SEMITOOL INC
DEF 14A, 1998-01-22
SPECIAL INDUSTRY MACHINERY, NEC
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                                  SCHEDULE 14A
                                 (Rule 14a-101)
                     INFORMATION REQUIRED IN PROXY STATEMENT
                            SCHEDULE 14A INFORMATION
           Proxy Statement Pursuant to Section 14(a) of the Securities
                      Exchange Act of 1934 (Amendment No. )
Filed by the Registrant |X|
Filed by a party other than the Registrant |_|
Check the appropriate box:
|_| Preliminary proxy statement               |_| Confidential,  For Use of the 
|X| Definitive  proxy  statement                 Commission Only (as  permitted
|_| Definitive   additional  materials           by Rule 14a-6(e)(2))
|_| Soliciting  material 
    pursuant to Rule 14a-11(c) or Rule 14a-12

     
                                 Semitool, Inc.
                (Name of Registrant as Specified in Its Charter)

                                 Semitool, Inc.
    (Name of Person(s) Filing Proxy Statement, if Other Than the Registrant)

Payment of Filing Fee (Check the appropriate box):
|X|    No fee required.
|_| Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.

(1) Title of each class of securities to which transaction applies:


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(2) Aggregate number of securities to which transactions applies:


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(3) Per unit price or other underlying value of transaction computed pursuant
    to  Exchange  Act Rule 0-11 (set forth the amount on which the filing fee
    is calculated and state how it was determined):



- --------------------------------------------------------------------------------

(4) Proposed maximum aggregate value of transaction.


- --------------------------------------------------------------------------------


(5) Total fee paid:


- --------------------------------------------------------------------------------

       |_|  Fee paid previously with preliminary materials:


- --------------------------------------------------------------------------------

       |_| Check box if any part of the fee is offset as  provided  by  Exchange
Act Rule  0-11(a)(2)  and identify the filing for which the  offsetting  fee was
paid previously.  Identify the previous filing by registration statement number,
or the form or schedule and the date of its filing.

(1) Amount previously paid:

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(2) Form, Schedule or Registration Statement No.:

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(3) Filing Party:

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(4) Date Filed:

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<PAGE>


                                 SEMITOOL, INC.


                    Notice of Annual Meeting of Shareholders
                           To Be Held February 9, 1998


To the Shareholders of Semitool, Inc.:

         NOTICE IS HEREBY  GIVEN that the  Annual  Meeting  of  Shareholders  of
Semitool, Inc., a Montana corporation (the "Company"),  will be held at the Best
Western - Outlaw Inn, 1701 Highway 93 South,  Kalispell,  Montana 59901, at 2:30
p.m., local time, on February 9, 1998, for the following purposes:

         1.  ELECTION OF  DIRECTORS.  To elect six  directors  of the Company to
serve until the 1999 Annual Meeting of  Shareholders  or until their  successors
are elected and qualified.

         2. APPROVAL AND RATIFICATION OF THE AMENDED AND RESTATED SEMITOOL, INC.
1994 STOCK  OPTION  PLAN,  AS  AMENDED.  To ratify and  approve  the Amended and
Restated  Semitool,  Inc.  1994 Stock Option Plan,  as amended,  to increase the
number of shares of Common Stock  available  for issuance  thereunder by 200,000
shares from 1,100,000 shares to 1,300,000 shares.

         3. RATIFICATION OF APPOINTMENT OF INDEPENDENT  AUDITORS.  To ratify the
appointment  of Coopers & Lybrand  L.L.P.  as the  independent  auditors for the
Company for the fiscal year ending September 30, 1998.

         4. OTHER BUSINESS. To transact such other business as may properly come
before the Annual Meeting of  Shareholders  and any  adjournment or postponement
thereof.

         The foregoing  items of business are more fully  described in the Proxy
Statement which is attached hereto and made a part hereof.

         The Board of  Directors  has fixed the close of  business on January 6,
1998 as the record date for determining the  shareholders  entitled to notice of
and to vote at the 1998 Annual Meeting of  Shareholders  and any  adjournment or
postponement thereof.

         WHETHER OR NOT YOU EXPECT TO ATTEND THE ANNUAL MEETING OF  SHAREHOLDERS
IN PERSON,  YOU ARE URGED TO MARK, SIGN, DATE AND RETURN THE ENCLOSED PROXY CARD
AS PROMPTLY AS POSSIBLE IN THE POSTAGE-PREPAID  ENVELOPE PROVIDED TO ENSURE YOUR
REPRESENTATION  AND THE PRESENCE OF A QUORUM AT THE ANNUAL MEETING.  IF YOU SEND
IN YOUR  PROXY CARD AND THEN  DECIDE TO ATTEND  THE ANNUAL  MEETING TO VOTE YOUR
SHARES IN PERSON,  YOU MAY STILL DO SO. YOUR PROXY IS  REVOCABLE  IN  ACCORDANCE
WITH THE PROCEDURES SET FORTH IN THE PROXY STATEMENT.

                                          By Order of the Board of Directors,

                                          /s/Raymon F. Thompson
                                          Raymon F. Thompson
                                          Chairman of the Board,
                                          Chief Executive Officer and
                                          President
Kalispell, Montana
January 22, 1998



<PAGE>







                                 SEMITOOL, INC.

                             655 West Reserve Drive
                            Kalispell, Montana 59901

                                 PROXY STATEMENT


General Information

         This Proxy  Statement  is furnished  to the  shareholders  of Semitool,
Inc., a Montana corporation (the "Company"), in connection with the solicitation
by the Board of Directors  of the Company (the "Board" or "Board of  Directors")
of proxies in the accompanying form for use in voting at the 1998 Annual Meeting
of Shareholders of the Company (the "Annual  Meeting") to be held on February 9,
1998,  at the Best  Western - Outlaw  Inn,  1701  Highway  93 South,  Kalispell,
Montana 59901,  at 2:30 p.m.,  local time, and any  adjournment or  postponement
thereof. The shares represented by the proxies received, properly marked, dated,
executed and not revoked will be voted at the Annual Meeting.

Revocability of Proxies

         Any proxy  given  pursuant to this  solicitation  may be revoked by the
person giving it at any time before it is exercised by delivering to the Company
(to the  attention  of Larry  Viano) a written  notice of  revocation  or a duly
executed  proxy  bearing a later date,  or by attending  the Annual  Meeting and
voting in person.

Solicitation and Voting Procedures

         The  solicitation  of proxies will be conducted by mail and the Company
will bear all attendant costs. These costs will include the expense of preparing
and mailing proxy  materials for the Annual Meeting and  reimbursements  paid to
brokerage   firms  and  others  for  their   expenses   incurred  in  forwarding
solicitation  material  regarding the Annual Meeting to beneficial owners of the
Company's Common Stock. The Company may conduct further solicitation personally,
by  telephone  or by  facsimile  through  its  officers,  directors  and regular
employees,  none of whom will receive additional compensation for assisting with
such solicitation.

         The close of  business  on January 6, 1998 has been fixed as the record
date (the "Record Date") for  determining  the holders of shares of Common Stock
of the Company  entitled to notice of and to vote at the Annual  Meeting.  As of
the  close of  business  on the  Record  Date,  the  Company  had  approximately
13,771,759 shares of Common Stock outstanding and entitled to vote at the Annual
Meeting.  The  presence at the Annual  Meeting of a majority of these  shares of
Common Stock of the  Company,  either in person or by proxy,  will  constitute a
quorum for the transaction of business at the Annual Meeting.  Each  outstanding
share of Common  Stock on the  Record  Date is  entitled  to one (1) vote on all
matters. With respect to the election of directors, each shareholder is entitled
to cumulate  his or her votes,  meaning that such  shareholder  can multiply the
number of  shares  owned by the  number of board  positions  to be  filled,  and
allocate  such  votes  for  all or as  many  director-nominees  as he or she may
designate.

         Abstentions and broker non-votes are each included in the determination
of the number of shares  present  and  voting,  but will not be  counted  for or
against any of the proposals to be voted upon at the meeting.



<PAGE>



                                 PROPOSAL NO. 1

                              ELECTION OF DIRECTORS


         As set by the Board of Directors pursuant to the Bylaws of the Company,
the authorized  number of directors is set at six. Six directors will be elected
at the Annual Meeting to serve until the 1999 Annual Meeting of  Shareholders or
until their  successors  are elected or  appointed  and  qualified  or until the
director's earlier  resignation or removal. In the event that any nominee of the
Company is unable or  declines  to serve as a director at the time of the Annual
Meeting,  the proxies will be voted for any nominee who shall be  designated  by
the present Board of Directors to fill the vacancy. In the event that additional
persons are  nominated for election as  directors,  the proxy holders  intend to
vote all proxies received by them in such a manner,  as will assure the election
of as many of the nominees  listed below as  possible,  and, in such event,  the
specific  nominees to be voted for will be determined by the proxy holders.  The
Board has no reason to believe  that the  persons  named below will be unable or
unwilling  to serve as a nominee or as a director,  if elected.  Each of the six
nominees for director who receives the greatest number of votes will be elected.

         Set  forth  below  is the  age  and  certain  biographical  information
relating to the director nominees.

         Raymon F.  Thompson,  age 56,  founded  the  Company  and has served as
Chairman,  Chief Executive Officer and President since its inception in 1979. In
1979,  Mr.  Thompson  designed,   patented  and  introduced  the  first  on-axis
rinser/dryer for the semiconductor industry.

