INTEGRATED MEASUREMENT SYSTEMS INC /OR/
DEF 14A, 1998-04-03
INSTRUMENTS FOR MEAS & TESTING OF ELECTRICITY & ELEC SIGNALS
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<PAGE>
                            SCHEDULE 14A INFORMATION
 
                  Proxy Statement Pursuant to Section 14(a) of
            the Securities Exchange Act of 1934 (Amendment No.    )
 
    Filed by the Registrant /X/
    Filed by a Party other than the Registrant / /
 
    Check the appropriate box:
    / /  Preliminary Proxy Statement
    / /  Confidential, for Use of the Commission Only (as permitted by Rule
         14a-6(e)(2))
    /X/  Definitive Proxy Statement
    / /  Definitive Additional Materials
    / /  Soliciting Material Pursuant to Section 240.14a-11(c) or
         Section 240.14a-12
 
                           INTEGRATED MEASUREMENT SYSTEMS, INC.
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)
 
- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)
 
Payment of Filing Fee (Check the appropriate box):
 
/X/  No fee required.
/ /  Fee computed on table below per Exchange Act Rules 14a-6(i)(1)
     and 0-11.
     (1) Title of each class of securities to which transaction applies:
         -----------------------------------------------------------------------
     (2) Aggregate number of securities to which transaction applies:
         -----------------------------------------------------------------------
     (3) Per unit price or other underlying value of transaction computed
         pursuant to Exchange Act Rule 0-11 (set forth the amount on which the
         filing fee is calculated and state how it was determined):
         -----------------------------------------------------------------------
     (4) Proposed maximum aggregate value of transaction:
         -----------------------------------------------------------------------
     (5) Total fee paid:
         -----------------------------------------------------------------------
/ /  Fee paid previously with preliminary materials.
/ /  Check box if any part of the fee is offset as provided by Exchange Act Rule
     0-11(a)(2) and identify the filing for which the offsetting fee was paid
     previously. Identify the previous filing by registration statement number,
     or the Form or Schedule and the date of its filing.
     (1) Amount Previously Paid:
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<PAGE>

                      INTEGRATED MEASUREMENT SYSTEMS, INC.

                            9525 S.W. GEMINI DRIVE
                             BEAVERTON, OR 97008
                                (503) 626-7117
                            ---------------------

                   NOTICE OF ANNUAL MEETING OF SHAREHOLDERS

                          TO BE HELD ON MAY 5, 1998
                            ---------------------

To the Shareholders of
Integrated Measurement Systems, Inc.:

     NOTICE IS HEREBY GIVEN that the annual meeting of shareholders (the 
"Annual Meeting") of Integrated Measurement Systems, Inc. (the "Company") 
will be held on Tuesday, May 5, 1998, at 10:00 a.m., local time, at the 
Embassy Suites, 9000 S.W. Washington Square Road, Tigard, Oregon 97223, for 
the following purposes:

1.   ELECTION OF DIRECTORS.  To elect two directors, each to serve for a 
     three-year term and until their successors are duly elected and 
     qualified;

2.   APPROVAL OF AMENDMENT TO THE COMPANY'S 1995 STOCK INCENTIVE PLAN.  To 
     approve an amendment to the Integrated Measurement Systems, Inc. 1995 
     Stock Incentive Plan;

3.   RATIFICATION OF APPOINTMENT OF AUDITORS.  To ratify the appointment by 
     the Board of Directors of Arthur Andersen LLP as independent auditors of 
     the Company for the fiscal year ending December 31, 1998; and

4.   OTHER BUSINESS.  To transact such other business as may properly come 
     before the meeting or any adjournments or postponements thereof.

     The Board of Directors of the Company has fixed the close of business on 
March 13, 1998 as the record date for the determination of shareholders 
entitled to notice of and to vote at the Annual Meeting.  Only shareholders 
of record at the close of business on that date will be entitled to notice of 
and to vote at the Annual Meeting or any adjournments thereof.

                                By Order of the Board of Directors,


                                Keith L. Barnes
                                PRESIDENT AND CHIEF EXECUTIVE OFFICER
Beaverton, Oregon
April 6, 1998

IT IS IMPORTANT THAT PROXIES BE RETURNED PROMPTLY.  THEREFORE, WHETHER OR NOT 
YOU PLAN TO BE PRESENT IN PERSON AT THE ANNUAL MEETING, PLEASE COMPLETE, DATE 
AND SIGN THE ENCLOSED PROXY AND RETURN IT IN THE ENCLOSED ENVELOPE, WHICH 
REQUIRES NO POSTAGE IF MAILED IN THE UNITED STATES.

<PAGE>

                     INTEGRATED MEASUREMENT SYSTEMS, INC.
                            9525 S.W. GEMINI DRIVE
                             BEAVERTON, OR 97008
                                (503) 626-7117
                            ---------------------

                               PROXY STATEMENT
                                     FOR
                        ANNUAL MEETING OF SHAREHOLDERS
                          TO BE HELD ON MAY 5, 1998
                            ---------------------

                                INTRODUCTION

GENERAL

     This Proxy Statement is being furnished to the shareholders of 
Integrated Measurement Systems, Inc., an Oregon corporation ("IMS" or the 
"Company"), as part of the solicitation of proxies by the Company's Board of 
Directors (the "Board of Directors") from holders of the outstanding shares 
of IMS common stock, par value of $0.01 per share (the "Common Stock"), for 
use at the Company's Annual Meeting of Shareholders to be held at 10:00 a.m. 
on May 5, 1998, and at any adjournments or postponements thereof (the "Annual 
Meeting"). At the Annual Meeting, shareholders will be asked to elect two 
members of the Company's Board of Directors, approve an amendment to the 
Company's 1995 Stock Incentive Plan, ratify the appointment by the Board of 
Directors of Arthur Andersen LLP as independent auditors of the Company for 
the fiscal year ending December 31, 1998, and transact such other business as 
may properly come before the meeting or any adjournments or postponements 
thereof.  This Proxy Statement, together with the enclosed proxy card, is 
first being mailed to shareholders of IMS on or about April 6, 1998.

SOLICITATION, VOTING AND REVOCABILITY OF PROXIES

     The Board of Directors has fixed the close of business on March 13, 1998 
as the record date for the determination of the shareholders entitled to 
notice of and to vote at the Annual Meeting.  Accordingly, only holders of 
record of shares of Common Stock at the close of business on such date will 
be entitled to vote at the Annual Meeting, with each such share entitling its 
owner to one vote on all matters properly presented at the Annual Meeting.  
On the record date, there were approximately 1,990 beneficial holders of the 
7,541,130 shares of Common Stock then outstanding.  The presence, in person 
or by proxy, of a majority of the total number of outstanding shares of 
Common Stock entitled to vote at the  Annual Meeting is necessary to 
constitute a quorum at the Annual Meeting.

     If the enclosed form of proxy is properly executed and returned in time 
to be voted at the Annual Meeting, the shares represented thereby will be 
voted in accordance with the instructions marked thereon.  EXECUTED BUT 
UNMARKED PROXIES WILL BE VOTED FOR THE ELECTION OF THE TWO NOMINEES FOR 
ELECTION TO THE BOARD OF DIRECTORS, FOR THE APPROVAL OF THE PROPOSED 
AMENDMENT TO THE COMPANY'S 1995 STOCK INCENTIVE PLAN AND FOR THE RATIFICATION 
OF THE APPOINTMENT OF ARTHUR ANDERSEN LLP AS THE COMPANY'S INDEPENDENT 
AUDITORS FOR THE FISCAL YEAR ENDING DECEMBER 31, 1998.  The Board of 
Directors does not know of any matters other than those described in the 
Notice of Annual Meeting of Shareholders that are to come before the Annual 
Meeting.  If any other matters are properly brought before the Annual 
Meeting, the persons named in the proxy will vote the shares represented by 
such proxy upon such matters as determined by a majority of the Board of 
Directors.


<PAGE>

     Shareholders who execute proxies retain the right to revoke them at any 
time prior to the exercise of the powers conferred thereby by filing a 
written notice of revocation with, or by delivering a duly executed proxy 
bearing a later date to, Corporate Secretary, Integrated Measurement Systems, 
Inc., 9525 S.W. Gemini Drive, Beaverton, Oregon 97008, or by attending the 
Annual Meeting and voting in person.  All valid, unrevoked proxies will be 
voted at the Annual Meeting.

                            ELECTION OF DIRECTORS

     At the Annual Meeting, two directors will be elected, each for a 
three-year term and until their successors are duly elected and qualified.  
Unless otherwise specified on the proxy, it is the intention of the persons 
named in the proxy to vote the shares represented by each properly executed 
proxy for the election of the nominees named below.  The Board of Directors 
believes that the nominees will stand for election and will serve as 
directors if elected. However, if any of the persons nominated by the Board 
of Directors fails to stand for election or is unable to accept election, the 
proxies will be voted for the election of such other persons as the Board of 
Directors may recommend.

     Under the Company's Articles of Incorporation, the directors are divided 
into three classes and, after a transitional period, will serve for terms of 
three years, with one class being elected by the shareholders each year.  The 
term of office of only one class of directors expires in each year, and their 
successors are elected for terms of three years and until their successors 
are duly elected and qualified.  There is no cumulative voting for election 
of directors.

     INFORMATION AS TO NOMINEES AND CONTINUING DIRECTORS.  The following 
table sets forth the names of the Board of Directors' nominees for election 
as a director and those directors who will continue to serve after the Annual 
Meeting.  Also set forth is certain other information with respect to each 
such person's age at April 6, 1998, principal occupation or employment during 
the past five years, the periods during which he has served as a director of 
IMS and positions currently held with IMS.

<TABLE>
<CAPTION>
                                   Director     Expiration
                            Age     Since         of Term     Positions held with IMS
                            ---    --------     ----------    -----------------------
  <S>                       <C>    <C>          <C>           <C>
  NOMINEES:
   Keith L. Barnes          46      1989           1998       President, Chief Executive 
                                                              Officer and Director
   C. Scott Gibson          45      1995           1998       Director

  CONTINUING DIRECTORS:
   James M. Hurd            49      1995           1999       Director
   James E. Solomon         61      1995           1999       Director
   H. Raymond Bingham       52      1993           2000       Chairman of the Board
   Milton R. Smith          62      1997           2000       Director
</TABLE>

     KEITH L. BARNES.  Mr Barnes has been the Company's Chief Executive 
Officer since May 1995, the Company's President since April 1991 and became a 
director of the Company in 1989.  Mr. Barnes is a member of the Board of 
Trustees for the Oregon Graduate Institute of Science and Technology.  Mr. 
Barnes is a director of Data I/O Corporation, a public company that provides 
programming and handling equipment for the design and manufacture of 
programmable integrated circuits. Mr. Barnes is a director of VXI 
Electronics, a private manufacturer of power systems modules.


                                      2
<PAGE>

     C. SCOTT GIBSON.  Mr. Gibson has served as a director of the Company 
since May 1995.  Mr. Gibson co-founded Sequent Computer Systems, Inc., a 
computer system supplier, in 1983 and served as Sequent's President from 1988 
through March 1992.  Prior to forming Sequent Computer Systems, Mr. Gibson 
was General Manager of Intel's Memory Components Operation.  Mr. Gibson 
serves as a director of Adaptive Solutions, Inc., Inference Corp., Radisys 
Corporation and Triquint Semiconductor, Inc., which are public companies.  
Mr. Gibson also serves as Chairman of the Oregon Graduate Institute of 
Science and Technology and as a director of several privately held technology 
companies.

     JAMES M. HURD.  Mr. Hurd has served as a director of the Company since 
May 1995.  Mr. Hurd co-founded Planar Systems, Inc., a publicly traded 
manufacturer of high performance information displays and has served as its 
President and Chief Executive Officer since 1983.  Mr. Hurd is also a 
director of Planar Systems, Inc.  Mr. Hurd is a member of the Board of 
Trustees for the Oregon Graduate Institute of Science and Technology.

