GENUS INC
10-K/A, 1996-04-12
SPECIAL INDUSTRY MACHINERY, NEC
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                       SECURITIES AND EXCHANGE COMMISSION
                            WASHINGTON, D. C. 20549
 
                                  FORM 10-K/A
 
/X/  Annual  report pursuant to  Section 13 or 15(d)  of the Securities Exchange
     Act of 1934 for the fiscal year ended December 31, 1995, or
 
/ /   Transition  report  pursuant to  Section 13  or  15(d) of  the  Securities
Exchange Act of 1934
 
COMMISSION FILE NO. 0-17139
                                  GENUS, Inc.
             (Exact name of registrant as specified in its charter)
 
<TABLE>
<S>                                           <C>
                 CALIFORNIA                                    94-2790804
      (State or other jurisdiction of                       (I.R.S. Employer
       incorporation or organization)                    Identification Number)
</TABLE>
 
                              1139 KARLSTAD DRIVE
                              SUNNYVALE, CA 94089
                    (Address of principal executive offices)
       Registrant's telephone number, including area code: (408) 747-7120
 
                            ------------------------
 
          SECURITIES REGISTERED PURSUANT TO SECTION 12(B) OF THE ACT:
 
                                      NONE
 
          SECURITIES REGISTERED PURSUANT TO SECTION 12(G) OF THE ACT:
 
                           COMMON STOCK, NO PAR VALUE
                          COMMON SHARE PURCHASE RIGHTS
                                (TITLE OF CLASS)
 
    Indicate  by check  mark whether  the Registrant  (1) has  filed all reports
required to be filed by  Section 13 or 15(d) of  the Securities Exchange Act  of
1934  during  the preceding  12  months (or  for  such shorter  period  that the
Registrant was required to file such reports), and (2) has been subject to  such
filing requirements for the past 90 days.
                             Yes X             No _
 
    Indicate  by check mark if disclosure  of delinquent filers pursuant to Item
405 of Regulation S-K is not contained herein, and will not be contained, to the
best of Registrant's  knowledge, in definitive  proxy or information  statements
incorporated by reference in Part III of this Form 10-K or any amendment to this
Form 10-K.  / /
 
    The aggregate market value of the voting stock held by non-affiliates of the
Registrant,  based on the  closing sale price  of the Common  Stock on March 28,
1996, in the over-the-counter market as reported by the Nasdaq National  Market,
was  approximately $78,512,616. Shares of Common  Stock held by each officer and
director and by each person who owns 5% or more of the outstanding voting  stock
have  been excluded in  that such persons  may be deemed  to be affiliates. This
determination of affiliate status is not necessarily a conclusive  determination
for other purposes.
 
    As  of  March 28,  1996, Registrant  had 16,249,323  shares of  Common Stock
outstanding.
 
                      DOCUMENTS INCORPORATED BY REFERENCE
 
Parts of the following documents are incorporated by reference in Parts II,  III
and IV of this
Form 10-K Report:
 
(1)  Registrant's 1995 Annual Report to Shareholders -- Items 5, 6, 7, 8 and 14;
    and
 
(2) Proxy  Statement for  Registrant's 1995  Annual Meeting  of Shareholders  --
    Items 10, 11, 12 and 13.
 
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<PAGE>
                                     PART I
 
ITEM 1.  BUSINESS
GENERAL
 
    Genus,  Inc. ("Genus"  or "the  Company") designs,  manufactures and markets
capital equipment and  processes for advanced  semiconductor manufacturing.  The
Company's  products  --  high  energy  MeV  (millions  of  electron  volts)  ion
implantation systems and  chemical vapor deposition  ("CVD") equipment are  used
worldwide  to  produce  integrated  circuits ("ICS")  for  the  data processing,
communications,  medical,  military,  transportation  and  consumer  electronics
industries.  Genus was the first to market  high energy MeV ion implantation and
the chemical vapor deposition of  tungsten silicide, which perform two  critical
steps in the manufacture of semiconductors.
 
    The  Company's global customer base  consists of semiconductor manufacturers
in the United States, Europe and Asia/Pacific including Japan, Korea and Taiwan.
 
PRODUCTS
 
    The primary products manufactured by Genus include two MeV ion  implantation
models  and three CVD models. Each of these products is available with a variety
of options and/or upgrades.
 
    MEV ION IMPLANTATION
 
    Ion implanters accelerate and drive  electrically charged atoms (ions)  into
the surface of a silicon wafer to convert silicon into semiconductor material as
part  of the  process of manufacturing  integrated circuits. The  market for ion
implanters consists of three primary segments: high current, medium current  and
high  energy (MeV).  Currently, high and  medium current ion  implanters make up
approximately 85  percent of  the total  ion implantation  market. However,  the
Company  believes  that  high energy  ion  implantation is  the  fastest growing
segment due to its use in emerging advanced technology applications and low cost
of ownership.
 
    CURRENT MEV ION IMPLANT PRODUCTS.
 
    TANDETRON-TM- 1520.   In November 1995,  Genus introduced the  Tandetron-TM-
1520,  a third-generation  MeV ion implanter  which evolved from  the Genus 1500
system, introduced  in 1988,  and the  Genus 1510  system, introduced  in  1992.
Although  specifically  designed  for high  energy  applications,  the Tandetron
implants with a wide range of energies from 10keV (thousands of electron  volts)
to  3 MeV. This  broad range allows  the system to  effectively meet both medium
current and high energy  application requirements. Key differentiating  features
of  the  Tandetron  are  its  small  footprint,  enhanced  performance  and  low
cost-of-ownership. The  system  also offers  significant  production  throughput
advantages for MeV applications including up to 50% higher throughput for single
implants  and up to 66%  increased throughput for chained  implants. Genus has a
patent application pending on the  Buried Implanted Layer for Lateral  Isolation
("BILLI")  structure. The Company believes that the BILLI technology may offer a
significant  competitive   advantage   for  process   simplification   and   epi
replacement, especially in logic applications.
 
