TEGAL CORP /DE/
10-K405/A, 2000-08-22
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>   1
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                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                 ---------------

                                  FORM 10-K / A

      [X]   ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
            EXCHANGE ACT OF 1934

                    FOR THE FISCAL YEAR ENDED MARCH 31, 2000

      [ ]   TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
            EXCHANGE ACT OF 1934

                         COMMISSION FILE NUMBER: 0-26824

                                TEGAL CORPORATION
             (EXACT NAME OF REGISTRANT AS SPECIFIED IN ITS CHARTER)

          DELAWARE                                              68-0370244
(STATE OR OTHER JURISDICTION OF                               (I.R.S. EMPLOYER
INCORPORATION OR ORGANIZATION)                               IDENTIFICATION NO.)

         2201 SOUTH MCDOWELL BLVD
           PETALUMA, CALIFORNIA                                   94954
(ADDRESS OF PRINCIPAL EXECUTIVE OFFICES)                        (ZIP CODE)

       REGISTRANT'S TELEPHONE NUMBER, INCLUDING AREA CODE: (707) 763-5600

        SECURITIES REGISTERED PURSUANT TO SECTION 12(b) OF THE ACT: NONE

                         SECURITIES REGISTERED PURSUANT
                          TO SECTION 12(g) OF THE ACT:
                          COMMON STOCK, $0.01 PAR VALUE

     Indicate by check mark whether the Registrant (1) has filed all reports
required to be filed by Section 13 or 15(d) of the Securities Exchange Act of
1934 during the preceding 12 months (or for such shorter period that the
Registrant was required to file reports) and (2) has been subject to such filing
requirements for the past 90 days. Yes [X] No [ ]

     Indicate by check mark if disclosure of delinquent filers pursuant to Item
405 of Regulation S-K is not contained herein, and will not be contained, to the
best of Registrant's knowledge, in definitive proxy or information statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K. [X]

     The aggregate market value of the voting stock held by non-affiliates of
the Registrant, based on the closing sale price of the Common Stock on May 10,
2000, as reported on the Nasdaq National Market was $62,276,020. As of May 10,
2000, 12,455,678 shares of the Registrant's Common Stock were outstanding.

                       DOCUMENTS INCORPORATED BY REFERENCE

     Portions of the Proxy Statement for Registrant's 2000 Annual Meeting of
Stockholders to be held on September 19, 2000, will be filed with the Commission
within 120 days after the close of the Registrant's fiscal year and are
incorporated by reference in Part III.

Total Pages 41                                 Index to Exhibits follows page 40
================================================================================



<PAGE>   2


                                TABLE OF CONTENTS
<TABLE>
<CAPTION>
                                                                                                       PAGE
                                                                                                       ----
                                                   PART I
<S>             <C>                                                                                    <C>
Item 1.         Business..............................................................................   3
Item 2.         Properties............................................................................  13
Item 3.         Legal Proceedings.....................................................................  13
Item 4.         Submission of Matters to a Vote of Security Holders...................................  14

                                                  PART II
Item 5.         Market for Registrant's Common Equity and Related Stockholder Matters.................  16
Item 6.         Selected Financial Data...............................................................  17
Item 7.         Management's Discussion and Analysis of Financial Condition and Results of Operations.  18
Item 7A.        Quantitative and Qualitative Disclosure about Market Risk.............................  20
Item 8.         Financial Statements and Supplementary Data...........................................  22
Item 9.         Changes in and Disagreements with Accountants on Accounting and Financial Disclosure..  36

                                                  PART III
Item 10.        Directors and Executive Officers of the Registrant....................................  36
Item 11.        Executive Compensation................................................................  36
Item 12.        Security Ownership of Certain Beneficial Owners and Management........................  36
Item 13.        Certain Relationships and Related Transactions........................................  36

                                                  PART IV
Item 14.        Exhibits, Financial Statement Schedules and Reports on Form 8-K.......................  37
Signatures............................................................................................  39
</TABLE>

                                       2
<PAGE>   3

                                     PART I

ITEM 1. BUSINESS

   Information contained or incorporated by reference herein contains
"forward-looking statements" within the meaning of the Private Securities
Litigation Reform Act of 1995, which can be identified by the use of
forward-looking terminology such as "may," "will," "expect," "anticipate,"
"estimate" or "continue" or the negative thereof or other variations thereon or
comparable terminology or which constitute projected financial information. The
following contains cautionary statements identifying important factors with
respect to such forward-looking statements, including certain risks and
uncertainties, that could cause actual results to differ materially from those
in such forward-looking statements. See "Risk Factors."

THE COMPANY

   Tegal Corporation, a Delaware Corporation ("Tegal" or the "Company"),
designs, manufactures, markets and services plasma etch systems used in the
fabrication of integrated circuits ("ICs") and related devices in voice and data
telecommunications, thin film head, small flat panel and printer head
applications. Etching constitutes one of the principal IC and related device
production process steps and must be performed numerous times in the production
of such devices.

   The Company was formed in December 1989 to acquire the operations of the
former Tegal Corporation, a division of Motorola, Inc. ("Motorola"). The
predecessor company was founded in 1972 and acquired by Motorola in 1978. Tegal
completed its initial public offering in October 1995.

SEMICONDUCTOR INDUSTRY BACKGROUND

Growth of Semiconductor and Semiconductor Equipment Industries

   The semiconductor industry has experienced significant growth over the last
20 years. This growth has resulted from the increasing demand for ICs from
traditional IC markets, such as personal computers, telecommunications, consumer
electronics, automotive electronics and office equipment, as well as developing
markets, such as wireless communications, multimedia and portable and network
computing. As a result of this increased demand, semiconductor device
manufacturers have periodically expended significant amounts of capital to build
new semiconductor fabrication facilities ("fabs") and to expand existing fabs.
In spite of the continuing growth in demand for semiconductors, the industry
periodically experiences periods of excess supply and excess capacity as
additions to capacity are brought online in large increments which exceed the
short-term growth in demand for ICs. The industry experienced such excess supply
and excess capacity from 1996 through mid 1999.

   Growth in the semiconductor industry has been driven, in large part, by
advances in semiconductor performance at a decreasing cost per function.
Increasingly advanced semiconductor processing technologies allow semiconductor
manufacturers to produce ICs with smaller features, thereby increasing
processing speed and expanding device functionality and memory capacity. As ICs
have become more complex, however, both the number and price of state of the art
process tools required to manufacture ICs have increased significantly. As a
result, the cost of semiconductor manufacturing equipment has become an
increasingly large part of the total cost in producing advanced ICs. Today, a
typical 200 millimeter wafer fab may cost as much as $1.4 to $1.6 billion, with
semiconductor manufacturing equipment costs representing the majority of total
fab costs.

Semiconductor Production Processes

   To create an IC, semiconductor wafers are subjected to a large number of
complex process steps. The three primary steps in manufacturing ICs are (1)
deposition, in which a layer of insulating or conducting material is deposited
on the wafer surface, (2) photolithography, in which the circuit pattern is
projected onto a light sensitive material (the photoresist), and (3) etch, in
which the unmasked parts of the deposited material on the wafer are selectively
removed to form the IC circuit pattern.

   Each step of the manufacturing process for ICs requires specialized
manufacturing equipment. Today, plasma etch systems are used for the great
majority of etching processes. During a plasma etch process (also known as "dry
etch"), a semiconductor wafer is exposed to a plasma composed of a reactive gas,
such as chlorine, which etches away selected portions of the layer underlying
the patterned photoresist layer.

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<PAGE>   4

Segmentation of the Etch Market

   Tegal believes that the dry etch market is becoming increasingly segmented.
Certain dry etch technologies or processes are better suited for etching
different types of materials (films) and, as a result, the dry etch market may
be segmented according to the type of film being etched. In addition, as ICs
become increasingly complex, certain etch steps required to manufacture a state
of the art IC demand leading edge (or "critical") etch performance. For example,
to produce a 64-megabit DRAM device, semiconductor manufacturers are required to
etch certain device features at dimensions as small as 0.18 micron. Nonetheless,
even in the most advanced ICs, a significant number of production steps can be
performed with a significantly less demanding (or "non-critical") etch
performance. As a result, Tegal believes the etch market has also begun to
segment according to the required level of etch performance -- critical or
non-critical.

Segmentation of the Etch Market by Film

   The dry etch market is generally segmented into the following market
segments, defined according to the class of film being etched: polysilicon,
oxide (dielectric) and metal. According to VLSI Research Inc., the oxide,
polysilicon, and metal segments of the dry etch market represented approximately
47%, 19% and 34%, respectively, of the total sales of dry etch systems in 1999.
New films are continually being developed in each of these three market
segments.

   Today, the semiconductor industry is faced with the need to develop and adopt
an unprecedented number of new films as conventional materials are running out
of the physical properties needed to support continuing shrinks in die size and
to provide improved performance. Certain of these films present unique etch
production problems. For example, the use of certain new films, such as
platinum, iridium and Lead Zirconium Titanate (PZT), currently being used in the
development of non-volatile, ferroelectric random access memory (FRAM) devices,
is presenting new challenges to semiconductor manufacturers. While these new
films contribute to improved IC performance and reduced die size, their unique
properties make them particularly difficult to etch and, therefore, require more
advanced etch process technologies. Similarly, customers seek to achieve zero
corrosion of metal etched wafers within 48 to 72 hours after completion of the
etch process, regardless of the line geometries involved. The reaction
byproducts of a chlorine based metal etch process tend to redeposit on the wafer
and corrode when exposed to water in the atmosphere. Removal of these
contaminants from the wafer is essential to prevent this corrosion.

Segmentation of the Etch Market into Critical and Non-Critical Production Steps

   Over time, the disparity in relative prices for etch systems capable of
etching at non-critical versus critical dimensions has grown significantly.
Tegal believes that in 1993, the cost of an eight inch wafer-capable system
ranged from approximately $500,000 to $700,000. Given the relatively modest
price differential among etchers, manufacturers of ICs and similar devices
tended to purchase one system, (the one they believed provided the most
technologically advanced solution for their particular etch requirements), to
perform all their etching. In contrast, the cost today of an eight inch capable
etch system ranges from approximately $500,000, for reliable, non-critical
etchers, to more than $2.5 million, for advanced, state of the art critical
etchers. Consequently, in periods of high equipment utilization Tegal believes
it is no longer cost effective to use state of the art etchers to perform both
critical and non-critical etching. When critical etching is required in the
production process, Tegal believes that the leading purchasing factor for a
semiconductor manufacturer will continue to be, ultimately, the product's etch
performance. When non-critical etching is required in the production process,
Tegal believes the leading purchasing factor for a semiconductor manufacturer
will be the overall product cost, with particular emphasis on the system's sale
price. In either case, however, the semiconductor manufacturer is driven to make
a value-oriented purchasing decision which minimizes the overall etch system
costs, while meeting the required etch process performance. Tegal believes that
a well-implemented "mix and match" purchasing philosophy could allow a
semiconductor manufacturer to realize significant etch system savings.

BUSINESS STRATEGY

   Tegal has a large installed base of etch equipment exceeding 1,500 systems
and we believe that over the years Tegal has earned a reputation as a supplier
of reliable, value-oriented etch systems. Our systems are sold throughout the
world to both domestic and international customers. In fiscal 2000,
approximately 59% of our revenues resulted from international sales. To support
our systems sales, we maintain local service and support in every major
geographic market in which we have an installed base, backed up by a spares
logistics system designed to provide delivery within 24 hours anywhere in the
world.

                                       4
<PAGE>   5

   Our objective is to build on our technical knowledge, experience and
reputation in the etch industry, as well as our established sales, marketing and
customer service infrastructure, to be a leading supplier of etch systems for
both the critical and non-critical segments of the etch market. To meet this
objective, we are is implementing a business strategy incorporating the
following elements:

   -  Use the performance capabilities of our 6500 series systems to generate
      incremental sales from the IC and related device markets for critical etch
      of specific applications and films where Tegal's products provide unique
      performance capabilities; and

   -  Increase sales of our non-critical etch systems by focusing sales and
      marketing on specialty applications that are addressed by the Company's
      900 series etchers such as voice and data telecommunications chips using
      gallium arsenide and other III-V materials, thin film heads, small flat
      panels, printer heads, and the conversion from wet to dry etch
      technologies.

PRODUCTS

6500 Series Products

   We offer several models of its 6500 series critical etch products configured
to address film types and applications desired by the customer. Tegal introduced
the 6500 series tool in 1994 and since that time has expanded the product line
to address new applications. Etch applications addressed by the 6500 series
system include: 1) new high K dielectrics and associated materials used in
capacitors at sub-0.5 micron for FRAMs, high-density DRAM and magnetic memory
(MRAM) devices, 2) shallow trench isolation used to isolate transistors driven
by increased packing densities used in memory devices employing design rules at
or below 0.25 micron, 3) sub-0.5 micron multi-layer metal films composed of
aluminum/copper/silicon/ titanium alloys, 4) sub-0.5 micron polysilicon and 5)
leading edge thin film head materials. All 6500 series models offer one and
two-chamber configurations. 6500 series systems typically range in price between
$1.8 million and $3.0 million.

   Our 6500 series systems have been engineered to provide process flexibility
and competitive throughput for wafers and substrates up to eight inches in
diameter, while minimizing cost and space requirements. A dual chamber platform
design allows for either parallel or integrated etch processes. The Company
seeks to maximize the 6500 series systems' average throughput by incorporating a
process chamber technology and system architecture designed to minimize
processing down-time required for cleaning and maintenance. Each 6500 series
system has a central wafer handling system with full cassette vacuum loadlocks,
noncontact optical wafer alignment and a vacuum transport system. Individual
process module servicing is possible without shutting down the system or other
chambers. Contamination control features in the 6500 series systems include pick
and place wafer handling with no moving parts above the wafer, four-level vacuum
isolation from the atmosphere to the etch chamber, and individual
high-throughput, turbo-pumped vacuum systems for the cassettes, wafer handling
platform and each process module. These and other features of the 6500 series
are designed to enable a semiconductor manufacturer to reduce wafer particle
contamination to a level which we believe exceeds industry standards and to
improve etch results and process flexibility.

   In addition, the our 6500 series systems incorporate a software system which
has been designed and tested to minimize the risk of the system operator
"crashing" the system or interrupting wafer fabrication and to be easy to use.
This software system incorporates a software architecture designed to operate in
multiple interface modes, including operator, maintenance engineer, process
engineer and diagnostic modes. Features include icon-based touch screen menus
for ease of use. In addition, the software provides a quick-response interface
which allows the semiconductor manufacturer access to all necessary system
information for factory automation. The system includes data archiving and
remote, real time diagnostics.

900 Series Products

   Tegal introduced its 900 series family of etch systems in 1984 as a critical
etch tool of that era. Over the years, we have repositioned the 900 series
family as non-critical etch systems capable of performing the less-demanding
etch steps required in the production of silicon-based IC devices and, more
recently, as critical etch tools for new specialty devices such as gallium
arsenide for high speed telecommunications devices. In 1994, we introduced an
eight inch wafer capable 900 series system (capable of etching five inch to
eight inch wafers) that was a scaled-up version of its three inch to six inch
wafer capable non-critical etch system. The 900 series non-critical etch systems
are aimed at pad, zero layer, non-selective nitride, backside, planarization and
small flat panel display applications, thin film etch applications used in the
manufacture of read-write heads for the disk drive industry and gallium arsenide
and other III-V materials used in high-speed digital wireless telecommunications
applications. Our 900 series systems typically sell for a price of $250,000 to
$600,000.

