of the  IC and ends  with a fully operational,
mass-producible IC.  Depending on the complexity of the IC, the average design
phase often  can last from several months to  several years.  The design phase
involves  many iterations of design, test, analysis  and redesign.  A key step
is the  computer aided design  of a circuit  layout that defines  the physical
locations of the circuit  elements.  The  IC manufacturer analyzes the  layout
using  design  verification  software   and  makes  necessary   modifications.
Although  design verification  software  is effective,  the manufacturer  must
produce   working  sample  chips  before  beginning  volume  production.    To
accomplish  this, a set of master patterns or masks must be generated and used
to fabricate sample chips.  Identifying and correcting design problems exposed
in the test of initial sample chips presents one of the most difficult, costly
and potentially time  consuming tasks in the  IC design phase.  This  task has
traditionally  been   done  using  an  iterative   design  modification  cycle
consisting of sample chip fabrication, sample chip test, data analysis, design
change,  new design verification, new mask  set generation and new sample chip
fabrication.   This cycle takes from  several weeks to several  months and may
have to be  repeated numerous times to  arrive at a final proven  design.  The
amount of time spent in the design modification cycle has a significant impact
on when a new product can be introduced to the marketplace.

      The fabrication phase can begin once sample chips have been manufactured
and  the design is deemed  to be functional.   The first critical  step in the
fabrication phase is to generate a production  mask set with as few defects as
possible, as mask defects  result in circuit failures and  manufacturing yield
loss.   Following mask generation, multiple  ICs are fabricated on  a wafer by
performing  in sequence a large  number of complex  processing steps including
film deposition, mask pattern  printing (lithograph) and  film etch.  In  this
manner,  the  circuit  is built  up  layer  by  layer  into a  complex  three-
dimensional structure.  Since wafer fabrication is very costly, it is critical
to  know that  each process  step is  being performed  correctly.   Expensive,
specialized equipment is used to obtain  data from the wafers as they progress
through  the fabrication sequence.   Information is relatively  easy to gather
for  each individual step by  making observations during  or immediately after
the step  is completed;  however, information on  how various steps  or layers
relate to  each  other is  much  more difficult  and  costly to  gather  using
traditional methods since  previous layers are  covered by subsequent  layers.
Traditionally, three-dimensional  information has been obtained  by the costly
and wasteful procedure of cutting or breaking a wafer and analyzing its cross-
section with a high resolution scanning electron microscope (SEM).

      During  the  test  phase,  completed  wafers  undergo  a  rigorous  test
procedure and are  then cut into  individual chips and  packaged.  Chips  that
fail their initial  tests or subsequently fail after some  period of use often
undergo  failure  analysis by  semiconductor  manufacturers  to determine  and
correct  the cause of the failure.   Failure analysis is a difficult procedure

                                       3






as faults are often embedded within the layers of  the IC.  In order to assess
accurately the  cause of  failure, the  manufacturer must be  able to  locate,
expose and analyze the faulty area without destroying the surrounding areas or
losing  the information  at  the site  of the  fault.   Shrinking  geometries,
increased complexity and more three-dimensional chip structures have created a
need for instruments with higher resolution, more accurate navigation (ability
to locate  specific areas  and  features on  a chip  or  wafer) and  increased
analytical capability.

      Micrion's FIB  systems permit  semiconductor manufacturers  more quickly
and  effectively to  view, analyze  and modify  ICs and  mask sets  during the
design, fabrication and test phases.   The Company's FIB systems use  a highly
focused beam of ions to create high resolution images of a portion of an IC or
workpiece to locate  specific areas  where work is  necessary.  Once  located,
Micrion's systems  can remove or add material to modify the circuit or analyze
the area  of  the circuit  to determine  construction and  composition.   This
combination  of  capabilities  is   unique  to  FIB  systems  and   allows  IC
manufacturers  to  use  one  system  to  perform  many  analysis  and  circuit
modification tasks with accuracy, precision and speed that previously were not
possible.

Magnetic Head Trimming Process and Problems

      The magnetic head manufacturing process is driven by the need to produce
smaller read/write heads  that can  record and retrieve  data accurately at  a
lower  effective  overall  cost.     The  existing  photolithographic  process
technology seems  to  be approaching  size limit  barriers that  may make  the
process less able to produce increasingly smaller heads.  Currently, the heads
are manufactured using a  stepper process, similar to that  used in integrated
circuit manufacturing,  to produce row  bars containing thousands  of magnetic
heads  that  are then  introduced  to an  ion  etch process  to  remove excess
material and to achieve the proper head size.

      Micrion's MicroMill  HT FIB  system overcomes  certain of the  technical
limitations of head manufacturing, using a combination of a highly focused ion
beam and sophisticated automation.   Precisely positioning and imaging  heads,
the MicroMill HT FIB  system automatically defines and performs  the necessary
micromachining to the manufacturer's specification.

FIB Systems Applications

      There  are   four  principal   applications  of  FIB   systems  in   the
semiconductor  manufacturing process:     circuit  modification, mask  repair,
process control and failure analysis.  Each  is used in one or more phases  of
IC manufacturing.    There is  one  principal application  in  the disk  drive
production process:  magnetic head trimming.

      Circuit  Modification.   The  wiring of  a chip  can  be modified  using
Micrion's  FIB  systems  by  removing  and adding  metal  connections  without
damaging  any of  the circuitry  in  the intervening  layers.   Wiring can  be
modified on even the most advanced ICs containing as many as five metal layers
sandwiched between multiple layers of insulating materials.

                                       4






      Mask Repair.   Mask quality has  a major impact  on IC yield  during the
manufacturing process.  Defects are usually the result of contamination during
mask fabrication.  The Company's FIB systems  can be used to make repairs on a
mask by  removing unwanted  material and  replacing missing  material.   It is
possible to  repair defects  with a  precision that is  not attainable  by any
other  technique, often making  the repaired site  indistinguishable from non-
defective areas.

      Process Control.  Semiconductor  manufacturers use Micrion's FIB systems
to prepare  and view a cross-section  of an in-process wafer  to provide vital
information about the three-dimensional structure of the circuit.  The systems
can determine  layer-to-layer alignment, layer thickness,  etch profiles, step
coverage and metal grain  structure.  In addition, particle  contamination can
be analyzed to determine its origin.

      Failure  Analysis.  The combined  features of the  Company's FIB systems
can  permit  semiconductor  manufacturers  to dissect  and  analyze  defective
circuits more  precisely than is possible by any other technique.  A defective
area can be exposed one segment at a time in increments of a small fraction of
a micron.   Each slice  can be sequentially  imaged and analyzed  to obtain  a
complete understanding of the defect, helping to determine its cause.

      Magnetic  Head Trimming.   The features of  the MicroMill HT  FIB system
allow it to position precisely and image magnetic read/write heads and perform
the  necessary micromachining  to  produce smaller  heads.   This  allows  for
narrower tracks and greater data storage density on a disk drive.

Micrion Products

      FIB Systems

      Micrion FIB systems consist of a number of modular subsystems, including
the ion column and source, the control computer, the  control electronics, the
substrate handling mechanism  and the  vacuum system.   The Company's  systems
incorporate proprietary software through a graphical user interface similar to
those used on personal computers.  Micrion's proprietary software controls the
electronics used throughout the  FIB systems, manipulates the ion  beam, moves
the workpiece, collects imaging data and performs other system functions.

      To minimize  the design cycle  and inventory costs  of new systems,  the
Company utilizes its modular subsystems and components wherever suitable.  For
example, the high resolution ion  column used in all of Micrion's  current FIB
products was originally developed for application to  x-ray mask repair and is
now  used for  other FIB  applications such  as circuit  modification, process
control and  failure analysis.  Much  of the electronics and  software used in
Micrion FIB systems are common to all of Micrion's FIB products.  The price of
Micrion FIB systems generally ranges from $400,000 to $2,500,000, depending on
the features selected.

      The Micrion 9000 Series  is used primarily for circuit  modification and
cross-sectional  imaging and is the  largest unit volume  product of Micrion's
family of FIB systems.  In cross-sectional imaging applications, the important

                                       5






attributes of substrate handling  are accurate x/y navigation and  the ability
to tile  large work pieces,  such as  8" silicon  wafers, to angles  up to  60
degrees.  The  Micrion 9000  Series incorporates a  fully automated  computer-
controlled 8"  stage that can accommodate  the largest silicon wafers  used in
semiconductor  manufacturing  today.    Substrates  are  loaded  on  specially
designed holders  that can be inserted onto the Micrion 9000 Series stage with
the simple selection of an icon on the control computer screen.

      The Micrion 9000EX Series incorporates a state of the art field emission
SEM  column  in  the  basic  Micrion  9000 Series  platform  to  provide  high
resolution SEM images in addition to the features offered by FIB technologies.
The combination of SEM and FIB technologies permits increased resolution of  a
cross-sectional image without breaking the wafer or tilting the workpiece.  An
available  option for the Micrion 9000EX Series  is an x-ray spectrometer that
detects  x-rays whose characteristic wavelength  can be used  to determine the
elements comprising the area being analyzed.

      The  Micrion  9800 is  used primarily  for  circuit modification  and is
differentiated from  the 9000  Series  principally by  its substrate  handling
capabilities.  In automated  circuit modification applications, x/y navigation
is required to be more accurate but the workpiece  does not need to be tilted.
In circuit modification, however, navigation on a substrate to  an accuracy of
better than 0.25 microns is desired.  To achieve this higher accuracy, Micrion
equips such  systems with x/y stages in which stage position is monitored by a
laser interferometer.  This type of measurement technique is the most accurate
available and at the present time only Micrion FIB systems offer this feature.
The handling and positioning capability of the Micrion  9800 is valuable since
it  permits  a large  number  of complex  modifications  to be  programmed and
automated, eliminating operator error in making the modifications.

      The Micrion MicroMill HT FIB system  is used primarily for magnetic head
trimming by disk  drive component  manufacturers.   It utilizes  parts of  the
Micrion  9800  platform and  incorporates  sophisticated  imaging software  to
analyze the read/write heads and to determine which areas to micromachine in a
completely automated process.  The system is designed to run automatically for
extended periods of time.   The initial shipments of the Micrion  MicroMill HT
system were made in the first half of calendar 1996.

      The Micrion 8000  is similar  in hardware configuration  to the  Micrion
9800  but is used for the repair  of masks, including phase shifting masks and
x-ray masks.   The Micrion  8000 comes equipped  with a number  of specialized
etching and deposition processes customized for mask repair applications.

      The Micrion 2000  Series system is designed for use  by customers who do
not require the  large substrate size handling possible  with the Micrion 9000
Series and who are willing to accept a less automated instrument in return for
reduced cost.  Many of the features of the Micrion 9000 Series are  maintained
in  the Micrion  2000  Series.   This series  includes  the Micrion  JFIB-2100
Specimen Preparation System for  use in connection with  transmission electron
microscopes.


                                       6



      
      
      
      
      Laser Systems

      Micrion also manufactures  and sells  a focused laser  beam system,  the
Micrion  L2, to  perform cut  and deposition  operations  on substrates.   The
primary applications of the Micrion L2 system are the repair of liquid crystal
display (LCD) substrates  used in laptop computers and plasma  panels used for
flat  display  television  systems.   As  these  applications  do not  require
resolutions as  high as FIB applications, the Micrion L2 uses high speed laser
cutting and laser-induced  metal deposition to  achieve higher throughput  for
production  repairs.   The  Micrion L2  uses  a proprietary  miniature  vacuum
chamber to  deliver the process gases to the vicinity of the substrate needing
repair  without the  time consuming  necessity of  transferring the  large LCD
panel into a vacuum chamber.

Markets

      The  primary current markets for Micrion FIB systems are segmented among
the  five principal applications:   circuit modification, mask repair, process
control,  failure analysis,  and  disk  drive  head  trimming.    The  primary
customers for circuit modification, process  control and failure analysis  are
the  failure  analysis groups  within  semiconductor  manufacturing companies.
These  groups provide technical support to design groups and wafer fabrication
groups.    At the  present time,  the market  is  beginning to  segment within
semiconductor companies,  between design applications and  fabrication support
applications.   As these  markets segment, the  Company expects  each to  grow
independently.  The need for  FIB systems by semiconductor design  groups will
be driven by the number of new designs introduced each year and the complexity
of these designs.   As cross-sectional imaging becomes more  widely integrated
into wafer fabrication lines, the market is expected  to grow as semiconductor
manufacturers enhance the capabilities of existing wafer fabrication lines and
install new fabrication lines.

      The  mask  repair  market   comprises  semiconductor  manufacturers  and
commercial  suppliers  of  masks  to  the  semiconductor  industry.     Larger
manufacturers, such  as IBM,  Motorola, Intel, Hitachi,  Fujitsu and  Samsung,
generally  maintain  their own  in-house  mask  making  capability.    Smaller
semiconductor   companies  typically  buy   from  commercial  mask  suppliers,
including DuPont, Dai Nippon Printing, Toppan, Photronics and Hoya.  While the
Company believes that the  market for mask repair applications  will increase,
sales of FIB mask repair tools by  the Company are not expected to represent a
substantial portion of the Company's sales in the foreseeable future.

      The  primary customers for disk drive head trimming are manufacturers of
computer disk drives and related components.  Disk drive manufacturers compete
to achieve the highest data storage capacity  at the lowest cost.  The ability
to increase  data density depends  on the size  and performance  of read/write
heads.    With  current   production  techniques  reaching  practical  limits,
manufacturers  are considering  the use  of FIB  technology  to assist  in the
production of smaller heads.






                                       7




Sales and Marketing

      Micrion utilizes a  network of direct sales  engineers, distributors and
representatives  to sell  the Company's  products to  customers in  the United
States, Europe, Japan and certain of the Pacific Rim countries.  In the United
States,  the  Company  has  four  sales  engineers.    Micrion's  wholly-owned
subsidiary, Micrion GmbH,  headquartered in Munich, employs one sales engineer
for Europe and  Western Asia.  The Company's sales  engineers are supported by
management personnel.

      In Japan, the Company uses Tokyo Electron Limited (TEL) as its exclusive
distributor  of semiconductor  manufacturing  equipment in  Japan.   TEL  buys
equipment at negotiated prices from  Micrion and resells the equipment  to end
users in Japan.   The Company entered into  an initial distribution  agreement
with TEL  in 1986.   The distribution  agreement is cancelable  with 60  days'
notice  to either party.   At  the present  time, TEL  maintains demonstration
equipment  inventory and sufficient spare parts to service the installed base.
Typically, TEL  does not  purchase equipment  from  the Company  until it  has
received an order from a customer.  As of June 30, 1996, TEL maintained a full
time staff  of one sales manager,  three salesmen and seven  service engineers
dedicated solely to Micrion's FIB products.

      The Company also uses JEOL, Ltd. ("JEOL") for the exclusive distribution
of the  Micrion JFIB-2100 Specimen Preparation System in Japan.  These systems
are sold  in conjunction with JEOL's  sales of their line  of transmission and
scanning electron  microscopes.   The Company  entered into  this distribution
agreement in  May 1995 and began shipments of the Micrion JFIB-2100 systems to
JEOL's  customers in fiscal 1996.  The distribution agreement is automatically
renewable  annually  unless terminated  by either  party  by 90  days' written
notice prior  to the end  of any  annual term.   In fiscal  1996, the  Company
consigned a JFIB-2100 system to JEOL for sales demonstrations.  JEOL is solely
responsible for sales distribution of this product in Japan, while the Company
maintains installation and  service responsibility.  Typically, JEOL  does not
purchase  equipment from  the Company until  it has  received an  order from a
customer.  As of June 30,  1996, JEOL's sales staff offers Micrion's JFIB-2100
system as part of their product offerings.

      Micrion  has established  a  wholly-owned subsidiary  in Japan,  Micrion
Japan Corporation KK,  to provide technical  sales and service support  to TEL
and JEOL,  and to provide information  to the Company  about the needs  of the
Japanese market.   Currently Micrion  Japan Corporation KK  employs one  sales
engineer and one service engineer.

