SILICON VALLEY GROUP INC
PRE 14A, 1996-01-04
SPECIAL INDUSTRY MACHINERY, NEC
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<PAGE>   1
 
                            SCHEDULE 14A INFORMATION
 
          PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES
                              EXCHANGE ACT OF 1934
 
Filed by the Registrant /X/
 
Filed by a Party other than the Registrant / /
 
Check the appropriate box:
 
<TABLE>
<S>                                             <C>
/X/  Preliminary Proxy Statement                / /  Confidential, for Use of the Commission
                                                Only (as permitted by Rule 14a-6(e)(2))
/ /  Definitive Proxy Statement
/ /  Definitive Additional Materials
/ /  Soliciting Material Pursuant to sec.240.14a-11(c) or sec.240.14a-12
</TABLE>
 
                           SILICON VALLEY GROUP, INC.
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)
 
- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)
 
Payment of Filing Fee (Check the appropriate box):
 
/X/  $125 per Exchange Act Rules 0-11(c)(1)(ii), or 14a-6(i)(1), or 14a-6(i)(2)
     or Item 22(a)(2) of Schedule 14A.
 
/ /  $500 per each party to the controversy pursuant to Exchange Act Rule
     14a-6(i)(3).
 
/ /  Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.
 
     (1)  Title of each class of securities to which transaction applies:
 
     (2)  Aggregate number of securities to which transaction applies:
 
     (3)  Per unit price or other underlying value of transaction computed
          pursuant to Exchange Act Rule 0-11 (Set forth the amount on which the
          filing fee is calculated and state how it was determined):
 
     (4)  Proposed maximum aggregate value of transaction:
 
     (5)  Total fee paid:
 
/ /  Fee paid previously with preliminary materials.
 
/ /  Check box if any part of the fee is offset as provided by Exchange Act Rule
     0-11(a)(2) and identify the filing for which the offsetting fee was paid
     previously. Identify the previous filing by registration statement number,
     or the Form or Schedule and the date of its filing.
 
     (1)  Amount Previously Paid:
 
     (2)  Form, Schedule or Registration Statement No.:
 
     (3)  Filing Party:
 
     (4)  Date Filed:
<PAGE>   2
 
                           SILICON VALLEY GROUP, INC.
 
                    NOTICE OF ANNUAL MEETING OF STOCKHOLDERS
                          TO BE HELD FEBRUARY 22, 1996
 
     The Annual Meeting of Stockholders of SILICON VALLEY GROUP, INC., a
Delaware corporation (the "Company"), will be held at the Company's principal
executive offices located at 101 Metro Drive, San Jose, California, on Thursday,
February 22, 1996, at 3:00 p.m., Pacific Time, for the following purposes:
 
          1. To elect five directors.
 
          2. To approve an amendment to the Company's Certificate of
     Incorporation authorizing an increase of authorized stock from 40,000,000
     to 100,000,000.
 
          3. To approve the adoption of the Company's 1996 Employee Stock
     Purchase Plan and to reserve 1,000,000 shares for issuance thereunder.
 
          4. To transact such other business as may properly come before the
     meeting or any adjournment thereof.
 
     Stockholders of record at the close of business on December 22, 1995 will
be entitled to vote at the meeting.
 
                                          By Order of the Board of Directors
 
                                          LARRY W. SONSINI
                                          Secretary
 
San Jose, California
January 17, 1996
 
     IMPORTANT: TO ASSURE THAT YOUR SHARES ARE REPRESENTED AT THE MEETING PLEASE
FILL IN, DATE, SIGN AND MAIL PROMPTLY THE ENCLOSED PROXY IN THE POSTAGE-PREPAID
ENVELOPE PROVIDED. IF YOU ATTEND THE MEETING, YOU MAY CHOOSE TO VOTE IN PERSON
EVEN THOUGH YOU HAVE SENT IN YOUR PROXY.
<PAGE>   3
 
                           SILICON VALLEY GROUP, INC.
                                101 METRO DRIVE
                           SAN JOSE, CALIFORNIA 95110
 
                                PROXY STATEMENT
 
GENERAL
 
     The accompanying proxy is solicited by the Board of Directors of Silicon
Valley Group, Inc., a Delaware corporation (the "Company"), for use at the
Annual Meeting of Stockholders to be held on February 22, 1996, at 3:00 p.m.,
Pacific Time, or at any adjournment thereof. The meeting will be held at the
Company's principal executive offices located at 101 Metro Drive, San Jose,
California 95110. At the meeting, only stockholders of record at the close of
business on December 22, 1995 will be entitled to vote. On that date, the
Company's outstanding capital stock consisted of 29,268,078 shares of Common
Stock.
 
     This Proxy Statement and form of proxy were first sent or given to
stockholders on or about January 17, 1996, together with the Company's 1995
Annual Report to Stockholders.
 
VOTING AND SOLICITATION
 
     Each stockholder is entitled to one vote for each share of Common Stock
held on all matters presented at the meeting. However, if any stockholder at the
meeting and prior to the voting gives notice of the stockholder's intention to
cumulate votes for the election of directors, then all stockholders may (i)
cumulate their votes and give any one candidate a number of votes equal to the
number of directors to be elected multiplied by the number of votes to which
their shares are entitled; or (ii) distribute their votes on the same principle
among as many candidates as they choose, up to a maximum of five candidates.
 
     The cost of solicitation of proxies will be borne by the Company. The
Company may also reimburse brokerage houses and other custodians, nominees and
fiduciaries for their expenses incurred in forwarding solicitation materials to
the beneficial owners of shares held of record by such persons. It is
contemplated that proxies will be solicited principally through the mail, but
directors, officers and regular employees of the Company may, without additional
compensation, solicit proxies personally or by telephone, telegraph or special
letter.
 
REVOCABILITY OF PROXIES
 
     Any proxy given pursuant to this solicitation may be revoked by the person
giving it at any time before its use by delivering to the Secretary of the
Company a written notice of revocation or a duly executed proxy bearing a later
date, or by attending the meeting and voting in person.
 
QUORUM; ABSTENTIONS; BROKER NON-VOTES
 
     The required quorum for the transaction of business at the Annual Meeting
is a majority of the votes eligible to be cast by holders of shares of Common
Stock issued and outstanding on the Record Date. Shares that are voted "FOR,"
"AGAINST" or "WITHHELD FROM" a matter are treated as being present at the
meeting for purposes of establishing a quorum and are also treated as shares
entitled to vote at the Annual Meeting (the "Votes Cast") with respect to such
matter.
 
     While there is no definitive statutory or case law authority in Delaware as
to the proper treatment of abstentions, the Company believes that abstentions
should be counted for purposes of determining both (i) the presence or absence
of a quorum for the transaction of business and (ii) the total number of Votes
Cast with respect to a proposal (other than the election of directors). In the
absence of controlling precedent to the contrary, the Company intends to treat
abstentions in this manner. Accordingly, abstentions will have the same effect
as a vote against the proposal.
 
     In a 1988 Delaware case, Berlin v. Emerald Partners, the Delaware Supreme
Court held that, while broker non-votes should be counted for purposes of
determining the presence or absence of a quorum for the
<PAGE>   4
 
transaction of business, broker non-votes should not be counted for purposes of
determining the number of Votes Cast with respect to the particular proposal on
which the broker has expressly not voted. Accordingly, the Company intends to
treat broker non-votes in this manner. Thus, a broker non-vote will not affect
the outcome of the voting on a proposal (other than the amendment to the
Certificate of Incorporation).
 
                                 PROPOSAL ONE:
 
                             ELECTION OF DIRECTORS
 
     Management proposes election of the five persons named below as directors
of the Company for the coming year. The proxy holders named in the accompanying
proxy intend, unless authorization to do so is withheld, to vote for the
election of the five named persons. If a person other than a management nominee
is nominated, the proxy holders may choose to cumulate their votes and allocate
them among such nominees of management as the proxy holders shall determine in
their discretion in order to elect as many nominees of management as possible.
The five candidates receiving the highest number of votes will be elected. The
proxy holders have also advised that, in the event any nominee is unavailable
for election, which is not currently anticipated, they may vote in accordance
with their judgment for the election of substitute nominees designated by the
Board. The Company's By-laws provide for a minimum of four and a maximum of
seven directors. The Board currently consists of five persons. Each nominee will
hold office until the next annual meeting of stockholders or until such
nominee's successor is duly elected and qualified to serve, unless sooner
removed in accordance with applicable law.
 
     The following table sets forth information concerning the nominees for
director.
 
<TABLE>
<CAPTION>
                                YEAR     DIRECTOR
             NAME               BORN      SINCE                  PRINCIPAL OCCUPATION
- ------------------------------  ----     --------    ---------------------------------------------
<S>                             <C>      <C>         <C>
Papken S. Der Torossian(3)....  1938       1984      Chairman of the Board of Directors since
                                                     1991; Director since 1984; Chief Executive
                                                     Officer since February 1986; President from
                                                     1984 to 1991. Mr. Der Torossian has
                                                     previously held a variety of management and
                                                     executive positions, including 12 years in
                                                     engineering management at Hewlett-Packard Co.
William A. Hightower(1)(2)....  1943       1994      President and Chief Executive Officer of
                                                     Telematics International, Inc. Prior to
                                                     joining Telematics in 1989, Mr. Hightower was
                                                     Vice Chairman and Chief Executive Officer of
                                                     American Transtech, a subsidiary of AT&T
                                                     Corp. Mr. Hightower also serves as a director
                                                     of Jotan, Inc.
William L. Martin(1)(2)(3)....  1923       1986      Private investor; Chief Executive Officer of
                                                     Plantronics, Inc. prior to his retirement in
                                                     1980; founder and chief executive officer of
                                                     Zehntel, Inc. until 1978.
Larry W. Sonsini(2)...........  1941       1991      Member and Chairman of the Executive
                                                     Committee of Wilson Sonsini Goodrich &
                                                     Rosati, attorneys. Mr. Sonsini also serves as
                                                     a director of Lattice Semiconductor
                                                     Corporation, Novell, Inc. and PIXAR.
</TABLE>
 
                                        2
<PAGE>   5
 
<TABLE>
<CAPTION>
                                YEAR     DIRECTOR
             NAME               BORN      SINCE                  PRINCIPAL OCCUPATION
- ------------------------------  ----     --------    ---------------------------------------------
<S>                             <C>      <C>         <C>
Nam P. Suh(3).................  1936       1994      Cross Professor of Manufacturing and
                                                     Mechanical Engineering. Head of the
                                                     Department of Mechanical Engineering and
                                                     Director of the Manufacturing Institute at
                                                     the Massachusetts Institute of Technology.
                                                     Dr. Suh is also the Founder and a member of
                                                     the Board of Axiomatics Corporation, and
                                                     serves as Co-Editor-in-Chief of Robotics and
                                                     Computer-Integrated Manufacturing.
</TABLE>
 
- ---------------
(1) Member of the Audit Committee.
 
(2) Member of the Compensation Committee.
 
(3) Member of Technical Advisory Committee.
 
     See also "Stock Ownership of Certain Beneficial Owners and Management." A
description of the business experience of the other executive officers of the
Company is contained in the Company's Annual Report on Form 10-K for the fiscal
year ended September 30, 1995 filed with the Securities and Exchange Commission.
There are no family relationships between any of the Company's directors or
executive officers.
 
     During fiscal 1995, the Board of Directors held nine meetings. In April
1995, John McBennett, a nominee of Perkin-Elmer to the Board of Directors,
resigned as a result of the contractual relationship between the Company and
Perkin-Elmer no longer requiring such representation.
 
     The standard committees of the Board include an Audit Committee, a
Compensation Committee and, beginning in fiscal 1995, a Technical Advisory
Committee. There is no Nominating Committee.
 
