MATTSON TECHNOLOGY INC
S-8, EX-23.2, 2001-01-19
SPECIAL INDUSTRY MACHINERY, NEC
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                                                                    EXHIBIT 23.2
                                                                    ------------

                   CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS

As independent public accountants, we hereby consent to the incorporation by
reference in this registration statement of our report dated January 21, 2000
included in Mattson Technology, Inc.'s Annual Report on Form 10-K for the year
ended December, 31 1999.

/s/  ARTHUR ANDERSEN LLP
---------------------------
Arthur Andersen LLP

San Jose, California
January 15, 2001


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