MATTSON TECHNOLOGY INC
S-3, 1999-05-06
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>
      AS FILED WITH THE SECURITIES AND EXCHANGE COMMISSION ON MAY 6, 1999.
 
                                                      REGISTRATION NO. 333-
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
 
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                           --------------------------
 
                                    FORM S-3
                             REGISTRATION STATEMENT
                        UNDER THE SECURITIES ACT OF 1933
                           --------------------------
 
                            MATTSON TECHNOLOGY, INC.
             (Exact name of Registrant as specified in its charter)
 
<TABLE>
<S>                                                      <C>
                       DELAWARE                                                77-0208119
            (State or other jurisdiction of                                 (I.R.S. Employer
            incorporation or organization)                                 Identification No.)
</TABLE>
 
           3550 WEST WARREN AVENUE, FREMONT, CA 94538 (510) 657-5900
       (Address, including zip code, and telephone number, including area
               code, of Registrant's principal executive offices)
                         ------------------------------
 
                                  BRAD MATTSON
                            CHIEF EXECUTIVE OFFICER
                            MATTSON TECHNOLOGY, INC.
               3550 WEST WARREN AVENUE, FREMONT, CALIFORNIA 94538
                                 (510) 657-5900
 (Name, address, including zip code, and telephone number, including area code,
                             of agent for service)
                         ------------------------------
 
                                   COPIES TO:
                              PETER M. ASTIZ, ESQ.
                             KIRK O. WILLIAMS, ESQ.
                            STEPHEN O. CARLSON, ESQ.
                        GRAY CARY WARE & FREIDENRICH LLP
                              400 HAMILTON AVENUE
                              PALO ALTO, CA 94301
                           --------------------------
 
    APPROXIMATE DATE OF COMMENCEMENT OF PROPOSED SALE TO THE PUBLIC: As soon as
practicable after this Registration Statement becomes effective.
 
    If the only securities being registered on this Form are being offered
pursuant to dividend or interest reinvestment plans, please check the following
box: / /
 
    If any of the securities being registered on this Form are to be offered on
a delayed or continuous basis pursuant to Rule 415 under the Securities Act of
1933, other than securities offered only in connection with dividend or interest
reinvestment plans, check the following box: /X/
 
    If this Form is filed to register additional securities for an offering
pursuant to Rule 462(b) under the Securities Act, please check the following box
and list the Securities Act registration statement number of the earlier
effective registration statement for the same offering. / /
 
    If this Form is a post-effective amendment filed pursuant to Rule 462(c)
under the Securities Act, check the following box and list the Securities Act
registration statement number of the earlier effective registration statement
for the same offering. / /
 
    If delivery of the prospectus is expected to be made pursuant to Rule 434,
please check the following box. / /
 
<TABLE>
<CAPTION>
                                                                         PROPOSED MAXIMUM
                                                                            AGGREGATE        PROPOSED MAXIMUM
              TITLE OF EACH CLASS OF                   AMOUNT TO BE       OFFERING PRICE    AGGREGATE OFFERING      AMOUNT OF
           SECURITIES TO BE REGISTERED                  REGISTERED         PER SHARE(1)           PRICE          REGISTRATION FEE
<S>                                                 <C>                 <C>                 <C>                 <C>
Common Stock, ($0.001 par value)..................    795,136 shares          $7.00             $5,565,952          $1,547.33
</TABLE>
 
(1) Estimated pursuant to Rule 457(c) solely for the purpose of computing the
    registration fee and based on the average of the high and low prices of the
    Common Stock of Mattson Technology, Inc. as reported on the Nasdaq National
    Market on May 3, 1999.
 
    THE REGISTRANT HEREBY AMENDS THIS REGISTRATION STATEMENT ON SUCH DATE OR
DATES AS MAY BE NECESSARY TO DELAY ITS EFFECTIVE DATE UNTIL THE REGISTRANT SHALL
FILE A FURTHER AMENDMENT WHICH SPECIFICALLY STATES THAT THIS REGISTRATION
STATEMENT SHALL THEREAFTER BECOME EFFECTIVE IN ACCORDANCE WITH SECTION 8(A) OF
THE SECURITIES ACT OR UNTIL THE REGISTRATION STATEMENT SHALL BECOME EFFECTIVE ON
SUCH DATE AS THE COMMISSION, ACTING PURSUANT TO SUCH SECTION 8(A), MAY
DETERMINE.
 
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
<PAGE>
PROSPECTUS         SUBJECT TO COMPLETION, DATED MAY 6, 1999
 
                                 795,136 SHARES
                            MATTSON TECHNOLOGY, INC.
 
                                  COMMON STOCK
 
                            ------------------------
 
    This Prospectus relates to the public offering, which is not being
underwritten, of shares of the common stock of Mattson Technology, Inc. The
shares of Mattson common stock may be offered by any of the selling stockholders
named in this prospectus. The selling stockholders received their shares or the
right to their shares when we acquired Concept Systems Design, Inc. We will
receive no part of the proceeds of any sales made under this prospectus. All
expenses of registration incurred in connection with this offering are being
borne by us, but all selling and other expenses incurred by the selling
stockholders will be borne by such selling stockholders. None of the shares
offered pursuant to this prospectus have been registered prior to the filing of
the registration statement of which this prospectus is a part.
 
    The common stock offered in this prospectus may be offered and sold by the
selling stockholders directly or through broker-dealers or underwriters acting
solely as agents. In addition, the broker-dealers and underwriters may acquire
the common stock as principals. The distribution of the common stock may be
effected in one or more transactions. These transactions may take place through
(1) the Nasdaq National Market, (2) privately negotiated transactions, (3)
underwritten public offerings, or (4) a combination of any such methods of sale.
These transactions may be made at (1) market prices prevailing at the time of
sale, (2) prices related to such prevailing market prices or (3) negotiated
prices. Usual and customary or specially negotiated brokerage fees or
commissions may be paid by the selling stockholders in connection with these
sales. See "PLAN OF DISTRIBUTION."
 
    Mattson's common stock is traded on the Nasdaq National Market under the
symbol "MTSN". On May 5, 1999 the last reported sales price for the common stock
was $7.125 per share.
 
    INVESTING IN THE COMMON STOCK OFFERED IN THIS PROSPECTUS INVOLVES A HIGH
DEGREE OF RISK. SEE "RISK FACTORS" BEGINNING ON PAGE 5.
 
                            ------------------------
 
    Each selling stockholder and any broker executing selling orders on behalf
of the selling stockholders may be deemed to be an "underwriter" within the
meaning of the Securities Act of 1933. Commissions received by any broker
executing selling orders may be deemed to be underwriting commissions under the
Securities Act.
 
                            ------------------------
 
    THE INFORMATION IN THIS PROSPECTUS IS NOT COMPLETE AND MAY BE CHANGED. WE
MAY NOT SELL THESE SECURITIES UNTIL THE REGISTRATION STATEMENT FILED WITH THE
SECURITIES AND EXCHANGE COMMISSION IS EFFECTIVE. THIS PROSPECTUS IS NOT AN OFFER
TO SELL THESE SECURITIES AND IS NOT SOLICITING AN OFFER TO BUY THESE SECURITIES
IN ANY STATE WHERE THE OFFER OR SALE IS NOT PERMITTED.
 
    NEITHER THE SECURITIES AND EXCHANGE COMMISSION NOR ANY STATE SECURITIES
COMMISSION HAS APPROVED OR DISAPPROVED THESE SECURITIES OR PASSED UPON THE
ADEQUACY OR ACCURACY OF THIS PROSPECTUS. ANY REPRESENTATION TO THE CONTRARY IS A
CRIMINAL OFFENSE.
 
                  The date of this Prospectus is May 6, 1999.
<PAGE>
                               TABLE OF CONTENTS
 
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<S>                                                                                                          <C>
 
WHERE YOU CAN FIND MORE INFORMATION........................................................................           3
 
INFORMATION INCORPORATED BY REFERENCE......................................................................           3
 
FORWARD LOOKING INFORMATION................................................................................           4
 
THE COMPANY................................................................................................           4
 
RISK FACTORS...............................................................................................           5
 
SELLING STOCKHOLDERS.......................................................................................          14
 
PLAN OF DISTRIBUTION.......................................................................................          16
 
DESCRIPTION OF CAPITAL STOCK...............................................................................          16
 
LEGAL MATTERS..............................................................................................
 
EXPERTS....................................................................................................          17
</TABLE>
 
                                       2
<PAGE>
                      WHERE YOU CAN FIND MORE INFORMATION
 
    We filed this registration statement on Form S-3 under the Securities Act of
1933, as amended (the "Securities Act") with the Securities and Exchange
Commission (the "SEC"). This prospectus does not contain all of the information
set forth in the registration statement. Those parts of the registration
statement which we omitted from this prospectus were omitted in accordance with
the rules and regulations of the SEC. For further information, please refer to
the registration statement. Copies of the registration statement may be obtained
from the Public Reference Section of the SEC, 450 Fifth Street, N.W.,
Washington, D.C. 20549 upon payment of the fees prescribed by the SEC.
 
    We are also subject to the informational reporting requirements of the
Securities Exchange Act of 1934, as amended (the "Exchange Act"). We file
reports, proxy statements and other information with the SEC to comply with the
Exchange Act. Such reports, proxy statements and other information can be
inspected and copied (1) on the Internet at http://www.sec.gov; (2) at the SEC's
regional offices at: Seven World Trade Center, New York, New York 10048 and 500
West Madison Street, Suite 1400, Chicago, Illinois 60661; and (3) at the Public
Reference Room of the SEC, 450 Fifth Street, N.W., Washington, D.C. 20549.
Copies of such material can be obtained from the Public Reference Section of the
SEC, 450 Fifth Street, N.W., Washington, D.C. 20549 at prescribed rates. You may
call the SEC at 1-800-SEC-0330 to obtain information regarding the operation of
the Public Reference Room. Our common stock is quoted on Nasdaq under the
trading symbol MTSN. Reports, proxy statements and other information concerning
our company also may be inspected at the National Association of Securities
Dealers, Inc., 1735 K Street, N.W., Washington, D.C. 20006.
 
                            ------------------------
 
                     INFORMATION INCORPORATED BY REFERENCE
 
    The SEC allows us to "incorporate by reference" the information we file with
them, which means that we can disclose important information to you by referring
you to those documents. The information incorporated by reference is considered
to be a part of this prospectus. Any information that we file with the SEC will
automatically update and supersede this information. We incorporate by reference
the documents listed below and any additional documents we file with the SEC
until the selling stockholders have sold all the shares.
 
