SEMITOOL INC
DEF 14A, 1999-01-21
SPECIAL INDUSTRY MACHINERY, NEC
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                                  SCHEDULE 14A
                                 (Rule 14a-101)
                     INFORMATION REQUIRED IN PROXY STATEMENT
                            SCHEDULE 14A INFORMATION
           Proxy Statement Pursuant to Section 14(a) of the Securities
                      Exchange Act of 1934 (Amendment No. )
Filed by the Registrant |X|
Filed by a party other than the Registrant
|_| Check the appropriate box: 
|_| Preliminary proxy statement               |_|  Confidential,  For Use of the
|X|  Definitive  proxy  statement                  Commission Only (as permitted
|_|  Definitive   additional  materials            by Rule 14a-6(e)(2))
|_|  Soliciting  material
     pursuant to Rule 14a-11(c) or Rule 14a-12

                                 Semitool, Inc.
                (Name of Registrant as Specified in Its Charter)

                                 Semitool, Inc.
    (Name of Person(s) Filing Proxy Statement, if Other Than the Registrant)

Payment of Filing Fee (Check the appropriate box):
|X|    No fee required.
|_| Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.

(1) Title of each class of securities to which transaction applies:


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(2) Aggregate number of securities to which transactions applies:


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(3) Per unit price or other underlying value of transaction computed pursuant
    to  Exchange  Act Rule 0-11 (set forth the amount on which the filing fee
    is calculated and state how it was determined):



- --------------------------------------------------------------------------------

(4) Proposed maximum aggregate value of transaction.


- --------------------------------------------------------------------------------


(5) Total fee paid:


- --------------------------------------------------------------------------------

       |_|  Fee paid previously with preliminary materials:


- --------------------------------------------------------------------------------

       |_| Check box if any part of the fee is offset as  provided  by  Exchange
Act Rule  0-11(a)(2)  and identify the filing for which the  offsetting  fee was
paid previously.  Identify the previous filing by registration statement number,
or the form or schedule and the date of its filing.

(1) Amount previously paid:

- --------------------------------------------------------------------------------

(2) Form, Schedule or Registration Statement No.:

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(3) Filing Party:

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(4) Date Filed:

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<PAGE>


                                 SEMITOOL, INC.
- --------------------------------------------------------------------------------


                    Notice of Annual Meeting of Shareholders
                           To Be Held February 9, 1999


To the Shareholders of Semitool, Inc.:

         NOTICE IS HEREBY  GIVEN that the  Annual  Meeting  of  Shareholders  of
Semitool, Inc., a Montana corporation (the "Company"),  will be held at the Best
Western Outlaw - Cavanaughs  Hotel,  1701 Highway 93 South,  Kalispell,  Montana
59901,  at 2:30  p.m.,  local  time,  on  February  9, 1999,  for the  following
purposes:

         1.  ELECTION OF  DIRECTORS.  To elect six  directors  of the Company to
serve until the 2000 Annual Meeting of  Shareholders  or until their  successors
are elected and qualified.

         2. APPROVAL AND RATIFICATION OF THE AMENDED AND RESTATED SEMITOOL, INC.
1994 STOCK  OPTION  PLAN,  AS  AMENDED.  To approve  and ratify the  Amended and
Restated  Semitool,  Inc.  1994 Stock Option Plan,  as amended,  to increase the
number of shares of Common Stock  available  for issuance  thereunder by 200,000
shares from 1,300,000 shares to 1,500,000 shares.

         3. RATIFICATION OF APPOINTMENT OF INDEPENDENT  AUDITORS.  To ratify the
appointment of  PricewaterhouseCoopers  LLP as the independent  auditors for the
Company for the fiscal year ending September 30, 1999.

         4. OTHER BUSINESS. To transact such other business as may properly come
before the Annual Meeting of  Shareholders  and any  adjournment or postponement
thereof.

         The foregoing  items of business are more fully  described in the Proxy
Statement, which is attached hereto and made a part hereof.

         The Board of  Directors  has fixed the close of  business on January 4,
1999 as the record date for determining the  shareholders  entitled to notice of
and to vote at the 1999 Annual Meeting of  Shareholders  and any  adjournment or
postponement thereof.

         WHETHER OR NOT YOU EXPECT TO ATTEND THE ANNUAL MEETING OF  SHAREHOLDERS
IN PERSON,  YOU ARE URGED TO MARK, SIGN, DATE AND RETURN THE ENCLOSED PROXY CARD
AS PROMPTLY AS POSSIBLE IN THE POSTAGE-PREPAID  ENVELOPE PROVIDED TO ENSURE YOUR
REPRESENTATION  AND THE PRESENCE OF A QUORUM AT THE ANNUAL MEETING.  IF YOU SEND
IN YOUR  PROXY CARD AND THEN  DECIDE TO ATTEND  THE ANNUAL  MEETING TO VOTE YOUR
SHARES IN PERSON,  YOU MAY STILL DO SO. YOUR PROXY IS  REVOCABLE  IN  ACCORDANCE
WITH THE PROCEDURES SET FORTH IN THE PROXY STATEMENT.

                                             By Order of the Board of Directors,

                                             /s/Raymon F. Thomspon
                                             -----------------------------------
                                             Raymon F. Thompson
                                             Chairman of the Board

Kalispell, Montana
January 21, 1999



<PAGE>


                                 SEMITOOL, INC.

                             655 West Reserve Drive
                            Kalispell, Montana 59901

                                 PROXY STATEMENT


General Information

         This Proxy  Statement  is furnished  to the  shareholders  of Semitool,
Inc., a Montana corporation (the "Company"), in connection with the solicitation
by the Board of Directors  of the Company (the "Board" or "Board of  Directors")
of proxies in the accompanying form for use in voting at the 1999 Annual Meeting
of Shareholders of the Company (the "Annual  Meeting") to be held on February 9,
1999,  at the Best  Western  Outlaw - Cavanaughs  Hotel,  1701 Highway 93 South,
Kalispell,  Montana  59901,  at 2:30 p.m.,  local time,  and any  adjournment or
postponement  thereof. The shares represented by the proxies received,  properly
marked, dated, executed and not revoked will be voted at the Annual Meeting.

Revocability of Proxies

         Any proxy  given  pursuant to this  solicitation  may be revoked by the
person giving it at any time before it is exercised by delivering to the Company
(to the attention of Mr. William A. Freeman) a written notice of revocation or a
duly executed proxy bearing a later date, or by attending the Annual Meeting and
voting in person.

Solicitation and Voting Procedures

         The  solicitation  of proxies will be conducted by mail and the Company
will bear all attendant costs. These costs will include the expense of preparing
and mailing proxy  materials for the Annual Meeting and  reimbursements  paid to
brokerage   firms  and  others  for  their   expenses   incurred  in  forwarding
solicitation  material  regarding the Annual Meeting to beneficial owners of the
Company's Common Stock. The Company may conduct further solicitation personally,
by  telephone  or by  facsimile  through  its  officers,  directors  and regular
employees,  none of whom will receive additional compensation for assisting with
such solicitation.

         The close of  business  on January 4, 1999 has been fixed as the record
date (the "Record Date") for  determining  the holders of shares of Common Stock
of the Company  entitled to notice of and to vote at the Annual  Meeting.  As of
the  close of  business  on the  Record  Date,  the  Company  had  approximately
13,792,023 shares of Common Stock outstanding and entitled to vote at the Annual
Meeting.  The  presence at the Annual  Meeting of a majority of these  shares of
Common Stock of the  Company,  either in person or by proxy,  will  constitute a
quorum for the transaction of business at the Annual Meeting.  Each  outstanding
share of Common  Stock on the  Record  Date is  entitled  to one (1) vote on all
matters. With respect to the election of directors, each shareholder is entitled
to cumulate  his or her votes,  meaning that such  shareholder  can multiply the
number of  shares  owned by the  number of board  positions  to be  filled,  and
allocate  such  votes  for  all or as  many  director-nominees  as he or she may
designate.

         Abstentions and broker non-votes are each included in the determination
of the number of shares  present  and  voting,  but will not be  counted  for or
against any of the proposals to be voted upon at the meeting.



<PAGE>



                                 PROPOSAL NO. 1

                              ELECTION OF DIRECTORS


         As set by the Board of Directors pursuant to the Bylaws of the Company,
the  authorized  number of  directors  is set at Seven.  Six  directors  will be
elected  at the  Annual  Meeting  to serve  until  the 2000  Annual  Meeting  of
Shareholders or until their successors are elected or appointed and qualified or
until the  director's  earlier  resignation  or  removal.  Following  the Annual
Meeting there will be one vacancy on the Board of  Directors.  In the event that
any  nominee of the  Company is unable or declines to serve as a director at the
time of the Annual Meeting,  the proxies will be voted for any nominee who shall
be designated by the present Board of Directors to fill the additional  vacancy.
In the event that  additional  persons are  nominated for election as directors,
the proxy holders intend to vote all proxies  received by them in such a manner,
as will assure the election of as many of the nominees listed below as possible,
and, in such event, the specific  nominees to be voted for will be determined by
the proxy  holders.  The Board has no reason to believe  that the persons  named
below will be unable or  unwilling  to serve as a nominee or as a  director,  if
elected.  Each of the six nominees for director who receives the greatest number
of votes will be elected.

         Set  forth  below  is the  age  and  certain  biographical  information
relating to the director nominees.

         Raymon F.  Thompson,  age 57,  founded  the Company and has served as
Chairman since its  inception. Mr. Thompson previously served as Chief Executive
Officer and President.  In 1979,  Mr. Thompson designed, patented and introduced
the first on-axis rinser/dryer for the semiconductor industry.

