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<TABLE> <S> <C>
<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM THE
UNAUDITED CONSOLIDATED FINANCIAL STATEMENTS OF ADE CORPORATION FOR THE SIX
MONTHS ENDED OCTOBER 31, 2000 AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO
SUCH FINANCIAL STATEMENTS.
</LEGEND>
<MULTIPLIER> 1,000
<S> <C>
<PERIOD-TYPE> 6-MOS
<FISCAL-YEAR-END> APR-30-2001
<PERIOD-START> MAY-01-2000
<PERIOD-END> OCT-31-2000
<CASH> 31,994
<SECURITIES> 0
<RECEIVABLES> 22,192
<ALLOWANCES> (744)
<INVENTORY> 35,566
<CURRENT-ASSETS> 96,943
<PP&E> 28,958
<DEPRECIATION> (15,562)
<TOTAL-ASSETS> 141,413
<CURRENT-LIABILITIES> 28,235
<BONDS> 11,647
0
0
<COMMON> 135
<OTHER-SE> 101,396
<TOTAL-LIABILITY-AND-EQUITY> 141,413
<SALES> 45,861
<TOTAL-REVENUES> 45,861
<CGS> 23,090
<TOTAL-COSTS> 23,090
<OTHER-EXPENSES> 23,727
<LOSS-PROVISION> 0
<INTEREST-EXPENSE> (665)
<INCOME-PRETAX> (291)
<INCOME-TAX> 64
<INCOME-CONTINUING> (355)
<DISCONTINUED> 0
<EXTRAORDINARY> 0
<CHANGES> 0
<NET-INCOME> (773)
<EPS-BASIC> (0.06)
<EPS-DILUTED> (0.06)
</TABLE>
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