     JAMES E. SOLOMON.  Mr. Solomon has served as a director of the Company 
since April, 1995.  Mr. Solomon currently serves as President and Chief 
Executive Officer of XULU Entertainment, Inc.  Mr. Solomon served a Senior 
Vice President and Chief Technology Officer for Cadence Design Systems, Inc. 
("Cadence") from February 1994 to May 1996.  Mr. Solomon has served as Senior 
Vice President and General Manager of Cadence's Analog Division from June 
1989 to February 1994 and as President of Cadence's Analog Division from 
December 1988 until May 1989.  Mr. Solomon is also the Chairman of the Board 
of Smart Machines, Inc. and XULU Entertainment, Inc., private companies.

     H. RAYMOND BINGHAM.  Mr. Bingham has been a director of the Company 
since 1993 and Chairman of the Board since May 1995.  Mr. Bingham joined 
Cadence in June 1993 as Executive Vice President and Chief Financial Officer. 
From June 1985 to May 1993 he served as Executive Vice President and Chief 
Financial Officer of Red Lion Hotels and Inns, which owned and operated a 
chain of hotels. Mr. Bingham serves as a director of Sunstone Hotel Investors 
Inc., Cadence and Innotech.

     MILTON R. SMITH.  Mr. Smith has been a director of the Company since 
1997. Mr. Smith currently serves as President of Smith Investments, a private 
investing and consulting firm.  From September 1994 to February 1995 Mr. 
Smith served as President and Chief Executive Officer of Zeelan Technology, 
Inc., a software company.  Mr. Smith was co-founder of and from October 1992 
to May 1994 served as President and Chief Executive Officer of ThrustMaster, 
Inc., a manufacturer of interactive control devices for personal computers.  
From September 1992 to January 1993, Mr. Smith held executive positions with 
two software companies, Test System Strategies, Inc. and Analogy, Inc.  Mr. 
Smith was co-founder of and from October 1986 until January 1992, held at 
various times the positions of Chairman of the Board, President and Chief 
Executive Officer of Floating Point Systems, Inc.  Mr. Smith serves on the 
Board of Directors of ThrustMaster, Inc., a public company, and TFR 
Technologies, Inc., a private company.

     BOARD OF DIRECTORS COMMITTEES AND NOMINATIONS BY SHAREHOLDERS.  The 
Board of Directors acts as a nominating committee for selecting nominees for 
election as directors.  The Company's bylaws also permit shareholders to make 
nominations for the election of directors, if such nominations are made 
pursuant to timely notice in writing to the Company's Secretary.  To be 
timely, notice must be delivered to, or mailed to and received at, the 
principal executive offices of the Company not less than 60 days nor more 
than 90 days prior to the date of the meeting, provided that at least 60 
days' notice or prior public disclosure of the date of the meeting is given 
or made to shareholders.  If less than 60 days' notice or prior public 
disclosure of the date of the meeting is given or made to shareholders, 
notice by the shareholder must be received by the Company not later than the 
close of business on the tenth day following the date on which such notice of 
the date of the meeting was mailed or such public disclosure 


                                     3
<PAGE>

was made.  A shareholder's notice of nomination must also set forth certain 
information specified in Article III, Section 3.16 of the Company's bylaws 
concerning each person the shareholder proposes to nominate for election and 
the nominating shareholder.

     During 1997 the Company's Board of Directors held four meetings.  Each 
incumbent director attended more than 75% of the aggregate of the total 
number of meetings held by the Board of Directors and the total number of 
meetings held by all committees of the Board on which he served during the 
period that he served.

     The Board of Directors has a standing Audit Committee which, during the 
fiscal year ended December 31, 1997, conducted two meetings.  The members of 
the Audit Committee currently are Messrs. Bingham, Gibson and Smith.  The 
Audit Committee reviews the scope of the independent annual audit and the 
independent public accountants' letter to the Board of Directors concerning 
the effectiveness of the Company's internal financial and accounting controls 
and the Board of Directors' response to that letter, if deemed necessary.  
The Board of Directors also has a Compensation Committee which reviews 
executive compensation and establishes executive compensation levels and  
also administers the Company's stock option plans and the 1995 Employee Stock 
Purchase Plan. During the fiscal year ended December 31, 1997, the 
Compensation Committee held five meetings.  The members of the Compensation 
Committee currently are Messrs. Gibson, Hurd and Smith.

     See "Management - Executive Compensation" for certain information 
regarding compensation of directors.

     THE BOARD OF DIRECTORS UNANIMOUSLY RECOMMENDS THAT SHAREHOLDERS VOTE FOR 
THE ELECTION OF ITS NOMINEES NAMED IN THIS PROXY STATEMENT.  If a quorum is 
present, the Company's bylaws provide that directors are elected by a 
plurality of the votes cast by the shares entitled to vote.  Abstentions and 
broker non-votes are counted for purposes of determining whether a quorum 
exists at the Annual Meeting, but are not counted and have no effect on the 
determination of whether a plurality exists with respect to a given nominee.


                                      4
<PAGE>

                                   MANAGEMENT

EXECUTIVE OFFICERS

     The following table sets forth certain information with respect to the 
executive officers of the Company.

<TABLE>
<CAPTION>
Name                 Age   Position
- ----                 ---   --------
<S>                  <C>   <C>
Keith L. Barnes       46   President, Chief Executive Officer and Director
Sar Ramadan           55   Chief Financial Officer, Secretary and Treasurer
Mark Allison          41   Vice President, Marketing
W. Barry Baril        46   Vice President, Engineering
David L. Brinker      47   General Manager, Test Software Division
James P. Fraine       42   Vice President, Sales
Donald E. Grant       56   Vice President, Operations
Gwyn Harvey           44   Director of Human Resources
Kenneth R. Lindsay    53   Vice President, Asia Operations
</TABLE>

     Information concerning the principal occupation of Mr. Barnes is set 
forth under the heading "Election of Directors."  Information concerning the 
principal occupation during at least the last five years of the executive 
officers of the Company who are not also directors of the Company is set 
forth below.

     SAR RAMADAN.  Mr. Ramadan joined the  Company in 1993 as Chief Financial 
Officer and was elected Secretary and Treasurer in 1995.  Prior to joining 
IMS, Mr. Ramadan held the positions of Finance Director and Chief Accounting 
Officer of Mentor Graphics Corp., a supplier of EDA software, from 1987 to 
1993.  In addition he was Vice President of Finance for CAD/CAM Resources 
Inc., between 1985 and 1987, and Vice President Group Controller at 
Computervision Corporation, a computer aided mechanical design business, from 
1979 to 1985.

     MARK ALLISON.  Mr. Allison joined the Company in November 1995 as Vice 
President of Marketing.  Prior to joining the Company, Mr. Allison was 
Director of Memory Marketing for Credence Corporation during 1995 and 
Director of Marketing for Megatest Corporation, from 1985 to 1995.  Both 
companies are ATE manufacturers.

     W. BARRY BARIL.  Mr. Baril is a founder of the Company, and has been the 
Vice President of Engineering since the Company's inception in 1983. 
Previously, Mr. Baril was Engineering Group Manager for the Logic Analyzer 
Division of Tektronix, a high technology company, for one year, Hybrid 
Circuit Project Manager and Group Leader for three years in Tektronix labs, 
and a Hybrid Circuit Project Manager and Design Engineer for four years at 
Burr Brown, an analog integrated circuit company.

     DAVID L. BRINKER.  Mr. Brinker joined the Company in December 1996 as 
General Manager, Test Software Division.  Prior to joining the Company, Mr. 
Brinker was President and Chief Executive Officer of TView, Inc., a 
multimedia hardware company.  From 1994 to July 1996, Mr. Brinker was Chief 
Financial Officer of Summit Design Systems, a supplier of EDA software.  
Between 1986 and 1994, Mr. Brinker held a variety of positions with Mentor 
Graphics, a supplier of EDA software, including Vice President of Worldwide 
Sales, Vice President of International Sales and Vice President of Asia.


                                      5
<PAGE>

     JAMES P. FRAINE.  Mr. Fraine joined the Company in 1994 as Vice 
President of Sales.  Prior to joining the Company, he was the National Sales 
Manager at Teradyne, Inc., an ATE company, from 1989 to 1994 and held the 
position of Account Manager at GenRad, Inc. from 1976 to 1986.  In addition,  
Mr. Fraine has held several sales and marketing positions at STS/Axiom 
Technology, Inc., a mixed signal test equipment company.

     DONALD E. GRANT.  Mr. Grant joined the Company in 1989 as Vice President 
of Operations.  Prior to joining the Company, Mr. Grant was Director of 
Manufacturing at Protocol Systems, Inc., a medical device manufacturer, from 
1986 to 1989, and Director of Operations at Kentrox Industries from 1983 to 
1986.  Mr. Grant held various manufacturing positions with Hewlett Packard 
from 1972 to 1983.

     GWYN HARVEY.  Ms. Harvey joined the Company in 1987 as Director of Human 
Resources.  Prior to joining the Company, Ms. Harvey worked in a variety of 
human resources management and professional positions with Metheus 
Corporation, Computervision Corporation, Metheus-Computervision, Inc., 
Sierracin-EOI and Fairchild, a Schlumberger Company.

     KENNETH R. LINDSAY.  Mr. Lindsay is a founder of the Company, and has 
served as Vice President of Asia Operations since 1992, Asian Business 
Manager from 1989 to 1992 and Vice President and Director of Marketing from 
1983 to 1989.  Prior to joining the Company, Mr. Lindsay was Worldwide 
Marketing Manager for the Semiconductor Test Systems Division of Tektronix, 
and also held other marketing, management, and engineering positions at 
Tektronix.


                                      6
<PAGE>
                            EXECUTIVE COMPENSATION

SUMMARY OF CASH AND CERTAIN OTHER COMPENSATION

     The following table provides certain summary information for the fiscal 
years ended December 31, 1995, 1996 and 1997 concerning compensation of the 
Company's Chief Executive Officer and each of the four other most highly 
compensated executive officers of the Company for the fiscal year ended 
December 31, 1997 (collectively, the "named executive officers").

                          SUMMARY COMPENSATION TABLE

<TABLE>
<CAPTION>
                                                                                               Long-Term
                                                     Annual Compensation                     Compensation
                                                  -------------------------                  -------------
                                                                           Other Annual      Stock Options        All Other
 Name and Principal Position        Year          Salary       Bonus       Compensation         Granted         Compensation
 ---------------------------        ----          ------       -----       ------------      -------------      ------------
<S>                                 <C>          <C>          <C>          <C>               <C>                <C>
Keith L. Barnes . . . . . . . . .   1995         $195,000     $98,886       $11,538(1)            84,000          $7,654(2)
President and Chief Executive       1996          200,000     139,250        12,939(3)           120,000           6,000(4)
Officer                             1997          237,500      52,000        13,467(3)           180,448           6,000(4)

David L. Brinker  . . . . . . . .   1995               --          --              --                 --                --
General Manager, Test Software      1996              500          --              --             50,000                --
Division                            1997          130,000      51,938              --             25,000             731(5)

Sar Ramadan . . . . . . . . . . .   1995          112,250      32,246              --             47,000           2,223(5)
Chief Financial Officer             1996          127,744      41,909              --             10,000           2,130(5)
                                    1997          138,250      23,580              --             95,000(6)        1,630(5)

James P. Fraine . . . . . . . . .   1995          132,250          --        83,101(7)            14,000           7,331(5)
Vice President, Sales               1996          136,458          --        86,400(7)             7,000           1,439(5)
                                    1997          139,580       9,698        54,589(7)            20,000(6)          467(5)

Donald E. Grant . . . . . . . . .   1995          102,302      25,705         4,000(1)            47,000             891(5)
Vice President, Operations          1996          116,000      31,844              --             10,000           2,604(5)
                                    1997          131,250      15,300              --             70,000(6)        3,027(5)
</TABLE>
- ------------------

(1)  Reflects a cash payment in lieu of vacation
(2)  Represents automobile allowance and Company payments of additional 
     insurance premiums
(3)  Represents Company reimbursements for organization dues, Company 
     payments of additional insurance premiums and reimbursement of certain 
     travel expenses.
(4)  Represents automobile allowance.
(5)  Represents Company payments of additional insurance premiums and, in 
     certain cases, reimbursement of certain travel expenses.
(6)  Includes the issuance of 40,000, 10,000 and 30,000 options to Messrs. 
     Ramadan, Fraine and Grant, respectively, that were subsequently 
     cancelled in connection with the grant of replacement options.  
     Consequently, of the numbers reported above only 55,000, 10,000 and 
     40,000 of the options granted during 1997 continue to be held by 
     Messrs. Ramadan, Fraine and Grant, respectively. See "Executive 
     Compensation - Stock Option Grants" and "10-Year Option Repricings."
(7)  Represents sales commissions.


