MICRION CORP /MA/
S-3, 1996-05-23
SPECIAL INDUSTRY MACHINERY, NEC
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As filed with the Securities and Exchange Commission on May 23, 1996
                                     Registration No. 333-______ 

                SECURITIES AND EXCHANGE COMMISSION
                     Washington, D.C.  20549
        
                             FORM S-3
     REGISTRATION STATEMENT UNDER THE SECURITIES ACT OF 1933

                       MICRION CORPORATION
      (Exact name of registrant as specified in its charter)
                                        
 Massachusetts                           No. 04-2892070  
 (State or other jurisdiction            (IRS Employer
 of incorporation or                     Identification No.)
 organization)
                     

 One Corporation Way, Peabody, Massachusetts 01960 (508) 531-6464
(Address, including zip code, and telephone number, including  
area code, of registrant's principal executive offices)


NICHOLAS P. ECONOMOU, Micrion Corporation, One Corporation Way,  
     Peabody, Massachusetts 01960 (508) 531-6464
    (Name, address, including zip code, and telephone number,
            including area code, of agent for service)

                            Copies to:

                       ROSLYN G. DAUM, ESQ.
                      Choate, Hall & Stewart
                          Exchange Place
                         53 State Street
                   Boston, Massachusetts  02109
                          (617) 248-5000
                                        

          Approximate date  of commencement  of proposed sale  to
the public:    From time to  time or at one  time after effective
date of this Registration Statement.

      If the only  securities being registered  on this Form  are
being offered  pursuant  to  dividend  or  interest  reinvestment
plans,  check the following box. [ ]
   
      If  any of the securities being registered on this Form are
to be offered  on a delayed or continuous basis  pursuant to Rule
415  under  the Securities  Act  of 1933,  other  than securities
offered only in connection with dividend or interest reinvestment
plans, check the following box. [X] 


                            


         If this Form is filed to register additional securities
for an offering pursuant to Rule 462(b) under the Securities Act,
please  check  the following  box  and  list the  Securities  Act
registration   statement  number   of   the   earlier   effective
registration statement for the same offering. [ ] 

          If  this  Form  is  a post  effective  amendment  filed
pursuant  to Rule  462(c)  under the  Securities  Act, check  the
following box and list  the Securities Act registration statement
number of the earlier  effective registration statement number of
the   earlier  effective  registration  statement  for  the  same
offering. [ ]  

          If  delivery of this prospectus is  expected to be made
pursuant to Rule 434, please check the following box. [ ]  

  C A L C U L A T I O N   O F   R E G I S T R A T I O N   F E E
                                         
                                         Proposed
  Title of each   Amount to   Proposed   Maximum
    Class of         be       Maximum    Aggregate    Amount of
  Securities to  Registered   Offering   Offering   Registration
  be Registered   (shares)    Price(1)   Price(1)       Fee
  _____________  __________   ________   _________  ____________

 Common Stock,     
 no par value     215,000     $36.375   $7,820,625     $2,697

(1)    Estimated   solely  for  the   purpose  of  computing  the
       registration  fee  pursuant  to  Rule   457(c)  under  the
       Securities Act of 1933 on the  basis of the average of the
       high and  low sales prices  of Micrion Corporation  Common
       Stock, no  par value per share, as reported  on the Nasdaq
       National Market on  May 21, 1996.

            The  registrant   hereby  amends  this   Registration
Statement on  such date or dates as may be necessary to delay its
effective  date  until  the   registrant  shall  file  a  further
amendment  which  specifically   states  that  this  Registration
Statement shall  thereafter become effective  in accordance  with
Section  8(a)  of  the  Securities  Act  of  1933  or  until  the
Registration Statement shall become effective on such date as the
Securities  and  Exchange  Commission,  acting pursuant  to  said
Section 8(a), may determine.















                             
PROSPECTUS
               
               SUBJECT TO COMPLETION, MAY 23, 1996

INFORMATION CONTAINED HEREIN IS SUBJECT TO COMPLETION OR AMENDMENT.
A REGISTRATION STATEMENT RELATING TO THESE SECURITIES HAS BEEN 
FILED WITH THE SECURITIES AND EXCHANGE COMMISSION. THESE SECURITIES
MAY NOT BE SOLD NOR MAY OFFERS TO BUY BE ACCEPTED PRIOR TO THE TIME
THE REGISTRATION STATEMENT BECOMES EFFECTIVE.  THIS PROSPECTUS SHALL
NOT CONSTITUTE AN OFFER TO SELL OR THE SOLICITATION OF AN OFFER TO
BUY NOR SHALL THERE BE ANY SALE OF THESE SECURITIES IN ANY STATE IN 
WHICH SUCH OFFER, SOLICITATION OR SALE WOULD BE UNLAWFUL PRIOR TO
THE REGISTRATION OR QUALIFICATION UNDER THE SECURITIES LAWS OF ANY 
SUCH STATE.



                          215,000 Shares

                       MICRION CORPORATION
                           Common Stock
                          (no par value)
                         ________________
         
       The 215,000  shares  of  Common Stock,  no par  value  per
share   (the  "Common   Stock"),   of   Micrion  Corporation,   a
Massachusetts   corporation  (the  "Company"),  covered  by  this
Prospectus (the "Shares")  are being offered by  a certain holder
of  the Company's Common  Stock (the "Selling  Stockholder").  In
connection with the settlement  of certain litigation, 119,200 of
the  Shares were issued by the Company to the Selling Stockholder
and  the  remaining  95,800   were  transferred  to  the  Selling
Stockholder by certain other stockholders of the Company.
                         ________________

       FOR  A  DISCUSSION OF  CERTAIN  FACTORS  WHICH  SHOULD  BE
CONSIDERED IN  CONNECTION WITH THE PURCHASE  OF THESE SECURITIES,
SEE "RISK FACTORS" COMMENCING ON PAGE 3.
                         ________________

       The Selling Stockholder  may sell the Shares from time  to
time in one or  more transactions.  The Shares may be sold on the
Nasdaq National Market, through registered brokers or dealers, or
otherwise,  at market  prices then  prevailing, or  in negotiated
transactions.   In  addition, any  Shares that  qualify  for sale
pursuant  to Rule 144 of the  Securities Act of 1933, as amended,
may  be  sold  under  Rule  144  rather  than  pursuant  to  this
Prospectus.   The Shares  may  also be  offered  in one  or  more
underwritten  offerings, on  a  firm commitment  or best  efforts
basis.  The underwriters in an underwritten offering, if any, and
the terms and conditions  of any such offering will  be described
in a  supplement to this  Prospectus.  For  information regarding
the Selling  Stockholder  and the  plan  of distribution  of  the
Shares  offered   hereby,  see   "The  Offering"  and   "Plan  of
Distribution."





       The Company will not receive any  of the proceeds from the
sale  of the  Shares by  the Selling  Stockholder.   See  "Use of
Proceeds."

        The Common  Stock of the Company  is listed  on the Nasdaq
National  Market under the symbol  "MICN."  On  ______, 1996, the
last reported sale price  of Common Stock on the  Nasdaq National
Market was $_____ per share.
                         ________________

  THESE SECURITIES HAVE NOT BEEN APPROVED OR DISAPPROVED BY THE
    SECURITIES AND EXCHANGE COMMISSION OR ANY STATE SECURITIES
    COMMISSION NOR HAS THE SECURITIES AND EXCHANGE COMMISSION
   OR ANY STATE SECURITIES COMMISSION PASSED UPON THE ACCURACY
       OR ADEQUACY OF THIS PROSPECTUS.  ANY REPRESENTATION
             TO THE CONTRARY IS A  CRIMINAL OFFENSE.

