SEMITOOL INC
PRE 14A, 2000-01-04
SPECIAL INDUSTRY MACHINERY, NEC
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                                  SCHEDULE 14A

                                 (Rule 14a-101)

                     INFORMATION REQUIRED IN PROXY STATEMENT

                            SCHEDULE 14A INFORMATION

           Proxy Statement Pursuant to Section 14(a) of the Securities

                Exchange Act of 1934 (Amendment No.       )

Filed by the Registrant   |X|
Filed by a party other than the Registrant   |_|
Check the appropriate box:
|X|    Preliminary proxy statement             |_|  Confidential, For Use of the
                                               Commission Only (as
|_|    Definitive proxy statement              permitted by Rule 14a-6(e)(2))
|_|    Definitive additional materials
|_|    Soliciting material pursuant to Rule 14a-11(c) or Rule 14a-12

                                 Semitool, Inc.
                (Name of Registrant as Specified in Its Charter)

                                 Semitool, Inc.
    (Name of Person(s) Filing Proxy Statement, if Other Than the Registrant)

Payment of Filing Fee (Check the appropriate box):
|X|    No fee required.

|_|    Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.

(1)    Title of each class of securities to which transaction applies:

       -------------------------------------------------------------------------

(2)    Aggregate number of securities to which transactions applies:

       -------------------------------------------------------------------------


(3)    Per unit price or other underlying value of transaction computed pursuant
       to  Exchange  Act Rule 0-11 (set forth the amount on which the filing fee
       is calculated and state how it was determined):

       -------------------------------------------------------------------------

(4)    Proposed maximum aggregate value of transaction.

       -------------------------------------------------------------------------


(5)    Total fee paid:

       -------------------------------------------------------------------------

       |_|  Fee paid previously with preliminary materials:

       -------------------------------------------------------------------------

       |_| Check box if any part of the fee is offset as  provided  by  Exchange
       Act Rule 0-11(a)(2) and identify the filing for which the offsetting  fee
       was paid previously.  Identify the previous filing by registration
       statement number, or the form or schedule and the date of its filing.

(1)    Amount previously paid:

       -------------------------------------------------------------------------

(2)    Form, Schedule or Registration Statement No.:

       -------------------------------------------------------------------------

(3)    Filing Party:

       -------------------------------------------------------------------------


(4)    Date Filed:

       -------------------------------------------------------------------------


<PAGE>


                                 SEMITOOL, INC.


                    Notice of Annual Meeting of Shareholders

                           To Be Held February 8, 2000

To the Shareholders of Semitool, Inc.:

         NOTICE IS HEREBY  GIVEN that the  Annual  Meeting  of  Shareholders  of
Semitool,  Inc.,  a Montana  corporation  (the  "Company"),  will be held at the
Grouse Mountain  Lodge,  Hwy. 93 & Fairway Drive,  Whitefish,  Montana 59937, at
2:30 p.m., local time, on February 8, 2000, for the following purposes:

         1.     ELECTION OF DIRECTORS.  To elect six directors of the Company to
serve until the 2001 Annual Meeting of Shareholders or until their successors
are elected and qualified.

         2.     AMENDMENT TO THE COMPANY'S  RESTATED ARTICLES OF  INCORPORATION.
To approve an amendment to the  Company's  Restated  Articles of  Incorporation
to increase the authorized number of shares of the Company's capital stock.

         3.     RATIFICATION OF APPOINTMENT OF INDEPENDENT  AUDITORS.  To ratify
the appointment of  PricewaterhouseCoopers  LLP as the independent  auditors for
the Company for the fiscal year ending September 30, 2000.

         4.     OTHER BUSINESS. To transact such other business as may properly
come before the Annual Meeting of  Shareholders  and any  adjournment or
postponement thereof.

         The foregoing  items of business are more fully  described in the Proxy
Statement, which is attached hereto and made a part hereof.

         The Board of  Directors  has fixed the close of  business on January 4,
2000 as the record date for determining the  shareholders  entitled to notice of
and to vote at the 2000 Annual Meeting of  Shareholders  and any  adjournment or
postponement thereof.

         WHETHER OR NOT YOU EXPECT TO ATTEND THE ANNUAL MEETING OF  SHAREHOLDERS
IN PERSON,  YOU ARE URGED TO SUBMIT  YOUR PROXY AS SOON AS POSSIBLE SO THAT YOUR
SHARES CAN BE VOTED AT THE MEETING IN ACCORDANCE WITH YOUR INSTRUCTIONS. YOU MAY
SUBMIT YOUR PROXY (1) OVER THE INTERNET,  (2) BY  TELEPHONE,  OR (3) BY SIGNING,
DATING  AND   RETURNING   THE  ENCLOSED   PROXY  CARD  AND  MAILING  IT  IN  THE
POSTAGE-PREPAID  ENVELOPE PROVIDED. THIS WILL ENSURE YOUR REPRESENTATION AND THE
PRESENCE  OF A QUORUM AT THE ANNUAL  MEETING.  IF YOU SUBMIT YOUR PROXY CARD AND
THEN DECIDE TO ATTEND THE ANNUAL MEETING TO VOTE YOUR SHARES IN PERSON,  YOU MAY
STILL DO SO. YOUR PROXY IS REVOCABLE IN ACCORDANCE WITH THE PROCEDURES SET FORTH
IN THE PROXY STATEMENT.

                                     By Order of the Board of Directors,


                                     Raymon F. Thompson
                                     Chairman of the Board

Kalispell, Montana
January 20, 2000


<PAGE>


                                 SEMITOOL, INC.

                             655 West Reserve Drive
                            Kalispell, Montana 59901

                                 PROXY STATEMENT

General Information

         This Proxy  Statement  is furnished  to the  shareholders  of Semitool,
Inc., a Montana corporation (the "Company"), in connection with the solicitation
by the Board of Directors  of the Company (the "Board" or "Board of  Directors")
of proxies in the accompanying form for use in voting at the 2000 Annual Meeting
of Shareholders of the Company (the "Annual  Meeting") to be held on February 8,
2000, at the Grouse Mountain Lodge, Hwy. 93 & Fairway Drive, Whitefish,  Montana
59937, at 2:30 p.m.,  local time, and any  adjournment or postponement  thereof.
The shares represented by the proxies received, properly marked, dated, executed
and not revoked will be voted at the Annual Meeting.