                                      7
<PAGE>

STOCK OPTION GRANTS

     The following table sets forth certain information concerning stock 
options granted to the named executive officers during the year ended 
December 31, 1997 under the Company's 1995 Stock Incentive Plan.

                      OPTION GRANTS IN LAST FISCAL YEAR

<TABLE>
<CAPTION>
                                                                                                           Potential Realizable
                                            Number of      Percent of                                        Value at Assumed
                                           Securities     Total Options                                    Annual Rates of Stock
                                           Underlying      Granted to      Exercise                       Price Appreciation for
                                             Options      Employees in     Price Per     Expiration           Option Term(3)
                                           Granted(1)      Fiscal 1997     Share(2)         Date              5%           10%
                                           ----------     -------------    ---------     ----------        -------       -------
  Name
  ----
  <S>                                      <C>            <C>              <C>           <C>               <C>          <C>

  Keith L. Barnes . . . . . . . . . .       45,112              7%          $11.75           7/2/07        $333,356     $ 844,789
                                            45,112(4)           7%           11.75           7/2/07         333,356       844,789
                                            90,224(5)          14%           11.75           7/2/07         666,712     1,689,578

  David L. Brinker  . . . . . . . . .       25,000              4%           13.00           4/2/07         204,391       517,966

  Sar Ramadan . . . . . . . . . . . .       40,000(6)           6%           18.50          1/13/07         465,382     1,179,369
                                            40,000              6%           11.75           7/2/07         295,580       749,059
                                            15,000(5)           3%           11.75           7/2/07         110,843       280,897

  James P. Fraine . . . . . . . . . .       10,000(6)           2%           18.50          1/13/07         116,346       294,842
                                            10,000              2%           11.75           7/2/07          73,895       187,265

  Donald E. Grant . . . . . . . . . .       30,000(6)           5%           18.50          1/13/07         349,036       884,527
                                            30,000              5%           11.75           7/2/07         221,685       561,794
                                            10,000(5)           2%           11.75           7/2/07          73,895       187,265
</TABLE>

- ---------------------------

1)   Unless otherwise indicated, options granted become exercisable starting 
     with the end of the month of the grant date, with 1/48th of the total 
     number of options granted becoming exercisable at that time and with an 
     additional 1/48th of such options becoming exercisable each month 
     thereafter, with a total four-year vesting period.

2)   Options were granted at an exercise price equal to the fair market value 
     of the Company's Common Stock at the time of grant.

3)   The potential realizable value is calculated based upon the term of the 
     option at its time of grant (10 years) and is calculated by assuming 
     that the stock price on the date of grant appreciates at the indicated 
     annual rate compounded annually for the entire term of the option and 
     that the option is exercised and sold on the last day of its term for 
     the appreciated price.  The 5% and 10% assumed rates of appreciation are 
     derived from the rules of the Securities and Exchange Commission and do 
     not represent the Company's estimates or projection of the future Common 
     Stock price.  There can be no assurance that the Common Stock will 
     appreciate at any particular rate or at all in future periods.

4)   Options vest four years after date of grant, subject to acceleration and 
     immediate exercisibility upon attainment of certain performance 
     objectives.

5)   Options vest ten years after date of grant, subject to acceleration and 
     immediate exercisibility upon attainment of certain performance 
     objectives.

6)   Options were cancelled in connection with issuance of replacement 
     options with a new vesting schedule and exercise price.


                                      8
<PAGE>

OPTION EXERCISES AND HOLDING

     The following table sets forth certain information with respect to the 
named executive officers concerning the exercise of options granted under the 
Company's 1995 Stock Incentive Plan during the year ended December 31, 1997, 
and the value of unexercised options held as of December 31, 1997.

                   AGGREGATED OPTION EXERCISES IN LAST FISCAL
                         YEAR AND FY-END OPTION VALUES

<TABLE>
<CAPTION>
                                                              Number of Securities           Value of Unexercised
                             Shares                          Underlying Unexercised          In-the-Money Options
                            Acquired                          Options at FY-End(1)              at FY-End (1)(2)
                               On            Value         --------------------------     --------------------------
Name                       Exercise(1)     Realized(1)     Exercisable  Unexercisable     Exercisable  Unexercisable
- ----                       -----------     -----------     -----------  -------------     -----------  -------------
<S>                        <C>             <C>             <C>          <C>               <C>          <C>
Keith L. Barnes . . . .       3,000          $27,750         98,648        282,800          $642,479    $1,491,054
David L. Brinker  . . .         --              --           14,689         60,311            65,592       268,783
Sar Ramadan . . . . . .         --              --           41,126         70,874           318,096       426,654
James P. Fraine . . . .         --              --           13,938         17,062           101,895       103,230
Donald E. Grant . . . .         --              --           39,876         57,124           311,377       352,748
</TABLE>
- ---------------------

(1)  The above table excludes information regarding exercises and the 
     year-end value of options to acquire shares of Common Stock of Cadence 
     Design Systems, Inc. granted prior to the Company's initial public 
     offering while the Company was a wholly-owned subsidiary of Cadence. 
     Cadence offers its employees a stock option program, including employees 
     of Cadence subsidiaries.  Prior to contemplation of the Company's 
     initial public offering, Cadence offered options to acquire Common Stock 
     of Cadence to Company employees and officers under the stock option 
     program.  All of the options to acquire Common Stock of Valid Logic, 
     Inc. held by Company employees as of the 1991 merger of Cadence and 
     Valid Logic, Inc., of which the Company was then a subsidiary, were 
     exchanged for options to acquire shares of Common Stock of Cadence.  The 
     options to acquire Common Stock of Cadence have been vesting since 
     Cadence's merger with Valid Logic, Inc.  No options to acquire Common 
     Stock of Cadence were granted in 1997 to any officers of the Company.  
     In 1997, Company employees, including officers, exercised 359,454 
     options to acquire Common Stock of Cadence and realized gains of 
     approximately $6,390,785.  Of the 359,454 options exercised, officers of 
     the Company exercised options for 132,846 shares of Cadence Common Stock 
     and realized gains of approximately $2,495,559.  The named executive 
     officers accounted for gains of approximately $1,949,467.

     Gains from the exercise and sale of Cadence options do not impact the 
     Company's expenses or results of operations.  Furthermore, such options 
     do not enter into the calculation of the Company's outstanding shares 
     nor its earnings per share calculations.

     The Shares Acquired on Exercise, Value Realized, Number of Securities 
     Underlying Unexercised Options at FY-End (Exercisable/Unexercisable) and 
     Value of Unexercised In-the-Money Options at FY-End 
     (Exercisable/Unexercisable) with respect to the Cadence options held by 
     the named executive officers is as follows:  Mr. Barnes-48,766; 
     $898,009; 3,767/7,501; $81,736/$162,756; Mr. Brinker-0; $0; 0/0; $0/$0; 
     Mr. Ramadan-23,440; $384,804; 4,220/9,844; $89,538/$208,364; Mr. 
     Fraine-28,080; $499,773; 107/16,407; $2,282/$349,846; Mr. Grant-19,676; 
     $372,930; 1,419/4,219; $30,612/$91,016.

(2)  Amounts reflected are based upon the market value of the underlying 
     securities at fiscal year end minus the exercise price.


                                      9
<PAGE>

TEN YEAR OPTION REPRICINGS

     The following table provides information regarding all repricings of 
stock options held by any named executive officer of the Company since July 
21, 1995, the date the Company became a reporting company under the 
Securities Exchange Act of 1934, as amended.

                           10-YEAR OPTION REPRICINGS

<TABLE>
<CAPTION>
                                        Number of        Market
                                       Securities       Price of         Exercise                       Length of Original
                                       Underlying        Stock at        Price at          New              Option Term 
                                         Options         Time of          Time of       Exercise       Remaining at Date of
Name                          Date      Repriced        Repricing        Repricing       Price               Repricing
- ----                          ----     ----------       ---------        ---------      --------       --------------------
<S>                          <C>       <C>              <C>              <C>            <C>            <C>
Keith L. Barnes . . . .        --            --               --               --            --                 --
David L. Brinker  . . .        --            --               --               --            --                 --
Sar Ramadan . . . . . .      7/2/97      40,000           $11.75           $18.50        $11.75          9 years, 195 days
James P. Fraine . . . .      7/2/97      10,000            11.75            18.50         11.75          9 years, 195 days
Donald E. Grant . . . .      7/2/97      30,000            11.75            18.50         11.75          9 years, 195 days
</TABLE>

EXECUTIVE DEFERRED COMPENSATION PLAN

     On July 1, 1996, the Company implemented an Executive Deferred 
Compensation Plan (the "Deferred Compensation Plan") for the purpose of 
providing eligible executives and employees with a program for deferring 
compensation earned during employment.  Under the terms of the Deferred 
Compensation Plan, eligible executives and employees of the Company may make 
voluntary contributions to the Plan up to 90% of compensation, the limitation 
stated in the Deferred Compensation Plan.  The voluntary contributions are 
invested in a variety of investment funds for the intended use of paying plan 
benefits when participating executives and employees become eligible to 
receive such benefits under the terms of the Deferred Compensation Plan.  The 
Company currently does not match executive or employee contributions and does 
not intend to do so in the foreseeable future.

EMPLOYMENT CONTRACTS

     The Company has entered into Employment Agreements with each of the 
named executive officers.  Each such Employment Agreement is terminable by 
either party.  If the executive officer resigns voluntarily or is properly 
terminated for cause, all pay and benefits under the agreement will cease as 
of the date of such resignation or termination.  If the executive officer is 
terminated other than for cause (including the voluntary resignation by an 
officer upon a breach by the Company of its obligations to the executive 
officer), the executive officer would receive all base salary, commissions 
and bonuses earned through the date of termination plus a payment equal to 
all accumulated but unused vacation and sick leave.  In addition, the officer 
would be entitled to continued vesting of options (or alternatively be paid 
the in-the-money value of such options), certain benefits, and payment of 
base salary for a severance period, which is two years in the case of Mr. 
Barnes, 18 months in the case of Mr. Ramadan and six months for each other 
executive officer.  If there is a change in control of the Company, then the 
vesting schedule of the Company options held by the named executive officers 
would accelerate so that all such options would become immediately 
exercisable.  Additionally, all Cadence options that vested by July 1, 1997 
(or the in-the-money value) would also be paid.


                                      10
<PAGE>

DIRECTOR COMPENSATION

     The members of the Company's Board of Directors are reimbursed for 
out-of-pocket and travel expenses incurred in attending Board meetings.  In 
addition, the Company's Chairman of the Board receives an annual retainer of 
$18,000 and each nonemployee member of the Board of Directors, other than the 
Chairman, receives an annual retainer of $12,000.  Each nonemployee director 
also receives $1,000 for each Board meeting attended and each meeting of a 
committee of the Board attended if not on the date of a regularly scheduled 
Board meeting. Committee chairs receive an additional $500 per meeting.  In 
1997, each nonemployee director received certain stock options under the 
Company's 1995 Stock Incentive Plan.