      In South Korea, the  Company uses ETEC Systems Korea  Corporation (ETEC)
as its  sales and service representative.  ETEC is compensated on a commission
basis and is paid after the product is delivered.  ETEC also provides warranty
service after the installation and customer acceptance of FIB systems in South
Korea.   It  receives  an additional  commission after  the  inception of  the
warranty period, which generally extends for one  year.  As of June 30,  1996,
ETEC maintained a staff of one salesman and seven service engineers in support
of Micrion's FIB products.


                                       8





      
      In  each of the two other Pacific  Rim countries where the Company's FIB
products  are marketed,  Taiwan  and  Singapore,  the  Company  uses  a  local
representative  compensated on a straight sales commission basis and paid only
when a product is delivered.  In  Taiwan, the Company has established a branch
office,  which is  staffed  by one  sales  engineer, to  work  with the  local
representative.

      Micrion  has entered  into an  arrangement with  ZMC Technologies,  Ltd.
(ZMC), which provides  technical contract labor to the Company  to support the
installation  of the Company's MicroMill HT FIB  systems at a customer site in
Thailand.   As of  June 30,  1996, ZMC  maintained  a staff  of seven  service
engineers to support the Micrion installed systems

Customer Support and Service

      The  Company  maintains  separate  customer support  and  field  service
organizations  that work  closely together  to promote  customer satisfaction.
The  Company's customer  support and  field service  personnel do  not perform
sales and marketing functions.  The  customer support organization is a  group
of  engineers, resident at the  Company's factory, dedicated  to technical and
logistical support  of the field engineers on a worldwide basis.  The customer
support group,  as of June 30, 1996, consisted  of 24 employees, and has ready
access  to in-house  engineering,  manufacturing and  final test  personnel to
provide rapid and knowledgeable support for the engineers maintaining customer
equipment in the field.

      As  of June  30, 1996,  the field  service group  consisted of  35 field
engineers  stationed around  the world near  the Company's  installed systems.
The  field service group consists of employees of Micrion and its distributors
and  representatives.  Each engineer  is assigned to  specific customer sites.
Service is provided  at the  customer's discretion either  under full  service
contracts  where Micrion receives monthly  revenue and provides  all the labor
and  spare parts  necessary  to maintain  system  performance, or  as  on-call
service where the customer is billed on a time and materials basis for service
work performed at  the customer's site.  A small  number of customers contract
with  the Company  for telephone  support of  the customers'  system operation
staff.

Research and Development

      As  of  June 30,  1996, the  Company's  research and  development effort
employed  43  scientists and  engineers, 19  of  whom have  advanced technical
degrees.  Both short- and long-term programs  are underway to enhance existing
products and develop new products and technology.  Current short-term research
and development  programs  include work  to improve  source lifetime,  develop
improved columns that can  produce smaller spots, expand the  applicability of
ion-assisted   chemical   processes  and   enhance   the   materials  analysis
capabilities  of systems.  Long-term research programs are underway to explore
areas  such as  advanced  ion sources,  beam  focusing techniques  and  system
architectures that could lead to significant improvements in  the capabilities
of future FIB systems.  In fiscal  1996, 1995 and 1994 the Company spent  $4.2


                                       9






million,  $2.9  million  and  $1.9  million,  respectively,  on  research  and
development.

      Research and development activities are enhanced by funded contracts and
strategic   alliances   with    government   agencies,   major   semiconductor
manufacturers  and universities.   Funded  programs  help provide  support and
leverage for the Company's research and development efforts, allowing a larger
and more complete overall program than would be possible with internal funding
alone.   Contracts are chosen in  areas that are closely  related to Micrion's
main  business  activities.   The Company  is currently  involved in  a funded
program with  ARPA.  Under this  program, the Company is  developing gas field
ion source (GFIS) technology.   This technology  has the potential to  produce
significant  performance  improvements in  future FIB  systems.   Although the
United States government  retains a  license to use  the technology  developed
under funded contracts for its own  internal purposes, the Company retains the
exclusive right for commercial development of the technology.   In some cases,
the  funding  of research  by  ARPA  is based  upon  needs  identified by  the
semiconductor industry.  In  fiscal 1996, 1995 and 1994,  the Company received
research  and  development revenues  of $1.2  million,  $2.4 million  and $4.4
million,  respectively.   Due  to pressures  on  US government  budgets, funds
available for research and development programs have  been reduced, and no new
contracts were  issued to the  Company in fiscal  1995 or  1996.  The  Company
expects external research and development funding to decrease in the future.

      Technology licensing  agreements  are  in effect  with  the  Max  Planck
Institut  in Germany  and  certain large  industrial  companies.   Cooperative
development  programs are underway  with the Department of  Energy and a large
domestic  semiconductor  manufacturer.     The  Company  believes  that  these
arrangements accelerate  technology development  and guide the  directions the
Company takes in  research and development toward those that are responsive to
current  and future customer requirements.  They also provide valuable insight
into   the  feasibility   and  market   potential  of   long-range  technology
developments.

Manufacturing

      Manufacturing  of all Micrion products is done at the Company's facility
in  Peabody, Massachusetts.    FIB system  manufacturing entails  fabrication,
assembly, integration and  test of  components and subassemblies  made by  the
Company  or purchased from suppliers.  Key  components such as ion sources and
ion  focusing  columns  are  designed  and  assembled  in-house   using  parts
fabricated both internally  and by  outside suppliers.   Other components  and
subassemblies  are   either  fabricated  in-house  or   purchased  if  readily
available.    Most  purchased  parts and  assemblies  are  standard  products.
Although certain components and subassemblies  used in the Company's  products
are made  to the  Company's  specifications, some  components and  subassembly
items, such as high voltage power supplies, are obtained or are available from
a limited  number of suppliers.   Although the Company believes  that it could
develop alternative sources  of supply for  all of the  parts included in  its
systems,  the Company could experience  significant delays in  the shipment of
its products if key suppliers were unable to deliver product to the Company in
a timely way.

                                      10






      The  typical manufacturing  cycle  takes  between  four and  six  months
depending  on the  type  and  complexity of  the  system.   The  manufacturing
operation  utilizes  up-to-date  techniques  such  as  computerized  materials
release and just-in-time delivery.

Competition

      Competition in the FIB market is intense.  There are a limited number of
FIB technology suppliers worldwide.  A  number of these suppliers have greater
financial  and technological  resources or have  greater strengths  in certain
technical or  other areas compared  with Micrion.   There can be  no assurance
that Micrion can maintain  competitiveness in the  market for FIB systems  and
technology.   Current principal competitors are Seiko, primarily in Japan, and
FEI  Company,  principally  in the  United  States  and Europe.    The Company
believes  that other suppliers  of semiconductor capital  equipment which have
introduced FIB products,  including Hitachi, JEOL and Schlumberger, may become
significant competitors in  the future.  Individual  competitors have strength
in  different areas,  including system  features, geographic  market presence,
customer service and  support, breadth of applications  and price.   While the
Company  competes  effectively  in  the  market  for  high-end,  sophisticated
systems,  others of its  competitors compete on  the basis of  lower price for
less complex and less flexible systems.  In addition, at any point in  time, a
particular FIB manufacturer may achieve technological advances which provide a
competitive advantage over others in the industry.

Intellectual Property

      The Company believes  that the success  of its business depends  more on
its technical  innovation, marketing abilities and  responsiveness to customer
requirements, than  on patents, trademarks, copyrights  and other intellectual
property rights.  Nevertheless, the Company has a policy of seeking to protect
its  intellectual property  through patents, license  agreements, confidential
disclosure agreements and trade  secrets.  The Company currently  holds eleven
U.S. patents  and a patent in  five foreign countries covering  aspects of its
technology.  The earliest any of  these patents expires is 2004.  Confidential
disclosure agreements are in  place with the customers  and other parties  who
have a  need or desire to  exchange proprietary information with  the Company.
In addition, the Company generally enters into confidentiality agreements with
its employees and limits access to its proprietary information.  Despite these
precautions, it may be possible for unauthorized third parties to copy aspects
of the Company's FIB systems or to obtain information that the Company regards
as proprietary.  The laws of some foreign countries in which the Company sells
or may  sell its products do  not protect the Company's  proprietary rights in
the products to the same extent as do the laws of the United States.

      Licensing  agreements  are  in  effect  with  the  Max  Planck  Institut
(Germany) and  certain large  commercial enterprises  which  give the  Company
rights to  use aspects of the  technology of those organizations.   Certain of
these  arrangements  are non-exclusive  and terminable,  and  there can  be no
assurance that the Company will be  able to maintain these relationships or to
initiate  similar relationships.  The Company is not dependent on any licensed


                                      11






technology  for  its  present  FIB  systems  and  has  developed   alternative
technological solutions to those offered by the licensed technologies.

      Various  competitors  of  Micrion  hold  patents   in  FIB  and  related
technologies.  From  time to time, the Company has  notified others that their
products may be infringing the patents of the Company.

Employees

      As of June 30, 1996, the company had a total of 211 full-time employees,
including 51 in research,  development and engineering, 128 in  manufacturing,
customer support  and quality assurance, 18  in sales and marketing  and 14 in
general  management,  administration  and  finance.   None  of  the  Company's
employees  is  represented  by  a  labor  union  and  the  Company  has  never
experienced a work  stoppage, slowdown  or strike.   Management considers  its
relationship  with its employees  to be excellent and  employee turnover to be
low.

      The success of  the Company's future operations depends in large part on
the  Company's  ability  to  attract  and  retain  highly  skilled  technical,
marketing and management personnel.  Certain of  such personnel are in limited
supply and are difficult to attract and retain.

Item 2.           PROPERTIES.

      The Company's corporate headquarters  and manufacturing and research and
development facility  are  located at  One Corporation  Way, Centennial  Park,
Peabody, Massachusetts, where the Company occupies approximately 52,996 square
feet under a lease that expires in February 2005.  The Company entered into an
arrangement  to lease  an additional  38,000 square  feet effective  August 1,
1996,  at Ten  Technology Drive,  Peabody, Massachusetts,  under a  lease that
expires in July 2001; the space will be used as a  warehouse for inventory and
spare  parts in  support  of the  Company's  manufacturing and  field  service
operations,  to  support an  expanded  customer service  organization,  and to
provide  future expansion  for  manufacturing production.    The Company  also
leases  field service  and/or  sales  offices  in  Austin,  Texas;  San  Jose,
California; Colorado Springs, Colorado; Munich, Germany; and Tachikawa, Japan.

      The Company believes that  its existing facilities are adequate  to meet
its requirements for at least the next twelve months.

Item 3.           LEGAL PROCEEDINGS.

      On  May 7, 1996, the Company  and KLA Instruments Corporation ("KLA"), a
stockholder of  the  Company, entered  into a  Settlement Agreement  resolving
certain litigation  brought by KLA against the Company and certain other named
defendants in the Superior Court of Essex County, Massachusetts, alleging that
(a)  the  Company  failed  to  abide   by  requirements  of  its  Articles  of
Organization and the Massachusetts Business Corporation Law in connection with
the refinancing  of the  Company  that occurred  during the  period from  July
through  August 1993  and (b)  the other  defendants breached  their fiduciary
duties to KLA in connection with the refinancing.  Pursuant  to the Settlement

                                      12






Agreement, the Company issued 119,202 shares of the Company's Common Stock  to
KLA  and another defendant transferred  95,798 shares of  the Company's Common
Stock to KLA.  The shares issued and transferred to KLA are subject to a proxy
in favor of Nicholas P. Economou, the President of the Company, which entitles
Dr.  Economou to  vote such  shares so long  as they  are held  by KLA  or its
affiliates.  The lawsuit was dismissed with prejudice.

      On August 2, 1996,  an action was filed in  the U.S. District Court  for
the District of  Massachusetts against  the Company, Nicholas  P. Economou,  a
director  and  officer of  the  Company, and  David  M. Hunter  and  Robert K.
McMenamin, officers of the Company.   On September 9, 1996, another action was
filed in  the same court against the Company, Dr. Economou, Messrs. Hunter and
McMenamin  and  Billy W.  Ward,  an  officer  of the  Company.    Each of  the
complaints purports to be  brought on behalf of  a class of purchasers of  the
Company's common stock from April 26, 1996 through June 21, 1996.  Each of the
complaints asserts claims  for violations under  the federal securities  laws,
alleging that  the Company made false and  misleading statements to the public
concerning the nature of its  sales agreement with a customer.   No responsive
pleading  to  either  complaint  is  yet due,  but  the  Company  believes the
complaints to  be without merit and  intends vigorously to defend  the claims.
There  can be no  assurance, however, that  the Company will  be successful in
defending  these lawsuits or that money damages,  if awarded, would not have a
material adverse effect on the Company.

Item 4.           SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.

      No  matters were submitted  to a vote of  the Company's security holders
during the fourth quarter of the fiscal year ended June 30, 1996.

























                                      13






Executive Officers of the Registrant

      The following  are the  names, ages,  positions with  the Company and  a
brief description of the business experience during the last five years of the
executive officers of the Company.


  Name                         Age         Position and Business Experience
  
  Nicholas P. Economou . .     47      President and Chief Executive
                                       Officer.
                                       Dr. Economou has been President and  a
                                       Director   of   the    Company   since
                                       February  1990  and   Chief  Executive
                                       Officer     since     August     1993.
                                       Dr. Economou  joined  the  Company  in
                                       1984  as the  Director of  Engineering
                                       and was subsequently  promoted to Vice
                                       President,   Engineering,   prior   to
                                       becoming President. 

 David M. Hunter . . . .       52      Vice President, Finance  and
                                       Administration, Chief Financial
                                       Officer and Treasurer.
                                       Mr.  Hunter  has been  Vice President,
                                       Finance   and  Administration,   since
                                       January  1993.   Mr. Hunter joined the
                                       Company in 1984 as Treasurer. 

 Charles J. Libby  . . .       51      Vice President, Engineering.
                                       Mr.  Libby  has  been  Vice President,
                                       Engineering,   since   August    1993.
                                       Mr. Libby joined  the Company  in 1989
                                       as  Director of  Software  Engineering
                                       and  was   subsequently  promoted   to
                                       Director  of   Engineering  prior   to
                                       becoming Vice President, Engineering.
 
 John A. Doherty . . . .       50      Vice President, Marketing.
                                       Mr. Doherty has  been Vice  President,
                                       Marketing, since 1983  and a  Director
                                       of  the  Company  from  1983 to  1988,
                                       from  1991 to  1993  and  has  been  a
                                       Director since November 1994. 

 Billy W. Ward . . . . .       43      Senior Vice President.
                                       Mr.   Ward   has  been   Senior   Vice
                                       President since  January 1996 and  was
                                       Vice  President  and   Chief  Engineer
                                       from  1983  to  January  1996  and   a
                                       Director of the  Company from 1983  to
                                       1984,  from  1988 to  1991,  and  from
                                       1993 to 1994.


                                      14




 Robert K. McMenamin . .       54      Vice President, Sales.
                                       Mr.    McMenamin   has    been    Vice
                                       President,    Sales,    since    1990.
                                       Mr. McMenamin  joined the  Company  in
                                       1988 as Sales Manager.

 














































                                      15





                                    
                                    PART II

Item 5.           MARKET   FOR   REGISTRANT'S   COMMON   EQUITY   AND  RELATED
                  STOCKHOLDER MATTERS.

      The  Company's  Common Stock  is traded  on  the Nasdaq  National Market
System  under  the symbol  "MICN."    As of  September  18,  1996, there  were
approximately  2,500 holders  of record  of the  Company's Common Stock.   The
following table  sets forth, for the  periods indicated, the high  and low bid
prices of the Common Stock, as reported by Nasdaq.   The bid prices quotations
reflect interdealer  prices, without  retail mark-up, mark-down  or commission
and may not represent actual transactions.  