       The date of this Prospectus is ______________, 1996.






































                            -2-



                      AVAILABLE INFORMATION

            The  Company  has  filed   with  the  Securities  and
Exchange  Commission (the  "Commission" or "SEC")  a registration
statement  on Form S-3 (herein, with  all amendments and exhibits
thereto, referred  to as the "Registration  Statement") under the
Securities  Act of 1933, as  amended (the "Securities Act"), with
respect to the Common Stock offered hereby.  This Prospectus does
not  contain all the  information set  forth in  the Registration
Statement, certain items of which are omitted in accordance  with
the  rules and  regulations  of  the  Commission.    The  omitted
information may be  inspected and copied at  the public reference
facilities  maintained by  the  Commission at  450 Fifth  Street,
N.W.,  Room 1024,  Washington, D.C.   20549,  and copies  of such
material can be obtained from the Public Reference Section of the
Commission, 450  Fifth Street,  N.W., Washington, D.C.  20549, at
prescribed rates.   For further  information with respect  to the
Company and the Shares  offered hereby, reference is made  to the
Registration   Statement  and   the  documents   incorporated  by
reference therein.   See  "Incorporation of Certain  Documents by
Reference" herein. 

            The   Company  is   subject   to  the   informational
requirements of the  Securities Exchange Act of 1934,  as amended
(the "Exchange Act"), and in accordance therewith, files reports,
proxy statements and other information with the Commission.  Such
reports, proxy statements and  other information can be inspected
and copied  at the public reference facilities  maintained by the
Commission at 450 Fifth Street, N.W., Room 1024, Washington, D.C.
20549,  and at  the Commission's  New York  Regional Office  at 7
World  Trade Center,  13th Floor,  New York,  New York  10007 and
Chicago Regional  Office at 500  West Madison Street,  Room 3190,
Chicago, Illinois 60661.  Copies of such material can be obtained
from  the Public Reference Section of the Commission at 450 Fifth
Street, N.W., Washington, D.C. 20549 at prescribed rates.   


         INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE

            The following documents filed by the Company with the
Commission  pursuant  to the  Exchange  Act  are incorporated  by
reference in this Prospectus:

1.      The Company's  Annual Report on Form  10-KSB for the  year
        ended June 30, 1995.
2.      The Company's  Quarterly Reports  on Form  10-QSB for  the
        quarters ended September  30, 1995, December 31, 1995  and
        March 31, 1996.
3.      The  Company's Current  Report on Form 8-K  filed on March
        18, 1996.
4.      The description of  the Company's Common  Stock, contained
        in the Company's registration statement on Form 8-A  filed
        with the  Commission on  April 14, 1994  (SEC File  No. 0-
        23840).


                            -3-



            All  documents   filed  by   the  Company   with  the
Commission  pursuant to Sections 13(a), 13(c), 14 or 15(d) of the
Exchange  Act after the date of this  Prospectus and prior to the
termination of this offering  shall be deemed to  be incorporated
by reference in this Prospectus and  to be a part hereof from the
date of filing  of such  documents.  Any  statement contained  in
this  Prospectus,  any Prospectus  supplement  or  in a  document
incorporated or deemed  to be incorporated by  reference shall be
deemed  to be  modified  or  superseded  to  the  extent  that  a
statement contained in any Prospectus supplement or in any  other
subsequently  filed document  which also  is or  is deemed  to be
incorporated  by  reference   herein  or   therein  modifies   or
supersedes  such  statement.     Any  statement  so  modified  or
superseded  shall  not  be  deemed,  except  as  so  modified  or
superseded, to constitute a part hereof.

            The  Company  will  provide without  charge  to  each
person,  including any beneficial owner,  to whom a  copy of this
Prospectus has  been delivered, upon the written  or oral request
of such person, a copy  of any or all of the  documents which are
incorporated by reference in this Prospectus, other than exhibits
to  such   documents  (unless  such  exhibits   are  specifically
incorporated  by reference  into such  documents).   Requests for
such  copies  should  be  directed  to  David  M.  Hunter,  Chief
Financial  Officer, One  Corporation Way,  Peabody, Massachusetts
01960 (Telephone:  (508) 531-6464).

            Certain  information  contained  in  this  Prospectus
summarizes,  is  based  upon,   or  refers  to,  information  and
financial  statements,   contained  in  one   or  more  documents
incorporated or deemed  to be incorporated  by reference in  this
Prospectus;  accordingly, such  information  contained herein  is
qualified  in its  entirety by  reference  to such  documents and
should be read in conjunction therewith.


                           THE COMPANY

            The Company  is a leader in  the design, development,
manufacture  and marketing  of focused-ion-beam  ("FIB") systems.
The Company's FIB systems are used in the design, fabrication and
testing  of semiconductor integrated  circuits ("ICs")  and other
products  to analyze  and correct  problems in  the manufacturing
process  and  are  used  also  in  on-line  manufacturing.    FIB
technology is relatively new and provides a unique combination of
capabilities to image, analyze and perform "microsurgery" on ICs.
Semiconductor integrated circuit and other  manufacturers use the
Company's  FIB systems to reduce  time to market,  and to achieve
and maintain  acceptable  manufacturing yields  more quickly  and
cost  effectively.  The Company introduced  the world's first FIB
system specifically designed for use in the manufacturing process
of  ICs  in  1985 and  since  then  has  introduced new  products
incorporating  a  variety  of   technological  advances.      The
principal  executive offices of  the Company  are located  at One


                            -4-



Corporation Way, Peabody,  Massachusetts 01960 (Telephone:  (508)
531-6464).


                           RISK FACTORS

            In   addition  to  the   other  information  in  this
Prospectus, the following factors  should be considered carefully
by potential investors in evaluating an investment  in the Common
Stock offered hereby.

            Cyclical   Nature   of   and   Dependence    on   the
Semiconductor Industry.  The  Company's business depends in large
part  upon the  capital expenditures  of semiconductor  and other
technology-based manufacturers and testing laboratories, which in
turn  depend on  the current  and anticipated  market  demand for
integrated circuits  and products  using integrated  circuits and
other micro-machined parts.  The semiconductor industry is highly
cyclical  and  historically has  experienced  periodic downturns.
The  Company's  financial  results have  been  adversely affected
during those  downturns.  The  Company believes that  the markets
for newer generations of  semiconductors will also be  subject to
similar  fluctuations.    Any  factor  adversely  affecting   the
semiconductor   industry,   particular   segments    within   the
semiconductor industry or other manufacturers using the Company's
products may have an effect  on the Company's business, financial
condition and operating results.  A slowdown in the semiconductor
industry or such other industries may have an exaggerated adverse
effect on the Company's  business.  Accordingly, there can  be no
assurance  that  the  Company's  operating results  will  not  be
adversely  affected   by  downturns  or  other   adverse  factors
affecting  the semiconductor  industry or  other technology-based
businesses that may occur in the future.