COMPENSATION COMMITTEE REPORT

     Under rules established by the Securities and Exchange Commission (the 
"SEC"), the Company is required to provide certain data and information 
regarding the compensation and benefits provided to the Company's President 
and Chief Executive Officer and the four other most highly compensated 
executive officers.  In fulfillment of this requirement, the Compensation 
Committee, at the direction of the Board of Directors, has prepared the 
following report for inclusion in this Proxy Statement.

     EXECUTIVE COMPENSATION PHILOSOPHY.  The Compensation Committee of the 
Board of Directors is composed entirely of nonemployee directors.  The 
Compensation Committee is responsible for setting and administering the 
policies and programs that govern both annual compensation and stock 
ownership programs for the executive officers of the Company.  The Company's 
executive compensation policy is based on principles designed to ensure that 
an appropriate relationship exists between executive compensation and 
corporate performance, while at the same time motivating and retaining 
executive officers.

     EXECUTIVE COMPENSATION COMPONENTS.  The key components of the Company's 
compensation program are base salary, cash bonuses and equity participation. 
These components are administered with the goal of providing total 
compensation that is competitive in the marketplace, rewards successful 
financial performance and aligns executive officers' interests with those of 
shareholders.  The Compensation Committee reviews each component of executive 
compensation on an annual basis.

     BASE SALARY.  Base salaries for executive officers are set at levels 
believed by the Compensation Committee to be sufficient to attract and retain 
qualified executive officers.  Base pay increases are provided to executive 
officers based on an evaluation of each executive's performance, as well as 
the overall performance of the Company.  In establishing base salaries, the 
Compensation Committee not only considers the financial performance of the 
Company, but also the success of the executive officers in developing and 
executing the Company's strategic plans, developing managers and employees 
and exercising leadership.  The Compensation Committee believes that 
executive officer base salaries for 1997 were reasonable as compared to 
amounts paid by companies of similar size.

     CASH BONUSES.  The Compensation Committee believes that a significant 
proportion of total cash compensation for executive officers should be 
subject to attainment of specific Company performance criteria.  This 
approach creates a direct incentive for executive officers to achieve desired 
performance goals and places a significant percentage of each executive 
officer's compensation at risk.  Consequently, each year the Compensation 
Committee establishes cash bonuses for executive officers based on the 
Company's achievement of certain performance criteria.  For fiscal 1997, the 
Company's executive officers received aggregate cash bonuses equal to 
approximately 15% of the total base salaries paid to such officers based on 
the Company's achievement of established performance goals.


                                      11
<PAGE>

     STOCK OPTIONS.  The Compensation Committee believes that equity 
participation is a key component of its executive compensation program.  
Stock options are granted to executive officers primarily based on the 
officer's actual and potential contribution to the Company's growth and 
profitability and competitive marketplace practices.  Option grants are 
designed to retain executive officers and motivate them to enhance 
stockholder value by aligning the financial interests of executive officers 
with those of stockholders.  Stock options also provide an effective 
incentive for management to create shareholder value over the long term since 
the full benefit of the compensation package cannot be realized unless an 
appreciation in the price of the Company's Common Stock occurs over a number 
of years.  In 1997, options to purchase a total of 448,448 shares of the 
Company's Common Stock were granted to the Company's executive officers 
(including the Company's Chief Executive Officer) with exercise prices equal 
to the fair market value of the underlying Common Stock on the date of grant. 
These options generally vest 1/48th per month commencing at the end of the 
month in which the options were granted and expire ten years from the date of 
grant.  The vesting of certain options granted to executive officers in 1997 
was tied to the attainment of certain performance objectives.

     STOCK OPTION REPRICING.  In July 1997, the Compensation Committee 
authorized a reissuance of all non-director stock options which had an 
exercise price of $18.50 granted to employees, including certain executive 
officers, in January 1997.  The new exercise price for these options was 
fixed at $11.75, the market price of the Company's Common Stock at the time 
of the reissuance.  Stock options granted to employees under the Company's 
1995 Stock Incentive Plan are intended to provide incentives to the employees 
to work to achieve long-term success for the Company.  A decline in the 
market price of the Company's Common Stock since the date the options were 
granted frustrated the purpose of the options, and the Compensation Committee 
deemed it to be in the best interests of the Company to reduce the exercise 
price to the market price at the time of repricing.  See "10-Year Option 
Repricings" table for further information concerning the option repricing.

     COMPENSATION OF CHIEF EXECUTIVE OFFICER.  Consistent with the executive 
compensation policy and components described above, the Compensation 
Committee determined the salary, bonus and stock options received by Keith L. 
Barnes, the Company's President and Chief Executive Officer and a director of 
the Company, for services rendered in 1997.  Mr. Barnes received a base 
salary of $237,500 for 1997.  He also earned a $52,000 cash bonus.  Mr. 
Barnes received the bonus based upon achieving a performance goal specified 
in advance by the Compensation Committee.  In July 1997, Mr. Barnes received 
options to purchase 180,448 shares of the Company's Common Stock.

COMPENSATION COMMITTEE

C. Scott Gibson
James M. Hurd
Milton R. Smith


COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION

     The members of the Compensation Committee during the fiscal year ended 
December 31, 1997 were C. Scott Gibson, James M. Hurd and Milton R. Smith.


                                      12
<PAGE>

STOCK PERFORMANCE GRAPH

     The following line graph compares the cumulative total return on the 
Company's Common Stock with the cumulative total return of the Nasdaq Stock 
Market Index and an index of peer companies selected by the Company.  The 
total cumulative return on investment (change in stock price plus reinvested 
dividends) for each of the periods for the Company's Common Stock, the Nasdaq 
Stock Market Index and the peer group index is based upon an assumed 
investment of $100 in the Company's Common Stock and each index on July 21, 
1995, the  date of the Company's initial public offering.

DATA POINTS FOR PERFORMANCE GRAPH

<TABLE>
<CAPTION>
Name           7/21/95  9/30/95  12/31/95  3/31/96  6/30/96  9/30/96  12/31/96  3/31/97  6/30/97  9/30/97  12/31/97
- ----           -------  -------  --------  -------  -------  -------  --------  -------  -------  -------  --------
<S>            <C>      <C>      <C>       <C>      <C>      <C>      <C>       <C>      <C>      <C>      <C>
IMSC            100.00   120.45    134.09   142.05   234.09   150.00    157.95   136.36   134.66   163.64    155.73
Nasdaq Index    100.00   104.37    105.65   110.57   119.60   123.85    129.94   122.90   145.42   170.02    159.45
Peer Group      100.00   103.71    109.15   105.24   122.51   132.92    142.45   117.97   131.85   197.85    173.66
</TABLE>


     The above graph compares the performance of the Company with that of the 
Nasdaq Stock Market Index and a group of peer companies with the investment 
weighted on market capitalization.  Companies in the peer group are as 
follows: Cadence Design Systems, Inc., Credence Design Systems, Inc., 
Electroglas, Inc., KLA-Tencor, Inc., LTX Corp., Mentor Graphics, Inc., 
Synopsys, Inc. and Teradyne, Inc.  The past performance of the Company's 
Common Stock is not an indication of future performance.  There can be no 
assurance that the price of the Company's Common Stock will appreciate at any 
particular rate or at all in future years.

            SECTION 16(a) BENEFICIAL OWNERSHIP REPORTING COMPLIANCE

     Section 16(a) of the Securities Exchange Act of 1934, as amended (the 
"1934 Act") requires that the Company's directors, officers and persons who 
own more than 10% of a registered class of the Company's equity securities 
file initial reports of ownership and reports of changes in ownership with 
the Securities and Exchange Commission.  Such persons also are required to 
furnish the Company with copies of all Section 16(a) reports they file.

     Based solely on its review of the copies of such reports received by it 
with respect to fiscal 1997 and written representations from reporting 
persons that no other reports were required, the Company believes that all 
filing requirements applicable to its directors, officers and persons who own 
more than 10% of a registered class of the Company's equity securities have 
been complied with for fiscal 1997, except that David L. Brinker, an 
executive officer of the Company, inadvertently filed one Form 5 reflecting 
one exempt transaction late and Cadence was delinquent in filing the Form 4 
required by virtue of its sale of Company Common Stock in the February, 1997 
secondary public offering.

                     CERTAIN TRANSACTIONS AND RELATIONSHIPS

     In certain foreign markets, primarily Europe, Cadence employees act as 
sales agents for the Company.  The Company reimburses Cadence through 
intercompany accounts for related costs incurred on the Company's behalf, 
plus an administrative fee.  Cadence provides selling, service and production 
support related to the Company's Virtual Test Software.  The Company has paid 
Cadence based upon estimated costs to provide this support.  Cadence provides 
facilities for certain domestic Company sales 


                                      13
<PAGE>

personnel.  During 1997 the costs of the above services provided by Cadence 
totaled approximately $2,648,000.  In 1997 the Company sold a mixed-signal 
Test Station and related upgrades and peripherals to Cadence, to be used by 
Cadence's design services group providing engineering test services to their 
customers, for approximately $1,329,000.

     On June 4, 1997, the Company loaned to James P. Fraine, the Company's 
Vice President, Sales, $70,000 which was to be repaid together with interest 
at a rate of 6% per annum under a Promissory Note.  Mr. Fraine repaid $35,000 
together with accrued interest thereon on December 2, 1997.  The remaining 
$35,000 principal balance and all interest thereon are to be repaid on March 
31, 1998 under the terms of the Promissory Note.

              STOCK OWNED BY MANAGEMENT AND PRINCIPAL SHAREHOLDERS

     The following table sets forth certain information regarding the 
ownership of the Common Stock as of March 13, 1998 with respect to:  (i) each 
person known by the Company to beneficially own more than 5% of the 
outstanding shares of Common Stock, (ii) each of the Company's continuing 
directors, (iii) each of the Company's nominees for election as director, 
(iv) each of the Company's named executive officers and (v) all directors and 
executive officers as a group.

<TABLE>
<CAPTION>
                                                    Shares of Common
                                                   Stock Beneficially     Percent of Common
Name and Business Address                               Owned (1)         Stock Outstanding
- -------------------------                          ------------------     -----------------
<S>                                                <C>                    <C>
Cadence Design Systems, Inc.  . . . . . . . . .         2,759,000              36.6%
2655 Seely Road, Bldg 5, MS 5B2
San Jose, CA  95134 (2)

Kopp Investment Advisors, Inc. (3)  . . . . . .           781,175              10.4%
LeRoy C. Kopp
6600 France Avenue South, Suite 672
Edina, MN  55435

Oppenheimer Funds, Inc. (4) . . . . . . . . . .           615,000               8.2%
Two World Trade Center
New York, NY  10048

Invista Capital Management, Inc. (5)  . . . . .           521,600               6.9%
Principal Mutual Life Insurance Co.
699 Walnut, 1800 Hub Tower
Des Moines, IA 50309

Keith L. Barnes . . . . . . . . . . . . . . . .           128,461               1.7%
David L. Brinker  . . . . . . . . . . . . . . .            20,201                  *
Sar Ramadan . . . . . . . . . . . . . . . . . .            51,183                  *
W. Barry Baril  . . . . . . . . . . . . . . . .            61,266                  *
Donald E. Grant . . . . . . . . . . . . . . . .            47,649                  *
H. Raymond Bingham  . . . . . . . . . . . . . .            15,944                  *
C. Scott Gibson   . . . . . . . . . . . . . . .            18,044                  *
James M. Hurd . . . . . . . . . . . . . . . . .            13,944                  *
Milton R. Smith . . . . . . . . . . . . . . . .             4,569                  *
James E. Solomon  . . . . . . . . . . . . . . .            13,944                  *
Executive Officers and Directors as a group
(14 persons)  . . . . . . . . . . . . . . . . .           447,101               5.6%
</TABLE>

- ----------------------------

*  less than one percent


                                      14
<PAGE>

(1)  Beneficial ownership is determined in accordance with rules of the SEC, 
     and includes voting power and investment power with respect to shares.  
     Shares issuable upon the exercise of outstanding stock options that are 
     currently exercisable or become exercisable within 60 days from March 
     13, 1998 are considered outstanding for the purpose of calculating the 
     percentage of Common Stock owned by such person, but not for the purpose 
     of calculating the percentage of Common Stock owned by any other person. 
     The number of shares that are issuable upon the exercise of options 
     that are currently exercisable or exercisable within 60 days of March 
     13, 1998 is as follows: Mr. Barnes - 120,074; Mr. Brinker - 20,201; Mr. 
     Ramadan - 49,625; Mr. Baril - 60,200; Mr. Grant - 47,126; Messrs. 
     Bingham, Gibson, Hurd and Solomon -13,944; Mr. Smith - 3,569; all 
     Executive Officers and Directors as a group - 420,329.