     The Audit Committee held one meeting in fiscal 1995. The functions of the
Audit Committee include recommending appointment of the Company's independent
auditors to the Board of Directors and reviewing (i) the scope of the
independent auditors' annual audit and their compensation; (ii) the general
policies and procedures of the Company with respect to internal auditing,
accounting and financial controls; and (iii) any change in accounting
principles, significant audit adjustments proposed by the auditors and any
recommendations that the auditors may have with respect to policies and
procedures.
 
     The Compensation Committee held two meetings in fiscal 1995. The
Compensation Committee monitors the nature and levels of compensation paid by
the Company to its executive personnel and administers the Company's stock
option plans and employee stock purchase plan.
 
     The Technical Advisory Committee held two meetings in fiscal 1995. The
Technical Advisory Committee is responsible for monitoring and assessing the
state of the Company's technical operations.
 
     During fiscal 1995 (or such portion of fiscal 1995 during which a director
served as a member of the Board of Directors), no director attended fewer than
75 percent of the aggregate of (i) the total number of meetings of the Board of
Directors held and (ii) the total number of meetings held by all committees of
the Board of Directors on which such director served.
 
                                 PROPOSAL TWO:
 
             APPROVAL OF AMENDMENT TO CERTIFICATE OF INCORPORATION
 
     The Company's Certificate of Incorporation, as currently in effect (the
"Certificate"), provides that the Company is authorized to issue two classes of
stock: 40,000,000 shares of Common Stock, $0.01 par value per share; and
1,000,000 shares of Preferred Stock. On October 19, 1995, the Board of Directors
authorized an amendment to the Certificate to increase the authorized number of
shares of Common Stock from 40,000,000 to 100,000,000 shares. The stockholders
are being asked to approve at the Annual Meeting such amendment
 
                                        3
<PAGE>   6
 
to the Certificate. Under the proposed amendment, the first paragraph of Article
IV of the Restated Certificate of Incorporation would be amended to read as
follows:
 
     Capitalization.  This corporation is authorized to issue two classes of
     shares, designated "Common Shares" and "Preferred Shares," respectively.
     The number of Common Shares authorized to be issued is 100,000,000, and the
     par value of each such share is $0.01. The number of Preferred Shares
     authorized to be issued is 1,000,000, and the par value of each such share
     is $0.01.
 
     The Company currently has 40,000,000 authorized shares of Common Stock. As
of December 1, 1995, 29,268,220 shares of Common Stock were issued and
outstanding. In addition, 2,161,224 shares of Common Stock were reserved for
future grant or for issuance upon the exercise of outstanding options under the
Option Plan, 298,730 shares of Common Stock were reserved for issuance under the
Company's Employee Stock Purchase Plan (the "Purchase Plan") and 1,750,000
shares of Common Stock were reserved for issuance upon exercise of a warrant
held by SEMATECH, Inc.
 
PURPOSE AND EFFECT OF THE AMENDMENT
 
     The principal purpose of the proposed amendment to the Certificate is to
authorize additional shares of Common Stock which will be available in the event
the Board of Directors determines that it is necessary or appropriate to permit
future stock dividends or stock splits, to raise additional capital through the
sale of securities, to acquire other companies or their businesses or assets or
to establish strategic relationships with corporate partners. The Board of
Directors has no present agreement or arrangement to issue any of the shares for
which approval is sought. If the amendment is approved by the stockholders, the
Board of Directors does not intend to solicit further stockholder approval prior
to the issuance of any additional shares of Common Stock, except as may be
required by applicable law.
 
     The increase in authorized Common Stock will not have any immediate effect
on the rights of existing stockholders. However, the Board will have the
authority to issue authorized Common Stock without requiring future stockholder
approval of such issuances, except as may be required by applicable law. To the
extent that the additional authorized shares are issued in the future, they will
decrease the existing stockholders' percentage equity ownership and, depending
on the price at which they are issued, could be dilutive to the existing
stockholders. The holders of Common Stock have no preemptive rights.
 
POTENTIAL ANTI-TAKEOVER EFFECT
 
     The increase in the authorized number of shares of Common Stock and the
subsequent issuance of such shares could have the effect of delaying or
preventing a change in control of the Company without further action by the
stockholders. Shares of authorized and unissued Common Stock could (within the
limits imposed by applicable law) be issued in one or more transactions which
would make a change in control of the Company more difficult, and therefore less
likely. Any such issuance of additional stock could have the effect of diluting
the earnings per share and book value per share of outstanding shares of Common
Stock, and such additional shares could be used to dilute the stock ownership or
voting rights of a person seeking to obtain control of the Company. The Company
has previously adopted certain measures that may have the effect of helping to
resist an unsolicited takeover attempt, including provisions of the Certificate
authorizing the Board to issue up to 1,000,000 shares of Preferred Stock with
terms, provisions and rights fixed by the Board.
 
REQUIRED VOTE
 
     The approval of the amendment to the Certificate requires the affirmative
vote of a majority of the outstanding shares of Common Stock of the Company. An
abstention or non-vote is not an affirmative vote and, therefore, will have the
same effect as a vote against the proposal.
 
     THE BOARD OF DIRECTORS RECOMMENDS THAT THE STOCKHOLDERS VOTE "FOR" THE
AMENDMENT TO THE CERTIFICATE.
 
                                        4
<PAGE>   7
 
                                PROPOSAL THREE:
 
           APPROVAL OF ADOPTION OF 1996 EMPLOYEE STOCK PURCHASE PLAN
 
     The Employee Stock Purchase Plan (the "Old Purchase Plan") was adopted by
the Board of Directors of the Company in August 1986 and has been amended
numerous times since then. Initially, 600,000 shares were reserved for issuance
under the Purchase Plan. In October 1991 and February 1992, the Board of
Directors and stockholders, respectively approved an increase of 600,000 shares
bringing the number of shares issuable under the Purchase Plan to a total of
1,200,000. The Purchase Plan provides an opportunity and incentive for eligible
employees to become stockholders of their Company.
 
     On October 19, 1995, the Board of Directors resolved to terminate the Old
Purchase Plan, so that the offering period beginning April 1, 1995 is the last
offering period under the Old Purchase Plan. At the same time, the Board of
Directors resolved to adopt a new 1996 Employee Stock Purchase Plan (the "1996
Purchase Plan") and to reserve 1,000,000 shares for issuance thereunder, subject
to obtaining approval of the stockholders of the Company.
 
     At the Annual Meeting, the stockholders are being requested to approve the
1996 Purchase Plan and the shares reserved for issuance thereunder.
 
REQUIRED VOTE
 
     The approval of the adoption of the 1996 Purchase Plan and the shares
reserved for issuance thereunder requires the affirmative vote of a majority of
the outstanding shares of Common Stock of the Company. An abstention or non-vote
is not an affirmative vote and, therefore, will have the same effect as a vote
against the proposal.
 
     THE BOARD OF DIRECTORS RECOMMENDS THAT THE STOCKHOLDERS VOTE "FOR" THE
ADOPTION OF THE 1996 PURCHASE PLAN AND THE RESERVATION OF SHARES THEREUNDER.
 
GENERAL
 
     The 1996 Purchase Plan, and the right of participants to make purchases
thereunder, is intended to qualify under the provisions of Sections 421 and 423
of the Internal Revenue Code of 1986, as amended (the "Code"). See "Tax
Information" below. The purpose of the 1996 Purchase Plan is to provide
employees of the Company and its designated subsidiaries with an opportunity to
purchase Common Stock of the Company at discounted prices through payroll
deductions.
 
     As of December 1, 1995, approximately 2,100 employees would be eligible for
the 1996 Purchase Plan.
 
ADMINISTRATION
 
     The 1996 Purchase Plan would be administered by the Compensation Committee.
 
ELIGIBILITY AND PARTICIPATION
 
     Any person who is employed by the Company or any designated subsidiary for
a period of 30 days and who is customarily employed for at least 20 hours per
week and at least five months per calendar year is eligible to participate in
offerings under the 1996 Purchase Plan. Eligible employees become participants
in the 1996 Purchase Plan by delivering to the Company a subscription agreement
authorizing payroll deductions prior to the applicable offering period. An
employee who becomes eligible to participate in the 1996 Purchase Plan after the
commencement of an offering period may not participate in the 1996 Purchase Plan
until the commencement of the next offering period.
 
     Participation in the 1996 Purchase Plan is voluntary and is dependent on
each eligible employee's election to participate and his or her respective
determination as to the level of payroll deductions. Accordingly, future
purchases under the 1996 Purchase Plan are not determinable.
 
                                        5
<PAGE>   8
 
     The following table represents the participation of the Named Executive
Officers in the Old Purchase Plan in fiscal 1995:
 
                                 PLAN BENEFITS
                          EMPLOYEE STOCK PURCHASE PLAN
                                LAST FISCAL YEAR
 
<TABLE>
<CAPTION>
                                                                                         PAYROLL
                                                          NUMBER OF                    DEDUCTIONS
                 NAME OF INDIVIDUAL OR                     SHARES        DOLLAR           AS OF
             IDENTITY OF GROUP AND POSITION               PURCHASED     VALUE(1)     FISCAL YEAR END
- --------------------------------------------------------  ---------     --------     ---------------
<S>                                                       <C>           <C>          <C>
Papken S. Der Torossian.................................     3,773      $ 84,874        $  25,874
  Chairman of the Board and Chief Executive Officer
Robert J. Richardson....................................       -0-           -0-            7,388
  Vice President, Silicon Valley Group, Inc. and
  President, Track Systems Division
Edward A. Dohring.......................................       -0-           -0-              -0-
  Vice President, Silicon Valley Group, Inc. and
  President SVG Lithography Systems, Inc.
Russell G. Weinstock....................................       -0-           -0-              -0-
  Vice President, Finance and Chief Financial Officer
Steven L. Jensen........................................       -0-           -0-            8,513
  Vice President, Worldwide Sales and Service
All current executive officers as a group (9 persons)...     3,773        84,874           85,989
All other employees as a group..........................    27,267       424,761          823,918
</TABLE>
 
- ---------------
(1) Market value of shares on date of purchase, minus the purchase price under
    the Purchase Plan.
 
OFFERING DATES
 
     The 1996 Purchase Plan will be implemented by overlapping 12-month offering
periods that commence on April 1 and October 1 of each year. The Board of
Directors has the power to alter the duration of the offering periods without
stockholder approval, if such change is announced at least 5 days prior to the
commencement of the offering period to be affected.
 
PURCHASE PRICE
 
     Shares are purchased on the last business day of each offering period (a
"purchase date") unless a participant withdraws from the offering period prior
to such purchase date. The price per share at which shares are purchased in an
offering under the 1996 Purchase Plan is the lower of (i) 85% of the fair market
value of a share of Common Stock on the date of commencement of the 12-month
offering period (the "Entry Price"); or (ii) 85% of the fair market value of a
share of Common Stock on the purchase date (the "Ending Price").
 
PAYMENT OF PURCHASE PRICE; PAYROLL DEDUCTIONS
 
     The purchase price of the shares is accumulated by payroll deductions over
the offering period. Under the 1996 Purchase Plan, deductions may not exceed 10%
of a participant's compensation, including amounts deferred in multiple offering
periods under the 1996 Purchase Plan and/or the Old Purchase Plan. A participant
may not make additional contributions to his or her account.
 
PURCHASE OF STOCK; EXERCISE OF OPTION
 
     By executing a subscription agreement to participate in the 1996 Purchase
Plan, the employee is entitled to have shares placed under option to him or her
that are exercisable cumulatively at the end of each offering period. Subject to
Code limits, the maximum number of shares subject to option to a participant at
the beginning of the offering period is that number determined by dividing the
amount accumulated in such
 
                                        6
<PAGE>   9
 
participant's account during the offering period by the lower of the (i) Entry
Price or (ii) Ending Price. See also "Payment of Purchase Price; Payroll
Deductions" above.
 