    GENUS 1510.  The Company's G1510 MeV ion implantation system was designed to
meet  low and medium dose requirements in the  40 keV to 3 MeV range. Introduced
in September 1992, the  1510 is Genus' second  generation MeV ion implanter  and
incorporates  the  basic design  and field  experience  of its  predecessor, the
G1500. It  is a  fully automated,  highly reliable  implanter with  strong  beam
purity at specified throughput of up to 180 wafers per hour on 200mm wafers.
 
    Currently,  the Tandetron 1520 and the  Genus 1510 are the only commercially
viable implanters capable of performing the full range of implants required  for
the  BILLI structure,  which Genus  believes is  critical to  the future  of MeV
technology for advanced memory and logic applications.
 
    Ion  implant  customers  include:   Fujitsu,  LG,  Hitachi,  Hyundai,   IBM,
Mitsubishi, Samsung, SGS-Thomson, Sharp and Sony.
 
                                       2
<PAGE>
    THIN FILM (CVD)
 
    To  manufacture an IC,  there are a  series of steps  during which layers of
conductive and non-conductive materials are deposited onto the surface of wafers
made of semiconducting  material. Deposited  thin films include  those used  for
interconnect  layers  (conductors  of  electrical current)  and  those  used for
dielectrics (insulating  or nonconductive  layers).  The interconnect  or  metal
layer  is deposited  on the wafer  surface to provide  the electrical connection
between the various circuit  elements, while the  dielectric layer is  deposited
between  the  interconnect  layers  to  provide  electrical  insulation  between
conductive interconnect layers.
 
    CURRENT THIN FILM PRODUCTS
 
    Genus' CVD products are designed for the deposition of tungsten silicide  on
gate  interconnects to increase  speed. The Company  offers three basic hardware
architectures. The  most recent  hardware  architecture is  the 7000  series,  a
single  wafer, tungsten silicide cluster tool.  The Company's two other hardware
architectures, the  8700  Series and  the  6000 Series,  also  deposit  tungsten
silicide.
 
    GENUS  7000 SYSTEM.  To meet the advanced technology requirements of the 64M
DRAM generation and beyond, in December  1994, the Company introduced the  Genus
7000,  a single wafer, open architecture  cluster tool. The initial processes on
this platform are silane and DCS (dichlorosilane) tungsten silicide. The modular
design of the 7000 provides customers  with the flexibility of multiple  process
configurations   while  offering  standard  mechanical  interfaces,  statistical
process control, diagnostics and industry  standard interfaces for factory  host
computers.  The 7000 uses a small  volume, computer-modeled process chamber with
specialized gas distribution which  yields a high  productivity process and  low
downtime.
 
    GENUS  8700 SERIES.  A batch CVD  tungsten silicide product, the 8700 Series
incorporates six heated chucks in the batch chamber and six gas injection ports,
which enable  individual  wafer  process  adjustment  of  gas  flows  and  chuck
temperature  for superior  wafer-to-wafer repeatability. The  dual cassette load
lock system provides  continuous wafer loading  and unloading capability,  which
results in high system throughput (wafers per hour).
 
    The  cold  wall  reaction  chamber and  robotic  wafer  handling  system are
designed to ensure highly reliable operation with a minimum of foreign  material
generation.  The system's through-the-wall mounted  main frame design is ideally
suited for use in  Class 1 or above  cleanrooms. All models of  the 8700 can  be
configured to process from 100mm (4") to 200mm (8") wafers.
 
    GENUS 6000 SERIES.  Similar in design to the 8700 Series, the 6000 Series is
a third-generation tool incorporating new designs to ensure reliability and ease
of  maintenance. It  was designed  to meet the  factory automation  needs of the
industry. The 6000 Series consists of a closed architecture cluster system which
incorporates the 8700-style six-chuck batch CVD chamber. This system also offers
dual cassette load lock architecture which enables continuous batch  processing.
A    new   robotic   handling   system    allows   mechanical   set-up   through
computer-controlled recipes.  The  overall design  features  component  upgrades
which provide production-worthy processing of 100mm (4") to 200mm (8") wafers.
 
    Genus' thin film customers include: AMD, Fujitsu, LG, Hitachi, Hyundai, IBM,
Samsung, Sanyo, SGS-Thomson and Sharp.
 
MARKETING, SALES AND SERVICE
 
    Genus  sells  and supports  its ion  implantation  and CVD  products through
direct sales and customer support organizations in the U.S., Western Europe  and
Korea  and through six  exclusive sales representatives  and distributors in the
U.S., Japan, Korea,  Taiwan and  Hong Kong. Yarbrough  Southwest provides  sales
distribution  in the southwestern  region of the United  States, and Semifore in
the Northwest.  Innotech Corporation,  a value-added  distributor, offers  sales
distribution  and  field service  in Japan.  Genus  Korea, Ltd.,  established in
January 1996, provides in-country field service and support. Sales in the Korean
and Taiwanese markets are served by the representative organizations of Aju-Exim
and Spirox, respectively. Hong Kong, Singapore and the Peoples Republic of China
are
 
                                       3
<PAGE>
served by  Katech International,  LTD.,  based in  Hong Kong.  The  Asia/Pacific
organizations  provide sales and service, as well as distribution assistance for
spare parts.  Genus  distributes  spare  parts  from  several  worldwide  depots
including:  Sunnyvale, California;  Tokyo, Japan;  Seoul, Korea;  Hsin-Chu City,
Taiwan; and Evry, France. To facilitate its marketing efforts, the Company has a
clean room applications laboratory in Sunnyvale, California.
 