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<PAGE>   6

   The 900 series systems incorporate a single diode process chamber on a
non-loadlocked modular platform for reliability and ease of maintenance, which
Tegal believes results in higher average throughput and lower operating costs.
Continued improvements in both reliability and performance have enabled us to
offer the 900 series systems as a solution for a broad range of applications
involving line widths down to 0.8 microns.

CUSTOMERS

   We sell our systems to semiconductor and related electronic device component
manufacturers throughout the world. Major customers over the last three fiscal
years have included the following:

<TABLE>
<CAPTION>

              <S>                            <C>                  <C>
              ABB Semiconductor AG           NEC                  Samsung
              Bosch                          Nortel Networks      Seiko Epson
              Fuji Film                      Oki                  SGS-Thomson Microelectronics
              Hyundai/LG Semiconductor       Read Rite            Sony
              Matsushita                     RF Micro Devices     Tesla
              Motorola
</TABLE>

   Of these 16 customers, six ordered one or more systems from us in fiscal
2000. The composition of our top five customers has changed from year to year,
but net system sales to our top five customers in each of fiscal 2000, 1999 and
1998 accounted for 53.1%, 66.4% and 61.2%, respectively, of our total net system
sales. Motorola, Sony and SGS-Thomson Microelectronics represented 15.5%, 13.9%
and 10.2%, respectively, of our net system sales in fiscal 2000. Matsushita,
Seiko Epson, Fuji Film and Oki represented 17.9%, 14.8%, 14.7% and 11.8%,
respectively, of our net system sales in fiscal 1999. Motorola, Samsung, Read
Rite and Hyundai represented 18.2%, 12.2%, 11.2% and 10.3%, respectively, of our
net system sales in fiscal 1998. Other than the above customers, no single
customer represented more than 10% of our net system sales in fiscal 2000, 1999
or 1998. Although the composition of the group comprising of our largest
customers may vary from year to year, the loss of a significant customer or any
reduction in orders by any significant customer, including reductions due to
market, economic or competitive conditions in the semiconductor and related
device manufacturing industry, may have a material adverse effect on us.

BACKLOG

   We schedule production of our systems based upon order backlog and customer
commitments. We include in our backlog only orders for which written purchase
orders have been accepted and shipment dates within the next 12 months have been
assigned. As of March 31, 2000 and 1999 our order backlog was approximately $5.9
million and $2.8 million, respectively. Systems orders are subject to
cancellation by the customer, but with substantial penalties other than in the
case of orders for evaluation systems or for systems which have not yet incurred
production costs. Orders may be subject to rescheduling with limited or no
penalty. Some orders are received for systems to be shipped in the same quarter
as the order is received. As a result, our backlog at any particular date is not
necessarily indicative of actual sales for any succeeding period.

MARKETING, SALES AND SERVICE

   We sell our systems worldwide through a network of 16 direct sales
representatives and five independent sales representatives in 17 sales offices
located throughout the world. In the United States, we market our systems
through direct sales personnel located in its Petaluma, California headquarters,
two regional sales offices and through one independent sales representative. In
addition, we provide field service and applications engineers out of one
regional location and our Petaluma headquarters in order to ensure dedicated
technical and field process support throughout the United States on short
notice.

   We maintain sales, service, and process support capabilities in Japan,
Taiwan, South Korea, Germany, Italy and the United Kingdom and service/support
operations in Austria and China. In addition to our international direct sales
and support organizations, we also market our systems through independent sales
representatives in China, Israel, South Korea and Singapore and selected markets
in Japan.

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<PAGE>   7

   International sales, which consist of export sales from the United States
either directly to the end user or to one of our foreign subsidiaries, accounted
for approximately 59%, 72% and 61% of total revenue for fiscal 2000, 1999 and
1998, respectively. Revenues by region for each of the last three fiscal years
were as follows:

<TABLE>
<CAPTION>

                                        YEARS ENDED MARCH 31,
                                  ---------------------------------
                                    2000         1999         1998
                                  -------      -------      -------
   <S>                            <C>          <C>          <C>
   United States ...........      $10,867      $ 8,111      $16,045
   Asia ....................        2,095        2,669       11,110
   Europe ..................        7,498        6,657        8,667
   Japan ...................        5,978       11,598        5,650
                                  -------      -------      -------
        Total external sales      $26,438      $29,035      $41,472
                                  =======      =======      =======
</TABLE>


   We generally sell our systems on 30-to-60 day credit terms to its domestic
and European customers. Customers in Pacific Rim countries, other than Japan,
are generally required to deliver a letter of credit payable in U.S. dollars
upon system shipment. Sales to other international customers, including Japan,
are either billed in local currency or U.S. dollars. We anticipate that
international sales will continue to account for a significant portion of
revenue in the foreseeable future.

   We generally warrant our new systems for 12 months and our refurbished
systems for six months from shipment. Installation is included in the price of
the system. Our field process engineers provide customers with call-out repair
and maintenance services for a fee. Customers may also enter into repair and
maintenance service contracts covering our systems. We train customers' service
engineers to perform routine service for a fee and provide telephone
consultation services generally free of charge.

   The sales cycles for our systems vary depending upon whether the system is an
initial design-in, reorder or used equipment. Initial design-in sales cycles are
typically 12 to 18 months, particularly for 6500 series systems. In contrast,
reorder sales cycles are typically four to six months, and used system sales
cycles are generally one to three months. The initial design-in sales cycle
begins with the generation of a sales lead, which is followed by qualification
of the lead, an analysis of the customer's particular applications needs and
problems, one or more presentations to the customer (frequently including
extensive participation by our senior management), two to three wafer sample
demonstrations, followed by customer testing of the results and extensive
negotiations regarding the equipment's process and reliability specifications.
Initial design-in sales cycles are monitored by senior management for correct
strategy approach and prioritization. We may, in some instances, need to provide
the customer with an evaluation critical etch system for three to six months
prior to the receipt of a firm purchase order.

RESEARCH AND DEVELOPMENT

   The market for semiconductor capital equipment is characterized by rapid
technological change. We believe that continued and timely development of new
systems and enhancements to existing systems is necessary for us to maintain our
competitive position. Accordingly, we devote a significant portion of our
personnel and financial resources to research and development programs and seeks
to maintain close relationships with our customers in order to be responsive to
their system needs.

   Our research and development encompasses the following areas: plasma
technology, process characterization and development, material sciences
applicable to the etch environment, system design and architecture,
electro-mechanical design and software engineering. Management emphasizes
advanced plasma and reactor chamber modeling capabilities in order to accelerate
bringing advanced chamber designs to market. We employ multi-discipline teams to
facilitate short engineering cycle times and rapid product development.

   As of March 31, 2000, we had 47 full-time employees dedicated to equipment
design engineering, process support and research and development. Research and
development expenses for fiscal 2000, 1999 and 1998 were $10.1 million, $9.6
million and $11.0 million, respectively, and represented 38.0%, 33.0% and 26.6%
of total revenue, respectively. Such expenditures were used for the development
of new systems and processes, continued enhancement and customization of
existing systems, etching customer samples in our demonstration labs and
providing process engineering support at customer sites.

MANUFACTURING

   Our etch systems are produced at our headquarters in Petaluma, California.
Our manufacturing activities consist of assembling and testing components and
sub-assemblies which are then integrated into finished systems. We have
structured our production facility to be driven either by orders or by forecasts
and have adopted a modular system architecture to increase assembly efficiency
and design flexibility. We have also implemented "just-in-time" manufacturing
techniques in our assembly processes. Through the use of such

                                       7
<PAGE>   8

techniques 900 series system manufacturing cycle times take approximately 14
days and cycle times for our 6500 series products take two to three months.

COMPETITION

   The semiconductor capital equipment industry is highly competitive. We
believe that the principal competitive factor in the critical segments of the
etch industry is technical performance of the system, followed closely by the
existence of customer relationships, the overall system price, the ability to
provide service and technical support on a global basis and other related cost
factors. We believe that the principal competitive factor in the non-critical
segments of the etch industry is system price, followed closely by the technical
performance of the system, the existence of established customer relationships,
the ability to provide service and technical support on a global basis and other
related cost factors.

INTELLECTUAL PROPERTY

   We hold an exclusive license to 28 United States patents, including our dual
frequency tri-electrode control system, and 35 corresponding foreign patents
covering various aspects of our systems. We have also applied for nine
additional United States patents and 25 additional foreign patents. Of these
patents, a few expire as early as 2003, others expire as late as 2017 with the
average expiration occurring in approximately 2009. We believe that the duration
of such patents generally exceed the life cycles of the technologies disclosed
and claimed therein. We believe that although the patents we have exclusively
licensed or hold directly will be of value, they will not determine our success,
which depends principally upon our engineering, marketing, service and
manufacturing skills. However, in the absence of patent protection, we may be
vulnerable to competitors who attempt to imitate our systems or processes and
manufacturing techniques and processes. In addition, other companies and
inventors may receive patents that contain claims applicable to our systems and
processes. The sale of our systems covered by such patents could require
licenses that may not be available on acceptable terms, if at all. We also rely
on trade secrets and other proprietary technology that we seek to protect, in
part, through confidentiality agreements with employees, vendors, consultants
and other parties. There can be no assurance that these agreements will not be
breached, that we will have adequate remedies for any breach, or that our trade
secrets will not otherwise become known to or independently developed by others.


   The original version of the system software for our 6500 series systems were
jointly developed by us and Realtime Performance, Inc., a third party software
vendor. Tegal holds a perpetual, non-exclusive, nonroyalty bearing license to
use and enhance this software. The enhanced version of the software currently
used on our 6500 series systems has undergone multiple releases of the original
software, and such enhancements were developed exclusively us. Neither the
software vendor nor any other party has any right to use our current release of
the system software.

EMPLOYEES

   As of March 31, 2000, we had a total of 184 employees consisting of 174
full-time permanent employees and 10 temporary or contract personnel, including
47 in engineering, research and development, 36 in manufacturing, 74 in
marketing, sales and customer service and support and 27 in executive and
administrative positions. Many of our employees are highly skilled, and our
success will depend in part upon its ability to attract, retain and develop such
employees. Skilled employees, especially employees with extensive technological
backgrounds, are currently in great demand. There can be no assurance that we
will be able to attract or retain the skilled employees which may be necessary
to continue our research and development, manufacturing or marketing programs.
The loss of any such persons, as well as the failure to recruit additional key
personnel in a timely manner, could have a material adverse effect on us.

   None of our employees are represented by a labor union or covered by a
collective bargaining agreement. We consider our employee relations to be good.

RISK FACTORS

The semiconductor industry is cyclical and may experience periodic downturns
which may negatively affect customer demand for our products and result in
losses such as those we recently experienced.

   Our business depends upon the capital expenditures of semiconductor
manufacturers, which in turn depend on the current and anticipated market demand
for integrated circuits and systems utilizing integrated circuits. The
semiconductor industry is highly cyclical and historically has experienced
periodic downturns, which often have had a material adverse effect on the
semiconductor

                                       8
<PAGE>   9

industry's demand for semiconductor capital equipment, including etch systems
manufactured by us. The semiconductor industry experienced such a slowdown from
1996 through mid 1999. Prior semiconductor industry downturns have adversely
affected our revenue, gross margins and results of operations. The most recent
downturn resulted in our reporting losses for each of the past three fiscal
years. In addition, the need for continued investment in research and
development, substantial capital equipment requirements, and extensive ongoing
customer service and support requirements worldwide will continue to limit our
ability to reduce expenses in response to any such downturn or slowdown in the
future. Our revenue, gross margin and results of operations may be materially
adversely affected by future downturns or slowdowns in the rate of capital
investment in the semiconductor industry. Moreover, although the semiconductor
industry may experience growth that causes significant growth in the
semiconductor capital equipment industry, there can be no assurance that such
growth can be sustained or that we will be positioned to benefit from such
growth.

Our competitors have greater financial resources and greater name recognition
than we do and therefore may compete more successfully in the critical etch
industry than we can.

   We believe that to be competitive, we will require significant financial
resources in order to offer a broad range of systems, to maintain customer
service and support centers worldwide and to invest in research and development.
Many of our existing and potential competitors, including, among others, Applied
Materials, Inc., Lam Research Corporation and Tokyo Electron Limited, have
substantially greater financial resources, more extensive engineering,
manufacturing, marketing and customer service and support capabilities, larger
installed bases of current generation etch and other production equipment and
broader process equipment offerings as well as greater name recognition than we
do. We expect our competitors to continue to improve the design and performance
of their current systems and processes and to introduce new systems and
processes with improved price and performance characteristics. We cannot assure
you that we will be able to compete successfully in the United States or
worldwide.

If our 6500 series systems do not achieve significant sales or volume production
due to reasons such as a lack of full customer adoption, inability to correct
technical, manufacturing or other difficulties which may develop with this
series, our business, financial condition and results of operations would be
materially adversely affected.

   We have designed our 6500 series systems, our generation of critical etch
systems, for sub-0.35 micron critical etch applications in emerging films,
polysilicon and metal which we believe to be the leading edge of critical etch
applications. Revenues from the sale of 6500 series systems have accounted for
22% and 19% of total revenues in fiscal 1999 and 2000, respectively. Our 6500
series systems which have been installed are currently being used primarily for
research and development activities or low volume production. For the 6500
series systems to achieve full market adoption, our customers must utilize these
systems for volume production.

   Because we must make new product development commitments well in advance of
sales, new product decisions must anticipate both the future requirements for
etch processes needed by semiconductor manufacturers and the equipment required
to address such applications. These product development commitments put us at
risk because the market for critical etch emerging film, polysilicon or metal
etch systems may not develop as quickly or to the degree we expect and because
our 6500 series systems may not otherwise achieve full market adoption.

   In addition, the selling cycles of these new systems are typically lengthy
and in connection with the development and production of the 6500 series, we
have increased our operating expenses and are likely to invest in increased
inventory levels in the future. The failure to achieve market acceptance of this
generation of systems in a timely manner could result in, among other things, an
increase in operating expenses and inventory obsolescence without corresponding
sales, any of which could have a material adverse effect on our business,
financial condition and results of operations.

Our potential customers may not adopt our products because a substantial
investment is required to install and use our products.

   A substantial investment is required to install and integrate capital
equipment into a semiconductor production line. We believe that once a device
manufacturer has selected a particular vendor's capital equipment, that
manufacturer generally relies upon that vendor's equipment for that specific
production line application and, to the extent possible, subsequent generations
of that vendor's systems. Accordingly, it may be extremely difficult to achieve
significant sales to a particular customer once another vendor's capital
equipment has been selected by that customer unless there are compelling reasons
to do so, such as significant performance or cost advantages. In addition,
certain of our competitors may seek to sell, as an attractively priced package,
etch equipment together with other process equipment, such as deposition
equipment. Furthermore, some semiconductor manufacturers have already made
initial buying decisions for the next generation of sub-0.35 micron etch
requirements. Any failure to gain access and achieve sales to new customers will
adversely affect the successful commercial adoption of our 6500 series systems
and could have a material adverse effect on us.