Revocability of Proxies

         Any proxy  given  pursuant to this  solicitation  may be revoked by the
person giving it at any time before it is exercised by delivering to the Company
(to the attention of Mr. William A. Freeman) a written notice of revocation or a
duly executed proxy bearing a later date, or by attending the Annual Meeting and
voting in person.

Solicitation and Voting Procedures

         The  solicitation  of proxies will be conducted by mail and the Company
will bear all attendant costs. These costs will include the expense of preparing
and mailing proxy  materials for the Annual Meeting and  reimbursements  paid to
brokerage   firms  and  others  for  their   expenses   incurred  in  forwarding
solicitation  material  regarding the Annual Meeting to beneficial owners of the
Company's Common Stock. The Company may conduct further solicitation personally,
by  telephone  or by  facsimile  through  its  officers,  directors  and regular
employees,  none of whom will receive additional compensation for assisting with
such solicitation.

         The close of  business  on January 4, 2000 has been fixed as the record
date (the "Record Date") for  determining  the holders of shares of Common Stock
of the Company  entitled to notice of and to vote at the Annual  Meeting.  As of
the  close of  business  on the  Record  Date,  the  Company  had  approximately
13,824,998 shares of Common Stock outstanding and entitled to vote at the Annual
Meeting.  The  presence at the Annual  Meeting of a majority of these  shares of
Common Stock of the  Company,  either in person or by proxy,  will  constitute a
quorum for the transaction of business at the Annual Meeting.  Each  outstanding
share of Common  Stock on the  Record  Date is  entitled  to one (1) vote on all
matters. With respect to the election of directors, each shareholder is entitled
to cumulate  his or her votes,  meaning that such  shareholder  can multiply the
number of  shares  owned by the  number of board  positions  to be  filled,  and
allocate  such  votes  for  all or as  many  director-nominees  as he or she may
designate.

         An automated system  administered by the Company's  transfer agent will
tabulate  votes cast by proxy at the  meeting,  and the  inspector  of elections
appointed for the meeting will tabulate votes cast in person at the meeting. The
amendment of the Restated  Articles of  Incorporation  to increase the number of
authorized  shares  of  Common  Stock and the  ratification  of the  independent
auditors  will require the  affirmative  vote of a majority of the shares of the
Company's  outstanding Common Stock.  Because  abstentions are treated as shares
present or  represented  and  entitled to vote for the  purposes of  determining
whether a matter has been  approved by the  stockholders,  abstentions  have the
same effect as negative  votes.  Broker  non-votes  and shares as to which proxy
authority  has been  withheld  with  respect  to any matter are not deemed to be
entitled to vote for purposes of  determining  whether  stockholder  approval of
that matter has been obtained and  effectively  count as votes against  Proposal
No. 2, the  Amendment to the  Restated  Articles of  Incorporation,  as amended,
and Proposal No. 3 the ratification of the independent auditors.


<PAGE>


                                 PROPOSAL NO. 1

                              ELECTION OF DIRECTORS

         As set by the Board of Directors pursuant to the Bylaws of the Company,
the authorized  number of directors is set at six. Six directors will be elected
at the Annual Meeting to serve until the 2001 Annual Meeting of  Shareholders or
until their  successors  are elected or  appointed  and  qualified  or until the
director's earlier  resignation or removal. In the event that any nominee of the
Company is unable or  declines  to serve as a director at the time of the Annual
Meeting,  the proxies will be voted for any nominee who shall be  designated  by
the present Board of Directors to fill the additional vacancy. In the event that
additional  persons are nominated  for election as directors,  the proxy holders
intend to vote all proxies received by them in such a manner, as will assure the
election  of as many of the  nominees  listed  below as  possible,  and, in such
event,  the specific  nominees to be voted for will be  determined  by the proxy
holders. The Board has no reason to believe that the persons named below will be
unable or unwilling to serve as a nominee or as a director,  if elected. Each of
the six nominees for director who receives the greatest  number of votes will be
elected.

         Set  forth  below  is the  age  and  certain  biographical  information
relating to the director nominees.

         Raymon F. Thompson, age 58, founded the  Company in 1979 and has served
as  Chairman  since the  Company's  inception.  Mr. Thompson  previously  served
as Chief Executive  Officer and President.  In 1979,  Mr. Thompson  designed,
patented and introduced the first on-axis rinser/dryer for the semiconductor
industry.

         Howard  E.  Bateman,  age 65,  has  served  on the  Company's  Board of
Directors  since  1990.  Mr.  Bateman  formerly  owned and  operated  Entech,  a
Pennsylvania  company  that  was an  independent  sales  representative  for the
Company's products from 1979 to 1996.

         Richard  A.  Dasen,  age 57,  has  served  on the  Company's  Board  of
Directors since 1984.  From 1974 to 1992, Mr. Dasen owned and managed  Evergreen
Bancorporation,  a multi-bank holding company. Since 1992, Mr. Dasen has been an
independent businessman.

         Timothy C. Dodkin, age 50, joined the Company in 1985 and served as the
Company's  European Sales Manager from 1985 to 1986.  Since 1986, Mr. Dodkin has
served as  Managing  Director  of  Semitool  Europe,  Ltd.  Prior to joining the
Company, Mr. Dodkin worked at Cambridge Instruments,  a semiconductor  equipment
manufacturer, for ten years in national and international sales.

         Daniel  J.  Eigeman,  age 65,  has  served  on the  Company's  Board of
Directors  since 1985.  From 1971 to 1993, Mr. Eigeman was President of Eigeman,
Hanson & Co.,  P.C., an accounting  firm,  and was a shareholder  of Junkermier,
Clark,  Campanella,  Stevens,  P.C.,  CPAs.  Mr. Eigeman  currently  serves as a
director of CPA Mutual Insurance of America, Inc.