         Howard  E.  Bateman,  age 64,  has  served  on the  Company's  Board of
Directors  since  1990.  Mr.  Bateman  formerly  owned and  operated  Entech,  a
Pennsylvania  company  that  was an  independent  sales  representative  for the
Company's products from 1979 to 1996.

         Richard  A.  Dasen,  age 56,  has  served  on the  Company's  Board  of
Directors since 1984.  From 1974 to 1992, Mr. Dasen owned and managed  Evergreen
Bancorporation,  a multi-bank holding company. Since 1992, Mr. Dasen has been an
independent businessman.

         Timothy C. Dodkin, age 49, joined the Company in 1985 and served as the
Company's  European Sales Manager from 1985 to 1986.  Since 1986, Mr. Dodkin has
served as  Managing  Director  of  Semitool  Europe,  Ltd.  Prior to joining the
Company Mr. Dodkin worked at Cambridge  Instruments,  a semiconductor  equipment
manufacturer, for ten years in national and international sales.

         Daniel  J.  Eigeman,  age 64,  has  served  on the  Company's  Board of
Directors  since 1985.  From 1971 to 1993, Mr. Eigeman was President of Eigeman,
Hanson & Co.,  P.C.,  CPAs,  and  since  1993 has  been  stockholder/partner  of
Junkermier,  Clark,  Campanella,  Stevens,  P.C.,  CPAs.  Mr.  Eigeman served as
President of the Montana  Society of Certified  Public  Accountants  in 1993 and
currently serves as a director of CPA Mutual Insurance of America, Inc.

         Calvin  S.  Robinson,  age 78,  has  served on the  Company's  Board of
Directors  since 1982 and since  February  of 1996 has  served as the  Company's
Secretary. Mr. Robinson has been of counsel to Crowley, Haughey, Hanson, Toole &
Dietrich,  P.L.L.P.,  since 1989.  This firm has provided  legal services to the
Company since 1979.  Mr. Robinson is also a director of Winter Sports, Inc.

                         THE BOARD RECOMMENDS A VOTE FOR
                    THE ELECTION OF THE NOMINEES NAMED ABOVE.



Relationships Among Directors or Executive Officers

         There  are no  family  relationships  among  any of  the  directors  or
executive  officers  of the  Company,  except  that  Thomas  Sulzbacher,  a vice
president of the Company, is the son-in-law of Raymon F. Thompson.

Meetings and Committees of the Board of Directors

         During the fiscal year ended  September  30,  1998,  the Board met five
times. The Board has three committees: the Audit Committee, the Compensation and
Stock Option  Committee  and the  Nominating  Committee.  During the fiscal year
ended  September  30,  1998,  no  director  attended  fewer  than 75% of all the
meetings of the Board and its  committees  on which he served  after  becoming a
member of the Board.

         The Audit  Committee,  which held two meetings in the fiscal year ended
September 30, 1998,  consisted of Messrs. Dasen and Eigeman. The Audit Committee
reviews and supervises the Company's financial controls, including selecting the
Company's  auditors,  reviewing  the books and accounts of the Company,  meeting
with the officers of the Company  regarding  the Company's  financial  controls,
acting upon  recommendations  of auditors and taking such further  action as the
Audit  Committee  deems necessary to complete an audit of the books and accounts
of the Company, as well as other matters which may come before it or as directed
by the Board.

         The Compensation and Stock Option Committee, which held two meetings in
the fiscal year ended September 30, 1998, consists of Messrs. Bateman,  Osborne,
and Robinson.  The Compensation and Stock Option Committee  reviews and approves
the compensation and benefits for the Company's executive officers,  administers
the Company's  stock option plan and performs such other duties as may from time
to time be determined by the Board.

         The Nominating Committee,  which held three meetings in the fiscal year
ended September 30, 1998, consists of Messrs.  Bateman,  Osborne,  and Thompson.
The Nominating Committee nominates directors to hold office for the ensuing year
and until  their  respective  successors  are duly  elected and  qualified.  The
Nominating Committee may consider  recommendations from shareholders if received
in writing  addressed  to the  Secretary  of the  Company no later than 120 days
prior  to  the  12-month   anniversary   of  the  previous   annual  meeting  of
shareholders.

Compensation of Directors

         Upon  becoming a member of the Board,  non-employee  directors  receive
options (the "Initial  Option Grants") to purchase 3,000 shares of Common Stock,
and thereafter  receive an annual option grant (the "Annual  Option  Grants") to
purchase  2,000 shares of Common  Stock.  The Company's  non-employee  directors
receive a $1,000  monthly fee,  $1,000 for each Board meeting  attended and $500
for each committee meeting attended that is not held in conjunction with a Board
meeting.  All  non-employee  directors are reimbursed  for expenses  incurred in
connection  with  attending  meetings of the Board.  Employee  directors  of the
Company do not receive compensation for their services as directors.



<PAGE>


                              SECURITY OWNERSHIP OF
                    CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

         The following table sets forth certain  information with respect to the
beneficial ownership of the Company's Common Stock as of the Record Date for (i)
each person who is known by the Company to beneficially  own more than 5% of the
Common Stock, (ii) each of the Company's  directors,  (iii) each of the officers
appearing in the Summary  Compensation  Table below and (iv) all  directors  and
executive officers as a group.

<TABLE>
<CAPTION>
<S>                                                                        <C>                          <C>

                                                                                 Shares Beneficially Owned
                                                                       ----------------------------------------
Directors, Executive Officers and 5% Shareholders                            Number                  Percent(1)
- --------------------------------------------------------------         -----------------         --------------
     Raymon F. and Ladeine A. Thompson(2)                                  6,359,234                    46.1%
     Howard E. Bateman(3)                                                     13,000                      *
     Richard A.Dasen(3)                                                       12,000                      *
     Daniel J. Eigeman(3)                                                      9,900                      *
     John S.Osborne(4)                                                         9,000                      *
     Calvin S. Robinson(3)                                                     9,750                      *
     Timothy C.Dodkin(5)                                                      37,000                      *
     Fabio Gualandris(6)                                                      10,000                      *
     Gregory L. Perkins(7)                                                    39,450                      *
     Thomas Sulzbacher(8)                                                     55,175                      *
     All directors and officers as a group (12 persons)(9)                 6,568,009                    47.2%

</TABLE>

*     Less than 1%.
(1)   Beneficial  ownership is determined  in  accordance  with the rules of the
      Securities  and Exchange  Commission.  In  computing  the number of shares
      beneficially  owned  by a  person  and the  percentage  ownership  of that
      person, shares of Common Stock subject to options held by that person that
      are currently exercisable or exercisable within 60 days of the Record Date
      are deemed outstanding.  Such shares,  however, are not deemed outstanding
      for the  purpose  of  computing  the  percentage  ownership  of each other
      person. Except as indicated in the footnotes to this table and pursuant to
      applicable  community  property  laws, the persons named in the table have
      sole  voting and  investment  power  with  respect to the shares set forth
      opposite such person's name.
(2)   Includes  318,750  shares held in the name of the Gina  Thompson  Trust of
      which Mr. Thompson is the trustee,  and includes 90,000 shares held in the
      name of the Floyd Foundation Trust of which Mr. Thompson is the trustee.
(3)   Includes 9,000 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.
(4)   Includes 5,000 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.
(5)   Includes 35,500 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.
(6)   Includes 10,000 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.
(7)   Includes 39,450 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.
(8)   Includes 15,800 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.
(9)   Includes 155,250 shares issuable pursuant to options which are exercisable
      within 60 days of the Record Date.



<PAGE>


                                 PROPOSAL NO. 2

      APPROVAL AND RATIFICATION OF THE AMENDED AND RESTATED SEMITOOL, INC.
                       1994 STOCK OPTION PLAN, AS AMENDED


         The  Company's  shareholders  are being asked to act upon a proposal to
approve and ratify the action of the Board  amending the  Company's  Amended and
Restated 1994 Stock Option Plan (the "Option Plan").  Approval and  ratification
of the proposal  requires the affirmative  vote of a majority of the outstanding
shares of the Company's  Common Stock present in person or  represented by proxy
and entitled to vote at the Annual Meeting.

         The  Board  amended  the  Option  Plan in  December  1998,  subject  to
shareholder  approval and  ratification  of the amended Option Plan, to increase
the number of shares  reserved  for  issuance  under the Option  Plan by 200,000
shares from 1,300,000 shares to 1,500,000 shares.

         The Board  believes that the  attraction  and retention of high quality
personnel are essential to the Company's  continued  growth and success and that
an incentive plan such as the Option Plan is necessary for the Company to remain
competitive in its compensation practices.

         Amended  Plan  Benefits.  As of the date of this  Proxy  Statement,  no
non-employee  directors and no associates of any director,  executive officer or
nominee  for  director  has been  granted  any  options  subject to  shareholder
approval of the proposed amendment.  The benefits to be received pursuant to the
Option  Plan  amendment  by the  Company's  directors,  executive  officers  and
employees are not determinable at this time.

                  THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR
                        APPROVAL AND RATIFICATION OF THE
                            OPTION PLAN, AS AMENDED.

General Description

         The following is a general  description  of the principal  terms of the
Option  Plan,  the  amendment  approved  by the  Board  and the  purpose  of the
amendment. Although the Company believes that the following description provides
a fair summary of the  material  terms of the Option Plan,  the  description  is
qualified  in its  entirety  by the text of the Option  Plan,  as proposed to be
amended.