                                       9
<PAGE>   10

Our quarterly revenue and operating results have fluctuated and are likely to
continue to fluctuate significantly from quarter to quarter, and we cannot
predict as to our future profitability.

   A variety of factors influence our revenues in a particular quarter, such as
the timing and mix of systems sales, the introduction or announcement of new
systems by us or our competitors, management decisions to commence or
discontinue product lines, our ability to design, introduce and manufacture new
systems on a timely basis, the timing of research and development expenditures
and expenses attendant to the further development of marketing, process support
and service capabilities, specific economic conditions in the semiconductor
industry, general economic conditions and exchange rate fluctuations.

   In particular, our 900 series etch systems typically sell for prices ranging
between $250,000 and $600,000, while prices of our 6500 series critical etch
systems typically range between $1.8 million and $3.0 million. To the extent we
are successful in selling our 6500 series systems, the sale of a small number of
these systems will probably account for a substantial portion of revenue in
future quarters, and a transaction for a single system could have a substantial
impact on revenue and gross margin for a given quarter.

   Additionally, our backlog at the beginning of each quarter does not normally
include all systems sales needed to achieve planned revenue for the quarter.
Consequently, we depend on obtaining orders for shipment within a particular
quarter to achieve our revenue objectives for that period. Because we build a
portion (typically 25-35 percent) of our systems according to forecast, the
absence of significant backlog for an extended period of time could hinder our
ability to plan expense, production and inventory levels, which could materially
adversely affect our operating results. Furthermore, a substantial portion of
our net revenue has historically been realized near the end of the quarter.
Accordingly, the failure to receive anticipated orders or delays in shipments
near the end of a quarter, due, for example, to unanticipated customer delays,
cancellations or manufacturing difficulties, may cause quarterly net revenue to
fall significantly short of our objectives, which could materially adversely
affect our operating results.

   The timing of new systems and technology announcements and releases by us and
others may also contribute to fluctuations in quarterly operating results,
including cases in which new systems or technology offerings cause customers to
defer ordering systems from our existing product lines. Our revenue and
operating results may also fluctuate due to the timing and mix of systems sold,
the volume of service provided and spare parts delivered in a particular quarter
and changes in pricing by us, our competitors or suppliers. The impact of these
and other factors on our revenue and operating results in any future periods is,
and will continue to be, difficult for us to forecast.

Our need for continued investment in research and development, for capital
equipment requirements and for extensive ongoing customer service and support
capability worldwide result in significant fixed costs which will be difficult
to reduce in the event that we do not meet our sales objectives.

   Our expense levels are based, in part, on expectations of future revenue. If
our revenues in a particular quarter do not meet expectations, our fixed and
significant operating expenses will adversely affect our results of operations.
The impact of maintaining significant fixed operating expenses without meeting
our sales objectives could harm our results of operations.

We must continue to improve our products and introduce new technologies and we
may not be able to introduce such improvements in a timely or effective enough
manner to compete successfully in our industry.

   The semiconductor manufacturing industry is subject to rapid technological
change and new system introductions and enhancements. We believe that our future
success depends on our ability to continue to enhance our existing systems and
their process capabilities, and to develop and manufacture in a timely manner
new systems with improved process capabilities. The industry also is subject to
fundamental changes in equipment requirements, such as the prior shift from six
inch wafer equipment to eight inch wafer equipment and the shift from eight inch
wafer equipment to twelve inch wafer equipment which is just now beginning.

   We must manage system transitions successfully, as introductions of new
systems could adversely affect sales of existing systems, including our 6500
series. There can be no assurance that we will be successful in the introduction
and volume manufacture of new systems or that we will be able to develop and
introduce, in a timely manner, new systems or enhancements to our existing
systems and processes which satisfy customer needs or achieve market adoption.
Our failure to accomplish any of the above would adversely affect our business,
financial condition and results of operations. In addition, we may incur
substantial unanticipated costs to ensure product functionality and reliability
early in our products' life cycles. If new products have quality or reliability
problems, we could experience reduced orders, delays in collecting accounts
receivable, higher manufacturing costs, and additional service and warranty
expenses, any of which could have a material adverse effect on our business,
financial condition and operating results.

                                       10
<PAGE>   11

Our sales cycles are lengthy, exposing us to the risks of inventory obsolescence
and fluctuations in operating results.

   Sales of our systems depend, in significant part, upon the decision of a
prospective customer to add new manufacturing capacity or to expand existing
manufacturing capacity, both of which typically involve a significant capital
commitment. We often experience delays in finalizing system sales following
initial system qualification while the customer evaluates and receives approvals
for the purchase of our systems and completes a new or expanded facility. Due to
these and other factors, our systems typically have a lengthy sales cycle (often
12 to 18 months in the case of critical etch systems) during which we may expend
substantial funds and management effort. Lengthy sales cycles subject us to a
number of significant risks, including inventory obsolescence and fluctuations
in operating results over which we have little or no control.

We may not be able to protect our intellectual property or obtain licenses for
third parties' intellectual property and therefore we may be exposed to
liability for infringement or the risk that our operations may be adversely
affected.

   Although we attempt to protect our intellectual property rights through
patents, copyrights, trade secrets and other measures, we may not be able to
protect our technology adequately and competitors may be able to develop similar
technology independently. Additionally, patent applications that we may file may
not be issued and foreign intellectual property laws may not protect our
intellectual property rights. There is also a risk that patents licensed by or
issued to us will be challenged, invalidated or circumvented and that the rights
granted thereunder will not provide competitive advantages to us. Furthermore,
others may independently develop similar systems, duplicate our systems or
design around the patents licensed by or issued to us.

   Although there are currently no pending claims or lawsuits by or against us
regarding possible infringement claims, other than those matters disclosed under
Item 3 -- Legal Proceedings, infringement claims by other third parties, or
claims for indemnification resulting from infringement claims, may be asserted
in the future and such assertions, if proven to be true, may materially
adversely affect us. In the future, additional litigation may be necessary to
enforce patents issued or exclusively licensed to us, to protect trade secrets
or know-how exclusively licensed to or owned by us or to defend us against
claimed infringement of the rights of others and to determine the scope and
validity of the proprietary rights of others. Existing litigation and any future
litigation could result in substantial cost and diversion of effort by us, which
by itself could have a material adverse effect on our financial condition and
operating results. Further, adverse determinations in such litigation could
result in our loss of proprietary rights, subject us to significant liabilities
to third parties, require us to seek licenses from third parties or prevent us
from manufacturing or selling our systems, any of which could have a material
adverse effect on us. In addition, licenses under third parties' intellectual
property rights may not be available on reasonable terms, if at all. See Item 3
-- Legal Proceedings.

Our future capital needs may exceed our ability to raise capital.

   The development, manufacture and marketing of etch systems are highly capital
intensive. In order to be competitive, we must continue to make significant
expenditures for, among other things, capital equipment and the manufacture of
evaluation and demonstration unit inventory for our 6500 series etch systems. We
believe that our existing cash balances, anticipated cash flow from operations
and funds available under our existing lines of credit will satisfy our
financing requirements for the next twelve months. Rapid revenue growth may
require that we seek additional capital to meet our working capital needs beyond
the next 12 months. Likewise, a sharp decline in future orders and revenues
might have a similar effect should we be unable to reduce our expenses to the
degree necessary to avoid incurring losses. To the extent that such financial
resources are insufficient to fund our activities, additional funds will be
required. We may not be able to obtain additional financing on reasonable terms
or at all. To the extent we raise additional capital through the sale of
additional equity or convertible debt securities, the issuance of these
securities could result in additional dilution to our stockholders.

Our customers are concentrated and therefore the loss of a significant customer
may harm our business.

   Tegal's top five customers accounted for 53.1%, 66.4% and 61.2% of our
systems revenues in fiscal 2000, 1999 and 1998, respectively. Three customers
accounted for more than 10% of net systems sales in fiscal 2000. Although the
composition of the group comprising our largest customers may vary from year to
year, the loss of a significant customer or any reduction in orders by any
significant customer, including reductions due to market, economic or
competitive conditions in the semiconductor manufacturing industry, may have a
material adverse effect on our business, financial condition and results of
operations. Our ability to increase our sales in the future will depend, in
part, upon our ability to obtain orders from new customers as well as the
financial condition and success of our existing customers and the general
economy, which is largely beyond our ability to control.

                                       11
<PAGE>   12

Because international sales account for a substantial portion of our revenue,
our international sales and operations may materially harm our financial results
due to political, legal and economic risks and to the impact of foreign exchange
rate fluctuations.

   International sales accounted for 59%, 72% and 61% of total revenue for
fiscal 2000, 1999 and 1998, respectively. International sales are subject to
certain risks, including the imposition of government controls, fluctuations in
the U.S. dollar (which could increase the sales price in local currencies of the
Company's systems in foreign markets), changes in export license and other
regulatory requirements, tariffs and other market barriers, political and
economic instability, potential hostilities, restrictions on the export or
import of technology, difficulties in accounts receivable collection,
difficulties in managing distributors or representatives, difficulties in
staffing and managing international operations and potentially adverse tax
consequences. Any of these factors may have a material adverse effect on us.

   We bill sales of our systems in certain countries in local currency, and we
have two lines of credit denominated in Japanese Yen. We generally attempt to
offset a portion of our U.S. dollar denominated balance sheet exposures subject
to foreign exchange rate remeasurement each period held by our foreign
subsidiaries whose books are denominated in currencies other than U.S. dollars
by purchasing currency options and forward currency contracts for future
delivery. There can be no assurance that our future results of operations will
not be adversely affected by foreign currency fluctuations. In addition, the
laws of certain countries in which our products are sold may not provide our
products and intellectual property rights with the same degree of protection as
the laws of the United States.

Our stockholder rights plan may deter takeover attempts.

   Under the terms of our stockholder rights plan, our Board of Directors is
authorized to issue preferred stock without further stockholder approval or to
exercise the anti-takeover provisions of our stockholder rights plan in the
event of an unsolicited attempt to assume control over the Company. Should our
Board of Directors exercise such rights, such action could have the effect of
delaying, deferring or preventing a change in control of Tegal.

Our stock price is volatile and could result in a material decline in the value
of your investment in Tegal.

   We believe that factors such as announcements of developments related to our
business, fluctuations in our operating results, sales of our common stock into
the market place, failure to meet or changes in analysts' expectations, general
conditions in the semiconductor industry or the worldwide economy, announcements
of technological innovations or new products or enhancements by us or our
competitors, developments in patents or other intellectual property rights,
developments in our relationships with our customers and suppliers, natural
disasters and outbreaks of hostilities could cause the price of our common stock
to fluctuate substantially. In addition, in recent years the stock market in
general, and the market for shares of small capitalization stocks in particular,
have experienced extreme price fluctuations, which have often been unrelated to
the operating performance of affected companies.

   Furthermore, the Securities and Exchange Commission is currently directing
that semiconductor capital equipment companies revise their revenue recognition
practices to record revenue upon customer acceptance rather than upon shipment
or delivery of systems, as is the current prevailing practice. As currently
intended, this application of Staff Accounting Bulletin (SAB) 101 will go into
effect no later than the fourth fiscal quarter after a company's year end which
occurs after December 15, 1999. As a result, SAB 101 will apply to our fourth
quarter ending March 31, 2001. In this case, our reported revenue and earnings
for the quarter ending March 31, 2001 may be less than the revenues and earnings
which we would otherwise report due to timing differences between system
shipment and customer acceptance. There can be no assurance that the market
price of our common stock will not experience significant fluctuations in the
future, including fluctuations that are unrelated to our performance.

Domestic and international economic conditions may expose our business to the
risk of limited demand for our products.

   Our business is subject to general economic conditions, both in the United
States and abroad. For example, in the last two years an economic crisis in Asia
has led to weak demand for our products in certain Asian economies -- notably
South Korea. Such economic events may continue to adversely affect our results
of operations, and additional economic events of a similar nature, such as a
global or regional recession, could, in the future, affect demand for our
products, which could have a material adverse effect on our business, financial
condition and operating results.

                                       12
<PAGE>   13

Potential disruption of our supply of materials required to build our systems
could have a negative effect on our operations and damage our customer
relationships.

   Material delays have not been significant in recent years. Nevertheless, we
procure certain components and sub-assemblies included in our systems from a
limited group of suppliers, and occasionally from a single source supplier. In
particular, we depend on MECS Corporation, a robotic equipment supplier, as the
sole source for the robotic arm used in all of our 6500 series systems. We
currently have no existing supply contract with MECS Corporation, and we
currently purchase all robotic assemblies from MECS Corporation on a purchase
order basis. Disruption or termination of certain of these sources, including
our robotic sub-assembly source, could have an adverse effect on our operations.
While we believe that alternative sources could be obtained and qualified to
supply these components or sub-assemblies, a prolonged inability to obtain such
components or sub-assemblies, receipt of defective components or sub-assemblies,
as well as difficulties or delays in shifting to alternative sources, could have
a material adverse effect on our operating results and could damage our
relationships with our customers.

Any failure by us to comply with environmental regulations imposed on us could
subject us to future liabilities, fines or requirements to modify our
manufacturing processes, which may be expensive.

   We are subject to a variety of governmental regulations related to the use,
storage, handling, discharge or disposal of toxic, volatile or otherwise
hazardous chemicals used in our manufacturing process. We believe that we are
currently in compliance in all material respects with these regulations and that
we have obtained all necessary environmental permits generally relating to the
discharge of hazardous wastes to conduct our business. Nevertheless, our failure
to comply with present or future regulations could result in fines being imposed
on us, suspension of production, alteration of our manufacturing processes, or
cessation of our operations. These environmental regulations could require us to
acquire expensive remediation equipment or to incur other expenses to comply
with environmental regulations. Any failure by us to control the use, disposal
or storage of, or adequately restrict the discharge of, hazardous substances
such as gasses or solvents could subject us to future liabilities for
environmental remediation, which could have a material adverse effect on our
operating results and financial condition.

SPECIAL NOTE REGARDING FORWARD LOOKING STATEMENTS

   This Form 10-K includes or incorporates by reference forward-looking
statements within the meaning of Section 27A of the Securities Act and Section
21E of the Exchange Act. Forward-looking statements, which are based on
assumptions and describe our future plans, strategies and expectations, are
generally identifiable by the use of the words "anticipate", "believe",
"estimate", "expect", "intend", "project", or similar expressions. These
forward-looking statements are subject to risks, uncertainties and assumptions
about us. Important factors that could cause actual results to differ materially
from the forward-looking statements we make in this Form 10-K are set forth
under the caption "Risk Factors" and elsewhere in this report and the documents
incorporated by reference in this report. If one or more of these risks or
uncertainties materialize, or if any underlying assumptions prove incorrect, our
actual results, performance or achievements may vary materially from any future
results, performance or achievements expressed or implied by these
forward-looking statements. All forward-looking statements attributable to us or
persons acting on our behalf are expressly qualified in their entirely by the
cautionary statements in this paragraph.

ITEM 2. PROPERTIES

   We maintain our headquarters, encompassing our executive office,
manufacturing, engineering, research and development operations, in one leased
120,000 square foot facility in Petaluma, California. We currently occupy 90,000
square feet of this building, with the remaining portion sublet or being offered
for sublet. The lease expires in March 2004. Other than certain large pieces of
capital equipment leased by us, we own substantially all of the machinery and
equipment used in its facilities. We believe that our existing facilities are
adequate to meet our requirements for several years.