    The following documents filed with the SEC are incorporated by reference
into this prospectus:
 
    - the Company's Annual Report on Form 10-K for the fiscal year ended
      December 31, 1998;
 
    - the Company's Definitive Proxy Statement relating to the Annual Meeting of
      Stockholders to be held May 20, 1999.
 
    - the Company's Form 8-K/A filed May 6, 1999.
 
    All documents filed by the Company pursuant to Section 13(a), 13(c), 14 or
15(d) of the Exchange Act after the date of this prospectus and prior to the
termination of the offering of securities contemplated by this prospectus shall
be deemed to be incorporated by reference in this prospectus. Such documents
shall be considered to be a part of this prospectus from the date of filing of
such documents. Any statement contained in a document incorporated by reference
or deemed to be incorporated by reference into this prospectus shall be deemed
to be modified or superseded for all purposes of this prospectus and the
registration statement to the extent that a statement contained (1) in this
prospectus, (2) in any document incorporated by reference or (3) in any
subsequently filed document which also is incorporated or deemed to be
incorporated by reference in this prospectus modifies or supersedes such
statement. Any such statement so modified or superseded shall not be deemed,
except as so modified or superseded, to constitute a part of this prospectus.
 
                                       3
<PAGE>
    We will provide without charge to each person, including any beneficial
owner, to whom a copy of this prospectus has been delivered a copy of any and
all of the documents referred to above which have been or may be incorporated in
this prospectus by reference and were not delivered with this prospectus. We
will not deliver exhibits to such documents, unless such exhibits are
specifically incorporated by reference. We will provide this information upon
written or oral request by a person to whom we delivered a copy of the
prospectus. Requests for such copies should be directed to our principal
executive offices located at 3550 West Warren Avenue, Fremont, CA 94538,
Attention: Secretary. Our general telephone number is (510) 657-5900.
 
                          FORWARD LOOKING INFORMATION
 
    This prospectus and the documents incorporated herein by reference contain
"forward-looking statements" that have been made pursuant to the provisions of
the Private Securities Litigation Reform Act of 1995. A "forward-looking
statement" is a statement that is based on the following:
 
    - Current expectations,
 
    - Estimates and projections about our industry,
 
    - Management's beliefs, and
 
    - Certain assumptions made by our management.
 
    Words such as "anticipates," "expects," "intends," "plans," "believes,"
"seeks," "estimates," variations of such words and similar expressions are
intended to identify such forward-looking statements. These statements are not
guarantees of future performance and are subject to certain risks, uncertainties
and assumptions that are difficult to predict. As a result, actual results may
differ materially from those expressed or forecasted in any forward-looking
statements. Such risks and uncertainties include those set forth herein under
"RISK FACTORS" beginning on page 5. These risks and uncertainties are also noted
in the documents incorporated into the prospectus by reference. Unless required
by law, we undertake no obligation to update publicly any forward-looking
statements, whether as a result of (1) new information, (2) future events or (3)
otherwise. However, readers should carefully review the risk factors set forth
in other reports or documents that we file from time to time with the SEC. The
readers should focus particularly on the Quarterly Reports on Form 10-Q and any
Current Reports on Form 8-K.
 
                                  THE COMPANY
 
    We design, manufacture and market advanced fabrication equipment. We sell
this equipment to the worldwide semiconductor industry.
 
    The Company was incorporated in California in November 1988. The company
reincorporated in Delaware in September 1997. Our principal executive offices
are located at 3550 West Warren Avenue, Fremont, California 94538. Our telephone
number is (510) 657-5900. As used in this prospectus, the terms "Company" and
"Mattson" refer to Mattson Technology, Inc.
 
    In connection with our July 24, 1998 acquisition of Concept Systems Design,
Inc., we issued 795,136 shares of Mattson common stock to the selling
stockholders. The selling stockholders hold certain registration rights pursuant
to a Registration Rights Agreement among the Company and the appointed
representatives of the selling stockholders. The parties executed this
Registration Rights Agreement on July 24, 1998.
 
                                       4
<PAGE>
                                  RISK FACTORS
 
    THE COMMON STOCK OFFERED IN THIS PROSPECTUS INVOLVES A HIGH DEGREE OF RISK.
IN ADDITION TO THE OTHER INFORMATION CONTAINED IN THE PROSPECTUS, THE FOLLOWING
FACTORS SHOULD BE CONSIDERED CAREFULLY IN EVALUATING AN INVESTMENT IN THE SHARES
OF COMMON STOCK OFFERED IN THIS PROSPECTUS. THE DISCUSSIONS IN THIS PROSPECTUS
MAY INCLUDE FORWARD-LOOKING STATEMENTS THAT INVOLVE RISKS AND UNCERTAINTIES.
DISCUSSIONS CONTAINING SUCH FORWARD-LOOKING STATEMENTS MAY BE FOUND IN THE
MATERIAL SET FORTH IN THIS SECTION. ACTUAL EVENTS OR RESULTS MAY DIFFER
MATERIALLY FROM THOSE DISCUSSED IN THIS SECTION.
 
    IN ORDER TO ACHIEVE THE ANTICIPATED BENEFITS OF THE ACQUISITION OF CONCEPT,
WE MUST SUCCESSFULLY INTEGRATE THEIR OPERATIONS WITH OUR OWN AND RETAIN KEY
PERSONNEL.  In order to achieve the anticipated benefits of the acquisition of
Concept, we must at a minimum be able to integrate the (1) businesses, (2)
personnel and (3) operations of the two companies efficiently and effectively.
No one can guarantee that this integration will occur smoothly or successfully.
We must dedicate management resources to coordinate the integration of the
operations of the two companies following the acquisition. Dedication of
management's time and energy to the integration of the two companies may
temporarily divert attention from the day-to-day business of the combined
company. A material adverse effect on our business and results of operations may
result if management cannot (1) successfully integrate the operations of the two
companies or (2) retain key personnel.
 
    OUR QUARTERLY RESULTS HAVE FLUCTUATED SIGNIFICANTLY IN THE PAST AND MAY
FLUCTUATE SIGNIFICANTLY IN THE FUTURE. We derive most of our net sales from the
sale of a relatively small number of systems. The list prices on these range
from $375,000 to over $1,000,000. At our current revenue level, each sale, or
failure to make a sale, can have a material effect on us. Our backlog at the
beginning of a quarter typically does not include all sales required to achieve
our sales objectives for that quarter. Consequently, our net sales and operating
results for a quarter depend on us shipping orders scheduled to be sold during
that quarter and obtaining orders for systems to be shipped in that same
quarter. A delay in a shipment near the end of a quarter may cause net sales in
that quarter to fall significantly below our expectations. Such a delay may
materially and adversely affect our operating results for that quarter. Other
factors which may lead to fluctuations in our quarterly and annual operating
results include:
 
    - Market acceptance of our systems and the products of our customers,
 
    - Substantial changes in revenues from significant customers,
 
    - Increased manufacturing overhead expenses due to reductions in the number
      of systems manufactured,
 
    - Geographic mix of sales,
 
    - Timing of announcement and introduction of new systems by us and by our
      competitors,
 
    - Changes in product mix,
 
    - Delays in orders due to customer financial difficulties, and
 
    - Cyclicality in the semiconductor industry and the markets served by our
      customers.
 
    In particular, the following results of the current market slowdown raise
significant risks that quarterly results will fluctuate:
 
    - Uncertainties regarding market conditions
 
    - Customer order changes, and
 
    - Customer order cancellations.
 
    Unpredictable order patterns often cause our manufacturing efficiency to
vary significantly from quarter to quarter. Any variation in our manufacturing
efficiency can adversely affect gross margins and
 
                                       5
<PAGE>
net operating results. The time lag between our first contact with a customer
and the customer placing its first order typically lasts from nine to twelve
months. This lag is often even longer. Our customers often face competing
capital budget considerations. Time lags between first customer contact and the
customer placing its first order, coupled with the customer's competing capital
budget considerations, make the timing of customer orders uneven and difficult
to predict. Any of the following could adversely affect our financial
performance:
 
    - Delay in receiving anticipated customer orders,
 
    - Failure to receive anticipated customer orders,
 
    - Deferrals of existing customer orders, or
 
    - Cancellations of existing customer orders.
 
    In addition, continued investments in the following areas may lead to
significantly higher fixed costs:
 
    - Research
 
    - Development and engineering, and
 
    - Development of a worldwide sales and marketing organization.
 
    Higher fixed costs resulting from any one or a combination of these
activities will be difficult or impossible to reduce rapidly if net sales goals
for that period are not met. We cannot accurately forecast the impact of these
and other factors on our operating results in any future period.
 
    Our net loss for the first quarter of 1999 was $2.4 million, or $0.16 per
share. In particular, there can be no assurance that the continuing industry
downturn will not be worse or larger than currently expected.
 
    See "INFORMATION INCORPORATED BY REFERENCE."
 
    OUR FUTURE SUCCESS DEPENDS UPON OUR ABILITY TO DEVELOP OUR SYSTEMS AND
PRODUCTS AND THE MARKET'S ACCEPTANCE OF THEM.  Our systems represent
alternatives to the conventional equipment currently marketed by our
competitors. As a result, we believe that our growth prospects depend in large
part upon our ability to gain acceptance by a broader group of customers. To
date, only our strip products have gained widespread market acceptance. Because
semiconductor manufacturers must make a substantial investment to install and
integrate capital equipment into a semiconductor production line, these
manufacturers will tend to choose semiconductor equipment manufacturers based on
the following:
 
    - Past relationships,
 
    - Product compatibility, and
 
    - Proven financial performance.
 
    Once a semiconductor manufacturer selects a particular vendor's capital
equipment, we believe that the manufacturer generally relies upon that equipment
for the specific production line application. In addition, the semiconductor
manufacturer frequently will attempt to consolidate its other capital equipment
requirements with the same vendor. Given these factors, there can be no
assurance that we will be successful in obtaining broader acceptance of our
systems and technology. The transition of the market to 300mm wafers will
present both an opportunity and a risk. We must introduce 300mm systems on a
timely basis and which meet customer requirements. To the extent that we are
unable to do this, our business, results of operations and financial condition
could be materially and adversely affected. See "INFORMATION INCORPORATED BY
REFERENCE."
 
    OUR REVENUES ARE SIGNIFICANTLY DEPENDENT ON INDIVIDUAL CUSTOMERS MAKING
PURCHASES.  We sell our products to leading integrated circuit manufacturers
located in the United States, Europe, Japan and the rest of the Pacific Rim.
During 1996 and 1998 there were no individually significant customers for our
 
                                       6
<PAGE>
products. During 1997 one end user customer, TSMC, accounted for approximately
11% of sales. While we actively pursue new customers, there can be no assurance
that we will be successful in our efforts. Any significant weakening in customer
demand would have a material adverse effect on us. See "INFORMATION INCORPORATED
BY REFERENCE."
 