            Uncertainties Associated with  New Applications.  The
Company has  recently begun shipping its  machines for production
applications,  which  are  new  applications  of  the   Company's
equipment.     There  can  be  no   assurance  that  difficulties
associated  with  these new  applications  and related  warranty,
service and other costs  will not have a material  adverse effect
on the Company's operating results.  Furthermore, the Company has
recently received a multiple-system purchase agreement, which, in
connection  with  a previous  order  from the  same  customer, is
valued  at  over  $60,000,000  and  involves  the  production  of
machines   for  these   new  applications.     The   exercise  of
cancellation or termination provisions contained in such purchase
agreement,  including  provisions that  entitle  the  customer to
cancel issued purchase  orders or to terminate  the agreement for
convenience,  would  have  a   material  adverse  effect  on  the
Company's  operating results.  In addition,  the inability of the
Company  to make  deliveries  required under  the multiple-system
purchase  agreement as a result of a lack of production capacity,
manpower,   inability   to   acquire  necessary   materials   for


                            -5-




manufacturing, or otherwise, could have a material adverse effect
on the Company's operating results.

            Variable  Operating Results.  The Company's operating
results  have in  the  past  and  may  in  the  future  fluctuate
significantly  depending  upon a  variety  of  actors which  vary
substantially  over   time,   including:     conditions  in   the
semiconductor  industry,  conditions  in  other  technology-based
manufacturing   industries   using   the    Company's   products,
competitive  pricing   pressures,  the  timing  of   orders  from
customers, the timing of new product introductions by the Company
and competitors, customer acceleration, cancellation  or delay of
shipments, changes in the  mix of types of systems  sold, changes
in the mix of  systems, service and parts revenues, the length of
sales cycles,  the relative  proportions of domestic  and foreign
shipments,  the mix of product and contract revenues, the mix and
timing of government and commercial contracts activity, the level
and timing  of selling,  general and administrative  expenses and
research  and  development expenses,  specific  feature  needs of
customers, some of which may be available in competitors' systems
but not in the Company's systems, production delays, and currency
exchange rate fluctuations.

       A substantial portion of the Company's quarterly  revenues
are derived from  the sale  of a relatively  small number of  FIB
systems,  which  presently  range  in  price  from  approximately
$300,000 to  $2,500,000.  Historically, a  significant portion of
the Company's  revenues from systems sales are  recognized in the
last month of a quarter.   As a result, the timing of recognition
of  revenue  from  a  single system  order,  either  pursuant  to
customer  acceptance  of a  system  or  percentage of  completion
contract  accounting,  could have  a  significant  impact on  the
Company's  net  sales  and  operating results  for  a  particular
financial period.   For example, delays in customer acceptance of
systems  near the  end  of a  quarter  could have  a  substantial
adverse   effect  on   operating   results   for  that   quarter.
Announcements by  the Company or its competitors  of new products
and technologies could cause  customers to defer or not  purchase
the Company's existing systems, which  could also have a material
adverse effect on the Company's business, financial condition and
results  of operations.  The  deferral or loss  of an anticipated
order could  have  a material  adverse  effect on  the  Company's
results of operations.  The impact of  these and other factors on
the Company's  sales and operating  results in any  future period
cannot  be  forecast with  certainty.    Moreover, the  Company's
backlog at  the beginning  of  each quarter  and orders  received
during a quarter are  not necessarily indicative of actual  sales
for  any succeeding  period.   The  Company's  sales may  reflect
orders  shipped in the  same quarter that they  are received.  In
addition,  the  need for  continued  investment  in research  and
development, capital  equipment and ongoing  customer service and
support capability  worldwide results in significant  fixed costs
which will be  difficult to reduce in the event  that the Company
does not meet its sales objectives.   Furthermore, as a result of
                            

                            -6-



competitive  pressures to  deliver  systems promptly  and a  long
manufacturing  cycle,  the  Company  typically  begins  to  build
systems prior  to receipt  of customer orders,  thereby incurring
significant inventory  costs in  advance of sales.   Accordingly,
there can be no assurance that the Company  will be profitable in
the future. 
 
        Rapid  Technological Change  and New  Product  Innovation.
The FIB market is  subject to rapid technological change  and new
product introductions and enhancements.  The Company's ability to
remain competitive in this market will depend in significant part
upon  its  ability to  develop  and  introduce new  products  and
enhancements on a timely  and cost effective basis.   The success
of the Company in developing new and enhanced FIB systems depends
on  a variety of factors, including product selection, timely and
efficient  completion  of   product  design,  implementation   of
manufacturing  and assembly  processes  and  effective sales  and
marketing.   If  the Company  experiences reliability  or quality
problems  with new  products, then  reductions in  orders, higher
manufacturing costs and additional  service and warranty  expense
may result.  Because new  product development commitments must be
made  well  in  advance  of  sales, new  product  decisions  must
anticipate both future demand  and the availability of technology
to  satisfy that  demand.   There can  be  no assurance  that the
Company will successfully develop  and introduce new products and
product enhancements  or that  such products will  achieve market
acceptance.  At any point in time, competitors of the Company may
achieve   technological  advances  which  provide  a  competitive
advantage over the Company's  FIB systems.  Announcements by  the
Company  or its competitors of  new products or  features have in
the past and could in the future, cause customers to defer or not
purchase  the  Company's  existing  products,  which  would  also
adversely  affect   the  Company.    In   addition,  advances  or
developments in other technologies could render the Company's FIB
systems  obsolete  for  particular  applications.   For  example,
advances in software verification tools could reduce the need for
FIB  systems  in  the  design and  modification  applications  of
integrated circuit manufacturing. 

        Uncertain  Market.     The  market  for  FIB  systems  is
relatively new.  The  Company believes that the first  FIB system
used  in IC manufacturing was sold commercially in 1985, and that
since then approximately 450 systems have been sold.  The Company
sold  its first FIB system in 1985 and  as of March 31, 1996, had
sold a total of 153 FIB systems.   The size of the market for the
Company's  FIB systems  is affected by  the relatively  high unit
prices of FIB systems, limited applications of FIB technology and
by the  relatively small  number of  purchasers of  such systems.
Most of the systems sold by the Company have prices  in excess of
$400,000 and are sold to customers in the semiconductor industry.
The  size of the  market for FIB  systems also is  limited by the
rate at  which prospective customers recognize  the functions and
capabilities  of  FIB systems.   There  can  be no  assurance the
market  for  the  Company's  FIB  systems  in  the  semiconductor


                            -7-



industry  will continue  to  grow or  that  FIB systems  will  be
accepted in markets outside of the semiconductor industry.

        Competition.     The  FIB   system   industry  is  highly
competitive,  and  the   Company  expects  this  competition   to
intensify.   Certain of  the Company's competitors  and potential
competitors  have  substantially  greater  financial,  marketing,
technological and production resources than the Company.  Certain
of  these competitors are  themselves semiconductor manufacturers
and, therefore, familiarity  with semiconductor manufacturing  as
well  as  greater  financial  resources give  these  companies  a
competitive  advantage.   Individual competitors  have advantages
and  strengths  in  different areas,  including  system features,
geographic market presence, customer service and support, breadth
of applications,  time  to  delivery  and  price.    The  Company
experiences price competition  in the sale  of FIB systems  which
has adversely affected, and in  the future could adversely affect
its operating margins.  Certain of the  Company's competitors use
demonstration   systems,  leasing   arrangements  and   loans  of
equipment to  a greater  extent than  the Company  as a  means of
gaining  market acceptance.  There  can be no  assurance that the
Company will be able to compete  successfully against current and
future competitors or that the competitive pressures faced by the
Company will not adversely affect its financial performance. 