   We lease sales, service and process support space in Santa Clara, California;
Manassas, Virginia; Munich, Germany; Kawasaki, Japan; Catania, Italy; Seoul,
South Korea and Hsin Chu City, Taiwan.

ITEM 3. LEGAL PROCEEDINGS

   On March 17, 1998, we filed a suit in the United States District Court in the
Eastern District of Virginia against Tokyo Electron Limited and several of its
U.S. subsidiaries (collectively, "TEL") alleging that TEL's 65DI and 85DI IEM
etch equipment infringe


                                       13
<PAGE>   14

certain of our patents. The suit was tried to the court in May 1999, and on
August 31, 1999, the court found both patents-in-suit valid, and found that TEL
had willfully infringed Tegal's '223 dual-frequency triode etcher patent. The
court enjoined TEL from further sales or service of its IEM etchers. In
addition, the court ordered TEL to pay attorney's fees and court costs to Tegal.
TEL has filed an appeal of the court's ruling. A follow-on action against TEL
concerning a later generation of IEM equipment is pending in the same court.
Trial is scheduled for September 11, 2000 in the follow-on action. We can not
assure you of the outcome of the appeal or the follow-on action or of the effect
of any such outcome on our business.

   On September 1, 1999, we filed a patent infringement action against Lam
Research Corporation ("Lam"), asserting infringement of the '223 patent and a
second, related patent. That suit was also filed in the Eastern District of
Virginia, Richmond Division. We are seeking injunctive relief barring Lam from
manufacturing, selling and supporting products that incorporate the Company's
patented technology. We are further seeking enhanced damages for willful
infringement of our patents. Lam filed a motion to dismiss that action for lack
of jurisdiction, or in the alternative to transfer that action to the Northern
District of California. On December 7, 1999, the motion to transfer was granted.
The case has since been transferred to the Northern District of California.
Discovery has begun in that action. We can not assure you of the outcome of that
lawsuit or of the effect of any such outcome on our business.

   As is typical in the semiconductor industry, we have received notices from
time to time from third parties alleging infringement claims. In July 1991, we
were advised by General Signal Corporation ("GSC") that we may need a license
under certain U.S. patents owned by GSC relating to "cluster tool" equipment.
Our 6500 series systems are generally configured with multiple process chambers
and, therefore, may be deemed "cluster tool" equipment. A number of companies
which were contacted by GSC with regard to licensing these patents formed an
ad-hoc committee to investigate the validity of the GSC patents. As a result of
such investigation, in November 1992 the committee members, including Tegal,
jointly notified GSC that they believe the subject patents are invalid and that,
accordingly, no license is necessary. In the fall of 1994, GSC filed suit
against Applied Materials, a non- member of the ad-hoc investigative committee,
alleging infringement of such patents. We believe that GSC's dispute with
Applied Materials has subsequently been settled. To date, GSC has taken no
action against us in connection with the licensing of these patents. We further
believe that GSC filed for bankruptcy protection and has since been dissolved.
Nevertheless, we can not assure you that GSC or its successors will not take any
such action in the future or, if any such action is taken, what the outcome of
such action may be.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

   No matters were submitted to a vote of security holders during the fourth
quarter ended March 31, 2000.

                                       14
<PAGE>   15

                      EXECUTIVE OFFICERS OF THE REGISTRANT

   The following sets forth certain information regarding the executive officers
of Tegal as of March 31, 2000:

<TABLE>
<CAPTION>

   NAME                       AGE                                  POSITION
   ----                       ---                                  --------
<S>                           <C>    <C>
   Michael L. Parodi          51     Chairman of the Board of Directors, President and Chief Executive Officer
   David Curtis               46     Vice President, Finance and Administration, Chief Financial Officer,
                                     Secretary and Treasurer
   Stephen P. DeOrnellas      45     Vice President, Technology and Corporate Development and Chief Technical Officer
   George B. Landreth         45     Vice President, Product Development
   James D. McKibben          49     Vice President, Worldwide Sales and Marketing
   Colin C. Tierney           53     Vice President, Worldwide Operations and Customer Support
</TABLE>


   Michael L. Parodi joined us as Director, President and Chief Executive
Officer in December 1997 and assumed the additional role of Chairman of the
Board in March 1999. From 1991 to 1996, Mr. Parodi was Chairman of the Board,
President and Chief Executive Officer of Semiconductor Systems, Inc. ("SSI"), a
manufacturer of photolithography processing equipment sold to the semiconductor
and thin film head markets until SSI was merged with FSI International ("FSI").
Mr. Parodi remained with FSI as Executive Vice President and General Manager of
SSI from the time of the merger to December 1997, integrating SSI into FSI. In
1990, Mr. Parodi led the acquisition of SSI from General Signal Corporation.
Prior to 1990, Mr. Parodi held various senior engineering and operations
management positions with General Signal Corporation, Signetics Corporation,
Raytheon Company, Fairchild Semiconductor Corporation and National Semiconductor
Corporation. Mr. Parodi currently is a member of the Semiconductor Equipment and
Materials International Board of Directors.

   David Curtis joined us in August 1991 as Vice President of Finance and
Administration and Chief Financial Officer and from May 1995 until June 1996, he
assumed the additional role of Vice President of Operations. Prior to joining
the Company, Mr. Curtis served as Chief Financial Officer of AMOT Controls
Corporation from 1988 until 1991. Prior to 1991, he held consulting positions
with Pittiglio Rabin Todd and McGrath, an operations consulting firm
specializing in implementing planning and control processes in rapidly growing
technology companies and with Arthur Andersen & Co.'s systems consulting
division.

   Stephen P. DeOrnellas joined us in July 1990 as Vice President of Marketing
and Technology, served as Vice President of Process Technology from April 1995
until June 1996, at which time he was appointed Vice President, Technology and
Corporate Development and Chief Technical Officer. From 1989 to 1990 he was Vice
President of Marketing for the Wafer Inspection Systems Division of KLA
Instruments Corporation ("KLA"). From 1981 to 1989 he held a variety of product
development and marketing management positions, including Vice President
Marketing from 1987 to 1989, Vice President of Process Engineering from 1983 to
1987, and Senior Process Engineer from 1981 to 1983, with Lam Research
Corporation where he had responsibility for the development and introduction of
the Lam Autoetch and Rainbow product lines.

   George B. Landreth joined us in November 1992 as Manager of Mechanical
Engineering where he was responsible for directing the development of the
Company's 6500 series critical etch systems platform. From June 1996 until April
1997 he served as Director of Program Development, at which time he was promoted
to Vice President, Product Development. Prior to joining us, Mr. Landreth held
product development engineering management and design engineering positions with
KLA, Silicon Valley Group, Inc., Optoscan Corporation, Eaton Corporation, Siltec
Corporation and Peterbilt Motors.

   James D. McKibben joined us in June 1996 as Vice President, Worldwide Sales.
In November 1998, he assumed the additional role of Vice President, Marketing.
Prior to joining us, from 1995 to 1996 and from 1988 to 1992, Mr. McKibben was
Vice President, Marketing, Sales and Customer Support for MRS Technology, Inc.,
a lithography equipment manufacturer for flat panel displays. From 1993 to 1995,
he served as Director of Marketing and Sales for SSI. From 1992 to 1993, he was
Regional Manager for Kulicke and Soffa Industries, Inc., a maker of wire bonders
and other back-end assembly equipment for the IC industry. Prior to 1988, Mr.
McKibben held several sales and service management positions with Wild/ Lietz,
Inc., GCA Corporation and J.T. Baker Chemical Company.

   Colin C. Tierney joined us in September 1998 as Vice President, Worldwide
Operations and Customer Support. From 1996 to 1998, he was Vice President
Operations with KLA where he led Operations through the merger with Tencor and
implemented new product introduction and demand flow technology processes. From
1988 to 1996, Mr. Tierney served as Vice President, Operations with Lam Research
Corporation where he led worldwide operations and facilities functions and
directed projects to integrate several

                                       15
<PAGE>   16

acquisitions. Prior to 1988, Mr. Tierney held senior operations positions with
Scientific Microsystems, Inc., Ultratech Stepper, Inc. and Diablo Systems Inc.,
a division of Xerox Corporation.

                                     PART II

ITEM 5. MARKET FOR THE REGISTRANT'S COMMON EQUITY AND RELATED STOCKHOLDER
MATTERS

   Since October 19, 1995, Tegal's common stock has been traded on the Nasdaq
National Market System under the symbol TGAL. The following table sets forth the
range of high and low sales prices for our common stock for each quarter during
the prior two fiscal years.


<TABLE>
<CAPTION>

                                                                                    HIGH         LOW
                                                                                    ----         ---
  FISCAL YEAR 1999
  <S>                                                                              <C>         <C>
  First Quarter...............................................................     7           3 11/16
  Second Quarter..............................................................     4 5/8       1 15/16
  Third Quarter...............................................................     3 5/8       1 3/8
  Fourth Quarter..............................................................     5 13/16     2 17/32

  FISCAL YEAR 2000
  First Quarter...............................................................     3 15/16     2 7/8
  Second Quarter..............................................................     4 3/4       2
  Third Quarter...............................................................     3 1/2       2
  Fourth Quarter..............................................................     9 11/16     5 1/2
</TABLE>


   The approximate number of record holders of our common stock as of March 31,
2000 was 243. We have not paid any cash dividends since our inception and do not
anticipate paying cash dividends in the foreseeable future. Further, our
domestic line of credit restricts the declaration and payment of cash dividends.

                                       16
<PAGE>   17

ITEM 6. SELECTED FINANCIAL DATA

<TABLE>
<CAPTION>

                                                                                       YEAR ENDED MARCH 31,
                                                               -------------------------------------------------------------------
                                                                 2000           1999           1998           1997          1996
                                                               --------       --------       --------       --------      --------
                                                                               (IN THOUSANDS, EXCEPT PER SHARE DATA)
       <S>                                                     <C>            <C>            <C>            <C>           <C>
       CONSOLIDATED STATEMENTS OF OPERATIONS DATA:
         Revenue ........................................      $ 26,438       $ 29,035       $ 41,472       $ 57,423      $ 62,046
         Gross profit ...................................         9,231          8,161         17,095         25,901        28,577
         Operating income (loss) ........................       (12,932)       (15,402)        (6,673)         3,180         6,572
         Income (loss) before income taxes ..............       (12,571)       (14,997)        (5,545)         4,180         6,186
         Net income (loss) ..............................       (12,571)       (15,132)        (5,545)         3,140         5,566
         Net income (loss) per share:(1)
            Basic .......................................         (1.15)         (1.42)         (0.54)          0.31          1.14
            Diluted .....................................         (1.15)         (1.42)         (0.54)          0.29          0.64
         Shares used in per share computation:
            Basic .......................................        10,964         10,630         10,364         10,124         4,506
            Diluted .....................................        10,964         10,630         10,364         10,764         8,760
       CONSOLIDATED BALANCE SHEET DATA:
         Cash and cash equivalents ......................      $ 12,627       $ 17,569       $ 25,660       $ 30,323      $ 23,283
         Working capital ................................        24,993         27,298         39,574         45,392        41,726
         Total assets ...................................        35,573         39,652         55,146         63,524        64,672
         Short-term notes payable to banks and others ...           430            223            285            252           243
         Long-term obligations ..........................           130             30            101            301           356
         Stockholders' equity ...........................        27,431         30,816         44,804         50,542        47,626
</TABLE>

------------

(1) See Note 1 of Tegal's Consolidated Financial Statements for an explanation
of the computation of earnings per share.




<TABLE>
<CAPTION>
                                                                    THREE MONTHS ENDED
                            ---------------------------------------------------------------------------------------------------
                            June 30,     Sept. 30      Dec. 31     March 31,    June 30,     Sept. 30,    Dec. 31,     March 31,
                              1998         1998         1998         1999         1999         1999         1999         2000
                            --------     --------     --------     --------     --------     --------     --------     --------
QUARTERLY FINANCIAL DATA:                                   (IN THOUSANDS, EXCEPT PER SHARE DATA)
<S>                         <C>          <C>          <C>          <C>          <C>          <C>          <C>          <C>
  Revenue ..............    $  6,484     $ 10,033     $  6,456     $  6,062     $  6,659     $  4,700     $  6,541     $  8,538
  Gross profit .........       2,383        2,712        1,814        1,252        2,157        1,536        2,181        3,357
  Net loss .............      (3,390)      (3,075)      (3,934)      (4,733)      (3,765)      (3,988)      (2,897)      (1,921)
  Net loss per share ...       (0.32)       (0.29)       (0.37)       (0.44)       (0.35)       (0.37)       (0.27)       (0.17)
</TABLE>

                                       17
<PAGE>   18

ITEM 7. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
OF OPERATIONS

     Information contained herein contains "forward-looking statements" within
the meaning of the Private Securities Litigation Reform Act of 1995, which can
be identified by the use of forward-looking terminology such as "may," "will,"
"expect," "anticipate," "estimate" or "continue" or the negative thereof or
other variations thereon or comparable terminology or which constitute projected
financial information. The following contains cautionary statements identifying
important factors with respect to such forward-looking statements, including
certain risks and uncertainties, that could cause actual results to differ
materially from those in such forward-looking statements.

RESULTS OF OPERATIONS

     The following table sets forth certain financial data for the years
indicated as a percentage of revenue:


<TABLE>
<CAPTION>

                                                      MARCH 31,
                                        ----------------------------------
                                          2000          1999          1998
                                        ------        ------        ------
<S>                                     <C>           <C>           <C>
Revenue ..........................       100.0%        100.0%        100.0%
Cost of sales ....................        65.1          71.9          58.8
                                        ------        ------        ------
Gross profit .....................        34.9          28.1          41.2
                                        ------        ------        ------
Operating expenses:
  Research and development .......        38.0          33.0          26.6
  Sales and marketing ............        18.1          18.0          14.7
  General and administrative .....        27.7          30.1          16.0
                                        ------        ------        ------
          Total operating expenses        83.8          81.1          57.3
                                        ------        ------        ------
Operating loss ...................       (48.9)        (53.0)        (16.1)
Other income net .................         1.4           1.4           2.7
                                        ------        ------        ------
Loss before income taxes .........       (47.5)        (51.6)        (13.4)
Provision for income taxes .......         0.0          (0.5)          0.0
                                        ------        ------        ------
          Net loss ...............       (47.5)%       (52.1)%       (13.4)%
                                        ======        ======        ======
</TABLE>


YEARS ENDED MARCH 31, 2000, 1999 AND 1998

Revenue

   Our revenue is derived from sales of new and refurbished systems, spare parts
and non-warranty service. Revenue declined 9 percent in fiscal 2000 from fiscal
1999 (to $26.4 million from $29.0 million). Revenue declined 30 percent in
fiscal 1999 from fiscal 1998 (to $29.0 million from $41.5 million). The revenue
decline in fiscal 2000 as compared to fiscal 1999 was principally attributable
to selling one less 6500 series system resulting in $1.6 million less revenue in
fiscal 2000. In addition, our service revenue declined by $0.6 million in fiscal
2000 over fiscal 1999. Nevertheless, during the second half of fiscal 2000, we
experienced an increase in both service and spare parts revenue which, we
believe, is a consequence of customers increasing their use of our systems. The
increased service revenue in the fourth quarter of fiscal 2000 was roughly equal
to the average quarterly service revenue in fiscal 1999. The revenue decline in
fiscal 1999 as compared to fiscal 1998 was principally attributable to a decline
in the number of 900 and 6500 series etch systems sold as the semiconductor
industry curtailed its capital equipment expenditures in the face of an industry
slowdown. We believe that sales of its 6500 series systems were adversely
affected in fiscal 1999 by the Korean financial crisis which became apparent in
the fall of 1997 and began to adversely impact our sales of 6500 series systems
in the fourth quarter of fiscal 1998. Our sales of spare parts and service also
declined by approximately $4.2 million in fiscal 1999 over fiscal 1998, which we
believe was principally due to our customers operating their Tegal equipment at
a lower level of utilization during the industry slowdown.