(2)  On February 20, 1997, the Company consummated a firm underwritten 
     secondary public offering of its Common Stock in which Cadence Design 
     Systems, Inc. sold 950,000 shares.  As a result of the issuance of 
     additional shares by the Company in such secondary offering and the sale 
     by Cadence of shares in such offering, Cadence's ownership interest in 
     the Company was reduced from approximately 55.1% prior to the offering 
     to 37.2% after the offering.

(3)  This information as to beneficial ownership is based on a Schedule 13G 
     filed by Kopp Investment Advisors, Inc. on behalf of itself, Kopp 
     Holding Company and LeRoy C. Kopp.  Kopp Investment Advisors, Inc. had 
     sole voting and dispositive power of 101,500 shares, sole dispositive 
     power over 25,500 shares and shared dispositive power over 735,675 
     shares; LeRoy C. Kopp had sole voting power over 20,000 shares.  The 
     Schedule 13G states that 761,175 shares are held in a representative or 
     fiduciary capacity.

(4)  This information as to beneficial ownership is based on a Schedule 13G 
     filed by Oppenheimer Funds, Inc. on behalf of itself and Oppenheimer 
     Discovery Fund.  Oppenheimer Funds, Inc. had shared dispositive power 
     over 615,000 shares and Oppenheimer Discovery Fund had sole voting power 
     and shared dispositive power over 585,000 shares.

(5)  This information as to beneficial ownership is based on a Schedule 13G 
     filed by Invista Capital Management, Inc. and Principal Mutual Life 
     Insurance Company.  Each such entity had shared voting power and shared 
     dispositive power over 521,600 shares.

               APPROVAL OF AMENDMENT TO 1995 STOCK INCENTIVE PLAN

     The Company maintains its 1995 Stock Incentive Plan (the "1995 Plan") to 
attract and retain experienced and competent employees and others who provide 
services to the Company and to provide an incentive to such persons to exert 
their best efforts on behalf of the Company.  A total of 1,620,000 shares of 
Common Stock have been reserved for issuance under the 1995 Plan.  As of 
March 31, 1998, approximately 172,343 shares remained available for grant 
under the 1995 Plan.  The Board of Directors believes that additional shares 
will be needed under the 1995 Plan to provide appropriate incentives to 
employees and others.  Accordingly, the Board of Directors has approved, and 
recommends shareholder adoption of, an amendment to the 1995 Plan that would 
increase from 1,620,000 shares to 1,995,000 shares the number of shares of 
Common Stock that are reserved for issuance under the 1995 Plan.  Because the 
officers, directors and employees of the Company who may participate in the 
1995 Plan and the amount of their options will be determined on a 
discretionary basis by the Compensation Committee or the full Board of 
Directors, it is not possible to state the names or positions of, or the 
number of options that may be granted to, the Company's officers, directors 
and employees.  The following is a summary of the basic terms and provisions 
of the 1995 Plan.

     The 1995 Plan, which was approved by the Company's sole shareholder on 
May 11, 1995, provides for grants of both "incentive stock options" within 
the meaning of Section 422 of the Internal Revenue Code of 1986, as amended 
(the "Code") and "non-qualified stock options" which are not qualified for 
treatment under Section 422 of the Code, and for direct stock grants and 
sales to employees 


                                      15
<PAGE>

or consultants of the Company.  The purposes of the 1995 Plan are to attract 
and retain the best available personnel for positions of substantial 
responsibility, to provide additional incentives to the employees and 
consultants of the Company and to promote the Company's business.  The 1995 
Plan is administered by the Compensation Committee of the Board of Directors.

     The term of each option granted under the 1995 Plan will generally be 
ten years from the date of grant, or such shorter period as may be 
established at the time of the grant.  An option granted under the 1995 Plan 
may be exercised at such times and under such conditions as determined by the 
Compensation Committee.  If a person who has been granted an option ceases to 
be an employee or consultant of the Company, such person may exercise that 
option only during the exercise period established by the Compensation 
Committee at the time the options were granted, which shall not exceed 90 
days after the date of termination, and only to the extent that the option 
was exercisable on the date of termination.  If a person who has been granted 
an option ceases to be an employee or consultant as a result of such person's 
total and permanent disability, such person may exercise that option at any 
time within twelve months after the date of termination, but only to the 
extent that the option was exercisable on the date of termination.  Except as 
otherwise provided in the agreement evidencing the terms of an option grant, 
no option granted under the 1995 Plan is transferable other than at death, 
and each option is exercisable during the life of the optionee only by the 
optionee.  In the event of the death of a person who has received an option, 
the option generally may be exercised by a person who acquired the option by 
bequest or inheritance during the twelve month period after the date of death 
to the extent that such option was exercisable on the date of death.

     The exercise price of incentive stock options granted under the 1995 
Plan may not be less that the fair market value of a share of Common Stock on 
the last market trading day prior to the date of grant of the option and 
incentive options granted to greater than 10% shareholders may not be granted 
for less than 110% of fair market value.  Non-qualified stock options may be 
granted at the price determined by the plan administrator.  The consideration 
to be paid upon exercise of an option, including the method of payment, will 
be determined by the Compensation Committee and may consist entirely of cash, 
check, shares of Common Stock or any combination of such methods of payment 
as permitted by the Compensation Committee.

     The 1995 Plan will continue in effect until May 2005, unless earlier 
terminated by the Board of Directors, but such termination will not affect 
the terms of any options outstanding at that time.  The Board of Directors 
may amend, terminate or suspend the 1995 Plan at any time as it may deem 
advisable.

FEDERAL INCOME TAX CONSEQUENCES

     The federal income tax discussion set forth below is included for 
general information only.  Optionees are urged to consult their tax advisors 
to determine the particular tax consequences applicable to them, including 
the application and effect of foreign, state and local income and other tax 
laws.

     INCENTIVE STOCK OPTIONS.  Certain options authorized to be granted under 
the 1995 Plan are intended to qualify as incentive stock options for federal 
income tax purposes.  Under federal income tax law currently in effect, the 
optionee will recognize no income upon grant or upon exercise of an incentive 
stock option.  If an employee exercises an incentive stock option and does 
not dispose of any of the option shares within two years following the date 
of grant and within one year following the date of exercise, then any gain 
realized upon subsequent disposition of the shares will be treated as income 
from the sale or exchange of a capital asset.  If an employee disposes of 
shares acquired upon exercise of an incentive stock option before the 
expiration of either the one-year holding period or the two-year waiting 
period, any amount realized will be taxable as ordinary compensation income 
in the year of such 


                                      16
<PAGE>

disqualifying disposition to the extent that the lesser of the fair market 
value of the shares on the exercise date or the fair market value of the 
shares on the date of disposition exceeds the exercise price.  The Company 
will not be allowed any deduction for federal income tax purposes at either 
the time of the grant or exercise of an incentive stock option.  Upon any 
disqualifying disposition by an employee, the Company will be entitled to a 
deduction to the extent the employee realized ordinary income.

     NON-QUALIFIED STOCK OPTIONS.  Certain options authorized to be granted 
under the 1995 Plan will be treated as non-qualified stock options for 
federal income tax purposes.  Under federal income tax law presently in 
effect, no income is realized by the grantee of a non-qualified stock option 
pursuant to the 1995 Plan until the option is exercised.  At the time of 
exercise of a non-qualified stock option, the optionee will realize ordinary 
compensation income, and the Company will be entitled to a deduction, in the 
amount by which the market value of the shares subject to the option at the 
time of exercise exceeds the exercise price.  The Company's deduction is 
conditioned upon withholding on the income amount.  Upon the sale of shares 
acquired through the exercise of a non-qualified stock option, the excess of 
the amount realized from the sale over the market value of the shares on the 
date of exercise will be taxable.

     CONSEQUENCES TO THE COMPANY.  The Company recognizes no deduction at the 
time of grant or exercise of an incentive stock option.  The Company will 
recognize a deduction at the time of exercise of a non-qualified stock option 
on the difference between the option price and the fair market value of the 
shares on the date of grant.  The Company also will recognize a deduction to 
the extent the optionee recognizes income upon a disqualifying disposition of 
shares acquired through the exercise of an incentive stock option.

     THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR THIS PROPOSAL.  If a quorum 
is present, this proposal will be approved if a majority of the votes cast on 
the proposal are voted for approval of the proposal.  Abstentions and broker 
non-votes are counted for purposes of determining whether a quorum exists at 
the Annual Meeting, but are not counted as votes cast and have no effect on 
the results of the vote on this proposal.

              RATIFICATION OF APPOINTMENT OF INDEPENDENT AUDITORS

     The Board of Directors has appointed Arthur Andersen LLP to act as 
independent auditors for the Company for the fiscal year ending December 31, 
1998, subject to ratification of such appointment by the Company's 
shareholders.

     Unless otherwise indicated, properly executed proxies will be voted in 
favor of ratifying the appointment of Arthur Andersen LLP to audit the books 
and accounts of the Company for the fiscal year ending December 31, 1998.  No 
determination has been made as to what action the Board of Directors would 
take if the shareholders do not ratify the appointment.

     A representative of Arthur Andersen LLP is expected to be present at the 
Annual Meeting and will be given an opportunity to make a statement if he or 
she desires to do so and will be available to respond to appropriate 
questions.

     THE BOARD OF DIRECTORS RECOMMENDS A VOTE FOR THIS PROPOSAL.


                                      17
<PAGE>

                  DATE FOR SUBMISSION OF SHAREHOLDER PROPOSALS

     Any shareholder proposal intended for inclusion in the proxy statement 
and form of proxy relating to the Company's 1999 annual meeting of 
shareholders must be received by the Company not later than December 7, 1998, 
pursuant to the proxy soliciting regulations of the Securities and Exchange 
Commission (the "SEC").  In addition, the Company's Bylaws require that 
notice of shareholder proposals and nominations for director be delivered to 
the Secretary of the Company not less than 60 days, nor more than 90 days, 
prior to the date of an annual meeting, unless notice or public disclosure of 
the date of the meeting occurs less than 60 days prior to the date of such 
meeting, in which event, shareholders may deliver such notice not later than 
the 10th day following the day on which notice of the date of the meeting was 
mailed or public disclosure thereof was made.  Nothing in this paragraph 
shall be deemed to require the Company to include in its proxy statement and 
form of proxy for such meeting any shareholder proposal which does not meet 
the requirements of the SEC in effect at the time.

                                 OTHER MATTERS

     As of the date of this Proxy Statement, the Board of Directors does not 
know of any other matters to be presented for action by the shareholders at 
the 1998 Annual Meeting.  If, however, any other matters not now known are 
properly brought before the meeting, the persons named in the accompanying 
proxy will vote such proxy in accordance with the determination of a majority 
of the Board of Directors.