                                                     High      Low
       1995

       First Quarter . . . . . . . . . . . . . . .   17-1/2    6-1/4
       Second Quarter  . . . . . . . . . . . . . .   21-1/4    10-3/4
       Third Quarter . . . . . . . . . . . . . . .   12-1/8    9-1/8
       Fourth Quarter  . . . . . . . . . . . . . .   15-7/8    10-1/8


       1996

       First Quarter . . . . . . . . . . . . . . .   16-1/2    11
       Second Quarter  . . . . . . . . . . . . . .   16-1/4    9-1/2
       Third Quarter . . . . . . . . . . . . . . .   20-1/2    9-3/4
       Fourth Quarter  . . . . . . . . . . . . . .   40-1/4    10-3/4

Dividend Policy

      The Company has not declared or paid cash dividends on its Common Stock,
presently  intends to  retain earnings for  use in  its business  and does not
anticipate paying  cash dividends in  the foreseeable  future.  The  Company's
current bank line of credit prohibits the payment of dividends, in cash  or in
kind, without the bank's consent.












                                      16










Item 6.           SELECTED FINANCIAL DATA.



                                      For the years ended June 30,      
                           1996      1995        1994        1993       1992
                             (Amounts in thousands, except per share data)      


 Total revenue            $39,536   $28,768     $20,011     $11,871     $9,842
 Income (loss) from         3,611     2,666       1,966         355      (689)
 operations

 Net income (loss)         *2,004     3,217       1,717         200      (897)

 Income (loss) from
 operations per share         .89       .75         .97         .19      (.37)
 Income (loss) per share     *.49       .91         .85         .11      (.48)


 At year end:

 Total assets             $41,571   $30,486     $14,144      $9,612     $6,518
 Long-term obligations        779        26          68         425        917

 Total stockholders' 
   equity                  29,257    24,637      10,269       3,719      1,527



* Includes a one-time litigation settlement charge of $2,685 during the fourth
quarter  of  fiscal 1996.   See  note 13  in  Notes to  Consolidated Financial
Statements



Item 7.           MANAGEMENT'S DISCUSSION AND  ANALYSIS OF FINANCIAL CONDITION
                  AND RESULTS OF OPERATIONS.

      The information required by this item appears  in the 1996 Annual Report
on pages 11 through 14 and is incorporated herein by reference.










                                      17








Item 8.           FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA.

      The information required by  this item appears in the 1996 Annual Report
on pages 15 through 30 and is incorporated herein by reference.

Item 9.           CHANGES IN  AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING
                  AND FINANCIAL DISCLOSURE.

      None.












































                                      18





                                   
                                   PART III

Item 10.    DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT.

      The  information required  regarding the  Executive Officers  of Micrion
Corporation is included in Part I in the unnumbered item  captioned "Executive
Officers of the Registrant."  Certain other information required regarding the
Directors of Micrion  Corporation is contained in the Proxy Statement on pages
3 and 4 and is incorporated herein by reference.

      Certain information regarding reports  required to be filed pursuant  to
Section 16(a) of the  Securities Exchange Act  of 1934 by directors,  officers
and  beneficial  owners of  10%  or  more of  the  Company's  Common Stock  is
contained  in the  Proxy Statement  on page  9 and  is incorporated  herein by
reference.

Item 11.    EXECUTIVE COMPENSATION.

      The information required  is contained in the Proxy Statement on pages 7
and 8 and is incorporated herein by reference.

Item 12.    SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT.

      The information required  with respect to security ownership  of certain
beneficial  owners and management of  Micrion Corporation is  contained in the
Proxy  Statement on  pages 2  and  3   under the  heading "Stock  Ownership of
Directors,  Nominees, Executive  Officers and  Principal Stockholders"  and is
incorporated herein by reference.

Item 13.    CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS.

      None.





















                                      19






                                    PART IV

Item 14.    EXHIBITS, FINANCIAL STATEMENT SCHEDULES AND REPORTS ON FORM 8-K.

      (a) 1.      Financial Statements

      The following  consolidated  financial statements  are  incorporated  by
reference in Item 8:

            Consolidated Balance Sheets as of June 30, 1996 and June 30, 1995
            Consolidated Statements of Operations for the years ended June 30,
            1996, June 30, 1995 and June 30, 1994
            Consolidated Statements  of  Stockholders' Equity  for  the  years
                ended June 30, 1996, June 30, 1995 and June 30, 1994
            Consolidated Statements of Cash Flows for the years ended June 30,
                1996, June 30, 1995 and June 30, 1994

      (a) 2.      Financial Statement Schedules

      All  schedules have been omitted  since the required  information is not
present or  not present  in amounts  sufficient to require  submission of  the
schedule,  or because the information required is included in the consolidated
financial statements or the notes thereto.

      (a) 3.      Listing of Exhibits

      The  exhibit numbers  in the  following list  correspond to  the numbers
assigned  to such exhibit in the Exhibit Table  of Item 601 of Regulation S-K.
The Company will furnish to any stockholder, upon written request, any exhibit
listed below  upon payment by such stockholder to the Company of the Company's
reasonable expense in furnishing such exhibit.


  Exhibit    Description of Document
  Number
    
   *3.1     Restated Articles of Organization of the Registrant.

   @3.2      Amended and Restated By-laws of the Registrant (as amended
             September 8, 1995).

A   4.1      Specimen Stock Certificate.
 
A+ 10.1      Registrant's Incentive Stock Plan, as amended (the "1986
             Plan").

A+ 10.2      Form of Stock Restriction Agreement under the 1986 Plan.

A+ 10.3      Registrant's 1990 Nonqualified Stock Option Plan, as amended
             (the "1990 Option Plan").


                                      20





  
 
  Exhibit    
  Number     Description of Document

A+ 10.4      Form of Stock Option Agreement under the 1990 Option Plan.

A+ 10.5      Registrant's 1993 Common Stock Incentive Plan, as amended (the
             "1993 Plan").

A+ 10.6      Form of Stock Restriction Agreement under the 1993 Plan,
             together with vesting schedule for executive officers.
 
 [email protected]      Registrant's 1994 Omnibus Stock Plan (as amended and restated
             September 5, 1995).

A+ 10.8      Registrant's 1994 Stock Purchase Plan.

 +#10.8.1    Registrant's 1994 Non-Employee Director Stock Option Plan.
   
A  10.9      Lease dated as of December 21, 1987 between the Registrant and
             Centennial Park Associates Limited Partnership I (the "Lease").

  @10.9.1    Second Amendment to the Lease, dated as of March 1, 1995.

A  10.10     Development Agreement, dated as of June 10, 1993, by and
             between the Registrant and SEMATECH, Inc.
   
A  10.11     Agreement dated as of May 6, 1993, by and between the
             Registrant and U.S. Army Research Laboratory, as amended.

A  10.12     Distributor Agreement between the Registrant and Tokyo Electron
             Limited, dated as of March 1, 1988.

A  10.21     Promissory Note of John A. Doherty in favor of Registrant,
             dated as of December 15, 1985, in the original principal amount
             of $19,000.
   
A  10.22     Promissory Note of Billy W. Ward in favor of Registrant, dated
             as of December 15, 1985, in the original principal amount of
             $19,000.

A  10.23     Form of Employee Agreement.

B  10.25     Common Stock Purchase Warrants issued to RvR Securities Corp.
             and Fechtor, Detwiler & Co., Inc., in connection with
             Registrant's initial public offering.
   
B  10.27     Letter Agreement, dated October 21, 1994, by and between the
             Registrant and Fleet Bank of Massachusetts, N.A. ("Fleet").

   10.28     Loan Modification Agreement by and between the Registrant and
             Fleet dated December 1, 1995.

   10.29     Second Loan Modification Agreement by and between the
             Registrant and Fleet dated May 16, 1996.
   
                                      21




  Exhibit    
  Number     Description of Document
   
   10.30     Promissory Note of the Registrant in favor of Fleet dated May
             16, 1996.

   11.1      Statement of Computation of Per Share Earnings.

   13.1      Management's Discussion and Analysis of Financial Condition and
             Results of Operations from 1996 Annual Report to Stockholders.

   13.2      Consolidated Financial Statements and Notes thereto from 1996
             Annual Report to Stockholders.
  
  @21.1      Subsidiaries of Registrant.

   23.1      Consent of KPMG Peat Marwick LLP.

   27.1      Financial Data Schedule.


































  

                                      22

  
  
  
  Exhibit                                           
  Number    Description of Document
  
  99.1      Cautionary Statement for Purposes of the "Safe Harbor"
            Provisions of the Private Securities Litigation Reform Act of
            1995.


_______________________________
      
A     Incorporated by reference to the same exhibit number to the Registrant's
      Registration Statement on  Form SB-2 (Registration  No. 33-75784) or  an
      amendment thereto.
*     Incorporated by reference to the same exhibit number to the Registrant's
      Report on Form 10-QSB filed on June 24, 1994.
#     Incorporated by reference to the same exhibit number to the Registrant's
      Report on Form 10-KSB filed on September 29, 1994.
+     Management contract or compensatory plan or arrangement. 
      Incorporated by reference to the same exhibit number to the Registrant's
B     Registration  Statement on Form  SB-2 (Registration No.  33-86008) or an
      amendment thereto.
@     Incorporated by reference to the same exhibit number to the Registrant's
      Report on Form 10-KSB filed on September 29, 1995.


      (b)   Reports on Form 8-K

      The Company  filed  no reports  on  Form  8-K with  the  Securities  and
Exchange Commission during the fiscal quarter ended June 30, 1996.

























                                      23





                                  SIGNATURES


Pursuant to the requirements of Section 13 or 15(d) of the Securities Exchange
Act of 1934, the registrant  caused this report to be signed on  its behalf by
the undersigned, thereunto duly authorized.


                                          MICRION CORPORATION


Date:  September 26, 1996               By: /s/ Nicholas P. Economou     
                                        Nicholas P. Economou
                                        President and Chief Executive Officer



Pursuant  to the  requirements of  the Securities  Exchange Act of  1934, this
report  has been  signed  below by  the  following persons  on  behalf of  the
registrant and in the capacities and on the dates indicated.


Signature                  Title                     Date


/s/ Nicholas P.  Economou  President, Chief          September 26, 1996
Nicholas P. Economou       Executive Officer and
                           Director (Principal
                           Executive Officer)


/s/ David M. Hunter        Vice President, Finance   September 26, 1996
David M. Hunter            and Administration
                           (Principal Financial
                           and Accounting Officer)


/s/ John A. Doherty        Vice President,           September 26, 1996
John A. Doherty            Marketing and Director


/s/ Charles M. McKenna     Director                  September 26, 1996
Charles M. McKenna


/s/ Louis P. Valente       Director                  September 26, 1996
Louis P. Valente



/s/ Thomas W. Folger       Director                  September 26, 1996
Thomas W. Folger

ds1-288223


                             
Exhibit 10.28
                             
                             LOAN MODIFICATION AGREEMENT


         This  Loan  Modification  Agreement  (the  "Agreement")  is  made as of
December 1, 1995 between Micrion Corporation,  a Massachusetts  corporation (the
"Borrower")  and Fleet Bank of  Massachusetts,  N.A. (the "Bank").  For good and
valuable   consideration,   receipt   and   sufficiency   of  which  are  hereby
acknowledged, the Borrower and the Bank act and agree as follows:

         1. Reference is made to (i) that certain letter agreement dated October
21, 1994 (the "Letter  Agreement")  between the Borrower and the Bank; (ii) that
certain $3,000,000 face amount promissory note dated October 21, 1994 (the "1994
Revolving  Note") made by the Borrower and payable to the order of the Bank; and
(iii) that certain  $5,000,000 face amount promissory note of even date herewith
(the "1995 Revolving Note") made by the Borrower and payable to the order of the
Bank.  The  Letter  Agreement  and  the  1995  Revolving  Note  are  hereinafter
collectively referred to as the "Financing Documents".

         2. The Letter Agreement is hereby amended, effective as of the date 
hereof:

            a. By deleting in its entirety the third sentence of 
Section 1.1 of the Letter Agreement and by substituting in its stead the 
following:

               "The   Revolving   Loans  shall  be  evidenced  by  a
               $5,000,000   face   amount   promissory   note   (the
               'Revolving  Note') dated December 1, 1995 made by the
                Borrower and payable to the order of the
                Bank."

As a result,  all references in the Letter  Agreement to a "Revolving Note" will
be deemed to refer to the 1995 Revolving Note.

            b. By deleting from the first sentence of Section 1.4 of the Letter 
Agreement the amount "$3,000,000" and by substituting in its stead the 
following:

               "$5,000,000"

            c. By deleting in its entirety the last sentence of Section 3.10 of 
the Letter Agreement and by substituting in its stead the following:

               "As at the end of each fiscal quarter of the Borrower
               (each,  a  'Determination   Date')   commencing  with
               December  31,  1995,  the  Borrower  will achieve Net
               Income of at least  







               $1,500,000  for the twelve months
               ending at such Determination Date."

            d. By deleting from clause (v) of Section 4.1 of the Letter 
Agreement the amount "$1,000,000" and by substituting in its stead the 
following:

               "$1,500,000"

            e. By deleting the period at the end of the first sentence of 
Section 6.3 of the Letter Agreement and by substituting in its stead the 
following:

               ";  provided  that   commencing  with  the  quarterly
               payment of facility  fees due January 1, 1996 and for
               each quarterly  payment  thereafter the nonrefundable
               quarterly  facility  fee will be $6,250 per  quarter,
               and the Borrower will also pay on December 1, 1995 an
               additional fee of $833,  representing the increase in
               facility fees for the period December 1-31, 1995."

            f. By  deleting  the  proviso  contained  in clause (2) of the
definition of "Borrowing  Base" appearing in Section 7.1 of the Letter Agreement
and by substituting in its stead the following:

               "; provided that the amount  contributed to Borrowing
               Base  pursuant to this clause (2) shall never  exceed
               $2,000,000,"

            g. By  deleting  from  the  definition  of  "Expiration  Date"
appearing in Section 7.1 of the Letter Agreement the date "December 1, 1995" and
by substituting in its stead the following:

               "December 1, 1996"

As a result,  from and after the date  hereof,  for the  purposes  of the Letter
Agreement, the "Expiration Date" will be deemed to be December 1, 1996.

            h. By  deleting  from the  definition  of  "Maximum  Revolving
Amount" appearing in Section 7.1 of the Letter Agreement the amount "$3,000,000"
and by substituting in its stead the following:

               "$5,000,000"


 










                             2


         
         3. Wherever in any Financing Document, or in any certificate or 
opinion to be  delivered  in  connection  therewith,  reference  is  made  to a
"letter agreement"  or to the  "Letter  Agreement",  from and after the date
hereof same will be deemed to refer to the Letter Agreement, as hereby amended.

         4. Simultaneously  with the execution and delivery of this  Agreement,
the Borrower is executing and delivering to the Bank the 1995 Revolving Note, in
substitution  for  the  1994  Revolving  Note.  The  1995  Revolving  Note  is a
$5,000,000  promissory note of the Borrower,  substantially in the form attached
hereto as Exhibit 1. Wherever in the Letter Agreement,  or in any certificate or
opinion  to be  delivered  in  connection  therewith,  reference  is made to the
"Revolving Note", from and after the date hereof same will be deemed to refer to
the 1995 Revolving Note.

         5. In order to induce the Bank to enter into this Agreement, the 
Borrower further represents and warrants to the Bank as follows:

            a. The execution,  delivery and  performance of this Agreement
and the 1995  Revolving  Note have been duly  authorized  by the Borrower by all
necessary  corporate and other action, will not require the consent of any third
party and will not conflict with,  violate the provisions of, or cause a default
or constitute  an event which,  with the passage of time or the giving of notice
or both,  could  cause a default on the part of the  Borrower  under its charter
documents  or  by-laws  or under any  contract,  agreement,  law,  rule,  order,
ordinance,  franchise, instrument or other document, or result in the imposition
of any lien or encumbrance on any property or assets of the Borrower.

            b. The Borrower has duly executed and delivered to the Bank each of 
this Agreement and the 1995 Revolving Note.

            c. Each of this  Agreement and the 1995  Revolving Note is the
legal,  valid and binding  obligation of the Borrower,  enforceable  against the
Borrower in accordance with its respective terms.

            d. The  representations and warranties of the Borrower made in
the Letter  Agreement  continue to be correct as of the date  hereof,  except 
as supplemented and/or modified on the attached Supplemental Disclosure
Schedule.

            e. The covenants and  agreements of the Borrower  contained in
the Letter  Agreement  continue to be correct as of the date  hereof,  except as
supplemented and/or modified on the attached Supplemental Disclosure Schedule.

            f. No event which  constitutes or which,  with notice or lapse
of time,  or both,  could  constitute,  an Event of Default  (as  defined in the
Letter Agreement) has occurred and is continuing.










