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EXHIBIT 21.1
ADE CORPORATION
List of Wholly-Owned Subsidiaries
ADE Phase Shift, Inc. ADE Technologies, Inc.
3470 E. Universal Way 77 Rowe Street
Tucson, AZ 85706 Newton, MA 02466
ADE Optical Systems Corporation ADE International Corporation
9625 Southern Pine Boulevard 32 Loockerman Square
Charlotte, NC 28273 Suite L-100
Dover, DE
ADE International GmbH ATI Foreign Sales Corporation
Klausnerring 17 c/o Corporate Services
85551 Kirchheim Price Waterhouse Centre
85551 Heimstetten Collymore Rock, St. Michael
Germany Barbados
ADE Securities Corporation ADE Software Corporation
80 Wilson Way 80 Wilson Way
Westwood, MA 02090 Westwood, MA 02090
List of Partially-Owned Subsidiaries
Japan ADE Ltd.
Tokimec Building
16-1, 2-chome, Minamikamata
Ohta-ku, Tokyo 144
Japan