   International sales accounted for approximately 59, 72 and 61 percent of
total revenue in fiscal 2000, 1999 and 1998, respectively. We expect that
international sales will continue to account for a significant portion of our
revenue.

Gross Profit

   Our gross profit as a percentage of revenue (gross margin) increased to 35
percent in fiscal 2000 from 28 percent in fiscal 1999 but remained below the 41
percent in fiscal 1998. The gross margin increase in fiscal 2000 as compared to
fiscal 1999 is principally due to reduced costs in service and spare parts. In
the case of service, expenses in fiscal 2000 were materially less due to reduced
headcount and in the case of spares, margins were improved due to a favorable
mix of parts sold, other inventory related costs including reduced provisions
for excess and obsolete inventory of $0.3 million. The gross margin decline in
fiscal 1999 as compared to fiscal 1998 was

                                       18
<PAGE>   19

principally attributable to spreading substantially fixed manufacturing overhead
expenses over significantly fewer systems manufactured and spare parts revenue.

   Our gross profit as a percentage of revenue has been, and will continue to
be, affected by a variety of factors, including the mix and average selling
prices of systems sold and the costs to manufacture, service and support new
product introductions and enhancements. Gross margins for our 6500 series
systems are typically lower than those of our more mature 900 series systems due
to the inefficiencies and lower vendor discounts associated with lower order
volumes and increased service installation and warranty support.

Research and Development

   Research and development expenses consist primarily of salaries, prototype
material and other costs associated with our research and product development
efforts. In absolute dollars, research and development expenses increased to
$10.1 million in fiscal 2000 from $9.6 million in fiscal 1999 and declined from
$11.0 million in fiscal 1998. Research and development as a percentage of
revenue increased to 38 percent in fiscal 2000 from 33 percent in fiscal 1999
and 27 percent in fiscal 1998, as we continued to enhance and support our new
6500 series systems in spite of the overall revenue decline in both fiscal
years. The absolute dollar increase in fiscal 2000 expenses over fiscal 1999
expenses was attributable to increased spending on prototype material
enhancements to the 6500 series system. The absolute dollar decrease in fiscal
1999 expenses over fiscal 1998 expenses was attributable to reduced spending on
salaries and related expenses due to a reduction in headcount in September 1998.
We anticipate that fiscal 2001 research and development expenses in absolute
dollars will continue at or decline slightly from fiscal 2000 levels to permit
us to support new process applications at our 6500 series customer installations
and to further enhance the 6500 series product line, while permitting research
and development expenses as a percentage of sales to decline to a more
sustainable ratio.

Sales and Marketing

   Sales and marketing expenses primarily consist of salaries, commissions,
trade show promotion and advertising expenses. In absolute dollars, sales and
marketing expenses declined to $4.8 million in fiscal 2000 from $5.2 million in
fiscal 1999 and $6.1 million in fiscal 1998. As a percentage of revenue, sales
and marketing expenses remained at 18 percent in fiscal 2000 and fiscal 1999 and
increased from 15 percent in fiscal 1998. The absolute dollar declines in sales
and marketing expenses in fiscal 2000 versus fiscal 1999 and in fiscal 1999
versus fiscal 1998 were principally due to declines in systems sales volumes,
resulting in lower commission spending and to reduced spending on advertising.
We expect to increase slightly our absolute dollar spending on sales and
marketing in fiscal 2001 for higher commission expenses on an anticipated
increase in systems sales.

General and Administrative

   General and administrative expenses consist of salaries, legal, accounting
and related administrative services and expenses associated with general
management, finance, information systems, human resources and investor relations
activities. General and administrative expenses in absolute dollars decreased to
$7.3 million in fiscal 2000 from $8.7 million in fiscal 1999 and increased from
$6.6 million in fiscal 1998. As a percentage of revenues, general and
administrative expenses declined to 28 percent in fiscal 2000 from 30 percent in
fiscal 1999 and increased from 16 percent in fiscal 1998. The absolute dollar
decrease in general and administrative expenses in fiscal 2000 over fiscal 1999
was primarily attributable to a $1.1 million decline in litigation-related
expenses in fiscal 2000. The increase in fiscal 1999 over fiscal 1998 was
attributable to our incurring an additional $2.7 million in legal fees and
expenses in connection with our patent disputes with TEL during fiscal 1999. We
anticipate that our general and administrative expenses for fiscal 2001 will be
somewhat lower than fiscal 2000 spending due primarily to anticipated reductions
in legal costs associated with our intellectual property after the first half of
fiscal 2001.

Other Income, Net

   Other income, net, consists principally of interest income, interest expense,
gains and losses on foreign exchange and the sale of fixed assets. We recorded
net non-operating income of $0.4 million, $0.4 million and $1.1 million in
fiscal 2000, 1999 and 1998, respectively. In all three years, net non-operating
income was primarily attributable to interest income on outstanding cash
balances.

                                       19
<PAGE>   20

Provision for Income Taxes

   Our effective tax rate was zero percent, in fiscal 2000, 1999 and 1998. We
incurred net losses before taxes in all three years and therefore recorded no
tax provision in fiscal 2000 and 1998 and recorded a tax provision of $0.1
million in fiscal 1999 associated with our operations in Japan.

Liquidity and Capital Resources

   For fiscal 2000, 1999 and 1998, we financed our operations from available
cash balances.

   Net cash used in operations was $13.6 million in fiscal 2000, due principally
to a net loss of $11.0 million after adjusting for depreciation, an increase in
accounts receivable and inventories offset in part by a decline in other current
assets and an increase in accrued expenses and accounts payable. Net cash used
in operations was $8.8 million in fiscal 1999, due principally to a net loss of
$13.2 million after adjusting for depreciation, a decline in accrued expenses
and accounts payable offset, in part, by a decline in accounts receivable,
inventories, and other current assets. Net cash used in operations was $2.9
million in fiscal 1998, due principally to a net loss of $3.1 million after
adjusting for depreciation, a decline in accrued expenses and an increase in
inventories offset, in part, by a decline in accounts receivable.

   Net capital expenditures totaled $0.6 million, $0.1 million and $1.3 million
in fiscal 2000, 1999 and 1998, respectively. Capital expenditures in all three
years were incurred principally for demonstration equipment, leasehold
improvements and to acquire design tools, analytical equipment and computers.

   Net cash provided by financing activities totaled $9.2 million for fiscal
2000, due principally to proceeds from the sale of 1.3 million shares of our
common stock and from the exercise of employee stock options and employee
participation in our stock purchase plan. Net cash provided by financing
activities for fiscal 1999 and 1998 were immaterial.

   As of March 31, 2000, we had approximately $12.6 million of cash and cash
equivalents. In addition to cash and cash equivalents, our other principal
sources of liquidity consisted of unused portions of several bank borrowing
facilities. As of March 31, 2000, we had available $5.6 million of unused
domestic credit line availability with no borrowings against that line. The
domestic credit line bore interest at prime plus 1.5 percent, or 10.5% as of
March 31, 2000. In April 2000, we replaced our prior domestic line of credit
with a new line of credit with a maximum borrowing capacity of $10 million
secured by substantially all of our assets. The new facility will be available
until April 2003 and bears interest at prime plus 1.5 percent. In addition to
the foregoing facility, as of March 31, 2000, our Japanese subsidiary had
available two lines of credit available for a total of 406 million Yen
(approximately $3.8 million at exchange rates prevailing on March 31, 2000)
unused portion of two Japanese bank lines of credit totaling 450 million Yen
(approximately $4.3 million at exchange rates prevailing on March 31, 2000)
secured by Japanese customer promissory notes held by such subsidiary in advance
of payment on customers' accounts receivable. The two Japanese bank lines bear
interest at Japanese prime (1.375 percent as of March 31, 2000) plus 0.25
percent and 0.375 percent, respectively.

   We believe that anticipated cash flow from operations, funds available under
our lines of credit and existing cash and cash equivalent balances will be
sufficient to meet our cash requirements for the next twelve months. Rapid
revenue growth may require that we seek additional equity or debt capital to
meet our working capital needs beyond the next 12 months. See Item 1 -- Business
-- Risk Factors -- Our future capital needs may exceed our ability to raise
capital.

ITEM 7A. QUANTITATIVE AND QUALITATIVE DISCLOSURE ABOUT MARKET RISK

Market Risk Disclosure

   We are exposed to financial market risks, including changes in foreign
currency exchange ("FX") rates and interest rates. To mitigate the risks
associated with FX rates, we utilize derivative financial instruments. We do not
use derivative financial instruments for speculative or trading purposes.

   We manufacture the majority of our products in the US; however, we service
customers worldwide and thus have a cost base that is diversified over a number
of European and Asian currencies as well as the US dollar. This diverse base of
local currency costs serves to mitigate partially the earnings effect of
potential changes in value of our local currency denominated revenue.
Additionally, we denominate our export sales in US dollars, whenever possible.

                                       20
<PAGE>   21

   We manage short-term exposures to changing FX rates with financial market
transactions, principally through the purchase of forward FX contracts to offset
the earnings and cash-flow impact of the nonfunctional currency-denominated
receivables. Forward FX contracts are denominated in the same currency as the
receivable being hedged, and the term of the forward FX contract matches the
term of the underlying receivable. The receivables being hedged arise from trade
transactions and other firm commitments affecting us.

   We do not hedge our foreign currency exposure in a manner that would entirely
eliminate the effects of changes in FX rates on our operations. Accordingly, our
reported revenue and results of operations have been, and may in the future, be
affected by changes in the FX rates. We have utilized a sensitivity analysis for
the purpose of identifying its market risk, in relation to underlying
transactions that are sensitive to FX rates including foreign currency forward
exchange contracts and nonfunctional currency denominated receivables. The net
amount that is exposed to changes in foreign currency rates was evaluated
against a 10% change in the value of the foreign currency versus the US dollar.
Based on this analysis, we believe that we are not materially sensitive to
changes in foreign currency rates on our net exposed FX position.

   A 68 basis-point move in the weighted average interest rates (10% of Tegal's
weighted average interest rates in 2000) affecting our floating rate financial
instruments as of March 31, 2000, would have an immaterial effect on Tegal's
pretax results of operations over the next fiscal year.

   All of the potential changes noted above are based on sensitivity analyses
performed on our balances as of March 31, 2000.

                                       21
<PAGE>   22


ITEM 8. FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA

                               TEGAL CORPORATION

                          CONSOLIDATED BALANCE SHEETS
                       (IN THOUSANDS, EXCEPT SHARE DATA)


<TABLE>
<CAPTION>

                                     ASSETS
                                                                                MARCH 31,
                                                                          -----------------------
                                                                            2000           1999
                                                                          --------       --------
Current assets:
<S>                                                                       <C>            <C>
  Cash and cash equivalents ........................................      $ 12,627       $ 17,569
  Accounts receivable, less allowance for returns and doubtful
     accounts of $449 and $264 .....................................         6,438          4,831
  Inventory ........................................................        13,261         12,226
  Prepaid expenses and other current assets ........................           679          1,478
                                                                          --------       --------
          Total current assets .....................................        33,005         36,104
Property and equipment, net ........................................         2,223          3,185
Other assets, net ..................................................           345            363
                                                                          --------       --------
                                                                          $ 35,573       $ 39,652
                                                                          ========       ========
                             LIABILITIES AND STOCKHOLDERS' EQUITY

Current liabilities:
  Notes payable ....................................................      $    430       $    223
  Accounts payable .................................................         2,538          2,254
  Accrued expenses and other current liabilities ...................         5,044          6,329
                                                                          --------       --------
          Total current liabilities ................................         8,012          8,806
Long term portion of capital lease obligations .....................           130             30
                                                                          --------       --------
          Total liabilities ........................................         8,142          8,836
                                                                          --------       --------
Commitments and contingencies (Note 6)
Stockholders' equity:
  Preferred stock; $0.01 par value; 5,000,000 shares
     authorized; none issued and outstanding .......................            --             --
  Common stock; $0.01 par value; 35,000,000 shares authorized;
     12,452,744 and 10,725,650 shares issued and outstanding .......           124            107
  Additional paid-in capital .......................................        64,699         55,635
  Accumulated other comprehensive income ...........................           261            156
  Accumulated deficit ..............................................       (37,653)       (25,082)
                                                                          --------       --------
          Total stockholders' equity ...............................        27,431         30,816
                                                                          --------       --------
                                                                          $ 35,573       $ 39,652
                                                                          ========       ========
</TABLE>

          See accompanying notes to consolidated financial statements.


                                       22
<PAGE>   23

                                TEGAL CORPORATION

                      CONSOLIDATED STATEMENTS OF OPERATIONS
                      (IN THOUSANDS, EXCEPT PER SHARE DATA)

<TABLE>
<CAPTION>

                                                        YEAR ENDED MARCH 31,
                                               --------------------------------------
                                                 2000           1999           1998
                                               --------       --------       --------
<S>                                            <C>            <C>            <C>
Revenue .................................      $ 26,438       $ 29,035       $ 41,472
Cost of sales ...........................        17,207         20,874         24,377
                                               --------       --------       --------
  Gross profit ..........................         9,231          8,161         17,095
                                               --------       --------       --------
Operating expenses:
  Research and development ..............        10,061          9,594         11,048
  Sales and marketing ...................         4,782          5,221          6,107
  General and administrative ............         7,320          8,748          6,613
                                               --------       --------       --------
          Total operating expenses ......        22,163         23,563         23,768
                                               --------       --------       --------
  Operating loss ........................       (12,932)       (15,402)        (6,673)
Other income, net .......................           361            405          1,128
                                               --------       --------       --------
  Loss before income taxes ..............       (12,571)       (14,997)        (5,545)
Provision for income taxes ..............            --            135             --
                                               --------       --------       --------
  Net loss ..............................      $(12,571)      $(15,132)      $ (5,545)
                                               ========       ========       ========
Net loss per share:
  Basic and diluted .....................      $  (1.15)      $  (1.42)      $   (.54)
Shares used in per share computation:
  Basic and diluted .....................        10,964         10,630         10,364
</TABLE>



          See accompanying notes to consolidated financial statements.