     Unless the employee's participation is discontinued prior to a purchase
date, his or her option for the purchase of shares will be exercised
automatically at the end of the offering period at the applicable price.
 
WITHDRAWAL; TERMINATION OF EMPLOYMENT
 
     A participant's interest in a given offering period may be terminated in
whole, but not in part, by signing and delivering to the Company a notice of
withdrawal from the 1996 Purchase Plan. Such withdrawal may be made at any time
prior to the end of the applicable offering period. A participant's withdrawal
from one offering period does not have any effect upon such participant's
eligibility to participate in subsequent offerings under the 1996 Purchase Plan
(except that certain restrictions may be imposed on officers and directors
pursuant to Rule 16b-3). Upon withdrawal from an offering period, all payroll
deductions that have been credited to the participant's account and that have
not been applied toward the purchase of shares of Common Stock within such
offering period will be returned to the participant without interest.
 
     Termination of a participant's employment for any reason, including failure
to be scheduled to work at least 20 hours per week, retirement or death, cancels
the participant's participation in the 1996 Purchase Plan immediately. In such
event, the payroll deductions credited to the participant's account will be
returned to such participant or to his or her beneficiaries without interest.
 
CAPITAL CHANGES
 
     In the event any change is made in the Company's capitalization, such as a
stock split or payment of a stock dividend, which change results in an increase
or decrease in the number of shares of Common Stock outstanding without receipt
of consideration by the Company, appropriate adjustment shall be made in the
exercise price and in the number of shares subject to options outstanding under
the 1996 Purchase Plan, as well as in the number of shares reserved for issuance
under the 1996 Purchase Plan.
 
     In the event of a sale or merger of the Company to or into another
corporation, the offering periods then in progress shall be shortened and shall
terminate immediately prior to the consummation of such transaction.
 
AMENDMENT AND TERMINATION OF THE PLAN
 
     The Board of Directors may at any time amend or terminate the 1996 Purchase
Plan. No such termination or amendment may affect previously granted purchase
rights. Amendments to the 1996 Purchase Plan or to options thereunder that would
adversely affect the rights of any participant under an option theretofore
granted may be effective as to such options only if the participant's consent is
obtained. No amendment may be made to the 1996 Purchase Plan without approval of
the stockholders of the Company if stockholder approval of such amendment is
necessary and desirable to comply with Section 423 of the Code or with Rule
16b-3, or any successor rule.
 
TAX INFORMATION
 
     The 1996 Purchase Plan, and the right of participants to make purchases
thereunder, is intended to qualify under the provisions of Sections 421 and 423
of the Code. Under these provisions, no income will be taxable to a participant
at the time of grant of the option or purchase of shares. Upon disposition of
the shares, the participant will generally be subject to tax and the amount of
the tax will depend upon the holding period.
 
     If the shares have been held by the participant for more than two years
after the first day of the offering period and for more than one year after the
date of purchase, the lesser of (i) the excess of the fair market value of the
shares at the time of such disposition over the purchase period or (ii) 15% of
the fair market value of the shares at the date of commencement of the offering
period, will be treated as ordinary income. If the shares are sold and the sale
price is less than the purchase price, there is no ordinary income and the
participant has a capital loss for the difference. If the shares are disposed of
before the expiration of these holding periods, the excess of the fair market
value of the shares on the purchase date over the purchase price
 
                                        7
<PAGE>   10
 
will be treated as ordinary income, and any further gain or loss on such
disposition will be long-term or short-term capital gain or loss, depending on
the holding period.
 
     Different rules may apply with respect to participants subject to Section
16 of the Exchange Act.
 
     The Company is not entitled to a deduction for amounts taxed as ordinary
income or capital gain to a participant except to the extent of ordinary income
recognized by participants upon disposition of shares prior to the expiration of
the holding periods described above.
 
     The foregoing is only a brief summary of the effect of federal income
taxation upon the participant and the Company with respect to the shares
purchased under the 1996 Purchase Plan, does not purport to be complete, and
does not discuss the tax consequences of a participant's death or the income tax
laws of any municipality, state or foreign country in which a participant may
reside.
 
          STOCK OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT
 
     The following table sets forth certain information regarding the Company's
Common Stock beneficially owned as of December 1, 1995 by (i) each person known
by the Company to own beneficially more than 5% of the Company's Common Stock;
(ii) each director of the Company; (iii) each of the four most highly paid
executive officers of the Company earning more than $100,000 in fiscal 1995 (the
"Named Executive Officers") and (iv) all directors and executive officers of the
Company as a group:
 
<TABLE>
<CAPTION>
                                                                       AMOUNT AND
                                                                  NATURE OF BENEFICIAL
                              NAME                                     OWNERSHIP           PERCENT(1)
- ----------------------------------------------------------------  --------------------     ----------
<S>                                                               <C>                      <C>
SEMATECH, Inc. .................................................        1,750,000(2)          5.64
  2706 Metropolis
  Austin, TX 78741-6499
Waddell & Reed, Inc. ...........................................        1,745,100(3)          5.63
  6300 Lamar
  Shawnee Mission, KS 66201
Papken S. Der Torossian.........................................          383,995(4)          1.23
William A. Hightower............................................            2,000(5)             *
William L. Martin...............................................            4,800(6)             *
Larry W. Sonsini................................................            9,800(7)             *
Nam P. Suh......................................................            2,000(8)             *
Robert J. Richardson............................................            7,804(9)             *
Edward A. Dohring...............................................           17,500(10)            *
Russell G. Weinstock............................................           16,651(11)            *
Steven L. Jensen................................................           31,000(12)            *
All directors and executive officers as a group (13 persons)....          494,575(13)         1.58
</TABLE>
 
- ---------------
  *  Less than 1%
 
 (1) Computed on the basis of 31,018,220 shares of Common Stock and shares of
     common stock issuable upon exercise of a warrant to purchase Common Stock
     at an exercise price of $13.625 per share as of December 1, 1995 plus, with
     respect to those persons holding options to purchase Common Stock
     exercisable within 60 days of December 1, 1995, the number of shares of
     Common Stock that are issuable upon exercise thereof.
 
 (2) Includes warrants to purchase 1,750,000 shares exercisable within 60 days
     after December 1, 1995.
 
 (3) Based on information received from Waddell & Reed, Inc.
 
 (4) Includes 240,215 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
 (5) Includes 2,000 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
 (6) Includes 3,300 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
                                        8
<PAGE>   11
 
 (7) Includes 9,800 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
 (8) Includes 2,000 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
 (9) Includes 7,804 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
(10) Includes 17,500 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
(11) Includes 12,750 shares subject to options which are exercisable within 60
days after December 1, 1995.
 
(12) Includes 31,000 shares subject to options which are exercisable within 60
     days after December 1, 1995.
 
(13) Includes 345,394 shares subject to options which are exercisable within 60
days after December 1, 1995.
 
COMPLIANCE WITH SECTION 16(A) FILING REQUIREMENTS
 
     Section 16(a) of the Securities Exchange Act of 1934, as amended (the
"Exchange Act"), requires the Company's directors, officers and beneficial
owners of more than 10% of the Company's Common Stock to file with the
Securities and Exchange Commission (the "SEC") initial reports of ownership and
reports of changes in ownership of Common Stock and other equity securities of
the Company. Based solely on its review of the copies of such reports received
by it, or written representations from reporting persons, the Company believes
that during the fiscal year ended September 30, 1995, its officers, directors
and holders of more than 10% of the Company's Common Stock complied with all
Section 16(a) filing requirements.
 
                             EXECUTIVE COMPENSATION
 
DIRECTOR COMPENSATION
 
     Directors' fees of $1,500 per Board meeting attended and a $2,500 quarterly
retainer are paid to directors who are not employees of the Company. Directors
are also reimbursed for reasonable expenses incurred in attending Board and
committee meetings. Members of the Board committees who are not part of the
Company's management receive $500 per committee meeting attended. During fiscal
1995, directors Martin and Sonsini, who were not employees of the Company, were
each granted an option to purchase 5,000 shares of Common Stock pursuant to the
Option Plan at a per share exercise price of $44.375 and $44.50, respectively.
Upon his first becoming a director in October 1994, Dr. Suh was granted an
option to purchase 10,000 shares of Common Stock pursuant to the Option Plan at
a per share exercise price of $19.625. Upon his first becoming a director in
December 1994, Mr. Hightower was granted an option to purchase 10,000 shares of
Common Stock pursuant to the Option Plan at a per share exercise price of
$19.5625. During fiscal 1995, Mr. Martin and Dr. Suh performed certain
consulting services to the Company for which they received fees of $7,500 and
$26,000, respectively.
 
EXECUTIVE EMPLOYMENT AGREEMENTS
 
     On August 1, 1994, the Company entered into a five-year employment
agreement (the "Employment Agreement") with Papken S. Der Torossian, Chairman of
the Board and Chief Executive Officer of the Company. The Employment Agreement
provides for a base salary of $370,000 per annum, or such higher rate as the
Company's Board of Directors may determine from time to time, along with such
performance bonus amounts and car allowances, if any, as the Board shall
authorize, in its discretion, from time to time, and provides that Mr. Der
Torossian shall be eligible to participate in the employee benefit plans and
executive compensation programs maintained by the Company. In the event of Mr.
Der Torossian's (i) termination of employment by the Company without cause; (ii)
termination by the Company within twelve (12) months of a change in control;
(iii) death or disability; or (iv) voluntary termination due to a material
reduction in salary or benefits or a material change in responsibilities or a
requirement to relocate, Mr. Der Torossian shall be paid an amount equal to 200%
of the base salary in effect on the date of such termination plus an amount
equal to 200% of the aggregate bonus and car allowance, if any, paid to Mr. Der
Torossian for the immediately preceding fiscal year or during the preceding
twelve month period, whichever is greater.
 
     On October 3, 1994, the Company entered into an employment agreement
expiring December 31, 1999 (the "Weinstock Agreement") with Russell G.
Weinstock, Vice President of Finance, Chief Financial Officer
 
                                        9
<PAGE>   12
 
and Assistant Secretary of the Company. The Weinstock Agreement provides for a
base salary of $195,000 per annum, or such higher rate as the Company's Board of
Directors may determine from time to time, along with such performance bonus
amounts and car allowances, if any, as the Board shall authorize, in its
discretion, from time to time (collectively, the "Base Compensation"), and
provides that Mr. Weinstock shall be eligible to participate in the employee
benefit plans and executive compensation programs maintained by the Company. In
the event of Mr. Weinstock's (i) termination of employment by the Company
without cause or (ii) death or disability, Mr. Weinstock shall be paid an amount
equal to 150% of the Base Compensation in effect on the date of such
termination. In the event that Mr. Weinstock is terminated by the Company within
twelve (12) months of a change in control, Mr. Weinstock will be paid an amount
equal to 200% of the Base Compensation in effect on the date of such
termination.
 
COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION
 
     The members of the Compensation Committee of the Board of Directors during
fiscal 1995 were Messrs. Hightower, Martin, Pollack and Sonsini. All members are
or were non-employee directors. Mr. Sonsini is a partner in and Chairman of the
Executive Committee of Wilson Sonsini Goodrich & Rosati, Professional
Corporation, a law firm based in Palo Alto, California. This firm serves as the
Company's primary outside legal counsel. No member of the Compensation Committee
has a relationship that would constitute an interlocking relationship with
executive officers or directors of another entity.
 
