MATTSON TECHNOLOGY INC
SC 13D, EX-99, 2001-01-11
SPECIAL INDUSTRY MACHINERY, NEC
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                                                                  EXHIBIT 2



           AMENDMENT TO STRATEGIC BUSINESS COMBINATION AGREEMENT


         THIS AMENDMENT TO STRATEGIC BUSINESS COMBINATION AGREEMENT (this
"AMENDMENT"), dated as of December 15, 2000, is entered into by and among
STEAG Electronic Systems AG, an Aktiengesellschaft organized and existing
under the laws of the Federal Republic of Germany ("STEAG"), and Mattson
Technology, Inc., a Delaware corporation ("MATTSON").

                                  RECITALS

         A. Mattson and STEAG have entered into that certain Strategic
Business Combination Agreement, dated as of June 27, 2000 (the
"Agreement"), pursuant to which Mattson will directly or indirectly acquire
100% of the issued and outstanding capital stock, equity ownership or its
equivalent of the STEAG Subsidiaries (as defined in the Agreement).

         B. STEAG and Mattson desire to amend the Agreement as set forth
below in order to effect certain changes in the structure and consideration
of the transactions contemplated thereby and to implement certain other
modifications and clarifications.

         NOW, THEREFORE, in consideration of the covenants and
representations set forth herein, and for other good and valuable
consideration, STEAG and Mattson agree as follows:

         1. DEFINED TERMS. Capitalized terms used but not otherwise defined
in this Amendment shall have the respective meanings ascribed to such terms
in the Agreement.

         2. RECITALS. Recitals A, B and C of the Agreement are hereby
deleted and replaced in their entirety by the following:

                  "A. STEAG and Mattson desire to enter into a transaction
         pursuant to which Mattson will directly or indirectly acquire 100%
         of the issued and outstanding capital stock, equity ownership or
         its equivalent (which, for purposes of this Agreement, shall be
         referred to as "capital stock") (the "STOCK ACQUISITION") of the
         STEAG subsidiaries listed on EXHIBIT A to this Agreement, STEAG
         Electronic Systems Semiconductor GmbH, a Gesellschaft mit
         beschraenkter Haftung recently organized in connection with this
         Agreement and existing under the laws of the Federal Republic of
         Germany ("NEWCO"), and STEAG Electronic Systems Semiconductor,
         Inc., a corporation to be organized in connection with this
         Agreement under the laws of the State of Delaware ("U.S. Newco")
         (collectively, the subsidiaries listed on EXHIBIT A, Newco and
         U.S. Newco, the "STEAG SUBSIDIARIES").

                  B. Prior to the Closing (as defined below), STEAG will
         contribute, assign or otherwise transfer (i) all of the capital
         stock it owns directly in of each of those STEAG Subsidiaries
         incorporated or organized in jurisdictions other than the U.S.A.
         and Germany to Newco (collectively, all such subsidiaries of STEAG
         that STEAG contributes or transfers to Newco, the "FOREIGN STEAG
         Subsidiaries," and such directly-owned capital stock, the "FOREIGN
         SUBSIDIARY SHARES"), after which STEAG will own 100% of the
         capital stock of Newco, and (ii) all of the capital stock it owns
         directly in each of those STEAG Subsidiaries incorporated in the
         U.S.A. (the "U.S. STEAG SUBSIDIARIES," and such capital stock, the
         "U.S. SUBSIDIARY SHARES") to U.S. Newco, after which STEAG will
         own 100% of the capital stock of U.S. Newco.

                  C. To effect the Stock Acquisition, at the Closing, STEAG
         will sell, assign and transfer to Mattson 100% of the issued and
         outstanding capital stock of U.S. Newco, and will sell, assign and
         transfer to Mattson (or, at Mattson's election, to a wholly owned
         subsidiary of Mattson) 100% of the issued and outstanding capital
         stock of Newco and each of the other STEAG Subsidiaries organized
         and existing under the laws of the Federal Republic of Germany
         (the "DIRECT STEAG SUBSIDIARIES," and such capital stock, the
         "DIRECT SUBSIDIARY SHARES"), and in consideration thereof Mattson
         will issue and deliver to STEAG shares of Mattson's common stock,
         par value $0.001 per share (the "MATTSON COMMON Stock"), as
         provided in Article II below (the "SHARE ISSUANCE"; together, the
         Stock Acquisition and the Share Issuance are referred to herein as
         the "STRATEGIC BUSINESS COMBINATION")."