        Ability to  Manage Growth.   The  Company has experienced
growth in production and  in its employee base which  has placed,
and will continue to place, a significant strain on the Company's
management, financial  and operating resources.   As part  of its
business strategy, the Company intends  to continue to expand its
operations.   This strategy  will require  expanded manufacturing
capability,  customer services  and support,  increased personnel
throughout  the  Company,  expanded  operational   and  financial
systems and implementation  of new control procedures.  There can
be  no assurance  that  the  Company  will  be  able  to  attract
qualified  personnel or successfully  manage expanded operations.
As  the  Company expands,  it may  from  time to  time experience
constraints  that will  adversely affect  its ability  to satisfy
customer  demand in  a timely  fashion or  to provide  consistent
levels of support  to existing customers.   For example,  because
the  Company's FIB  systems are  technically complex,  receipt of
orders  for a  larger than  expected number  of systems  within a
short period of  time could  extend the delivery  cycle, in  turn
causing  delayed revenue  and  possible cancellation  or loss  of
orders.   There  can  be  no  assurance  that  the  Company  will
anticipate all  of the changing demands that  expansion may place
on the Company's  operational, management  and financial  systems
and controls  or that  the Company  will be  able to  continue to
improve such systems and  controls.  If the  Company's management
is unable  to manage growth effectively,  the Company's business,
results of operations and financial condition could be materially
and adversely affected.  




                            -8-



        Substantial  International   Operations.    International
sales  accounted for approximately 27%,  43%, 63% and  53% of the
Company's net revenues in  fiscal 1993, 1994 and 1995 and for the
nine  month  period  ended March  31,  1996,  respectively.   The
Company  expects  international sales  to comprise  a significant
percentage of its sales in the foreseeable future.  Certain risks
are  inherent in international  operations, including  changes in
demand resulting from fluctuations in exchange rates, the risk of
government financed  or subsidized competition,  changes in trade
policies and  tariff regulations, difficulties in  obtaining U.S.
export  licenses and  geopolitical risks.   Although most  of the
Company's international sales  are denominated  in United  States
dollars, fluctuations in foreign currencies can impact the prices
quoted by the Company to prospective customers and thereby affect
the  Company's  ability  to   obtain  orders  from  such  foreign
customers.  Therefore, a decrease in the value of certain foreign
currencies in relation to  the U.S. dollar could have  an adverse
impact on the Company's results of operations.  

        The  Company's  sales to  Japanese  customers represented
approximately 24%, 45%, 28% and  31% respectively, of its product
revenues in  fiscal 1993, 1994  and 1995 and  for the  nine month
period ended March 31, 1996.  The Company's sales to South Korean
customers represented  0%, 0%,  28% and 8%,  respectively of  its
total product revenues  in fiscal  1993, 1994, 1995  and for  the
nine  month  period  ended March  31,  1996.    Changes in  trade
policies between the United States and Japan or South Korea could
adversely  affect  the  Company's  sales to  customers  in  these
countries.

        In  foreign markets  the  Company markets  and sells  its
products through independent sales representatives and a Japanese
distributor.     The  use  of  such   sales  representatives  and
distributor results  in lower  gross profit  margins on sales  to
foreign customers.  Accordingly, an increase in the proportion of
international sales  could negatively affect the  Company's gross
profit margins.   The Company does  not have long-term  contracts
with its  sales representatives,  and the  distribution agreement
with its Japanese distributor may be cancelled on 60 days notice.
The  loss  of such  sales representatives  or distributor  or the
inability  to  develop  and   maintain  an  alternative   foreign
distribution  network could have a material adverse impact on the
Company's international sales.  

        Dependence on  Significant Customers.   Historically, the
Company  has sold  its  FIB  systems  to  and  has  entered  into
development  contracts  with   a  relatively   small  number   of
significant customers.   During fiscal year  1995, Tokyo Electron
Limited,  the  Company's  Japanese  distributor,  Samsung and  LG
Semicon   accounted  for   approximately   28%,   15%  and   12%,
respectively, of the Company's  total revenues.  The loss  of any
of these significant customers or the inability of the Company to
attract new  customers to  replace these  customers could  have a
material adverse effect on the Company's operations and financial



                            -9-


condition.  In addition, the Company has entered into a multiple-
system purchase agreement, which  with a previous order from  the
same customer, is  valued at  over $60,000,000, and  the loss  of
this  customer  could  have  a  material adverse  effect  on  the
Company's    operations   and    financial   condition.       See
" Uncertainties Associated with New Applications."  

        Lengthy  Sales Cycle.   The  decision  to purchase  a FIB
system  involves  a  significant  commitment of  capital  by  the
Company's customers  and generally  the  consent of  a number  of
internal  decision-makers.     Therefore,  there  are  frequently
lengthy periods between the initiation  of contact by the Company
with a  customer and the closing  of a sale.   During the lengthy
sales cycle  for the Company's  products, the Company  may expend
substantial funds and management effort in anticipation of a sale
even though a sale may not result from the effort, thus adversely
affecting the Company's revenues and results of operations.
  
       Possible Volatility of Stock  Price.  The  market price of
the  Company's Common  Stock  has risen  substantially since  the
Company's  initial public offering in May 1994 and may be subject
to wide fluctuations and possible rapid  increases or declines in
a short time period.  These fluctuations may occur in response to
variations in  quarterly operating  results, changes  in earnings
estimates  by  analysis,  announcements concerning  technological
innovations, new  product introductions, or new  contracts by the
Company,  its  competitors,  or  their   customers,  governmental
regulatory action,  litigation and  other factors.   In addition,
the  stock market  and in  particular the  stock prices  for many
technology companies may fluctuate widely for reasons that may be
unrelated to  the operating performance of  particular companies.
These  fluctuations, as  well  as general  economic or  political
conditions,  may  adversely  affect   the  market  price  of  the
Company's Common Stock.

        Dependence on  Suppliers.  Certain  of the components and
subassemblies included  in the  Company's products, such  as high
voltage power supplies, are  made to the Company's specifications
and  obtained  from  a  single  source  or  a  limited  group  of
suppliers.    A  number  of these  components  and  subassemblies
require lengthy  manufacturing  lead  times.   In  the  past  the
Company has experienced manufacturing delays due to the temporary
unavailability of  qualified components and parts.   Although the
Company believes it could develop  alternative sources for all of
the components and parts used in its products, significant delays
or interruptions  in the  delivery  of components  or parts  from
current suppliers,  receipt of defective components  or parts, as
well as difficulties or delays in shifting manufacturing capacity
to  new suppliers  could have  a material  adverse effect  on the
Company. 

        Dependence  on  Key  Personnel.    The  Company's  future
success  is dependent,  in part,  on its  ability to  attract and
retain certain key scientific, marketing and management personnel



                           -10-


and  on its ability to  continue to attract  and retain qualified
employees, particularly  as it  expands the  market  for its  FIB
systems beyond the semiconductor  industry.  In addition, certain
of  such personnel  are in  limited supply  and are  difficult to
attract and retain.  Competition for these personnel  is intense,
and  the  loss of  several key  employees  could have  an adverse
effect on the Company's results of operations and prospects.  The
Company does  not have  employment contracts  with, and  does not
maintain key person life insurance policies on, any personnel.  