COMPENSATION COMMITTEE REPORT
 
     The Compensation Committee sets, reviews and administers the executive
compensation program of the Company and is comprised of the individuals listed
below, all of whom are non-employee directors of the Company. The role of the
Compensation Committee is to establish and approve salaries and other
compensation paid to the executive officers of the Company and to administer the
Company's stock option plans and employee stock purchase plan.
 
     Compensation Philosophy.  The Company's compensation philosophy is that
cash compensation should be directly linked to the short-term performance of the
Company and that longer-term incentives, such as stock options, should be
aligned with the objective of enhancing stockholder value over the long term.
The use of stock options clearly links the interests of the officers and
employees of the Company to the interests of the stockholders. In addition, the
Compensation Committee believes that the total compensation package must be
competitive with other companies in the industry to ensure that the Company can
continue to attract, retain and motivate key employees who are critical to the
long-term success of the Company.
 
     As a result of federal tax legislation recently enacted, the Company will
not be allowed a federal income tax deduction for compensation paid to certain
executive officers to the extent that compensation exceeds $1 million per
officer in any fiscal year. No officer of the Company has received compensation
in excess of $1 million to date. The Compensation Committee will continue to
monitor this issue and will formulate a policy with respect to this limitation
on deductibility when appropriate.
 
     Components of Executive Compensation.  The principal cash components of
executive compensation are base salary and cash bonuses.
 
     Base salary is set based on competitive factors and the historic salary
structure for various levels of responsibility within the Company. The
Compensation Committee annually conducts surveys of companies in the industry in
order to determine whether the Company's executive base salaries are in a
competitive range. Generally, salaries are set at the middle of the range. A
significant portion of each executive's total compensation is intended to be
variable and to relate to and be contingent upon Company performance.
 
     Bonuses are awarded annually to executive officers as recommended by the
Chief Executive Officer and reviewed and approved by the Compensation Committee.
In establishing the overall level of executive bonuses, the Compensation
Committee considers data from surveys of the bonus amounts paid by other
companies in similar businesses. The amount of bonus for each executive consists
of an amount which is based upon the operating profit plan and cash flow
objectives of the Company approved by the entire Board of
 
                                       10
<PAGE>   13
 
Directors at the beginning of the fiscal year. An additional smaller bonus is
discretionary, based upon that executive meeting certain objectives set out for
him relating to his area of activity. The operating profit and cash flow
components of the bonus plan emphasize the Compensation Committee's belief that,
when the Company is successful, the executive's compensation should be higher,
but that, conversely, if the Company is not successful and is not profitable,
bonuses should be minimal. Depending upon the level of the executive, the
Company targets between 40% and 60% of the total compensation to be variable and
based upon the Company meeting 100% of its budgetary performance plan. If
performance fell below 70% of plan, no performance bonus would be paid. Each
individual executive officer's bonus is determined, based upon the executive's
base salary, profitability of the Company, attainment of cash flow objectives
and the executive's individual performance.
 
     The principal equity component of executive compensation is the stock
option program. Stock options are generally granted when an executive joins the
Company and periodically thereafter. Options vary with the responsibility level
of the executive. The initial option granted to the executive vests over a
period of four or five years. This provides a method of retention and motivation
for the senior level executives of the Company and also aligns senior
management's objectives with long-term stock price appreciation. This approach
is designed to encourage the creation of stockholder value over the long term
since no benefit is realized from the stock option grant unless the price of the
Common Stock rises over a number of years. In addition to the stock option
program, all eligible employees of the Company may participate in a payroll
deduction employee stock purchase plan pursuant to which stock may be purchased
at 85% of the fair market value at the beginning or end of each one-year
offering period (up to a maximum of $25,000 worth per calendar year or 10% of
annual compensation, whichever is less).
 
     Other elements of executive compensation are participation in a
Company-wide life insurance program as well as Company-wide medical benefits and
the ability to defer compensation pursuant to a 401(k) plan. The Company makes
matching contributions under the 401(k) plan based on the amount of the
employee's compensation, up to a maximum of 3% of compensation.
 
     The Compensation Committee believes that the compensation levels of the
Company's executive officers are competitive and in line with those of
comparable companies.
 
                                          Compensation Committee of the Board of
                                          Directors
 
                                          William L. Martin, Chairman
                                          Larry W. Sonsini
                                          William A. Hightower
 
                                       11
<PAGE>   14
 
EXECUTIVE COMPENSATION
 
     The following table sets forth the compensation paid during the last three
fiscal years to the Company's Chief Executive Officer and to the four other
Named Executive Officers:
 
                           SUMMARY COMPENSATION TABLE
 
<TABLE>
<CAPTION>
                                                                                 LONG-TERM
                                                                                COMPENSATION
                                               ANNUAL COMPENSATION(1)           ------------
                                        -------------------------------------   STOCK OPTION
                               FISCAL                          OTHER ANNUAL        GRANTS       ALL OTHER
 NAME AND PRINCIPAL POSITION    YEAR     SALARY    BONUS(2)   COMPENSATION(3)   (# OF SHS.)    COMPENSATION
- -----------------------------  ------   --------   --------   ---------------   ------------   ------------
<S>                            <C>      <C>        <C>        <C>               <C>            <C>
Papken S. Der Torossian......   1995    $444,133   $415,708       $ 4,620          150,000      $ 2,359(4)
  Chairman of the Board and     1994     370,000    342,361         4,620          250,000        1,961(5)
  Chief Executive Officer       1993     354,321    185,370         4,497          150,000        1,777(4)
Robert J. Richardson.........   1995     206,922    119,446         6,962           48,840       52,459(6)
  Vice President, Silicon
     Valley                     1994     184,230    107,443         6,029           20,000          570(4)
  Group, Inc. and President,    1993     174,039     63,720         3,281           10,000          539(4)
  Track Systems Division
Edward A. Dohring............   1995     213,172    123,054         4,620           30,000       13,735(6)
  Vice President, Silicon
     Valley                     1994     185,164    124,487         4,811           20,000        1,234(4)
  Group, Inc. and President,
     SVG                        1993     172,067     63,189         4,845           20,000        1,178(4)
  Lithography Systems, Inc.
Russell G. Weinstock.........   1995     213,173    132,487         4,620           30,000          832(4)
  Vice President of Finance
     and                        1994     183,462    114,352         4,868           25,000          658(4)
  Chief Financial Officer       1993     170,287     63,700         5,127           20,000          607(4)
Steven L. Jensen.............   1995     191,154    111,825         5,054           20,000          507(4)
  Vice President, Worldwide     1994     174,700    101,885         5,487           20,000          431(4)
  Sales and Service             1993     164,027     61,075         3,179           20,000          374(4)
</TABLE>
 
- ---------------
(1) Excludes certain perquisites and other amounts, such as car allowance,
    which, for any executive officer, in the aggregate did not exceed the lesser
    of $50,000 or 10% of the total annual salary and bonus for such executive
    officer.
 
(2) Includes bonus amounts earned during the fiscal year indicated even if such
    amounts are paid in another fiscal year.
 
(3) Represents Company matching contributions to the named executive officer's
    401(k) plan account.
 
(4) Represents split-life insurance premiums paid by the Company for the benefit
    of the named executive officer.
 
(5) Represents split-life insurance premiums paid by the Company for the benefit
    of the named executive officer. Does not include $226,877 in compensation
    resulting from loan interest forgiveness and tax reimbursement.
 
(6) For Messrs. Richardson and Dohring, represents $51,783 and $12,198,
    respectively, for relocation expenses and $676 and $1,537, respectively, for
    split-life insurance premiums paid by the Company for the benefit of such
    executive officers.
 
                                       12
<PAGE>   15
 
OPTIONS GRANTED AND OPTIONS EXERCISED IN THE LAST FISCAL YEAR
 
     The following tables set forth information regarding stock options granted
to and exercised by the Named Executive Officers during the last fiscal year, as
well as options held by such officers as of September 30, 1995:
 
                       OPTION GRANTS IN LAST FISCAL YEAR
 
<TABLE>
<CAPTION>
                                                                                POTENTIAL REALIZABLE VALUE
                                                                                AT ASSUMED ANNUAL RATES OF
                                            INDIVIDUAL GRANTS(1)                 STOCK PRICE APPRECIATION
                                --------------------------------------------       (THROUGH EXPIRATION
                                            % OF                                         DATE)(2)
                                            TOTAL     EXERCISE                  --------------------------
                                OPTION     OPTIONS     PRICE      EXPIRATION      5% PER
             NAME               GRANTS     GRANTED     ($/SH)        DATE          YEAR       10% PER YEAR
- ------------------------------  -------    -------    --------    ----------    ----------    ------------
<S>                             <C>        <C>        <C>         <C>           <C>           <C>
Papken S. Der Torossian.......  150,000      20.4     $ 26.875      4/17/02     $1,641,000     $3,825,000
Robert J. Richardson..........   48,840       6.6       24.621      4/17/02        489,700      1,141,000
Edward A. Dohring.............   30,000       4.1       24.458      4/17/02        298,800        696,000
Russell G. Weinstock..........   30,000       4.1       24.458      4/17/02        298,800        696,000
Steven L. Jensen..............   20,000       2.7       26.875      4/17/02        218,900        510,000
</TABLE>
 
- ---------------
(1) These options were granted under the Company's Option Plan in October,
    February and April of fiscal 1995 and have an exercise price equal to the
    fair market value of the Company's Common Stock as of the date of grant.
    Each of the options vests cumulatively over a period of four years from the
    date of grant.
 
(2) The Potential Realizable Values are calculated based on the fair market
    value on the date of grant, which is equal to the exercise price of options
    granted in fiscal 1995, assuming that the stock appreciates in value from
    the date of grant until the end of the option term at the annual rate
    specified (5% and 10%). Potential Realizable Values are net of the option
    exercise price. The assumed rates of appreciation are specified in rules of
    the Securities and Exchange Commission, and do not represent the Company's
    estimate or projection of its future stock price. Actual gains, if any,
    resulting from stock option exercises and Common Stock holdings are
    dependent on the future performance of the Common Stock, overall stock
    market conditions, as well as the option holder's continued employment
    through the exercise/ vesting period. There can be no assurance that the
    amounts reflected in this table will be achieved.
 
                      OPTION EXERCISES IN LAST FISCAL YEAR
                       AND FISCAL YEAR END OPTION VALUES
 
<TABLE>
<CAPTION>
                                                                     NUMBER OF
                                                                    UNEXERCISED            VALUE OF UNEXERCISED
                                                                 OPTIONS AT FISCAL                OPTIONS
                                   SHARES                             YEAR END             AT FISCAL YEAR END(1)
                                  ACQUIRED         VALUE        --------------------     -------------------------
             NAME                ON EXERCISE      REALIZED      VESTED      UNVESTED       VESTED        UNVESTED
- -------------------------------  -----------     ----------     -------     --------     ----------     ----------
<S>                              <C>             <C>            <C>         <C>          <C>            <C>
Papken S. Der Torossian........    329,285       $5,529,000     218,215      352,500     $6,653,000     $7,781,000
Robert J. Richardson...........     15,000          405,000       5,304       68,536         85,000      1,342,000
Edward A. Dohring..............         --               --      15,000       69,000        469,000      1,627,000
Russell G. Weinstock...........     36,500        1,359,000       7,750       67,250        243,000      1,526,000
Steven L. Jensen...............         --               --      31,000       59,000        983,000      1,439,000
</TABLE>
 
- ---------------
(1) Represents the difference between the exercise price of the options and the
    closing price of the Company's Common Stock as reported on the Nasdaq
    National Market on September 30, 1995.
 