         Howard  E.  Bateman,  age 63,  has  served  on the  Company's  Board of
Directors  since  1990.  Mr.  Bateman  formerly  owned and  operated  Entech,  a
Pennsylvania  company  that  was an  independent  sales  representative  for the
Company's products from 1979 to 1996.

         Richard  A.  Dasen,  age 55,  has  served  on the  Company's  Board  of
Directors since 1984.  From 1974 to 1992, Mr. Dasen owned and managed  Evergreen
Bancorporation,  a multi-bank holding company. Since 1992, Mr. Dasen has been an
independent businessman.

         Daniel  J.  Eigeman,  age 63,  has  served  on the  Company's  Board of
Directors  since 1985.  From 1971 to 1993, Mr. Eigeman was President of Eigeman,
Hanson & Co., P.C.,  CPAs, and since 1993 has been Vice President of Junkermier,
Clark,  Campanella,  Stevens, P.C., CPAs. Mr. Eigeman served as President of the
Montana Society of Certified Public  Accountants in 1993 and currently serves as
a director of CPA Mutual Insurance of America, Inc.

         John S. Osborne, age 53, has served on the Company's Board of Directors
since  July of 1997 and has  thirty  years of  experience  in the  semiconductor
industry,  including  20 years in microchip  manufacturing  and ten years in the
capital  equipment  industry.  During the past ten years,  Mr.  Osborne had held
senior  management  positions  at Lam Research in Fremont,  CA. These  positions
included Vice President of Lam's Worldwide  Customer Support.  Mr. Osborne holds
seven patents, has numerous technical and business publications,  and has served
on the Board of Directors of four companies.

         Calvin  S.  Robinson,  age 77,  has  served on the  Company's  Board of
Directors  since 1982 and since  February  of 1996 has  served as the  Company's
Secretary.  Mr. Robinson has been of counsel to Murphy,  Robinson,  Heckathorn &
Phillips,  P.C. since 1989. This firm has provided legal services to the Company
since 1979.  Mr. Robinson is also a director of Winter Sports, Inc.

                         THE BOARD RECOMMENDS A VOTE FOR
                    THE ELECTION OF THE NOMINEES NAMED ABOVE.



Relationships Among Directors or Executive Officers

         There  are no  family  relationships  among  any of  the  directors  or
executive  officers  of the  Company,  except  that  Thomas  Sulzbacher,  a vice
president of the Company, is the son-in-law of Raymon F. Thompson.

Meetings and Committees of the Board of Directors

         During the fiscal year ended  September  30,  1997,  the Board met four
times. The Board has three committees: the Audit Committee, the Compensation and
Stock Option  Committee  and the  Nominating  Committee.  During the fiscal year
ended  September  30,  1997,  no  director  attended  fewer  than 75% of all the
meetings of the Board and its  committees  on which he served  after  becoming a
member of the Board.

         The Audit Committee, which held three meetings in the fiscal year ended
September 30, 1997,  consisted of Messrs. Dasen and Eigeman. The Audit Committee
reviews and supervises the Company's financial controls, including selecting the
Company's  auditors,  reviewing  the books and accounts of the Company,  meeting
with the officers of the Company  regarding  the Company's  financial  controls,
acting upon  recommendations  of auditors and taking such further  action as the
Audit  Committee  deems necessary to complete an audit of the books and accounts
of the Company, as well as other matters which may come before it or as directed
by the Board.

         The Compensation and Stock Option  Committee,  which held five meetings
in the fiscal year ended  September  30, 1997,  consists of Messrs.  Bateman and
Robinson.  The Compensation and Stock Option Committee  reviews and approves the
compensation and benefits for the Company's executive officers,  administers the
Company's  stock option plan and performs  such other duties as may from time to
time be determined by the Board.

         The  Nominating  Committee,  which held four (4) meetings in the fiscal
year ended  September 30, 1997,  consists of Messrs.  Bateman and Thompson.  The
Nominating Committee nominates directors to hold office for the ensuing year and
until their respective successors are duly elected and qualified. The Nominating
Committee may consider  recommendations from shareholders if received in writing
addressed  to the  Secretary  of the Company no later than 120 days prior to the
12-month anniversary of the previous annual meeting of shareholders.

Compensation of Directors

         Upon  becoming a member of the Board,  non-employee  directors  receive
options (the "Initial  Option Grants") to purchase 3,000 shares of Common Stock,
and thereafter  receive an annual option grant (the "Annual  Option  Grants") to
purchase  2,000 shares of Common  Stock.  The Company's  non-employee  directors
receive a $1,000  monthly fee,  $1,000 for each Board meeting  attended and $500
for each committee meeting attended that is not held in conjunction with a Board
meeting.  All  non-employee  directors are reimbursed  for expenses  incurred in
connection  with  attending  meetings of the Board.  Employee  directors  of the
Company do not receive compensation for their services as directors.




<PAGE>


                              SECURITY OWNERSHIP OF
                    CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

         The following table sets forth certain  information with respect to the
beneficial ownership of the Company's Common Stock as of the Record Date for (i)
each person who is known by the Company to beneficially  own more than 5% of the
Common Stock, (ii) each of the Company's  directors,  (iii) each of the officers
appearing in the Summary  Compensation  Table below and (iv) all  directors  and
executive officers as a group.

<TABLE>
<S>                                                                 <C>                            <C>    

                                                                         Shares Beneficially Owned
                                                              -------------------------------------------------
  Directors, Executive Officers and 5% Shareholders                  Number                     Percent(1)
- -------------------------------------------------------       ---------------------         -------------------
Raymon F. and Ladeine A. Thompson(2)....................            6,384,234                      46.4%
Howard E. Bateman(3)....................................               11,000                       *
Richard A. Dasen(3).....................................               10,000                       *
Daniel J. Eigeman(3)....................................                7,900                       *
John S. Osborne(4)......................................                5,000                       *
Calvin S. Robinson(3)...................................                7,750                       *
Timothy C. Dodkin(5)....................................               23,250                       *
Gregory L. Perkins(6) ..................................               27,300                       *
Thomas Sulzbacher(7)....................................               46,275                       *


All directors and officers as a group (10 persons)(8)...            6,526,009                      47.1

</TABLE>
- ----------------------------
*     Less than 1%.

(1)Beneficial  ownership is determined  in  accordance  with the rules of the
   Securities  and Exchange  Commission.  In  computing  the number of shares
   beneficially  owned  by a  person  and the  percentage  ownership  of that
   person, shares of Common Stock subject to options held by that person that
   are currently exercisable or exercisable within 60 days of the Record Date
   are deemed outstanding.  Such shares,  however, are not deemed outstanding
   for the  purpose  of  computing  the  percentage  ownership  of each other
   person. Except as indicated in the footnotes to this table and pursuant to
   applicable  community  property  laws, the persons named in the table have
   sole  voting and  investment  power  with  respect to the shares set forth
   opposite such person's name.

(2)Includes  318,750  shares held in the name of the Gina  Thompson  Trust of
   which Mr. Thompson is the trustee, and includes 100,000 shares held in the
   name of the Floyd Foundation Trust of which Mr. Thompson is the trustee.

(3)Includes 7,000 option shares exercisable within 60 days of the Record Date.

(4)Represents 3,000 option shares exercisable within 60 days of the Record Date.

(5)Includes 21,750 option shares exercisable within 60 days of the Record Date.

(6)Represents 27,300 option shares exercisable within 60 days of the Record
   Date.

(7)Includes 6,900 option shares exercisable within 60 days of the Record Date.

(8)Includes 90,250 option shares exercisable within 60 days of the Record Date.




<PAGE>


                                 PROPOSAL NO. 2

      APPROVAL AND RATIFICATION OF THE AMENDED AND RESTATED SEMITOOL, INC.
                       1994 STOCK OPTION PLAN, AS AMENDED


         The  Company's  shareholders  are being asked to act upon a proposal to
approve and ratify the action of the Board  amending the  Company's  Amended and
Restated 1994 Stock Option Plan (the "Option Plan").  Approval and  ratification
of the proposal  requires the affirmative  vote of a majority of the outstanding
shares of the Company's  Common Stock present in person or  represented by proxy
and entitled to vote at the Annual Meeting.

         The  Board  amended  the  Option  Plan in  December  1997,  subject  to
shareholder  approval and  ratification  of the amended Option Plan, to increase
the number of shares  reserved  for  issuance  under the Option  Plan by 200,000
shares from 1,100,000 shares to 1,300,000 shares.

         The Board  believes that the  attraction  and retention of high quality
personnel are essential to the Company's  continued  growth and success and that
an incentive plan such as the Option Plan is necessary for the Company to remain
competitive in its compensation practices.

                  THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR
                        APPROVAL AND RATIFICATION OF THE
                            OPTION PLAN, AS AMENDED.

General Description

         The following is a general  description  of the principal  terms of the
Option  Plan,  the  amendment  approved  by the  Board  and the  purpose  of the
amendment. Although the Company believes that the following description provides
a fair summary of the  material  terms of the Option Plan,  the  description  is
qualified  in its  entirety  by the text of the Option  Plan,  as proposed to be
amended.