                                       23
<PAGE>   24

                                TEGAL CORPORATION

                 CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY
                        (IN THOUSANDS, EXCEPT SHARE DATA)
<TABLE>
<CAPTION>


                                                                                           ACCUMULATED
                                                                                              OTHER
                                                        COMMON STOCK         ADDITIONAL   COMPREHENSIVE                   TOTAL
                                                 -------------------------     PAID-IN        INCOME      ACCUMULATED  STOCKHOLDERS'
                                                  SHARES          AMOUNT       CAPITAL        (LOSS)        DEFICIT       EQUITY
                                                 ---------       ---------   ----------   -------------   -----------  -------------
<S>                                              <C>             <C>         <C>          <C>             <C>          <C>
 Balances of March 31, 1997 .................    10,279,721      $     103    $  54,821      $      23     $  (4,405)   $  50,542
 Common stock issued under option and
   stock purchase plans .....................       286,317              3          356                                       359
 Net loss ...................................                                                                 (5,545)
 Cumulative translation adjustment ..........                                                     (552)
 Total comprehensive loss ...................                                                                              (6,097)
                                                 ----------      ---------    ---------      ---------     ---------    ---------
 Balances at March 31, 1998 .................    10,566,038            106       55,177           (529)       (9,950)      44,804
 Common stock issued under option and
   stock purchase plans .....................       159,612              1          458                                       459
 Net loss ...................................                                                               (15,132)
 Cumulative translation adjustment ..........                                                      685
 Total comprehensive loss ...................                                                                             (14,447)
                                                 ----------      ---------    ---------      ---------     ---------    ---------
 Balances at March 31, 1999 .................    10,725,650            107       55,635            156       (25,082)      30,816
 Common stock sold, net of issuance
   costs of $480 ............................     1,292,336             13        7,507                                     7,520
 Common stock issued under option and
 stock purchase plans .......................       434,758              4        1,557                                     1,561
 Net loss ...................................                                                                (12,571)
 Cumulative translation adjustment ..........                                                      105
 Total comprehensive loss ...................                                                                             (12,466)
                                                 ----------      ---------    ---------      ---------     ---------    ---------
 Balances at March 31, 2000 .................    12,452,744      $     124    $  64,699      $     261     $ (37,653)   $  27,431
                                                 ==========      =========    =========      =========     =========    =========
</TABLE>


          See accompanying notes to consolidated financial statements.

                                       24
<PAGE>   25


                                TEGAL CORPORATION

                      CONSOLIDATED STATEMENTS OF CASH FLOWS
                                 (IN THOUSANDS)

<TABLE>
<CAPTION>

                                                                                                 YEAR ENDED MARCH 31,
                                                                                       --------------------------------------
                                                                                         2000           1999           1998
                                                                                       --------       --------       --------
            <S>                                                                        <C>            <C>            <C>
            Cash flows from operating activities:
              Net loss ..........................................................      $(12,571)      $(15,132)      $ (5,545)
                 Adjustments to reconcile net loss to net cash used in
                   operating activities:
                   Deferred income taxes ........................................            --            239             --
                   Depreciation and amortization ................................         1,559          1,904          2,299
                   Allowance for doubtful accounts and sales return
                      allowances ................................................           185           (277)          (222)
                   Changes in operating assets and liabilities:
                      Accounts receivable .......................................        (1,545)         4,763          3,663
                      Inventory .................................................        (1,067)         1,963         (1,773)
                      Prepaid expenses and other assets .........................           872          1,168           (485)
                      Accounts payable and other current liabilities ............          (979)        (2,817)        (1,307)
                                                                                       --------       --------       --------
                      Net cash used in operating activities .....................       (13,546)        (8,189)        (3,370)
                                                                                       --------       --------       --------
            Cash flows used in investing activities for the purchases of
              property and equipment ............................................          (597)          (106)        (1,283)
                                                                                       --------       --------       --------
            Cash flows from financing activities:
              Net proceeds from issuance of common stock ........................         9,081            460            359
              Borrowings under notes payable ....................................         9,264          2,164          3,516
              Repayment of notes payable ........................................        (9,057)        (2,226)        (3,483)
              Repayment of capital lease financing ..............................          (105)          (224)          (348)
                                                                                       --------       --------       --------
                      Net cash provided by financing activities .................         9,183            174             44
                                                                                       --------       --------       --------
            Effect of exchange rates on cash and cash equivalents ...............            18             30            (54)
                                                                                       --------       --------       --------
            Net decrease in cash and cash equivalents ...........................        (4,942)        (8,091)        (4,663)
            Cash and cash equivalents at beginning of year ......................        17,569         25,660         30,323
                                                                                       --------       --------       --------
            Cash and cash equivalents at end of year ............................      $ 12,627       $ 17,569       $ 25,660
                                                                                       ========       ========       ========
            Supplemental disclosures of cash paid during the year Interest ......      $    123       $     28       $     68
                                                                                       ========       ========       ========
              Income taxes ......................................................      $    332       $     --       $     --
                                                                                       ========       ========       ========
            Supplemental disclosure of noncash investing and financing
              activities Transfer of demo lab equipment between inventory and
              fixed assets ......................................................      $    255       $   (249)      $    682
                                                                                       ========       ========       ========
</TABLE>


          See accompanying notes to consolidated financial statements.

                                       25
<PAGE>   26

                                TEGAL CORPORATION

                 NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
     (ALL AMOUNTS IN THOUSANDS, EXCEPT SHARE DATA, UNLESS OTHERWISE NOTED)

NOTE 1. DESCRIPTION OF BUSINESS AND SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

Description of Business

   Tegal Corporation (the "Company") designs, manufactures, markets, and
services plasma etch systems used in the fabrication of integrated circuits
("ICs") and related devices in voice and data telecommunications, thin film
head, small flat panel and printer head applications. Etching constitutes one of
the principal IC and related device production process steps and must be
performed numerous times in the production of such devices.

Basis of Presentation

   The consolidated financial statements include the accounts of the Company and
all of its subsidiaries. Intercompany transactions and balances are eliminated
in consolidation. Accounts denominated in foreign currencies are translated
using the foreign currencies as the functional currencies. Assets and
liabilities of foreign operations are translated to U.S. dollars at current
rates of exchange and revenues and expenses are translated using weighted
average rates. The effects of translating the financial statements of foreign
subsidiaries into U.S. dollars are reported as cumulative other comprehensive
income, a separate component of stockholders' equity. Gains and losses from
foreign currency transactions are included as a separate component of other
income (expense).

   The preparation of financial statements in conformity with generally accepted
accounting principles requires management to make estimates and assumptions that
affect the reported amounts of assets and liabilities and disclosures of
contingent assets and liabilities at the date of the financial statements and
the reported amounts of revenues and expenses during the reporting periods.
Actual results could vary from those estimates, although such differences are
not expected to be material to the financial statements.

Cash and Cash Equivalents

   The Company considers all highly liquid debt instruments having a maturity of
three months or less on the date of purchase to be cash equivalents.

   At March 31, 2000 and 1999, all of the Company's investments are classified
as cash equivalents on the balance sheet. The investment portfolio at March 31,
2000 and 1999 is comprised of money market funds. At March 31, 2000 and 1999,
the fair value of the Company's investments approximated cost.

Fair Value of Financial Instruments

   The carrying amount of the Company's financial instruments, including
accounts receivable, approximates fair value, due to their relatively short
maturity. The Company has foreign subsidiaries which operate and sell the
Company's products in various global markets. As a result, the Company is
exposed to changes in foreign currency exchange rates. The Company utilizes
hedge instruments, primarily forward contracts to manage its exposure associated
with firm third-party transactions denominated in non-functional currencies. The
Company does not hold derivative financial instruments for speculative purposes.
Forward contracts are considered identifiable hedges and realized and unrealized
gains and losses are deferred until settlement of the hedged items. They are
recognized as other gains or losses when a hedged transaction is no longer
expected to occur. Deferred gains and losses were not significant at March 31,
2000 or 1999. Foreign currency gains and losses included in other income
(expense) were not significant for the years ended March 31, 2000, 1999 and
1998.

   At March 31, 2000, the Company had no forward exchange contracts. At March
31, 1999, the Company had forward exchange contracts maturing at various dates
throughout fiscal 2000 to exchange 178,338 Yen into $1,427 which also
represented the fair value of these instruments at March 31, 1999.

   The Company enters into foreign exchange contracts to partially hedge net
accounts receivable or payable U.S. dollar positions on the books of its
subsidiaries which are subject to periodic remeasurement. Gains or losses on the
contracts that offset any gains or

                                       26
<PAGE>   27

losses on the underlying balance sheet exposures are recognized as a foreign
exchange gain over the term of the options. To date, foreign currency gains on
foreign exchange contracts have been immaterial.

Concentration of Credit Risk

   Financial instruments that potentially subject the Company to significant
concentration of credit risk consist primarily of temporary cash investments and
accounts receivable. Substantially all of the Company's temporary investments
are invested in money market funds. The Company's accounts receivable are
derived primarily from sales to customers located in the U.S., Europe, and Asia.
The Company performs ongoing credit evaluations of its customers and generally
requires no collateral. The Company maintains reserves for potential credit
losses. Write-offs during the periods presented have been insignificant. As of
March 31, 2000, two customers accounted for approximately 34 percent and 12
percent of the accounts receivable balance. As of March 31, 1999, one customer
accounted for approximately 35 percent of the accounts receivable balance.

Inventory

   Inventory is stated at the lower of cost or market, with cost being
determined under the first-in, first-out method.

Property and Equipment

   Property and equipment is recorded at cost. Depreciation is calculated using
the straight-line method over the estimated useful lives of the assets, ranging
from three to seven years. Leasehold improvements are stated at cost and are
amortized using the straight-line method over the shorter of the estimated
useful life of the improvements or the lease term.

Revenue Recognition

   Systems and spares revenue is recognized when title passes to the customer. A
provision for installation costs and estimated future warranty costs is recorded
at the time revenue is recognized. Service revenue is recognized as the related
services are provided, unless services are paid for in advance according to
service contracts, in which case revenue is deferred and recognized over the
service period using the straight-line method.

Earnings Per Share

   Basic Earnings Per Share ("EPS") is computed by dividing net income available
to common stockholders by the weighted average number of common shares
outstanding during the period. Diluted EPS is computed using the weighted
average number of common shares outstanding plus any potentially dilutive
securities, except when antidilutive.

Stock-Based Compensation

   The Company accounts for stock-based compensation using the intrinsic value
method prescribed in Accounting Principles Board Opinion No. 25, "Accounting for
Stock Issued to Employees," and related interpretations. The Company's policy is
to grant options with an exercise price equal to the closing market price of the
Company's stock on the grant date. Accordingly, no compensation cost for stock
option grants has been recognized in the Company's statements of operations. The
Company provides additional pro forma disclosures as required under Statement of
Financial Accounting Standard No. 123 ("SFAS 123"), "Accounting for Stock-Based
Compensation" (see Note 7).

Comprehensive Income

   In fiscal 1999, the Company adopted SFAS No. 130, "Reporting Comprehensive
Income." Comprehensive income is defined as the change in equity of a company
during a period from transactions and other events and circumstances excluding
transactions resulting from investments by owners and distributions to owners.
The primary difference between net income and comprehensive income for Tegal, is
attributable to foreign currency translation adjustments. Comprehensive income
is shown in the statement of stockholders' equity.

                                       27
<PAGE>   28

New Accounting Pronouncements

   In June 1998, the Financial Accounting Standards Board issued SFAS No. 133,
"Accounting for Derivative Instruments and Hedging Activities." SFAS No. 133
requires that an entity recognize all derivatives as either assets or
liabilities in the statement of financial position and measure those instruments
at fair value. It further provides criteria for derivative instruments to be
designated as fair value, cash flow and foreign currency hedges and establishes
respective accounting standards for reporting changes in the fair value of the
instruments. The statement is effective for all fiscal quarters of fiscal years
beginning after June 15, 2000 pursuant to the issuance of SFAS No. 137,
"Accounting for Derivative Instruments and Hedging Activities -- Deferral of the
Effective Date of FASB statement No. 133," which deferred the effective date of
SFAS No. 133 by one year. Upon adoption of SFAS No. 133, the Company will be
required to adjust hedging instruments to fair value in the balance sheet and
recognize the offsetting gain or loss as transition adjustments to be reported
in net income or other comprehensive income, as appropriate, and presented in a
manner similar to the cumulative effect of a change in accounting principle.
While the Company believes the adoption of this statement will not have a
significant effect on the Company's results of operations, the impact of the
adoption of SFAS No. 133 as of the effective date cannot be reasonably estimated
at this time.

   In December 1999, the Securities and Exchange Commission ("SEC") issued Staff
Accounting Bulletin No. 101 ("SAB 101"), "Revenue Recognition in Financial
Statements." SAB 101 summarizes certain of the SEC's views in applying generally
accepted accounting principles ("GAAP") to revenue recognition in financial
statements. The Company is required to adopt SAB 101 in the quarter beginning on
April 1, 2000 and is currently evaluating its impact on its financial statements
and related disclosures.

NOTE 2. BALANCE SHEET AND INCOME STATEMENT DETAIL

   Inventory consisted of:

<TABLE>
<CAPTION>

                                        MARCH 31,
                                   -----------------
                                     2000      1999
                                   --------  -------
<S>                                <C>       <C>
Raw materials..................    $  2,579  $ 2,554
Work in process................         633    1,590
Finished goods and spares......      10,049    8,082
                                   --------  -------
                                   $ 13,261  $12,226
                                   ========  =======
</TABLE>


   Property and equipment consisted of:

<TABLE>
<CAPTION>

                                                     MARCH 31,
                                             -----------------------
                                               2000           1999
                                             --------       --------
<S>                                          <C>            <C>
Machinery and equipment ...............      $  8,229       $  8,081
Demo lab equipment ....................         2,795          3,050
Leasehold improvements ................         2,998          2,976
                                             --------       --------
                                               14,022         14,107
Less accumulated depreciation and
amortization ..........................       (11,799)       (10,922)
                                             --------       --------
                                             $  2,223       $  3,185
                                             ========       ========
</TABLE>

   Machinery and equipment at March 31, 2000 and 1999 includes approximately
$484 and $607, respectively, of assets under leases that have been capitalized.
Accumulated amortization for such equipment approximated $265 and $523,
respectively.

   A summary of accrued expenses and other current liabilities follows:

<TABLE>
<CAPTION>

                                             MARCH 31,
                                        ------------------
                                         2000        1999
                                        ------      ------
<S>                                     <C>         <C>
Accrued compensation costs .......      $1,193      $1,340
Income taxes payable .............         596         615
Product warranty .................       1,188       1,355
Other ............................       2,067       3,019
                                        ------      ------
                                        $5,044      $6,329
                                        ======      ======
</TABLE>


                                       28
<PAGE>   29

   Other income, net, consisted of the following:

<TABLE>
<CAPTION>

                                                          YEAR ENDED MARCH 31,
                                                   ---------------------------------
                                                   2000          1999          1998
                                                   -----       -------       -------
<S>                                                <C>         <C>           <C>
Interest income .............................      $ 384       $   951       $ 1,329
Interest expense ............................       (132)          (28)          (68)
Foreign currency exchange gain (loss), ......         48          (549)         (138)
net
Other .......................................         61            31             5
                                                   -----       -------       -------
                                                   $ 361       $   405       $ 1,128
                                                   =====       =======       =======
</TABLE>

NOTE 3. EARNINGS PER SHARE

   Basic and diluted Earnings Per Share are the same for all reported periods.

   Options to purchase 3,098,733, 2,441,000 and 2,036,000 shares of common stock
were outstanding at March 31, 2000, 1999, and 1998, respectively, but were not
included in the computation of diluted EPS as the Company was in a loss
situation and to do so would have been antidilutive.