         3. CAPITALIZATION OF NEWCO AND U.S. NEWCO. The caption to Article
1 of the Agreement is hereby amended by adding at the end thereof the
words: "AND U.S. NEWCO".

         4. TRANSFER OF FOREIGN SUBSIDIARY SHARES TO NEWCO. Section 1.1 is
hereby amended: (x) by adding at the end of the parenthetical in clause (b)
thereof the following: "and expenses incidental to its formation and the
transfer to it of the Foreign Subsidiary Shares"; and (y) by deleting from
clause (c) thereof the ending parenthetical and replacing it with the
following: "(the "NEWCO SHARES")".

         5. TRANSFER OF U.S. SUBSIDIARY SHARES TO U.S. NEWCO. A new Section
1.2 is hereby added to the Agreement, the text of which shall be as
follows:

                  "1.2 TRANSFER OF U.S. SUBSIDIARY SHARES TO U.S. NEWCO.
         Not later than five (5) days prior to the Closing, (a) STEAG will
         form U.S. Newco, all of the shares of which shall be owned
         initially and until the Closing by STEAG, and (b) STEAG will
         transfer and deliver to U.S. Newco, by means of capital
         contribution, all of the issued and outstanding shares of capital
         stock of (i) STEAG RTP Systems, Inc., (ii) STEAG Electronic
         Systems, Inc., and (iii) STEAG Cutek, Inc. The transactions
         described in this Section 1.2 will be effected in such manner that
         (a) U.S. Newco will own all of the outstanding shares of capital
         stock of the U.S. STEAG Subsidiaries, (b) U.S. Newco will have no
         other assets or liabilities (other than its initial $100 cash
         capitalization and expenses incidental to its formation and the
         transfer to it of the U.S. STEAG Subsidiaries), and (c) STEAG will
         own 100% of the issued and outstanding capital stock of U.S. Newco
         (the "U.S. NEWCO SHARES" and, together with the Newco Shares and
         the Direct Subsidiary Shares, the "STEAG SHARES")."

         6. PURCHASE AND SALE OF STOCK. Section 2.1 of the Agreement is
hereby amended: (x) by adding immediately prior to the period in the first
sentence thereof the following clause "; PROVIDED, that at the election of
Mattson, Mattson may designate an indirect, wholly owned subsidiary of
Mattson organized and existing under the laws of the Federal Republic of
Germany ("Mattson Germany"), by written notice to STEAG given at least 5
days prior to the Closing (which notice shall state the name and registered
seat of Mattson Germany and such other information as shall be necessary to
effect the transfers in accordance with German law), to accept the delivery
of the Newco Shares and the Direct Subsidiary Shares from STEAG, and
following such notice STEAG shall transfer, and deliver the Newco Shares
and the Direct Subsidiary Shares to Mattson Germany; PROVIDED, FURTHER,
that such election shall not relieve Mattson of its obligations under the
next sentence of this Section 2.1 or under any other provision of this
Agreement"; and (y) by deleting part (iii) of clause (a) thereof and
replacing it in its entirety by the following clause: "(iii) the Mattson
Secured Note referred to in Section 6.13(c) of this Agreement".

         7. ASSUMED OBLIGATIONS OF STEAG. (a) Section 2.3 of the Agreement
is hereby amended by inserting between the first and second sentence
thereof the following two new sentences:

     "Without limiting the foregoing, the assumption by Mattson of STEAG's
     guarantee obligations (a) under currency exchange rate forward
     contracts (subject to Section 6.13(d) below), (b) under the (Y)
     500,000,000 credit line described in Section 6.21 below, and (c) for
     deposits made under customer contracts (totaling as of the date
     hereof, and not to exceed, DM 1,725,000 with respect to STEAG RTP
     Systems GmbH and DM 3,947,000 with respect to STEAG MicroTech GmbH)
     will be secured, as of the Closing Date with respect to the forward
     contracts and the credit line, and as of the date which is 6 months
     after the Closing Date with respect to the customer contracts, by one
     or more stand-by letters of credit or bank guarantees from a mutually
     acceptable bank in form and substance reasonably satisfactory to
     STEAG, or such other form of security as may be reasonably acceptable
     to STEAG; PROVIDED, that the obligation of Mattson to provide any such
     stand-by letter of credit or bank guarantee shall terminate at such
     time as Mattson obtains from the applicable third-party a full release
     of STEAG's obligations, in form and substance reasonably satisfactory
     to STEAG. To the extent that STEAG has not been released from any of
     the assumed obligations as a matter of law, whether due to the absence
     of a third party consent or otherwise, Mattson will indemnify STEAG in
     accordance with Section 9.1(c).".