                             3



           g. No material  adverse  change has occurred in the  financial
condition of the Borrower from that disclosed in the financial statements of the
Borrower as at June 30, 1995.

         6. Except as expressly affected hereby, the Letter Agreement remains 
in full force and effect as heretofore.

         7. Nothing  contained herein will be deemed to constitute a waiver or a
release of any provision of any of the Financing  Documents.  Nothing  contained
herein will in any event be deemed to  constitute  an agreement to give a waiver
or release or to agree to any amendment or  modification of any provision of any
of the Financing Documents on any other or future occasion.

         Executed  as an  instrument  under  seal,  as of the day and year first
above written.

                                        MICRION CORPORATION
                                        By:    /s/ David M. Hunter
                                               ____________________
                                               David M. Hunter
                                               Vice President, Finance
                                               and Administration

Accepted and agreed:

FLEET BANK OF MASSACHUSETTS, N.A.

By:      /s/ Thomas W. Davies
         _________________________
         Thomas W. Davies
         Vice President

DS1-293273                   


















                             
                             4



Exhibit 10.29



                             SECOND LOAN MODIFICATION AGREEMENT


         This Second Loan Modification  Agreement ("this  Agreement") is made as
of May 16, 1996 between Micrion  Corporation,  a Massachusetts  corporation (the
"Borrower")  and Fleet  National  Bank  (successor  by  merger to Fleet  Bank of
Massachusetts, N.A.) (the "Bank"). For good and valuable consideration,  receipt
and sufficiency of which are hereby acknowledged,  the Borrower and the Bank act
and agree as follows:

      1.    Reference is made to (i) that certain letter agreement dated October
21, 1994 between the Borrower and Fleet Bank of Massachusetts,  N.A., as amended
by Loan Modification  Agreement dated as of December 1, 1995 (as so amended, the
"Letter  Agreement")  the Bank having  succeeded  to the rights of Fleet Bank of
Massachusetts,  N.A.  thereunder);  (ii) that certain  $5,000,000 face principal
amount  promissory note dated December 1, 1995 (the "1995 Revolving  Note") made
by the Borrower and payable to the order of Fleet Bank of  Massachusetts,  N.A.;
and (iii) that certain $10,000,000 face principal amount promissory note of even
date  herewith (the "1996  Revolving  Note") made by the Borrower and payable to
the order of the Bank.  The Letter  Agreement  and the 1996  Revolving  Note are
hereinafter collectively referred to as the "Financing Documents". The aforesaid
December 1, 1995 Loan Modification  Agreement is hereinafter  referred to as the
"1995 Modification".

         2. The Letter Agreement is hereby amended, effective as of the 
date hereof:

            a.   By deleting in its entirety the third sentence of 
Section 1.1 of the Letter Agreement and by substituting in its stead the 
following:

                    "The  Revolving  Loans  shall  be  evidenced  by that
                    certain  $10,000,000 face principal amount promissory
                    note (the  'Revolving  Note') dated May 16, 1996 made
                    by the  Borrower  and  payable  to the  order  of the
                    Bank."

As a result,  all references in the Letter  Agreement to a "Revolving Note" will
be deemed to refer to the 1996 Revolving Note.

            b. By deleting  from the first  sentence of Section 1.4 of the
Letter Agreement the amount  "$5,000,000" (which amount was inserted by the 1995
Modification) and by substituting in its stead the following:

                    "$10,000,000"

            c. By deleting in their entireties Sections 3.8 - 3.10, inclusive, 
of the Letter Agreement and by substituting in their stead the following:


                
                
                "3.8. Net Worth. The Borrower will maintain as at the
                end  of  each   fiscal   quarter   of  the   Borrower
                (commencing  with its results as at March 31, 1996) a
                consolidated  Tangible  Net Worth  which shall be not
                less than the then-effective TNW Requirement. As used
                herein,  the 'TNW Requirement' will be deemed to have
                been  $22,500,000  as at December 31, 1995; and as at
                the  last  day  of  each  fiscal  quarter  thereafter
                beginning with March 31, 1996 (each, a 'Determination
                Date') the TNW  Requirement  will be deemed to become
                an  amount   equal  to  the  sum  of:  (i)  that  TNW
                Requirement   in  effect  on  the  last  day  of  the
                immediately  preceding fiscal quarter,  plus (ii) 80%
                of the  consolidated  Net Income of the  Borrower and
                Subsidiaries during the fiscal quarter ending at such
                Determination  Date (but without giving effect to any
                Net  Income  which is less than  zero for any  fiscal
                quarter),  plus (iii) 80% of the net  proceeds of any
                equity  securities  sold by the Borrower  (other than
                stock issued in connection  with the KLA  Settlement,
                as defined below) during the fiscal quarter ending at
                such Determination Date.

                3.9.  Current Radio. The Borrower will maintain as at
                the  end of  each  fiscal  quarter  of  the  Borrower
                (commencing  with its result as at March 31,  1996) a
                ratio of consolidated  Current Assets to consolidated
                Current  Liabilities,  which  ratio shall be not less
                than 1.75 to 1.

                3.10.   Profitability.   The  Borrower  will  achieve
                quarterly  consolidated  Adjusted  Net  Income  of at
                least $1.00 for each fiscal quarter,  commencing with
                its results for the fiscal  quarter  ending March 31,
                1996.   For  each   12-month   period   ending  on  a
                Determination  Date (as  defined  above),  commencing
                with the 12-month  period  ending June 30, 1996,  the
                Borrower  will  achieve  consolidated   Adjusted  Net
                Income of not less than the following:  not less than
                $2,000,000 for the 12- month period ending  September
                30, 1996;  not less than  $4,000,000 for the 12-month
                period  ending  December 31, 1996;  and not less than
                





                             2


               
               






               
               $5,000,000  for the 12-month  period ending March 31,
               1997 and for each 12-month period ending on each
               subsequent Determination Date."

            d. By deleting from clause (v) of Section 4.1 of the 
Letter Agreement the amount "$1,500,000" and by substituting in its stead the 
following:

               "$5,000,000"

            e. By deleting the period at the end of the first sentence of 
Section 6.3 of the Letter Agreement (as amended by the 1995 Modification) and
by substituting in its stead the following:

               ";  provided   further  that   commencing   with  the
               quarterly  payment of facility  fees due July 1, 1996
               and  for  each  quarterly   payment   thereafter  the
               non-refundable quarterly facility fee will be $12,500
               per fiscal  quarter and the Borrower will also pay on
               May 16, 1996 an  additional  $3,194.44,  representing
               the increase in facility  fees for the period May 16,
               1996 through June 30, 1996."

            f. By inserting into Section 7.1 of the Letter Agreement, 
immediately before the definition of "Aggregate Bank Liabilities", the 
following:

               "'Adjusted Net Income' (or 'Adjusted Net Loss') -
               For any fiscal period, the sum of (i) the
               Borrower's  consolidated  Net Income (or consolidated
               Net Loss,  expressed  as a negative  number) for such
               fiscal  period,  plus (ii) the amount of any one-time
               charge  recognized by the Borrower during such fiscal
               period arising from the KLA  Settlement  (but only to
               the extent  that same  results  from the  issuance of
               Common Stock  pursuant to the KLA  Settlement or from
               certain  one-time  cash  charges  relating to the KLA
               Settlement; provided that such cash charges shall not
               exceed   $250,000  in  the  aggregate)  and  actually
               deducted on the books of the Borrower for the purpose
               of determining the Borrower's consolidated Net Income
               (or  consolidated  Net Loss,  as the case may be) for
               such fiscal period."













                                           3



          g. By  deleting  from  the  definition  of  "Expiration  Date"
appearing  in Section 7.1 of the Letter  Agreement  the date  "December 1, 1996"
(such date having been inserted by the 1995 Modification) and by substituting in
its stead the following:

               "December 1, 1997"

As a result,  from and after the date  hereof,  for the  purposes  of the Letter
Agreement  and the other  Financing  Documents,  the  "Expiration  Date" will be
deemed to be December 1, 1997.

            h. By inserting into Section 7.1 of the Letter Agreement, 
immediately after the definition of "Indebtedness", the following:

               "'KLA   Settlement'  -  The   settlement  of  certain
               litigation  filed against the Company on December 22,
               1993 by KLA  Instruments  Corporation,  as heretofore
               disclosed by the Borrower to the Bank."

            i. By  deleting  from the  definition  of  "Maximum  Revolving
Amount" appearing in Section 7.1 of the Letter Agreement the amount "$5,000,000"
(such amount having been inserted by the 1995  Modification) and by substituting
in its stead the following:

               "$10,000,000"

         3. Wherever in any Financing Document, or in any certificate or opinion
to be  delivered  in  connection  therewith,  reference  is  made  to a  "letter
agreement"  or to the  "Letter  Agreement",  from and after the date hereof same
will be deemed to refer to the Letter Agreement, as hereby amended.

         4. Simultaneously  with the execution and delivery of this  Agreement,
the Borrower is executing and delivering to the Bank the 1996 Revolving Note, in
substitution  for  the  1995  Revolving  Note.  The  1996  Revolving  Note  is a
$10,000,000 promissory note of the Borrower,  substantially in the form attached
hereto as  Exhibit  1.  Wherever  in any of the  Financing  Documents  or in any
certificate  or opinion to be delivered in  connection  therewith,  reference is
made to a "Revolving  Note",  from and after the date hereof same will be deemed
to refer to the 1996 Revolving Note.

         5. In order to induce the Bank to enter into this Agreement, the 
Borrower further represents and warrants as follows:

            a. The execution,  delivery and  performance of this Agreement
and the 1996  Revolving  Note have been duly  authorized  by the Borrower by all
necessary  corporate 






                                       4







and other action, will not require the consent of any third party and will not 
conflict with,  violate the provisions of, or cause a default or constitute  an 
event which,  with the passage of time or the giving of notice or both, could 
cause a default on the part of the Borrower under its charter documents  or  
by-laws  or under any  contract,  agreement,  law,  rule,  order, ordinance,  
franchise, instrument or other document, or result in the imposition
of any lien or encumbrance on any property or assets of the Borrower.

            b. The Borrower has duly executed and delivered each of this 
Agreement and the 1996 Revolving Note.

            c. Each of this  Agreement and the 1996  Revolving Note is the
legal,  valid and binding  obligation of the Borrower,  enforceable  against the
Borrower in accordance with its respective terms.

            d. The statements,  representations and warranties made in the
Letter  Agreement  continue  to be  correct  as of the date  hereof;  except  as
amended,  updated and/or  supplemented by the attached  Supplemental  Disclosure
Schedule.

            e. The covenants and agreements of the Borrower contained in the 
Letter Agreement have been complied with on and as of the date hereof.

            f. No event which  constitutes or which,  with notice or lapse
of time,  or both,  could  constitute,  an Event of Default  (as  defined in the
Letter Agreement) has occurred and is continuing.

            g. Except as  heretofore  disclosed in writing to the Bank, no
material adverse change has occurred in the financial  condition of the Borrower
from that  disclosed in the annual  financial  statements of the Borrower  dated
June 30, 1995, heretofore furnished to the Bank.

         6. Except as expressly affected hereby, the Letter Agreement and each 
of the other Financing Documents remains in full force and effect as heretofore.

         7. Nothing  contained herein will be deemed to constitute a waiver or a
release of any provision of any of the Financing  Documents.  Nothing  contained
herein will in any event be deemed to  constitute  an agreement to give a waiver
or release or to agree to any amendment or  modification of any provision of any
of the Financing Documents on any other or future occasion.













                                           5




         
         
         Executed,  as an  instrument  under seal,  as of the day and year first
above written.

                                                 MICRION CORPORATION


                                                 By:    /s/ David M. Hunter
                                                        David M. Hunter
                                                        Vice President, Finance 
                                                        and Administration


Accepted and agreed:

FLEET NATIONAL BANK


By:      /s/ Thomas W. Davies
         Thomas W. Davies
         Vice President


1-292225
 






                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             
                             6



Exhibit 10.30


                                     PROMISSORY NOTE


$10,000,000.00                                       Boston, Massachusetts
                                                              May 16, 1996


         FOR  VALUE   RECEIVED,   the   undersigned   Micrion   Corporation,   a
Massachusetts  corporation (the "Borrower")  hereby promises to pay to the order
of FLEET  NATIONAL  BANK (the  "Bank") the  principal  amount of Ten Million and
00/100 ($10,000,000.00)  Dollars or such portion thereof as has been advanced or
hereafter may be advanced by the Bank and/or its corporate  predecessor pursuant
to ss.1.1 of that certain letter  agreement  between the Borrower and Fleet Bank
of  Massachusetts,  N.A. dated October 21, 1994, as amended (as so amended,  the
"Letter  Agreement")  (the Bank having  succeeded to the rights of Fleet Bank of
Massachusetts,  N.A.  thereunder)  and  remains  outstanding  from  time to time
hereunder  ("Principal"),  with interest,  at the rate hereinafter set forth, on
the daily balance of all unpaid Principal, from the date hereof until payment in
full of all Principal and interest hereunder.

         Interest on all unpaid  Principal  shall be due and payable  monthly in
arrears, on the first day of each month, commencing on the first such date after
the  advance  of any  Principal  and  continuing  on the first day of each month
thereafter  and on the date of  payment of this note in full,  at a  fluctuating
rate per annum  (computed  on the basis of a year of three  hundred  sixty (360)
days for the actual number of days elapsed) which shall at all times be equal to
the Prime Rate, as in effect from time to time (but in no event in excess of the
maximum rate permitted by then  applicable  law). A change in the aforesaid rate
of interest  shall  become  effective on the same day on which any change in the
Prime Rate is effective.  Overdue Principal and, to the extent permitted by law,
overdue  interest  shall bear interest at a fluctuating  rate per annum which at
all times shall be equal to the sum of (i) two (2%)  percent per annum plus (ii)
the per annum rate otherwise  payable under this note (but in no event in excess
of the maximum rate permitted by then applicable  law),  compounded  monthly and
payable on demand. As used herein,  "Prime Rate" means that rate of interest per
annum  announced  by the Bank  from  time to time as its  prime  rate,  it being
understood  that such rate is  merely a  reference  rate,  not  necessarily  the
lowest,  which  serves as the basis upon which  effective  rates of interest are
calculated for obligations making reference thereto. If the entire amount of any
required  Principal  and/or  interest is not paid within ten (10) days after the
same is due, the Borrower shall pay to the Bank a late fee equal to five percent
(5%) of the required  payment,  provided  that such late fee shall be reduced to
three  percent (3%) of any  required  Principal  and  interest  that is not paid
within  fifteen  (15)  days of the date it is due if this note is  secured  by a
mortgage on an owner-occupied residence of 1-4 units.

         All outstanding Principal and all interest accrued thereon shall be due
and payable in full on the first to occur of: (i) an  acceleration under Section
5.2 of the Letter  Agreement or (ii) December 1, 1997.  The Borrower may at any 
time and from time to time prepay all or any



Portion  of  said  Principal,   without   premium  or  penalty.   Under  certain
circumstances set forth in the Letter Agreement, prepayments of Principal may be
required.

         Payments of both  Principal and interest  shall be made, in immediately
available  funds, at the office of the Bank located at 75 State Street,  Boston,
Massachusetts  02109, or at such other address as the Bank may from time to time
designate.