                              COST OF SOLICITATION

     The cost of soliciting proxies will be borne by the Company.  In 
addition to use of the mails, proxies may be solicited personally or by 
telephone by directors, officers and employees of the Company, who will not 
be specially compensated for such activities.  Also, Allen Nelson & Co. may 
solicit proxies at an approximate cost of $1,200 plus reasonable expenses.  
Such solicitations may be made personally, or by mail, facsimile, telephone, 
telegraph or messenger.  Integrated Measurement Systems, Inc. will also 
request persons, firms and companies holding shares in their names or in the 
name of their nominees, which are beneficially owned by others, to send proxy 
materials to and obtain proxies from such beneficial owners.  The Company 
will reimburse such persons for their reasonable expenses incurred in that 
connection.

                             ADDITIONAL INFORMATION

     A copy of the Company's Annual Report to Shareholders for the fiscal 
year ended December 31, 1997 accompanies this Proxy Statement.  The Company 
is required to file an Annual Report on Form 10-K for its fiscal year ended 
December 31, 1997 with the Securities and Exchange Commission.  Shareholders 
may obtain, free of charge, a copy of the Form 10-K (without exhibits) by 
writing to Mr. Sar Ramadan, Integrated Measurement Systems, Inc., 9525 S.W. 
Gemini Drive, Beaverton, Oregon 97008.

                                 By Order of the Board of Directors


                                 Keith L. Barnes
                                 President and Chief Executive Officer

Beaverton, Oregon
April 6, 1998


                                      18
<PAGE>

                         INTEGRATED MEASUREMENT SYSTEMS, INC.

                              1995 STOCK INCENTIVE PLAN


1.   PURPOSES OF THE PLAN.  

     The purposes of this Stock Incentive Plan are to attract and retain the
best available personnel for positions of substantial responsibility, to provide
additional incentive to the Employees and Consultants of the Company and to
promote the success of the Company's business.

     Options granted hereunder may be either "incentive stock options," as
defined in Section 422 of the Internal Revenue Code of 1986, as amended, or
"nonqualified stock options," at the discretion of the Board and as reflected in
the terms of the written option agreement.  In addition, shares of the Company's
Common Stock may be Sold hereunder independent of any Option grant.

2.   DEFINITIONS.  

     As used herein, the following definitions shall apply:

     2.1  "ADMINISTRATOR" shall mean the Board or any of its Committees as shall
be administering the Plan, in accordance with Section 4.1 of the Plan.

     2.2  "BOARD" shall mean the Board of Directors of the Company.

     2.3  "CODE" shall mean the Internal Revenue Code of 1986, as amended.

     2.4  "COMMITTEE" shall mean a Committee appointed by the Board in
accordance with Section 4.1 of the Plan.

     2.5  "COMMON STOCK" shall mean the Common Stock of the Company.

     2.6  "COMPANY" shall mean Integrated Measurement Systems, Inc., an 
Oregon corporation.

     2.7  "CONSULTANT" shall mean any person who is engaged by the Company or
any Parent or Subsidiary to render consulting services and is compensated for
such consulting services and any Director of the Company whether or not
compensated by the Company for their services as Directors.


                                    A-1
<PAGE>

     2.8  "CONTINUOUS STATUS AS AN EMPLOYEE OR CONSULTANT" shall mean the
absence of any interruption or termination of service as an Employee or
Consultant.  Continuous Status as an Employee or Consultant shall not be
considered interrupted in the case of: (i) any sick leave, military leave, or
any other leave of absence approved by the Company; provided, however, that for
purposes of Incentive Stock Options, any such leave is for a period of not more
than ninety days or reemployment upon the expiration of such leave is guaranteed
by contract or statute, provided, further, that on the ninety-first day of such
leave (where re-employment is not guaranteed by contract or statute) the
Optionee's Incentive Stock Option shall automatically convert to a Nonqualified
Stock Option; or (ii) transfers between locations of the Company or between the
Company, its Parent, its Subsidiaries or its successor.

     2.9  "DIRECTOR" shall mean a member of the Board.

     2.10 "DISABILITY" shall mean total and permanent disability as defined in
Section 22(e)(3) of the Code.

     2.11 "EMPLOYEE" shall mean any person, including Officers and Directors,
employed by the Company or any Parent or Subsidiary of the Company.  Neither the
payment of a director's fee by the Company nor service as a Director shall be
sufficient to constitute "employment" by the Company.

     2.12 "EXCHANGE ACT" shall mean the Securities Exchange Act of 1934, as
amended.

     2.13 "INCENTIVE STOCK OPTION" shall mean an Option intended to qualify as
an incentive stock option within the meaning of Section 422 of the Code.

     2.14 "NONQUALIFIED STOCK OPTION" shall mean an Option not intended to
qualify as an incentive stock option within the meaning of Section 422 of the
Code.  

     2.15 "NOTICE OF GRANT" shall mean a written notice evidencing certain terms
and conditions of an individual Option grant.  The Notice of Grant is part of
the Option Agreement.

     2.16 "OFFICER" shall mean a person who is an officer of the Company within
the meaning of Section 16 of the Exchange Act and the rules and regulations
promulgated thereunder.

     2.17 "OPTION" shall mean a stock option granted pursuant to the Plan.

     2.18 "OPTION AGREEMENT" shall mean a written agreement between the Company
and an Optionee evidencing the terms and conditions of an individual Option
grant.  The Option Agreement is subject to the terms and conditions of the Plan.

     2.19 "OPTIONED STOCK" shall mean the Common Stock subject to an Option.

     2.20 "OPTIONEE" shall mean an Employee or Consultant who receives an
Option.

     2.21 "PARENT" shall mean a "parent corporation," whether now or hereafter
existing, as defined in Section 424(e) of the Code.

     2.22 "PLAN" shall mean this 1995 Stock Incentive Plan.

                                 A-2

<PAGE>


     2.23 "RULE 16b-3"  shall mean Rule 16b-3 of the Exchange Act or any
successor to Rule 16b-3, as in effect when discretion is being exercised with
respect to the Plan.

     2.24 "SALE" or "SOLD" shall include, with respect to the sale of Shares
under the Plan, the sale of Shares for consideration in the form of cash or
notes, as well as a grant of Shares for consideration in the form of past or
future services.

     2.25 "SHARE" shall mean a share of the Common Stock, as adjusted in
accordance with Section 11 of the Plan.

     2.26 "SUBSIDIARY" shall mean a "subsidiary corporation," whether now or
hereafter existing, as defined in Section 424(f) of the Code.

   
3.   STOCK SUBJECT TO THE PLAN.  

     Subject to the provisions of Section 11 of the Plan, the maximum aggregate
number of Shares which may be optioned and/or Sold under the Plan is 1,995,000
shares of Common Stock.  The Shares may be authorized, but unissued,
or reacquired Common Stock.

     If an Option should expire or become unexercisable for any reason without
having been exercised in full, the unpurchased Shares which were subject thereto
shall, unless the Plan shall have been terminated, become available for future
Option grants and/or Sales under the Plan; provided, however, that Shares that
have actually been issued under the Plan shall not be returned to the Plan and
shall not become available for future distribution under the Plan.
    

4.   ADMINISTRATION OF THE PLAN.

     4.1  PROCEDURE.

          4.1.1 MULTIPLE ADMINISTRATIVE BODIES.  If permitted by Rule 16b-3, the
     Plan may be administered by different bodies with respect to Directors,
     Officers who are not Directors, and Employees who are neither Directors nor
     Officers.

          4.1.2 ADMINISTRATION WITH RESPECT TO DIRECTORS AND OFFICERS SUBJECT TO
     SECTION 16(b).  With respect to Option grants made to Employees who are
     also Officers or Directors subject to Section 16(b) of the Exchange Act,
     the Plan shall be administered by (A) the Board, if the Board may
     administer the Plan in compliance with the rules governing a plan intended
     to qualify as a discretionary plan under Rule 16b-3, or (B) a Committee
     designated by the Board to administer the Plan, which Committee shall be
     constituted to comply with the rules, if any, governing a plan intended to
     qualify as a discretionary plan under Rule 16b-3.  Once appointed, such
     Committee shall continue to serve in its designated capacity until
     otherwise directed by the Board.  From time to time the Board may increase
     the size of the Committee and appoint additional members, remove members
     (with or without cause) and substitute new members, fill vacancies (however
     caused), and remove all members of the Committee and thereafter directly
     administer the Plan, all to the extent permitted by the rules governing a
     plan intended to qualify as a discretionary plan under Rule 16b-3.  With
     respect to persons subject to Section 16 of the Exchange Act, transactions
     under the Plan are intended to comply with all applicable conditions of
     Rule 16b-3.  To the extent any provision of the Plan or action by the
     Administrator fails to so comply, it shall 

                                            A-3
<PAGE>
     be deemed null and void, to the extent permitted by law and deemed 
     advisable by the Administrator.

          4.1.3 ADMINISTRATION WITH RESPECT TO OTHER PERSONS.  With respect to
     Option grants made to Employees or Consultants who are neither Directors
     nor Officers of the Company, the Plan shall be administered by (a) the
     Board or (b)a Committee designated by the Board, which Committee shall be
     constituted to satisfy the legal requirements relating to the
     administration of stock option plans under state corporate and securities
     laws and the Code.  Once appointed, such Committee shall serve in its
     designated capacity until otherwise directed by the Board.  The Board may
     increase the size of the Committee and appoint additional members, remove
     members (with or without cause) and substitute new members, fill vacancies
     (however caused), and remove all members of the Committee and thereafter
     directly administer the Plan, all to the extent permitted by the legal
     requirements relating to the administration of stock option plans under
     state corporate and securities laws and the Code.

     4.2  POWERS OF THE ADMINISTRATOR.  Subject to the provisions of the Plan,
and in the case of a Committee, subject to the specific duties delegated by the
Board to such Committee, the Administrator shall have the authority, in its
discretion:  

          4.2.1 to grant Incentive Stock Options in accordance with Section 422
     of the Code, or Nonqualified Stock Options; 

          4.2.2 to authorize Sales of Shares of Common Stock hereunder; 

          4.2.3 to determine, upon review of relevant information and in
     accordance with Section 8.2 of the Plan, the fair market value of the
     Common Stock; 

          4.2.4 to determine the exercise/purchase price per Share of Options to
     be granted or Shares to be Sold, which exercise/purchase price shall be
     determined in accordance with Section 8.1 of the Plan; 

          4.2.5 to determine the Employees or Consultants to whom, and the time
     or times at which, Options shall be granted and the number of Shares to be
     represented by each Option; 

          4.2.6 to determine the Employees or Consultants to whom, and the time
     or times at which, Shares shall be Sold and the number of Shares to be
     Sold; 

          4.2.7 to interpret the Plan; 

          4.2.8 to prescribe, amend and rescind rules and regulations relating
     to the Plan; 

          4.2.9 to determine the terms and provisions of each Option granted
     (which need not be identical) and, with the consent of the holder thereof,
     modify or amend each Option; 

          4.2.10 to determine the terms and provisions of each Sale of Shares
     (which need not be identical) and, with the consent of the purchaser
     thereof, modify or amend each Sale; 

          4.2.11 to accelerate or defer (with the consent of the Optionee) the
     exercise date of

                                         A-4
<PAGE>

     any Option; 

          4.2.12 to accelerate or defer (with the consent of the Optionee or
     purchaser of Shares) the vesting restrictions applicable to Shares Sold
     under the Plan or pursuant to Options granted under the Plan; 

          4.2.13 to authorize any person to execute on behalf of the Company any
     instrument required to effectuate the grant of an Option or Sale of Shares
     previously granted or authorized by the Board; 

          4.2.14 to determine the restrictions on transfer, vesting
     restrictions, repurchase rights, or other restrictions applicable to Shares
     issued under the Plan; 

          4.2.15 to effect, at any time and from time to time, with the consent
     of the affected Optionees, the cancellation of any or all outstanding
     Options under the Plan and to grant in substitution therefor new Options
     under the Plan covering the same or different numbers of Shares, but having
     an Option price per Share consistent with the provisions of Section 8 of
     this Plan as of the date of the new Option grant; 

          4.2.16 to establish, on a case-by-case basis, different terms and
     conditions pertaining to exercise or vesting rights upon termination of
     employment, whether at the time of an Option grant or Sale of Shares, or
     thereafter;

          4.2.17 to approve forms of agreement for use under the Plan; 

          4.2.18 to reduce the exercise price of any Option to the then current
     fair market value if the fair market value of the Common Stock covered by
     such Option shall have declined since the date the Option was granted; 

          4.2.19 to determine whether and under what circumstances an Option may
     be settled in cash under subsection 9.6 instead of Common Stock; and

          4.2.20 to make all other determinations deemed necessary or advisable
     for the administration of the Plan.