                  (b) Schedule 2.3 is hereby deleted and replaced in its
entirety by Schedule 2.3A attached to this Amendment, and all references in
the Agreement to Schedule 2.3 shall be deemed to refer to such Schedule
2.3A.

         8. CLOSING. Section 2.4 of the Agreement is hereby amended by
adding immediately prior to the period in the first sentence thereof the
following clause: "; PROVIDED, that the parties may elect to specify that
the Closing will be deemed to take place at the time which is both 24:00
hours on December 31, 2000 and 0:00 on January 1, 2001".

         9. ALLOCATION OF PURCHASE PRICE. Section 2.6 of the Agreement is
hereby amended by deleting the first sentence thereof and replacing it with
the following sentence:

         "STEAG and Mattson agree to allocate the value of (i) the Newco
         Shares among the Foreign STEAG Subsidiaries, (ii) the U.S. Newco
         Shares among the U.S. STEAG Subsidiaries and (iii) the Mattson
         Shares among the Direct STEAG Subsidiaries, Newco and U.S. Newco
         for financial accounting and tax purposes in accordance with the
         percentages set forth on the allocation schedule attached as
         SCHEDULE 2.6 attached hereto.",

by deleting in the second sentence thereof the words "Mattson Shares and
Newco Shares" and replacing them with the words "Mattson Shares, Newco
Shares and U.S. Newco Shares", and by deleting the words "Direct Subsidiary
Shares" in the last sentence thereof and replacing them with the words
"Foreign Subsidiary Shares".

         10. EARLY CONDITION SATISFACTION DATE. Section 2.8 of the
Agreement is hereby amended by deleting from clause (i) of the introductory
paragraph thereof the words: "prior to December 1, 2000," and by deleting
from the end of the second to last paragraph thereof the words "January 1,
2001" and replacing them with the words "24:00/0:00 hours on December 31,
2000/January 1, 2001".

         11. POST-CLOSING ADJUSTMENTS. Section 2.9 of the Agreement is
hereby deleted and replaced in its entirety by the following:

         "2.9 POST-CLOSING ADJUSTMENTS. The following adjustments will be
     made with regard to the profits and losses of the STEAG Subsidiaries
     following the Closing:

         (a) As promptly as practicable, but in no event more than 60 days
     following the Closing Date, Mattson shall prepare and deliver to STEAG
     (i) audited income statements of STEAG RTP Systems GmbH and STEAG
     MicroTech GmbH for the 10 months ended October 31, 2000 (the "October
     Income Statements"), and (ii) audited income statements of STEAG RTP
     Systems GmbH and STEAG MicroTech GmbH for the year ended December 31,
     2000 (the "Year 2000 Income Statements" and, together with the October
     Income Statements, the "Closing Financial Statements"). The Closing
     Financial Statements shall be prepared in accordance with German GAAP
     (as defined in Section 3.5) applied on a basis consistent with the
     accounting principles used in preparation of the income statements for
     STEAG RTP Systems GmbH and STEAG MicroTech GmbH referred to in Section
     3.5(a), except, in the case of the October Income Statements, for such
     differences as are appropriate for interim financial statements. The
     Closing Financial Statements shall be audited by
     PricewaterhouseCoopers ("PWC"), using procedures and methods
     consistent with past practice; PROVIDED that Mattson's auditors,
     Arthur Andersen ("AA"), shall be permitted to participate in such
     audits. STEAG will make available such STEAG employees who are
     reasonably necessary for the preparation of the Closing Financial
     Statements, using the books and records of the STEAG Subsidiaries, to
     assist Mattson in preparing the Closing Financial Statements.