NOTE 4. NOTES PAYABLE TO BANKS AND OTHERS

   In April 2000, the Company replaced its prior line of credit with a
replacement line of credit totaling $10 million with a U.S. financial
institution. No amount was outstanding under the old line of credit as of March
31, 2000 and March 31, 1999. The new line bears interest at prime plus 1.5
percent, is secured by a blanket security on all of the Company's assets, and is
available until April 2003. The new line of credit restricts the declaration and
payment of cash dividends and includes, among other terms and conditions,
requirements that the Company maintain certain levels of tangible net worth.

   The Company's Japanese subsidiary has two lines of credit available for
300,000 Yen and 150,000 Yen (approximately $2.8 million and $1.4 million,
respectively, at exchange rates prevailing as of March 31, 2000), bearing
interest at 1.625 percent and 2.0 percent, in excess of Japanese prime (1.375
percent as of March 31, 2000). The lines of credit are available until June 30,
2000 and are secured by Japanese customer promissory notes provided in advance
of payment. Outstanding balances on these lines in U.S. dollars as of March 31,
2000 and 1999, were $417 and $223, respectively.

NOTE 5. INCOME TAXES

   The components of loss before income taxes are as follows:

<TABLE>
<CAPTION>

                                   YEAR ENDED MARCH 31,
                          -------------------------------------
                            2000           1999          1998
                          --------       --------       -------
<S>                       <C>            <C>            <C>
Domestic ...........      $(12,664)      $(14,563)      $(6,760)
Foreign ............            93           (434)        1,215
                          --------       --------       -------
                          $(12,571)      $(14,997)      $(5,545)
                          ========       ========       =======
</TABLE>

   The components of the provision for income taxes are as follows:

<TABLE>
<CAPTION>

                                   YEAR ENDED MARCH 31,
                              -----------------------------
                               2000        1999        1998
                              -----       -----       -----
<S>                            <C>        <C>         <C>
Current:
  U.S. federal .........       $ --       $(257)      $(939)
  State and local ......         --          --          --
  Foreign ..............         --         153          --
                              -----       -----       -----
                                 --        (104)       (939)
                              -----       -----       -----
Deferred:
  U.S. federal .........         --         239         939
  State and local ......         --          --          --
                              -----       -----       -----
                                 --         239         939
                              -----       -----       -----
          Total ........       $ --       $ 135       $  --
                              =====       =====       =====
</TABLE>

                                       29
<PAGE>   30

   The income tax provision differs from the amount computed by applying the
statutory U.S. federal income tax rate as follows:

<TABLE>
<CAPTION>

                                                                    YEAR ENDED MARCH 31,
                                                            -----------------------------------
                                                             2000          1999          1998
                                                            -------       -------       -------
 <S>                                                        <C>           <C>           <C>
 Income tax provision at U.S. statutory rate ...........    $(4,276)      $(5,099)      $(1,885)
 State taxes net of federal benefit ....................       (733)         (874)         (323)
 Utilization of foreign losses .........................         --            --          (633)
 Reversal of deferred tax assets previously reserved....         --            --            --
 Utilization of net operating losses and credits .......     (1,027)          638         1,621
 Increase in valuation allowance .......................      6,015         5,419         1,161
 Other .................................................         21            51            59
                                                           --------       -------      --------
   Income tax expense ..................................   $     --       $   135      $     --
                                                           ========       =======      ========
</TABLE>

   The components of deferred taxes are as follows:

<TABLE>
<CAPTION>

                                                                               MARCH 31,
                                                                         -----------------------
                                                                           2000           1999
                                                                         --------       --------
                   <S>                                                   <C>            <C>
                   Revenue recognized for tax and deferred for book...   $    412       $    344
                   Non-deductible accruals and reserves ..............      3,440          2,435
                   Foreign net operating loss carryforward ...........         --            458
                   Domestic net operating loss carryforward ..........      9,178          5,212
                   Credits ...........................................      3,128          2,101
                   Uniform capitalization adjustment .................        215            139
                   Other .............................................        523            193
                                                                         --------       --------
                             Total ...................................     16,897         10,882
                   Valuation allowance ...............................    (16,897)       (10,882)
                                                                         ========       ========
                             Net deferred tax asset ..................   $     --       $     --
                                                                         ========       ========
</TABLE>

   The Company has recorded no net deferred tax assets for the years ended March
31, 2000 and 1999, respectively. The valuation allowance increased by $6,015 and
$5,419 during fiscal 2000 and 1999, respectively. A full valuation allowance was
established to offset the Company's deferred tax assets due to management's
determination that, as of March 31, 2000, it is more likely than not that such
deferred tax assets will not be realized.

   At March 31, 2000, the Company had federal and state operating loss
carryforwards of approximately $25.5 million and $13.2 million which expire
through 2020.

   At March 31, 2000, the Company also has research and experimentation credit
carryforwards of $2,213 and $537 for federal and state income tax purposes,
respectively, which expire through 2015.

NOTE 6. COMMITMENTS AND CONTINGENCIES

   The Company has several noncancelable operating leases and capital leases,
primarily for general office, production, and warehouse facilities, that expire
over the next five years. Future minimum lease payments under these leases are
as follows:

<TABLE>
<CAPTION>

                                                      YEAR ENDING
                                                         MARCH 31,
                                                   ---------------------
                                                   CAPITAL     OPERATING
                                                    LEASES       LEASES
                                                   -------     ---------
 <S>                                               <C>         <C>
 2001 ........................................         120        1,989
 2002 ........................................          94           83
 2003 ........................................          45           32
 2004 ........................................          --            6
 2005 ........................................          --           --
                                                    ------       ------
 Total minimum lease payments ................         259       $2,110
                                                                 ======
 Less amount representing interest ...........         (25)
                                                    ------
 Present value of minimum lease payments .....      $  234
                                                    ------
 Less current portion ........................        (104)
                                                    ------
 Long term capital lease obligation ..........      $  130
                                                    ======
</TABLE>

                                       30
<PAGE>   31

   The above schedule of minimum payments excludes minimum annual sublease
rentals payable to the Company totaling $217 through March 31, 2001, under
operating subleases. In addition, most leases provide for the Company to pay
real estate taxes and other maintenance expenses. Rent expense for operating
leases was $1,926, $2,069, and $1,949 during the years ended March 31, 2000,
1999, and 1998, respectively.

NOTE 7. EMPLOYEE BENEFIT PLANS

Equity Incentive Plan

   Pursuant to the Amended and Restated Equity Incentive Plan ("Equity Incentive
Plan"), options and stock purchase rights to purchase 3,500,000 shares of common
stock could be granted to management and consultants. The exercise price of
options and the purchase price of stock purchase rights generally has been the
fair value of the Company's common stock on the date of grant. At the date of
issuance of the stock options, all options are exercisable; however the Company
has the right to repurchase any stock acquired pursuant to the exercise of stock
options upon termination of employment or consulting agreement at the original
exercise price for up to four years from the date the options were granted, with
the repurchase rights ratably expiring over that period of time. Incentive stock
options are exercisable for up to 10 years from the grant date of the option.
Nonqualified stock options are exercisable for up to 15 years from the grant
date of the option. The Equity Incentive Plan expired in December 1999.
Consequently no shares were available for issuance under the Equity Incentive
Plan as of March 31, 2000.

1990 Stock Option Plan

   Pursuant to the terms of the Company's 1990 Stock Option Plan ("Option
Plan"), options and stock purchase rights to purchase 550,000 shares of common
stock could be granted to employees of the Company or its affiliates. Incentive
stock options are exercisable for a period of up to 10 years from the date of
grant of the option and nonqualified stock options are exercisable for a period
of up to 10 years and 2 days from the date of grant of the option. At the date
of issuance of the stock options, all options are exercisable; however, the
Company has the right to repurchase any stock acquired pursuant to the exercise
of stock options upon termination of employment at the original exercise price
for up to four years from the date the options were granted, with the repurchase
rights ratably expiring over that period of time. The 1990 Stock Option Plan
expired on March 10, 2000. Consequently no shares were available for issuance
under the Option Plan as of March 31, 2000.

1998 Equity Participation Plan

   Pursuant to the terms of the Company's Amended 1998 Equity Participation Plan
("Equity Plan"), which was authorized as a successor plan to the Company's
Equity Incentive Plan and Option Plan, 900,000 shares of common stock may be
granted upon the exercise of options and stock appreciation rights or upon the
vesting of restricted stock awards. The exercise price of options generally will
be the fair value of the Company's common stock on the date of grant. Options
are generally subject to vesting at the discretion of the Compensation Committee
of the Board of Directors (the "Committee"). At the discretion of the Committee,
vesting may be accelerated when the fair market value of the Company's stock
equals a certain price established by the Committee on the date of grant.
Incentive stock options will be exercisable for up to 10 years from the grant
date of the option. Non-qualified stock options will be exercisable for a
maximum term to be set by the Committee upon grant. As of March 31, 2000,
122,766 shares were available for issuance under the Equity Plan.

Directors Stock Option Plan

   Pursuant to the terms of the Amended Stock Option Plan for Outside Directors
("Directors Plan"), up to 300,000 shares of common stock may be granted to
outside directors. Under the Directors Plan, each outside director who was
elected or appointed to the Board on or after September 15, 1998, shall be
granted an option to purchase 20,000 shares of common stock and on each
secondary anniversary after the applicable election or appointment shall receive
an additional option to purchase 20,000 shares, provided that such outside
director continues to serve as an outside director on that date. 10,000 shares
each will vest on the first and second anniversaries of the option grant date,
contingent upon continued service as a director. Vesting may be accelerated, at
the discretion of the Board, when the fair market value of the Company's stock
equals a certain price set by the Board on the date of grant of the option. As
of March 31, 2000, 100,000 shares were available for issuance under the
Directors Plan.

                                       31
<PAGE>   32

   The following table summarizes the Company's stock option activity for the
four plans described above and weighted average exercise price within each
transaction type for each of the years ended March 31, 2000, 1999 and 1998
(number of shares in thousands):

<TABLE>
<CAPTION>

                                                                 2000                  1999                 1998
                                                         -------------------   ------------------   ------------------
                                                          SHARES     PRICE      SHARES     PRICE     SHARES     PRICE
                                                         -------    -------    -------    -------   -------    -------
<S>                                                      <C>        <C>         <C>      <C>         <C>      <C>
Options outstanding at beginning of year.............      2,532    $  4.53      2,036    $  5.46     1,413    $  4.36
Options canceled.....................................        (96)      5.16       (184)      6.23      (100)      6.07
Options granted......................................      1,037       3.29        742       2.15       942       6.01
Options exercised....................................       (374)      3.76        (62)      1.31      (219)      0.47
                                                         -------    -------    -------    -------   -------    -------
Options outstanding March 31.........................      3,099    $  4.19      2,532    $  4.53     2,036    $  5.46
                                                         =======    =======    =======    =======   =======    =======
</TABLE>

   At March 31, 2000, the repurchase right associated with 1,142,981 of the
options outstanding had expired.

   Significant option groups outstanding at March 31, 2000, and related weighted
average exercise price of options granted for which the Company no longer has
the right to repurchase and contractual life information are as follows (number
of shares in thousands):

<TABLE>
<CAPTION>

                                                                                         OPTIONS IN WHICH
                                                                                         UNDERLYING SHARES
                                                                                         NO LONGER SUBJECT
                                                              OUTSTANDING              TO REPURCHASE RIGHTS
                                                      --------------------------   ----------------------------    REMAINING
                           EXERCISE PRICE RANGE          SHARES         PRICE          SHARES          PRICE      LIFE (YEARS)
                           --------------------       ------------  ------------   -------------  -------------  -------------
                           <S>                        <C>           <C>            <C>            <C>            <C>
                               $ .24 -- $ .53                66       $    .49             66       $    .49          3.42
                               $1.50 -- $3.44             1,649           2.77            245           2.17         10.83
                               $4.25 -- $5.50               834           4.62            421           4.87          7.42
                               $6.13 -- $6.25                85           6.20             65           4.20          9.62
                               $6.88 -- $8.75               406           8.10            287           7.93          9.43
                                   $12.00                    59          12.00             59          12.00          6.05
                                                         ------                       -------
                                   Totals                 3,099                         1,143
                                                         ======                       =======
</TABLE>

   As described in Note 1, the Company has adopted the disclosure provisions as
required by SFAS 123. Accordingly, no compensation cost has been recognized in
the Company's statements of operations as all options were granted at an
exercise price equal to the market value of the Company's common stock at the
date of grant.

   As required by SFAS 123 for pro forma disclosure purposes only, the Company
has calculated the estimated grant date fair value using the Black-Scholes
model. The Black-Scholes model, as well as other currently accepted option
valuation models, was developed to estimate the fair value of freely tradable,
fully transferable options without vesting restrictions, which significantly
differ from the Company's stock option awards. These models also require highly
subjective assumptions, including future stock price volatility and expected
time until exercise, which greatly affect the calculated grant date fair value.

   The following assumptions are included in the estimated grant date fair value
calculations for the Company's stock option awards and Employee Qualified Stock
Purchase Plan ("Employee Plan"):

<TABLE>
<CAPTION>

                                 2000    1999    1998
                                ------  ------  -----
  <S>                           <C>     <C>     <C>
  Expected life (years):
    Stock options............     4.0     4.0     4.0
    Employee plan............     0.5     0.5     0.5
  Risk-free interest rate....    5.60%   5.20%   6.16%
  Volatility.................      95%     75%     60%
  Dividend yield.............       0%      0%      0%
</TABLE>


   The weighted average estimated grant date fair value, as defined by SFAS 123,
for options granted during 2000, 1999 and 1998 was $2.28, $1.27 and $2.66 per
option, respectively.

Stock Purchase Plan

   The Company has offered an Employee Plan under which rights are granted to
purchase shares of common stock at 85% of the lesser of the market value of such
shares at the beginning of a six month offering period or at the end of that six
month period. Under the Employee Plan, the Company is authorized to grant
options to purchase up to 500,000 shares of common stock. 60,934 common


                                       32
<PAGE>   33

stock shares were purchased in fiscal 2000 and 97,541 common shares were
purchased in fiscal 1999. Shares available for future purchase under the
Employee Plan were 226,521 at March 31, 2000.

   Compensation cost (included in pro forma net income and net income per share
amounts only) for the grant date fair value, as defined by SFAS 123, of the
purchase rights granted under the Employee Plan was calculated using the
Black-Scholes model. The weighted average estimated grant date fair value per
share, as defined by SFAS 123, for rights granted under the Employee Plan for
stock purchased under the Employee Plan during 2000, 1999 and 1998 were $3.31,
$1.48 and $1.47, respectively.

Pro Forma Net Income and Net Income Per Share

   Had the Company recorded compensation costs based on the estimated grant date
fair value (as defined by SFAS 123) for awards granted under its stock option
plans and stock purchase plan, the Company's net loss and loss per share would
have been increased to the pro forma amounts below for the years ended March 31,
2000, 1999 and 1998:

<TABLE>
<CAPTION>

                                               2000            1999           1998
                                          ------------    ------------    -----------
<S>                                       <C>             <C>             <C>
Pro forma net loss...................     $    (14,785)   $    (16,895)   $    (6,674)
Pro forma net loss per share:
  Basic and diluted..................     $      (1.35)   $      (1.59)   $     (0.64)
</TABLE>


   The pro forma effect on net loss and net loss per share takes into
consideration pro forma compensation related only to grants made after December
15, 1995. Consequently, the pro forma effect on net loss and net loss per share
for 2000, 1999 and 1998 is not necessarily representative of the pro forma
effect on net income in future years.