    Genus'  products  are  sold  primarily   to  domestic  and  foreign   device
manufacturers,  including  both  foundries  (companies  producing semiconductors
principally for  other  semiconductor  manufacturers)  and  companies  producing
semiconductors mainly for outside sales. Genus has sold, installed and supported
equipment to almost every major semiconductor manufacturer in the world.
 
    The  Company maintains sales, technical support and service personnel at its
principal  executive   offices  located   in  Sunnyvale,   California,  and   in
Newburyport,   Massachusetts.  Genus   has  also   established  several  foreign
subsidiaries to facilitate its sales and service activities abroad: Genus Korea,
Ltd. in Seoul Korea; Genus KK in Tokyo Japan; Genus Europa SARL in Evry, France;
Genus Europa Ltd. in Melbourn, Herts,  England; Genus Europa GmbH in  Stuttgart,
Germany;  and  Genus Europa  Srl. in  Milan,  Italy. These  subsidiaries provide
installation, field service,  and maintenance, as  well as additional  technical
support  to  assist  Genus'  customers in  effectively  utilizing  the Company's
products. Such  services are  also  provided by  the Company's  distributors  in
Tokyo,  Seoul, Taipei and  Hong Kong. The Company  warrants its products against
defects in material and workmanship for twelve months.
 
    In 1995, one customer  accounted for 63% of  the Company's net sales.  Three
customers  accounted for 33%, 19%  and 14% of net sales  in 1994. In 1993, three
customers accounted for 26%, 23% and 14% of  net sales. See Note 14 of Notes  to
Consolidated  Financial Statements. Although export sales are subject to certain
control  restrictions,  including   approval  by  the   Office  of  Export   and
Administration of the U.S. Department of Commerce, Genus has not experienced any
significant difficulties related to such limitations.
 
    BACKLOG.   The  Company's backlog  at December  31, 1995,  was approximately
$45.0 million, compared with approximately  $44.0 million at December 31,  1994.
Genus  includes in its backlog  only those orders for  which a customer purchase
order has  been received  and a  delivery  date within  twelve months  has  been
specified.  The  Company's backlog  at December  31,  1995 consisted  of product
shipments expected to be delivered  during calendar year 1996. However,  because
of the possibility of customer changes in delivery schedules or cancellations of
orders,   the  Company's  backlog   as  of  any  particular   date  may  not  be
representative of actual sales for any succeeding period.
 
RESEARCH AND DEVELOPMENT
 
    Constant technological  change,  fierce  competition  and  a  high  rate  of
technical  obsolescence are  key characteristics of  the semiconductor equipment
industry. Genus' future  prospects depend in  part on the  Company's ability  to
broaden  its market acceptance  by differentiating its products  on the basis of
production-worthiness, technical capability, productivity, particle control, and
customer support. To maintain close relationships with its customers and  remain
responsive  to their requirements,  continued investment is  needed for research
and development. In 1993, 1994 and 1995, the Company's research and  development
expenditures  were approximately $7.8  million, $9.0 million  and $12.3 million,
respectively.
 
    As part of its research and development program, the Company has established
technical research relationships with certain major semiconductor  manufacturers
to further enhance its products for advanced ULSI devices.
 
COMPETITION
 
    The   Company  believes  that  the  principal  competitive  factors  in  the
semiconductor equipment market are product performance, quality and reliability,
wafer  throughput,   customer   support,   equipment   automation,   price   and
relationships.
 
                                       4
<PAGE>
    Genus  competes with a number of companies which historically have had wider
name  recognition,   broader  product   acceptance  within   the  industry   and
substantially  greater resources. In  addition, the rapid  rate of technological
change in the industry creates opportunities for firms to enter this market  and
apply  new technologies to meet its  needs. Accordingly, the Company anticipates
that it will  face competition in  the domestic as  well as foreign  marketplace
from both well-established and new competitors.
 
    In  the  ion implantation  marketplace, the  Company's MeV  ion implantation
system competes with one  other MeV system. The  Company believes that its  high
energy  MeV  system  currently  has certain  technological  advantages  over the
competing MeV  system.  Genus has  new  applications for  MeV  ion  implantation
technology  which it believes will  see widespread use in  the future since they
enable significant manufacturing cost reduction and improved integrated  circuit
performance.  The Company faces  direct competition from  Eaton Corporation. The
presence of Eaton in the MeV market place has continued to increase during 1995.
There can  be no  assurance that  competition in  the Company's  particular  MeV
product market will not intensify or that Genus' technical advantages may not be
reduced or lost as a result of technical advances made by competitors or changes
in semiconductor processing technology.
 
    In  the CVD market, Genus  competes with other producers  of CVD systems, as
well as alternative methods  of deposition, such as  sputtering, and thin  films
other  than tungsten silicide. The Company  faces direct competition in tungsten
silicide from Applied  Materials, Inc. and  Tokyo Electron, Ltd.  The impact  of
their  presence in the CVD tungsten silicide market continued to increase during
1995. There can  be no  assurance that levels  of competition  in the  Company's
particular  CVD  product  market will  not  intensify or  that  Genus' technical
advantages may not be reduced or lost as a result of technical advances made  by
competitors or changes in semiconductor processing technology.
 
MANUFACTURING AND SUPPLIERS
 
    Most  of the components for the  Company's CVD tungsten silicide systems are
produced in subassemblies  by independent  domestic suppliers  according to  the
Company's   design  and  procurement  specifications.  Many  components  of  the
Company's MeV ion implantation systems  are also acquired as subassemblies  from
outside  domestic  vendors.  The  Company  anticipates  that  the  use  of  such
subassemblies  will  continue  to  increase  in  order  to  achieve   additional
manufacturing  efficiencies. The Company has alternate sources of supply for the
components and  parts  purchased  from outside  suppliers,  except  for  certain
components  used in its CVD tungsten and MeV ion implantation products which are
presently available only from single sources. To date, the Company has been able
to obtain adequate supplies of such components in a timely manner from  existing
sources.  However,  the  inability to  develop  alternate sources  or  to obtain
sufficient source components as required in  the future, could result in  delays
of product shipments which could have a material adverse affect on the Company's
operating results.
 