         Calvin S.  Robinson,  age 79, has served as a director  of the  Company
since 1982 and since February of 1996 has served as the Company's Secretary. Mr.
Robinson  has been of counsel to  Crowley,  Haughey,  Hanson,  Toole & Dietrich,
P.L.L.P., since 1989. This firm has provided legal services to the Company since
1979. Mr. Robinson is also a director of Winter Sports, Inc.

                         THE BOARD RECOMMENDS A VOTE FOR
                    THE ELECTION OF THE NOMINEES NAMED ABOVE.

Relationships Among Directors or Executive Officers

         There are currently no family  relationships among any of the directors
or executive officers of the Company. Mr. Thomas Sulzbacher, former Vice
President, Marketing and Sales,  left the Company on April 15, 1999.  He is
Mr. Thompson's son-in-law.

Meetings and Committees of the Board of Directors

         During the fiscal year ended  September  30,  1999,  the Board met five
times. The Board has three committees: the Audit Committee, the Compensation and
Stock Option  Committee  and the  Nominating  Committee.  During the fiscal year
ended  September  30,  1999,  no  director  attended  fewer  than 75% of all the
meetings of the Board and its  committees  on which he served  after  becoming a
member of the Board.

         The Audit Committee, which held three meetings in the fiscal year ended
September 30, 1999, consisted of Messrs.  Dasen, Robinson and Eigeman. The Audit
Committee  reviews and supervises the Company's  financial  controls,  including
selecting  the  Company's  auditors,  reviewing  the books and  accounts  of the
Company,  meeting  with the  officers of the  Company  regarding  the  Company's
financial  controls,  acting upon  recommendations  of auditors  and taking such
further action as the Audit  Committee  deems  necessary to complete an audit of
the books and accounts of the Company,  as well as other  matters which may come
before it or as directed by the Board.

         The Compensation and Stock Option Committee,  which held 10 meetings in
the fiscal  year ended  September  30,  1999,  consists  of Messrs.  Bateman and
Robinson.  The Compensation and Stock Option Committee  reviews and approves the
compensation and benefits for the Company's executive officers,  administers the
Company's  stock option plan and performs  such other duties as may from time to
time be determined by the Board.

         The  Nominating  Committee,  which held no  meetings in the fiscal year
ended  September  30,  1999,  consists  of Messrs.  Bateman  and  Thompson.  The
Nominating Committee nominates directors to hold office for the ensuing year and
until their respective successors are duly elected and qualified. The Nominating
Committee may consider  recommendations from shareholders if received in writing
addressed  to the  Secretary  of the Company no later than 120 days prior to the
12-month anniversary of the previous annual meeting of shareholders.

Compensation of Directors

         Upon  becoming a member of the Board,  non-employee  directors  receive
options (the "Initial  Option Grants") to purchase 3,000 shares of Common Stock,
and thereafter  receive an annual option grant (the "Annual  Option  Grants") to
purchase  2,000 shares of Common  Stock.  The Company's  non-employee  directors
receive a $1,000  monthly fee,  $1,000 for each Board meeting  attended and $500
for each committee meeting attended that is not held in conjunction with a Board
meeting.  All  non-employee  directors are reimbursed  for expenses  incurred in
connection  with  attending  meetings of the Board.  Employee  directors  of the
Company do not receive compensation for their services as directors.


<PAGE>


                              SECURITY OWNERSHIP OF
                    CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

         The following table sets forth certain  information with respect to the
beneficial ownership of the Company's Common Stock as of the Record Date for (i)
each person who is known by the Company to beneficially  own more than 5% of the
Common Stock, (ii) each of the Company's  directors,  (iii) each of the officers
appearing in the Summary  Compensation  Table below and (iv) all  directors  and
executive officers as a group.  The address for all 5% owners is 655 West
Reserve Drive, Kalipsell, MT  59901.

<TABLE>
<CAPTION>

                                                                 SHARES BENEFICIALLY OWNED
                                                           --------------------------------------
DIRECTORS, EXECUTIVE OFFICERS AND 5% SHAREHOLDERS               NUMBER             PERCENT(1)
- --------------------------------------------------         -----------------    -----------------
<S>                                                           <C>                    <C>
     Raymon F. and Ladeine A. Thomspon(2)                     6,316,184              45.7%
     Howard E. Bateman(3)                                        15,000                *
     Richard A. Dasen(3)                                         14,000                *
     Daniel J. Eigeman(3)                                        11,900                *
     Calvin S. Robinson(3)                                       11,750                *
     Timothy C. Dodkin(4)                                        53,000                *
     Fabio Gualandris(5)                                         32,000                *
     William A. Freeman(6)                                       16,000                *
     Gregory L. Perkins(7)                                       53,850                *
     Thomas Sulzbacher                                          131,125                *

     All directors and officers as a group (12 persons)(8)    6,543,984              46.6%
</TABLE>
- ------------------------------------------------

*     Less than 1%.

(1)  Beneficial  ownership is  determined  in  accordance  with the rules of the
     Securities  and  Exchange  Commission.  In  computing  the number of shares
     beneficially owned by a person and the percentage ownership of that person,
     shares of Common  Stock  subject to options  held by that  person  that are
     currently  exercisable or exercisable within 60 days of the Record Date are
     deemed outstanding.  Such shares,  however,  are not deemed outstanding for
     the purpose of computing  the  percentage  ownership of each other  person.
     Except  as  indicated  in the  footnotes  to this  table  and  pursuant  to
     applicable  community  property  laws,  the persons named in the table have
     sole  voting  and  investment  power  with  respect to the shares set forth
     opposite such person's name.
(2)  Includes  212,500  shares  held in the name of the Gina  Thompson  Trust of
     which Mr.  Thompson is the trustee,  and includes 94,700 shares held in the
     name of the Floyd Foundation Trust of which Mr. Thompson is the trustee.
(3)  Includes 11,000 shares  issuable  pursuant to options which are exercisable
     within 60 days of the Record Date.
(4)  Includes 51,500 shares  issuable  pursuant to options which are exercisable
     within 60 days of the Record Date.
(5)  Includes 32,000 shares  issuable  pursuant to options which are exercisable
     within 60 days of the Record Date.
(6)  Includes 16,000 shares  issuable  pursuant to options which are exercisable
     within 60 days of the Record Date.
(7)  Includes 53,850 shares  issuable  pursuant to options which are exercisable
     within 60 days of the Record Date.
(8)  Includes 217,650 shares issuable  pursuant to options which are exercisable
     within 60 days of the Record Date.