         The  Option  Plan  was  adopted  by  the  Board  and  approved  by  the
shareholders  of the Company in December 1994. The purpose of the Option Plan is
to assist the Company in attracting and retaining high quality  personnel and to
provide a means  whereby  eligible  employees  (including  officers and employee
directors)  and  non-employee  directors  can acquire  Common Stock  through the
exercise of options,  thereby aligning the interests of employees,  officers and
directors with the interests of  shareholders.  The Option Plan provides for the
granting to employees  (including  officers and employee directors) of incentive
stock options  ("Incentive  Stock Options") within the meaning of Section 422 of
the  Internal  Revenue  Code of  1986,  as  amended,  and for  the  granting  to
employees,  directors and consultants of nonqualified stock options. The Company
cannot grant an Incentive  Stock Option if as a result of the grant the optionee
would have the right in any  calendar  year to exercise  (under all plans of the
Company  or its  affiliates)  for the  first  time one or more  Incentive  Stock
Options for shares having an aggregate  fair market value  (determined as of the
grant date) in excess of  $100,000.  As of the Record  Date,  approximately  182
persons were either  participating  in or eligible to  participate in the Option
Plan and options to purchase  1,357,500 shares had been granted under the Option
Plan of which options to purchase 859,375 shares were outstanding.

         The Option Plan is currently administered by the Compensation and Stock
Option Committee of the Board (the "Compensation Committee"),  which, except for
Initial  Option  Grants  and Annual  Option  Grants to  non-employee  directors,
determines the terms of the options granted under the Option Plan, including the
exercise price,  the number of shares subject to the option and  exercisability.
Generally,  5% of the shares subject to the option granted under the Option Plan
become exercisable at the end of each three-month period commencing three months
after the grant date such that the option is fully  exercisable five years after
the grant date.  No Incentive  Stock Option may be  transferred  by the optionee
other than by will or the laws of descent or distribution.  Each Incentive Stock
Option may be  exercised,  during the  lifetime  of the  optionee,  only by such
optionee.

         Under the Option Plan,  non-employee  directors  receive Initial Option
Grants to purchase  3,000 shares of Common Stock upon the date he or she becomes
a  director.   Thereafter,   immediately   following   each  annual  meeting  of
shareholders,  each  non-employee  director who continues as such  following the
annual  meeting and has attended two or more  meetings of the Board of Directors
as of the time of such  annual  meeting,  receives  an  Annual  Option  Grant to
purchase 2,000 shares of Common Stock.

         The Board of Directors believes there are insufficient shares of Common
Stock  currently  available  under the  Option  Plan to  satisfy  option  grants
anticipated  to be  effected  in  1998.  The  shareholders  of the  Company  are
therefore  being asked to approve the Option Plan,  as amended,  to increase the
number of shares of Common Stock  available  for issuance  thereunder by 200,000
shares from 1,300,000 shares to 1,500,000 shares.

         In general,  the exercise  price of stock subject to the Initial Option
Grants and the Annual Option Grants is the fair market value of the Common Stock
on the date of grant.  The Initial Option Grants vest and become  exercisable as
of the date of grant and the Annual Option Grants vest and become exercisable as
to 25% of the shares covered thereby on the last day of each three-month  period
following  the date of grant  such that the  option  becomes  fully  exercisable
twelve months after the grant date.

         The exercise price of Incentive  Stock Options granted under the Option
Plan must equal at least the fair market  value of the Common  Stock on the date
of grant.  The  exercise  price of any  Incentive  Stock  Option  granted  to an
optionee  who owns stock  possessing  more than 10% of the  voting  power of the
Company's  outstanding capital stock must equal at least 110% of the fair market
value of the  Common  Stock on the date of  grant.  The  Compensation  Committee
determines the exercise price of  nonqualified  stock options other than Initial
Option  Grants and Annual  Option  Grants.  In general,  payment of the exercise
price may be made in cash, by the optionee's personal check,  certified check or
other specified consideration.

         In general, except for options granted to non-employee  directors,  the
Option Plan provides that the Compensation  Committee may include a provision in
the option  agreement  providing  that,  in the event of a Change in Control (as
defined in the Option Plan),  any outstanding  options covered by such agreement
shall be fully vested,  nonforfeitable  and become exercisable as of the date of
the Change in Control.  If the  Compensation  Committee elects to include such a
provision,  the option agreement will provide that, (a) in the event of a Change
in Control  relating to (i) an  acquisition  of Common  Stock  resulting  in the
beneficial  ownership by any person or related group of persons of more than 50%
of the total  combined  voting power of the  outstanding  Common  Stock,  (ii) a
change in the  composition of the Board over a 36 month period or (iii) approval
by the  Company's  shareholders  of any  reverse  merger  in which  the  Company
survives as an entity,  but in which securities  possessing more than 50% of the
total  combined  voting  power  of  the  Company's  outstanding  securities  are
transferred to a person or persons different from those who held such securities
immediately  prior to such merger,  the option shall remain  exercisable for the
remaining  term of the  option,  and (b) in the  event  of a Change  in  Control
relating  to  (x)  approval  by  the  Company's  shareholders  of  a  merger  or
consolidation  in which the Company is not the  surviving  entity  (except for a
transaction  the principal  purpose of which is to change the Company's state of
incorporation)  or (y) the approval by the Company's  shareholders of either the
sale, transfer or other disposition of all or substantially all of the assets of
the Company or the complete  liquidation  or  dissolution  of the  Company,  the
option shall  terminate as of the effective date of such merger,  disposition of
assets,  liquidation  or  dissolution.  As to options  granted  to  non-employee
directors,  (A) in the event of a Change in  Control  relating  to (i),  (ii) or
(iii)  above,  any such  outstanding  options  become  fully  vested  and remain
exercisable  for the  remaining  term of such  options and (B) in the event of a
Change in Control  relating to (x) or (y) above,  any such  outstanding  options
terminate  as of the  effective  date of such  merger,  disposition  of  assets,
liquidation or dissolution.

Federal Income Tax Information

         If an  option  granted  under the  Option  Plan is an  Incentive  Stock
Option, the optionee will recognize no income upon grant of the option and incur
no tax  liability  due to the  exercise  of the option  unless the  optionee  is
subject to alternative  minimum tax. The Company will not be allowed a deduction
for  federal  income tax  purposes as a result of the  exercise of an  Incentive
Stock Option  regardless of the  applicability  of the alternative  minimum tax.
Upon the sale or  exchange  of the shares at least two years  after grant of the
option  and one year after  exercise  of the  option,  a gain will be treated as
long-term capital gain. If these holding periods are not satisfied, the optionee
will  recognize  ordinary  income equal to the  difference  between the exercise
price  and the  lower of the fair  market  value of the stock at the date of the
option exercise or the sale price of the stock.  The Company will be entitled to
a  deduction  in the  same  amount  as the  ordinary  income  recognized  by the
optionee.  Any gain recognized on such a premature  disposition of the shares in
excess of the  amount  treated  as  ordinary  income  will be  characterized  as
long-term  capital gain if the sale occurs more than one year after  exercise of
the option or as  short-term  capital  gain if the sale is made  earlier.  Under
current law, the maximum federal long-term capital gain tax rate for individuals
is 20% while the maximum  federal  ordinary  income tax rate for  individuals is
39.6%.

         All  options  which do not  qualify  as  Incentive  Stock  Options  are
referred to as  nonqualified  stock options.  An optionee will not recognize any
taxable  income at the time he or she is granted a  nonqualified  stock  option.
However, upon its exercise,  the optionee will recognize ordinary income for tax
purposes  measured by the excess,  if any, of the then fair market  value of the
shares over the exercise price. In certain  circumstances,  where the shares are
subject to a substantial risk of forfeiture when acquired,  the date of taxation
may be deferred unless the optionee files an election with the Internal  Revenue
Service  under  Section  83(b)  of the Code  within  30 days  after  the date of
exercise.  The income  recognized  by an optionee who is also an employee of the
Company will be subject to tax  withholding by the Company by payment of cash or
out of the current  earnings  paid to the  optionee.  Upon  disposition  of such
shares,  the  optionee  will  recognize  a  capital  gain or loss  equal  to the
difference between the sale price and sum of the amount paid for the shares plus
any amount recognized as ordinary income upon exercise of the option.  Such gain
or loss and will qualify for  long-term  capital  gain or loss  treatment if the
shares have been held for more than one year.

         The  foregoing  is only a  summary  of the  effect  of  federal  income
taxation  upon the  optionee  and the  Company  with  respect  to the  grant and
exercise of options  under the Option Plan and does not purport to be  complete.
The foregoing does not discuss the income tax laws of any  municipality,  state,
or foreign country in which an optionee may reside.

                                 PROPOSAL NO. 3

               RATIFICATION OF APPOINTMENT OF INDEPENDENT AUDITORS


         PricewaterhouseCoopers  LLP has  served  as the  Company's  independent
auditors  since  1984 and has been  appointed  by the Board to  continue  as the
Company's  independent  auditors for the Company's  fiscal year ending September
30, 1999. In the event that  ratification  of this  selection of auditors is not
approved  by a  majority  of the  shares of Common  Stock  voting at the  Annual
Meeting in person or by proxy,  management  will review its future  selection of
auditors.  A  representative  of  PricewaterhouseCoopers  LLP is  expected to be
present at the Annual Meeting.  The  representative  will have an opportunity to
make a statement and to respond to appropriate questions.

          THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR RATIFICATION OF
         THE APPOINTMENT OF PRICEWATERHOUSECOOPERS LLP AS THE COMPANY'S
                    INDEPENDENT AUDITORS FOR THE FISCAL YEAR
                           ENDING SEPTEMBER 30, 1999.



<PAGE>


                  EXECUTIVE COMPENSATION AND OTHER INFORMATION

                           Summary Compensation Table

         The following  table sets forth  information  relating to  compensation
received by the Company's  current and former Chief  Executive  Officers and the
four other most highly compensated executive officers of the Company (the "Named
Executive Officers") during the periods indicated.