                                       13
<PAGE>   16
 
COMPARISON OF TOTAL CUMULATIVE STOCKHOLDER RETURN
 
     The following graph sets forth the Company's total cumulative stockholder
return as compared to the S&P 500 Index and the Russell 2000 Index for the past
five fiscal years. The total stockholder return assumes $100 invested at the
beginning of the period in Common Stock of the Company, the S&P 500, and the
Russell 2000 Index. Total return assumes reinvestment of dividends. Historical
stock price performance is not necessarily indicative of future stock price
performance.
 
 
<TABLE>
<CAPTION>
                           September   September   September   September   September   September
                             1990        1991        1992        1993        1994        1995
                           ---------   ---------   ---------   ---------   ---------   ---------
<S>                        <C>         <C>         <C>         <C>         <C>         <C>
SVGI......................    100.00      126.19      0.9524      211.90      273.81      735.71
S&P 500...................    100.00      131.29      145.75      164.71      170.74      221.63
Russell 2000..............    100.00      145.08      158.05      210.46      216.08      266.57

</TABLE>
 
                                       14
<PAGE>   17
 
                              CERTAIN TRANSACTIONS
 
TRANSACTIONS WITH PERKIN-ELMER
 
     In July 1992, the Company purchased all 1,990,000 shares of the common
stock of SVG Lithography Systems, Inc. ("SVGL") held by Perkin-Elmer and a
promissory note in the aggregate principal amount of $8,200,000 payable by SVGL
to Perkin-Elmer. The purchase price for such shares and note was 10,000 shares
of the Company's Series A Preferred Stock. On March 14, 1995, the Series A
Preferred Stock was converted into 1,000,000 shares of the Company's Common
Stock. The Series A Preferred Stock accrued cumulative quarterly dividends of 7%
per annum. During fiscal 1995, the Company issued 27,692 Shares of Common Stock
in satisfaction of the quarterly dividend amounts due. On March 23, 1995, the
Company filed a Registration Statement on Form S-3 pursuant to which the Company
sold 3,192,606 shares of Common Stock and Perkin-Elmer sold its entire holding
of 1,807,394 shares of Common Stock, including 1,000,000 shares from the
conversion of the Series A Preferred Stock.
 
AGREEMENTS WITH EXECUTIVE OFFICERS
 
     See also "Executive Compensation -- Executive Employment Agreements."
 
                             EMPLOYEE BENEFIT PLANS
 
STOCK OPTION PLANS
 
     The Company has four stock option plans that provide for the grant of
options to employees and directors of the Company, the 1981 Amended Stock Option
Plan, the 1982 Employee Stock Option Plan and the 1984 Stock Option Plan
(collectively, the "Plans") and the 1987 Stock Option Plan, as amended (the
"Option Plan"). These plans provide for the grant of "incentive stock options"
qualified under Section 422 of the Code as well as nonstatutory options. Since
1981, an aggregate of 4,480,000 shares of Common Stock have been reserved for
issuance under the four plans. At December 1, 1995, options to purchase an
aggregate of 1,605,005 shares were outstanding under all the plans, and 556,219
shares were available for additional grants under the Option Plan.
 
     General.  The Option Plan gives the Board, or a committee which the Board
may appoint from among its members, authority to grant options to purchase
Common Stock. Options granted under the Option Plan may be either "incentive
stock options" as defined in Section 422 of the Code, or nonstatutory stock
options, as determined by the Board or its committee.
 
     Purpose.  The purpose of the Option Plan is to enable the company to grant
to key employees and directors an opportunity to acquire Common Stock, thereby
providing them with an inducement to remain in the service of the Company,
contribute to the Company's success and aid in attracting other capable
personnel.
 
     Administration of the Option Plan.  The Option Plan is currently
administered by the Compensation Committee of the Board of Directors (the
"Committee"). Subject to the other provisions of the Option Plan, the Committee
has the sole authority to determine (i) the persons to whom options to purchase
shares of Common Stock shall be granted; (ii) the number of shares to be granted
to each optionee; (iii) the price to be paid for the shares upon the exercise of
each option; (iv) the period within which each option may be exercised,
including any vesting requirements and (v) the terms and conditions of each
stock option agreement to be entered into between the Company and the optionee.
The Committee shall have full and complete authority to promulgate such rules
and regulations as it deems necessary or desirable for administering and
interpreting the Option Plan. Any determination, decision, computation or
interpretation of the Option Plan by the Committee shall be conclusive as to any
interested person.
 
     Eligibility.  The Option Plan provides that options may be granted to key
employees and directors, including Outside Directors. Incentive stock options
may be granted only to employees.
 
                                       15
<PAGE>   18
 
     Outside Directors' Options.  The Option Plan provides that, with respect to
Outside Directors, nonstatutory options shall be automatically granted to
Outside Directors on a yearly basis in order to provide an incentive to Outside
Directors of the Company (the "Automatic Grant Program"). Each Outside Director
will receive (i) upon becoming a director, an option to purchase 10,000 shares
of Common Stock and (ii) upon the date of each anniversary of becoming a
director of the Company, an option to purchase 5,000 shares of Common Stock.
Options granted to Outside Directors have a term of ten years from the date of
grant and are exercisable only during the time the optionee remains a director
or within one year thereafter (but not beyond expiration of the option term and
only to the extent vested at the date of termination).
 
     Terms and Conditions of Options.  Each option is evidenced by a stock
option agreement between the optionee and the Company and is subject to the
following terms and conditions and to such other terms and conditions not
inconsistent therewith as the Committee may deem appropriate in each case:
 
          (a) Option Price.  The price to be paid for shares of Common Stock
     upon the exercise of an option granted under the Option Plan is determined
     by the Committee at the time the option is granted but shall in no event be
     less than the closing price on the Nasdaq National Market for the date the
     option is granted (or if there was no trade on such date, then the closing
     price on the most recent date on which trading in the Common Stock
     occurred).
 
          (b) Period of Option.  The period within which an option may be
     exercised is determined by the Committee at the time the option is granted
     but must not exceed ten years from the date the option is granted. Options
     granted to Outside Directors pursuant to the Automatic Grant Program expire
     ten years from the date of grant. No option may be exercised by any person
     after such expiration.
 
          (c) Payment for Stock.  Payment for each share of Common Stock
     purchased under an option may be made (i) in cash; (ii) in shares of Common
     Stock owned by the optionee (other than Common Stock acquired by the
     optionee within six months preceding the payment date pursuant to any
     Company stock option, stock purchase or other stock incentive plan) or
     (iii) a combination of such Common Stock and cash, unless the Committee
     requires that payment be made in cash.
 
          (d) Stock Appreciation Rights.  The Committee, in its discretion, may
     provide that any option by its terms may permit the participant, upon
     exercise of an option, to elect, in lieu of payment for stock, to receive
     payment from the Company in (i) cash equal to the excess of the value of
     one share over the option price times the number of shares as to which the
     option is exercised; (ii) the number of full shares having an aggregate
     value equal to the cash amount calculated under alternative (i) or (iii)
     any combination of cash and Common Stock having an aggregate value equal to
     the cash amount calculated under alternative (i).
 
          (e) Nontransferability of Options.  An option is nontransferable by
     the optionee other than by will or the laws of descent and distribution,
     and is exercisable during the optionee's lifetime only by the optionee.
 
          (f) Value Limitation.  The aggregate fair market value (determined as
     of the time the option is granted) of all shares of Common Stock with
     respect to which incentive stock options are exercisable for the first time
     by an optionee during any calendar year shall not exceed $100,000.
 
          (g) Effective Date of Grant.  The date of grant of options under the
     Plan shall be deemed to be the date of the action by the Committee,
     notwithstanding that issuance of the option may be conditioned on the
     execution of a stock option agreement.
 
     Performance-Based Compensation Limitation.  No employee may be granted, in
any fiscal year, options to purchase more than 250,000 shares. The foregoing
limitation, which will be adjusted proportionately in connection with any change
in the Company's capitalization (such as a stock split), is intended to satisfy
the requirements applicable to options intended to qualify as "performance-based
compensation" within the meaning of Section 162(m) of the Code. In the event
that the Board or its committee determines that such limitations are not
required to qualify options as performance-based compensation, the Board or its
committee may modify or eliminate such limitations.
 
                                       16
<PAGE>   19
 
     Adjustment Upon Changes in Capitalization.  In the event of changes in the
outstanding Common Stock of the Company by reason of stock dividends, mergers,
split-ups, consolidations, recapitalizations, reorganizations or like events (as
determined by the Committee), an appropriate adjustment will be made by the
Committee in the number of shares of Common Stock reserved under the Option Plan
and in the number of shares of Common Stock and the option price per share
specified in any stock option agreement with respect to any unpurchased shares.
The determination of the Committee as to which adjustments shall be made shall
be conclusive.
 
     Amendment and Termination of the Option Plan.  The Board may amend the
Option Plan at any time, except that without the approval by vote of the holders
of a majority of the Company's common shares represented and entitled to vote at
a duly held meeting (i) the number of shares of Common Stock that may be made
available under the Option Plan may not be increased and (ii) the class of
persons eligible to be granted options under the Option Plan may not be changed.
 
     The Option Plan will expire in December 2000 and no options will be granted
thereafter. The Board may terminate the Option Plan at any time, and no options
will be granted thereafter. Expiration or termination of the Option Plan will
not affect the validity of any options then outstanding.
 
     The material terms of each of the Plans are substantially the same as the
terms of the Option Plan described above.
 
     The Plans may be administered by the Board of Directors or by a committee
of the Board, and are currently being administered by the Compensation
Committee. Key employees of the Company so designated by the Committee are
eligible to be granted options under the Plans. An option may be granted to a
director only by action of the Board with a majority of the Board and a majority
of the directors acting in the matter being disinterested persons within the
meaning of Rule 16b-3 under the Exchange Act. Under the 1981 Amended Stock
Option Plan and 1982 Employee Stock Option Plan, a non-employee director may not
receive an option. The exercise price for all options must be at least equal to
the fair market value of the shares on the date of grant. The Plans also
authorize stock appreciation rights in connection with the exercise of an
option, but none have been granted.
 
                                       17
<PAGE>   20
 
PARTICIPATION IN THE OPTION PLAN
 
     As of the date of this proxy statement, there has been no determination by
the Administrator of the Option Plan with respect to future awards under the
Option Plan. Accordingly, future awards are not determinable. The following
table sets forth information with respect to options granted under the Option
Plan during the fiscal year ended September 30, 1995 to (i) the Company's Chief
Executive Officer and the four other Named Executive Officers; (ii) all current
executive officers as a group; (iii) all current directors who are not executive
officers as a group and (iv) all employees who are not executive officers, as a
group. The term of all options outstanding under the Option Plan is six to ten
years from the date of grant:
 
<TABLE>
<CAPTION>
                                                                     WEIGHTED        MARKET
                                                                     AVERAGE        PRICE OF
                                               SHARES SUBJECT     EXERCISE PRICE   UNDERLYING   DOLLAR VALUE
             NAME AND POSITION               TO OPTIONS GRANTED     PER SHARE      SHARES(1)    OF OPTIONS(1)
- -------------------------------------------  ------------------   --------------   ----------   -------------
<S>                                          <C>                  <C>              <C>          <C>
Papken S. Der Torossian....................        150,000           $ 26.875        $26.00       $(131,250)
  Chairman of the Board and
  Chief Executive Officer
Robert J. Richardson.......................         48,840             24.621         26.00          67,335
  Vice President, Silicon Valley Group,
  Inc. and President, Track Systems
  Division
Edward A. Dohring..........................         30,000             24.458         26.00          46,250
  Vice President, Silicon Valley Group,
  Inc. and President, SVG Lithography
  Systems, Inc.
Russell G. Weinstock.......................         30,000             24.458         26.00          46,250
  Vice President of Finance and
  Chief Financial Officer
Steven L. Jensen...........................         20,000             26.875         26.00         (17,500)
  Vice President, Worldwide Sales and
  Service
All current executive officers as a group
  (9 persons)..............................        378,840             25.482         26.00         196,085
All current nonexecutive officer directors
  as a group (4 persons)...................         30,000             27.875         26.00         (56,250)
All current nonexecutive officer employees
  as a group (355 persons).................        327,751             27.479         26.00        (484,778)
</TABLE>
 
- ---------------
(1) Determined on the basis of the market price of the Company's Common Stock as
    reported by the Nasdaq National Market as of the close of trading on
    December 1, 1995.
 