<PAGE>


                                 PROPOSAL NO. 2

                 AMENDMENT OF RESTATED ARTICLES OF INCORPORATION
            TO AUTHORIZE 45 MILLION ADDITIONAL SHARES OF COMMON STOCK

         The Board of Directors  believes  that the  Company's  current  capital
structure does not provide sufficient flexibility for the potential future needs
of the Company.  Therefore,  the Board has unanimously  approved an amendment to
the  Company's  Restated  Articles of  Incorporation  to increase  the number of
authorized  shares of the Company's  Common Stock from 30,000,000 to 75,000,000.
The Board of Directors  recommends such amendment to the Company's  shareholders
for adoption.  If the amendment is adopted,  it will become  effective  upon the
filing of a  Certificate  of Amendment  of the  Company's  Restated  Articles of
Incorporation with the Secretary of State of the State of Montana. At January 4,
2000, 13,824,998 shares were issued and outstanding, 874,887 shares were subject
to  outstanding  options,  391,302  shares were  available  for future  issuance
pursuant to the  Company's  stock option plan,  leaving a balance of  14,908,813
authorized shares.

         Purpose and Effect of the Amendment

         The  principal  purpose  of  the  proposed  amendment  is to  authorize
additional  shares of Common Stock which will be available in the event that the
Board of Directors  determines that it is necessary or appropriate,  among other
things,  to effect future stock dividends or stock splits,  to raise  additional
capital  through  the sale of  securities,  to  acquire  another  company or its
business or assets through the issuance of securities.

         If  the  proposed  amendment  is  adopted,   the  aggregate  number  of
authorized  shares of Common Stock will be increased from  30,000,000  shares to
75,000,000  shares.  If the  Proposal  were  adopted,  based on the  balance  of
authorized  shares as of January 4, 2000,  59,908,813  shares would be available
for future issuance by the Board of Directors without any shareholder  approval,
except in accordance with the requirements of the Nasdaq Stock Market or Montana
law.  If the  Proposal is not  approved,  the number of  authorized  shares will
remain the same and  management  will have limited  flexibility to do the things
described  above.  Although  The Board has no immediate  plans,  understandings,
agreements or commitments to issue any of the additional shares of Common Stock,
the Board may give  consideration  to a stock  dividend or split,  depending  on
market and other business conditions,.

         There  will  be no  change  in  the  voting  rights,  dividend  rights,
liquidation  rights,  preemptive  rights  or any other  shareholder  rights as a
result of the proposed amendment.  The additional shares might be issued at such
times and under such  circumstances as to have a dilutive effect on earnings per
share and on the equity ownership of the present holders of Common Stock.

         Potential Anti-Takeover Effect

         The proposed  amendment  could,  under certain  circumstances,  have an
anti-takeover  effect,  although  this is not the  intent of the  proposal.  The
increased number of authorized  shares of Common Stock could  discourage,  or be
used to  impede,  an  attempt to  acquire  or  otherwise  change  control of the
Company.  The private placement of shares of Common Stock into "friendly" hands,
for example,  could dilute the voting strength of a party seeking control of the
Company.  Furthermore,  many companies  have issued  warrants or other rights to
acquire  additional shares of Common Stock to the holders of its Common Stock to
discourage or defeat  unsolicited  share  accumulation  programs and acquisition
proposals,  which  programs or proposals may be viewed by the Board of Directors
as not in the best  interest of the Company and its  shareholders.  Although the
Company has no present intent to use the additional  authorized shares of Common
Stock for such purposes,  if this Proposal is adopted, more capital stock of the
Company would be available for such purposes than is currently available.

         Adoption  of  the  amendment  to the  Company's  Restated  Articles  of
Incorporation  to  authorize  additional  shares of Common  Stock  requires  the
approval of a majority of the shares outstanding.  Accordingly,  a shareholder's
abstention  or failure to vote will have the same  effect as a vote  against the
Proposal. Unless otherwise marked, all properly signed and returned proxies will
be voted FOR Proposal No. 2.

                  THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR
             THE AMENDMENT OF THE RESTATED ARTICLES OF INCORPORATION
            TO AUTHORIZE 45 MILLION ADDITIONAL SHARES OF COMMON STOCK


<PAGE>


                                 PROPOSAL NO. 3

               RATIFICATION OF APPOINTMENT OF INDEPENDENT AUDITORS

         PricewaterhouseCoopers  LLP has  served  as the  Company's  independent
auditors  since  1984 and has been  appointed  by the Board to  continue  as the
Company's  independent  auditors for the Company's  fiscal year ending September
30, 2000. In the event that  ratification  of this  selection of auditors is not
approved  by a  majority  of the  shares of Common  Stock  voting at the  Annual
Meeting in person or by proxy,  management  will review its future  selection of
auditors.  A  representative  of  PricewaterhouseCoopers  LLP is  expected to be
present at the Annual Meeting.  The  representative  will have an opportunity to
make a statement and to respond to appropriate questions.

          THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR RATIFICATION OF
         THE APPOINTMENT OF PRICEWATERHOUSECOOPERS LLP AS THE COMPANY'S
                    INDEPENDENT AUDITORS FOR THE FISCAL YEAR
                           ENDING SEPTEMBER 30, 2000.