<TABLE>
<CAPTION>
<S>                                     <C>         <C>               <C>       <C>       <C>             <C>
                                                                                        Long-Term
                                                                                       Compensation
                                                                                        Securities
                                                                                        Underlying            All Other
   Name and Principal Position          Year         Salary            Bonus            Options(#)          Compensation
- ----------------------------------     -------     ------------    --------------    -----------------    ------------------
Raymon F. Thompson                      1998        $250,010            --                  --            $   5,000(1)
   Chairman of the Board of             1997         243,345            --                  --                4,750(1)
   Directors                            1996         230,015          $70,000               --
                                                                                                              4,750(1)
Fabio Gualrandis(2)                     1998         130,000            --                100,000           127,599(3)
   President and Chief Executive
   Officer
Timothy C. Dodkin(4)                    1998         413,239            --                 25,000            10,313(1)
   Managing Director, Semitool          1997         303,536          162,749              10,000             2,620(1)
   Europe Ltd.                          1996         228,565           50,000               --                2,504(1)
Thomas Sulzbacher Vice President        1998         189,146            --                 20,000             5,000(1)
   of Sales and Marketing               1997         151,507           75,025              20,000             5,250(1)
Gregory L. Perkins                      1998         158,340            --                 20,000             5,225(1)
   Vice President and General           1997         147,472           60,000               7,000             3,938(1)
   Manager                              1996         141,180            --                  --                2,573(1)
</TABLE>



(1)      Represents Company contributions to the Company's 401(k) plan on behalf
         of the Named  Executive  Officer,  except that  amounts for Mr.  Dodkin
         represent  Company  contributions  to a United Kingdom employee benefit
         plan that is  similar  to the  Company's  401(k)  plan on behalf of Mr.
         Dodkin.
(2)      In July 1998, Mr.  Gualrandis  joined Semitool  Europe,  Ltd., a wholly
         owned  subsidary of the Company.  In October 1998,  Mr.  Gualrandis was
         appointed President and Chief Executive Officer of the Company.  Salary
         amount for Mr. Gualrandis reflects salaries received since July 1998.
(3)      Includes  $120,000 in relocation  expenses,  $4,050 in housing expenses
         and $3,549 in car allowance paid to Mr. Gualrandis.
(4)      Mr. Dodkin's compensation is paid in UK Pounds Sterling. The average UK
         Pound  Sterling  exchange  rates for  fiscal  1996,  1997 and 1998 were
         1.565, 1.638, and 1.65, respectively.




<PAGE>


                        Option Grants in Last Fiscal Year

         The following table provides certain  information with respect to stock
options  granted to the Named  Executive  Officers  during the fiscal year ended
September  30, 1998.  In addition,  as required by the  Securities  and Exchange
Commission  rules, the table sets forth the hypothetical  gains that would exist
for the  respective  options  based on assumed  rates of annual  compound  price
appreciation during the option term.


<TABLE>
<CAPTION>
<S>                                <C>              <C>          <C>              <C>             <C>              <C>

                                                      Individual Grants
                                --------------------------------------------------------------
                                                                                                  Potential Realizable Value
                                  Number of      % of Total                                         at Assumed Annual Rate
                                 Securities        Options                                              of Stock Price
                                 Underlying       Granted to     Exercise                              Appreciation for
                                   Options       Employees in    Price Per      Expiration              Option Term(1)
         Name                     Granted(2)      Fiscal Year      Share           Date                5%            10%
- -----------------------------     ----------      -----------    ---------      -----------       --------------------------
Raymon F. Thompson...........
                                     --               --            --              --             --               --
Fabio Gualandris.............
                                   100,000          23.28%        $8.625          6/30/08         1,151,565        1,999,603
Timothy C. Dodkin............
                                    25,000           5.82%       $11.875          1/26/08           186,703          473,142
Thomas Sulzbacher............
                                    20,000           4.66%       $11.875          1/26/08           144,996          378,514
Gregory L. Perkins...........
                                    20,000           4.66%       $11.875          1/26/08           144,996          378,514
</TABLE>

- -------------------------------

(1)      Potential realizable value is determined by applying an amount equal to
         the  fair  market  value on the  date of  grant  to the  stated  annual
         appreciation  rate  compounded  annually for the remaining  term of the
         option,  subtracting  the  exercise  price at the end of the period and
         multiplying the remaining number by the number of shares subject to the
         option. Actual gains, if any, on stock option exercise and Common Stock
         holdings are dependent  upon a number of factors,  including the future
         performance of the Common Stock,  overall stock market conditions,  and
         the timing of option exercises,  if any. There can be no assurance that
         the amounts reflected in this table will be achieved.
(2)      Reflects options that have a ten year term and vest and become
         exercisable at the rate of 5% per quarter.

                 Aggregated Option Exercises in Last Fiscal Year
                        and Fiscal Year-End Option Values

         During 1998, No named Executive  Officer  exercised options to purchase
shares of the Company's  Common Stock. The following table discloses for each of
the Named Executive  Officers certain  information  relating options to purchase
the  Company's  Common Stock held at the end of the fiscal year ended  September
30, 1998.

<TABLE>
<CAPTION>
<S>                                     <C>                 <C>                 <C>                 <C>

                                               Number of Securities                      Value of Unexercised
                                              Underlying Unexercised                     In-the-Money Options
                                         Options at September 30, 1998(#)            at September 30, 1998($)(1)
                                       -------------------------------------    ---------------------------------------


                 Name                    Exercisable         Unexercisable         Exercisable          Unexercisable
       -------------------------       ---------------    ------------------    ----------------    -------------------

       Raymon F. Thompson.....           None                 None              $     0             $     0
       Fabio Gualandris.......            --                100,000                   0                   0
       Timothy C. Dodkin......          29.750               41,250                   0                   0
       Thomas Sulzbacher......          11,500               34,500                   0                   0
       Gregory L. Perkins.....          34,500               34,500                   0                   0
</TABLE>



(1)     Based on the fair  market  value of the  Company's  Common  Stock as of
        September 30, 1998 of $5.875.  No options held by Named Executive
        Officers were "in-the-money" as of such date.


Compensation Committee Interlocks and Insider Participation



         During the fiscal  year ended  September  30,  1998,  Messrs.  Bateman,
Osborne  and  Robinson  served  on the  Compensation  Committee  of the Board of
Directors.  No  interlocking  relationship  exists  between  any  member  of the
Company's  Board of Directors or  Compensation  Committee  and any member of the
Board of Directors or compensation  committee of any other company, nor has such
interlocking relationship existed in the past.





                      REPORT OF THE COMPENSATION COMMITTEE
                            OF THE BOARD OF DIRECTORS




         This section is not  "soliciting  material," is not deemed "filed" with
the Commission and is not incorporated by reference in any filing of the Company
under the Securities Act of 1933, as amended, or the Securities and Exchange Act
of 1934,  as  amended,  whether  made  before  or  after  the  date  hereof  and
irrespective of any general language to the contrary.

         The   Compensation  and  Stock  Option  Committee  of  the  Board  (the
"Compensation  Committee")  was formed in 1995 and consists of Messrs.  Bateman,
Osborne and Robinson.  Decisions  concerning the  compensation  of the Company's
executive  officers are made by the  Compensation  Committee and reviewed by the
full Board (excluding any interested director).

Executive Officer Compensation Programs

         The  objectives of the executive  officer  compensation  program are to
attract,  retain,  motivate and reward key  personnel  who possess the necessary
leadership and management skills,  through competitive base salary,  annual cash
bonus incentives, long-term incentive compensation in the form of stock options,
and various benefits, including medical and life insurance plans.

         The executive  compensation policies of the Compensation  Committee are
intended to combine  competitive  levels of  compensation  and rewards for above
average performance and to align relative  compensation with the achievements of
key business objectives,  optimal satisfaction of customers, and maximization of
shareholder  value. The Compensation  Committee believes that stock ownership by
management is  beneficial  in aligning  management  and  shareholder  interests,
thereby enhancing shareholder value.

         Base  Salaries.  Salaries  for the  Company's  executive  officers  are
determined  primarily on the basis of the  executive  officer's  responsibility,
general  salary  practices  of  peer  companies  and  the  officer's  individual
qualifications  and experience.  The base salaries are reviewed annually and may
be adjusted by the  Compensation  Committee in accordance with certain  criteria
which include individual  performance,  the functions performed by the executive
officer,  the scope of the executive officer's on-going duties,  general changes
in the  compensation  peer group in which the  Company  competes  for  executive
talent, and the Company's financial performance generally. The weight given each
such  factor  by  the  Compensation   Committee  may  vary  from  individual  to
individual.

         Incentive  Bonuses.  The  Compensation  Committee  believes that a cash
incentive bonus plan can serve to motivate the Company's  executive officers and
management to address annual  performance  goals,  using more immediate measures
for  performance  than those  reflected  in the  appreciation  in value of stock
options.  The bonus amounts are based upon  recommendations  by management and a
subjective   consideration   of  factors   including  such  officer's  level  of
responsibility,  individual performance,  contributions to the Company's success
and the Company's financial performance generally. No bonuses were paid based on
fiscal 1998 performance.

         Stock Option  Grants.  Stock options are granted to executive  officers
and other  employees under the Option Plan.  Because of the direct  relationship
between the value of an option and the stock price, the  Compensation  Committee
believes  that options  motivate  executive  officers to manage the Company in a
manner that is consistent with  shareholder  interests.  Stock option grants are
intended to focus the  attention  of the  recipient on the  Company's  long-term
performance  which the Company believes results in improved  shareholder  value,
and to retain the services of the executive officers in a competitive job market
by providing significant long-term earning potential. To this end, stock options
generally  vest and  become  fully  exercisable  over a  five-year  period.  The
principal factors  considered in granting stock options to executive officers of
the Company are prior performance,  level of responsibility,  other compensation
and the executive  officer's ability to influence the Company's long-term growth
and  profitability.  However,  the Option Plan does not provide any quantitative
method  for  weighting  these  factors,  and a  decision  to  grant  an award is
primarily  based  upon a  subjective  evaluation  of the past as well as  future
anticipated performance.

