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EXHIBIT 23.1
INDEPENDENT AUDITORS' CONSENT
The Board of Directors SpeedFam-IPEC, Inc.
We consent to incorporation by reference in this registration statement
of SpeedFam-IPEC, Inc. of our reports dated June 27, 2000, relating to the
consolidated balance sheets of SpeedFam-IPEC, Inc. and subsidiaries as of June
3, 2000 and May 31, 1999, and the related consolidated statements of operations,
stockholders' equity and comprehensive income, and cash flows for each of the
three fiscal years in the period from June 1, 1997 to June 3, 2000, and related
schedule, and our report dated June 27, 2000, relating to the consolidated
balance sheets of SpeedFam-IPEC Co., Ltd. and subsidiaries as of April 30, 2000
and 1999, and the related consolidated statements of operations, stockholders'
equity and comprehensive income, and cash flows for each of the years in the
three-year period ended April 30, 2000, which reports appear in the 2000 annual
report on Form 10-K of SpeedFam-IPEC, Inc.
KPMG LLP
Chicago, Illinois
November 29, 2000