<PAGE>


                  EXECUTIVE COMPENSATION AND OTHER INFORMATION

                           Summary Compensation Table

         The following  table sets forth  information  relating to  compensation
received by the Company's  current and former Chief  Executive  Officers and the
four other most highly compensated executive officers of the Company (the "Named
Executive Officers") during the periods indicated.

<TABLE>
<CAPTION>
                                                                          Long-Term
                                                                         Compensation
                                                                          Securities
                                                                          Underlying        All Other
       Name and Principal           Year       Salary        Bonus        Options(#)       Compensation
            Position
- ------------------------------     ------     ---------     --------     ------------     --------------
<S>                                 <C>       <C>            <C>           <C>            <C>
  Raymon F. Thompson                1999      $ 150,006        --             --          $   4,971(1)
    Chairman of the Board           1998        250,010        --             --              5,000(1)
    of Directors                    1997        243,345        --             --              4,750(1)

  Fabio Gualandris(2)               1999        265,008      60,000         10,000              --
    President and Chief             1998        130,000        --          100,000          127,599(3)
    Executive Officer

  Timothy C. Dodkin(4)              1999        310,000        --             --             10,188(1)
    Managing Director               1998        413,239        --           25,000           10,313(1)
    Semitool Europe Ltd.            1997        303,536     162,749         10,000            2,620(1)

  William A. Freeman(5)             1999        180,007      40,000         10,000            5,000(1)
    Vice President and              1998         97,504        --           40,000           25,971(1)
    Chief Financial Officer

  Gregory L. Perkins                1999        160,006        --             --              5,000(1)
    Vice President and              1998        158,340        --           20,000            5,225(1)
    General Manager                 1997        147,472      60,000          7,000            3,938(1)

  Thomas Sulzbacher(6)              1999        252,231        --             --              1,500(1)
    Vice President of               1998        189,146        --           20,000            5,000(1)
    Sales and Marketing             1997        151,507      75,025         20,000            5,250(1)
</TABLE>
    --------------------------

(1)  Represents Company  contributions to the Company's 401(k) plan on behalf of
     the Named Executive  Officer,  except that amounts for Mr. Dodkin represent
     Company  contributions  to a United Kingdom  employee  benefit plan that is
     similar to the Company's 401(k) plan on behalf of Mr. Dodkin.
(2)  In July 1998, Mr. Gualandris  joined Semitool Europe,  Ltd., a wholly-owned
     subsidiary of the Company.  In October 1998,  Mr.  Gualandris was appointed
     President  and Chief  Executive  Officer of the  Company.  The fiscal  1998
     salary amount for Mr.  Gualandris  reflects  salaries  received starting in
     July of that year.
(3)  Includes  $120,000 in relocation  expenses,  $4,050 in housing expenses and
     $3,549 in car allowance paid to Mr. Gualandris.
(4)  Mr.  Dodkin's  compensation is paid in UK Pounds  Sterling.  The average UK
     Pound Sterling  exchange  rates for fiscal 1997,  1998 and 1999 were 1.638,
     1.65 and 1.63, respectively.
(5)  Includes $14,096 in relocation expenses, $6,875 in car allowance and $5,000
     in company contributions to the Company's 401(k) plan.
(6)  Mr. Sulzbacher left the Company on April 15, 1999.


<PAGE>


                        Option Grants in Last Fiscal Year

         The following table provides certain  information with respect to stock
options  granted to the Named  Executive  Officers  during the fiscal year ended
September  30, 1999.  In addition,  as required by the  Securities  and Exchange
Commission  rules, the table sets forth the hypothetical  gains that would exist
for the  respective  options  based on assumed  rates of annual  compound  price
appreciation during the option term.

<TABLE>
<CAPTION>

                                             INDIVIDUAL GRANTS
                         ----------------------------------------------------------
                                                                                       Potential Realizable Value
                          Number of       % of Total                                   at Assumed Annual Rate of
                          Securities        Options                                    Stock Price Appreciation
                          Underlying      Granted to       Exercise                               for
                           Options       Employees in      Price Per     Expiration           Option Term(1)
                                                                                       -------------------------
Name                      Granted(2)      Fiscal Year        Share          Date           5%             10%
- --------------------     ------------    ------------    ------------    ----------    -------------------------
<S>                         <C>              <C>            <C>            <C>           <C>           <C>
Raymon F. Thompson            --              0%              NA             NA            NA             NA

Fabio Gualandris            10,000           7.27%          $6.5625        3/4/09        $41,271       $104,589

Timothy C. Dodkin             --              0%              NA             NA            NA             NA

William A. Freeman          10,000           7.27%          $6.5625        3/4/09        $41,271       $104,589

Gregory L. Perkins            --              0%              NA             NA            NA             NA

Thomas Sulzbacher             --              0%              NA             NA            NA             NA
</TABLE>
- -------------------------------

(1)  Potential realizable value is determined by applying an amount equal to the
     fair market  value on the date of grant to the stated  annual  appreciation
     rate compounded annually for the remaining term of the option,  subtracting
     the exercise price at the end of the period and  multiplying  the remaining
     number by the number of shares subject to the option. Actual gains, if any,
     on stock option  exercise and Common Stock  holdings are  dependent  upon a
     number of factors,  including the future  performance  of the Common Stock,
     overall stock market  conditions,  and the timing of option  exercises,  if
     any.  There can be no  assurance  that the amounts  reflected in this table
     will be achieved.

(2)  Reflects options that have a ten year term and vest and become  exercisable
     at the rate of 5% per quarter.

                 Aggregated Option Exercises in Last Fiscal Year
                        and Fiscal Year-End Option Values

         During 1999, no named Executive Officer serving as an executive officer
at September 30, 1999, exercised options to purchase shares of the Company's
Common Stock.  The following table  discloses for each of the Named Executive
Officers certain  information  relating to options to purchase the Company's
Common Stock held at the end of the fiscal year ended September 30, 1999.