         The  Option  Plan  was  adopted  by  the  Board  and  approved  by  the
shareholders  of the Company in December 1994. The purpose of the Option Plan is
to assist the Company in attracting and retaining high quality  personnel and to
provide a means  whereby  eligible  employees  (including  officers and employee
directors)  and  non-employee  directors  can acquire  Common Stock  through the
exercise of options,  thereby aligning the interests of employees,  officers and
directors with the interests of  shareholders.  The Option Plan provides for the
granting to employees  (including  officers and employee directors) of incentive
stock options  ("Incentive  Stock Options") within the meaning of Section 422 of
the  Internal  Revenue  Code of  1986,  as  amended,  and for  the  granting  to
employees,  directors and consultants of nonqualified stock options. The Company
cannot grant an Incentive  Stock Option if as a result of the grant the optionee
would have the right in any  calendar  year to exercise  (under all plans of the
Company  or its  affiliates)  for the  first  time one or more  Incentive  Stock
Options for shares having an aggregate  fair market value  (determined as of the
grant date) in excess of  $100,000.  As of the Record  Date,  approximately  156
persons were either  participating  in or eligible to  participate in the Option
Plan and options to purchase  769,250  shares had been granted  under the Option
Plan of which options to purchase 589,251 shares were outstanding.

         The Option Plan is currently administered by the Compensation and Stock
Option Committee of the Board (the "Compensation Committee"),  which, except for
Initial  Option  Grants  and Annual  Option  Grants to  non-employee  directors,
determines the terms of the options granted under the Option Plan, including the
exercise price,  the number of shares subject to the option and  exercisability.
Generally,  5% of the shares subject to the option granted under the Option Plan
become exercisable at the end of each three-month period commencing three months
after the grant date such that the option is fully  exercisable five years after
the grant date.  No Incentive  Stock Option may be  transferred  by the optionee
other than by will or the laws of descent or distribution.  Each Incentive Stock
Option may be  exercised,  during the  lifetime  of the  optionee,  only by such
optionee.

         Under the Option Plan,  non-employee  directors  receive Initial Option
Grants to purchase  3,000 shares of Common Stock upon the date he or she becomes
a  director.   Thereafter,   immediately   following   each  annual  meeting  of
shareholders,  each  non-employee  director who continues as such  following the
annual  meeting and has attended two or more  meetings of the Board of Directors
as of the time of such  annual  meeting,  receives  an  Annual  Option  Grant to
purchase 2,000 shares of Common Stock.

         In general,  the exercise  price of stock subject to the Initial Option
Grants and the Annual Option Grants is the fair market value of the Common Stock
on the date of grant.  The Initial Option Grants vest and become  exercisable as
of the date of grant and the Annual Option Grants vest and become exercisable as
to 25% of the shares covered thereby on the last day of each three-month  period
following  the date of grant  such that the  option  becomes  fully  exercisable
twelve months after the grant date.

         The exercise price of Incentive  Stock Options granted under the Option
Plan must equal at least the fair market  value of the Common  Stock on the date
of grant.  The  exercise  price of any  Incentive  Stock  Option  granted  to an
optionee  who owns stock  possessing  more than 10% of the  voting  power of the
Company's  outstanding capital stock must equal at least 110% of the fair market
value of the  Common  Stock on the date of  grant.  The  Compensation  Committee
determines the exercise price of  nonqualified  stock options other than Initial
Option  Grants and Annual  Option  Grants.  In general,  payment of the exercise
price may be made in cash, by the optionee's personal check,  certified check or
other specified consideration.

         In general, except for options granted to non-employee  directors,  the
Option Plan provides that the Compensation  Committee may include a provision in
the option  agreement  providing  that,  in the event of a Change in Control (as
defined in the Option Plan),  any outstanding  options covered by such agreement
shall be fully vested,  nonforfeitable  and become exercisable as of the date of
the Change in Control.  If the  Compensation  Committee elects to include such a
provision,  the option agreement will provide that, (a) in the event of a Change
in Control  relating to (i) an  acquisition  of Common  Stock  resulting  in the
beneficial  ownership by any person or related group of persons of more than 50%
of the total  combined  voting power of the  outstanding  Common  Stock,  (ii) a
change in the  composition of the Board over a 36 month period or (iii) approval
by the  Company's  shareholders  of any  reverse  merger  in which  the  Company
survives as an entity,  but in which securities  possessing more than 50% of the
total  combined  voting  power  of  the  Company's  outstanding  securities  are
transferred to a person or persons different from those who held such securities
immediately  prior to such merger,  the option shall remain  exercisable for the
remaining  term of the  option,  and (b) in the  event  of a Change  in  Control
relating  to  (x)  approval  by  the  Company's  shareholders  of  a  merger  or
consolidation  in which the Company is not the  surviving  entity  (except for a
transaction  the principal  purpose of which is to change the Company's state of
incorporation)  or (y) the approval by the Company's  shareholders of either the
sale, transfer or other disposition of all or substantially all of the assets of
the Company or the complete  liquidation  or  dissolution  of the  Company,  the
option shall  terminate as of the effective date of such merger,  disposition of
assets,  liquidation  or  dissolution.  As to options  granted  to  non-employee
directors,  (A) in the event of a Change in  Control  relating  to (i),  (ii) or
(iii)  above,  any such  outstanding  options  become  fully  vested  and remain
exercisable  for the  remaining  term of such  options and (B) in the event of a
Change in Control  relating to (x) or (y) above,  any such  outstanding  options
terminate  as of the  effective  date of such  merger,  disposition  of  assets,
liquidation or dissolution.

         The Board of Directors believes there are insufficient shares of Common
Stock  currently  available  under the  Option  Plan to  satisfy  option  grants
anticipated to be issued in 1998. The  shareholders of the Company are therefore
being asked to approve the Option  Plan,  as amended,  to increase the number of
shares of Common Stock available for issuance  thereunder by 200,000 shares from
1,100,000 shares to 1,300,000 shares.

Federal Income Tax Information

         If an  option  granted  under the  Option  Plan is an  Incentive  Stock
Option, the optionee will recognize no income upon grant of the option and incur
no tax  liability  due to the  exercise  of the option  unless the  optionee  is
subject to alternative  minimum tax. The Company will not be allowed a deduction
for  federal  income tax  purposes as a result of the  exercise of an  Incentive
Stock Option  regardless of the  applicability  of the alternative  minimum tax.
Upon the sale or  exchange  of the shares at least two years  after grant of the
option and one and a half years after  exercise  of the  option,  a gain will be
treated as long-term  capital gain. If these holding  periods are not satisfied,
the optionee will recognize  ordinary income equal to the difference between the
exercise  price and the lower of the fair market  value of the stock at the date
of the  option  exercise  or the sale price of the stock.  The  Company  will be
entitled to a deduction in the same amount as the ordinary income  recognized by
the optionee.  Any gain recognized on such a premature disposition of the shares
in excess of the amount  treated as  ordinary  income will be  characterized  as
long-term  capital  gain if the sale occurs more than one and a half years after
exercise  of the  option  or as  short-term  capital  gain  if the  sale is made
earlier.  Under  current  law, the maximum  long-term  capital gain tax rate for
individuals is 20% while the maximum ordinary income tax rate for individuals is
39.6%.

         All  options  which do not  qualify  as  Incentive  Stock  Options  are
referred to as  nonqualified  stock options.  An optionee will not recognize any
taxable  income at the time he or she is granted a  nonqualified  stock  option.
However, upon its exercise,  the optionee will recognize ordinary income for tax
purposes  measured by the excess,  if any, of the then fair market  value of the
shares over the exercise price. In certain  circumstances,  where the shares are
subject to a substantial risk of forfeiture when acquired,  the date of taxation
may be deferred unless the optionee files an election with the Internal  Revenue
Service  under  Section  83(b)  of the Code  within  30 days  after  the date of
exercise.  The Company  generally  will be  entitled to a deduction  in the same
amount as the ordinary income recognized by the optionee.  The income recognized
by an optionee  who is also an employee of the Company will be subject to income
and employment  tax  withholding by the Company by payment of cash or out of the
current  earnings  paid to the  optionee.  Upon  resale  of such  shares  by the
optionee,  any difference  between the sale price and the exercise price, to the
extent not recognized as ordinary income as provided  above,  will be treated as
capital  gain or loss,  and will  qualify  for  long-term  capital  gain or loss
treatment if the shares have been held for more than one and a half years.

         The  foregoing  is only a  summary  of the  effect  of  federal  income
taxation  upon the  optionee  and the  Company  with  respect  to the  grant and
exercise of options  under the Option Plan and does not purport to be  complete.
The foregoing does not discuss the income tax laws of any  municipality,  state,
or foreign country in which an optionee may reside.



                                 PROPOSAL NO. 3

               RATIFICATION OF APPOINTMENT OF INDEPENDENT AUDITORS


         Coopers &  Lybrand  L.L.P.  has  served  as the  Company's  independent
auditors  since  1984 and has been  appointed  by the Board to  continue  as the
Company's  independent  auditors for the Company's  fiscal year ending September
30, 1998. In the event that  ratification  of this  selection of auditors is not
approved  by a  majority  of the  shares of Common  Stock  voting at the  Annual
Meeting in person or by proxy,  management  will review its future  selection of
auditors. A representative of Coopers & Lybrand L.L.P. is expected to be present
at the Annual  Meeting.  The  representative  will have an opportunity to make a
statement and to respond to appropriate questions.

          THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR RATIFICATION OF
          THE APPOINTMENT OF COOPERS & LYBRAND L.L.P. AS THE COMPANY'S
                    INDEPENDENT AUDITORS FOR THE FISCAL YEAR
                           ENDING SEPTEMBER 30, 1998.



<PAGE>


                  EXECUTIVE COMPENSATION AND OTHER INFORMATION

                           Summary Compensation Table

         The following  table sets forth  information  relating to  compensation
received by the Company's Chief Executive Officer and the four other most highly
compensated  executive officers of the Company (the "Named Executive  Officers")
during the periods indicated.

<TABLE>
<S>                                     <C>         <C>             <C>                   <C>                   <C>    


                                                                                        Long-Term
                                                                                       Compensation
                                                                                     -----------------
                                                                                        Securities
                                                                                        Underlying            All Other
   Name and Principal Position          Year         Salary            Bonus            Options(#)         Compensation(1)
- ----------------------------------     -------     ------------    --------------    -----------------    ------------------

Raymon F. Thompson                      1997        $243,345            --                  --                  $4,750
   Chairman, Chief Executive            1996         230,015         $70,000(2)             --                   4,750
   Officer and President                1995         227,091                                --                   4,620

Timothy C. Dodkin(3)                    1997         303,536        $162,749(4)           10,000                 2,620
   Managing Director, Semitool          1996         228,565          50,000                --                   2,504
   Europe Ltd.                          1995         208,333          55,000(2)           45,000                 2,534
                                                                                                            
                                                                     
Thomas Sulzbacher Vice President        1997         151,507          75,025              20,000                 5,250
   of Sales and Marketing               

Gregory L. Perkins                      1997         147,472          60,000               7,000                 3,938
   Vice President and General           1996         141,180            --                  --                   2,573
   Manager                              1995         127,921          70,000(2)           45,000                   920
                                                                
                                                                                                          
Robert W. Berner(5)                     1997         156,673            --                5,000                 4,921
   Vice President and                   1996         140,005            --               15,000                 3,979
   General Manager, Metallization       
   Group

</TABLE>



(1)Represents Company contributions to the Company's 401(k) plan on behalf
   of the Named  Executive  Officer,  except that  amounts for Mr.  Dodkin
   represent  Company  contributions  to a United Kingdom employee benefit
   plan that is  similar  to the  Company's  401(k)  plan on behalf of Mr.
   Dodkin.
(2)Includes bonus amounts paid in fiscal 1996 for services rendered in fiscal
   1995.
(3)Mr. Dodkin's compensation is paid in UK Pounds Sterling. The average UK
   Pound  Sterling  exchange  rates for  fiscal  1995,  1996 and 1997 were
   1.584, 1.565 and 1.638, respectively.
(4)Includes  bonus amounts paid in fiscal 1998 for services  rendered in fiscal
   1997.  (5) Mr.  Berner  ceased being an officer of the Company as of 
   December 5, 1997.
(5)Mr. Berner ceased being an officer of the Company as of December 5, 1997.



<PAGE>


                        Option Grants in Last Fiscal Year

         The following table provides certain  information with respect to stock
options  granted to the Named  Executive  Officers  during the fiscal year ended
September  30, 1997.  In addition,  as required by the  Securities  and Exchange
Commission  rules, the table sets forth the hypothetical  gains that would exist
for the  respective  options  based on assumed  rates of annual  compound  price
appreciation during the option term.

<TABLE>
<S>                                <C>           <C>            <C>       <C>             <C>         <C>


                                                  Individual Grants
                                ----------------------------------------------------
                                                                                          Potential Realizable
                                 Number of     % of Total                                   Value at Assumed
                                 Securities      Options                                  Annual Rate of Stock
                                 Underlying    Granted to     Exercise                   Price Appreciation for
                                  Options     Employees in    Price Per   Expiration          Option Term (1)
       Name                       Granted(2)   Fiscal Year      Share        Date             5%         10%
- ----------------------          -----------   ------------     -------    ----------      --------------------- 
                                                                                                                

Raymon F. Thompson...........       --             --            --           --             --          --

Timothy C. Dodkin............      10,000         6.62%         $9.75     04/29/2007      $ 61,317    $155,390

Thomas Sulzbacher............      20,000        13.25%          9.75     04/29/2007       122,634     310,780

Gregory L. Perkins...........       7,000         4.64%          9.75     04/29/2007        42,922     108,773

Robert W. Berner.............       5,000         3.31%          9.75     04/29/2007        30,659      77,695

- -------------------------------
</TABLE>

(1)      Potential realizable value is determined by applying an amount equal to
         the  fair  market  value on the  date of  grant  to the  stated  annual
         appreciation  rate  compounded  annually for the remaining  term of the
         option,  subtracting  the  exercise  price at the end of the period and
         multiplying the remaining number by the number of shares subject to the
         option. Actual gains, if any, on stock option exercise and Common Stock
         holdings are dependent  upon a number of factors,  including the future
         performance of the Common Stock,  overall stock market conditions,  and
         the timing of option exercises,  if any. There can be no assurance that
         the amounts reflected in this table will be achieved.

(2)      Reflects options that have a ten year term and vest and become 
         exercisable at the rate of 5% per quarter.



<PAGE>


                 Aggregated Option Exercises in Last Fiscal Year
                        and Fiscal Year-End Option Values



         The following table discloses for each of the Named Executive  Officers
certain  information  relating to options to purchase the Company's Common Stock
exercised  during  the fiscal  year  ended  September  30,  1997 and  options to
purchase the Company's Common Stock held at the end of such period.

<TABLE>
<S>                                   <C>            <C>           <C>              <C>            <C>              <C>    

                                                                     Number of Securities              Value of Unexercised
                                                                    Underlying Unexercised             In-the-Money Options
                                                                   Options at September 30,        at September 30, 1996($)(1)
                                                                            1996(#)
                                                                 ------------------------------    -----------------------------
                                    Shares
                                  Acquired on       Value
                Name              Exercise(#)     Realized($)    Exercisable     Unexercisable    Exercisable      Unexercisable
       -----------------------    -----------     -----------    ------------    --------------   -------------    -------------

       Raymon F. Thompson....         --             --              --               --              --               --
      
       Timothy C. Dodkin.....         --             --            16,250           29,750         $266,906         $479,344
       
       Thomas Sulzbacher.....         --             --             4,300           21,700           69,687          336,562
       
       Gregory L. Perkins....         --             --            22,100           26,900          363,350          435,525
       
       Robert W. Berner......         --             --            13,000           22,000          194,187          311,437

</TABLE>

- -------------------------------
(1)    Based on the fair market value of the Company's Common Stock as of
       September 30, 1997 $25.125.


Compensation Committee Interlocks and Insider Participation



         During the fiscal year ended  September 30, 1997,  Messrs.  Bateman and
Robinson  served on the  Compensation  Committee of the Board of  Directors.  No
interlocking  relationship  exists between any member of the Company's  Board of
Directors or Compensation  Committee and any member of the Board of Directors or
compensation   committee  of  any  other  company,  nor  has  such  interlocking
relationship existed in the past.




<PAGE>


                      REPORT OF THE COMPENSATION COMMITTEE
                            OF THE BOARD OF DIRECTORS




         This section is not  "soliciting  material," is not deemed "filed" with
the Commission and is not incorporated by reference in any filing of the Company
under the Securities Act of 1933, as amended, or the Securities and Exchange Act
of 1934,  as  amended,  whether  made  before  or  after  the  date  hereof  and
irrespective of any general language to the contrary.

         The Compensation Committee of the Board was formed in 1995 and consists
of Messrs.  Bateman and Robinson.  Decisions  concerning the compensation of the
Company's executive officers are made by the Compensation Committee and reviewed
by the full Board (excluding any interested director).

Executive Officer Compensation Programs

         The  objectives of the executive  officer  compensation  program are to
attract,  retain,  motivate and reward key  personnel  who possess the necessary
leadership and management skills,  through competitive base salary,  annual cash
bonus incentives, long-term incentive compensation in the form of stock options,
and various benefits, including medical and life insurance plans.

         The executive  compensation policies of the Compensation  Committee are
intended to combine  competitive  levels of  compensation  and rewards for above
average performance and to align relative  compensation with the achievements of
key business objectives,  optimal satisfaction of customers, and maximization of
shareholder  value. The Compensation  Committee believes that stock ownership by
management is  beneficial  in aligning  management  and  shareholder  interests,
thereby enhancing shareholder value.

         Base  Salaries.  Salaries  for the  Company's  executive  officers  are
determined  primarily on the basis of the  executive  officer's  responsibility,
general  salary  practices  of  peer  companies  and  the  officer's  individual
qualifications  and experience.  The base salaries are reviewed annually and may
be adjusted by the  Compensation  Committee in accordance with certain  criteria
which include individual  performance,  the functions performed by the executive
officer,  the scope of the executive officer's on-going duties,  general changes
in the  compensation  peer group in which the  Company  competes  for  executive
talent, and the Company's financial performance generally. The weight given each
such  factor  by  the  Compensation   Committee  may  vary  from  individual  to
individual.