        Protection  of  Intellectual  Property.    The  Company's
success depends in significant part on maintenance and protection
of its intellectual  property.  The  Company attempts to  protect
its  intellectual property  rights through  a range  of measures,
including patents, trade secrets and  confidentiality agreements.
There can  be  no assurance  that  the Company  will be  able  to
protect its technology or that others will not be able to develop
similar technology independently.  No assurance can be given that
the claims  allowed on  any patents held  by the Company  will be
sufficiently  broad  to  protect the  Company's  technology: that
patents  issued   to  the   Company  will  not   be  invalidated,
circumvented or challenged: or that the rights granted thereunder
will  provide competitive advantages to the Company.  There is no
assurance that  foreign intellectual  property laws  will protect
the Company's patents and other intellectual property rights.  In
addition, significant and protracted litigation  may be necessary
to enforce the Company's  patents and other intellectual property
rights, to protect the Company's trade secrets, to determine  the
validity  and scope  of the  proprietary rights  of others  or to
defend against claims of infringement.  There can be no assurance
that  third party  claims alleging  infringement of  intellectual
property rights, including infringement of patents that have been
or may  be issued in the future, will not be asserted against the
Company.    Several of  the  Company's  competitors hold  patents
covering a variety  of FIB products and  applications and methods
of use of focused ion  and electron beam products.  From  time to
time the Company has  received correspondence from competitors of
the Company claiming that  certain of the Company's products  may
be infringing one or more of these patents.  The Company believes
that  it  has credible  arguments that  these patents  are either
invalid, not infringed or would not  be enforced by a court.  Any
such assertions of intellectual property claims could require the
Company to discontinue the  use of certain processes or  to cease
the manufacture,  use and sale  of infringing products,  to incur
significant  litigation   costs  and  damages,  and   to  develop
noninfringing technology  or to  acquire licenses to  the alleged
infringed technology.   Litigation may also divert the efforts of
management and technical personnel from other matters.  There can
be  no assurance that  the Company would  be able  to obtain such
licenses  on   acceptable  terms  or  to   develop  noninfringing
technology.    The Company  has  received  patent and  technology
licenses from  certain companies and academic  institutions.  The
failure  to  renew  certain  of  these  licenses  or  significant



                            -11-



increases in  amounts payable under these licenses  could have an
adverse effect on the Company.  

        Single  Production   Facility.      The   Company's  only
production  facility  is located  in  Peabody,  Massachusetts and
substantially  all of  the Company's  manufacturing  inventory is
maintained there.  In  the event that production at  the facility
were  interrupted  by  fire,  earthquake  or  other  catastrophic
events,  power failures,  work  stoppages, regulatory  actions or
other  causes,  the  Company  would  be  unable  to  continue  to
manufacture   its  products.    Although  the  Company  maintains
business  interruption  insurance,  such  insurance  may  not  be
adequate in the  event of  such an  interruption and,  therefore,
such  an event  could materially  adversely affect  the Company's
business and results of operations. 

        Government  Audits.   The Company  is a  party to certain
contracts  with agencies of  the United  States government.   The
Company  is compensated under such contracts on a cost plus fixed
fee basis.  The  Company's costs allocated to such  contracts are
subject to review and audit by the United States government.  The
Company  is   currently  being  audited  by   the  United  States
government with respect to  one such contract.   There can be  no
assurance that the revenues  recognized under such contracts will
not  be negatively  impacted or  revised as  a result  of  such a
review or audit by the United States government.

        Dividends.   The Company  has not paid any cash dividends
since its  inception and the  Company does not  anticipate paying
cash dividends in the foreseeable  future.  The Company's current
bank line of  credit prohibits payment  of dividends without  the
bank's consent.

        Anti-Takeover  Provisions.    Certain provisions  in  the
Company's Second Restated Articles  and Restated By-laws, as well
as certain  provisions of  the Massachusetts General  Laws, could
have  the effect of delaying, deferring or preventing a change in
control  of the  Company.   It is  possible that  such provisions
could  make it  more difficult  to accomplish  transactions which
stockholders may otherwise deem to be in their best interests.  


                           THE OFFERING

        Pursuant to  the terms of a Settlement Agreement dated as
of May 7,  1996 (the  "Settlement Agreement"), by  and among  the
Company,  the  Selling  Stockholder  and  certain  other  parties
arising out of certain litigation filed in Massachusetts Superior
Court,  Essex  County,  the  Company issued  119,200  Shares  and
certain  other  stockholders  transferred 95,800  Shares  to  the
Selling Stockholder.   Pursuant to the  Settlement Agreement, the
Company   agreed to  prepare and  file with the Commission  a 
a registration   statement on Form S-3 (or equivalent  form),  
upon  the  written  request  of  the  Selling



                           -12-


Stockholder, for resale of as many of the Shares as requested  by
the  Selling Stockholder.   The  Selling Stockholder  delivered a
written  request  to the  Company,  requesting  the filing  of  a
registration statement with respect to all of the Shares. 

        The following table sets forth the number of Shares being
offered  hereby   by  the  Selling  Stockholder.     The  Selling
Stockholder has had no material  relationship with the Company or
any  of its  affiliates  during the  past three  years.   To  the
Company's  knowledge, the  Selling Stockholder  is currently  the
beneficial owner of 244 shares of Common Stock in addition to the
Shares being offered hereby.


             Name                       Number of Shares

KLA Instruments Corporation                  215,000
160 Rio Robles
San Jose, CA 95161-9055


                         USE OF PROCEEDS

       The Company will not receive any  of the proceeds from the
sale of the Shares by the Selling Stockholder.


                       PLAN OF DISTRIBUTION

        The Selling  Stockholder has not advised  the Company  of
any specific plans for the distribution of the Shares, but it  is
anticipated that the Selling Stockholder may,  from time to time,
offer for sale and sell or distribute the Shares to be offered by
it hereby  (a) in  transactions executed on  the Nasdaq  National
Market, or any  securities exchange  on which the  shares may  be
traded,  through   registered  broker-dealers  (who  may  act  as
principals, pledgees or agents) pursuant to unsolicited orders or
offers  to buy,  (b) in negotiated  transactions, or  (c) through
other means,  including pursuant to the exemption provided by SEC
Rule 144, if available.  The Shares may be sold from time to time
in  one or more transactions  at market prices  prevailing at the
time of sale or a fixed  offering price, which may be changed, or
at varying prices determined at the time of sale or at negotiated
prices.     Such  prices  will   be  determined  by  the  Selling
Stockholder or  by agreement between the  Selling Stockholder and
its  underwriters, dealers, brokers  or agents.   The  Shares may
also  be  offered in  one or  more  underwritten offerings.   The
underwriters in an underwritten  offering, if any, and the  terms
and  conditions of  any  such offering  will  be described  in  a
supplement to this Prospectus.
 
        In  connection  with  distribution  of  the  Shares,  the
Selling  Stockholder  may  enter  into hedging  or  other  option
transactions with broker-dealers in  connection with which, among
other  things, such broker-dealers  may engage in  short sales of
the Shares pursuant to  this Prospectus in the course  of hedging

                           -13-


the positions  they assume  with  the Selling  Stockholder.   The
Selling Stockholder may also  sell Shares short pursuant to  this
Prospectus  and  deliver  the  Shares to  close  out  such  short
positions.  The Selling Stockholder may also enter into option or
other transactions  with broker-dealers  which may result  in the
delivery of  Shares  to such  broker-dealers  who may  sell  such
Shares pursuant to  this Prospectus.  The Selling Stockholder may
also  pledge the Shares to  a broker-dealer and  upon default the
broker-dealer may effect the sales of the pledged Shares pursuant
to this Prospectus.