<TABLE>
<CAPTION>
                                       Number of Securities                         Value of Unexercised
                                      Underlying Unexercised                        In-the-Money Options
                                  Options at September 30, 1999(#)               at September 30, 1999($)(1)
                             ---------------------------------------------------------------------------------------

             Name                Exercisable          Unexercisable           Exercisable          Unexercisable
   ---------------------     -------------------  ---------------------   -------------------  ---------------------
<S>                                 <C>                  <C>              <C>                    <C>

   Raymon F. Thompson                None                 None            $          0           $         0

   Fabio Gualandris                 21,000               89,000                  6,000                35,250

   Timothy C. Dodkin                45,750               25,250                  4,922                   328

   William A. Freeman               13,000               37,000                  2,250                20,250

   Gregory L. Perkins               48,900               20,100                  5,797                   328

   Thomas Sulzbacher                 None                 None                       0                     0
</TABLE>
- ----------------------------

(1)  Based  on the  fair  market  value  of the  Company's  Common  Stock  as of
     September 30, 1999 of $8.8125.


Compensation Committee Interlocks and Insider Participation

         During the fiscal year ended  September 30, 1999,  Messrs.  Bateman and
Robinson  served on the  Compensation  Committee of the Board of  Directors.  No
interlocking  relationship  exists between any member of the Company's  Board of
Directors or Compensation  Committee and any member of the Board of Directors or
compensation   committee  of  any  other  company,  nor  has  such  interlocking
relationship existed in the past.


<PAGE>


                      REPORT OF THE COMPENSATION COMMITTEE
                            OF THE BOARD OF DIRECTORS

         This section is not  "soliciting  material," is not deemed "filed" with
the Commission and is not incorporated by reference in any filing of the Company
under the Securities Act of 1933, as amended, or the Securities and Exchange Act
of 1934,  as  amended,  whether  made  before  or  after  the  date  hereof  and
irrespective of any general language to the contrary.

         The   Compensation  and  Stock  Option  Committee  of  the  Board  (the
"Compensation Committee") was formed in 1995 and consists of Messrs. Bateman and
Robinson.  Decisions  concerning  the  compensation  of the Company's  executive
officers are made by the  Compensation  Committee and reviewed by the full Board
(excluding any interested director).

Executive Officer Compensation Programs

         The  objectives of the executive  officer  compensation  program are to
attract,  retain,  motivate and reward key  personnel  who possess the necessary
leadership and management skills,  through competitive base salary,  annual cash
bonus incentives, long-term incentive compensation in the form of stock options,
and various benefits, including medical and life insurance plans.

         The executive  compensation policies of the Compensation  Committee are
intended to combine  competitive  levels of  compensation  and rewards for above
average performance and to align relative  compensation with the achievements of
key business objectives,  optimal satisfaction of customers, and maximization of
shareholder  value. The Compensation  Committee believes that stock ownership by
management is  beneficial  in aligning  management  and  shareholder  interests,
thereby enhancing shareholder value.

         Base  Salaries.  Salaries  for the  Company's  executive  officers  are
determined  primarily on the basis of the  executive  officer's  responsibility,
general  salary  practices  of  peer  companies  and  the  officer's  individual
qualifications  and experience.  The base salaries are reviewed annually and may
be adjusted by the  Compensation  Committee in accordance with certain  criteria
which include individual  performance,  the functions performed by the executive
officer,  the scope of the executive officer's on-going duties,  general changes
in the  compensation  peer group in which the  Company  competes  for  executive
talent, and the Company's financial performance generally. The weight given each
such  factor  by  the  Compensation   Committee  may  vary  from  individual  to
individual.

         Incentive  Bonuses.  The  Compensation  Committee  believes that a cash
incentive bonus plan can serve to motivate the Company's  executive officers and
management to address annual  performance  goals,  using more immediate measures
for  performance  than those  reflected  in the  appreciation  in value of stock
options.  The bonus amounts are based upon  recommendations  by management and a
subjective   consideration   of  factors   including  such  officer's  level  of
responsibility,  individual performance,  contributions to the Company's success
and the Company's financial performance generally.

         Stock Option  Grants.  Stock options are granted to executive  officers
and other  employees under the Option Plan.  Because of the direct  relationship
between the value of an option and the stock price, the  Compensation  Committee
believes  that options  motivate  executive  officers to manage the Company in a
manner that is consistent with  shareholder  interests.  Stock option grants are
intended to focus the  attention  of the  recipient on the  Company's  long-term
performance  which the Company believes results in improved  shareholder  value,
and to retain the services of the executive officers in a competitive job market
by providing significant long-term earning potential. To this end, stock options
generally  vest and  become  fully  exercisable  over a  five-year  period.  The
principal factors  considered in granting stock options to executive officers of
the Company are prior performance,  level of responsibility,  other compensation
and the executive  officer's ability to influence the Company's long-term growth
and  profitability.  However,  the Option Plan does not provide any quantitative
method  for  weighting  these  factors,  and a  decision  to  grant  an award is
primarily  based  upon a  subjective  evaluation  of the past as well as  future
anticipated performance.

         Other  Compensation  Plans.  The Company has  adopted  certain  general
employee benefit plans in which executive  officers are permitted to participate
on parity with other  employees.  The Company  also  provides a 401(k)  deferred
compensation pension plan.  Benefits  under  these  general plans are indirectly
tied  to the  Company's performance.

         Deductibility of  Compensation.  Section 162(m) of the Internal Revenue
Code  ("IRC")  disallows  a deduction  by the  Company for certain  compensation
exceeding $1.0 million paid to any Named  Executive  Officer,  excluding,  among
other things,  certain performance based compensation.  Because the compensation
figures for the Named Executive Officers have not approached the limitation, the
Compensation  Committee has not had to use any of the available  exemptions from
the  deduction  limit.  However,  the Option  Plan is  designed  to qualify  any
compensation realized by Named Executive Officers from the exercise of an option
as performance based compensation.  The Compensation  Committee remains aware of
the  existence  of  the  IRC  Section  162(m)  limitations,  and  the  available
exemptions,   and  will  address  the  issue  of   deductibility   when  and  if
circumstances  warrant the use of such  exemptions  in addition to the exemption
contemplated under the Option Plan.