PROFIT SHARING PLAN
 
     The Company maintains a profit sharing plan under which a cash bonus is
paid quarterly to eligible employees equal to a percentage of their base salary.
All domestic employees working at least 30 hours per week with three months
continuous service, with the exception of employees participating in the sales
commission program, are eligible to participate in the plan. Profit sharing
payments totaling $3,557,000 were made during fiscal 1995.
 
CASH OR DEFERRED PROFIT SHARING PLAN (401(K) PLAN)
 
     The Company's Cash or Deferred Profit Sharing Plan is intended to be a
qualified retirement plan under Section 401(k) of the Code. Under this plan, a
participating employee may contribute up to 17% of such employee's compensation,
but not exceeding the amount allowed for employee deferrals under applicable tax
laws ($9,240 in calendar 1995), and the Company may contribute an additional
amount for the employee's account. All domestic employees of the Company are
eligible to participate in the plan. The Company's contributions on behalf of
employees who have been employed with the Company for at least five years are
fully vested. If an employee has been employed less than five years, 20% of the
Company contribution times the number of years of service to the Company vests
immediately and the balance vests in equal annual increments until the fifth
anniversary of employment (based on continued service to the Company). If a
 
                                       18
<PAGE>   21
 
participant's employment is terminated prior to one year of service, the entire
Company contribution is forfeited.
 
LIFE INSURANCE PLAN
 
     The company pays the premiums on a group term life insurance policy for all
regular full-time employees who have worked for the Company for 90 days. The
amount of coverage under this plan is equal to one times annual salary. The
first $50,000 of coverage for executive officers is provided in the same manner
as for other employees of the Company. Additional coverage for officers up to
approximately three times annual salary is provided through individual split
dollar policies on which the Company pays the premiums. A substantial portion of
the cost of the premiums paid each year are offset by increases in the cash
value of the policy. In the event that the policy is not surrendered for cash
value, but rather death benefits are paid, the Company also recovers an amount
sufficient to offset the amount of premiums previously paid under the policy.
 
STOCK PURCHASE PLAN
 
     See "Proposal Three: Approval of Adoption of 1996 Employee Stock Purchase
Plan" for a description of the Old Purchase Plan and the 1996 Purchase Plan.
 
                    STOCKHOLDER PROPOSALS TO BE PRESENTED AT
                            THE NEXT ANNUAL MEETING
 
     Proposals of stockholders intended to be presented at the next Annual
Meeting of Stockholders of the Company (i) must be received by the Company at
101 Metro Drive, San Jose, California 95110 no later than September 19, 1996 and
(ii) must satisfy the conditions established by the Securities and Exchange
Commission for stockholder proposals to be included in the Company's Proxy
Statement for that meeting.
 
                              INDEPENDENT AUDITORS
 
     The Board has selected Deloitte & Touche LLP, independent auditors, to
audit the financial statements of the Company for the fiscal year ending
September 30, 1996. Representatives of Deloitte & Touche LLP are expected to be
present at the Annual Meeting and will have the opportunity to make a statement
if they desire to do so. Such representatives are also expected to be available
to respond to any questions.
 
                                 OTHER BUSINESS
 
     At this time management knows of no other matters that may be brought
before the meeting. However, if any other matters are properly brought before
the meeting, the proxy holders named in the accompanying proxy intend to vote
the proxies on such matters in accordance with their best judgment.
 
                                          By Order of the Board of Directors
 
January 17, 1996
 
                                       19
<PAGE>   22
 
                                     [LOGO]
 
(LOGO)printed on recycled paper
<PAGE>   23
                                                                     APPENDIX A 


                           SILICON VALLEY GROUP, INC.
 
                       1996 EMPLOYEE STOCK PURCHASE PLAN
 
     1.  Purpose.  The purpose of the Plan is to provide employees of the
Company and its Designated Subsidiaries with an opportunity to purchase Common
Stock of the Company through accumulated payroll deductions. It is the intention
of the Company to have the Plan qualify as an "Employee Stock Purchase Plan"
under Section 423 of the Code. The provisions of the Plan, accordingly, shall be
construed so as to extend and limit participation in a manner consistent with
the requirements of that section of the Code.
 
     2.  Definitions.
 
          (a) "Board" shall mean the Board of Directors of the Company.
 
          (b) "Code" shall mean the Internal Revenue Code of 1986, as amended.
 
          (c) "Common Stock" shall mean the Common Stock of the Company.
 
          (d) "Company" shall mean Silicon Valley Group, Inc. and any Designated
     Subsidiary.
 
          (e) "Compensation" shall mean all cash compensation, including, but
     not limited to, salaries, incentive bonuses and commissions.
 
          (f) "Designated Subsidiaries" shall mean the Subsidiaries which have
     been designated by the Board from time to time in its sole discretion as
     eligible to participate in the Plan.
 
          (g) "Employee" shall mean any individual who is an Employee of the
     Company for tax purposes whose customary employment with the Company is at
     least twenty (20) hours per week and more than five (5) months in any
     calendar year. For purposes of the Plan, the employment relationship shall
     be treated as continuing intact while the individual is on sick leave or
     other leave of absence approved by the Company. Where the period of leave
     exceeds ninety (90) days and the individual's right to reemployment is not
     guaranteed either by statute or by contract, the employment relationship
     shall be deemed to have terminated on the 91st day of such leave.
 
          (h) "Enrollment Date" shall mean the first day of each Offering
     Period.
 
          (i) "Exercise Date" shall mean the last day of each Offering Period.
 
          (j) "Fair Market Value" shall mean, as of any date, the value of
     Common Stock determined as follows:
 
             (1) If the Common Stock is listed on any established stock exchange
        or a national market system, including without limitation the Nasdaq
        National Market or The Nasdaq SmallCap Market of The Nasdaq Stock
        Market, its Fair Market Value shall be the closing sales price for such
        stock (or the closing bid, if no sales were reported) as quoted on such
        exchange or system on the date of determination, as reported in The Wall
        Street Journal or such other source as the Administrator deems reliable,
        or;
 
             (2) If the Common Stock is regularly quoted by a recognized
        securities dealer but selling prices are not reported, its Fair Market
        Value shall be the mean of the closing bid and asked prices for the
        Common Stock on the date of determination, as reported in The Wall
        Street Journal or such other source as the Board deems reliable, or;
 
             (3) In the absence of an established market for the Common Stock,
        the Fair Market Value thereof shall be determined in good faith by the
        Board.
 
          (k) "Offering Period" shall mean a period of approximately twelve (12)
     months, commencing on the first Trading Day on or after April 1 and
     terminating on the last Trading Day in the period ending the following
     September 30, or commencing on the first Trading Day on or after October 1
     and terminating on the last Trading Day in the period ending the following
     March 31, during which an option granted
<PAGE>   24
 
     pursuant to the Plan may be exercised. The duration of Offering Periods may
     be changed pursuant to Section 4 of this Plan.
 
          (l) "Plan" shall mean this Employee Stock Purchase Plan.
 
          (m) "Purchase Price" shall mean an amount equal to eighty-five percent
     (85%) of the Fair Market Value of a share of Common Stock on the Enrollment
     Date or on the Exercise Date, whichever is lower.
 
          (n) "Reserves" shall mean the number of shares of Common Stock covered
     by each option under the Plan which have not yet been exercised and the
     number of shares of Common Stock which have been authorized for issuance
     under the Plan but not yet placed under option.
 
          (o) "Subsidiary" shall mean a corporation, domestic or foreign, of
     which not less than fifty percent (50%) of the voting shares are held by
     the Company or a Subsidiary, whether or not such corporation now exists or
     is hereafter organized or acquired by the Company or a Subsidiary.
 
          (p) "Trading Day" shall mean a day on which national stock exchanges
     and the Nasdaq System are open for trading.
 
     3.  Eligibility.
 
          (a) Any Employee (as defined in Section 2(g)), who has been employed
     by the Company for at least thirty (30) days on a given Enrollment Date
     shall be eligible to participate in the Plan.
 
          (b) Any provisions of the Plan to the contrary notwithstanding, no
     Employee shall be granted an option under the Plan (i) to the extent that,
     immediately after the grant, such Employee (or any other person whose stock
     would be attributed to such Employee pursuant to Section 424(d) of the
     Code) would own capital stock of the Company and/or hold outstanding
     options to purchase such stock possessing five percent (5%) or more of the
     total combined voting power or value of all classes of the capital stock of
     the Company or of any Subsidiary, or (ii) to the extent that his or her
     rights to purchase stock under all employee stock purchase plans of the
     Company and its subsidiaries accrues at a rate which exceeds Twenty-Five
     Thousand Dollars ($25,000) worth of stock (determined at the fair market
     value of the shares at the time such option is granted) for each calendar
     year in which such option is outstanding at any time.
 
     4.  Offering Periods.  The Plan shall be implemented by consecutive
Offering Periods with a new Offering Period commencing on the first Trading Day
on or after April 1 and October 1 each year, or on such other date as the Board
shall determine, and continuing thereafter until terminated in accordance with
Section 19 hereof. The Board shall have the power to change the duration of
Offering Periods (including the commencement dates thereof) with respect to
future offerings without stockholder approval if such change is announced at
least five (5) days prior to the scheduled beginning of the first Offering
Period to be affected thereafter.
 
     5.  Participation.
 
          (a) An eligible Employee may become a participant in the Plan by
     completing a subscription agreement authorizing payroll deductions in the
     form of Exhibit A to this Plan and filing it with the Company prior to the
     applicable Enrollment Date.
 
          (b) Payroll deductions for a participant shall commence on the first
     payroll following the Enrollment Date and shall end on the last payroll in
     the Offering Period to which such authorization is applicable, unless
     sooner terminated by the participant as provided in Section 10 hereof.
 
     6.  Payroll Deductions.
 
          (a) At the time a participant files his or her subscription agreement,
     he or she shall elect to have payroll deductions made on each pay day
     during the Offering Period in an amount not exceeding ten percent (10%) of
     the Compensation which he or she receives on each pay day during the
     Offering Period. If a participant is enrolled in multiple offering periods
     under this and/or any of the Company's employee stock purchase plans, his
     or her deductions under such offering periods shall be counted against the
     ten
 
                                       -2-
<PAGE>   25
 
     percent (10%) limit set forth in this Section 6(a) so that no more than ten
     percent (10%) of Compensation in the aggregate shall be deducted under all
     such offering periods.
 
          (b) All payroll deductions made for a participant shall be credited to
     his or her account under the Plan and shall be withheld in whole
     percentages only. A participant may not make any additional payments into
     such account.
 
          (c) A participant may discontinue his or her participation in the Plan
     as provided in Section 10 hereof, or may increase or decrease the rate of
     his or her payroll deductions during the Offering Period by completing or
     filing with the Company a new subscription agreement authorizing a change
     in payroll deduction rate. The Board may, in its discretion, limit the
     number of participation rate changes during any Offering Period. The change
     in rate shall be effective with the first full payroll period following
     five (5) business days after the Company's receipt of the new subscription
     agreement unless the Company elects to process a given change in
     participation more quickly. A participant's subscription agreement shall
     remain in effect for successive Offering Periods unless terminated as
     provided in Section 10 hereof.
 