    OUR REVENUES ARE HIGHLY DEPENDENT ON OUR JAPANESE DISTRIBUTOR, MARUBENI, AND
THE ASIAN MARKET IN GENERAL.  We believe that strong sales in the Japanese
market will be essential to our future financial performance. As part of our
strategy for penetrating the Japanese market, we established a distributor
relationship with Marubeni. We are substantially dependent upon Marubeni to
address the Japanese market. Sales through Marubeni to customers in Japan
accounted for 16% of our net sales for the year ended December 31, 1998.
Although management believes that it maintains a good relationship with
Marubeni, there can be no assurance that the relationship will continue. In the
event of a termination of our distribution agreement with Marubeni, our strategy
to increase our sales in Japan would be adversely affected. In addition, upon
termination of this relationship with Marubeni, we would have the obligation to
repurchase up to $1 million of inventory related to our sales to Marubeni.
Although we intend to continue to invest significant resources in Japan,
including the hiring of additional personnel to support Marubeni's efforts,
there can be no assurance that we will be able to maintain or increase our sales
to the Japanese semiconductor industry.
 
    We are also substantially dependent upon sales to Pacific Rim countries
generally. During the year ended December 31, 1998, approximately 50% of our net
sales were to customers based in the Pacific Rim. During 1997, we made
approximately 60% of our net sales to customers based in the Pacific Rim. As
such, we are particularly at risk with respect to effects from developments such
as the Asian economic problems. In addition, because some of our foreign sales
are denominated in U.S. dollars, our products become less price competitive in
countries with currencies that are declining in value in comparison with the
dollar. See "INFORMATION INCORPORATED BY REFERENCE."
 
    OUR SALES CYCLE IS LENGTHY BECAUSE SALES OF OUR SYSTEMS DEPEND UPON THE
DECISIONS OF PROSPECTIVE CUSTOMERS TO MAKE SIGNIFICANT CAPITAL
COMMITMENTS.  Sales of our systems depend, in significant part, upon the
decision of a prospective customer to increase manufacturing capacity or to
expand current manufacturing capacity. Both decisions typically involve a
significant capital commitment. Our ability to receive orders from potential
customers may depend upon such customers undertaking an evaluation for new
equipment. For many potential customers, such an evaluation may occur
infrequently. Following initial system qualification, we often experience
further delays in finalizing system sales while the customer:
 
    - Evaluates the purchase of our systems,
 
    - Receives approvals for the purchase of our systems, and
 
    - Completes a new or expanded facility.
 
    We believe we must significantly increase our inventory investment in
evaluation systems because many customers use these systems in their evaluation
processes. Due to these factors, our systems typically have a lengthy sales
cycle during which we may expend substantial funds and management effort. There
can be no assurance that any of our efforts will succeed. See "INFORMATION
INCORPORATED BY REFERENCE."
 
    OUR SALES REFLECT THE CYCLICALITY OF THE SEMICONDUCTOR INDUSTRY.  Our
business depends in significant part upon capital expenditures by manufacturers
of semiconductor devices, including manufacturers that are opening new or
expanding existing fabrication facilities. The level of capital expenditures by
these manufacturers of semiconductor devices depend upon the current and
anticipated market demand for such devices and the products utilizing such
devices. The semiconductor industry is highly cyclical. The industry
historically experiences periods of oversupply that result in significantly
reduced demand for capital equipment, including the systems manufactured and
marketed by us. Although sales increased in the first
 
                                       7
<PAGE>
quarter of 1999 and the fourth quarter of 1998 compared to sales in the third
quarter of 1998, sales had decreased for each of the first three quarters of
1998. We anticipate that a significant portion of new orders will depend upon
demand from semiconductor manufacturers who build or expand large fabrication
facilities. There can be no assurance that such demand will exist. Any future
downturns or slowdowns in the semiconductor market will materially and adversely
affect our net sales and operating results. See "INFORMATION INCORPORATED BY
REFERENCE."
 
    WE MAY NOT BE ABLE TO COMPETE IN THE HIGHLY COMPETITIVE SEMICONDUCTOR
INDUSTRY.  The market for our systems is both highly competitive and subject to
rapid technological change. Significant competitive factors include the
following:
 
    - System performance,
 
    - Cost of ownership,
 
    - Size of installed base,
 
    - Breadth of product line, and
 
    - Customer support.
 
    Principal competitors in the United States for our Aspen Strip systems
include:
 
    - GaSonics,
 
    - Eaton (formerly Fusion), and
 
    - Matrix.
 
    The following principal competitors for our Aspen Strip Systems have
established relationships with Japanese integrated circuit manufacturers:
 
    - Canon,
 
    - Plasma Systems Corporation,
 
    - KEM (formerly McElectronics), and
 
    - Tokyo Ohka
 
    Competitors for our Aspen LiteEtch systems include:
 
    - Lam Research,
 
    - GaSonics,
 
    - Matrix,
 
    - Tegal, and
 
    - Shibaura.
 
    Competitors for our Aspen CVD systems include:
 
    - Applied Materials,
 
    - Novellus,
 
    - ASM, and
 
    - Watkins-Johnson.
 
    Competitors for our Aspen RTP system include:
 
    - AG Associates,
 
    - Steag Microelectronics, and
 
    - Applied Materials.
 
                                       8
<PAGE>
    Competitors for our epitaxial systems include:
 
    - Applied Materials,
 
    - Moore Technology
 
    - ASM, and
 
    - Toshiba.
 
    The following characteristics of certain of our competitors (particularly
for CVD systems) give them a competitive advantage over us:
 
    - Broader product lines,
 
    - Longer operating history,
 
    - Greater experience with high volume manufacturing,
 
    - Broader name recognition,
 
    - Substantially larger customer bases, and
 
    - Substantially greater financial, technical and marketing resources.
 
    In addition, to expand our sales we must often replace the systems of our
competitors. There can be no assurance that our competitors will not develop
enhancements to or future generations of competitive products that will offer
price/performance features that are superior to our systems. See "INFORMATION
INCORPORATED BY REFERENCE."
 
    MOST OF OUR SALES REVENUE IS CONCENTRATED IN ASPEN STRIP SYSTEMS.  From
inception until December 31, 1998, our sales of Aspen Strip systems constitute
91% of our sales. Our continued sales growth will depend upon achieving market
acceptance of: (1) Aspen CVD systems, (2) Aspen RTP systems, (3) Aspen LiteEtch
systems, (4) new EpiPro systems, and (5) future products. See "INFORMATION
INCORPORATED BY REFERENCE."
 
    DEVELOPMENT AND ACCEPTANCE OF THE COMPANY'S EPI SYSTEMS WILL BE IMPORTANT TO
OUR BUSINESS STRATEGY IN THE FUTURE.  Prior to our acquisition of Concept, we
had no experience with sales of EPI products. There can be no assurance that
development of the EPI technology will meet expectations or that any of our new
EPI products will:
 
    - Adequately meet the requirements of the marketplace,
 
    - Be of acceptable quality, or
 
    - Achieve market acceptance as Mattson products.
 
    In addition, there can be no assurance that our EPI products will function
and perform as planned or that we will not experience other delays or
difficulties in the development of these products. Our success in developing,
introducing, selling and supporting EPI products will depend on a variety of
factors in addition to product design and development. These additional factors
include:
 
    - Timely and efficient implementation and continuation of manufacturing
      processes,
 
    - Effective sales,
 
    - Marketing and customer service, and
 
    - The absence of performance problems.
 
    ACQUISITIONS, WHICH ARE INHERENTLY RISKY, ARE PART OF OUR BUSINESS
STRATEGY.  As part of our business strategy, subject to certain regulatory
approvals and other conditions, we may make additional acquisitions
 
                                       9
<PAGE>
of, or significant investments in, businesses that offer complementary products,
services and technologies. The risks commonly encountered in acquisitions of
businesses will accompany any acquisitions or investments. Such risks include,
among other things:
 
    - Difficulty of assimilating the operations and personnel of the acquired
      businesses,
 
    - Potential disruption of our ongoing business,
 
    - Inability of management to maximize our financial and strategic position
 
    - Inability of management to manage the financial and strategic position of
      acquired or invested products, services, and technologies,
 
    - Inability to maintain uniform standards, controls and procedures and
      policies, and
 
    - Impairment of relationships with employees and customers which may occur
      as a result of any integration.
 
    These factors could have a material adverse effect on our business, results
of operations or financial condition. Consideration paid for future
acquisitions, if any, could be in the form of:
 
    - Cash,
 
    - Stock,
 
    - Rights to purchase stock or
 
    - A combination of cash, stock and rights to acquire stock.
 
    To the extent that shares of stock or other rights to purchase stock are
issued in connection with any such future acquisitions, dilution to existing
stockholders and to earnings per share may result. See "INFORMATION INCORPORATED
BY REFERENCE."
 
    OUR FUTURE SUCCESS DEPENDS UPON OUR CONTINUING TO DEVELOP AND INTRODUCE NEW
SYSTEMS WHICH COMPETE EFFECTIVELY ON THE BASIS OF PRICE AND PERFORMANCE.  We
compete and our customers compete in markets characterized by:
 
    - Rapidly changing technology,
 
    - Evolving industry standards, and
 
    - Continuous improvements in products and services.
 
    Because of continual changes in these markets, we believe that our future
success will depend, in part, upon our ability to continue to improve our
systems and our process technologies. Due to the continual change in these
markets, our success will also depend upon our ability to develop new
technologies and systems which (1) compete effectively on the basis of price and
performance and (2) adequately address customer requirements. In addition, we
must adapt our systems and processes to technological changes and to support
emerging target market industry standards. The success of new system
introductions is dependent on a number of factors. These factors include timely
completion of new system designs and market acceptance. There can be no
assurance that we will be able to improve our existing systems or develop new
technologies or systems in a timely manner. In particular, the transition of the
market to 300mm wafers will present us with both an opportunity and a risk. To
the extent that we are unable to introduce 300mm systems on a timely basis and
which meet customer requirements, our business, results of operations and
financial condition could be materially and adversely affected. See "INFORMATION
INCORPORATED BY REFERENCE."
 