    The  Company's thin film CVD operation  is located in Sunnyvale, California,
while its MeV ion implantation technology manufacturing operation is located  in
Newburyport, Massachusetts.
 
INTELLECTUAL PROPERTY
 
    The  Company believes that because of  the rapid technological change in the
industry its  future prospects  will  depend primarily  upon the  expertise  and
creative skills of its personnel in process technology, new product development,
marketing,  application  engineering, and  product  engineering, rather  than on
patent protection. Nevertheless,  the Company  has a policy  to actively  pursue
domestic  and foreign  patent protection  to cover  technology developed  by the
Company. The Company's current patents include technology relating to cold  wall
CVD  of tungsten silicide, ion beam formation, high energy ion acceleration, ion
implant angle control, wafer cleaning, and wafer heating and handling in vacuum.
 
                                       5
<PAGE>
    In 1987, the Company's Ion Technology Division (formerly General Ionex)  and
Eaton  Corporation entered into  a licensing agreement  whereby the Company uses
certain ion implantation related technology.
 
EMPLOYEES
 
    As of December  31, 1995,  the Company employed  319 people  on a  full-time
basis.   The  Company  believes  that  its  relations  with  its  employees  are
satisfactory. None  of the  employees  are covered  by a  collective  bargaining
agreement.
 
ENVIRONMENTAL REGULATION
 
    Federal,  state and local regulations  impose various environmental controls
on the discharge of chemicals and  gases used in the manufacturing process.  The
Company   believes  that   its  activities  conform   to  present  environmental
regulations. Increasing  public  attention has,  however,  been focused  on  the
environmental  impact  of semiconductor  operations. While  the Company  has not
experienced any materially adverse effects  on its operations from  governmental
regulations, there can be no assurance that changes in such regulations will not
impose  the need  for additional  capital equipment  or other  requirements. Any
failure by  the  Company  to  adequately restrict  the  discharge  of  hazardous
substances   could  subject  it  to  future   liabilities  or  could  cause  its
manufacturing operations to be suspended.
 
ITEM 2. PROPERTIES
 
    The Company's executive offices and thin film manufacturing and research and
development operations  are  presently located  in  one building  in  Sunnyvale,
California,   totalling  approximately  100,500   square  feet.  The  California
facilities are occupied under a lease  expiring in October 2002, with a  current
annual  rental expense of approximately $650,000. Genus' Ion Technology Division
is located in Newburyport, Massachusetts. This facility, totalling approximately
25,000 square feet,  is occupied by  the Company under  a month-to-month  lease,
with  a current  annual rental expense  of approximately  $175,000. In September
1995, the Company entered into an agreement to lease a new facility for the  Ion
Technology  Division. The Division  expects to move  to the new  facility by May
1996. This  facility,  totalling  approximately  70,000  square  feet,  will  be
occupied  under a lease expiring  in May 2017, with  an annual rental expense of
approximately $805,000. The  Company also  leases sales and  support offices  in
Seoul,  South Korea; Tokyo,  Japan; Melbourn, Herts,  England; Evry, France; and
Rockville Center, New York. The Company owns substantially all of the  machinery
and equipment used in its facilities. See Notes 3 and 8 of Notes to Consolidated
Financial  Statements.  The Company  believes that  its existing  facilities and
capital equipment  are  adequate  to  meet its  current  requirements  and  that
suitable additional or substitute space will be available as needed.
 
ITEM 3.  LEGAL PROCEEDINGS
 
    None.
 
ITEM 4.  SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS
 
    None.
 
                                       6
<PAGE>
                                    PART II
 
ITEM 5.  MARKET FOR THE REGISTRANT'S COMMON EQUITY AND RELATED STOCKHOLDER
MATTERS.
 
    The  principal market in which the Company's  common stock is traded and the
related security holder matters  are set forth under  the caption "Common  Stock
Information"  on page  28 of the  Company's 1995 Annual  Report to Shareholders.
This information is incorporated  herein by this  reference thereto. The  market
value of the Company's common stock on March 28, 1996 was $5.75 per share.
 
ITEM 6.  SELECTED FINANCIAL DATA.
 
    Selected  financial data of the  Company for the years  1991 through 1995 is
included under the caption "Selected Consolidated Financial Data" on page 10  of
the   Company's  1995  Annual  Report   to  Shareholders.  This  information  is
incorporated herein by this reference thereto.
 
ITEM 7.  MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
OF OPERATIONS
 
    The information  required  by  this  Item  is  included  under  the  caption
"Management's  Discussion  and Analysis  of Financial  Condition and  Results of
Operations"  on  pages  11  to  13  of  the  Company's  1995  Annual  Report  to
Shareholders. This information is incorporated herein by this reference thereto.
 
ITEM 8.  FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA
 
    The  Company's consolidated financial statements  and related notes thereto,
together with the Report of  Independent Accountants and the selected  quarterly
financial  data of the Company are presented on  pages 14 to 27 of the Company's
1995 Annual Report to Shareholders.  This information is incorporated herein  by
this reference thereto.
 