         (b) Unless within 10 business days after its receipt of the
     Closing Financial Statements, STEAG delivers to Mattson a detailed
     written statement describing its objections to the October Income
     Statements or the Year 2000 Income Statements, such Closing Financial
     Statements shall be final and binding. If STEAG delivers such a
     written objection statement to Mattson, the parties and their
     respective auditors will use reasonable efforts to resolve any
     disputes, but if a final resolution is not reached within 20 business
     days after STEAG has submitted its objections, any remaining disputes
     will be resolved by an internationally recognized firm of independent
     certified public accountants (excluding PWC and AA) mutually selected
     by Mattson and STEAG or, if they are unable to agree, by PWC and AA
     (the "Reviewing Accountants"). The Reviewing Accountants shall be
     instructed to resolve any matters in dispute as promptly as
     practicable and, in any event, within 30 days after the dispute is
     submitted to them. The determination of the Reviewing Accountants will
     be final and binding. Mattson and STEAG will each pay one-half of the
     fees and expenses of the Reviewing Accountants. Mattson and STEAG
     shall cooperate with each other and the Reviewing Accountants in
     connection with the matters contemplated by this Section 2.9,
     including by furnishing such information and access to such books,
     records (including accountants' work papers), personnel and properties
     as may be reasonably requested.

         (c) The parties agree that the estimated aggregate pre-tax profits
     for STEAG RTP Systems GmbH and STEAG MicroTech GmbH for the year
     ending December 31, 2000 are DM 30.7 million (the "Year 2000 Profit
     Estimate"), based on the assumptions that (i) the aggregate pre-tax
     profits for such companies for the 10 months ended October 31, 2000
     were as set forth in Part A of Schedule 2.9, and (ii) the reserve
     adjustment set forth in Part B of Schedule 2.9 will be made in fiscal
     2000 after October 31, 2000. If the actual aggregate pre-tax profits
     for STEAG RTP Systems GmbH and STEAG MicroTech GmbH for the 10 months
     ended October 31, 2000, as set forth in the October Income Statements,
     are greater than or less than the amount set forth in Part A of
     Schedule 2.9, then the Year 2000 Profit Estimate shall be adjusted up
     or down, as the case may be, by the amount of the difference. Any
     dispute as to the need for such an adjustment or the amount thereof
     shall be resolved in the manner provided in Section 2.9(b).

         (d) Within 5 business days after the Closing Financial Statements
     (and any adjustment to the Year 2000 Profit Estimate) become final, in
     accordance with the Profit Transfer Contracts (as defined in Section
     3.5(c)), Mattson will cause each of STEAG RTP Systems GmbH and STEAG
     MicroTech GmbH to transfer its profit for fiscal year 2000 to STEAG.
     If the aggregate payments to STEAG pursuant to the preceding sentence
     are less than the Year 2000 Profit Estimate (as adjusted, if
     necessary), then, concurrently with the profit payments required by
     the preceding sentence, Mattson will make a cash payment, by wire
     transfer to an account designated in writing by STEAG, equal to the
     difference between such aggregate profit payments and the Year 2000
     Profit Estimate. If the aggregate payments to STEAG pursuant to the
     first sentence of this paragraph are more than the Year 2000 Profit
     Estimate (as adjusted, if necessary), then, within 10 business days
     after receipt of such payments, STEAG will make a cash payment, by
     wire transfer to an account designated in writing by Mattson, equal to
     the difference between such aggregate profit payments and the Year
     2000 Profit Estimate."

         For the avoidance of doubt, neither party shall be required to
make any payment based on the aggregate cash balances of the combined STEAG
Subsidiaries.

         12. TRANSFER OF U.S. STEAG SUBSIDIARIES TO U.S. NEWCO. Section
2.10 of the Agreement is hereby deleted in its entirety.

         13. DUE INCORPORATION. Section 3.1(b) of the Agreement is hereby
amended by deleting the last sentence thereof and replacing it with the
following sentence:

     "At the Closing, (i) Mattson will receive good and valid title to
     shares or other units of capital stock representing one hundred
     percent (100%) of the equity ownership interest of U.S. Newco, Newco,
     and each Direct STEAG Subsidiary; (ii) U.S. Newco will hold good and
     valid title to each U.S. STEAG Subsidiary; and (iii) Newco will hold
     good and valid title to each Foreign STEAG Subsidiary, free and clear
     of any Encumbrances."