    OUR SUBSTANTIAL DEPENDENCE UPON A LIMITED NUMBER OF SUPPLIERS FOR SOME
COMPONENTS AND SUBASSEMBLIES REDUCES OUR CONTROL OVER THE TERMS OF THEIR
DELIVERIES.  We rely to a substantial extent on outside vendors to manufacture
many of the Aspen systems' components and subassemblies. We obtain certain of
these
 
                                       10
<PAGE>
components and subassemblies from a supplier or a limited group of suppliers.
Our reliance on outside vendors generally, and a sole or a limited group of
suppliers in particular, involves several risks. These risks include:
 
    - A potential inability to obtain an adequate supply of required components,
 
    - Reduced control over pricing of components, and
 
    - Reduced control over timely delivery of components.
 
    The manufacture of certain of these components and subassemblies is an
extremely complex process and requires long lead times. As a result, there can
be no assurance that delays or shortages caused by suppliers will not occur. Any
inability to obtain adequate deliveries or any other circumstance that would
require us to seek alternative sources of supply or to manufacture such
components internally could delay our ability to ship our systems. Any such
delay could have a material adverse effect on us. See "INFORMATION INCORPORATED
BY REFERENCE."
 
    WE ARE HIGHLY DEPENDENT ON OUR KEY PERSONNEL.  Our success depends to a
large extent upon the efforts and abilities of Brad Mattson, Chairman and Chief
Executive Officer, and other key managerial and technical employees. The loss of
Mr. Mattson or other key employees could have a material adverse effect on us.
We do not enter into written employment agreements with any of our executive
officers. The success of our business will also depend upon our ability to
continue to attract and retain qualified employees. In particular, we must
attract and retain highly skilled design and process engineers to manufacture
existing systems and develop new systems and processes. The competition for such
personnel is intense. See "INFORMATION INCORPORATED BY REFERENCE."
 
    WE ARE HIGHLY DEPENDENT ON OUR SALES OVERSEAS, PARTICULARLY TO JAPAN AND
OTHER PACIFIC RIM COUNTRIES. International sales accounted for 67%, 65%, and 76%
of our total net sales during 1998, 1997, and 1996, respectively. We anticipate
that international sales will continue to account for a significant portion of
net sales. International sales are subject to certain risks, including:
 
    - Unexpected changes in regulatory requirements,
 
    - Exchange rates,
 
    - Tariffs and other barriers,
 
    - Political and economic instability,
 
    - Difficulties in accounts receivable collections,
 
    - Extended payment terms,
 
    - Difficulties in managing distributors or representatives,
 
    - Difficulties in staffing and managing foreign subsidiary operations, and
 
    - Potentially adverse tax consequences.
 
    Because of our dependence upon international sales in general, and on sales
to Japan and Pacific Rim countries in particular, we are particularly at risk to
effects from developments such as the Asian economic problems. Our international
sales are also subject to certain governmental restrictions, including the
Export Administration Act and the regulations promulgated under that act. Our
sales to date have been denominated in U.S. dollars. As a result, there have
been no losses related to currency fluctuations on sales. There can be no
assurance that any of these factors will not have a material adverse effect on
us. See "INFORMATION INCORPORATED BY REFERENCE."
 
                                       11
<PAGE>
    WE RELY ON OUR INTELLECTUAL PROPERTY RIGHTS TO PROTECT OUR PROPRIETARY
TECHNOLOGY.  We rely on a combination of the following to protect our
proprietary technology:
 
    - Patents,
 
    - Copyrights,
 
    - Trademark and trade secret laws,
 
    - Non-disclosure agreements, and
 
    - Other intellectual property protection methods.
 
    We believe that patents are of less significance in this industry than such
factors as innovative skills, technical expertise and know-how of our personnel.
There can be no assurance that our competitors will not be able to legitimately
ascertain the non-patented proprietary information embedded in our systems. If
this occurs, we may be precluded from preventing the use of such information. To
the extent we wish to assert our patent rights, there can be no assurance that
any claims of our patents will be sufficiently broad to protect our technology.
In addition, there can be no assurance that:
 
    - Any patents issued to us will not be challenged, invalidated or
      circumvented,
 
    - Any rights granted thereunder will provide adequate protection to us, or
 
    - We will have sufficient resources to prosecute our rights.
 
    No lawsuits are pending against us regarding infringement of any existing
patents or other intellectual property rights. In addition, we have not received
any unresolved notices that we are infringing intellectual property rights of
others. Still, there can be no assurance that such infringement claims will not
be asserted by third parties in the future. There also can be no assurance in
the event of such claims of infringement that we will be able to obtain licenses
on reasonable terms. Our involvement in any patent dispute or other intellectual
property dispute or action to protect trade secrets and know-how could have a
material adverse effect on us. Adverse determinations in any litigation could do
the following:
 
    - Subject us to significant liabilities to third parties,
 
    - Require us to seek licenses from third parties, and
 
    - Prevent us from manufacturing and selling our systems.
 
    Any of these situations could have a material adverse effect on us. See
"INFORMATION INCORPORATED BY REFERENCE."
 
    OUR FAILURE TO COMPLY WITH CURRENT OR FUTURE ENVIRONMENTAL REGULATIONS COULD
RESULT IN SUBSTANTIAL LIABILITY TO THE COMPANY.  We are subject to a variety of
federal, state and local laws, rules and regulations. These laws, rules and
regulations pertain to the use, storage, discharge and disposal of hazardous
chemicals during (1) sales demonstrations and (2) research and development. In
recent years we have seen an increase in the amount of public attention focused
on the environmental impact of operations which use hazardous materials. To the
best of our knowledge, we are in compliance with all federal, state and local
environmental regulations. However, failure to comply with present or future
regulations could result in the following:
 
    - Substantial liability to us,
 
    - Suspension or cessation of our operations,
 
    - Restrictions on our ability to expand at our present locations,
 
    - Requirements for the acquisition of significant equipment, or
 
    - Other significant expense.
 
                                       12
<PAGE>
    See "INFORMATION INCORPORATED BY REFERENCE."
 
    THE PRICE OF OUR COMMON STOCK HAS IN THE PAST AND MAY IN THE FUTURE
FLUCTUATE SIGNIFICANTLY.  Significant volatility characterized the market price
of our common stock in the past. Our stock price declined substantially from its
highs. There can be no assurance that the market price of our common stock will
not decline in the future. We believe that a variety of factors could cause the
price of our common stock to fluctuate, perhaps substantially, including:
 
    - Announcements of developments related to our business,
 
    - Fluctuations in our operating results and order levels,
 
    - General conditions in the semiconductor industry or in the worldwide
      economy,
 
    - Announcements of technological innovations,
 
    - New products or product enhancements by us or by our competitors,
 
    - Developments in patents or other intellectual property rights, and
 
    - Developments in our relationships with our customers, distributors and
      suppliers.
 
    In addition, in recent years the stock market in general, and the market for
shares of small capitalization stocks in particular, experienced extreme price
fluctuations. These fluctuations were often unrelated to the operating
performance of the affected companies. Such fluctuations could adversely affect
the market price of our common stock. See "INFORMATION INCORPORATED BY
REFERENCE."
 
    WE ARE EXPOSED TO RISKS RELATED TO YEAR 2000 (Y2K) ISSUES FROM OUR PRODUCTS,
OUR INTERNATIONAL INFRASTRUCTURE AND OUR BUSINESS PARTNERS WHICH COULD HAVE A
SIGNIFICANT IMPACT ON OUR FINANCIAL CONDITION.  As with many other companies,
the Year 2000 computer issue presents risks for us. We use a significant number
of computer software programs and operating systems in our internal operations,
including applications used in our (1) financial systems, (2) product
development systems, (3) order management systems and (4) manufacturing systems.
The inability of computer software programs to accurately recognize, interpret
and process date codes designating the year 2000 and beyond could cause systems
to yield inaccurate results or encounter operating problems resulting in the
interruption of the business operations which they control. This could adversely
affect our ability to (1) process orders, (2) forecast production requirements
or (3) issue invoices. A significant failure of the computer integrated
manufacturing systems, which monitor and control factory equipment, would
disrupt manufacturing operations and cause a delay in completion and shipping of
products. Moreover, if our critical suppliers' or customers' systems or products
fail because of a Year 2000 malfunction, it could impact our operating results.
Finally, our own products could malfunction as a result of a failure in date
recognition, giving rise to the possibility of warranty claims and litigation.
Based on currently available information, our management does not believe that
the Year 2000 issues discussed above, related to internal systems or products
sold to customers, will have a material impact on our financial condition or
overall trends in results of operations. However, we are uncertain to what
extent we may be affected by such matters. A significant disruption of our
financial management and control systems or a lengthy interruption in our
manufacturing operations caused by a Year 2000 related issue could result in a
material adverse impact on our operating results and financial condition. In
addition, it is possible that a supplier's failure to ensure Year 2000
capability or our customer's concerns about Year 2000 readiness of our products
would have a material adverse effect on our results of operations.
 
                                       13
<PAGE>
                              SELLING STOCKHOLDERS
 
    The following table sets forth certain information regarding each selling
stockholder, each of whom is a former shareholder of Concept.
 
<TABLE>
<CAPTION>
                                                                    SHARES
                                                                 BENEFICIALLY      SHARES TO
                                                                OWNED PRIOR TO    BE SOLD IN     SHARES BENEFICIALLY
NAME AND ADDRESS OF SELLING STOCKHOLDER                           OFFERING(1)      OFFERING     OWNED AFTER OFFERING
- -------------------------------------------------------------  -----------------  -----------  -----------------------
<S>                                                            <C>                <C>          <C>
 
Jim Mezey....................................................         81,426          72,259              *
5671 Portrush Court
San Jose, CA 95138
 
Glenn Pfefferkorn............................................         37,011          32,844              *
46676 Windmill Drive
Fremont, CA 94539
 
Janet Pfefferkorn............................................         37,011          32,844              *
46676 Windmill Drive
Fremont, CA 94539
 
Roger Cory...................................................         91,789          81,456              *
3409 Mira Vista Circle
San Jose, CA 95132
 
Robert and Linda Mailho Family Trust.........................         74,024          65,691              *
14338 Kirk Allan Lane
Sonora, CA 95370
 
Alan Carbonaro...............................................         84,387          74,887              *
1834 Sterling Place
Livermore, CA 94550
 
Louise Campbell McBride, Trustee of the......................         29,609          26,276              *
Louise Campbell McBride Living Trust
dated 1/28/98
3807 Hancock Drive
Santa Clara, CA 95051
 
Robert Dixon and Judith E. Dixon.............................         76,984          68,317              *
Trustees of the Dixon Family 1994 Trust,
dated 9-9-94
2801 Lockheed Way
Carson City, NV 89706
 
