|
|
|
|
|
|
|
|
|
|
|
|
|
<PAGE> 1
EXHIBIT 23.1
CONSENT OF INDEPENDENT ACCOUNTANTS
We hereby consent to the incorporation by reference in the Registration
Statements on Forms S-8 (Nos. 333-66781, 333-12473 and 333-462) of our report
dated April 28, 2000 appearing on page 33 of Tegal Corporation's Annual Report
on Form 10-K for the year ended March 31, 2000.
/s/ PricewaterhouseCoopers LLP
San Jose, California
May 24, 2000
|
|