         The  undersigned  Borrower  irrevocably  authorizes the Bank to make or
cause to be made,  on a  schedule  attached  to this note or on the books of the
Bank, at or following  the time of making any Revolving  Loan (as defined in the
Letter  Agreement)  and of receiving  any payment of Principal,  an  appropriate
notation  reflecting such  transaction and the then aggregate  unpaid balance of
Principal.  Failure of the Bank to make any such  notation  shall not,  however,
affect any obligation of the Borrower  hereunder or under the Letter  Agreement.
The unpaid Principal  balance of this note, as recorded by the Bank from time to
time on such schedule or on such books, shall constitute presumptive evidence of
the aggregate unpaid principal amount of the Revolving Loans.

         The  Borrower  hereby (a) waives  notice of and consents to any and all
advances,  settlements,  compromises, favors and indulgences (including, without
limitation,  any extension or postponement of the time for payment), any and all
receipts,  substitutions,  additions,  exchanges and releases of collateral, and
any and all  additions,  substitutions  and releases of any person  primarily or
secondarily  liable, (b) waives  presentment,  demand,  notice,  protest and all
other demands and notices generally in connection with the delivery, acceptance,
performance, default or enforcement of or under this note, and (c) agrees to pay
all costs and expenses,  including,  without limitation,  reasonable  attorneys'
fees,  incurred or paid by the Bank in enforcing this note and any collateral or
security therefor, all whether or not litigation is commenced.

         This note is the Revolving  Note referred to in, and is entitled in the
benefit  of, the Letter  Agreement.  This note is subject to  prepayment  as set
forth in the Letter Agreement. The maturity of this note may be accelerated upon
the occurrence of an Event of Default, as provided in the Letter Agreement.

         Executed,  as an  instrument  under seal,  as of the day and year first
above written.

CORPORATE SEAL                            MICRION CORPORATION

ATTEST:


/s/ Roslyn G. Daum                        By:  /s/ David M. Hunter
Clerk                                          Name:    David M. Hunter
                                               Title:   Chief Financial Officer

DS1-293274


                                       2



                                                                    Exhibit 11.1

                      MICRION CORPORATION AND SUBSIDIARIES
<TABLE>
                                   Statement of Computation of Per Share Earnings
<CAPTION>

                                                                 For the years ended June 30,
                                                          ------------------------------------------
                                                             1996            1995            1994
                                                          ----------      ----------      ----------

<S>                                                       <C>             <C>             <C>       
Net income ...........................................    $2,004,100      $3,216,500      $1,716,800

(a) Computation of Primary Earnings
         Per Share:

Weighted average common equivalent
         shares outstanding:
         Common stock ................................     3,923,588       3,427,437         572,712

         Conversion of preferred stock to
         common stock ................................             -               -       1,335,010

         Common stock equivalents:
           Warrants (1) ..............................        55,150         100,488         117,346
           Options (2) ...............................        98,483           7,065               -
                                                          ----------      ----------      ----------


Weighted average common and common
equivalent shares outstanding ........................     4,077,221       3,534,990       2,025,068
                                                          ==========      ==========      ==========

Primary net income per share .........................           .49             .91             .85
                                                          ==========      ==========      ==========

(b) Computation of Fully Diluted Earnings
         Per Share:

Weighted average common equivalent
         shares outstanding:
         Common stock ................................     3,923,588       3,427,437         572,712

Conversion of preferred stock to
         common stock ................................             -               -       1,335,010

Common stock equivalents:
         Warrants (1) ................................        60,677         110,159         120,816

         Options (2) .................................       212,655          29,630               -
                                                          ----------      ----------      ----------



Weighted average common and common
         equivalent shares outstanding ...............     4,196,920       3,567,226       2,028,538
                                                          ==========      ==========      ==========

Fully diluted net income per share ...................           .48             .90             .85
                                                          ==========      ==========      ==========
<FN>


(1) Warrants issued 7/93 for 160,000 shares and 5/94 for 100,000 shares, less
shares reacquired under the treasury stock method.

(2) Options granted 11/94, 12/94, 5/95, 1/96 and 4/96 under option plan, less
shares required under the treasury stock method.
</TABLE>



                                                                    EXHIBIT 13.1


MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION
AND RESULTS OF OPERATIONS

Results of Operations

For the year ended June 30, 1996, the Company reported record revenues and
income from operations, reflecting the continued increase in the acceptance of
Focused Ion Beam ("FIB") systems by semiconductor manufacturers and other
manufacturers outside of the semiconductor industry. Total revenues increased
37% and income from operations increased 35% as compared to the year ended June
30, 1995.

<TABLE>
The following table summarizes the Company's historical results of operations as
a percentage of total sales for fiscal 1996, 1995 and 1994:
<CAPTION>


                                                    1996        1995       1994
- --------------------------------------------------------------------------------
<S>                                                 <C>         <C>        <C> 
Total revenue                                       100%        100%       100%
Gross profit                                         38          37         39
Selling, general and administrative                  18          18         20
Research and development                             11          10          9
- --------------------------------------------------------------------------------
Total operating expenses                             29          28         29
Income from operations                                9           9         10
Other (expense) income, net                          (6)          1         --
Income tax benefit (expense)                          2           1         (1)
- --------------------------------------------------------------------------------
Net income                                            5%         11%         9%
- --------------------------------------------------------------------------------
</TABLE>

Fiscal 1996 Compared to Fiscal 1995

Revenues. Total revenues increased by 37% to $39.5 million for the year ended
June 30, 1996 from $28.8 million for the same period ended June 30, 1995. The
increase was primarily due to increased product revenues as a result of
increased sales of FIB systems.

Product revenues consist of revenues from the sale of systems, spare and
replacement parts and services provided with respect to systems. Product
revenues increased 45% to $38.3 million for the year ended June 30, 1996 as
compared to $26.4 million for the same period ended June 30, 1995. The increase
was due to increased sales of FIB systems resulting from increased spending by
semiconductor manufacturing companies and continued market acceptance of
Micrion's FIB products, particularly the MicroMill HT head trimming systems used
by disk drive manufacturers.

Contract revenues decreased 47% to $1.2 million for the year ended June 30, 1996
from $2.4 million for the same period ended June 30, 1995. The decrease was due
to the completion of a commercial contract during fiscal 1996. The Company
expects research and development contract revenue to decrease in the future and
not be a significant part of total revenues. Also, the Company expects a higher
proportion of contract revenues to be derived from government contracts in the
future, which will yield a lower gross margin.

Gross Profit. Total gross profit increased 40% to $15.0 million for the year
ended June 30, 1996 from $10.7 million for the same period ended June 30, 1995.
This increase was primarily due to an increased number of shipments of FIB
systems during fiscal 1996.

The Company's gross margin varies due to the product mix, distribution channels
and geographical location of customers. Gross profit on product revenues
increased 45% to $15.0 million for the year ended June 30, 1996 from $10.4
million for the same period ended June 30, 1995. The increase was primarily due
to the higher number of FIB system sales. The gross margin on product revenues
remained the same at 39.2% for the years ended June 30, 1996 and June 30, 1995.


<PAGE>

MANAGEMENT'S DISCUSSION AND ANALYSIS


Gross profit on contract revenues decreased 99% to $.005 million for the year
ended June 30, 1996 as compared to $.37 million for the same period ended June
30, 1995. The decrease is due to a higher mix of government contract revenues
during the period, which generally yield a lower profit margin, and completion
of a commercial contract which had additional costs related to that contract
which were not anticipated during the period. The Company had anticipated the
decrease in total contract revenues, primarily due to reductions in U.S.
Government funding availability for research and development type contracts. The
Company's gross margin on contract revenues decreased to .4% for the year ended
June 30, 1996 from 15.4% for the year ended June 30, 1995. The decrease was due
to a higher mix of contract revenues from government entities during the period.

Selling, General and Administrative Expenses. Selling, general and
administrative expenses increased 40% to $7.2 million for the year ended June
30, 1996 from $5.1 million for the same period ended June 30, 1995. The increase
is primarily attributable to the ramp-up of the Company's infrastructure in
order to produce the FIB systems for a new application. Also, the increase is
due to increases in sales and marketing expenses associated with the addition of
personnel in applications support, sales and advertising, the expansion of
product advertising and trade show presence, additional administrative
personnel, increases in compensation levels and litigation costs. The Company
also increased customer support personnel, especially in the Pacific Rim, to
support the disk drive head trimming systems located in that geographic area.

Research and Development Expenses. The Company's research and development
expense increased 45% to $4.2 million for the year ended June 30, 1996 from $2.9
million for the same period ended June 30, 1995. This increase was due to the
Company's additional development activity for new products and enhancements and
an increase in the number of engineering and research employees during the year.
Research and development expense as a percentage of total revenues increased to
11% for the year ended June 30, 1996 from 10% for the same period ended June 30,
1995.

Other Income and Expense. Other income and expense for the year ended June 30,
1996 consists primarily of a one-time litigation settlement charge of $2.7
million relating to the negotiated settlement with KLA Instruments Corporation.
Under the terms of the non-cash settlement, the Company issued 119,202 shares of
Micrion common stock for dismissal of all claims filed in the litigation. Also,
interest income decreased to $.22 million for the period ended June 30, 1996
from $.39 million for the same period ended June 30, 1995. The decrease is
primarily due to a lower cash position during the period.

Income Tax Benefit. Income tax benefit in fiscal 1996 reflects the reduction in
the valuation reserve for deferred tax assets. The reduction in the valuation
reserve resulted in the recognition of net deferred tax assets of $1,346,400
during the fourth quarter of fiscal 1996. The Company continuously re-evaluates
the recoverability of deferred tax assets.

Fiscal 1995 Compared to Fiscal 1994

Revenues. Total revenues increased by 44% to $28.8 million for the year ended
June 30, 1995 from $20.0 million for the same period ended June 30, 1994. The
increase was primarily due to increased product revenues as a result of
increased sales of FIB systems.

Product revenues increased 69% to $26.4 million for the year ended June 30, 1995
as compared to $15.6 million for the same period ended June 30, 1994. The
increase was due to increased sales of FIB systems resulting from increased
spending by semiconductor manufacturing companies and continued market
acceptance of Micrion's FIB products, particularly the 9100 series of products.


<PAGE>

MANAGEMENT'S DISCUSSION AND ANALYSIS


Contract revenues decreased 46% to $2.4 million for the year ended June 30, 1995
from $4.4 million for the same period ended June 30, 1994. The decrease was due
to the completion of certain government and commercial contracts during fiscal
1995. In part, as a result of U.S. Government reductions in availability of
research and development contracts, no additional contracts were awarded to the
Company in the year ended June 30, 1995.

Gross Profit. Total gross profit increased 37% to $10.7 million for the year
ended June 30, 1995 from $7.8 million for the same period ended June 30, 1994.
This increase was primarily due to an increased number of shipments of FIB
systems during fiscal 1995.

Gross profit on product revenues increased 47% to $10.4 million for the year
ended June 30, 1995 from $7.1 million for the same period ended June 30, 1994.
The increase was primarily due to the higher number of FIB system sales.
However, the gross margin on product revenues decreased to 39.2% for the year
ended June 30, 1995 from 45.1% for the year ended June 30, 1994. The percentage
decrease was due to changes in the mix of product shipments and the predominance
of foreign shipments, which generally yield lower gross margins than domestic
sales. In addition, the Company penetrated the South Korean market with its
first FIB shipments to that geographical region during the year ended June 30,
1995 and was able to attain a dominant market share in that country, which is
deemed crucial for future sales growth. Margins for product sales into South
Korea were less due to the distribution channels required to attain the
significant market share. Also, an adjustment during the fourth quarter in the
level of accruals needed in connection with a royalty arrangement had a slight
positive effect on the gross margin related to product revenues.

Gross profit on contract revenues decreased 52% to $.37 million for the year
ended June 30, 1995 as compared to $.76 million for the same period ended June
30, 1994. The decrease is due to a higher mix of government contract revenues
during the period, which generally yield a lower profit margin, and completion
of certain government and commercial contracts that were not replaced with new
contracts. The Company had anticipated the decrease in total contract revenues,
primarily due to reductions in U.S. Government funding availability for research
and development type contracts. The Company's gross margin on contract revenues
decreased to 15.4% for the year ended June 30, 1995 from 17.4% for the year
ended June 30, 1994. The decrease was due to a higher mix of contract revenues
from government entities during the period.

Selling, General and Administrative Expenses. Selling, general and
administrative expenses increased 29% to $5.1 million for the year ended June
30, 1995 from $4.0 million for the same period ended June 30, 1994. The increase
is due to increases in sales and marketing expenses associated with the addition
of personnel in applications support, sales and advertising, the expansion of
product advertising and trade show presence, additional administrative and
customer support personnel, increases in compensation levels, litigation costs
and increased costs associated with being a public company. A renegotiation and
extension of the Company's lease for its primary facility resulted in less rent
expense during fiscal 1995. Total selling, general and administrative expenses
as a percentage of total revenues decreased to 18% for the year ended June 30,
1995 from 20% for the same period ended June 30, 1994 due to the significantly
increased revenues for that fiscal period.

Research and Development Expenses. The Company's research and development
expense increased 57% to $2.9 million for the year ended June 30, 1995 from $1.9
million for the same period ended June 30, 1994. This increase was due to the
Company's additional development activity for new products and enhancements and
an increase in the number of engineering and research employees during the year.
Research and development expense as a percentage of total revenues increased to
10% for the year ended June 30, 1995 from 9% for the same period ended June 30,
1994.


<PAGE>

MANAGEMENT'S DISCUSSION AND ANALYSIS


Other Income and Expense. Other income, primarily interest income, increased to
$.34 million for the period ended June 30, 1995 from $.06 million expense for
the same period ended June 30, 1994. The increase is primarily due to investment
interest earned on proceeds from the Company's IPO and follow-on offering of
Common Stock and retirement of nearly all of the Company's outstanding debt.

Income Tax Benefit. Income tax benefit in fiscal 1995 reflects the reduction in
the valuation reserve for deferred tax assets. The reduction in the valuation
reserve resulted in recognizing net deferred tax assets of $469,801 during the
fourth quarter of fiscal 1995.

Liquidity and Capital Resources

The Company had $2.1 million in cash and cash equivalents at June 30, 1996, a
decrease of $4.8 million from June 30, 1995.

In fiscal 1996, net cash used by operating activities amounted to $4.5 million,
primarily to fund increases in accounts receivable and inventories due to
increased revenues and customer demand for the Company's FIB systems. The
increase in accounts receivable and inventories was partially offset by
increases in accounts payable and accrued expenses.

Investment activities in fiscal 1996 used $2.4 million, consisting primarily of
capital expenditures related to customer support, research and development,
manufacturing, administrative functions and facilities related improvements.

Net cash provided by financing activities in fiscal 1996 was $1.4 million and
consisted primarily of proceeds from a lease line of credit used to fund capital
purchases. At June 30, 1996, the Company had debt outstanding of $1.0 million
related to capitalized lease obligations.

The Company's existing bank line of credit provides for borrowings of up to
$10.0 million. The line of credit expires on December 1, 1997 and is unsecured.
At June 30, 1996, $340,000 was outstanding under the line of credit.

The Company believes that existing cash balances, together with its available
and expected lines of credit, will be sufficient to finance the Company's
operations and meet its foreseeable cash requirements at least through fiscal
1997.

Other

At June 30, 1996, the Company had available for financial statement and federal
income tax purposes a net operating loss carryforward of approximately $650,000
and tax credit carryforwards of approximately $500,000. The operating loss and
tax credit carryforwards expire in varying amounts in the years 2002 through
2007. Due to a change in ownership, substantially all of the net operating loss
utilization is subject to limitation under Internal Revenue Code Section 382.
See Note 11 of the Notes to Consolidated Financial Statements.

A significant portion of the Company's revenues are subject to the risks
associated with international sales. Although the Company's prices are generally
denominated in United States currency, customers in foreign countries usually
evaluate purchases of the Company's products on the purchase price expressed in
the customers' currency. Therefore, changes in foreign currency exchange rates
may adversely affect the sale of the Company's products.