Pacific Induction Inc. Profit Sharing Plan...................         29,609          26,276              *
1963 Josephine Avenue
San Jose, CA 95124
 
Marlene M. LoCastro, Trustee of the Marlene..................          5,921           5,254              *
M. LoCastro 1997 Trust, dated
November 6, 1997
16050 Los Gatos-Almaden Road
Los Gatos, CA 95032
</TABLE>
 
                                       14
<PAGE>
<TABLE>
<CAPTION>
                                                                    SHARES
                                                                 BENEFICIALLY      SHARES TO
                                                                OWNED PRIOR TO    BE SOLD IN     SHARES BENEFICIALLY
NAME AND ADDRESS OF SELLING STOCKHOLDER                           OFFERING(1)      OFFERING     OWNED AFTER OFFERING
- -------------------------------------------------------------  -----------------  -----------  -----------------------
<S>                                                            <C>                <C>          <C>
David Eck....................................................         59,218          52,551              *
c/o Solar Products, Inc.
5 Colton Road East
Lyme, CT 06330
 
Charles Sutcliffe............................................         37,011          32,844              *
c/o Silicon Valley Management
15474 Via Vaquero
Monte Sereno, CA 95030
 
Vergil Owen..................................................         29,609          26,276              *
c/o All Weld
1011 Pectin Ct.
Milpitas, CA 95035
 
Barbara Leavery..............................................            740             657              *
6601 Rinconada Drive
Citrus Heights, CA 95610
 
J. Michael Hernandez.........................................          1,048             930              *
623 Windmill Lane
Pleasanton, CA 94566
 
Shawna Morgan................................................            118             105              *
6043 I Joaquin Murieta
Newark, CA 94560
 
Ling Zhu.....................................................            240             213              *
4516 Mackinaw Street
Union City, CA 94587
 
Andrea Borst.................................................             55              49              *
4506 Boones Trail Terrace
Chesterfield, VA 23832
 
Western Asset Management SEP-IRA FBO.........................            888             788              *
Daniel P. White
3397 Hilow Road
Los Gatos, CA 95032
 
Yokogawa Electric Corporation................................        118,438         105,105              *
Yoshiaki Ugai
2-9-32 Nakacho, Musashino-shi
Tokyo, 180-8750 Japan
                                                                     -------      -----------
                                                                     795,136(2)      705,622(2)
</TABLE>
 
- ------------------------
 
*   Less than 1%
 
(1) Based on the number of shares beneficially owned at July 24, 1998, the date
    of the acquisition of Concept Systems Design, Inc.
 
(2) The difference between the number of shares beneficially owned prior to the
    offering and the shares to be sold in the offering is equal to the total
    number of shares of Mattson Common Stock to be held in escrow.
 
                                       15
<PAGE>
                              PLAN OF DISTRIBUTION
 
    We have been advised by the selling stockholders that they may sell all or a
portion of their shares of common stock. The selling stockholders plan to sell
on the Nasdaq National Market, or otherwise. The selling stockholders may sell
their shares (1) at prices and on terms prevailing at the time of sale, (2) at
prices related to the then current market price, or (3) in negotiated
transactions. The selling stockholders may sell one or more of the following
methods:
 
    - Block trades in which the broker or dealer so engaged will attempt to sell
      the Shares as agent, but may position and resell a portion of the block as
      principal to facilitate the transaction,
 
    - Purchases by a broker or dealer as principal and resale by such broker or
      dealer for its own account pursuant to this prospectus,
 
    - On over-the-counter distribution in accordance with the rules of the
      Nasdaq National Market,
 
    - Ordinary brokerage transactions and transactions in which the broker
      solicits purchasers, and
 
    - Privately negotiated transactions.
 
    There is no assurance that selling stockholders will offer or sell any or
all of their shares of common stock registered under this prospectus. An escrow
agent holds in escrow 89,514 of the shares of stock owned by the selling
stockholders. This escrow lasts until July 24, 1999, which is one year after the
closing of the acquisition of Concept. The escrow fund will secure
indemnification obligations in connection with the acquisition. Accordingly,
shares held in escrow are not available for sale at this time.
 
    In effecting sales, brokers or dealers engaged by the selling stockholders
may arrange for other brokers or dealers to participate. Brokers or dealers will
receive commissions or discounts from the selling stockholders in amounts to be
negotiated prior to the sale. Such brokers or dealers and any other
participating brokers or dealers may be deemed to be "underwriters" within the
meaning of the Securities Act in connection with such sales. We will pay all
expenses incident to the offering and sale to the public of shares by the
selling stockholders. We will not pay (1) underwriting commissions or similar
charges and (2) legal fees and disbursements of counsel for the selling
stockholders.
 
    We agreed with the selling stockholders to keep the registration statement
of which this prospectus constitutes a part effective until the earlier of:
 
    - Such time as each of the selling stockholders may sell all of the shares
      held by him, her or it without registration pursuant to Rule 144 under the
      Securities Act within a three-month period;
 
    - Such time as all of the shares have been sold by the selling stockholders,
      or
 
    - July 24, 1999, (one (1) year following the date that we closed the
      acquisition of Concept).
 
    We intend to de-register any of the shares not sold by the selling
stockholders at the end of such period. At such time, however, any unsold shares
may be freely tradable subject to compliance with Rule 144 of the Securities
Act.
 
                          DESCRIPTION OF CAPITAL STOCK
 
    Our authorized capital stock consists of 60,000,000 shares of common stock
and 2,000,000 shares of preferred stock. As of April 2, 1999, there were
15,489,022 shares of common stock and no shares of preferred stock outstanding.
 
    COMMON STOCK.  Subject to preferences that may be applicable to any
outstanding preferred stock, holders of common stock are entitled to receive
ratably such dividends as may be declared by the Board of Directors out of the
funds legally available therefor. Each holder of common stock is entitled to one
vote for each share held of record by such holder. If we liquidate, dissolve or
wind up the company, holders of
 
                                       16
<PAGE>
common stock are entitled to share ratably in all assets remaining after payment
of liabilities and the liquidation preference of any outstanding preferred
stock. The outstanding shares of common stock have no preemptive, subscription,
redemption or conversion rights. All of the outstanding shares of common stock
are, and the shares to be outstanding upon completion of this offering will be,
fully paid and nonassessable. The rights, preferences and privileges of the
holders of common stock are subject to, and may be adversely affected by, the
rights of the holders of any series of preferred stock which we may designate
and issue in the future.
 
    PREFERRED STOCK.  The Board of Directors is authorized, subject to any
limitations prescribed by law, to provide for the issuance of preferred stock in
series. By filing a certificate pursuant to the applicable law of the State of
Delaware, we may establish the number of shares to be included in each such
series, and to fix the designation, powers, preferences and rights of the shares
of each such series. The certificate filed in Delaware will also set any
qualifications, limitations or restrictions on any series of stock.
 
    DELAWARE LAW AND CERTAIN CHARTER PROVISIONS.  We are a Delaware corporation
and will be subject to Section 203 of the Delaware General Corporation Law (the
"Delaware Law"). In general, Section 203 of the Delaware Law prevents an
"interested stockholder" (defined generally as a person owning 15% or more of a
corporation's outstanding voting stock) from engaging in a "business
combination" (as defined in the Delaware Law) with a Delaware corporation for 3
years following the date such person became an interested stockholder. A
business combination may occur subject to certain exceptions. One exception
requires the approval of the board and the holders of at least two-thirds of the
outstanding shares of voting stock not owned by the interested stockholder. The
existence of this provision could have the effect of discouraging takeover
attempts, including attempts that might result in a premium over the market
price for the shares of common stock.
 
    Our certificate of incorporation and bylaws may limit the ability of
stockholders to change the size of the board of directors and to fill vacancies
on the board of directors. Our certificate of incorporation provides that any
action required or permitted to be taken by our stockholders may be taken only
at a duly called annual or special meeting of the stockholders. The certificate
of incorporation does not provide for cumulative voting in the election of
directors. The bylaws also establish procedures, including advance notice
procedures, with regard to the nomination, other than by or at the direction of
the Board of Directors, of candidates for elections as directors or for
stockholder proposals to be submitted at stockholder meetings. The amendment of
any of these provisions would require approval by holders of two-thirds or more
of the outstanding common stock.
 
    These and other provisions could have the effect of making it more difficult
to effect a change in the control of the board of directors. This may discourage
tender offers for our common stock, including offers at a premium over the
market price. These provisions also may result in a delay in changes in control
and of management. These provisions could have the effect of making it more
difficult for proposals favored by stockholders to be presented for stockholder
consideration.
 
    We have also included in our certificate of incorporation provisions to (1)
eliminate the personal liability of its directors for monetary damages resulting
from breaches of their fiduciary duty to the extent permitted by the Delaware
Law and (2) indemnify its directors and officers to the fullest extent permitted
by Section 145 of the Delaware Law.
 
    TRANSFER AGENT AND REGISTRATION.  The transfer agent and registrar for our
common stock is ChaseMellon Shareholder Services.
 
                                    EXPERTS
 
    The consolidated financial statements incorporated in this Prospectus by
reference to the Annual Report on Form 10-K of Mattson Technology, Inc. for the
year ended December 31, 1998 and the audited historical financial statements of
Concept Systems Design, Inc. as of June 30, 1998 and for the year then
 
                                       17
<PAGE>
ended incorporated in this prospectus by reference to the Form 8-K/A of Mattson
Technology, Inc. dated May 6, 1999 have been so incorporated in reliance on the
report of PricewaterhouseCoopers LLP, independent accountants, given on the
authority of said firm as experts in auditing and accounting.
 
    The financial statements of Concept Systems Design, Inc. as of June 30, 1997
and for the year then ended included in our Form 8-K/A dated May 6, 1999 have
been incorporated into our Form 8-K/A in reliance on the report of Arthur
Andersen LLP, independent public accountants, given on the authority of that
firm as experts in giving said reports.
 
