EXHIBIT 21.1
SUBSIDIARIES OF REGISTRANT
Name Jurisdiction of Incorporation
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Semitool Europe Ltd. United Kingdom
Semitool Halbleitertechnik Vertriebs GmbH Germany
Semitool France SARL France
Semitool Italia SRL Italy
Semitool Japan KK Japan
Semitool, Inc., Korea Korea
Semitool FSC, Inc. Barbados
Semitool (Asia) Pte Ltd. Singapore
Semitool Schweiz, GmbH Switzerland
Semy Engineering, Inc. Delaware
Rhetech, Inc. Delaware