         Other  Compensation  Plans.  The Company has  adopted  certain  general
employee benefit plans in which executive  officers are permitted to participate
on parity with other  employees.  The Company  also  provides a 401(k)  deferred
compensation  pension plan.  Benefits  under these general plans are  indirectly
tied to the Company's performance.

         Deductibility of  Compensation.  Section 162(m) of the Internal Revenue
Code  ("IRC")  disallows  a deduction  by the  Company for certain  compensation
exceeding $1.0 million paid to any Named  Executive  Officer,  excluding,  among
other things,  certain performance based compensation.  Because the compensation
figures for the Named Executive Officers have not approached the limitation, the
Compensation  Committee has not had to use any of the available  exemptions from
the  deduction  limit.  However,  the Option  Plan is  designed  to qualify  any
compensation realized by Named Executive Officers from the exercise of an option
as performance based compensation.  The Compensation  Committee remains aware of
the  existence  of  the  IRC  Section  162(m)  limitations,  and  the  available
exemptions,   and  will  address  the  issue  of   deductibility   when  and  if
circumstances  warrant the use of such  exemptions  in addition to the exemption
contemplated under the Option Plan.

Chief Executive Officer Compensation

         The compensation of the Chief Executive Officer is reviewed annually on
the same basis as discussed  above for all executive  officers.  Mr.  Thompson's
base  salary for the fiscal year ended  September  30,  1998 was  $250,000.  Mr.
Thompson's base salary was established in part by comparing the base salaries of
chief  executive  officers at other  companies  of similar  size.  However,  Mr.
Thompson  voluntarily  lowered  his base  salary  from  $250,000  to $150,000 in
response to the semiconductor  capital equipment industry's  downturn.  Prior to
the  voluntary  reduction,  Mr.  Thompson's  base salary was at the  approximate
median of the base  salary  range for  Presidents/Chief  Executive  Officers  of
comparative companies.  Mr. Thompson received no stock options or bonuses during
the fiscal year ended September 30, 1998.


         Mr.  Gualandris's  base salary for the fiscal year ending September 30,
1999 has been  established  at  $260,000.  As in the case of Mr.  Thompson,  Mr.
Gualandris's  base salary was established in part by comparing the base salaries
of chief executive officers at other companies of similar size. Mr. Gualandris's
base  salary  is at  the  approximate  median  of  the  base  salary  range  for
Presidents/Chief  Executive  Officers of comparative  companies.  Mr. Gualandris
received stock options to purchase  100,000 shares of the Company's Common Stock
at the time of his joining  Semitool  Europe,  Ltd.  No other  stock  options or
bonuses were granted to him upon his appointment as the Company's  President and
Chief Executive Officer.


                                           MEMBERS OF THE COMPENSATION COMMITTEE



                                           Howard E. Bateman
                                           John F. Osborne
                                           Calvin S. Robinson




<PAGE>


                              CERTAIN TRANSACTIONS



         The   following  is  a   description   of  certain   transactions   and
relationships  entered into or existing  during the fiscal year ended  September
30,  1998  between  the Company  and  certain  affiliated  parties.  The Company
believes  that the  terms of such  transactions  were no less  favorable  to the
Company than could have been obtained from an unaffiliated party.

         During the fiscal year ended  September  30, 1998,  the Company  leased
airplanes from Raymon F.  Thompson.  Under these lease  agreements,  the Company
made rental payments to Raymon F. Thompson of $1,273,200  during the fiscal year
ended  September 30, 1998.  The Company  currently  leases one airplane from Mr.
Thompson with monthly rental charge of $22,000.  This lease agreement expires in
March of 1999.  The  terms of the lease  agreement  were  based on  quotes  from
independent aircraft leasing dealers for the same type of aircraft.  The Company
believes  that these  lease  agreements  are on terms no less  favorable  to the
Company than could have been obtained from an unaffiliated party.

         Fastener's  West,  Inc.  ("FWI"),  76% of which  was owned by Raymon F.
Thompson  until  January  of 1998 when he sold his  entire  ownership  of "FWI",
supplies some of the fasteners used by the Company. During the fiscal year ended
September  30,  1998,  total  purchases  by the  Company  from FWI  amounted  to
approximately  $441,000.  Prices paid by the Company are  comparable to the list
price paid by other FWI customers.



<PAGE>


                             STOCK PERFORMANCE GRAPH

         The following  graph compares the  percentage  change in the cumulative
total  shareholder  return on the Company's  Common Stock from February 2, 1995,
the  date of the  Company's  initial  public  offering,  through  the end of the
Company's  fiscal year ended September 30, 1998,  with the percentage  change in
the cumulative total return for the Nasdaq Composite Index (U.S.  Companies) and
the Hambrecht & Quist Semiconductor  Index. The comparison assumes an investment
of $100 on February  2, 1995 in the  Company's  Common  Stock and in each of the
foregoing indices and assumes  reinvestment of dividends.  The stock performance
shown  on the  graph  below  is  not  necessarily  indicative  of  future  price
performance.

                      STOCK PERFORMANCE GRAPH APPEARS HERE


                COMPARISON OF 31 MONTH CUMULATIVE TOTAL REUTRN*

           AMONG SEMITOOL, INC., THE NASDAQ STOCK MARKET (U.S.) INDEX

                 AND THE HAMBRECHT & QUIST SEMICONDUCTOR INDEX

Following is a listing of each of the plot points illustrated in the graph:

<TABLE>
<CAPTION>
<S>                                 <C>     <C>     <C>     <C>     <C>     <C>     <C>     <C>     <C>     <C>     <C>
                                 02/02/95   03/95   06/95   09/95   12/95   03/96   06/96   09/96   12/96   03/97   06/97
SEMITOOL, INC.                        100     162     246     288     150     173     150     137     110     127     134
NASDAQ COMPOSIT INDEX                 100     107     123     137     139     146     157     163     171     162     191
HAMBRECHT & QUIST SEMICONDUCTORS      100     115     161     182     132     125     120     136     171     193     217

                                    09/97   12/97   03/98   06/98   09/98
SEMITOOL, INC.                        290     151     147      94      68
NASDAQ COMPOSIT INDEX                 224     210     246     253     229
HAMBRECHT & QUIST SEMICONDUCTORS      272     181     207     178     155

*  $100 INVESTED ON 02/02/95 IN STOCK OR INDEX-INCLUDING REINVESTMENT OF DIVIDENDS.  FISCAL YEAR ENDING SEPTEMBER 30.

</TABLE>



<PAGE>


                              SHAREHOLDER PROPOSALS


         To be  considered  for  presentation  to  the  annual  meeting  of  the
Company's  shareholders  to be held in  2000,  a  shareholder  proposal  must be
received by Mr. William A. Freeman,  Chief Financial  Officer,  655 West Reserve
Drive, Kalispell, Montana 59901, no later than September 23, 1999.


                      SHAREHOLDER NOMINATIONS FOR DIRECTOR


         Pursuant to the Company's  bylaws,  nominations of persons for election
to the  Board of  Directors  may be made at a  meeting  of  shareholders  by any
shareholder  entitled to vote for the  election of  directors at the meeting who
complies with the notice  procedures.  Such nominations must be made pursuant to
timely  notice in writing  to the  Secretary  of the  Company.  To be timely,  a
shareholder's  notice  must  be  delivered  to or  mailed  and  received  at the
principal  executive  offices of the  Company  not less than sixty days nor more
than ninety days prior to the first  anniversary of the preceeding year's annual
meeting;  provided,  however,  that in the  event  that the  date of the  annual
meeting is  advanced by more than thirty days or delayed by more than sicty days
from  such  anniversary,  notice  by the  shareholder  to be  timely  must be so
received not earlier than the ninetieth day prior to such annual meeting and not
later than the close of business on the later of (1) the  sixtieth  day prior to
such annual  meeting,  or (2) tenth day following the day on which notice of the
date of the  meeting was mailed or such public  disclosure  was made,  whichever
occurs first.


         Such shareholder's notice must set forth (a) as to each person whom the
shareholder proposes to nominate for election or re-election as a director,  (i)
the name, age,  business address and residence  address of the person,  (ii) the
principal  occupation or employment of the person, (iii) the class and number of
shares of the Company which are beneficially  owned by the person,  and (iv) any
other  information  relating to the person that is required to be  disclosed  in
solicitations  for proxies for election of directors  pursuant to Rule 14a under
the Securities  Exchange Act of 1934; and (b) as to the  shareholder  giving the
notice,  (i) the name and record address of the shareholder,  and (ii) the class
and  number of shares of the  corporation  which are  beneficially  owned by the
shareholder.  The Company may require any proposed nominee to furnish such other
information  as may  reasonably  be  required by the  Company to  determine  the
eligibility of such proposed nominee to serve as a director of the Company.


                                  OTHER MATTERS

         Section 16(a) Beneficial Ownership Reporting Compliance.  Section 16(a)
of the Exchange Act requires the  Company's  directors,  executive  officers and
persons  who own more  than 10% of the  Company's  Common  Stock  (collectively,
"Reporting  Persons") to file  reports of ownership  and changes in ownership of
the Company's  Common Stock.  Reporting  Persons are required by Securities  and
Exchange  Commission  regulations  to furnish  the  Company  with  copies of all
Section  16(a)  reports  they file.  Based solely on its review of the copies of
such reports received or written representations from certain Reporting Persons,
the Company  believes that during the fiscal year ended  September 30, 1998, all
Reporting Persons complied with all applicable filing requirements.