         Incentive  Bonuses.  The  Compensation  Committee  believes that a cash
incentive bonus plan can serve to motivate the Company's  executive officers and
management to address annual  performance  goals,  using more immediate measures
for  performance  than those  reflected  in the  appreciation  in value of stock
options.  The bonus amounts are based upon  recommendations  by management and a
subjective   consideration   of  factors   including  such  officer's  level  of
responsibility,  individual performance,  contributions to the Company's success
and the Company's financial performance generally.

         Stock Option  Grants.  Stock options are granted to executive  officers
and other  employees under the Option Plan.  Because of the direct  relationship
between the value of an option and the stock price, the  Compensation  Committee
believes  that options  motivate  executive  officers to manage the Company in a
manner that is consistent with  shareholder  interests.  Stock option grants are
intended to focus the  attention  of the  recipient on the  Company's  long-term
performance  which the Company believes results in improved  shareholder  value,
and to retain the services of the executive officers in a competitive job market
by providing significant long-term earning potential. To this end, stock options
generally  vest and  become  fully  exercisable  over a  five-year  period.  The
principal factors  considered in granting stock options to executive officers of
the Company are prior performance,  level of responsibility,  other compensation
and the executive  officer's ability to influence the Company's long-term growth
and  profitability.  However,  the Option Plan does not provide any quantitative
method  for  weighting  these  factors,  and a  decision  to  grant  an award is
primarily  based  upon a  subjective  evaluation  of the past as well as  future
anticipated performance.

         Other  Compensation  Plans.  The Company has  adopted  certain  general
employee benefit plans in which executive  officers are permitted to participate
on parity with other  employees.  The Company  also  provides a 401(k)  deferred
compensation  pension plan.  Benefits  under these general plans are  indirectly
tied to the Company's performance.

         Deductibility of  Compensation.  Section 162(m) of the Internal Revenue
Code  ("IRC")  disallows  a deduction  by the  Company for certain  compensation
exceeding $1.0 million paid to any Named  Executive  Officer,  excluding,  among
other things,  certain performance based compensation.  Because the compensation
figures for the Named Executive Officers have not approached the limitation, the
Compensation  Committee has not had to use any of the available  exemptions from
the  deduction  limit.  However,  the Option  Plan is  designed  to qualify  any
compensation realized by Named Executive Officers from the exercise of an option
as performance based compensation.  The Compensation  Committee remains aware of
the  existence  of  the  IRC  Section  162(m)  limitations,  and  the  available
exemptions,   and  will  address  the  issue  of   deductibility   when  and  if
circumstances  warrant the use of such  exemptions  in addition to the exemption
contemplated under the Option Plan.

Chief Executive Officer Compensation

         The compensation of the Chief Executive Officer is reviewed annually on
the same basis as discussed  above for all executive  officers.  Mr.  Thompson's
base  salary for the fiscal year ended  September  30,  1997 was  $243,345.  Mr.
Thompson's base salary was established in part by comparing the base salaries of
chief executive officers at other companies of similar size. Mr. Thompson's base
salary  was  at  the   approximate   median  of  the  base   salary   range  for
Presidents/Chief  Executive  Officers of  comparative  companies.  Mr.  Thompson
received no stock options or bonuses during the fiscal year ended  September 30,
1997.


                                        MEMBERS OF THE COMPENSATION COMMITTEE



                                        Howard E. Bateman
                                        Calvin S. Robinson




<PAGE>


                              CERTAIN TRANSACTIONS





         The   following  is  a   description   of  certain   transactions   and
relationships  entered into or existing  during the fiscal year ended  September
30,  1997  between  the Company  and  certain  affiliated  parties.  The Company
believes  that the  terms of such  transactions  were no less  favorable  to the
Company than could have been obtained from an unaffiliated party.

         During the fiscal year ended  September 30, 1997,  the Company  leased,
and continues to lease,  airplanes  from Raymon F.  Thompson.  Under these lease
agreements, the Company made rental payments to Raymon F. Thompson of $1,276,600
during the fiscal year ended  September 30, 1997. The Company  currently  leases
three  airplanes  from Mr.  Thompson with an aggregate  monthly rental charge of
$106,100. One of these lease agreements expires in 1999, one expires in 2000 and
the other  expires  in 2001.  The terms of the lease  agreements  were  based on
quotes from independent  aircraft leasing dealers for the same type of aircraft.
The Company  believes that these lease agreements are on terms no less favorable
to the Company than could have been obtained from an unaffiliated party.

         Fastener's  West,  Inc.  ("FWI"),  76% of which is owned by  Raymon  F.
Thompson,  supplies some of the fasteners used by the Company. During the fiscal
year ended September 30, 1997,  total purchases by the Company from FWI amounted
to approximately $720,000. Prices paid by the Company are comparable to the list
price paid by other FWI customers.



<PAGE>


                             STOCK PERFORMANCE GRAPH

         The following  graph compares the  percentage  change in the cumulative
total  shareholder  return on the Company's  Common Stock from February 2, 1995,
the  date of the  Company's  initial  public  offering,  through  the end of the
Company's  fiscal year ended September 30, 1997,  with the percentage  change in
the cumulative total return for the Nasdaq Composite Index (U.S.  Companies) and
the Hambrecht & Quist Semiconductor  Index. The comparison assumes an investment
of $100 on February  2, 1995 in the  Company's  Common  Stock and in each of the
foregoing indices and assumes  reinvestment of dividends.  The stock performance
shown  on the  graph  below  is  not  necessarily  indicative  of  future  price
performance.

                      STOCK PERFORMANCE GRAPH APPEARS HERE



                 COMPARISON OF 31 MONTH CUMULATIVE TOTAL RETURN*

            AMONG SEMITOOL, INC., THE NASDAQ STOCK MARKET (U.S) INDEX

                  AND THE HAMBRECHT & QUIST SEMICONDUCTOR INDEX
<TABLE>
<S>                                <C>        <C>     <C>    <C>    <C>      <C>     <C>     <C>     <C>      <C>     <C>     <C>

Following is a listing of each of the plot points illustrated in the graph:

DOLLARS                            2/02/95    3/95    6/95   9/95   12/95    3/96    6/96    9/96    12/96    3/97    6/97    9/97

SEMITOOL, INC.                         100     162     246    288     150     173     150     137      110     127     134     290

NASDAQ STOCK MARKET-US                 100     107     123    137     139     146     157     163      171     162     192     224

HAMBRECHT & QUIST SEMICONDUCTORS       100     115     161    182     132     125     120     136      171     193     217     272

*  $100 INVESTED ON 2/02/95 IN STOCK OR INDEX-INCLUDING REINVESTMENT OF DIVIDENDS.  FISCAL YEAR ENDING SEPTEMBER 30.

</TABLE>






<PAGE>






                              SHAREHOLDER PROPOSALS


         To be  considered  for  presentation  to  the  annual  meeting  of  the
Company's  shareholders  to be held in  1998,  a  shareholder  proposal  must be
received by Larry Viano,  Principal  Financial Officer,  655 West Reserve Drive,
Kalispell, Montana 59901, no later than September 11, 1998.


                                  OTHER MATTERS

         Section 16(a) Beneficial Ownership Reporting Compliance.  Section 16(a)
of the Exchange Act requires the  Company's  directors,  executive  officers and
persons  who own more  than 10% of the  Company's  Common  Stock  (collectively,
"Reporting  Persons") to file  reports of ownership  and changes in ownership of
the Company's  Common Stock.  Reporting  Persons are required by Securities  and
Exchange  Commission  regulations  to furnish  the  Company  with  copies of all
Section  16(a)  reports  they file.  Based solely on its review of the copies of
such reports received or written representations from certain Reporting Persons,
the Company  believes that during the fiscal year ended  September 30, 1997, all
Reporting Persons complied with all applicable filing requirements.

         Other Matters.  The Board of Directors knows of no other business which
will be  presented  at the Annual  Meeting.  If any other  business  is properly
brought before the Annual  Meeting,  it is intended that proxies in the enclosed
form will be voted in respect  thereof in  accordance  with the judgments of the
persons voting the proxies.

         It is  important  that the proxies be returned  promptly  and that your
shares  be  represented.  Shareholders  are  urged to mark,  date,  execute  and
promptly return the accompanying proxy card in the enclosed envelope.

                                  By Order of the Board of Directors,



                                  /s/Raymon F. Thompson
                                  Raymon F. Thompson
                                  Chairman of the Board,
                                  Chief Executive Officer and
                                  President

January 22, 1998
Kalispell, Montana
















<PAGE>


                                    EXHIBIT A


                       AMENDED AND RESTATED SEMITOOL, INC.
                             1994 STOCK OPTION PLAN


1. Establishment, Purpose, and Definitions.

                  (a) There is hereby adopted the 1994 Stock Option Plan
(the "Plan") of Semitool, Inc. (the "Company").

                  (b) The  purpose  of the Plan is to  provide  a means  whereby
eligible  individuals  (as defined in Section 4, below) can acquire Common Stock
of the Company (the "Stock").  The Plan provides employees  (including  officers
and  directors  who are  employees)  of the  Company  and of its  Affiliates  an
opportunity to purchase shares of Stock pursuant to options which may qualify as
incentive stock options (referred to as "incentive stock options") under Section
422 of the  Internal  Revenue  Code  of  1986,  as  amended  (the  "Code"),  and
employees, officers, directors,  independent contractors, and consultants of the
Company  and of its  Affiliates  an  opportunity  to  purchase  shares  of Stock
pursuant to options  which are not  described in Sections 422 or 423 of the Code
(referred to as "nonqualified stock options").

