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Exhibit 21.01
BROOKS AUTOMATION, INC.
SUBSIDIARIES OF THE REGISTRANT
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Name Jurisdiction
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AutoSimulations Asia Pacific Pte Ltd. Singapore
AutoSimulations Ltd. United Kingdom
Auto-Soft Ltd. Scotland
Brooks Automation Asia Ltd. Korea
Brooks Automation GmbH Germany
Brooks Automation Holding GmbH Germany
Brooks Automation International, Inc. Barbados
Brooks Automation K.K. Japan
Brooks Automation Korea, Ltd. Korea
Brooks Automation Ltd. United Kingdom
Brooks Automation Massachusetts Securities Corporation Massachusetts
Brooks Automation Offshore International Caymans
Brooks Automation, Pte Ltd. Singapore
Brooks Automation SARL France
Brooks Automation SDN. BHD. Malaysia
Brooks Automation Software Corporation Canada
Brooks Automation Taiwan Taiwan
Brooks Hanyon Inc. Korea
FASTech International B.V. The Netherlands
FASTech International Ltd. Ireland
Smart Machines, Inc. California
Smart Machines of California, Inc. California
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