     4.3  EFFECT OF BOARD'S DECISION.  All decisions, determinations and
interpretations of the Administrator shall be final and binding on all Optionees
and any other holders of any Options granted under the Plan or Shares Sold under
the Plan.

5.   ELIGIBILITY.

     5.1  PERSONS ELIGIBLE.  Options may be granted and/or Shares Sold only to
Employees and Consultants.  Incentive Stock Options may be granted only to
Employees.  An Employee or Consultant who has been granted an Option or Sold
Shares may, if he or she is otherwise eligible, be granted an additional Option
or Options or Sold additional Shares.

     5.2  ISO LIMITATION.  To the extent that the aggregate fair market value:
(i) of Shares subject to an Optionee's Incentive Stock Options granted by the
Company, any Parent or Subsidiary,

                                   A-5
<PAGE>

which (ii) become exercisable for the first time during any calendar year 
(under all plans of the Company or any Parent or Subsidiary) exceeds 
$100,000, such excess Options shall be treated as Nonqualified Stock Options. 
For purposes of this Section 5.2, Incentive Stock Options shall be taken 
into account in the order in which they were granted, and the fair market 
value of the Shares shall be determined as of the time of grant.

     5.3  SECTION 5.2 LIMITATIONS.  Section 5.2 of the Plan shall apply only to
an Incentive Stock Option evidenced by an Option Agreement which sets forth the
intention of the Company and the Optionee that such Option shall qualify as an
Incentive Stock Option.  Section 5.2 of the Plan shall not apply to any Option
evidenced by a Option Agreement which sets forth the intention of the Company
and the Optionee that such Option shall be a Nonqualified Stock Option.

     5.4  NO RIGHT TO CONTINUED EMPLOYMENT.  The Plan shall not confer upon any
Optionee any right with respect to continuation of employment or consulting
relationship with the Company, nor shall it interfere in any way with his or her
right or the Company's right to terminate his employment or consulting
relationship at any time, with or without cause.

     5.5  OTHER LIMITATIONS.  The following limitations shall apply to grants of
Options to Employees:

          5.5.1     No Employee shall be granted, in any fiscal year of the
     Company, Options to purchase more than 200,000 Shares.

          5.5.2     In connection with his or her initial employment, an
     Employee may be granted Options to purchase up to an additional 200,000
     Shares which shall not count against the limit set forth in subsection
     5.5.1 above.

          5.5.3     The foregoing limitations shall be adjusted proportionately
     in connection with any change in the Company's capitalization as described
     in Section 11.

          5.5.4     If an Option is canceled in the same fiscal year of the
     Company in which it was granted (other than in connection with a
     transaction described in Section 11), the canceled Option shall be counted
     against the limits set forth in subsections 5.5.1 and 5.5.2 above).  For
     this purpose, if the exercise price of an Option is reduced, the
     transaction will be treated as a cancellation of the Option and the grant
     of a new Option.

6.   TERM OF PLAN.

     The Plan shall become effective upon the earlier to occur of its adoption
by the Board or its approval by the stockholders of the Company as described in
Section 17 of the Plan.  It shall continue in effect for a term of ten (10)
years, unless sooner terminated under Section 13 of the Plan.

7.   TERM OF OPTION.  

     The term of each Option shall be stated in the Notice of Grant; provided,
however, that in the case of an Incentive Stock Option, the term shall be ten
(10) years from the date of grant or such shorter term as may be provided in the
Notice of Grant.  However, in the case of an Incentive Stock Option granted to
an Optionee who, at the time the Incentive Stock Option is granted, owns stock
representing 

                                     A-6
<PAGE>

more than ten percent (10%) of the voting power of all classes of stock of 
the Company or any Parent or Subsidiary, the term of the Incentive Stock 
Option shall be five (5) years from the date of grant thereof or such shorter 
term as may be provided in the Notice of Grant.

8.   EXERCISE/PURCHASE PRICE AND CONSIDERATION.

     8.1  EXERCISE/PURCHASE PRICE.  The per-Share exercise/purchase price for
the Shares to be issued pursuant to exercise of an Option or a Sale shall be
such price as is determined by the Administrator, but shall be subject to the
following:

          8.1.1     In the case of an Incentive Stock Option

                    (a)  granted to an Employee who, at the time of the grant 
          of such Incentive Stock Option, owns stock representing more than 
          ten percent (10%) of the voting power of all classes of stock of 
          the Company or any Parent or Subsidiary, the per Share exercise 
          price shall be no less than one hundred ten percent (110%) of the 
          fair market value per Share on the date of the grant.

                    (b)  granted to any other Employee, the per Share 
          exercise price shall be no less than one hundred percent (100%) of 
          the fair market value per Share on the date of grant.

          8.1.2     In the case of a Nonqualified Stock Option or Sale, the 
     per Share exercise/purchase price shall be determined by the 
     Administrator.

          8.1.3     Any determination to establish an Option exercise price 
     or effect a Sale of Common Stock at less than fair market value on the 
     date of the grant or authorization of Sale shall be accompanied by an 
     express finding by the Administrator specifying that the sale is in the 
     best interest of the Company, and specifying both the fair market value 
     and the Option exercise price or sale price of the Common Stock. 

     8.2  FAIR MARKET VALUE.  The fair market value per Share shall be
determined by the Administrator in its discretion; provided, however, that where
there is a public market for the Common Stock, the fair market value per Share
shall be the closing price of the Common Stock (or the closing bid if no sales
were reported) for the last market trading day prior to the date of grant of the
Option or authorization of Sale or other determination, as reported in THE WALL
STREET JOURNAL (or, if not so reported, as otherwise reported by the National
Association of Securities Dealers Automated Quotation (NASDAQ) System) or, in
the event the Common Stock is listed on a stock exchange, the fair market value
per Share shall be the closing price on such exchange for the last market
trading day prior to the date of grant of the Option or authorization of Sale or
other determination, as reported in THE WALL STREET JOURNAL. 

     8.3  CONSIDERATION.  The consideration to be paid for the Shares to be
issued upon exercise of an Option or pursuant to a Sale, including the method of
payment, shall be determined by the Administrator.  In the case of an Incentive
Stock Option, the Administrator shall determine the acceptable form of
consideration at the time of grant.  Such consideration may consist of:

          8.3.1     cash;

                                    A-7
<PAGE>

          8.3.2     check;

          8.3.3     transfer to the Company of Shares which 

                    (a) in the case of Shares acquired upon exercise of an 
          Option, have been owned by the Optionee for more than six months on 
          the date of surrender, and 

                    (b) have a fair market value on the date of surrender 
          equal to the aggregate exercise price of the Shares to be acquired; 

          8.3.4     delivery of instructions to the Company to withhold from
     the Shares that would otherwise be issued on the exercise that number of
     Shares having a fair market value at the time of such exercise equal to the
     Option exercise price;

          8.3.5     such other consideration and method of payment for the
     issuance of Shares to the extent permitted by legal requirements relating
     to the administration of stock option plans and issuances of capital stock
     under state corporate and securities laws and the Code; or

          8.3.6     any combination of the foregoing methods of payment.

     If the fair market value of the number of whole Shares transferred or the
number of whole Shares surrendered is less than the total exercise price of the
Option, the shortfall must be made up in cash or by check.  Notwithstanding the
foregoing provisions of this Section 8.3, the consideration for Shares to be
issued pursuant to a Sale may not include, in whole or in part, the
consideration set forth in subsections (iii) and (iv) above.

9.   EXERCISE OF OPTION.

     9.1  PROCEDURE FOR EXERCISE; RIGHTS AS A STOCKHOLDER.  Any Option granted
hereunder shall be exercisable at such times and under such conditions as
determined by the Administrator, including performance criteria with respect to
the Company and/or the Optionee, and as shall be permissible under the terms of
the Plan.

     An Option may not be exercised for a fraction of a Share.

     An Option shall be deemed to be exercised when written notice of such
exercise has been given to the Company in accordance with the terms of the
Option by the person entitled to exercise the Option and full payment for the
Shares with respect to which the Option is exercised has been received by the
Company.  Full payment may, as authorized by the Administrator, consist of any
consideration and method of payment allowable under the Option Agreement and
Section 8.3 of the Plan.  Each Optionee who exercises an Option shall, upon
notification of the amount due (if any) and prior to or concurrent with delivery
of the certificate representing the Shares, pay to the Company amounts necessary
to satisfy applicable federal, state and local tax withholding requirements.  An
Optionee must also provide a duly executed copy of any stock transfer agreement
then in effect and determined to be applicable by the Administrator.  Until the
issuance (as evidenced by the appropriate entry on the books of the Company or
of a duly authorized transfer agent of the Company) of the stock certificate
evidencing such Shares, no right to vote or receive dividends or any other
rights as a stockholder shall exist with respect to the Optioned Stock

                               A-8
<PAGE>

represented by such stock certificate, notwithstanding the exercise of the
Option.  No adjustment will be made for a dividend or other right for which the
record date is prior to the date the stock certificate is issued, except as
provided in Section 11 of the Plan.

     Exercise of an Option in any manner shall result in a decrease in the
number of Shares which thereafter may be available, both for purposes of the
Plan and for sale under the Option, by the number of Shares as to which the
Option is exercised.

     9.2  TERMINATION OF EMPLOYMENT OR CONSULTING RELATIONSHIP.  In the event
that an Optionee's Continuous Status as an Employee or Consultant terminates
(other than upon the Optionee's death or Disability) the Optionee may exercise
his or her Option, but only within such period of time as is determined by the
Administrator, and only to the extent that the Optionee was entitled to exercise
it at the date of termination (but in no event later than the expiration of the
term of such Option as set forth in the Notice of Grant).  In the case of an
Incentive Stock Option, the Administrator shall determine such period of time
(in no event to exceed ninety (90) days from the date of termination) when the
Option is granted.  If, at the date of termination, the Optionee is not entitled
to exercise his or her entire Option, the Shares covered by the unexercisable
portion of the Option shall revert to the Plan.  If, after termination, the
Optionee does not exercise his or her Option within the time specified by the
Administrator, the Option shall terminate, and the Shares covered by such Option
shall revert to the Plan.

     9.3  DISABILITY OF OPTIONEE.  In the event that an Optionee's Continuous
Status as an Employee or Consultant terminates as a result of the Optionee's
Disability, the Optionee may exercise his or her Option at any time within
twelve (12) months from the date of such termination, but only to the extent
that the Optionee was entitled to exercise it at the date of such termination
(but in no event later than the expiration of the term of such Option as set
forth in the Notice of Grant).  If, at the date of termination, the Optionee is
not entitled to exercise his or her entire Option, the Shares covered by the
unexercisable portion of the Option shall revert to the Plan.  If, after
termination, the Optionee does not exercise his or her Option within the time
specified herein, the Option shall terminate, and the Shares covered by such
Option shall revert to the Plan.

     9.4  DEATH OF OPTIONEE.  In the event of the death of an Optionee, the
Option may be exercised at any time within twelve (12) months following the date
of death (but in no event later than the expiration of the term of such Option
as set forth in the Notice of Grant), by the Optionee's estate or by a person
who acquired the right to exercise the Option by bequest or inheritance, but
only to the extent that the Optionee was entitled to exercise the Option at the
date of death.  If, at the time of death, the Optionee was not entitled to
exercise his or her entire Option, the Shares covered by the unexercisable
portion of the Option shall revert to the Plan.  If, after death, the Optionee's
estate or a person who acquired the right to exercise the Option by bequest or
inheritance does not exercise the Option within the time specified herein, the
Option shall terminate, and the Shares covered by such Option shall revert to
the Plan.

