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                                   EXHIBIT 23


                    CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS


               As independent public accountants, we hereby consent to the
incorporation of our reports included in this Form 10-K, into Electro
Scientific Industries, Inc. and subsidiaries previously filed Form S-8 and
Form S-3 Registration Statements File Nos., 2-91731, 33-2623, 33-2624,
33-34098, 33-37148, 33-46970, 33-58292, 33-70584, 33-63705, 33-65477,
333-16485, 333-16487, 333-29513, 333-35917, 333-35927, 333-46443, 333-88411
and 333-88727,



Portland, Oregon
August 15, 2000














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