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<PAGE> 1
EXHIBIT 23.1
CONSENT OF INDEPENDENT ACCOUNTANTS
We hereby consent to the incorporation by reference in the Registration
Statements on Forms S-8 (Nos. 333-66781, 333-12473 and 333-462) of our report
dated April 28, 2000 appearing in Tegal Corporation's Annual Report on Form
10-K/A for the year ended March 31, 2000.
/s/ PricewaterhouseCoopers LLP
San Jose, California
July 27, 2000
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