                                       18
<PAGE>
    NO DEALER, SALESMAN OR ANY OTHER PERSON HAS BEEN AUTHORIZED TO GIVE ANY
INFORMATION OR TO MAKE ANY REPRESENTATIONS, OTHER THAN THOSE CONTAINED IN THIS
PROSPECTUS, IN CONNECTION WITH THE OFFER MADE BY THIS PROSPECTUS. IF GIVEN OR
MADE, SUCH INFORMATION OR REPRESENTATIONS MAY NOT BE RELIED UPON AS HAVING BEEN
AUTHORIZED BY THE COMPANY. THIS PROSPECTUS DOES NOT CONSTITUTE AN OFFER TO SELL
OR A SOLICITATION OF AN OFFER TO BUY ANY SECURITY OTHER THAN THE SECURITIES TO
WHICH THIS PROSPECTUS RELATES, OR AN OFFER IN ANY JURISDICTION IN WHICH SUCH
OFFER OR SOLICITATION IS NOT AUTHORIZED, OR TO ANY PERSON TO WHOM IT IS UNLAWFUL
TO MAKE SUCH OFFER OR SOLICITATION. NEITHER THE DELIVERY OF THIS PROSPECTUS NOR
ANY SALE OF SECURITIES HEREUNDER SHALL, UNDER ANY CIRCUMSTANCES, CREATE ANY
IMPLICATION THAT THERE HAS BEEN NO CHANGE IN THE AFFAIRS OF THE COMPANY SINCE
THE DATE HEREOF. THE INFORMATION CONTAINED HEREIN IS CORRECT AS OF ANY TIME
SUBSEQUENT TO THE DATE HEREOF.
 
                                       19
<PAGE>
                                    PART II
                     INFORMATION NOT REQUIRED IN PROSPECTUS
 
ITEM 14. OTHER EXPENSES OF ISSUANCE AND DISTRIBUTION.
 
    The following table sets forth the various expenses payable by us in
connection with the sale and distribution of the securities being registered.
All of the amounts shown are estimates except for the Securities and Exchange
Commission registration fee and the Nasdaq listing application fee.
 
<TABLE>
<CAPTION>
                                                                                    TO BE
                                                                                   PAID BY
                                                                                THE REGISTRANT
                                                                                --------------
<S>                                                                             <C>
Securities and Exchange Commission registration fee...........................    $    1,600
Nasdaq National Market additional shares listing application fee..............        17,500
Accounting fees and expenses..................................................        30,000
Printing expenses.............................................................         5,000
Transfer agent and registrar fees and expenses................................         5,000
Escrow Agent fees and expenses................................................        10,000
Legal fees and expenses.......................................................        20,000
Miscellaneous expenses........................................................         5,000
                                                                                     -------
    TOTAL.....................................................................        94,100
</TABLE>
 
ITEM 15. INDEMNIFICATION OF DIRECTORS AND OFFICERS.
 
    Section 145 of the Delaware General Corporation Law ("Delaware Law") permits
indemnification of officers, directors, and other corporate agents under certain
circumstances and subject to certain limitations. Our Certificate of
Incorporation and Bylaws provide that we shall indemnify our directors,
officers, employees, and agents to the full extent permitted by Delaware Law.
The Certificate of Incorporation and Bylaws further provide that we may
indemnify directors, officers, employees and agents in circumstances in which
indemnification is otherwise discretionary under Delaware law. In addition, we
entered into separate indemnification agreements with our directors and officers
which would require us, among other things, to indemnify them against certain
liabilities which may arise by reason of their status or service (other than
liabilities arising from willful misconduct of a culpable nature) and to
maintain directors' and officer's liability insurance, if available on
reasonable terms.
 
    These indemnification provisions may be sufficiently broad to permit
indemnification of the Registrant's officers and directors for liabilities
(including reimbursement of expenses incurred) arising under the Securities Act
of 1933, as amended.
 
    At present, there is no pending litigation or proceeding involving any of
our directors, officers, employees or other agents in which indemnification is
being sought. We are not aware of any threatened litigation that may result in a
claim for indemnification by any of our directors, officers, employees or other
agents.
 
                                      II-1
<PAGE>
ITEM 16. EXHIBITS.
 
    The following exhibits are filed with this Registration Statement:
 
<TABLE>
<CAPTION>
  EXHIBIT
  NUMBER                                                  EXHIBIT TITLE
- -----------  --------------------------------------------------------------------------------------------------------
<C>          <S>
 
       2.1*  Agreement and Plan of Reorganization among the Company, Concept Acquisition Corporation and Concept
             dated July 10, 1998.
 
       4.1   Registration Rights Agreement by and among the Company and the appointed representatives of the former
             shareholders of Concept.
 
       5.1   Legal opinion of Gray Cary Ware & Freidenrich LLP, counsel to the Registrant.
 
      23.1   Consent of PricewaterhouseCoopers LLP, independent accountants.
 
      23.2   Consent of Arthur Andersen LLP, independent public accountants.
 
      23.3   Consent of Gray Cary Ware & Freidenrich LLP (included in Exhibit 5.1 to this Registration Statement).
 
      24.1   Power of Attorney (included as page II-4).
</TABLE>
 
- ------------------------
 
*   Incorporated by reference to Exhibit 2.1 to the Company's Current Report on
    Form 8-K filed August 6, 1998.
 
ITEM 17. UNDERTAKINGS.
 
    The undersigned registrant hereby undertakes:
 
    1. To file, during any period in which offers or sales are being made, a
post-effective amendment to this registration statement:
 
        1.1 To include any prospectus required by Section 10(a)(3) of the
    Securities Act of 1933;
 
        1.2 To reflect in the prospectus any facts or events arising after the
    effective date of the registration statement (or the most recent
    post-effective amendment thereof) which, individually or in the aggregate,
    represent a fundamental change in the information set forth in the
    registration statement;
 
        1.3 To include any material information with respect to the plan of
    distribution not previously disclosed in the registration statement or any
    material change to such information in the registration statement.
 
PROVIDED, HOWEVER, that paragraphs 1(i) and 1(ii) do not apply if the
information required to be included in a post-effective amendment by those
paragraphs is contained in periodic reports filed by the registrant pursuant to
Section 13 or Section 15(d) of the Securities Exchange Act of 1934 that are
incorporated by reference in the registration statement.
 
    2. That for the purpose of determining any liability under the Securities
Act of 1933, each such post-effective amendment shall be deemed to be a new
registration statement relating to the securities offered therein, and the
offering of such securities at that time shall be deemed to be the initial bona
fide offering thereof.
 
    3. To remove from registration by means of a post-effective amendment any of
the securities being registered which remain unsold at the termination of the
offering.
 
    The undersigned registrant hereby undertakes that, for purposes of
determining any liability under the Securities Act of 1933, as amended, each
filing of the registrant's annual report pursuant to Section 13(a)
 
                                      II-2
<PAGE>
or Section 15(d) of the Securities Exchange Act of 1934, as amended (and, where
applicable, each filing of an employee benefit plan's annual report pursuant to
Section 15(d) of the Securities Exchange Act of 1934) that is incorporated by
reference in the registration statement shall be deemed to be a new registration
statement relating to the securities offered therein, and the offering of such
securities at that time shall be deemed to be the initial bona fide offering
thereof.
 
    Insofar as indemnification for liabilities arising under the Act may be
permitted to directors, officers, and controlling persons of the registrant
pursuant to the foregoing provisions, or otherwise, the registrant has been
advised that in the opinion of the Securities and Exchange Commission such
indemnification is against public policy as expressed in the Securities Act and
is, therefore, unenforceable. In the event that a claim for indemnification
against such liabilities (other than the payment by the registrant of expenses
incurred or paid by a director, officer, or controlling person of the registrant
in the successful defense of any action, suit, or proceeding) is asserted by
such director, officer, or controlling person in connection with the securities
being registered, the registrant will, unless in the opinion of its counsel the
matter has been settled by controlling precedent, submit to a court of
appropriate jurisdiction the question whether such indemnification by it is
against public policy as expressed in the Securities Act and will be governed by
the final adjudication of such issue.
 
    The undersigned registrant hereby undertakes that:
 
        (a) For purposes of determining any liability under the Securities Act,
    the information omitted from the form of prospectus filed as part of this
    registration statement in reliance upon Rule 430A and contained in a form of
    prospectus filed by the registrant pursuant to Rule 424(b)(1) or (4) or
    497(h) under the Securities Act shall be deemed to be part of this
    registration statement as of the time it was declared effective.
 
        (b) For the purpose of determining any liability under the Securities
    Act, each post-effective amendment that contains a form of prospectus shall
    be deemed to be a new registration statement relating to the securities
    offered therein, and the offering of such securities at that time shall be
    deemed to be the initial bona fide offering thereof.
 
                                      II-3
<PAGE>
                                   SIGNATURES
 
    Pursuant to the requirements of the Securities Act of 1933, the Registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-3 and has duly caused this Registration
Statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Fremont, State of California, on the 6th day of May,
1999.
 
                                MATTSON TECHNOLOGY, INC.
 
                                BY:               /S/ BRAD MATTSON
                                     -----------------------------------------
                                                    Brad Mattson
                                              CHIEF EXECUTIVE OFFICER
 
                               POWER OF ATTORNEY
 
    Each of the officers and directors of Mattson Technology, Inc. whose
signature appears below hereby constitutes and appoints Brad Mattson and Brian
McDonald his true and lawful attorneys and agents, with full power of
substitution, and with power to act alone, to sign on behalf of the undersigned
any amendment or amendments to this Registration Statement on Form S-3
(including post-effective amendments) and any and all new registration
statements filed pursuant to Rule 462 under the Securities Act of 1933, as
amended, and to perform any acts necessary to file such amendments or
registration statements, with exhibits thereto and other documents in connection
therewith, and each of the undersigned does hereby ratify and confirm his
signature as it may be signed by his said attorneys and agents to any and all
such documents and all that said attorneys and agents, or their substitutes,
shall do or cause to be done by virtue hereof.
 
    Pursuant to the requirements of the Securities Act of 1933, this
Registration Statement has been signed on May 6, 1999 by the following persons
in the capacities indicated.
 
          SIGNATURE                        TITLE
- ------------------------------  ---------------------------
 
       /s/ BRAD MATTSON         Chief Executive Officer and
- ------------------------------    Director
         Brad Mattson
 
      /s/ BRIAN MCDONALD        Vice President--Finance and
- ------------------------------    Chief Financial Officer
        Brian McDonald
 
    /s/ STEPHEN CIESINSKI       Director
- ------------------------------
      Stephen Ciesinski
 
       /s/ JOHN SAVAGE          Director
- ------------------------------
         John Savage
 
     /s/ SHIGERU NAKAYAMA       Director
- ------------------------------
       Shigeru Nakayama
 
      /s/ KENNETH SMITH         Director
- ------------------------------
        Kenneth Smith
 
    /s/ KENNETH KANNAPPAN       Director
- ------------------------------
      Kenneth Kannappan
 
                                      II-4
<PAGE>
                                 EXHIBIT INDEX
 
<TABLE>
<CAPTION>
  EXHIBIT
  NUMBER                                                  EXHIBIT TITLE
- -----------  --------------------------------------------------------------------------------------------------------
<C>          <S>
 
       2.1*  Agreement and Plan of Reorganization among the Company, Concept Acquisition Corporation and Concept
             dated July 10, 1998.
 