                  (c) The term  "Affiliates" as used in the Plan means parent or
subsidiary corporations,  as defined in Sections 424(e) and (f) of the Code (but
substituting  "the Company" for "employer  corporation"),  including  parents or
subsidiaries which become such after adoption of the Plan.

2. Administration of the Plan.

                  (a) The Plan shall be  administered  by the Board of Directors
of the Company  (the  "Board").  Subject to Section  2(e)  below,  the Board may
delegate the  responsibility  for administering  the Plan to a committee,  under
such terms and conditions as the Board shall  determine (the  "Committee").  The
Committee  shall  consist  of two or more  members  of the Board or such  lesser
number of members of the Board as permitted by Rule 16b-3  promulgated under the
Securities Exchange Act of 1934, as amended ("Rule 16b-3").  None of the members
of the Committee  shall receive,  while serving on the Committee,  or during the
one-year  period  preceding  appointment to the  Committee,  a grant or award of
equity  securities  under (i) the Plan or (ii) any other plan of the  Company or
its  affiliates  under which the  participants  are  entitled  to acquire  Stock
(including  restricted Stock), stock options,  stock bonuses,  related rights or
stock  appreciation  rights of the Company or any of its affiliates,  other than
pursuant  to the grant of  automatic  options  provided  in  Section 7 below and
pursuant  to  transactions  in any such  other plan  which do not  disqualify  a
director from being a disinterested person under Rule 16b-3. The limitations set
forth in this  Section  2(a)  shall  automatically  incorporate  any  additional
requirements  that may in the future be  necessary  for the Plan to comply  with
Rule 16b-3.  Members of the Committee  shall serve at the pleasure of the Board.
The  Committee  shall  select  one of its  members as  chairman,  and shall hold
meetings  at such  times  and  places as it may  determine.  A  majority  of the
Committee shall  constitute a quorum and acts of the Committee at which a quorum
is present,  or acts reduced to or approved in writing by all the members of the
Committee,  shall be the valid  acts of the  Committee.  If the  Board  does not
delegate  administration  of the Plan to the  Committee,  then each reference in
this Plan to "the Committee" shall be construed to refer to the Board.

                  (b)  Except for  options  granted  to  Non-Employee  Directors
pursuant to Section 7, the Committee shall determine which eligible  individuals
(as defined in Section 4, below) shall be granted  options  under the Plan,  the
timing of such grants,  the terms thereof  (including  any  restrictions  on the
Stock), and the number of shares subject to such options.

                  (c)  Except for  options  granted  to  Non-Employee  Directors
pursuant  to Section  7, the  Committee  may amend the terms of any  outstanding
option granted under this Plan, but any amendment which would  adversely  affect
the optionee's rights under an outstanding  option shall not be made without the
optionee's  written  consent.  The Committee  may, with the  optionee's  written
consent,  cancel any outstanding  stock option or accept any  outstanding  stock
option in exchange for a new option.

                  (d) The  Committee  shall  have  the  sole  authority,  in its
absolute  discretion to adopt, amend, and rescind such rules and regulations as,
in its opinion,  may be advisable in the administration of the Plan, to construe
and  interpret  the Plan,  the rules and the  regulations,  and the  instruments
evidencing  options  or Stock  granted  under  the  Plan  and to make all  other
determinations deemed necessary or advisable for the administration of the Plan.
All decisions,  determinations,  and  interpretations  of the Committee shall be
binding on all participants.  Notwithstanding the foregoing, the Committee shall
not  exercise any  discretionary  functions  with respect to options  granted to
Non-Employee Directors pursuant to Section 7.

                  (e) Notwithstanding  the foregoing  provisions of this Section
2,  grants of  options  to any  "Covered  Employee,"  as such term is defined by
Section 162(m) of the Code shall be made only by a subcommittee of the Committee
which, in addition to meeting other  applicable  requirements of this Section 2,
is composed  solely of two or more  "outside  directors,"  within the meaning of
Section 162(m) of the Code and the regulations  thereunder (the  "Subcommittee")
to  the  extent   necessary  to  qualify   such  grants  as   "performance-based
compensation"  under  Section  162(m).  In the case of such  grants  to  Covered
Employees, references to the "Committee" shall be deemed to be references to the
Subcommittee as specified above.

3. Stock Subject to the Plan.

                  (a) An  aggregate of not more than  1,300,000  shares of Stock
shall be available  for the grant of stock  options under the Plan, of which not
more than  90,000  shares  shall be  available  for the grant of  options  under
Section 7 of the Plan. If an option is surrendered  (except surrender for shares
of Stock) or for any other reason ceases to be  exercisable in whole or in part,
the shares  which were subject to such option but as to which the option had not
been exercised shall continue to be available under the Plan.

                  (b) If there is any change in the Stock  subject to any option
granted  under  the  Plan,   through  merger,   consolidation,   reorganization,
recapitalization, reincorporation, stock split, stock dividend (in excess of two
percent),  or other change in the capital structure of the Company,  appropriate
adjustments  shall be made by the  Committee  in order  to  preserve  but not to
increase the benefits to the individual, including adjustments to the number and
kind of shares and the price per share subject to outstanding options.

4. Eligible  Individuals.           The persons  eligible to  participate in the
Plan  (other  than  pursuant  to  Section  7)  are  such  employees,   officers,
independent  contractors,  and consultants of the Company or an Affiliate as the
Committee   ,  in  its   discretion,   shall   designate   from  time  to  time.
Notwithstanding  the  foregoing,  only  employees of the Company or an Affiliate
(including officers and directors who are bona fide employees) shall be eligible
to receive  incentive  stock options.  Except for grants  pursuant to Section 7,
Eligible Individuals shall not include Non-Employee Directors.

5. The Option Price.           The exercise price of each incentive stock option
shall be not less than the per share fair market  value of the Stock  subject to
such option on the date the option is granted.  Except as provided in Section 7,
the exercise price of each  nonqualified  stock option shall be as determined by
the Committee.  Notwithstanding  the foregoing,  (i) in the case of an incentive
stock  option  granted  to a person  possessing  more  than ten  percent  of the
combined  voting power of the Company or an Affiliate,  the exercise price shall
be not less than 110 percent of the fair  market  value of the Stock on the date
the  option is  granted.  The  exercise  price of an option  shall be subject to
adjustment to the extent provided in Section 3(b), above.

6. Terms and Conditions of Options.

                  (a) Each option  granted  pursuant to the Plan will be 
evidenced by a written  Stock  Option  Agreement  executed by the Company and 
the person to whom such option is granted.

                  (b) The  Committee  shall  determine  the term of each  option
granted  under the Plan;  provided,  however,  that (i) the term of an incentive
stock option  shall not be more than 10 years,  (ii) in the case of an incentive
stock  option  granted  to a person  possessing  more  than ten  percent  of the
combined voting power of the Company or an Affiliate, the term of each incentive
stock option  shall be no more than five years,  and (iii) the term of an option
granted pursuant to Section 7 shall be as provided in Section 7.

                  (c) In the case of incentive stock options, the aggregate fair
market  value  (determined  as of the time such  option is granted) of the Stock
with respect to which incentive stock options are exercisable for the first time
by an  eligible  employee  in any  calendar  year (under this Plan and any other
plans  of  the   Company  or  its   Affiliates)   shall  not  exceed   $100,000.
Notwithstanding  the designation in an option agreement,  to the extent that the
$100,000  limit is exceeded for any calendar  year,  the excess options shall be
nonqualified stock options.

                  (d) Except for grants to  Non-Employee  Directors  pursuant to
Section 7, which shall be granted on the form of Stock Option Agreement attached
hereto as Exhibit A, the Stock  Option  Agreement  may contain such other terms,
provisions,   and   conditions  as  may  be  determined  by  the  Committee  not
inconsistent  with this Plan.  If an option,  or any part thereof is intended to
qualify as an incentive stock option,  the Stock Option  Agreement shall contain
those terms and conditions which are necessary to so qualify it.

                  (e) The  maximum  amount  of Stock for  which  options  may be
granted  pursuant to any  individual  per calendar  year under the Plan shall be
375,000  shares,  subject to adjustment  pursuant to Section 3(b). To the extent
required  by  Section  162(m)  of the Code and the  regulations  thereunder,  in
applying the foregoing limitation with respect to an employee,  if any option is
canceled, the canceled option shall continue to count against the maximum number
of shares for which  options may be granted to the  employee  under this Section
6(e).  For this  purpose,  the  repricing  of an option  shall be  treated  as a
cancellation of the existing option and the grant of a new option.