Chief Executive Officer Compensation

         The compensation of the Chief Executive Officer is reviewed annually on
the same basis as discussed above for all executive officers.

         Mr.  Gualandris's  base salary for the fiscal year ending September 30,
1999 was  established  at $260,000.  His base salary was  established in part by
comparing the base salaries of chief  executive  officers at other  companies of
similar size. Mr.  Gualandris's base salary is at the approximate  median of the
base  salary  range  for  Presidents/Chief   Executive  Officers  of  comparable
companies.  Mr.  Gualandris  received stock options to purchase 10,000 shares of
the  Company's  Common Stock during  fiscal year 1999 and he received a bonus of
$60,000.

                                    MEMBERS OF THE COMPENSATION COMMITTEE

                                    Howard E. Bateman
                                    Calvin S. Robinson


<PAGE>


                              CERTAIN TRANSACTIONS

         The   following  is  a   description   of  certain   transactions   and
relationships  entered into or existing  during the fiscal year ended  September
30,  1999  between  the Company  and  certain  affiliated  parties.  The Company
believes  that the  terms of such  transactions  were no less  favorable  to the
Company than could have been obtained from an unaffiliated party.

         During the fiscal year ended  September  30, 1999,  the Company  leased
airplanes from Raymon F.  Thompson.  Under these lease  agreements,  the Company
made rental  payments to Raymon F.  Thompson of $474,000  during the fiscal year
ended  September 30, 1999. The Company  currently  leases two airplanes from Mr.
Thompson  with a total  monthly  rental  charge of  $57,000.  The lease  term is
month-to-month.  The  terms of the lease  agreement  were  based on quotes  from
independent aircraft leasing dealers for the same type of aircraft.  The Company
believes  that these  lease  agreements  are on terms no less  favorable  to the
Company than could have been obtained from an unaffiliated party.


<PAGE>


                             STOCK PERFORMANCE GRAPH

         The following  graph compares the  percentage  change in the cumulative
total  shareholder  return on the Company's  Common Stock from February 2, 1995,
the  date of the  Company's  initial  public  offering,  through  the end of the
Company's  fiscal year ended September 30, 1999,  with the percentage  change in
the cumulative total return for the Nasdaq Composite Index (U.S.  Companies) and
the Hambrecht & Quist Semiconductor  Index. The comparison assumes an investment
of $100 on February  2, 1995 in the  Company's  Common  STOCK AND IN EACH OF THE
FOREGOING INDICES AND ASSUMES  REINVESTMENT OF DIVIDENDS.  THE STOCK PERFORMANCE
SHOWN  ON THE  GRAPH  BELOW  IS  NOT  NECESSARILY  INDICATIVE  OF  FUTURE  PRICE
PERFORMANCE.

                      STOCK PERFORMANCE GRAPH APPEARS HERE

                 COMPARISON OF 56 MONTH CUMULATIVE TOTAL RETURN

           AMONG SEMITOOL, INC., THE NASDAQ STOCK MARKET (U.S.) INDEX

                 AND THE HAMBRECHT & QUIST SEMICONDUCTORS INDEX

Following is a listing of each of the plot points illustrated in the graph:

<TABLE>
<CAPTION>

<S>                              <C>       <C>       <C>       <C>       <C>       <C>
DOLLARS                          Feb-95    Sep-95    Sep-96    Sep-97    Sep-98    Sep-99


SEMITOOL, INC.                      100       288       137       290        68       102


NASDAQ STOCK MARKET (U.S.)          100       137       163       224       228       370


HAMBRECHT & QUIST SEMICONDUCTORS    100       182       136       272       155       424

</TABLE>


<PAGE>


                              SHAREHOLDER PROPOSALS

         To be  considered  for  presentation  to  the  annual  meeting  of  the
Company's  shareholders  to be held in  2001,  a  shareholder  proposal  must be
received by Mr. William A. Freeman,  Chief Financial  Officer,  655 West Reserve
Drive, Kalispell, Montana 59901, no later than September 22, 2000.

                      SHAREHOLDER NOMINATIONS FOR DIRECTOR

         Pursuant to the Company's  bylaws,  nominations of persons for election
to the  Board of  Directors  may be made at a  meeting  of  shareholders  by any
shareholder  entitled to vote for the  election of  directors at the meeting who
complies with the notice  procedures.  Such nominations must be made pursuant to
timely  notice in writing  to the  Secretary  of the  Company.  To be timely,  a
shareholder's  notice  must  be  delivered  to or  mailed  and  received  at the
principal  executive  offices of the  Company  not less than sixty days nor more
than ninety days prior to the first  anniversary of the preceeding year's annual
meeting;  provided,  however,  that in the  event  that the  date of the  annual
meeting is  advanced by more than thirty days or delayed by more than sixty days
from  such  anniversary,  notice  by the  shareholder  to be  timely  must be so
received not earlier than the ninetieth day prior to such annual meeting and not
later than the close of business on the later of (1) the  sixtieth  day prior to
such annual  meeting,  or (2) tenth day following the day on which notice of the
date of the  meeting was mailed or such public  disclosure  was made,  whichever
occurs first.

         Such shareholder's notice must set forth (a) as to each person whom the
shareholder proposes to nominate for election or re-election as a director,  (i)
the name, age,  business address and residence  address of the person,  (ii) the
principal  occupation or employment of the person, (iii) the class and number of
shares of the Company which are beneficially  owned by the person,  and (iv) any
other  information  relating to the person that is required to be  disclosed  in
solicitations  for proxies for election of directors  pursuant to Rule 14a under
the Securities  Exchange Act of 1934; and (b) as to the  shareholder  giving the
notice,  (i) the name and record address of the shareholder,  and (ii) the class
and  number of shares of the  corporation  which are  beneficially  owned by the
shareholder.  The Company may require any proposed nominee to furnish such other
information  as may  reasonably  be  required by the  Company to  determine  the
eligibility of such proposed nominee to serve as a director of the Company.