         Other Matters.  The Board of Directors knows of no other business which
will be  presented  at the Annual  Meeting.  If any other  business  is properly
brought before the Annual  Meeting,  it is intended that proxies in the enclosed
form will be voted in respect  thereof in  accordance  with the judgments of the
persons voting the proxies.

         It is  important  that the proxies be returned  promptly  and that your
shares  be  represented.  Shareholders  are  urged to mark,  date,  execute  and
promptly return the accompanying proxy card in the enclosed envelope.

                                             By Order of the Board of Directors,


                                             Raymon F. Thompson
                                             Chairman of the Board


January 21, 1999
Kalispell, Montana



                       AMENDED AND RESTATED SEMITOOL, INC.
                             1994 STOCK OPTION PLAN



      1.      Establishment, Purpose, and Definitions.

              (a) There is hereby adopted the 1994 Stock Option Plan
(the "Plan") of Semitool, Inc. (the "Company").

              (b) The purpose of the Plan is to provide a means whereby eligible
individuals  (as defined in Section 4, below) can  acquire  Common  Stock of the
Company (the  "Stock").  The Plan  provides  employees  (including  officers and
directors who are employees) of the Company and of its Affiliates an opportunity
to purchase  shares of Stock  pursuant to options which may qualify as incentive
stock options  (referred to as "incentive  stock  options") under Section 422 of
the Internal  Revenue  Code of 1986,  as amended (the  "Code"),  and  employees,
officers, directors, independent contractors, and consultants of the Company and
of its Affiliates an opportunity to purchase shares of Stock pursuant to options
which are not  described  in  Sections  422 or 423 of the Code  (referred  to as
"nonqualified stock options").

              (c) The term  "Affiliates"  as used in the Plan  means  parent  or
subsidiary corporations,  as defined in Sections 424(e) and (f) of the Code (but
substituting  "the Company" for "employer  corporation"),  including  parents or
subsidiaries which become such after adoption of the Plan.

      2.      Administration of the Plan.

              (a) The Plan shall be  administered  by the Board of  Directors of
the Company (the "Board"). Subject to Section 2(e) below, the Board may delegate
the responsibility  for administering the Plan to a committee,  under such terms
and  conditions as the Board shall  determine (the  "Committee").  The Committee
shall  consist  of two or more  members  of the Board or such  lesser  number of
members of the Board as permitted by Rule 16b-3 promulgated under the Securities
Exchange  Act of 1934,  as amended  ("Rule  16b-3").  None of the members of the
Committee shall receive, while serving on the Committee,  or during the one-year
period  preceding  appointment  to the  Committee,  a grant or  award of  equity
securities  under  (i) the Plan or (ii) any  other  plan of the  Company  or its
affiliates under which the participants are entitled to acquire Stock (including
restricted  Stock),  stock  options,  stock  bonuses,  related  rights  or stock
appreciation rights of the Company or any of its affiliates, other than pursuant
to the grant of  automatic  options  provided in Section 7 below and pursuant to
transactions  in any such  other plan which do not  disqualify  a director  from
being a disinterested person under Rule 16b-3. The limitations set forth in this
Section 2(a) shall  automatically  incorporate any additional  requirements that
may in the future be necessary  for the Plan to comply with Rule 16b-3.  Members
of the Committee  shall serve at the pleasure of the Board.  The Committee shall
select one of its members as chairman, and shall hold meetings at such times and
places as it may  determine.  A majority of the  Committee  shall  constitute  a
quorum and acts of the  Committee at which a quorum is present,  or acts reduced
to or  approved  in writing by all the  members of the  Committee,  shall be the
valid acts of the Committee.  If the Board does not delegate  administration  of
the Plan to the Committee,  then each reference in this Plan to "the  Committee"
shall be construed to refer to the Board.

              (b) Except for options granted to Non-Employee  Directors pursuant
to Section 7, the Committee  shall  determine  which  eligible  individuals  (as
defined in Section 4, below) shall be granted options under the Plan, the timing
of such grants, the terms thereof (including any restrictions on the Stock), and
the number of shares subject to such options.

              (c) Except for options granted to Non-Employee  Directors pursuant
to  Section  7, the  Committee  may amend the  terms of any  outstanding  option
granted under this Plan,  but any  amendment  which would  adversely  affect the
optionee's  rights  under an  outstanding  option  shall not be made without the
optionee's  written  consent.  The Committee  may, with the  optionee's  written
consent,  cancel any outstanding  stock option or accept any  outstanding  stock
option in exchange for a new option.

              (d) The Committee shall have the sole  authority,  in its absolute
discretion to adopt,  amend,  and rescind such rules and  regulations as, in its
opinion,  may be advisable in the  administration  of the Plan,  to construe and
interpret  the  Plan,  the  rules  and  the  regulations,  and  the  instruments
evidencing  options  or Stock  granted  under  the  Plan  and to make all  other
determinations deemed necessary or advisable for the administration of the Plan.
All decisions,  determinations,  and  interpretations  of the Committee shall be
binding on all participants.  Notwithstanding the foregoing, the Committee shall
not  exercise any  discretionary  functions  with respect to options  granted to
Non-Employee Directors pursuant to Section 7.

              (e)  Notwithstanding  the foregoing  provisions of this Section 2,
grants of options to any "Covered  Employee," as such term is defined by Section
162(m) of the Code shall be made only by a subcommittee of the Committee  which,
in addition  to meeting  other  applicable  requirements  of this  Section 2, is
composed  solely of two or more  "outside  directors,"  within  the  meaning  of
Section 162(m) of the Code and the regulations  thereunder (the  "Subcommittee")
to  the  extent   necessary  to  qualify   such  grants  as   "performance-based
compensation"  under  Section  162(m).  In the case of such  grants  to  Covered
Employees, references to the "Committee" shall be deemed to be references to the
Subcommittee as specified above.

      3.      Stock Subject to the Plan.

              (a) An aggregate of not more than 1,500,000  shares of Stock shall
be available  for the grant of stock  options  under the Plan, of which not more
than 90,000  shares shall be available  for the grant of options under Section 7
of the Plan. If an option is surrendered  (except surrender for shares of Stock)
or for any other reason ceases to be exercisable in whole or in part, the shares
which  were  subject  to such  option  but as to which the  option  had not been
exercised shall continue to be available under the Plan.

              (b) If there is any  change in the  Stock  subject  to any  option
granted  under  the  Plan,   through  merger,   consolidation,   reorganization,
recapitalization, reincorporation, stock split, stock dividend (in excess of two
percent),  or other change in the capital structure of the Company,  appropriate
adjustments  shall be made by the  Committee  in order  to  preserve  but not to
increase the benefits to the individual, including adjustments to the number and
kind of shares and the price per share subject to outstanding options.

      4.      Eligible Individuals. The persons eligible to participate in the
Plan (other than pursuant to Section 7) are such employees, officers,
independent contractors,  and  consultants of the Company or an Affiliate as the
Committee, in its  discretion,  shall  designate  from  time to time.
Notwithstanding  the foregoing, only employees of the Company or an Affiliate
(including officers and directors who are bona fide employees) shall be eligible
to receive  incentive stock  options.  Except for grants  pursuant to Section 7,
Eligible  Individuals shall not include Non-Employee Directors.

      5.      The  Option Price.  The exercise  price of each  incentive  stock
option shall be not less than the per share fair market  value of the Stock
subject to such option on the date the option is granted.  Except as provided in
Section 7, the exercise price of each  nonqualified  stock option shall be as
determined by the Committee.  Notwithstanding  the foregoing, (i) in the case of
an incentive stock  option  granted  to a person  possessing  more  than ten
percent  of the combined  voting power of the Company or an Affiliate,  the
exercise price shall be not less than 110 percent of the fair  market  value of
the Stock on the date the  option is  granted.  The  exercise price of an option
shall be subject to adjustment to the extent provided in Section 3(b), above.

      6.      Terms and Conditions of Options.

              (a) Each option granted  pursuant to the Plan will be evidenced by
a written Stock Option Agreement  executed by the Company and the person to whom
such option is granted.

              (b) The Committee  shall determine the term of each option granted
under the  Plan;  provided,  however,  that (i) the term of an  incentive  stock
option shall not be more than 10 years,  (ii) in the case of an incentive  stock
option  granted to a person  possessing  more than ten  percent of the  combined
voting power of the Company or an Affiliate,  the term of each  incentive  stock
option shall be no more than five years, and (iii) the term of an option granted
pursuant to Section 7 shall be as provided in Section 7.

              (c) In the case of incentive  stock  options,  the aggregate  fair
market  value  (determined  as of the time such  option is granted) of the Stock
with respect to which incentive stock options are exercisable for the first time
by an  eligible  employee  in any  calendar  year (under this Plan and any other
plans  of  the   Company  or  its   Affiliates)   shall  not  exceed   $100,000.
Notwithstanding  the designation in an option agreement,  to the extent that the
$100,000  limit is exceeded for any calendar  year,  the excess options shall be
nonqualified stock options.

              (d)  Except  for  grants to  Non-Employee  Directors  pursuant  to
Section 7, which shall be granted on the form of Stock Option Agreement attached
hereto as Exhibit A, the Stock  Option  Agreement  may contain such other terms,
provisions,   and   conditions  as  may  be  determined  by  the  Committee  not
inconsistent  with this Plan.  If an option,  or any part thereof is intended to
qualify as an incentive stock option,  the Stock Option  Agreement shall contain
those terms and conditions which are necessary to so qualify it.

