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EXHIBIT 21
ELECTRO SCIENTIFIC INDUSTRIES, INC.
AND SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
AS OF JUNE 3, 2000
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<CAPTION>
PERCENTAGE OF
STATE/COUNTRY VOTING SECURITIES
SUBSIDIARIES OF INCORPORATION OWNED(1)
------------ ---------------- --------
<S> <C> <C>
Dynamotion, Inc. New York 100%
ESI Foreign Sales Corporation Guam 100%
ESI GmbH Germany 100%
ESI International (DISC) Oregon 100%
ESI KK Japan 100%
ESI Korea Korea 100%
ESI Ltd England 100%
ESI SARL France 100%
ESI SRL Italy 100%
Microvision, Corp. Minnesota 100%
Palomar Systems, Inc. Oregon 100%
Testec, Inc. Arizona 100%
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(1) Other than qualifying shares, where applicable.
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