     9.5  RULE 16b-3.  Options granted to persons subject to Section 16(b) of
the Exchange Act must comply with Rule 16b-3 and shall contain such additional
conditions or restrictions as may be required thereunder to qualify for the
maximum exemption from Section 16 of the Exchange Act with respect to Plan
transactions.

     9.6  BUYOUT PROVISIONS.  The Administrator may at any time offer to buy out
for a payment in cash or Shares, an Option previously granted, based on such
terms and conditions as the Administrator

                                     A-9
<PAGE>

shall establish and communicate to the Optionee at the time that such offer 
is made.

10.  NONTRANSFERABILITY OF OPTIONS.  

     Except as otherwise specifically provided in the Option Agreement, an
Option may not be sold, pledged, assigned, hypothecated, transferred or disposed
of in any manner other than by will, or by the laws of descent and distribution,
and may be exercised during the lifetime of the Optionee only by the Optionee
or, if incapacitated, by his or her legal guardian or legal representative.

11.  ADJUSTMENTS UPON CHANGES IN CAPITALIZATION OR MERGER.  

     11.1 CHANGES IN CAPITALIZATION: Subject to any required action by the
stockholders of the Company, the number of shares of Common Stock covered by
each outstanding Option and the number of shares of Common Stock which have been
authorized for issuance under the Plan but as to which no Options have yet been
granted or Sales made or which have been returned to the Plan upon cancellation
or expiration of an Option, as well as the price per share of Common Stock
covered by each such outstanding Option, shall be proportionately adjusted for
any increase or decrease in the number of issued shares of Common Stock
resulting from a stock split, reverse stock split, stock dividend, combination
or reclassification of the Common Stock, or any other increase or decrease in
the number of issued shares of Common Stock effected without receipt of
consideration by the Company; provided, however, that conversion of any
convertible securities of the Company shall not be deemed to have been "effected
without receipt of consideration."  Such adjustment shall be made by the
Administrator, whose determination in that respect shall be final, binding and
conclusive.  Except as expressly provided herein, no issuance by the Company of
shares of stock of any class, or securities convertible into shares of stock of
any class, shall affect, and no adjustment by reason thereof shall be made with
respect to, the number or price of shares of Common Stock subject to an Option.

     11.2 DISSOLUTION OR LIQUIDATION.  In the event of the proposed dissolution
or liquidation of the Company, each outstanding Option will terminate
immediately prior to the consummation of such proposed action, unless otherwise
provided by the Administrator.  The Administrator may, in the exercise of its
sole discretion in such instances, declare that any Option shall terminate as of
a date fixed by the Board and give each Optionee the right to exercise his or
her Option as to all or any part of the Optioned Stock, including Shares as to
which the Option would not otherwise be exercisable.

     11.3 MERGER OR ASSET SALE.  In the event of a proposed sale of all or
substantially all of the assets of the Company, or the merger of the Company
with or into another corporation, each outstanding Option shall be assumed or an
equivalent option shall be substituted by such successor corporation or a Parent
or Subsidiary of such successor corporation, unless the Administrator
determines, in the exercise of its sole discretion and in lieu of such
assumption or substitution, that the Optionee shall have the right to exercise
the Option as to all of the Optioned Stock, including Shares as to which the
Option would not otherwise be exercisable.  If the Administrator makes an Option
fully exercisable in lieu of assumption or substitution in the event of a merger
or sale of assets, the Administrator shall notify the Optionee that the Option
shall be fully exercisable for a period of thirty (30) days from the date of
such notice or such shorter period as the Administrator may specify in the
notice, and the Option will terminate upon the expiration of such period.  For
the purposes of this paragraph, the Option shall be considered assumed if,
following the merger or sale of assets, the Option confers the right to
purchase, for each Share of Optioned Stock subject to the Option immediately
prior to the merger or sale of assets, the consideration (whether stock, cash,
or other securities or property) received in the merger or sale of assets by
holders of Common Stock for each 

                                 A-10
<PAGE>

Share held on the effective date of the transaction (and if holders were 
offered a choice of consideration, the type of consideration chosen by the 
holders of a majority of the outstanding Shares); provided, however, that if 
such consideration received in the merger or sale of assets was not solely 
common stock of the successor corporation or its Parent, the Administrator 
may, with the consent of the successor corporation and the Optionee, provide 
for the consideration to be received upon the exercise of the Option, for 
each Share of Optioned Stock subject to the Option, to be solely common stock 
of the successor corporation or its Parent equal in fair market value to the 
per share consideration received by holders of Common Stock in the merger or 
sale of assets.

12.  TIME OF GRANTING OPTIONS.  

     The date of grant of an Option shall, for all purposes, be the date on
which the Administrator makes the determination granting such Option.  Notice of
the determination shall be given to each Optionee within a reasonable time after
the date of such grant.

13.  AMENDMENT AND TERMINATION OF THE PLAN.

     13.1 AMENDMENT AND TERMINATION.  The Board may amend or terminate the Plan
from time to time in such respects as the Board may deem advisable.

     13.2 STOCKHOLDER APPROVAL.  The Company shall obtain stockholder approval
of any Plan amendment to the extent necessary and desirable to comply with Rule
16b-3 or with Section 422 of the Code (or any successor rule or statute or other
applicable law, rule or regulation, including the requirements of any exchange
or quotation system on which the Common Stock is listed or quoted).  Such
stockholder approval, if required, shall be obtained in such a manner and to
such a degree as is required by the applicable law, rule or regulation.

     13.3 EFFECT OF AMENDMENT OR TERMINATION.  Any such amendment or termination
of the Plan shall not affect Options already granted, and such Options shall
remain in full force and effect as if this Plan had not been amended or
terminated, unless mutually agreed otherwise between the Optionee and the
Administrator, which agreement must be in writing and signed by the Optionee and
the Company.

14.  CONDITIONS UPON ISSUANCE OF SHARES.  

     Shares shall not be issued pursuant to the exercise of an Option or a Sale
unless the exercise of such Option or consummation of the Sale and the issuance
and delivery of such Shares pursuant thereto shall comply with all relevant
provisions of law, including, without limitation, the Securities Act of 1933, as
amended, applicable state securities laws, the Exchange Act, the rules and
regulations promulgated thereunder, and the requirements of any stock exchange
(including NASDAQ) upon which the Shares may then be listed, and shall be
further subject to the approval of counsel for the Company with respect to such
compliance.

15.  RESERVATION OF SHARES.  

     The Company, during the term of this Plan, will at all times reserve and
keep available such number of Shares as shall be sufficient to satisfy the
requirements of the Plan.

16.  LIABILITY OF COMPANY.

                                    A-11
<PAGE>

     16.1 INABILITY TO OBTAIN AUTHORITY.  Inability of the Company to obtain
authority from any regulatory body having jurisdiction, which authority is
deemed by the Company's counsel to be necessary to the lawful issuance and sale
of any Shares hereunder, shall relieve the Company of any liability in respect
of the failure to issue or sell such Shares as to which such requisite authority
shall not have been obtained.

     As a condition to the exercise of an Option or a Sale, the Company may
require the person exercising such Option or to whom Shares are being Sold to
represent and warrant at the time of any such exercise or Sale that the Shares
are being purchased only for investment and without any present intention to
sell or distribute such Shares if, in the opinion of counsel for the Company,
such a representation is required by any of the aforementioned relevant
provisions of law.

     16.2 GRANTS EXCEEDING ALLOTTED SHARES.  If the Optioned Stock covered by an
Option exceeds, as of the date of grant, the number of Shares which may be
issued under the Plan without additional stockholder approval, such Option shall
be void with respect to such excess Optioned Stock, unless stockholder approval
of an amendment sufficiently increasing the number of Shares subject to the Plan
is timely obtained in accordance with Section 13 of the Plan.

17.  STOCKHOLDER APPROVAL.  

     Continuance of the Plan shall be subject to approval by the stockholders of
the Company within twelve months before or after the date the Plan is adopted. 
Such stockholder approval shall be obtained in the manner and to the degree
required under applicable federal and state law.

                                  A-12
<PAGE>
                      INTEGRATED MEASUREMENT SYSTEMS, INC.
          THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
 
    The undersigned shareholder of Integrated Measurement Systems, Inc., an
Oregon corporation (the "Company"), hereby appoints Keith L. Barnes and H.
Raymond Bingham, or either of them, with full power of substitution in each, as
proxies to cast all votes which the undersigned shareholder is entitled to cast
at the Annual Meeting of Shareholders (the "Annual Meeting") to be held at 10:00
a.m. on Tuesday May 5, 1998 at the Embassy Suites, 9000 SW Washington Square
Road in Tigard Oregon and any adjournments or postponements thereof upon the
following matters:
 
1.  PROPOSAL 1 -- Election of Two Directors for a Three-Year Term
 
    / /  FOR the nominees listed below (except as indicated below)
 
    / /  WITHHOLD AUTHORITY to vote for all nominees listed below
 
(INSTRUCTIONS: TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL NOMINEE, STRIKE
                        OUT THAT NOMINEE'S NAME SHOWN.)
 
                        KEITH L. BARNES  C. SCOTT GIBSON
 
2.  PROPOSAL TO APPROVE AMENDMENT TO THE 1995 STOCK INCENTIVE PLAN.
 
        / /  FOR                / /  AGAINST              / /  ABSTAIN
 
3.  PROPOSAL TO RATIFY SELECTION OF ARTHUR ANDERSEN LLP AS INDEPENDENT AUDITORS
    FOR THE 1998 FISCAL YEAR.
 
        / /  FOR                / /  AGAINST              / /  ABSTAIN
 
4.  IN THEIR DISCRETION, THE PROXIES ARE AUTHORIZED TO VOTE UPON SUCH OTHER
    MATTERS AS MAY PROPERLY COME BEFORE THE MEETING OR ANY ADJOURNMENTS OR
    POSTPONEMENTS THEREOF.
 
Please check the box if you plan to attend the Annual Meeting  / /
<PAGE>
    THIS PROXY, WHEN PROPERLY EXECUTED, WILL BE VOTED IN THE MANNER DIRECTED
HEREIN BY THE UNDERSIGNED SHAREHOLDER. UNLESS DIRECTION IS GIVEN, THIS PROXY
WILL BE VOTED "FOR" THE ELECTION OF THE NOMINEES LISTED IN PROPOSAL 1, "FOR"
PROPOSALS 2 AND 3, AND IN ACCORDANCE WITH THE RECOMMENDATIONS OF THE MAJORITY OF
THE BOARD OF DIRECTORS AS TO OTHER MATTERS. THE UNDERSIGNED HEREBY ACKNOWLEDGES
RECEIPT OF THE COMPANY'S PROXY STATEMENT AND HEREBY REVOKES ANY OTHER PROXY OR
PROXIES PREVIOUSLY GIVEN.
                                                 Dated _________________________
                                                 _______________________________
                                                 Shareholder (print name)
                                                 _______________________________
                                                 Shareholder (sign name)
                                                 Please sign exactly as your
                                                 name appears on the Proxy Card.
                                                 If shares are registered in
                                                 more than one name, the
                                                 signatures of all such persons
                                                 are required. A corporation
                                                 should sign in its full
                                                 corporate name by a duly
                                                 authorized officer, stating
                                                 his/her title. Trustees,
                                                 guardians, executors and
                                                 administrators should sign in
                                                 their official capacity, giving
                                                 their full titles as such. If a
                                                 partnership, please sign in the
                                                 partnership name by authorized
                                                 person(s). If you receive more
                                                 than one Proxy Card, please
                                                 sign and return all such cards
                                                 in the accompanying envelope.
 
PLEASE SIGN, DATE AND RETURN THIS PROXY CARD TODAY, USING THE ENCLOSED ENVELOPE


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