        Any    underwriters,    dealers,  brokers    or    agents
participating  in  the distribution  of  the  Shares may  receive
compensation in the form of underwriting  discounts, concessions,
commissions  or   fees  from   the  Selling   Stockholder  and/or
purchasers of Shares,  for whom  they may act.   Such  discounts,
concessions, commissions or fees  will not exceed those customary
for  the type of transactions involved.  In addition, the Selling
Stockholder and any such underwriters, dealers, brokers or agents
that participate in the  distribution of Shares may be  deemed to
be  underwriters under the Securities Act, and any profits on the
sale  of  Shares  by them  and  any  discounts,   commissions  or
concessions received by  any of such persons may  be deemed to be
underwriting discounts and commissions  under the Securities Act.
Those  who  act  as  underwriter,  broker,  dealer  or  agent  in
connection with  the sale of the  Shares will be selected  by the
Selling  Stockholder and  may have  other  business relationships
with  the Company  and  its  subsidiaries  or affiliates  in  the
ordinary course of business.

        Pursuant  to   the  Settlement  Agreement,  the   Selling
Stockholder (and any underwriter and selling broker participating
in the distribution of Shares) are entitled to indemnification by
the  Company  against  liability (including  liability  under the
Securities Act and  the Exchange  Act) arising by  reason of  any
untrue  statement or omission  or alleged omission  (other than a
statement provided  by the Selling Stockholder)  contained in the
registration statement of which this Prospectus is a part.


       DISCLOSURE OF COMMISSION POSITION ON INDEMNIFICATION
                  FOR SECURITIES ACT LIABILITIES

        The Company's  Second  Restated  Articles provide that no
director  of the Company  shall be liable  to the Company  or its
stockholders for monetary damages for breach of fiduciary duty as
a  director, except  for  liability (i)  for  any breach  of  the
director's duty  of loyalty to  the Company or  its stockholders,
(ii)  for acts or  omissions not in  good faith  or which involve
intentional  misconduct or a knowing violation  of law, (iii) for
approving a dividend, stock repurchases or other distributions to
stockholders  that  would result  in  personal  liability to  the
directors under Section  61 or Section 62 of Chapter  156B of the
General  Laws of Massachusetts,  or (iv)  for any  transaction in
which the director derived an improper personal benefit.

                           -14-



        Section  67  of  Chapter 156B  of  the  General  Laws  of
Massachusetts  provides  that  to  the  extent  specified  in  or
authorized by the  articles of organization, a  by-law adopted by
shareholders  or  a  resolution adopted  by  the  holders of  the
majority of shares of stock  entitled to vote on the election  of
directors, a corporation can  indemnify directors, officers,  and
other employees or  agents of  the corporation except  as to  any
matter as to which such person shall have been adjudicated in any
proceeding  not to  have acted  in good  faith in  the reasonable
belief  that  the  action  was  in  the  best  interests  of  the
corporation.   The Company's Second Restated Articles provide,
in part, that the Company shall indemnify any person who is or
was  a  party  or  is  threatened  to  be  made  a  party to  any
threatened, pending  or  completed action,  suit, proceeding,  or
claim, by  reason  of the  fact  that such  person  is or  was  a
director  or officer  of the  Company or  while a  director or
officer is or was servicing at the request of the Company as a
director, trustee,  officer, employee  or other agent  of another
organization, including  service in any capacity  with respect to
employee benefit  plans, against all liabilities, costs, expenses
(including  attorneys'  fees  and  expenses),  judgments,  fines,
penalties and  amounts paid in settlement  incurred in connection
with the  defense or disposition  of or  otherwise in  connection
with or  resulting  from any  such  action, suit,  proceeding  or
claim.

        Pursuant to the  Settlement Agreement, the directors  and
officers of the Company are entitled to indemnification by the
Selling Stockholder against  liability (including liability under
the Securities Act and the Exchange Act) arising by reason of any
statement  contained  in  the  registration  statement  that  the
Selling   Stockholder  provided  to  the  Company  in  writing
explicitly for use in this registration statement, being false or
misleading or omitting to  state a material fact necessary  to be
stated in  order that  the statements  made in  this registration
statement,  in the circumstances in  which they are  made, not be
misleading.

        Insofar as  indemnification of liabilities arising  under
the  Securities  Act  of  1933  may be  permitted  to  directors,
officers and  controlling persons  of the Company  pursuant to
the provisions described  under Item 15 above, or  otherwise, the
Company has been advised that in the opinion of the Securities
and Exchange  Commission such indemnification  is against  public
policy as expressed in the Act and  is, therefore, unenforceable.
In  the event  that  a  claim  for indemnification  against  such
liabilities (other than the payment by the Company of expenses
incurred  or paid by a director, officer or controlling person of
the Company in the  successful defense of any action,  suit or
proceeding) is asserted by  such director, officer or controlling
person in connection with any of the securities being registered,
the Company will,  unless in  the opinion of  its counsel  the
matter has  been settled  by controlling  precedent, submit  to a
court  of  appropriate  jurisdiction  the question  whether  such
indemnification by it  is against public  policy as expressed  in
the Act and will  be governed by  the final adjudication of  such
issue.
                           -15-


                          LEGAL MATTERS

        The legality of  the Common Stock offered hereby is being
passed  upon for  the  Company  by  Choate,  Hall  &  Stewart  (a
partnership   including   professional   corporations),   Boston,
Massachusetts.


                             EXPERTS

        The  consolidated financial  statements of the
Company and its subsidiaries as of June 30, 1995 and June 30,
1994 and for each of the  years in the  three-year period ended
June 30, 1995, incorporated by reference in this Prospectus and in
the Registration Statement, have been incorporated by reference  
herein in reliance upon the report of KPMG Peat Marwick LLP, 
independent certified public accountants, which report has been 
incorporated by  reference herein, and upon the authority of said 
firm as experts in accounting and auditing.






































                           -16-

                                      
        No  dealer,  salesman   or  any  other  person  has  been
authorized to give any information or to make any representations
not contained in  this Prospectus,  and, if given  or made,  such
information  or representations must not be relied upon as having
been  authorized by the Company or any of the Underwriters.  This
Prospectus does not  constitute an offer of  any securities other
than  those  to which  it  relates  or an  offer  to  sell, or  a
solicitation  of  an  offer   to  buy,  to  any  person   in  any
jurisdiction  where  such  an  offer  or  solicitation  would  be
unlawful.  Neither the  delivery of this Prospectus nor  any sale
hereunder shall,  under any circumstances, create any implication
that the information contained  herein is correct as of  any time
subsequent to the date hereof.

