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                                                                    EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

    We hereby consent to the incorporation by reference in this Registration
Statement on Form S-3 of our report dated November 3, 1999 relating to the
consolidated financial statements and financial statement schedule, which
appears in Semitool, Inc.'s Annual Report on Form 10-K for the year ended
September 30, 1999. We also consent to the reference to us under the heading
"Experts" in such Registration Statement.

/s/ PricewaterhouseCoopers LLP

PricewaterhouseCoopers LLP
Boise, Idaho
September 21, 2000



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