ITEM 9.  CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND
FINANCIAL DISCLOSURE
 
    None.
                            ------------------------
 
    With  the exception  of the information  incorporated by  reference from the
Company's 1995 Annual Report  to Shareholders in  Parts II and  IV of this  Form
10-K, the Company's 1995 Annual Report to Shareholders is not to be deemed filed
as a part of this Report.
                            ------------------------
 
                                       7
<PAGE>
                                    PART III
 
    Certain information required by Part III is omitted from this Report in that
the Registrant will file a definitive proxy statement pursuant to Regulation 14A
relating  to the  Registrant's 1996 Annual  Meeting of  Shareholders (the "Proxy
Statement") not later than 120 days after the end of the fiscal year covered  by
this  Report, and certain information included therein is incorporated herein by
reference.
 
ITEM 10.  DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT
 
    The information  regarding  directors  and nominees  for  directors  of  the
Company is incorporated by reference to the Company's Proxy Statement.
 
    The  executive officers of the Company, who  are elected by and serve at the
discretion of the Board of Directors, and  their ages at March 28, 1996, are  as
follows:
 
<TABLE>
<CAPTION>
                NAME                      AGE                                 POSITION
- ------------------------------------      ---      ---------------------------------------------------------------
<S>                                   <C>          <C>
William W. R. Elder.................          57   Chairman and Chief Executive Officer
Kent L. Robertson...................          54   Executive Vice President, Chief Financial Officer and Secretary
James M. Burns......................          49   Executive  Vice  President  and  General  Manager,  Thin  Films
                                                    Division
John E. Aldeborgh...................          39   Vice President and General Manager, Ion Division
William D. Cole.....................          41   Vice President, Sales
Kevin C. Conlon.....................          42   Vice President, Marketing
Thomas E. Seidel....................          60   Vice President, Chief Technical Officer
Ernest P. Quinones..................          36   Corporate Controller, Chief Accounting Officer, and Treasurer
Mario M. Rosati.....................          49   Assistant Secretary
</TABLE>
 
    Except as  set  forth  below,  all  of  the  executive  officers  have  been
associated  with the Company in their present  or other capacities for more than
the past five years. Officers are elected annually by the Board of Directors and
serve at the discretion  of the Board. There  are no family relationships  among
executive officers of the Company.
 
    Mr.  Elder, a founder of the Company,  served as President and as a director
of the Company  from its organization  in November 1981  through April 1990.  In
April  1990, he was named  Chairman of the Board,  President and Chief Executive
Officer. Mr. Elder currently serves as Chairman of the Board and Chief Executive
Officer of the Company.
 
    Mr. Robertson joined the Company in  June 1995 as Executive Vice  President,
Chief  Financial Officer and Secretary of the Company. From January 1994 to June
1995 and  from  February 1987  to  March 1992,  Mr.  Robertson was  Senior  Vice
President,   Chief  Financial  Officer  and   Secretary  of  Pyramid  Technology
Corporation, a manufacturer  of computer  servers. From March  1992 to  December
1993,  he was associated with RasterOps Corporation, a manufacturer of truecolor
photo realistic imaging  systems, as Executive  Vice President, Chief  Financial
Officer  and Secretary. From  September 1980 to  January 1987 he  served as Vice
President, Chief  Financial  Officer and  Secretary  of Telco  Systems  Inc.,  a
manufacturer of telecommunications equipment.
 
    Mr.  Burns joined the  Company in February 1995  as Executive Vice President
and General Manager of  the Company's Thin Films  Division. From August 1992  to
January  1995,  Mr. Burns  was with  Hughes Network  Systems, a  manufacturer of
advance commercial telecommunications, as Assistant Vice President,  Operations.
From December 1991 to July 1992, he was associated with Trimble Navigation, LTD,
a manufacturer of navigational systems, as Director of Customer Satisfaction and
Quality.  From  November 1990  to July  1991,  Mr. Burns  was Vice  President of
Operations with
 
                                       8
<PAGE>
Domestic  Automation  Company,  a  manufacturer  of  computerized  metering  and
communication  products. From  May 1972  to October  1990, he  served in various
positions  at   Hewlett-Packard   Company,  a   computer   and   instrumentation
manufacturer, most recently as Group Manufacturing Manager, Peripherals Group.
 
    Mr.  Aldeborgh joined the Company in June  1989 as Director of Operations of
the Company's  Ion  Technology  Division.  Mr.  Aldeborgh  has  served  as  Vice
President  and General  Manager of  this Division  since January  1993. Prior to
joining the Company, Mr. Aldeborgh was  with LTX Corporation, a manufacturer  of
semiconductor  test equipment, from May 1983  to May 1989, in various management
positions,  most  recently   as  Director  of   Manufacturing  for  its   Linear
Manufacturing Division.
 
    Mr. Cole joined the Company in January 1993 as Vice President of Sales. From
December  1984  to  December 1992,  he  was  associated with  Teradyne,  Inc., a
semiconductor equipment manufacturer, in various sales positions, most  recently
as National Sales Manager.
 
    Mr.  Conlon joined the Company in April 1992 as Vice President of Marketing.
From February  1990 to  April 1992,  Mr. Conlon  held marketing  and  operations
management  positions  at  Novellus  Systems,  Inc.,  a  semiconductor equipment
manufacturer, most recently  as Director  of Manufacturing. From  April 1980  to
February  1990, he  served in  various positions  at Applied  Materials, Inc., a
semiconductor  equipment  manufacturer,  most  recently  as  Product   Marketing
Manager, Implant Division.
 
    Mr.  Seidel joined the Company in January  1996, as Vice President and Chief
Technical Officer. From  July 1988 to  January 1996, Mr.  Seidel was  associated
with SEMATECH, a Semiconductor-Industry Consortium, in various senior management
positions,  most  recently  as  Chief  Technologist  and  Director  of Strategic
Technology. From March  1987 to July  1988, Mr. Seidel  was associated with  the
University  of  California at  Santa Barbara,  as  head of  the Microelectronics
department. From February 1985 to March 1987, Mr. Seidel was employed with  J.C.
Schumacher  Co., a semiconductor equipment manufacturer, most recently as Senior
Vice President of Technology.  From June 1966 to  February 1985, Mr. Seidel  was
associated   with  AT&T  Bell  Laboratories   in  various  technical  management
positions.
 