       4.1   Registration Rights Agreement by and among the Company and the appointed representatives of the former
             shareholders of Concept.
 
       5.1   Legal opinion of Gray Cary Ware & Freidenrich LLP, counsel to the Registrant.
 
      23.1   Consent of PricewaterhouseCoopers LLP, independent accountants.
 
      23.2   Consent of Arthur Andersen LLP, independent public accountants.
 
      23.3   Consent of Gray Cary Ware & Freidenrich LLP (included in Exhibit 5.1 to this Registration Statement).
 
      24.1   Power of Attorney (included as page II-4).
</TABLE>
 
- ------------------------
 
*   Incorporated by reference to Exhibit 2.1 to the Company's Current Report on
    Form 8-K filed August 6, 1998.

<PAGE>
                                                                     EXHIBIT 4.1
 
                         REGISTRATION RIGHTS AGREEMENT
 
    THIS REGISTRATION RIGHTS AGREEMENT is entered into as of July 24, 1998, by
and among Mattson Technology, Inc., a Delaware corporation (the "Company" or
"Mattson"), and David Eck and Dan White as representatives (the "Shareholder
Representatives") of the shareholders (the "Shareholders") of Concept Systems
Design, Inc., a California corporation ("Concept"). The Shareholders have
received certain rights to register shares of Mattson common stock (the "Rights
Holders") to be received upon the merger (the "Merger") of Concept Acquisition
Corporation, a California corporation and a wholly-owned subsidiary of Mattson
("Sub"), with and into Concept as set forth in the Agreement and Plan of
Reorganization dated July 10, 1998 (the "Merger Agreement") among Mattson,
Concept and Sub.
 
                                    RECITAL
 
    Pursuant to the terms of the Merger Agreement, the Company and the
Shareholder Representatives on behalf of the Shareholders desire to provide for
certain registration and other rights all as set forth herein.
 
                                   AGREEMENT
 
    NOW, THEREFORE, in consideration of the foregoing and of the mutual promises
and covenants contained herein, the parties agree as follows:
 
    1.  REGISTRATION RIGHTS.
 
        1.1  DEFINITIONS. As used in this Agreement, the following terms shall
    have the following respective meanings:
 
           (a)  The term "Commission" means the Securities and Exchange
       Commission.
 
           (b)  The terms "Holder" or "Holders" means any person or persons to
       whom Registrable Securities were originally issued.
 
           (c)  The terms "register," "registered" and "registration" refer to a
       registration effected by preparing and filing with the SEC a registration
       statement in compliance with the Securities Act of 1933, as amended (the
       "Securities Act"), and the declaration or ordering of the effectiveness
       of such registration statement.
 
           (d)  The term "Registrable Securities" means (i) all shares of the
       Company's Common Stock issued in connection with the Merger, but
       excluding shares of the Company's Common Stock issued in the Merger that
       have been sold or otherwise transferred by the Shareholders who initially
       received such shares in the Merger; (ii) all shares of capital stock
       issued in lieu of any of the stock referred to in clause (i) in any
       reorganization, which have not been sold to the public; and (iii) all
       shares of capital stock issued in respect of any of the stock referred to
       in clauses (i) or (ii) as a result of any stock split, stock dividend,
       recapitalization or the like, which have not been sold to the public.
 
        1.2  REQUIRED REGISTRATION.
 
           (a)  OBLIGATION OF THE COMPANY. Not later than (90) days after the
       Closing Date (as defined in the Merger Agreement), the Company shall (i)
       prepare and file with the Commission a registration statement on any form
       for which the Company then qualifies or which counsel for the Company
       shall deem appropriate and which form shall be available for the
       disposition of the Registrable Securities in accordance with the intended
       method or methods of disposition thereof, and (ii) use its best efforts
       to cause such registration statement to be declared effective by the
       Commission as soon as practicable thereafter, and shall use its best
       efforts to effect all such other registrations, qualifications and
       compliances (including, without limitation, the execution of an
       undertaking to file post-effective amendments, appropriate qualifications
       under the applicable
<PAGE>
       blue sky or other state securities laws and appropriate compliance with
       exemptive regulations issued under the Securities Act and any other
       governmental requirements or regulations) as would permit or facilitate
       the sale and distribution of all of the Registrable Securities; provided
       that the Company shall not be obligated to take any action to effect such
       registration, qualification or compliance pursuant to this subsection
       1.2:
 
               (i)  in any particular jurisdiction in which the Company would be
           required to execute a general qualification or compliance unless the
           Company is already subject to service in such jurisdiction and except
           as required by the Securities Act; or
 
               (ii)  after the Company has effected one such registration
           pursuant to this subsection 0 and such registration has been declared
           or ordered effective unless the Commission issues a stop order with
           respect thereto.
 
           (b)  EFFECTIVENESS; SUSPENSION RIGHT.
 
               (i)  The Company will use its best efforts to maintain the
           effectiveness of the registration statement and other applicable
           registrations, qualifications and compliances until the earlier of
           (A) such time as each of the Holders may sell all of the Registrable
           Securities held by him, her or it without registration pursuant to
           Rule 144 under the Securities Act within a three-month period, (B)
           such time as all of the Registrable Securities have been sold by the
           Holders or (C) one year after the closing of the Merger (the
           "Registration Effective Period"), and from time to time will amend or
           supplement the registration statement and the prospectus contained
           therein as and to the extent necessary to comply with the Securities
           Act, the Securities Exchange Act of 1934, as amended (the "Exchange
           Act") and any applicable state securities statute or regulation,
           subject to the following limitations and qualifications.
 
               (ii)  Following the date the registration statement is first
           declared effective, the Holders will be permitted, subject to the
           Suspension Right (as defined in paragraph (iii) below), to offer and
           sell Registerable Securities during the Registration Effective Period
           in the manner described in the registration statement provided that
           the registration statement remains effective and has not been
           suspended.
 
               (iii)  Notwithstanding any other provision of this Section 1.2,
           the Company shall have the right to require that all Holders suspend
           further open market offers and sales of Registerable Securities
           whenever, and for so long as, in the reasonable judgment of the
           Company after consultation with counsel, the Company possesses or the
           Company is aware another party possesses material undisclosed
           information with respect to the Company or the Company has knowledge
           of or the Company is aware of another party which has knowledge of
           events involving material undisclosed information regarding the
           Company (the "Suspension Right"). In the event the Company exercises
           the Suspension Right, such suspension will continue for the period of
           time necessary for disclosure to occur at a time that is not
           detrimental to the Company and its stockholders (including the
           Shareholders after the closing of the Merger) or until such time as
           the information or event is no longer material, each as determined in
           good faith by the Company after consultation with counsel. The
           Company will promptly give the Holders notice of any such suspension
           and will use all reasonable efforts to minimize the length of the
           suspension.
 
           (c)  EXPENSES. The costs and expenses to be borne by the Company for
       purposes of this Section 1.2 shall include, without limitation, printing
       expenses, legal fees and disbursements of counsel for the Company, "blue
       sky" expenses, accounting fees and filing fees, but shall not include
       underwriting commissions or similar charges.
 
        1.3  INDEMNIFICATION.
 
                                       2
<PAGE>
           (a)  The Company will indemnify each Holder, each of its officers and
       directors and partners, and each person controlling such person within
       the meaning of Section 15 of the Securities Act, with respect to which
       registration, qualification or compliance has been effected pursuant to
       this Section 1, and each underwriter, if any, and each person who
       controls any underwriter within the meaning of Section 15 of the
       Securities Act, against all expenses, claims, losses, damages or
       liabilities (or actions in respect thereof), including any of the
       foregoing incurred in settlement of any litigation, commenced or
       threatened, arising out of or based on any untrue statement (or alleged
       untrue statement) by the Company of a material fact contained in any
       registration statement, prospectus, offering circular or other document,
       or any amendment or supplement thereto, incident to any such
       registration, qualification or compliance, or based on any omission (or
       alleged omission) to state therein a material fact required to be stated
       therein or necessary to make the statements therein, in light of the
       circumstances in which they were made, not misleading, or any violation
       by the Company of the Securities Act or any rule or regulation
       promulgated under the Securities Act applicable to the Company in
       connection with any such registration, qualification or compliance
       pursuant to the Securities Act or any state securities laws, rules or
       regulations, and the Company will reimburse each such Holder, each of its
       officers and directors, and each person controlling such Holder, each
       such underwriter and each person who controls any such underwriter, for
       any legal and any other expenses reasonably incurred in connection with
       investigating, preparing or defending any such claim, loss, damage,
       liability or action, provided that the Company will not be liable to any
       such person in any such case to the extent that any such claim, loss,
       damage, liability or expense arises out of or is based on any untrue
       statement or omission (or alleged untrue statement or omission), made in
       reliance upon and in conformity with written information furnished to the
       Company by an instrument duly executed by such Holder, controlling person
       or underwriter and stated to be specifically for use therein or the
       preparation thereby.
 
           (b)  Each Holder will, if Registrable Securities held by such Holder
       are included in the securities as to which such registration,
       qualification or compliance is being effected, indemnify the Company,
       each of its directors and officers, each underwriter, if any, of the
       Company's securities covered by such a registration statement, each
       person who controls the Company or such underwriter within the meaning of
       Section 15 of the Securities Act, and each other such Holder, each of its
       officers and directors and each person controlling such Holder within the
       meaning of Section 15 of the Securities Act, against all claims, losses,
       damages and liabilities (or actions in respect thereof) arising out of
       any untrue statement (or alleged untrue statement) of a material fact
       contained in any such registration statement, prospectus, offering
       circular or other document, or any omission (or alleged omission) to
       state therein a material fact required to be stated therein or necessary
       to make the statements therein not misleading, and will reimburse the
       Company, such Holder, such directors, officers, persons, underwriters or
       control persons for any legal or any other expenses reasonably incurred
       in connection with investigating, preparing or defending any such claim,
       loss, damage, liability or action, in each case to the extent, but only
       to the extent, that such untrue statement (or alleged untrue statement)
       or omission (or alleged omission) is made in such registration statement,
       prospectus, offering circular or other document in reliance upon and in
       conformity with written information furnished to the Company by an
       instrument duly executed by such Holder and stated to be specifically for
       use therein or the preparation thereby.
 