<PAGE>
              
                                                               Exhibit 13.2

                          INDEPENDENT AUDITORS' REPORT


The Board of Directors
Micrion Corporation:

     We have audited the accompanying consolidated balance sheets of Micrion 
Corporation and subsidiaries as of June 30, 1996 and 1995, and the related
consolidated statements of operations, stockholders' equity, and cash flows for
each of the years in the three-year period ended June 30, 1996. These
consolidated financial statements are the responsibility of the Company's
management. Our responsibility is to express an opinion on these consolidated
financial statements based on our audits.

     We conducted our audits in accordance with generally accepted auditing
standards. Those standards require that we plan and perform the audit to obtain
reasonable assurance about whether the financial statements are free of
material misstatement. An audit includes examining, on a test basis, evidence
supporting the amounts and disclosures in the financial statements. An audit
also includes assessing the accounting principles used and significant
estimates made by management, as well as evaluating the overall financial
statement presentation. We believe that our audits provide a reasonable basis
for our opinion.

     In our opinion, the consolidated financial statements referred to above
present fairly, in all material respects, the financial position of Micrion
Corporation and subsidiaries as of June 30, 1996 and 1995, and the results of
their operations and their cash flows for each of the years in the three-year
period ended June 30, 1996, in conformity with generally accepted accounting
principles.


/s/ KPMG Peat Marwick LLP

Boston, Massachusetts
August 1, 1996

<PAGE>


<TABLE>
CONSOLIDATED BALANCE SHEETS
<CAPTION>

                                                                                June 30,
                                                                       ----------------------------
                                                                          1996             1995
- ---------------------------------------------------------------------------------------------------
<S>                                                                    <C>              <C>        
ASSETS
CURRENT ASSETS:
  Cash and cash equivalents                                            $ 2,081,200      $ 6,851,100
  Accounts receivable (notes 3, 9 and 10)                               11,105,500        9,771,400
  Inventories (note 4)                                                  22,481,400       11,262,700
  Prepaid expenses and other current assets                                627,100          271,100
  Net deferred tax assets (note 11)                                      1,816,200          469,800
- ---------------------------------------------------------------------------------------------------
    Total current assets                                                38,111,400       28,626,100
- ---------------------------------------------------------------------------------------------------

PROPERTY AND EQUIPMENT, net (notes 5 and 7)                              3,234,600        1,561,700
OTHER ASSETS, net                                                          224,800          298,000
- ---------------------------------------------------------------------------------------------------
    Total assets                                                       $41,570,800      $30,485,800
- ---------------------------------------------------------------------------------------------------

LIABILITIES AND STOCKHOLDERS' EQUITY
CURRENT LIABILITIES:
  Accounts payable                                                       6,472,700        3,262,100
  Accrued expenses                                                       2,834,900        1,624,700
  Accrued warranty expenses                                              1,253,000          541,000
  Current installments of obligations under
    capital leases (note 7)                                                245,100           39,800
  Note payable to bank (note 6)                                            340,000               --
  Customer deposits and deferred income                                    389,200          355,700
- ---------------------------------------------------------------------------------------------------
    Total current liabilities                                           11,534,900        5,823,300
- ---------------------------------------------------------------------------------------------------

OBLIGATIONS UNDER CAPITAL LEASES, net of
  current installments (note 7)                                            779,100           25,500

COMMITMENTS AND CONTINGENCIES (note 7)

STOCKHOLDERS' EQUITY (note 8):
  Preferred stock, no par value; authorized 5,000,000 shares                    --               --
  Common stock, no par value; authorized 12,300,000 shares              31,426,800       28,814,400
  Accumulated deficit                                                   (2,172,600)      (4,176,700)
  Other equity (deficit)                                                     2,600             (700)
- ---------------------------------------------------------------------------------------------------
    Total stockholders' equity                                          29,256,800       24,637,000
- ---------------------------------------------------------------------------------------------------
    Total liabilities and stockholders' equity                         $41,570,800      $30,485,800
- ---------------------------------------------------------------------------------------------------
</TABLE>

See accompanying notes to consolidated financial statements.


<PAGE>


<TABLE>
CONSOLIDATED STATEMENTS OF OPERATIONS
<CAPTION>

                                                                   For the years ended June 30,
                                                            -------------------------------------------
                                                                1996           1995            1994
- -------------------------------------------------------------------------------------------------------
<S>                                                         <C>             <C>             <C>
REVENUES:
  Product revenues (notes 9 and 10)                         $38,290,000     $26,396,600     $15,643,100
  Contract revenues (note 10)                                 1,246,200       2,371,600       4,368,300
- -------------------------------------------------------------------------------------------------------
    Total revenues                                           39,536,200      28,768,200      20,011,400
- -------------------------------------------------------------------------------------------------------

COST OF REVENUES:
  Cost of product revenues                                   23,270,100      16,036,300       8,586,500
  Cost of contract revenues                                   1,241,700       2,006,200       3,610,300
- -------------------------------------------------------------------------------------------------------
    Total cost of revenues                                   24,511,800      18,042,500      12,196,800
- -------------------------------------------------------------------------------------------------------

  Gross profit                                               15,024,400      10,725,700       7,814,600

OPERATING EXPENSES:
  Selling, general and
     administrative expenses                                  7,179,000       5,134,100       3,983,500
  Research and development expenses                           4,234,500       2,925,300       1,864,800
- -------------------------------------------------------------------------------------------------------
     Total operating expenses                                11,413,500       8,059,400       5,848,300
- -------------------------------------------------------------------------------------------------------

  Income from operations                                      3,610,900       2,666,300       1,966,300

OTHER (EXPENSE) INCOME:
  Litigation settlement (note 13)                            (2,684,500)             --              --
  Interest income                                               223,300         388,000          17,400
  Interest expense                                              (93,300)        (21,800)        (74,700)
  Other                                                          70,400         (30,300)         (5,200)
- -------------------------------------------------------------------------------------------------------
    Total other (expense) income                             (2,484,100)        335,900         (62,500)
- -------------------------------------------------------------------------------------------------------

    Income before benefit
      (provision) for income taxes                            1,126,800       3,002,200       1,903,800

BENEFIT (PROVISION) FOR INCOME TAXES (note 11)                  877,300         214,300        (187,000)
- -------------------------------------------------------------------------------------------------------

  Net income                                                $ 2,004,100     $ 3,216,500     $ 1,716,800
- -------------------------------------------------------------------------------------------------------

EARNINGS PER SHARE                                          $       .49     $       .91     $       .85
- -------------------------------------------------------------------------------------------------------

WEIGHTED AVERAGE COMMON AND COMMON
  EQUIVALENT SHARES OUTSTANDING                               4,077,200       3,535,000       2,025,000
- -------------------------------------------------------------------------------------------------------
</TABLE>


See accompanying notes to consolidated financial statements.


<PAGE>

<TABLE>
CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY
<CAPTION>


                                  Convertible preferred stock            Common stock
                                  ---------------------------     ------------------------
                                      Shares         Amount          Shares         Amount    
- ------------------------------------------------------------------------------------------
<S>                                <C>          <C>               <C>          <C>
BALANCE, June 30, 1993                    --    $        --       1,335,010    $     6,700    

Conversion of common stock to
  preferred stock at stated
  liquidation preference           1,335,010      4,005,000      (1,335,010)        (6,700)   
Issuance of common stock                  --             --         434,142        214,900    
Repurchase of common stock                --             --          (4,444)          (700)   
Conversion of preferred stock
  to common stock pursuant to
  initial public offering         (1,335,010)    (4,005,000)      1,335,010     12,866,700    
Issuance of common stock
  pursuant to initial public
  offering, net of costs                  --             --       1,000,000      4,679,400    
Effect of foreign currency
  translation                             --             --              --             --      
Amortization of unearned
  compensation                            --             --              --             --      
Net income                                --             --              --             --      
- ------------------------------------------------------------------------------------------
BALANCE, June 30, 1994                    --             --       2,764,708     17,760,300    

Issuance of common stock
  pursuant to follow-on
  offering, net of costs                  --             --       1,000,000     11,054,900    
Repurchase of common stock                --             --          (3,382)          (800)   
Conversion of warrants to
  common stock                            --             --         140,000             --      
Effect of foreign currency
  translation                             --             --              --             --      
Decrease in loans to
  shareholders                            --             --              --             --      
Amortization of unearned
  compensation                            --             --              --             --      
Net income                                --             --              --             --      
- ------------------------------------------------------------------------------------------
BALANCE, June 30, 1995                    --             --       3,901,326     28,814,400    

Issuance of common stock
  pursuant to employee stock
  purchase plan                           --             --           6,536         58,800    
Issuance of common stock
  pursuant to employee stock
  option plan                             --             --           1,750         19,100    
Issuance of common stock
  pursuant to settlement of
  litigation (note 13)                    --             --         119,202      2,534,500    
Effect of foreign currency
  translation                             --             --              --             --      
Decrease in loans to
  shareholders                            --             --              --             --      
Amortization of unearned
  compensation                            --             --              --             --      
Net income                                --             --              --             --      
- ------------------------------------------------------------------------------------------
BALANCE, June 30, 1996                    --    $        --       4,028,814    $31,426,800    
- ------------------------------------------------------------------------------------------
</TABLE>




<TABLE>
<CAPTION>
                                                     Additional                      Other          Total   
                                                        paid-in    Accumulated      equity   stockholders'  
                                                        capital        deficit    (deficit)        equity   
- ---------------------------------------------------------------------------------------------------------
<S>                                                 <C>            <C>            <C>         <C>           
BALANCE, June 30, 1993                              $12,860,000    $(9,110,000)   $(37,500)   $ 3,719,200   
                                                                                                            
Conversion of common stock to                                                                               
  preferred stock at stated                                                                                 
  liquidation preference                             (3,998,300)            --          --             --     
Issuance of common stock                                     --             --     (87,700)       127,200   
Repurchase of common stock                                   --             --          --           (700)  
Conversion of preferred stock                                                                               
  to common stock pursuant to                                                                               
  initial public offering                            (8,861,700)            --          --             --     
Issuance of common stock                                                                                    
  pursuant to initial public                                                                                
  offering, net of costs                                     --             --          --      4,679,400   
Effect of foreign currency                                                                                  
  translation                                                --             --         800            800   
Amortization of unearned                                                                                    
  compensation                                               --             --      26,200         26,200   
Net income                                                   --      1,716,800          --      1,716,800   
- ---------------------------------------------------------------------------------------------------------
BALANCE, June 30, 1994                                       --     (7,393,200)    (98,200)    10,268,900   
                                                                                                            
Issuance of common stock                                                                                    
  pursuant to follow-on                                                                                     
  offering, net of costs                                     --             --          --     11,054,900   
Repurchase of common stock                                   --             --          --           (800)  
Conversion of warrants to                                                                                   
  common stock                                               --             --          --             --     
Effect of foreign currency                                                                                  
  translation                                                --             --      36,700         36,700   
Decrease in loans to                                                                                        
  shareholders                                               --             --      19,000         19,000   
Amortization of unearned                                                                                    
  compensation                                               --             --      41,800         41,800   
Net income                                                   --      3,216,500          --      3,216,500   
- ---------------------------------------------------------------------------------------------------------
BALANCE, June 30, 1995                                       --     (4,176,700)       (700)    24,637,000   
                                                                                                            
Issuance of common stock                                                                                    
  pursuant to employee stock                                                                                
  purchase plan                                              --             --          --         58,800   
Issuance of common stock                                                                                    
  pursuant to employee stock                                                                                
  option plan                                                --             --          --         19,100   
Issuance of common stock                                                                                    
  pursuant to settlement of                                                                                 
  litigation (note 13)                                       --             --          --      2,534,500   
Effect of foreign currency                                                                                  
  translation                                                --             --     (45,500)       (45,500)  
Decrease in loans to                                                                                        
  shareholders                                               --             --      33,000         33,000   
Amortization of unearned                                                                                    
  compensation                                               --           --        15,800         15,800   
Net income                                                   --      2,004,100          --      2,004,100   
- ---------------------------------------------------------------------------------------------------------
BALANCE, June 30, 1996                              $        --    $(2,172,600)   $  2,600    $29,256,800   
- ---------------------------------------------------------------------------------------------------------
</TABLE>





See accompanying notes to consolidated financial statements.


<PAGE>



<TABLE>
CONSOLIDATED STATEMENTS OF CASH FLOWS
<CAPTION>

                                                                            For the years ended June 30,
                                                                 --------------------------------------------------
                                                                      1996               1995              1994
- -------------------------------------------------------------------------------------------------------------------
<S>                                                              <C>                 <C>                <C>        
CASH FLOWS FROM OPERATING ACTIVITIES:
  Net income                                                     $  2,004,100        $ 3,216,500        $ 1,716,800
  Adjustments to reconcile net income to net cash
    used by operating activities:
      Depreciation and amortization                                   795,800            555,800            387,900
      Unearned compensation                                            15,800             41,800            153,400
      Increase in deferred tax benefit                             (1,346,400)          (469,800)                --
      Litigation settlement                                         2,534,500                 --                 --
      Changes in assets and liabilities:
        Accounts receivable                                        (1,380,500)        (6,256,400)        (1,433,700)
        Inventories                                               (11,908,000)        (5,584,300)        (1,390,100)
        Prepaid expenses and other current assets                    (361,600)          (133,400)           (46,600)
        Accounts payable                                            3,198,000          1,691,100           (115,500)
        Accrued expenses                                            1,233,100             46,900            627,900
        Accrued warranty expenses                                     717,600             84,100             59,900
        Customer deposits and deferred income                          33,500            177,500           (785,900)
- -------------------------------------------------------------------------------------------------------------------
  Net cash used by operating activities                            (4,464,100)        (6,630,200)          (825,900)
- -------------------------------------------------------------------------------------------------------------------

CASH FLOWS FROM INVESTING ACTIVITIES:
  Purchase of property and equipment                               (1,705,000)          (769,200)        (1,108,500)
  Increase in other assets                                             (1,100)           (35,600)          (216,000)
- -------------------------------------------------------------------------------------------------------------------
  Net cash used by investing activities                            (1,706,100)          (804,800)        (1,324,500)
- -------------------------------------------------------------------------------------------------------------------

CASH FLOWS FROM FINANCING ACTIVITIES:
  Proceeds from capital lease obligations                           1,106,600                 --                 --   
  Repayments of capital lease obligations                            (147,700)           (39,300)           (33,300)
  Net borrowings from line of credit                                  340,000                 --                 --
  Repayments of notes payable                                            --                   --         (1,844,600)
  Proceeds from sale of common stock, net                              77,900         11,054,900          4,679,400
  Repurchase of common stock, net                                        --                 (800)              (700)
- -------------------------------------------------------------------------------------------------------------------
  Net cash provided by financing activities                         1,376,800         11,014,800          2,800,800
- -------------------------------------------------------------------------------------------------------------------
Exchange rate changes on cash                                          23,500             33,200             (3,000)
- -------------------------------------------------------------------------------------------------------------------
(DECREASE) INCREASE IN CASH AND CASH EQUIVALENTS                   (4,769,900)         3,613,000            647,400
CASH AND CASH EQUIVALENTS, beginning of year                        6,851,100          3,238,100          2,590,700
- -------------------------------------------------------------------------------------------------------------------
CASH AND CASH EQUIVALENTS, end of year                           $  2,081,200        $ 6,851,100        $ 3,238,100
- -------------------------------------------------------------------------------------------------------------------

SUMMARY OF NONCASH FINANCIAL TRANSACTIONS:
  Fixed assets acquired under capital lease                      $    689,300        $        --        $    65,900
- -------------------------------------------------------------------------------------------------------------------
SUPPLEMENTAL DISCLOSURES OF CASH FLOW INFORMATION:
  Cash paid during the year for:
  Interest                                                       $     56,400        $    19,400        $    86,500
- -------------------------------------------------------------------------------------------------------------------
  Income taxes                                                   $    154,100        $   239,700        $    54,200
- -------------------------------------------------------------------------------------------------------------------
</TABLE>



See accompanying notes to consolidated financial statements 


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS          June 30, 1996, 1995 and 1994


(1) NATURE OF BUSINESS

Micrion Corporation and its subsidiaries (the "Company") are engaged in the
development, production and marketing of capital equipment used in the
manufacturing and processing of semiconductor and other high technology devices.