    Mr. Quinones joined the  Company in June 1989  as the Company's Director  of
Corporate  Finance. From  October 1991 through  February 1995, he  served as the
Company's Corporate  and  Thin  Films  Division  Controller.  Mr.  Quinones  was
appointed Genus' Corporate Controller, Chief Accounting Officer and Treasurer in
March  1995.  Prior to  joining the  Company,  Mr. Quinones  was with  Coopers &
Lybrand L.L.P., a public accounting firm, from July 1982 to May 1989, in various
audit positions, most recently as Audit Manager.
 
    Mr. Rosati has been Assistant Secretary and a director of the Company  since
the  Company's inception in  November 1981 to  June 1995. From  July 1995 to the
present, Mr. Rosati has been the  Company's Assistant Secretary. He is a  member
of Wilson, Sonsini, Goodrich & Rosati, P.C., general counsel to the Company.
 
ITEM 11.  EXECUTIVE COMPENSATION
 
    The  information required by  this Item is incorporated  by reference to the
Company's Proxy Statement.
 
ITEM 12.  SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT
 
    The information required by  this Item is incorporated  by reference to  the
Company's Proxy Statement.
 
ITEM 13.  CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS
 
    The  information required by  this Item is incorporated  by reference to the
Company's Proxy Statement.
 
                                       9
<PAGE>
                                    PART IV
 
ITEM 14.  EXHIBITS, FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K
 
    (a)  The following documents are filed as a part of this Report:
 
    1.  FINANCIAL STATEMENTS.   The following Consolidated Financial  Statements
of  Genus,  Inc.  and  Report of  Independent  Accountants  are  incorporated by
reference to  pages 14  through 27  of the  Registrant's 1995  Annual Report  to
Shareholders:
 
    Consolidated Balance Sheets - December 31, 1995 and 1994
 
    Consolidated Statements of Operations - Years Ended December 31, 1995, 1994
    and 1993
 
    Consolidated Statements of Shareholders' Equity - Years Ended December 31,
    1995, 1994 and 1993
 
    Consolidated Statements of Cash Flows - Years Ended December 31, 1995, 1994
    and 1993
 
    Notes to Consolidated Financial Statements
 
    Report of Independent Accountants
 
    2.    FINANCIAL  STATEMENT  SCHEDULES.   The  following  financial statement
schedules of Genus, Inc. for  the years ended December  31, 1995, 1994 and  1993
are  filed as  part of this  Report and should  be read in  conjunction with the
Consolidated Financial Statements of Genus, Inc.
 
<TABLE>
<CAPTION>
           SCHEDULE                                                      PAGE
           ---------------------------------------------------------     -----
<S>        <C>                                                        <C>
           Report of Independent Accountants........................         S-1
II --      Valuation and Qualifying Accounts........................         S-2
</TABLE>
 
    Schedules not listed above have been omitted because they are not applicable
or are not  required or  the information  required to  be set  forth therein  is
included in the Consolidated Financial Statements or Notes thereto.
 
    3.   EXHIBITS.   The Exhibits listed  on the accompanying  Index to Exhibits
immediately following the financial statement schedules are filed as part of, or
incorporated by reference into, this Report.
 
    4.  REPORTS ON FORM 8-K.  No  reports on Form 8-K were filed by the  Company
during the fiscal quarter ended December 31, 1995.
 
                                       10
<PAGE>
                                   SIGNATURES
 
    Pursuant  to  the requirements  of  Section 13  or  15(d) of  the Securities
Exchange Act of 1934, the Registrant has duly caused this Report to be signed on
its behalf  by  the undersigned,  thereunto  duly  authorized, in  the  City  of
Sunnyvale, State of California, on the 28th day of March, 1996.
 
                                          GENUS, INC.
 
                                          By:       /s/ WILLIAM W. R. ELDER
 
                                             -----------------------------------
                                                     William W. R. Elder
                                                  CHAIRMAN OF THE BOARD AND
                                                   CHIEF EXECUTIVE OFFICER
 
                               POWER OF ATTORNEY
 
    KNOW  ALL MEN  BY THESE PRESENTS,  that each person  whose signature appears
below constitutes  and appoints,  William W.  R. Elder  and Kent  L.  Robertson,
jointly   and  severally,  his   attorneys-in-fact,  each  with   the  power  of
substitution, for him in any and all capacities, to sign any amendments to  this
Report  on Form  10-K, and  to file  the same,  with exhibits  thereto and other
documents in connection therewith, with the Securities and Exchange  Commission,
hereby  ratifying and confirming all that each of said attorneys-in-fact, or his
substitute or substitutes, may do or cause to be done by virtue hereof.
 
    Pursuant to the requirements  of the Securities Exchange  Act of 1934,  this
Report  has  been  signed  below  by the  following  persons  on  behalf  of the
Registrant and in the capacities and on the dates indicated.
 