                                           




                          215,000 Shares


                             MICRION
                           CORPORATION

 
                           Common Stock
                          (no par value)


                           ____________

                            PROSPECTUS
                           ______, 1996
                           ____________

























                             PART II
              INFORMATION NOT REQUIRED IN PROSPECTUS


Item 14.  Other Expenses of Issuance and Distribution 

     The  following  table  sets  forth the  costs  and  expenses
payable  by the registrant in connection with the distribution of
the securities being  registered hereunder.   All of the  amounts
shown  are   estimates,  except   the  Securities   and  Exchange
Commission registration  fee.  The Selling  Stockholder will bear
all  selling commissions with respect  to the sale  of the shares
registered  hereby.    The  Selling  Stockholder  has  agreed  to
reimburse the registrant for its  reasonable cost and expenses in
connection  with  the  distribution   of  the  securities   being
registered hereunder,  together with  legal fees incurred  by the
registrant not to exceed $10,000.

                Securities and Exchange Commission         
                Registration Fee  . . . . . . . . . . . .  $ 2,697
                Nasdaq Listing Fee  . . . . . . . . . . .  $ 2,384
                Legal Fees and Expenses   . . . . . . . .  $ 3,519
                Accountants' Fees and Expenses  . . . . .  $ 3,000
                
                     Total  . . . . . . . . . . . . . . .  $11,600            

Item 15.  Indemnification of Directors and Officers

     The Registrant's  Second Restated  Articles provide that  no
director of the  Company shall be  liable to the  Company or  its
stockholders for monetary damages for breach of fiduciary duty as
a  director, except  for  liability (i)  for  any breach  of  the
director's duty of  loyalty to the  Company or its  stockholders,
(ii) for acts  or omissions not  in good  faith or which  involve
intentional misconduct or  a knowing violation of law,  (iii) for
approving a dividend, stock repurchases or other distributions to
stockholders  that  would result  in  personal  liability to  the
directors  under Section 61 or Section 62  of Chapter 156B of the
General  Laws of  Massachusetts, or (iv)  for any  transaction in
which the director derived an improper personal benefit.

     Section  67  of  Chapter   156B  of  the  General   Laws  of
Massachusetts  provides  that  to  the  extent  specified  in  or
authorized by the  articles of organization, a by-law  adopted by
shareholders or  a  resolution  adopted by  the  holders  of  the
majority  of shares of stock entitled  to vote on the election of
directors, a  corporation can indemnify directors,  officers, and
other employees or  agents of  the corporation except  as to  any
matter as to which such person shall have been adjudicated in any
proceeding  not to  have acted  in good  faith in  the reasonable
belief  that  the  action  was  in  the  best  interests  of  the
corporation.  The Registrant's  Second Restated Articles provide,
in part, that the Registrant shall indemnify any person who is or
was  a  party  or  is  threatened  to  be  made  a  party to  any
threatened, pending  or completed  action,  suit, proceeding,  or
claim, by  reason  of the  fact  that such  person  is or  was  a
director  or officer  of the  Registrant or  while a  director or

                               II-1

officer is or was servicing at the request of the Registrant as a
director, trustee,  officer, employee  or other agent  of another
organization, including  service in any capacity  with respect to
employee benefit plans, against  all liabilities, costs, expenses
(including  attorneys'  fees  and  expenses),  judgments,  fines,
penalties and  amounts paid in settlement  incurred in connection
with the defense  or disposition  of or  otherwise in  connection
with  or resulting  from  any such  action,  suit, proceeding  or
claim.


     Pursuant  to the  Settlement  Agreement, the  directors  and
officers of the registrant are entitled to indemnification by the
Selling Stockholder against  liability (including liability under
the Securities Act and the Exchange Act) arising by reason of any
statement  contained  in  the  registration  statement  that  the
Selling  Stockholder  provided  to  the  registrant   in  writing
explicitly for use in this registration statement, being false or
misleading or omitting to  state a material fact necessary  to be
stated in  order that  the statements  made in  this registration
statement,  in the circumstances in  which they are  made, not be
misleading.



































                               II-2


Item 16.  Exhibits

   Exhibit No.    Description
      3.1*        Restated Articles of Organization of
                  Registrant.
      3.2**       Amended and Restated By-Laws of the
                  Registrant.
      4.1***      Specimen Stock Certificate.
      5           Opinion of Choate, Hall & Stewart.
      10****      Settlement Agreement by and among KLA
                  Instruments Corporation, the Registrant and
                  Other Parties dated May 7, 1996.
      23.1        Consent of Choate, Hall & Stewart (included in
                  Exhibit 5).
      23.2        Consent of KPMG Peat Marwick LLP.
      24          Power of Attorney (included in the signature
                  page of this Registration Statement).

*      Filed as an exhibit  to the registrant's report on  Form 10-
       QSB  filed  on June  24,  1994  and incorporated  herein  by
       reference.

**     Filed as an exhibit  to the registrant's report on  Form 10-
       KSB filed on September  28, 1994 and incorporated herein  by
       reference.
     
***    Filed  as  an  exhibit   to  the  registrant's  registration
       statement  on Form  SB-2 (Registration  No. 33-75784)  or an
       amendment thereto and incorporated by reference herein.

****   Filed as an  exhibit to the registrant's Quarterly Report on
       Form 10-QSB  filed May 14,  1996 and incorporated  herein by
       reference.
























                               II-3


Item 17.  Undertakings

   (a)     The undersigned registrant hereby undertakes:

     (1)  To file, during any period in which offers or sales are
   being made,  a  post-effective amendment  to this  Registration
   Statement:

           (i)      to   include   any  prospectus   required  by
     section 10(a)(3) of  the Securities Act of  1933, unless the
     information required  to be included in  such post effective
     amendment is contained  in a  periodic report  filed by  the
     registrant pursuant  to Section 13 or 15(d)  of the Exchange
     Act and incorporated herein by reference;

           (ii)     to  reflect in  the prospectus  any facts  or
     events arising after the effective date of this Registration
     Statement  (or  the  most  recent  post-effective  amendment
     thereof) which,  individually or in the aggregate, represent
     a fundamental  change in the  information set forth  in this
     Registration Statement, unless  the information required  to
     be included in such post-effective amendment is contained in
     a  periodic  report  filed  by the  registrant  pursuant  to
     Section  13  or 15(d)  of  the Securities  Exchange  Act and
     incorporated herein by reference; and

           (iii)    to  include  any  material  information  with
     respect to the plan of distribution not previously disclosed
     in the Registration Statement or any material change to such
     information in the Registration Statement.

     (2)   That,  for the  purpose  of determining  any liability
   under  the Securities  Act of  1933, each  such  post-effective
   amendment shall  be deemed to be  a new registration  statement
   relating to  the securities offered  therein, and the  offering
   of  such securities  at that  time shall  be deemed  to be  the
   initial bona fide offering thereof.

     (3) To remove from registration by means of a post-effective
   amendment any of  the securities being registered which  remain
   unsold at the termination of the offering.

   (b)     The  undersigned  registrant  hereby undertakes  that,
for purposes  of determining  any liability under  the Securities
Act  of 1933,  each  filing  of  the registrant's  annual  report
pursuant to  section 13(a)  or section  15(d)  of the  Securities
Exchange  Act of 1934 (and,  where applicable, each  filing of an
employee benefit  plan's annual report pursuant  to Section 15(d)
of the Securities Exchange  Act of 1934) that is  incorporated by
reference in the Registration  Statement shall be deemed to  be a
new  registration statement  relating to  the securities  offered
therein, and the offering  of such securities at that  time shall
be deemed to be the initial bona fide offering thereof.