(2) SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

(a) Principles of Consolidation

The consolidated financial statements include the accounts of Micrion
Corporation and its wholly owned subsidiaries, Micrion Japan Corporation KK,
Micrion GmbH and Micrion Foreign Sales Corporation. All significant intercompany
balances and transactions have been eliminated in consolidation.

(b) Inventories

Inventories are stated at the lower of cost or market (net realizable value).
Cost is determined using the first-in, first-out (FIFO) method.

(c) Revenue Recognition

Product revenues are recorded at the time of factory acceptance by the customer,
with the exception of certain systems with significant engineering costs, which
are accounted for under the percentage of completion accounting method. Sales of
spare parts are recorded at the time of shipment and maintenance service
revenues are billed in advance as deferred revenue and are recognized as the
service is performed.

Contract revenues are accounted for under the percentage of completion
accounting method. Losses are recognized in full when they become known.

(d) Property and Equipment

Property and equipment is stated at cost. Depreciation and amortization of
property and equipment, leasehold improvements and assets under capital leases
are provided by straight-line or accelerated methods over the estimated useful
lives of the respective assets as follows:

        Furniture and fixtures                              7-10 years
        Computer, engineering and production equipment      3-7 years 
        Sales demonstration systems                         5 years 
        Leasehold improvements                              5-10 years 
        Property under capital leases                       3-5 years

License fees, which are included in other assets, are amortized using the
straight-line method over their estimated useful life, generally five years.

In accordance with Financial Accounting Standards Board Statement No. 121,
"Accounting for the Impairment of Long-Lived Assets and for Long-Lived Assets to
be Disposed Of," the Company reviews its long-lived assets for impairment
whenever events or changes in circumstances indicate that the carrying amount of
an asset may not be recoverable. If it is determined that the carrying amount of
an asset cannot be fully recovered, an impairment loss is recognized.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(2) SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES, (continued)

(e) New Accounting Pronouncement

In October 1995, the Financial Accounting Standards Board issued SFAS No. 123
"Accounting for Stock-Based Compensation," which established financial
accounting and reporting standards for stock-based employee compensation plans.
Companies that do not adopt this new method will be required to make pro forma
footnote disclosures of net income as if the fair value-based method of
accounting required by SFAS No. 123 had been applied. The Company is required to
adopt SFAS No. 123 beginning in fiscal 1997. Adoption of this pronouncement is
not expected to have a material impact on the Company's financial position or
results of operations because the Company intends to make pro forma footnote
disclosures instead of adopting the new accounting method.

(f) Research and Development

Expenditures for research and development are charged against operations as
incurred. For the years ended June 30, 1996, 1995 and 1994, aggregate research
and development costs were $5,132,100, $4,531,700 and $4,659,300, respectively,
including $897,600, $1,606,400 and $2,794,500, respectively, of costs recovered
under research and development contracts.

(g) Income Taxes

The Company accounts for income taxes under the asset and liability method.
Under this method, deferred tax assets and liabilities are recognized for the
future tax consequences attributable to differences between the financial
statement carrying amounts of existing assets and liabilities and their
respective tax bases and operating loss and tax credit carryforwards. Deferred
tax assets and liabilities are measured using enacted tax rates expected to
apply to taxable income in the years in which those temporary differences are
expected to be recovered or settled. The effect on deferred tax assets and
liabilities of a change in tax rates is recognized in income in the period that
includes the enactment date.

(h) Foreign Currency Translation

Assets and liabilities of the Company's foreign operations are translated into
U.S. dollars at the exchange rate in effect at the balance sheet date, and
revenue and expenses are translated at average rates in effect during the
period. The resulting translation adjustment is reflected as a separate
component of equity on the consolidated balance sheets. Transaction gains and
losses are reflected in the consolidated statements of operations and are
immaterial.

(i) Net Income per Share

Net income per share is computed based on the weighted average number of
equivalent shares of the Company's common stock outstanding during each period,
giving effect to stock options and warrants considered to be dilutive. Fully
diluted net income per share is not significantly different from primary net
income per share amounts.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(2) SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES, (continued)

(j) Cash Equivalents

Cash equivalents consist of short-term investments with original maturities of
three months or less.

(k) Fair Value of Financial Instruments

The carrying value for cash and cash equivalents, accounts receivable, accounts
payable, capital lease obligations and short-term debt approximates fair value
because of the short maturity of these instruments.

(l) Concentration of Credit Risk

Financial instruments that potentially subject the Company to concentration of
credit risk consist primarily of temporary cash and cash equivalents and
accounts receivable. The Company invests its excess cash primarily in high
quality securities of short duration and limits the amount of credit exposure to
any one financial institution. The Company also provides credit, in the normal
course of business, primarily to large multinational corporations. Credit risk
on trade receivables is minimized as the result of the strong financial position
of the Company's customer base.

(m) Use of Estimates

The preparation of consolidated financial statements in conformity with
generally accepted accounting principles requires management to make estimates
and assumptions that affect the reported amounts of assets and liabilities and
disclosure of contingent assets and liabilities at the date of the financial
statements and the reported amounts of revenues and expenses during the
reporting period. Actual results could differ from those estimates.

<TABLE>
(3) ACCOUNTS RECEIVABLE

Accounts receivable consist of:
<CAPTION>

                                                                           June 30,
                                                                 ----------------------------
                                                                     1996             1995
- ---------------------------------------------------------------------------------------------
<S>                                                              <C>              <C>               
Trade accounts                                                   $ 9,787,600      $ 8,018,200       
Billed:
  Product revenues with significant engineering costs                180,500          586,600
  Research and development contracts in progress                      86,100          200,000
Unbilled:                                              
  Product revenues with significant engineering costs                936,400          592,900
  Research and development contracts in progress                     114,900          373,700
- ---------------------------------------------------------------------------------------------
  Total receivables                                              $11,105,500      $ 9,771,400
- ---------------------------------------------------------------------------------------------
</TABLE>

<TABLE>
(4) INVENTORIES

Inventories consist of:
<CAPTION>

                                                                           June 30,
                                                                 ----------------------------
                                                                     1996            1995
- ---------------------------------------------------------------------------------------------
<S>                                                              <C>              <C>        
Raw materials and manufactured parts, net                        $10,081,800      $ 5,992,800
Work in process                                                   11,157,900        4,816,900
Finished goods                                                     1,241,700          453,000
- ---------------------------------------------------------------------------------------------
  Total inventories                                              $22,481,400      $11,262,700
- ---------------------------------------------------------------------------------------------
</TABLE>




<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

<TABLE>
(5) PROPERTY AND EQUIPMENT

Property and equipment consist of:
<CAPTION>

                                                                  June 30,
                                                      ------------------------------
                                                          1996               1995
- ------------------------------------------------------------------------------------
<S>                                                   <C>                <C>         
Furniture and fixtures                                $   623,300        $   471,300 
Computer, engineering and production equipment          3,822,500          2,736,700
Sales demonstration systems                               345,200            345,200
Leasehold improvements                                    242,800            193,200
Property under capital lease                            1,884,300            777,700
- ------------------------------------------------------------------------------------
                                                        6,918,100          4,524,100
Accumulated depreciation and amortization              (3,683,500)        (2,962,400)
- ------------------------------------------------------------------------------------

  Net property and equipment                          $ 3,234,600        $ 1,561,700
- ------------------------------------------------------------------------------------
</TABLE>

At June 30, 1996 and 1995, accumulated amortization for property under capital
lease was $878,500 and $742,600, respectively.

(6) INDEBTEDNESS

On July 2, 1993, the Company entered into a working capital line of credit
agreement with the Bank of Boston for borrowings up to $2,300,000, of which the
first $1,800,000 of borrowings were guaranteed by certain stockholders of the
Company. Amounts borrowed under this guaranteed portion bore interest at the
bank's prime rate plus 1% and any additional borrowings bore interest at the
bank's prime rate plus 1.5%. In consideration of the guarantee, the Company
issued to the guarantors, warrants to purchase 160,000 shares of common stock at
an exercise price of $1.50 per share (note 8). The agreement restricted the
Company from paying dividends in cash or shares to stockholders.

The agreement with the bank expired on September 30, 1994.

On October 21, 1994, the Company entered into a line of credit agreement with
Fleet Bank, N.A. which provided for borrowings up to $3.0 million. Amounts
borrowed bore interest at the bank's prime rate (9.0% at June 30, 1995). On
November 17, 1995, the Company modified the line of credit to provide borrowings
up to $5.0 million. Amounts borrowed bore interest at the bank's prime rate. On
May 16, 1996, the Company entered into a second modification of the line of
credit agreement to provide borrowings up to $10.0 million. Amounts borrowed
bear interest at the bank's prime rate (8.25% at June 30, 1996). The line of
credit expires on December 1, 1997. At June 30, 1996, $340,000 was outstanding
against the line of credit.

(7) LEASES

The Company occupies facilities under an operating lease. During fiscal 1995,
the lease was renegotiated and extended to an expiration date of February 2005.
Rent expense was approximately $592,900, $347,000 and $607,000 for the years
ended June 30, 1996, 1995 and 1994, respectively. Capital lease obligations
consist of amounts due under equipment leases expiring in December 2001.
Property under capital lease consists primarily of computers, engineering
equipment and related software.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

<TABLE>
(7) LEASES (continued)

At June 30, 1996, future minimum lease payments under these noncancelable
agreements are as follows:
<CAPTION>

                                                                         Capital       Operating
Year ending June 30:                                                       Lease           Lease
- ------------------------------------------------------------------------------------------------
<S>                                                                   <C>             <C>       
    1997                                                              $  314,500      $  553,500
    1998                                                                 284,900         517,800
    1999                                                                 246,100         509,500
    2000                                                                 218,400         515,500
    2001-2005                                                             91,000       2,360,500
- ------------------------------------------------------------------------------------------------
    Minimum future lease payments                                     $1,154,900      $4,456,800
                                                                                      ----------
Less amounts representing interest                                      (130,700)
                                                                      ----------
    Present value of future minimum lease payments                     1,024,200
Less current installments                                               (245,100)
                                                                      ----------
    Obligations under capital lease, net of current  installments     $  779,100
                                                                      ----------
</TABLE>

In addition, the Company is responsible for additional operating expenses
incurred by the lessor under the operating lease. Such expenses are
approximately $175,000, annually.

(8) STOCKHOLDERS' EQUITY

(a) Preferred Stock

On August 31, 1993, the Company was authorized to issue up to 5,000,000 shares
of preferred stock at no par value ("1993 Preferred Stock") and 1,335,010
outstanding shares of common stock were converted into the same number of shares
of 1993 Preferred Stock with a liquidation preference of $3.00 per share.

Effective May 11, 1994, the holders of a sufficient number of shares of the
Company's preferred stock elected, in accordance with the Company's Articles of
Organization, to convert all outstanding shares of preferred stock into the same
number of shares of common stock. In addition, on March 31, 1994, the
stockholders approved the creation of a new undesignated class of preferred
stock consisting of 5,000,000 shares, no par value. No shares of this class of
preferred stock have been issued as of June 30, 1996.

(b) Common Stock

On August 31, 1993, the Company's stockholders approved a reduction in the
authorized number of shares to 12,300,000 common shares at no par value. In
August 1993, the Board of Directors voted to adopt the 1993 Common Stock
Incentive Plan which provides for the award of up to 500,000 shares of common
stock to key employees and consultants. As of June 30, 1996, 429,698 shares of
stock have been awarded. The shares vest over a period of two to five years
depending on the employee's years of service with the Company. For the years
ended June 30, 1996 and 1995, the Company recorded $15,800 and $41,800,
respectively, as compensation expense in connection with this award.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(8) STOCKHOLDERS' EQUITY (continued)

On May 18, 1994, the Company completed its initial public offering ("IPO") by
issuing 1,000,000 shares of common stock at $5.50 per share, and proceeds, net
of underwriters' commissions and other expenses, amounted to $4,679,400. In
conjunction with the IPO, the Company issued warrants to the underwriters for
the purchase of an aggregate of 100,000 shares of common stock at a price of
$6.60 per share.

The warrants are exercisable beginning May 10, 1995 through May 10, 1999.

On December 7, 1994, the Company completed a follow-on public offering of
1,000,000 shares of common stock at $12.00 per share, and proceeds, net of
underwriters' commissions and other expenses, amounted to $11,054,900.

Concurrent with completion of this offering, 160,000 warrants issued in July
1993 were exercised on a net issue basis.

(c) Stock Options

On May 8, 1990, the Company adopted the 1990 Nonqualified Stock Option Plan.
Four hundred eighty-five shares of common stock are reserved for issuance under
this plan. At June 30, 1996, 390 options to purchase common stock at $30 per
share were outstanding, of which all options are exercisable. No activity under
this plan has occurred for the period from June 30, 1993 through June 30, 1996.

On March 31, 1994, the Company's stockholders approved the 1994 Omnibus Stock
Plan which initially provided for the issuance of up to 200,000 shares of common
stock pursuant to the grant of incentive stock options to employees and the
grant of nonqualified options or restricted stock to employees, consultants,
directors and officers of the Company. The stockholders also approved the 1994
Employee Stock Purchase Plan which provides for the sale of up to 100,000 shares
of common stock to eligible employees at a price at the lesser of 85% of fair
market value at either the date of grant or the date of exercise. On November 3,
1995, the Company's shareholders approved an amendment to the Company's 1994
Omnibus Stock Plan increasing the aggregate number of shares issuable under such
plan from 200,000 to 500,000 shares. As of June 30, 1996, 402,125 incentive
stock options have been issued at exercise prices ranging from $10.25 to $13.625
per share, of which 111,773 were exercisable and 1,750 have been exercised. As
of June 30, 1996, 6,536 shares have been issued under the 1994 Employee Stock
Purchase Plan.

On November 17, 1994, the Company's stockholders approved the 1994 Non-Employee
Director Stock Option Plan (the "Director Plan"). The Director Plan provides for
the issuance of a maximum amount of 50,000 shares of common stock pursuant to
the grant of stock options to eligible directors of the Company at an exercise
price equal to the fair market value of the common stock on the date of grant.
As of June 30, 1996, 30,000 shares have been granted under this plan at exercise
prices ranging from $13.375 to $15.00 per share, of which 10,625 shares were
exercisable and none of which have been exercised.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(8) STOCKHOLDERS' EQUITY (continued)

(d) Warrants

<TABLE>
The following is a summary of all outstanding warrants to purchase common stock
at June 30, 1996:
<CAPTION>

                           Allowable shares       Price         Expiration
                            under warrants      per share          Date
- ----------------------------------------------------------------------------
<S>                             <C>             <C>            <C>
                                     83         $9,000.00      June 30, 1998
                                100,000         $    6.60       May 10, 1999
</TABLE>

(9) MARKETING AGREEMENT

In March 1988, the Company entered into a marketing agreement with a Japanese
distributor, Tokyo Electron Limited ("TEL"). The agreement grants TEL the right
to market, distribute, sell and service in Japan the Company's focused ion beam
wafer modification equipment and flat panel display laser repair equipment. The
agreement will remain in force unless terminated by mutual written agreement or
60 days written notice by either party. For the years ended June 30, 1996, 1995
and 1994, sales of $8,004,600, $8,044,700 and $7,010,600, respectively, were
made to TEL. At June 30, 1996 and 1995, receivables of $818,100 and $3,163,800,
respectively, were due.