<TABLE>
<C>                                                     <S>                               <C>
                         NAME                                        TITLE                         DATE
- ------------------------------------------------------  --------------------------------  -----------------------
 
               /s/ WILLIAM W. R. ELDER                  Chairman, Chief Executive
     -------------------------------------------         Officer and Director (Principal      March 28, 1996
                 William W. R. Elder                     Executive Officer)
 
                /s/ KENT L. ROBERTSON                   Executive Vice President, Chief
     -------------------------------------------         Financial Officer, Secretary         March 28, 1996
                  Kent L. Robertson                      (Principal Financial Officer)
 
                                                        Corporate Controller, Chief
                  ERNEST P. QUINONES                     Accounting Officer and
     -------------------------------------------         Treasurer (Principal Accounting      March 28, 1996
                  Ernest P. Quinones                     Officer)
 
                  STEPHEN F. FISHER
     -------------------------------------------        Director                              March 25, 1996
                  Stephen F. Fisher
 
                 G. FREDERICK FORSYTH
     -------------------------------------------        Director                              March 28, 1996
                 G. Frederick Forsyth
 
                    TODD S. MYHRE
     -------------------------------------------        Director                              March 28, 1996
                    Todd S. Myhre
 
                   MARIO M. ROSATI
     -------------------------------------------        Director                              March 28, 1996
                   Mario M. Rosati
</TABLE>
 
                                       11
<PAGE>
                                                                    EXHIBIT 23.1
 
                       CONSENT OF INDEPENDENT ACCOUNTANTS
 
    We  consent to the incorporation by reference in the registration statements
of Genus, Inc. and subsidiaries on Form S-8 (File Nos. 33-28394 and 33-38657) of
our reports dated January 26, 1996, on our audits of the consolidated  financial
statements  and financial statement schedules of Genus, Inc. and subsidiaries as
of December 31, 1995  and 1994, and for  each of the three  years in the  period
ended  December 31, 1995,  which reports are  included in this  Annual Report on
Form 10-K.
 
                                           Coopers & Lybrand L.L.P.
 
San Jose, California
March 27, 1996
 
                                       12
<PAGE>
                                                                      SCHEDULE I
 
                       REPORT OF INDEPENDENT ACCOUNTANTS
 
To The Board of Directors and Shareholders
Genus, Inc.
 
    Our  report  on the  consolidated financial  statements  of Genus,  Inc. and
subsidiaries has been incorporated by reference  in this Form 10-K from page  27
of  the 1995 Annual Report to Shareholders of Genus, Inc. In connection with our
audits of such financial statements, we have also audited the related  financial
statement schedule listed in the index of page 10 of this Form 10-K.
 
    In  our opinion,  the financial statement  schedule referred  to above, when
considered in  relation to  the basic  financial statements  taken as  a  whole,
present  fairly,  in  all  material respects,  the  information  required  to be
included therein.
 
                                           Coopers & Lybrand L.L.P.
 
San Jose, California
January 26, 1996
 
                                      S-1
<PAGE>
                                                                     SCHEDULE II
 
                                  GENUS, INC.
                       VALUATION AND QUALIFYING ACCOUNTS
              FOR THE YEARS ENDED DECEMBER 31, 1995, 1994 AND 1993
                                 (IN THOUSANDS)
 
<TABLE>
<CAPTION>
                                                                    COLUMN B     COLUMN C                 COLUMN E
                                                                   -----------  -----------              -----------
COLUMN A                                                           BALANCE AT   CHARGED TO    COLUMN D     BALANCE
- -----------------------------------------------------------------   BEGINNING    COSTS AND   ----------    AT END
DESCRIPTION                                                         OF PERIOD    EXPENSES    DEDUCTIONS   OF PERIOD
- -----------------------------------------------------------------  -----------  -----------  ----------  -----------
<S>                                                                <C>          <C>          <C>         <C>
1995
Allowance for doubtful accounts..................................   $     250    $      --   $       --   $     250
Inventory reserves...............................................       2,665          995          389       3,271
Product warranty and installation accruals.......................       2,394        3,640        1,716       4,318
1994
Allowance for doubtful accounts..................................         250            0            0         250
Inventory reserves...............................................       3,250          947       (1,533)      2,665
Product warranty and installation accruals.......................       2,042        2,094       (1,742)      2,394
1993
Allowance for doubtful accounts..................................         270          475         (495)        250
Inventory reserves...............................................       4,766        1,419       (2,935)      3,250
Product warranty and installation accruals.......................       1,737        1,381       (1,076)      2,042
</TABLE>
 
                                      S-2
<PAGE>
                                  GENUS, INC.
                           ANNUAL REPORT ON FORM 10-K
                          YEAR ENDED DECEMBER 31, 1995
                               INDEX TO EXHIBITS
 
<TABLE>
<CAPTION>
                                                                                                         SEQUENTIALLY
  EXHIBIT                                                                                                  NUMBERED
    NO.                                             DESCRIPTION                                              PAGE
- -----------  -----------------------------------------------------------------------------------------  ---------------
 
<C>          <S>                                                                                        <C>
       3.1   Restated Articles of Incorporation of Registrant (2).....................................            --
 
       3.2   By-laws of Registrant, as amended (4)....................................................            --
 
       4.1   Common Shares Rights Agreement, dated as of April 27, 1990, between Registrant and Bank
              of America, N.T. and S.A., as Rights Agent (6)..........................................            --
 
      10.3   Lease dated December 6, 1985 for Registrant's facilities at 4 Mulliken Way, Newburyport,
              Massachusetts, and amendment and extension of lease dated March 17, 1987 (1)............            --
 
      10.6   Lease dated June 15, 1988 for Registrant's facilities at 100 Merrick Road, West Building,
              Rockville Center, New York (1)..........................................................            --
 
      10.7   Assignment of Lease dated April 1986 for Registrant's facilities at Unit 11A Melbourn
              Science Park, Melbourn, Hertz, England (1)..............................................            --
 
      10.8   Registrant's 1981 Incentive Stock Option Plan, as amended (3)............................            --
 
     10.10   Registrant's 1989 Employee Stock Purchase Plan, as amended (7)...........................            --
 
     10.11   International Distributor Agreement dated November 23, 1987 between General Ionex
              Corporation and Innotech Corporation (1)................................................            --
 
     10.12   Distributor/Representative Agreement dated August 1, 1984 between Registrant and Aju Exim
              (formerly Spirox Holding Co./You One Co. Ltd.) (1)......................................            --
 
