SEMITOOL INC
SC 13G, 1997-02-10
SPECIAL INDUSTRY MACHINERY, NEC
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                       SECURITIES AND EXCHANGE COMMISSION

                             Washington, D.C. 20549


                                  SCHEDULE 13G
                                 (Rule 13d-102)

             Information Statement Pursuant to Rules 13d-1 and 13d-2
                    Under the Securities Exchange Act of 1934
                             (Amendment No. ______)


                                 SEMITOOL, INC.
                             ---------------------
                                (Name of Issuer)


                                  COMMON STOCK
                           --------------------------
                         (Title of Class of Securities)


                                   816909 10 5
                              ---------------------
                                 (CUSIP Number)



*The  remainder of this cover page shall be filled out for a reporting  person's
initial filing on this form with respect to the subject class of securities, and
for any  subsequent  amendment  containing  information  which  would  alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the  Securities  Exchange  Act of
1934 ("Act") or otherwise  subject to the liabilities of that section of the Act
but  shall be  subject  to all other  provisions  of the Act  (however,  see the
Notes).


                                Page 1 of 8 Pages

<PAGE>


<PAGE>


                                  SCHEDULE 13G

- - -------------------------                          -------------------------
CUSIP NO. 816909 10 5                                   Page  1  of  4  Pages
- - -------------------------                          -------------------------
- - ----------------------------------------------------------------------
   1   NAME OF REPORTING PERSON
         S.S. OR I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

            Raymon F. Thompson and Ladeine A. Thompson
                ###-##-####            ###-##-####
- - ----------------------------------------------------------------------
   2     CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*    (a)  [ ]
                                                              (b)  [ ]
- - ----------------------------------------------------------------------
   3   SEC USE ONLY
- - ----------------------------------------------------------------------
   4   CITIZENSHIP OR PLACE OF ORGANIZATION
                                  United States
- - ----------------------------------------------------------------------
 NUMBER OF        | 5 |   SOLE VOTING POWER
  SHARES          |   |      6,681,534
BENEFICIALLY      |   |
 OWNED BY         | 6 |   SHARED VOTING POWER
   EACH           |   |
 REPORTING        |   |
PERSON WITH       | 7 |   SOLE DISPOSITIVE POWER
                  |   |      6,681,534
                  |   |
                  | 8 |   SHARED DISPOSITIVE POWER
                  |   |
- - ----------------------------------------------------------------------
   9     AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
            6,681,534
- - ----------------------------------------------------------------------
  10     CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN
         SHARES*                                                   [ ]
- - ----------------------------------------------------------------------
  11     PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9
            48.9%
- - ----------------------------------------------------------------------
  12     TYPE OF REPORTING PERSON*
            IN
- - ----------------------------------------------------------------------
                      *SEE INSTRUCTION BEFORE FILLING OUT!

                                Page 2 of 8 Pages

<PAGE>

Item 1.

         (a)      Name of Issuer:  Semitool, Inc.

         (b)      Address of Issuer's Principal Executive Offices:

                  655 West Reserve Drive
                  Kalispell, Montana 59901


Item 2.

         (a)      Name of Person Filing:

                  Raymon F. Thompson and Ladeine A. Thompson

         (b)      Address of Principal Business Office or, if None,
                  Residence:

                  655 West Reserve Drive
                  Kalispell, Montana 59901

         (c)      Citizenship:   U.S.A.
         (d)      Title of Class of Securities:  Common Stock, no par value

         (e)      CUSIP NUMBER:  816909 10 5

Item      3. If this  statement  is filed  pursuant to Rules  13d-1(b),  or 13d-
          2(b), check whether the person filing is a:

         Not applicable.

Item 4.   Ownership:

         (a)      Amount Beneficially Owned:

                  6,681,534 shares, as of December 31, 1996.  Includes 5,219,919
                  shares held by the Raymon F. Thompson  Revocable Living Trust;
                  250,000  shares  held by the  Raymon  F.  Thompson  Charitable
                  Remainder  Trust;  5,000  shares  held by Raymon F.  Thompson,
                  Individually;  887,865  shares held by the Ladeine A. Thompson
                  Revocable  Trust;  and 318,750 shares held in the name of Gina
                  Thompson Trust of which Mr. Thompson is the trustee (the "Gina
                  Thompson Trust Shares").

         (b)      Percent of Class:   48.9% as of December 31, 1996.

         (c)      Number of shares as to which such person has:

                   (i)     sole power to vote or to direct the vote:

                           5,793,669 shares, also includes the Gina Thompson
                           Trust Shares.

                   (ii)    shared power to vote or to direct the vote:

                           None.

                   (iii) sole power to dispose or to direct the disposition
                         of:

                           5,788,669 shares, also includes the Gina Thompson
                           Trust Shares.

                    (iv) shared power to dispose or to direct the
                         disposition of:

                           None.


Item 5.   Ownership of Five Percent or Less of a Class:

         Not applicable.

Item 6.   Ownership of More than Five Percent on Behalf of Another Person:

         Not applicable.

Item 7.   Identification and Classification of the Subsidiary Which Acquired the
          Security Being Reported on by the Parent Holding Company:

         Not applicable.

Item 8.   Identification and Classification of Members of the Group:

         Not applicable.

Item 9.   Notice of Dissolution of the Group:

         Not applicable.

Item 10.   Certification:

         Not applicable.



                                    SIGNATURE

After  reasonable  inquiry and to the best of my knowledge and belief, I certify
that the information set forth in this statement is true, complete and correct.


                                           February 10, 1997
                                         ------------------------------
                                                    (Date)


                                          /s/Raymon F. Thompson
                                         ------------------------------
                                                  (Signature)


                                         Raymon F. Thompson/Individual
                                         ------------------------------
                                                  (Name/Title)


                                           February 10, 1997
                                         ------------------------------
                                         


                                          /s/Ladeine A. Thompson
                                         ------------------------------

                                         
                                         Ladeine A. Thompson/Individual
                                         ------------------------------
                                                 (Name/Title)





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