(10) GEOGRAPHIC AND CUSTOMER INFORMATION

<TABLE>
The following summarizes the geographic distribution of the Company's revenues:
<CAPTION>

                                           For the years ended June 30,
                                   ---------------------------------------------
                                          1996             1995             1994
- --------------------------------------------------------------------------------
<S>                                <C>              <C>              <C>        
Total revenue:
  North America                    $12,402,200      $10,731,900      $11,336,000
  Far East exports                  23,260,800       16,215,700        7,010,600
  Other foreign exports              3,873,200        1,820,600        1,664,800
- --------------------------------------------------------------------------------
    Total revenues                 $39,536,200      $28,768,200      $20,011,400
- --------------------------------------------------------------------------------
</TABLE>

For the years ended June 30, 1996, 1995 and 1994, the U.S. Government accounted
for 3%, 6% and 13%, respectively, of total revenues. For the years ended June
30, 1996, 1995 and 1994, two, three and one customer(s), respectively, other
than the U.S. Government, accounted for 55%, 55% and 35%, respectively, of total
revenues. At June 30, 1996, the two customers accounted for 51% of total
accounts receivable.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(11) INCOME TAXES

<TABLE>
The components of the net deferred tax assets recognized in the consolidated
balance sheets are as follows:
<CAPTION>

                                                             June 30,
                                                -------------------------------
                                                       1996                1995
- -------------------------------------------------------------------------------
<S>                                              <C>                 <C>        
Deferred tax assets                              $1,834,500         $ 2,447,700
Deferred tax liabilities                            (18,300)           (121,500)
Valuation allowance                                      --          (1,856,400)
- -------------------------------------------------------------------------------
  Net deferred tax assets                        $1,816,200         $   469,800
- -------------------------------------------------------------------------------
</TABLE>

<TABLE>
The approximate tax effect of each type of temporary difference and tax credit
carryforwards before allocation of the valuation allowance is as follows:
<CAPTION>

                                                                June 30,
                                                     ---------------------------
Deferred tax assets:                                       1996             1995
- --------------------------------------------------------------------------------
<S>                                                  <C>              <C>       
Net operating loss carryforwards                     $  218,700       $1,219,000
Reserves                                              1,063,500          697,600
Tax credit carryforwards                                552,300          531,100
- --------------------------------------------------------------------------------
  Deferred tax assets                                $1,834,500       $2,447,700
- --------------------------------------------------------------------------------
</TABLE>

The amount recorded as net deferred tax assets as of June 30, 1996 represents
the amount of tax benefits of existing deductible temporary differences or
carryforwards that are more likely than not to be realized through the
generation of sufficient future taxable income within the carryforward period.
The Company believes that the net deferred tax assets of $1,816,200 at June 30,
1996 will more likely than not be realized in the carryforward period using
anticipated results from operations. As of June 30, 1996, based on the Company's
level of net income and projected earnings, the Company reduced the valuation
allowance by $1,856,400. During the fourth quarter of fiscal 1996, the Company
recorded a tax benefit of $1,687,300 due to the reduction of the valuation
allowance. The Company's taxable income before net operating loss carryforwards
was $1,426,600 and $2,978,300 for the years ended June 30, 1995 and 1994,
respectively. The Company continuously re-evaluates the recoverability of
deferred tax assets.

<TABLE>
The components of the benefit (provision) for income taxes are as follows:
<CAPTION>

                                               For the years ended June 30,
                                           ------------------------------------
                                                 1996         1995         1994
- -------------------------------------------------------------------------------
<S>                                        <C>           <C>          <C>       
Federal:
  Current                                  $ (360,700)   $ (68,100)   $ (58,600)
  Deferred                                  1,067,800      469,800           --
State:
  Current                                     (74,900)    (180,000)    (123,000)
  Deferred                                    278,600           --           --
Foreign:
  Current                                     (33,500)      (7,400)      (5,400)
  Deferred                                         --           --           --
- -------------------------------------------------------------------------------
    Benefit (provision) for income taxes   $  877,300    $ 214,300    $(187,000)
- -------------------------------------------------------------------------------
</TABLE>


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(11) INCOME TAXES (continued)

<TABLE>
The actual income tax benefit (provision) differs from the "expected" tax
computed by applying the U.S. Federal corporate tax rate of 34% to income before
provision for income taxes as follows:
<CAPTION>

                                                    For the years ended June 30,
                                               --------------------------------------
                                                     1996           1995         1994
- -------------------------------------------------------------------------------------
<S>                                            <C>           <C>            <C>       
Computed "expected" tax provision              $ (383,100)   $(1,020,800)   $(647,300)
(Increase) reduction in income taxes
   resulting from:
      State taxes, net of federal
         income tax benefit                       (46,200)      (114,700)     (81,200)
      Foreign taxes                               (66,900)        (7,400)      (5,400)
      Foreign sales corporation benefit           204,900           --           --
      Litigation settlement                      (861,800)          --           --
      Other                                       174,000        278,900       (1,000)
      Change in valuation allowance             1,856,400      1,078,300      547,900
- -------------------------------------------------------------------------------------
        Benefit (provision) for income taxes   $  877,300    $   214,300    $(187,000)
- -------------------------------------------------------------------------------------
</TABLE>

For income tax purposes at June 30, 1996, the Company has net operating loss
carryforwards available to reduce future income of approximately $650,000 and
tax credit carryforwards of approximately $500,000. The net operating loss and
tax credit carryforwards expire in varying amounts in the years 2002 through
2007. The net operating losses are subject to limitations under section 382 of
the Internal Revenue Code. This limitation requires that the net operating loss
be absorbed gradually over the period 1996 through 1998. The Company expects to
utilize the full amount of its net operating loss and credit carryforwards.

(12) EMPLOYEE BENEFIT PLAN

In July 1987, the Company adopted a tax-qualified employee savings and
retirement plan under Internal Revenue Code Section 401(k) ("Plan"), covering
all of the Company's employees following three months of service and attainment
of the age of 18. Participants may elect to contribute to the Plan up to the
lesser of the statutorily prescribed annual limit or 20% of their pre-tax
compensation. The Plan permits, but does not require, additional matching
contributions by the Company on behalf of all participants in the Plan.
Effective January 1, 1996 the Company began matching one half of each employee's
contribution up to 3% of their salary. For fiscal 1996, the Company made
matching contributions of $102,800 to the Plan.

(13) SETTLEMENT OF LITIGATION

On May 7, 1996, the Company reached settlement with KLA Instruments Corporation
of litigation initiated by KLA in December, 1993, which alleged that the Company
had failed to abide with the Massachusetts Business Corporation Law and its
Articles of Organization in connection with the refinancing and recapitalization
of the Company during the period June through August 1993. Under the terms of
the noncash settlement, the Company issued 119,202 shares of Micrion common
stock in exchange for the release of all claims in the litigation, and recorded
the related expense of $2,684,500 in the fiscal 1996 fourth quarter.


<PAGE>

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS


(14) UNAUDITED INTERIM FINANCIAL INFORMATION

<TABLE>
Quarterly financial information is as follows:
(in thousands, except per share data)
<CAPTION>

For the quarters ended              September 30,   December 31,     March 31,      June 30,
- --------------------------------------------------------------------------------------------

<S>                                      <C>            <C>           <C>           <C>    
Year ended June 30, 1996
  Revenues                               $ 8,570        $ 8,872       $ 9,715       $12,379
  Gross profit                             2,904          3,291         3,679         5,150
  Net income                                 486            580           446           491
  Net income per share                       .12            .15           .11           .11
Year ended June 30, 1995

  Revenues                               $ 6,088        $ 6,549       $ 7,925       $ 8,206
  Gross profit                             2,363          2,469         2,664         3,230
  Net income                                 571            576           710         1,362
  Net income per share                       .19            .17           .18           .34
- --------------------------------------------------------------------------------------------
<FN>

Note: Due to rounding, some totals may not add.
</TABLE>

(15) SUBSEQUENT EVENT

Subsequent to June 30, 1996, two actions were filed against the Company and
certain of its officers and directors. Each suit purports to be brought on
behalf of a class of purchasers of the Company's common stock from April 26,
1996 through June 21, 1996. The complaints assert claims under the federal
securities laws. The litigation is at the preliminary stage, and discovery has
not commenced. While the ultimate outcome of these actions is uncertain, it is
the opinion of management that the claims are wholly without merit and the
Company will vigorously defend these actions.




Exhibit 23.1


                   Consent of Independent Auditors


     We consent to the  incorporation by reference in the Registration  
Statements on Form S-8 (Nos. 33-99850 and 33-87928) of Micrion Corporation of 
our report dated August 1, 1996, with respect to the consolidated financial 
statements of Micrion Corporation  for the year ended June 30, 1996,  which 
report appears in the June 30, 1996 Annual Report on Form 10-K of Micrion 
Corporation.


                              
                                             KPMG Peat Marwick LLP


Boston, Massachusetts
September 26, 1996



DS1-293270


<TABLE> <S> <C>

<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRCTED FROM THE
COMPANY'S CONSOLIDATED FINANCIAL STATEMENTS AND IS QUALIFIED IN ITS ENTIRETY BY
REFERENCE TO SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
       
<S>                             <C>
<PERIOD-TYPE>                   YEAR
<FISCAL-YEAR-END>               JUN-30-1996
<PERIOD-END>                               JUN-30-1996
<CASH>                                           2,081
<SECURITIES>                                         0
<RECEIVABLES>                                   11,106
<ALLOWANCES>                                         0
<INVENTORY>                                     22,481
<CURRENT-ASSETS>                                38,111
<PP&E>                                           3,235
<DEPRECIATION>                                     796
<TOTAL-ASSETS>                                  41,571
<CURRENT-LIABILITIES>                           11,535
<BONDS>                                              0
                                0
                                          0
<COMMON>                                        31,427
<OTHER-SE>                                     (2,170)
<TOTAL-LIABILITY-AND-EQUITY>                    29,257
<SALES>                                         38,290
<TOTAL-REVENUES>                                39,536
<CGS>                                           23,270
<TOTAL-COSTS>                                   24,512
<OTHER-EXPENSES>                                 2,484
<LOSS-PROVISION>                                     0
<INTEREST-EXPENSE>                                  93
<INCOME-PRETAX>                                  3,611
<INCOME-TAX>                                     (877)
<INCOME-CONTINUING>                              1,127
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                            0
<NET-INCOME>                                     2,004
<EPS-PRIMARY>                                      .49
<EPS-DILUTED>                                      .48

        




</TABLE>





Exhibit 99.1

                           CAUTIONARY STATEMENT FOR PURPOSES OF THE
                            "SAFE HARBOR" PROVISIONS OF THE PRIVATE
                           SECURITIES LITIGATION REFORM ACT OF 1995


         Micrion  Corporation  (the "Company")  desires to take advantage of the
new "safe harbor" provisions of the Private Securities  Litigation Reform Act of
1995 and is including this Exhibit 99.1 in its Form 10-K in order to do so.

         The Company  wishes to caution  readers  that the  following  important
factors,  among  others,  in some cases have  affected,  and in the future could
affect,  the  Company's  actual  results  and could cause the  Company's  actual
consolidated  results for the Company's  current  quarter and beyond,  to differ
materially from those expressed in any forward-looking statements made by, or on
behalf of, the Company:

         The exercise of cancellation or termination provisions contained in the
Company's   multiple-system   purchase  agreement  with  Read-Rite  Corporation,
including  provisions that entitle the customer to cancel issued purchase orders
or to terminate the agreement for convenience.

         The  inability  of the Company to make  deliveries  required  under the
multiple-system  purchase agreement referenced in the preceding paragraph or any
other purchase  orders as a result of a lack of production  capacity,  manpower,
inability to acquire necessary materials for manufacturing, or otherwise.

         Difficulties  associated  with the use of the  Company's  machines  for
production applications,  which are new applications of the Company's equipment,
by  the  customer  who is a  party  to the  multiple-system  purchase  agreement
referenced in the preceding  paragraph or by any other customers similarly using
the Company's  machines,  and the  warranty,  service and other costs that might
result in connection with such difficulties.

         Any factor adversely  affecting the  semiconductor  industry,  which is
highly cyclical, or particular segments within the semiconductor industry.

         A variety of factors  which vary  substantially  over time,  including:
conditions in the semiconductor  industry;  competitive  pricing pressures;  the
timing of orders from customers;  the timing of new product introductions by the
Company  and  competitors;  customer  acceleration,  cancellation  or  delay  of
shipments;  changes in the mix of types of systems  sold;  changes in the mix of
systems,  service and parts revenues;  the length of sales cycles;  the relative
proportions of domestic and foreign  shipments;  the mix of product and contract
revenues;  the mix and timing of government and commercial  contracts  activity;
the level  and  timing of  selling,  general  and  administrative  expenses  and
research and development expenses;  specific feature needs of customers, some of
which may be available in competitors' systems but not in the Company's systems;
production delays; and currency exchange rate fluctuations.
         
         
         
         The timing of recognition of revenue from a single system order, either
pursuant to customer acceptance of a system or percentage of completion contract
accounting;  announcements by the Company or its competitors of new products and
technologies; the deferral or loss of an anticipated order could have a material
adverse effect on the Company's results of operations.

         Difficulties   in   developing   and   introducing   new  products  and
enhancements  on a timely  and cost  effective  basis or in  product  selection,
timely  and  efficient   completion  of  product   design,   implementation   of
manufacturing  and  assembly   processes  and  effective  sales  and  marketing;
reliability or quality problems with new products.

         Inability to  anticipate  both future  demand and the  availability  of
technology to satisfy that demand in the development of new products.

         Factors  in  connection  with the facts that  certain of the  Company's
competitors and potential  competitors  have  substantially  greater  financial,
marketing,  technological  and  production  resources  than the Company and that
certain of these competitors are themselves  semiconductor  manufacturers,  and,
therefore, familiar with semiconductor manufacturing.

         Inability  of the  Company to manage  growth in  production  and in its
employee  base,  which has placed,  and will  continue to place,  a  significant
strain on the Company's  management,  financial and operating resources,  and to
expand its customer  services and support,  increase  personnel  throughout  the
Company,  expand  operational  and  financial  systems and implement new control
procedures;  inability to attract  qualified  personnel or  successfully  manage
expanded  operations;  inability to deal with  constraints  that might adversely
affect its ability to satisfy  customer demand in a timely fashion or to provide
consistent levels of support to existing customers.

         Factors  inherent in  international  operations,  including  changes in
demand  resulting from  fluctuations in exchange  rates,  the risk of government
financed  or  subsidized  competition,  changes  in trade  policies  and  tariff
regulations,  difficulties in obtaining U.S.  export  licenses and  geopolitical
risks,  and  fluctuations  in foreign  currencies  that might  impact the prices
quoted by the Company to prospective  customers and thereby affect the Company's
ability to obtain orders from such foreign customers.

         Factors  related  to the fact that the  Company  markets  and sells its
products through independent sales  representatives and a Japanese  distributor,
which  results in lower gross profit  margins on sales to foreign  customers and
the fact  that an  increase  in the  proportion  of  international  sales  could
negatively affect the Company's gross profit margins.

         A lack of success,  or associated  costs, in defending pending lawsuits
brought by certain  stockholders  of the Company,  each of which  purports to be
brought on behalf of a class of purchasers  of the  Company's  common stock from
April 26, 1996 through June 21, 1996,



                                                        2







alleging  that the Company made false and  misleading  statements  to the public
concerning the nature of its sales agreement with Read-Rite Corporation.

         The loss of one or more  significant  customers or the inability of the
Company to attract new customers to replace these customers.

         Risks  associated  with  the  expenditures  of  substantial  funds  and
management  effort in  anticipation  of a sale even though a sale may not result
from the effort, as a result of lengthy sales cycles.

         The risk of  significant  delays or  interruptions  in the  delivery of
components  or  parts,  such as  high  voltage  power  suppliers,  from  current
suppliers,  receipt of defective components or parts, as well as difficulties or
delays in shifting manufacturing capacity to new suppliers.

         Inability to attract and retain certain  qualified  employees,  such as
key scientific,  marketing and management  personnel,  who are in limited supply
and are difficult to attract and retain.

         Difficulties in protecting the Company's technology or in responding to
the development of similar technology by others.

         Interruption by fire,  earthquakes or other catastrophic  events, power
failures,  work stoppages,  regulatory  actions or other causes to either of the
Company's production facilities,  where the Company's manufacturing inventory is
maintained.







1-293271

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