         14. NON-CONTRAVENTION/CONSENTS AND APPROVALS. Subsection (iii) of
Section 3.3(b) of the Agreement is hereby amended by deleting the words
"Direct Subsidiary Shares" and replacing them with the words "Foreign
Subsidiary Shares".

         15. CONDUCT OF BUSINESS OF STEAG SUBSIDIARIES FOLLOWING THE STEAG
EARLY CONDITION SATISFACTION DATE. A new Section 5.5 is hereby added to the
Agreement, the text of which shall be as follows:

         "5.5 CONDUCT OF BUSINESS OF STEAG SUBSIDIARIES FOLLOWING THE STEAG
     EARLY CONDITION SATISFACTION Date. During the period between the STEAG
     Early Condition Satisfaction Date and the Closing, STEAG shall use its
     reasonable efforts to cause the STEAG Subsidiaries to comply with
     policies, procedures and directives of the proposed management team
     designated by the Integration Committee (as defined in Section 6.3 of
     this Agreement). Notwithstanding the foregoing, neither STEAG, any
     STEAG Subsidiary nor any officer, director or employee of any STEAG
     Subsidiary shall be required to take any action pursuant to the
     preceding sentence if: (a) such action would breach, violate or
     conflict with any of STEAG's representations, warranties, covenants or
     obligations under any other provision of this Agreement or the
     transactions contemplated hereby; (b) such action would cause STEAG,
     any STEAG Subsidiary or any of their respective officers, directors or
     employees to violate any law, applicable regulation or binding
     agreement; (c) such action would require the consent of Mattson under
     Section 5.1 of this Agreement, unless such action has received the
     prior written consent of STEAG as well as Mattson (for the avoidance
     of doubt, but without limiting the foregoing, any action to close down
     any facility or business unit shall require such consent); or (d) such
     action would reasonably be expected to result in expense, loss or
     damage to STEAG or would otherwise adversely affect STEAG or any of
     its officers or directors (other than by reducing the profits or net
     assets of any of the STEAG SUBSIDIARIES). Notwithstanding the previous
     sentence, the parties agree that, following the STEAG Early Condition
     Satisfaction Date, the proposed management team designated by the
     Integration Committee shall be permitted, without any further consent,
     to cause the STEAG Subsidiaries to (x) increase reserve amounts, (y)
     take asset write-offs and (z) make inventory valuation changes.
     Nothing contained in this Section 5.5 shall restrict or limit STEAG's
     right to receive such reports and information from the STEAG
     Subsidiaries as are customary or as otherwise requested by STEAG."

         16. STOCK OPTION GRANTS. Section 6.11 of the Agreement is hereby
amended by adding after the last sentence thereof the following sentence:
"Nowithstanding the foregoing, Mattson shall not be required to grant
options to employees of STEAG Subsidiaries in Japan, Korea or the United
Kingdom to the extent such grants would violate applicable laws in such
countries; PROVIDED, that Mattson shall use its reasonable efforts to grant
such options in compliance with applicable local law as soon as practicable
following the closing; and PROVIDED, FURTHER, that upon such grants being
made the respective vesting period for such grantee shall begin as of the
Closing Date, notwithstanding the date of option grant."

         17. STEAG INTERCOMPANY INDEBTEDNESS; FORWARD CONTRACTS. STEAG
hereby represents and warrants that: (x) in accordance with Section 6.13(b)
of the Agreement, as of June 30, 2000, STEAG caused all indebtedness of any
of the STEAG Subsidiaries to STEAG or any of its affiliates (other than
indebtedness of one STEAG Subsidiary to another, and other than Excluded
Indebtedness), in aggregate principal amount of approximately $100,974,000,
to be cancelled and converted to equity without any payment on the part of
such STEAG Subsidiaries; (y) subsequent to such cancellation of
indebtedness STEAG extended additional loans to the STEAG Subsidiaries, the
aggregate principal amount of which was approximately $21,726,906 as of
November 30, 2000; and (z) as of November 30, 2000, the STEAG Subsidiaries
had aggregate cash in an amount not less than $20 million. New subsections
(c) and (d) are hereby added to Section 6.13 of the Agreement, the text of
which shall be as follows:

         "(c) Notwithstanding anything to the contrary in subsection (b) of
     this Section 6.13, in Section 5.1((h), or in any other provision of
     this Agreement, (i) from and after December 15, 2000, STEAG shall not
     be required to cancel any indebtedness of any STEAG Subsidiary to
     STEAG; (ii) STEAG will not loan any additional amounts to any STEAG
     Subsidiary following the date which is 10 days prior to the expected
     Closing Date without the prior written consent of Mattson; PROVIDED,
     that if the expected Closing Date is postponed, STEAG shall be
     entitled to loan additional amounts until the date which is 10 days
     prior to such later expected Closing Date; (iii) from and after
     December 15, 2000, STEAG will not cause or permit any STEAG Subsidiary
     to make any cash payments to STEAG (other than in respect of Excluded
     Indebtedness described in clauses (i), (iii) or (v) of the second
     sentence of Section 6.13(b)); and (iv) at the Closing, STEAG will
     accept as payment for all remaining indebtedness of the STEAG
     Subsidiaries to STEAG (other than Excluded Indebtedness) a secured
     promissory note from Mattson, or, at the request of Mattson, will
     assign all remaining indebtedness of the STEAG Subsidiaries to STEAG
     (other than Excluded Indebtedness) to a wholly owned subsidiary of
     Mattson (to be designated in a written notice from Mattson to STEAG at
     least 2 days prior to the Closing), and such assignment by STEAG will
     be made in exchange for a secured promissory note from Mattson. The
     secured promissory note referred to in the immediately preceding
     sentence will be equal in principal amount to the aggregate amount of
     intercompany indebtedness cancelled or assigned by STEAG (to be set
     forth in a notice from STEAG to Mattson at least 2 days prior to the
     Closing), and will be in the form of Exhibit F and secured by a
     stand-by letter of credit or bank guarantee from a mutually acceptable
     bank in form and substance reasonably satisfactory to STEAG (the
     "Mattson Secured Note").

         (d) Between December 15, 2000 and the Closing, STEAG will cancel
     all currency exchange rate forward contracts listed on Schedule 2.3,
     the cancellation of which, in the aggregate, would not result in a
     loss, as of the time of cancellation, to STEAG or any STEAG
     Subsidiary. For the avoidance of doubt, in determining which forward
     contracts to cancel pursuant to the preceding sentence, STEAG shall
     not be required to take into account any potential exchange rate gain
     or loss on the underlying accounts receivable. In accordance with
     Section 2.3 of this Agreement, Mattson will assume and become solely
     responsible for the guarantee obligations of STEAG under any forward
     contracts listed on Schedule 2.3 which are not so cancelled as of the
     Closing."

         18. ACTIONS OF DIRECTORS OF STEAG SUBSIDIARIES. A new Section 6.19
is hereby added to the Agreement, the text of which shall be as follows:

         "6.19 ACTIONS OF DIRECTORS OF STEAG SUBSIDIARIES. Upon the
     availability of audited financial statements as of December 31, 2000,
     for the STEAG Subsidiaries other than Newco and U.S. Newco, Mattson
     will promptly review such financial statements. As soon as practicable
     after the review of such audited financial statements in the case of
     the STEAG Subsidiaries other than Newco and U.S. Newco, and not later
     than 30 days after the Closing in the case of Newco and U.S. Newco,
     except with respect to fraud or intentional violations of law, Mattson
     will approve, or cause the applicable holding company to approve, to
     the fullest extent permitted under applicable law, the prior actions
     of the officers and directors of the STEAG Subsidiaries in its
     capacity as sole shareholder of such subsidiaries. Except with the
     prior written consent of STEAG, Mattson further agrees not to, and to
     cause its applicable direct and indirect subsidiaries not to, commence
     or institute any claim, action or proceeding against any such officers
     and directors with respect to actions taken prior to the Closing by
     such persons in their capacity as officers or directors of any of the
     STEAG Subsidiaries (other than for fraud or intentional violations of
     law)."