           (c)  Each party entitled to indemnification under this Section 0 (the
       "Indemnified Party") shall give notice to the party required to provide
       indemnification (the "Indemnifying Party") promptly after such
       Indemnified Party has actual knowledge of any claim as to which indemnity
       may be sought, and shall permit the Indemnifying Party to assume the
       defense of any such claim or any litigation resulting therefrom, provided
       that counsel for the Indemnifying Party, who shall conduct the defense of
       such claim or litigation, shall be approved by the Indemnified Party
 
                                       3
<PAGE>
       (whose approval shall not unreasonably be withheld), and the Indemnified
       Party may participate in such defense at such party's expense, and
       provided further that the failure of any Indemnified Party to give notice
       as provided herein shall not relieve the Indemnifying Party of its
       obligations under this Section 1 unless the failure to give such notice
       is materially prejudicial to an Indemnifying Party's ability to defend
       such action and provided further, that the Indemnifying Party shall not
       assume the defense for matters as to which there is a conflict of
       interest or separate and different defenses. No Indemnifying Party, in
       the defense of any such claim or litigation, shall, except with the
       consent of each Indemnified Party, consent to entry of any judgment or
       enter into any settlement which does not include as an unconditional term
       thereof the giving by the claimant or plaintiff to such Indemnified Party
       of a release from all liability in respect to such claim or litigation.
 
           (d)  To the extent that the indemnification provided for in this
       Section 1.3 is held by a court of competent jurisdiction to be
       unavailable to an Indemnified Party with respect to any loss, liability,
       claim, damage or expense referred to herein, then the Indemnifying Party,
       in lieu of indemnifying such Indemnified Party hereunder, shall
       contribute to the amount paid or payable by such Indemnified Party as a
       result of such loss, liability, claim, damage or expense in such
       proportion as is appropriate to reflect the relative fault of the
       Indemnifying Party on the one hand and of the Indemnified Party on the
       other in connection with the statements or omissions which resulted in
       such loss, liability, claim, damage or expense, as well as any other
       relevant equitable considerations. The relative fault of the Indemnifying
       Party and of the Indemnified Party shall be determined by reference to,
       among other things, whether the untrue or alleged untrue statement of a
       material fact or the omission or alleged omission to state a material
       fact relates to information supplied by the Indemnifying Party or by the
       Indemnified Party and the parties' relative intent, knowledge, access to
       information and opportunity to correct or prevent such statement or
       omission.
 
        1.4  RULE 144 REPORTING. With a view to making available to Holders the
    benefits of Rule 144 promulgated by the Commission under the Securities Act,
    the Company agrees to use its best efforts to:
 
           (a)  make and keep adequate current public information with respect
       to the Company available, as those terms are used in Rule 144 under the
       Securities Act, at all times after the Closing Date (as defined in the
       Merger Agreement);
 
           (b)  file with the Commission in a timely manner all reports and
       other documents required of the Company under the Securities Exchange Act
       of 1934, as amended (the "Exchange Act"); and
 
           (c)  furnish to Holders promptly upon request a written statement by
       the Company as to its compliance with the reporting requirements of Rule
       144 and the Exchange Act, a copy of the most recent annual or quarterly
       report of the Company, and such other reports and documents of the
       Company as any Holder may reasonably request in order to permit such
       Holder to avail itself of any rule or regulation of the Commission
       allowing such Holder to sell its Company Common Stock without
       registration.
 
        1.5  ASSIGNMENT OF REGISTRATION RIGHTS. The rights to cause the Company
    to register Registrable Securities pursuant to this Section 1 may not be
    assigned by a Holder.
 
                                       4
<PAGE>
    2.  GENERAL.
 
        2.1  WAIVERS AND AMENDMENTS. With the written consent of the record or
    beneficial holders of at least a majority of the Registrable Securities, the
    obligations of the Company and the rights of the Holders of the Registrable
    Securities under this Agreement may be waived (either generally or in a
    particular instance, either retroactively or prospectively, and either for a
    specified period of time or indefinitely), and with the same consent the
    Company, when authorized by resolution of its Board of Directors, may enter
    into a supplementary agreement for the purpose of adding any provisions to
    or changing in any manner or eliminating any of the provisions of this
    Agreement; provided, however, that no such modification, amendment or waiver
    shall reduce the aforesaid percentage of Registrable Securities without the
    consent of all of the Holders of the Registrable Securities. Upon the
    effectuation of each such waiver, consent, agreement of amendment or
    modification, the Company shall promptly give written notice thereof to the
    record holders of the Registrable Securities who have not previously
    consented thereto in writing. This Agreement or any provision hereof may be
    changed, waived, discharged or terminated only by a statement in writing
    signed by the party against which enforcement of the change, waiver,
    discharge or termination is sought, except to the extent provided in this
    Section 2.0.
 
        2.2  GOVERNING LAW. This Agreement shall be governed in all respects by
    the laws of the State of California as such laws are applied to agreements
    between California residents entered into and to be performed entirely
    within California.
 
        2.3  SUCCESSORS AND ASSIGNS. Except as otherwise expressly provided
    herein, the provisions hereof shall inure to the benefit of, and be binding
    upon, the successors, assigns, heirs, executors and administrators of the
    parties hereto.
 
        2.4  ENTIRE AGREEMENT. This Agreement and the other documents delivered
    pursuant hereto constitute the full and entire understanding and agreement
    between the parties with regard to the subjects hereof and thereof, and this
    Agreement shall supersede and cancel all prior agreements between the
    parties hereto with regard to the subject matter hereof.
 
        2.5  NOTICES, ETC. All notices and other communications required or
    permitted hereunder shall be in writing and shall be effective upon personal
    delivery or three (3) business days after mailing by first class mail,
    postage prepaid, certified or registered mail, return receipt requested,
    addressed (a) if to any Holder, at such Holder's address listed in the
    Company's records, or (b) if to the Company, at 3550 West Warren Avenue,
    Fremont, California 94538, Attention: Brad Mattson or at such other address
    as the Company shall have furnished to the Holder in writing.
 
        2.6  SEVERABILITY. In case any provision of this Agreement shall be
    invalid, illegal, or unenforceable, the validity, legality and
    enforceability of the remaining provisions of this Agreement shall not in
    any way be affected or impaired thereby.
 
        2.7  TITLES AND SUBTITLES. The titles of the sections and subsections of
    this Agreement are for convenience of reference only and are not to be
    considered in construing this Agreement.
 
        2.8  COUNTERPARTS. This Agreement may be executed in any number of
    counterparts, each of which shall be an original, but all of which together
    shall constitute one instrument.
 
                                       5
<PAGE>
    IN WITNESS WHEREOF, the parties hereby have executed this Agreement on the
date first above written.
 
<TABLE>
<S>                             <C>  <C>
                                COMPANY:
                                MATTSON TECHNOLOGY, INC.
 
                                By:               /s/ BRAD MATTSON
                                     -----------------------------------------
                                     Its: Chairman and Chief Executive Officer
 
                                SHAREHOLDER REPRESENTATIVES:
 
                                By:                /s/ DAVID ECK
                                     -----------------------------------------
                                              Printed Name: David Eck
 
                                By:                /s/ DAN WHITE
                                     -----------------------------------------
                                              Printed Name: Dan White
</TABLE>
 
               [SIGNATURE PAGE TO REGISTRATION RIGHTS AGREEMENT]
 
                                       6

<PAGE>
                                                                     EXHIBIT 5.1
 
May 3, 1999
 
Securities and Exchange Commission
450 Fifth Street, N.W.
Washington, D.C. 20549
 
    Re: MATTSON TECHNOLOGY, INC.
      REGISTRATION STATEMENT ON FORM S-3
 
Ladies and Gentlemen:
 
    As legal counsel for Mattson Technology, Inc., a Delaware corporation (the
"Company"), we are rendering this opinion in connection with the preparation and
filing of a registration statement on Form S-3 (the "Registration Statement")
relating to the registration under the Securities Act of 1933, as amended, of
795,136 shares of Common Stock, par value $0.001 per share (the "Common Stock")
issued to the selling stockholders by the Company in connection with that
certain Agreement and Plan of Merger dated July 24, 1998 by and among the
Company, Concept Acquisition Corporation, a Delaware corporation, and Concept
Systems Design, Inc., a California corporation.
 
    We have examined such instruments, documents and records as we deemed
relevant and necessary for the basis of our opinion hereinafter expressed. In
such examination, we have assumed the genuineness of all signatures and the
authenticity of all documents submitted to us as originals and the conformity to
the originals of all documents submitted to us as copies.
 
    Based on such examination, we are of the opinion that the 795,136 shares of
Common Stock of the Company being registered pursuant to the Registration
Statement and to be sold by the selling stockholders are duly authorized shares
of Common Stock and are validly issued, fully paid and nonassessable.
 
    We hereby consent to the filing of this opinion as an exhibit to the
Registration Statement referred to above and the use of our name wherever it
appears in said Registration Statement.
 
    This opinion is to be used only in connection with the issuance of the
Common Stock while the Registration Statement is in effect.
 
                                          Respectfully submitted,
 
                                          /s/ Gray Cary Ware & Freidenrich
                                          --------------------------------------
                                          GRAY CARY WARE & FREIDENRICH LLP

<PAGE>
                                                                    EXHIBIT 23.1
 
                       CONSENT OF INDEPENDENT ACCOUNTANTS
 
    We hereby consent to the incorporation by reference in the Prospectus
constituting part of this Registration Statement on Form S-3 of our report dated
February 9, 1999 which appears on page 45 of Mattson Technology, Inc.'s Annual
Report on Form 10-K for the year ended December 31, 1998. We also consent to the
incorporation by reference of our report dated April 15, 1999 which appears on
page 14 of Mattson Technology, Inc.'s Current Report on Form 8-K/A filed May 6,
1999 relating to the financial statements of Concept Systems Design, Inc. as of
and for the year ended June 30, 1998. We also consent to the reference to us
under the heading "Experts" in such Prospectus.
 
/S/ PRICEWATERHOUSECOOPERS LLP
 
San Jose, California
May 3, 1999

<PAGE>
                                                                    EXHIBIT 23.2
 
         CONSENT OF ARTHUR ANDERSEN LLP, INDEPENDENT PUBLIC ACCOUNTANTS
 
    As independent public accountants, we hereby consent to the incorporation by
reference in this registration statement of our report on the financial
statements of Concept Systems Design, Inc. dated September 4, 1997 appearing on
page 15 of Mattson Technology, Inc.'s Report on Form 8-K/A dated May 6, 1999. We
also consent to the reference to us under the heading "Experts" in such
Prospectus.
 
/S/ ARTHUR ANDERSEN LLP
 
San Jose, California
May 3, 1999


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