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EXHIBIT 5.1
[Crowley, Haughey, Hanson, Toole & Dietrich letterhead]
June 30, 2000
Semitool, Inc.
655 West Reserve Drive
Kalispell, MT 59901
Ladies and Gentlemen:
At your request, we have examined the Registration Statement on Form S-3
filed by Semitool, Inc., a Montana corporation (the "Company"), with the
Securities and Exchange Commission on June 16, 2000, as amended (the
"Registration Statement") relating to the registration under the Securities Act
of 1933, as amended, of up to 4,715,000 shares of the Company's common stock, no
par value (the "Stock"), being offered by the Company and by certain selling
shareholders specified therein (the "Selling Shareholders"), including up to
615,000 shares that may be issued upon exercise of the underwriters'
over-allotment option.
As counsel to the Company, we have examined the proceedings taken by the
Company and the Selling Shareholders in connection with the sale by Company and
the Selling Shareholders of up to 4,715,000 shares of Stock.
It is our opinion that the 4,715,000 shares of Stock that may be sold will
be legally and validly issued, fully paid and nonassessable.
We consent to the use of this opinion as an exhibit to the Registration
Statement and further consent to all references to us in the Registration
Statement, the prospectus constituting a part thereof and any amendments
thereto.
Sincerely yours,
Crowley, Haughey, Hanson, Toole &
Dietrich P.L.L.P.
/s/ ALLAN KARELL
Allan Karell