                                  OTHER MATTERS

         SECTION 16(A) BENEFICIAL OWNERSHIP REPORTING COMPLIANCE.  Section 16(a)
of the Exchange Act requires the  Company's  directors,  executive  officers and
persons  who own more  than 10% of the  Company's  Common  Stock  (collectively,
"Reporting  Persons") to file  reports of ownership  and changes in ownership of
the Company's  Common Stock.  Reporting  Persons are required by Securities  and
Exchange  Commission  regulations  to furnish  the  Company  with  copies of all
Section  16(a)  reports  they file.  Based solely on its review of the copies of
such reports received or written representations from certain Reporting Persons,
the Company  believes that during the fiscal year ended  September 30, 1999, all
Reporting  Persons  complied with all applicable  filing  requirements  with the
exception  of one late  Form 3 filing  with respect to one transaction  each for
Kazuyo N. Heinink and Gary L. Spray.

         OTHER MATTERS.  The Board of Directors knows of no other business which
will be  presented  at the Annual  Meeting.  If any other  business  is properly
brought before the Annual  Meeting,  it is intended that proxies in the enclosed
form will be voted in respect  thereof in  accordance  with the judgments of the
persons voting the proxies.

         It is  important  that the proxies be returned  promptly  and that your
shares  be  represented.  Shareholders  are  urged to mark,  date,  execute  and
promptly return the accompanying proxy card in the enclosed envelope.

                                      By Order of the Board of Directors,


                                      Raymon F. Thompson
                                      Chairman of the Board


<PAGE>


                                      PROXY
                                 SEMITOOL, INC.

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                      FOR THE ANNUAL MEETING TO BE HELD ON
                                February 8, 2000

         RAYMON F. THOMPSON AND WILLIAM A. FREEMAN, or either of them, each with
the power of  substitution,  are hereby  authorized  to  represent  and vote the
shares of the  undersigned,  with all the  powers  which the  undersigned  would
possess if  personally  present,  at the Annual  Meeting of Semitool,  Inc. (the
"Company"),  to be held on February 8, 2000, and any adjournment or postponement
thereof.

         Election of all directors (or if any nominee is not available for
election, such  substitute as the Board of DIRECTORS OR THE PROXY HOLDERS MAY
DESIGNATE).  NOMINEES:  (01) RAYMON F.  THOMPSON,  (02) HOWARD E.  BATEMAN,
(03)  RICHARD A. DASEN, (04) DANIEL J. EIGEMAN, (05) CALVIN S. ROBINSON AND
(06) TIMOTHY C. DODKIN.

BOARD OF DIRECTORS'  RECOMMENDATIONS:  The Board of Directors  recommends a vote
FOR the election of Directors, FOR approval of the ratification of the amendment
to the Company's  Restated Articles of Incorporation and FOR ratification of the
appointment of PricewaterhouseCoopers  LLP as the Company's independent auditors
for the fiscal year ending September 30, 2000.

If you wish to vote in accordance  with the Board of Directors'  recommendations
you need not mark any boxes, just sign and date on the reverse side.

SEE REVERSE        CONTINUED AND TO BE SIGNED ON REVERSE SIDE        SEE REVERSE
   SIDE                                                                 SIDE


<PAGE>


[FORM OF BACK OF PROXY CARD]

- --------------------------------------- ----------------------------------------

Vote by Telephone                       Vote by Internet

It's fast, convenient, and immediate!   It's fast, convenient,  and your vote is
Call Toll-Free on a Touch-Tone Phone    immediately confirmed and posted
1-877-PRX-VOTE (1-877-779-8683).

Follow these four easy steps:           Follow these four easy steps:

1. Read the accompanying Proxy          1. Read the accompanying Proxy
   Statement/Prospectus and Proxy Card     Statement/Prospectus and Proxy Card.

2. Call the toll-free number            2. Go  to  the   Website
   1-877-PRX-VOTE (1-877-779-8683).        http://www.eproxyvote.com/smtl
   For shareholders residing outside
   the United States call collect on a
   touch-tone phone 1-201-536-8073

3. Enter your 14-digit Voter Control    3. Enter your14-digit Voter Control
   Number located on your Proxy Card       Number located on your Proxy Card
   above your name.                        above your name.

4. Follow the recorded instructions     4. Follow the instructions provided.

Your vote is important!                 Your vote is important!
Call 1-877-PRX-VOTE anytime!            Go to http://www.eproxyvote.com/smtl
                                        anytime!

- --------------------------------------- ----------------------------------------



    Do not return your Proxy Card if you are voting by Telephone or Internet

                                   DETACH HERE

    |X|  Please mark
         votes as in
         this example.

     Shares represented by this proxy
will be voted as directed by the        3. To ratify the appointment of
shareholder.  If no such directions        PricewaterhouseCoopers LLP as the
are indicated,  the Proxies will have      Company's independent auditors for
authority to vote FOR the election of      the fiscal year ending September 30,
all directors and FOR proposals            2000:
2 and 3.  In their discretion, the           [ ]FOR   [ ]AGAINST   [ ]ABSTAIN
Proxies are authorized to vote upon
such other business as may properly
come before the Annual Meeting.
                                        Mark here for address change and note
                                        at left [  ]

1. Election of Directors (see reverse):

    [ ] FOR         [ ] WITHHELD

    [ ]------------------------------
       For all nominees except as       PLEASE MARK, SIGN, DATE AND RETURN THIS
       noted above                      PROXY CARD PROMPTLY USING THE ENCLOSED
                                        REPLY ENVELOPE
2. Amendment to the Company's Restated
   Articles of Incorporation.  To
   approve an amendment to the          Please sign and date where indicated.
   Company's Restated Articles of       Joint owners should each sign.  When
   Incorporation to increase the        signing as attorney, executor,
   authorized number of shares of the   administrator, trustee or guardian,
   Company's capital stock.             please give full title as such.

    [ ]FOR   [ ]AGAINST   [ ] ABSTAIN

                                        Signature_______________________________
                                        Date______________

                                        Signature_______________________________
                                        Date______________



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