              (e) The maximum  amount of Stock for which  options may be granted
pursuant to any  individual  per  calendar  year under the Plan shall be 375,000
shares,  subject to adjustment  pursuant to Section 3(b). To the extent required
by Section 162(m) of the Code and the  regulations  thereunder,  in applying the
foregoing limitation with respect to an employee, if any option is canceled, the
canceled option shall continue to count against the maximum number of shares for
which options may be granted to the employee  under this Section 6(e).  For this
purpose,  the repricing of an option shall be treated as a  cancellation  of the
existing option and the grant of a new option.

      7.      Stock Options for Non-Employee Directors

              (a) Automatic Grant of Options. An option to purchase 3,000 shares
of Stock  shall be  granted  ("Initial  Grant") to each  director  who is not an
employee of the Company ("Non-Employee Director"), such Initial Grant to be made
(i)  to the  then  existing  Non-Employee  Directors  upon  the  closing  of the
Company's initial public offering of its Stock in an underwriting  pursuant to a
registration  statement  filed under the Securities Act of 1933 ("IPO") and (ii)
to other Non-Employee  Directors elected or appointed to the Board after the IPO
upon the date  each  first  becomes  a  Non-Employee  Director  of the  Company.
Thereafter,   immediately   following  each  annual  meeting  of  the  Company's
stockholders,  each  Non-Employee  Director  who  continues  as  a  Non-Employee
Director  following  such annual  meeting shall be granted an option to purchase
2,000 shares of Stock  ("Subsequent  Grant");  provided that no Subsequent Grant
shall be made to any  Non-Employee  Director who has not served as a director of
the Company and attended at least two (2) meetings of the Board of Directors, as
of the time of such annual meeting.  Each such Subsequent Grant shall be made on
the date of the annual  stockholders'  meeting in question;  provided,  however,
that as to Subsequent  Grants made to Non-Employee  Directors in connection with
the Company's 1996 annual stockholders' meeting (the "1996 Annual Meeting"), (x)
Non-Employee  Directors who have served as a director of the Company,  as of the
time of the 1996  Annual  Meeting,  for at least one year,  shall be  granted an
option to purchase  1,500 shares of Stock on the date of the 1996 Annual Meeting
and shall be granted an option to purchase  500 shares of Stock on May 20, 1996,
and (y) Non-Employee  Directors who have not served as a director of the Company
for at least one year, as of the time of such annual meeting,  but have attended
at least two (2) meetings of the Board of Directors,  as of the time of the 1996
Annual Meeting,  shall be granted an option to purchase 2,000 shares of Stock on
May 20, 1996. If any option ceases to be  exercisable  in whole or in part,  the
shares which were subject to such option but as to which the option had not been
exercised  shall continue to be available under the Plan. All options granted to
Non-Employee Directors shall be nonqualified stock options.

              (b) Option Exercise  Price.  The exercise price per share of Stock
covered by each option shall be the per-share  fair market value of the Stock on
the date the option is granted;  provided  that the exercise  price per share of
Stock covered by options constituting Initial Grants under Section 7(a)(i) above
shall  be the  per-share  price to the  public  in the  IPO;  provided  further,
however,  that the exercise price per share of Stock covered by options  granted
on May 20, 1996 under  Section  7(a)(x) and (y) above shall be the lesser of the
per-share  fair market value of the Stock on February 16, 1996 or the  per-share
fair market  value of the Stock on the date the option is granted.  The exercise
price of an option  granted under the Plan shall be subject to adjustment to the
extent provided in Section 3(b) hereof.

              (c)  Exercisability.  Each  Initial  Grant  shall  vest and become
exercisable as of the date of grant. Each Subsequent Grant shall vest and become
exercisable as to 1/4 of the shares covered  thereby on a quarterly basis on the
last day of each  three-month  period  following the date of grant such that the
option will be fully exercisable twelve (12) months after its date of grant.

      8.      Use of Proceeds.  Cash  proceeds  realized from the sale of Stock
under the Plan or pursuant to options granted under the Plan shall constitute
general funds of the Company.

      9.      Amendment, Suspension, or Termination of the Plan.

              (a) The Board may at any time amend, suspend or terminate the Plan
as it deems advisable;  provided that such amendment,  suspension or termination
complies with all applicable  requirements  of state and federal law,  including
any applicable requirement that the Plan or an amendment to the Plan be approved
by the  shareholders,  and provided further that,  except as provided in Section
3(b),  above,  the  Board  shall in no  event  amend  the Plan in the  following
respects without the consent of stockholders then sufficient to approve the Plan
in the first instance:

                  (i)  To increase the maximum number of shares subject to
incentive stock options issued under  the Plan; or

                  (ii) To change the designation or class of persons eligible to
receive incentive stock options under the Plan.

              (b) No option may be granted nor any Stock  issued  under the Plan
during any  suspension or after the  termination  of the Plan, and no amendment,
suspension,  or termination of the Plan shall, without the affected individual's
consent,  alter or impair any rights or obligations  under any option previously
granted under the Plan.  The Plan shall  terminate  with respect to the grant of
incentive stock options on the tenth  anniversary of the date of adoption of the
Plan, unless previously terminated by the Board pursuant to this Section 9.

              (c) Notwithstanding  the  provisions  of Sections  9(a) and 9(b),
above, the provisions set forth in Section 7 of the Plan (and any other sections
of the Plan that affect the formula award terms of option grants to Non-Employee
Directors  required  to be  specified  in the Plan by Rule  16b-3)  shall not be
amended periodically and in no event more than once every six months, other than
to comport with changes to the Code, the Employee Retirement Income Security Act
of 1974, as amended, or any applicable rules and regulations thereunder.

      10.     Assignability. To the extent required by Rule 16b-3, no option
granted pursuant to this Plan shall be transferable by the holder except by
operation of law or by will or the laws of descent and distribution;  provided, 
that, if Rule 16b-3 is amended  after the date of the  Board's  adoption of the 
Plan to permit broader  transferability  of options under that Rule, (i) options
granted under Section 7 to Non-Employee  Directors shall be transferable to the
fullest extent permitted  by  Rule  16b-3  as so  amended, (ii) any other option
shall  be transferable to the extent provided in the option agreement covering
the option, and the Committee shall have discretion to amend any such
outstanding  option to provide for broader transferability of the option as the
Committee may authorize within the limitations of Rule 16b-3. Notwithstanding
the foregoing, if required by the Code, each incentive stock option under the
Plan shall be transferable by the optionee only by will or the laws of descent
and  distribution,  and, during the optionee's lifetime, shall be exercisable
only by the optionee. In the event of any Rule 16b-3  permitted  transfer of an
option  hereunder,  the  transferee shall be entitled to exercise the option in
the same manner and only to the same extent as the optionee (or his personal
representative  or the person who would have  acquired  the  right to  exercise
the  option  by  bequest  or  intestate succession)  would have been entitled to
exercise the option under Sections 6, 7 and 11 had the option not been
transferred.

      11.     Payment Upon Exercise of Options.

              (a)  Payment of the  purchase  price upon  exercise  of any option
granted under this Plan shall be made in cash, by optionee's  personal  check, a
certified  check,  bank draft,  or postal or express  money order payable to the
order of the Company in lawful money of the United States  (collectively,  "Cash
Consideration');  provided,  however,  that,  except for options  granted  under
Section 7, the Committee, in its sole discretion,  may permit an optionee to pay
the  option  price in whole or in part  (i) with  shares  of Stock  owned by the
optionee or with shares of Stock withheld from the shares otherwise  deliverable
to the  optionee  upon  exercise  of the  option;  (ii)  by  delivery  on a form
prescribed by the Committee of an irrevocable  direction to a securities  broker
approved by the  Committee  to sell shares of Stock and deliver all or a portion
of the  proceeds to the  Company in payment for the Stock;  (iii) by delivery of
the optionee's  promissory  note with such  recourse,  interest,  security,  and
redemption provisions as the Committee in its discretion determines appropriate;
or (iv) in any  combination of the foregoing.  The exercise price of any options
granted under Section 7 shall be paid in Cash  Consideration,  the consideration
specified  in  clauses  (i)  or  (ii)  of  the  preceding  sentence,  or in  any
combination  thereof.  Any Stock used to exercise options shall be valued at its
fair market  value on the date of the exercise of the option.  In addition,  the
Committee, in its sole discretion, may authorize the surrender by an optionee of
all or part of an unexercised option (excluding options granted under Section 7,
above) and  authorize a payment in  consideration  thereof of an amount equal to
the  difference  between the aggregate fair market value of the Stock subject to
such option and the  aggregate  option price of such Stock.  In the  Committee's
discretion, such payment may be made in cash, shares of Stock with a fair market
value on the date of surrender equal to the payment amount,  or some combination
thereof.

              (b) In the event that the  exercise  price is  satisfied by shares
withheld from the shares of Stock  otherwise  deliverable  to the optionee,  the
Committee may issue the optionee an additional  option,  with terms identical to
the  option  agreement  under  which the  option was  exercised,  entitling  the
optionee to purchase additional shares of Stock equal to the number of shares so
withheld but at an exercise price equal to the fair market value of the Stock on
the grant date of the new option;  provided,  however,  that no such  additional
options may be granted  with respect to options  granted  pursuant to Section 7,
above. Any additional option shall be subject to the provisions of Section 6(e),
above.

      12.     Withholding Taxes.

              (a) No Stock shall be delivered  under the Plan to any participant
until the participant has made  arrangements  acceptable to the Committee (or in
the case of exercise of options granted to Named  Executives,  the Subcommittee)
for the satisfaction of federal, state, and local income and social security tax
withholding obligations,  including, without limitation, obligations incident to
the receipt of Stock under the Plan or to the failure to satisfy the  conditions
for treatment as incentive stock options under applicable tax law. Upon exercise
of a stock  option  the  Company  shall  withhold  from the  optionee  an amount
sufficient to satisfy  federal,  state and local income and social  security tax
withholding obligations.