          (d) Notwithstanding the foregoing, to the extent necessary to comply
     with Section 423(b)(8) of the Code and Section 3(b) hereof, a participant's
     payroll deductions may be decreased to zero percent (0%) at such time
     during any Offering Period which is scheduled to end during the current
     calendar year (the "Current Offering Period") that the aggregate of all
     payroll deductions which were previously used to purchase stock under the
     Plan (or another employee stock purchase plan of the Company) in a prior
     offering period which ended during that calendar year plus all payroll
     deductions accumulated with respect to the current offering period or
     periods equal $21,250. Payroll deductions shall recommence at the rate
     provided in such participant's subscription agreement at the beginning of
     the first Offering Period which is scheduled to end in the following
     calendar year, unless terminated by the participant as provided in Section
     10 hereof.
 
          (e) At the time the option is exercised, in whole or in part, or at
     the time some or all of the Company's Common Stock issued under the Plan is
     disposed of, the participant must make adequate provision for the Company's
     federal, state, or other tax withholding obligations, if any, which arise
     upon the exercise of the option or the disposition of the Common Stock. At
     any time, the Company may, but shall not be obligated to, withhold from the
     participant's compensation the amount necessary for the Company to meet
     applicable withholding obligations, including any withholding required to
     make available to the Company any tax deductions or benefits attributable
     to sale or early disposition of Common Stock by the Employee.
 
     7.  Grant of Option.  On the Enrollment Date of each Offering Period, each
eligible Employee participating in such Offering Period shall be granted an
option to purchase on the Exercise Date of such Offering Period (at the
applicable Purchase Price) up to a number of shares of the Company's Common
Stock determined by dividing such Employee's payroll deductions accumulated
prior to such Exercise Date and retained in the Participant's account as of the
Exercise Date by the applicable Purchase Price; provided that in no event shall
an Employee be permitted to purchase during each Offering Period more than a
number of Shares determined by dividing $25,000 by the Fair Market Value of a
share of the Company's Common Stock on the Enrollment Date, and provided further
that such purchase shall be subject to the limitations set forth in Sections
3(b), 6(a) and 12 hereof. Exercise of the option shall occur as provided in
Section 8 hereof, unless the participant has withdrawn pursuant to Section 10
hereof. The Option shall expire on the last day of the Offering Period.
 
     8.  Exercise of Option.  Unless a participant withdraws from the Plan as
provided in Section 10 hereof, his or her option for the purchase of shares
shall be exercised automatically on the Exercise Date, and the maximum number of
full shares subject to option shall be purchased for such participant at the
applicable Purchase Price with the accumulated payroll deductions in his or her
account. No fractional shares shall be purchased; any payroll deductions
accumulated in a participant's account which are not sufficient to purchase a
full share shall be retained in the participant's account for the subsequent
Offering Period, subject to earlier withdrawal by the participant as provided in
Section 10 hereof. Any other monies left over in a participant's
 
                                       -3-
<PAGE>   26
 
account after the Exercise Date shall be returned to the participant. During a
participant's lifetime, a participant's option to purchase shares hereunder is
exercisable only by him or her.
 
     9.  Delivery.  As promptly as practicable after each Exercise Date on which
a purchase of shares occurs, the Company shall arrange the delivery to each
participant, as appropriate, of a certificate representing the shares purchased
upon exercise of his or her option.
 
     10.  Withdrawal; Termination of Employment.
 
          (a) A participant may withdraw all but not less than all the payroll
     deductions credited to his or her account and not yet used to exercise his
     or her option under the Plan at any time by giving written notice to the
     Company in the form of Exhibit B to this Plan. All of the participant's
     payroll deductions credited to his or her account shall be paid to such
     participant promptly after receipt of notice of withdrawal and such
     participant's option for the Offering Period shall be automatically
     terminated, and no further payroll deductions for the purchase of shares
     shall be made for such Offering Period. If a participant withdraws from an
     Offering Period, payroll deductions shall not resume at the beginning of
     the succeeding Offering Period unless the participant delivers to the
     Company a new subscription agreement.
 
          (b) Upon a participant's ceasing to be an Employee (as defined in
     Section 2(g) hereof) for any reason, he or she shall be deemed to have
     elected to withdraw from the Plan and the payroll deductions credited to
     such participant's account during the Offering Period but not yet used to
     exercise the option shall be returned to such participant or, in the case
     of his or her death, to the person or persons entitled thereto under
     Section 14 hereof, and such participant's option shall be automatically
     terminated. The preceding sentence notwithstanding, a participant who
     receives payment in lieu of notice of termination of employment shall be
     treated as continuing to be an Employee for the participant's customary
     number of hours per week of employment during the period in which the
     participant is subject to such payment in lieu of notice.
 
          (c) A participant's withdrawal from an Offering Period shall not have
     any effect upon his or her eligibility to participate in any similar plan
     which may hereafter be adopted by the Company or in succeeding Offering
     Periods which commence after the termination of the Offering Period from
     which the participant withdraws.
 
     11.  Interest.  No interest shall accrue on the payroll deductions of a
participant in the Plan.
 
     12.  Stock.
 
          (a) The maximum number of shares of the Company's Common Stock which
     shall be made available for sale under the Plan shall be one million
     (1,000,000) shares, subject to adjustment upon changes in capitalization of
     the Company as provided in Section 18 hereof. If, on a given Exercise Date,
     the number of shares with respect to which options are to be exercised
     exceeds the number of shares then available under the Plan, the Company
     shall make a pro rata allocation of the shares remaining available for
     purchase in as uniform a manner as shall be practicable and as it shall
     determine to be equitable.
 
          (b) The participant shall have no interest or voting right in shares
     covered by his option until such option has been exercised.
 
          (c) Shares to be delivered to a participant under the Plan shall be
     registered in the name of the participant or in the name of the participant
     and his or her spouse.
 
     13.  Administration.
 
          (a) Administrative Body.  The Plan shall be administered by the Board
     or a committee of members of the Board appointed by the Board.The Board or
     its committee shall have full and exclusive discretionary authority to
     construe, interpret and apply the terms of the Plan, to determine
     eligibility and to adjudicate all disputed claims filed under the Plan.
     Every finding, decision and determination made by the Board or its
     committee shall, to the full extent permitted by law, be final and binding
     upon all parties.
 
                                       -4-
<PAGE>   27
 
          (b) Rule 16b-3 Limitations.  Notwithstanding the provisions of
     Subsection (a) of this Section 13, in the event that Rule 16b-3 promulgated
     under the Securities Exchange Act of 1934, as amended (the "Exchange Act"),
     or any successor provision ("Rule 16b-3") provides specific requirements
     for the administrators of plans of this type, the Plan shall be
     administered only by such a body and in such a manner as shall comply with
     the applicable requirements of Rule 16b-3. Unless permitted by Rule 16b-3,
     no discretion concerning decisions regarding the Plan shall be afforded to
     any committee or person that is not "disinterested" as that term is used in
     Rule 16b-3.
 
     14.  Designation of Beneficiary.
 
          (a) A participant may file a written designation of a beneficiary who
     is to receive any shares and cash, if any, from the participant's account
     under the Plan in the event of such participant's death subsequent to an
     Exercise Date on which the option is exercised but prior to delivery to
     such participant of such shares and cash. In addition, a participant may
     file a written designation of a beneficiary who is to receive any cash from
     the participant's account under the Plan in the event of such participant's
     death prior to exercise of the option. If a participant is married and the
     designated beneficiary is not the spouse, spousal consent shall be required
     for such designation to be effective.
 
          (b) Such designation of beneficiary may be changed by the participant
     at any time by written notice. In the event of the death of a participant
     and in the absence of a beneficiary validly designated under the Plan who
     is living at the time of such participant's death, the Company shall
     deliver such shares and/or cash to the executor or administrator of the
     estate of the participant, or if no such executor or administrator has been
     appointed (to the knowledge of the Company), the Company, in its
     discretion, may deliver such shares and/or cash to the spouse or to any one
     or more dependents or relatives of the participant, or if no spouse,
     dependent or relative is known to the Company, then to such other person as
     the Company may designate.
 
     15.  Transferability.  Neither payroll deductions credited to a
participant's account nor any rights with regard to the exercise of an option or
to receive shares under the Plan may be assigned, transferred, pledged or
otherwise disposed of in any way (other than by will, the laws of descent and
distribution or as provided in Section 14 hereof) by the participant. Any such
attempt at assignment, transfer, pledge or other disposition shall be without
effect, except that the Company may treat such act as an election to withdraw
funds from an Offering Period in accordance with Section 10 hereof.
 
     16.  Use of Funds.  All payroll deductions received or held by the Company
under the Plan may be used by the Company for any corporate purpose, and the
Company shall not be obligated to segregate such payroll deductions.
 
     17.  Reports.  Individual accounts shall be maintained for each participant
in the Plan. Statements of account shall be given to participating Employees at
least annually, which statements shall set forth the amounts of payroll
deductions, the Purchase Price, the number of shares purchased and the remaining
cash balance, if any.
 
     18.  Adjustments Upon Changes in Capitalization, Liquidation, Dissolution,
          Merger or Asset Sale.
 
          (a) Changes in Capitalization.  Subject to any required action by the
     stockholders of the Company, the Reserves as well as the price per share of
     Common Stock covered by each option under the Plan which has not yet been
     exercised shall be proportionately adjusted for any increase or decrease in
     the number of issued shares of Common Stock resulting from a stock split,
     reverse stock split, stock dividend, combination or reclassification of the
     Common Stock, or any other increase or decrease in the number of shares of
     Common Stock effected without receipt of consideration by the Company;
     provided, however, that conversion of any convertible securities of the
     Company shall not be deemed to have been "effected without receipt of
     consideration." Such adjustment shall be made by the Board, whose
     determination in that respect shall be final, binding and conclusive.
     Except as expressly provided herein, no issuance by the Company of shares
     of stock of any class, or securities convertible into shares of stock of
     any class, shall affect, and no adjustment by reason thereof shall be made
     with respect to, the number or price of shares of Common Stock subject to
     an option.
 
                                       -5-
<PAGE>   28
 
          (b) Dissolution or Liquidation.  In the event of the proposed
     dissolution or liquidation of the Company, the Offering Period shall
     terminate immediately prior to the consummation of such proposed action,
     unless otherwise provided by the Board.
 
          (c) Merger or Asset Sale.  In the event of a proposed sale of all or
     substantially all of the assets of the Company, or the merger of the
     Company with or into another corporation, the Offering Period then in
     progress shall be shortened by setting a new Exercise Date (the "New
     Exercise Date") immediately prior to the consummation of such
     transaction.If the Offering Period then in progress is shortened in the
     event of a merger or sale of assets, the Board shall notify each
     participant in writing, at least five (5) business days prior to the New
     Exercise Date, that the Exercise Date for his option has been changed to
     the New Exercise Date and that his option shall be exercised automatically
     on the New Exercise Date, unless prior to such date he has withdrawn from
     the Offering Period as provided in Section 10 hereof.
 
     19.  Amendment or Termination.
 
          (a) The Board of Directors of the Company may at any time and for any
     reason terminate or amend the Plan. Except as provided in Section 18
     hereof, no such termination can affect options previously granted, provided
     that an Offering Period may be terminated by the Board of Directors on any
     Exercise Date if the Board determines that the termination of the Plan is
     in the best interests of the Company and its stockholders. Except as
     provided in Section 18 hereof, no amendment may make any change in any
     option theretofore granted which adversely affects the rights of any
     participant. To the extent necessary to comply with Rule 16b-3 or under
     Section 423 of the Code (or any successor rule or provision or any other
     applicable law or regulation), the Company shall obtain stockholder
     approval in such a manner and to such a degree as required.
 