Savings and Investment Plan

   The Company has established a defined contribution plan that covers
substantially all U.S. employees who are regularly scheduled to work 20 or more
hours per week. Employee contributions of up to four percent of each covered
employee's compensation will be matched by the Company based upon a percentage
to be determined annually by the Board of Directors ("Board"). Employees may
contribute up to 15 percent of their compensation, not to exceed a prescribed
maximum amount. The Company made contributions to the plan of $27, $27 and $31
in the years ended March 31, 2000, 1999, and 1998, respectively.

NOTE 8. STOCKHOLDER RIGHTS PLAN

   On June 11, 1996, the Board adopted a Preferred Shares Rights Agreement
("Agreement") and pursuant to the Agreement authorized and declared a dividend
of one preferred share purchase right ("Right") for each common share of the
Company's outstanding shares at the close of business on July 1, 1996. The
Rights are designed to protect and maximize the value of the outstanding equity
interests in the Company in the event of an unsolicited attempt by an acquirer
to take over the Company, in a manner or under terms not approved by the Board.
Each Right becomes exercisable to purchase one one-hundredth of a share of
Series A Junior Participating Preferred Stock at an exercise price of $45.00
upon certain circumstances associated with an unsolicited takeover attempt and
expires on June 11, 2006. The Company may redeem the Rights at a price of $0.01
per Right.

NOTE 9. SEGMENT REPORTING

   The Company operates in one segment comprising the design, manufacturing and
servicing of plasma etch systems used in the manufacturing of integrated
circuits and related devices.

The following is a summary of the Company's operations:

<TABLE>
<CAPTION>

                                                               YEARS ENDED MARCH 31,
                                                      --------------------------------------
                                                          2000          1999         1998
                                                      -----------   -----------  -----------
         <S>                                          <C>           <C>          <C>
         Revenues:
           Sales to customers located in:
              United States......................      $   10,867    $    8,111   $   16,045
              Asia...............................           2,095         2,669       11,110
              Europe.............................           7,498         6,657        8,667
              Japan..............................           5,978        11,598        5,650
                                                       ----------    ----------   ----------
                   Total external sales..........      $   26,438    $   29,035   $   41,472
                                                       ==========    ==========   ==========
</TABLE>


                                       33
<PAGE>   34

<TABLE>
<CAPTION>

                                                                      MARCH 31,
                                                           ----------------------------
                                                                2000            1999
                                                           ------------    ------------
              <S>                                          <C>             <C>
              Identifiable assets at year-end:
                United States..........................    $     36,905    $     38,986
                Europe.................................           7,130           8,405
                Japan..................................           3,956           7,623
                Consolidation eliminations.............         (12,418)        (15,362)
                                                           ------------    ------------
                        Total identifiable assets......    $     35,573    $     39,652
                                                           ============    ============
</TABLE>

   The Company's sales are primarily to domestic and international semiconductor
manufacturers. The top five customers accounted for approximately 53 percent, 41
percent, and 41 percent of the Company's total net sales for the years ended
March 31, 2000, 1999, and 1998, respectively. Three customers accounted for 16
percent, 14 percent and 10 percent of the Company's total net sales for the year
ended March 31, 2000, no customer accounted for more than 10 percent of net
sales for the year ended March 31, 1999, and one customer accounted for 16
percent of net sales for the year ended March 31, 1998.

                                       34
<PAGE>   35

                        REPORT OF INDEPENDENT ACCOUNTANTS

To the Board of Directors and Stockholders of
Tegal Corporation

   In our opinion, the consolidated financial statements listed in the
accompanying index present fairly, in all material respects, the financial
position of Tegal Corporation and its subsidiaries at March 31, 2000 and 1999,
and the results of its operations and its cash flows for each of the three years
in the period ended March 31, 2000 in conformity with accounting principles
generally accepted in the United States. In addition, in our opinion, the
financial statement schedule listed in the accompanying index presents fairly,
in all mutual respects, the information set forth therein when read in
conjunction with the related consolidated financial statements. These financial
statements and financial statement schedule are the responsibility of the
Company's management; our responsibility is to express an opinion on these
financial statements and financial statement schedule based on our audits. We
conducted our audits of these statements in accordance with auditing standards
generally accepted in the United States, which require that we plan and perform
the audit to obtain reasonable assurance about whether the financial statements
are free of material misstatement. An audit includes examining, on a test basis,
evidence supporting the amounts and disclosures in the financial statements,
assessing the accounting principles used and significant estimates made by
management, and evaluating the overall financial statement presentation. We
believe that our audits provide a reasonable basis for the opinion expressed
above.

/s/  PricewaterhouseCoopers LLP

San Jose, California
April 28, 2000

                                       35
<PAGE>   36

ITEM 9. CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND
FINANCIAL DISCLOSURE

   None.

                                    PART III

   Certain information required by Part III is omitted from this Report in that
the Registrant will file a definitive proxy statement pursuant to Regulation 14A
(the "Proxy Statement") no later than 120 days after the end of the fiscal year
covered by this Report, and certain information included therein is incorporated
herein by reference. Only those sections of the Proxy Statement that
specifically address the items set forth herein are incorporated by reference.
Such incorporation does not include the Compensation Committee Report or the
Performance Graph included in the Proxy Statement.

ITEM 10. DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT

   The information concerning the Company's directors required by this Item is
incorporated by reference to the Company's Proxy Statement under the caption
"Election of Directors."

   The information required by this Item relating to the Company's executive
officers is included under the caption "Executive Officers of the Registrant" in
Part I, Item 4, of this Form 10-K/A Report.

   The information regarding compliance with Section 16(a) of the Securities
Exchange Act of 1934, as amended, is incorporated by reference to the Company's
Proxy Statement under the caption "Section 16(a) Beneficial Ownership Reporting
Compliance."

ITEM 11. EXECUTIVE COMPENSATION

   The information required by this Item is incorporated by reference to the
Company's Proxy Statement under the caption "Executive Compensation."

ITEM 12. SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

   The information required by this Item is incorporated by reference to the
Company's Proxy Statement under the captions "Principal Stockholders" and
"Ownership of Stock by Management."

ITEM 13. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

   The information required by this Item is incorporated by reference to the
Company's Proxy Statement under the caption "Certain Transactions."

                                       36
<PAGE>   37

                                     PART IV

ITEM 14. EXHIBITS, FINANCIAL STATEMENT SCHEDULES AND REPORTS ON FORM 8-K

(a) The following documents are filed as part of this Form 10-K/A:

(1) Financial Statements

   The Company's Financial Statements and notes thereto appear on this Form
   10-K/A according to the following Index of Consolidated Financial Statements:

<TABLE>
<CAPTION>

                                                                     PAGE
                                                                     ----
    <S>                                                              <C>
    Consolidated Balance Sheets as of March 31, 2000 and 1999....     22
    Consolidated Statements of Operations for the years ended
      March 31, 2000, 1999 and 1998..............................     23
    Consolidated Statements of Stockholders' Equity for the
      years ended March 31, 2000, 1999 and 1998..................     24
    Consolidated Statements of Cash Flows for the years ended
      March 31, 2000, 1999 and 1998..............................     25
    Notes to Consolidated Financial Statements...................     26
    Report of Independent Accountants............................     35
</TABLE>


(2) Financial Statement Schedule

<TABLE>
<CAPTION>

                                                                                              PAGE
                                                                                              ----
<S>                                                                                           <C>
Schedule II -- Valuation and Qualifying Accounts.....................................          40
</TABLE>


   Schedules other than those listed above have been omitted since they are
   either not required, not applicable, or the required information is shown in
   the consolidated financial statements or related notes.

(3) Exhibits

The following exhibits are referenced or included in this report:

<TABLE>
<CAPTION>

     EXHIBIT                         DESCRIPTION
     -------                         -----------
     <S>          <C>
      3.1         Certificate of Incorporation of the Registrant, as amended
                  (incorporated by reference to Exhibits 3(i).1 and 3(i).2
                  included in Registrant's Registration Statement on Form S-1
                  (File No. 33-84702) declared effective by the Securities and
                  Exchange Commission on October 18, 1995)
      3.2         By-laws of Registrant (incorporated by reference to Exhibit 3(ii)
                  included in Registrant's Registration Statement on Form S-1
                  (File No. 33-84702) declared effective by the Securities
                  and Exchange Commission on October 18, 1995)
     *4.1         Form of Certificate For Common Stock
    *10.1         Amended and Restated Equity Incentive Plan
    *10.2         1990 Stock Option Plan
    *10.4         Employee Qualified Stock Purchase Plan
     10.5         Amended and Restated Stock Option Plan for Outside Directors
                  (incorporated by reference to Appendix B to the Proxy
                  Statement for the Registrant's 1998 Annual Meeting of
                  Stockholders filed with the SEC on July 29, 1998 (Commission
                  File No. 0-26824))
     10.10        Employment Agreement between the Registrant and Stephen P.
                  DeOrnellas dated December 16, 1997 (incorporated by reference
                  to Exhibit 10.10 to the Registrant's Annual Report on Form
                  10-K for the fiscal year ended March 31, 1998 filed with the
                  SEC on May 20, 1998 (Commission File No. 0-26824))
    *10.11        Lease dated August 15, 1986, as amended, between the Registrant
                  and South McDowell Investments
    *10.12        Technology License Agreement between the Registrant and Motorola, Inc.
                  dated December 19, 1989
</TABLE>

                                       37
<PAGE>   38

<TABLE>
<CAPTION>

     EXHIBIT                         DESCRIPTION
     -------                         -----------
     <S>          <C>
    *10.15        Supplemental Source Code License Agreement with the Registrant
                  and Realtime Performance, Inc. dated as of November 1, 1991
     10.18        Employment Agreement between Registrant and Michael L. Parodi
                  dated as of December 17, 1997 (incorporated by reference to
                  Exhibit 10.18 to the Registrant's Annual Report on Form 10-K
                  for the fiscal year ended March 31, 1998 filed with the SEC on
                  May 20, 1998 (Commission File No. 0-26824))
     10.19        1998 Equity Participation Plan (incorporated by reference to
                  Appendix A to the Proxy Statement for the Registrant's 1998
                  Annual Meeting of Stockholders filed with the SEC on July 29,
                  1998 (Commission File No. 0-26824))
   **10.20        Security and Loan Agreement between Registrant and Coast Business
                  Credit dated as of April 14, 2000
    *21           List of Subsidiaries of the Registrant
     23.1         Consent of Independent Accountants
   **24.1         Power of Attorney
   **27.1         Financial Data Schedule
</TABLE>

------------
 * Incorporated by reference to identically numbered exhibits included in
   Registrant's Registration Statement on Form S-1 (File No. 33-84702) declared
   effective by the Securities and Exchange Commission on October 18, 1995.
** Previously filed.

(b) Reports on Form 8-K.

   The following Form 8-K's were filed with the Securities and Exchange
Commission during the Company's fourth Quarter ended March 31, 2000:

   On February 15, 2000, the Company filed a current report on Form 8-K under
Item 5. "Other Events" relating to the issuance and sale of up to 849,514 shares
of the Company's common stock.

   On March 28, 2000, the Company filed a current report on Form 8-K under Item
5. "Other Events" relating to the issuance and sale of up to 442,822 shares of
the Company's common stock.

                                       38
<PAGE>   39


                                   SIGNATURES

   Pursuant to the requirements of Section 13 or 15(d) of the Securities
Exchange Act of 1934, the Registrant has duly caused this Report to be signed on
its behalf by the undersigned, thereunto duly authorized.

                                TEGAL CORPORATION

                                By:         /s/ MICHAEL L. PARODI
                                   ---------------------------------------------
                                               Michael L. Parodi
                                   Chairman, President & Chief Executive Officer

Dated: August 22, 2000


   Pursuant to the requirements of the Securities Exchange Act of 1934, this
Report has been signed below by the following persons on behalf of the
Registrant and in the capacities and on the dates indicated.

<TABLE>
<CAPTION>

                     SIGNATURE                                       TITLE                                          DATE
                     ---------                                       -----                                          ----
<S>                                                   <C>                                                       <C>
               /s/ MICHAEL L. PARODI                  Chairman, President, Chief Executive Officer and          August 22, 2000
-------------------------------------------------     Director (Principal Executive Officer)
                  Michael L. Parodi

                /s/ DAVID CURTIS *                    Chief Financial Officer                                   August 22, 2000
-------------------------------------------------     (Principal Financial Officer)
                    David Curtis

                /s/ KATHY PETRINI *                   Corporate Controller                                      August 22, 2000
-------------------------------------------------     (Principal Accounting Officer)
                    Kathy Petrini

                 /s/ FRED NAZEM *                     Director                                                  August 22, 2000
-------------------------------------------------
                     Fred Nazem

               /s/ JEFFREY KRAUSS *                   Director                                                  August 22, 2000
-------------------------------------------------
                   Jeffrey Krauss

               /s/ THOMAS R. MIKA *                   Director                                                  August 22, 2000
-------------------------------------------------
                   Thomas R. Mika

              /s/ EDWARD A. DOHRING *                 Director                                                  August 22, 2000
-------------------------------------------------
                  Edward A. Dohring

    * By:      /s/ MICHAEL L. PARODI                                                                            August 22, 2000
-------------------------------------------------
                   Attorney-in-fact
</TABLE>


                                       39
<PAGE>   40

                                                                     SCHEDULE II

                                TEGAL CORPORATION

                        VALUATION AND QUALIFYING ACCOUNTS
                     YEARS ENDED MARCH 31, 1998, 1999, 2000
                                 (IN THOUSANDS)
<TABLE>
<CAPTION>

                                                            BALANCE AT    CHARGED TO      CHARGED                   BALANCE
                                                             BEGINNING     COSTS AND     TO OTHER                   AT END
     DESCRIPTION                                              OF YEAR      EXPENSES      ACCOUNTS     DEDUCTIONS    OF YEAR
     -----------                                           ------------  ------------   ----------   ------------  ---------
     <S>                                                   <C>           <C>            <C>          <C>           <C>
     Year ended March 31, 1998:
       Doubtful accounts...............................         320            154           --           (177)        297
       Sales returns and allowances....................         444            214           --           (420)        238
       Cash discounts..................................          41             31           --            (65)          7
     Year ended March 31, 1999:
       Doubtful accounts...............................         297             35           --           (130)        202
       Sales returns and allowances....................         238            (25)          --           (170)         43
       Cash discounts..................................           7             49           --            (37)         19
     Year ended March 31, 2000:
       Doubtful accounts...............................         202             93            8             51         354
       Sales returns and allowances....................          43            189           (8)          (158)         66
       Cash discounts..................................          19             60           --            (50)         29
</TABLE>

                                       40
<PAGE>   41

                                INDEX TO EXHIBITS

<TABLE>
<CAPTION>

   EXHIBIT
    NUMBER                              DESCRIPTION OF EXHIBIT
    ------                              ----------------------
   <S>            <C>
     23.1         Consent of Independent Accountants
</TABLE>

                                       41


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