              (b) In the event that such tax  withholding  is  satisfied  by the
Company  or the  optionee's  employer  withholding  shares  of  Stock  otherwise
deliverable to the optionee,  the Committee may issue the optionee an additional
option,  with terms identical to the option agreement under which the option was
exercised,  entitling the optionee to purchase  additional shares of Stock equal
to the number of shares so withheld  but at an exercise  price equal to the fair
market  value  of the  Stock  on the  grant  date of the new  option;  provided,
however,  that no such additional options may be granted with respect to options
granted pursuant to Section 7, above. Any additional  option shall be subject to
the provisions of Section 6(e), above.

      13.     Change in Control.

              (a) For purposes of this  Section 13, a "Change in Control"  shall
be deemed to occur upon:

                  (i)  The  direct or  indirect  acquisition  by any person or
 related group of persons (other than an  acquisition  from or by the Company or
 by a  Company-sponsored  employee  benefit plan or by a person that directly or
 indirectly  controls,  is controlled  by, or is under common  control with, the
 Company)  of  beneficial  ownership  (within  the  meaning of Rule 13d-3 of the
 Securities Exchange Act of 1934, as amended) of securities possessing more than
 fifty  percent  (50%) of the  total  combined  voting  power  of the  Company's
 outstanding Stock;

                  (ii) A change in the composition of the Board over a period
 of  thirty-six  (36) months or less such that a majority  of the Board  members
 cease, by reason of one or more contested  elections for Board membership or by
 one or more  actions by written  consent of  stockholders,  to be  comprised of
 individuals  who  either  (A) have been Board  members  continuously  since the
 beginning of such period or (B) have been elected or nominated  for election as
 Board  members  during such period by at least a majority of the Board  members
 described  in clause (A) who were still in office at the time such  election or
 nomination was approved by the Board;

                  (iii)Approval by the Company's stockholders of a merger or
 consolidation  in which the Company is not the surviving  entity,  except for a
 transaction the principal  purpose of which is to change the state in which the
 Company is incorporated;

                  (iv) Approval  by the  Company's  stockholders  of (A) the
 sale,  transfer or other  disposition of all or substantially all of the assets
 of the  Company  (including  the  capital  stock  of the  Company's  subsidiary
 corporations) or (B) the complete liquidation or dissolution of the Company; or

                  (v)  Approval by the Company's  stockholders  of any reverse
 merger in which the  Company  survives  as an  entity  but in which  securities
 possessing  more than fifty percent (50%) of the total combined voting power of
 the Company's  outstanding  securities  are  transferred to a person or persons
 different from those who held such securities immediately prior to such merger.

                  (vi) For the purpose of this  Section 13,  "Approval by the
 Company's  Stockholders"  shall mean  approval by a majority of those shares of
 Stock voting at a stockholder's meeting at which a quorum is present, excluding
 shares  beneficially owned (within the meaning of Rule 13d-3 under the Exchange
 Act) by the Non-Employee Directors.

              (b) Except for options  granted to  Non-Employee  Directors  under
Section 7, the  Committee  may provide in any stock option  agreement  (or in an
amendment thereto) that, in the event of any Change in Control,  any outstanding
options covered by such an agreement shall be fully vested,  nonforfeitable  and
become exercisable, as of the date of the Change in Control.

              (c) If the Committee determines to incorporate a Change in Control
provision in any option agreement  hereunder,  the agreement shall provide that,
(i) in the event of a Change in Control  described in clauses (i),  (ii) and (v)
of paragraph (a) above,  the option shall remain  exercisable  for the remaining
term of the  option and (ii) in the event of a Change in  Control  described  in
clauses (iii) or (iv) of paragraph (a) above,  the option shall  terminate as of
the  effective  date  of the  merger,  disposition  of  assets,  liquidation  or
dissolution described therein.

              (d) As to any  options  granted  under  Section 7 to  Non-Employee
Directors,  (i) in the event of a Change in Control  described  in clauses  (i),
(ii) or (v) of paragraph (a) above, any such outstanding  options under the Plan
shall become fully vested and remain  exercisable for the remaining term of such
options and (ii) in the event of a Change in Control  described in clauses (iii)
or (iv) of  paragraph  (a)  above,  outstanding  options  under  the Plan  shall
terminate  as of the  effective  date  of the  merger,  disposition  of  assets,
liquidation or dissolution described therein.

              (e) Notwithstanding  the foregoing  provisions of this Section 13,
an outstanding option may not be accelerated under this Section 13 if and to the
extent (i) such option is, in connection with the  transaction  giving rise to a
Change of Control, either to be assumed by the successor or parent thereof or to
be replaced with a comparable  option to purchase shares of the capital stock of
the  successor  corporation  or parent  thereof,  or (ii)  such  option is to be
replaced  with a  cash  incentive  program  of the  successor  corporation  that
preserves  the option spread  existing at the time of the corporate  transaction
giving  rise to the Change of Control and  provides  for  subsequent  payment in
accordance with the same vesting schedule applicable to such option.

      14.     Stockholder Approval. The Plan and any options granted pursuant to
Section 7 and  options  granted  to Covered  Employees  hereunder  shall  become
effective  only upon  approval  by the  holders of a majority  of the  Company's
shares voting (in person or by proxy) at a stockholders'  meeting held within 12
months of the  Board's  adoption  of the Plan.  The  Committee  may grant  stock
options under the Plan prior to the stockholders' meeting, but until stockholder
approval of the Plan is obtained,  no such option shall be  exercisable.  In the
event that  stockholder  approval  is not  obtained  within the period  provided
above, all options described in this Section 14 previously  granted above, shall
terminate.

      15.     Rule 16b-3 Compliance. Transactions under the Plan are intended to
comply with all applicable  conditions of Rule 16b-3 or its successors under the
Exchange  Act. To the extent any provision of the Plan or action by the Board or
the  Committee  fails to so  comply,  it shall be deemed  null and void,  to the
extent  permitted  by law and deemed  advisable  by the Board or the  Committee.
Moreover,  in the event the Plan does not include a  provision  required by Rule
16b-3 to be stated therein in order to qualify the grants under Section 5 hereof
as grants  under a  non-discretionary  formula  under Rule 16b-3 such  provision
(other than one relating to eligibility requirements, or the price and amount of
awards) shall be deemed  automatically  to be incorporated by reference into the
Plan with respect to grants of options to Non-Employee Directors.



                                      PROXY
                                 SEMITOOL, INC.

                    THIS PROXY IS SOLICITED ON BEHALF OF THE
                    BOARD OF DIRECTORS FOR THE ANNUAL MEETING
                         TO BE HELD ON February 9, 1999.

RAYMON F.  THOMPSON  and WILLIAM A.  FREEMAN,  or either of them,  each with the
power of substitution, are hereby authorized to represent and vote the shares of
the  undersigned,  with all the powers which the  undersigned  would  possess if
personally present, at the Annual Meeting of Semitool, Inc. (the "Company"),  to
be held on February 9, 1999, and any adjournment or postponement thereof.

Election of all directors (or if any nominee is not available for election, such
substitute  as the Board of  Directors  or the  proxy  holders  may  designate).
Nominees:  RAYMON F. THOMPSON,  HOWARD E. BATEMAN,  RICHARD A. DASEN, TIMOTHY C.
DODKIN, DANIEL J. EIGEMAN AND CALVIN S. ROBINSON.

BOARD OF DIRECTORS'  RECOMMENDATIONS:  The Board of Directors  recommends a vote
FOR the election of Directors,  FOR approval of the  ratification of the Amended
and  Restated  Semitool,  Inc.  1994  Stock  Option  Plan,  as  amended  and FOR
ratification  of  the  appointment  of  PricewaterhouseCoopers   L.L.P.  as  the
Company's independent auditors for the fiscal year ending September 30, 1999.

If you wish to vote in accordance  with the Board of Directors'  recommendations
you need not mark any boxes, just sign and date on the reverse side.



<PAGE>


                          [FORM OF BACK OF PROXY CARD]


Shares  represented by this proxy will be voted as directed by the  shareholder.
If no such directions are indicated, the Proxies will have authority to vote FOR
the election of all directors.  In their discretion,  the Proxies are authorized
to vote upon such other business as may properly come before the Annual Meeting.

                   ----------------------------------------------------------

1.  Election of Directors (see  reverse):  
          [ ] FOR       [ ] WITHHELD

          FOR,   except  vote   withheld  from  the following  nominee(s):


2.  To approve and ratify the Amended and Restated Semitool, Inc. 1994 Stock
Option Plan, as amended, increasing the number of shares of Common Stock
available  for issuance thereunder  by 200,000  shares from  1,300,000 shares to
1,500,000 shares:

          [ ] FOR       [ ] AGAINST         [ ] ABSTAIN


3.  To ratify the appointment of PricewaterhouseCoopers L.L.P. as the Company's
independent auditors for the fiscal year ending September 30, 1999:

          [ ] FOR       [ ] AGAINST         [ ] ABSTAIN


Mark here for  address  change  and  note  at  left [ ]    


Please  sign and date where  indicated.  Joint  owners  should  each sign.  When
signing as attorney, executor,  administrator,  trustee or guardian, please give
full title as such.

Signature_______________________________               Date_____________________

Signature_______________________________               Date_____________________


PLEASE MARK,  SIGN,  DATE AND RETURN THIS PROXY CARD PROMPTLY USING THE ENCLOSED
REPLY ENVELOPE.



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