         19. COOPERATION ON TAX MATTERS. A new Section 6.20 is hereby added
to the Agreement, the text of which shall be as follows:

         "6.20 COOPERATION ON TAX MATTERS. Following the Closing, Mattson
     and STEAG shall each promptly notify the other in writing upon receipt
     by STEAG, Mattson, any of their Affiliates or any of the STEAG
     Subsidiaries of written notice of any pending or threatened federal,
     state, local or foreign tax audits, claims for taxes or assessments
     that may affect the tax liabilities of any of the STEAG Subsidiaries
     with respect to any tax period ending on or before the Closing Date.
     Mattson will (a) provide STEAG with copies of all correspondence
     received from any tax authority with respect to such tax periods and
     (b) will consult with STEAG with respect to, and allow STEAG a
     reasonable opportunity to comment on, any response by Mattson or any
     STEAG Subsidiary. STEAG will assist Mattson and any STEAG Subsidiary
     with respect to any such matter and will cooperate with any request
     for information. Nothing contained in this Section 6.20 shall be
     deemed to create an obligation by STEAG to pay any Taxes on behalf of
     any STEAG Subsidiary. For a period of six years following the Closing
     Date, Mattson and STEAG will each provide to the other, upon request,
     access during normal business hours to all Tax records relating to the
     STEAG Subsidiaries."

         20. JAPANESE LOAN GUARANTY. A new Section 6.21 is hereby added to
the Agreement, the text of which shall be as follows:

         "6.21 JAPANESE LOAN GUARANTY. Each of Mattson and STEAG will use
     their reasonable efforts to have STEAG released from its guarantee
     obligations under the (Y)500,000,000 credit line from Westdeutsche
     Landesbank Girozentrale Tokyo Branch, Japan to STEAG Electronic
     Systems Japan Co., Ltd. (which obligations Mattson will assume
     pursuant to Section 2.3 of this Agreement). In the event that STEAG is
     not so released within 18 months after the Closing, Mattson will cause
     such credit line to be repaid or refinanced without any continuing
     obligation on the part of STEAG."

         21. INSURANCE. A new Section 6.22 is hereby added to the
Agreement, the text of which shall be as follows:

         "6.22 INSURANCE. Regardless whether the Closing or the STEAG Early
     Condition Satisfaction Date has occurred, as from January 1, 2001,
     Mattson shall provide or cause to be provided, at its own expense,
     insurance under Mattson's insurance policies listed on Schedule 6.22
     hereto with respect to the STEAG Subsidiaries (other than the STEAG
     Subsidiaries located in Asia); PROVIDED, that Mattson will not be
     providing the following types of insurance: (a) environmental
     liability insurance; (b) legal expense insurance; (c) personal
     accident insurance; (d) travel insurance abroad; (e) automobile
     insurance; (f) luggage insurance; and (g) director and officer
     insurance. Until the Closing Date, such insurance policies shall name
     STEAG as an additional insured party. In the event this Agreement is
     thereafter terminated, Mattson shall continue such insurance coverage
     until the earlier of (a) the date STEAG obtains replacement insurance
     coverage or (b) 60 days following the date of termination, following
     which STEAG shall reimburse Mattson for its allocated share of
     Mattson's insurance costs with respect to the STEAG Subsidiaries."

         22. TRANSITION SERVICES AGREEMENTS. A new Section 6.23 is hereby
added to the Agreement, the text of which shall be as follows:

         "6.23. TRANSITION SERVICES AGREEMENT. The parties agree that the
     Transition Services Agreements to be executed and delivered at the
     Closing, including the supply agreement between STEAG MicroTech GmbH
     and STEAG Electronic Systems spol. s r.o. shall be true and correct
     German language translations of substantially the English language
     forms initialed and dated by STEAG and Mattson on December 15, 2000."

         23. CONDITIONS TO EACH PARTY'S OBLIGATIONS. Section 7.1(f) of the
Agreement is hereby amended by deleting all of the language following the
comma and replacing it with the following: "of the outstanding Foreign
Subsidiary Shares".

         24. CONDITIONS TO OBLIGATIONS OF STEAG. A new subsection (l) is
hereby added to Section 7.3 of the Agreement, the text of which shall be as
follows:

         "(l) MATTSON SECURED NOTE; SECURITY FOR ASSUMED GUARANTEE. STEAG
     shall receive at the Closing (i) the Mattson Secured Note referred to
     in Section 6.13(c), (ii) the stand-by letter of credit or bank
     guarantee securing the Mattson Secured Note, and (iii) the stand-by
     letter(s) of credit or bank guarantee(s) securing Mattson's
     obligations with respect to forward contracts and the (Y) 500,000,000
     credit line pursuant to Section 2.3."