                               II-4
                               




   (h)     Insofar  as  indemnification  of  liabilities  arising
under the Securities Act  of 1933 may be permitted  to directors,
officers and  controlling persons  of the registrant  pursuant to
the provisions  described under Item 15 above,  or otherwise, the
registrant has been advised that in the opinion of the Securities
and Exchange  Commission such  indemnification is  against public
policy as expressed in the Act  and is, therefore, unenforceable.
In the  event  that  a  claim for  indemnification  against  such
liabilities (other than the payment by the registrant of expenses
incurred  or paid by a director, officer or controlling person of
the registrant in the  successful defense of any action,  suit or
proceeding) is asserted by  such director, officer or controlling
person in connection with any of the securities being registered,
the registrant will,  unless in  the opinion of  its counsel  the
matter has  been settled  by controlling  precedent, submit  to a
court  of appropriate  jurisdiction  the  question  whether  such
indemnification by  it is against  public policy as  expressed in
the Act  and will be governed  by the final adjudication  of such
issue.





































                               II-5

                            
                            
                            SIGNATURES

Pursuant to the requirements  of the Securities Act of  1933, the
Company certifies that it has reasonable  grounds to believe that
it meets all  of the requirements for filing on  Form S-3 and has
duly caused  this  registration statement  to  be signed  on  its
behalf by the undersigned, thereunto duly authorized, in the City
of Peabody, Commonwealth of Massachusetts, on May 22, 1996.

                              MICRION CORPORATION 

                              By: /s/ Nicholas P. Economou  
                                  Nicholas P. Economou, President
                                  and Chief Executive Officer

                        POWER OF ATTORNEY

KNOW  ALL MEN  BY  THESE  PRESENTS,  that each  individual  whose
signature  appears  below  constitutes and  appoints  Nicholas P.
Economou and David M. Hunter, jointly and severally, his true and
lawful  attorneys-in-fact   and  agents   with  full   powers  of
substitution, for him and  in his name,  place and stead, in  any
and all  capacities, to  sign any and  all amendments  (including
post-effective amendments) to this registration statement, and to
file  the same, with all  exhibits thereto, and  all documents in
connection   therewith,   with   the   Securities   and  Exchange
Commission, granting unto said attorneys-in-fact and  agents, and
each of them, full power and authority to do and perform each and
every act and  thing requisite and necessary  to be in  and about
the premises, as fully to all intents and purposes as he might or
could do in person, hereby ratifying and confirming all that said
attorneys-in-fact and agents,  or any  of them, or  their or  his
substitute or substitutes, may lawfully do or cause to be done by
virtue thereof.

Pursuant  to the requirements of the Securities Act of 1933, this
registration  statement has been signed below on May 22, 1996, by
the following persons in the capacities indicated.

Name                          Capacity

/s/ Nicholas P. Economou      President, Chief Executive Officer
Nicholas P. Economou          and  Director (Principal  Executive
                              Officer)

/s/ David M. Hunter           Vice President, Finance, Chief 
David M. Hunter               Financial Officer and Treasurer
                              (Principal Financial and Accounting
                              Officer) 
 
/s/ John A. Doherty           Vice President, Marketing, and 
John A. Doherty               Director


                               II-6

                                   


/s/ Louis P. Valente          Director
Louis P. Valente

/s/ Thomas W. Folger          Director
Thomas W. Folger

/s/ Charles M. McKenna        Director
Charles M. McKenna













































                               II-7






                        INDEX TO EXHIBITS

   Exhibit No.    Description
      3.1*        Restated Articles of Organization of
                  Registrant.
      3.2**       Amended and Restated By-Laws of the
                  Registrant.
      4.1***      Specimen Stock Certificate.
      5           Opinion of Choate, Hall & Stewart.
      10****      Settlement Agreement by and among KLA
                  Instruments Corporation, the Registrant and
                  Other Parties dated May 7, 1996.
      23.1        Consent of Choate, Hall & Stewart (included in
                  Exhibit 5).
      23.2        Consent of KPMG Peat Marwick LLP.
      24          Power of Attorney (included in the signature
                  page of this Registration Statement).

*    Filed as an exhibit  to the registrant's report on  Form 10- 
     QSB  filed  on  June 24,  1994  and  incorporated  herein by
     reference.

**   Filed as an exhibit  to the registrant's report on  Form 10-
     KSB  filed on September 28, 1994  and incorporated herein by
     reference.
     
***  Filed   as  an  exhibit  to  the  registrant's  registration
     statement  on Form  SB-2 (Registration  No. 33-75784)  or an
     amendment thereto and incorporated by reference herein.

**** Filed as an exhibit to the registrant's Quarterly Report  on
     Form 10-QSB  filed May 14,  1996 and incorporated  herein by
     reference.





















                                         II-8


                                                Exhibit 5

                      CHOATE, HALL & STEWART
        A partnership including professional corporations
                          EXCHANGE PLACE
                         53 STATE STREET
                   BOSTON, MASSACHUSETTS  02110


                                   May 23, 1996


Micrion Corporation
One Corporation Way
Peabody, Massachusetts  01960

Gentlemen:

     This  opinion  is  delivered  to you  in  connection  with a
registration statement on Form S-3 (the "Registration Statement")
to  be filed  on  May 23,  1996,  by  Micrion  Corporation  (the
"Company")  under the  Securities Act  of 1933,  as amended  (the
"Act"),  for  registration under  the  Act of  215,000  shares of
Common  Stock, no par value (the "Common Stock"), of the Company.
Terms  not otherwise defined herein  shall be deemed  to have the
meanings ascribed such terms in the Registration Statement.

     In connection with rendering  this opinion, we have examined
such corporate  records, certificates  and other documents  as we
have considered necessary for  the purposes of this opinion.   In
such  examination,  we  have   assumed  the  genuineness  of  all
signatures, the authenticity of all documents  submitted to us as
originals,  the  conformity  of  the original  documents  of  all
document  submitted to us as  copies and the  authenticity of the
originals of such latter documents.  As to any facts material  to
our opinion, we have, when  relevant facts were not independently
established, relied upon the  aforesaid records, certificates and
documents.

     Based upon the  foregoing, we  are of the  opinion that  the
shares  of Common Stock to be sold by the Selling Stockholder are
and,  when sold  by  the Selling  Stockholder,  will be,  legally
issued, fully paid and non-assessable.

     We hereby consent to be  named in the Registration Statement
and in any amendments thereto as counsel for the Company, to  the
statements with reference  to our firm  made in the  Registration
Statement,  and  to the  filing and  use  of this  opinion  as an
exhibit to the Registration Statement.

                                   Very truly yours,

                                   CHOATE, HALL & STEWART


                                                   Exhibit 23.2





                 CONSENT OF INDEPENDENT AUDITORS


The Board of Directors
Micrion Corporation:

We consent to incorporation by reference in this Registration
Statement on Form S-3 of Micrion Corporation of our report dated
July  28,  1995,  relating to the consolidated balance sheets of 
Micrion Corporation and subsidiaries as of June 30, 1995, and the 
related consolidated statements of operations, stockholders' 
equity, and cash flows for each of the years in the three year 
period ended June 30, 1995, which reports appear in the Annual 
Report on Form 10-KSB of Micrion Corporation, and to the reference 
to our firm under the heading "Experts" in the Registration Statement.

                                   KPMG Peat Marwick LLP


Boston, Massachusetts
May 22, 1996






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