7. Stock Options for Non-Employee Directors

                  (a) Automatic  Grant of Options.  An option to purchase  3,000
shares of Stock shall be granted  ("Initial  Grant") to each director who is not
an employee of the Company ("Non-Employee  Director"),  such Initial Grant to be
made (i) to the then  existing  Non-Employee  Directors  upon the closing of the
Company's initial public offering of its Stock in an underwriting  pursuant to a
registration  statement  filed under the Securities Act of 1933 ("IPO") and (ii)
to other Non-Employee  Directors elected or appointed to the Board after the IPO
upon the date  each  first  becomes  a  Non-Employee  Director  of the  Company.
Thereafter,   immediately   following  each  annual  meeting  of  the  Company's
stockholders,  each  Non-Employee  Director  who  continues  as  a  Non-Employee
Director  following  such annual  meeting shall be granted an option to purchase
2,000 shares of Stock  ("Subsequent  Grant");  provided that no Subsequent Grant
shall be made to any  Non-Employee  Director who has not served as a director of
the Company and attended at least two (2) meetings of the Board of Directors, as
of the time of such annual meeting.  Each such Subsequent Grant shall be made on
the date of the annual  stockholders'  meeting in question;  provided,  however,
that as to Subsequent  Grants made to Non-Employee  Directors in connection with
the Company's 1996 annual stockholders' meeting (the "1996 Annual Meeting"), (x)
Non-Employee  Directors who have served as a director of the Company,  as of the
time of the 1996  Annual  Meeting,  for at least one year,  shall be  granted an
option to purchase  1,500 shares of Stock on the date of the 1996 Annual Meeting
and shall be granted an option to purchase  500 shares of Stock on May 20, 1996,
and (y) Non-Employee  Directors who have not served as a director of the Company
for at least one year, as of the time of such annual meeting,  but have attended
at least two (2) meetings of the Board of Directors,  as of the time of the 1996
Annual Meeting,  shall be granted an option to purchase 2,000 shares of Stock on
May 20, 1996. If any option ceases to be  exercisable  in whole or in part,  the
shares which were subject to such option but as to which the option had not been
exercised  shall continue to be available under the Plan. All options granted to
Non-Employee Directors shall be nonqualified stock options.

                  (b) Option  Exercise  Price.  The exercise  price per share of
Stock  covered by each option  shall be the  per-share  fair market value of the
Stock on the date the option is granted;  provided  that the exercise  price per
share of Stock  covered by options  constituting  Initial  Grants under  Section
7(a)(i)  above shall be the per-share  price to the public in the IPO;  provided
further,  however, that the exercise price per share of Stock covered by options
granted on May 20, 1996 under Section  7(a)(x) and (y) above shall be the lesser
of the  per-share  fair market  value of the Stock on  February  16, 1996 or the
per-share fair market value of the Stock on the date the option is granted.  The
exercise  price of an  option  granted  under  the  Plan  shall  be  subject  to
adjustment to the extent provided in Section 3(b) hereof.

                  (c)  Exercisability.  Each Initial Grant shall vest and become
exercisable as of the date of grant. Each Subsequent Grant shall vest and become
exercisable as to 1/4 of the shares covered  thereby on a quarterly basis on the
last day of each  three-month  period  following the date of grant such that the
option will be fully exercisable twelve (12) months after its date of grant.

8. Use of Proceeds.          Cash proceeds realized from the sale of Stock under
the Plan or pursuant to options granted under the Plan shall constitute  general
funds of the Company.

9. Amendment, Suspension, or Termination of the Plan.

                  (a) The Board may at any time amend,  suspend or terminate the
Plan  as it  deems  advisable;  provided  that  such  amendment,  suspension  or
termination complies with all applicable  requirements of state and federal law,
including any applicable  requirement  that the Plan or an amendment to the Plan
be approved by the  shareholders,  and provided further that, except as provided
in  Section  3(b),  above,  the  Board  shall in no event  amend the Plan in the
following  respects  without  the consent of  stockholders  then  sufficient  to
approve the Plan in the first instance:

                      (i) To increase the maximum number of shares subject to
                  incentive stock options issued under  the Plan; or

                     (ii) To change the designation or class of persons eligible
                  to receive incentive stock options under the Plan.

                  (b) No option may be granted  nor any Stock  issued  under the
Plan  during  any  suspension  or after  the  termination  of the  Plan,  and no
amendment,  suspension,  or termination of the Plan shall,  without the affected
individual's consent, alter or impair any rights or obligations under any option
previously  granted under the Plan. The Plan shall terminate with respect to the
grant  of  incentive  stock  options  on the  tenth  anniversary  of the date of
adoption of the Plan, unless previously terminated by the Board pursuant to this
Section 9.

                  (c)  Notwithstanding the provisions of Sections 9(a) and 9(b),
above, the provisions set forth in Section 7 of the Plan (and any other sections
of the Plan that affect the formula award terms of option grants to Non-Employee
Directors  required  to be  specified  in the Plan by Rule  16b-3)  shall not be
amended periodically and in no event more than once every six months, other than
to comport with changes to the Code, the Employee Retirement Income Security Act
of 1974, as amended, or any applicable rules and regulations thereunder.

10. Assignability.            To the extent  required by Rule  16b-3,  no option
granted  pursuant  to this Plan shall be  transferable  by the holder  except by
operation of law or by will or the laws of descent and  distribution;  provided,
that,  if Rule 16b-3 is amended  after the date of the  Board's  adoption of the
Plan to permit broader  transferability  of options under that Rule, (i) options
granted under Section 7 to  Non-Employee  Directors shall be transferable to the
fullest  extent  permitted  by Rule 16b-3 as so amended,  (ii) any other  option
shall be transferable to the extent  provided in the option  agreement  covering
the  option,  and  the  Committee  shall  have  discretion  to  amend  any  such
outstanding  option to provide for broader  transferability of the option as the
Committee may authorize  within the  limitations of Rule 16b-3.  Notwithstanding
the foregoing,  if required by the Code,  each incentive  stock option under the
Plan shall be  transferable  by the optionee only by will or the laws of descent
and distribution, and, during the optionee's lifetime, shall be exercisable only
by the optionee.  In the event of any Rule 16b-3 permitted transfer of an option
hereunder,  the transferee  shall be entitled to exercise the option in the same
manner  and  only  to  the  same  extent  as  the   optionee  (or  his  personal
representative  or the person who would have  acquired the right to exercise the
option by bequest or intestate  succession) would have been entitled to exercise
the option under Sections 6, 7 and 11 had the option not been transferred.

11. Payment Upon Exercise of Options.

                  (a) Payment of the purchase  price upon exercise of any option
granted under this Plan shall be made in cash, by optionee's  personal  check, a
certified  check,  bank draft,  or postal or express  money order payable to the
order of the Company in lawful money of the United States  (collectively,  "Cash
Consideration');  provided,  however,  that,  except for options  granted  under
Section 7, the Committee, in its sole discretion,  may permit an optionee to pay
the  option  price in whole or in part  (i) with  shares  of Stock  owned by the
optionee or with shares of Stock withheld from the shares otherwise  deliverable
to the  optionee  upon  exercise  of the  option;  (ii)  by  delivery  on a form
prescribed by the Committee of an irrevocable  direction to a securities  broker
approved by the  Committee  to sell shares of Stock and deliver all or a portion
of the  proceeds to the  Company in payment for the Stock;  (iii) by delivery of
the optionee's  promissory  note with such  recourse,  interest,  security,  and
redemption provisions as the Committee in its discretion determines appropriate;
or (iv) in any  combination of the foregoing.  The exercise price of any options
granted under Section 7 shall be paid in Cash  Consideration,  the consideration
specified  in  clauses  (i)  or  (ii)  of  the  preceding  sentence,  or in  any
combination  thereof.  Any Stock used to exercise options shall be valued at its
fair market  value on the date of the exercise of the option.  In addition,  the
Committee, in its sole discretion, may authorize the surrender by an optionee of
all or part of an unexercised option (excluding options granted under Section 7,
above) and  authorize a payment in  consideration  thereof of an amount equal to
the  difference  between the aggregate fair market value of the Stock subject to
such option and the  aggregate  option price of such Stock.  In the  Committee's
discretion, such payment may be made in cash, shares of Stock with a fair market
value on the date of surrender equal to the payment amount,  or some combination
thereof.

                  (b) In the  event  that the  exercise  price is  satisfied  by
shares withheld from the shares of Stock otherwise  deliverable to the optionee,
the Committee may issue the optionee an additional option,  with terms identical
to the option  agreement  under which the option was  exercised,  entitling  the
optionee to purchase additional shares of Stock equal to the number of shares so
withheld but at an exercise price equal to the fair market value of the Stock on
the grant date of the new option;  provided,  however,  that no such  additional
options may be granted  with respect to options  granted  pursuant to Section 7,
above. Any additional option shall be subject to the provisions of Section 6(e),
above.

12. Withholding Taxes.

                  (a)  No  Stock  shall  be  delivered  under  the  Plan  to any
participant  until  the  participant  has made  arrangements  acceptable  to the
Committee  (or in the case of exercise of options  granted to Named  Executives,
the Subcommittee)  for the satisfaction of federal,  state, and local income and
social  security tax withholding  obligations,  including,  without  limitation,
obligations incident to the receipt of Stock under the Plan or to the failure to
satisfy the conditions for treatment as incentive stock options under applicable
tax law.  Upon  exercise of a stock option the Company  shall  withhold from the
optionee an amount  sufficient  to satisfy  federal,  state and local income and
social security tax withholding obligations.

                  (b) In the event that such tax withholding is satisfied by the
Company  or the  optionee's  employer  withholding  shares  of  Stock  otherwise
deliverable to the optionee,  the Committee may issue the optionee an additional
option,  with terms identical to the option agreement under which the option was
exercised,  entitling the optionee to purchase  additional shares of Stock equal
to the number of shares so withheld  but at an exercise  price equal to the fair
market  value  of the  Stock  on the  grant  date of the new  option;  provided,
however,  that no such additional options may be granted with respect to options
granted pursuant to Section 7, above. Any additional  option shall be subject to
the provisions of Section 6(e), above.