         25. TERMINATION. Section 8.1(j) of the Agreement is hereby deleted
in its entirety.

         26. INDEMNIFICATION. A new subsection (c) is hereby added to
Section 9.1 of the Agreement, the text of which shall be as follows:

         "(c) Mattson shall indemnify and hold harmless the STEAG
     Indemnified Persons from and against all Damages arising out of (i)
     the failure of STEAG RTP Systems GmbH and STEAG MicroTech GmbH to
     discharge after the Closing their obligations to third parties to the
     extent of any obligation of STEAG under ss.303 AktG (German Stock
     Corporation Act), as a result of the termination of the Profit
     Transfer Contracts, to guarantee such obligations up until the date of
     publication or deemed publication of the registration of the
     termination of the Profit Transfer Contracts with the German
     Commercial Register, and (ii) the obligations assumed by Mattson
     pursuant to Section 2.3 of this Agreement."

         27. NOTICES. The address for copies of notices to STEAG under
Section 10.1(b) of the Agreement is hereby deleted and replaced by the
following:

     "Skadden, Arps, Slate, Meagher & Flom LLP
     525 University Avenue
     Palo Alto, CA  94301
     Attention:  Marc R. Packer
     Fax:  (650) 470-4570
     Tel:  (650) 470-4500"

         28. EXPENSES. Section 10.8 of the Agreement is hereby amended by
adding after the second sentence thereof the following:

     "In order to implement the preceding sentence, within 60 days
     following the Closing, STEAG will deliver to Mattson an accounting of
     all costs and expenses incurred by STEAG in connection with this
     Agreement and the transactions contemplated hereby, including legal,
     accounting and investment banking fees, together with true and
     complete copies of all invoices relating to such costs and expenses.
     None of such costs or expenses have been paid by or allocated to the
     STEAG Subsidiaries prior to the Closing. Mattson will, or will cause
     one or more of the STEAG Subsidiaries to, reimburse STEAG for 50% of
     the aggregate costs and expenses shown on such accounting within 10
     days of Mattson's receipt of such accounting."

         29. GERMAN COUNTERPART AMENDMENT. As soon as practicable after the
date of this Amendment, and in any event prior to the Closing, Mattson and
STEAG shall execute and deliver an amendment to the German law-governed
version of the Agreement, in such form as may be necessary or appropriate
to effectuate the purposes of this Amendment and is otherwise mutually
acceptable to Mattson and STEAG, which document shall be notarized in
accordance with German law or as otherwise agreed among the parties.

         30. GENERAL PROVISIONS. (a) Except as expressly amended or
modified by this Amendment, the Agreement remains in full force and effect.

         (b) This Amendment may be executed in one or more counterparts,
all of which shall be considered one and the same instrument and shall
become effective when one or more counterparts have been signed by each of
the parties and delivered to the other parties, it being understood that
all parties need not sign the same counterpart.

         (c) In the event that any provision of this Amendment, or the
application thereof becomes or is declared by a court of competent
jurisdiction to be illegal, void, or unenforceable, the remainder of this
Amendment will continue in full force and effect nd the application of such
provision to other persons or circumstances will be interpreted so as
reasonably to effect the intent of the parties hereto. The parties further
agree to replace such void or unenforceable provision of this Amendment
with a valid and enforceable provision that will achieve, to the extent
possible, the economic, business, and other purposes of such void or
unenforceable provision.

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         IN WITNESS WHEREOF, STEAG and Mattson have caused this Amendment
to be executed and delivered by each of them or their respective officers
thereunto duly authorized, all as of the date first written above.

STEAG ELECTRONIC SYSTEMS AG

By:/s/ Peter Lockowandt
   ---------------------------------
   Dr. Peter Lockowandt
   General Counsel

By:/s/ Rolf Thaler
   ---------------------------------
   Dr. Rolf Thaler
   Chief Financial Officer

MATTSON TECHNOLOGY, INC.

By:/s/ Brad Mattson
   ---------------------------------
       Brad Mattson, Chairman
       and Chief Executive Officer




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