     10.15   Exclusive Sales and Service Representative Agreement dated October 1, 1989 between
              Registrant and AVBA Engineering Ltd (5).................................................            --
 
     10.16   Exclusive Sales and Service Representative Agreement dated as of April 1, 1990 between
              Registrant and Indosale PVT Ltd (5).....................................................            --
 
     10.18   License Agreement dated November 23, 1987 between Registrant and Eaton Corporation (1)...            --
</TABLE>
 
                                      I-1
<PAGE>
 
<TABLE>
<CAPTION>
                                                                                                         SEQUENTIALLY
  EXHIBIT                                                                                                  NUMBERED
    NO.                                             DESCRIPTION                                              PAGE
- -----------  -----------------------------------------------------------------------------------------  ---------------
 
<C>          <S>                                                                                        <C>
     10.21   Exclusive Sales and Service Representative Agreement dated May 1, 1989 between Registrant
              and Spirox Taiwan, Ltd. (4).............................................................            --
 
     10.22   Lease dated April 7, 1992 between Registrant and The John A. and Susan R. Sobrato 1979
              Revocable Trust for property at 1139 Karlstad Drive, Sunnyvale, California (8)..........            --
 
     10.24   Term Loan Agreement dated April 17, 1992 between the Registrant and Silicon Valley Bank
              (8).....................................................................................            --
 
     10.25   Asset Purchase Agreement, dated May 28, 1992, by and between the Registrant and Advantage
              Production Technology, Inc. (9).........................................................            --
 
     10.26   License and Distribution Agreement, dated September 8, 1992, between the Registrant and
              Sumitomo Mutual Industries, Ltd. (10)................................................. .            --
 
     10.28   Mortgage dated February 1, 1993 with Bay Bank Middlesex for Registrant's facilities at
              One Merrimack Landing, Unit 26, Newburyport, Massachusetts (11).........................            --
 
     10.29   Revolving Loan Agreement between the Registrant and Silicon Valley Bank dated May 15,
              1994 (12)...............................................................................            --
 
     10.30   Lease Agreement dated as of October 1995 for Registrant's facilities at Lot 62 Stanley
              Tucker Drive, Newburyport, Massachusetts................................................            --
 
      11.1   Computation of Net Income/Loss Per Share.................................................            --
 
      13.1   Annual Report to Shareholders for the year ended December 31, 1995 (to be deemed filed
              only to the extent required by the instructions to exhibits for reports on Form 10-K)...            --
 
      22.1   Subsidiaries of Registrant (10)..........................................................            --
 
      23.1   Consent of Independent Accountants (included on page 12).................................            --
 
      24.1   Power of Attorney (included on page 11)..................................................            --
 
      27.1   Financial Data Schedule
</TABLE>
 
- ------------------------
(1)  Incorporated   by  reference   to  the  exhibit   filed  with  Registrant's
     Registration Statement on Form S-1 (No. 33-23861) filed August 18, 1988 and
     amended on September 21, 1988, October 5, 1988, November 3, 1988,  November
     10,  1988  and  December  15,  1988,  which  Registration  Statement became
     effective November 10, 1988.
 
(2)  Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1988.
 
(3)  Incorporated by  reference  to  the exhibit  filed  with  the  Registrant's
     Registration Statement on Form S-8 filed January 17, 1991.
 
                                      I-2
<PAGE>
(4)  Incorporated  by  reference  to  the exhibit  filed  with  the Registrant's
     Registration Statement on Form S-1 (No. 33-28755) filed on May 17, 1989 and
     amended May 24, 1989, which Registration Statement became effective May 24,
     1989.
 
(5)  Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1989.
 
(6)  Incorporated by  reference  to  the exhibit  filed  with  the  Registrant's
     Quarterly Report on Form 10-Q for the quarter ended September 30, 1990.
 
(7)  Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1990.
 
(8)  Incorporated  by  reference  to  the exhibit  filed  with  the Registrant's
     Quarterly Report on Form 10-Q for the quarter ended June 30, 1992.
 
(9)  Incorporated by reference to the exhibit filed with the Registrant's Report
     on Form 8-K dated June 12, 1992.
 
(10) Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 21, 1992.
 
(11) Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1993.
 
(12) Incorporated by reference to the exhibit filed with the Registrant's Annual
     Report on Form 10-K for the year ended December 31, 1994.
 
                                      I-3

<PAGE>
                                                                    EXHIBIT 11.1
 
                                  GENUS, INC.
                       COMPUTATION OF EARNINGS PER COMMON
                        AND COMMON EQUIVALENT SHARE (A)
                                 (IN THOUSANDS)
 
<TABLE>
<CAPTION>
                                                                                     YEAR ENDED DECEMBER 31,
                                                                                 -------------------------------
                                                                                   1995       1994       1993
                                                                                 ---------  ---------  ---------
 
<S>                                                                              <C>        <C>        <C>
Average common shares outstanding..............................................     15,334     12,545     12,170
 
Computation of incremental outstanding shares
  Net effect of dilutive stock options based on treasury stock method..........        729        561     --
                                                                                 ---------  ---------  ---------
                                                                                    16,063     13,106     12,170
                                                                                 ---------  ---------  ---------
                                                                                 ---------  ---------  ---------
Net income (loss)..............................................................  $  19,282  $   4,177  $  (6,883)
                                                                                 ---------  ---------  ---------
                                                                                 ---------  ---------  ---------
Earnings (loss) per share (b)..................................................  $    1.20  $    0.32  $   (0.57)
                                                                                 ---------  ---------  ---------
                                                                                 ---------  ---------  ---------
</TABLE>
 
(a) See Note 1 of Notes to Consolidated Financial Statements.
 
(b) Primary and fully diluted earnings per share are materially the same for all
    years presented.


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