13. Change in Control.

                  (a) For  purposes  of this  Section  13, a "Change in Control"
shall be deemed to occur upon:

                      (i)   The direct or indirect acquisition by any person or
                  related group of persons (other than an acquisition from or by
                  the Company or by a Company-sponsored employee benefit plan or
                  by a person that directly or indirectly controls, is 
                  controlled  by, or is under common control with, the Company)
                  of beneficial  ownership (within the meaning of Rule 13d-3 of
                  the  Securities  Exchange  Act of  1934,  as  amended)  of  
                  securities possessing  more than fifty percent (50%) of the 
                  total combined voting power of the Company's outstanding 
                  Stock;

                     (ii)   A change  in the  composition  of the  Board  over a
                  period  of  thirty-six (36)  months  or less  such that a
                  majority  of the  Board  members  cease,  by reason  of one or
                  more  contested elections for Board  membership or by one or 
                  more actions by written  consent of stockholders,  to be  
                  comprised  of  individuals  who either (A) have been Board
                  members continuously since the beginning of such period or (B)
                  have been elected or nominated  for election as Board  members
                  during such period by at least a majority of the Board members
                  described in clause (A) who were still in office at the time 
                  such election or nomination was approved by the Board;

                    (iii)   Approval by the Company's stockholders of a merger
                  or consolidation in which the Company is not the surviving
                  entity, except for a transaction the principal purpose of 
                  which is to change the state in which the Company is 
                  incorporated;

                     (iv)   Approval by the Company's stockholders of (A) the
                 sale, transfer or other disposition of all or substantially all
                 of the assets of the Company  (including the capital stock of
                 the Company's  subsidiary  corporations)  or (B) the  complete
                 liquidation or dissolution of the Company; or

                      (v)   Approval by the Company's stockholders of any 
                 reverse merger in which the Company survives as an entity but 
                 in which securities possessing more than fifty percent (50%) 
                 of the total combined voting power of the Company's outstanding
                 securities are transferred to a person or persons different 
                 from those who held such securities  immediately prior to such
                 merger.

                     (vi)   For the  purpose  of this  Section  13, "Approval by
                 the Company's Stockholders" shall mean approval by a majority 
                 of those shares of Stock voting at a  stockholder's  meeting at
                 which a quorum is present, excluding shares  beneficially owned
                 (within the meaning of Rule 13d-3 under the Exchange Act) by 
                 the Non-Employee Directors.

                  (b) Except for options granted to Non-Employee Directors under
Section 7, the  Committee  may provide in any stock option  agreement  (or in an
amendment thereto) that, in the event of any Change in Control,  any outstanding
options covered by such an agreement shall be fully vested,  nonforfeitable  and
become exercisable, as of the date of the Change in Control.

                  (c) If the  Committee  determines  to  incorporate a Change in
Control provision in any option agreement hereunder, the agreement shall provide
that, (i) in the event of a Change in Control described in clauses (i), (ii) and
(v) of  paragraph  (a)  above,  the  option  shall  remain  exercisable  for the
remaining  term of the  option  and (ii) in the  event of a  Change  in  Control
described  in clauses  (iii) or (iv) of  paragraph  (a) above,  the option shall
terminate  as of the  effective  date  of the  merger,  disposition  of  assets,
liquidation or dissolution described therein.

                  (d) As to any options  granted under Section 7 to Non-Employee
Directors,  (i) in the event of a Change in Control  described  in clauses  (i),
(ii) or (v) of paragraph (a) above, any such outstanding  options under the Plan
shall become fully vested and remain  exercisable for the remaining term of such
options and (ii) in the event of a Change in Control  described in clauses (iii)
or (iv) of  paragraph  (a)  above,  outstanding  options  under  the Plan  shall
terminate  as of the  effective  date  of the  merger,  disposition  of  assets,
liquidation or dissolution described therein.

                  (e) Notwithstanding  the foregoing  provisions of this Section
13, an outstanding option may not be accelerated under this Section 13 if and to
the extent (i) such option is, in connection with the transaction giving rise to
a Change of Control,  either to be assumed by the successor or parent thereof or
to be replaced with a comparable  option to purchase shares of the capital stock
of the successor  corporation  or parent  thereof,  or (ii) such option is to be
replaced  with a  cash  incentive  program  of the  successor  corporation  that
preserves  the option spread  existing at the time of the corporate  transaction
giving  rise to the Change of Control and  provides  for  subsequent  payment in
accordance with the same vesting schedule applicable to such option.

14. Stockholder Approval.           The Plan and any options granted pursuant to
Section 7 and  options  granted  to Covered  Employees  hereunder  shall  become
effective  only upon  approval  by the  holders of a majority  of the  Company's
shares voting (in person or by proxy) at a stockholders'  meeting held within 12
months of the  Board's  adoption  of the Plan.  The  Committee  may grant  stock
options under the Plan prior to the stockholders' meeting, but until stockholder
approval of the Plan is obtained,  no such option shall be  exercisable.  In the
event that  stockholder  approval  is not  obtained  within the period  provided
above, all options described in this Section 14 previously  granted above, shall
terminate.

15. Rule 16b-3 Compliance.           Transactions under the Plan are intended to
comply with all applicable  conditions of Rule 16b-3 or its successors under the
Exchange  Act. To the extent any provision of the Plan or action by the Board or
the  Committee  fails to so  comply,  it shall be deemed  null and void,  to the
extent  permitted  by law and deemed  advisable  by the Board or the  Committee.
Moreover,  in the event the Plan does not include a  provision  required by Rule
16b-3 to be stated therein in order to qualify the grants under Section 5 hereof
as grants  under a  non-discretionary  formula  under Rule 16b-3 such  provision
(other than one relating to eligibility requirements, or the price and amount of
awards) shall be deemed  automatically  to be incorporated by reference into the
Plan with respect to grants of options to Non-Employee Directors.




<PAGE>





[FORM OF FRONT OF PROXY CARD]

                                      PROXY
                                 SEMITOOL, INC.
                             655 West Reserve Drive
                            Kalispell, Montana 59901

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
             FOR THE ANNUAL MEETING TO BE HELD ON February 9, 1998

         RAYMON F. THOMPSON and LARRY A. VIANO, or either of them, each with the
power of substitution, are hereby authorized to represent and vote the shares of
the  undersigned,  with all the powers which the  undersigned  would  possess if
personally present, at the Annual Meeting of Semitool, Inc. (the "Company"),  to
be held on February 9, 1998, and any adjournment or postponement thereof.

         Election of all directors (or if any nominee is not available for 
election, such substitute as the Board of Directors or the proxy holders may
designate).  Nominees: RAYMON F. THOMPSON, HOWARD E. BATEMAN, RICHARD A. DASEN,
DANIEL J. EIGEMAN, JOHN S. OSBORNE AND CALVIN S. ROBINSON.

  BOARD OF DIRECTORS' RECOMMENDATIONS: The Board of Directors  recommends a vote
FOR the election of Directors,  FOR ratification and approval of the Amended and
Restated Semitool,  Inc. 1994 Stock Option Plan, as amended and FOR ratification
and  appointment  of  Coopers  & Lybrand  L.L.P.  as the  Company's  independent
auditors for the fiscal year ending September 30, 1998.

If you wish to vote in accordance  with the Board of Directors'  recommendations
you need not mark any boxes, just sign and date on the reverse side.

                   CONTINUED AND TO BE SIGNED ON REVERSE SIDE


         [FORM OF BACK OF PROXY CARD]

[X] Please mark votes as in this example.

         Shares  represented  by this  proxy  will be voted as  directed  by the
shareholder.  If no  such  directions  are  indicated,  the  Proxies  will  have
authority to vote FOR the election of all Director Nominees.  In their 
discretion, the Proxies are authorized  to vote upon such other  business as may
properly come before the Annual Meeting.


1.  Election of Directors (see reverse):

         [ ] FOR         [ ] WITHHELD
         
[ ]---------------------------------------------------
FOR all Director Nominees except as noted above


2. To ratify and  approve the Amended and  Restated  Semitool,  Inc.  1994 Stock
Option  Plan,  as  amended,  increasing  the  number of  shares of Common  Stock
available for issuance  thereunder by 200,000  shares from  1,100,000  shares to
1,300,000 shares:

         [ ] FOR         [ ] AGAINST         [ ] ABSTAIN


3. To ratify  the  appointment  of  Coopers & Lybrand  L.L.P.  as the  Company's
independent auditors for the fiscal year ending September 30, 1998:

         [ ] FOR         [ ] AGAINST         [ ] ABSTAIN


MARK HERE FOR ADDRESS CHANGE AND NOTE AT LEFT [ ]

PLEASE MARK,  SIGN,  DATE AND RETURN THIS PROXY CARD PROMPTLY USING THE ENCLOSED
REPLY ENVELOPE.

Please sign exactly as your name appears herein and date where indicated.
Joint owners should each  sign.  When  signing  as  attorney,  executor,
administrator,  trustee or guardian, please give full title as such.

Signature_______________________________    Date______________

Signature_______________________________    Date______________






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