          (b) Without stockholder consent and without regard to whether any
     participant rights may be considered to have been "adversely affected," the
     Board (or its committee) shall be entitled to change the Offering Periods,
     limit the frequency and/or number of changes in the amount withheld during
     an Offering Period, establish the exchange ratio applicable to amounts
     withheld in a currency other than U.S. dollars, permit payroll withholding
     in excess of the amount designated by a participant in order to adjust for
     delays or mistakes in the Company's processing of properly completed
     withholding elections, establish reasonable waiting and adjustment periods
     and/or accounting and crediting procedures to ensure that amounts applied
     toward the purchase of Common Stock for each participant properly
     correspond with amounts withheld from the participant's Compensation, and
     establish such other limitations or procedures as the Board (or its
     committee) determines in its sole discretion advisable which are consistent
     with the Plan.
 
     20.  Notices.  All notices or other communications by a participant to the
Company under or in connection with the Plan shall be deemed to have been duly
given when received in the form specified by the Company at the location, or by
the person, designated by the Company for the receipt thereof.
 
     21.  Conditions Upon Issuance of Shares.  Shares shall not be issued with
respect to an option unless the exercise of such option and the issuance and
delivery of such shares pursuant thereto shall comply with all applicable
provisions of law, domestic or foreign, including, without limitation, the
Securities Act of 1933, as amended, the Securities Exchange Act of 1934, as
amended, the rules and regulations promulgated thereunder, and the requirements
of any stock exchange upon which the shares may then be listed, and shall be
further subject to the approval of counsel for the Company with respect to such
compliance.
 
     As a condition to the exercise of an option, the Company may require the
person exercising such option to represent and warrant at the time of any such
exercise that the shares are being purchased only for investment and without any
present intention to sell or distribute such shares if, in the opinion of
counsel for the Company, such a representation is required by any of the
aforementioned applicable provisions of law.
 
     22.  Term of Plan.  The Plan shall become effective upon April 1, 1996,
subject to approval by the stockholders of the Company. It shall continue in
effect for a term of ten (10) years unless sooner terminated under Section 19
hereof.
 
                                       -6-
<PAGE>   29
 
                                   EXHIBIT A
 
                           SILICON VALLEY GROUP, INC.
 
                       1996 EMPLOYEE STOCK PURCHASE PLAN
 
                             SUBSCRIPTION AGREEMENT
 
_________ Original Application            Enrollment Date: _______________
 
_________ Change in Payroll Deduction Rate
 
_________ Change of Beneficiary(ies)
 
1.     ____________________________________________________ hereby elects to
       participate in the Silicon Valley Group, Inc. 1996 Employee Stock
       Purchase Plan (the "Employee Stock Purchase Plan") and subscribes to
       purchase shares of the Company's Common Stock in accordance with this
       Subscription Agreement and the Employee Stock Purchase Plan.
 
2.     I hereby authorize payroll deductions from each paycheck in the amount 
       of _________% of my Compensation on each payday (not to exceed 10%, 
       including  amounts deferred under other employee stock purchase plans 
       of the Company) during the Offering Period in accordance with the 
       Employee Stock Purchase Plan. (Please note that no fractional 
       percentages are permitted.)
 
3.     I understand that said payroll deductions shall be accumulated for the
       purchase of shares of Common Stock at the applicable Purchase Price
       determined in accordance with the Employee Stock Purchase Plan. I
       understand that if I do not withdraw from an Offering Period, any
       accumulated payroll deductions will be used to automatically exercise my
       option.
 
4.     I understand that the Internal Revenue Code limits the amount that may be
       purchased under all employee stock purchase plans of the Company to a
       maximum of $25,000 worth of Company stock, based on the fair market value
       of the stock on the first day of the Offering Period, per calendar year.
 
5.     I have received a copy of the complete Employee Stock Purchase Plan. I
       understand that my participation in the Employee Stock Purchase Plan is
       in all respects subject to the terms of the Plan. I understand that my
       ability to exercise the option under this Subscription Agreement is
       subject to stockholder approval of the Employee Stock Purchase Plan.
 
6.     Shares purchased for me under the Employee Stock Purchase Plan should 
       be issued in the name(s) of (Employee or Employee and Spouse only): 
       ___________________________________________________________.
 
7.     I understand that if I dispose of any shares received by me pursuant to
       the Plan within 2 years after the Enrollment Date (the first day of the
       Offering Period during which I purchased such shares) or one year after
       the Exercise Date, I will be treated for federal income tax purposes as
       having received ordinary income at the time of such disposition in an
       amount equal to the excess of the fair market value of the shares at the
       time such shares were purchased by me over the price which I paid for the
       shares. I hereby agree to notify the Company in writing within 30 days
       after the date of any disposition of my shares and I will make adequate
       provision for Federal, state or other tax withholding obligations, if
       any, which arise upon the disposition of the Common Stock. The Company
       may, but will not be obligated to, withhold from my compensation the
       amount necessary to meet any applicable withholding obligation including
       any withholding necessary to make available to the Company any tax
       deductions or benefits attributable to sale or early disposition of
       Common Stock by me. If I dispose of such shares at any time after the
       expiration of the 2-year and 1-year holding periods, I understand that I
       will be treated for federal income tax purposes as having received income
       only at the time of such disposition, and that such income will be taxed
       as ordinary income only to the extent of an amount equal to the lesser of
       (1) the excess of the fair market value of the shares at the time of such
       disposition over the purchase price which I paid for the shares, or (2)
       15% of the fair market value of the shares on the first day of the
<PAGE>   30
 
       Offering Period. The remainder of the gain, if any, recognized on such
       disposition will be taxed as capital gain.
 
8.     I hereby agree to be bound by the terms of the Employee Stock Purchase
       Plan. The effectiveness of this Subscription Agreement is dependent upon
       my eligibility to participate in the Employee Stock Purchase Plan.
 
9.     In the event of my death, I hereby designate the following as my
       beneficiary(ies) to receive all payments and shares due me under the
       Employee Stock Purchase Plan:
 
NAME: (Please print) _________________________________________________________
                           (First)        (Middle)        (Last)
 
<TABLE>
<S>                                  <C>

- -------------------------------      --------------------------------------------------------
Relationship
                                     --------------------------------------------------------
                                     (Address)
Employee's Social
Security Number:
                                     --------------------------------------------------------

Employee's Address:
                                     --------------------------------------------------------

                                     --------------------------------------------------------

                                     --------------------------------------------------------
</TABLE>
 
I UNDERSTAND THAT THIS SUBSCRIPTION AGREEMENT SHALL REMAIN IN EFFECT THROUGHOUT
SUCCESSIVE OFFERING PERIODS UNLESS TERMINATED BY ME.
 
<TABLE>
<S>                                  <C>
Dated:
      ------------------------       --------------------------------------------------------
                                     Signature of Employee


                                     --------------------------------------------------------
                                     Spouse's Signature (If beneficiary other than spouse)
</TABLE>
 
                                       -2-
<PAGE>   31
 
                                   EXHIBIT B
 
                           SILICON VALLEY GROUP, INC.
 
                       1996 EMPLOYEE STOCK PURCHASE PLAN
 
                              NOTICE OF WITHDRAWAL
 
     The undersigned participant in the Offering Period of the Silicon Valley
Group, Inc. 1996 Employee Stock Purchase Plan which began on _______________
19___  (the "Enrollment Date") hereby notifies the Company that he or she 
hereby withdraws from the Offering Period. He or she hereby directs the Company 
to pay to the undersigned as promptly as practicable all the payroll deductions
credited to his or her account with respect to such Offering Period. The
undersigned understands and agrees that his or her option for such Offering
Period will be automatically terminated. The undersigned understands further
that no further payroll deductions will be made for the purchase of shares in
the current Offering Period and the undersigned shall be eligible to participate
in succeeding Offering Periods only by delivering to the Company a new
Subscription Agreement.
 
                                            Name and Address of Participant:
 
                                            ------------------------------------
 
                                            ------------------------------------
 
                                            ------------------------------------
 

                                            Signature:
 
                                            ------------------------------------
 

                                            Date: 
                                                 -------------------------------
<PAGE>   32

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS

                            SILICON VALLEY GROUP, INC.

                  PROXY FOR 1996 ANNUAL MEETING OF STOCKHOLDERS
                                FEBRUARY 22, 1996
P
     The undersigned stockholder of Silicon Valley Group, Inc. (the "Company")
     hereby revokes all previous proxies and appoints Papken S. Der Torossian
R    and Russell G. Weinstock or either of them, with full power of
     substitution, Proxies and Attorneys-in-Fact, on behalf and in the name of
     the undersigned, to vote and otherwise represent all of the shares
O    registered in the name of the undersigned at the 1996 Annual Meeting of
     Stockholders of the Company to be held on February 22, 1996, at 3:00 p.m. 
     at the Company's principal executive offices located at 101 Metro Drive, 
X    San Jose, California, or any adjournment thereof, with the same effect as
     if the undersigned were present and voting such shares, on the following 
     matters and in the following manner:
Y       


- ----------------------------------
COMMENTS/ADDRESS CHANGE:

                                   (Continued and to be signed on reverse side)


                       FOLD AND DETACH HERE
            
<PAGE>   33
- -----------------
    COMMON



1. Election of Directors:

FOR                     WITHHOLD
all nominees            authority to
listed below            vote for all
(except as              nominees
indicated).             listed below.
   
   If you wish to withhold authority to vote for any individual nominee, strike
   a line through that nominee's name in the list below: 
   
       Papken S. Der Torossian, William A. Hightower, William L. Martin, 
       Larry W. Sonsini, Nam P. Suh

2. Proposal to approve an amendment to the Company's Certificate of
   Incorporation authorizing an increase of authorized stock from 40,000,000 to
   100,000,000.

FOR                     AGAINST                 WITHHOLD


3. Proposal to approve the adoption of the Company's 1996 Employee Stock
   Purchase Plan and to reserve 1,000,000 shares for issuance thereunder.

FOR                     AGAINST                 WITHHOLD

In their discretion, the Proxies are entitled to vote upon such other matters 
as may properly come before the meeting or any adjournments thereof.

THE SHARES REPRESENTED BY THIS PROXY WILL BE VOTED IN ACCORDANCE WITH THE 
SPECIFICATIONS MADE. IF NO SPECIFICATION IS MADE, THE SHARES REPRESENTED BY 
THIS PROXY WILL BE VOTED FOR EACH OF THE ABOVE PERSONS AND PROPOSALS, AND FOR 
SUCH OTHER MATTERS AS MAY PROPERLY COME BEFORE THE MEETING AS THE PROXYHOLDERS 
DEEM ADVISABLE.

I plan to attend the meeting:

                      DATED:                          199


                                  (Signature)


                                  (Signature)

(This proxy should be marked, dated, and signed by each stockholder exactly as 
such stockholder's name appears hereon, and returned promptly in the enclosed 
envelope. Persons signing in a fiduciary capacity should so indicate. A 
corporation is requested to sign its name by its President or other authorized 
officer, with the office held designated. If shares are held by joint tenants 
or as community property, both holders should sign.)

TO ENSURE YOUR REPRESENTATION AT THE ANNUAL MEETING, PLEASE MARK, SIGN AND DATE 
THIS PROXY AND RETURN IT AS PROMPTLY AS POSSIBLE.

                              FOLD AND DETACH HERE

                     YOUR VOTE IS IMPORTANT TO THE COMPANY

                      PLEASE SIGN AND RETURN YOUR PROXY BY
                    TEARING OFF THE TOP PORTION OF THE SHEET
             AND RETURNING IT IN THE ENCLOSED POSTAGE-PAID ENVELOPE


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